Feeding clamp device of cold header for producing aluminum alloy for semiconductor equipment

Abstract

The invention belongs to the field of processing of aluminum alloy for semiconductor equipment, and particularly relates to a feeding clamp device of a cold header for producing the aluminum alloy for the semiconductor equipment, which comprises a workbench, a material guide frame is welded and fixed on the side end face of the workbench, a blanking groove is formed in the workbench in a penetrating manner, and a clamp feeding assembly is mounted on the workbench; the clamp feeding assembly comprises a first fixing plate and a worm, a mounting frame is rotationally connected to the worm, a first connecting shaft is rotationally connected to the interior of the mounting frame, a worm gear and a first connecting rod are welded and fixed to the first connecting shaft, and a second connecting rod is rotationally connected to the end of the first connecting rod; the end of the second connecting rod is welded and fixed to a clamping plate, an automatic lubricating assembly is installed on the clamping plate, and the problem that in the actual working process, an existing feeding clamp device for the cold header cannot conduct automatic and stable clamping and positioning work according to workpieces of different specifications and sizes is solved.

Description

Technical Field

[0001] The invention relates to the field of aluminum alloy processing for semiconductor equipment, in particular to a feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor equipment. Background Art

[0002] Since aluminum alloys are easy to process and form, they are suitable for the manufacture of complex structures and precision parts, which is especially important for the high-precision parts required in semiconductor equipment. It can ensure the manufacture of components that meet strict dimensional requirements. Therefore, aluminum alloys are widely used in the manufacture of semiconductor equipment. In the manufacturing process of semiconductor equipment, in order to ensure the high precision and quality requirements of parts, aluminum alloys for semiconductor equipment need to be formed using cold heading machines. During the operation of the cold heading machine, in order to ensure that the workpiece can be stably clamped and fed during the processing, a feeding clamp device needs to be used in conjunction.

[0003] However, there are some problems in the actual working process of the existing feeding clamp equipment for cold heading machines. For example, a clamp device for cold heading machines for hardware accessories of industrial automation equipment with publication number CN108856622B can stably clamp the workpiece during work, but it cannot automatically and stably clamp and position workpieces of different sizes during work, so the workpiece is very likely to have position deviation during the feeding process; since the aluminum alloy parts in semiconductor equipment require high precision and quality requirements, the position deviation of the workpiece during the feeding process is very likely to cause errors in the processing of aluminum alloy parts or unqualified products, and the practicality is poor; and the existing feeding clamp equipment for cold heading machines cannot automatically lubricate the aluminum alloy blank during actual work, so the aluminum alloy blank is very likely to cause the surface of the aluminum alloy workpiece to be scratched or even damaged during the subsequent cold heading process, so it is necessary to provide a feeding clamp device for a cold heading machine for producing aluminum alloy for semiconductor equipment to meet the needs of users. Summary of the invention

[0004] The present invention is proposed in view of the problems existing in the feed clamp device of the existing cold heading machine for producing aluminum alloy for semiconductor devices.

[0005] To solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions: a feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor equipment, comprising a workbench, a material guide frame is welded and fixed on the side end surface of the workbench, a first return spring is welded and fixed on the material guide frame, a baffle plate is welded and fixed on the other end of the first return spring, a material discharge trough is opened through the workbench, a clamp feeding assembly is installed on the workbench, the clamp feeding assembly comprises a first fixed plate and a worm, a mounting frame is rotatably connected to the worm, a first connecting shaft is rotatably connected in the mounting frame, a worm gear and a first connecting rod are welded and fixed on the first connecting shaft, The end of the first connecting rod is rotatably connected to the second connecting rod, the second connecting rod is rotatably connected to the third connecting rod, the end of the second connecting rod is welded and fixed on the clamping plate, an automatic lubrication assembly is installed on the clamping plate, the automatic lubrication assembly includes a second receiving groove and a transfer frame, a liquid storage frame is welded and fixed on the top surface of the transfer frame, the bottom of the liquid storage frame is connected to the first connecting pipe, the bottom of the first connecting pipe is connected to the top of the transfer frame, a support plate is welded and fixed on the inner wall of the transfer frame, a first connecting spring is welded and fixed on the top surface of the support plate, a first rubber ball is fixedly connected to the top of the first connecting spring, and a protective frame is welded and fixed on the bottom surface of the workbench.

[0006] As a preferred solution of the present invention, the worm is connected to the middle part of the mounting frame, the bottom end surface of the mounting frame fits with the top end surface of the workbench, the worm wheel is symmetrically distributed on both sides of the worm, the worm wheel corresponds one-to-one with the first connecting rod through the first connecting shaft, the first connecting rod corresponds one-to-one with the second connecting rod, the third connecting rod and the clamping plate respectively, and the first connecting rod is parallel to the third connecting rod.

[0007] As a preferred scheme of the present invention, wherein: the first fixed plate is welded and fixed on the top surface of the workbench, the first fixed plate is rotatably connected to the first reciprocating screw, one end of the first reciprocating screw is connected to a transmission belt, a sliding block is threadedly connected to the first reciprocating screw, the sliding block is rotatably connected to the worm, the worm wheel is meshingly connected to the worm, a circular gear is welded and fixed to the worm, the bottom of the transmission belt is connected to the second reciprocating screw, the second reciprocating screw is rotatably connected in the protective frame, and the shape and size of the first reciprocating screw are the same as those of the second reciprocating screw.

[0008] As a preferred scheme of the present invention, wherein: a first receiving groove is opened in the clamping plate, a second connecting shaft is rotatably connected in the first receiving groove, a positioning plate is welded and fixed on the second connecting shaft, a first one-way threaded rod is threadedly connected to the clamping plate, an end of the first one-way threaded rod is rotatably connected to a rotating plate, a limiting block is hinged on the rotating plate, the limiting block is slidably connected to the positioning plate, the first receiving grooves are symmetrically distributed on both sides of the clamping plate, the first receiving grooves correspond one-to-one with the positioning plate through the second connecting shaft, and the positioning plate corresponds one-to-one with the first one-way threaded rod through the limiting block.

