Piezoelectric-magnetic combined type three-dimensional vibration energy acquisition energy device and electronic equipment

Abstract

The invention discloses a piezoelectric-magnetic combined type three-dimensional vibration energy acquisition energy device and electronic equipment, the piezoelectric-magnetic combined type three-dimensional vibration energy acquisition energy device comprises a magnetic component, a mass block, a support component, a coil, a piezoelectric component and a wire, the support component is connected between the mass block and the magnetic component, and the coil is connected between the magnetic component and the support component. The mass block can perform three-dimensional swing relative to the magnetic component; the coil synchronously moves along with the mass block to cut a magnetic induction line of the magnetic component; the piezoelectric component elastically deforms along with the supporting component to generate a piezoelectric effect; the first end and the second end of the coil and the first electrode layer of the piezoelectric part are connected with wires, and the wires are used for conveying energy obtained through electromagnetic induction conversion of the magnetic part and the coil and energy obtained through piezoelectric effect conversion of the piezoelectric part. According to the invention, vibration energy collection of a piezoelectric effect and vibration energy collection of an electromagnetic induction phenomenon can be combined, the energy conversion efficiency is improved, and efficient collection of three-dimensional vibration energy is realized.

Description

Technical Field

[0001] The present invention belongs to the technical field of vibration energy harvesting, and in particular relates to a piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device and electronic equipment. Background Art

[0002] With the rapid development of wireless sensors and portable electronic devices, higher requirements are placed on long-term, stable and environmentally adaptable energy supply technologies. Traditional battery-powered devices have problems such as limited life, frequent replacement and environmental pollution. Therefore, it is particularly important to develop micro-energy technologies that can collect energy from the environment and convert it into electrical energy. Summary of the invention

[0003] The present invention is based on the inventor's discovery and understanding of the following facts and problems:

[0004] The inventors realize that vibration energy is a ubiquitous and stable form of energy, and its collection and conversion technology can meet the development and application of micro-energy technology. At the same time, the vibration energy collection technology in the relevant technology includes piezoelectric, electromagnetic and electrostatic types, but single-effect energy collectors often have problems such as low efficiency and low output power.

[0005] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0006] To this end, an embodiment of the present invention proposes a piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device that can realize the combination of piezoelectric effect and electromagnetic induction.

[0007] An embodiment of the present invention further provides an electronic device.

[0008] The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device of the embodiment of the present invention comprises:

[0009] Magnetic components;

[0010] A mass block and a supporting component, wherein the supporting component is multiple, the multiple supporting components are connected between the mass block and the magnetic component, there is a gap between the mass block and the magnetic component, and the supporting component is elastic so that the mass block can swing three-dimensionally relative to the magnetic component;

[0011] A coil, the coil is connected to the mass block, the coil moves synchronously with the mass block to cut the magnetic flux lines of the magnetic component, and the coil has a first end and a second end;

[0012] A piezoelectric component, the piezoelectric component is placed on the supporting component, and the piezoelectric component undergoes elastic deformation along with the supporting component to generate a piezoelectric effect;

[0013] The first end and the second end of the coil and the first electrode layer of the piezoelectric component are all connected with a wire, and the wire is used to transmit energy converted by the magnetic component and the coil through electromagnetic induction and energy converted by the piezoelectric component through piezoelectric effect.

[0014] The embodiments of the present invention can realize the combination of vibration energy collection by piezoelectric effect and vibration energy collection by electromagnetic induction phenomenon, improve energy conversion efficiency, and realize efficient collection of three-dimensional vibration energy.

[0015] In some embodiments, the coil is a planar coil, and the magnetization direction of the magnetic component is orthogonal to the planar coil;

[0016] And / or, the magnetic component is a permanent magnet;

[0017] And / or, the piezoelectric component comprises a piezoelectric film layer, a first electrode layer and a second electrode layer, the first electrode layer and the second electrode layer are respectively located on both sides of the piezoelectric film layer, and the first electrode layer is connected to a wire.

