Motor heat dissipation device, motion system and semiconductor equipment

Abstract

The invention discloses a motor heat dissipation device, a motion system and a semiconductor device, the motor heat dissipation device comprises a motor stator and a motor rotor, and the motor rotor is configured to be capable of reciprocating relative to the motor stator; the heat exchange pipeline is arranged on the motor rotor and exchanges heat with the motor rotor; the condensation cavity is connected to one end of the heat exchange pipeline, a plurality of condensation pieces which are communicated with one another and internally provided with cooling liquid are arranged in the condensation cavity, and the gas medium makes contact with the condensation pieces and is converted into a liquid medium which flows into the heat exchange pipeline; the check valve is connected to the other end of the heat exchange pipeline and connected with the condensation cavity, the heat exchange pipeline exchanges heat with the motor rotor, so that the liquid medium in the heat exchange pipeline is converted into a gas medium and enters the check valve, and the check valve is used for guiding the gas medium into the condensation cavity and preventing the liquid medium in the condensation cavity from flowing back. According to the invention, the problem of heat dissipation of the motor in a vacuum environment is solved, the influence on vibration of equipment, especially a power element, is reduced, and the air tightness in the vacuum environment is ensured.

Description

Technical Field

[0001] The invention relates to a motor heat dissipation device, a motion system and semiconductor equipment, and belongs to the technical field of motor heat dissipation. Background Art

[0002] In semiconductor front-end measurement equipment, the cavity is a vacuum environment. A linear motor is installed in the cavity to drag the load platform to reciprocate. When the current passes through the rotor winding of the linear motor, ohmic heat is generated. Compared with the atmospheric environment, the heat generated by the motor in a vacuum environment is difficult to dissipate and conduct due to the lack of heat convection, which will cause local overheating of the motor, affecting its working efficiency and motion accuracy.

[0003] At present, most motors use two methods for heat dissipation: one is air cooling and the other is liquid cooling. Air cooling usually uses fans and other forms to remove heat from the surface of the motor by enhancing convection. However, since the working environment here is a vacuum environment and there is no convection, air cooling is not applicable. Liquid cooling usually uses a heat exchanger design, which requires the layout of complex pipes to remove heat through the cold flow medium, and the circulation of the liquid usually requires the introduction of an external pump. Since the heat-generating part of the linear motor is the rotor coil, the movement process makes it difficult to arrange the pipes. Even if flexible connections such as hoses are used, there is a risk of coolant leakage; secondly, the introduction of fluid media and external pumps inevitably requires openings in the cavity, which can easily destroy the vacuum environment of the cavity; in addition, the introduction of the pump also adds a new source of vibration, affecting the stable operation of the equipment.

[0004] With respect to the above-mentioned problems in the prior art, no effective solution has been proposed yet. Summary of the invention

[0005] To solve the above problems, the present invention provides a motor heat dissipation device, a motion system and a semiconductor device. The motor heat dissipation device can achieve cooling and heat dissipation of the motor, especially cooling and heat dissipation of a linear motor arranged in a vacuum cavity.

[0006] In a first aspect, the present invention provides a motor heat dissipation device, comprising:

[0007] A motor stator and a motor mover, wherein the motor mover is configured to be capable of reciprocating motion relative to the motor stator;

[0008] A heat exchange pipe, disposed on the motor mover and exchanging heat with the motor mover;

[0009] A condensation chamber connected to one end of the heat exchange pipe, wherein a plurality of condensation plates which are interconnected and have a coolant inside are arranged in the condensation chamber, and the gas medium is converted into a liquid medium in contact with the condensation plates and flows into the heat exchange pipe;

[0010] A check valve is connected to the other end of the heat exchange pipe and to the condensation chamber. The heat exchange between the heat exchange pipe and the motor rotor causes the liquid medium in the heat exchange pipe to be converted into a gas medium and enter the check valve. The check valve is used to introduce the gas medium into the condensation chamber and prevent the liquid medium in the condensation chamber from flowing back.

[0011] In one embodiment of the present invention, it also includes a telescopic chamber, which is installed on a base, one end of which is fixedly connected to the base, and the other end is connected to the coolant inside a plurality of the condensing plates through a coolant pipe; a plurality of the telescopic chambers are arranged in parallel, and the telescopic chambers are arranged in pairs, and the two telescopic chambers arranged in a pair are arranged opposite to one end fixedly connected to the base respectively, so that the telescopic directions of the two telescopic chambers arranged in a pair are opposite.

