Support for ion source cathode and using method thereof

Abstract

The invention discloses a support for an ion source cathode and a using method of the support, and relates to the technical field of ion implantation. The ion source specifically comprises an ion source shell, the top of the ion source shell is fixedly connected with a supporting plate, the top of the supporting plate is fixedly connected with a cathode box, a cathode is arranged in the cathode box, and an insulator fixing plate is arranged outside the ion source shell; the support for the ion source cathode further comprises a locking mechanism used for connecting the cathode box and the cathode, the locking mechanism is fixedly connected to the outer portion of the ion source shell and comprises an insulator and a first screw, the insulator fixing plate is fixedly connected with the ion source shell through the first screw, and the insulator fixing plate is fixedly connected with the ion source shell through the second screw. The insulator is fixedly connected with the insulator fixing plate through a second screw, and a groove is formed in the insulator; the fixing mechanism is used for fixing the position of the cathode, and by means of the support for the ion source cathode and the using method of the support, the purpose of improving the using efficiency of equipment is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of ion implantation, in particular to a bracket for an ion source cathode and a use method thereof. Background Art

[0002] Ion implantation is a method of introducing controlled amounts of impurities into a silicon substrate to alter its electrical properties. It is a critical process in semiconductor manufacturing. The ion implantation process is performed within an ion implanter, and the ion source is a key component of the ion implanter. Typically, the ion source of an ion implanter uses an indirect-heated cathode ion source. A shaft extends from the center of the cathode, which is clamped by other components. This allows the cathode to be fixed to one end of the ion source chamber. A filament near the cathode is energized, heating the cathode. Simultaneously, a voltage is applied to the shaft in the center of the cathode, causing the cathode to emit electrons into the ion source chamber, where they collide with gas atoms to generate ions.

[0003] The current ion source cathode bracket and its use method, after long-term heating and power-on, the middle axis of the cathode is consumed, a gap is generated with the clamping component, and the cathode shakes, requiring shutdown and replacement of new products, affecting production capacity. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides an ion source cathode bracket, which specifically includes:

[0005] An ion source shell, wherein a support plate is fixedly connected to the top of the ion source shell, a cathode box is fixedly connected to the top of the support plate, a cathode is provided inside the cathode box, and an insulator fixing plate is provided outside the ion source shell;

[0006] The ion source cathode support also includes:

[0007] A locking mechanism for connecting the cathode box and the cathode, the locking mechanism being fixedly connected to the outside of the ion source housing, the locking mechanism comprising an insulator and a first screw, the insulator fixing plate being fixedly connected to the ion source housing by the first screw, the insulator being fixedly connected to the insulator fixing plate by a second screw, and the insulator having a groove formed therein;

[0008] A fixing mechanism is used to fix the position of the cathode. The fixing mechanism is fixedly connected to the inside of the slot. The fixing mechanism includes a head and a graphite nut. The bottom of the head is fixedly connected to the cathode bracket. The head is sleeved on the outside of the cathode. The graphite nut is arranged on the outside of the cathode. The cathode bracket is fixedly connected to the slot by a third screw.

[0009] Preferably, the outside of the ion source shell is fixedly connected with a positioning ring, the top of the ion source shell is fixedly connected with an air intake mechanism, the top of the ion source shell is fixedly connected with a spring and a fixed column, the top of the spring is snap-connected with a hook for fixing the position of the cathode box, and the hook is snap-connected with the cathode box.

[0010] Preferably, a fixing column is fixedly connected to the top of the ion source shell, a connecting piece is fixedly connected to the outside of the fixing column, and a plurality of the fixing columns are provided.

[0011] Preferably, the fixing mechanism further includes a filament clamp and an adjustment assembly, the interior of the filament clamp is snap-connected with a filament, the adjustment assembly is fixedly connected to the exterior of the graphite nut, and the filament clamp is fixedly connected to the slot via a fourth screw.

[0012] Preferably, the outside of the filament clamp is fixedly connected to a base, the top of the base is fixedly connected to a first adjustment rod, the outside of the first adjustment rod is fixedly connected to a half ring, and two first adjustment rods and two half rings are provided.

[0013] Preferably, a cooling block is fixedly connected to the inside of the semi-ring, a buckle plate is fixedly connected to the outside of the semi-ring, and a heat conducting rod is fixedly connected to the outside of the cooling block, which is used to transfer the temperature of the cooling block to the filament to accelerate the cooling of the filament.

