Semiconductor production equipment control element control generation method and device

Abstract

The embodiment of the invention provides a semiconductor production equipment control element control generation method and device, and relates to the technical field of semiconductor production control, and the method comprises the steps: based on a preset control library, creating control element control class information according to a received control creation instruction; the control creation instruction comprises a dependency attribute; adding the dependency attribute in the control element control class information to generate an initial control library file; creating control element control style information according to the received control page style; associating the initial control library file with the control style information of the control element to generate a dynamic link library file; and calling the dynamic link library file to generate a control element control. The control element control is developed as a component, so that the control element control can be directly referenced to be reused, and the development speed can be increased. And in the later maintenance change, only the dynamic link library file of the control element control is modified, so that the processing efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor production control technology, and in particular to a method for generating a semiconductor production equipment control element control, a semiconductor production equipment control element control generating device, a semiconductor production control device and a storage medium. Background Art

[0002] With the rapid development of the semiconductor industry in recent years, the requirements for semiconductor chip processing and manufacturing in various industries have become increasingly refined, high-end, and high-quality, and the improvement of its operating software has become increasingly important. The experience of human-computer interaction in the interface has become one of the factors to measure the quality of a product. Therefore, it is essential to improve the friendliness of interface interaction.

[0003] In the existing solution, the display of control element controls such as valves is realized through pop-up windows. This implementation method has the following disadvantages: when the pop-up window is loaded, multiple different control buttons will be loaded on the pop-up window of the control element control, and the control buttons are also operated on the main page of the operating software. The control buttons are loaded again when the pop-up window pops up, resulting in the reuse of control buttons. Secondly, the loading of image resources consumes more software memory, and the reloading of the pop-up window will undoubtedly have a certain impact on the running memory; secondly, in terms of reuse modification, if there is a business change in the pop-up window page in the subsequent project, the related pop-up window page must be modified, and the related projects cannot be reused, resulting in greatly reduced maintenance and reusability. Summary of the invention

[0004] In view of the above problems, embodiments of the present invention are proposed to provide a method for generating a control element control of a semiconductor production equipment, a device for generating a control element control of a semiconductor production equipment, a semiconductor production control device and a storage medium that overcome the above problems or at least partially solve the above problems.

[0005] In a first aspect of the present invention, an embodiment of the present invention discloses a method for generating a control element control of a semiconductor production equipment, comprising:

[0006] Based on the preset control library, according to the received control creation instruction, create the control element control class information; the control creation instruction includes a dependency attribute;

[0007] Add the dependency attribute to the control element control class information to generate an initial control library file;

[0008] Creating control element control style information according to the received control page style;

[0009] Associating the initial control library file with the control element control style information to generate a dynamic link library file;

[0010] The dynamic link library file is called to generate a control element control.

[0011] Optionally, the control element control style information includes a control element control style index and a control element control page label; the step of associating the control library file with the control element control style information to generate a dynamic link library file includes:

[0012] Add the control element control style index to the initial control library file to generate a first control library file;

[0013] The control element control page label is attribute-associated with the first control library file to generate a dynamic link library file.

[0014] Optionally, the method further comprises:

[0015] Receiving a dependency property customization instruction, wherein the dependency property customization instruction includes modifying a property field;

[0016] The original attribute field in the dependency attribute is replaced according to the modified attribute field.

[0017] Optionally, the method further comprises:

[0018] In response to the event triggering for the dependency property, the control operation state is determined according to the dependency property.

[0019] Optionally, the dependency property is a control element value; and the step of determining the control operation state according to the dependency property in response to an event trigger for the dependency property comprises:

[0020] In response to the triggering of the control element value, the current control element value is obtained, and the control operation state is determined according to the current control element value.

[0021] Optionally, the method further comprises:

[0022] When the control operation state is the operation-allowed state, the initial control element state corresponding to the current control element value is displayed;

[0023] A control operation for the initial control element state is received, and a pop-up box control interface corresponding to the initial control element state is displayed.

[0024] Optionally, the method further comprises:

[0025] Receiving an execution instruction triggered in the pop-up box control interface;

[0026] issuing the execution instruction and receiving feedback status for the execution instruction;

[0027] When the feedback status is successful execution, modifying the initial control element state to the control element state corresponding to the execution instruction;

[0028] When the feedback status is execution failure, the initial control element state is maintained.