[0012] In one embodiment of the present invention, a flow channel is provided in the base, the flow channel is communicated with the telescopic cavity, a mounting groove is provided on the base near the flow channel, and a cooling source is provided in the mounting groove.

[0013] In one embodiment of the present invention, the heat exchange pipe, the condensation chamber, the check valve, and the telescopic chamber move synchronously with the motor mover.

[0014] In one embodiment of the present invention, the interior of the condensing plate is a hollow structure and is provided with a coolant, a circulation pipe is passed through a plurality of the condensing plates and the plates are interconnected through the circulation pipe, the condensing plates are arranged in a downwardly inclined conical structure, the bottom of the circulation pipe is connected to a coolant pipe through a coolant channel, and the coolant in the circulation pipe flows into the coolant pipe through the coolant channel.

[0015] In one embodiment of the present invention, the height of the bottom surface of the condensing chamber is configured to decrease gradually from the middle to both sides, and downwardly recessed liquid storage tanks are provided on both sides of the bottom surface of the condensing chamber. A liquid opening is provided on the side wall of the condensing chamber near the liquid storage tank, and the liquid opening is connected to the heat exchange pipe.

[0016] In one embodiment of the present invention, one end of the heat exchange pipe is connected to a liquid pipe, and the liquid pipe is connected to the condensation chamber. The condensation chamber is located above the heat exchange pipe so that the liquid medium in the condensation chamber flows into the heat exchange pipe through the liquid pipe under the action of gravity.

[0017] In one embodiment of the present invention, the other end of the heat exchange pipe is connected to a first joint, the first joint is connected to a vent pipe, and the vent pipe is connected to the check valve via a second joint.

[0018] In one embodiment of the present invention, the condensation chamber has a vent, and the vent is connected to the outlet of the check valve via a connecting channel. The connecting channel is a conical mouth structure, and the inner diameter of one end connected to the condensation chamber is larger than the inner diameter of the other end connected to the check valve.

[0019] In a second aspect, the present invention provides a motion system, comprising the motor heat dissipation device, the motion system also comprising a motion platform, the motion platform being provided with a bearing boss for bearing components; the motion platform is connected to the motor mover, the motor stator is fixed to the base, the base is provided with a guide rail, the motion platform is movably connected to the guide rail, and the motor mover drives the motion platform to move along the guide rail; wherein the check valve is embedded in the motion platform, the condensation chamber is fixedly installed on the motion platform, and the connecting channel is placed in the motion platform.

[0020] In a third aspect, the present invention provides a semiconductor device, comprising the motor heat dissipation device or the motion system, wherein the semiconductor device further comprises a working chamber, and the motor heat dissipation device or the motion system is installed in the working chamber.

[0021] The beneficial effects of the present invention are:

[0022] The motor heat dissipation device, motion system and semiconductor equipment provided by the present invention use the gas-liquid phase change cycle to take away the heat on the motor mover, without introducing a circulating power source. Relying on the height difference of the structural design, the liquid phase change medium flows through the heat exchange pipeline arranged on the motor mover through the action of gravity, absorbs heat and evaporates into gas to take away the heat, and the gas enters the condensation chamber. A condensation plate is arranged above the condensation chamber. The gas contacts the condensation plate and drips into the liquid storage tank after liquefaction, and flows into the heat exchange pipeline from the liquid storage tank again to realize circulation. A coolant is arranged in the condensation plate, and the coolant is transferred to the base at the bottom through internal circulation, and the heat is transferred to the outside of the cavity. Correspondingly, the linear guide, condensation chamber, motion platform, liquid pipeline, gas pipeline and motor mover are connected to each other to form a whole, and reciprocate synchronously without relative motion, which increases the stability of the connection part; at the same time, the reciprocating motion of the motor also provides power for the circulation of liquid flow to ensure the full operation of the entire device.

[0023] The present invention solves the heat dissipation problem of the motor in a vacuum environment, and can effectively improve the running stability and service life of the motor. In addition, after the heat dissipation power is reduced, the energy utilization rate of the motor is higher, the energy density of the motor is improved, and a motor of smaller model and size can be used for load dragging, which saves space and is more conducive to the layout of the equipment; and the evaporation heat absorption of the gas-liquid phase change medium is adopted as the whole to remove the heat of the motor mover. Compared with traditional heat conduction and heat exchange, the efficiency of phase change heat absorption is higher. The motor relies on its own movement and the height difference of the installation design as the power source, and there is no need to introduce power elements such as pumps, which greatly reduces the impact on the whole equipment, especially the impact of the vibration of the power elements, and ensures the stable operation of the equipment; secondly, the problem of heat dissipation of vacuum moving parts is solved, all pipeline connections and moving platforms move synchronously as a whole, there is no relative movement, the connection and installation of the pipeline are more stable, the airtightness in the vacuum environment is ensured, and the vacuum degree requirements of the equipment are ensured; in addition, the device realizes the self-circulation of the coolant, and the coolant can be self-circulated without introducing any power source, and is transferred to the base in the vacuum cavity to realize heat exchange with the outside world. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional diagram of a motor heat dissipation device provided in an embodiment of the present invention.