[0014] Preferably, the adjustment assembly includes a movable column and a fixed rod, the outside of the movable column is fixedly connected to a connecting frame, the outside of the fixed rod is fixedly connected to an annular plate, the movable column is slidably connected to the inside of the graphite nut, and the movable column passes through the inside of the graphite nut, and the fixed rod is fixedly connected to the top of the graphite nut.

[0015] Preferably, a threaded through hole is provided inside the graphite nut, a positioning column is fixedly connected to the inside of the connecting frame, a fixing ring is fixedly connected to the outside of the positioning column, a plurality of fixing rings are provided, a press plate is fixedly connected to the top of the positioning column, and the positioning column is slidably connected to the inside of the graphite nut.

[0016] Preferably, the air intake mechanism includes an air pipe, the top of the air pipe is fixedly connected to a gas sleeve, the outside of the gas sleeve is fixedly connected to a connecting pipe, the top of the connecting pipe extends to the interior of the cathode box, and the outside of the air pipe is fixedly connected to a cooling plate, which is used to transfer heat to the air pipe, reduce the gas temperature in the air pipe, and then supply air to the cathode box, thereby promoting the cooling of the cathode and filament inside the cathode box. The cooling plate is fixedly connected to the bottom of the positioning ring, and the air pipe is fixedly connected to the top of the ion source shell.

[0017] A method for using an ion source cathode bracket comprises the following steps:

[0018] S1. Install the cathode, cathode bracket, filament, filament clamp and insulator, open the adjustment component, and position the cathode;

[0019] S2, open the air intake mechanism, filament and energize the cathode, and ions are gradually generated by collision in the cathode box;

[0020] S3. After the work is completed, the fixing mechanism is opened and the position of the cooling block is adjusted to cool the filament by heat transfer;

[0021] S4. After the work is completed, open the cooling plate and the air intake mechanism, adjust the air intake temperature, and supply air to the interior of the cathode box to promote the cooling of the filament and cathode.

[0022] The present invention provides a bracket for an ion source cathode and a method for using the bracket. The bracket has the following beneficial effects:

[0023] 1. This ion source cathode holder and its use method incorporate a fixing mechanism. After prolonged heating and power-on, the cathode's central axis wears away, creating a gap between the cathode and the clamping components. This can cause the cathode to wobble, requiring shutdown and replacement, impacting production capacity. Therefore, a fixing mechanism and adjustment assembly are provided to secure the cathode within the cathode holder and cathode box, positioning and securing the cathode to prevent shaking. This effectively doubles the cathode's service life, significantly improving the ion source's lifespan and stability, reducing downtime and boosting production efficiency.

[0024] 2. This ion source cathode holder and its method of use utilize a fixing mechanism to cool the filament after use. After heating, the filament takes a long time to return to a low temperature. After long-term use, the filament tends to become thinner and require replacement. Therefore, a removable cooling block and heat conducting rod are provided to cool the filament after use through heat transfer, assisting in rapid cooling of the filament, protecting it, and extending its lifespan.

[0025] 3. This ion source cathode bracket and its use method utilizes an air inlet mechanism to deliver gas into the cathode box through an air pipe, a gas sleeve, and a connecting pipe, providing gas atoms to the cathode box. After use, the temperature inside the cathode box is high. To cool the filament and cathode, a controlled cooling plate transfers heat to the air pipe, thereby controlling the temperature of the gas entering the cathode box and supplying air to the interior of the cathode box, thereby cooling the filament and cathode.

[0026] 4. The ion source cathode bracket and its use method, by providing a locking mechanism, a fixing mechanism and an air intake mechanism, complete the fixing of the cathode and the filament position, adjusts the positioning of the cathode, and cools the filament and the interior of the cathode box, thereby protecting the filament and the cathode and extending the service life of the filament and the cathode. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 It is a flowchart of the present invention;

[0029] Figure 3 It is a side structural schematic diagram of the present invention;

[0030] Figure 4 This is a schematic structural diagram of the locking mechanism of the present invention;

[0031] Figure 5 This is a structural diagram of the fixing mechanism of the present invention;

[0032] Figure 6 For the present invention Figure 4 Schematic diagram of the structure at A in the middle;

[0033] Figure 7 This is a schematic diagram of the structure of the components of the present invention;

[0034] Figure 8 This is a structural schematic diagram of the connecting frame of the present invention;

[0035] Figure 9 It is a structural schematic diagram of the air intake mechanism of the present invention.

