Power supply circuit and chemical vapor deposition equipment

Abstract

The invention discloses a power supply circuit and chemical vapor deposition equipment. According to the power supply circuit, a transformer comprises a primary winding and a secondary winding; the secondary winding comprises a first sub-winding and a second sub-winding, the first sub-winding comprises a first end and a second end, and the second sub-winding comprises a third end and a fourth end; the second end and the third end are connected in series and grounded; a load is connected in series between the first end and the fourth end; the sum of the turns of the first sub-winding and the second sub-winding is smaller than the turns of the primary winding. According to the technical scheme, the transformer is arranged in the power supply circuit, the mode that the second end and the third end are connected in series and grounded is utilized, it is guaranteed that the supplied voltage is loaded under the transformer structure, meanwhile, reduction of single-line voltage can be facilitated, and safety is improved; the voltage supplied to the load is reduced through the transformer, personal potential safety hazards are reduced, contact risks are reduced, the safety of equipment is improved, and safe power supply is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of power supply, and in particular to a power supply circuit and chemical vapor deposition equipment. Background Art

[0002] The metal-organic source gas and other process gases involved in the reaction in the Metal-organic Chemical Vapor Deposition (MOCVD) equipment need to maintain a certain temperature when transported in the pipeline to prevent gas solidification and blockage. Therefore, a heating belt is used to wrap the pipeline to provide a certain temperature.

[0003] At present, the design scheme used for the heating belt products of MOCVD equipment is to be powered by AC 220V voltage. If the heating belt circuit is accidentally touched during use, it will cause irreversible damage to the human body and there is a certain degree of danger. Summary of the invention

[0004] The present invention provides a power supply circuit and chemical vapor deposition equipment to solve the problems of high voltage of the power supply circuit in the prior art and danger and safety in the working process.

[0005] According to one aspect of the present invention, there is provided a power supply circuit, comprising: a transformer;

[0006] The transformer includes a primary winding and a secondary winding;

[0007] The secondary winding includes a first sub-winding and a second sub-winding, the first sub-winding includes a first end and a second end, and the second sub-winding includes a third end and a fourth end; the second end is connected in series with the third end and is grounded; a load is connected in series between the first end and the fourth end;

[0008] The sum of the number of turns of the first sub-winding and the second sub-winding is smaller than the number of turns of the primary winding.

[0009] Optionally, a first voltage difference between the first terminal and the second terminal is less than 36V; and a second voltage difference between the fourth terminal and the third terminal is less than 36V.

[0010] Optionally, the number of turns of the first sub-winding is the same as the number of turns of the second sub-winding.

[0011] Optionally, the third voltage difference between the two ends of the primary winding is 220V;

[0012] The first voltage difference is 30V, and the second voltage difference is 30V.

[0013] Optionally, the power supply circuit further includes a circuit breaker;

[0014] The circuit breaker includes a fifth terminal, a sixth terminal, a seventh terminal, and an eighth terminal;

[0015] The fifth end is electrically connected to the first end of the first sub-winding; the sixth end is electrically connected to one end of the load; the seventh end is electrically connected to the fourth end of the second sub-winding; and the eighth end is electrically connected to the other end of the load;

[0016] The circuit breaker is used to control the circuit between the secondary winding and the load to be disconnected when the leakage current is greater than the preset current.

[0017] Optionally, the circuit breaker further includes a first switch and a second switch;

[0018] The first switch is arranged in series between the first terminal and the fifth terminal; the second switch is arranged in series between the fourth terminal and the eighth terminal;

[0019] The circuit breaker is used to control the first switch and the second switch to be disconnected when the leakage current is greater than a preset current.

[0020] Optionally, the power supply circuit further includes a detection button and a detection resistor;

[0021] The sixth terminal is grounded, and the detection button and the detection resistor are arranged in series between the sixth terminal and the ground.

[0022] Optionally, the resistance value R of the detection resistor, the first voltage difference V1 between the first end and the second end, and the preset current I0 satisfy V1 / R>I0.

[0023] Optionally, the load comprises a heating tape.

[0024] According to another aspect of the present invention, there is provided a chemical vapor deposition device, comprising a power supply circuit; and a gas delivery pipeline;

[0025] The load is surrounded by the gas delivery pipeline and is used to change the temperature of the gas delivery pipeline.

