Cleaning device and process equipment

Abstract

The embodiment of the invention provides a cleaning device and process equipment, the cleaning device comprises a cleaning assembly, the cleaning assembly comprises a cleaning piece and a fixing structure, the cleaning piece is connected with the fixing structure, and the cleaning piece sprays cleaning liquid to a flexible base material; the water squeezing assembly comprises a first water squeezing roller and a second water squeezing roller, the first water squeezing roller and the second water squeezing roller are located at the same horizontal position, and one end of the flexible base material penetrates through the position between the first water squeezing roller and the second water squeezing roller and extends to the side, away from the water squeezing assembly, of the fixing structure; the water absorption assembly is arranged on one side of the water squeezing assembly and used for absorbing the cleaning fluid on the water squeezing assembly. The flexible base material can continuously run at a certain linear speed, the cleaning part sprays cleaning liquid to the flexible base material to achieve cleaning of the flexible base material, the first wringing roller and the second wringing roller squeeze away liquid or particles and the like on the surface of the flexible base material, the liquid is sucked and discharged through the water suction assembly, cleaning of the flexible base material is completed, the cleaning effect is good, and the cleaning efficiency is high. And color change caused by air oxidation in the operation process can be prevented.

Description

Technical Field

[0001] The present application relates to the field of diaphragm technology, and in particular to a cleaning device and process equipment. Background Art

[0002] With the continuous development of energy storage technologies such as batteries and photovoltaics, as well as wearable electronic printing technology, there is an increasing demand for batch processing of flexible functional substrates with a thickness of microns. Flexible substrates often need to be cleaned. Currently, there is no equipment on the market for cleaning flexible substrates, so a cleaning device is urgently needed. Summary of the invention

[0003] The purpose of the embodiments of the present application is to provide a cleaning device and process equipment, which can prevent the metal film or substrate from being oxidized and discolored by air during operation, and has a good cleaning effect.

[0004] In a first aspect, an embodiment of the present application provides a cleaning device, which is used to clean a flexible substrate, wherein the cleaning device comprises: a cleaning component, comprising a cleaning piece and a fixed structure, the cleaning piece is connected to the fixed structure, and the cleaning piece sprays cleaning liquid to the flexible substrate along a preset angle; a water squeezing component, comprising a first water squeezing roller and a second water squeezing roller, the first water squeezing roller and the second water squeezing roller are located at the same horizontal position, one end of the flexible substrate passes between the first water squeezing roller and the second water squeezing roller, and extends to a side of the fixed structure away from the water squeezing component; a water absorbing component, which is arranged on both sides and in the middle of the water squeezing component, and is used to absorb the cleaning liquid on the water squeezing component.

[0005] In the above-mentioned implementation process, after one end of the flexible substrate passes through the water squeezing component and the water absorbing component, it is led out from the side of the fixed structure away from the water squeezing component, so that the flexible substrate can run continuously at a certain linear speed. At this time, the cleaning component sprays cleaning liquid to the flexible substrate to clean the flexible substrate. At the same time, the first water squeezing roller and the second water squeezing roller squeeze out the liquid or particles on the surface of the flexible substrate, and the liquid is absorbed and discharged by the water absorbing component to complete the cleaning of the flexible substrate. The cleaning effect is good and can prevent discoloration by oxidation by air during operation.

[0006] In some embodiments, the fixing structure includes a fixing plate and a side upper cover, the fixing plate is connected to the cleaning part, the spray end of the cleaning part is arranged on the side of the fixing plate close to the water squeezing component, and the fixing plate is arranged on the inner side of the side upper cover.

[0007] In the above implementation process, the fixing plate is used to fix the cleaning member, and the side upper cover is used to fix the fixing plate, thereby ensuring that the cleaning member is sprayed along a preset angle, which is beneficial to the stability of the cleaning member during operation and improves the cleaning effect on the flexible substrate.

[0008] In some embodiments, the fixing plates are disposed on opposite sides of the flexible substrate, each fixing plate is fixed with the cleaning member, and after the flexible substrate is cleaned by the cleaning member, it extends from the gap between the two side covers to the outside of the side covers.

