Impedance matcher and radio frequency power supply system
By designing a capacitor module with adjustable compensation inductance and capacitance values in the RF power supply system, combined with switch control, the problem of impedance matching delay between the RF power supply and the variable impedance load is solved, and fast impedance matching is achieved.
Patent Information
- Application Number
- CN202411386173.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-30
- Publication Date
- 2025-01-14
AI Technical Summary
Prior art In impedance matching between a radio frequency power supply and a plasma load or other impedance variable load, the capacitance value adjustment speed is too slow, resulting in a matching delay.
An impedance matching device is designed, which includes a first inductor and a first capacitor module. The capacitor module includes an adjustable compensation inductor value and a capacitor value. The matching value can be quickly adjusted through switch control to achieve fast impedance matching.
By quickly adjusting the matching value of the capacitor module, the impedance matching between the RF power supply and the load can be quickly achieved, reducing the matching delay.
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Figure CN119315958A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of radio frequency technology, and in particular to an impedance matcher and a radio frequency power supply system having the impedance matcher. Background Art
[0002] At present, with the development of RF power supply technology, the impedance matching requirements between RF power supply and load are getting higher and higher. Among them, the current commonly used method is to match the impedance of RF power supply and load by adjusting the capacitance value of adjustable capacitor. However, when the RF power supply provides power to the plasma load or other loads with variable impedance, the impedance matching is achieved only by adjusting the capacitance value of the adjustable capacitor. The adjustment speed of the capacitance value is too slow, and there is a high matching delay. Therefore, how to quickly adjust the capacitance value to quickly achieve impedance matching has become a problem that needs to be considered. Summary of the invention
[0003] The present application provides an impedance matcher and a radio frequency power supply system, which can quickly achieve impedance matching.
[0004] In a first aspect, an impedance matcher is provided, the impedance matcher comprising a first inductor and a first capacitor module. The first inductor and the first capacitor module are both used to connect to the output path of the RF power supply, and the first inductor and the first capacitor module have a first matching value and a second matching value respectively. Wherein, the first capacitor module at least comprises a first capacitor and a first capacitor compensation unit, the first capacitor is connected to the output path of the RF power supply, the first capacitor compensation unit is connected to the first capacitor, the first capacitor compensation unit has an adjustable compensation inductance value, and the second matching value of the first capacitor module is at least the overall matching value of the compensation inductance value of the first capacitor compensation unit and the capacitance value of the first capacitor; the second matching value of the first capacitor module is capacitive and is different at least according to the difference of the compensation inductance value of the first capacitor compensation unit. Wherein, the first matching value of the first inductor and the second matching value of the first capacitor module are used to perform impedance matching between the RF power supply and the load.
[0005] In a possible implementation, the first inductor is connected between the RF power source and the load, one end of the first capacitor is connected to the connection point between the first inductor and the RF power source, and the other end of the first capacitor is grounded. The first capacitance compensation unit includes a compensation inductor and a first switch, and the compensation inductor and the first switch are connected in parallel between the other end of the first capacitor and the ground; the first switch is alternately turned on or off at a first on-duty cycle, so that the first capacitance compensation unit has the compensation inductance value, and the compensation inductance value changes according to the change of the first on-duty cycle.
[0006] In a possible implementation, the first capacitor module further includes a second capacitor compensation unit, the second capacitor compensation unit includes a compensation capacitor and a second switch, the compensation capacitor and the second switch are connected in parallel between the other end of the first capacitor and the compensation inductor; wherein the second switch is alternately turned on or off at a second conduction duty cycle, so that the second capacitor compensation unit has a compensation capacitance value, and the compensation capacitance value changes according to the change of the second conduction duty cycle. The second matching value of the first capacitor module is the overall matching value of the compensation inductance value of the first capacitor compensation unit, the compensation capacitance value of the second capacitor compensation unit, and the capacitance value of the first capacitor, and the second matching value of the first capacitor module is also different according to the difference of the compensation capacitance value of the second capacitor compensation unit.
