Optimization design method of variable cross-section quartz tube structure for remote plasma source and related equipment

Abstract

The present application belongs to the technical field of plasma sources, and discloses a method for optimizing the structure of a variable-section quartz tube of a remote plasma source and related equipment. By performing two-dimensional modeling, meshing, setting material parameters and physical fields, simulation and optimization on a microwave remote plasma source, the precise optimization design of the inner surface shape of the quartz tube is achieved, and the problem that the traditional cylindrical quartz tube cannot precisely control the plasma flow and distribution is solved. The method has the advantages of improving the uniformity of electron density distribution, improving the plasma outlet flux and improving the power utilization rate. Moreover, the optimization design is performed through simulation analysis, and the design cycle is shorter and the design cost is lower than that of the physical test method.

Description

Technical Field

[0001] The present application relates to the technical field of plasma sources, and in particular to a method for optimizing the design of a variable-section quartz tube structure of a remote plasma source and related equipment. Background Art

[0002] The microwave remote plasma source is an advanced plasma excitation device that uses microwave energy to excite and maintain plasma at a location far from the source. This device transmits microwave energy to a specific area, causing the gas molecules in the area to be excited and ionized, thereby forming a high-density, highly active plasma. The microwave remote plasma source has significant advantages such as efficient energy conversion, uniform plasma distribution, no electrode pollution and long life, and therefore has shown broad application potential in many fields such as material processing, semiconductor manufacturing, environmental protection, and medical treatment.

[0003] In microwave remote plasma sources, the quartz tube plays a vital role. It serves as a reaction chamber for gas ionization into plasma. Microwaves pass through the quartz tube to input energy into the gas inside the quartz tube, causing the gas to ionize. When the electron density of the plasma exceeds the critical density, microwaves propagate along the surface, and a large amount of energy exchange occurs near the critical density isosurface. The shape of the quartz tube has a significant effect on the electric field distribution before excitation and the electric field and plasma electron density distribution after excitation.

[0004] At the same time, the movement of plasma can be regarded as fluid from a macroscopic perspective, with convection and diffusion phenomena. The shape of the quartz tube, as a fluid channel, determines the change in the plasma flow velocity field, thereby affecting the convection and diffusion of the plasma. Therefore, the structural design of the quartz tube has a decisive influence on the performance of the microwave remote plasma source.

[0005] However, most of the quartz tubes of microwave remote plasma sources are still designed with a round tube of equal wall thickness, and the inner hole is a simple cylindrical shape. This design has the following defects:

[0006] First, most of the optimization of the quartz tube focuses on the change of its uniform thickness, position and length, without fully considering the influence of the plasma excitation process and flow field. This simple optimization method cannot give full play to the regulatory role of the quartz tube structure on plasma performance.

[0007] Secondly, this design causes the ignition area and the area with high plasma electron density to be concentrated at the intersection of the quartz tube and the waveguide. For microwave remote plasma sources that require plasma to flow out of the quartz tube to work, this distribution is not conducive to back-end use and reduces the overall efficiency of the device.

[0008] Finally, a simple cylindrical inner hole cannot achieve fine control of plasma flow, and it is difficult to meet the diverse requirements of plasma distribution and flow characteristics in different application scenarios.

[0009] Therefore, in order to improve the performance of microwave remote plasma source, a new quartz tube structure optimization design method is urgently needed. This method should be able to comprehensively consider the influence of quartz tube shape on flow field, electric field and plasma generation process, and realize accurate optimization design of quartz tube shape. Through this optimization, we expect to improve the uniformity of electron density distribution, increase plasma outlet flux and improve power utilization, thereby significantly improving the overall performance of microwave remote plasma source.

[0010] In view of the above problems, the existing technology needs to be improved urgently. Summary of the invention

[0011] The purpose of this application is to provide a remote plasma source variable cross-section quartz tube structure optimization design method and related equipment, which can improve the uniformity of electron density distribution, increase plasma outlet flux and improve power utilization, and has a short design cycle and low design cost.

[0012] In a first aspect, the present application provides a method for optimizing the structure of a remote plasma source with a variable cross-section quartz tube, which is used to optimize the design of a quartz tube of a microwave remote plasma source, wherein the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, wherein the inner cavity of the resonant cavity is a rectangular parallelepiped, and the resonant cavity is used to feed microwaves from the lower end to ionize the working gas in the quartz tube into plasma; the method for optimizing the structure of a remote plasma source with a variable cross-section quartz tube comprises the steps of:

[0013] A1. Performing two-dimensional modeling on a microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube is described by an interpolation curve having control points;

[0014] A2. Meshing the two-dimensional model;

[0015] A3. Setting material parameters of the two-dimensional model;

[0016] A4. Setting properties of the physical field of the two-dimensional model; the physical field includes a flow field corresponding to the inner region of the quartz tube, an electromagnetic field corresponding to the inner cavity of the resonant cavity, the wall of the quartz tube and the inner region of the quartz tube, and a plasma field corresponding to the inner region of the quartz tube;

[0017] A5. Configure a steady-state solver to simulate the flow field, and configure a frequency-domain-transient solver to simulate the electromagnetic field and plasma field;

[0018] A6. Based on the simulation results of the flow field, electromagnetic field and plasma field, an optimization solver is configured, the optimization target and constraints are set, the optimal coordinates of the control points are calculated, the optimal interpolation curve is obtained, and the optimization of the inner surface shape of the quartz tube is completed.

[0019] By performing two-dimensional modeling, meshing, setting material parameters and physical fields, simulation and optimization on the microwave remote plasma source, the precise optimization design of the inner surface shape of the quartz tube is achieved, which solves the problem that traditional cylindrical quartz tubes cannot finely control the plasma flow and distribution. It has the advantages of improving the uniformity of electron density distribution, increasing plasma outlet flux and improving power utilization. Moreover, compared with the physical test method, the optimization design through simulation analysis has a shorter design cycle and lower design cost.

