Single crystal furnace vacuum filtering device and filtering and rapping method

Abstract

The invention relates to the technical field of single crystal furnaces, in particular to a single crystal furnace vacuum filtering device and a filtering and rapping method, and the method comprises the following steps: when the single crystal furnace is in a first state, performing interval rapping operation on a filtering cloth bag; and when the single crystal furnace is in a second state, performing timed continuous rapping operation on the filter cloth bag, the device comprises a filtering tank, a filtering cloth bag and an air cylinder, according to the invention, the rapping mode of the cylinder is changed into a mode that the cylinder raps in a certain mode only when the single crystal furnace enters a re-feeding ending step of a re-feeding stage and a cooling ending step of the single crystal furnace enters a furnace shutdown state, so that not only is the rapping efficiency improved, but also the service life of the filter device is prolonged; and the frequency of the dry pump can return to a lower frequency after each rapping, so that the condition of overload caused by full frequency of the dry pump is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal furnaces, and in particular to a single crystal furnace vacuum filtering device and a filtering and rapping method. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment (such as argon, nitrogen, and helium), and grows dislocation-free single crystals through the Czochralski method.

[0003] In the production process of single crystals, the state of the single crystal furnace mainly includes the first state and the second state. Among them, the first state is the single crystal pulling process; the single crystal pulling process includes the first investment stage and multiple reinvestment stages, that is, after the first investment stage is over, it enters the first reinvestment stage, after the first reinvestment stage is over, it enters the second reinvestment stage, and after the second reinvestment stage is over, it enters the third reinvestment stage. Repeat this until the entire single crystal pulling process is completed (the single crystal pulling process requires about 6-7 reinvestments, or longer, and the specific running time is determined by the single crystal pulling state). The second state is the state after the single crystal furnace is stopped, and the second state is entered after the first state is ended; that is to say, after the single crystal pulling process is completed, it enters the shutdown state. The above-mentioned first investment stage includes the first investment (first feeding), melting, single crystal growth, cooling, and taking out the single crystal; the reinvestment stage includes reinvestment (feeding again), melting, single crystal growth, cooling, and taking out the single crystal; the shutdown state includes cooling, cleaning, and furnace replacement. A large amount of oxides will be produced in the single crystal pulling process. The produced oxides and the inert gas (such as argon) continuously filled in the single crystal pulling process will gather in the single crystal furnace. In order to maintain a certain vacuum degree in the single crystal furnace, it is necessary to use a dry pump to evacuate the single crystal furnace. During the extraction process, air enters the filter device, and then the gas is filtered by the filter device. Finally, the filtered gas is discharged from the filter device, and the filtered solids are placed in the filter device.

[0004] At present, the filtering device in the prior art generally includes a filter tank, in which a filter bag is arranged, and above the filter bag, that is, on the top of the filter tank, a cylinder is arranged. In the first state and the second state of the single crystal furnace, the cylinder continuously vibrates the filter bag at a frequency of 180s / 2 times, and in the process of vibrating the filter bag, the particles adsorbed on the filter bag fall to the bottom of the filter tank, and the gas is discharged from the tank, thereby completing the filtering operation.

[0005] Although the above-mentioned filtering device has achieved a better filtering effect, it is found in actual application that since the cylinder always continuously vibrates the filter bag at a frequency of 180s / 2 times in the first state and the second state of the single crystal furnace, the cylinder implements the vibration action at the same frequency for a long time, which not only consumes the filtering device sharply, but also affects the normal drawing of the single crystal and causes the dry pump to shut down due to overload. Specifically, in the first state and the second state of the single crystal furnace, the cylinder always vibrates the filter bag at a frequency of 180s / 2 times. As time goes by, especially in the middle and late stages, the particles accumulated on the filter bag gradually increase. When the existing vibration frequency of the cylinder cannot vibrate the particles on the filter bag, the filtering capacity of the filter bag for gas will be reduced, thereby increasing the air pressure in the single crystal furnace. The excessive air pressure in the single crystal furnace will not only affect the normal drawing of the single crystal, but also cause the dry pump to have to operate at full frequency for a long time in order to keep the air pressure in the single crystal furnace within a certain numerical range, thereby causing the dry pump to shut down due to overload. Summary of the invention

[0006] The object of the present invention is to provide a single crystal furnace vacuum filtration device and a filtration vibration method to solve the problems raised in the above background technology.