[0009] As a preferred solution of the present invention, wherein: a sliding plate is threadedly connected to the second reciprocating screw, a second fixed plate is welded and fixed to the top end surface of the sliding plate, a guide rod and a second return spring are welded and fixed to the side end surface of the second fixed plate, a guide block is welded and fixed to the other end of the second return spring, the guide block is slidably connected to the guide rod, a support rod is hinged to the top end of the guide block, a mounting plate is hinged to the top end of the support rod, a rack is welded and fixed to the mounting plate, the rack is meshed with a circular gear, and the mounting plate is slidably connected to the workbench.

[0010] As a preferred solution of the present invention, the second reciprocating screw is connected to the middle part of the sliding plate, the outer wall of the sliding plate is in contact with the inner wall of the protective frame, the guide rod is located directly below the mounting plate, and the second return spring is symmetrically distributed on both sides of the guide rod, and the second return spring corresponds to the guide block and the support rod one by one respectively.

[0011] As a preferred solution of the present invention, wherein: the second receiving groove is opened on the clamping plate, a plug rod is slidably connected through the clamping plate, a push plate is welded and fixed to one end of the plug rod, and a rubber piston is fixedly connected to the other end of the plug rod, the clamping plate is made of mesh material, the clamping plate is welded and fixed to the transfer frame, the plug rod is connected to the center part of the clamping plate, one end of the plug rod is fixedly connected to the middle part of the push plate, the other end of the plug rod is fixedly connected to the middle part of the rubber piston, and the rubber piston is slidably connected in the transfer frame.

[0012] As a preferred solution of the present invention, wherein: the bottom of the transfer frame is connected to a second connecting tube, the bottom of the second connecting tube is connected to a first conveying tube, a fixed mesh plate is welded and fixed in the first conveying tube, a second connecting spring is welded and fixed on the top surface of the fixed mesh plate, a second rubber ball is fixedly connected to the top of the second connecting spring, the bottom of the first conveying tube is connected to a second conveying tube, the end of the second conveying tube is connected to a first liquid guide tube, a first atomizing nozzle is installed on the first liquid guide tube, the first liquid guide tube is fixedly connected in the clamping plate, a rubber hose is connected to the first liquid guide tube, the top of the rubber hose is connected to a second liquid guide tube, the second liquid guide tube is fixedly connected in the positioning plate, and a second atomizing nozzle is installed on the second liquid guide tube.

[0013] As a preferred solution of the present invention, the diameter of the second connecting tube is the same as that of the first connecting tube, the shape and size of the first rubber ball are the same as those of the second rubber ball, the diameter of the second rubber ball is larger than the diameter of the second connecting tube, the second delivery tube is connected to the middle part of the first liquid guide tube, the first atomizing nozzles are equidistantly distributed on both sides of the first liquid guide tube, the second atomizing nozzles are equidistantly distributed on the second liquid guide tube, the side end face of the first atomizing nozzle is flush with the side end face of the clamping plate, and the side end face of the second atomizing nozzle is flush with the side end face of the positioning plate.

[0014] As a preferred scheme of the present invention, wherein: a second one-way threaded rod is rotatably connected to the side end face of the protective frame, a connecting plate is threadedly connected to the second one-way threaded rod, a guide plate is welded and fixed on the connecting plate, the guide plate is slidably connected to the side end of the protective frame, the second one-way threaded rod is symmetrically distributed on both sides of the protective frame, the second one-way threaded rod corresponds to the guide plate one by one through the connecting plate, the second one-way threaded rod is connected to the middle part of the top of the connecting plate, the cross-section of the guide plate is an isosceles trapezoid, the height of the bottom end face of the guide plate is higher than the height of the top end face of the guide rod, and the height of the bottom end face of the guide plate is lower than the height of the top end face of the guide block.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention is provided with a clamp feeding assembly, and the first reciprocating screw rod and the second reciprocating screw rod can be used to install the frame and the sliding plate to move synchronously. At this time, under the guiding and pushing action of the guide plate, the rack can be pushed to move automatically upward through the guide block and the support rod, and the circular gear can drive the worm gear to rotate automatically, and then the second connecting rod and the third connecting rod on both sides can drive the corresponding clamping plate to move toward the middle at the same time, so that the aluminum alloy blank for semiconductor equipment can be automatically clamped; and through the rotation of the first unidirectional threaded rods on both sides, the corresponding positioning plate can be pushed to rotate toward the middle, so that the clamping plate can automatically and stably clamp and center the aluminum alloy blank in all directions with the positioning plates on both sides; and after the aluminum alloy blank is stably clamped, it can move synchronously with the installation frame to complete the subsequent automatic positioning and feeding work; ensure that the aluminum alloy blank can be automatically and accurately fed to the required position in the internal mold of the cold heading machine, ensure the stability and consistency of each processing, avoid processing errors or unqualified products due to position changes, increase the accuracy and stability of the use of the feeding clamp device; and improve the practicality and applicability of the feeding clamp device.

[0017] 2. The present invention is provided with an automatic lubrication component. When the aluminum alloy blank is clamped by the clamping plate, the aluminum alloy blank can automatically push the push plate, and then can automatically push the lubricant into the first liquid guide tube and the second liquid guide tube. In conjunction with each first atomizing nozzle and each second atomizing nozzle, the aluminum alloy blank can be automatically and stably sprayed in all directions, thereby reducing the friction between the aluminum alloy blank and the internal mold of the cold heading machine, thereby reducing wear and heat generation, extending the service life of the internal mold of the cold heading machine, and protecting the surface of the aluminum alloy workpiece from scratches and damage, and reducing energy consumption during processing, reducing the risk of clamping or jamming, thereby improving production efficiency and processing quality.

[0018] 3. The present invention is provided with a guide plate, and the second one-way threaded rod can be used to drive the threaded connecting plate to move stably. The rotation of the second one-way threaded rods on both sides can drive the guide plates on both sides to move toward the middle or both sides. The movement of the guide plate can be used to conveniently adjust the guide pushing distance of the guide block. By adjusting the movement distance of the guide block, the movement distance of the rack can be adjusted, and then the movement distance of the clamping plates on both sides can be conveniently adjusted, so that the feeding clamp device can conveniently and stably clamp and position aluminum alloy billets of different specifications and sizes, thereby improving the practicality and applicability of the feeding clamp device.

