A probe card fully automatic testing system and testing method

Abstract

The present invention relates to the field of probe card testing technology, and specifically discloses a probe card fully automatic testing system and testing method, including a test box, wherein a conveyor frame is fixedly arranged inside the test box, and the left and right sides of the conveyor frame penetrate the left and right sides of the test box, and a discharge frame is also fixedly arranged at the rear of the inside of the test box, and one side of the discharge frame extends to the rear of the test box. By synchronously recording the test parameters of each probe card, detailed data support is provided for subsequent quality analysis, and the surface quality of the probe card is checked before testing, so that defective probe cards can be removed in time to avoid invalid testing of these defective products. For mass-produced probe cards, this pre-screening method can greatly improve the overall test efficiency, not only saving test time, but also improving the utilization rate of test resources, reducing the operating time and energy consumption of the equipment, and reducing operating costs.

Description

Technical Field

[0001] The present invention relates to the technical field of probe card testing, and in particular to a full-automatic testing system and a testing method for a probe card. Background Art

[0002] In the semiconductor industry, probe cards are key tools for testing integrated circuit chips, and their performance and quality directly affect the test results of the chips. With the continuous development of semiconductor technology, the testing requirements for probe cards are getting higher and higher. At present, traditional probe card testing methods usually require a lot of manual operation, and each link from feeding, testing to discharging may rely on manual intervention. This method is not only inefficient, but also prone to operational errors and instability due to human factors, increasing testing costs and time costs. Moreover, during the test process, the inspection of the surface quality of the probe card is often not timely and comprehensive enough, resulting in invalid testing of some probe cards with surface defects, wasting testing resources and time.

[0003] In traditional testing, manual loading is not only slow, but also difficult to ensure the continuity of loading. The time waiting for manual loading will reduce the utilization rate of the test equipment and affect the overall test efficiency. At the same time, there is a lack of effective protection measures for the transportation process of the probe card, which can easily cause scratches on the surface of the probe card and affect the test accuracy. During the test, different probe cards may interfere with each other, and the test conditions are difficult to maintain stable and consistent, affecting the accuracy of the test results. In addition, there is a lack of synchronous recording of the test parameters of each probe card, which is not conducive to subsequent quality analysis and problem tracing. Summary of the invention

[0004] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a probe card fully automatic testing system and testing method to solve the technical defects existing in the prior art.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] A probe card fully automatic testing system, comprising:

[0007] A test box, wherein a conveying rack is fixedly arranged inside the test box, and the left and right sides of the conveying rack penetrate the left and right sides of the test box, and a discharging rack is also fixedly arranged at the rear of the inside of the test box, and one side of the discharging rack extends to the rear of the test box;

[0008] A fixed frame, a fixed frame is fixedly provided on the left side of the inner wall of the test box, and a test frame is rotatably provided on the right side inside the fixed frame, a loading frame is fixedly provided on the right side of the test frame, a connecting frame is also fixedly provided on the right side of the inner wall of the test box, and the right side of the loading frame is rotatably connected to the inside of the connecting frame, a plurality of loading components are provided on the surface of the loading frame, a driving motor is fixedly provided on the left side of the fixed frame, and the output shaft of the driving motor is fixedly connected to the inside of the test frame;

[0009] The feeding assembly includes a movable frame and a sliding frame, a plurality of servo electric cylinders 1 are fixedly arranged inside the feeding frame, and the driving ends of the plurality of servo electric cylinders 1 are fixedly arranged with a movable frame, an electric slide 1 is fixedly arranged inside the movable frame, and a sliding frame is slidably arranged on the top of the electric slide 1, a positioning groove is arranged inside the sliding frame, and positioning clamps are movably arranged on both sides of the positioning groove through micro electric cylinders;

[0010] A support frame is fixedly arranged on the right side of the test box and below the loading frame, a pretreatment component is arranged on one side of the top of the support frame, and a unloading component is arranged on the other side of the top of the support frame.

[0011] Furthermore, a feed conveyor belt is rotatably arranged at the lower part of the conveying frame, and a material-holding sponge is fixedly arranged on the surface of the feed conveyor belt. A feed limit groove is also arranged inside the conveying frame, and a plurality of material guide balls are rotatably arranged on both sides of the inner wall of the feed limit groove.

[0012] Furthermore, the pretreatment component includes a pretreatment frame, an electric slide 2 is fixedly arranged in front of the top of the support frame, and the pretreatment frame is slidably arranged on the top of the electric slide 2, a pretreatment chamber is arranged inside the pretreatment frame, and capacitive sensors are arranged on the front and back sides of the pretreatment chamber, air ducts are arranged on the left and right sides of the pretreatment frame, and the interiors of the two air ducts are connected to the interior of the pretreatment chamber.