[0020] Preferably, the two-dimensional model includes two tube wall regions corresponding to the tube wall of the quartz tube, an ionization region located between the two tube wall regions, and two waveguide regions corresponding to the inner cavity of the resonant cavity, wherein the two waveguide regions are respectively located on opposite sides of the two tube wall regions;

[0021] There are four control points, namely the first control point, the second control point, the third control point and the fourth control point; the first control point and the fourth control point are the two endpoints of the interpolation curve, and the coordinate positions of the first control point and the fourth control point are fixed; the second control point and the third control point are located between the first control point and the fourth control point, and the coordinates of the second control point and the third control point are parameters to be optimized.

[0022] The design of the two-dimensional model includes the tube wall area, ionization area and waveguide area. The division of these areas helps to accurately simulate the flow field, electromagnetic field and plasma field in the quartz tube. The two-dimensional model has a simple structure, which is conducive to improving the efficiency of subsequent simulation and iterative optimization. The setting and optimization of the four control points can accurately adjust the shape of the inner surface of the quartz tube, thereby optimizing the generation and flow of plasma. By fixing the positions of the first and fourth control points, the two end points of the interpolation curve are ensured to be stable, and the coordinates of the second and third control points are optimized, so that the interpolation curve can be adjusted in the middle part to achieve the best plasma distribution and flow effect.

[0023] Preferably, step A1 comprises:

[0024] A101. Establishing the two-dimensional model;

[0025] A102. Initialize the coordinates of the control points.

[0026] Preferably, in step A2, a boundary layer is established at the inner edge of the pipe wall region, and the remaining region of the two-dimensional model is meshed using a free triangle mesh.

[0027] By establishing a boundary layer at the edge of the tube wall, the flow characteristics of the fluid near the tube wall can be effectively processed to ensure accurate simulation of the flow field. At the same time, using free triangle meshes to mesh the remaining areas can improve the adaptability and calculation accuracy of the mesh, thereby better reflecting the changes in the overall flow field. These measures work together to optimize the calculation of the flow field, thereby improving the efficiency and uniformity of plasma generation.

[0028] Preferably, in step A3, material parameters of the area outside the ionization zone are set, specifically including: setting the electromagnetic parameters of the waveguide zone to the electromagnetic parameters of air, and setting the electromagnetic parameters of the tube wall zone to the electromagnetic parameters of quartz; the electromagnetic parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant.

[0029] Preferably, step A4 comprises:

[0030] Setting the properties of the flow field: selecting the flow field region as the ionization zone, setting the physical model type, Mach number and reference pressure level of the flow field, setting the fluid density and dynamic viscosity source of the flow field, and setting the side wall type, inlet normal flow velocity and outlet boundary conditions of the flow field;

[0031] Setting the properties of the electromagnetic field: selecting the electromagnetic field region as the entire two-dimensional model, setting the model input frequency source of the electromagnetic field, setting the port type, input power and microwave resonance mode of the entrance of the electromagnetic field, and setting the remaining boundaries of the electromagnetic field as ideal electric conductors;

[0032] The properties of the plasma field are set: the plasma field region is selected as the ionization zone, the transmission mode of the plasma field and the model input speed type are set, and reaction formulas are added to the plasma field according to the domain reaction and boundary reaction occurring in the ionization process of the working gas and the substances involved in the reaction, and the electron outlet and substance outflow boundary conditions are set at the outlet of the plasma field.

[0033] Preferably, step A6 comprises:

[0034] Add an optimization solver based on the simulation results of flow field, electromagnetic field and plasma field, select the optimization algorithm and set the optimization tolerance;

[0035] The optimization objective is set to maximize the spatial integral of the flux of target ions at the outlet of the plasma field;

[0036] Setting control variables and upper and lower bounds of each control variable; the control variables can determine the coordinates of the second control point and the third control point;

[0037] Adding constraints related to the electron density at the central axis of the ionization region;

[0038] Using the optimization solver, based on the optimization objective, the upper and lower bounds of each control variable and the constraint conditions, the control variable is optimized and iteratively solved to obtain the optimal solution of the control variable;

[0039] The optimal coordinates of the second control point and the third control point are calculated according to the optimal solution of the control variable to determine the optimal interpolation curve.

[0040] In a second aspect, the present application provides a remote plasma source variable cross-section quartz tube structure optimization design device, which is used to optimize the design of the quartz tube of the microwave remote plasma source, wherein the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, wherein the inner cavity of the resonant cavity is a rectangular parallelepiped, and the resonant cavity is used to feed microwaves from the lower end to ionize the working gas in the quartz tube into plasma; the remote plasma source variable cross-section quartz tube structure optimization design device comprises:

[0041] A modeling module is used to perform two-dimensional modeling on the microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube is described by an interpolation curve with control points;

[0042] A meshing module, used for meshing the two-dimensional model;

[0043] A material setting module, used to set material parameters of the two-dimensional model;

[0044] A physical field setting module, used to set the properties of the physical field of the two-dimensional model; the physical field includes a flow field corresponding to the inner area of ​​the quartz tube, an electromagnetic field corresponding to the inner cavity of the resonant cavity, the wall of the quartz tube and the inner area of ​​the quartz tube, and a plasma field corresponding to the inner area of ​​the quartz tube;

[0045] A simulation module for configuring a steady-state solver to simulate flow fields and a frequency-domain-transient solver to simulate electromagnetic and plasma fields;

[0046] The solution module is used to configure the optimization solver based on the simulation results of the flow field, electromagnetic field and plasma field, set the optimization target and constraint conditions, calculate the optimal coordinates of the control points, obtain the optimal interpolation curve, and complete the optimization of the inner surface shape of the quartz tube.

[0047] In a third aspect, the present application provides an electronic device comprising a processor and a memory, wherein the memory stores a computer program executable by the processor, and when the processor executes the computer program, it runs the steps in the remote plasma source variable-cross-section quartz tube structure optimization design method as described above.

[0048] In a fourth aspect, the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, runs the steps of the method for optimizing the structure of a variable-cross-section quartz tube of a remote plasma source as described above.

[0049] Beneficial effects: The method for optimizing the structure of a variable-section quartz tube for a remote plasma source and related equipment provided in the present application achieves precise optimization design of the inner surface shape of the quartz tube by performing two-dimensional modeling, meshing, setting material parameters and physical fields, simulation, and optimization on the microwave remote plasma source, thereby solving the problem that the traditional cylindrical quartz tube cannot precisely control the plasma flow and distribution, and has the advantages of improving the uniformity of electron density distribution, increasing the plasma outlet flux, and improving power utilization. Moreover, the optimization design is performed through simulation analysis, and the design cycle is shorter and the design cost is lower than that of physical experiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 A flow chart of a method for optimizing the design of a variable-cross-section quartz tube structure for a remote plasma source provided in an embodiment of the present application.