[0019] 4. The present invention is provided with a material baffle plate. When the mounting frame drives the clamping plate to move to the material guide frame, the material baffle plate can be pushed to automatically move away from the material guide frame, so that the aluminum alloy billet on the material guide frame can stably move between the clamping plates on both sides, ensuring the convenience of subsequent clamping and loading work. Similarly, the feeding clamp can move away from the material baffle plate during the process of clamping and feeding the aluminum alloy billet. At this time, the material baffle plate can automatically reset under the elastic action of the first reset spring and block the material guide frame to avoid the next aluminum alloy billet from deviating during the transportation process, resulting in its premature unloading and deviation from the clamp feeding assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below in combination with the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0021] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0022] Figure 2 It is a schematic diagram of the connection structure between the transmission belt and the second reciprocating screw rod of the present invention;

[0023] Figure 3 It is a schematic diagram of the main cross-sectional structure of the protection frame of the present invention;

[0024] Figure 4 The present invention Figure 3 The enlarged structural diagram at A in the middle;

[0025] Figure 5 It is a schematic diagram of the overall top view of the structure of the present invention;

[0026] Figure 6 It is a schematic diagram of the top-sectional structure of the installation frame of the present invention;

[0027] Figure 7 It is a schematic diagram of the main cross-sectional structure of the installation frame of the present invention;

[0028] Figure 8 It is a schematic diagram of the top-sectional structure of the protection frame of the present invention;

[0029] Fig. 9 It is a schematic diagram of the top view structure of the guide block of the present invention;

[0030] Fig.10 It is a schematic diagram of the side view structure of the rack of the present invention;

[0031] Fig.11 It is a schematic diagram of the top-sectional structure of the clamping plate of the present invention;

[0032] Fig.12 The present invention Fig.11 The enlarged structural diagram at B in the middle;

[0033] Fig.13 is a schematic diagram of the top view of the structure of the first liquid guide tube of the present invention;

[0034] Fig.14 It is a schematic diagram of the top-sectional structure of the positioning plate of the present invention;

[0035] Fig.15 It is a schematic diagram of the side section structure of the clamping plate of the present invention;

[0036] Fig.16 It is a schematic diagram of the side section structure of the transfer frame of the present invention;

[0037] Fig.17 It is a schematic diagram of the structure of the first rubber ball of the present invention.

[0038] In the figure: 1, workbench; 2, material guide frame; 3, first return spring; 4, material blocking plate; 5, material trough; 6, clamp feeding assembly; 601, first fixed plate; 602, first reciprocating screw rod; 603, servo motor; 604, sliding block; 605, worm; 606, circular gear; 607, mounting frame; 608, first connecting shaft; 609, worm gear; 610, first connecting rod; 611, second connecting rod; 612, third connecting rod; 613, clamping plate; 614, first receiving groove; 615, second connecting shaft; 616, positioning plate; 617, first one-way threaded rod; 618, rotating plate; 619, limit block; 620, transmission belt; 621, second reciprocating screw rod; 622, sliding plate; 623, second fixed plate; 624, guide rod; 625, second return spring; 626, guide block; 627, support rod; 628, mounting plate; 629, rack; 7, automatic lubrication assembly; 701, second storage slot; 702, plug rod; 703, push plate; 704, third return spring; 705, rubber piston; 706, transfer frame; 707, liquid storage frame; 708, fixed tube; 709, first connecting tube; 710, support plate; 711, first connecting spring; 712, first rubber ball; 713, second connecting tube; 714, first delivery tube; 715, fixed mesh plate; 716, second connecting spring; 717, second rubber ball; 718, second delivery tube; 719, first liquid guide tube; 720, first atomizing nozzle; 721, rubber hose; 722, second liquid guide tube; 723, second atomizing nozzle; 8, protection frame; 9, second one-way threaded rod; 10, connecting plate; 11, guide plate. DETAILED DESCRIPTION

[0039] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0040] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0041] Secondly, the present invention is described in detail with reference to schematic diagrams. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0042] Example

[0043] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0044] like Figure 1-17As shown, a feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor equipment includes a workbench 1, a material guide frame 2 is welded and fixed on the side end surface of the workbench 1, a first return spring 3 is welded and fixed on the material guide frame 2, a material blocking plate 4 is welded and fixed on the other end of the first return spring 3, a material discharge trough 5 is opened through the workbench 1, a clamp feeding assembly 6 is installed on the workbench 1, and the clamp feeding assembly 6 includes a first fixed plate 601 and a worm 605, a mounting frame 607 is rotatably connected to the worm 605, and a first connecting shaft 608 is rotatably connected inside the mounting frame 607 A worm gear 609 and a first connecting rod 610 are welded and fixed on the first connecting shaft 608, the end of the first connecting rod 610 is rotatably connected to the second connecting rod 611, the second connecting rod 611 is rotatably connected to the third connecting rod 612, the other end of the third connecting rod 612 is rotatably connected in the installation frame 607, the second connecting rod 611 penetrates and is slidably connected to the side end of the installation frame 607, the end of the second connecting rod 611 is welded and fixed on the clamping plate 613, the clamping plate 613 is installed with an automatic lubrication component 7, and the automatic lubrication component 7 includes a second receiving groove 701 The top surface of the transfer frame 706 is welded with a liquid storage frame 707, the bottom of the liquid storage frame 707 is connected to a first connecting pipe 709, the bottom of the first connecting pipe 709 is connected to the top of the transfer frame 706, a support plate 710 is welded and fixed on the inner wall of the transfer frame 706, a first connecting spring 711 is welded and fixed on the top surface of the support plate 710, and a first rubber ball 712 is fixedly connected to the top of the first connecting spring 711, and a protective frame 8 is welded and fixed on the bottom surface of the workbench 1. The aluminum alloy blank can be automatically fed by the clamp feeding assembly 6. Dynamically stable all-round clamping and center positioning work; and after the aluminum alloy billet is stably clamped, it can move synchronously with the installation frame 607 to complete the subsequent automatic positioning and feeding work; ensure that the aluminum alloy billet can be automatically and accurately fed to the required position in the internal mold of the cold heading machine, ensuring the stability and consistency of each processing; and combined with the automatic lubrication component 7, it can automatically and stably spray the aluminum alloy billet in all directions, reduce the friction between the aluminum alloy billet and the internal mold of the cold heading machine, thereby reducing wear and heat generation, and extending the service life of the internal mold of the cold heading machine.

