Integrated circuit production equipment with dust removal function

By adopting structures such as bottom plate, vertical plate, rotating shaft, conveyor belt, sponge sleeve and vacuum cleaner in integrated circuit production equipment, the problem of residual liquid on the surface of the circuit board after etching is solved, automatic cleaning and dust removal is achieved, and the application of the equipment is improved. and cleanliness.

CN119277658AActive Publication Date: 2025-01-07JIANGSU DUOKR INFORMATION TECHNOLOGY CO LTD

Patent Information

Application Number
CN202411377539.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-30
Publication Date
2025-01-07
Estimated Expiration
2044-09-30

AI Technical Summary

Technical Problem

After etching of existing integrated circuit production equipment, etching liquid is prone to residual on the surface of the circuit board, which affects subsequent use, and it is difficult for existing equipment to effectively remove, resulting in poor applicability.

Method used

A integrated circuit production equipment with dust removal function was designed, adopting structures such as bottom plate, vertical plate, rotating shaft, conveyor belt, rotating pipe, sponge sleeve, water squeeze assembly and vacuum cleaner, and transport the circuit board through the conveyor belt and at the sponge sleeve position. Automatically clean the etching liquid to prevent it from solidifying and adhering, and combine it with vacuum cleaner to remove dust to improve the applicability and cleanliness of the equipment.

Benefits of technology

It realizes automatic cleaning of the etching liquid remaining on the surface of the circuit board, prevents solidification and adhesion, improves the applicability and practicality of the equipment, and ensures the normal use of the circuit board.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses integrated circuit production equipment with a dust removal function, and belongs to the technical field of integrated circuit production, the integrated circuit production equipment comprises a bottom plate, the upper end of the bottom plate is connected with a vertical plate, the side wall of one side of the vertical plate is symmetrically and rotatably connected with two rotating shafts, and the two rotating shafts are jointly provided with a conveying belt; a rotating assembly used for driving the rotating shaft to rotate is installed on the vertical plate, an etching assembly used for circuit board processing is installed on the vertical plate, a mounting frame is connected to the side wall of one side of the vertical plate, a rotating pipe is rotationally installed on the mounting frame, and the rotating pipe is in transmission connection with the rotating shaft through a belt wheel. The circuit board etching device overcomes the defects in the prior art, through mutual cooperation of the conveying belt, the rotating pipe, the sponge sleeve, the fixed cylinder, the water conveying pipe, the spring, the piston, the pulley, the cam and other structures, etching liquid left on a circuit board can be automatically cleaned after the circuit board is etched, the etching liquid is prevented from being solidified and attached to the circuit board, and therefore the circuit board etching device is convenient to use. And the applicability of the device is improved.
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Description

Technical Field

[0001] The invention relates to the field of integrated circuit production, and in particular to integrated circuit production equipment with a dust removal function. Background Art

[0002] Integrated circuits are a way of miniaturizing circuits (mainly semiconductor devices, but also passive components, etc.). They use certain processes to interconnect the transistors, resistors, capacitors, inductors and other components and wiring required in a circuit, and then make them on a small piece or several small pieces of semiconductor wafers or dielectric substrates. These are then packaged in a tube shell to become a miniature structure with the required circuit functions. All the components have been structurally integrated into a whole, making a major step forward in the direction of miniaturization, low power consumption, intelligence and high reliability of electronic components.

[0003] When producing integrated circuits, manufacturers need to etch the surface of the circuit board. In order to save costs, manufacturers usually use chemical etcher for etching. However, after the etching is completed, etching liquid will generally remain on the surface of the circuit board. When the etching liquid solidifies, the etching liquid will adhere to the surface of the circuit board, which is easy to affect the subsequent normal use of the circuit board and has poor applicability. Summary of the invention