[0018] In some embodiments, the coil is in the shape of a meander, a straight conductor, a mesh, or a concentric circle;

[0019] and / or, the coil is prepared by electroplating, evaporation deposition or sputtering;

[0020] and / or, the coil is made of aluminum, copper, aluminum-copper alloy or gold;

[0021] And / or, the magnetic component is a neodymium iron boron permanent magnet, an aluminum nickel cobalt permanent magnet alloy, an iron chromium cobalt permanent magnet alloy, a barium ferrite, a strontium ferrite or a rare earth cobalt permanent magnet;

[0022] And / or, the material of the piezoelectric film layer is lead zirconate titanate or scandium aluminum nitride.

[0023] In some embodiments, the supporting component includes a beam body, the beam body is elastic, one end of the beam body is connected to the supporting block, and the other end of the beam body is connected to the magnetic component.

[0024] In some embodiments, the number of the support components is at least 3, and the support components are arranged along the circumference of the mass block;

[0025] And / or, the beam body is a straight beam, an arched beam or a folded beam, and the folded beam has at least one bent section;

[0026] And / or, the beam body is integrally formed.

[0027] In some embodiments, a shell is further included, wherein the shell is fixedly connected to the magnetic component and the shell is disposed between the supporting component and the magnetic component.

[0028] In some embodiments, the housing has a first cavity in the middle, and the support component and the mass block are located on a side of the housing away from the magnetic component;

[0029] And / or, the shell is a silicon-based shell, a silicon nitride shell or a III-V semiconductor shell;

[0030] And / or, the magnetic component and the shell are arranged along a first direction, and a size of the mass block in the first direction is greater than or equal to a size of the support component in the first direction and smaller than a size of the shell in the first direction.

[0031] In some embodiments, an insulating layer is further included, the insulating layer being disposed on the housing, the supporting component and the mass block, and the wire is located on a side of the insulating layer away from the housing, the supporting component and the mass block;

[0032] The first end of the coil has a first connection portion, the second end of the coil has a second connection portion, the shell is provided with a third connection portion, the fourth connection portion and the fifth connection portion, the piezoelectric component has a sixth connection portion, the insulating layer has a seventh connection portion, an eighth connection portion, a ninth connection portion, a tenth connection portion, an eleventh connection portion and a twelfth connection portion on a side away from the shell, the support component and the mass block, and the seventh connection portion, the eighth connection portion, the ninth connection portion, the tenth connection portion, the eleventh connection portion and the twelfth connection portion correspond to and are connected to the first connection portion, the second connection portion, the third connection portion, the fourth connection portion, the fifth connection portion and the sixth connection portion respectively;

[0033] The conductive wire includes a first metal layer, a second metal layer and a third metal layer, one end of the first metal layer is connected to the seventh connection part, and the other end is connected to the ninth connection part, one end of the second metal layer is connected to the eighth connection part, and the other end is connected to the tenth connection part, and one end of the third metal layer is connected to the eleventh connection part, and the other end is connected to the twelfth connection part.

[0034] In some embodiments, the ninth connection portion, the tenth connection portion, the eleventh connection portion, the third connection portion, the fourth connection portion and the fifth connection portion are all multiple in number;

[0035] And / or, the first metal layer, the second metal layer and the third metal layer are all prepared by electroplating, evaporation deposition or sputtering process;

[0036] And / or, the first metal layer, the second metal layer and the third metal layer are made of aluminum, copper, aluminum-copper alloy or gold;

[0037] And / or, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device is manufactured using micro-nano processing technology;

[0038] And / or, it also includes an energy harvesting circuit, and the energy harvesting circuit is connected to the ninth connecting portion, the tenth connecting portion and the eleventh connecting portion.

[0039] The electronic device disclosed in the present invention comprises a device body and any one of the above-mentioned piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy devices, wherein the device body and the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device are connected so that the electric energy collected by the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device is transmitted to the device body. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 This is a schematic diagram of the structure of a piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to an embodiment of the present invention.

[0041] Figure 2 A schematic diagram of the upper surface structure of a shell, a supporting component and a mass block provided in an embodiment of the present invention.

[0042] Figure 3 A schematic diagram of the upper surface structure of the insulating layer provided in an embodiment of the present invention.