[0007] In a possible implementation, the switching frequency of the first switch is the same as the switching frequency of the second switch, and the switching frequency of the first switch and the switching frequency of the second switch are both lower than the frequency of the RF signal output by the RF power supply. When the first switch is alternately turned on or off at the first on-duty cycle, the second switch is in an on state or an off state; when the second switch is alternately turned on or off at the second on-duty cycle, the first switch is in an on state or an off state.
[0008] In a possible implementation, the first capacitor is a capacitor with adjustable capacitance value, and the second matching value of the first capacitor module is also different according to the capacitance value of the first capacitor. The impedance matcher also includes an adjustment module and a control module, the adjustment module is used to adjust the capacitance value of the first capacitor, and the control module is at least used to control the conduction or disconnection of the first switch, and control the adjustment module to adjust the capacitance value of the first capacitor.
[0009] In a possible implementation, the control module is also used to determine a target second matching value of the first capacitor module based on the impedance value of the load and the first matching value of the first inductor; the control module is also used to control the first switch based on the relationship between the target second matching value and the current second matching value of the first capacitor module, wherein when the target second matching value is less than the current second matching value of the first capacitor module, the control module controls the first switch to disconnect and controls the adjustment module to increase the capacitance value of the first capacitor; when the target second matching value is greater than the current second matching value of the first capacitor module, the control module controls the first switch to be alternately turned on or off with the first on-duty cycle, and / or controls the adjustment module to reduce the capacitance value of the first capacitor.
[0010] In a possible implementation, the first capacitor module further includes a third switch, the third switch being connected between a connection point between the first inductor and the RF power supply and one end of the first capacitor; wherein the third switch is alternately turned on or off at a third on-duty cycle, so that the second matching value of the first capacitor module changes according to a change in the third on-duty cycle. The control module is also used to control the on or off of the third switch.
[0011] In a possible implementation, the control module is further used to, when the third switch is in the on state, at least control the first switch to be alternately turned on or off with the first on-duty cycle, or at least control the first switch to be continuously in the on state or the off state; when the third switch is in the off state, at least control the first switch to be continuously in the off state.
[0012] In a possible implementation, the first capacitance compensation unit includes a compensation inductor, which is connected between the other end of the first capacitor and ground. The compensation inductor is a length-adjustable inductor, and the compensation inductor value of the first capacitance compensation unit changes according to the change of the length of the compensation inductor.
[0013] In the second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a radio frequency power supply and an impedance matcher. The impedance matcher includes a first inductor and a first capacitor module. The first inductor and the first capacitor module are both used to connect to the output path of the radio frequency power supply, and the first inductor and the first capacitor module have a first matching value and a second matching value respectively. Wherein, the first capacitor module at least includes a first capacitor and a first capacitor compensation unit, the first capacitor is connected to the output path of the radio frequency power supply, the first capacitor compensation unit is connected to the first capacitor, the first capacitor compensation unit has an adjustable compensation inductance value, and the second matching value of the first capacitor module is at least the overall matching value of the compensation inductance value of the first capacitor compensation unit and the capacitance value of the first capacitor; the second matching value of the first capacitor module is capacitive and at least different according to the difference of the compensation inductance value of the first capacitor compensation unit. Wherein, the first matching value of the first inductor and the second matching value of the first capacitor module are used to impedance match the radio frequency power supply and the load.
[0014] The impedance matcher and RF power supply system of the present application, by setting a first capacitor compensation unit connected to the first capacitor and configuring the first capacitor compensation unit to have an adjustable compensation inductance value, can quickly change the second matching value of the first capacitor module including the first capacitor, thereby quickly achieving impedance matching. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.
[0016] Figure 1 FIG. 4 is a circuit diagram of an impedance matcher in an embodiment of the present application.
[0017] Figure 2 FIG. 4 is a circuit diagram of an impedance matcher in another embodiment of the present application.
[0018] Figure 3 FIG. 4 is a circuit diagram of an impedance matcher in another embodiment of the present application.
[0019] Figure 4 FIG. 4 is a circuit diagram of an impedance matcher in yet another embodiment of the present application.
