A baking furnace used in the production of copper-clad ceramic substrates

Abstract

The present invention discloses a baking furnace applied to the production of copper-clad ceramic substrates, belonging to the technical field of baking furnaces, comprising a base plate, four legs fixedly connected to the base plate, an arc-shaped mounting plate fixedly connected to the legs, two channel steel brackets fixedly connected to the base plate, and an ethanol steam generator and a linkage water supply box fixedly connected to the two channel steel brackets. The present invention arranges a spiral heating resistor wire and a heating unit in the baking furnace, so that the heat source is distributed more evenly, which can ensure that the heat is effectively transferred to each corner, so that the temperature difference between the central area and the edge area is minimized, and by arranging a convection regulating mechanism, the airflow distribution in the baking furnace is more controllable, and the airflow can be more dispersed and stably covered in the baking furnace, and by arranging an ethanol steam generator and a linkage water supply box, the cooling rate can be controlled more safely, and the cooling rate and temperature uniformity can also be ensured.

Description

Technical Field

[0001] The invention belongs to the technical field of baking furnaces, and in particular relates to a baking furnace used for the production of copper-clad ceramic substrates. Background Art

[0002] In the manufacturing process of copper-clad ceramic substrates, the baking oven plays a vital role. It not only ensures the close bonding between materials, but also guarantees the quality and performance of the substrate through precise temperature control and a stable heating environment. This process step is essential to achieve high reliability and high efficiency of the product, and can meet the growing demand for precision components in the electronics industry. The operation of the baking oven must follow strict parameter settings to ensure that each production can achieve the expected results, while also taking into account energy efficiency and environmental protection requirements. In the entire manufacturing process, the baking process is one of the key factors that determine the final characteristics of the copper-clad ceramic substrate.

[0003] The existing baking furnaces for the production of copper-clad ceramic substrates still have the following shortcomings:

[0004] In the production process of copper-clad ceramic substrates, it is an effective method to remove stress by temperature cycling in a baking furnace. This method can reduce the internal stress caused by factors such as differences in thermal expansion coefficients between materials, mechanical stress or chemical reactions during processing, thereby improving the stability and reliability of the product. Temperature cycling stress relief is mainly based on the phenomenon that the residual stress inside the material changes with temperature. When the material is heated, the distance between atoms increases, which helps to relax the local high stress areas caused by plastic deformation or phase change; during the cooling process, the material is allowed to gradually return to a more uniform state. When the existing baking furnace realizes temperature cycling, new stress is generated due to the excessively fast heating rate. At the same time, due to the uneven and unreasonable distribution of heat-generating components, the temperature uniformity in the furnace is not good, which causes the materials in different areas to experience different degrees of thermal expansion, which will lead to local stress concentration and increase the risk of cracks, delamination or warping, especially at the edge of the substrate or at complex geometries. In addition, it may also lead to serious consequences such as failure of the copper-ceramic interface, degradation of solder or intermediate layer performance, and damage to the internal structure.

[0005] The cooling stage of the baking oven is a very important part of the stress removal process, but not all baking ovens can provide effective cooling solutions: although natural cooling is simple and easy, it takes a long time and it is difficult to ensure the consistency of the cooling rate; although forced air cooling can speed up the cooling speed, if the airflow distribution is unreasonable, it is easy to cause new stress concentration points. Summary of the invention

[0006] In order to overcome the above defects, the present invention provides a baking furnace used for the production of copper-clad ceramic substrates, which solves the problems in the prior art.

[0007] To achieve the above object, the present invention provides the following technical solution: a baking furnace used in the production of copper-clad ceramic substrates, comprising:

[0008] A base plate, wherein four legs are fixedly connected to the base plate, an arc-shaped mounting plate is fixedly connected to the legs, two channel steel brackets are fixedly connected to the base plate, and an ethanol steam generator and a linkage water supply tank are fixedly connected to the two channel steel brackets respectively;