[0029] In a second aspect of the present invention, an embodiment of the present invention discloses a semiconductor production equipment control element control generating device, comprising:

[0030] A first creation module is used to create control element control class information based on a preset control library and according to a received control creation instruction; the control creation instruction includes a dependency attribute;

[0031] An adding module, used for adding the dependency attribute to the control element control class information to generate an initial control library file;

[0032] A second creation module, used to create control element control style information according to the received control page style;

[0033] An association module, used for associating the initial control library file with the control element control style information to generate a dynamic link library file;

[0034] The calling module is used to call the dynamic link library file to generate a control element control.

[0035] In the third aspect of the present invention, an embodiment of the present invention discloses a semiconductor production control device, including a processor, a memory, and a computer program stored in the memory and capable of running on the processor, and when the computer program is executed by the processor, the steps of the semiconductor production equipment control element control generating method as described above are implemented.

[0036] In a fourth aspect of the present invention, an embodiment of the present invention discloses a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the method for generating a control element control of a semiconductor production equipment as described above are implemented.

[0037] The embodiments of the present invention include the following advantages:

[0038] The embodiment of the present invention creates control element control class information based on a preset control library and a received control creation instruction; the control creation instruction includes a dependency attribute; the dependency attribute is added to the control element control class information to generate an initial control library file; the control element control style information is created based on the received control page style; the initial control library file is associated with the control element control style information to generate a dynamic link library file; and the dynamic link library file is called to generate a control element control. By developing the control element control as a component, the control element control can be directly referenced for reuse, which can improve the development speed; and for later maintenance changes, only the dynamic link library file of the control element control needs to be modified, and the control element control is realized by directly calling the dynamic link library file, without modifying the code of the control software or modifying the project associated with the control element control, thereby reducing the amount of modified data and improving processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a flowchart of the steps of an embodiment of a method for generating a control element control of a semiconductor production equipment according to the present invention;

[0040] Figure 2 It is a flowchart of another embodiment of a method for generating a control element control of a semiconductor production equipment according to the present invention;

[0041] Figure 3 It is a flowchart of steps of an example of a method for generating a control element control of a semiconductor production equipment according to the present invention;

[0042] Figure 4 It is a structural block diagram of an embodiment of a semiconductor production equipment control element control generating device of the present invention. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0044] Reference Figure 1 , shows a flowchart of a method for generating a semiconductor production equipment control component control in an embodiment of the present invention, wherein the method for generating a semiconductor production equipment control component control may specifically include the following steps:

[0045] Step 101, based on a preset control library and according to a received control creation instruction, create control element control class information; the control creation instruction includes a dependency attribute;

[0046] In an embodiment of the present invention, the preset control library is a database of various page controls that need to be displayed in the control software. All controls that need to be displayed in the control software need to create corresponding categories in the preset control library to store corresponding data under the category so that the controls can be displayed on the page of the control software. Among them, control elements refer to physical elements such as valves, switches, flow meters, etc. that realize control functions; control element controls are page controls of physical control elements on the control software page; such as page controls corresponding to physical valves, and page controls corresponding to physical switches; the actual status of physical control elements is displayed on control element controls. That is, the actual status of physical control elements can be viewed through control element controls; physical control elements can also be controlled through control element controls to realize remote control of physical control elements.

[0047] Based on the preset control library and the received control creation instruction, the control element control class information of the control element control can be created so that the project information corresponding to the control element control can be newly created in the control library. The control creation instruction includes a dependency attribute, and a dependency attribute corresponds to a display state of the control element control.

[0048] By creating control component control class information in the preset control library, the control component control is registered. The control component control class information can be modified to modify the style and display content of the control component control.

[0049] Step 102, adding the dependency attribute to the control element control class information to generate an initial control library file;

[0050] Add dependency properties to the control component control class information to enable the control component control to have different usage properties and generate an initial control library file. By calling the initial control library file, a control component control that can display the basic usage properties of the control component can be realized.

[0051] Step 103, creating control element control style information according to the received control page style;

[0052] In the embodiment of the present invention, control element control style information can also be created based on the received control page style, and the control element control style information is the display style of the page representing the control element control in the display device. The control element control style can be a newly created page style or a control page style referenced by a third party, which is not limited in the embodiment of the present invention.