[0051] Figure 2 A schematic structural diagram of a variable-cross-section quartz tube structure optimization design device for a remote plasma source provided in an embodiment of the present application.

[0052] Figure 3 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application.

[0053] Figure 4 Schematic diagram of the structure of a microwave remote plasma source.

[0054] Figure 5 It is a structural diagram of the two-dimensional model.

[0055] Figure 6 This is the distribution map of control points.

[0056] Figure 7 Schematic diagram of mesh division of two-dimensional model.

[0057] Figure 8 is the target convergence curve.

[0058] Fig. 9 This is the velocity field distribution before optimization.

[0059] Fig.10 is the electron density distribution before optimization.

[0060] Fig.11 This is the argon ion flux distribution before optimization.

[0061] Fig.12 This is the distribution of the velocity field after optimization.

[0062] Fig.13 is the electron density distribution after optimization.

[0063] Fig.14 This is the optimized argon ion flux distribution.

[0064] Fig.15 is the electric field distribution before optimization.

[0065] Fig.16 is the electric field distribution after optimization.

[0066] Explanation of reference numerals: 1. Modeling module; 2. Meshing module; 3. Material setting module; 4. Physical field setting module; 5. Simulation module; 6. Solving module; 90. Resonant cavity; 91. Quartz tube; 92. Microwave feed port; 93. Microwave source; 94. Tube wall region; 95. Ionization region; 96. Waveguide region; 97. Center line segment; 301. Processor; 302. Memory; 303. Communication bus. DETAILED DESCRIPTION

[0067] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0068] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0069] A microwave remote plasma source is an advanced device that uses microwave energy to excite and maintain plasma at a location far from the source. By transmitting microwave energy to a specific area, the gas molecules in the area are excited and ionized to form a high-density, highly active plasma. This type of plasma has significant advantages such as efficient energy conversion, uniform plasma distribution, no electrode pollution and long life, and has shown broad application potential in many fields such as material processing, semiconductor manufacturing, environmental protection, and medical treatment. However, most of the quartz tubes of microwave remote plasma sources are currently round tubes with equal wall thickness and cylindrical inner holes. Most of the optimization focuses on changes in their uniform thickness, position and length, without considering the influence of the plasma excitation process and flow field. At the same time, the ignition area and the area with high plasma electron density of this microwave remote plasma source are concentrated at the intersection of the quartz tube and the waveguide, which is not conducive to the back-end use for microwave remote plasma sources that require plasma to flow out of the quartz tube to work.

[0070] In order to solve these problems, this application proposes a method for optimizing the design of a variable cross-section quartz tube structure of a remote plasma source. The method optimizes the design of the quartz tube of a microwave remote plasma source to improve the uniformity of electron density distribution, plasma outlet flux and power utilization.

[0071] Please refer to Figure 1 In some embodiments of the present application, a method for optimizing the design of a quartz tube structure of a remote plasma source with a variable cross-section is used to optimize the design of a quartz tube 91 of a microwave remote plasma source. The microwave remote plasma source includes a resonant cavity 90 and a quartz tube 91 (a circular tube) passing through the resonant cavity 90. The inner cavity of the resonant cavity 90 is a rectangular parallelepiped (e.g., Figure 4 As shown), the resonant cavity 90 is used to feed microwaves from the lower end to ionize the working gas in the quartz tube 91 into ions;

[0072] The method for optimizing the structure of a variable cross-section quartz tube of a remote plasma source comprises the following steps:

[0073] A1. Perform two-dimensional modeling on the microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube 91 is described by an interpolation curve with control points (ie, the curve corresponding to the generatrix of the inner surface of the quartz tube 91 is set as the interpolation curve);

[0074] A2. Mesh the 2D model;

[0075] A3. Set the material parameters of the 2D model;

[0076] A4. Setting the properties of the physical field of the two-dimensional model; the physical field includes a flow field corresponding to the inner region of the quartz tube 91, an electromagnetic field corresponding to the inner cavity of the resonant cavity 90, the wall of the quartz tube 91 and the inner region of the quartz tube 91, and a plasma field corresponding to the inner region of the quartz tube 91;

[0077] A5. Configure a steady-state solver to simulate the flow field, and configure a frequency-domain-transient solver to simulate the electromagnetic field and plasma field;

[0078] A6. Based on the simulation results of flow field, electromagnetic field and plasma field, configure the optimization solver, set the optimization target and constraints, calculate the optimal coordinates of the control points, obtain the optimal interpolation curve, and complete the optimization of the inner surface shape of the quartz tube.

[0079] By performing two-dimensional modeling, meshing, setting material parameters and physical fields, simulation and optimization on the microwave remote plasma source, the precise optimization design of the inner surface shape of the quartz tube is achieved, which solves the problem that traditional cylindrical quartz tubes cannot finely control the plasma flow and distribution. It has the advantages of improving the uniformity of electron density distribution, increasing plasma outlet flux and improving power utilization. Moreover, compared with the physical test method, the optimization design through simulation analysis has a shorter design cycle and lower design cost.

[0080] Among them, reference Figure 4 The microwave remote plasma source also includes a microwave source 93 connected to the lower end of the resonant cavity 90 and used to feed microwaves into a microwave feed inlet 92 of the resonant cavity 90; wherein the inner cavity of the resonant cavity 90 is filled with air; and the working gas input into the inner hole of the quartz tube 91 is generally argon, but not limited thereto.

[0081] It should be noted that the variable cross-section quartz tube structure optimization design method of the remote plasma source can be designed and analyzed based on COMSOL Multiphysics software or other numerical simulation software.

[0082] Preferably, see Figure 5 The two-dimensional model includes two tube wall areas 94 corresponding to the tube wall of the quartz tube 91 (because the quartz tube 91 is a rotating body, the two tube wall areas 94 are symmetrically arranged relative to the central axis of the quartz tube 91), an ionization area 95 located between the two tube wall areas 94, and two waveguide areas 96 (rectangular areas) corresponding to the inner cavity of the resonant cavity 90. The two waveguide areas 96 are respectively located on the opposite sides of the two tube wall areas 94 (the two waveguide areas 96 are respectively connected to the two tube wall areas 94).