[0020] Figure 5 It is a block diagram of a radio frequency power supply system in one embodiment of the present application.
[0021] Explanation of the accompanying drawings: 1000, RF power supply system, RS, RF power supply, 10, impedance matcher, L1, first inductor, 100, first capacitor module, C1, first capacitor, 110, first capacitor compensation unit, Lr, compensation inductor, S1, first switch, 120, second capacitor compensation unit, Cr, compensation capacitor, S2, second switch, S3, third switch, 200, adjustment module, 300, control module, GND, ground, RL, load. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0023] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0024] In the following, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.
[0025] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.
[0026] See also Figure 1 , Figure 1 FIG. 1 is a circuit diagram of an impedance matcher in an embodiment of the present application. Figure 1 As shown, the present application provides an impedance matcher 10, which includes a first inductor L1 and a first capacitor module 100. The first inductor L1 and the first capacitor module 100 are both used to connect to the output path of the radio frequency power supply RS, and the first inductor L1 and the first capacitor module 100 have a first matching value and a second matching value, respectively. Among them, the first capacitor module 100 includes at least a first capacitor C1 and a first capacitor compensation unit 110, the first capacitor C1 is connected to the output path of the radio frequency power supply RS, the first capacitor compensation unit 110 is connected to the first capacitor C1, the first capacitor compensation unit 110 has an adjustable compensation inductance value, and the second matching value of the first capacitor module 100 is at least the overall matching value of the compensation inductance value of the first capacitor compensation unit 110 and the capacitance value of the first capacitor C1; the second matching value of the first capacitor module 100 is capacitive, and at least different according to the compensation inductance value of the first capacitor compensation unit 110. Among them, the first matching value of the first inductor L1 and the second matching value of the first capacitor module 100 are used to perform impedance matching between the radio frequency power supply RS and the load RL.
[0027] Therefore, the above-mentioned impedance matcher 10 in the present application, by setting a first capacitor compensation unit 110 connected to the first capacitor C1 and configuring the first capacitor compensation unit 110 to have an adjustable compensation inductance value, can quickly change the second matching value of the first capacitor module 100 including the first capacitor C1, thereby quickly achieving impedance matching.
[0028] It should be noted that, generally speaking, it is difficult to perform impedance matching between the RF power supply RS and the load RL by adjusting the first matching value of the first inductor L1. Therefore, when the impedance value of the load RL changes, it is necessary to quickly adjust the second matching value of the first capacitor module 100 to perform impedance matching between the RF power supply RS and the load RL.
[0029] See also Figure 2 , Figure 2 FIG. 1 is a circuit diagram of an impedance matcher in another embodiment of the present application. Figure 2 As shown, the first inductor L1 is connected between the RF power supply RS and the load RL, one end of the first capacitor C1 is connected to the connection point between the first inductor L1 and the RF power supply RS, and the other end of the first capacitor C1 is grounded GND. The first capacitance compensation unit 110 includes a compensation inductor Lr and a first switch S1, and the compensation inductor Lr and the first switch S1 are connected in parallel between the other end of the first capacitor C1 and the ground GND; wherein the first switch S1 is alternately turned on or off at a first on-duty cycle, so that the first capacitance compensation unit 110 has a compensation inductance value, and the compensation inductance value changes according to the change of the first on-duty cycle.
[0030] Therefore, the impedance matcher 10 in the present application can directly provide a compensation inductance value by cooperating with the compensation inductor Lr and the first switch S1, and can provide a required compensation inductance value by adjusting the first on-duty cycle of the first switch S1, so that the second matching value is quickly reduced to the target value.
[0031] The larger the first conduction duty cycle is, the smaller the compensation inductance value is; and the smaller the first conduction duty cycle is, the larger the compensation inductance value is.
[0032] like Figure 2 As shown, the first inductor L1 is connected between the RF power supply RS and the load RL, that is, one end of the first inductor L1 is connected to the RF power supply RS, and the other end of the first inductor L1 is connected to the load RL; one end of the first capacitor C1 is connected to the connection point between the first inductor L1 and the RF power supply RS, that is, one end of the first capacitor C1 is connected to the connection point between one end of the first inductor L1 and the RF power supply RS.
