Air conditioning system

Abstract

The invention discloses an air conditioning system which comprises an air return opening, a fresh air opening and an air supply opening. The temperature adjusting branch can adjust the temperature of an air body guided in from an air inlet of the temperature adjusting branch and exhaust the air body from an air outlet of the temperature adjusting branch, and the air outlet of the temperature adjusting branch is in butt joint with the air supply outlet; an air inlet of the humidity adjusting branch is used for guiding in an air body from the temperature adjusting branch, and after the guided-in air body is subjected to humidity adjustment, the humidity adjusting branch can be guided out from an air outlet; the air inlet of the temperature adjusting branch can obtain air from the air return opening, the fresh air opening and the air outlet of the humidity adjusting branch. According to the air conditioning system, the humidity adjusting branch is independently arranged, the air body temperature is prevented from being influenced in the humidity adjusting process, then interference between temperature adjusting and humidity adjusting is effectively avoided, and therefore the air conditioning system can effectively solve the problem that the temperature adjusting and humidity adjusting effects are poor due to mutual interference between the temperature adjusting process and the humidity adjusting process of the air conditioning system.

Description

Technical Field

[0001] The present invention relates to the technical field of air conditioning, and more particularly to an air conditioning system. Background Art

[0002] High-precision constant temperature and humidity clean rooms are often used in industrial fields such as microelectronics and precision instruments. Strictly controlling the temperature and humidity accuracy, cleanliness, noise, pressure and other parameters of the manufacturing environment in the clean room is an important guarantee for improving the product qualification rate.

[0003] In a general clean room air conditioning system, the clean room return air is first mixed with the fresh air, dehumidified and cooled by the cooling coil, and then heated and humidified by the heater (e.g. heat exchange coil, electric heating, etc.) and humidifier (e.g. wet film humidifier, electric steam humidifier, etc.), and then sent into the room after reaching the ideal air supply state point. However, humidity control and temperature control will affect each other, making it difficult to achieve precise temperature control and / or humidity control.

[0004] In the process of realizing the invention, the inventors found that there are at least the following problems in the prior art: the temperature control process and the humidity control process of the air-conditioning system interfere with each other, resulting in poor temperature and humidity control effects. Summary of the invention

[0005] In view of this, an object of the present invention is to provide an air conditioning system, which can effectively solve the problem that the temperature and humidity control processes of the air conditioning system interfere with each other, resulting in poor temperature and humidity control effects.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] An air conditioning system, comprising:

[0008] Return air vent, fresh air vent, supply air vent;

[0009] A temperature regulating branch, capable of regulating the temperature of the air introduced into the air inlet of the temperature regulating branch and discharging the air from the air outlet of the temperature regulating branch, the air outlet of the temperature regulating branch being connected to the air supply port;

[0010] The humidity controlling branch has an air inlet for introducing air from the temperature controlling branch, and can adjust the humidity of the introduced air before exporting it from the air outlet of the humidity controlling branch; the air inlet of the temperature controlling branch can obtain air from the return air outlet, the fresh air outlet and the air outlet of the humidity controlling branch.

[0011] When the above-mentioned air conditioning system is applied, the heating of the temperature control branch and the humidity control of the humidity control branch are controlled accordingly according to the temperature and humidity requirements of the target chamber, and the air outlet of the humidity control branch supplies air to the temperature control branch to adjust the humidity of the air supply branch so that the temperature and humidity of the air supply outlet meet the requirements. In the above-mentioned air conditioning system, the temperature control branch is connected between the air supply outlet and the return air outlet to control the temperature, and then a humidity control branch is separately provided to obtain the air body from the temperature control branch, and return it to the air inlet of the temperature control branch after humidity control to achieve humidity control, thereby achieving the final temperature and humidity control. By separately providing a humidity control branch, the influence of the air body temperature during the humidity control process is avoided, thereby effectively avoiding interference between temperature and humidity control. In summary, the air conditioning system can effectively solve the problem that the temperature control process and the humidity control process of the air conditioning system interfere with each other, resulting in poor temperature and humidity control effects.

[0012] In some technical schemes, the temperature control branch includes a first heat exchange device and a first electric heater; the first heat exchange device includes a first heat exchange channel and a second heat exchange channel that can exchange heat with each other, and the outlet of the first heat exchange channel is connected to the first electric heater; the second heat exchange channel is used to connect to an external fluid.

[0013] In some technical solutions, the air inlet of the humidity regulating branch is connected between the first heat exchange device and the first electric heater.

