Combined clamp frame

Abstract

The invention provides a combined clamp frame, and belongs to the field of silicon wafer processing, the combined clamp frame comprises an upper support body and a blanking frame, the butt joint of the upper support body and the blanking frame adopts a positioning support module, and a split flexible chuck and a composite cushion block of the blanking frame are in direct contact with a silicon wafer. Wherein the split type flexible chuck integrally or independently unlocks any group of supported silicon wafers; the combined clamp frame of the upper supporting body and the discharging frame is adopted, flexible contact is adopted in the portion, abutting against the silicon wafer, of the discharging frame, the problem of hard contact damage is avoided, independent, step-by-step or overall unlocking can be achieved, the structure is simple, use is convenient, the damage rate is low, and application and popularization in the silicon wafer machining field are facilitated.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer processing, and in particular relates to a combined clamp frame. Background Art

[0002] During the silicon wafer preparation process, the degumming, rinsing and other processes of the silicon wafer all involve the material frame structure. Therefore, the structure of the material frame is related to the silicon wafer yield and processing production efficiency.

[0003] Existing material frames are structures that fix the silicon wafer in whole or in part and release the fixation in whole. The material frame structure often uses rigid contact when clamping or supporting the silicon wafer, which easily leads to dirt or even breakage of the contact points. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides a combined clamp frame, which can solve the above-mentioned problems.

[0005] A combined clamp frame includes an upper support body and a blanking frame, a positioning support module is used at the joint between the upper support body and the blanking frame, a split flexible chuck and a composite pad of the blanking frame are in direct contact with silicon wafers, wherein the split flexible chuck unlocks any group of supported silicon wafers as a whole or individually.

[0006] Furthermore, the upper support body includes an upper end plate, a side upper support beam, an upper hanging column, a crystal support lower limit plate, a plurality of crystal support upper limit blocks and an upper positioning support block with an upper positioning portion at the bottom end, and two side upper support beams are arranged in parallel and spaced apart between the two upper end plates, thereby forming an upper support frame, four columnar upper positioning support blocks are arranged at both ends of the two side upper support beams, the crystal support lower limit plate is arranged across the two side upper support beams, and a plurality of crystal support upper limit blocks are arranged on the crystal support lower limit plate.

[0007] Furthermore, the material unloading frame includes a material frame body with an opening at the top, two rows of split flexible chucks, a composite pad, a lower hanging column and a lower positioning support block with a lower positioning portion on the top; two rows of the split flexible chucks are correspondingly arranged on both sides of the top of the material frame body, the composite pad is arranged at the bottom of the material frame body, and the lower positioning support block is arranged at the top of the material frame body.

[0008] Furthermore, the composite pad includes a lower rigid pad, an upper flexible block and a flexible block pressure plate, the upper flexible block abuts against the upper surface of the lower rigid pad, the two flexible block pressure plates are arranged on the outside of the lower rigid pad and the upper flexible block, and the upper installation height of the flexible block pressure plate is lower than the upper installation height of the upper flexible block.

[0009] Furthermore, a lower pad block positioning piece is provided below the lower rigid pad block for positioning and supporting the material frame and the lower rigid pad block.

[0010] Furthermore, each row of the split flexible chucks includes a plurality of clamping blocks, flexible abutments, clamping pivots, flip seats, flip fixing plates and anti-collision strips provided with connecting parts; the flexible abutments are embedded in the recess at the front end of the clamping block, the rear end of the clamping block is mounted on the flip seat through the clamping pivot, the front end of the flip seat is fixedly connected to the rear end face of the flip fixing plate, the anti-collision strip is connected to the front end face of the flip fixing plate, and the rear end face of the flip seat is connected to the top surface of the material frame through the fixing block.

[0011] Compared with the prior art, the beneficial effects of the present invention are as follows: the present application adopts a combined clamp frame of an upper support body and a blanking frame, and the parts of the blanking frame that abut against the silicon wafer adopt flexible contact, avoiding the problem of hard contact damage, and can be unlocked independently, step by step or as a whole. It has a simple structure and is compatible with silicon wafers in the range of 166mm-230mm (of course, it can also be expanded to larger or smaller specifications). It is easy to use, has a low breakage rate, and is easy to promote and apply in the field of silicon wafer processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 A schematic diagram of a combined clamp frame of the present invention;

[0013] Figure 2 is a schematic diagram of the structure of the upper support body;

[0014] Figure 3 It is a structural schematic diagram of the blanking frame;

[0015] Figure 4 It is a structural schematic diagram of a composite cushion block;

[0016] Figure 5 It is a structural schematic diagram of a split flexible chuck;

[0017] Figure 6 It is a partial structural schematic diagram of a split flexible chuck;

[0018] Figure 7 It is a structural schematic diagram of the combined fixture frame.