[0013] Furthermore, the unloading assembly includes an unloading rack, and two electric slides three are fixedly arranged on the rear side of the top of the support frame, and the unloading rack is slidably arranged on the top of the two electric slides three, and the interior of the unloading rack is provided with an unloading groove, and the front and rear sides of the unloading groove are provided with a plurality of limit clamps through the movably arranged micro electric cylinders.

[0014] Furthermore, a discharging conveyor belt is rotatably arranged inside the discharging rack, and a plurality of workpiece placement racks are fixedly arranged on the surface of the discharging conveyor belt.

[0015] Furthermore, a plurality of test cavities are arranged inside the test frame, and a movable closing plate is movably arranged on the right side of each test cavity through a micro electric cylinder, a servo electric cylinder 2 is also fixedly arranged on the outer peripheral surface of the test frame, and test equipment is movably arranged inside the plurality of test cavities, and the driving ends of the plurality of servo electric cylinders 2 are respectively fixedly connected to one side of the plurality of test equipment.

[0016] Furthermore, a fully automatic test method for a probe card comprises the following steps:

[0017] Step 1: When loading the probe card, the test area of ​​the probe card is flexibly clamped by the clamping sponge, the probe card is automatically conveyed and controlled by the rotation of the feed conveyor belt, and the probe card is vertically limited by the feed limit groove to convey the probe card to the bottom of the loading rack;

[0018] Step 2: When performing the probe card loading operation, the movable frame is controlled to move downward by the driving end of the servo electric cylinder 1 in the lowest loading assembly on the loading frame until the top of the probe card extends into the positioning groove inside the sliding frame, and the top of the probe card is positioned and clamped by the positioning clamps on both sides of the positioning groove, and then the driving end of the servo electric cylinder 1 is controlled to reset;

[0019] Step 3: Drive the pretreatment rack to slide to the bottom of the probe card through the electric slide table 2, and use the driving end of the servo electric cylinder 1 to control the test area of ​​the probe card to descend to the inside of the pretreatment chamber. At this time, clean air is introduced into the inside of the pretreatment chamber through the air duct on the left, and the dust in the test area of ​​the probe card is removed by the clean air. The air is discharged through the air duct on the right to realize the circulation of air in the pretreatment chamber, and then the capacitive sensors set on the front and back sides of the pretreatment chamber are used to detect the surface quality of the test area of ​​the probe card. The probe cards that fail the surface quality test are directly sent out without subsequent test operations.

[0020] Step 4: For probe cards that fail the surface quality inspection, the unloading rack is controlled to move to the bottom of the probe card, the positioning clamp inside the sliding rack releases the clamping of the top of the probe card, and the limit clamp inside the unloading slot is used to clamp the surface of the probe card. Then, the unloading rack is controlled to move to the top of the unloading rack, and the probe card is sent from the inside of the conveying rack 27 to the inside of the workpiece placement rack, and the workpiece placement rack is driven by the unloading conveyor belt for transportation;

[0021] Step 5. When testing the probe card, control the sliding frame to slide to the left through the electric slide 1 until the sliding frame slides into the test cavity as a whole. At this time, control the micro-electric cylinder to drive the movable closing plate to move downward, and use the movable closing plate and the sliding frame to close the right side of the test cavity. Then use the driving end of the servo electric cylinder 2 to control the test interface on the test equipment to connect with the test area of ​​the probe card, and synchronously record the test data of the probe card. At this point, complete one loading operation of the probe card, use the output shaft of the drive motor to control the rotation of the test frame, rotate the next set of loading components on the loading frame to the bottom, and continue the loading operation of the probe card.

[0022] The beneficial effects achieved by the present invention using the above structure are as follows:

[0023] 1. The fully automatic probe card test system proposed in the present invention does not require any human assistance at all, which not only saves labor costs, but also avoids operational errors and instability caused by human factors. Through the cooperation of multiple loading components on the loading rack and the drive motor, the loading process of the probe card is continuous. Once a probe card enters the test rack, the next probe card can be quickly prepared. This continuous loading method greatly shortens the test interval time and improves the utilization rate of the test equipment. Compared with the time that may be required to wait for manual loading in traditional tests, this time is now almost negligible; in addition, by synchronously recording the test parameters of each probe card, detailed data support is provided for subsequent quality analysis. If a problem is found in a batch of probe cards in subsequent use, these records can be quickly traced back to the specific problem in the test process. By checking the body parameters and finding the root cause of the problem, manufacturers can adjust the production process and quality control measures in time to improve the overall quality of the product. By checking the surface quality of the probe card before testing, defective probe cards can be removed in time to avoid invalid testing of these defective products. For mass-produced probe cards, this pre-screening method can greatly improve the overall test efficiency, which not only saves test time, but also improves the utilization rate of test resources, reduces the operating time and energy consumption of the equipment, and reduces the operating cost. The blowing treatment of the test area of ​​the probe card by the pretreatment component can effectively remove dust and other impurities. The clean test area can ensure good contact between the probe and the chip pin, thereby ensuring the accurate transmission of the test signal, avoiding inaccurate test results due to poor contact, and improving the reliability of the test.