[0025] Figure 2 A three-dimensional diagram from another perspective of the motor heat dissipation device provided by an embodiment of the present invention.

[0026] Figure 3 A front view of a motor heat dissipation device provided in an embodiment of the present invention.

[0027] Figure 4 A rear view of the motor heat dissipation device provided in an embodiment of the present invention.

[0028] Figure 5 A three-dimensional diagram of the motor heat dissipation device provided by an embodiment of the present invention without a motion platform.

[0029] Figure 6 A three-dimensional diagram of a partial structure of a motor heat dissipation device provided in an embodiment of the present invention.

[0030] Figure 7 A top view of a partial structure of a motor heat dissipation device provided in an embodiment of the present invention.

[0031] Figure 8 A schematic diagram of the internal structure of a condensation chamber provided in an embodiment of the present invention.

[0032] Fig. 9 A bottom view of a condensation chamber provided in an embodiment of the present invention.

[0033] Fig.10 for Fig. 9 AA section view in.

[0034] Fig.11 A three-dimensional diagram of the motor heat dissipation device provided in an embodiment of the present invention without a base.

[0035] Fig.12 A schematic diagram of the internal structure of the motor heat dissipation device provided in an embodiment of the present invention without a base from a three-dimensional perspective.

[0036] Fig.13 A schematic diagram of the internal structure of the motor heat dissipation device provided in an embodiment of the present invention without the base plane perspective.

[0037] Fig.14 A bottom view of a motor heat dissipation device provided in an embodiment of the present invention.

[0038] Fig.15 for Fig.14 BB section view in.

[0039] Fig.16 A motion schematic diagram of a coolant circulation system provided in an embodiment of the present invention.

[0040] In the figure: 1. base; 2. guide rail; 3. motion platform; 31. bearing boss; 4. motor stator; 5. motor mover; 6. heat exchange pipe; 7. first joint; 8. vent pipe; 9. condensation chamber; 91. mounting ear seat; 92. condensation plate; 93. circulation pipe; 94. liquid port; 95. vent; 96. liquid storage tank; 97. coolant channel; 10. liquid pipe; 11. second joint; 12. check valve; 13. locking nut; 14. flange; 15. connecting channel; 16. coolant pipe; 17. telescopic chamber; 18. mounting seat; 19. flow channel; 20. mounting groove. DETAILED DESCRIPTION

[0041] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0043] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] The embodiments of the present application provide a motor heat dissipation device, a motion system and a semiconductor device. The motor heat dissipation device can achieve cooling and heat dissipation of the motor, especially cooling and heat dissipation of a linear motor arranged in a vacuum chamber, and can also achieve cooling and heat dissipation of other motors arranged in the vacuum chamber.

[0045] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 The motor includes a motor stator 4 and a motor mover 5. The motor mover 5 can perform non-contact reciprocating motion in a slot set in the motor stator 4. The motor stator 5 can be fixed on a base 1. Guide rails 2 are set on both sides of the base 1. The motion platform 3 is movably connected to the guide rails 2. The motor mover 5 drives the motion platform 3 to move along the guide rails 2.

[0046] Since the main heating part during the operation of the motor is the motor rotor coil part, it is necessary to cool down the motor rotor 5 and dissipate the heat. The embodiment of the present application provides a motor heat dissipation device, which uses the evaporation heat absorption of the gas-liquid phase change medium to remove the heat of the motor rotor 5. The phase change heat absorption is more efficient than the traditional heat exchange, and then the absorbed heat is circulated through the coolant in the condensing plate 92 to transfer the heat to the outside of the device. The entire gas-liquid phase change system of the motor heat dissipation device can be divided into three parts, one part is the heat exchange pipe 6 connection structure, one part is the condensation chamber 9 structure, and one part is the check valve 12 structure.