[0009] A baking oven, the baking oven is fixedly connected between four arc-shaped mounting plates, an annular water supply belt is fixedly connected to the baking oven, a water inlet is provided on the annular water supply belt, a flow guide port is fixedly connected to the bottom of the baking oven, a No. 1 conical air port is connected to the bottom of the flow guide port, a three-way distribution valve is connected to the bottom of the No. 1 conical air port, a spiral heating resistance wire is provided on the inner wall of the baking oven, nine fixed blocks are fixedly connected to the inner wall of the baking oven, the fixed blocks are fixedly connected to the spiral heating resistance wire, three atomizing nozzles are fixedly connected to the fixed blocks, a connecting port is fixedly connected to the top of the flow guide port, a cross slot is provided on the connecting port, a convection regulating mechanism is provided on the inner bottom of the baking oven, the input end of the ethanol steam generator 5 is connected to the three-way distribution valve 11, and the three-way distribution valve 11 The hot air is introduced into the ethanol steam generator 5. The output end and the input end of the linkage water supply box 6 are both provided with a one-way valve 43. The one-way valve 43 on the output end of the linkage water supply box 6 is connected to the water inlet on the annular water supply belt 8 through a hose;

[0010] A combined material port, the combined material port is matched with a baking oven, the combined material port includes a convection port slidably connected to the baking oven, four fixed columns are fixedly connected to the convection port, conical sealing plates are fixedly connected to the four fixed columns, a three-way valve is connected to the conical sealing plate, four air outlet fans are arranged on the convection port, a connecting column is fixedly connected to the bottom of the convection port, a cross plug matching the cross slot is arranged at the bottom of the connecting column, the cross plug is slidably connected in the cross slot, a heating unit is arranged outside the connecting column, and multiple groups of material racks are fixedly connected to the outside of the heating unit, an output end of the three-way valve 18 is connected to an input end of the three-way distribution valve 11 through a hose, and the hot air in the baking oven 7 flows out through the three-way valve 18 and directly flows into the three-way distribution valve 11 again, thereby achieving a high temperature maintenance effect, and when the baking is completed, the three-way distribution valve 11 introduces the hot air into the ethanol steam generator 5 again, and heats the ethanol, thereby performing a cooling operation.

[0011] As a further solution of the present invention: the convection regulating mechanism includes four guide ports opened on the guide port, three guide plates are rotatably connected in the guide port, linkage ports are opened on both sides of the guide port, three worm gears are rotatably connected in the linkage port, the worm gear is coaxially fixedly connected to the guide plate on the corresponding side, an adjusting worm is rotatably connected at the top corresponding to the linkage port position in the guide port, the adjusting worm is meshed with the three worm gears on the corresponding side, a bevel gear is coaxially fixedly connected to one side of the adjusting worm, two adjacent bevel gears are meshed with each other, a dual-axis servo motor is fixedly connected to the top of the guide port, and two output ends of the dual-axis servo motor are coaxially fixedly connected to the two bevel gears on the corresponding side.

[0012] As a further solution of the present invention: four air inlet fans are arranged at the inner bottom of the guide port, and the air inlet fans and the air outlet fans are both provided with drive motors.

[0013] As a further solution of the present invention: a spiral heat-conducting pipe is arranged in the ethanol steam generator, a pressurizing cylinder is arranged in the ethanol steam generator, the spiral heat-conducting pipe is sleeved on the outside of the pressurizing cylinder and fixedly connected thereto, a telescopic rod and a compression spring are fixedly connected in the pressurizing cylinder, the compression spring is sleeved on the outside of the telescopic rod, a piston plate is fixedly connected to the output end of the telescopic rod, the piston plate abuts against the compression spring, a matching tooth plate is fixedly connected to the end of the piston plate away from the telescopic rod, the output end of the ethanol steam generator is arranged on the outer wall of the ethanol steam generator, the two ends of the spiral heat-conducting pipe are respectively connected to the output end and the input end of the ethanol steam generator, a matching gear is rotatably connected in the ethanol steam generator, the matching gear is meshed with the matching tooth plate, and a matching worm is coaxially fixedly connected to one side of the matching gear.

[0014] As a further solution of the present invention: a linkage shell is fixedly connected to one side of the linkage water supply tank, a matching worm wheel is rotatably connected inside the linkage shell, and the matching worm wheel is meshed with the matching worm.