[0045] In this embodiment, the length of the baffle plate 4 is equal to the width of the material guide frame 2, the material guide frame 2 is inclined, the bottom end surface of the baffle plate 4 is in contact with the top end surface of the workbench 1, the inner bottom end surface of the end of the material guide frame 2 is flush with the top end surface of the workbench 1, the baffle plate 4 is in contact with the clamping plate 613, and when the mounting frame 607 drives the clamping plate 613 to move to the material guide frame 2, it can push the baffle plate 4 to automatically move away from the material guide frame 2, so that the aluminum alloy billet on the material guide frame 2 can stably move between the clamping plates 613 on both sides, ensuring the convenience of subsequent clamping and loading work. Similarly, the feeding clamp can move away from the baffle plate 4 during the process of clamping and feeding the aluminum alloy billet. At this time, the baffle plate 4 can automatically reset under the elastic action of the first reset spring 3, and block the material guide frame 2 to avoid the next aluminum alloy billet from deviating during the transportation process, causing it to be unloaded in advance and deviate from the clamp feeding assembly 6.

[0046] In this embodiment, the worm 605 is connected to the middle part of the mounting frame 607, the bottom end surface of the mounting frame 607 is fitted with the top end surface of the workbench 1, and the worm gear 609 is symmetrically distributed on both sides of the worm 605. The worm gear 609 corresponds one-to-one with the first connecting rod 610 through the first connecting shaft 608. The first connecting rod 610 corresponds one-to-one with the second connecting rod 611, the third connecting rod 612 and the clamping plate 613 respectively. The first connecting rod 610 is parallel to the third connecting rod 612. The meshing drive of the worm 605 and the worm gear 609 drives the corresponding clamping plates 613 to move toward the middle at the same time through the second connecting rod 611 and the third connecting rod 612 on both sides, so that the aluminum alloy blanks used for semiconductor equipment can be automatically clamped.

[0047] In this embodiment, the first fixed plate 601 is welded and fixed on the top surface of the workbench 1, and the first fixed plate 601 is rotatably connected with the first reciprocating screw rod 602, one end of the first reciprocating screw rod 602 is connected to the output end of the servo motor 603, and the servo motor 603 is welded and fixed on the first fixed plate 601. The other end of the first reciprocating screw rod 602 is connected with a transmission belt 620, and the first reciprocating screw rod 602 is threadedly connected with a sliding block 604, and the sliding block 604 is rotatably connected with the worm 605, and the worm wheel 609 is meshed with the worm 605. The bottom end surface of the sliding block 604 The worm 605 is welded and fixed with a circular gear 606, the bottom of the transmission belt 620 is connected with a second reciprocating screw 621, the second reciprocating screw 621 is rotatably connected in the protective frame 8, the shape and size of the first reciprocating screw 602 are the same as those of the second reciprocating screw 621, a sliding plate 622 is threadedly connected to the second reciprocating screw 621, a second fixed plate 623 is welded and fixed to the top surface of the sliding plate 622, a guide rod 624 and a second return spring 625 are welded and fixed to the side end surface of the second fixed plate 623, and the second return spring 625 is welded and fixed to the side end surface of the second fixed plate 623. The other end of the spring 625 is welded and fixed with a guide block 626, which is slidably connected to the guide rod 624, and the top of the guide block 626 is hinged with a support rod 627, and the top of the support rod 627 is hinged with a mounting plate 628, and a rack 629 is welded and fixed on the mounting plate 628, and the rack 629 is meshed and connected with the circular gear 606, and the mounting plate 628 is slidably connected to the workbench 1, and the second reciprocating screw 621 is connected to the middle part of the sliding plate 622, and the outer wall of the sliding plate 622 is in contact with the inner wall of the protective frame 8, and the guide rod 624 is located on the mounting plate 6 28, the second return spring 625 is symmetrically distributed on both sides of the guide rod 624, and the second return spring 625 corresponds to the guide block 626 and the support rod 627 one by one. The first reciprocating screw 602 and the second reciprocating screw 621 can be used to install the frame 607 and the sliding plate 622 to move synchronously. At this time, under the guiding and pushing action of the guide plate 11, the guide block 626 and the support rod 627 can push the rack 629 to automatically move upward, and the circular gear 606 can drive the worm gear 609 to rotate automatically, thereby ensuring the automatic stability of the subsequent clamping and positioning work.

[0048] In this embodiment, a first receiving groove 614 is provided in the clamping plate 613, and a second connecting shaft 615 is rotatably connected in the first receiving groove 614. A positioning plate 616 is welded and fixed on the second connecting shaft 615. A first one-way threaded rod 617 is threadedly connected to the clamping plate 613, and a rotating plate 618 is rotatably connected to the end of the first one-way threaded rod 617. A limiting block 619 is hinged on the rotating plate 618, and the limiting block 619 is slidably connected to the positioning plate 616. The first receiving grooves 614 are symmetrically distributed on both sides of the clamping plate 613. The groove 614 corresponds one-to-one with the positioning plate 616 through the second connecting shaft 615, and the positioning plate 616 corresponds one-to-one with the first one-way threaded rod 617 through the limit block 619. Through the rotation of the first one-way threaded rod 617 on both sides, the corresponding positioning plate 616 can be pushed to rotate toward the middle, so that the clamping plate 613 cooperates with the positioning plates 616 on both sides to automatically and stably clamp and center the aluminum alloy billet in all directions; and after the aluminum alloy billet is stably clamped, it can move synchronously with the installation frame 607 to complete the subsequent automatic positioning and feeding work.