[0004] In view of the deficiencies of the prior art, the present invention provides an integrated circuit production device with a dust removal function, which overcomes the deficiencies of the prior art.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an integrated circuit production equipment with a dust removal function, comprising a bottom plate, a vertical plate connected to the upper end of the bottom plate, two rotating shafts symmetrically connected to the side wall of one side of the vertical plate, a conveyor belt installed on the two rotating shafts, a rotating assembly for driving the rotating shaft to rotate installed on the vertical plate, an etching assembly for circuit board processing installed on the vertical plate, a mounting frame connected to the side wall of one side of the vertical plate, a rotating tube rotatably installed on the mounting frame, the rotating tube and the rotating shaft are connected by a pulley transmission, and a tube wall of the rotating tube is provided. A sponge sleeve is connected to the fixed sleeve, and the sponge sleeve is located at the upper end of the conveyor belt. A number of water outlet holes are evenly and equidistantly opened on the tube wall of the rotating tube. The upper end of the bottom plate is connected to a placing table, and a storage box is installed on the upper end of the placing table. The upper end of the bottom plate is connected to a fixed cylinder, and the fixed cylinder is communicated with the storage box through a connecting pipe. A water pipe is connected to the side wall of one side of the fixed cylinder, and the other end of the water pipe passes through the side wall of the placing table and is rotatably connected to the rotating tube. A water squeezing component for discharging clean water into the rotating tube is installed on the fixed cylinder, and a scraping component for cleaning the conveyor belt is installed in the storage box.

[0006] By adopting the above technical scheme, first, the flushing liquid is poured into the storage box, and then the connecting pipe is opened. At this time, the flushing liquid will enter the fixed cylinder through the connecting pipe, and then the connecting pipe is closed. During operation, the rotating shaft is rotated by the rotating component to operate the conveyor belt to transport the circuit board. When the circuit board moves to the specified position, the circuit board is etched by the etching component. When the etching process is completed, the circuit board is continued to be transported by the conveyor belt, and the rotation of the rotating shaft will drive the rotating tube to rotate through the pulley, and the rotation of the rotating tube will drive the sponge cover to rotate. At the same time, the water squeezing component will discharge the flushing liquid in the fixed cylinder into the inside of the rotating tube, and the rotating tube will discharge the flushing liquid into the sponge cover through the water outlet. When the conveyor belt moves to the position of the sponge cover, the sponge cover will automatically clean the etching liquid left on the surface of the circuit board. Through the above structure, the etching liquid left on the circuit board after the etching process of the circuit board can be automatically cleaned to prevent the etching liquid from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

[0007] As a preferred technical solution of the present invention, the rotating assembly includes a motor fixedly mounted on a side wall of one side of the vertical plate, and the output end of the motor is connected to the corresponding rotating shaft through a coupling.

[0008] By adopting the above technical solution, the motor is started and the motor drives the corresponding rotating shaft to connect.

[0009] As a preferred technical solution of the present invention, a support plate is installed on the side wall of one side of the vertical plate, and the motor is arranged on the support plate.

[0010] By adopting the above technical solution, the motor can be prevented from falling from the vertical plate.

[0011] As a preferred technical solution of the present invention, the water squeezing assembly includes two springs symmetrically connected to the top of the fixed cylinder, the other ends of the two springs are commonly connected to a piston, the piston is slidably connected in the fixed cylinder, and the piston matches the fixed cylinder, the upper end of the piston is connected to a rack, the upper end of the rack passes through the top of the fixed cylinder and extends upward and is equipped with a pulley, the fixed sleeve on the tube wall of the rotating tube is connected to a cam, and the cam is in conflict with the pulley.

[0012] By adopting the above technical solution, when the rotating tube rotates, it will drive the cam to rotate, and the rotation of the cam will exert a force on the pulley. The pulley will drive the rack to move downward under the force, and the movement of the rack will drive the piston to move downward. The downward movement of the piston will compress the air in the fixed cylinder. At this time, the flushing liquid in the fixed cylinder will be pressed into the rotating tube through the water pipe. In addition, the spring will be stretched when the piston moves downward. The spring will be deformed under the force, and when the force of the cam is removed from the pulley, the spring will be reset, and the spring will reset the piston, and this process is repeated.

[0013] As a preferred technical solution of the present invention, the scraping assembly includes a rotating rod rotatably connected to the side wall of the storage box, one end of the rotating rod is arranged through the side wall of the storage box, and a plurality of cleaning brushes are evenly and equidistantly connected to the rod wall of the rotating rod located in the storage box, and the corresponding cleaning brushes are attached to the lower end of the conveyor belt, and a driving assembly for driving the rotating rod to rotate is installed on the bottom plate.

[0014] By adopting the above technical solution, the rotating rod is rotated by the driving component, and the rotation of the rotating rod drives the cleaning brush to rotate. When the cleaning brush contacts the conveyor belt, the cleaning brush cleans the conveyor belt to prevent part of the etching liquid from adhering to the conveyor belt, thereby improving the cleanliness of the conveyor belt.