[0026] The technical solution of the present invention is to set a transformer in the power supply circuit, the transformer includes a primary winding and a secondary winding; the secondary winding includes a first sub-winding and a second sub-winding, the second end of the first sub-winding is connected in series with the third end of the second sub-winding and is grounded, the first end and the fourth end are connected to the load, and the second end and the third end are connected in series with each other and are grounded, so that the voltage supplied to the load under this transformer structure can be guaranteed while also helping to reduce the single-line voltage, thereby improving safety; the voltage supplied to the load is reduced by the transformer, thereby reducing personal safety hazards, reducing contact risks, improving the safety of equipment, and realizing safe power supply.

[0027] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 is a schematic structural diagram of a transformer provided according to an embodiment of the present invention;

[0030] Figure 2 It is a circuit connection diagram of a power supply circuit provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0032] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein.

[0033] Figure 1 is a schematic diagram of the structure of a transformer provided according to an embodiment of the present invention, Figure 2 1 is a circuit connection diagram of a power supply circuit provided according to an embodiment of the present invention. Figure 1 and Figure 2 As shown, the power supply circuit includes: a transformer 1;

[0034] The transformer 1 comprises a primary winding 11 and a secondary winding 12;

[0035] The secondary winding 12 includes a first sub-winding 121 and a second sub-winding 122. The first sub-winding 121 includes a first terminal c and a second terminal d. The second sub-winding 122 includes a third terminal e and a fourth terminal f. The second terminal d is connected in series with the third terminal e and is grounded. A load is connected in series between the first terminal c and the fourth terminal f.

[0036] The sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is smaller than the number of turns of the primary winding 11 .

[0037] The transformer 1 plays a role in voltage conversion. The primary winding 11 can be a device connected to a power source, receiving energy from the power source, and can be fed with a 220V AC voltage so that the power supply circuit can be directly connected to the mains; the secondary winding 12 can be a winding connected to a load, and can provide energy to the load. The voltage of the secondary winding 12 is related to the turns ratio of the primary winding 11 and the secondary winding 12.

[0038] Among them, the secondary winding 12 is provided to include a first sub-winding 121 and a second sub-winding 122, the first sub-winding 121 includes a first end c and a second end d, the second sub-winding 122 includes a third end e and a fourth end f, the first sub-winding 121 and the second sub-winding 122 are independent of each other and the number of turns of the first sub-winding 121 and the second sub-winding 122 are both smaller than the number of turns of the primary winding 11, when the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is smaller than the number of turns of the primary winding 11, since the voltage of the secondary winding 12 is related to the turns ratio of the primary winding 11 and the secondary winding 12, the voltage difference across the first sub-winding 121 and the voltage difference across the second sub-winding 122 are both smaller than the first sub-winding 121.

[0039] The second end d of the first sub-winding 121 and the third end e of the second sub-winding 122 are connected in series and grounded, so that the potentials of the second end d and the third end e are 0. Assuming that the voltage difference of the first sub-winding 121 is a, the potential of the first end c of the first sub-winding 121 is +a, and the voltage difference of the second sub-winding 122 is b, then the potential of the fourth end f of the second sub-winding 122 is -b. Since the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11, when the two ends of the primary winding 11 are 220V AC voltage, the voltage difference a+b between the first sub-winding 121 and the second sub-winding 122 is less than 220V, that is, the voltage across the load is less than 220V.

[0040] It is understandable that directly applying a high voltage of 220V to power the load will have certain safety hazards, causing the staff to accidentally touch the power supply circuit, causing irreversible damage to the human body, and there is a certain danger. However, through the technical solution of the embodiment of the present invention, by using the transformer 1 to set the secondary winding 12 to include a first sub-winding 121 and a second sub-winding 122, the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11, so that the voltage output to the load is reduced, the probability of irreversible damage to the human body is reduced, and the danger is reduced. At the same time, the embodiment of the present invention connects the second end d and the third end e in series and grounds. On the one hand, the first sub-winding 121 and the second sub-winding 122 are combined into one winding, and the first end c and the fourth end f are connected in series with the load to realize power supply; on the other hand, the second end d and the third end e are both grounded, so that the first end c is a positive voltage and the fourth end f is a negative voltage, so that the single lines corresponding to the first end c and the fourth end f can share the voltage to the load, ensuring the minimization of the single line voltage when the power supply voltage is fixed, which helps to improve safety.

