Equipment control device based on vacuum gauge

Abstract

The invention discloses an equipment control device based on a vacuum gauge, and relates to the technical field of vacuum gauges. According to the method, a vacuum gauge and a control module are included, and the two ends of the control module are connected with the vacuum gauge and controlled equipment respectively; and the control module is used for receiving a pressure signal measured by the vacuum gauge and controlling the working state of the controlled equipment according to the pressure signal and preset trigger pressure. The control function of the vacuum gauge can be increased, the manufacturing cost can be reduced, and the vacuum gauge is matched with old-model equipment.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum gauges, and in particular to an equipment control device based on a vacuum gauge. Background Art

[0002] Vacuum gauges are used for process pressure monitoring of various semiconductor equipment. Vacuum gauges also play a key role in the pressure-triggered automation of modern semiconductor industry and mechanical control systems, which can monitor and provide accurate pressure data in real time to ensure that the system operates within the optimal pressure range.

[0003] Traditional vacuum gauges are mainly used to measure pressure and transmit pressure signals to control systems or display devices, and their functions are relatively simple. With the upgrading of semiconductor equipment technology, the process flow has become more complex and the control requirements have become more stringent, requiring vacuum gauges to not only measure pressure, but also have certain control and processing functions.

[0004] At present, although vacuum gauges with control functions can reduce dependence on external equipment, such vacuum gauges are integrated and have more complex structures, higher initial costs, and relatively complex maintenance. If either the pressure test part or the control part is damaged, they will not work properly. In addition, existing vacuum gauges with control functions are all integrated designs, which are more suitable for new equipment and have poor versatility for old equipment. Summary of the invention

[0005] In view of this, the present application provides an equipment control device based on a vacuum gauge, which not only increases the control function of the vacuum gauge, but also reduces the manufacturing cost and is compatible with old model equipment.

[0006] The present application provides a device control device based on a vacuum gauge, the device comprising: a vacuum gauge and a control module, wherein two ends of the control module are respectively connected to the vacuum gauge and a controlled device; the control module is used to receive a pressure signal measured by the vacuum gauge, and control the working state of the controlled device according to the pressure signal and a preset trigger pressure.

[0007] Optionally, the control module includes a signal processing circuit and a drive control circuit, the input end of the signal processing circuit is connected to the output end of the vacuum gauge, the output end of the signal processing circuit is connected to the input end of the drive control circuit, and the output end of the drive control circuit is connected to the controlled device; the signal processing circuit is used to process the pressure signal measured by the vacuum gauge and transmit the processed pressure signal to the drive control circuit; the drive control circuit is used to control the working state of the controlled device according to the processed pressure signal and a preset trigger pressure.

[0008] Optionally, each of the drive control circuits controls at least one controlled device.

[0009] Optionally, the drive control circuit includes a relay, an input end of the relay is connected to the output end of the signal processing circuit; the relay is used to compare the pressure value corresponding to the processed pressure signal with a preset trigger pressure, and control the contact switch state inside the relay according to the comparison result; based on the contact switch state, the working state of the controlled device is controlled.

[0010] Optionally, the drive control circuit further includes a sliding rheostat, which is connected to the relay and is used to adjust a preset trigger pressure of the relay.

[0011] Optionally, the drive control circuit further includes a function selection chip, and the function selection chip is connected to the relay and is used to select a function of the relay.

[0012] Optionally, the signal processing circuit includes: a transistor, a diode and a capacitor, and the transistor, the diode and the capacitor are used to amplify, shape and filter the pressure signal respectively.

[0013] Optionally, the control module is also connected to a machine platform; the machine platform is used to receive the pressure signal sent by the control module and display it.

[0014] Optionally, the machine is further used to provide a power signal to the control module; the control module is further used to provide a power signal to the vacuum gauge.

[0015] Optionally, the device further comprises: a voltage stabilizing module, the voltage stabilizing module is connected to the signal processing circuit, and the voltage stabilizing chip is used to perform voltage stabilizing processing on the power supply signal provided by the machine.

[0016] By means of the above technical solution, the present application provides a device control device based on a vacuum gauge, which controls the working state of the controlled device based on the pressure signal and the preset trigger pressure by grafting a control module on the vacuum gauge, which can not only expand the control function of the vacuum gauge, but also reduce the manufacturing cost and adapt to the old model equipment. At the same time, through the control module, the vacuum gauge can also be provided with electrical isolation protection, which can avoid damage to the pressure sensor of the vacuum gauge when the controlled device is working abnormally. Since the control module can be replaced, the maintenance cost is also low.

