Ceramic quality analyzer and electrode processing method

Abstract

The invention relates to a ceramic quality analyzer and an electrode processing method, and the method comprises the steps: firstly building an optimal 3D printing model of a quality analyzer electrode suitable for 3D printing equipment, then configuring a printing material, carrying out the 3D printing of the obtained optimal 3D printing model of the quality analyzer electrode, and obtaining a preliminary model structure; and the preliminary model is sequentially cleaned, degreased and sintered, a first ceramic structure is obtained, and finally, the first ceramic structure is subjected to surface post-treatment to obtain a target ceramic structure. The mass analyzer manufactured through the method is simple in machining process, the cost is lower than that of mass analyzer electrodes in the market, and batch production is convenient to achieve. Besides, errors generated when the mass analyzer is assembled are reduced to a great extent through printing of the mass analyzer electrode, the situation that the precision of the mass analyzer is reduced due to errors caused by movable connection between parts is avoided, the stability of the mass analyzer is improved, and the service life of the mass analyzer is prolonged.

Description

Technical Field

[0001] The invention relates to the field of mass spectrometers and mass analyzers, and in particular to a ceramic mass analyzer and an electrode processing method. Background Art

[0002] Mass spectrometers have the characteristics of high resolution, high sensitivity, high accuracy, fast analysis speed and strong qualitative ability, so they are widely used in omics research, clinical medicine, environmental monitoring, public safety and other fields. The mass analyzer is the core component of the mass spectrometer. It is a device that uses a specific ideal electric field to screen the mass-to-charge ratio of certain ions. Among the many types of mass analyzers, the ion trap mass analyzer stands out in the field that requires low cost, miniaturization, high portability and high qualitative ability due to its high pressure tolerance, simple structure, small size and time-series mass spectrometry analysis ability. The orbital trap mass analyzer has unique advantages in high sample throughput and high result confidence, and can cooperate with other components to achieve a perfect combination of scanning speed, high resolution, mass accuracy, spectrum quality and sensitivity.

[0003] The processing and assembly accuracy of the mass analyzer determines the detection level of the entire instrument. Affected by the processing method, processing structure and size, most of the current commercial ion traps and orbital traps use CNC machine tools to process special stainless steel materials, and use quartz auxiliary structures of specific sizes to assist in positioning at the electrode support structure, so that the electrode is closely attached to the surface of the quartz auxiliary structure, and the overall assembly is controlled by grinding the contact surface between the surface of the quartz auxiliary structure and the electrode.

[0004] In the ion trap mass analyzer or orbital trap mass analyzer manufactured by this method, it is difficult to ensure the size and structural morphology of the inscribed circle of the contact surface while ensuring the assembly accuracy during the continuous modification and grinding process of the electrodes and quartz auxiliary structural parts. The errors of multiple parts eventually accumulate and affect the distribution of the ideal electric field, reducing the ion transmission efficiency and mass resolution. In addition, the modification and grinding method of the electrodes and quartz auxiliary structural parts of the ion trap mass analyzer or orbital trap mass analyzer requires continuous measurement and manual grinding, which has extremely high requirements on the process level, resulting in low production and high price of the current related mass analyzers. Summary of the invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a ceramic mass analyzer and an electrode processing method, which solves the problems that the electrodes and quartz auxiliary structural parts of the existing ion trap mass analyzer are prone to errors in the continuous modification and grinding of the parts, resulting in reduced performance, and the preparation process is complicated, resulting in low output and high prices.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] A method for processing a ceramic mass analyzer electrode, characterized in that it comprises the following steps:

[0008] Step S1, establishing a 3D printing model of an optimal mass analyzer electrode suitable for a 3D printing device;

[0009] Step S2, preparing printing materials, 3D printing the 3D printed model obtained in step S1, obtaining a preliminary model structure, and sequentially cleaning, degreasing and sintering the preliminary model structure to obtain a first ceramic structure;

[0010] Step S3: performing surface post-treatment on the first ceramic structure to obtain a target ceramic structure.

[0011] Furthermore, the S1 comprises the following steps:

[0012] Step S 11 , draw the three-dimensional model of the mass analyzer electrode;

[0013] Step S 12 , performing analytical simulation and electric physical field coupling calculation on the three-dimensional model;

[0014] Step S 13 , judging whether the derived three-dimensional model meets the standard according to the calculation results;

[0015] If it is in accordance with the above, the three-dimensional model is the optimal mass analyzer electrode structure, which is exported as a 3D printing model, and the process proceeds to step S2;

[0016] If not, return to step S 11 , modify and draw the three-dimensional model according to the calculation results, and perform analysis simulation and electric physical field coupling calculation again until the three-dimensional model meets the standards.

[0017] Furthermore, the step S 11 The three-dimensional model drawn in the 3D printer can be exported to a 3D printing model suitable for engineering software supporting different 3D printing equipment, and the 3D printing model is a universal exchange binary file; and / or,

[0018] The step S 12 In the process, the three-dimensional model is analyzed and simulated and coupled with the electro-physical field, including: under the condition of given lens voltage and particle initial conditions, the distribution of the electrostatic field and the motion trajectory of the charged ions in the field are calculated by numerical solution, and the numerical solution is any one of the finite difference method, the finite element method and the charge density method.

[0019] Furthermore, the step S2 comprises the following steps:

[0020] Step S21 , configure special light-curing ceramic slurry;

[0021] Step S 22 3D printing the special light-cured ceramic slurry into a preliminary model structure, a first ceramic embryo;

[0022] Step S 23 , cleaning the first ceramic green body in a cleaning agent to obtain a second ceramic green body;

[0023] Step S 24 , performing a degreasing treatment on the second ceramic green body to obtain a third ceramic green body;

[0024] Step S 25 , sintering the third ceramic green body to obtain a first ceramic structure; and / or

[0025] The step S2 also includes a testing step, including:

[0026] Step S 26 , performing preliminary precision measurement on the first ceramic structure, and determining whether the dimensional error between the first ceramic structure and the 3D printed model obtained in step S1 meets the requirements according to the measurement data;

[0027] If the size of the first ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1, the first ceramic structure is discarded and the process returns to step S1. 21 Go to step S 25 ;

[0028] If the size of the first ceramic structure obtained is larger than the size of the 3D printed model obtained in step S1, calculating the size error between the first ceramic structure and the 3D printed model obtained in step S1;

[0029] If the size error is between 0-100 μm, proceed to step S3;

[0030] If the size error is between 100-200 μm or cracks occur, it is an accidental error, and the first ceramic structure is discarded and the process returns to step S. 21 Go to step S 25 ;

[0031] If the size error is greater than 200 μm, it is a system error, the first ceramic structure is discarded and the process returns to step S1 to modify and draw the 3D printing model according to the size error.

[0032] Furthermore, step S 21 The special light-curing ceramic slurry comprises a main component and an auxiliary component;

[0033] The main component includes any one or a combination of aluminum oxide, zirconium oxide, silicon carbide, aluminum nitride and silicon nitride, and the particle size of the main component is 0.5-50 μm;

[0034] The auxiliary components include any one or a combination of dispersants, binders, photoinitiators, stabilizers, and surfactants;

[0035] The main component and the auxiliary component are uniformly mixed in a specific ratio using a mixer, wherein the specific ratio is calculated by mass fraction, wherein the main component accounts for 75%-80% and the auxiliary component accounts for 20%-25%; and / or,

[0036] The step S 23 The cleaning agent is any one or a combination of isopropanol, ethanol, and deionized water; and / or,

[0037] The step S 24 The degreasing process lasts for 12-168 hours, and the degreasing process includes a low temperature stage, a medium temperature stage and a high temperature stage; and / or,

[0038] The step S 25 During the sintering process, the temperature is raised to 1400-2200°C at a heating rate of 3-10°C / h and then kept at this temperature for 12-72h.

[0039] Furthermore, the step S 22 In the step of 3D printing the photocurable ceramic slurry into a preliminary model structure, the step includes: controlling parameters of the photocurable ceramic 3D printer, including a single-layer scraping thickness, a laser scanning method, a laser power, a laser wavelength, and a laser scanning time;

[0040] The laser scanning method includes SLA stereolithography;

[0041] The thickness of the single-layer scraper is 10-100 μm;

[0042] The laser power is 3-5W;

[0043] The laser wavelength is 365-405nm;

[0044] The laser scanning time is 0.2-5s according to the requirements of the special light-cured ceramic slurry and the molding structure; or,

[0045] The laser scanning method includes DLP digital surface projection and LCD liquid crystal display;

[0046] The thickness of the single-layer scraper is 10-100 μm;

[0047] The laser power is 0-60mW / cm2 ;

[0048] The laser wavelength is 365-405nm;

[0049] The laser scanning time is 0.2-5s according to the requirements of the special light-cured ceramic slurry and the molding structure.