[0041] It can be understood that the sum of the number of turns of the first sub-winding 121 and the second sub-winding 122 is less than the number of turns of the primary winding 11, which also means that the number of turns of the first sub-winding 121 is less than the number of turns of the primary winding 11, and the number of turns of the second sub-winding 122 is less than the number of turns of the primary winding 11. The voltage at the first end c and the fourth end f is reduced, which also reduces the hazard of single-line false touch.

[0042] In some embodiments, the load includes a heating belt. The power supply circuit can supply power to the heating belt so that the heating belt generates heat and provides a corresponding temperature. It is understandable that when the rated working voltage of the heating belt is 220V, the embodiment of the present invention uses the transformer 1 to reduce 220V, which will reduce the heating efficiency of the heating belt. Therefore, when setting the number of turns of the secondary winding 12, it is necessary to comprehensively consider whether the heating efficiency of the heating belt is suitable for the current working scene, and maximize the safety of the power supply circuit while meeting the working scene.

[0043] Specifically, the load is set to be a heating belt. The potentials at both ends of the primary winding 11 are 0V and 220V, respectively, and a 220V AC voltage is passed through the primary winding 11. A first sub-winding 121 and a second sub-winding 122 with the same number of turns are set in the secondary winding 12, and the second end d of the first sub-winding 121 and the third end e of the second sub-winding 122 are grounded. The first end c of the first sub-winding 121 is +30V, and the fourth end f of the second sub-winding 122 is -30V, so that the voltage supplied to the heating belt is 60V, which meets the heating efficiency requirements in the current application scenario. At the same time, the voltage on the single line of the power supply circuit is only 30V, which is less than the human safety voltage of 36V. Therefore, even if the staff accidentally touches the single line during the operation of the heating belt, it will not affect personal safety, eliminating safety hazards and improving the safety of the entire equipment.

[0044] The technical solution of the embodiment of the present invention is to set a transformer in the power supply circuit, the transformer includes a primary winding and a secondary winding; the secondary winding includes a first sub-winding and a second sub-winding, the second end of the first sub-winding is connected in series with the third end of the second sub-winding and is grounded, the first end and the fourth end are connected to the load, and the second end and the third end are connected in series with each other to ensure the voltage supplied to the load under this transformer structure, which can also help to reduce the single-line voltage and improve safety; the voltage supplied to the load is reduced by the transformer, thereby reducing personal safety hazards, reducing contact risks, improving the safety of equipment, and achieving safe power supply.

[0045] Optional, continue to refer to Figure 1 and Figure 2 As shown, the first voltage difference between the first terminal c and the second terminal d is less than 36V; the second voltage difference between the fourth terminal f and the third terminal e is less than 36V.

[0046] Among them, since the human safety voltage is 36V, the first voltage difference between the first end c and the second end d is set to be less than 36V, and the second voltage difference between the fourth end f and the third end e is set to be less than 36V, so that even if the staff accidentally touches a single line during the load power supply process, it will not cause personal safety problems.

[0047] Exemplarily, in the current scenario, the minimum voltage to ensure the working efficiency of the load is set to 60V, and the voltage difference between the first end c and the fourth end f is set to 60V. In order to ensure that the first voltage difference and the second voltage difference are both less than 36V, the first voltage difference can be made 30V, and the second voltage difference can be made 30V. In this way, it can be ensured that the two single lines of the power supply circuit are both less than 36V, thereby ensuring the power supply efficiency while eliminating personal safety hazards and improving the safety of the load during operation.

[0048] The technical solution of the embodiment of the present invention ensures the safety of each single line and eliminates safety hazards by setting the first voltage difference between the first end and the second end to be less than; the second voltage difference between the fourth end and the third end to be less than, so that the first voltage difference and the second voltage difference are both less than the safety voltage for the human body.

[0049] Optional, continue to refer to Figure 1 and Figure 2 As shown, the number of turns of the first sub-winding 121 is the same as the number of turns of the second sub-winding 122 .

[0050] Among them, when the number of turns of the first sub-winding 121 is the same as the number of turns of the second sub-winding 122, it means that the potential of the first end c and the fourth end f is the same and the electrical properties are opposite, so that the voltage of each single line in the power supply circuit is the same, which helps to share the power supply voltage of the load and improve safety.