[0024] 2. In the present invention, a clamping sponge is arranged on the surface of the feed conveyor belt to clamp the test area of ​​the probe card. This flexible clamping method can effectively avoid damage to the surface of the probe card. The clamping sponge can adaptively adjust the clamping force according to the shape and size of the probe card to ensure that the probe card is firmly fixed during the transportation process to prevent it from shifting or falling. In addition, guide balls are arranged on both sides of the feed limit groove. The guide balls can effectively reduce the friction of the probe card surface during the transportation process. In the traditional transportation method, the friction between the probe card and the conveying groove may cause scratches on the probe card surface or make the conveying process not smooth enough. The presence of the guide balls enables the probe card to pass through the conveying frame smoothly under lower friction, which plays a good protective role on the probe card and extends the service life of the probe card. At the same time, it also helps to maintain the flatness of the probe card surface and ensure the test accuracy.

[0025] 3. In the present invention, several test cavities are arranged inside the test frame to provide an independent test space for the probe card, which can effectively avoid mutual interference during the testing process of different probe cards. During the testing process, the electromagnetic environment, temperature changes and other factors in each test cavity can be controlled relatively independently, ensuring that the test conditions of each probe card are more stable and consistent, thereby improving the accuracy of the test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic diagram of the structure of a probe card fully automatic testing system according to an embodiment of the present invention;

[0027] Figure 2 It is a schematic diagram of the structure of the conveying frame and the discharging frame according to an embodiment of the present invention;

[0028] Figure 3 A schematic diagram of the internal structure of a test box according to an embodiment of the present invention;

[0029] Figure 4 It is a schematic diagram of the structure of the loading rack, the movable rack and the sliding rack according to an embodiment of the present invention;

[0030] Figure 5 A schematic diagram of the internal structure of a conveyor frame according to an embodiment of the present invention;

[0031] Figure 6 It is a schematic diagram of the support frame and the discharge frame structure of an embodiment of the present invention;

[0032] Figure 7 It is a schematic diagram of the structure of the fixing frame, the testing frame and the loading frame according to an embodiment of the present invention.

[0033] In the figure, 1. test box; 2. conveyor frame; 3. feed conveyor belt; 4. material clamping sponge; 5. guide ball; 6. feed limit slot; 7. fixed frame; 8. test frame; 9. loading rack; 10. connecting frame; 11. servo electric cylinder 1; 12. movable frame; 13. electric slide 1; 14. sliding frame; 15. positioning slot; 16. positioning splint; 17. test chamber; 18. movable closing plate; 19. servo electric cylinder 2; 20. drive motor; 21. support frame; 22. electric slide 2; 23. pretreatment frame; 24. pretreatment chamber; 25. electric slide 3; 26. unloading rack; 27. unloading slot; 28. limit splint; 29. ​​unloading rack; 30. unloading conveyor belt; 31. workpiece placement rack; 32. loading slot. DETAILED DESCRIPTION

[0034] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments.

[0035] Embodiment 1:

[0036] like Figures 1 to 7 As shown, a probe card fully automatic testing system comprises:

[0037] A test box 1, wherein a conveyor rack 2 is fixedly arranged inside the test box 1, and the left and right sides of the conveyor rack 2 pass through the left and right sides of the test box 1, and a discharge rack 29 is also fixedly arranged at the rear of the test box 1, and one side of the discharge rack 29 extends to the rear of the test box 1; it should be noted that the probe card is automatically fed into the test box 1 through the conveyor rack 2, and the probe card is automatically tested in cooperation with the test structure inside the test box 1, and finally the probe card after the test is sent out through the discharge rack 29, and the entire probe card test processing process does not require manual auxiliary operation, and is controlled by an automated test system throughout the process, and the test parameters of each probe card are synchronously recorded, and before the probe card is tested, the surface quality of the probe card is pre-checked, and the probe card with surface defects is directly rejected, thereby reducing invalid test processing of probe cards with poor surface quality and improving the test processing efficiency of the probe card.