[0053] Step 104, associating the initial control library file with the control element control style information to generate a dynamic link library file;

[0054] The initial control library file is associated with the control element control style information, and the reference relationship of the file is combined, that is, the specific display page of the control element control is combined with the control element control that displays the basic usage properties of the control element, so that the control element control is associated with the corresponding display page, and a dynamic link library file is generated to facilitate direct reference of the control element control for reuse, thereby improving reference efficiency.

[0055] Step 105, calling the dynamic link library file to generate a control element control.

[0056] After generating the dynamic link library file of the control element control, the dynamic link library file can be called to draw the data in the dynamic link library to generate the control element control. The user can view the status of the physical control element on the control element control, and can also operate on the control element control to use the control element control to control and observe the usage of the actual control element.

[0057] The embodiment of the present invention creates control element control class information based on a preset control library and a received control creation instruction; the control creation instruction includes a dependency attribute; the dependency attribute is added to the control element control class information to generate an initial control library file; the control element control style information is created based on the received control page style; the initial control library file is associated with the control element control style information to generate a dynamic link library file; and the dynamic link library file is called to generate a control element control. By developing the control element control as a component, the control element control can be directly referenced for reuse, which can improve the development speed. In addition, for later maintenance changes, only the dynamic link library file of the control element control needs to be modified, and the control element control is realized by directly calling the dynamic link library file, without modifying the code of the control software or modifying the project associated with the control element control, thereby reducing the amount of modified data and improving processing efficiency. Improve processing efficiency.

[0058] Reference Figure 2 , shows a flowchart of another control element control generation method embodiment of the present invention, the control element control generation method may specifically include the following steps:

[0059] Step 201: Based on a preset control library and according to a received control creation instruction, create control element control class information; the control creation instruction includes a dependency attribute.

[0060] The embodiment of the present invention can be applied to an electronic device for controlling semiconductor production, wherein a plurality of control libraries are provided in the electronic device, and when a user needs to create a new control element control, a control instruction can be sent to the electronic device. In a project file corresponding to a preset control library, based on a received control creation instruction, control element control class information corresponding to the control element control is created in a control library project; wherein the control element control creation instruction includes at least one dependent attribute. For example, the control element is a valve control, and the dependent attribute includes the valve opening.

[0061] Step 202: Add the dependency attribute to the control element control class information to generate an initial control library file.

[0062] Add dependency properties to the control component control class information so that the control component control has different usage properties and generate an initial control library file.

[0063] In addition, in an optional embodiment of the present invention, the dependency property can be customized so that the control element control can be customized. The method also includes:

[0064] Step S1, receiving a dependency attribute customization instruction, wherein the dependency attribute customization instruction includes modifying an attribute field;

[0065] When the dependent property needs to be customized, the user can input data in the corresponding field, that is, generate a modified property field. A dependent property customization instruction is received, wherein the dependent property customization instruction includes a modified property field.

[0066] Step S2: replacing the original attribute field in the dependent attribute according to the modified attribute field.

[0067] From the original dependent properties, determine the original property fields that have the same properties as the modified property fields, and use the modified property fields to replace the original property fields to change the initial control library file.

[0068] Step 203: Create control element control style information according to the received control page style.

[0069] In the embodiment of the present invention, corresponding control element control style information may also be created in the control library project according to the received control page style, and the page display style corresponding to the control element control may be determined through the control element control style information.

[0070] Step 204: Associating the initial control library file with the control element control style information to generate a dynamic link library file.

[0071] The initial control library file is associated with the control element control style information, and the function of the control element control is associated with the page element to generate a dynamic link library file. This allows the control element control to be developed as a component, and can be directly referenced and reused when used in other interfaces. If there are maintenance changes in the later stage, only the component needs to be modified, thereby improving the efficiency of later maintenance. The dynamic link library file can determine the specific file format according to actual needs, and the embodiment of the present invention does not limit this. In one example of the present invention, the dynamic link library file is a dll format file.

[0072] Step 205: calling the dynamic link library file to generate a control element control.

[0073] The dynamic link library file is called to generate the control component control so that the user can use the control component control.

[0074] Step 206: In response to the event triggering for the dependency property, determine the control operation state according to the dependency property.