[0014] In some technical solutions, a fan for air flow is further included, the fan is connected between the first heat exchange device and the first electric heater, and the air inlet of the humidity control branch is connected between the fan and the first electric heater.

[0015] In some technical schemes, the humidity control branch includes a second heat exchange device as a dehumidification function device and a humidifier as a humidification function device; the second heat exchange device includes a third heat exchange channel and a fourth heat exchange channel that can exchange heat with each other, and the third heat exchange channel is connected to the humidifier; the fourth heat exchange channel, the compressor, the condenser and the throttling device are connected in series in sequence to form a mechanical compression refrigeration system.

[0016] In some technical schemes, a controller is also included, the inlet end of the second heat exchange channel is connected to a second electric heater, and a first temperature sensor is arranged between the second electric heater and the inlet of the second heat exchange channel; the controller can control the start and stop and / or opening degree of the second electric heater, and / or control the flow rate of the second heat exchange channel according to the difference between the detection value of the first temperature sensor and the first target temperature value; and a second temperature sensor is also included for monitoring the temperature of the outlet air body of the first heat exchange channel, and the controller can set the first target temperature value according to the difference between the second temperature sensor and the second target temperature value.

[0017] In some technical schemes, the temperature control branch also includes a third electric heater, which is connected between the first electric heater and the air supply outlet, and a third temperature sensor is arranged between the third electric heater and the first electric heater; it also includes a fourth temperature sensor for detecting the temperature near the air supply outlet; the controller controls the opening and / or start and stop of the first electric heater and the third electric heater according to the third temperature sensor and the fourth temperature sensor; the detection accuracy of the third temperature sensor is higher than the detection accuracy of the second temperature sensor.

[0018] In some technical solutions, it also includes a humidity sensor for detecting the humidity of the air body near the air outlet, and the controller can adjust the humidity control power of the humidity control module of the humidity control branch according to the humidity sensor; the humidity control module includes a dehumidification function device and a humidification function device.

[0019] In some technical schemes, a fifth temperature sensor is further included for detecting the outlet temperature of the humidity control branch. A fourth electric heater is arranged between the outlet of the humidity control branch and the humidity control module. The controller can control the fourth electric heater according to the detection value of the fifth temperature sensor.

[0020] In some technical solutions, the fresh air inlet is provided with a filter. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A connection diagram of an air conditioning system provided by an embodiment of the present invention;

[0023] Figure 2 A control schematic diagram of a mechanical compression refrigeration system provided by an embodiment of the present invention;

[0024] Figure 3 An air processing process diagram of an air conditioning system provided for an embodiment of the present invention for performing ultra-high precision temperature and humidity adjustment under the conditions of an embodiment (the fresh air state is 21°C, 40%RH, and the supply air set point state is 25°C, 55%RH).

[0025] The following are marked in the accompanying drawings:

[0026] 10——air conditioning system, 11——return air outlet, 12——fresh air outlet, 13——air supply outlet, 14——temperature control branch, 15——humidity control branch;

[0027] 101 - filter, 102 - first heat exchange device, 103 - fan, 104 - first electric heater, 105 - third electric heater, 106 - second heat exchange device, 107 - humidifier, 108 - fourth electric heater, 109 - fourth temperature sensor, 110 - humidity sensor, 111 - third temperature sensor, 112 - electric water valve, 113 - fifth temperature sensor, 114 - second electric heater, 115 - first temperature sensor, 116 - second temperature sensor, 20 - mechanical compression refrigeration system, 201 - compressor, 202 - condenser, 203 - throttling device, 30 - controller.

[0028] The dotted line represents the control signal line. DETAILED DESCRIPTION

[0029] The embodiment of the invention discloses an air conditioning system to effectively solve the problem that the temperature and humidity control effect of the air conditioning system is poor.

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] See also Figure 1-Figure 3 , Figure 1 A connection diagram of an air conditioning system provided by an embodiment of the present invention; Figure 2 A control schematic diagram of a mechanical compression refrigeration system provided by an embodiment of the present invention; Figure 3 An air processing process diagram of an air conditioning system provided for an embodiment of the present invention for performing ultra-high precision temperature and humidity adjustment under the conditions of an embodiment (the fresh air state is 21°C, 40%RH, and the supply air set point state is 25°C, 55%RH).

[0032] In some embodiments, an air conditioning system 10 is provided, which may also be called a constant temperature and humidity air conditioning system 10 when capable of achieving constant temperature and humidity control. Furthermore, it may be a high-precision constant temperature and humidity air conditioning system 10 for a small clean room.