[0038] A fixed frame 7 is fixedly provided on the left side of the inner wall of the test box 1, and a test frame 8 is rotatably provided on the right side of the fixed frame 7. A loading frame 9 is fixedly provided on the right side of the test frame 8. A connecting frame 10 is also fixedly provided on the right side of the inner wall of the test box 1, and the right side of the loading frame 9 is rotatably connected to the inside of the connecting frame 10. A plurality of loading components are provided on the surface of the loading frame 9. A driving motor 20 is fixedly provided on the left side of the fixed frame 7, and the output shaft of the driving motor 20 is fixedly connected to the inside of the test frame 8. It should be noted that when the conveying frame 2 is used to transfer the test frame 8 to the test box 1, the test frame 8 is fixedly provided with a loading frame 9. After the probe card to be tested is transported to the bottom of the loading rack 9, the probe card is continuously and automatically loaded by using several loading components provided on the loading rack 9, and then the probe card is sent to the interior of the test frame 8 for automatic testing. The test frame 8 is controlled to rotate inside the fixed frame 7 by the output shaft of the driving motor 20, and the loading rack 9 is driven to rotate synchronously by the test frame 8, and the several loading components on the loading rack 9 are used to continuously load the probe card inside the conveying frame 2, thereby greatly improving the efficiency of the fully automatic test of the probe card.

[0039] It should be noted that in this application, the directions indicated by the directional indicators such as left, right, front, and back are all in the form of Figure 1-3 The fully automatic probe card test system in the Figure 1 As shown, the left and right sides of the conveyor frame 2 pass through the left and right sides of the test box 1. Figure 3 As shown, the fixing frame 7 is fixedly arranged on the left side of the inner wall of the test box 1. Figure 2 for Figure 1 The azimuth diagram of horizontal circumferential rotation of 180° is to clearly show the discharge rack 29 arranged at the rear of the test box 1; this azimuth description is only for the convenience of technical personnel in this field to understand the technical solution of the present invention, and does not constitute a limitation on the protection scope of the invention. In other embodiments, the left, right, front, rear and other directions can be replaced accordingly according to actual conditions, such as mirror replacement.

[0040] A support frame 21 is also fixedly arranged on the right side of the inside of the test box 1 and directly below the loading frame 9. A pre-treatment component is arranged in front of the top of the support frame 21, and a unloading component is arranged behind the top of the support frame 21. It should be noted that after the probe card is taken out from the inside of the conveyor frame 2 by the loading component, the probe card is first lifted to a high position, and then the test area of ​​the probe card is blown with air in conjunction with the pre-treatment component in front of the top of the support frame 21 to clean the dust in the test area of ​​the probe card, thereby ensuring the cleanliness of the test area of ​​the probe card and avoiding affecting the contact effect between the probe and the chip pins. This causes inaccurate test signal transmission or poor contact. In addition, after the surface cleaning of the probe card test area is completed, the appearance quality of the probe card test area is inspected, and the probe cards with appearance quality defects are directly sent out through the unloading assembly, thereby reducing the invalid detection operations of the probe card automatic test device. By pre-detecting and screening out the probe cards with surface quality defects, on the one hand, the test efficiency of batch probe cards can be improved, and on the other hand, the consumption required for testing probe cards with surface quality defects can be reduced, thereby greatly reducing the operating energy consumption of the probe card automatic test system.

[0041] In a specific embodiment, the probe card fully automatic test system proposed in the present invention does not require any human assistance at all, which not only saves labor costs, but also avoids operational errors and instability caused by human factors. Through the cooperation of multiple loading components on the loading rack 9 and the drive motor 20, the loading process of the probe card is continuous. Once a probe card enters the test rack 8, the next probe card can be quickly prepared. This continuous loading method greatly shortens the test interval time and improves the utilization rate of the test equipment. Compared with the time that may be required to wait for manual loading in traditional tests, this time is now almost negligible. In addition, by synchronously recording the test parameters of each probe card, detailed data support is provided for subsequent quality analysis. If problems are found in a batch of probe cards in subsequent use, these records can be quickly traced back to By identifying the specific parameters in the test process and finding the root cause of the problem, manufacturers can adjust the production process and quality control measures in a timely manner to improve the overall quality of the product. By checking the surface quality of the probe card before testing, defective probe cards can be removed in time to avoid ineffective testing of these defective products. For mass-produced probe cards, this pre-screening method can greatly improve the overall test efficiency, which not only saves test time, but also improves the utilization rate of test resources, reduces equipment operation time and energy consumption, and reduces operating costs. The pre-treatment component can effectively remove dust and other impurities by blowing the test area of ​​the probe card. A clean test area can ensure good contact between the probe and the chip pin, thereby ensuring accurate transmission of the test signal, avoiding inaccurate test results due to poor contact, and improving the reliability of the test.