[0075] After the control element control is generated, when there is an event trigger for the dependency property of the control element control, the control operation state of the current control element control can be determined according to the dependency property in response to the event trigger for the dependency property. Among them, the event for the dependency property may include but is not limited to the event of modifying the dependency property of the control element value in the control element control, the event of modifying the pressure control dependency property of the control element in the control element control, the event of modifying the flow control dependency property of the control element in the control element control, etc. Then, when triggered, the event of modifying the dependency property of the control element value in the control element control is triggered by the user's operation of modifying the control element value in the control element control. After the event of modifying the dependency property of the control element value in the control element control is triggered, it can be determined that the dependency property corresponds to the state of the control element start operation.

[0076] Specifically, the dependency attribute is a control element value; the step of determining the control operation state according to the dependency attribute in response to an event trigger for the dependency attribute includes: in response to a trigger for the control element value, obtaining the control element operation value, and determining the control operation state according to the control element operation value.

[0077] Among various dependent properties, the control element value is a commonly used property value. The control element value represents the working state of the control element. For example, when the control element is a valve, the control element value can represent the valve opening. When the control element value is zero, the valve opening is zero and the valve is closed. In response to the trigger for the control element value, the current control element value can be obtained; the control operation state corresponding to the current control element control is determined according to the current control element value. For example, when the current control element value is 10%, it can be determined that the control operation state is that the control element is open and the opening is adjustable. This allows users to directly view the status of the current control element, reduce the resources for loading images to display control elements, and improve display efficiency.

[0078] Step 207: When the control operation state is the operation-allowed state, the initial control element state corresponding to the control element operation value is displayed.

[0079] When the control operation state is the allowed operation state, that is, the actual control element can be controlled by the user through the control element control, the current control element value can be used as the basis for user adjustment, and then the state corresponding to the current control element value is displayed as the initial control element state. The control element state includes open or closed, and can also be partially open.

[0080] Step 208: receiving a control operation for the initial control element state, and displaying a pop-up box control interface corresponding to the initial control element state.

[0081] The user can observe the specific state of the control element on the page displaying the initial control element state, and when the current control element state needs to be controlled, the control operation can be performed on the initial control element state. The control operation includes but is not limited to right-clicking the initial control element state on the control element control, long pressing the initial control element state, etc. The control of the control element state can be initiated through a single operation, which reduces user operations and improves ease of use. When a control operation for the initial control element state is received, a pop-up box control interface (such as a poup interface) corresponding to the initial control element state is displayed.

[0082] Step 209: receiving an execution instruction triggered in the pop-up box control interface.

[0083] Then the user can determine the parameters that need to be specifically adjusted in the pop-up box control interface, trigger the execution instruction in the pop-up box control interface, and receive the execution instruction to start the control process of the control element.

[0084] Step 210: issue the execution instruction and receive a feedback status of the execution instruction.

[0085] After obtaining the execution instruction, the execution instruction can be sent to the actual control element corresponding to the control element control, and the actual control element executes the execution instruction and feeds back the execution status of the execution instruction, that is, the feedback status, after execution.

[0086] Step 211: When the feedback status is successful execution, the initial control element state is modified to the control element state corresponding to the execution instruction.

[0087] When the feedback status is successful execution, that is, the control of the actual control element is the same as the user setting, the control element state is updated at this time, and the initial control element state can be modified to the control element state corresponding to the execution instruction.

[0088] Step 212: When the feedback status is execution failure, maintain the initial control element status.

[0089] When the feedback status is execution failure, that is, the control element state has not changed, the initial control element state is maintained.

[0090] Furthermore, the control element control style information includes a control element control style index and a control element control page label; the control element control style index is used to indicate the index relationship between the styles of each element in the control element control in the page, so as to associate the styles of the elements in the control element control. When the user operates a page element in a single control element control, other page elements associated with it are displayed. The control element control page label is used to classify the pages of the control element control, and different labels correspond to different types.

[0091] The step of associating the control library file with the control element control style information to generate a dynamic link library file comprises:

[0092] Sub-step S2041, adding the control element control style index to the initial control library file to generate a first control library file;

[0093] A control element control style index may be firstly added to the initial control library file, so that the initial control library file may include specific information of the control element control style, thereby generating a first control library file.

[0094] Sub-step S2041, associate the control element control page tag with the first control library file by attributes to generate a dynamic link library file.

[0095] After obtaining the first control library file, the label node of the control element control page label can be attribute-associated with the control library file to generate a dynamic link library file.