[0015] As a preferred technical solution of the present invention, the driving assembly includes a gear fixedly connected to one end of the rotating rod, and the gear is meshed with the rack.

[0016] By adopting the above technical solution, when the rack moves in the vertical direction, the rack will exert a force on the gear, and the gear will drive the rotating rod to rotate due to the force.

[0017] As a preferred technical solution of the present invention, the etching assembly includes a cylinder fixedly mounted on a side wall of a vertical plate, the piston end of the cylinder is connected to an etcher, and the etcher is located above the conveyor belt.

[0018] By adopting the above technical solution, when etching the circuit board, the cylinder is started, and the cylinder will drive the etcher to move in the vertical direction. When the etcher moves to the specified position, the etcher is started, and the etcher will etch the circuit board.

[0019] As a preferred technical solution of the present invention, a vacuum cleaner is installed on the side wall of one side of the vertical plate, a vacuum tube is installed at the lower end of the vacuum cleaner, a vacuum head is connected to the lower end of the vacuum tube, and the vacuum head is located above the conveyor belt.

[0020] By adopting the above technical solution, when the circuit board moves to the position below the vacuum head, the vacuum cleaner is started and the vacuum cleaner removes dust on the surface of the circuit board through the vacuum tube and the vacuum head to prevent the dust from affecting the processing of the circuit board, thereby improving the practicality of the device.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] (1) The present invention transports the circuit board by arranging structures such as a bottom plate, a vertical plate, a rotating shaft, a conveyor belt, a mounting frame, a rotating tube, a sponge cover, a placement table, a material storage box, a fixed cylinder, a water pipe, a motor, a support plate, a spring, a piston, a pulley and a cam. The conveyor belt is operated by a motor and a rotating shaft to transport the circuit board. The rotation of the rotating shaft drives the rotating tube and the sponge cover to rotate through a pulley. When the rotating tube rotates, the cam is driven to rotate. The rotation of the cam drives the piston to move downward through the pulley. The downward movement of the piston compresses the air in the fixed cylinder. At this time, the flushing liquid in the fixed cylinder is pressed into the rotating tube through the water pipe. In addition, when the piston moves downward, the spring will be stretched, and the spring will be deformed by the force. When the force of the cam is removed from the pulley, the spring will reset, and the spring will reset the piston. This process is repeated. When the flushing liquid in the fixed cylinder is discharged into the rotating tube, the rotating tube will discharge the flushing liquid into the sponge sleeve through the water outlet. When the conveyor belt moves to the position of the sponge sleeve, the sponge sleeve will automatically clean the etching liquid remaining on the surface of the circuit board. Through the above structure, the etching liquid remaining on the circuit board after the etching process can be automatically cleaned to prevent the etching liquid from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

[0023] (2) The present invention provides structures such as a rack, a pulley, a cam, a rotating rod, a cleaning brush and a gear. When the rack moves in the vertical direction, the rack will exert a force on the gear. The gear will drive the rotating rod to rotate due to the force. The rotation of the rotating rod will drive the cleaning brush to rotate. When the cleaning brush contacts the conveyor belt, the cleaning brush will clean the conveyor belt to prevent part of the etching liquid from adhering to the conveyor belt, thereby improving the cleanliness of the conveyor belt.

[0024] (3) The present invention provides a vacuum cleaner, a vacuum tube, a vacuum head and other structures. When the circuit board moves to a position below the vacuum head, the vacuum cleaner is started and the vacuum cleaner removes dust on the surface of the circuit board through the vacuum tube and the vacuum head to prevent the dust from affecting the processing of the circuit board, thereby improving the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2It is a schematic diagram of the working state structure of the cam and the pulley in the present invention;

[0027] Figure 3 for Figure 2 A magnified view of part A;

[0028] Figure 4 It is a right side view of the present invention;

[0029] Figure 5 It is a schematic diagram of the internal structure of the fixed cylinder in the present invention;

[0030] Figure 6 It is a schematic diagram of the structure of the scraping assembly in the present invention;

[0031] Figure 7 It is a schematic diagram of the rotating tube structure in the present invention.