[0083] The design of the two-dimensional model includes a tube wall area 94, an ionization area 95 and a waveguide area 96. The division of these areas helps to accurately simulate the flow field, electromagnetic field and plasma field in the quartz tube 91. The two-dimensional model has a simple structure, which is conducive to improving the efficiency of subsequent simulation and iterative optimization.

[0084] Among them, the interpolation curve is the edge line of the two tube wall areas 94 on the opposite side. Since the two tube wall areas 94 are symmetrically arranged about the central axis of the quartz tube 91, after setting the two interpolation curves to a symmetrical relationship, only one of the interpolation curves needs to be adjusted, and the shape of the other interpolation curve will be automatically adjusted. At this time, only a control point needs to be set on one of the interpolation curves.

[0085] The width of the two waveguide regions 96 is a, the lengths of the two waveguide regions 96 are b1 and b2 respectively (the end of the waveguide region 96 with a length of b2 away from the ionization region 95 corresponds to the microwave feed port 92 of the resonant cavity 90), and the length of the quartz tube 91 is , so that the lengths of the tube wall region 94 and the ionization region 95 are both , the outer radius of the quartz tube 91 is R, so the distances from the opposite edges of the two tube wall regions 94 to the central axis of the ionization region 95 (also the central axis of the quartz tube 91) are all R. a, b1, b2, The values ​​of and R are set according to actual needs, for example, a is 5cm, b1 is 9cm, b2 is 10cm, is 25cm, R is 3.5cm, but not limited to this.

[0086] The number of control points can be set according to actual needs. Figure 6 In the figure, there are four control points, namely, the first control point P1, the second control point P2, the third control point P3 and the fourth control point P4; the first control point P1 and the fourth control point P4 are the two end points of the interpolation curve, and the coordinate positions of the first control point P1 and the fourth control point P4 are fixed; the second control point P2 and the third control point P3 are located between the first control point P1 and the fourth control point P4, and the coordinates of the second control point P2 and the third control point P3 are parameters to be optimized.

[0087] The coordinates of each control point are the coordinates on the reference coordinate xy, the x-axis of the reference coordinate xy coincides with the central axis of the ionization zone 95, and the y-axis is perpendicular to the x-axis and passes through the midpoint of the central axis of the ionization zone 95, as shown in FIG. Figure 6 shown.

[0088] The setting and optimization of the four control points can accurately adjust the shape of the inner surface of the quartz tube 91, thereby optimizing the generation and flow of plasma. By fixing the positions of the first and fourth control points, the two end points of the interpolation curve are ensured to be stable, and the coordinates of the second and third control points are optimized so that the interpolation curve can be adjusted in the middle part, and finally the optimal interpolation curve is found to achieve the best plasma distribution and flow effect.

[0089] The first control point P1, the second control point P2, the third control point P3 and the fourth control point P4 can be parameterized as , , , , , are the horizontal coordinates of the second control point P2 and the third control point P3 on the reference coordinate xy, , , , The wall thickness at the first control point P1, the second control point P2, the third control point P3 and the fourth control point P4 (i.e., the wall thickness of the quartz tube 91) can be fixed at the inlet and outlet of the quartz tube 91, so that and Set to a fixed value, which can be set according to actual needs, for example, 1 cm, but not limited to this; at this time, by adjusting , , and The interpolation curve can be optimized, so that , , and Optimize as a global parameter.

[0090] Specifically, step A1 includes:

[0091] A101. Establish a two-dimensional model;

[0092] A102. Initialize the coordinates of the control points.

[0093] The two-dimensional model can be established using computer-aided design software, for example, directly in COMSOL Multiphysics software. When using COMSOL Multiphysics software, in the model guidance step of the model establishment process, you can select the type of physical field to be added, including flow field, electromagnetic field and plasma field. Among them, the flow field has multiple subdivision types such as creeping flow, laminar flow, turbulent flow, potential flow, etc. Among them, laminar flow is more in line with the fluid flow conditions inside the quartz tube 91. Therefore, it is preferred to select laminar flow (that is, the flow field is a laminar flow field).

[0094] When establishing a two-dimensional model, a center line segment 97 may be set at the center axis of the ionization zone 95 to assist in subsequent mesh division and to encrypt (increase density) the mesh near the center axis of the ionization zone 95. The coordinates of the starting point of the center line segment 97 may be set to , the coordinates of the end point can be set to , but not limited to this.

[0095] Among them, the initialization setting of the coordinates of the control points is mainly , , , , , Perform initial settings.

[0096] Preferably, in step A2, a boundary layer is established at the inner edge of the pipe wall region 94 (ie, at the interpolation curve), and the remaining region of the two-dimensional model is meshed using a free triangle mesh.

[0097] By establishing a boundary layer at the inner edge of the tube wall region 94, the flow characteristics of the fluid near the tube wall can be effectively processed to ensure accurate simulation of the flow field. At the same time, using a free triangle grid to mesh the remaining area can improve the adaptability and calculation accuracy of the grid, thereby better reflecting the changes in the overall flow field. These measures work together to optimize the calculation of the flow field, thereby improving the efficiency and uniformity of plasma generation.

[0098] Among them, since it is necessary to monitor the flux of target ions at the outlet of the plasma field and the change of electron density at the central axis of the ionization zone 95 when the coordinates of the control points are subsequently iteratively optimized, when the remaining areas of the two-dimensional model are meshed using the free triangle mesh, the mesh at the central axis of the ionization zone 95 and the outlet of the ionization zone 95 can be appropriately encrypted using the center line segment 97 and the edge line of the outlet of the ionization zone 95 to improve the accuracy of the monitored data. Specifically, the change of electron density and the flux of target ions can be monitored by setting probes at the center line segment 97 and the edge line of the outlet of the ionization zone 95.