[0009] In the above implementation process, fixed plates are provided on opposite sides of the flexible substrate, and a cleaning component is provided on each fixed plate. The flexible substrate can not only run continuously at a certain linear speed, but also clean both sides of the flexible substrate, thereby improving efficiency and cleaning effect.

[0010] In some embodiments, the gap width between the two side covers is configured to range from 1 to 3 mm.

[0011] In the above implementation process, by setting the gap between the side upper covers smaller, a certain negative pressure can be formed on the inner side of the side upper covers when the water absorption assembly absorbs water, thereby preventing water leakage and avoiding the cleaning liquid from overflowing the cleaning device.

[0012] In some embodiments, the fixing plate is tiltedly disposed on the inner side of the side upper cover, and the horizontal angle between the fixing plate and the side upper cover is in the range of 40°-60°, and / or the angle between the spray direction of the cleaning element and the running direction of the flexible substrate is in the range of 40°-60°. This can improve the cleaning effect of the cleaning element on the flexible substrate.

[0013] In some embodiments, the cleaning device also includes a water retaining assembly, which includes a first water retaining plate and a second water retaining plate. The first water retaining plate is arranged on the side of the first water squeezing roller away from the flexible substrate, and the second water retaining plate is arranged on the side of the second water squeezing roller away from the flexible substrate.

[0014] In the above-mentioned implementation process, by setting a first water baffle on one side of the first water squeezing roller and a second water baffle on one side of the second water squeezing roller, liquid can be prevented from flowing out from both sides of the first water squeezing roller and the second water squeezing roller, water leakage can be prevented, and contamination of the cleaning device and other devices can be avoided, thereby improving cleanliness.

[0015] In some embodiments, the thickness of the water retaining component is in the range of 2-10 mm, and / or the length of the water retaining component is in the range of 0.4-0.6 times the diameter of the water squeezing component. This can ensure that the water retaining component has good elasticity, facilitate the fit between the water retaining component and the water squeezing component, prevent water leakage, avoid contamination of the cleaning device and other devices, and improve cleanliness.

[0016] In some embodiments, the hardness of the water retaining component is 40-70 degrees, which ensures that the water retaining component has both elasticity and a certain hardness, which is conducive to the fit between the water retaining component and the water squeezing component to prevent water leakage.

[0017] In some embodiments, the water suction component includes a first water suction pipe, a second water suction pipe and a third water suction pipe, the first water suction pipe, the second water suction pipe and the third water suction pipe are connected, and the water suction port of the first water suction pipe is arranged on the side of the first water squeezing roller away from the flexible substrate, the water suction port of the second water suction pipe is arranged between the first water squeezing roller and the second water squeezing roller, and the water suction port of the third water suction pipe is arranged on the side of the second water squeezing roller away from the flexible substrate.

[0018] In the above implementation process, by arranging the first water suction pipe, the second water suction pipe and the third water suction pipe at different positions of the cleaning device, liquid at different positions can be sucked, which is beneficial to discharge the liquid from the cleaning device, avoiding secondary contamination of the flexible substrate and the cleaning device, and improving the cleanliness.

[0019] In some embodiments, the distance between the suction port and the highest liquid level of the cleaning liquid at the squeezing roller is 5-20 mm. The liquid in the cleaning device can be discharged in time through the suction component to prevent the liquid from overflowing the cleaning device, avoid secondary contamination of the cleaning device and the flexible substrate, and improve the cleaning performance.

[0020] In a second aspect, the present application also provides a process equipment, comprising a cleaning device as described in any one of the above items.

[0021] Since the process equipment provided in the second aspect includes a cleaning device, the process equipment has all the technical effects of the cleaning device, which will not be described in detail here.

[0022] Other features and advantages of the present disclosure will be set forth in the following description, or some features and advantages may be inferred or unambiguously determined from the description, or may be learned by implementing the above-mentioned technology of the present disclosure.

[0023] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 A schematic diagram of the structure of a cleaning device provided in an embodiment of the present application;

[0026] Figure 2 A schematic diagram of the overall structure of the cleaning device provided in an embodiment of the present application.