[0032] Description of reference numerals:

[0033] 1. Bottom plate; 2. Vertical plate; 3. Rotating shaft; 4. Conveyor belt; 5. Mounting frame; 6. Rotating tube; 7. Sponge cover; 8. Placing table; 9. Storage box; 10. Fixed cylinder; 11. Water pipe; 12. Motor; 13. Support plate; 14. Spring; 15. Piston; 16. Rack; 17. Pulley; 18. Cam; 19. Rotating rod; 20. Cleaning brush; 21. Gear; 22. Cylinder; 23. Etching machine; 24. Vacuum cleaner; 25. Vacuum tube; 26. Vacuum head. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] See also Figure 1 and Figure 4 , an integrated circuit production equipment with a dust removal function, includes a base plate 1, a vertical plate 2 is fixedly connected to the upper end of the base plate 1, two rotating shafts 3 are symmetrically rotatably connected to the side wall of one side of the vertical plate 2, and a conveyor belt 4 is installed on the two rotating shafts 3. A rotating assembly for driving the rotating shaft 3 to rotate is installed on the vertical plate 2, and the rotating assembly includes a motor 12 fixedly installed on the side wall of one side of the vertical plate 2, and the output end of the motor 12 is connected to the corresponding rotating shaft 3 through a coupling. When the motor 12 is started, the motor 12 will drive the corresponding rotating shaft 3 to be connected, and a support plate 13 is installed on the side wall of one side of the vertical plate 2, and the motor 12 is arranged on the support plate 13 to prevent the motor 12 from falling from the vertical plate 2.

[0036] An etching assembly for circuit board processing is installed on the vertical plate 2, and the etching assembly includes a cylinder 22 fixedly installed on a side wall of one side of the vertical plate 2. The piston end of the cylinder 22 is connected to an etcher 23, and the etcher 23 is located above the conveyor belt 4. The etcher 23 is a prior art, so it is not described in detail in the present invention. The specific structural shell working principle can refer to the prior art. When etching the circuit board, start the cylinder 22, and the cylinder 22 will drive the etcher 23 to move in the vertical direction. When the etcher 23 moves to the specified position, start the etcher 23, and the etcher 23 will etch the circuit board.

[0037] For details, please refer to Figure 1-2 , Figure 5 and Figure 7 A mounting frame 5 is connected to the side wall of one side of the vertical plate 2, and a rotating tube 6 is rotatably mounted on the mounting frame 5. The rotating tube 6 is connected to the rotating shaft 3 through a pulley transmission. A sponge sleeve 7 is fixedly sleeved on the tube wall of the rotating tube 6, and the sponge sleeve 7 is located at the upper end of the conveyor belt 4. A number of water outlet holes are evenly and equidistantly opened on the tube wall of the rotating tube 6, a placing table 8 is fixedly connected to the upper end of the bottom plate 1, and a storage box 9 is installed on the upper end of the placing table 8. A fixed cylinder 10 is connected to the upper end of the bottom plate 1, and the fixed cylinder 10 is connected to the storage box 9 through a connecting pipe. A water pipe 11 is connected to the side wall of one side of the fixed cylinder 10, and the other end of the water pipe 11 passes through the side wall of the placing table 8 and is rotatably connected to the rotating tube 6, and a water squeezing component for discharging clean water into the rotating tube 6 is installed on the fixed cylinder 10.

[0038] The squeezing assembly includes two springs 14 symmetrically connected to the top of the fixed cylinder 10, and the other ends of the two springs 14 are connected to a piston 15. The piston 15 is slidably connected in the fixed cylinder 10, and the piston 15 matches the fixed cylinder 10. The upper end of the piston 15 is connected to a rack 16, and the upper end of the rack 16 passes through the top of the fixed cylinder 10 and extends upward and is installed with a pulley 17. The fixed sleeve on the wall of the rotating tube 6 is connected with a cam 18, and the cam 18 conflicts with the pulley 17. First, pour the flushing liquid into the storage box 9, and then open the connecting pipe At this time, the flushing liquid will enter the fixed cylinder 10 through the connecting pipe, and then the connecting pipe will be closed. When working, the motor 12 will rotate the rotating shaft 3 to operate the conveyor belt 4 to transport the circuit board. When the circuit board moves to the specified position, the etching component will etch the circuit board. After the etching process is completed, the circuit board will continue to be transported by the conveyor belt 4, and the rotation of the rotating shaft 3 will drive the rotating tube 6 to rotate through the pulley, and the rotation of the rotating tube 6 will drive the sponge cover 7 to rotate.