[0036] Figure: 1, ion source housing; 2, insulator fixing plate; 3, locking mechanism; 301, first screw; 302, insulator; 303, slot; 4, cathode box; 5, cathode; 6, fixing mechanism; 601, head; 602, cathode bracket; 603, graphite nut; 604, adjustment assembly; 6041, movable column; 6042, connecting frame; 6043, threaded through hole; 6044, locking column; 6045, fixing rod; 6046, annular plate ;6047, fixing ring; 6048, pressing plate; 605, filament; 606, filament clamp; 607, base; 608, first adjusting rod; 609, half ring; 610, buckle plate; 611, cooling block; 612, heat conducting rod; 7, positioning ring; 8, air intake mechanism; 801, air pipe; 802, gas sleeve; 803, connecting pipe; 804, cooling plate; 9, spring; 10, hook; 11, fixing column; 12, connecting piece; 13, support plate. DETAILED DESCRIPTION

[0037] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for purposes of illustration and description and are not intended to be exhaustive or to limit the invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments are chosen and described to better illustrate the principles of the invention and its practical application, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for specific applications.

[0038] like Figures 1-9 As shown, the present invention provides a technical solution: specifically comprising:

[0039] An ion source shell 1 is provided, and a support plate 13 is fixedly connected to the top of the ion source shell 1. Two support plates 13 are provided and symmetrically arranged. When installed, the two support plates 13 are installed on the top of the ion source shell 1. The top of the support plate 13 is fixedly connected to the cathode box 4. A hole is opened on the side of the cathode box 4. A cathode 5 is provided inside the cathode box 4. The cathode 5 is installed in the hole on the side of the cathode box 4. The cathode 5 is made of tungsten and has a cylindrical structure. A first step and a first thread are provided on the outer periphery, and a blind hole countersunk is provided inside. An insulator fixing plate 2 is provided on the outside of the ion source shell 1;

[0040] The ion source cathode 5 bracket also includes:

[0041] A locking mechanism 3 is used to connect the cathode box 4 and the cathode 5. The locking mechanism 3 is fixedly connected to the outside of the ion source housing 1. The locking mechanism 3 includes an insulator 302 and a first screw 301. The insulator fixing plate 2 is fixedly connected to the ion source housing 1 by the first screw 301. The insulator 302 is fixedly connected to the insulator fixing plate 2 by a second screw. A groove 303 is formed inside the insulator 302.

[0042] The fixing mechanism 6 is used to fix the position of the cathode 5. The fixing mechanism 6 is fixedly connected to the inside of the groove 303. The fixing mechanism 6 includes a head 601 and a graphite nut 603. The bottom of the head 601 is fixedly connected to the cathode bracket 602. The outside of the cathode bracket 602 is fixedly connected to the cathode 5 support plate 13 by a fourth screw. The cathode 5 support plate 13 is fixedly connected to the inside of the groove 303 by a fifth screw. The cathode bracket 602 is made of graphite. The head 601 is sleeved on the outside of the cathode 5. The head 601 is provided with a second step and a through hole. The graphite nut 603 is arranged on the outside of the cathode 5. The cathode 5 exposes the head thread. The graphite nut 603 is locked on the exposed thread head of the cathode 5. The cathode bracket 602 is fixedly connected to the groove 303 by a third screw. The central axes of the cathode 5, the head 601 and the graphite nut 603 are all in the same straight line. The graphite nut 603 locks the cathode 5 to prevent it from shaking.

[0043] The outside of the ion source shell 1 is fixedly connected with a positioning ring 7, the top of the ion source shell 1 is fixedly connected with an air intake mechanism 8, the top of the ion source shell 1 is fixedly connected with a spring 9 and a fixed column 11, the top of the spring 9 is snap-connected with a hook 10, the hook 10 is snap-connected with the cathode box 4, and the top plate of the cathode box 4 has a hole connected to the hook 10.

[0044] A fixing column 11 is fixedly connected to the top of the ion source shell 1 , and a connecting piece 12 is fixedly connected to the outside of the fixing column 11 . A plurality of fixing columns 11 are provided.

[0045] Before using the equipment, install the cathode 5 and insulator 302, activate the adjustment assembly 604, and position the cathode 5. Then, activate the air intake mechanism 8 and the fixing mechanism 6, and energize the cathode 5. Ions are gradually generated by collisions within the cathode box 4. After the operation is completed, the fixing mechanism 6 is activated to cool the interior of the fixing mechanism 6 through heat transfer. The air intake mechanism 8 is activated, and the inlet air temperature is adjusted to supply air to the interior of the cathode box 4.