[0007] The technical solution adopted by the present invention is:

[0008] A single crystal furnace vacuum filtration and vibration method, the single crystal furnace is equipped with a vacuum filtration device, the vacuum filtration device has a filter bag, and the filtration and vibration method comprises:

[0009] When the single crystal furnace is in the first state, performing an interval rapping operation on the filter bag; and

[0010] When the single crystal furnace is in the second state, a timed and continuous vibration operation is performed on the filter bag;

[0011] The first state is the state in which the single crystal furnace is in the process of pulling a single crystal, and the second state is the state in which the single crystal furnace is in the process of being shut down.

[0012] Optionally, performing the interval rapping operation on the filter bag further comprises:

[0013] Step S11: After the single crystal furnace is restarted, the main ball valve connecting the single crystal furnace and the vacuum filtration device is closed to keep the inert gas flow rate value within a certain range;

[0014] Step S12: vibrating the filter bag in a certain manner;

[0015] Step S13: When the gas pressure in the single crystal furnace reaches a certain value, open the main ball valve in step S11 and then stop vibrating the filter bag.

[0016] Optionally, the certain range in step S11 is 100-200 Slpm, and\or

[0017] The certain mode in step S12 is a frequency of 0.5S / time, an interval of 3-8S, and\or

[0018] The certain value in step S13 is 20-40 Torr.

[0019] Optionally, performing a timed continuous rapping operation on the filter bag further comprises:

[0020] Step S21: When the single crystal furnace is stopped, performing a temperature reduction operation on the single crystal furnace;

[0021] Step S22: After the temperature is lowered, close the main ball valve connecting the single crystal furnace and the vacuum filtration device;

[0022] Step S23: The filter bag is continuously vibrated in a certain manner for a period of time and then the vibrating is stopped.

[0023] Optional,

[0024] The certain mode in step S23 is a frequency of 0.5S / time, an interval of 3-8S, and\or

[0025] The period of time in step S23 is 0.5-3 minutes.

[0026] Optionally, a single crystal furnace vacuum filtration device comprises:

[0027] A filter tank is located at one side of the single crystal furnace and has a cavity therein. The inlet of the filter tank is connected to the interior of the single crystal furnace through a first pipe, and the outlet of the filter tank is connected to the dry pump through a second pipe.

[0028] A filter bag is arranged in the cavity of the filter tank;

[0029] The cylinder is arranged on the filter tank through and through, and its output end can act on the filter bag at intervals in a certain way under certain conditions and can act on the filter bag in a certain way at regular intervals under another condition.

[0030] Optionally, also include:

[0031] at least one rapping plate disposed within the cavity of the filter tank;

[0032] One side of the vibration plate is connected to the top wall of the filter tank through a spring, and is freely suspended in the filter tank;

[0033] The other side of the vibration plate is connected to the upper end of the filter bag, and the cylinder acts on the filter bag through the vibration plate.

[0034] Optionally, also include:

[0035] The number of the filter bags is multiple, and they are arranged in groups in the filter tank;

[0036] The number of the cylinders and the number of the rapping plates are multiple, the upper end of each group of filter bags is commonly connected to one of the rapping plates, and one rapping plate corresponds to one cylinder.

[0037] Optionally, a truncated platform is provided on the rapping plate at a position corresponding to the output end of the cylinder, and the cylinder acts on the rapping plate through the truncated platform.

[0038] Optionally, the filter bag is cylindrical in shape, with an open bottom and a closed top.

[0039] Compared with the prior art, the present invention has the following beneficial effects:

[0040] In the present invention, the vibration mode of the cylinder is changed from the original mode in which the cylinder continuously vibrates at a frequency of 180s / 2 times in the first state and the second state of the single crystal furnace to the current mode in which the cylinder performs vibration in a certain manner only when the single crystal furnace enters the re-investment end step of the re-investment stage and the temperature reduction end step of the single crystal furnace entering the shutdown state. This change in the cylinder vibration mode not only reduces the existing cylinder vibration times by several times compared with the original cylinder vibration times, but also improves the vibration effect to a great extent, ensures the stable pressure control of the single crystal growth environment and the stable temperature control of the single crystal growth environment, and also prolongs the service life of the filter device. According to the cylinder vibration mode disclosed in the present invention, the dry pump frequency can return to a lower frequency after each vibration, avoiding the occurrence of overload, tripping and other faults of the dry pump at full frequency, and reducing the operating energy consumption of the dry pump. The problems in the prior art are solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0042] Figure 1 This is a schematic diagram of the overall structure of the single crystal furnace vacuum filtration device in this application;