[0015] As a further solution of the present invention: a threaded rod is rotatably connected in the linkage water supply box, the threaded rod is coaxially fixedly connected with the matching worm gear, a water pump piston is slidably connected in the linkage water supply box, the threaded rod passes through the water pump piston and is threadedly connected thereto.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention arranges a spiral heating resistor wire and a heating unit in the baking oven, so that the heat source distribution is more uniform, which can ensure that the heat is effectively transferred to every corner, so that the temperature difference between the central area and the edge area is minimized. In addition, by arranging an air outlet fan on the convection port and an air inlet fan in the guide port, the two can form strong convection in the baking oven, accelerate air circulation, and promote heat exchange. The guarantee of temperature uniformity can minimize the temperature gradient difference in the baking oven, reduce the risk of residual stress, and make the product performance more stable.

[0018] In order to make the strong convection environment formed by the air inlet fan and the air outlet fan controllable and avoid local overheating caused by direct blowing of a single wind direction, the present invention is provided with a convection regulating mechanism, which controls the angle of the guide plate through a dual-axis servo motor. This control method can make the airflow distribution in the baking oven more controllable, and the airflow can be more dispersed and stably covered in the baking oven.

[0019] When cooling the copper-clad ceramic substrate, the present invention sets an ethanol steam generator and a linked water supply box, and uses the heat in the baking furnace to heat ethanol. The relatively high thermal expansion coefficient of ethanol will cause it to expand rapidly in a high-temperature environment. The ethanol steam generator can provide power to the linked water supply box, and the linked water supply box can supply water to the atomizing nozzles. The atomizing nozzles are very evenly distributed in the baking furnace. By controlling the temperature of the cooling medium, the cooling rate can be controlled more safely to avoid stress accumulation caused by too fast cooling. At the same time, the cooling rate and temperature uniformity can also be guaranteed. In addition, the present invention uses ultrapure water as the cooling medium. After cooling, the strong convection formed by the air inlet fan and the air outlet fan can also quickly dry the residual water stains. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0021] Figure 2 It is a three-dimensional internal structure schematic diagram of the baking oven of the present invention;

[0022] Figure 3 It is a three-dimensional structural schematic diagram of the spiral heating resistance wire and the atomizing nozzle part of the present invention;

[0023] Figure 4 It is a three-dimensional structural schematic diagram of the heating unit and the material rack plate part of the present invention;

[0024] Figure 5 It is a schematic diagram of the three-dimensional structure of the diversion port of the present invention;

[0025] Figure 6 It is a schematic diagram of the three-dimensional internal structure of the ethanol vapor generator of the present invention;

[0026] Figure 7 It is a schematic diagram of the three-dimensional internal structure of the pressurized cylinder of the present invention;

[0027] Figure 8 It is a schematic diagram of the three-dimensional structure of the linkage type water supply box of the present invention;

[0028] Fig. 9 It is a schematic diagram of the three-dimensional internal structure of the linkage water supply box of the present invention.

[0029] In the figure: 1 base plate, 2 legs, 3 arc-shaped mounting plate, 4 channel steel bracket, 5 ethanol steam generator, 6 linkage water supply box, 7 baking oven, 8 annular water supply belt, 9 diversion port, 10 No. 1 conical air port, 11 three-way distribution valve, 12 spiral heating resistance wire, 13 fixing block, 14 atomizing nozzle, 15 connection port, 16 convection port, 17 conical sealing plate, 18 three-way valve, 19 air outlet fan, 20 connecting column, 21 cross plug, 22 heating unit, 23 material shelf, 24 guide plate, 25 worm gear, 26 adjusting worm, 27 bevel gear, 28 dual-axis servo motor, 29 air intake fan, 30 drive motor, 31 spiral heat pipe, 32 pressurizing cylinder, 33 telescopic rod, 34 compression spring, 35 piston plate, 36 matching tooth plate, 37 matching gear, 38 matching worm, 39 linkage housing, 40 matching worm gear, 41 threaded rod, 42 water pump piston, 43 one-way valve. DETAILED DESCRIPTION

[0030] The technical solution of the present invention is further described in detail below in conjunction with specific implementation methods.