[0046] The fixing mechanism 6 also includes a filament clamp 606 and an adjustment assembly 604. The filament clamp 606 is internally snap-connected with the filament 605. The adjustment assembly 604 is fixedly connected to the outside of the graphite nut 603. The filament clamp 606 is fixedly connected to the slot 303 by a fourth screw. The connecting piece 12 is locked to the bottom of the cathode 5 support plate 13 and the fixing column 11 by screws and nuts respectively.

[0047] The outside of the filament clamp 606 is fixedly connected to the base 607 , the top of the base 607 is fixedly connected to the first adjustment rod 608 , the outside of the first adjustment rod 608 is fixedly connected to the half ring 609 , and there are two first adjustment rods 608 and two half rings 609 .

[0048] The interior of the half ring 609 is fixedly connected to a cooling block 611 , the exterior of the half ring 609 is fixedly connected to a buckle plate 610 , and the exterior of the cooling block 611 is fixedly connected to a heat conducting rod 612 .

[0049] After using the device, manually adjust the stroke of the first adjustment rod 608. The first adjustment rod 608 drives the cooling block 611, the buckle plate 610 and the heat-conducting rod 612 to move along the filament clamp 606 toward the filament 605. The temperature of the cooling block 611 is transferred to the filament 605 through the heat-conducting rod 612, thereby cooling the filament 605 and promoting the cooling work of the filament 605.

[0050] When the device needs to be used, the first adjusting rod 608 is adjusted to the initial state, and the first adjusting rod 608 drives the cooling block 611 away from the filament 605 and the cathode 5 to avoid affecting the heating work of the cathode 5.

[0051] The adjustment assembly 604 includes a movable column 6041 and a fixed rod 6045. The bottom of the movable column 6041 is fixedly connected to a gasket, which is in contact with the first thread. The outside of the movable column 6041 is fixedly connected to a connecting frame 6042. The outside of the fixed rod 6045 is fixedly connected to an annular plate 6046. The annular plate 6046 is set to a magnetic material. The movable column 6041 is slidably connected to the inside of the graphite nut 603, and the movable column 6041 passes through the inside of the graphite nut 603. The fixed rod 6045 is fixedly connected to the top of the graphite nut 603.

[0052] A threaded through hole 6043 is provided inside the graphite nut 603, a locking column 6044 is fixedly connected to the inside of the connecting frame 6042, a fixing ring 6047 is fixedly connected to the outside of the locking column 6044, the fixing ring 6047 is set to a magnetic material, and there are multiple fixing rings 6047, a pressing plate 6048 is fixedly connected to the top of the locking column 6044, and the locking column 6044 is slidably connected to the inside of the graphite nut 603.

[0053] During installation, the cathode 5 moves toward the cathode bracket 602, the first step contacts the second step and the second step limits the first step, the first thread passes through the through hole and the first thread is exposed, the graphite nut 603 is close to the surface of the head 601, and the threaded through hole 6043 is matched and locked with the first thread, thereby fixing the position of the cathode 5.

[0054] As the cathode 5 is used, the pressing plate 6048 is manually pressed at the same time, and the pressing plate 6048 drives the positioning column 6044 to move downward, and the positioning column 6044 moves downward inside the graphite nut 603, thereby driving the connecting frame 6042 outside the positioning column 6044 and the movable column 6041 to move downward, and the gasket at the bottom of the movable column 6041 contacts and squeezes the cathode 5, and the fixing ring 6047 gradually engages and fixes with the annular plate 6046, thereby strengthening the position of the cathode 5.

[0055] The air intake mechanism 8 includes an air pipe 801, the top of the air pipe 801 is fixedly connected to a gas sleeve 802, the outside of the gas sleeve 802 is fixedly connected to a connecting pipe 803, the top of the connecting pipe 803 extends to the interior of the cathode box 4, the bottom of the cathode box 4 is open, and the connecting pipe 803 enters the cathode box 4 from the opening, the outside of the air pipe 801 is fixedly connected to a cooling plate 804, the cooling plate 804 is fixedly connected to the bottom of the positioning ring 7, and the air pipe 801 is fixedly connected to the top of the ion source shell 1.

[0056] The gas enters the gas pipe 801 through the ion source shell 1 , enters the gas sleeve 802 through the gas pipe 801 , enters the connecting pipe 803 through the gas sleeve 802 , and enters the cathode box 4 through the connecting pipe 803 to provide gas atoms for the cathode 5 .