[0017] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0019] Figure 1 A schematic structural diagram of a vacuum gauge-based equipment control device provided in an embodiment of the present application is shown;

[0020] Figure 2 A schematic structural diagram of another device control device based on a vacuum gauge provided in an embodiment of the present application is shown;

[0021] Figure 3 A schematic diagram of the structure of a control module provided in an embodiment of the present application is shown;

[0022] Figure 4 The figure shows a circuit structure diagram inside the control module provided in the embodiment of the present application;

[0023] Figure 5 A schematic diagram of the input interface and output interface of the control module provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0024] The present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict.

[0025] The existing vacuum gauge is integratedly manufactured, with a more complex structure, higher initial cost, and relatively complex maintenance. If either the pressure test part or the control part is damaged, both cannot work normally, and the universality for old model equipment is poor.

[0026] In order to solve the above problems, the embodiment of the present invention provides a device control device based on a vacuum gauge, such as Figure 1 As shown, it includes: a vacuum gauge 1 and a control module 2, wherein the two ends of the control module 2 are respectively connected to the vacuum gauge 1 and the controlled device 3; the control module 2 is used to receive the pressure signal measured by the vacuum gauge 1, and control the working state of the controlled device 3 according to the pressure signal and the preset trigger pressure.

[0027] The vacuum gauge 1 may be a thin film vacuum gauge or other types of vacuum gauges. The embodiment of the present invention does not specifically limit the type of vacuum gauge. The preset trigger pressure may be set according to actual business needs. The controlled device may be a valve, a pump, etc., and the working state of the controlled device may include stopping working or starting working.

[0028] Specifically, the vacuum gauge is used for process pressure monitoring of various semiconductor devices, and usually contains a pressure sensor inside. The input interface of the control module 2 is connected to the pressure sensor of the vacuum gauge, and the output interface of the control module 2 is connected to the controlled device 3. When the vacuum gauge monitors the semiconductor device, the pressure sensor inside it will transmit the collected pressure signal to the control module 2, and the control module 2 will compare the size of the pressure signal with the preset trigger voltage, and control the working state of the controlled device according to the comparison result.

[0029] The control module of the embodiment of the present invention can be adapted to various types and models of vacuum gauges, and has high adaptability. In addition, the modular design of the embodiment of the present invention allows flexible configuration and upgrading according to specific needs, and appropriate modules can be selected according to actual needs to reduce initial investment. Only a certain module needs to be replaced or upgraded when necessary, thereby reducing the overall maintenance and upgrade costs.

[0030] In some embodiments, Figure 2 As shown, the control module 2 is also connected to a machine platform 4; the machine platform 4 is used to receive the pressure signal sent by the control module 2 and display it.

[0031] Specifically, the control module 2 transmits the received pressure signal to the machine platform 4 for statistics and display.

[0032] In some embodiments, the machine platform 4 is further used to provide a power signal to the control module; the control module 2 is further used to provide a power signal to the vacuum gauge.

[0033] Specifically, the machine platform 4 can provide a power signal to the control module 2 , and the control module 2 can provide a power signal to the vacuum gauge 1 .

[0034] The vacuum gauge of the embodiment of the present invention can cut off the power supply when the system pressure is too high or too low, thereby protecting the system from damage. For example, when the pressure is too high, the power supply of the pump is automatically cut off to avoid excessive operation of the pump or potential system damage.

[0035] In some embodiments, Figure 3 As shown, the control module 2 includes a signal processing circuit 21 and a drive control circuit 22, the input end of the signal processing circuit 21 is connected to the output end of the vacuum gauge 1, the output end of the signal processing circuit 21 is connected to the input end of the drive control circuit 22, and the output end of the drive control circuit 22 is connected to the controlled device 3; the signal processing circuit 21 is used to process the pressure signal measured by the vacuum gauge 1 and transmit the processed pressure signal to the drive control circuit 22; the drive control circuit 22 is used to control the working state of the controlled device according to the processed pressure signal and the preset trigger pressure.

[0036] Each of the drive control circuits 22 controls at least one controlled device 3. Figure 3 For example, each drive control circuit controls one controlled device.

[0037] The vacuum gauge of the embodiment of the present invention can be integrated with other automatic control systems to implement more complex control logic. For example, the operating status of other devices can be automatically adjusted according to different pressure readings to optimize the efficiency of the entire system.