[0096] The embodiment of the present invention develops the control element as a component, and the display interface can directly reference the component for reuse. If there is a maintenance change in the later stage, only the component needs to be modified, which improves the maintenance efficiency. At the same time, the addition of dependent attributes allows developers to develop different control element operation displays according to different business scenarios, and reduce the loading of control element images, reduce the loading of resources, and improve operating efficiency; a single operation can be used to initiate the control process, and the state change of the control element is directly reflected, which improves the intuitive usability of the control element control.

[0097] In order to make the implementation process of the embodiments of the present invention clear to those skilled in the art, refer to Figure 3 , take the valve as the control element as an example to explain:

[0098] S1: Create a new valve custom control class (valve control class information) based on the control library project.

[0099] S2: Add the required dependency properties in the valve control class.

[0100] S3: Create a template style for the valve control page.

[0101] S4: Add the valve control style index in the control library configuration item file to ensure that the valve control can be loaded when the control library is running.

[0102] S5: The label node in the page style is associated with the control library class by attributes, which facilitates page data loading and polymorphic expansion of the page.

[0103] S6: Perform event processing on the dependent properties, especially the dependent properties of the Valve value. Perform event processing when the return value is changed during the call. The specific processing steps are as follows.

[0104] S7: Get the valve operation value and load the valve initial state.

[0105] S8: During operation, obtain whether the current state is operable through dependency properties.

[0106] S9: If operation is currently allowed, the initial valve state is displayed.

[0107] S10: If the current state allows the operation, right-click the valve to display the poup interface for operation; otherwise, no operation is performed and the initial valve state is displayed.

[0108] S11: During operation, click the valve switch command to issue the command, and wait for the command to be executed successfully.

[0109] S12: When the command fails to execute, the valve does not change and the valve status before the operation is displayed.

[0110] S13: The valve value changes when the command succeeds.

[0111] S14: The lower computer returns the changed Valve value

[0112] S15: At this time, the control library background class processes the Valve change event, and determines the current changed valve position according to the switch operation value of the dependent property and the valve status value to make it consistent with the current pipeline.

[0113] It should be noted that, for the sake of simplicity, the method embodiments are described as a series of action combinations, but those skilled in the art should be aware that the embodiments of the present invention are not limited by the order of the actions described, because according to the embodiments of the present invention, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

[0114] Reference Figure 4 , shows a structural block diagram of an embodiment of a semiconductor production equipment control element control generating device of the present invention, which may specifically include the following modules:

[0115] The first creation module 401 is used to create control element control class information based on a preset control library and according to a received control creation instruction; the control creation instruction includes a dependency attribute;

[0116] An adding module 402 is used to add the dependency attribute to the control element control class information to generate an initial control library file;

[0117] The second creation module 403 is used to create control element control style information according to the received control page style;

[0118] An association module 404 is used to associate the initial control library file with the control element control style information to generate a dynamic link library file;

[0119] The calling module 405 is used to call the dynamic link library file to generate a control element control.

[0120] In an optional embodiment of the present invention, the control element control style information includes a control element control style index and a control element control page label; the association module 404 includes:

[0121] A first adding submodule, used for adding the control element control style index in the initial control library file to generate a first control library file;

[0122] The attribute association submodule is used to associate the attributes of the control element control page label with the first control library file to generate a dynamic link library file.

[0123] In an optional embodiment of the present invention, the device further comprises:

[0124] The attribute customization module is used to receive a dependency attribute customization instruction, wherein the dependency attribute customization instruction includes modifying an attribute field;

[0125] A replacement module is used to replace the original attribute field in the dependency attribute according to the modified attribute field.

[0126] In an optional embodiment of the present invention, the device further comprises:

[0127] The response module is used to respond to the event triggering for the dependency property and determine the control operation state according to the dependency property.

[0128] In an optional embodiment of the present invention, the dependency attribute is a control element value; and the response module includes:

[0129] The response submodule is used to obtain the current control element value in response to the triggering of the control element value, and determine the control operation state according to the current control element value.

[0130] In an optional embodiment of the present invention, the device further comprises:

[0131] A first display module, used for displaying an initial control element state corresponding to the current control element value when the control operation state is an operation-allowed state;

[0132] The second display module is used to receive a control operation for the initial control element state and display a pop-up box control interface corresponding to the initial control element state.