[0043] Figure 2 for Figure 1A vertical cross-sectional structural schematic diagram of ;

[0044] Figure 3 for Figure 2 A schematic diagram of the partially enlarged structure at center A;

[0045] Figure 4 This is a schematic diagram of the internal structure of the single crystal furnace vacuum filtration device in this application;

[0046] Figure 5 This is a schematic diagram of the structure of an embodiment of the present application;

[0047] Figure 6 This is the interval rapping flow chart of the first state of this application;

[0048] Figure 7 This is a flow chart of the timed continuous rapping in the second state of this application.

[0049] Reference numerals:

[0050] 1. Filter tank; 2. Vibrating plate; 3. Filter bag; 4. Cylinder; 5. First pipeline; 6. Main ball valve; 7. Round table; 8. Spring; 9. Second pipeline; 10. Dry pump; 11. Single crystal furnace;

[0051] S1, intermittent rapping in the first state; S2, timed continuous rapping in the second state. DETAILED DESCRIPTION

[0052] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0053] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the products of the present invention are conventionally placed when used, or are the orientations or positional relationships conventionally understood by those skilled in the art, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0054] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0055] The single crystal furnace in the following embodiments is equipped with a vacuum filtration device, and the vacuum filtration device has a filter bag.

[0056] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0057] The embodiment of the present invention provides a single crystal furnace vacuum filtration and vibration method, comprising:

[0058] When the single crystal furnace is in the first state, an intermittent rapping operation is performed on the filter bag, and when the single crystal furnace is in the second state, a timed continuous rapping operation is performed on the filter bag.

[0059] The first state is the state when the single crystal furnace is in the process of pulling a single crystal, and the second state is the state after the single crystal furnace is shut down.

[0060] Specifically, Figure 6 As shown, when the single crystal furnace is in the first state, the specific operation method of performing the interval vibration operation S1 on the filter bag includes:

[0061] Step S11: After the single crystal furnace enters the first re-start, the main ball valve connecting the single crystal furnace and the vacuum filtration device is automatically closed to keep the inert gas flow value within a certain range;

[0062] Step S12: vibrating the filter bag in a certain manner;

[0063] Step S13: When the gas pressure in the single crystal furnace reaches a certain value, the main ball valve in step S11 is automatically opened and then the vibration of the filter bag is stopped.

[0064] Step S14: When the single crystal furnace enters the second re-start, the main ball valve connecting the single crystal furnace and the vacuum filtration device is automatically closed to keep the inert gas flow value within a certain range;

[0065] Step S15: vibrating the filter bag in a certain manner;

[0066] Step S16: When the gas pressure in the single crystal furnace reaches a certain value, the main ball valve in step S14 is automatically opened and then the vibration of the filter bag is stopped.

[0067] Step S17: When the single crystal furnace enters the third re-start, the main ball valve connecting the single crystal furnace and the vacuum filtration device is automatically closed to keep the inert gas flow value within a certain range;

[0068] Step S18: vibrating the filter bag in a certain manner;

[0069] Step S19: When the gas pressure in the single crystal furnace reaches a certain value, the main ball valve in step S17 is automatically opened and then the vibration of the filter bag is stopped.

[0070] …

[0071] This process is repeated until the single crystal pulling process is completed.

[0072] In the above-mentioned vibration method, the filter bag will be vibrated in a certain way every time the single crystal furnace enters the end state of the re-investment stage. When the air pressure in the single crystal furnace reaches a certain value, the vibration of the filter bag will be stopped, thereby realizing the interval vibration of the filter bag.

[0073] Further, in step S12, step S15 and step S18, it is more appropriate to vibrate the filter bag at a frequency of 0.5S / time and an interval of 3-8S. As a preferred embodiment, the filter bag is vibrated at a frequency of 0.5S / time and an interval of 5S, and the vibrating efficiency is the highest. Table 1 shows the specific test results.

[0074]

[0075] Further, in step S11, step S14 and step S17, it is more appropriate to keep the inert gas flow rate at 100-200 Slpm. As a preferred embodiment, the inert gas flow rate is kept at 120 Slpm. Table 2 gives the specific test results.

