High-temperature-resistant muffle furnace tube and manufacturing method thereof

Abstract

The invention relates to a high-temperature-resistant muffle furnace tube and a manufacturing method thereof in the field of high-temperature material preparation, and the manufacturing method comprises the following steps: mixing 93% of zirconium oxide, 2% of yttrium oxide, 2% of magnesium oxide and 3% of calcium oxide to obtain composite powder, sealing the composite powder in a rubber sleeve with a steel core, carrying out compression molding at 160mpa in an oil press or a cold isostatic press, volatilizing impurities by using a plurality of platforms, and carrying out hot pressing to obtain the high-temperature-resistant muffle furnace tube. And finally, sintering at high temperature to obtain a prefabricated part, and processing and cutting the prefabricated part to obtain the required finished muffle furnace tube. According to the method for manufacturing the high-temperature-resistant muffle furnace tube by using the zirconium oxide, the yttrium oxide, the magnesium oxide and the calcium oxide as the main raw materials, the muffle furnace tube prepared by the method has excellent high-temperature resistance, good oxidation resistance and corrosion resistance, is simple to manufacture, high in yield, high in speed and high in hardness, can be sintered without long-time drying treatment, and can be used for preparing the high-temperature-resistant muffle furnace tube. The finished product period is short, the application range is wide, and important core accessories in high-temperature material hot working are achieved.

Description

Technical field:

[0001] The invention belongs to the field of high temperature material preparation, and particularly relates to a muffle furnace tube made of zirconium oxide, yttrium oxide, magnesium oxide and calcium oxide as main raw materials and a preparation method thereof. Background technology:

[0002] Muffle furnace is a heat treatment equipment widely used in semiconductor materials, ceramics, metallurgy, aerospace and other fields. The core component of the muffle furnace is the furnace tube, and its performance directly affects the efficiency and effect of heat treatment. Traditional muffle furnace tubes are mainly made of refractory materials, such as furnace tubes made of alumina or ceramic materials, and the maximum working temperature is only about 1500 degrees. However, some new materials and refractory metals require 1600-2000 degrees for heat treatment, but the corresponding equipment and accessories cannot be found, one of the important accessories is the muffle furnace tube. There are no muffle furnace tubes available at 1600-2000 on the market. Therefore, the development of a muffle furnace tube with excellent high temperature resistance, good oxidation resistance, reduction resistance and corrosion resistance and its production method has important practical value and is an important equipment for solving the heat treatment of high temperature materials. Summary of the invention:

[0003] The purpose of the present invention is to provide a muffle furnace tube with a working temperature of 2000 degrees, and a method for manufacturing a high-temperature resistant muffle furnace tube using zirconium oxide, yttrium oxide, magnesium oxide and calcium oxide as main raw materials. The muffle furnace tube prepared by the method has excellent high-temperature resistance, good oxidation resistance and corrosion resistance, is simple to manufacture, has a high yield rate, fast speed, high hardness, can be sintered without long-term drying treatment, has a short finished product cycle, a wide range of applications, and is an important core component in high-temperature material thermal processing.

[0004] The present invention is achieved through the following technical solutions:

[0005] The present invention provides a high temperature resistant muffle furnace tube, which is composed of the following raw materials in mass ratio:

[0006] Zirconia 90-96%

[0007] Yttrium oxide 1-4%

[0008] Magnesium oxide 1-4%

[0009] Calcium oxide 1-6%.

[0010] As a most preferred embodiment of the present invention, the composition includes 93% zirconium oxide, 2% yttrium oxide, 2% magnesium oxide and 3% calcium oxide.

[0011] The present invention also provides a method for manufacturing the high temperature resistant muffle furnace tube, comprising the following steps:

[0012] (1) Powder mixing: firstly, the components are mixed according to the mass ratio to obtain a composite powder;

[0013] (2) Pressing: The composite powder is placed in a steel core rubber sleeve and sealed, and pressed into shape at 60-160 MPa in a hydraulic press or a cold isostatic press;

[0014] (3) Sintering: multiple platforms are used to volatilize impurities and finally sinter into preforms at high temperatures;

[0015] (4) Processing: The prefabricated parts are processed and cut to obtain the required finished muffle furnace tubes.

[0016] The sintering in step (3) includes the following two methods:

[0017] a Various high-temperature electric furnace sintering: use multiple platforms to volatilize impurities, and finally sinter at a high temperature of 1950-2050℃ to obtain prefabricated parts;

[0018] b Gas furnace sintering: Use multiple platforms to volatilize impurities, and finally slowly sinter at a high temperature of 1800-1850℃ to obtain prefabricated parts.