[0051] Exemplarily, in the current application scenario, the minimum supply voltage to ensure load power is 60V. When the number of turns of the first sub-winding 121 and the number of turns of the second sub-winding 122 are different, the voltage of the first terminal c is +40V, and the voltage of the fourth terminal f is -20V, so that the load working efficiency is guaranteed, but the single wire corresponding to the first terminal c is +40V, which is greater than the human body safety voltage of 36V, so the safety of this setting is not good; and when the number of turns of the first sub-winding 121 and the number of turns of the second sub-winding 122 are the same, the voltage of the first terminal c is +30V, and the voltage of the fourth terminal f is -30V, so that the load working efficiency is guaranteed while both sets of single wires are less than the human body safety voltage of 36V, which improves the safety of the load during operation.

[0052] The technical solution of the embodiment of the present invention sets the number of turns of the first sub-winding to be the same as the number of turns of the second sub-winding, so that under a fixed power supply voltage, the same number of turns can ensure equal distribution of voltage on a single line, which helps to improve the safety of the load during operation.

[0053] Optional, continue to refer to Figure 1 and Figure 2 As shown, the third voltage difference between the two ends of the primary winding 11 is 220V;

[0054] The first voltage difference is 30V, and the second voltage difference is 30V.

[0055] Among them, the primary winding 11 can be set to connect to the AC power so that the third voltage difference is 220V. By utilizing the relationship between the number of turns of the primary winding 11 and the secondary winding 12, the first voltage difference is set to 30V and the second voltage difference is set to 30V. While ensuring the working efficiency of the load, the contact hidden danger is eliminated and the safety of the load during operation is improved.

[0056] Optional, continue to refer to Figure 2 As shown, the power supply circuit also includes a circuit breaker RCD;

[0057] The circuit breaker RCD comprises a fifth terminal g, a sixth terminal h, a seventh terminal i and an eighth terminal j;

[0058] The fifth terminal g is electrically connected to the first terminal c of the first sub-winding 121; the sixth terminal h is electrically connected to one end of the load; the seventh terminal i is electrically connected to the fourth terminal f of the second sub-winding 122; and the eighth terminal j is electrically connected to the other end of the load;

[0059] The circuit breaker RCD is used to control the circuit between the secondary winding 12 and the load to be disconnected when the leakage current is greater than a preset current.

[0060] Among them, the circuit breaker RCD can be used for leakage protection. The circuit breaker RCD may include four terminals respectively arranged on two single wires connected to the load, the fifth end g is electrically connected to the first end c of the first sub-winding 121; the sixth end h is electrically connected to one end of the load; the seventh end i is electrically connected to the fourth end f of the second sub-winding 122; the eighth end j is electrically connected to the other end of the load, and the circuit breaker RCD can detect whether leakage occurs in the circuit by detecting whether the current entering the circuit breaker RCD is balanced with the current leaving the circuit breaker RCD.

[0061] Among them, when the circuit breaker RCD detects that the current from the fifth terminal g to the seventh terminal i and the sixth terminal h and the eighth terminal j is unbalanced, the leakage current at this time is greater than the preset current, indicating that leakage occurs in the power supply circuit at this time, and then controls the loop between the secondary winding 12 and the load to be disconnected, that is, the line connected to the first terminal c and the load is disconnected, and the line connected to the fourth terminal f and the load is also disconnected.

[0062] The technical solution of the embodiment of the present invention is to set a circuit breaker in the power supply circuit. When leakage occurs in the power supply circuit, the circuit breaker can promptly control the circuit between the load and the second winding to disconnect, thereby playing a role in leakage protection and improving the safety of the power supply circuit.

[0063] Optional, continue to refer to Figure 2 As shown, the circuit breaker RCD further includes a first switch 21 and a second switch 22;

[0064] The first switch 21 is arranged in series between the first terminal c and the fifth terminal g; the second switch 22 is arranged in series between the fourth terminal f and the eighth terminal j;

[0065] The circuit breaker RCD is used to control the first switch 21 and the second switch 22 to be disconnected when the leakage current is greater than a preset current.

[0066] Among them, since the circuit breaker RCD can detect whether the current from the fifth terminal g to the seventh terminal i and the sixth terminal h and the eighth terminal j is balanced, and then determine whether there is leakage, when leakage occurs, the line connected to the first terminal c and the load is controlled to be disconnected, and the line connected to the fourth terminal f and the load is also disconnected, so the first switch 21 and the second switch 22 can be set, and the first switch 21 is set between the first terminal c and the fifth terminal g, and the second switch 22 is set between the fourth terminal f and the eighth terminal j, so that when leakage is detected, the first switch 21 and the second switch 22 are controlled to switch at the same time to ensure that the line connected to the first terminal c and the load is disconnected, and the line connected to the fourth terminal f and the load is also disconnected.