[0049] In this embodiment, the second receiving groove 701 is provided on the clamping plate 613, and a plug rod 702 is slidably connected to the clamping plate 613, one end of the plug rod 702 is welded and fixed with a push plate 703, the other end of the plug rod 702 is fixedly connected with a rubber piston 705, the rubber piston 705 is fixedly connected with a third return spring 704, the other end of the third return spring 704 is fixedly connected to the clamping plate 613, the clamping plate 613 is made of a mesh plate, a transfer frame 706 is welded and fixed to the clamping plate 613, the rubber piston 705 is limitedly slidably connected in the transfer frame 706, and the top of the liquid storage frame 707 is connected with a fixed pipe 708, a solenoid valve is installed on the fixed tube 708, a plug rod 702 is connected to the center of the clamping plate 613, one end of the plug rod 702 is fixedly connected to the middle part of the push plate 703, and the other end of the plug rod 702 is fixedly connected to the middle part of the rubber piston 705, the outer wall of the rubber piston 705 is in contact with the inner wall of the transfer frame 706, the bottom of the transfer frame 706 is connected to the second connecting tube 713, the bottom of the second connecting tube 713 is connected to the first delivery tube 714, a fixed mesh plate 715 is welded and fixed in the first delivery tube 714, and a second connecting spring 715 is welded and fixed on the top surface of the fixed mesh plate 715 6. The top of the second connecting spring 716 is fixedly connected with a second rubber ball 717. The bottom of the first delivery tube 714 is connected with a second delivery tube 718. The end of the second delivery tube 718 is connected with a first liquid guide tube 719. The first liquid guide tube 719 is equipped with a first atomizing nozzle 720. The first liquid guide tube 719 is fixedly connected in the clamping plate 613. The first liquid guide tube 719 is connected with a rubber hose 721. The top of the rubber hose 721 is connected with a second liquid guide tube 722. The second liquid guide tube 722 is fixedly connected in the positioning plate 616. The second liquid guide tube 722 is equipped with a second atomizing nozzle 723. The aluminum alloy When the aluminum alloy blank is clamped by the clamping plate 613, the aluminum alloy blank can automatically push the push plate 703, and then automatically push the lubricant into the first liquid guide tube 719 and the second liquid guide tube 722. In conjunction with the first atomizing nozzles 720 and the second atomizing nozzles 723, the aluminum alloy blank can be automatically and stably sprayed in all directions, reducing the friction between the aluminum alloy blank and the internal mold of the cold heading machine, thereby reducing wear and heat generation, extending the service life of the internal mold of the cold heading machine, and protecting the surface of the aluminum alloy workpiece from scratches and damage, reducing energy consumption during processing, and reducing the risk of clamping or jamming.

[0050] In this embodiment, the diameter of the second connecting tube 713 is the same as the diameter of the first connecting tube 709, the shape and size of the first rubber ball 712 are the same as the shape and size of the second rubber ball 717, the diameter of the second rubber ball 717 is larger than the diameter of the second connecting tube 713, the second delivery tube 718 is connected to the middle part of the first liquid guide tube 719, the first atomizing nozzles 720 are equidistantly distributed on both sides of the first liquid guide tube 719, the second atomizing nozzles 723 are equidistantly distributed on the second liquid guide tube 722, the side end surface of the first atomizing nozzle 720 is flush with the side end surface of the clamping plate 613, and the side end surface of the second atomizing nozzle 723 is flush with the side end surface of the positioning plate 616. By using each first atomizing nozzle 720 and each second atomizing nozzle 723, the lubricant can be automatically sprayed on the front and rear end surfaces and the left and right end surfaces of the aluminum alloy billet, respectively, so that the all-round lubrication treatment of the aluminum alloy billet can be automatically and efficiently completed, and the working efficiency of the feeding clamp device is effectively improved.

[0051] In this embodiment, a second one-way threaded rod 9 is rotatably connected to the side end face of the protective frame 8, a connecting plate 10 is threadedly connected to the second one-way threaded rod 9, a guide plate 11 is welded and fixed to the connecting plate 10, the guide plate 11 penetrates and is slidably connected to the side end of the protective frame 8, the second one-way threaded rod 9 is symmetrically distributed on both sides of the protective frame 8, the second one-way threaded rod 9 corresponds one-to-one with the guide plate 11 through the connecting plate 10, the second one-way threaded rod 9 is connected to the middle part of the top of the connecting plate 10, the cross-section of the guide plate 11 is an isosceles trapezoid, the height of the bottom end face of the guide plate 11 is higher than the height of the top end face of the guide rod 624, and the height of the bottom end face of the guide plate 11 is lower than The height of the top surface of the guide block 626 can be driven by the second one-way threaded rod 9 to drive the threaded connecting plate 10 to move stably. The rotation of the second one-way threaded rod 9 on both sides can drive the guide plates 11 on both sides to move toward the middle or both sides. The movement of the guide plate 11 can be used to conveniently adjust the guiding pushing distance of the guide block 626. By adjusting the movement distance of the guide block 626, the movement distance of the rack 629 can be adjusted, and then the movement distance of the clamping plates 613 on both sides can be conveniently adjusted, so that the feeding clamp device can conveniently and stably clamp and position aluminum alloy billets of different specifications and sizes.