[0031] like Figure 1-Figure 9 As shown, the present invention provides a technical solution:

[0032] A base plate 1, four legs 2 are fixedly connected to the base plate 1, an arc-shaped mounting plate 3 is fixedly connected to the legs 2, two channel steel brackets 4 are fixedly connected to the base plate 1, an ethanol steam generator 5 and a linkage water supply tank 6 are fixedly connected to the two channel steel brackets 4, and the channel steel brackets 4 can ensure the stability of the ethanol steam generator 5 and the linkage water supply tank 6;

[0033] The baking oven 7 is fixedly connected between the four arc-shaped mounting plates 3, and an annular water supply belt 8 is fixedly connected to the baking oven 7, and a water inlet is provided on the annular water supply belt 8. A diversion port 9 is fixedly connected to the bottom of the baking oven 7, and a No. 1 conical air port 10 is connected to the bottom of the diversion port 9, and a three-way distribution valve 11 is connected to the bottom of the No. 1 conical air port 10. A spiral heating resistance wire 12 is provided on the inner wall of the baking oven 7, and nine fixed blocks 13 are fixedly connected to the inner wall of the baking oven 7, and the fixed blocks 13 are connected to the spiral heating resistance wire 12. The resistance wire 12 is fixedly connected, and three atomizing nozzles 14 are fixedly connected to the fixing block 13. A connection port 15 is fixedly connected to the top of the guide port 9, and a cross slot is provided on the connection port 15. A convection regulating mechanism is provided at the inner bottom of the baking oven 7. The legs 2 cooperate with the arc-shaped mounting plate 3 to ensure the stability of the baking oven 7. By arranging the spiral heating resistance wire 12 in the baking oven 7, the heat source is distributed more evenly, which can ensure that the heat is effectively transferred to every corner, so that the temperature difference between the central area and the edge area is minimized;

[0034] A combined material port is provided in conjunction with the baking oven 7. The combined material port includes a convection port 16 which is slidably connected to the baking oven 7. Four fixing columns are fixedly connected to the convection port 16. A conical sealing plate 17 is fixedly connected to the four fixing columns. A three-way valve 18 is connected to the conical sealing plate 17. Four air outlet fans 19 are provided on the convection port 16. A connecting column 20 is fixedly connected to the bottom of the convection port 16. A cross plug 21 which matches the cross slot is provided at the bottom of the connecting column 20. The cross The plug 21 is slidably connected in the cross slot, and a heating unit 22 is arranged outside the connecting column 20. A plurality of material racks 23 are fixedly connected to the outside of the heating unit 22. The combined material port is detachable, so that the copper-clad ceramic substrate can be taken and placed. By matching the cross plug 21 with the cross slot, the assembly can be carried out more conveniently. The copper-clad ceramic substrate can be placed on the material rack 23. The bottom of the material rack 23 is hollowed out. The heating unit 22 cooperates with the spiral heating resistance wire 12 to make the heating efficiency better.

[0035] The convection regulating mechanism includes four guide ports opened on the guide port 9, three guide plates 24 are rotatably connected in the guide ports, linkage ports are opened on both sides of the guide ports, three worm gears 25 are rotatably connected in the linkage ports, the worm gears 25 are coaxially fixedly connected to the guide plates 24 on the corresponding side, and the top of the guide port 9 corresponding to the linkage port position is rotatably connected with an adjusting worm 26, the adjusting worm 26 and the three worm gears 25 on the corresponding side are meshed with each other, a bevel gear 27 is coaxially fixedly connected to one side of the adjusting worm 26, and two adjacent bevel gears 27 are meshed with each other, a double-axis servo motor 28 is fixedly connected to the top of the guide port 9, and two output ends of the double-axis servo motor 28 are coaxially fixedly connected to the two bevel gears 27 on the corresponding side, four air inlet fans 29 are arranged at the inner bottom of the guide port 9, and a driving motor 30 is arranged on the air inlet fan 29 and the air outlet fan 19, and the purpose of setting the convection regulating mechanism is to adjust the air generated by the air inlet fan 29 in the guide port 9 The airflow direction is driven by the dual-axis servo motor 28 to rotate the two bevel gears 27 on the corresponding side. Since the two adjacent bevel gears 27 are meshed with each other, the worm 26 can be adjusted to rotate. The rotation of the worm 26 will cause the worm wheel 25 meshed with it to rotate, so that the angle of the guide plate 24 in the guide port can be adjusted. The convection adjustment mechanism makes the airflow distribution in the baking oven 7 more controllable, and the airflow can be more dispersed and stably covered in the baking oven 7. The strong convection environment formed by the air inlet fan 29 and the air outlet fan 19 is controllable, which can avoid local overheating caused by direct blowing from a single wind direction. In addition, by arranging the air outlet fan 19 on the convection port 16 and the air inlet fan 29 in the guide port 9, the two can form strong convection in the baking oven 7, accelerate air circulation, promote heat exchange, and ensure temperature uniformity. The temperature gradient difference in the baking oven 7 can be minimized, the risk of residual stress is reduced, and the product performance is more stable.