[0067] The technical solution of the embodiment of the present invention is to set a first switch and a second switch in the circuit breaker. When leakage occurs in the power supply circuit, the circuit breaker can promptly control the first switch and the second switch to be disconnected, so that the loop between the load and the second winding is disconnected, which plays a role of leakage protection and improves the safety of the power supply circuit.

[0068] Optional, continue to refer to Figure 2 As shown, the power supply circuit also includes a detection button PB and a detection resistor R;

[0069] The sixth terminal h is grounded, and the detection button PB and the detection resistor R are arranged in series between the sixth terminal h and the ground.

[0070] Among them, since the rated voltage of a normal circuit breaker RCD on the market is fixed, generally 220V, and in the embodiment of the present invention, while reducing the load power supply voltage, it is necessary to adaptively change the working voltage of the circuit breaker RCD to ensure that the circuit breaker RCD can work normally when leakage occurs, a detection button PB and a detection resistor R are set in the power supply circuit, and the detection button PB and the detection resistor R are arranged in series between the sixth terminal h and the ground terminal. When the detection button PB is pressed, the sixth terminal h and the ground terminal are turned on. Due to the presence of the detection resistor R, a corresponding current will be generated. When the current is greater than the preset current, the circuit breaker RCD performs leakage protection and disconnects the loop between the secondary winding 12 and the load. The loop between the detection resistor R, the detection button PB and the sixth terminal h is used to detect whether the circuit breaker RCD is effective under the current voltage and whether it can operate normally.

[0071] It can be understood that the resistance value of the detection resistor R determines the current between the sixth terminal h and the ground terminal. Since this current affects whether the circuit breaker RCD can work normally, the resistance value of the detection resistor R has a certain range. In some embodiments, the resistance value R of the detection resistor R, the first voltage difference V1 between the first terminal c and the second terminal d, and the preset current I0 satisfy V1 / R>I0. V1 / R can represent the current between the sixth terminal h and the ground terminal. When V1 / R>I0, it means that the current between the sixth terminal h and the ground terminal is greater than the preset current. Therefore, the circuit breaker RCD determines that there is leakage and disconnects the loop between the secondary winding 12 and the load.

[0072] Exemplarily, the preset current I0 of the circuit breaker RCD is set to 30mA, the first voltage difference is 30V, and the second voltage difference is 30V. When there is a current greater than 30mA on either side of the circuit breaker RCD, the circuit breaker RCD can be judged as leakage, so R=30V / 30mA=1000Ω, that is, when the detection resistance RR is less than 1000Ω, the circuit breaker RCD can work normally, so a resistance of 750Ω is selected, I=30V / 750Ω=40mA>30mA, which meets the requirements. Then, when the detection button PB connects the loop between the sixth terminal h and the ground, the circuit breaker RCD performs leakage protection.

[0073] It is understandable that the size of the detection resistor R can be adjusted according to the single-line voltage, so that the circuit breaker RCD can work normally under the corresponding voltage. However, when the circuit breaker RCD does not work, the circuit breaker RCD specifications need to be replaced and reconfirmed.

[0074] The technical solution of the embodiment of the present invention is to set a detection button and a detection resistor in the power supply circuit, and at the same time, the size of the detection resistor can be adjusted according to the single-line voltage to ensure that the circuit breaker RCD can work normally under the current single-line voltage, play a role in leakage protection, and improve the safety of the load during operation.

[0075] Based on the same inventive concept, an embodiment of the present invention provides a chemical vapor deposition device, which includes a power supply circuit; and a gas delivery pipeline;

[0076] The load is surrounded by the gas delivery pipeline and is used to change the temperature of the gas delivery pipeline.