[0033] In some embodiments, an air conditioning system 10 is provided, which mainly includes a return air inlet 11, a fresh air inlet 12, an air supply inlet 13, a temperature control branch 14 and a humidity control branch 15, for controlling the temperature and humidity of a target chamber, wherein the target chamber is generally a clean room.

[0034] The return air port 11 is used to connect to the target chamber to obtain gas from the target chamber; and the air supply port 13 is used to supply gas to the target chamber. For the target chamber with constant temperature and humidity requirements, the temperature and humidity of the return air port 11 and the air supply port 13 must be equal or nearly equal to meet the constant temperature and humidity requirements. In order to facilitate the flow of air in the target chamber, generally speaking, the return air port 11 and the air supply port 13 can be arranged at two ends of the target chamber that are far away from each other.

[0035] The fresh air outlet 12 is used to obtain wind from the external environment of the target chamber as fresh air. The external environment of the target chamber generally refers to the atmospheric environment. Considering that the atmospheric environment is prone to contain impurities, a filter 101 can be provided at the fresh air outlet 12, specifically, a high-efficiency filter. The return air outlet 11, the fresh air outlet 12, and the air supply outlet 13 are all for the convenience of limiting the subsequent connection relationship, and do not necessarily exist as ports.

[0036] The temperature regulating branch 14 can regulate the temperature of the air introduced into the air inlet of the temperature regulating branch 14 and discharge it from the air outlet of the temperature regulating branch 14. The air outlet of the temperature regulating branch 14 is connected to the air supply port 13 to supply the temperature-controlled air to the air supply port 13. How the temperature regulating branch 14 is heated to achieve temperature control can be set as needed. The specific temperature control can be controlled accordingly according to the target chamber temperature. Generally speaking, the heating module of the temperature regulating branch 14 can be an external heat exchange module, an electric heating module, or a combination of the two.

[0037] The humidity control branch 15 has an air inlet for introducing air from the temperature control branch 14, and can adjust the humidity of the introduced air and then guide it out from the air outlet; the air inlet of the temperature control branch 14 can obtain air from the return air inlet 11, the fresh air inlet 12 and the air outlet of the humidity control branch 15. Other structures can be set between the air inlet of the temperature control branch 14, the return air inlet 11, the fresh air inlet 12 and the air outlet of the humidity control branch 15 to indirectly obtain air, or they can be directly connected through a channel to directly obtain air, such as the air inlet of the temperature control branch 14, the return air inlet 11, the fresh air inlet 12 and the air outlet of the humidity control branch 15 are connected through a four-way structure, or through a four-way valve, so that the air from the return air inlet 11, the fresh air inlet 12 and the air outlet of the humidity control branch 15 are mixed and supplied to the temperature control branch 14.

[0038] The air inlet of the humidity control branch 15 is used to introduce air from the temperature control branch 14 , and can be located upstream or downstream of the heating module of the temperature control branch 14 , or can be introduced from between the heating modules when multiple heating modules are provided.

[0039] The humidity control branch 15 has a humidity control module, such as a dehumidification module and a humidification module, wherein the dehumidification module does not require complete dehumidification, such as reducing humidity. Humidity control refers to changing the humidity of the air body, and the humidity control branch 15 adjusts the humidity through the humidity control module to meet the expected humidity requirements. Specifically, the humidity can be adjusted according to the humidity of the air outlet 13, or according to the difference between the humidity of the air outlet 13 and the humidity in the target chamber.

[0040] In some embodiments, when the above-mentioned air conditioning system 10 is applied, the heating of the temperature control branch 14 and the humidity control of the humidity control branch 15 are controlled accordingly according to the temperature and humidity requirements of the target chamber, and the air outlet of the humidity control branch 15 supplies air to the temperature control branch 14 to adjust the humidity of the air supply branch, so that the temperature and humidity of the air supply outlet 13 meet the requirements. In the above-mentioned air conditioning system 10, the temperature control branch 14 is connected between the air supply outlet 13 and the return air outlet 11 to control the temperature, and then a humidity control branch 15 is separately provided to obtain the air body from the temperature control branch 14, and return to the air inlet of the temperature control branch 14 after humidity control to achieve humidity control, thereby achieving the final temperature and humidity control. By separately providing the humidity control branch 15, it is avoided that the temperature of the air body is affected during the humidity control process, thereby effectively avoiding interference between temperature and humidity control. In summary, the air conditioning system 10 can effectively solve the problem that the temperature control process and the humidity control process of the air conditioning system 10 interfere with each other, resulting in poor temperature and humidity control effects.