[0036] The input end of the ethanol steam generator 5 is connected to one input end of the three-way distribution valve 11, a spiral heat-conducting pipe 31 is arranged in the ethanol steam generator 5, a pressurizing cylinder 32 is arranged in the ethanol steam generator 5, the spiral heat-conducting pipe 31 is sleeved on the outside of the pressurizing cylinder 32 and is fixedly connected thereto, a telescopic rod 33 and a compression spring 34 are fixedly connected in the pressurizing cylinder 32, the compression spring 34 is sleeved on the outside of the telescopic rod 33, a piston plate 35 is fixedly connected to the output end of the telescopic rod 33, the piston plate 35 is abutted against the compression spring 34, a matching tooth plate 36 is fixedly connected to the end of the piston plate 35 away from the telescopic rod 33, and an output is provided on the outer wall of the ethanol steam generator 5. The two ends of the spiral heat-conducting pipe 31 are respectively connected to the output end and the input end of the ethanol steam generator 5. A matching gear 37 is rotatably connected in the ethanol steam generator 5. The matching gear 37 is meshed with the matching tooth plate 36. A matching worm 38 is coaxially fixedly connected to one side of the matching gear 37. The pressurizing cylinder 32 is filled with ethanol. When the spiral heat-conducting pipe 31 is filled with high-temperature gas, the ethanol expands due to heat, and the piston plate 35 will move toward the baking oven 7. The telescopic rod 33 and the compression spring 34 will be compressed, and the matching tooth plate 36 will move synchronously. The matching gear 37 meshing with the matching tooth plate 36 will rotate, and the matching worm 38 will rotate synchronously;

[0037] A linkage shell 39 is fixedly connected to one side of the linkage water supply box 6, and a matching worm gear 40 is rotatably connected in the linkage shell 39, and the matching worm gear 40 is meshed with the matching worm 38. A threaded rod 41 is rotatably connected in the linkage water supply box 6, and the threaded rod 41 is coaxially fixedly connected with the matching worm gear 40. A water pump piston 42 is slidably connected in the linkage water supply box 6, and the threaded rod 41 penetrates the water pump piston 42 and is threadedly connected thereto. A one-way valve 43 is provided on the output end and the input end of the linkage water supply box 6. The one-way valve 43 on the output end of the linkage water supply box 6 is connected to the water inlet on the annular water supply belt 8 through a hose. The rotation of the matching worm 38 will cause the matching worm gear 40 meshing therewith to rotate, so that the threaded rod 41 can rotate, and the water pump piston 42 threadedly connected thereto can move. It should be noted that ultrapure water must be used as the cooling medium in the linkage water supply box 6 to ensure that it will not have an adverse effect on the copper-clad ceramic substrate. The flow direction of the one-way valve 43 on the output end of the linkage water supply box 6 The direction is from the inside of the linkage water supply box 6 to the outside of the linkage water supply box 6. The flow direction of the one-way valve 43 on the input end of the linkage water supply box 6 is from the outside of the linkage water supply box 6 to the inside of the linkage water supply box 6. The negative pressure or positive pressure generated by the water pump piston 42 can correspondingly pump in or out the ultrapure water of the external water source, and the water supply of the annular water supply belt 8 can be guaranteed. The atomizing nozzle 14 can perform a cooling operation on the baking oven 7. It should be noted that during the initial cooling, the ultrapure water temperature needs to be controlled at a higher temperature. As the cooling process proceeds, the water temperature is continuously lowered. This can avoid the generation and accumulation of stress caused by a rapid drop in temperature. By controlling the temperature of the cooling medium, the cooling rate can be controlled more safely to avoid stress accumulation caused by too fast cooling. At the same time, the cooling rate and temperature uniformity can also be guaranteed. In addition, the present invention uses ultrapure water as a cooling medium. After cooling, the strong convection formed by the air inlet fan 29 and the air outlet fan 19 can also quickly dry the residual water stains.