[0076]

[0077] Furthermore, in step S13, step S16 and step S19, it is more suitable when the gas pressure in the single crystal furnace reaches 20-40 Torr. As a preferred embodiment, the gas pressure in the single crystal furnace is 30 Torr. Table 3 gives the specific test results.

[0078]

[0079] like Figure 7 As shown, when the single crystal furnace is in the second state, the specific operation method of performing the timed continuous vibration operation S2 on the filter bag includes:

[0080] Step S21: When the single crystal furnace enters the shutdown state, the single crystal furnace is subjected to a temperature reduction operation;

[0081] Step S22: After the temperature is lowered, close the main ball valve connecting the single crystal furnace and the vacuum filtration device;

[0082] Step S23: The filter bag is continuously vibrated in a certain manner for a period of time and then the vibrating is stopped.

[0083] In the above-mentioned rapping method, after the single crystal furnace enters the shutdown state, the filter bag is continuously rapped for a period of time in a certain manner, so as to realize a timed and continuous rapping operation on the filter bag.

[0084] Further, in step S23, it is more appropriate to continuously vibrate the filter bag at a frequency of 0.5S / time and an interval of 3-8S for 0.5-3min and then stop vibrating. As a preferred embodiment, the filter bag is continuously vibrated at a frequency of 0.5S / time and an interval of 5S for 1min and then stop vibrating. Tables 1 and 4 respectively give the specific test results.

[0085]

[0086]

[0087] Here, the present disclosure also provides a single crystal furnace vacuum filtration device to implement the above-mentioned rapping method. Figure 1-4 As shown, it includes: a filter tank 1, a plurality of filter bags 3 and a cylinder 4 and other parts.

[0088] The filter tank 1 is located on one side of the single crystal furnace 11, and has a cavity therein. The inlet of the filter tank 1 is connected to the inside of the single crystal furnace 11 through the first pipe 5, and the outlet of the filter tank 1 is connected to the dry pump 10 through the second pipe 9. The filter tank 1 is configured as a bearing component. The oxide and inert gas (such as argon) in the single crystal furnace 11 enter the inside of the filter tank 1 through the first pipe 5 under the action of the dry pump 10, and then are discharged from the filter tank 1 through the second pipe 9 under the action of the dry pump 10. A plurality of filter bags 3 are arranged in the cavity of the filter tank 1. The filter bags 3 are configured to adsorb and filter out the particles in the gas, so that the separated particles are adsorbed on the filter bags 3, and the gas is discharged from the filter tank 1 through the second pipe 9. The cylinder 4 is fixedly arranged on the top of the filter tank 1, and its output end acts on the filter bags 3 at intervals in a certain way under certain conditions and acts on the filter bags 3 in a certain way under another condition, so that the particles adsorbed on the filter bags 3 fall into the bottom cavity of the filter tank 1.

[0089] Specifically, Figure 2-Figure 4As shown, in the embodiment of the present disclosure, the filter bag 3 is cylindrical in shape, with an open structure at the bottom, a closed structure at the top, and a hollow structure inside. In order to increase the contact area between the filter bag 3 and the gas, each filter bag 3 extends along the axial direction of the filter tank 1, that is, extends in the vertical direction to the bottom position adjacent to the filter tank 1. The gas enters the filter bag 3 through the cavity at the bottom of the filter tank 1, and then passes through the inner wall of the filter bag 3. The gas is filtered through the inner wall of the filter bag 3.

[0090] Furthermore, the filter device further includes at least one rapping plate 2, which is disposed in a cavity adjacent to the top of the filter tank 1, connected to the inner top wall of the filter tank 1 through a spring 8, and its edge portion does not contact the inner side wall of the filter tank 1. The rapping plate 2 is located above the filter bag 3, and the rapping plate 2 is fixedly connected to the filter bag 3. The cylinder 4 acts on the filter bag 3 through the rapping plate 2. The shape of the edge portion of the rapping plate 2 is adapted to the inner side wall of the filter tank 1.

[0091] Furthermore, if Figure 3 As shown, in order to facilitate the cylinder 4 to perform the rapping operation on the rapping plate 2, a round table 7 is provided on the rapping plate 2, that is, just below the output end of the cylinder 4. The cylinder 4 directly acts on the round table 7, and the round table 7 drives the rapping plate 2 to vibrate.