[0033] See also Figure 3 , Figure 3 FIG. 1 is a circuit diagram of an impedance matcher in another embodiment of the present application. Figure 3As shown, the first capacitor module 100 also includes a second capacitor compensation unit 120, the second capacitor compensation unit 120 includes a compensation capacitor Cr and a second switch S2, the compensation capacitor Cr and the second switch S2 are connected in parallel between the other end of the first capacitor C1 and the compensation inductor Lr; wherein the second switch S2 is alternately turned on or off with a second conduction duty cycle, so that the second capacitor compensation unit 120 has a compensation capacitor Cr value, and the compensation capacitor Cr value changes according to the change of the second conduction duty cycle. Wherein, the second matching value of the first capacitor module 100 is the overall matching value of the compensation inductance value of the first capacitor compensation unit 110, the compensation capacitor Cr value of the second capacitor compensation unit 120, and the capacitance value of the first capacitor C1, and the second matching value of the first capacitor module 100 is also different according to the difference in the compensation capacitor Cr value of the second capacitor compensation unit 120.
[0034] Therefore, the impedance matcher 10 in the present application can directly provide the compensation capacitor Cr value by cooperating with the compensation capacitor Cr and the second switch S2, and can provide the required compensation capacitor Cr value by adjusting the second on-duty cycle of the second switch S2, so that the second matching value can be quickly increased to the target value.
[0035] Furthermore, by cooperating with the first capacitance compensation unit 110 and the second capacitance compensation unit 120 , the second matching value can be adjusted higher or lower, and can be more applicable to various situations of impedance matching.
[0036] The larger the second conduction duty cycle is, the smaller the value of the compensation capacitor Cr is; and the smaller the second conduction duty cycle is, the larger the value of the compensation capacitor Cr is.
[0037] like Figure 3 As shown, the compensation capacitor Cr and the second switch S2 are connected in parallel between the other end of the first capacitor C1 and the compensation inductor Lr, that is, the compensation capacitor Cr and the second switch S2 are connected in parallel between the other end of the first capacitor C1 and one end of the compensation inductor Lr.
[0038] In one or more embodiments, the switching frequency of the first switch S1 is the same as the switching frequency of the second switch S2, and the switching frequency of the first switch S1 and the switching frequency of the second switch S2 are both lower than the frequency of the RF signal output by the RF power supply RS. When the first switch S1 is alternately turned on or off at a first on-duty cycle, the second switch S2 is in an on state or an off state; when the second switch S2 is alternately turned on or off at a second on-duty cycle, the first switch S1 is in an on state or an off state.
[0039] Therefore, the impedance matcher 10 in the present application can avoid the first switch S1 and the second switch S2 affecting the transmission of the RF signal to the load RL through the impedance matcher 10 when they are alternately turned on or off by configuring the switching frequency of the first switch S1 and the switching frequency of the second switch S2 to be lower than the frequency of the RF signal output by the RF power supply RS. In addition, for the convenience of control, when one switch is alternately turned on or off, the other switch is continuously in the on state or the off state.
[0040] In one or more embodiments, the switching frequency of the first switch S1 and the switching frequency of the second switch S2 may both be 40%-90% of the frequency of the RF signal output by the RF power supply RS. Further, the switching frequency of the first switch S1 and the switching frequency of the second switch S2 may both be 80% of the frequency of the RF signal output by the RF power supply RS. This can make the variation range of the second matching value smaller.
[0041] like Figure 3 As shown, the first capacitor C1 is a capacitor with adjustable capacitance value, and the second matching value of the first capacitor module 100 is also different according to the capacitance value of the first capacitor C1. The impedance matcher 10 also includes an adjustment module 200 and a control module 300, the adjustment module 200 is used to adjust the capacitance value of the first capacitor C1, and the control module 300 is at least used to control the conduction or disconnection of the first switch S1, and control the adjustment module 200 to adjust the capacitance value of the first capacitor C1.