[0038] One output end of the three-way valve 18 is connected to one input end of the three-way distribution valve 11 through a hose, and the other output end of the three-way valve 18 is connected to the output end of the ethanol vapor generator 5 through a hose. When the baking oven 7 is in use, it needs to go through preheating, high temperature maintenance and cooling stages. During the preheating stage, one input end of the three-way distribution valve 11 inhales external cold air, which is heated by the spiral heating resistor 12 and the heating unit 22 in the baking oven 7. After the preheating stage, the temperature in the baking oven 7 reaches the specified temperature, and this input end is closed. In order to improve the high temperature maintenance efficiency, the hot air in the baking oven 7 flows out through the three-way valve 18 and then directly flows into the three-way distribution valve 11 again, thereby achieving a high temperature maintenance effect. When the baking is completed, the three-way distribution valve 11 introduces the hot air into the ethanol vapor generator 5 again, and heats the ethanol, thereby performing a cooling operation.

[0039] The working principle of the present invention is:

[0040] The channel steel bracket 4 can ensure the stability of the ethanol steam generator 5 and the linkage water supply tank 6, and the legs 2 cooperate with the arc-shaped mounting plate 3 to ensure the stability of the baking oven 7. By arranging the spiral heating resistance wire 12 in the baking oven 7, the heat source is distributed more evenly, which can ensure that the heat is effectively transferred to every corner, so that the temperature difference between the central area and the edge area is minimized;

[0041] The combined material port is detachable, so that the copper-clad ceramic substrate can be easily taken in and out. The cross plug 21 can be matched with the cross slot to facilitate assembly. The copper-clad ceramic substrate can be placed on the material rack 23. The bottom of the material rack 23 is hollowed out. The heating unit 22 cooperates with the spiral heating resistance wire 12 to achieve better heating efficiency.

[0042] The purpose of setting the convection regulating mechanism is to adjust the airflow direction generated by the air inlet fan 29 in the guide port 9. The two bevel gears 27 on the corresponding side are driven to rotate by the dual-axis servo motor 28. Since the two adjacent bevel gears 27 are meshed with each other, the adjusting worm 26 can be rotated. The rotation of the adjusting worm 26 will cause the worm wheel 25 meshed with it to rotate, so that the angle of the guide plate 24 in the guide port can be adjusted. The convection regulating mechanism makes the airflow distribution in the baking oven 7 more controllable, and the airflow can be more dispersed and stably covered in the baking oven 7. The strong convection environment formed by the air inlet fan 29 and the air outlet fan 19 is controllable, which can avoid local overheating caused by direct blowing from a single wind direction. In addition, by arranging the air outlet fan 19 on the convection port 16 and the air inlet fan 29 in the guide port 9, the two can form strong convection in the baking oven 7, accelerate air circulation, promote heat exchange, and ensure temperature uniformity. The temperature gradient difference in the baking oven 7 can be minimized, the risk of residual stress is reduced, and the product performance is more stable;