[0050] Furthermore, step S3 includes the following steps:

[0051] Step S 31 , performing contour modification on the sintered first ceramic structure to obtain a second ceramic structure;

[0052] Step S 32 , metallizing the second ceramic structure by using a composite process to obtain a third ceramic structure;

[0053] Step S 33 , using a composite process to hydrophobize the third ceramic structure to obtain a target ceramic structure.

[0054] Furthermore, step S 31 The process of modifying the contour of the first ceramic structure after sintering includes any one or a combination of turning, grinding, boring, carving, EDM electrical discharge machining and laser engraving; and / or,

[0055] Step S 32 The composite process for metallizing the second ceramic structure by using the composite process includes any one or a combination of PVD physical vapor deposition, CVD chemical vapor deposition, magnetron sputtering, screen printing, impregnation and co-firing; and / or,

[0056] Step S 33 The composite process for hydrophobizing the third ceramic structure by using a composite process includes any one of silanization treatment and sol-gel method or a combination of the two.

[0057] Furthermore, the processing method further comprises step S4: performing a secondary measurement on the target ceramic structure, and judging whether the dimensional error between the target ceramic structure and the 3D printing model obtained in step S1 meets the requirements according to the measurement data;

[0058] If the size of the target ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1 or cracks occur, the target ceramic structure is discarded and the process returns to step S2;

[0059] If the size of the target ceramic structure is larger than the size of the 3D printing model obtained in step S1, the error between the target ceramic structure and the 3D printing model obtained in step S1 is calculated.

[0060] If the error is between 0-50μm, the target ceramic structure is qualified;

[0061] If the error is between 50-100 μm, the target ceramic structure is subjected to surface post-processing again.

[0062] In order to achieve the above object, the present invention also adopts the following technical solutions:

[0063] A ceramic material mass analyzer, including a ceramic material ion trap mass analyzer, the ceramic material ion trap mass analyzer includes a mass analyzer electrode manufactured by any of the processing methods described, the mass analyzer electrode includes a ceramic front end cover electrode, a ceramic ring electrode and a ceramic rear end cover electrode;

[0064] The ceramic ring electrode is clamped between the ceramic front end cover electrode and the ceramic rear end cover electrode, the ceramic front end cover electrode is connected to one side of the ceramic ring electrode, and the ceramic rear end cover electrode is connected to the other side of the ceramic ring electrode; or,

[0065] A ceramic orbital trap mass analyzer is included, wherein the ceramic orbital trap mass analyzer includes a mass analyzer electrode manufactured by the processing method according to any one of claims 1 to 9, wherein the mass analyzer electrode includes a ceramic central axis electrode and two ceramic outer drum electrodes;

[0066] The ceramic center axis electrode is sandwiched between the two ceramic outer drum electrodes, and both ends of the ceramic center axis electrode extend from the two ceramic outer drum electrodes.

[0067] In summary, compared with the prior art, the present invention has at least the following beneficial effects:

[0068] The present invention relates to a ceramic mass analyzer and electrode processing method. First, a 3D printing model of an optimal mass analyzer electrode suitable for a 3D printing device is established, and then printing materials are configured. The 3D printing model of the optimal mass analyzer electrode obtained by 3D printing is obtained to obtain a preliminary model structure. The preliminary model is sequentially cleaned, degreased and sintered to obtain a first ceramic structure of the mass analyzer electrode. Finally, the target ceramic structure is obtained by surface post-processing the obtained first ceramic structure. The mass analyzer electrode manufactured by the method has high precision and good mechanical strength of the ceramic structure at the same time, and the processing method is simple, the processing yield is high, and the cost is lower than the mass analyzer electrode on the market, which is convenient for mass production. In addition, the printing precision of the mass analyzer electrode is very high, which greatly reduces the error generated when assembling the mass analyzer, reduces the difficulty of the mass analyzer preparation process, avoids the reduction of the mass analyzer precision caused by the error caused by the active connection between parts, improves the stability of the mass analyzer, and extends the service life of the mass analyzer. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0070] Figure 1 The present invention provides a flow chart of the method for processing ceramic mass analyzer electrodes.

[0071] Figure 2 A flow chart of a method for processing a ceramic mass analyzer electrode provided in an embodiment of the present invention.

[0072] Figure 3 FIG. 4 is a schematic structural diagram of a ceramic ion trap mass analyzer according to an embodiment of the present invention.

[0073] Figure 4 Schematic diagram of the structure of the ceramic front end cover electrode according to an embodiment of the present invention.

[0074] Figure 5 Schematic diagram of the structure of a ceramic ring electrode according to an embodiment of the present invention.

[0075] Figure 6 Schematic diagram of the structure of the ceramic rear end cover electrode according to an embodiment of the present invention.

[0076] Figure 7 Schematic diagram of the structure of a ceramic orbital trap mass analyzer according to an embodiment of the present invention.

[0077] Figure 8 for Figure 7 Cross-sectional view at AA in the figure.

[0078] Description of reference numerals:

[0079] 1. Ceramic front end cover electrode; 2. Ceramic ring electrode; 3. Ceramic rear end cover electrode; 4. Slot; 5. Pin; 6. Ceramic center axis electrode; 7. Ceramic outer drum electrode. DETAILED DESCRIPTION

[0080] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0081] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0082] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0083] As attached Figure 1 As shown, an embodiment of the present invention discloses a method for processing a ceramic mass analyzer electrode, comprising the following steps:

[0084] Step S1, establishing an optimal 3D printing model of a mass analyzer electrode suitable for a 3D printing device.

[0085] Specifically, step S1 includes the following steps:

[0086] Step S 11 , draw a three-dimensional model of the mass analyzer electrode.

[0087] The three-dimensional model is drawn by drawing the three-dimensional model of the initial version of the mass analyzer electrode in the three-dimensional modeling software of the computer based on the existing commercial structure model and historical experience parameters.

[0088] In the present invention, the ceramic material mass analyzer suitable for the processing method includes a ceramic material ion trap mass analyzer or a ceramic material orbital trap mass analyzer.

[0089] The structure of a traditional ion trap mass analyzer is generally detachably connected in sequence: a front cover electrode, a first auxiliary structural member, a ring electrode, a second auxiliary structural member and a rear cover electrode, wherein the front cover electrode, the ring electrode and the rear cover electrode are stainless steel structures, and the first auxiliary structural member connecting the front cover electrode and the ring electrode and the second auxiliary structural member connecting the ring electrode and the rear cover electrode are generally made of quartz. The structure of a traditional ion trap mass analyzer is made of different materials because the parts connected to each other are made of different materials, and most traditional ion trap mass analyzers are processed by CNC machine tools to process special stainless steel materials, and slots are designed at the electrode support structure. A quartz ring of a specific size is used for auxiliary positioning, so that the electrode is tightly attached to the surface of the quartz ring, and the contact surface between the quartz ring surface and the electrode is ground to control the overall assembly. This requires extremely high process level and is difficult to operate. In addition, multiple parts are made of multiple materials, which can easily lead to large errors.

[0090] Therefore, if the attached Figure 3 -Attached Figure 6 As shown, the ceramic ion trap mass analyzer of the present invention prints the traditional auxiliary structural parts on both sides and the middle ring electrode into a ceramic ring electrode 2, that is, the ceramic ion trap mass analyzer is composed of three electrode parts, namely, the ceramic front end cover electrode 1, the ceramic ring electrode 2 and the ceramic rear end cover electrode 3. The three-dimensional model of the embodiment of the present invention refers to the three-dimensional model of each of the three electrodes, namely, the ceramic front end cover electrode 1, the ceramic ring electrode 2 and the ceramic rear end cover electrode 3, to determine the size and structural parameters of each electrode. After the drawing is completed, the three-dimensional model of the initial version of the ion trap mass analyzer electrode is exported; the ceramic ion trap mass analyzer is an assembled three-dimensional model of the three-dimensional models of the above-mentioned electrodes.

[0091] Specifically, a plurality of slots 4 are provided on the outer edges of the ceramic front end cover electrode 1 and the ceramic rear end cover electrode 3 structures, and a plurality of pins 5 extend from the middle to both ends of the ceramic ring electrode 2. The number, distribution and size of the slots 4 of the ceramic front end cover electrode 1 and the ceramic rear end cover electrode 3 are consistent with the pins 5 of the ceramic ring electrode 2, so that the two ends of the ceramic ring electrode 2 are aligned and installed with the ceramic front end cover electrode 1 and the ceramic rear end cover electrode 3 to form a ceramic ion trap mass analyzer, and the traditional movable connection installation of five structural parts is improved to a rigid connection of three structural parts, which effectively reduces the difficulty of assembly and the errors generated during assembly, and at the same time effectively avoids the continuous accumulation of errors of multiple parts caused by the movable connection in the case of long-term use, which affects the distribution of the ideal electric field, reduces the ion transmission efficiency and mass resolution, and thus reduces the performance of the ion trap mass analyzer.