[0043] Figure 4 FIG. 4 is a schematic diagram of an energy harvesting circuit according to an embodiment of the present invention.

[0044] Figure 5 Schematic diagram of the layer structure of the piezoelectric component according to an embodiment of the present invention.

[0045] Reference numerals:

[0046] 100. Piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device;

[0047] 1. Magnetic components;

[0048] 2. Mass block;

[0049] 3. Support components;

[0050] 4. Coil; 41. First connecting portion; 42. Second connecting portion;

[0051] 5. housing; 51. third connection portion; 52. fourth connection portion; 53. fifth connection portion;

[0052] 6. Wire; 61. First metal layer; 62. Second metal layer; 63. Third metal layer;

[0053] 7. Piezoelectric component; 71. Piezoelectric film layer; 72. First electrode layer; 73. Second electrode layer; 74. Sixth connecting portion;

[0054] 8. Insulating layer; 81. Seventh connecting portion; 82. Eighth connecting portion; 83. Ninth connecting portion; 84. Tenth connecting portion; 85. Eleventh connecting portion; 86. Twelfth connecting portion;

[0055] 9. Energy harvesting circuit. DETAILED DESCRIPTION

[0056] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0057] The following combination Figures 1 to 5 The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device and electronic equipment of the embodiment of the present invention are described in detail.

[0058] like Figures 1 to 3 As shown, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 of an embodiment of the present invention includes a magnetic component 1, a mass block 2 and a supporting component 3. There are multiple supporting components 3, and the multiple supporting components 3 are connected between the mass block 2 and the magnetic component 1. There is a gap between the mass block 2 and the magnetic component 1, and the supporting component 3 is elastic so that the mass block 2 can swing three-dimensionally relative to the magnetic component 1.

[0059] The supporting component 3 provides support for the mass block 2 so that the mass block 2 is in a suspended state, and the supporting component 3 is elastic and has resilience. When the three-dimensional vibration energy harvesting energy device is placed in an application environment and vibrates, the mass block 2 will vibrate three-dimensionally.

[0060] The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 also includes a coil 4, a piezoelectric component 7 and a wire 6. The embodiment of the present invention harvests the three-dimensional vibration energy of the mass block 2 through the electromagnetic induction phenomenon of the coil 4 and the magnetic component 1 and the piezoelectric effect of the piezoelectric component 7, thereby improving the energy conversion efficiency.

[0061] The coil 4 is connected to the mass block 2. The coil 4 can be attached to the surface of the mass block 2, and the coil 4 is located in the magnetic field of the magnetic component 1. The coil 4 moves synchronously with the mass block 2 to cut the magnetic flux lines of the magnetic component 1, and current will be generated in the coil 4; the piezoelectric component 7 is placed on the supporting component 3, and the piezoelectric component 7 undergoes elastic deformation with the supporting component 3 to produce a piezoelectric effect; the coil 4 has a first end and a second end, and the first end and the second end of the coil 4 and the first electrode layer 72 of the piezoelectric component 7 are all connected to a wire 6, and the wire 6 is used to transmit energy converted by the magnetic component 1 and the coil 4 through electromagnetic induction and energy converted by the piezoelectric component 7 through the piezoelectric effect.

[0062] The first end and the second end of the coil 4 of the embodiment of the present invention are both connected to the wire 6, which is used to connect to the energy collection circuit 9 to transmit the electric energy obtained by the electromagnetic induction phenomenon to the electronic device. The piezoelectric component 7 is connected to the energy collection circuit 9 through the wire 6, and the electric energy obtained by the piezoelectric effect is transmitted to the electronic device for normal operation of the electronic device, and the excess electric energy can be stored.

[0063] In the embodiment of the present invention, a three-dimensional vibration energy harvesting energy device is placed in an application environment. When the mass block 2 vibrates three-dimensionally, electrical energy is obtained between the coil 4 and the magnetic component 1 through electromagnetic induction, and the piezoelectric component 7 obtains electrical energy through the piezoelectric effect generated by the elastic deformation of the supporting component 3. The embodiment of the present invention can combine the vibration energy harvesting of the piezoelectric effect with the vibration energy harvesting of the electromagnetic induction phenomenon, improve the energy conversion efficiency, and realize the efficient harvesting of three-dimensional vibration energy.