[0099] The probe at the center line segment 97 can be defined as: the integral of the absolute value of the derivative of the electron density at the central axis of the ionization region 95 with respect to the x-coordinate along the center line segment 97, which can be expressed as: , is the integral of the absolute value of the derivative of the electron density at the central axis of the ionization region 95 with respect to the x coordinate along the central line segment 97, ne is the electron density at the central axis of the ionization region 95, represents the derivative of the electron density at the central axis of the ionization region 95 with respect to the x-coordinate, and ds is the differential of the path length of the central line segment 97.

[0100] The probe at the exit edge of the ionization region 95 can be defined as: the spatial integral of the flux of the target ions at the exit of the plasma field. The type of the target ions is determined by the type of the working gas. For example, when the working gas is argon, the target ions are argon ions.

[0101] Specifically, in step A3, material parameters are set for the area outside the ionization zone 95, mainly electromagnetic parameters, including: setting the electromagnetic parameters of the waveguide zone 96 to the electromagnetic parameters of air, and setting the electromagnetic parameters of the tube wall zone 94 to the electromagnetic parameters of quartz; the electromagnetic parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant.

[0102] Since the inner cavity of the resonant cavity 90 is filled with air, the electromagnetic parameters of the waveguide area 96 are set to the electromagnetic parameters of air; since the tube wall of the quartz tube 91 is quartz, the electromagnetic parameters of the tube wall area 94 are set to the electromagnetic parameters of quartz. Specifically, the relative magnetic permeability of air is 1, the electrical conductivity is 0, and the relative dielectric constant is 1; the relative magnetic permeability of quartz is 1, the electrical conductivity is 10 -14 S / m, and the relative dielectric constant is 4.2.

[0103] In this application, step A4 includes:

[0104] Set the properties of the flow field: select the flow field region as the ionization zone, set the physical model type, Mach number and reference pressure level of the flow field, set the fluid density and dynamic viscosity source of the flow field, and set the side wall type, inlet normal flow velocity and outlet boundary conditions of the flow field;

[0105] Set the properties of the electromagnetic field: select the entire two-dimensional model as the electromagnetic field region, set the model input frequency source of the electromagnetic field, set the port type, input power and microwave resonance mode of the electromagnetic field entrance, and set the remaining boundaries of the electromagnetic field as ideal electric conductors;

[0106] Set the properties of the plasma field: select the plasma field area as the ionization zone, set the plasma field transmission mode and model input speed type, add reaction equations to the plasma field according to the domain reaction and boundary reaction occurring in the ionization process of the working gas and the substances involved in the reaction, and set the electron outlet and substance outflow boundary conditions at the outlet of the plasma field (that is, set the boundary conditions at the outlet of the plasma field as the electron outlet and substance outflow outlet).

[0107] Through these settings, the flow field, electromagnetic field and plasma field in the quartz tube 91 can be accurately simulated, thereby optimizing the shape of the quartz tube 91 and improving the uniformity of electron density distribution, plasma outlet flux and power utilization.

[0108] Among them, various parameters and conditions of the flow field can be set according to actual needs. For example, the physical model type of the flow field can be set to a compressible flow model, the Mach number of the flow field can be set to less than 0.3, the reference pressure level of the flow field can be set to 0Pa, the source of the fluid density and dynamic viscosity of the flow field can be set to come from the plasma field, the side wall type of the flow field can be selected as a no-slip wall, the inlet normal flow velocity of the flow field can be set to 10m / s, and the outlet boundary condition of the flow field can be set to a 0 pressure outlet boundary condition; but it is not limited to this.

[0109] Among them, various parameters and conditions of the electromagnetic field can be set according to actual needs. For example, the source of the electromagnetic field model input frequency can be selected from the solver, the port type of the electromagnetic field entrance can be set to a rectangular port, the input power of the electromagnetic field entrance can be set to 40W / m, and the microwave resonance mode of the electromagnetic field entrance can be selected as TE mode or TM mode.

[0110] Among them, various parameters and conditions of the plasma field can be set according to actual needs. For example, the transmission mode of the plasma field can be selected from electric field migration and convection, and the model input velocity type of the plasma field can be selected from velocity field.

[0111] In step A5, the flow field is selected as the simulation object when configuring the steady-state solver. The steady-state solver is used to simulate the flow field. This is a function provided by COMSOL Multiphysics software or other numerical simulation software. The simulation can be realized by calling the corresponding simulation calculation function.

[0112] Furthermore, when configuring the frequency domain-transient solver, select electromagnetic waves, plasma and all physical field coupling, set the transient output time step as needed (for example, set it to 10^{range(-6,0.4,-2)}, but not limited to this), set the frequency of the microwave feed to 2.45GHz, and then use the configured frequency domain-transient solver to simulate the electromagnetic field and plasma field. Using the frequency domain-transient solver to simulate the electromagnetic field and plasma field is a function equipped with COMSOL Multiphysics software or other numerical simulation software, and the simulation can be realized by calling the corresponding simulation calculation function.

[0113] Preferably, step A5 further comprises: judging the rationality of the flow field distribution, electromagnetic field distribution and plasma field distribution obtained by simulation, and when at least one of the flow field distribution, electromagnetic field distribution and plasma field distribution is unreasonable, adjusting the initial value of the coordinate of the control point (specifically adjusting , , , , , After the initial value of the control point P1 is obtained, step A2 to step A5 are performed again until the flow field distribution, electromagnetic field distribution and plasma field distribution are all reasonable (so that step A6 is performed on the basis of the flow field distribution, electromagnetic field distribution and plasma field distribution obtained last time, and the coordinates of the first control point P1 and the fourth control point P4 have been determined). This ensures that good initial conditions are provided for the iterative optimization of the subsequent step A6, and the reliability of the optimization results is ensured.

[0114] In this embodiment, step A6 includes:

[0115] A601. Add optimization solver based on the simulation results of flow field, electromagnetic field and plasma field, select optimization algorithm and set optimization tolerance;

[0116] A602. The optimization target is set to maximize the spatial integral of the flux of the target ions at the outlet of the plasma field;

[0117] A603. Set the control variables and the upper and lower bounds of each control variable; the control variables can determine the coordinates of the second control point and the third control point;

[0118] A604. Add constraints related to the electron density at the center axis of the ionization region;

[0119] A605. Using the optimization solver, based on the optimization objective, the upper and lower bounds of each control variable and the constraints, the control variables are optimized and solved iteratively to obtain the optimal solution of the control variables;

[0120] A606. Calculate the optimal coordinates of the second control point P2 and the third control point P3 according to the optimal solution of the control variables to determine the optimal interpolation curve.