[0019] The beneficial effects of the present invention are:

[0020] (1) It has excellent high temperature resistance and can withstand working temperatures up to 2000℃;

[0021] (2) It has good anti-oxidation, anti-reduction and anti-corrosion properties, and can maintain stable chemical properties at high temperatures;

[0022] (3) The preparation method is simple and easy to industrialize. Specific implementation method:

[0023] The preferred embodiments of the present invention are described in detail below so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0024] Embodiment 1:

[0025] Firstly, 93% zirconium oxide, 2% yttrium oxide, 2% magnesium oxide and 3% calcium oxide are mixed to obtain a composite powder;

[0026] The composite powder is placed in a steel core rubber sleeve and sealed, and pressed into shape in an oil press or a cold isostatic press at 160 MPa;

[0027] Use a high-temperature electric furnace for sintering, use multiple platforms to volatilize impurities, and finally sinter at a high temperature of 2050°C to obtain a prefabricated part;

[0028] The prefabricated parts are processed and cut to obtain the required finished muffle furnace tubes.

[0029] Embodiment 2:

[0030] Firstly, 90% zirconium oxide, 4% yttrium oxide, 1% magnesium oxide and 5% calcium oxide are mixed to obtain a composite powder;

[0031] The composite powder is placed in a steel core rubber sleeve and sealed, and pressed into shape in an oil press or a cold isostatic press at 130 MPa;

[0032] Sintering is done in a high-temperature electric furnace, using multiple platforms to volatilize impurities, and finally sintering at a high temperature of 1950°C to obtain a prefabricated part;

[0033] The prefabricated parts are processed and cut to obtain the required finished muffle furnace tubes.

[0034] Embodiment 3:

[0035] Firstly, 96% zirconium oxide, 2% yttrium oxide, 1% magnesium oxide and 1% calcium oxide are mixed to obtain a composite powder;

[0036] The composite powder is placed in a steel core rubber sleeve and sealed, and pressed into shape in an oil press or a cold isostatic press at 100 MPa;

[0037] Sintering is done in a gas furnace, using multiple platforms to volatilize impurities, and finally slowly sintering at a high temperature of 1850°C to obtain a prefabricated part;

[0038] The prefabricated parts are processed and cut to obtain the required finished muffle furnace tubes.

[0039] The material ratios of the above embodiments can be slightly adjusted according to the material particle size, and can also be slightly adjusted according to the product size, thermal shock resistance, oxidation resistance, and reduction resistance requirements, and can all meet the operating temperature of about 2000 degrees.

[0040] The present invention utilizes zirconium oxide, yttrium oxide, magnesium oxide and calcium oxide as main raw materials to manufacture the muffle furnace tube and the preparation method thereof, which has significant advantages and effects. The performance and preparation efficiency of the muffle furnace tube can be further optimized by optimizing the raw material ratio and sintering process parameters. Therefore, the present invention has good practical value in the field of high-temperature processing and heat treatment, and has promotion prospects in the field of aerospace and new materials science.

[0041] The above-mentioned embodiments only express several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A high temperature resistant muffle furnace tube, characterized in that: It is composed of the following raw materials in the following mass ratio: Zirconia 90-96% Yttrium oxide 1-4% Magnesium oxide 1-4% Calcium oxide 1-6%.

2. The new high temperature resistant muffle furnace tube according to claim 1, characterized in that: in, Zirconium oxide 93%, yttrium oxide 2%, magnesium oxide 2%, calcium oxide 3%.

3. A method for manufacturing a high temperature resistant muffle furnace tube according to claim 1 or 2, characterized in that: The steps include: (1) Powder mixing: firstly, the components are mixed according to the mass ratio to obtain a composite powder; (2) Pressing: The composite powder is placed in a steel core rubber sleeve and sealed, and pressed at 160 MPa in a hydraulic press or a cold isostatic press; (3) Sintering: multiple platforms are used to volatilize impurities and finally sinter into preforms at high temperatures; (4) Processing: The prefabricated parts are processed and cut to obtain the required finished muffle furnace tubes.

4. The method for manufacturing a new high temperature resistant muffle furnace tube according to claim 3, characterized in that: Step (3) includes the following two methods: a Various high-temperature electric furnace sintering: use multiple platforms to volatilize impurities, and finally sinter at a high temperature of 1950-2050℃ to obtain prefabricated parts; b Gas furnace sintering: Use multiple platforms to volatilize impurities, and finally slowly sinter at a high temperature of 1800-1850℃ to obtain prefabricated parts.