[0041] In some embodiments, the temperature regulating branch 14 may include a first heat exchange device 102 and a first electric heater 104; the first heat exchange device 102 includes a first heat exchange channel and a second heat exchange channel that can exchange heat with each other, and the outlet of the first heat exchange channel is connected to the first electric heater; the second heat exchange channel is used to connect the external fluid. So that the external fluid can enter the first heat exchange device 102 through the second heat exchange channel, and first heat the wind body. The heat exchange here is mainly used to initially reduce the deviation between the wind body and the target chamber temperature value. Then enter the first electric heater 104 through the first heat exchange channel, and the first electric heater 104 further accurately controls the temperature to further reduce the deviation between the wind body and the target chamber temperature value. The first heat exchange device 102 and the second heat exchange device 106 described later can adopt a plate heat exchanger, a tube heat exchanger or a coil heat exchanger. The first heat exchange device 102 and the second heat exchange device 106 adopt the same heat exchange structure or different heat exchange structures.

[0042] In some embodiments, the air inlet of the humidity control branch 15 can be connected between the first heat exchange device 102 and the first electric heater, so that the air body is supplied to the humidity control branch 15 after the air body passes through the first heat exchange channel of the first heat exchange device 102 for preliminary temperature adjustment, which can avoid excessive temperature fluctuations at the air inlet of the humidity control branch 15, so as to facilitate the humidity control of the humidity control branch 15. The air inlet of the humidity control branch 15 is connected to the upstream end of the first electric heater 104, which reduces the heating power of the first electric heater 104 and the difficulty of temperature adjustment compared to the connection at the downstream end. At the same time, the humidity control branch 15 does not require high accuracy for the inlet air temperature, so the fluid after preliminary temperature adjustment by the first heat exchange device 102 can meet the use requirements. It should be noted that in order to better describe the relationship, the "upstream end" and "downstream end" will be introduced in the context. Specifically, the corresponding structure is along the flow direction of the fluid (liquid, wind body, etc.), the outlet end corresponds to the downstream end, and the inlet end corresponds to the upstream end.

[0043] In some embodiments, a fan 103 for driving the flow of air may be further included, and the fan 103 may be connected to the temperature control branch 14, and the air inlet of the humidity control branch 15 may be connected to the downstream end of the fan 103, so that when the fan 103 is working, it can simultaneously generate suction force on the return air inlet 11, the fresh air inlet 12 and the air outlet of the humidity control branch 15. In this case, the fan 103 may be arranged at the upstream end or the downstream end of the first heat exchange channel.

[0044] In some embodiments, the fan 103 can be connected between the first heat exchange device 102 and the first electric heater to better ensure the stability of the wind pressure at the air outlet 13. Furthermore, the air inlet of the humidity control branch 15 can be connected between the fan 103 and the first electric heater.

[0045] In some embodiments, the humidity control branch 15 can include a second heat exchange device 106 as a dehumidification device and a humidifier 107 as a humidification device. In this case, the second heat exchange device 106 is equivalent to a dehumidification module, and the humidifier 107 is equivalent to a humidification module, wherein the humidifier 107 generally adopts an electric humidifier 107.

[0046] The second heat exchange device 106 includes a third heat exchange channel and a fourth heat exchange channel that can exchange heat with each other, wherein the third heat exchange channel is connected to the humidifier 107. Figure 1 As shown, the humidifier 107 is arranged at the downstream end of the third heat exchange channel, dehumidifying first and then humidifying, which can more accurately adjust the humidity; of course, the humidifier 107 can also be arranged at the upstream end of the third heat exchange channel, which can reduce the power of the mechanical compression refrigeration system 20.

[0047] The fourth heat exchange channel, the compressor 201, the condenser 202 and the throttling device 203 are connected in series to form a mechanical compression refrigeration system 20. At this time, the fourth heat exchange channel is equivalent to an evaporator, which absorbs heat from the third heat exchange channel to promote the condensation and liquefaction of water vapor in the third heat exchange channel, thereby achieving a dehumidification effect. The specific configuration of the mechanical compression refrigeration system 20 can also refer to the current compression refrigeration air conditioner.

[0048] In some embodiments, a controller 30 is also included. The temperature and / or humidity of some location points obtained by the controller 30 are used to correspondingly control the dehumidification module, the humidification module of the humidity control branch 15 and the temperature control module of the temperature control branch 14. It can be a comprehensive control or only control some of the structures.