[0092] Furthermore, in order to more conveniently control the gas flowing from the single crystal furnace 11 to the filter tank 1 , a main ball valve 6 is provided on the first pipeline 5 , and the on-off of the first pipeline 5 is controlled by controlling the opening and closing of the main ball valve 6 .

[0093] Furthermore, in order to improve the rapping efficiency, the number of filter bags 3 can be set to multiple, and they are arranged in groups in the filter tank 1; the number of cylinders 4 and the number of rapping plates 2 are also set to multiple, and the upper ends of each group of filter bags 3 are commonly connected to one of the rapping plates 2, and one rapping plate 2 corresponds to one cylinder 4.

[0094] The specific operation is as follows: Figure 5As shown, when the single crystal furnace 11 enters the working state, argon is continuously filled into the single crystal furnace 11, the dry pump 10 is turned on, and the main ball valve 6 is opened at the same time. The oxide and argon in the single crystal furnace 11 enter the bottom cavity of the filter tank 1 through the first pipe 5 under the action of the dry pump 10. Under the continuous action of the dry pump 10, the gas in the bottom cavity of the filter tank 1 enters the filter bag 3, and the gas flows from bottom to top. During the flow, the airflow passes through the inner wall of the filter bag 3 from the inside to the outside, and the airflow is filtered by the inner wall of the filter bag 3 to separate the particulate matter and gas in the airflow. The separated particulate matter is adsorbed on the filter bag 3, and the gas is discharged from the filter tank 1 through the second pipe 9 under the action of the dry pump 10. As time goes by, when the single crystal furnace 11 enters the re-investment end step of the first re-investment stage, the main ball valve 6 is automatically closed, and the cylinder 4 performs a vibration action on the round table 7 set on the vibration plate 2 in a certain way, and the round table 7 drives the vibration plate 2 to vibrate, and the vibration plate 2 drives the filter bag 3 to vibrate, so that the particles on the filter bag 3 fall into the bottom cavity of the filter tank 1. With the continuous advancement of the work in the single crystal furnace 11, since the main ball valve 6 is in a closed state at this time, with the continuous increase of oxides and argon in the single crystal furnace, the air pressure in the single crystal furnace 11 gradually increases. When the air pressure in the single crystal furnace 11 reaches a certain value, the main ball valve 6 will automatically open, and the cylinder 4 automatically stops the vibration action. When the single crystal furnace 11 enters the re-investment end step of the second re-investment stage, the main ball valve 6 is automatically closed again, and the cylinder 4 automatically performs a vibration action on the round table 7 set on the vibration plate 2 again in a certain way, so that the particles adsorbed on the filter bag 3 fall into the bottom cavity of the filter tank 1 again. Similarly, when the air pressure in the single crystal furnace 11 reaches a certain value, the main ball valve 6 automatically opens, and the cylinder 4 automatically stops the vibration action. So repeatedly, when the single crystal furnace 11 enters the re-investment end step of a re-investment stage, the main ball valve 6 will automatically close, and the cylinder 4 will automatically vibrate the round table 7 arranged on the vibration plate 2 in a certain way. When the air pressure in the single crystal furnace 11 reaches a certain value, the main ball valve 6 will automatically open, and the cylinder 4 automatically stops the vibration action until the single crystal drawing process ends. After the single crystal drawing process ends, the single crystal furnace 11 enters the shutdown state, the argon gas stops filling, the main ball valve 6 opens, and the single crystal furnace 11 enters the cooling state by itself. When the cooling of the single crystal furnace 11 ends, the main ball valve 6 automatically closes, the dry pump 10 automatically closes, and the cylinder 4 automatically vibrates the round table 7 arranged on the vibration plate 2 again in a certain way. After continuous vibration for a period of time, the cylinder 4 automatically stops the vibration action, and the single crystal furnace 11 is cleaned and the furnace is changed.

[0095] In summary, in the embodiment disclosed in the present invention, the rapping mode of the cylinder 4 is changed from the original mode in which the cylinder 4 continuously rapped at a frequency of 180s / 2 times in the first state and the second state of the single crystal furnace to the current mode in which the cylinder 4 performs the rapping action in a certain manner only when the single crystal furnace 11 enters the re-investment end step of the re-investment phase and the cooling end step of the single crystal furnace 11 entering the shutdown state. This change in the rapping mode of the cylinder 4 not only reduces the existing rapping times of the cylinder 4 by several times compared with the original rapping times of the cylinder 4, improves the rapping effect to a great extent, and prolongs the service life of the filter device. According to the existing rapping mode of the cylinder 4, the frequency of the dry pump 10 can return to a lower frequency after each rapping, avoiding the occurrence of overload, tripping and other faults of the dry pump 10 at full frequency.