[0038] In some embodiments, the drive control circuit 22 includes a relay, an input end of the relay is connected to the output end of the signal processing circuit 21; the relay is used to compare the pressure value corresponding to the processed pressure signal with the preset trigger pressure, and control the contact switch state inside the relay according to the comparison result; based on the contact switch state, the working state of the controlled device is controlled.

[0039] by Figure 4 For example, each drive control circuit includes a relay, and CN2 and CN3 are relays in the two drive control circuits respectively. When the relay receives the processed pressure signal, it will compare the pressure value corresponding to the processed pressure signal with the preset trigger pressure, and control the contact switch state according to the comparison result, thereby controlling the working state of the controlled device. For example, if the pressure value corresponding to the processed pressure signal is greater than the preset trigger pressure, the contact switch is disconnected, and the controlled device stops working; on the contrary, if the pressure value corresponding to the processed pressure signal is less than or equal to the preset trigger pressure, the contact switch is closed, and the controlled device starts working.

[0040] The embodiment of the present invention uses a relay to achieve electrical isolation to protect the pressure sensor from being affected by high voltage or current. Signal isolation is extremely important in electrical systems, which can prevent the spread of electrical faults and increase the safety and reliability of the system.

[0041] In some embodiments, the drive control circuit 22 further includes a sliding rheostat, which is connected to the relay and is used to adjust a preset trigger pressure of the relay.

[0042] by Figure 4 For example, each driving control circuit includes not only a relay but also a sliding rheostat, VR1 and VR2 are sliding rheostats in the two driving control circuits respectively. By adjusting the sliding rheostat, the preset trigger pressure of the relay can be adjusted.

[0043] In some embodiments, the drive control circuit 22 further includes a function selection chip, which is connected to the relay and is used to select a function of the relay.

[0044] by Figure 4 For example, SP1 and SP2 are function selection chips in two drive control circuits respectively. Through the function selection chips SP1 and SP2, the function of the relay can be selected. For example, the first function of the relay is to compare the input pressure signal with the preset trigger pressure. When the input pressure signal is greater than the preset trigger pressure, the relay is closed; when the input pressure signal is less than or equal to the preset trigger pressure, the relay does not work. The second function of the relay is to input two pressure signals A and B to be compared respectively. When the pressure signal A is greater than the pressure signal B, the relay is closed; when the pressure signal A is less than or equal to the pressure signal B, the relay does not work. The third function of the relay is to compare the input pressure signal with the preset trigger pressure. When the input pressure signal is less than the preset trigger pressure, the relay is closed; when the input pressure signal is greater than or equal to the preset trigger pressure, the relay does not work. The embodiment of the present invention can select function one or function three according to actual business needs, that is, compare the input processed pressure signal with the preset trigger pressure, so as to control the closing state of the relay, and then control the working state of the controlled device.

[0045] It should be noted that, in the embodiment of the present invention, the relay of each drive control circuit can select the trigger mode corresponding to function one or function three according to actual business needs, and the trigger mode of each drive control circuit is set separately and is unrelated to each other.

[0046] The drive control method and the preset trigger pressure of the embodiment of the present invention are both adjustable, and the functions are complete. When in use, they can be adjusted according to actual business needs, and the adjustment method is convenient.

[0047] In some embodiments, the signal processing circuit includes: a transistor, a diode and a capacitor, and the transistor, the diode and the capacitor are respectively used to amplify, shape and filter the pressure signal.

[0048] like Figure 4 As shown, the signal processing circuit includes transistors Q1, Q2, diode D2, and capacitors C1, C2, C3 and C4, and also includes resistors R8, R9, R10 and R11. The above transistors, diodes and capacitors are used to amplify, shape and filter the pressure signal respectively. Further, the signal processing circuit also includes capacitors EC1, EC2 and EC3, resistors R1, R2, R3, R4, R5, R6, R7, R12, R13, R14 and R15, and diodes D1, D3, D4, D5 and D6.

[0049] In some embodiments, the device further includes: a voltage stabilizing module, the voltage stabilizing module is connected to the signal processing circuit, and the voltage stabilizing module is used to perform voltage stabilization processing on the power supply signal provided by the machine.

[0050] Specifically, the voltage stabilizing module includes a voltage stabilizing chip, such as Figure 4 As shown, the voltage stabilizing chip U1 is connected to the signal processing circuit, and the voltage stabilizing chip U1 is used to stabilize the power supply signal.