[0092] Similarly, the structure of a traditional orbital trap mass analyzer is generally detachably connected: a central axis electrode, two outer drum electrodes and two quartz seats, wherein the central axis electrode and the two outer drum electrodes are stainless steel structures, while the quartz seats that fix the outer drum electrodes and the central axis electrode are made of quartz. The structure of a traditional orbital trap mass analyzer is composed of multiple materials, and the processing method of most traditional ion trap mass analyzers is to use CNC machine tools to process special stainless steel materials, and use quartz seats of specific sizes to assist in positioning the electrode support structure, so that the electrode is close to the surface of the quartz seat, and the contact surface between the quartz seat surface and the electrode is ground to control the overall assembly. It has extremely high requirements on the process level and is difficult to operate. In addition, multiple parts are composed of multiple materials, which can easily lead to large errors.

[0093] Therefore, if the attached Figure 7 -Attached Figure 8 As shown, the ceramic orbital trap mass analyzer of the present invention prints the traditional quartz seats on both sides and the outer drum electrodes on both sides into a ceramic outer drum electrode 7, that is, the ceramic orbital trap mass analyzer is composed of a ceramic central axis electrode 6 and two symmetrically arranged ceramic outer drum electrodes 7. The three-dimensional model of the embodiment of the present invention refers to the three-dimensional model of each of the three electrodes, the ceramic central axis electrode 6 and the two symmetrically arranged ceramic outer drum electrodes 7, to determine the size and structural parameters of each electrode. After the drawing is completed, the three-dimensional model of the initial version of the orbital trap mass analyzer electrode is exported; the ceramic orbital trap mass analyzer is an assembled three-dimensional model of the three-dimensional models of the above-mentioned electrodes.

[0094] The ceramic center axis electrode 6 is built-in and clamped between two symmetrically arranged ceramic outer drum electrodes 7, and both ends extend from the side openings of the two ceramic outer drum electrodes 7, and the middle of the ceramic center axis electrode 6 is suspended in the internal space formed by the two ceramic outer drum electrodes. The traditional movable connection installation of five structural parts is improved to a rigid connection of three structural parts, which effectively reduces the difficulty of assembly and the errors generated during assembly. At the same time, it effectively avoids the situation that the errors of multiple parts caused by the movable connection will eventually accumulate and affect the distribution of the ideal electric field, reduce the ion transmission efficiency and mass resolution, and reduce the performance of the orbital trap mass analyzer in the case of long-term use, thereby ensuring the stable performance of the orbital trap mass analyzer and extending the service life of the orbital trap mass analyzer. The processing method for preparing the orbital trap mass analyzer with this structure is simple, has low operating difficulty, and has a high processing yield rate, so the cost is lower than the orbital trap mass analyzer on the market, which is convenient for mass production.

[0095] The software for drawing the three-dimensional model must be able to export the specific structure of the mass generator electrode into a universal exchange binary file that can be read on the engineering software supporting different 3D printing devices. At the same time, the three-dimensional model and the exported universal exchange binary file should comply with the molding structure and size allowed by different 3D printing devices. The software for drawing the three-dimensional model usually includes Solidworks, Pro / ENGINEER, PTC Creo, Materialise Magics and Voxeldance Tango, etc. Any one or a combination of the above can be used when drawing and exporting the three-dimensional model. For example, the steps of creating precise single parts, assembling single parts into complex assemblies and providing constraints, and exporting specific vector structures into universal exchange binary files use Solidworks software, and the process of simplifying and repairing the above universal exchange binary files uses Materialise Magics and Voxeldance Tango. The selection and use of software and the software version are not limited here.

[0096] Step S 12 , analyze and simulate the three-dimensional model and perform coupling calculations with the electrical physics field.

[0097] According to the actual operation mode, the mass analyzer electrode and the mass analyzer assembled therefrom will work at different temperatures and pressures. Although this part has no direct relationship with the formation of the electric field, it will affect the comprehensive performance. Therefore, it is necessary to perform physical field coupling calculation on the three-dimensional model of the mass analyzer electrode and the mass analyzer assembled therefrom, and consider multiple physical conditions together. In addition, the shape and layout of the electrode are optimized and adjusted in the present invention. Therefore, it is not only necessary to perform physical field coupling calculation on the three-dimensional model of the mass analyzer electrode and the mass analyzer assembled therefrom, but also to perform electric field simulation analysis on the three-dimensional model. By controlling the behavior of ions in the electric field, mass analysis is achieved and the dynamic behavior of ions inside the electric field is predicted to determine whether the performance of the three-dimensional model of the mass analyzer electrode and the mass analyzer assembled therefrom meets the standard. For example, the quadrupole field potential distribution is discussed, the boundary conditions such as the electrode shape and the voltage on the pole are analyzed, and the optimized small mass analyzer electrode structure including factors such as the entrance slit and the exit slit is deduced according to the quadrupole field potential distribution.

[0098] The methods of computational analysis generally include analytical solutions and numerical solutions. The analytical solution can only be used for a few systems with high symmetry, and the calculation process is very complicated. It is not widely used in practice. In most cases, numerical solutions are used. The following three solutions are currently widely used in numerical solutions: (a) Finite difference method: Starting from the differential equation of the electromagnetic field, the grid is divided in the entire area, and the differential equation is replaced by the difference equation to obtain a linear equation system; (b) Finite element method: Starting from the variational principle of the electromagnetic field, the entire area is divided to obtain a linear equation system; (c) Charge density method: Starting from Coulomb's law, the boundary is discretized to obtain a linear equation system. Any of the above methods can be selected for computational analysis, and there is no limitation here. The analysis and calculation software should use the above numerical solution to calculate the distribution of the electrostatic field and the motion trajectory of the charged ions in the field under the given lens voltage and particle initial conditions. Different 3D printing devices allow different molding structures and sizes, and their allowed parameters are also different. When drawing a three-dimensional model, the specific performance of the 3D printing device should be fully considered. The analysis and calculation software usually uses SIMION 8.0 series software or COMSOL Multiphysics 6.0 series software. SIMION 8.0 series software uses the finite difference method, which can calculate the distribution of the electrostatic field and the motion trajectory of the charged ions in the field under the given lens voltage and particle initial conditions, with an accuracy of 10μm. 3 The maximum simulation height is 8cm 3The COMSOL Multiphysics 6.0 series software can understand the interaction of various physical phenomena including ion movement and electron flow based on first principles such as transport phenomena, electromagnetic field theory, and solid mechanics. The software can use any of the above when performing analysis and calculations, and there is no limitation here. In addition, there is no limitation on the version of the software.

[0099] Step S 13 , judge whether the exported 3D model meets the standards based on the calculation results. Specifically, the standards mainly include:

[0100] (1) Whether the ion dynamic behavior obtained by calculation is close to or similar to that of a commercial ion trap mass analyzer or orbital trap mass analyzer.

[0101] (2) Under the existing electric field parameters, such as voltage, frequency, and their phase relationship, can we maintain a high transmission efficiency while minimizing unnecessary ion loss?

[0102] (3) Whether ions can be effectively captured, stored, and manipulated as expected.

[0103] (4) Whether it can meet the needs of further optimization such as miniaturization and portability.

[0104] If it is in compliance, it means that the performance and structure of the drawn three-dimensional model of the mass analyzer composed of electrodes meet the standards, and the three-dimensional model is the optimal mass analyzer electrode structure, which is exported as a 3D printing model, and step S2 and subsequent processing steps are continued;

[0105] If it does not meet the requirements, it means that the existing commercial structure model and historical experience parameters are not fully applicable, and it is necessary to return to step S 11 , evaluate the three-dimensional model according to the calculation results, modify and adjust the parameters such as the r / z value, stable area range, support structure, incident and exit holes of the mass analyzer based on literature data, experimental results or expert experience, and re-export it for analysis and simulation and electric physical field coupling calculation, and then judge it, and so on, until the 3D printing model of the optimal miniaturized mass analyzer electrode structure suitable for 3D printing equipment is drawn and exported.

[0106] Step S2, preparing printing materials, 3D printing the 3D printed model obtained in step S1, obtaining a preliminary model structure, and sequentially cleaning, degreasing and sintering the preliminary model structure to obtain a first ceramic structure.

[0107] Specifically, step S2 includes the following steps:

[0108] Step S 21 , prepare special light-curing ceramic slurry.