[0042] Embodiment 2:

[0043] Furthermore, a feed conveyor belt 3 is rotatably arranged at the lower part of the conveyor frame 2, and a material-holding sponge 4 is fixedly arranged on the surface of the feed conveyor belt 3. A feed limit groove 6 is also arranged inside the conveyor frame 2, and a plurality of guide balls 5 are rotatably arranged on both sides of the inner wall of the feed limit groove 6.

[0044] It should be noted that when the probe card is loaded, the test area of ​​the probe card is flexibly clamped by the card sponge 4, the rotation of the feed conveyor belt 3 is used to control the automatic transportation of the probe card, the feed limit groove 6 is used to vertically limit the probe card, and at the same time, a number of guide balls 5 arranged on both sides of the inner wall of the feed limit groove 6 are used to reduce the friction of the probe card surface during transportation, thereby effectively protecting the probe card.

[0045] Furthermore, the loading assembly includes a movable frame 12 and a sliding frame 14, a plurality of servo electric cylinders 11 are fixedly installed inside the loading frame 9, and the driving ends of the plurality of servo electric cylinders 11 are fixedly installed with the movable frame 12, an electric slide 13 is fixedly installed inside the movable frame 12, and a sliding frame 14 is slidably installed on the top of the electric slide 13, a positioning groove 15 is installed inside the sliding frame 14, and positioning clamps 16 are movably installed on both sides of the positioning groove 15 through micro electric cylinders.

[0046] It should be noted that when the probe card is being loaded, the movable frame 12 is controlled to move downward by the driving end of the servo electric cylinder 11 in the lowest loading assembly on the loading rack 9 until the top of the probe card extends into the positioning groove 15 inside the sliding rack 14, and the top of the probe card is positioned and clamped by the positioning clamps 16 on both sides of the positioning groove 15, and then the driving end of the servo electric cylinder 11 is controlled to reset. At this time, the pretreatment assembly is used to clean and inspect the surface quality of the test area of ​​the probe card clamped on the sliding rack 14. For the probe cards whose surface quality meets the requirements, the sliding rack 14 is sent as a whole into the interior of the test rack 8 through the electric slide 13 for the probe card testing operation. At this point, one loading operation of the probe card is completed, and the test rack 8 is controlled to rotate by the output shaft of the driving motor 20, and the next group of loading assemblies on the loading rack 9 is rotated to the bottom, and the loading operation of the probe card is continued to ensure the continuity of the probe card loading.

[0047] In a specific embodiment, the present invention provides a material clamping sponge 4 on the surface of the feed conveyor belt 3 to clamp the test area of ​​the probe card. This flexible clamping method can effectively avoid damage to the surface of the probe card. The material clamping sponge 4 can adaptively adjust the clamping force according to the shape and size of the probe card to ensure that the probe card is firmly fixed during the transportation process to prevent it from shifting or falling. In addition, material guide balls 5 are provided on both sides of the feed limit groove 6. The material guide balls 5 can effectively reduce the friction of the probe card surface during the transportation process. In the traditional transportation method, the friction between the probe card and the conveying groove may cause scratches on the probe card surface or make the conveying process not smooth enough. The presence of the material guide balls 5 enables the probe card to pass through the conveying frame 2 smoothly under lower friction, which plays a good protective role on the probe card and extends the service life of the probe card. At the same time, it also helps to maintain the flatness of the probe card surface and ensure the test accuracy.

[0048] The positioning clamps 16 on both sides of the positioning groove 15 are movably set by a micro-electric cylinder, so as to position and clamp the top of the probe card. This clamping method can be flexibly adjusted according to the actual size of the probe card to ensure that probe cards of different specifications can be firmly clamped. At the same time, precise positioning and stable clamping are helpful to keep the position of the probe card stable during subsequent cleaning, inspection and testing operations, and avoid affecting the accuracy of the operation due to the shaking of the probe card; at the same time, the output shaft of the drive motor 20 is used to control the rotation of the test frame 8, and the next group of loading components on the loading frame 9 is rotated to the bottom to continue the loading operation of the probe card. This cyclic loading mechanism ensures the continuity of the probe card loading, and can continuously provide the probe card to be tested for the test process. In the automated test system, through the continuous loading of the probe card, the resources of the test equipment can be fully utilized, the idle time of the equipment can be reduced, and the production efficiency of the entire system can be improved.