[0027] Reference numerals

[0028] 100, flexible substrate; 200, cleaning component; 201, cleaning part; 202, fixing plate; 203, side upper cover; 204, water inlet pipe; 300, water squeezing component; 301, first water squeezing roller; 302, second water squeezing roller; 400, water absorption component; 401, first water absorption pipe; 402, second water absorption pipe; 403, third water absorption pipe; 500, water retaining component; 501, first water retaining plate; 502, second water retaining plate. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0030] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0031] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0032] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or a point connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0033] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0034] Example

[0035] With the continuous development of energy storage technologies such as batteries and photovoltaics, as well as wearable electronic printing technologies, there is an increasing demand for batch processing of flexible functional substrates with a thickness of microns. Production equipment that can continuously and stably perform electroplating, molding, spraying, and coating on flexible functional substrates is the key to the industrialization of advanced technologies. The bending resistance of extremely thin flexible substrates is almost zero. Large-scale production equipment usually uses a roll-to-roll system to achieve the transmission of flexible substrates. The processing technology of flexible substrates in the process includes chemical vapor deposition, physical vapor deposition, and electrodeposition. When different processes transition, the flexible substrate often needs to be cleaned to prevent it from carrying contaminants that cause discoloration of the surface or corrosion of subsequent process equipment, and to avoid exposure to the air for a period of time.

[0036] In view of this, if Figure 1-Figure 2 As shown, in the first aspect, an embodiment of the present application provides a cleaning device, which is used to clean a flexible substrate 100, wherein the cleaning device comprises: a cleaning component 200, comprising a cleaning member 201 and a fixed structure, wherein the cleaning member 201 is connected to the fixed structure, and the cleaning member 201 sprays cleaning liquid to the flexible substrate 100 along a preset angle; a water squeezing component 300, comprising a first water squeezing roller 301 and a second water squeezing roller 302, wherein the first water squeezing roller 301 and the second water squeezing roller 302 are located at the same horizontal position, and one end of the flexible substrate 100 passes through between the first water squeezing roller 301 and the second water squeezing roller 302, and extends to a side of the fixed structure away from the water squeezing component 300; and a water absorbing component 400, which is arranged on both sides and the middle of the water squeezing component 300, and is used to absorb the cleaning liquid on the water squeezing component 300.

[0037] Exemplarily, the flexible substrate 100 includes but is not limited to a high molecular polymer, and can be a roll material with low bending strength such as an extremely thin metal foil, such as a copper foil, which can be used as a current collector of a battery. It is mainly formed by depositing a uniform copper layer on both sides of a lightweight and flexible polymer film such as PET or PP. This material significantly reduces the weight of the battery, improves the energy density, and can effectively improve the stress distribution inside the battery, thereby improving the cycle stability of the battery.

[0038] It can be understood that the cleaning device provided in the present application is mainly for flexible substrates 100 with a thickness of 3-6 microns. It can prevent the flexible substrates 100 from being oxidized and discolored by air when running between plating tanks during the transmission of the coating equipment. It has a compact structure, exquisite design, flexible and easy installation, and good cleaning effect.

[0039] It should be noted that, in order to improve the cleaning effect and avoid contamination of the flexible substrate 100 by the cleaning liquid, the moving direction of the flexible substrate 100 includes but is not limited to the up and down direction, wherein the cleaning component 200, the water absorbing component 400 and the water squeezing component 300 are distributed along the up and down direction, one end of the flexible substrate 100 penetrates from the water squeezing component 300 and extends to the inside of the cleaning device, the cleaning component 200 cleans the flexible substrate 100, and the water absorbing component 400 discharges the liquid in the cleaning device, and finally the flexible substrate 100 is led out from the upper end of the cleaning device, thereby ensuring that the flexible substrate 100 runs continuously at a certain linear speed, shortening the film travel time, and also achieving its cleaning effect.

[0040] For the water squeezing component 300, the first water squeezing roller 301 and the second water squeezing roller 302 are both active rollers, and the flexible substrate 100 is driven by the friction between the roller surface of the water squeezing component 300. The diameters of the first water squeezing roller 301 and the second water squeezing roller 302 are both set to 20-100 mm. By setting their diameters to no more than 100 mm, the cleaning device can be made compact, space-saving, and the weight of the cleaning device can be reduced, while being easy to disassemble and install. At the same time, the roller surface materials of the first water squeezing roller 301 and the second water squeezing roller 302 include but are not limited to nitrile rubber, natural rubber, fluororubber, silicone rubber, polyurethane, EPDM, etc.