[0047] In some embodiments, the motor heat dissipation device includes a heat exchange pipe 6, one end of the heat exchange pipe 6 is connected to a first joint 7, the first joint 7 is connected to a vent pipe 8, the vent pipe 8 is connected to a check valve 12 through a second joint 11, and one end of the heat exchange pipe 6 is a gas flow end; the other end of the heat exchange pipe 6 can be connected to a liquid pipe 10 through a locking nut 13, the liquid pipe 10 is connected to a condensation chamber 9, and the other end of the heat exchange pipe 6 is a liquid flow end. Exemplarily, the first joint 7 can be a right-angle elbow, and the second joint 11 can be a three-way joint.

[0048] Please refer to Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 and Fig.12 In some embodiments, a liquid medium with a gas-liquid phase change is stored in the condensation chamber 9. A condensation sheet 92 is provided in the condensation chamber 9. The interior of the condensation sheet 92 is a hollow structure and is provided with a coolant. A circulation pipe 93 is passed through a plurality of condensation sheets 92 and is interconnected through the circulation pipe 93. A coolant channel 97 is connected to the bottom of the circulation pipe 93. A coolant pipe 16 is connected to the bottom of the coolant channel 97. The coolant can flow out of the condensation chamber 9 through the coolant channel 97 and enter the coolant pipe 16. A plurality of condensation sheets 92 are connected together through the circulation pipe 93, so that the circulation flow of the coolant can be realized, and the coolant will not be trapped in the hollow structure of the condensation sheet 92 and will not flow. Exemplarily, the condensation chamber 9 can be fixedly installed under the motion platform 3 through the mounting ears 91 provided on the side walls at both ends thereof.

[0049] Furthermore, a plurality of condensing plates 92 are arranged as downwardly inclined conical structures, and the height of the inner bottom surface of the condensing chamber 9 is configured to decrease from the middle to both sides, that is, the inner bottom surface of the condensing chamber 9 is arranged to have a slope that is high in the middle and low on both sides, and downwardly recessed liquid storage tanks 96 are arranged on both sides of the inner bottom surface of the condensing chamber 9, and a liquid through port 94 is arranged on the side wall of the condensing chamber 9 near the liquid storage tank 96, and the liquid through port 94 is connected to the liquid through pipe 10.

[0050] Furthermore, a vent 95 is provided on one side wall of the condensing chamber 9, and the vent 95 is located above the middle of the inner bottom surface of the condensing chamber 9 and is higher than the liquid storage tank 96. Thus, the height difference between the vent 95 and the liquid storage tank 96 can prevent the liquid medium stored in the liquid storage tank 96 from flowing out of the vent 95, thereby preventing the liquid medium from flowing back.

[0051] Specifically, the gas in gas-liquid phase change enters the condensation chamber 9 from the vent 95. When the gas contacts the condensation sheet 92 above the inside of the condensation chamber 9, it is liquefied and converted into liquid. The liquid will drip to the bottom along the condensation sheet 92. Several condensation sheets 92 are arranged in a tapered structure inclined downward to facilitate the liquid to drip downward. The condensation sheet 92 is arranged above the cavity. The inside of the condensation sheet 92 is hollow and filled with circulating coolant, which can effectively promote the liquefaction of the phase change medium and facilitate the liquefaction. Due to the slope design of the bottom surface of the condensation chamber 9, the bottom presents a slope, which is convenient for the flow and accumulation of the liquefied liquid. The accumulated liquid will flow to the low-lying sides. The downwardly concave liquid storage tanks 96 arranged on both sides of the bottom surface of the condensation chamber 9 can store the liquid medium of the gas-liquid phase change, and provide a buffering effect when the phase change speed is fast and the cavity is full of liquid. A liquid through hole 94 is provided on the side wall of the condensing chamber 9 near the liquid storage tank 96 , and the liquid medium flows out of the condensing chamber 9 through the liquid through hole 94 and enters the liquid through pipe 10 connected to the outside.

[0052] Please refer to Figure 5 , Figure 7 , Fig.11 , Fig.12 and Fig.13 In some embodiments, the heat exchange pipe 6 is disposed in the motor mover 5. Specifically, the heat exchange pipe 6 can be embedded in the motor mover 5, can be integrally formed with the motor mover 5 by injecting epoxy resin, or can be installed on the surface of the motor mover 5. The heat exchange pipe 6 can adopt an S-type pipeline design, and its structure is an "S" shape, which can fully increase the contact area with the motor mover 5 and improve the heat exchange efficiency; preferably, the heat exchange pipe 6 can be made of a material with high thermal conductivity.