[0049] Embodiment 3:

[0050] Furthermore, the pretreatment component includes a pretreatment rack 23, an electric slide 22 is fixedly arranged in front of the top of the support frame 21, and the pretreatment rack 23 is slidably arranged on the top of the electric slide 22, a pretreatment chamber 24 is arranged inside the pretreatment rack 23, and capacitive sensors are arranged on the front and rear sides of the pretreatment chamber 24, air ducts are arranged on the left and right sides of the pretreatment rack 23, and the interiors of the two air ducts are connected to the interior of the pretreatment chamber 24; it should be noted that after the top of the probe card is clamped and lifted, the pretreatment rack 23 is driven by the electric slide 22 to slide to the probe card Directly below, the driving end of the servo electric cylinder 11 is used to control the test area of ​​the probe card to descend to the inside of the pretreatment chamber 24. At this time, clean air is introduced into the inside of the pretreatment chamber 24 through the air duct on the left, and the clean air is used to remove the dust in the test area of ​​the probe card. The air is discharged through the air duct on the right to realize the circulation of air in the pretreatment chamber 24, and then the capacitive sensors arranged on the front and back sides of the pretreatment chamber 24 are used to detect the surface quality of the test area of ​​the probe card. The probe cards that fail the surface quality test are directly sent out, and no subsequent test operations are performed.

[0051] Further, the material unloading assembly includes a material unloading rack 26, two electric slides 25 are fixedly arranged on the rear side of the top of the support frame 21, and the top of the two electric slides 25 is slidably provided with a material unloading rack 26, a material unloading slot 27 is arranged inside the material unloading rack 26, and a plurality of limit clamps 28 are movably arranged on the front and rear sides of the material unloading slot 27 through a micro electric cylinder;

[0052] A discharging conveyor belt 30 is rotatably arranged inside the discharging rack 29, and a plurality of workpiece placement racks 31 are fixedly arranged on the surface of the discharging conveyor belt 30, wherein a plurality of workpiece placement racks 31 are also provided with material blocking sponges 4 inside, and the material blocking sponges 4 are used to protect the probe card test area after the test is completed.

[0053] It should be noted that, for probe cards that fail the surface quality inspection, the unloading rack 26 is controlled to move to the bottom of the probe card, the positioning clamp 16 inside the sliding rack 14 releases the clamp on the top of the probe card, and the limit clamp 28 inside the unloading slot 27 is used to clamp the surface of the probe card. Then, the unloading rack 26 is controlled to move to above the unloading rack 29, and the probe card is sent from the inside of the conveyor rack 27 to the inside of the workpiece placement rack 31, and the workpiece placement rack 31 is driven by the unloading conveyor belt 30 for transportation, thereby realizing the automatic unloading operation of the probe card.

[0054] Furthermore, a plurality of test chambers 17 are provided inside the test frame 8, and a movable closing plate 18 is movably provided on the right side of each test chamber 17 through a micro-electric cylinder, and a servo electric cylinder 2 19 is fixedly provided on the outer peripheral surface of the test frame 8, and test equipment is movably provided inside the plurality of test chambers 17, and the driving ends of the plurality of servo electric cylinders 2 19 are respectively fixedly connected to one side of the plurality of test equipment;

[0055] It should be noted that when testing the probe card, the sliding frame 14 is controlled to slide to the left through the electric slide 13 until the sliding frame 14 slides into the interior of the test cavity 17 as a whole. At this time, the micro-electric cylinder is controlled to drive the movable closing plate 18 to move downward, and the movable closing plate 18 and the sliding frame 14 are used to close the right side of the test cavity 17. The driving end of the servo electric cylinder 2 19 is then used to control the test interface on the test equipment to connect with the test area of ​​the probe card, and the test data of the probe card is synchronously recorded.

[0056] In a specific embodiment, the present invention provides an independent testing space for the probe card by setting up a plurality of test cavities 17 inside the test frame 8, which can effectively avoid mutual interference during the testing process of different probe cards. During the testing process, the electromagnetic environment, temperature changes and other factors in each test cavity 17 can be controlled relatively independently, ensuring that the testing conditions of each probe card are more stable and consistent, thereby improving the accuracy of the test results.

[0057] Embodiment 4:

[0058] Specifically, this embodiment discloses a probe card fully automatic testing method, which is applied to a probe card fully automatic testing system in the above embodiment, and includes the following steps:

[0059] Step 1: When loading the probe card, the test area of ​​the probe card is flexibly clamped by the clamping sponge 4, the probe card is automatically conveyed and controlled by the rotation of the feeding conveyor belt 3, and the probe card is vertically limited by the feeding limit groove 6 to convey the probe card to the bottom of the loading rack 9;

[0060] Step 2: When the probe card is being loaded, the movable frame 12 is controlled to move downward by the driving end of the servo electric cylinder 11 in the lowest loading assembly on the loading frame 9 until the top of the probe card is inserted into the positioning groove 15 inside the sliding frame 14, and the top of the probe card is positioned and clamped by the positioning clamps 16 on both sides of the positioning groove 15, and then the driving end of the servo electric cylinder 11 is controlled to reset;