[0041] In the above implementation process, after one end of the flexible substrate 100 passes through the squeezing component 300 and the water absorbing component 400, it is led out from the side of the fixed structure away from the squeezing component 300, so that the flexible substrate 100 can run continuously at a certain linear speed. At this time, the cleaning member 201 sprays the cleaning liquid to the flexible substrate 100 to clean the flexible substrate 100. At the same time, the first squeezing roller 301 and the second squeezing roller 302 squeeze out the liquid or particles on the surface of the flexible substrate 100, and the liquid is absorbed and discharged by the water absorbing component 400 to complete the cleaning of the flexible substrate 100. The cleaning effect is good and it can prevent the flexible substrate 100 from being oxidized and discolored by air during operation.

[0042] like Figure 1 As shown, the fixing structure includes a fixing plate 202 and a side upper cover 203 , the fixing plate 202 is connected to the cleaning component 201 , the spray end of the cleaning component 201 is arranged on a side of the fixing plate 202 close to the water squeezing component 300 , and the fixing plate 202 is arranged on the inner side of the side upper cover 203 .

[0043] Exemplarily, the shape of the side upper cover 203 is not specifically limited, and the fixing plate 202 and the side upper cover 203 can be connected in a detachable manner, for example, fixed by bolts, etc., to facilitate disassembly, cleaning and replacement; the fixing plate 202 and the side upper cover 203 both include but are not limited to being symmetrically distributed on both sides of the flexible substrate 100, wherein the two side upper covers 203 enclose a shell of the cleaning device, and the bottom of the cleaning device may not be provided with a side lower cover, of course, it is not ruled out that a side lower cover is provided, and the side lower cover is connected to the side upper cover 203, etc.

[0044] In the above implementation process, the fixing plate 202 is used to fix the cleaning member 201, and the side upper cover 203 is used to fix the fixing plate 202, thereby ensuring that the cleaning member 201 sprays along a preset angle, which is beneficial to the stability of the cleaning member 201 during operation and improves the cleaning effect on the flexible substrate 100.

[0045] In some embodiments, the fixing plates 202 are disposed on opposite sides of the flexible substrate 100 , each fixing plate 202 is fixed with the cleaning member 201 , and after the flexible substrate 100 is cleaned by the cleaning member 201 , it extends from the gap between the two side covers 203 to the outside of the side covers 203 .

[0046] Exemplarily, two fixed plates 202 are provided, each of which is provided with the cleaning component 201, the water inlet of the cleaning component 201 is used to connect the water inlet pipe 204, the angle of the cleaning component 201 relative to the fixed plate 202 can be set to be adjustable, the two cleaning components 201 can be symmetrically distributed about the running direction of the flexible substrate 100, of course, other arrangements are not excluded, wherein the cleaning component 201 includes but is not limited to a nozzle, and the shape of the water mist sprayed by the nozzle can be fan-shaped, cylindrical or conical, etc.

[0047] In the above implementation process, fixed plates 202 are provided on opposite sides of the flexible substrate 100, and a cleaning member 201 is provided on each fixed plate 202. The flexible substrate 100 can not only run continuously at a certain linear speed, but also clean both sides of the flexible substrate 100, thereby improving efficiency and cleaning effect.

[0048] In some embodiments, the gap width between the two side covers 203 is configured to range from 1 to 3 mm, and the gap is configured for passing the flexible substrate 100 , wherein the smaller the gap width, the better, for example, the gap width is set to 1 mm, 1.5 mm or 2 mm.

[0049] In the above implementation process, by setting the gap between the side upper covers 203 to be smaller, a certain negative pressure can be formed on the inner side of the side upper cover 203 when the water absorption component 400 absorbs water, thereby preventing water leakage and avoiding the cleaning liquid from overflowing the cleaning device.

[0050] In some embodiments, the fixing plate 202 is tiltedly disposed on the inner side of the side upper cover 203, and the horizontal angle between the fixing plate 202 and the side upper cover 203 is in the range of 40°-60°, for example, the horizontal angle between the fixing plate 202 and the side upper cover 203 is set to 45°, etc., and / or the angle between the spray direction of the cleaning member 201 and the running direction of the flexible substrate 100 is in the range of 40°-60°, for example, the spray direction of the cleaning member 201 and the running direction of the flexible substrate 100 are set to 45°, etc. The cleaning effect of the cleaning member 201 on the flexible substrate 100 can be improved.