[0053] Furthermore, the condensation chamber 9 and the liquid passage 10 are higher than the heat exchange pipe 6, and the reasonable structural arrangement of the condensation chamber 9 enables the liquid to achieve circulating heat dissipation by its own gravity. Specifically, the liquid medium flowing out of the condensation chamber 9 flows into the liquid passage 10. Due to the existence of the height difference, the liquid medium will flow into the heat exchange pipe 6 under the action of gravity. The heat exchange pipe 6 adopts a material with high thermal conductivity, such as a copper pipe, etc. The flow channel of the heat exchange pipe 6 is designed to be an S-shaped winding structure, the purpose of which is to fully contact with the motor mover 5 and increase the contact area of ​​heat transfer. Correspondingly, the heat exchange pipe 6 can be embedded in the motor mover 5, and can be integrally formed with the motor mover 5 by pouring epoxy resin, or it can be attached to the surface of the motor mover 5. After passing through the heat exchange pipe 6, the liquid phase change medium absorbs heat and undergoes a phase change, gradually changing from liquid to gas in the heat exchange pipe 6, and the gaseous phase change medium on both sides flows into the check valve 12 through the vent pipe 8 and the second joint 11.

[0054] In some embodiments, the check valve 12 may be a Tesla valve, which is a one-way check valve that uses a simple flow channel design and does not require moving parts. The structure of the Tesla valve consists of a series of alternating pipeline branches. When the fluid enters the pipeline from the forward direction, it can basically flow unimpeded without obstruction; but when entering from the other direction, the fluid flowing out of the annular branch will collide head-on with the fluid on the inclined branch, thereby hindering the flow of the fluid. After passing through multiple pipeline branches, very little fluid can flow out of the pipe mouth, and the fluid can even be controlled to not flow out, thereby playing the role of a check valve.

[0055] Furthermore, the vent 95 of the condensing chamber 9 is connected to the outlet of the check valve 12 via a connecting channel 15 . The connecting channel 15 is a conical mouth structure, and the inner diameter of one end connected to the condensing chamber 9 is larger than the inner diameter of the other end connected to the check valve 12 .

[0056] Specifically, the gasified gas passes through the check valve 12 to ensure the one-way flow of the gas, and then flows into the connecting channel 15 opened inside the motion platform 3. The connecting channel 15 adopts a conical mouth structure design to ensure that the liquid does not flow back, and the front check valve 12 can further prevent the liquid from flowing back into the vent pipe 8. This embodiment of the present application uses a Tesla valve as a one-way check valve 12 for gas flow, which cooperates with the conical structure of the connecting channel 15 to facilitate the passage of gas and prevent the reflux of liquid, thereby achieving gas-liquid separation and ensuring that the gas and liquid phases do not interfere with each other in the space. When the gas flows through the connecting channel 15, it enters the condensation chamber 9, where it is liquefied, starting a new round of gas-liquid phase change cycle.

[0057] The heat of the motor mover 5 is taken away by the gas-liquid phase change system, but since this is a closed vacuum environment, if the heat on the condensing sheet 92 is not transferred out in time, the temperature of the condensing sheet 92 will slowly rise, affecting the subsequent gas-liquid phase change process. Therefore, the motor heat dissipation device is also equipped with a coolant circulation system.

[0058] Please refer to Figure 3 , Figure 4 , Fig.11 , Fig.12 , Fig.13 , Fig.14 , Fig.15 and Fig.16 In some embodiments, the coolant circulation system of the motor heat dissipation device includes a telescopic chamber 17, which is located below the condensing chamber 9. The telescopic chamber 17 is connected to the coolant channel 97 of the condensing chamber 9 through a coolant pipe 16, and the coolant pipe 16 is connected to the telescopic chamber 17 through a flange 14. Optionally, the telescopic chamber 17 is installed above the base 1, one end of which is fixedly connected to a mounting seat 18 provided on the base 1, and the other end is connected to the coolant pipe 16. Among them, the telescopic chamber 17 is a cavity that can be telescopic. Exemplarily, the telescopic chamber 17 can be a telescopic pipe, such as a bellows. The coolant pipe 16 is connected to the telescopic chamber 17. While ensuring the vacuum airtightness, the vacuum telescopic chamber 17 is driven to compress and extend by the motion platform 3, thereby driving the liquid in the pipeline to circulate back and forth, thereby realizing the self-circulation of the coolant.