[0042] Therefore, the impedance matcher 10 in the present application can change the second matching value of the first capacitor module 100 including the first capacitor C1 more quickly, thereby realizing impedance matching more quickly, and adjust the capacitance value of the first capacitor C1 at the same time, so as to further reduce the delay of impedance matching. And the control module 300 is set to control the conduction or disconnection of the first switch S1, so as to accurately control the second matching value.
[0043] In one or more embodiments, the control module 300 is further configured to control the on or off state of the second switch S2 .
[0044] In one or more embodiments, the adjustment module 200 may be a rotary motor.
[0045] In one or more embodiments, the control module 300 is also used to determine the target second matching value of the first capacitor module 100 according to the impedance value of the load RL and the first matching value of the first inductor L1; the control module 300 is also used to control the first switch S1 according to the relationship between the target second matching value and the current second matching value of the first capacitor module 100, wherein, when the target second matching value is less than the current second matching value of the first capacitor module 100, the control module 300 controls the first switch S1 to be disconnected, and controls the adjustment module 200 to increase the capacitance value of the first capacitor C1; when the target second matching value is greater than the current second matching value of the first capacitor module 100, the first switch S1 is controlled to be alternately turned on or off with a first conduction duty cycle, and / or the adjustment module 200 is controlled to reduce the capacitance value of the first capacitor C1.
[0046] Therefore, the impedance matcher 10 in the present application determines the target second matching value by configuring the control module 300 , and thus achieves the target second matching value by controlling the first switch S1 and / or controlling the adjustment module 200 .
[0047] like Figure 3 As shown, the first capacitor module 100 further includes a third switch S3, which is connected between a connection point between the first inductor L1 and the RF power supply RS and one end of the first capacitor C1; wherein the third switch S3 is alternately turned on or off at a third on-duty cycle, so that the second matching value of the first capacitor module 100 changes according to the change of the third on-duty cycle. The control module 300 is also used to control the on or off of the third switch S3.
[0048] Therefore, the impedance matcher 10 in the present application adjusts the second matching value of the first capacitor module 100 as a whole by setting the third switch S3 to be alternately turned on or off with a third conduction duty cycle.
[0049] The larger the third conduction duty cycle is, the larger the second matching value is; and the smaller the third conduction duty cycle is, the smaller the second matching value is.
[0050] In one or more embodiments, the control module 300 is further configured to control at least the first switch S1 to be alternately turned on or off with a first on-duty cycle when the third switch S3 is in the on-state, or to at least control the first switch S1 to be continuously in the on-state or the off-state; and to control at least the first switch S1 to be continuously in the off-state when the third switch S3 is in the off-state.
[0051] Therefore, in order to reduce switching loss, in the impedance matcher 10 of the present application, when the third switch S3 is in the off state, the first switch S1 is also continuously in the off state.
[0052] In one or more embodiments, the control module 300 is further used to control the second switch S2 to be alternately turned on or off with a second on-duty cycle when the third switch S3 is in the on state, or to control the second switch S2 to be continuously in the on state or the off state; when the third switch S3 is in the off state, the control module 300 is further used to control the second switch S2 to be continuously in the off state.
[0053] In one or more embodiments, the control module 300 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).
[0054] See also Figure 4 , Figure 4 FIG. 1 is a circuit diagram of an impedance matcher in another embodiment of the present application. Figure 4 As shown, the first capacitance compensation unit 110 includes a compensation inductor Lr, which is connected between the other end of the first capacitor C1 and the ground GND. The compensation inductor Lr is an inductor with adjustable length. The compensation inductor value of the first capacitance compensation unit 110 changes according to the change of the length of the compensation inductor Lr.
[0055] Therefore, the impedance matcher 10 in the present application can also make the compensation inductance value change according to the change of the length of the compensation inductance Lr when the compensation inductance Lr is an adjustable length inductance.