[0121] The optimization solver and optimization algorithm are introduced, the optimization objectives and constraints are set, and the optimal solution of the control variables is obtained through iterative solution, thereby determining the optimal interpolation curve. This process effectively optimizes the shape of the quartz tube 91, maximizes the plasma outlet flux, makes the electron density distribution more uniform, and improves the power utilization rate.

[0122] In step A601, the optimization algorithm can be selected according to actual needs, such as selecting the BOBYQA algorithm, but not limited thereto. The optimization tolerance can be adjusted according to actual needs, such as the optimization tolerance is 0.01, but not limited thereto.

[0123] In step A602, the probe at the exit edge of the ionization zone 95 can be used as the objective function, and the optimization purpose of the objective function can be selected as maximization.

[0124] In step A603, global parameters (i.e. , , and ) as control variables, and set the upper and lower bounds of each control variable to:

[0125] ;

[0126] ;

[0127] ;

[0128] ;

[0129] .

[0130] In step A604, the following constraints may be added:

[0131] .

[0132] Among them, in step A605, optimizing and iteratively solving the control variables by using the optimization solver is a function equipped in COMSOL Multiphysics software or other numerical simulation software, and it is only necessary to run the corresponding function.

[0133] Among them, in step A606, the optimal solution of the control variable is converted into the optimal coordinates of the second control point P2 and the third control point P3 (calculated according to the coordinates of the second control point P2 and the third control point P3 and the conversion method of the global parameters), so that the coordinates of the four control points are obtained, and then the coordinates of the four control points are used to calculate the optimal interpolation curve (the calculation process is existing technology and will not be described in detail here).

[0134] In a possible implementation, a is 5 cm, b1 is 9 cm, b2 is 10 cm, is 25cm, R is 3.5cm, and The final values ​​are all 1cm; the physical model type of the flow field is set to a compressible flow model, the Mach number of the flow field is set to less than 0.3, the reference pressure level of the flow field is set to 0Pa, the fluid density and dynamic viscosity sources of the flow field are set to come from the plasma field, the side wall type of the flow field is selected as a no-slip wall, the inlet normal flow velocity of the flow field is set to 10m / s, and the outlet boundary condition of the flow field is set to a 0 pressure outlet boundary condition; the model input frequency source of the electromagnetic field is selected as from the solver, the port type of the electromagnetic field inlet is set to a rectangular port, and the electromagnetic The input power at the entrance of the field is set to 40W / m, and the microwave resonance mode at the entrance of the electromagnetic field is selected as the TM mode; the transmission mode of the plasma field selects electric field migration and convection, and the model input velocity type of the plasma field selects the velocity field; the transient output time step of the frequency domain-transient solver is set to 10^{range(-6,0.4,-2)}, and the frequency of the microwave fed is set to 2.45GHz, where the working gas is argon; after simulating the convection field, electromagnetic field and plasma field, it can be extracted from the simulation results Fig. 9 The velocity field distribution before optimization is shown in Fig.10 The electron density distribution before optimization is shown. Fig.11 The argon ion flux distribution before optimization is shown in FIG. Fig.15 The electric field distribution before optimization is shown in the figure. On this basis, the optimization solver is used to optimize and iterate the control variables, and the optimal solution of the control variables is obtained as follows: , , , ; The target convergence curve in the iteration process (i.e., the curve of target changing with the number of iterations) is as follows Figure 8 As shown in the figure, the target refers to the spatial integral of the flux of the target ions at the outlet of the plasma field (from Figure 8 It can be seen that as the iterative process progresses, the target value is significantly improved, and the final result is about 4 times that before optimization). Finally, it can be extracted from the optimized flow field, electromagnetic field and plasma field. Fig.12 The optimized velocity field distribution shown in Fig.13 The optimized electron density distribution shown, Fig.14 The optimized argon ion flux distribution and Fig.16 The optimized electric field distribution is shown.

[0135] from Figure 9-Figure 16It can be seen that the optimized flow channel structure that first contracts and then expands increases the plasma flow rate at the microwave feed inlet 92, avoids the problem of electron density concentration at the center, and the plasma ionization is more uniform in the entire reaction cavity (ionization zone 95). From the target convergence curve, it can be seen that the flux of argon ions at the outlet is significantly increased. From the electric field distribution after plasma generation before and after optimization, it can be seen that the critical density area is significantly expanded after optimization, and the standing wave intensity formed with the waveguide inlet section (i.e., the waveguide area 96 where the microwave feed inlet 92 is located) decreases. The input reflection coefficient S11 of the microwave feed inlet 92 before optimization is calculated to be -2.09dB, and the input reflection coefficient S11 of the microwave feed inlet 92 after optimization is -8.56dB. The optimized structure significantly reduces the port reflectivity and increases the microwave power utilization.

[0136] As can be seen from the above, the method for optimizing the structure of the variable cross-section quartz tube of the remote plasma source performs two-dimensional modeling on the microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube 91 is described by an interpolation curve with control points; the two-dimensional model is meshed; the material parameters of the two-dimensional model are set; the physical field of the two-dimensional model is set; the physical field includes a flow field corresponding to the inner area of ​​the quartz tube 91, an electromagnetic field corresponding to the inner cavity of the resonant cavity 90, the wall of the quartz tube 91 and the inner area of ​​the quartz tube 91, and a plasma field corresponding to the inner area of ​​the quartz tube 91; a steady-state solver is configured to simulate the flow field, and a frequency domain-transient solver is configured to simulate the electromagnetic field and the plasma field; based on the simulation results, an optimization solver is configured, the optimization target and constraints are set, the optimal coordinates of the control points are calculated, the optimal interpolation curve is obtained, and the optimization of the inner surface shape of the quartz tube is completed; thereby, the uniformity of electron density distribution, the plasma outlet flux and the power utilization rate can be improved, and the design cycle is short and the design cost is low.