[0064] The embodiment of the present invention has a long service life, does not need to be replaced, is less affected by environmental factors, and can actively collect energy from the environment and convert it. The embodiment of the present invention can change its volume size according to needs. For example, in small low-power electronic devices such as wireless sensors, wearable devices, and medical implants, the three-dimensional vibration energy harvesting energy device of the embodiment of the present invention can be made into a micro energy device to improve its practicality and application scenarios.

[0065] In some embodiments, the coil 4 is a planar coil 4, and the magnetization direction of the magnetic component 1 is orthogonal to the planar coil 4. When the planar coil 4 is orthogonal to the magnetization wind direction, according to the three-dimensional swing characteristics of the mass block 2, the planar coil 4 can more effectively cut the magnetic flux lines, improve the conversion efficiency of the three-dimensional vibration energy, and increase the energy collection amount.

[0066] Furthermore, the shape of the coil 4 is a circular shape, a straight conductor shape, a mesh shape or a concentric circle shape. In application, the coil 4 of different shapes can be selected to increase the current generated after the coil 4 cuts the magnetic flux lines and ensure the energy conversion efficiency.

[0067] Furthermore, the coil 4 is prepared by electroplating, evaporation deposition or sputtering process, so that the planar coil 4 is fixedly formed on the surface of the mass block 2, which simplifies the manufacturing process, improves the structural stability, and can realize the production of micro-energy devices. The material of the coil 4 is aluminum, copper, aluminum-copper alloy or gold and other metals to ensure its conductive properties and structural stability.

[0068] In some embodiments, the magnetic component 1 is a permanent magnet. The permanent magnet has a stable magnetic field, and by controlling the magnetization direction, an ideal magnetic flux distribution state can be obtained, and no other additional components are required, which makes it easier to achieve miniaturization and manufacture micro energy devices.

[0069] Furthermore, the magnetic component 1 is a neodymium iron boron permanent magnet, an aluminum nickel cobalt permanent magnet alloy, an iron chromium cobalt permanent magnet alloy, a barium ferrite, a strontium ferrite or a rare earth cobalt permanent magnet.

[0070] In some embodiments, the piezoelectric component 7 includes a piezoelectric film layer 71 , a first electrode layer 72 and a second electrode layer 73 . The first electrode layer 72 and the second electrode layer 73 are respectively located on both sides of the piezoelectric film layer 71 . The first electrode layer 72 is connected to a wire 6 .

[0071] The first electrode layer 72 is arranged on the upper side of the piezoelectric film layer 71, and the second electrode layer 73 is arranged on the lower side of the piezoelectric film layer 71. When the supporting component 3 undergoes elastic deformation, the piezoelectric film layer 71 is stretched, and current is generated in the first electrode layer 72, thereby realizing the conversion of vibration and electrical energy through the piezoelectric effect.

[0072] The embodiment of the present invention combines the piezoelectric effect and the electromagnetic induction phenomenon, improves the conversion efficiency of vibration and electric energy, has a larger output current, is more practical, and can meet the needs of electronic devices with a larger power consumption range.

[0073] Furthermore, the material of the piezoelectric film layer 71 is lead zirconate titanate (PZT) or scandium aluminum nitride (ScAIN).

[0074] In some embodiments, the supporting component 3 includes a beam body, which is elastic, one end of which is connected to the supporting block, and the other end of which is connected to the magnetic component 1 .

[0075] That is to say, the beam body is made of an elastic material, which can ensure the three-dimensional vibration of the mass block 2 and also provide a rebound force for the resetting of the mass block 2 .

[0076] For example, the beam body is made of an elastic metal sheet or alloy sheet, which can be elastically deformed and has resilience when vibrating.

[0077] Further, the number of the supporting components 3 is at least 3, and the supporting components 3 are arranged along the circumferential direction of the mass block 2 .