[0057] After the work is completed, the cooling plate 804 is turned on, and the cooling plate 804 transfers the temperature to the gas pipe 801, reducing the gas temperature in the gas pipe 801. The gas enters the cathode box 4, reducing the temperature in the cathode box 4, and promoting the filament 605 and the cathode 5 to return to the initial temperature.

[0058] Working Principle: Before using the device, install cathode 5 and insulator 302. Use the second screw to connect insulator 302 to insulator fixing plate 2. Move cathode 5 toward cathode bracket 602. The first step contacts the second step, and the second step limits the first step. The first thread passes through the through hole and the first thread is exposed. Graphite nut 603 is close to the surface of head 601. The threaded through hole 6043 engages and locks with the first thread, thereby fixing the position of cathode 5. Open adjustment assembly 604 to position cathode 5.

[0059] As the cathode 5 is used, the pressing plate 6048 is manually pressed at the same time, and the pressing plate 6048 drives the positioning column 6044 to move downward, and the positioning column 6044 moves downward inside the graphite nut 603, thereby driving the connecting frame 6042 outside the positioning column 6044 and the movable column 6041 to move downward, and the gasket at the bottom of the movable column 6041 contacts and squeezes the cathode 5, and the fixing ring 6047 gradually engages and fixes with the annular plate 6046, thereby strengthening the position of the cathode 5.

[0060] The gas inlet mechanism 8 and filament 605 are turned on, and the cathode 5 is energized. Ions are gradually generated by collisions within the cathode box 4. Gas passes through the ion source housing 1 into the gas pipe 801, then into the gas sleeve 802. From there, it enters the connecting pipe 803, and finally into the cathode box 4, providing gas atoms to the cathode 5.

[0061] After the work is completed, the fixing mechanism 6 is opened to cool the interior of the fixing mechanism 6 by heat transfer. After using the device, the stroke of the first adjustment rod 608 is manually adjusted. The first adjustment rod 608 drives the cooling block 611, the pinch plate 610, and the heat conducting rod 612 to move along the filament clamp 606 toward the filament 605. The temperature of the cooling block 611 is transferred to the filament 605 through the heat conducting rod 612, thereby cooling the filament 605 and promoting the cooling of the filament 605.

[0062] When the device needs to be used, the first adjustment rod 608 is adjusted to the initial state, and the first adjustment rod 608 drives the cooling block 611 away from the filament 605 and the cathode 5 to avoid affecting the heating work of the cathode 5.

[0063] The air intake mechanism 8 is turned on, and the air intake temperature is adjusted to supply air to the interior of the cathode box 4. The cooling plate 804 is turned on, and the cooling plate 804 transmits the temperature to the air pipe 801, lowering the temperature of the gas in the air pipe 801. The gas enters the cathode box 4, lowering the temperature therein and promoting the filament 605 and cathode 5 to return to their initial temperatures.

[0064] The present invention provides a method for using an ion source cathode bracket, comprising the following steps:

[0065] S1. Install the cathode 5, cathode bracket 602, filament 605, filament clamp 606 and insulator 302, open the adjustment assembly 604, and position the cathode 5;

[0066] S2, open the air intake mechanism 8, the filament 605 and energize the cathode 5, and gradually generate ions by collision in the cathode box 4;

[0067] S3. After the work is completed, the fixing mechanism 6 is opened and the position of the cooling block 611 is adjusted to cool the filament 605 by heat transfer;

[0068] S4. After the work is completed, the cooling plate 804 and the air intake mechanism 8 are turned on, the air intake temperature is adjusted, and air is supplied to the interior of the cathode box 4 to promote the cooling of the filament 605 and the cathode 5.

[0069] Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without making creative efforts should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in the present invention shall be implemented in accordance with conventional means in the field unless otherwise specified or limited.

Claims

1. A bracket for an ion source cathode, comprising: An ion source shell (1), characterized in that: a support plate (13) is fixedly connected to the top of the ion source shell (1), a cathode box (4) is fixedly connected to the top of the support plate (13), a cathode (5) is arranged inside the cathode box (4), and an insulator fixing plate (2) is arranged outside the ion source shell (1); The ion source cathode support also includes: A locking mechanism (3) for connecting the cathode box (4) and the cathode (5), the locking mechanism (3) being fixedly connected to the outside of the ion source shell (1), the locking mechanism (3) comprising an insulator (302) and a first screw (301), the insulator fixing plate (2) being fixedly connected to the ion source shell (1) via the first screw (301), the insulator (302) being fixedly connected to the insulator fixing plate (2) via a second screw, and a groove (303) being provided inside the insulator (302); A fixing mechanism (6) is used to fix the position of the cathode (5), the fixing mechanism (6) is fixedly connected to the inside of the slot (303), the fixing mechanism (6) comprises a head (601) and a graphite nut (603), the bottom of the head (601) is fixedly connected to a cathode bracket (602), the head (601) is sleeved on the outside of the cathode (5), the graphite nut (603) is arranged on the outside of the cathode (5), and the cathode bracket (602) is fixedly connected to the slot (303) by a third screw.