[0056] In one or more embodiments, the compensation inductor Lr can be a spiral coil-type length-adjustable inductor, the compensation inductor Lr includes multiple turns of coils, the compensation inductance value is related to the length of the compensation inductor Lr, the coil radius and the number of coils, and the length of the compensation inductor Lr is greater than or equal to 0.8 times the coil radius.
[0057] When the length of the compensation inductor Lr increases, the compensation inductance value decreases, so that the second matching value decreases; when the length of the compensation inductor Lr decreases, the compensation inductance value increases, so that the second matching value increases.
[0058] Furthermore, when the length of the compensation inductor Lr is reduced to 0.8 times of the coil radius, the compensation inductance value is maximum.
[0059] Particularly, the overall matching value of the maximum compensation inductance value and the capacitance value of the first capacitor C1 is capacitive, so that the second matching value is capacitive, wherein as the compensation inductance value decreases, the overall matching value of the compensation inductance value and the capacitance value of the first capacitor C1 is always capacitive.
[0060] The impedance matcher 10 of the present application, through the above structure, can adopt multiple adjustment methods to quickly change the second matching value of the first capacitor module 100 including the first capacitor C1, thereby quickly achieving impedance matching and effectively reducing the delay of impedance matching.
[0061] See also Figure 5 , Figure 5 FIG. 1 is a block diagram of a radio frequency power supply system in an embodiment of the present application. Figure 5 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RS and the impedance matcher 10 in any of the aforementioned embodiments.
[0062] Please refer again Figure 1 .like Figure 1 As shown, the impedance matcher 10 includes a first inductor L1 and a first capacitor module 100. The first inductor L1 and the first capacitor module 100 are both used to connect to the output path of the radio frequency power supply RS, and the first inductor L1 and the first capacitor module 100 have a first matching value and a second matching value respectively. Among them, the first capacitor module 100 at least includes a first capacitor C1 and a first capacitor compensation unit 110, the first capacitor C1 is connected to the output path of the radio frequency power supply RS, the first capacitor compensation unit 110 is connected to the first capacitor C1, the first capacitor compensation unit 110 has an adjustable compensation inductance value, and the second matching value of the first capacitor module 100 is at least the overall matching value of the compensation inductance value of the first capacitor compensation unit 110 and the capacitance value of the first capacitor C1; the second matching value of the first capacitor module 100 is capacitive, and at least different according to the different compensation inductance values of the first capacitor compensation unit 110. Among them, the first matching value of the first inductor L1 and the second matching value of the first capacitor module 100 are used to perform impedance matching between the radio frequency power supply RS and the load RL.
[0063] The more specific structure of the impedance matcher 10 can refer to the relevant content of the impedance matcher 10 in any of the aforementioned embodiments, which will not be repeated here.
[0064] In one or more embodiments, the RF power source RS is used to output a RF signal to the load RL through the impedance matcher 10 , and the impedance matcher 10 is used to perform impedance matching between the RF power source RS and the load RL.
[0065] The impedance matcher 10 and the electronic device of the present application, through the above structure, can adopt multiple adjustment methods to quickly change the second matching value of the first capacitor module 100 including the first capacitor C1, thereby quickly achieving impedance matching and effectively reducing the delay of impedance matching.
[0066] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. An impedance matching device, characterized in that: include: A first inductor and a first capacitor module; the first inductor and the first capacitor module are both used to connect to the output path of the radio frequency power supply, and the first inductor and the first capacitor module have a first matching value and a second matching value respectively; The first capacitor module at least includes a first capacitor and a first capacitor compensation unit, the first capacitor is connected to the output path of the RF power supply, the first capacitor compensation unit is connected to the first capacitor, the first capacitor compensation unit has an adjustable compensation inductance value, and the second matching value of the first capacitor module is at least the overall matching value of the compensation inductance value of the first capacitor compensation unit and the capacitance value of the first capacitor; the second matching value of the first capacitor module is capacitive and is different at least according to the difference of the compensation inductance value of the first capacitor compensation unit; The first matching value of the first inductor and the second matching value of the first capacitor module are used to perform impedance matching between the RF power supply and the load.