[0043] The pressurizing cylinder 32 is filled with ethanol. When the spiral heat-conducting tube 31 is filled with high-temperature gas, the ethanol expands due to the heat, and the piston plate 35 will move to one side of the baking oven 7. The telescopic rod 33 and the compression spring 34 will be compressed, and the matching tooth plate 36 will move synchronously, and the matching gear 37 meshing with the matching tooth plate 36 will rotate, and the matching worm 38 will rotate synchronously. The rotation of the matching worm 38 will cause the matching worm wheel 40 meshing with it to rotate, so that the threaded rod 41 can rotate, and the water pump piston 42 threadedly connected to it can move. It should be noted that the cooling medium in the linked water supply box 6 must use ultrapure water to ensure that it will not have an adverse effect on the copper-clad ceramic substrate. The flow direction of the one-way valve 43 on the output end of the linked water supply box 6 is from the inside of the linked water supply box 6 to the outside of the linked water supply box 6. The one-way valve 43 on the input end of the linked water supply box 6 The flow direction is from the outside of the linked water supply box 6 to the inside of the linked water supply box 6. The negative pressure or positive pressure generated by the water pump piston 42 can correspondingly pump in or out the ultrapure water from the external water source, and the water supply of the annular water supply belt 8 can be guaranteed. The atomizing nozzle 14 can perform a cooling operation on the baking oven 7. It should be noted that during the initial cooling, the ultrapure water temperature needs to be controlled at a higher temperature. As the cooling process proceeds, the water temperature is continuously lowered. This can avoid the generation and accumulation of stress caused by a rapid drop in temperature. By controlling the temperature of the cooling medium, the cooling rate can be controlled more safely to avoid stress accumulation caused by too fast cooling. At the same time, the cooling rate and temperature uniformity can also be guaranteed. In addition, the present invention uses ultrapure water as a cooling medium. After cooling, the strong convection formed by the air inlet fan 29 and the air outlet fan 19 can also quickly dry the residual water stains.

[0044] When the baking oven 7 is in use, it needs to go through preheating, high temperature maintenance and cooling stages. During the preheating stage, an input end of the three-way distribution valve 11 inhales external cold air, which is heated by the spiral heating resistor 12 and the heating unit 22 in the baking oven 7. After the preheating stage, the temperature in the baking oven 7 reaches the specified temperature, and the input end is closed at this time. In order to improve the high temperature maintenance efficiency, an output end of the three-way valve 18 is connected to an input end of the three-way distribution valve 11 through a hose. At this time, after the hot air in the baking oven 7 flows out through the three-way valve 18, it directly flows into the three-way distribution valve 11 again, thereby achieving a high temperature maintenance effect. The input end of the ethanol steam generator 5 is connected to the three-way distribution valve 11. When the baking is completed, the three-way distribution valve 11 introduces hot air into the ethanol steam generator 5 and heats the ethanol, thereby performing a cooling operation.

[0045] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge scope of ordinary technicians in this field without departing from the purpose of the present invention.

Claims

1. A baking furnace used in the production of copper-clad ceramic substrates, characterized in that: include: A base plate (1), wherein four legs (2) are fixedly connected to the base plate (1), an arc-shaped mounting plate (3) is fixedly connected to the legs (2), two channel steel brackets (4) are fixedly connected to the base plate (1), and an ethanol steam generator (5) and a linkage water supply tank (6) are respectively fixedly connected to the two channel steel brackets (4); A baking oven (7), wherein the baking oven (7) is fixedly connected between four arc-shaped mounting plates (3), an annular water supply belt (8) is fixedly connected to the baking oven (7), a water inlet is provided on the annular water supply belt (8), a flow guide port (9) is fixedly connected to the bottom of the baking oven (7), a No. 1 conical air port (10) is provided at the bottom of the flow guide port (9), a three-way distribution valve (11) is provided at the bottom of the No. 1 conical air port (10), a spiral heating resistance wire (12) is provided on the inner wall of the baking oven (7), Nine fixing blocks (13) are fixedly connected to the inner wall of the baking oven (7), the fixing blocks (13) are fixedly connected to the spiral heating resistance wire (12), three atomizing nozzles (14) are fixedly connected to the fixing blocks (13), a connecting port (15) is fixedly connected to the top of the guide port (9), a cross slot is provided on the connecting port (15), a convection regulating mechanism is provided at the inner bottom of the baking oven (7), the input end of the ethanol steam generator (5) is connected to the three-way distribution valve (11), the three-way distribution valve (11) guides hot air into the ethanol steam generator (5), the output end and the input end of the linkage water supply box (6) are both provided with a one-way valve (43), and the one-way valve (43) on the output end of the linkage water supply box (6) is connected to the water inlet on the annular water supply belt (8) through a hose; A combined material port, the combined material port being arranged in conjunction with a baking oven (7), the combined material port comprising a convection port (16) slidably connected to the baking oven (7), the convection port (16) being fixedly connected to four fixing columns, the four fixing columns being fixedly connected to conical sealing plates (17), the conical sealing plates (17) being connected to a three-way valve (18), the convection port (16) being provided with four air outlet fans (19), the bottom of the convection port (16) being fixedly connected to a connecting column (20), the bottom of the connecting column (20) being provided with a cross plug (21) matching the cross slot, the The cross plug (21) is slidably connected in the cross slot, a heating unit (22) is arranged outside the connection column (20), and a plurality of material racks (23) are fixedly connected to the outside of the heating unit (22). An output end of the three-way valve (18) is connected to an input end of the three-way distribution valve (11) through a hose. After the hot air in the baking oven (7) flows out through the three-way valve (18), it directly flows into the three-way distribution valve (11) again, thereby achieving a high temperature maintenance effect. When the baking is completed, the three-way distribution valve (11) again guides the hot air into the ethanol steam generator (5) to heat the ethanol, thereby performing a cooling operation.