2. The ion source cathode bracket according to claim 1, characterized in that: The outside of the ion source shell (1) is fixedly connected to a positioning ring (7), the top of the ion source shell (1) is fixedly connected to an air intake mechanism (8), the top of the ion source shell (1) is fixedly connected to a spring (9) and a fixing column (11), the top of the spring (9) is snap-connected to a hook (10), and the hook (10) is snap-connected to a cathode box (4).

3. The ion source cathode bracket according to claim 1, characterized in that: A fixing column (11) is fixedly connected to the top of the ion source shell (1), a connecting piece (12) is fixedly connected to the outside of the fixing column (11), and a plurality of the fixing columns (11) are provided.

4. The ion source cathode bracket according to claim 1, characterized in that: The fixing mechanism (6) further comprises a filament clamp (606) and an adjustment assembly (604); the interior of the filament clamp (606) is snap-connected with a filament (605); the adjustment assembly (604) is fixedly connected to the outside of the graphite nut (603); and the filament clamp (606) is fixedly connected to the groove (303) via a fourth screw.

5. The ion source cathode bracket according to claim 4, characterized in that: The outside of the filament clamp (606) is fixedly connected to a base (607), the top of the base (607) is fixedly connected to a first adjustment rod (608), the outside of the first adjustment rod (608) is fixedly connected to a half ring (609), and two of each of the first adjustment rod (608) and the half ring (609) are provided.

6. The ion source cathode bracket according to claim 5, characterized in that: The interior of the semi-ring (609) is fixedly connected to a cooling block (611), the exterior of the semi-ring (609) is fixedly connected to a buckle plate (610), and the exterior of the cooling block (611) is fixedly connected to a heat-conducting rod (612).

7. The ion source cathode bracket according to claim 4, characterized in that: The adjustment assembly (604) includes a movable column (6041) and a fixed rod (6045), the outside of the movable column (6041) is fixedly connected to a connecting frame (6042), the outside of the fixed rod (6045) is fixedly connected to an annular plate (6046), the movable column (6041) is slidably connected to the inside of the graphite nut (603), and the movable column (6041) passes through the inside of the graphite nut (603), and the fixed rod (6045) is fixedly connected to the top of the graphite nut (603).

8. The ion source cathode support according to claim 7, characterized in that: The graphite nut (603) is provided with a threaded through hole (6043) inside, the connecting frame (6042) is fixedly connected to a retaining column (6044) inside, the retaining column (6044) is fixedly connected to a fixing ring (6047) outside, and a plurality of fixing rings (6047) are provided, the top of the retaining column (6044) is fixedly connected to a pressing plate (6048), and the retaining column (6044) is slidably connected to the inside of the graphite nut (603).

9. The ion source cathode support according to claim 2, characterized in that: The air intake mechanism (8) comprises an air pipe (801), the top of the air pipe (801) is fixedly connected to a gas sleeve (802), the outside of the gas sleeve (802) is fixedly connected to a connecting pipe (803), the top of the connecting pipe (803) extends to the interior of the cathode box (4), the outside of the air pipe (801) is fixedly connected to a cooling plate (804), the cooling plate (804) is fixedly connected to the bottom of a positioning ring (7), and the air pipe (801) is fixedly connected to the top of the ion source shell (1).

10. A method for using a bracket for an ion source cathode, characterized in that: The following steps are involved: S1, installing the cathode (5), the cathode support (602), the filament (605), the filament clamp (606) and the insulator (302), opening the adjustment component (604), and positioning the cathode (5); S2, opening the air intake mechanism (8), the filament (605) and energizing the cathode (5), and gradually generating ions by collision in the cathode box (4); S3, after the work is completed, the fixing mechanism (6) is opened, and the position of the cooling block (611) is adjusted to cool the filament (605) by heat transfer; S4. After the work is completed, the cooling plate (804) and the air intake mechanism (8) are turned on, and the air intake temperature is adjusted to supply air to the interior of the cathode box (4) to promote the cooling of the filament (605) and the cathode (5).

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