[0078] For example, the number of supporting components 3 is 3, 4, or 6. The number of supporting components 3 can be determined based on the weight of the mass block 2, the size of the beam, the elastic deformation capacity, the ability to constrain the three-dimensional swing of the mass block 2, etc., to ensure that the mass block 2 can achieve three-dimensional vibration.

[0079] Optionally, the beam body is a straight beam, an arched beam or a folded beam.

[0080] When the beam body is a folding beam, the folding beam has at least one bending section, the number of the bending sections in the folding beam may be 1, 2 or 4, and the bending of the bending section may be a right angle or an obtuse angle.

[0081] For example, the folded beam is in a Z shape.

[0082] For another example, the folding beam includes a first section, a second section and two third sections, one end of the first section is connected to the mass block 2, the other end of the first section is connected to the middle of the second section, both ends of the second section are respectively connected to a third section, one end of the third section is connected to the second section, and the other end of the third section is directly or indirectly connected to the magnetic component 1.

[0083] Furthermore, the first section is orthogonal to the second section, and the second section is orthogonal to the third section. At this time, the folding beam has three connecting ends, one of which is connected to the mass block 2, and the other two connecting ends are directly or indirectly connected to the magnetic component 1.

[0084] When a folded beam is used, on the one hand, the elastic deformation capacity of the beam body is increased. When the mass block 2 vibrates in three dimensions, the beam body is more likely to deform, reducing the constraint on the mass block 2. At the same time, multiple folded beams can ensure that there is sufficient resilience to make the mass block 2 vibrate reciprocatingly, thereby improving the conversion efficiency of vibration energy.

[0085] Optionally, straight beams, arched beams and folded beams can be used alone or in combination. For example, a portion of the beam body is a straight beam and another portion of the beam body is a folded beam. For another example, a portion of the beam body is an arched beam and another portion of the beam body is a folded beam.

[0086] Furthermore, the beam body is integrally formed, which has better stability, easier control of structural performance, and ensures product quality.

[0087] In some embodiments, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 also includes a shell 5, which is fixedly connected to the magnetic component 1, and the shell 5 is arranged between the supporting component 3 and the magnetic component 1.

[0088] That is to say, the support component 3 is not directly connected to the magnetic component 1, but is fixed to the magnetic component 1 through the shell 5, and the mass block 2 is connected to the shell 5 through the support component 3. In application, the structure of the shell 5 can be used to arrange other components more reasonably, and the structure is more stable.

[0089] Furthermore, the housing 5 has a first cavity in the middle, and the support component 3 and the mass block 2 are located on the side of the housing 5 away from the magnetic component 1. At this time, the mass block 2 can be suspended, which is more convenient for the three-dimensional swing of the mass block 2. Due to the support and constraint of the support component 3, at least part of the swing area of ​​the mass block 2 can be located in the first cavity, which can make more reasonable use of space and ensure the structural stability of the support component 3 and the mass block 2.

[0090] Furthermore, the shell 5 is a silicon-based shell 5, a silicon nitride shell 5 or a III-V semiconductor shell 5. According to application requirements, the corresponding material of the shell 5 is selected to fully utilize the characteristics of the shell 5 of the corresponding material to ensure the structural stability of the energy device.

[0091] Further, the magnetic component 1 and the shell 5 are arranged along the first direction, and the size of the mass block 2 in the first direction is greater than or equal to the size of the support component 3 in the first direction, and smaller than the size of the shell 5 in the first direction.

[0092] The first direction is also the up-down direction shown in the figure.

[0093] The first cavity runs through the upper and lower ends of the shell 5. Therefore, the mass block 2 can be placed in the first cavity so that the swing area of ​​the mass block 2 is more restricted in the first cavity, which can protect the mass block 2 and improve the compactness and rationality of the layout and the stability of the structure.

[0094] like Figure 2 and Figure 3 As shown, in some embodiments, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 also includes an insulating layer 8, which is arranged on the shell 5, the supporting component 3 and the mass block 2, and the wire 6 is located on the side of the insulating layer 8 away from the shell 5, the supporting component 3 and the mass block 2.