2. The baking furnace for copper-clad ceramic substrate production according to claim 1, characterized in that: The convection regulating mechanism comprises four guide ports opened on the guide port (9), three guide plates (24) are rotatably connected in the guide ports, linkage ports are opened on both sides of the guide ports, three worm gears (25) are rotatably connected in the linkage ports, the worm gears (25) are coaxially fixedly connected to the guide plates (24) on the corresponding side, an adjusting worm (26) is rotatably connected at the top of the guide port (9) at positions corresponding to the linkage ports, the adjusting worm (26) and the three worm gears (25) on the corresponding side are meshed with each other, a bevel gear (27) is coaxially fixedly connected to one side of the adjusting worm (26), two adjacent bevel gears (27) are meshed with each other, a double-axis servo motor (28) is fixedly connected to the top of the guide port (9), and two output ends of the double-axis servo motor (28) are coaxially fixedly connected to the two bevel gears (27) on the corresponding side.

3. The baking furnace for copper-clad ceramic substrate production according to claim 2, characterized in that: Four air inlet fans (29) are arranged at the inner bottom of the guide port (9), and both the air inlet fans (29) and the air outlet fans (19) are provided with drive motors (30).

4. The baking furnace for copper-clad ceramic substrate production according to claim 3, characterized in that: The ethanol steam generator (5) is provided with a spiral heat-conducting pipe (31), and the ethanol steam generator (5) is provided with a pressurizing cylinder (32). The spiral heat-conducting pipe (31) is sleeved on the outside of the pressurizing cylinder (32) and is fixedly connected thereto. A telescopic rod (33) and a compression spring (34) are fixedly connected to the pressurizing cylinder (32). The compression spring (34) is sleeved on the outside of the telescopic rod (33). The output end of the telescopic rod (33) is fixedly connected to a piston plate (35). The piston plate (35) and the compression spring (34) are fixedly connected to each other. 34) is abutted against each other, one end of the piston plate (35) away from the telescopic rod (33) is fixedly connected to a matching tooth plate (36), an output end of the ethanol steam generator (5) is provided on the outer wall of the ethanol steam generator (5), two ends of the spiral heat conduction pipe (31) are respectively connected to the output end and the input end of the ethanol steam generator (5), a matching gear (37) is rotatably connected inside the ethanol steam generator (5), the matching gear (37) and the matching tooth plate (36) are meshed with each other, and a matching worm (38) is coaxially fixedly connected to one side of the matching gear (37).

5. The baking furnace for copper-clad ceramic substrate production according to claim 4, characterized in that: A linkage housing (39) is fixedly connected to one side of the linkage water supply box (6), a matching worm wheel (40) is rotatably connected inside the linkage housing (39), and the matching worm wheel (40) is meshed with the matching worm (38).

6. The baking furnace for copper-clad ceramic substrate production according to claim 5, characterized in that: A threaded rod (41) is rotatably connected inside the linkage water supply box (6), and the threaded rod (41) is coaxially fixedly connected to the matching worm gear (40). A water pump piston (42) is slidably connected inside the linkage water supply box (6), and the threaded rod (41) passes through the water pump piston (42) and is threadedly connected thereto.

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