[0051] The appearance of the control module 2 provided in the embodiment of the present invention is as follows: Figure 5 As shown, the input interface and output interface of the control module adopt DB15 interface respectively, and the pins of the input interface can be designed to receive pressure signals and provide power signals to the vacuum gauge respectively, and the pins of the output interface can be designed to output pressure signals to the machine 4, output relay switch signals to the controlled device and receive power signals from the machine 4 respectively. The preset trigger pressure value can be set independently by adjusting the knob.

[0052] The connection method of the embodiment of the present invention is reliable and simple. The control module can be directly plugged into the vacuum gauge, and the other end can be directly connected to the machine cable. Both ends have a threaded locking design, which is convenient and stable to install and use. In addition, the control module of the embodiment of the present invention has a high overall integration, a small size, and a low requirement for machine installation space.

[0053] The embodiment of the present invention can add the function of controlling the state switching of controlled devices such as pumps and valves to ordinary thin film vacuum gauges by adopting a control module, thereby expanding the application range of pressure sensors. In addition, the embodiment of the present invention also provides electrical isolation protection, so that the pressure sensor is not affected by high voltage or current, thereby improving the safety performance of the pressure sensor. At the same time, the embodiment of the present invention can be adapted to pressure sensors of different models and different ranges, and the replacement and maintenance costs are much lower than those of pressure sensors, which has better economic applicability.

[0054] Those skilled in the art will appreciate that the above-mentioned physical device structure provided in this embodiment does not constitute a limitation on the physical device, and may include more or fewer components, or a combination of certain components, or different arrangements of components.

[0055] Those skilled in the art will appreciate that the accompanying drawings are only schematic diagrams of a preferred implementation scenario, and the modules or processes in the accompanying drawings are not necessarily necessary for implementing the present application. Those skilled in the art will appreciate that the modules in the devices in the implementation scenario can be distributed in the devices of the implementation scenario according to the description of the implementation scenario, or can be changed accordingly and located in one or more devices different from the present implementation scenario. The modules of the above-mentioned implementation scenario can be combined into one module, or can be further split into multiple submodules.

[0056] The above serial numbers of this application are only for description and do not represent the advantages and disadvantages of the implementation scenarios. The above disclosure is only a few specific implementation scenarios of this application, but this application is not limited to them, and any changes that can be thought of by technicians in this field should fall within the scope of protection of this application.

Claims

1. A device control device based on a vacuum gauge, characterized in that: include: A vacuum gauge and a control module, wherein two ends of the control module are respectively connected to the vacuum gauge and the controlled device; The control module is used to receive the pressure signal measured by the vacuum gauge, and control the working state of the controlled device according to the pressure signal and a preset trigger pressure.

2. The device according to claim 1, characterized in that The control module includes a signal processing circuit and a drive control circuit, the input end of the signal processing circuit is connected to the output end of the vacuum gauge, the output end of the signal processing circuit is connected to the input end of the drive control circuit, and the output end of the drive control circuit is connected to the controlled device; The signal processing circuit is used to process the pressure signal measured by the vacuum gauge and transmit the processed pressure signal to the drive control circuit; The drive control circuit is used to control the working state of the controlled device according to the processed pressure signal and the preset trigger pressure.

3. The device according to claim 2, characterized in that Each of the driving control circuits controls at least one controlled device.

4. The device according to claim 2, characterized in that The drive control circuit includes a relay, and an input end of the relay is connected to an output end of the signal processing circuit; The relay is used to compare the pressure value corresponding to the processed pressure signal with a preset trigger pressure, and control the contact switch state inside the relay according to the comparison result; Based on the contact switch state, the working state of the controlled device is controlled.

5. The device according to claim 4, characterized in that The drive control circuit further includes a sliding rheostat, which is connected to the relay and is used to adjust a preset trigger pressure of the relay.

6. The device according to claim 4, characterized in that The drive control circuit further includes a function selection chip, which is connected to the relay and is used to select the function of the relay.

7. The device according to claim 2, characterized in that The signal processing circuit includes: a transistor, a diode and a capacitor. The transistor, the diode and the capacitor are used to amplify, shape and filter the pressure signal respectively.

8. The device according to claim 1, characterized in that The control module is also connected to a machine platform; the machine platform is used to receive the pressure signal sent by the control module and display it.

9. The device according to claim 8, characterized in that The machine platform is also used to provide a power signal to the control module; the control module is also used to provide a power signal to the vacuum gauge.

10. The device according to claim 9, characterized in that The device further comprises: a voltage stabilizing module, which is connected to the signal processing circuit and is used for performing voltage stabilizing processing on the power supply signal provided by the machine.

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