[0095] The first end of the coil 4 has a first connecting part 41, the second end of the coil 4 has a second connecting part 42, the shell 5 is provided with a third connecting part 51, a fourth connecting part 52 and a fifth connecting part 53, the piezoelectric component 7 has a sixth connecting part 74, and the side of the insulating layer 8 away from the shell 5, the supporting component 3 and the mass block 2 has a seventh connecting part 81, an eighth connecting part 82, a ninth connecting part 83, a tenth connecting part 84, an eleventh connecting part 85 and a twelfth connecting part 86, the seventh connecting part 81, the eighth connecting part 82, the ninth connecting part 83, the tenth connecting part 84, the eleventh connecting part 85 and the twelfth connecting part 86 respectively correspond to and are connected with the first connecting part 41, the second connecting part 42, the third connecting part 51, the fourth connecting part 52, the fifth connecting part 53 and the sixth connecting part 74.

[0096] That is to say, in the thickness direction of the insulating layer 8, the seventh connection part 81 is correspondingly connected to the first connection part 41, the eighth connection part 82 is correspondingly connected to the second connection part 42, the ninth connection part 83 is correspondingly connected to the third connection part 51, the tenth connection part 84 is correspondingly connected to the fourth connection part 52, the eleventh connection part 85 is correspondingly connected to the fifth connection part 53, and the twelfth connection part 86 is correspondingly connected to the sixth connection part 74.

[0097] The wire 6 includes a first metal layer 61, a second metal layer 62 and a third metal layer 63. One end of the first metal layer 61 is connected to the seventh connecting part 81, and the other end is connected to the ninth connecting part 83. One end of the second metal layer 62 is connected to the eighth connecting part 82, and the other end is connected to the tenth connecting part 84. One end of the third metal layer 63 is connected to the eleventh connecting part 85, and the other end is connected to the twelfth connecting part 86.

[0098] like Figure 4 As shown, the first metal layer 61 and the second metal layer 62 are used to transmit the electric energy generated in the coil 4 to the energy harvesting circuit 9 , and the third metal layer 63 is used to transmit the electric energy generated by the piezoelectric component 7 to the energy harvesting circuit 9 .

[0099] Each connection portion in the embodiment of the present invention may be a soldering pad.

[0100] In some embodiments, the ninth connection portion 83 , the tenth connection portion 84 , the eleventh connection portion 85 , the third connection portion 51 , the fourth connection portion 52 , and the fifth connection portion 53 are all plural in number.

[0101] That is to say, the ninth connection part 83, the tenth connection part 84, the eleventh connection part 85, the third connection part 51, the fourth connection part 52 and the fifth connection part 53 can be set to multiple according to the structure of the supporting component, so as to transmit the current generated by the coil cutting the magnetic flux lines through multiple paths.

[0102] For example, the number of supporting components shown in the figure is four, each supporting component has one connecting end connected to the shell, the ninth connecting part 83, the tenth connecting part 84, the third connecting part 51, and the fourth connecting part 52 can all be set to two, and the number of the eleventh connecting part 85 and the fifth connecting part 53 for heating are four, which facilitates the transmission of current in the coil through multiple paths and improves stability.

[0103] Furthermore, the first metal layer 61, the second metal layer 62 and the third metal layer 63 are all prepared by electroplating, evaporation deposition or sputtering, so that the first metal layer 61, the second metal layer 62 and the third metal layer 63 are fixedly formed on the surface of the insulating layer 8, which simplifies the manufacturing process, improves the structural stability, and can realize the manufacturing of micro-energy devices. The first metal layer 61, the second metal layer 62 and the third metal layer 63 are made of aluminum, copper, aluminum-copper alloy or gold to ensure their conductive properties and structural stability.

[0104] In some embodiments, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 is manufactured using micro-nano processing technology.

[0105] The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 in the above embodiment can be manufactured using micro-nano processing technology according to the requirements of the application scenario, so as to be applied to low-power electronic devices such as wireless sensors, wearable electronic devices, and medical implants, thereby solving the problems of traditional battery life limitations, replacement difficulties, and environmental impacts in related technologies.