[0039] When the rotating tube 6 rotates, it will drive the cam 18 to rotate. The rotation of the cam 18 will apply a force to the pulley 17. The pulley 17 will drive the rack 16 to move downward under the force. The movement of the rack 16 will drive the piston 15 to move downward. The downward movement of the piston 15 will compress the air in the fixed cylinder 10. At this time, the flushing liquid in the fixed cylinder 10 will be pressed into the rotating tube 6 through the water pipe 11. In addition, when the piston 15 moves downward, the spring 14 will be stretched. The spring 14 will be deformed under the force. When the force of the cam 18 is removed from the pulley 17, the spring 14 will be reset, and the spring 14 will reset the piston 15, and this process is repeated.

[0040] When the flushing liquid in the fixed cylinder 10 is discharged into the rotating tube 6, the rotating tube 6 then discharges the flushing liquid into the sponge sleeve 7 through the water outlet. When the conveyor belt 4 moves to the position of the sponge sleeve 7, the sponge sleeve 7 will automatically clean the etching liquid remaining on the surface of the circuit board. The upper structure can automatically clean the etching liquid remaining on the circuit board after the circuit board is etched to prevent the etching liquid from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

[0041] For details, please refer to Figure 1 , Figure 3 and Figure 6 The scraping assembly for cleaning the conveyor belt 4 is installed in the material storage box 9, and the scraping assembly includes a rotating rod 19 rotatably connected to the side wall of the material storage box 9, one end of the rotating rod 19 passes through the side wall of the material storage box 9, and a plurality of cleaning brushes 20 are evenly and equidistantly connected to the rod wall of the rotating rod 19 located in the material storage box 9, and the corresponding cleaning brush 20 is attached to the lower end of the conveyor belt 4, and a driving assembly for driving the rotating rod 19 to rotate is installed on the bottom plate 1, and the driving assembly includes a gear 21 fixedly connected to one end of the rotating rod 19, and the gear 21 is meshed with the rack 16. When the rack 16 moves in the vertical direction, the rack 16 will apply a force to the gear 21, and the gear 21 will drive the rotating rod 19 to rotate under the force, and the rotation of the rotating rod 19 will drive the cleaning brush 20 to rotate, and when the cleaning brush 20 contacts with the conveyor belt 4, the cleaning brush 20 will clean the conveyor belt 4 to prevent part of the etching liquid from adhering to the conveyor belt 4, thereby improving the cleanliness of the conveyor belt 4.

[0042] For details, please refer to Figure 1 A vacuum cleaner 24 is installed on the side wall of one side of the vertical plate 2, and a vacuum tube 25 is installed at the lower end of the vacuum cleaner 24. The lower end of the vacuum tube 25 is connected to a vacuum head 26, and the vacuum head 26 is located above the conveyor belt 4. When the circuit board moves to the position below the vacuum head 26, the vacuum cleaner 24 is started, and the vacuum cleaner 24 will remove dust on the surface of the circuit board through the vacuum tube 25 and the vacuum head 26 to prevent dust from affecting the circuit board processing, thereby improving the practicality of the device.

[0043] Working principle: First, pour the flushing liquid into the storage box 9, and then open the connecting pipe. At this time, the flushing liquid will enter the fixed cylinder 10 through the connecting pipe, and then close the connecting pipe. When working, the motor 12 is used to rotate the rotating shaft 3 to operate the conveyor belt 4 to transport the circuit board. When the circuit board moves to the specified position, the etching component is used to etch the circuit board. When the etching process is completed, the circuit board is continued to be transported by the conveyor belt 4. In addition, the rotation of the rotating shaft 3 will drive the rotating tube 6 to rotate through the pulley, and the rotation of the rotating tube 6 will drive the sponge cover 7 to rotate. When the rotating tube 6 rotates, it will drive the cam 18 to rotate, and the rotation of the cam 18 will apply a force to the pulley 17, and the pulley 17 will be subjected to the force. The rack 16 is driven to move downward, and the movement of the rack 16 will drive the piston 15 to move downward. The downward movement of the piston 15 will compress the air in the fixed cylinder 10. At this time, the flushing liquid in the fixed cylinder 10 is pressed into the rotating tube 6 through the water pipe 11, and the piston 15 will also stretch the spring 14 when it moves downward. The spring 14 will be deformed by the force. When the force of the cam 18 is removed from the pulley 17, the spring 14 will be reset, and the spring 14 will reset the piston 15. This is repeated. When the flushing liquid in the fixed cylinder 10 is discharged into the interior of the rotating tube 6, the rotating tube 6 will discharge the flushing liquid into the sponge cover 7 through the water outlet. When the conveyor belt 4 moves to the position of the sponge cover 7, the sponge cover 7 will automatically clean the etching liquid left on the surface of the circuit board.