[0109] The special photocurable ceramic slurry includes main components and auxiliary components. The main components include one or more of aluminum oxide, zirconium oxide, silicon carbide, aluminum nitride and silicon nitride. Among them, aluminum oxide is economical and has high thermal stability, which is suitable for the development and research link in the processing method of the present invention; zirconium oxide has better fracture toughness and wear resistance, higher hardness, and a thermal collision coefficient that is closer to metal materials, and is a more ideal molding material in the processing method of the present invention; silicon carbide has extremely high high temperature resistance and low thermal expansion coefficient, and exhibits good thermal shock resistance, and can be doped with nano-metal particles or graphite structures, and can be used in the processing method of the present invention to prepare certain special structures with high electrical performance requirements; aluminum nitride has good insulation and mechanical properties, and can be used in the processing method of the present invention to prepare special structures with high electrical performance requirements; silicon nitride can be used in the processing method of the present invention to prepare certain special structures with high insulation performance requirements. Further, the particle size of the main component is 0.5-50μm. Of course, in other embodiments of the present invention, the particle size of the main component can also be adjusted accordingly according to the specific construction process requirements, and the present invention does not make specific limitations. At the same time, the brand and specifications of the material are not specifically limited in the present invention.

[0110] The auxiliary components include one or more of a dispersant, a binder, a photoinitiator, a stabilizer, and a surfactant. Among them, the dispersant is used to ensure that the main components are evenly dispersed in the liquid medium and prevent particles from aggregating, so as to provide good dispersibility for the special photocurable ceramic slurry in the present invention, and ensure high-precision and uniform interlayer bonding in the ceramic ion trap mass analyzer during 3D printing; the binder is used to bond the powder particles of the special photocurable ceramic slurry together to form an overall structure, which directly affects the mechanical properties of the molded object; the photoinitiator can quickly start the polymerization reaction under ultraviolet light and convert the liquid resin into a solid material. By selecting a suitable photoinitiator, the printing speed of the ceramic mass analyzer electrode of the present invention can be optimized and the curing degree can be improved; the stabilizer is used to help maintain the long-term stability of the special photocurable ceramic slurry, prevent performance changes caused by particle deposition or chemical reaction, so as to achieve a good printing effect of the mass analyzer electrode of the present invention; the surfactant is used to change the interfacial tension between the particles and the liquid, which helps to improve the wettability of the special photocurable ceramic slurry, so that the powder of the special photocurable ceramic slurry is more evenly distributed in the liquid medium, which helps to improve the quality and accuracy of the printed object during the printing process. In addition, the brand and specifications of the auxiliary components are not specifically limited in the present invention.

[0111] In the present invention, the main components and auxiliary components are mixed uniformly in a specific ratio using a mixer, so that the special light-curing ceramic slurry particles are evenly and effectively dispersed in a liquid medium such as a photosensitive resin liquid. The specific ratio is calculated by mass fraction, wherein the main component accounts for 75%-80%, and the auxiliary component accounts for 20%-25%. Of course, in other embodiments of the present invention, the specific ratio can also be adjusted accordingly according to the specific construction process requirements, and the present invention does not make specific limitations. The special light-curing ceramic slurry suspension obtained after mixing in the present invention should have appropriate rheological properties, including appropriate viscosity and long-term dispersion stability, and maintain appropriate viscosity during the printing process to ensure fluidity, and remain stable within a reasonable time (such as several hours to several days) without serious particle precipitation.

[0112] Step S 22 , 3D print the special light-curing ceramic slurry into a preliminary model structure, namely the first ceramic green embryo.

[0113] The 3D printing effect of the first ceramic green body is not only related to the preparation of the above-mentioned ceramic slurry, but also related to the main control parameters of the photocuring ceramic 3D printer. The main control parameters of the photocuring ceramic 3D printer include single-layer scraping thickness, laser scanning mode, laser power, laser wavelength and laser scanning time. Among them, the scraper thickness is the thickness of a layer of special photocurable ceramic slurry, which affects the resolution and speed of printing the mass analyzer electrode of the present invention. Although a thinner layer thickness can produce finer printing details, it will increase the printing time and the probability of printing failure. Although a thicker layer thickness can increase the printing speed, it may sacrifice some surface quality and detail single layer. Therefore, when printing the mass analyzer electrode of the present invention, the scraper thickness is usually set between 10-100μm; the laser scanning method usually includes SLA stereo photocuring, DLP digital surface projection, LCD liquid crystal display and derivative technologies of the above methods. The relevant scanning path also has a significant impact on the printing accuracy of the mass analyzer electrode of the present invention and the internal stress distribution of the molded parts, and should be continuously adjusted in combination with the specific mass analyzer electrode structure and actual experience; if the laser power is set too low, the special photocurable ceramic slurry may not be completely cured, and the power set too high may cause over-curing and deformation of the parts. Therefore, when printing the mass analyzer electrode of the present invention, the laser power of SLA stereo photocuring is usually set between 3-5W, and the laser power of DLP digital surface projection or LCD liquid crystal display is usually set between 0-60mW / cm 2The wavelength of the laser determines the absorption rate of the laser on the surface of the material. Different materials have different absorption efficiencies for lasers of specific wavelengths. Correctly selecting the appropriate wavelength can improve the printing efficiency of the mass analyzer electrode of the present invention and ensure a better printing effect. Therefore, when printing the mass analyzer electrode of the present invention, the laser wavelength is usually set between 365-405nm; the residence time of the laser on the surface of the special light-cured ceramic slurry affects the degree of energy input. The laser scanning time is usually controlled in conjunction with the scanning speed. If the laser scanning time is set too short, the special light-cured ceramic slurry may not be completely cured. If the laser scanning time is set too long, the special light-cured ceramic slurry may be over-cured or cause deformation and cracking of the components. Therefore, when printing the mass analyzer electrode of the present invention, the laser scanning time is usually set between 0.2-5s according to the requirements of the special light-cured ceramic slurry and the molding structure. Of course, in other embodiments of the present invention, the main control parameters of the light-cured ceramic 3D printer, i.e., the single-layer scraping thickness, laser scanning mode, laser power, laser wavelength and laser scanning time, can also be adjusted accordingly according to the specific construction process requirements, and the present invention does not make specific limitations.

[0114] Step S 23 , cleaning the first ceramic green body in a cleaning agent to obtain a second ceramic green body.

[0115] The purpose of cleaning is to clean off the excess uncured special light-cured ceramic slurry. 23 The main types of cleaning agents used include one or more of isopropanol, ethanol, and deionized water. Among them, for water-soluble or easy-to-clean ceramic printing materials, deionized water is generally selected to remove the residues of the first ceramic green embryo powder, and deionized water also plays a role in preventing the first ceramic green embryo from being contaminated; isopropanol and ethanol are suitable for situations where organic residues in special light-cured ceramic slurries need to be removed. Both can evaporate quickly at room temperature and effectively reduce the concentration of residues. In the actual cleaning process of the first ceramic green embryo, an appropriate cleaning liquid can be used in conjunction with an ultrasonic cleaning machine to efficiently remove the residues in the first ceramic green embryo structure without damaging the first ceramic green embryo structure. However, it should be noted that the cleaning effect should be tested on the experimental sample first and the ceramic material should be observed to see if it is damaged before judging whether to use the above method to clean the first ceramic green embryo. Of course, in other embodiments of the present invention, the selection of the cleaning agent can also be adjusted accordingly according to the specific construction process requirements, and the present invention does not make specific restrictions, and the brand and specifications of the cleaning agent are not specifically limited in the present invention.

[0116] Step S 24 , degreasing the second ceramic green body to obtain a third ceramic green body.

[0117] Degreasing refers to the use of a degreasing furnace to degrease the cleaned ceramic structure embryo and cool it with the furnace to obtain a ceramic structure embryo, i.e., the third ceramic embryo. The degreasing process usually needs to adjust the heating rate, holding time and cooling rate according to the structure and size of the second ceramic embryo. The degreasing process usually includes a low temperature stage, a medium temperature stage and a high temperature stage. The specific degreasing temperature is related to the type and amount of auxiliary components used in the special light-cured ceramic slurry, and the entire degreasing process should be heated slowly to avoid cracks or deformation caused by too fast a temperature rise. Specifically, the low temperature stage is about 100-200°C, at which stage, most of the water and some low-boiling organic matter in the second ceramic embryo will be removed; the medium temperature stage is about 200-500°C, at which stage, most of the organic additives in the second ceramic embryo will be removed; the high temperature stage is about 500-1200°C, at which stage, almost all organic components in the second ceramic embryo will be completely decomposed. The whole degreasing process time is 12-168h, and the specific degreasing time depends on the size, thickness and type and amount of additives used in the ceramic slurry of the second ceramic green embryo. In addition, in order to prevent the formation of cracks on the surface of the third ceramic green embryo obtained, it is necessary to control the heating rate. The generally recommended heating rate is 1-5℃ / min, wherein the temperature is kept for 3h after heating to 200℃, and then kept for 3h after continuing to heat to 300℃, and then kept for 3h after continuing to heat to 700℃, and then kept for 3h after continuing to heat to 1200℃. Of course, in other embodiments of the present invention, the heating rate and the insulation time can also be adjusted accordingly according to the specific construction process requirements, and the present invention is not specifically limited. After the heating process is completed and the specific temperature set is reached, it is also necessary to keep it at the specific temperature set for a period of time to ensure that all additives have been fully decomposed. Finally, after the degreasing process is completed, it should be cooled naturally with the furnace to avoid damage to the third ceramic green embryo caused by thermal stress.