[0049] In some embodiments, the inlet of the second heat exchange channel can be connected to a heating device to achieve heating and temperature control. Of course, the inlet of the second heat exchange channel can be connected to a second electric heater 114 as the above-mentioned heating device. By heating, the temperature of the fluid in the second heat exchange channel can be better controlled, so as to more accurately control the temperature of the air at the outlet of the first heat exchange channel.

[0050] In some embodiments, a first temperature sensor 115 may be provided between the second electric heater 114 and the inlet of the second heat exchange channel, so as to control the start and stop and / or power of the second electric heater 114 through the first temperature sensor 115 to achieve online temperature control.

[0051] For example, the controller 30 can control the fluid temperature and / or flow rate in the second heat exchange channel according to the difference between the detection value of the first temperature sensor 115 and the first target temperature value. Accordingly, an electric water valve 112 can be connected in series on the second heat exchange channel.

[0052] Specifically, the controller 30 can control the start and stop and / or opening degree of the second electric heater 114 according to the difference between the detection value of the first temperature sensor 115 and the first target temperature value, where the opening degree refers to the size of the heating power, and / or control the flow rate of the second heat exchange channel (by controlling the electric water valve 112).

[0053] The first target temperature value can be set manually or according to the temperature of a certain node. Specifically, a second temperature sensor 116 can be provided to monitor the temperature of the air body at the outlet of the first heat exchange channel, and the controller 30 can set the first target temperature value according to the difference between the second temperature sensor 116 and the second target temperature value. The second target temperature value can be a set value or a temperature value of the air outlet 13.

[0054] In some embodiments, the temperature control branch 14 preferably also includes a third electric heater 105, and the third electric heater 105 is connected between the first electric heater 104 and the air supply port 13 to perform further precise temperature control. The minimum adjustment difference of the heating power of the third electric heater 105 can be further made smaller than the minimum adjustment difference of the heating power of the first electric heater 104, that is, the former has higher accuracy.

[0055] In some embodiments, a third temperature sensor 111 may be provided between the third electric heater 105 and the first electric heater 104 . The detection accuracy of the third temperature sensor 111 is higher than that of the second temperature sensor 116 , so as to facilitate more accurate temperature control.

[0056] In some embodiments, a fourth temperature sensor 109 for detecting the temperature near the air outlet 13 may be further provided. The fourth temperature sensor 109 may be provided at the air outlet 13 or at a position near the air outlet 13 of the target chamber, so as to reflect the temperature of the air outlet 13. Of course, considering the uniformity of the overall temperature of the target chamber, the fourth temperature sensor 109 may be provided at any position of the target chamber. The controller 30 may control the opening and / or start / stop of the first electric heater 104 and / or the third electric heater 105 according to the detection values ​​of the third temperature sensor 111 and the fourth temperature sensor 109; the detection accuracy of the third temperature sensor 111 and the fourth temperature sensor 109 is higher than the detection accuracy of the second temperature sensor 116. In actual use, the heating power (opening) of the first electric heater 104 may be controlled according to the detection value of the third temperature sensor 111 to reduce the deviation; the heating power of the third electric heater 105 may be controlled according to the detection values ​​of the third temperature sensor 111 and the fourth temperature sensor 109 to further reduce the deviation, thereby achieving the effect of high-precision temperature control.

[0057] In some embodiments, a humidity sensor 110 for detecting the humidity of the air body near the air outlet 13 may also be included, such as directly detecting the humidity of the air body at the air outlet 13, or indirectly detecting the humidity of the air body at the air outlet 13. Of course, considering the uniformity of the overall humidity of the target chamber, the humidity sensor 110 can be set at any position of the target chamber. The controller 30 can adjust the humidity control power of the humidity control module of the humidity control branch 15 according to the humidity sensor 110, such as adjusting the dehumidification power and / or humidification power of the dehumidification module. Whether to choose humidification or dehumidification also needs to be determined according to the relative humidity of the fresh air relative to the humidity of the target chamber and the direction of deviation: if the former has a high humidity, a dehumidification device is generally equipped; if the former has a low humidity, a humidification device is generally equipped; if the former is uncertain, a dehumidification device and a humidification device are generally equipped at the same time. In specific applications, the humidity control module may include a dehumidification function device and / or a humidification function device, wherein the dehumidification function device is such as the above-mentioned second heat exchange device 106, and the humidification function device is such as the above-mentioned electric heating dehumidification device.