[0019] In the figure,

[0020] 100, upper support body; 101, upper end plate; 102, side upper support beam; 103, upper hanging column; 104, lower limit plate of crystal support; 105, upper limit block of crystal support; 106, upper positioning support block; 107, upper positioning part;

[0021] 200, blanking frame; 210, material frame body; 220, split flexible chuck; 221, clamping block; 222, flexible abutment member; 223, clamping pivot; 224, flip seat; 225, flip fixing plate; 226, anti-collision strip; 227, fixing block; 230, composite pad; 231, lower rigid pad; 232, upper flexible block; 233, flexible block pressure plate; 234, pad lower positioning member; 240, lower hanging column; 250, lower positioning support block; 251, lower positioning part. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] A modular fixture frame, see Figure 1-Figure 7 The combined clamp frame includes an upper support body 100 and a blanking frame 200. A positioning support module is used at the joint between the upper support body 100 and the blanking frame 200. The split flexible chuck and the composite pad of the blanking frame 200 are in direct contact with the silicon wafer, wherein the split flexible chuck unlocks any group of supported silicon wafers as a whole or individually.

[0024] The contact portion between the upper support body 100 and the wafer support is a rigid support member, and the contact portion between the blanking frame 200 and the silicon wafer is a flexible support member.

[0025] See also Figure 2 The upper support body 100 includes an upper end plate 101, a side upper support beam 102, an upper hanging column 103, a crystal support lower limit plate 104, a plurality of crystal support upper limit blocks 105 and an upper positioning support block 106 with an upper positioning portion 107 at the bottom end.

[0026] Layout relationship: Two side upper support beams 102 are arranged in parallel and spaced apart between the two upper end plates 101, thereby forming an upper support frame, four columnar upper positioning support blocks 106 are arranged at both ends of the two side upper support beams 102, and the crystal support lower limit plate 104 is arranged across the two side upper support beams 102, and a plurality of the crystal support upper limit blocks 105 are arranged on the crystal support lower limit plate 104.

[0027] The upper hanging column 103 is arranged on the outer end surface or outer side surface of the upper end plate 101 or the side upper supporting beam 102 .

[0028] The upper positioning support block 106 may be in the shape of a round column or a square cross-section column, and a square cross-section column is preferably used. The upper positioning portions 107 provided at the bottom of the two upper positioning support blocks 106 on the same side have different positioning directions.

[0029] In a specific example, the upper positioning portion 107 may be in a form of a concave cross section of a curve of half a period of a sine function curve, a semicircular concave cross section, an equilateral triangle concave cross section, or the like.

[0030] See also Figure 3-Figure 6 The blanking frame 200 includes a material frame body 210 with an opening at the top, two rows of split flexible clamps 220, a composite cushion block 230, a lower hanging column 240 and a lower positioning support block 250 with a lower positioning portion 251 at the top.

[0031] Arrangement relationship: two rows of the split flexible chucks 220 are correspondingly arranged on both sides of the top of the material frame 210 , the composite pad 230 is arranged at the bottom of the material frame 210 , and the lower positioning support block 250 is arranged at the top of the material frame 210 .

[0032] The lower hanging column 240 is arranged on the outer end surface or outer side surface of the material frame 210 , and the upper hanging column 103 and the lower hanging column 240 are installed at corresponding positions up and down to facilitate the operation of the hanger.

[0033] Among them, the composite pad 230 includes a lower rigid pad 231, an upper flexible block 232 and a flexible block pressure plate 233, the upper flexible block 232 abuts against the upper surface of the lower rigid pad 231, the two flexible block pressure plates 233 are arranged on the outside of the lower rigid pad 231 and the upper flexible block 232, and the upper installation height of the flexible block pressure plate 233 is lower than the upper installation height of the upper flexible block 232.

[0034] A lower pad block positioning member 234 is further provided below the lower rigid pad block 231 for positioning and supporting the material frame 210 and the lower rigid pad block 231 .

[0035] Each row of the split flexible clamps 220 includes a plurality of clamping blocks 221 with connecting parts, a flexible abutment member 222 , a clamping pivot 223 , a flip seat 224 , a flip fixing plate 225 and an anti-collision strip 226 .