[0118] Step S 25 , sintering the third ceramic green body to obtain a first ceramic structure.

[0119] Sintering treatment refers to using a sintering furnace to sinter the cleaned third ceramic green embryo and cool it with the furnace to obtain a first ceramic structure. The sintering process usually needs to adjust the heating rate, insulation time and cooling rate according to the structure and size of the third ceramic green embryo. The sintering process is usually affected by the type and intended use of the special light-cured ceramic slurry. The optimal temperature and time parameters of sintering depend on the type of ceramic and the type and amount of additives used. For example, when the main component of the special light-cured ceramic slurry in the embodiment of the present invention is aluminum oxide, the common sintering temperature is about 1550-1650°C; when the main component of the special light-cured ceramic slurry is zirconium oxide, the common sintering temperature is about 1400-1600°C; when the main component of the special light-cured ceramic slurry is silicon nitride, the common sintering temperature is about 1750-1850°C; the main component of the special light-cured ceramic slurry is silicon carbide, and the common sintering temperature is about 2000-2200°C, sometimes even higher.

[0120] The initial heating rate of the ceramic sintering process is usually set slower to avoid the accumulation of internal stress and the generation of cracks in the third ceramic embryo. The heating rate is generally set between 3-10℃ / h. After the temperature is raised to a specific temperature of 1400-2200℃, it is necessary to maintain it at a specific temperature for 12-72h to allow solid-phase sintering to occur between the special light-cured ceramic slurry powder particles. In addition, cooling after insulation usually uses natural cooling with the furnace to avoid surface cracking or deformation of the first ceramic structure obtained due to thermal stress. Among them, the main components of some special light-cured ceramic slurries, such as silicon carbide and silicon nitride, require a specific atmosphere during the sintering process to prevent material oxidation, such as the use of argon and nitrogen.

[0121] Since in executing step S 22 -S 26 The ceramic green body will undergo a certain degree of deformation during sintering, so it is necessary to add a measurement step after the sintering process:

[0122] Step S 26 , performing preliminary precision measurement on the first ceramic structure, and judging whether the dimensional error between the first ceramic structure and the 3D printed model obtained in step S1 meets the requirements according to the measurement data;

[0123] If the size of the first ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1, the first ceramic structure is discarded and the process returns to step S1. 21 Go to step S 25 ;

[0124] If the size of the first ceramic structure obtained is larger than the size of the 3D printed model obtained in step S1, then calculating the size error between the first ceramic structure and the 3D printed model obtained in step S1;

[0125] If the dimensional error is between 0-100 μm, continue with step S3 and subsequent processing steps;

[0126] If the size error is between 100-200 μm or cracking occurs, it is an accidental error, the first ceramic structure is discarded and the process returns to step S. 21 Go to step S 25 ;

[0127] If the size error is greater than 200 μm, it is a system error, the first ceramic structure is discarded and the process returns to step S1 to modify and draw the 3D printing model according to the size error.

[0128] The overall structure measurement means are specifically divided into contact scanning systems and non-contact scanning systems. The contact scanning system mainly includes a profilometer and a step meter, and the non-contact scanning system mainly includes the ATOS Q system. Among them, the profilometer is a precision instrument used to measure and evaluate the surface profile of the first ceramic structure. It mainly adopts a stylus-type sensing method. The stylus moves on the surface of the first ceramic structure, and records the contour line by sensing the follow-up reaction to the ups and downs of the surface of the first ceramic structure. By determining the actual geometric features and shape of the surface of the first ceramic structure, the flatness and manufacturing accuracy of the surface of the first ceramic structure can be evaluated; the step meter is an instrument used to measure the height difference change of the surface or microstructure of the first ceramic structure. It mainly adopts contact probe technology. The probe step meter contacts the surface of the first ceramic structure through a mechanical probe, and measures the height difference by moving the probe between different planes; the non-contact laser scanning system usually uses laser interference to measure the step height of the surface of the first ceramic structure, and the accuracy range can reach the micron requirement.

[0129] The first ceramic structure after sintering may have certain surface roughness and poor performance, so it is necessary to increase the surface post-treatment step to improve the quality and appearance of the first ceramic structure.

[0130] Step S3: performing surface post-treatment on the first ceramic structure to obtain a target ceramic structure.

[0131] Specifically, step S3 includes the following steps:

[0132] Step S 31 , modifying the contour of the sintered first ceramic structure to obtain a second ceramic structure.

[0133] Specifically, a precision CNC machine tool is used to modify the sintered first ceramic structure, the purpose of which is to mainly remove the roughness, defects and irregularities on the surface of the first ceramic structure, make the surface of the first ceramic structure smoother and more uniform, and make the error between the first ceramic structure and the ion trap structure model obtained in step S1 smaller. The main modification processes of the precision CNC machine tool include any one or a combination of turning, grinding, boring, carving, EDM electric spark machining and laser engraving. Among them, turning is a processing method that removes materials through the relative movement of a rotating workpiece and a non-rotating cutting tool. It can process the geometric shape and size of the first ceramic structure of the present invention, and realize the processing of a workpiece with a rotating surface with a larger contour; grinding is a processing method that uses the high-speed rotation of an abrasive tool to remove tiny defects on the surface of the first ceramic structure of the present invention, and can perform processing with high precision and small surface roughness requirements; boring is a method of further processing the inner hole on the first ceramic structure of the present invention using a boring tool to improve the processing accuracy of the inner hole, improve the surface quality of the inner hole or accurately modify the size of the inner hole, and also can process different inner hole shapes on the first ceramic structure, such as round holes, tapered holes, etc.; precision carving is a method of using a rotating tool to further process the inner hole on the first ceramic structure of the present invention, so as to improve the surface quality of the inner hole or accurately modify the size of the inner hole. At the same time, different inner hole shapes, such as round holes, tapered holes, etc., can also be processed on the first ceramic structure. Tools such as milling cutters cut workpieces to achieve the desired shape, size and smoothness. The precision engraving machine can perform multi-axis linkage during processing to achieve precise processing of complex curved surfaces and structures, and is suitable for precise processing of the hard surface of the first ceramic structure of the present invention; EDM electric spark machining is a processing method that removes materials through the electric spark discharge phenomenon. It generates pulse discharge between the tool electrode and the workpiece to achieve high-temperature melting or vaporization of the material. It is suitable for use when the first ceramic structure of the present invention is a hard material or has a complex internal shape, and does not generate cutting force; laser engraving uses a high-energy density laser beam to irradiate the surface of the material, so that the first ceramic structure of the present invention is locally rapidly heated and vaporized. It does not need to contact the workpiece during the processing process, and is suitable for processing fragile and thin materials.

[0134] Step S 32 , metallizing the second ceramic structure using a composite process to obtain a third ceramic structure.

[0135] Metallization refers to a technology that coats a metal layer on the surface of a second ceramic structure, which can effectively improve the comprehensive properties of the ceramic structure, such as strength, toughness and wear resistance. The main metallization processes include any one or a combination of PVD physical vapor deposition, CVD chemical vapor deposition, magnetron sputtering, screen printing, impregnation and co-firing. Among them, PVD physical vapor deposition is a metallization process in which metal is evaporated in a high vacuum environment by physical methods, and the metal vapor is condensed on the surface of the second ceramic structure of the present invention to form a thin film; CVD chemical vapor deposition is a metallization process in which metal or metal compounds are deposited on the surface of the second ceramic structure of the present invention at high temperature by chemical reaction; magnetron sputtering is a metallization process in which atoms or molecules of a metal target are "struck" onto the surface of a polymer by high voltage electricity, thereby forming a uniform metal layer on the surface of the second ceramic structure of the present invention; screen printing is a metallization process in which a conductive slurry is used to form a pattern on a ceramic structure through screen printing technology, and then sintering is performed to combine the metal compound with the second ceramic structure of the present invention; the impregnation method is a metallization process in which the second ceramic structure of the present invention is immersed in a solution containing metal ions, and the metal ions are reduced and attached to the surface of the second ceramic structure through heat treatment; co-firing is a metallization process in which the second ceramic structure coated with metal is sintered at high temperature, so that the metal and the second ceramic structure are melted at high temperature to form a close mechanical and chemical bond, which can form a strong and durable connection relationship.