[0077] The chemical vapor deposition equipment may be a MOCVD equipment, which can be used to prepare corresponding film layers according to metal organic source gas and other process gases. The other process gas may be ammonia NH 3 , phosphine PH 3 Arsenic acid AsH 3Gases such as metal organic source gas and other process gases are transported to the reaction chamber through a gas delivery pipeline during the working process of the MOCVD equipment. Since the reaction requires a corresponding temperature, a heating belt will be wrapped around the gas delivery pipeline to maintain the temperature in the pipeline to prevent the gas from solidifying or liquefying and blocking the gas delivery pipeline, for example, metal organic source gas. In the embodiment of the present invention, a heating belt is arranged on the gas delivery pipeline, and the heating belt is powered by a power supply circuit to maintain the temperature of the metal organic source gas and other process gases, so that the supply gas can be transmitted at the optimal delivery temperature. It can be understood that the chemical vapor deposition equipment includes a variety of gas delivery pipelines, the surface of the gas delivery pipeline can be made of stainless steel pipe material, and the gas delivery pipeline can also include solenoid valves, pressure gauges, concentration meters and other equipment. When the mains 220V power supply is used and the heating belt circuit is damaged, the damaged heating circuit can also be conductively connected to other stainless steel pipes or electronic devices such as solenoid valves, pressure gauges and concentration meters through the stainless steel pipe, affecting the normal operation of the devices in the chemical vapor deposition equipment. Therefore, the minimum voltage of the heating belt can be determined according to the working efficiency of the MOCVD equipment and the working efficiency of the heating belt, and the voltage on the power supply line can be changed by using the transformer 1. Even if the heating belt line is accidentally touched during the operation of the MOCVD equipment, the risk of electric shock is reduced, and safe power supply is achieved, which plays a protective role for personal safety and ensures the normal operation of the MOCVD equipment. The technical solution of the embodiment of the present invention is to set a transformer in the power supply circuit, and the transformer includes a primary winding and a secondary winding; the secondary winding includes a first sub-winding and a second sub-winding, the second end of the first sub-winding is connected in series with the third end of the second sub-winding and grounded, the first end and the fourth end are connected to the load, and the second end and the third end are connected in series with each other to ensure that the voltage supplied to the load under this transformer structure can also help to reduce the single-line voltage, thereby improving safety; the voltage supplied to the load is reduced by the transformer, thereby reducing personal safety hazards, reducing contact risks, improving the safety of the equipment, and achieving safe power supply.

[0078] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A power supply circuit, characterized in that: include: transformer; The transformer comprises a primary winding and a secondary winding; The secondary winding includes a first sub-winding and a second sub-winding, the first sub-winding includes a first end and a second end, the second sub-winding includes a third end and a fourth end; the second end is connected in series with the third end and is grounded; a load is connected in series between the first end and the fourth end; The sum of the numbers of turns of the first sub-winding and the second sub-winding is smaller than the number of turns of the primary winding.

2. The power supply circuit according to claim 1, characterized in that: A first voltage difference between the first terminal and the second terminal is less than 36V; and a second voltage difference between the fourth terminal and the third terminal is less than 36V.

3. The power supply circuit according to claim 2, characterized in that: The number of turns of the first sub-winding is the same as the number of turns of the second sub-winding.

4. The power supply circuit according to claim 3, characterized in that: The third voltage difference between the two ends of the primary winding is 220V; The first voltage difference is 30V, and the second voltage difference is 30V.

5. The power supply circuit according to claim 1, characterized in that: The power supply circuit also includes a circuit breaker; The circuit breaker includes a fifth end, a sixth end, a seventh end and an eighth end; The fifth end is electrically connected to the first end of the first sub-winding; the sixth end is electrically connected to one end of the load; the seventh end is electrically connected to the fourth end of the second sub-winding; and the eighth end is electrically connected to the other end of the load; The circuit breaker is used to control the circuit between the secondary winding and the load to be disconnected when the leakage current is greater than a preset current.

6. The power supply circuit according to claim 5, characterized in that: The circuit breaker further comprises a first switch and a second switch; The first switch is arranged in series between the first terminal and the fifth terminal; the second switch is arranged in series between the fourth terminal and the eighth terminal; The circuit breaker is used to control the first switch and the second switch to be disconnected when the leakage current is greater than a preset current.

7. The power supply circuit according to claim 5, characterized in that: The power supply circuit also includes a detection button and a detection resistor; The sixth terminal is grounded, and the detection button and the detection resistor are arranged in series between the sixth terminal and the ground terminal.

8. The power supply circuit according to claim 7, characterized in that: The resistance value R of the detection resistor, the first voltage difference V1 between the first end and the second end, and the preset current I0 satisfy V1 / R>I0.

9. The power supply circuit according to claim 1, characterized in that: The load includes a heating tape.

10. A chemical vapor deposition device, characterized in that: The invention comprises the power supply circuit as claimed in any one of claims 1 to 9; and further comprises a gas delivery pipeline; The load is surrounded on the gas delivery pipeline and is used to change the temperature of the gas delivery pipeline.

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