[0061] Step 3: Drive the pretreatment rack 23 to slide to the bottom of the probe card through the electric slide 22, and use the driving end of the servo electric cylinder 11 to control the test area of ​​the probe card to descend to the inside of the pretreatment chamber 24. At this time, clean air is introduced into the pretreatment chamber 24 through the air duct on the left, and the dust in the test area of ​​the probe card is removed by the clean air. The air is discharged through the air duct on the right to realize the circulation of air in the pretreatment chamber 24. Then, the capacitive sensors arranged on the front and back sides of the pretreatment chamber 24 are used to detect the surface quality of the test area of ​​the probe card. The probe cards that fail the surface quality detection are directly sent out without subsequent testing operations.

[0062] Step 4: For probe cards that fail the surface quality inspection, the unloading rack 26 is controlled to move to the bottom of the probe card, the positioning clamp 16 inside the sliding rack 14 releases the clamping of the top of the probe card, and the limiting clamp 28 inside the unloading slot 27 is used to clamp the surface of the probe card. Then, the unloading rack 26 is controlled to move to the top of the unloading rack 29, and the probe card is sent from the inside of the conveying rack 27 to the inside of the workpiece placement rack 31, and the workpiece placement rack 31 is driven by the unloading conveyor belt 30 for transportation;

[0063] Step 5. When testing the probe card, the electric slide 13 is used to control the sliding frame 14 to slide to the left until the sliding frame 14 slides into the test cavity 17 as a whole. At this time, the micro-electric cylinder is controlled to drive the movable closing plate 18 to move downward, and the movable closing plate 18 and the sliding frame 14 are used to close the right side of the test cavity 17. The driving end of the servo electric cylinder 2 19 is then used to control the test interface on the test equipment to connect with the test area of ​​the probe card, and the test data of the probe card is recorded synchronously. At this point, a loading operation of the probe card is completed, and the output shaft of the drive motor 20 is used to control the test frame 8 to rotate, and the next group of loading components on the loading frame 9 is rotated to the bottom, and the loading operation of the probe card continues.

[0064] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0065] The above shows and describes the basic principles, main features and advantages of the present invention. The embodiments provided are exemplary preferred embodiments, rather than limiting the present application. The scope of the present invention is defined by the appended claims rather than the above description. Those skilled in the art can modify or replace the technical solutions described in the above embodiments. Any modification, equivalent replacement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A probe card fully automatic test system, characterized in that: include: A test box (1), wherein a conveying frame (2) is fixedly arranged inside the test box (1), and the left and right sides of the conveying frame (2) penetrate the left and right sides of the test box (1); a discharging frame (29) is also fixedly arranged at the rear of the inside of the test box (1), and one side of the discharging frame (29) extends to the rear of the test box (1); A fixed frame (7), wherein the left side of the inner wall of the test box (1) is fixedly provided with the fixed frame (7), and the right side of the interior of the fixed frame (7) is rotatably provided with a test frame (8), a loading frame (9) is fixedly provided on the right side of the test frame (8), a connecting frame (10) is also fixedly provided on the right side of the inner wall of the test box (1), and the right side of the loading frame (9) is rotatably connected to the inside of the connecting frame (10), a plurality of loading components are provided on the surface of the loading frame (9), a driving motor (20) is fixedly provided on the left side of the fixed frame (7), and the output shaft of the driving motor (20) is fixedly connected to the inside of the test frame (8); The feeding assembly comprises a movable frame (12) and a sliding frame (14); a plurality of servo electric cylinders (11) are fixedly arranged inside the feeding frame (9); the driving ends of the plurality of servo electric cylinders (11) are fixedly arranged with the movable frame (12); an electric slide (13) is fixedly arranged inside the movable frame (12); a sliding frame (14) is slidably arranged on the top of the electric slide (13); a positioning groove (15) is arranged inside the sliding frame (14); and positioning clamps (16) are movably arranged on both sides of the positioning groove (15) via micro electric cylinders; A support frame (21) is also fixedly arranged on the right side of the interior of the test box (1) and below the loading frame (9); a pre-treatment component is arranged on one side of the top of the support frame (21), and a unloading component is arranged on the other side of the top of the support frame (21).

2. A probe card fully automatic test system according to claim 1, characterized in that: A feed conveyor belt (3) is rotatably arranged at the lower part of the conveyor frame (2), and a material-holding sponge (4) is fixedly arranged on the surface of the feed conveyor belt (3). A feed limit groove (6) is also arranged inside the conveyor frame (2), and a plurality of material guide balls (5) are rotatably arranged on both sides of the inner wall of the feed limit groove (6).