[0096] It should be noted that the first state and second state steps of the single crystal furnace 11 in the embodiment disclosed in the present invention are completed by the controller controlling the execution module. Similarly, the vibration mode of the cylinder 4 is also controlled by the controller. The specific control method belongs to the common knowledge in the field of automation, and this application does not focus on this part.

[0097] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A single crystal furnace vacuum filtration and vibration method, wherein the single crystal furnace is equipped with a vacuum filtration device, and the vacuum filtration device has a filter bag, characterized in that: The filtering and rapping method comprises: when the single crystal furnace is in a first state, performing an interval rapping operation on the filter bag; and When the single crystal furnace is in the second state, a timed and continuous vibration operation is performed on the filter bag; The first state is the state in which the single crystal furnace is in the process of pulling a single crystal, and the second state is the state in which the single crystal furnace is in the process of being shut down.

2. The single crystal furnace vacuum filtration and vibration method according to claim 1, characterized in that: The intermittent vibration operation on the filter bag further includes: step S11: after the single crystal furnace is restarted, the main ball valve connecting the single crystal furnace and the vacuum filtration device is closed to keep the inert gas flow value within a certain range; Step S12: vibrating the filter bag in a certain manner; Step S13: When the gas pressure in the single crystal furnace reaches a certain value, open the main ball valve in step S11 and then stop vibrating the filter bag.

3. The single crystal furnace vacuum filtration and vibration method according to claim 2, characterized in that: The certain range in step S11 is 100-200 Slpm, and\or the certain mode in step S12 is a frequency of 0.5S / time, with an interval of 3-8S, and\or The certain value in step S13 is 20-40 Torr.

4. The single crystal furnace vacuum filtration rapping method according to claim 1, characterized in that: The timed continuous rapping operation on the filter bag further comprises: Step S21: When the single crystal furnace is stopped, the single crystal furnace is cooled down; Step S22: After the cooling is completed, the main ball valve connecting the single crystal furnace and the vacuum filtration device is closed; Step S23: The filter bag is continuously vibrated in a certain manner for a period of time and then the vibrating is stopped.

5. The single crystal furnace vacuum filtration and vibration method according to claim 4, characterized in that: The certain mode in step S23 is a frequency of 0.5S / time, an interval of 3-8S, and\or The period of time in step S23 is 0.5-3 minutes.

6. A single crystal furnace vacuum filtration device, used to implement the method described in any one of claims 1 to 5, characterized in that: include: A filter tank is located at one side of the single crystal furnace and has a cavity therein. The inlet of the filter tank is connected to the interior of the single crystal furnace through a first pipe, and the outlet of the filter tank is connected to a dry pump through a second pipe. A filter bag is arranged in the cavity of the filter tank. A cylinder is arranged through the filter tank, and its output end can act on the filter bag at intervals in a certain way under certain conditions and can act on the filter bag in a certain way at regular intervals under another condition.

7. The single crystal furnace vacuum filtration device according to claim 6, characterized in that: Also includes: at least one rapping plate disposed within the cavity of the filter tank; One side of the vibration plate is connected to the top wall of the filter tank through a spring, and is freely suspended in the filter tank; The other side of the vibration plate is connected to the upper end of the filter bag, and the cylinder acts on the filter bag through the vibration plate.

8. The single crystal furnace vacuum filtration device according to claim 7, characterized in that: Also includes: The number of the filter bags is multiple, and they are arranged in groups in the filter tank; The number of the cylinders and the number of the rapping plates are multiple, the upper end of each group of filter bags is commonly connected to one of the rapping plates, and one rapping plate corresponds to one cylinder.

9. The single crystal furnace vacuum filtration device according to claim 7, characterized in that: A truncated platform is provided on the rapping plate at a position corresponding to the output end of the cylinder, and the cylinder acts on the rapping plate through the truncated platform.

10. The single crystal furnace vacuum filtration device according to claim 6, characterized in that: The filter bag is cylindrical in shape, with an open bottom and a closed top.

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