[0059] Further, the telescopic chambers 17 are arranged in pairs, and the multiple telescopic chambers 17 are arranged in parallel. The two telescopic chambers 17 arranged in pairs are arranged opposite to one end fixedly connected to the base 1, that is, the positions of the fixed ends of the two telescopic chambers 17 are opposite, so that the telescopic directions of the two telescopic chambers 17 arranged in pairs are opposite, that is, when one of the two telescopic chambers 17 arranged in pairs is in an extended state, the other is in a compressed state, ensuring that the total volume of the coolant in the circulation system remains unchanged. Optionally, the telescopic chambers 17 can be set to an even number. In this embodiment, the telescopic chambers 17 are set to two, a total of one pair.

[0060] Taking the two telescopic chambers 17 provided in this embodiment as an example, when the motion platform 3 moves, the motion platform 3 drives the condensation chamber 9 to move, and the condensation chamber 9 drives the telescopic chamber 17 to perform telescopic movement through the coolant pipe 16. Since the fixed ends of the two telescopic chambers 17 are in opposite positions, when one telescopic chamber 17 is in a compressed state, the other telescopic chamber 17 is in an extended state, and this design can ensure that the volume of the coolant is constant.

[0061] Optionally, a flow channel 19 is provided in the base 1, the flow channel 19 is connected to the telescopic cavity 17, and the circulation pipe 93 of the condensation cavity 9 is connected to the flow channel 19 through a plurality of coolant channels 97, a plurality of coolant pipes 16, and a plurality of telescopic cavities 17, so as to realize the circulation of the coolant. Among them, the number of coolant channels 97, coolant pipes 16, and telescopic cavities 17 is the same.

[0062] Optionally, a mounting groove 20 is provided at the bottom of the base 1, and the mounting groove 20 is as close to the flow channel 19 as possible. Since the base 1 at the bottom is fixed, a cooling source can be placed in the mounting groove 20. The cooling source can be a cooling liquid source, a cooling fan, etc., which is used to exchange heat with the outside world, thereby taking away the heat of the coolant in the flow channel 19 in the base 1.

[0063] The coolant circulation system provided in this embodiment of the present application does not introduce an external power source. The circulation of the coolant does not rely on an external pump to provide power. It completely relies on the reciprocating motion of the motor itself to achieve the internal circulation of the coolant, which greatly reduces the impact on the entire equipment, especially the impact of the vibration of the power components, and ensures the stable operation of the equipment. Fig.16 As shown, when the motion platform 3 moves to the left, the coolant pipe 16 drives the first telescopic cavity ( Fig.16 The bellows 1 in the first telescopic chamber moves to the left, the first telescopic chamber is compressed, the coolant flows from right to left in the first telescopic chamber, enters the flow channel 19 in the base 1, flows from left to right in the flow channel 19, and the coolant enters the second telescopic chamber ( Fig.16 The bellows 2 in the second telescopic cavity is driven by the coolant tube 16 to be in an extended state, and the coolant also moves from right to left in the second telescopic cavity, flows into the coolant tube 16, and enters the coolant circulation tube 93. When the motion platform 3 moves to the right, the coolant tube 16 drives the second telescopic cavity to compress, and the coolant flows from left to right in the second telescopic cavity, enters the flow channel 19 in the base 1, and flows from right to left in the flow channel 19, and the coolant enters the first telescopic cavity. The first telescopic cavity is driven by the coolant tube 16 to be in an extended state, and the coolant moves from left to right in the first telescopic cavity, flows into the coolant tube 16, and enters the coolant circulation tube 93. Thus, the internal circulation of the coolant is realized through the reciprocating motion of the motor.

[0064] In addition, an embodiment of the present application also provides a motion system, which includes the above-mentioned motor heat dissipation device. In some embodiments, the motion system also includes a base 1 and a motion platform 3, the motion platform 3 is connected to the motor mover 5, the motor stator 4 is fixed to the base 1, the base 1 is provided with a guide rail 2, the motion platform 3 is movably connected to the guide rail 2, and the motor mover 5 drives the motion platform 3 to move along the guide rail 2; wherein, the check valve 12 is embedded in the motion platform 3, the condensation chamber 9 can be fixedly installed under the motion platform 3 through the mounting ear seat 91 provided on its side wall, and the connecting channel 15 is placed in the motion platform 3.

[0065] In this embodiment, the entire motion platform 3 is fixedly mounted on the linear guide rails 2 on both sides of the base 1, and the guide rails 2 play a supporting role. When the motor is powered on, the motor mover 5 drives the heat exchange pipe 6 and the motion platform 3 to reciprocate. Therefore, when the motor mover 5 of the motion system drags the motion platform 3 to reciprocate, ohmic heat is generated when the current passes through the motor mover winding, and the motor heat dissipation device provided in the embodiment of the present application can achieve effective cooling and heat dissipation of the motor.