2. The impedance matching box according to claim 1, characterized in that: The first inductor is connected between the RF power source and the load, one end of the first capacitor is connected to a connection point between the first inductor and the RF power source, and the other end of the first capacitor is grounded; Wherein, the first capacitance compensation unit includes a compensation inductor and a first switch, and the compensation inductor and the first switch are connected in parallel between the other end of the first capacitor and the ground; wherein, the first switch is alternately turned on or off with a first on-duty cycle, so that the first capacitance compensation unit has the compensation inductance value, and the compensation inductance value changes according to the change of the first on-duty cycle.
3. The impedance matching box according to claim 2, characterized in that: The first capacitor module further includes a second capacitor compensation unit, the second capacitor compensation unit includes a compensation capacitor and a second switch, the compensation capacitor and the second switch are connected in parallel between the other end of the first capacitor and the compensation inductor; wherein the second switch is alternately turned on or off at a second on-duty cycle, so that the second capacitor compensation unit has a compensation capacitance value, and the compensation capacitance value changes according to the change of the second on-duty cycle; The second matching value of the first capacitor module is an overall matching value of the compensation inductance value of the first capacitor compensation unit, the compensation capacitance value of the second capacitor compensation unit and the capacitance value of the first capacitor, and the second matching value of the first capacitor module also varies according to the compensation capacitance value of the second capacitor compensation unit.
4. The impedance matching box according to claim 3, characterized in that: The switching frequency of the first switch is the same as the switching frequency of the second switch, and the switching frequency of the first switch and the switching frequency of the second switch are both lower than the frequency of the radio frequency signal output by the radio frequency power supply; When the first switch is alternately turned on or off with the first on-duty cycle, the second switch is in an on state or an off state; when the second switch is alternately turned on or off with the second on-duty cycle, the first switch is in an on state or an off state.
5. The impedance matching box according to claim 2, characterized in that: The first capacitor is a capacitor with adjustable capacitance value, and the second matching value of the first capacitor module is different according to the capacitance value of the first capacitor; The impedance matcher further includes an adjustment module and a control module, wherein the adjustment module is used to adjust the capacitance value of the first capacitor, and the control module is at least used to control the on or off of the first switch and control the adjustment module to adjust the capacitance value of the first capacitor.
6. The impedance matching box according to claim 5, characterized in that: The control module is also used to determine a target second matching value of the first capacitor module according to the impedance value of the load and the first matching value of the first inductor; the control module is also used to control the first switch according to the relationship between the target second matching value and the current second matching value of the first capacitor module, wherein, when the target second matching value is less than the current second matching value of the first capacitor module, the control module controls the first switch to be disconnected, and controls the adjustment module to increase the capacitance value of the first capacitor; when the target second matching value is greater than the current second matching value of the first capacitor module, the control module controls the first switch to be alternately turned on or off with the first on-duty cycle, and / or controls the adjustment module to decrease the capacitance value of the first capacitor.
7. The impedance matching box according to claim 5, characterized in that: The first capacitor module further includes a third switch, which is connected between a connection point between the first inductor and the RF power supply and one end of the first capacitor; wherein the third switch is alternately turned on or off at a third on-duty cycle, so that the second matching value of the first capacitor module changes according to a change in the third on-duty cycle; The control module is further used to control the on or off of the third switch.
8. The impedance matching box according to claim 7, characterized in that: The control module is further configured to control at least the first switch to be alternately turned on or off with the first on-duty ratio when the third switch is in the on-state, or at least control the first switch to be continuously in the on-state or the off-state; When the third switch is in the off state, at least the first switch is controlled to remain in the off state.
9. The impedance matching box according to claim 2, characterized in that: The first capacitance compensation unit includes a compensation inductor, which is connected between the other end of the first capacitor and the ground. The compensation inductor is an inductor with adjustable length. The compensation inductor value of the first capacitance compensation unit changes according to the change of the length of the compensation inductor.
10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and an impedance matcher as claimed in any one of claims 1 to 9.