[0136] Step S 33 , using a composite process to hydrophobize the third ceramic structure to obtain a target ceramic structure.

[0137] Hydrophobization refers to a technology that improves the self-cleaning and anti-fouling properties of the surface of the third ceramic structure. The main processes for hydrophobizing ceramic structures include any one of silanization treatment and sol-gel method or a combination of the two. Among them, silanization treatment is a hydrophobicization process in which a silane solvent such as methylsilane, ethylsilane, etc. is applied to the third ceramic structure, or the third ceramic structure is immersed in a silane solution to form a film; the sol-gel method is a hydrophobicization process in which a layer of thin film containing hydrophobic groups is created on the surface of the third ceramic structure by plasma to achieve hydrophobicization.

[0138] Finally, in order to check whether the error between the target ceramic structure size obtained after surface post-treatment and the ion trap structure model obtained in step S1 is further reduced or whether the surface is intact and crack-free, a precision measurement step is added after the ceramic ion trap mass analyzer is processed to ensure that the product quality of the finished product is optimal when it is put into use. Therefore, the processing method of the present invention also includes:

[0139] Step S4, performing a secondary measurement on the target ceramic structure, and judging whether the dimensional error between the target ceramic structure and the 3D printing model obtained in step S1 meets the requirements according to the measurement data;

[0140] If the size of the target ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1 or cracks occur, the target ceramic structure is discarded and the process returns to step S2;

[0141] If the size of the target ceramic structure is larger than the size of the 3D printed model obtained in step S1, the error between the target ceramic structure and the 3D printed model obtained in step S1 is calculated.

[0142] If the error is between 0-50μm, the target ceramic structure is qualified and can be put into use later;

[0143] If the error is between 50-100 μm, the target ceramic structure is subjected to surface post-processing step S3 again to reduce the error between the target ceramic structure and the 3D printed model obtained in step S1, and the processing is stopped after the error range is reduced to between 0-50 μm to obtain a finished ceramic ion trap mass analyzer.

[0144] Overall structure measurement methods and steps 26 The overall structure measurement means used are the same. Among them, the profilometer is a precision instrument used to measure and evaluate the surface contour of the target ceramic structure. It mainly adopts a stylus-type sensing method. The stylus moves on the surface of the target ceramic structure, and records the contour line by sensing the follow-up reaction to the ups and downs of the target ceramic structure surface. By determining the actual geometric characteristics and shape of the target ceramic structure surface, the flatness and manufacturing accuracy of the target ceramic structure surface can be evaluated; the step meter is an instrument used to measure the height difference change of the target ceramic structure surface or microstructure. It mainly adopts contact probe technology. The probe step meter contacts the surface of the target ceramic structure with a mechanical probe and measures the height difference by moving the probe between different planes; the non-contact laser scanning system usually uses laser interference to measure the step height on the surface of the target ceramic structure, and the accuracy range can reach the micron requirement.

[0145] The features and performance of the present invention are further described in detail below in conjunction with the embodiments.

[0146] Example 1

[0147] Step S1, according to the two-dimensional drawings of the ion trap mass analyzer electrodes, namely the ceramic front end cover electrode 1, the ceramic ring electrode 2 and the ceramic rear end cover electrode 3, use Solidworks to draw the three-dimensional models of the ceramic front end cover electrode 1, the ceramic ring electrode 2 and the ceramic rear end cover electrode 3, and export binary files respectively. If necessary, the above three electrodes can also be assembled to obtain the three-dimensional model of the ion trap mass analyzer, and export the binary file; after simplifying and repairing the above binary file using Materialise Magics, the three-dimensional models of the exported electrodes are analyzed and simulated and the electric physical field coupling calculation is performed. If necessary, the three-dimensional model of the ion trap mass analyzer assembled by the above three electrodes can be analyzed and simulated and the electric physical field coupling calculation is performed; specifically, under the condition of given lens voltage and particle initial conditions, use SIMION The 8.0 series software calculates and analyzes the performance of each three-dimensional model. When the performance and structure of the three-dimensional model of the ion trap mass analyzer composed of the drawn ceramic front end cover electrode 1, ceramic ring electrode 2, ceramic rear end cover electrode 3 and the above three electrodes meet the standards, the 3D printing model of the optimal miniaturized ion trap mass analyzer electrode structure, namely the ceramic front end cover electrode 1, ceramic ring electrode 2 and ceramic rear end cover electrode 3, is obtained.

[0148] Step S2, using 80wt.% alumina, 3wt.% dispersant, 3wt.% photoinitiator and 14wt.% other auxiliary components to uniformly mix in a photosensitive resin liquid using a mixer to obtain a special light-cured ceramic slurry, adding the special light-cured ceramic slurry into a loading box of a light-cured ceramic 3D printer, importing the binary file of the 3D printing model of the optimal miniaturized ion trap mass analyzer electrode into the light-cured ceramic 3D printer control software, setting the scraping thickness to 50μm, the laser scanning mode to SLA stereo light curing, the laser power to 5W, the laser wavelength to 385nm, and obtaining a first ceramic embryo after successful printing, and placing the first ceramic embryo into isopropanol to clean off excess uncured ceramic slurry to obtain A second ceramic green embryo, placing the second ceramic green embryo into a degreasing furnace, gradually heating up at a heating rate of 1°C / min, heating to 200°C and then keeping warm for 3h, continuing to heat to 300°C and then keeping warm for 3h, continuing to heat to 700°C and then keeping warm for 3h, finally continuing to heat to 1200°C and then keeping warm for 3h, closing the degreasing furnace after the insulation is completed, and naturally cooling to room temperature with the furnace to obtain a third ceramic green embryo, moving the third ceramic green embryo into a muffle furnace, heating to 1600°C at a heating rate of 5°C / min, and then keeping at this temperature for 36h, closing the muffle furnace after the heating is completed, and naturally cooling to room temperature with the furnace to obtain a first ceramic structure, and using a profilometer to measure the size and surface of the first ceramic structure to confirm that the size of the first ceramic structure meets the standard.

[0149] Step S3, placing the first ceramic structure that meets the measurement standards into a precision CNC machine tool for grinding and carving to obtain a second ceramic structure, placing the obtained second ceramic structure into a high vacuum environment for PVD physical vapor deposition to obtain a third ceramic structure with a metal film formed on the surface, and the hydrophobic process step is omitted here, that is, the obtained third ceramic structure is the target ceramic structure.

[0150] Step S4, using the ATOS Q system to measure the size and surface of the target ceramic structure;

[0151] Specifically, a second measurement is performed on the target ceramic structure, and it is determined based on the measurement data whether the dimensional error between the target ceramic structure and the 3D printing model obtained in step S1 meets the requirements;

[0152] If the size of the target ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1 or cracks occur, the target ceramic structure is discarded and the process returns to step S2;

[0153] If the size of the target ceramic structure obtained is larger than the size of the 3D printed model obtained in step S1, then calculating the error between the target ceramic structure and the 3D printed model obtained in step S1;

[0154] If the error is between 0 and 50 μm, the target ceramic structure is qualified and each electrode of the mass analyzer is obtained;

[0155] If the error is between 50-100 μm, the target ceramic structure is subjected to surface post-processing again.

[0156] Example 2

[0157] Step S1, according to the two-dimensional drawings of the ion trap mass analyzer electrodes, namely the ceramic front end cover electrode 1, the ceramic ring electrode 2 and the ceramic rear end cover electrode 3, use Pro / ENGINEER to draw the three-dimensional models of the ceramic front end cover electrode 1, the ceramic ring electrode 2 and the ceramic rear end cover electrode 3, and export binary files respectively; if necessary, the above three electrodes can also be assembled to obtain the three-dimensional model of the ion trap mass analyzer, and export the binary file; after simplifying and repairing the above binary file using Voxeldance Tango, the three-dimensional models of the exported electrodes are analyzed and simulated and the electric physical field coupling calculation is performed, and if necessary, the three-dimensional model of the ion trap mass analyzer assembled by the above three electrodes can be analyzed and simulated and the electric physical field coupling calculation is performed; specifically, under the condition of given lens voltage and particle initial conditions, use SIMION The 8.0 series software calculates and analyzes the performance of each three-dimensional model. When the performance and structure of the three-dimensional model of the ion trap mass analyzer composed of the drawn ceramic front end cover electrode 1, ceramic ring electrode 2, ceramic rear end cover electrode 3 and the above three electrodes meet the standards, the 3D printing model of the optimal miniaturized ion trap mass analyzer electrode structure, namely the ceramic front end cover electrode 1, ceramic ring electrode 2 and ceramic rear end cover electrode 3, is obtained.