[0052] It should be noted that the present invention is a feeding clamp device for a cold heading machine for producing aluminum alloy for semiconductor equipment. First, before the device starts working, it is necessary to align the feed trough 5 on the workbench 1 with the lower mold cavity of the internal mold of the cold heading machine, and then the device can be welded to the cold heading machine as a whole. After the device is installed as a whole, the staff will place the aluminum alloy blank to be fed on the guide frame 2. At this time, under the inclined guiding action of the guide frame 2, the aluminum alloy blank can be automatically transported to the workbench 1 through the guide frame 2 under the action of its own gravity, and the aluminum alloy blank can fall stably to the workbench 1. The servo motor 603 is driven to drive the first reciprocating screw 602 to rotate stably on the first fixed plate 601. The continuous rotation of the first reciprocating screw 602 can drive the threaded sliding block 604 to move toward the lower material trough 5. The movement of the sliding block 604 can drive the mounting frame 607 to move synchronously through the worm 605. At the same time, during the rotation of the first reciprocating screw 602, the transmission belt 620 can drive the second reciprocating screw 621 to rotate synchronously, thereby The sliding plate 622 having the same width as the sliding block 604 is driven to move synchronously. During the movement of the sliding plate 622, the guide blocks 626 on both sides of the second fixed plate 623 can be driven to move to contact the inclined surfaces of the guide plates 11 on both sides. Under the guiding action of the inclined surfaces of the guide plates 11 on both sides, the guide blocks 626 on both sides can be pushed to move toward the middle at the same time. Under the movement action of the guide blocks 626 on both sides, the support rod 627 on the top can push the mounting plate 628 in the translation process to move upward automatically, thereby pushing the rack 629 in the translation process to move upward automatically. The worm 605 can be driven to rotate automatically by the meshing circular gear 606 under the action of the movement of the rack 629. The worm 605 can drive the meshing worm wheels 609 on both sides to rotate toward the middle at the same time. At this time, the worm wheels 609 on both sides can drive the corresponding first connecting rods 610 to rotate toward the middle at the same time through the first connecting shaft 608. During the rotation of the first connecting rod 610, under the traction of the third connecting rod 612, the corresponding clamping plates 613 can be driven to translate toward the middle at the same time through the second connecting rods 611 on both sides.

[0053] Under the movement of the installation frame 607, the aluminum alloy blank can be moved synchronously by the clamping plate 613, and during the movement of the installation frame 607, the aluminum alloy blank can be automatically and stably clamped and fixed under the movement of the clamping plates 613 on both sides; before the feeding clamp device starts working, the staff can rotate the second one-way threaded rods 9 on both sides of the protection frame 8, and use the rotation of the second one-way threaded rods 9 on both sides to drive the corresponding guide plates 11 to move to the middle or both sides through the threaded connection plate 10, and use the movement of the guide plate 11 to adjust the distance of pushing the guide block 626, and by adjusting the position of the guide plates 11 on both sides, the pushing distance of the inclined surface of the guide plate 11 for the guide block 626 can be adjusted; when the guide block 626 moves to the side end plane and the rack 629 stops moving upward, the rack 629 drives the worm 605, which can just enable the clamping plates 613 on both sides to clamp and fix the aluminum alloy blank;

[0054] Before the feeding clamp device starts working, the staff can rotate the first one-way threaded rod 617 on both sides of the clamping plate 613. Under the action of the thread rotation of the first one-way threaded rod 617, the rotating plate 618 connected by the end rotation can push the hinged limit block 619 to move, and then can push the positioning plate 616 on the second connecting shaft 615 to rotate stably. By adjusting the inclination angle of the positioning plates 616 on both sides of the clamping plate 613, when the clamping plates 613 on both sides clamp and fix the aluminum alloy billet, each positioning plate 616 can further clamp and extrude the lateral position of the aluminum alloy billet, so that the aluminum alloy billet can be automatically clamped in the middle part between the clamping plates 613 on both sides;

[0055] After being clamped and positioned, the aluminum alloy blank can continue to move with the sliding block 604 and the mounting frame 607 until the aluminum alloy blank moves to the top of the feed chute 5. When the aluminum alloy blank moves to the top of the feed chute 5, the guide block 626 moves to the inclined surface on the other side of the guide plate 11. At this time, under the elastic action of the second return spring 625, the guide blocks 626 on both sides can be driven to automatically move to the side for a distance. Under the reverse movement of the guide blocks 626 on both sides, the mounting plate 11 can be driven through the support rod 627. The rack 629 on 628 automatically moves downward for a distance, thereby driving the meshing circular gear 606 to rotate in the opposite direction, thereby driving the worm 605 to rotate in the opposite direction. Under the reverse rotation of the worm 605, the clamping plates 613 on both sides can be driven to move away from the aluminum alloy blank through the worm wheels 609 on both sides and the corresponding first connecting rods 610 and second connecting rods 611. At this time, the aluminum alloy blank can automatically fall into the lower mold cavity in the cold heading machine directly below through the feeding chute 5, completing the automatic feeding work;

[0056] Subsequently, under the continued rotation of the first reciprocating screw rod 602 and the second reciprocating screw rod 621, the mounting frame 607 and the sliding plate 622 can synchronously move in the opposite direction and reset. After the mounting frame 607 and the sliding plate 622 move and reset, the sliding plate 622 can drive the guide block 626 on the guide rod 624 to move away from the guide plate 11. At this time, under the elastic action of the second reset spring 625, the guide blocks 626 on both sides can be driven to automatically move and reset, and then the rack 629 on the mounting plate 628 can be driven by the support rod 627 to automatically move downward and reset. Similarly, under the movement of the rack 629, the worm 605 is driven to rotate in the opposite direction through the circular gear 606, thereby driving the clamping plates 613 on both sides to move and reset. When the clamping plates 613 move and reset, the material blocking plate 4 can be pushed to automatically move away from the material guide. Frame 2, so that the aluminum alloy blank on the material guide frame 2 can stably move to between the clamping plates 613 on both sides, ensuring the convenience of subsequent clamping and feeding work. Similarly, the feeding clamp can move away from the baffle plate 4 during the process of clamping and feeding the aluminum alloy blank. At this time, the baffle plate 4 can automatically reset under the elastic action of the first reset spring 3 and block the material guide frame 2 to avoid the next aluminum alloy blank from deviating during the transportation process, causing it to be unloaded in advance and deviating from the clamp feeding assembly 6; this reciprocating process can automatically complete the automatic clamping and positioning feeding of the aluminum alloy blank for semiconductor equipment, ensuring that the aluminum alloy blank can be automatically and accurately fed to the required position in the internal mold of the cold heading machine, ensuring the stability and consistency of each processing, and avoiding the problem of processing errors or unqualified products due to position changes;