3. The probe card fully automatic test system according to claim 1, characterized in that: The pretreatment component comprises a pretreatment frame (23), an electric slide table 2 (22) is fixedly arranged in front of the top of the support frame (21), and the pretreatment frame (23) is slidably arranged on the top of the electric slide table 2 (22), a pretreatment chamber (24) is arranged inside the pretreatment frame (23), and capacitive sensors are arranged on the front and rear sides of the pretreatment chamber (24), and air guide tubes are arranged on the left and right sides of the pretreatment frame (23), and the interiors of the two air guide tubes are connected to the interior of the pretreatment chamber (24).

4. The probe card fully automatic test system according to claim 1, characterized in that: The material unloading component comprises a material unloading rack (26), two electric slides (25) are fixedly arranged on the rear side of the top of the support frame (21), and the top of the two electric slides (25) is slidably provided with a material unloading rack (26), a material unloading groove (27) is arranged inside the material unloading rack (26), and a plurality of limit clamps (28) are movably arranged on the front and rear sides of the material unloading groove (27) through micro electric cylinders.

5. The probe card fully automatic test system according to claim 1, characterized in that: A discharging conveyor belt (30) is rotatably arranged inside the discharging rack (29), and a plurality of workpiece placement racks (31) are fixedly arranged on the surface of the discharging conveyor belt (30).

6. The probe card fully automatic test system according to claim 1, characterized in that: The test frame (8) is provided with a plurality of test chambers (17) inside, and a movable closing plate (18) is movably provided on the right side inside each test chamber (17) via a micro electric cylinder, and a servo electric cylinder 2 (19) is fixedly provided on the outer peripheral surface of the test frame (8), and test equipment is movably provided inside the plurality of test chambers (17), and the driving ends of the plurality of servo electric cylinders 2 (19) are respectively fixedly connected to one side of the plurality of test equipment.

7. A probe card fully automatic testing method, characterized in that: A probe card fully automatic test system applied to any one of claims 1 to 6, comprising the following steps: Step 1: When loading the probe card, the test area of ​​the probe card is flexibly clamped by the clamping sponge (4), the probe card is automatically conveyed and controlled by the rotation of the feeding conveyor belt (3), and the probe card is vertically limited by the feeding limit groove (6), so as to convey the probe card to the bottom of the loading rack (9); Step 2: When performing the probe card loading operation, the movable frame (12) is controlled to move downward by the driving end of the servo electric cylinder 1 (11) in the lowest loading assembly on the loading frame (9) until the top of the probe card extends into the positioning groove (15) inside the sliding frame (14), and the top of the probe card is positioned and clamped by the positioning clamps (16) on both sides of the positioning groove (15), and then the driving end of the servo electric cylinder 1 (11) is controlled to reset; Step 3: Use the electric slide 2 (22) to drive the pretreatment rack (23) to slide to the bottom of the probe card, and use the driving end of the servo electric cylinder 1 (11) to control the test area of ​​the probe card to descend to the inside of the pretreatment chamber (24). At this time, clean air is introduced into the inside of the pretreatment chamber (24) through the air duct on the left, and the dust in the test area of ​​the probe card is removed by the clean air. The air is discharged through the air duct on the right to achieve air circulation inside the pretreatment chamber (24). Then, the capacitive sensors arranged on the front and back sides of the pretreatment chamber (24) are used to detect the surface quality of the test area of ​​the probe card. Probe cards that fail the surface quality test are directly sent out without subsequent testing operations. Step 4: For probe cards that fail the surface quality test, the unloading rack (26) is controlled to move to the bottom of the probe card, the positioning clamp (16) inside the sliding rack (14) releases the clamp on the top of the probe card, and the limiting clamp (28) inside the unloading slot (27) is used to clamp the surface of the probe card. Then, the unloading rack (26) is controlled to move to the top of the unloading rack (29), and the probe card is sent from the inside of the conveying rack (27) to the inside of the workpiece placement rack (31), and the workpiece placement rack (31) is driven by the unloading conveyor belt (30) for transportation; Step 5. When testing the probe card, the electric slide 1 (13) is used to control the slide frame (14) to slide to the left until the slide frame (14) slides into the test cavity (17) as a whole. At this time, the micro-electric cylinder is controlled to drive the movable closing plate (18) to move downward, and the movable closing plate (18) and the slide frame (14) are used to close the right side of the test cavity (17). The drive end of the servo electric cylinder 2 (19) is then used to control the test interface on the test equipment to connect with the test area of ​​the probe card, and the test data of the probe card is recorded synchronously. At this point, a loading operation of the probe card is completed, and the output shaft of the drive motor (20) is used to control the test frame (8) to rotate, and the next group of loading components on the loading frame (9) is rotated to the bottom, and the loading operation of the probe card is continued.

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