[0044] Finally, it should be noted that in the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0045] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An integrated circuit production device with a dust removal function, comprising a base plate (1), the upper end of the base plate (1) being connected to a vertical plate (2), characterized in that: Two rotating shafts (3) are symmetrically rotatably connected to the side wall of one side of the vertical plate (2), and a conveyor belt (4) is installed on the two rotating shafts (3). A rotating assembly for driving the rotating shafts (3) to rotate is installed on the vertical plate (2), and an etching assembly for circuit board processing is installed on the vertical plate (2). A mounting frame (5) is connected to the side wall of one side of the vertical plate (2), and a rotating tube (6) is rotatably installed on the mounting frame (5). The rotating tube (6) is connected to the rotating shaft (3) through a pulley transmission. A sponge sleeve (7) is fixedly sleeved on the tube wall of the rotating tube (6), and the sponge sleeve (7) is located at the upper end of the conveyor belt (4). The rotating tube (6) A plurality of water outlet holes are evenly and equidistantly provided on the tube wall; the upper end of the bottom plate (1) is connected to a placing table (8); the upper end of the placing table (8) is equipped with a material storage box (9); the upper end of the bottom plate (1) is connected to a fixed cylinder (10); the fixed cylinder (10) and the material storage box (9) are connected via a connecting pipe; a water delivery pipe (11) is connected to the side wall of one side of the fixed cylinder (10); the other end of the water delivery pipe (11) passes through the side wall of the placing table (8) and is rotatably connected to the rotating tube (6); a water squeezing component for discharging clean water into the rotating tube (6) is installed on the fixed cylinder (10); and a scraping component for cleaning the conveyor belt (4) is installed in the material storage box (9).

2. The integrated circuit production equipment with dust removal function according to claim 1, characterized in that: The rotating assembly comprises a motor (12) fixedly mounted on a side wall of a vertical plate (2), and an output end of the motor (12) is connected to a corresponding rotating shaft (3) via a coupling.

3. The integrated circuit production equipment with dust removal function according to claim 2, characterized in that: A support plate (13) is installed on the side wall of one side of the vertical plate (2), and the motor (12) is arranged on the support plate (13).

4. The integrated circuit production equipment with dust removal function according to claim 1, characterized in that: The water squeezing assembly comprises two springs (14) symmetrically connected to the top of a fixed cylinder (10); the other ends of the two springs (14) are commonly connected to a piston (15); the piston (15) is slidably connected to the fixed cylinder (10), and the piston (15) matches the fixed cylinder (10); the upper end of the piston (15) is connected to a rack (16); the upper end of the rack (16) passes through the top of the fixed cylinder (10) and extends upward and is equipped with a pulley (17); a cam (18) is fixedly sleeved on the wall of the rotating tube (6); the cam (18) is in conflict with the pulley (17).

5. The integrated circuit production equipment with dust removal function according to claim 1, characterized in that: The scraping assembly comprises a rotating rod (19) rotatably connected to the side wall of the material storage box (9), one end of the rotating rod (19) is arranged to pass through the side wall of the material storage box (9), and a plurality of cleaning brushes (20) are evenly and equidistantly connected to the rod wall of the rotating rod (19) located in the material storage box (9), and the corresponding cleaning brushes (20) are attached to the lower end of the conveyor belt (4), and a driving assembly for driving the rotating rod (19) to rotate is installed on the bottom plate (1).

6. The integrated circuit production equipment with dust removal function according to claims 4 and 5, characterized in that: The driving assembly comprises a gear (21) fixedly connected to one end of the rotating rod (19), and the gear (21) is meshed with the rack (16).

7. The integrated circuit production equipment with dust removal function according to claim 1, characterized in that: The etching assembly comprises a cylinder (22) fixedly mounted on a side wall of a vertical plate (2), the piston end of the cylinder (22) is connected to an etching machine (23), and the etching machine (23) is located above the conveyor belt (4).

8. The integrated circuit production equipment with dust removal function according to claim 1, characterized in that: A dust collector (24) is installed on the side wall of one side of the vertical plate (2), a dust collection pipe (25) is installed at the lower end of the dust collector (24), a dust collection head (26) is connected to the lower end of the dust collection pipe (25), and the dust collection head (26) is located above the conveyor belt (4).

Citation Information

Patent Citations

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