[0158] Step S2: 80wt.% zirconium oxide, 2wt.% dispersant, 3wt.% photoinitiator and 15wt.% other auxiliary components are uniformly mixed in a photosensitive resin liquid using a mixer to obtain a special photocurable ceramic slurry, and the special photocurable ceramic slurry is added to the loading box of the photocurable ceramic 3D printer. The binary file of the 3D printing model of the optimal miniaturized ion trap mass analyzer electrode is imported into the control software of the photocurable ceramic 3D printer, and the scraping thickness is set to 50μm, the laser scanning mode is DLP digital surface projection, and the laser power is 50mW / cm 2 , the laser wavelength is 405nm, the laser scanning time is 2.5s, and the first ceramic embryo is obtained after successful printing. The first ceramic embryo is placed in deionized water to wash away excess uncured ceramic slurry to obtain a second ceramic embryo. The second ceramic embryo is placed in a degreasing furnace and gradually heated at a heating rate of 1℃ / min. After heating to 200℃, it is kept warm for 3h, and then continued to heat to 300℃ and then kept warm for 3h, and then continued to heat to 700℃ and then kept warm for 3h. Finally, it is continued to heat to 1200℃ and then kept warm for 3h. After the insulation is completed, the degreasing furnace is turned off, and the furnace is naturally cooled to room temperature to obtain a third ceramic embryo. After the third ceramic embryo is moved into a muffle furnace, it is heated to 1500℃ at a heating rate of 5℃ / min and then kept at this temperature for 20h. After the heating is completed, the muffle furnace is turned off, and the furnace is naturally cooled to room temperature to obtain a first ceramic structure, and the size and surface of the first ceramic structure are measured using a profilometer to confirm that the size of the first ceramic structure meets the standard.

[0159] Step S3, placing the first ceramic structure that meets the measurement standards into a precision CNC machine tool for turning to obtain a second ceramic structure, and using a PVD physical vapor deposition process on the obtained second ceramic structure to obtain a third ceramic structure with a metal film formed on the surface. The hydrophobic process step is omitted here, and the obtained third ceramic structure is the target ceramic structure.

[0160] Step S4, using the ATOS Q system to measure the size and surface of the target ceramic structure;

[0161] Specifically, a second measurement is performed on the target ceramic structure, and it is determined based on the measurement data whether the dimensional error between the target ceramic structure and the 3D printing model obtained in step S1 meets the requirements;

[0162] If the size of the target ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1 or cracks occur, the target ceramic structure is discarded and the process returns to step S2;

[0163] If the size of the target ceramic structure obtained is larger than the size of the 3D printed model obtained in step S1, then calculating the error between the target ceramic structure and the 3D printed model obtained in step S1;

[0164] If the error is between 0 and 50 μm, the target ceramic structure is qualified and each electrode of the mass analyzer is obtained;

[0165] If the error is between 50-100 μm, the target ceramic structure is subjected to surface post-processing again.

[0166] Example 3

[0167] Step S1, according to the two-dimensional drawings of the orbital trap mass analyzer electrodes, namely the ceramic central axis electrode 6 and the two ceramic outer drum electrodes 7, use PTC Creo to draw the three-dimensional models of the ceramic central axis electrode 6 and the two ceramic outer drum electrodes 7, and export binary files respectively; if necessary, the above three electrodes can be assembled to obtain the three-dimensional model of the orbital trap mass analyzer, and the binary file is exported; after simplifying and repairing the above binary file using Materialise Magics, the three-dimensional models of each electrode exported are analyzed and simulated and the electric physical field coupling calculation is performed, and if necessary, the three-dimensional model of the orbital trap mass analyzer assembled by the above three electrodes can be analyzed and simulated and the electric physical field coupling calculation is performed; specifically, under the condition of given lens voltage and particle initial conditions, the COMSOL Multiphysics 6.0 series software is used to calculate and analyze the various performances of each three-dimensional model, and when the performance and structure of the three-dimensional model of the drawn ceramic central axis electrode 6, the two ceramic outer drum electrodes 7 and the orbital trap mass analyzer assembled by the above three electrodes meet the standards, the optimal miniaturized orbital trap mass analyzer electrode structure, namely the 3D printing model of the ceramic central axis electrode 6 and the two ceramic outer drum electrodes 7 is obtained;

[0168] Step S2: 75wt.% silicon carbide, 5wt.% dispersant, 3wt.% photoinitiator and 12wt.% other auxiliary components are uniformly mixed in a photosensitive resin liquid using a mixer to obtain a special photocurable ceramic slurry, and the special photocurable ceramic slurry is added to the loading box of the photocurable ceramic 3D printer, and the binary file of the 3D printing model of the optimal miniaturized orbital trap mass analyzer electrode is imported into the control software of the photocurable ceramic 3D printer, and the scraping thickness is set to 40μm, the laser scanning mode is LCD liquid crystal display, and the laser power is 60mW / cm 2 , the laser wavelength is 405nm, the laser scanning time is 2.8s, and the first ceramic embryo is obtained after successful printing. The first ceramic embryo is placed in ethanol to clean off excess uncured ceramic slurry to obtain a second ceramic embryo. The second ceramic embryo is placed in a degreasing furnace and gradually heated at a heating rate of 1℃ / min. After heating to 200℃, it is kept warm for 3h, and then continued to heat to 300℃ and then kept warm for 3h, and then continued to heat to 700℃ and then kept warm for 3h, and finally continued to heat to 1200℃ and then kept warm for 3h. After the insulation is completed, the degreasing furnace is turned off, and the furnace is naturally cooled to room temperature to obtain a third ceramic embryo. After the third ceramic embryo is moved into a muffle furnace, it is heated to 2100℃ at a heating rate of 5℃ / min and then kept at this temperature for 24h. After the heating is completed, the muffle furnace is turned off, and the furnace is naturally cooled to room temperature to obtain a first ceramic structure, and the size and surface of the first ceramic structure are measured using a profilometer to confirm that the size of the first ceramic structure meets the standard.

[0169] Step S3, placing the first ceramic structure that meets the standard in measurement into a precision CNC machine tool and laser engraving it to obtain a second ceramic structure, immersing the obtained second ceramic structure in a solution containing metal ions, reducing the metal ions through heat treatment and attaching them to the surface of the second ceramic structure to obtain a third ceramic structure, using a sol-gel method to perform a hydrophobic treatment on the obtained third ceramic structure so that a layer of thin film containing hydrophobic groups is formed on its surface, thereby obtaining the desired target ceramic structure.

[0170] Step S4, using the ATOS Q system to measure the size and surface of the target ceramic structure;

[0171] Specifically, a second measurement is performed on the target ceramic structure, and it is determined based on the measurement data whether the dimensional error between the target ceramic structure and the 3D printing model obtained in step S1 meets the requirements;

[0172] If the size of the target ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1 or cracks occur, the target ceramic structure is discarded and the process returns to step S2;

[0173] If the size of the target ceramic structure obtained is larger than the size of the 3D printed model obtained in step S1, then calculating the error between the target ceramic structure and the 3D printed model obtained in step S1;

[0174] If the error is between 0 and 50 μm, the target ceramic structure is qualified and each electrode of the mass analyzer is obtained;

[0175] If the error is between 50-100 μm, the target ceramic structure is subjected to surface post-processing again.

[0176] In addition to the above-mentioned mass analyzer electrode processing method, the present invention also provides a ceramic material mass analyzer assembled from the mass analyzer electrodes obtained by the processing method of the above-mentioned embodiment, such as a ceramic material ion trap mass analyzer or a ceramic material orbital trap mass analyzer.

[0177] As attached Figure 3 -Attached Figure 6 As shown, the ceramic material ion trap mass analyzer includes mass analyzer electrodes, and the mass analyzer electrodes include a ceramic front end cover electrode 1, a ceramic ring electrode 2 and a ceramic rear end cover electrode 3, and these electrodes are all made by the above processing method. The ceramic material ion trap mass analyzer is assembled as follows: the ceramic ring electrode 2 is sandwiched between the ceramic front end cover electrode 1 and the ceramic rear end cover electrode 3, the ceramic front end cover electrode 1 is connected to one side of the ceramic ring electrode 2, and the ceramic rear end cover electrode 3 is connected to the other side of the ceramic ring electrode 2.

