Mass production type automatic production line
By processing the coating process in sections and rationally arranging the automation area and process area, the existing coating equipment automated production line problems of large equipment width and low coating quality are solved, and the effects of substrate efficiency improvement, cost reduction and quality improvement are achieved.
Patent Information
- Application Number
- CN202411478524.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-01-24
AI Technical Summary
The existing vertical dual-carrier plate coating equipment automation production line is arranged on both sides of the process equipment, resulting in a wide equipment width, a large factory span, high factory cost, and a long stagnation of the coating substrate in the atmosphere, and low coating quality. .
By segmenting the coating process and setting up reasonable automation areas and process areas, the torsion path and time of the coated substrate can be reduced, thereby reducing the stagnation time of the substrate in the atmosphere, improving the coating quality, and reducing the equipment footprint.
The improvement of substrate efficiency has been achieved, the land occupation and cost of the plant are reduced, the quality of coating quality and equipment are improved, and the economic benefits and scalability of the production line are enhanced.
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Figure CN119349146A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of film coating technology and provides a mass production type automated production line, specifically a mass production type automated production line in which automated equipment is arranged at both ends of process equipment. Background Art
[0002] The vertical dual-carrier coating equipment automated production line consists of two major parts: process equipment and automation equipment. The process equipment completes the functions related to substrate coating, and the automation equipment completes the functions related to substrate feeding, discharging, and flipping. The automation equipment is arranged on both sides of the process equipment, resulting in a wider width of the vertical dual-carrier coating equipment automated production line, requiring a larger span of the plant, a larger thousand-level area, and higher factory costs. The automation part is arranged on both sides of the process equipment, which will cause the substrate to stagnate in the atmosphere for a long time, resulting in low coating quality, and a large number of equipment, high equipment density, difficult maintenance, and high cost.
[0003] The existing vertical double-carrier coating equipment automated production line is arranged on the side of the process equipment, resulting in a wider width of the vertical double-carrier coating equipment automated production line, a larger span of the required plant, a larger thousand-level area space, higher factory costs, and extremely low plant utilization; moreover, the coated substrates remain stagnant for a long time in the atmosphere, the coating quality is low, the equipment density is large, maintenance is difficult, the cost is high, and the overall economic benefits are poor. Summary of the invention
[0004] In order to solve the problems existing in the above-mentioned prior art, the present invention provides a mass production automated production line, which divides the coating process into sections, sets reasonable automation areas and process areas, reduces the torsion path and time of the coated substrate, thereby reducing the stagnation time of the substrate in the atmosphere, improving the coating quality, and reducing the equipment footprint.
[0005] In a first aspect, some embodiments of the present invention provide a mass production automated production line comprising, in sequence: a loading automation zone, a first processing zone, and a unloading automation zone; the first processing zone is located between the loading automation zone as the first automation zone and the unloading automation zone as the fourth automation zone.
[0006] The embodiment of the present invention sets the automation zone at both ends of the processing zone, and can set reasonable automation zone and process zone, thereby reducing the twisting path and time of the coating substrate.
[0007] In some embodiments, the mass production automated production line also includes: a second automated zone, a second processing zone, a third automated zone and a third processing zone; the first processing zone is located between the first automated zone and the second automated zone; the second processing zone is located between the second automated zone and the third automated zone; the third processing zone is located between the third automated zone and the fourth automated zone.
[0008] In some embodiments, the first automation area includes a basket loader, a loading and inserting film machine, a first variable pitch gantry gripper, a first double-station loading platform, a first large gantry substrate transfer machine, a first carrier flip table and a first buffer warehouse; the basket loader transports the basket containing the material to the loading and inserting film machine; the loading and inserting film machine arranges the material in the basket into a matrix; the first variable pitch gantry gripper grabs the matrix of the material arranged by the loading and inserting film machine and places it on the first double-station loading platform; the first double-station loading platform moves the matrix of the material to the bottom of the first large gantry substrate transfer machine; the first large gantry substrate transfer machine moves the matrix of the material to the top of the first carrier flip table; in the state of taking and placing the matrix of the material, the carrier in the first carrier flip table changes from a standing state to a horizontal state and stands up again after taking and placing the matrix of the material and transports it to the first buffer warehouse after standing up; the first buffer warehouse transports the carrier transported from the first carrier flip table to the first processing area.