[0058] In some embodiments, considering that the humidity control branch 15 needs to be cooled and dehumidified, the temperature of the wind body will be significantly reduced, resulting in a large range of fluctuations in the temperature of the wind body, which is not conducive to the temperature control of the temperature control branch 14. Based on this, a fourth electric heater 108 can be provided on the humidity control branch 15, and the fourth electric heater 108 is arranged between the air outlet of the humidity control branch 15 and the humidity control module. For example, on the humidity control branch 15, a second heat exchange device 106, a humidifier 107 and a fourth electric heater 108 are arranged in sequence along the flow direction of the wind body. Further, a fifth temperature sensor 113 for detecting the outlet temperature of the humidity control branch 15 is also included. At this time, the controller 30 can control the fourth electric heater 108 according to the detection value of the fifth temperature sensor 113 (113). So that the outlet temperature of the humidity control branch 15 is close to the temperature of the return air outlet 11, so as to reduce the interference with the temperature control branch 14.

[0059] In some embodiments, Figure 1 As shown, a schematic diagram of the structure of a high-precision constant temperature and humidity air-conditioning system (hereinafter referred to as "air-conditioning system 10") 10 is provided. The high-precision constant temperature and humidity air-conditioning system is used as above to control the temperature of a target chamber, wherein the target chamber is a clean room. In some embodiments, in the following description, temperature refers to dry-bulb temperature, and humidity refers to relative humidity. High-precision constant temperature and humidity means that the deviation of the temperature in the clean room from the target value T is within ±0.05°C (degrees Celsius), and the deviation of the humidity from the target value D is within 3%RH (RH is the unit of relative humidity, which indicates the ratio of the absolute humidity in the air to the saturated absolute humidity at the same temperature and pressure); for example: T±0.02°C, D±2%RH.

[0060] The air in the target chamber is mixed with the air passing through the fresh air branch and the humidity control branch through the connected return air port 11. The mixed air enters the first heat exchange channel of the first heat exchange device 102 for isohypsum cooling, and then is powered by the fan 103 (when performing calculations, it can be assumed that the electrical power of the main fan 103 is fully converted into mechanical energy, and no heat is transferred to the cold air). At the outlet of the fan 103, the air is divided into two parts. Most of the air is heated by the first electric heater 104, the third electric heater 105, and then is sent into the target chamber. The air completes ultra-high precision temperature regulation in stages in this branch.

[0061] The controller 30 monitors the detection value of the first temperature sensor 115 (the accuracy can be within ±0.04°C), adjusts the opening of the second electric heater 114 to maintain the cooling water temperature entering the second heat exchange channel of the first heat exchange device 102 within the high-precision fluctuation range of the set value, and adjusts the high-precision electric water valve 112 (the accuracy can be within 1%) to achieve high-precision regulation of the cooling water volume of the second heat exchange channel. The mixed air exchanges heat with the high-precision cooling water through the first heat exchange channel, and the temperature is fine-tuned with high precision while cooling down, so that the temperature of the air after passing through the first heat exchange device 102, that is, the detection value of the second temperature sensor 116 (the accuracy can be within ±0.04°C) and the temperature difference of the target temperature are within ±0.1°C; the air volume in the clean room is a fixed value, and the heat generated by the fan 103 is constant when the air volume is stable. The air is heated after passing through the fan 103, but it does not affect the temperature fluctuation accuracy.

[0062] The controller 30 adjusts the opening of the first electric heater 104 and the third electric heater 105 according to the detection values ​​of the third temperature sensor 111 (the accuracy can be within ±0.01°C) and the fourth temperature sensor 109 (the accuracy can be within ±0.01°C and can be placed in the target chamber) so that the temperature difference between the air passing through and the target temperature is within the range of ±0.07°C and ±0.05°C respectively, thereby completing the ultra-high precision adjustment of the supply air temperature.

[0063] Another small part of the air passes through the outlet of the fan 103 and passes through the third heat exchange channel of the second heat exchange device 106, the humidifier 107, and the fourth electric heater 108 in turn, and then mixes with the air of the other two branches to enter the above cycle. The controller 30 adjusts the opening of the throttling device 203 and the frequency of the compressor 201 in the mechanical compression refrigeration system 20 according to the detection value of the high-precision humidity sensor 110 placed in the target chamber, thereby controlling the evaporation temperature of the refrigerant in the fourth heat exchange channel of the second heat exchange device 106 to change the dehumidification amount, and adjusting the electric heating opening of the humidifier 107 to change the humidification amount; by changing the humidification amount and dehumidification amount, ultra-high precision regulation of humidity is achieved. It is worth noting that the controller 30 sets the opening of the throttling device 203, the frequency of the compressor 201 and the opening of the humidifier 107 within a certain adjustment range, so that the throttling device 203, the compressor 201 and the humidifier 107 can avoid the start and stop stages and maintain a high adjustment accuracy. The controller 30 adjusts the opening of the fourth electric heater 108 according to the detection value of the fifth temperature sensor 113, so that the air supply temperature of the humidity control branch is consistent with the target temperature, avoiding interference with the temperature control branch.