[0051] Please refer to Figure 1 The cleaning device also includes a water retaining assembly 500, which includes a first water retaining plate 501 and a second water retaining plate 502. The first water retaining plate 501 is arranged on the side of the first squeezing roller 301 away from the flexible substrate 100, and the second water retaining plate 502 is arranged on the side of the second squeezing roller 302 away from the flexible substrate 100.

[0052] Exemplarily, the first water baffle 501 and the second water baffle 502 are both configured as special-shaped plates, and the structural shapes of the first water baffle 501 and the second water baffle 502 can be set to be consistent. For example, the first water baffle 501 and the second water baffle 502 are both configured as right-angled triangles or right-angled trapezoids. Taking the right-angled trapezoid as an example, the sizes of the first water baffle 501 and the second water baffle 502 are not specifically limited. For example, the upper size of both is set to 15 mm, the lower size is set to 25 mm, and the thickness size is set to 5 mm.

[0053] It is understandable that in order to ensure that the first water baffle 501 and the second water baffle 502 are not only elastic and wear-resistant, but also have a certain hardness, the material selection of the first water baffle 501 and the second water baffle 502 includes but is not limited to nitrile rubber, natural rubber, fluororubber, silicone rubber, polyurethane, etc.

[0054] In the above-mentioned implementation process, by setting the first water baffle 501 on one side of the first water squeezing roller 301 and the second water baffle 502 on one side of the second water squeezing roller 302, liquid can be prevented from flowing out from both sides of the first water squeezing roller 301 and the second water squeezing roller 302, water leakage can be prevented, and contamination of the cleaning device and other devices can be avoided, thereby improving cleanliness.

[0055] In some embodiments, the thickness of the water retaining component 500 is in the range of 2-10 mm, and / or the length of the water retaining component 500 is in the range of 0.4-0.6 times the diameter of the water squeezing component 300, for example, the diameter of the water squeezing component 300 is set to 50 mm. This ensures that the water retaining component 500 has good elasticity, facilitates the fit between the water retaining component 500 and the water squeezing component 300, prevents water leakage, avoids contamination of the cleaning device and other devices, and improves cleanliness.

[0056] In some embodiments, the hardness of the water retaining assembly 500 is 40-70 degrees, for example, the hardness of the first water retaining plate 501 and the second water retaining plate 502 are both set to 50 degrees. Ensuring that the water retaining assembly 500 has both elasticity and a certain hardness is conducive to the fit between the water retaining assembly 500 and the water squeezing assembly 300 to prevent water leakage.

[0057] In some embodiments, the water suction component 400 includes a first water suction pipe 401, a second water suction pipe 402 and a third water suction pipe 403, the first water suction pipe 401, the second water suction pipe 402 and the third water suction pipe 403 are connected, and the water suction port of the first water suction pipe 401 is arranged on the side of the first water squeezing roller 301 away from the flexible substrate 100, the water suction port of the second water suction pipe 402 is arranged between the first water squeezing roller 301 and the second water squeezing roller 302, and the water suction port of the third water suction pipe 403 is arranged on the side of the second water squeezing roller 302 away from the flexible substrate 100.

[0058] Exemplarily, the second water suction pipe 402 is located between the first water suction pipe 401 and the third water suction pipe 403. To avoid interference of the water retaining assembly 500 with the water suction assembly 400, the bottoms of the first water suction pipe 401 and the third water suction pipe 403 may be slightly higher than the bottom of the second water suction pipe 402.

[0059] In the above implementation process, by arranging the first water suction pipe 401, the second water suction pipe 402 and the third water suction pipe 403 at different positions of the cleaning device, liquid at different positions can be sucked, which is beneficial to discharge the liquid from the cleaning device, avoiding secondary contamination of the flexible substrate 100 and the cleaning device, and improving the cleanliness.

[0060] In some embodiments, the distance between the suction port and the highest liquid level of the cleaning liquid at the squeezing roller is 5-20 mm, for example, the range is set to 10 mm. The liquid in the cleaning device can be discharged in time through the suction component 400 to prevent the liquid from overflowing the cleaning device, avoid secondary contamination of the cleaning device and the flexible substrate 100, and improve the cleaning performance.