[0137] refer to Figure 2 The present application provides a remote plasma source variable cross-section quartz tube structure optimization design device, which is used to optimize the design of a quartz tube 91 of a microwave remote plasma source. The microwave remote plasma source includes a resonant cavity 90 and a quartz tube 91 (a circular tube) passing through the resonant cavity 90. The inner cavity of the resonant cavity 90 is a rectangular parallelepiped (such as Figure 4 As shown), the resonant cavity 90 is used to feed microwaves from the lower end to ionize the working gas in the quartz tube 91 into ions;

[0138] The remote plasma source variable cross-section quartz tube structure optimization design device comprises:

[0139] Modeling module 1 is used to perform two-dimensional modeling on the microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube 91 is described by an interpolation curve with control points (for the specific process, refer to step A1);

[0140] Meshing module 2, used for meshing the two-dimensional model (refer to step A2 for the specific process);

[0141] Material setting module 3, used to set the material parameters of the two-dimensional model (refer to step A3 for the specific process);

[0142] The physical field setting module 4 is used to set the properties of the physical field of the two-dimensional model; the physical field includes the flow field corresponding to the inner area of ​​the quartz tube 91, the electromagnetic field corresponding to the inner cavity of the resonant cavity 90, the wall of the quartz tube 91 and the inner area of ​​the quartz tube 91, and the plasma field corresponding to the inner area of ​​the quartz tube 91 (for the specific process, refer to step A4);

[0143] Simulation module 5, used to configure a steady-state solver to simulate the flow field, and to configure a frequency domain-transient solver to simulate the electromagnetic field and plasma field (for the specific process, refer to step A5);

[0144] Solving module 6 is used to configure the optimization solver based on the simulation results of the flow field, electromagnetic field and plasma field, set the optimization target and constraint conditions, calculate the optimal coordinates of the control points, obtain the optimal interpolation curve, and complete the optimization of the inner surface shape of the quartz tube 91 (for the specific process, refer to step A6).

[0145] Please refer to Figure 3, is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. The present application provides an electronic device, including: a processor 301 and a memory 302. The processor 301 and the memory 302 are interconnected and communicate with each other through a communication bus 303 and / or other forms of connection mechanisms (not shown). The memory 302 stores a computer program executable by the processor 301. When the electronic device is running, the processor 301 executes the computer program to execute the remote plasma source variable cross-section quartz tube structure optimization design method in any optional implementation of the above embodiment to achieve the following functions: two-dimensional modeling of the microwave remote plasma source is performed to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube 91 is controlled by The interpolation curve of the control point is described; the two-dimensional model is meshed; the material parameters of the two-dimensional model are set; the physical field of the two-dimensional model is set; the physical field includes the flow field corresponding to the inner area of ​​the quartz tube 91, the electromagnetic field corresponding to the inner cavity of the resonant cavity 90, the wall of the quartz tube 91 and the inner area of ​​the quartz tube 91, and the plasma field corresponding to the inner area of ​​the quartz tube 91; a steady-state solver is configured to simulate the flow field, and a frequency domain-transient solver is configured to simulate the electromagnetic field and the plasma field; based on the simulation results, an optimization solver is configured, the optimization target and constraints are set, the optimal coordinates of the control points are calculated, the optimal interpolation curve is obtained, and the optimization of the inner surface shape of the quartz tube is completed.

[0146] The embodiment of the present application provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the method for optimizing the structure of a variable-section quartz tube of a remote plasma source in any optional implementation of the above embodiment is executed to achieve the following functions: two-dimensional modeling of a microwave remote plasma source is performed to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube 91 is described by an interpolation curve with control points; the two-dimensional model is meshed; material parameters of the two-dimensional model are set; the physical field of the two-dimensional model is set; the physical field includes a flow field corresponding to the internal area of ​​the quartz tube 91, an electromagnetic field corresponding to the inner cavity of the resonant cavity 90, the wall of the quartz tube 91 and the internal area of ​​the quartz tube 91, and a plasma field corresponding to the internal area of ​​the quartz tube 91; a steady-state solver is configured to simulate the flow field, and a frequency domain-transient solver is configured to simulate the electromagnetic field and the plasma field; based on the simulation results, an optimization solver is configured, the optimization target and constraints are set, the optimal coordinates of the control points are calculated, and the optimal interpolation curve is obtained to complete the optimization of the shape of the inner surface of the quartz tube. Among them, the computer-readable storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable red-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk or optical disk.

[0147] In the embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of the devices or units can be electrical, mechanical or other forms.

[0148] In addition, the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, and may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0149] Furthermore, the functional modules in the various embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0150] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0151] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A method for optimizing the structure of a variable-section quartz tube of a remote plasma source, which is used to optimize the design of a quartz tube of a microwave remote plasma source, wherein the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, wherein the inner cavity of the resonant cavity is a rectangular parallelepiped, and the resonant cavity is used to feed microwaves from the lower end to ionize the working gas in the quartz tube into plasma; characterized in that: The method for optimizing the design of the variable cross-section quartz tube structure of the remote plasma source comprises the following steps: A1. Performing two-dimensional modeling on a microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube is described by an interpolation curve having control points; A2. Meshing the two-dimensional model; A3. Setting material parameters of the two-dimensional model; A4. Setting the physical field of the two-dimensional model; the physical field includes a flow field corresponding to the inner region of the quartz tube, an electromagnetic field corresponding to the inner cavity of the resonant cavity, the wall of the quartz tube and the inner region of the quartz tube, and a plasma field corresponding to the inner region of the quartz tube; A5. Configure a steady-state solver to simulate the flow field, and configure a frequency-domain-transient solver to simulate the electromagnetic field and plasma field; A6. Based on the simulation results, configure the optimization solver, set the optimization target and constraints, calculate the optimal coordinates of the control points, obtain the optimal interpolation curve, and complete the optimization of the inner surface shape of the quartz tube; The two-dimensional model includes two tube wall regions corresponding to the tube wall of the quartz tube, an ionization region located between the two tube wall regions, and two waveguide regions corresponding to the inner cavity of the resonant cavity, wherein the two waveguide regions are respectively located on opposite sides of the two tube wall regions; There are four control points, namely, a first control point, a second control point, a third control point and a fourth control point; the first control point and the fourth control point are two end points of the interpolation curve, and the coordinate positions of the first control point and the fourth control point are fixed; the second control point and the third control point are located between the first control point and the fourth control point, and the coordinates of the second control point and the third control point are parameters to be optimized; Step A4 includes: Setting the flow field: selecting the flow field region as the ionization zone, setting the physical model type, Mach number and reference pressure level of the flow field, setting the fluid density and dynamic viscosity source of the flow field, and setting the side wall type, inlet normal flow velocity and outlet boundary conditions of the flow field; Setting the electromagnetic field: selecting the electromagnetic field region as the entire two-dimensional model, setting the model input frequency source of the electromagnetic field, setting the port type, input power and microwave resonance mode of the entrance of the electromagnetic field, and setting the remaining boundaries of the electromagnetic field as ideal electric conductors; The plasma field is set: the plasma field region is selected as the ionization zone, the transmission mode of the plasma field and the model input speed type are set, and reaction formulas are added to the plasma field according to the domain reaction and boundary reaction occurring in the ionization process of the working gas and the substances involved in the reaction, and electron outlet and substance outflow boundary conditions are set at the outlet of the plasma field.