[0036] The flexible abutment 222 is embedded in the recess at the front end of the pressing block 221, the rear end of the pressing block 221 is mounted on the flip seat 224 via a pressing pivot 223, the front end of the flip seat 224 is fixedly connected to the rear end face of the flip fixing plate 225, the anti-collision strip 226 is connected to the front end face of the flip fixing plate 225, and the rear end face of the flip seat 224 is connected to the top surface of the material frame 210 via a fixing block 227.

[0037] In a specific example, the flexible abutment member 222 is a flexible pressing block, such as a compression sponge block, a rubber block or a silicone block. At this time, the connecting portion at the front end of the pressing block 221 is a recess, and the flexible pressing block is embedded in the recess.

[0038] The flexible abutment member 222 may also be in the form of a flexible roller. In this case, the connection portion at the front end of the pressing block 221 becomes a pivot mounting portion, and the flexible roller is mounted via the roller pivot.

[0039] Since the clamping block 221 and the flexible abutment member 222 are mounted on the flip seat 224 via the clamping pivot 223, the rear end of the clamping block 221 can be unlocked and locked by a single, a group, or multiple groups of clamping blocks 221 through an unlocking mechanism. Of course, all the clamping blocks 221 can also be unlocked at the same time. The unlocking mechanism can be an existing mechanism in the field, such as an unlocking mechanism composed of an unlocking plate, an unlocking pressure plate, and an unlocking bearing, or a pull-out pressure plate unlocking mechanism that unlocks step by step from one end to the other, or a side manually or automatically driven unlocking structure, etc., as long as it can drive or release the clamping block 221 to rotate and release the silicon wafer interface clamped inside.

[0040] In a specific example, the top of the material frame body 210 of the material unloading frame 200 is open, and its end can also be designed as an opening to serve as a material discharge port. Of course, a detachable baffle can also be used for blocking design.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A combined fixture frame, characterized in that: The combined clamp frame comprises an upper support body (100) and a blanking frame (200), wherein a positioning support module is used at the joint between the upper support body (100) and the blanking frame (200), and the split flexible chuck and the composite pad of the blanking frame (200) are in direct contact with the silicon wafers, wherein the split flexible chuck unlocks any group of supported silicon wafers as a whole or individually.

2. The combined clamp frame according to claim 1, characterized in that: The upper support body (100) comprises an upper end plate (101), a side upper support beam (102), an upper hanging column (103), a crystal support lower limit plate (104), a plurality of crystal support upper limit blocks (105), and an upper positioning support block (106) with an upper positioning portion (107) at the bottom end; Two side upper support beams (102) are arranged in parallel and spaced apart between the two upper end plates (101); four columnar upper positioning support blocks (106) are arranged at both ends of the two side upper support beams (102); a crystal support lower limit plate (104) is arranged across the two side upper support beams (102); and a plurality of crystal support upper limit blocks (105) are arranged on the crystal support lower limit plate (104).

3. The combined clamp frame according to claim 1, characterized in that: The material unloading frame (200) comprises a material frame body (210) with an opening at the top, two rows of split flexible chucks (220), a composite cushion block (230), a lower hanging column (240), and a lower positioning support block (250) with a lower positioning portion (251) provided at the top; two rows of the split flexible chucks (220) are correspondingly arranged on both sides of the top of the material frame body (210), the composite cushion block (230) is arranged at the bottom of the material frame body (210), and the lower positioning support block (250) is arranged at the top of the material frame body (210).

4. The combined clamp frame according to claim 1 or 3, characterized in that: The composite pad (230) comprises a lower rigid pad (231), an upper flexible block (232) and a flexible block pressure plate (233); the upper flexible block (232) is abutted against the upper surface of the lower rigid pad (231); the two flexible block pressure plates (233) are arranged on the outer sides of the lower rigid pad (231) and the upper flexible block (232); and the upper side installation height of the flexible block pressure plate (233) is lower than the upper side installation height of the upper flexible block (232).

5. The combined clamp frame according to claim 4, characterized in that: A pad lower positioning piece (234) is also provided below the lower rigid pad (231).

6. The combined clamp frame according to claim 4, characterized in that: Each row of the split flexible chuck (220) includes a plurality of clamping blocks (221) provided with connecting parts, flexible abutments (222), clamping pivots (223), flip seats (224), flip fixing plates (225) and anti-collision strips (226); the flexible abutments (222) are embedded in the recess at the front end of the clamping block (221), the rear end of the clamping block (221) is mounted on the flip seat (224) through the clamping pivot (223), the front end of the flip seat (224) is fixedly connected to the rear end face of the flip fixing plate (225), the anti-collision strip (226) is connected to the front end face of the flip fixing plate (225), and the rear end face of the flip seat (224) is connected to the top surface of the material frame (210) through a fixing block (227).

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