[0061] In a second aspect, the present application also provides a process equipment, including the cleaning device as described above.

[0062] Since the process equipment provided in the second aspect includes a cleaning device, the process equipment has all the technical effects of the cleaning device, which will not be described in detail here.

[0063] In all the embodiments of the present application, "big" and "small" are relative, "more" and "less" are relative, and "up" and "down" are relative. The expressions of such relative terms are not elaborated in the embodiments of the present application.

[0064] It should be understood that the "in this embodiment", "in the embodiment of the present application" or "as an optional implementation" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present application. Therefore, "in this embodiment", "in the embodiment of the present application" or "as an optional implementation" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. Those skilled in the art should also be aware that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily required for the present application.

[0065] In the various embodiments of the present application, it should be understood that the size of the serial numbers of the above-mentioned processes does not necessarily mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0066] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A cleaning device, characterized in that: The cleaning device is used to clean the flexible substrate, wherein the cleaning device comprises: A cleaning component, comprising a cleaning member and a fixing structure, wherein the cleaning member is connected to the fixing structure, and the cleaning member sprays cleaning liquid onto the flexible substrate along a preset angle; A water squeezing assembly, comprising a first water squeezing roller and a second water squeezing roller, wherein the first water squeezing roller and the second water squeezing roller are located at the same horizontal position, and one end of the flexible substrate passes between the first water squeezing roller and the second water squeezing roller and extends to a side of the fixed structure away from the water squeezing assembly; The water absorbing component is arranged on both sides and the middle of the water squeezing component and is used for absorbing the cleaning liquid on the water squeezing component.

2. The cleaning device according to claim 1, characterized in that: The fixing structure comprises a fixing plate and a side upper cover, the fixing plate is connected to the cleaning member, the spray end of the cleaning member is arranged on a side of the fixing plate close to the water squeezing assembly, and the fixing plate is arranged on the inner side of the side upper cover.

3. The cleaning device according to claim 2, characterized in that: The fixing plates are arranged on opposite sides of the flexible substrate, each fixing plate is fixed with the cleaning piece, and after the flexible substrate is cleaned by the cleaning piece, it extends from the gap between the two side covers to the outside of the side covers.

4. The cleaning device according to claim 2 or 3, characterized in that: The width of the gap between the two side upper covers is configured to range from 1 to 3 mm.

5. The cleaning device according to claim 4, characterized in that: The fixing plate is tiltedly arranged on the inner side of the side upper cover, and the horizontal angle between the fixing plate and the side upper cover is in the range of 40°-60°, and / or the angle between the spraying direction of the cleaning part and the running direction of the flexible substrate is in the range of 40°-60°.

6. The cleaning device according to claim 1, characterized in that: The cleaning device also includes a water retaining assembly, which includes a first water retaining plate and a second water retaining plate. The first water retaining plate is arranged on the side of the first squeezing roller away from the flexible substrate, and the second water retaining plate is arranged on the side of the second squeezing roller away from the flexible substrate.

7. The cleaning device according to claim 6, characterized in that: The thickness of the water retaining component is in the range of 2-10 mm, and / or the length of the water retaining component is in the range of 0.4-0.6 times the diameter of the water squeezing component.

8. The cleaning device according to claim 7, characterized in that: The hardness of the water retaining component is 40-70 degrees.

9. The cleaning device according to claim 1 or 8, characterized in that: The water suction component includes a first water suction pipe, a second water suction pipe and a third water suction pipe, the first water suction pipe, the second water suction pipe and the third water suction pipe are connected, and the water suction port of the first water suction pipe is arranged on the side of the first water squeezing roller away from the flexible substrate, the water suction port of the second water suction pipe is arranged between the first water squeezing roller and the second water squeezing roller, and the water suction port of the third water suction pipe is arranged on the side of the second water squeezing roller away from the flexible substrate.

10. The cleaning device according to claim 9, characterized in that: The distance between the suction port and the highest liquid level of the cleaning liquid at the squeezing roller is in the range of 5-20 mm.

11. A process equipment, characterized in that: Comprising a cleaning device as described in any one of claims 1-10.

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