2. The method for optimizing the design of a variable cross-section quartz tube structure for a remote plasma source according to claim 1, characterized in that: Step A1 includes: A101. Establish the two-dimensional model and add the physical field to the two-dimensional model; A102. Initialize the coordinates of the control points.

3. The method for optimizing the structure of a remote plasma source variable cross-section quartz tube according to claim 1, characterized in that: In step A2, a boundary layer is established at the inner edge of the pipe wall region, and the remaining region of the two-dimensional model is meshed using a free triangle mesh.

4. The method for optimizing the design of a variable cross-section quartz tube structure for a remote plasma source according to claim 1, characterized in that: In step A3, material parameters are set for the area outside the ionization zone, specifically including: setting the electromagnetic parameters of the waveguide zone to the electromagnetic parameters of air, and setting the electromagnetic parameters of the tube wall zone to the electromagnetic parameters of quartz; the electromagnetic parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant.

5. The method for optimizing the design of a variable cross-section quartz tube structure for a remote plasma source according to claim 1, characterized in that: Step A6 includes: Add an optimization solver based on the simulation results, select the optimization algorithm, and set the optimization tolerance; The optimization objective is set to maximize the spatial integral of the flux of target ions at the outlet of the plasma field; Setting control variables and upper and lower bounds of each control variable; the control variables can determine the coordinates of the second control point and the third control point; Adding constraints related to the electron density at the central axis of the ionization region; Using the optimization solver, based on the optimization objective, the upper and lower bounds of each control variable and the constraint conditions, the control variable is optimized and iteratively solved to obtain the optimal solution of the control variable; The optimal coordinates of the second control point and the third control point are calculated according to the optimal solution of the control variable to determine the optimal interpolation curve.

6. A remote plasma source variable cross-section quartz tube structure optimization design device, used for optimizing the design of the quartz tube of the microwave remote plasma source, the microwave remote plasma source comprises a resonant cavity and a quartz tube passing through the resonant cavity, the inner cavity of the resonant cavity is a rectangular parallelepiped, the resonant cavity is used to feed microwaves from the lower end to ionize the working gas in the quartz tube into plasma; characterized in that: The remote plasma source variable cross-section quartz tube structure optimization design device comprises: A modeling module is used to perform two-dimensional modeling on the microwave remote plasma source to obtain a two-dimensional model; in the two-dimensional model, the inner surface of the quartz tube is described by an interpolation curve with control points; A meshing module, used for meshing the two-dimensional model; A material setting module, used to set material parameters of the two-dimensional model; A physical field setting module, used to set the physical field of the two-dimensional model; the physical field includes a flow field corresponding to the inner area of ​​the quartz tube, an electromagnetic field corresponding to the inner cavity of the resonant cavity, the wall of the quartz tube and the inner area of ​​the quartz tube, and a plasma field corresponding to the inner area of ​​the quartz tube; A simulation module for configuring a steady-state solver to simulate flow fields and a frequency-domain-transient solver to simulate electromagnetic and plasma fields; A solution module is used to configure an optimization solver based on the simulation results, set optimization goals and constraints, calculate and obtain the optimal coordinates of the control points, obtain the optimal interpolation curve, and complete the optimization of the inner surface shape of the quartz tube; The two-dimensional model includes two tube wall regions corresponding to the tube wall of the quartz tube, an ionization region located between the two tube wall regions, and two waveguide regions corresponding to the inner cavity of the resonant cavity, wherein the two waveguide regions are respectively located on opposite sides of the two tube wall regions; There are four control points, namely, a first control point, a second control point, a third control point and a fourth control point; the first control point and the fourth control point are two end points of the interpolation curve, and the coordinate positions of the first control point and the fourth control point are fixed; the second control point and the third control point are located between the first control point and the fourth control point, and the coordinates of the second control point and the third control point are parameters to be optimized; When setting the physical field of the two-dimensional model, the physical field setting module executes: Setting the flow field: selecting the flow field region as the ionization zone, setting the physical model type, Mach number and reference pressure level of the flow field, setting the fluid density and dynamic viscosity source of the flow field, and setting the side wall type, inlet normal flow velocity and outlet boundary conditions of the flow field; Setting the electromagnetic field: selecting the electromagnetic field region as the entire two-dimensional model, setting the model input frequency source of the electromagnetic field, setting the port type, input power and microwave resonance mode of the entrance of the electromagnetic field, and setting the remaining boundaries of the electromagnetic field as ideal electric conductors; The plasma field is set: the plasma field region is selected as the ionization zone, the transmission mode of the plasma field and the model input speed type are set, and reaction formulas are added to the plasma field according to the domain reaction and boundary reaction occurring in the ionization process of the working gas and the substances involved in the reaction, and electron outlet and substance outflow boundary conditions are set at the outlet of the plasma field.

7. An electronic device, characterized in that: The invention comprises a processor and a memory, wherein the memory stores a computer program executable by the processor, and when the processor executes the computer program, the steps in the method for optimizing the structure of a remote plasma source variable cross-section quartz tube are executed as described in any one of claims 1 to 5.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by the processor, the steps of the method for optimizing the structure of a remote plasma source variable-cross-section quartz tube are performed as described in any one of claims 1 to 5.

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