[0009] In some embodiments, the first processing area includes a stage I process equipment, and the stage I process equipment performs a first coating on the material from the first automation area as the first processing.
[0010] In some embodiments, the second automated area includes a second cache bin, a second carrier flipping table, a second double-station loading platform, a second large gantry substrate transfer machine, a first substrate flipping machine, a third carrier flipping table, a third large gantry substrate transfer machine and a third cache bin; the carrier of the first processing area is sent to the second cache bin; the second cache bin sends the carrier to the second carrier flipping table, and the carrier in the second carrier flipping table changes from an upright state to a horizontal state in the state of taking and placing the matrix of the material, and after taking and placing the matrix of the material, it is stood up again and sent back to the second cache bin. ; The second large gantry substrate transfer machine transports the matrix of the material in the second carrier turning table to the second double-station loading platform; the second double-station loading platform moves the matrix of the material to the first substrate flipping machine; the first substrate flipping machine flips the matrix of the material, and transports the matrix of the material at the first substrate flipping machine to the carrier in the third carrier turning table through the third large gantry substrate transfer machine; the third carrier turning table sends the carrier into the third cache bin; the third cache bin sends the carrier into the second processing area.
[0011] In some embodiments, the second processing area includes IN section process equipment, and the IN section process equipment performs a second coating on the material from the second automation area as the second processing.
[0012] In some embodiments, the third automated area includes a fourth cache bin, a fourth carrier flipping table, a third double-station loading platform, a fourth gantry substrate transfer machine, a second substrate flipping machine, a fifth carrier flipping table, a fifth gantry substrate transfer machine and a fifth cache bin; the carrier of the second processing area is sent to the fourth cache bin; the fourth cache bin sends the carrier to the fourth carrier flipping table, and the carrier in the fourth carrier flipping table changes from an upright state to a horizontal state when the matrix of the material is placed and the matrix of the material is placed and then stands up and is sent back to the fourth cache warehouse; the fourth large gantry substrate transfer machine transports the matrix of materials in the fourth carrier turning table to the third double-station loading platform; the third double-station loading platform moves the matrix of materials to the second substrate flipping machine; the second substrate flipping machine flips the matrix of materials, and transports the matrix of materials at the substrate flipping machine to the carrier in the fifth carrier turning table through the fifth large gantry substrate transfer machine; the fifth carrier turning table sends the carrier into the fifth cache warehouse; the fifth cache warehouse sends the carrier into the third processing area.
[0013] In some embodiments, the third processing area includes a P-stage process equipment, and the P-stage process equipment performs a third coating on the material from the third automation area as the third processing.
[0014] In some embodiments, the fourth automation area includes a sixth cache bin, a sixth carrier flip table, a fourth double-station loading platform, a sixth gantry substrate transfer machine, a second variable-pitch gantry gripper, a blanking and inserting machine, and a basket blanking machine; the carrier of the third processing area is sent to the sixth cache bin; the sixth cache bin sends the carrier to the sixth carrier flip table, and the carrier in the sixth carrier flip table changes from a vertical state to a horizontal state when the matrix of the material is taken and placed, and then Stand it up and send it back to the sixth cache warehouse; the sixth large gantry substrate transfer machine transports the matrix of the material in the sixth carrier flipping table to the fourth double-station loading platform; the fourth double-station loading platform moves the matrix of the material to the second variable-pitch gantry gripper; the second variable-pitch gantry gripper puts the matrix of the material into the unloading and inserting machine to collect the material into the flower basket; the flower basket unloading machine sends the flower basket filled with the material in the second variable-pitch gantry gripper to the AGV unloading port.
[0015] In some embodiments, the flower basket loader is provided with a nitrogen bin, and the flower basket is cached in the nitrogen bin. When the downstream equipment needs to replenish the flower basket, the flower basket in the nitrogen bin is transported to the downstream equipment.