[0064] The fresh air branch utilizes the negative pressure difference between the inlet pressure of the fan 103 and the external pressure to allow the fresh air to pass through the filter 101 and enter the inlet of the device.

[0065] Figure 2 The figure shows a schematic diagram of the structure of the mechanical compression refrigeration system 20 that realizes the cooling and dehumidification function of the second heat exchange device 106. The mechanical compression refrigeration system 20 includes the fourth heat exchange channel of the second heat exchange device 106 as a refrigerant evaporator, a compressor 201, a condenser 202, and a throttling device 203. The refrigerant completes the refrigeration cycle in the above four major components, so that the surface temperature of the second heat exchange device 106 is lower than the dew point temperature of the wet air at the outlet of the fan 103. At this time, the water vapor in the air condenses and precipitates, and the moisture content of the air is reduced.

[0066] The air conditioning system 10 performs an air processing process of ultra-high precision temperature and humidity adjustment under the conditions of an embodiment (the fresh air state is 21°C, 40%RH, and the supply air set point state is 25°C, 55%RH), such as Figure 3 shown. Figure 3 Points A to H in the Figure 1The air state at points A to H in the figure. Since there is no long-term stay of personnel in the clean room R, the fresh air is mainly used to maintain the indoor slightly positive pressure requirement. The required fresh air volume for the clean room can be calculated based on the ventilation times method, that is, the air volume at point E (21°C, 40%RH) is 250CMH (m³ / h, cubic meters / hour); when the air temperature and humidity in the clean room reach the target range, since there is almost no wet load in the clean room, the main reason affecting the humidity in the clean room comes from the humidity of the fresh air. According to the fresh air and indoor temperature and humidity conditions, the humidity control branch air volume is calculated, that is, the air volume at point F is 300CMH; based on According to the unidirectional air velocity requirement in the clean room, the required air volume is calculated, that is, the air volume at point A (25°C, 55%RH) is 18000CMH; the air state point C after the three-way air D, E, and F are mixed isohumidified and cooled to point B through the first heat exchange device 102, and isohumidified and heated to point A' through the fan 103, and then continues to be isohumidified and heated to point A in the air supply state through the first electric heater 104 and the third electric heater 105; the air supply absorbs the sensible heat load in the clean room and reaches point D. In this process, the sensible heat load is very small and the humidity load can be ignored. Figure 3 Points A and D can be approximated to the same point; in the process from point C to point A, only the temperature of the air is controlled, and the air humidity remains unchanged, so points A, C, and D are on the same isohumidity line; compared with the return air volume in the clean room, the air volume of the fresh air and humidity control branch is very small, so the air state of point C after the air from points E, F, and D is mixed can also be approximated to point D. Figure 3 Points A, C, and D are represented by the same point;

[0067] The air inlet state A' of the humidity control branch is cooled and dehumidified to point H, heated and humidified to point G on the iso-relative humidity line, and then iso-humidified to point F from point G; the moisture content of point C after the aforementioned point D is mixed with points E and F is equal to that of point D, and it can be inferred that point J after the mixture of points E and F is also located on the same iso-humidity line of point D; since the temperature setting value of point F is equal to the temperature control target value of the air supply point A, point F is on the isotherm of point A, find a point F on the isotherm of point A, connect points E and F, and intersect the iso-humidity line of point A at point J. Since the air volume ratio of points E and F is 6:5, the length ratio of EJ to FJ is also 6:5, and the parameters of the air state point F can be determined accordingly.

[0068] The temperature control and humidity control parts are highly integrated into one, which greatly reduces the space occupied by the air conditioning system 10. The system is equipped with two branches to independently adjust the temperature and humidity of the clean room air supply, reducing the interference of one adjustment process on the other branch; further, by setting high-precision and fast-response sensors, valves and other devices for feedback and adjustment, and setting the valve and device opening within the high-precision adjustment range, high-precision temperature and humidity control of the clean room air is achieved; in addition, this air conditioning system 10 reduces the volume of the cold coil by processing sensible heat and latent heat separately, and utilizes the characteristics of the inlet and outlet pressure distribution of the fan 103. The humidity control and fresh air branches can provide air circulation power without the need to set up the fan 103, which greatly reduces the space occupied by the air conditioning system 10 and realizes the integration of the temperature control module and the humidity control module.