[0066] Since the condensation chamber 9 and the check valve 12 are arranged below the moving platform 3, in order to prevent uneven heat on the moving platform 3 from affecting the accuracy of the components carried on the moving platform 3, a bearing boss 31 for carrying the components is provided on the moving platform 3. Since the bearing boss 31 has a small contact area and low thermal conductivity, the operating stability and accuracy of the components on the moving platform 3 can be ensured.

[0067] The present application integrates the motor mover 5, the heat exchange pipe 6, the motion platform 3, the condensation chamber 9, the check valve 12, and the guide rail 2 into an integrated whole that can move synchronously, thereby ensuring the stability of the heat dissipation connection of the moving parts; at the same time, the reciprocating motion of the linear motor is used as the power source for the gas-liquid flow and the coolant flow, thereby eliminating the introduction of additional power source components, saving costs, and reducing the impact on the entire equipment, especially the impact of vibration of the power components; in addition, the heat exchange pipe 6 is directly arranged on the motor mover 5, the check valve 12 of the gas flow channel and the condensation chamber 9 for liquid condensation are both arranged below the motion platform 3, and the overall structure is compact, saving space, and is conducive to the layout of other equipment.

[0068] In addition, the present application also provides a semiconductor device, which includes the above-mentioned motor heat dissipation device or motion system. In some embodiments, the semiconductor device also includes a working chamber, and the motor heat dissipation device or motion system is installed in the working chamber. Specifically, the base 1 can be installed at the bottom of the working chamber.

[0069] Among them, the working chamber can be a vacuum working chamber, and the interior of the vacuum working chamber is a vacuum environment. When the motor mover 5 in the chamber drags the motion platform 3 to and fro, ohmic heat is generated when the current passes through the motor mover winding. The motor heat dissipation device provided in the embodiment of the present application can achieve effective cooling and heat dissipation of the motor, especially cooling and heat dissipation of the linear motor arranged in the vacuum chamber, and can also achieve cooling and heat dissipation of the remaining motors arranged in the vacuum chamber.

[0070] In addition, in addition to the above-mentioned method of using the coolant pipe 16 in conjunction with the telescopic cavity 17 to introduce the coolant into the flow channel 19 of the base 1 and then exchanging heat with the outside world, the coolant circulation system of the motor heat dissipation device in the semiconductor device can also adopt a flexible hose connection method. Specifically, an interface connected to the hose can be set at the outlet of the condensation chamber 9, and an interface and hose connection are designed on the vacuum working chamber, and connected to external power source equipment, such as a circulating pump, etc., so as to realize the circulation of the coolant and heat transfer to the outside world.

[0071] In summary, the motor heat dissipation device, motion system and semiconductor equipment provided by the present application solve the heat dissipation problem of the motor in a vacuum environment, and can effectively improve the running stability and service life of the motor. In addition, after the heat dissipation power is reduced, the energy utilization rate of the motor is higher, the energy density of the motor is improved, and a motor of smaller model and size can be used for load dragging, which saves space and is more conducive to the layout of the equipment; and the evaporation absorption of the gas-liquid phase change medium is used as a whole to remove the heat of the motor mover. Compared with traditional heat conduction and heat exchange, the efficiency of phase change heat absorption is higher. The motor relies on its own movement and the height difference of the installation design as the power source, and there is no need to introduce power elements such as pumps, which greatly reduces the impact on the whole equipment, especially the impact of the vibration of the power element, and ensures the stable operation of the equipment; secondly, the problem of heat dissipation of vacuum moving parts is solved, all pipeline connections and motion platforms move synchronously as a whole, there is no relative movement, and the connection and installation of the pipeline are more stable, ensuring the airtightness in the vacuum environment and ensuring the vacuum degree requirements of the equipment; in addition, the device realizes the self-circulation of the coolant, and the coolant can be self-circulated without introducing any power source, and transferred to the base in the vacuum cavity to realize heat exchange with the outside world.

[0072] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A motor heat dissipation device, characterized in that: include: A motor stator (4) and a motor mover (5), wherein the motor mover (5) is configured to be capable of reciprocating relative to the motor stator (4); A heat exchange pipe (6) is arranged on the motor mover (5) and performs heat exchange with the motor mover (5); A condensation chamber (9) is connected to one end of the heat exchange pipe (6), wherein a plurality of condensation plates (92) which are interconnected and have a cooling liquid inside are arranged in the condensation chamber (9), and the gas medium is converted into a liquid medium upon contact with the condensation plates (92) and flows into the heat exchange pipe (6); The check valve (12) is connected to the other end of the heat exchange pipe (6) and is connected to the condensation chamber (9). The heat exchange pipe (6) and the motor rotor (5) perform heat exchange so that the liquid medium in the heat exchange pipe (6) is converted into a gas medium and enters the check valve (12). The check valve (12) is used to introduce the gas medium into the condensation chamber (9) and prevent the liquid medium in the condensation chamber (9) from flowing back.