[0106] The present invention realizes the conversion between vibration and electrical energy through the displacement of mass block 2 during three-dimensional vibration, the cutting of magnetic flux lines of permanent magnet by coil 4 and the piezoelectric effect of piezoelectric component 7. Compared with the vibration energy harvesting device in the related art, the embodiment of the present invention has a simple structure, a smaller size, is easy to package, and has the advantages of three-dimensional vibration energy harvesting, and can be widely used in the field of three-dimensional vibration energy harvesting.

[0107] like Figure 5 As shown, in some embodiments, the material of the first electrode layer 72 and the second electrode layer 73 of the piezoelectric component 7 is Pt, the material of the piezoelectric film layer 71 is PZT, the material of the insulating layer 8 is silicon nitride, the material of the metal layer and the coil 4 is Au, and the substrate on the lower side of the second electrode layer 73 is an SOI substrate.

[0108] like Figure 4As shown, in some embodiments, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 further includes an energy harvesting circuit 9, which is connected to the ninth connection portion 83, the tenth connection portion 84, and the eleventh connection portion 85. The energy harvesting circuit 9 harvests the current generated in the coil 4 and the piezoelectric component 7 through the ninth connection portion 83, the tenth connection portion 84, and the eleventh connection portion 85. After the current generated in the coil 4 and the piezoelectric component 7 flows to the ninth connection portion 83, the tenth connection portion 84, and the eleventh connection portion 85, it is output to the energy harvesting circuit 9 through the bonding wire to store the stored electrical energy.

[0109] The embodiment of the present invention can collect energy during the three-dimensional vibration process, convert the vibration signal into an electrical signal, and then store and manage the energy through an external circuit. The energy device is made using micro-nano processing technology and has the advantages of high precision, small size, low cost, portability and easy integration, which can meet the increasing demand for sensor self-energy and micro energy in various industries.

[0110] The electronic device disclosed in the present invention comprises a device body and any one of the above-mentioned piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy devices 100. The device body and the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 are connected so that the electric energy collected by the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 is transmitted to the device body.

[0111] The device body can be a low-power electronic device such as a wireless sensor, a wearable electronic device, or a medical implant.

[0112] In the field of micro-electromechanical systems (MEMS) technology, a piezoelectric-magnetic composite three-dimensional vibration energy harvesting MEMS micro-energy device (i.e., a piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device 100 of an embodiment of the present invention) can convert mechanical three-dimensional vibration energy in the environment into electrical energy. The MEMS micro-energy device uses the principles of electromagnetic induction and piezoelectric effect to cause relative movement between the permanent magnet and the coil 4 inside the device through three-dimensional vibration, change the magnetic flux, and thus generate an induced electromotive force in the coil 4. At the same time, by stretching the piezoelectric film layer 71 in the piezoelectric component 7, efficient conversion between vibration and electrical energy is achieved, and the device has the advantages of simple structure, high conversion efficiency, and large output current.

[0113] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0114] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0115] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0116] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0117] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0118] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device, characterized in that: include: Magnetic components; A mass block and a supporting component, wherein the supporting components are multiple in number, the multiple supporting components are connected between the mass block and the magnetic component, a gap is provided between the mass block and the magnetic component, and the supporting component is elastic so that the mass block can swing three-dimensionally relative to the magnetic component; A coil, the coil is connected to the mass block, the coil moves synchronously with the mass block to cut the magnetic flux lines of the magnetic component, and the coil has a first end and a second end; A piezoelectric component, the piezoelectric component is placed on the supporting component, and the piezoelectric component undergoes elastic deformation along with the supporting component to generate a piezoelectric effect; The first end and the second end of the coil and the first electrode layer of the piezoelectric component are all connected with a wire, and the wire is used to transmit energy converted by the magnetic component and the coil through electromagnetic induction and energy converted by the piezoelectric component through piezoelectric effect.

2. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 1 is characterized in that: The coil is a planar coil, and the magnetization direction of the magnetic component is orthogonal to the planar coil; And / or, the magnetic component is a permanent magnet; And / or, the piezoelectric component comprises a piezoelectric film layer, a first electrode layer and a second electrode layer, the first electrode layer and the second electrode layer are respectively located on both sides of the piezoelectric film layer, and the first electrode layer is connected to a wire.

3. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 2 is characterized in that: The shape of the coil is a circular shape, a straight conductor shape, a mesh shape or a concentric circle shape; and / or, the coil is prepared by electroplating, evaporation deposition or sputtering; and / or, the coil is made of aluminum, copper, aluminum-copper alloy or gold; And / or, the magnetic component is a neodymium iron boron permanent magnet, an aluminum nickel cobalt permanent magnet alloy, an iron chromium cobalt permanent magnet alloy, a barium ferrite, a strontium ferrite or a rare earth cobalt permanent magnet; And / or, the material of the piezoelectric film layer is lead zirconate titanate or scandium aluminum nitride.

4. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 1 is characterized in that: The supporting component comprises a beam body, the beam body is elastic, one end of the beam body is connected to the supporting block, and the other end of the beam body is connected to the magnetic component.

5. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 4 is characterized in that: The number of the supporting components is at least 3, and the supporting components are arranged along the circumference of the mass block; And / or, the beam body is a straight beam, an arched beam or a folded beam, and the folded beam has at least one bent section; And / or, the beam body is integrally formed.

6. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 1 is characterized in that: It also includes a shell, which is fixedly connected to the magnetic component and is arranged between the supporting component and the magnetic component.

7. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 6 is characterized in that: The shell has a first cavity in the middle, and the support component and the mass block are located on a side of the shell away from the magnetic component; And / or, the shell is a silicon-based shell, a silicon nitride shell or a III-V semiconductor shell; And / or, the magnetic component and the shell are arranged along a first direction, and a size of the mass block in the first direction is greater than or equal to a size of the supporting component in the first direction and smaller than a size of the shell in the first direction.

8. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 6 is characterized in that: It also includes an insulating layer, which is arranged on the housing, the supporting component and the mass block, and the wire is located on a side of the insulating layer away from the housing, the supporting component and the mass block; The first end of the coil has a first connection portion, the second end of the coil has a second connection portion, the shell is provided with a third connection portion, the fourth connection portion and the fifth connection portion, the piezoelectric component has a sixth connection portion, the insulating layer has a seventh connection portion, an eighth connection portion, a ninth connection portion, a tenth connection portion, an eleventh connection portion and a twelfth connection portion on a side away from the shell, the support component and the mass block, and the seventh connection portion, the eighth connection portion, the ninth connection portion, the tenth connection portion, the eleventh connection portion and the twelfth connection portion correspond to and are connected to the first connection portion, the second connection portion, the third connection portion, the fourth connection portion, the fifth connection portion and the sixth connection portion respectively; The conductive wire includes a first metal layer, a second metal layer and a third metal layer, one end of the first metal layer is connected to the seventh connection part, and the other end is connected to the ninth connection part, one end of the second metal layer is connected to the eighth connection part, and the other end is connected to the tenth connection part, and one end of the third metal layer is connected to the eleventh connection part, and the other end is connected to the twelfth connection part.

9. The piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device according to claim 8, characterized in that: The ninth connecting portion, the tenth connecting portion, the eleventh connecting portion, the third connecting portion, the fourth connecting portion and the fifth connecting portion are all multiple in number; And / or, the first metal layer, the second metal layer and the third metal layer are all prepared by electroplating, evaporation deposition or sputtering process; And / or, the first metal layer, the second metal layer and the third metal layer are made of aluminum, copper, aluminum-copper alloy or gold; And / or, the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device is manufactured using micro-nano processing technology; And / or, it also includes an energy harvesting circuit, and the energy harvesting circuit is connected to the ninth connecting portion, the tenth connecting portion and the eleventh connecting portion.

10. An electronic device, characterized in that: It comprises a device body and a piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device as described in any one of claims 1 to 9, wherein the device body and the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device are connected so that the electric energy collected by the piezoelectric-magnetic composite three-dimensional vibration energy harvesting energy device is transmitted to the device body.

Images