[0133] In an optional embodiment of the present invention, the device further comprises:

[0134] An instruction triggering module, used for receiving an execution instruction triggered in the pop-up box control interface;

[0135] A sending module, used for sending the execution instruction and receiving a feedback status of the execution instruction;

[0136] An execution success module, configured to modify the initial control element state to the control element state corresponding to the execution instruction when the feedback state is execution success;

[0137] The execution failure module is used to maintain the initial control element state when the feedback state is execution failure.

[0138] As for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0139] An embodiment of the present invention further provides a semiconductor production control device, including:

[0140] A processor and a storage medium, wherein the storage medium stores a computer program executable by the processor, and when the semiconductor production control device is running, the processor executes the computer program to execute the semiconductor production equipment control component control generation method as described in any one of the embodiments of the present invention. The semiconductor production equipment control component control generation method includes:

[0141] Based on the preset control library, according to the received control creation instruction, create the control element control class information; the control creation instruction includes a dependency attribute;

[0142] Add the dependency attribute to the control element control class information to generate an initial control library file;

[0143] Creating control element control style information according to the received control page style;

[0144] Associating the initial control library file with the control element control style information to generate a dynamic link library file;

[0145] The dynamic link library file is called to generate a control element control.

[0146] Optionally, the control element control style information includes a control element control style index and a control element control page label; the step of associating the control library file with the control element control style information to generate a dynamic link library file includes:

[0147] Add the control element control style index to the initial control library file to generate a first control library file;

[0148] The control element control page label is attribute-associated with the first control library file to generate a dynamic link library file.

[0149] Optionally, the method further comprises:

[0150] Receiving a dependency property customization instruction, wherein the dependency property customization instruction includes modifying a property field;

[0151] The original attribute field in the dependency attribute is replaced according to the modified attribute field.

[0152] Optionally, the method further comprises:

[0153] In response to the event triggering for the dependency property, the control operation state is determined according to the dependency property.

[0154] Optionally, the dependency property is a control element value; and the step of determining the control operation state according to the dependency property in response to an event trigger for the dependency property comprises:

[0155] In response to the triggering of the control element value, the current control element value is obtained, and the control operation state is determined according to the current control element value.

[0156] Optionally, the method further comprises:

[0157] When the control operation state is the operation-allowed state, the initial control element state corresponding to the current control element value is displayed;

[0158] A control operation for the initial control element state is received, and a pop-up box control interface corresponding to the initial control element state is displayed.

[0159] Optionally, the method further comprises:

[0160] Receiving an execution instruction triggered in the pop-up box control interface;

[0161] issuing the execution instruction and receiving feedback status for the execution instruction;

[0162] When the feedback status is successful execution, modifying the initial control element state to the control element state corresponding to the execution instruction;

[0163] When the feedback status is execution failure, the initial control element state is maintained.

[0164] The memory may include a random access memory (RAM) or a non-volatile memory, such as at least one disk memory. Optionally, the memory may also be at least one storage device located away from the processor.

[0165] The above-mentioned processor can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components.

[0166] An embodiment of the present invention further provides a computer-readable storage medium on which a computer program is stored, and when the computer program is executed by a processor, the method for generating a semiconductor production equipment control component control as described in any one of the embodiments of the present invention is executed. The method for generating a semiconductor production equipment control component control comprises:

[0167] Based on the preset control library, according to the received control creation instruction, create the control element control class information; the control creation instruction includes a dependency attribute;

[0168] Add the dependency attribute to the control element control class information to generate an initial control library file;

[0169] Creating control element control style information according to the received control page style;

[0170] Associating the initial control library file with the control element control style information to generate a dynamic link library file;

[0171] The dynamic link library file is called to generate a control element control.

[0172] Optionally, the control element control style information includes a control element control style index and a control element control page label; the step of associating the control library file with the control element control style information to generate a dynamic link library file includes:

[0173] Add the control element control style index to the initial control library file to generate a first control library file;

[0174] The control element control page label is attribute-associated with the first control library file to generate a dynamic link library file.

[0175] Optionally, the method further comprises:

[0176] Receiving a dependency property customization instruction, wherein the dependency property customization instruction includes modifying a property field;

[0177] The original attribute field in the dependency attribute is replaced according to the modified attribute field.