2. The motor heat dissipation device according to claim 1, characterized in that: It also includes a telescopic chamber (17), wherein the telescopic chamber (17) is installed on the base (1), one end of which is fixedly connected to the base (1), and the other end is connected to the coolant inside a plurality of the condensing plates (92) through a coolant pipe (16); a plurality of the telescopic chambers (17) are arranged in parallel, and the telescopic chambers (17) are arranged in pairs, and the two telescopic chambers (17) arranged in pairs are arranged opposite to one end fixedly connected to the base (1), so that the telescopic directions of the two telescopic chambers (17) arranged in pairs are opposite.

3. The motor heat dissipation device according to claim 2, characterized in that: A flow channel (19) is provided in the base (1), the flow channel (19) is communicated with the telescopic cavity (17), and a mounting groove (20) is provided on the base (1) near the flow channel (19), and a cooling source is provided in the mounting groove (20).

4. The motor heat dissipation device according to claim 2, characterized in that: The heat exchange pipe (6), the condensation chamber (9), the check valve (12), and the telescopic chamber (17) move synchronously with the motor mover (5).

5. The motor heat dissipation device according to claim 1, characterized in that: The interior of the condensing sheet (92) is a hollow structure and is provided with a coolant. A circulation pipe (93) is passed through a plurality of the condensing sheets (92) and the condensing sheets (92) are interconnected through the circulation pipe (93). The condensing sheets (92) are arranged in a downwardly inclined conical structure. The bottom of the circulation pipe (93) is connected to a coolant pipe (16) through a coolant channel (97). The coolant in the circulation pipe (93) flows into the coolant pipe (16) through the coolant channel (97).

6. The motor heat dissipation device according to claim 1, characterized in that: The height of the inner bottom surface of the condensing chamber (9) is configured to decrease from the middle to both sides, and downwardly recessed liquid storage tanks (96) are provided on both sides of the inner bottom surface of the condensing chamber (9), and a liquid through hole (94) is provided on the side wall of the condensing chamber (9) near the liquid storage tank (96), and the liquid through hole (94) is connected to the heat exchange pipe (6).

7. The motor heat dissipation device according to claim 1, characterized in that: One end of the heat exchange pipe (6) is connected to a liquid pipe (10), and the liquid pipe (10) is connected to the condensation chamber (9). The condensation chamber (9) is located above the heat exchange pipe (6), so that the liquid medium in the condensation chamber (9) flows into the heat exchange pipe (6) through the liquid pipe (10) under the action of gravity.

8. The motor heat dissipation device according to claim 1, characterized in that: The other end of the heat exchange pipe (6) is connected to a first joint (7), the first joint (7) is connected to a vent pipe (8), and the vent pipe (8) is connected to the check valve (12) via a second joint (11).

9. The motor heat dissipation device according to claim 1, characterized in that: The condensation chamber (9) has a vent (95), and the vent (95) is connected to the outlet of the check valve (12) via a connecting channel (15). The connecting channel (15) is a conical port structure, and the inner diameter of one end connected to the condensation chamber (9) is larger than the inner diameter of the other end connected to the check valve (12).

10. A motion system, characterized in that The motor heat dissipation device comprises the motor heat dissipation device as described in any one of claims 1 to 9, wherein the motion system further comprises a motion platform (3), and the motion platform (3) is provided with a bearing boss (31) for bearing components; the motion platform (3) is connected to the motor mover (5), the motor stator (4) is fixed to the base (1), the base (1) is provided with a guide rail (2), the motion platform (3) is movably connected to the guide rail (2), and the motor mover (5) drives the motion platform (3) to move along the guide rail (2); wherein the check valve (12) is embedded in the motion platform (3), the condensation chamber (9) is fixedly installed on the motion platform (3), and the connecting channel (15) is placed in the motion platform (3).

11. A semiconductor device, characterized in that The semiconductor device comprises the motor heat dissipation device according to any one of claims 1 to 9 or the motion system according to claim 10, wherein the semiconductor device further comprises a working chamber, and the motor heat dissipation device or the motion system is installed in the working chamber.

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