[0069] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0070] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An air conditioning system, characterized in that: include: Return air outlet (11), fresh air outlet (12), supply air outlet (13); A temperature regulating branch (14) capable of regulating the temperature of air introduced into the air inlet of the temperature regulating branch (14) and discharging the air from the air outlet of the temperature regulating branch (14); the air outlet of the temperature regulating branch (14) is connected to the air supply port (13); A humidity control branch (15), wherein the air inlet of the humidity control branch (15) is used to introduce air from the temperature control branch (14), and can adjust the humidity of the introduced air before the air is discharged from the air outlet of the humidity control branch (15); the air inlet of the temperature control branch (14) can obtain air from the return air outlet (11), the fresh air outlet (12) and the air outlet of the humidity control branch (15).

2. The air conditioning system according to claim 1, characterized in that: The temperature adjustment branch (14) comprises a first heat exchange device (102) and a first electric heater (104); the first heat exchange device (102) comprises a first heat exchange channel and a second heat exchange channel capable of exchanging heat with each other, the outlet of the first heat exchange channel being connected to the first electric heater (104); and the second heat exchange channel is used for connecting to an external fluid.

3. The air conditioning system according to claim 2, characterized in that: The air inlet of the humidity control branch (15) is connected between the first heat exchange device (102) and the first electric heater (104).

4. The air conditioning system according to claim 3, characterized in that: It also includes a fan (103) for air flow, the fan (103) being connected between the first heat exchange device (102) and the first electric heater (104), and the air inlet of the humidity control branch is connected between the fan and the first electric heater (104).

5. The air conditioning system according to claim 4, characterized in that: The humidity control branch (15) comprises a second heat exchange device (106) as a dehumidification function device and a humidifier (107) as a humidification function device; the second heat exchange device (106) comprises a third heat exchange channel and a fourth heat exchange channel capable of exchanging heat with each other, the third heat exchange channel being connected to the humidifier (107); the fourth heat exchange channel, the compressor (201), the condenser (202) and the throttling device (203) are sequentially connected in series to form a mechanical compression refrigeration system (20).

6. The air conditioning system according to any one of claims 2 to 5, characterized in that: The invention also includes a controller (30), wherein the inlet end of the second heat exchange channel is connected to a second electric heater (114), and a first temperature sensor (115) is provided between the second electric heater and the inlet of the second heat exchange channel; the controller is capable of controlling the start and stop and / or the opening degree of the second electric heater (114) and / or the flow rate of the second heat exchange channel according to the difference between the detection value of the first temperature sensor (115) and the first target temperature value; and further includes a second temperature sensor (116) for monitoring the temperature of the air body at the outlet of the first heat exchange channel, and the controller (30) is capable of setting the first target temperature value according to the difference between the second temperature sensor (116) and the second target temperature value.

7. The air conditioning system according to claim 6, characterized in that: The temperature control branch (14) further comprises a third electric heater (105), the third electric heater (105) being connected between the first electric heater (104) and the air supply port, and a third temperature sensor (111) being provided between the third electric heater (105) and the first electric heater (104); and further comprises a fourth temperature sensor (109) for detecting the temperature near the air supply port; the controller (30) controls the opening degree and / or start and stop of the first electric heater (104) and the third electric heater (105) according to the third temperature sensor (111) and the fourth temperature sensor (109); the detection accuracy of the third temperature sensor (111) is higher than the detection accuracy of the second temperature sensor (116).

8. The air conditioning system according to claim 7, characterized in that: It also includes a humidity sensor (110) for detecting the humidity of the air body near the air outlet, and the controller (30) is capable of adjusting the humidity control power of the humidity control module of the humidity control branch (15) according to the humidity sensor (110); the humidity control module includes a dehumidification function device and a humidification function device.

9. The air conditioning system according to claim 8, characterized in that: It also includes a fifth temperature sensor (113) for detecting the outlet temperature of the humidity control branch (15), and a fourth electric heater (108) is provided between the outlet of the humidity control branch (15) and the humidity control module thereof, and the controller is capable of controlling the fourth electric heater (108) according to the detection value of the fifth temperature sensor (113).

10. The air conditioning system according to claim 9, characterized in that: The fresh air inlet (12) is provided with a filter.

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