[0178] As attached Figure 7 -Attached Figure 8As shown, the ceramic orbital trap mass analyzer includes a mass analyzer electrode, and the mass analyzer electrode includes a ceramic central axis electrode 6 and two ceramic outer drum electrodes 7, and the above electrodes are all made by the above processing method. The ceramic orbital trap mass analyzer is assembled as follows: the ceramic central axis electrode 6 is sandwiched between the two ceramic outer drum electrodes 7, and the two ends of the ceramic central axis electrode 6 extend from the side openings of the two ceramic outer drum electrodes 7.

[0179] The mass analyzer electrodes are processed by 3D printing, which has high processing accuracy. They are then assembled into a mass analyzer, which greatly reduces the processing errors caused by the traditional preparation of mass analyzer electrodes and the assembly errors caused by traditional electrodes assembled into a mass analyzer. It reduces the difficulty of assembling the mass analyzer, avoids the reduction in mass analyzer accuracy caused by errors caused by active connections between parts, improves the stability of the mass analyzer, and extends the service life of the mass analyzer.

[0180] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. A method for processing a ceramic mass analyzer electrode, characterized in that: The following steps are involved: Step S1, establishing an optimal 3D printing model of a mass analyzer electrode suitable for a 3D printing device; Step S2, preparing printing materials, 3D printing the 3D printed model obtained in step S1, obtaining a preliminary model structure, and sequentially cleaning, degreasing and sintering the preliminary model structure to obtain a first ceramic structure; Step S3: performing surface post-treatment on the first ceramic structure to obtain a target ceramic structure.

2. The processing method according to claim 1, characterized in that: The S1 comprises the following steps: Step S 11 , draw the three-dimensional model of the mass analyzer electrode; Step S 12 , performing analytical simulation and electric physical field coupling calculation on the three-dimensional model; Step S 13 , judging whether the derived three-dimensional model meets the standard according to the calculation results; If it is in accordance with the above, the three-dimensional model is the optimal mass analyzer electrode structure, which is exported as a 3D printing model, and the process proceeds to step S2; If not, return to step S 11 , modify and draw the three-dimensional model according to the calculation results, and perform analysis simulation and electric physical field coupling calculation again until the three-dimensional model meets the standards.

3. The processing method according to claim 2, characterized in that: The step S 11 The three-dimensional model drawn in can be exported as a 3D printing model suitable for engineering software supporting different 3D printing equipment, and the 3D printing model is a universal exchange binary file; and / or, The step S 12 In the process, the three-dimensional model is analyzed and simulated and coupled with the electro-physical field, including: under the condition of given lens voltage and particle initial conditions, the distribution of the electrostatic field and the motion trajectory of the charged ions in the field are calculated by numerical solution, and the numerical solution is any one of the finite difference method, the finite element method and the charge density method.

4. The processing method according to claim 1, characterized in that: The step S2 comprises the following steps: Step S 21 , configure special light-curing ceramic slurry; Step S 22 3D printing the special light-cured ceramic slurry into a preliminary model structure, i.e., a first ceramic embryo; Step S 23 , cleaning the first ceramic green body in a cleaning agent to obtain a second ceramic green body; Step S 24 , performing a degreasing treatment on the second ceramic green body to obtain a third ceramic green body; Step S 25 , sintering the third ceramic green body to obtain a first ceramic structure; and / or The step S2 also includes a testing step, including: Step S 26 , performing preliminary precision measurement on the first ceramic structure, and determining whether the dimensional error between the first ceramic structure and the 3D printed model obtained in step S1 meets the requirements according to the measurement data; If the size of the first ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1, the first ceramic structure is discarded and the process returns to step S1. 21 Go to step S 25 ; If the size of the first ceramic structure obtained is larger than the size of the 3D printed model obtained in step S1, calculating the size error between the first ceramic structure and the 3D printed model obtained in step S1; If the size error is between 0-100 μm, proceed to step S3; If the size error is between 100-200 μm or cracks occur, it is an accidental error, and the first ceramic structure is discarded and the process returns to step S. 21 Go to step S 25 ; If the size error is greater than 200 μm, it is a system error, the first ceramic structure is discarded and the process returns to step S1 to modify and draw the 3D printing model according to the size error.

5. The processing method according to claim 4, characterized in that: Step S 21 The special light-curing ceramic slurry comprises a main component and an auxiliary component; The main component includes any one or a combination of aluminum oxide, zirconium oxide, silicon carbide, aluminum nitride and silicon nitride, and the particle size of the main component is 0.5-50 μm; The auxiliary components include any one or a combination of dispersants, binders, photoinitiators, stabilizers, and surfactants; The main component and the auxiliary component are uniformly mixed in a specific ratio using a mixer, wherein the specific ratio is calculated by mass fraction, wherein the main component accounts for 75%-80% and the auxiliary component accounts for 20%-25%; and / or, The step S 23 The cleaning agent is any one or a combination of isopropanol, ethanol, and deionized water; and / or, The step S 24 The degreasing process lasts for 12-168 hours, and the degreasing process includes a low temperature stage, a medium temperature stage and a high temperature stage; and / or, The step S 25 During the sintering process, the temperature is raised to 1400-2200°C at a heating rate of 3-10°C / h and then kept at this temperature for 12-72h.

6. The processing method according to claim 4, characterized in that: The step S 22 In the method, 3D printing the photocurable ceramic slurry into a preliminary model structure includes: controlling parameters of the photocurable ceramic 3D printer, including single-layer scraping thickness, laser scanning method, laser power, laser wavelength and laser scanning time; the laser scanning method includes SLA stereoscopic photocuring; The thickness of the single-layer scraper is 10-100 μm; The laser power is 3-5W; The laser wavelength is 365-405nm; The laser scanning time is 0.2-5s according to the requirements of the special light-cured ceramic slurry and the molding structure; or, The laser scanning method includes DLP digital surface projection and LCD liquid crystal display; The thickness of the single-layer scraper is 10-100 μm; The laser power is 0-60mW / cm 2 ; The laser wavelength is 365-405nm; The laser scanning time is 0.2-5s according to the requirements of the special light-cured ceramic slurry and the molding structure.

7. The processing method according to claim 1, characterized in that: The step S3 comprises the following steps: Step S 31 , performing contour modification on the sintered first ceramic structure to obtain a second ceramic structure; Step S 32 , metallizing the second ceramic structure by using a composite process to obtain a third ceramic structure; Step S 33 , using a composite process to hydrophobize the third ceramic structure to obtain a target ceramic structure.

8. The processing method according to claim 7, characterized in that: Step S 31 The process of modifying the contour of the first ceramic structure after sintering includes any one or a combination of turning, grinding, boring, carving, EDM electrical discharge machining and laser engraving; and / or, Step S 32 The composite process for metallizing the second ceramic structure by using the composite process includes any one or a combination of PVD physical vapor deposition, CVD chemical vapor deposition, magnetron sputtering, screen printing, impregnation and co-firing; and / or, Step S 33 The composite process for hydrophobizing the third ceramic structure by using a composite process includes any one of silanization treatment and sol-gel method or a combination of the two.

9. The processing method according to claim 1, characterized in that: The processing method further comprises step S4: performing a secondary measurement on the target ceramic structure, and judging whether the dimensional error between the target ceramic structure and the 3D printing model obtained in step S1 meets the requirements according to the measurement data; If the size of the target ceramic structure obtained is smaller than the size of the 3D printed model obtained in step S1 or cracks occur, the target ceramic structure is discarded and the process returns to step S2; If the size of the target ceramic structure obtained is larger than the size of the 3D printing model obtained in step S1, then calculating the error between the target ceramic structure and the 3D printing model obtained in step S1; If the error is between 0-50μm, the target ceramic structure is qualified; If the error is between 50-100 μm, the target ceramic structure is subjected to surface post-processing again.

10. A ceramic mass analyzer, characterized in that: A ceramic ion trap mass analyzer is included, wherein the ceramic ion trap mass analyzer includes a mass analyzer electrode manufactured by the processing method according to any one of claims 1 to 9, wherein the mass analyzer electrode includes a ceramic front end cover electrode, a ceramic ring electrode and a ceramic rear end cover electrode; The ceramic ring electrode is clamped between the ceramic front end cover electrode and the ceramic rear end cover electrode, the ceramic front end cover electrode is connected to one side of the ceramic ring electrode, and the ceramic rear end cover electrode is connected to the other side of the ceramic ring electrode; or, A ceramic orbital trap mass analyzer is included, wherein the ceramic orbital trap mass analyzer includes a mass analyzer electrode manufactured by the processing method according to any one of claims 1 to 9, wherein the mass analyzer electrode includes a ceramic central axis electrode and two ceramic outer drum electrodes; The ceramic central axis electrode is sandwiched between the two ceramic outer drum electrodes, and two ends of the ceramic central axis electrode extend out from the side openings of the two ceramic outer drum electrodes.

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