[0057] After the aluminum alloy blank is unloaded and separated from the clamping plate 613, the push plate 703 loses its blocking force. At this time, under the elastic action of the third reset spring 704, the push plate 703 on the plug rod 702 can be automatically moved outward and reset through the rubber piston 705. At this time, under the movement of the rubber piston 705, a negative pressure can be formed inside the transfer frame 706. At this time, under the action of the negative pressure inside the transfer frame 706, a force can be generated on the first rubber ball 712 and the second rubber ball 717 to move toward the inside of the transfer frame 706. The second rubber ball 717 will not move under the blocking action of the second connecting pipe 713, and the second rubber ball 717 will not move. The rubber ball 717 can perform a stable sealing operation on the second connecting tube 713, and the first rubber ball 712 will move downward. At this time, under the action of the movement of the first rubber ball 712, it can be separated from the first connecting tube 709. At this time, the lubricant in the liquid storage frame 707 can be automatically transported to the transfer frame 706 through the first connecting tube 709; and when the rubber piston 705 stops moving, the negative pressure suction force disappears. At this time, under the elastic action of the first connecting spring 711 on the supporting plate 710, the first rubber ball 712 can be driven to automatically move upward and reset, and the first connecting tube 709 is blocked to prevent excessive delivery of lubricant;

[0058] When the clamping plate 613 clamps and fixes the aluminum alloy blank, the aluminum alloy blank can squeeze the push plate 703 and move it into the second receiving groove 701 to avoid adverse effects on the subsequent clamping work. Under the movement of the push plate 703, the plug rod 702 can push the rubber piston 705 to move into the transfer frame 706 and squeeze the air inside the transfer frame 706. The air pressure inside the transfer frame 706 increases. At this time, under the action of the air pressure inside the transfer frame 706, an upward force can be generated on the first rubber ball 712. However, under the blocking action of the first connecting pipe 709, the first rubber ball 712 will not move, and the first connecting pipe 709 can be stably sealed. At the same time, the air pressure inside the transfer frame 706 can generate a downward force on the second rubber ball 717, thereby pushing the second rubber ball 717 to move downward. At this time, the lubricant in the transfer frame 706 can pass through the second connecting pipe 713 and the first The delivery pipe 714 and the second delivery pipe 718 are stably delivered to the first liquid guide pipe 719. At this time, the first liquid guide pipe 719 can spray the front and rear end faces of the stably clamped aluminum alloy blank through each first atomizing nozzle 720. Then, the lubricant delivered from the middle of the first liquid guide pipe 719 can be delivered to both sides of the first liquid guide pipe 719, and delivered to the second liquid guide pipe 722 in the two positioning plates 616 through the rubber hoses 721 on both sides. At this time, under the action of each second atomizing nozzle 723 on the second liquid guide pipe 722, the left and right end faces of the aluminum alloy blank can be sprayed. By lubricating the outer end face of the aluminum alloy blank, the friction between the aluminum alloy blank and the internal mold of the cold heading machine can be reduced, thereby reducing wear and heat generation, extending the service life of the internal mold of the cold heading machine, and protecting the surface of the aluminum alloy workpiece from scratches and damage, and reducing energy consumption during processing, reducing the risk of clamping or jamming, thereby improving production efficiency and processing quality;

[0059] Similarly, after the aluminum alloy billet is clamped stably, the push plate 703 and the rubber piston 705 stop moving. At this time, under the elastic action of the second connecting spring 716, the second rubber ball 717 can be driven to automatically move upward and reset, ensuring the stability of its subsequent repeated working state. This reciprocating process can automatically complete the lubrication treatment of the outer end surface of the aluminum alloy billet during the clamping process of each aluminum alloy billet.

[0060] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced by equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A feeding clamp device for a cold heading machine for producing aluminum alloy for semiconductor equipment, comprising a workbench (1), characterized in that: A material guide frame (2) is welded and fixed on the side end surface of the workbench (1), a first return spring (3) is welded and fixed on the material guide frame (2), a material blocking plate (4) is welded and fixed on the other end of the first return spring (3), a material discharge trough (5) is opened through the workbench (1), a clamp feeding assembly (6) is installed on the workbench (1), the clamp feeding assembly (6) comprises a first fixed plate (601) and a worm (605), a mounting frame (607) is rotatably connected to the worm (605), a first connecting shaft (608) is rotatably connected inside the mounting frame (607), a worm wheel (609) and a first connecting rod (610) are welded and fixed on the first connecting shaft (608), a second connecting rod (611) is rotatably connected to the end of the first connecting rod (610), and a third connecting rod (611) is rotatably connected to the second connecting rod (611). The end of the second connecting rod (611) is welded and fixed on the clamping plate (613), and the clamping plate (613) is installed with an automatic lubrication component (7), the automatic lubrication component (7) comprises a second receiving groove (701) and a transfer frame (706), a liquid storage frame (707) is welded and fixed on the top surface of the transfer frame (706), the bottom of the liquid storage frame (707) is connected to the first connecting pipe (709), the bottom of the first connecting pipe (709) is connected to the top of the transfer frame (706), a support plate (710) is welded and fixed on the inner wall of the transfer frame (706), a first connecting spring (711) is welded and fixed on the top surface of the support plate (710), the top of the first connecting spring (711) is fixedly connected to the first rubber ball (712), and a protective frame (8) is welded and fixed on the bottom surface of the workbench (1).

2. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 1, characterized in that: The worm (605) is connected to the middle part of the installation frame (607), the bottom end surface of the installation frame (607) is in contact with the top end surface of the workbench (1), the worm wheel (609) is symmetrically distributed on both sides of the worm (605), the worm wheel (609) corresponds one-to-one with the first connecting rod (610) through the first connecting shaft (608), the first connecting rod (610) corresponds one-to-one with the second connecting rod (611), the third connecting rod (612) and the clamping plate (613), respectively, and the first connecting rod (610) is parallel to the third connecting rod (612).

3. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 1, characterized in that: The first fixed plate (601) is welded and fixed on the top surface of the workbench (1); a first reciprocating screw (602) is rotatably connected to the first fixed plate (601); one end of the first reciprocating screw (602) is connected to a transmission belt (620); a sliding block (604) is threadedly connected to the first reciprocating screw (602); the sliding block (604) is rotatably connected to the worm (605); the worm wheel (609) is meshingly connected to the worm (605); a circular gear (606) is welded and fixed to the worm (605); a second reciprocating screw (621) is connected to the bottom of the transmission belt (620); the second reciprocating screw (621) is rotatably connected in the protective frame (8); the shape and size of the first reciprocating screw (602) are the same as those of the second reciprocating screw (621).

4. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 3, characterized in that: A first receiving groove (614) is provided in the clamping plate (613), and a second connecting shaft (615) is rotatably connected in the first receiving groove (614), and a positioning plate (616) is welded and fixed on the second connecting shaft (615). A first one-way threaded rod (617) is threadedly connected to the clamping plate (613), and a rotating plate (618) is rotatably connected to the end of the first one-way threaded rod (617). A limiting block (619) is hinged on the rotating plate (618), and the limiting block (619) is slidably connected to the positioning plate (616). The first receiving grooves (614) are symmetrically distributed on both sides of the clamping plate (613), and the first receiving grooves (614) correspond one-to-one with the positioning plate (616) through the second connecting shaft (615), and the positioning plate (616) corresponds one-to-one with the first one-way threaded rod (617) through the limiting block (619).

5. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 4, characterized in that: A sliding plate (622) is threadedly connected to the second reciprocating screw rod (621), a second fixed plate (623) is welded and fixed on the top end surface of the sliding plate (622), a guide rod (624) and a second return spring (625) are welded and fixed on the side end surface of the second fixed plate (623), a guide block (626) is welded and fixed on the other end of the second return spring (625), the guide block (626) is slidably connected to the guide rod (624), a support rod (627) is hinged on the top end of the guide block (626), a mounting plate (628) is hinged on the top end of the support rod (627), a rack (629) is welded and fixed on the mounting plate (628), the rack (629) is meshed and connected with the circular gear (606), and the mounting plate (628) is slidably connected to the workbench (1).

6. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 5, characterized in that: The second reciprocating screw rod (621) is connected to the middle part of the sliding plate (622), the outer wall of the sliding plate (622) is in contact with the inner wall of the protective frame (8), the guide rod (624) is located directly below the mounting plate (628), and the second return spring (625) is symmetrically distributed on both sides of the guide rod (624), and the second return spring (625) corresponds one-to-one to the guide block (626) and the support rod (627), respectively.

7. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 1, characterized in that: The second receiving groove (701) is opened on the clamping plate (613), and a plug rod (702) is slidably connected to the clamping plate (613). One end of the plug rod (702) is welded and fixed with a push plate (703), and the other end of the plug rod (702) is fixedly connected with a rubber piston (705). The clamping plate (613) is made of a mesh plate material. The clamping plate (613) and the transfer frame (706) are welded and fixed. The plug rod (702) is connected to the center of the clamping plate (613), one end of the plug rod (702) is fixedly connected to the middle part of the push plate (703), and the other end of the plug rod (702) is fixedly connected to the middle part of the rubber piston (705), and the rubber piston (705) is slidably connected in the transfer frame (706).

8. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 7, characterized in that: The bottom of the transfer frame (706) is connected to a second connecting pipe (713), the bottom of the second connecting pipe (713) is connected to a first conveying pipe (714), a fixed mesh plate (715) is welded and fixed inside the first conveying pipe (714), a second connecting spring (716) is welded and fixed on the top surface of the fixed mesh plate (715), a second rubber ball (717) is fixedly connected to the top of the second connecting spring (716), the bottom of the first conveying pipe (714) is connected to a second conveying pipe (718), and the second conveying pipe (718) is connected to the bottom of the second conveying pipe (714). The end of (718) is connected to a first liquid guide tube (719), a first atomizing nozzle (720) is installed on the first liquid guide tube (719), the first liquid guide tube (719) is fixedly connected in the clamping plate (613), a rubber hose (721) is connected to the first liquid guide tube (719), the top end of the rubber hose (721) is connected to a second liquid guide tube (722), the second liquid guide tube (722) is fixedly connected in the positioning plate (616), and a second atomizing nozzle (723) is installed on the second liquid guide tube (722).

9. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 8, characterized in that: The diameter of the second connecting tube (713) is the same as that of the first connecting tube (709); the shape and size of the first rubber ball (712) are the same as those of the second rubber ball (717); the diameter of the second rubber ball (717) is larger than the diameter of the second connecting tube (713); the second delivery tube (718) is connected to the middle part of the first liquid guiding tube (719); the first atomizing nozzles (720) are equidistantly distributed on both sides of the first liquid guiding tube (719); the second atomizing nozzles (723) are equidistantly distributed on the second liquid guiding tube (722); the side end surface of the first atomizing nozzle (720) is flush with the side end surface of the clamping plate (613); and the side end surface of the second atomizing nozzle (723) is flush with the side end surface of the positioning plate (616).

10. The feeding clamp device of a cold heading machine for producing aluminum alloy for semiconductor devices according to claim 1, characterized in that: A second one-way threaded rod (9) is rotatably connected to the side end face of the protective frame (8), a connecting plate (10) is threadedly connected to the second one-way threaded rod (9), a guide plate (11) is welded and fixed to the connecting plate (10), and the guide plate (11) is slidably connected to the side end of the protective frame (8). The second one-way threaded rod (9) is symmetrically distributed on both sides of the protective frame (8), the second one-way threaded rod (9) corresponds to the guide plate (11) one by one through the connecting plate (10), the second one-way threaded rod (9) is connected to the middle part of the top of the connecting plate (10), the cross-section of the guide plate (11) is an isosceles trapezoid, the height of the bottom end face of the guide plate (11) is higher than the height of the top end face of the guide rod (624), and the height of the bottom end face of the guide plate (11) is lower than the height of the top end face of the guide block (626).

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