[0178] Optionally, the method further comprises:

[0179] In response to the event triggering for the dependency property, the control operation state is determined according to the dependency property.

[0180] Optionally, the dependency property is a control element value; and the step of determining the control operation state according to the dependency property in response to an event trigger for the dependency property comprises:

[0181] In response to the triggering of the control element value, the current control element value is obtained, and the control operation state is determined according to the current control element value.

[0182] Optionally, the method further comprises:

[0183] When the control operation state is the operation-allowed state, the initial control element state corresponding to the current control element value is displayed;

[0184] A control operation for the initial control element state is received, and a pop-up box control interface corresponding to the initial control element state is displayed.

[0185] Optionally, the method further comprises:

[0186] Receiving an execution instruction triggered in the pop-up box control interface;

[0187] issuing the execution instruction and receiving feedback status for the execution instruction;

[0188] When the feedback status is successful execution, modifying the initial control element state to the control element state corresponding to the execution instruction;

[0189] When the feedback status is execution failure, the initial control element state is maintained.

[0190] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0191] It will be appreciated by those skilled in the art that the embodiments of the present invention may be provided as methods, devices, or computer program products. Therefore, the embodiments of the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

[0192] The embodiments of the present invention are described with reference to the flowcharts and / or block diagrams of the methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0193] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce a manufactured product including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0194] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce a computer-implemented process, thereby providing instructions for executing on the computer or other programmable terminal device to implement the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0195] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

[0196] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0197] The above is a detailed introduction to a method and device for generating a control element control of a semiconductor production equipment provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for a general technician in this field, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A method for generating a control element control of a semiconductor production equipment, characterized in that: include: Based on the preset control library, according to the received control creation instruction, create control element control class information; The control creation instruction includes a dependency attribute; Add the dependency attribute to the control element control class information to generate an initial control library file; Creating control element control style information according to the received control page style; Associating the initial control library file with the control element control style information to generate a dynamic link library file; The dynamic link library file is called to generate a control element control.

2. The method according to claim 1, characterized in that The control element control style information includes a control element control style index and a control element control page label; the step of associating the control library file with the control element control style information to generate a dynamic link library file includes: Add the control element control style index to the initial control library file to generate a first control library file; The control element control page label is attribute-associated with the first control library file to generate a dynamic link library file.

3. The method according to claim 1, characterized in that The method further comprises: Receiving a dependency property customization instruction, wherein the dependency property customization instruction includes modifying a property field; The original attribute field in the dependency attribute is replaced according to the modified attribute field.

4. The method according to claim 1, characterized in that The method further comprises: In response to the event triggering for the dependency property, the control operation state is determined according to the dependency property.

5. The method according to claim 4, characterized in that The dependency attribute is a control element value; The step of determining the control operation state according to the dependency property in response to the event triggering for the dependency property comprises: In response to the triggering of the control element value, the current control element value is obtained, and the control operation state is determined according to the current control element value.

6. The method according to claim 5, characterized in that The method further comprises: When the control operation state is the operation-allowed state, the initial control element state corresponding to the current control element value is displayed; A control operation for the initial control element state is received, and a pop-up box control interface corresponding to the initial control element state is displayed.

7. The method according to claim 6, characterized in that The method further comprises: Receiving an execution instruction triggered in the pop-up box control interface; issuing the execution instruction and receiving feedback status for the execution instruction; When the feedback status is successful execution, modifying the initial control element state to the control element state corresponding to the execution instruction; When the feedback status is execution failure, the initial control element state is maintained.

8. A semiconductor production equipment control element control generating device, characterized in that: include: A first creation module is used to create control element control class information based on a preset control library and according to a received control creation instruction; The control creation instruction includes a dependency attribute; An adding module, used for adding the dependency attribute to the control element control class information to generate an initial control library file; A second creation module, used to create control element control style information according to the received control page style; An association module, used for associating the initial control library file with the control element control style information to generate a dynamic link library file; The calling module is used to call the dynamic link library file to generate a control element control.

9. A semiconductor production control device, characterized in that: The method comprises a processor, a memory and a computer program stored in the memory and capable of running on the processor, wherein when the computer program is executed by the processor, the steps of the method for generating a control element control of a semiconductor production equipment as described in any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method for generating a control element control of a semiconductor production equipment according to any one of claims 1 to 7 are implemented.

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