[0016] In some embodiments, the first variable pitch gantry gripper can perform variable pitch processing during the handling process.
[0017] In some embodiments, the second variable pitch gantry gripper can perform variable pitch processing during the handling process.
[0018] In some embodiments, in the first dual-station loading platform, loading and unloading are carried out simultaneously.
[0019] In some embodiments, in the second dual-station loading platform, loading and unloading are carried out simultaneously.
[0020] In some embodiments, in the third dual-station loading platform, loading and unloading are carried out simultaneously.
[0021] In some embodiments, in the fourth dual-station loading platform, loading and unloading are carried out simultaneously.
[0022] In some embodiments, the first buffer bin returns the empty carrier boards to the first carrier board turning station.
[0023] In some embodiments, the third buffer bin returns the empty carrier boards to the third carrier board turning station.
[0024] In some embodiments, the fifth buffer bin returns the empty carrier boards to the fifth carrier board turning station.
[0025] In the second aspect, some embodiments of the present invention provide a mass production automated production line comprising, in sequence: a first automated loading area, a first processing area, a first automated unloading area, a first conveying area, a second automated loading area, a second processing area, a second automated unloading area, a second conveying area, a third automated loading area, a third processing area and a third automated unloading area; the first processing area is located between the first automated loading area and the first automated unloading area; the second processing area is located between the second automated loading area and the second automated unloading area; the third processing area is located between the third automated loading area and the third automated unloading area.
[0026] The embodiment of the present invention sets the automation zone at both ends of the processing zone, and can set reasonable automation zone and process zone, thereby reducing the twisting path and time of the coating substrate.
[0027] In some embodiments, the first automated loading area includes a loading and inserting machine, a first substrate transfer machine, a first truss substrate gripper, a first small carrier conveyor line, a second truss substrate gripper and a first small carrier lifting and rotating table; the small carrier in the large carrier in the loading and inserting machine is removed by the first truss substrate gripper and placed on the first small carrier conveyor line; the first substrate transfer machine then places the substrate on the loading and inserting machine on the small carrier; the large carrier is turned over by the first small carrier lifting and rotating table; the small carrier is hung on the large carrier by the second truss substrate gripper.
[0028] In some embodiments, the first processing area includes a stage I process equipment, and the stage I process equipment performs a first coating on the material from the first automated loading area as the first processing.
[0029] In some embodiments, the first automated unloading area includes a second small carrier lifting and rotating table, a third truss substrate gripper, a second small carrier conveyor line, a first tray elevator, a fourth truss substrate gripper and a first substrate flipping gripper; the small carrier in the large carrier in the I-stage process equipment is taken out by the third truss substrate gripper and placed on the second small carrier conveyor line, flows into the first substrate flipping gripper to be flipped and placed in the first conveying area and flows into the second automated loading area. At the same time, the fourth truss substrate gripper puts the empty small carrier into the large carrier and returns to the first automated loading area through the internal circulation of the first processing area.
[0030] In some embodiments, the first conveying area includes an I-IN section small carrier conveying line, and the I-IN section small carrier conveying line conveys the material from the first automated unloading area.
[0031] In some embodiments, the second automated loading area includes a first substrate transfer machine, a fifth truss substrate gripper, a third small carrier conveyor line, a second pallet elevator, a third small carrier lifting and rotating table, and a sixth truss substrate gripper; the material conveyed from the I-IN section small carrier conveyor line is transported by the first substrate transfer machine to the small carrier taken down by the fifth truss substrate gripper, and the small carrier is transported to the third small carrier lifting and rotating table through the third small carrier conveyor line, and finally the small carrier on the third small carrier lifting and rotating table is placed on the large carrier on the second processing area by the sixth truss substrate gripper.
[0032] In some embodiments, the second processing area includes IN section process equipment, and the IN section process equipment performs a second coating on the material from the second automated loading area as the second processing.
[0033] In some embodiments, the second automated unloading area includes a fourth small carrier lifting and rotating table, a seventh truss substrate gripper, a fourth small carrier conveyor line, a third tray elevator, an eighth truss substrate gripper and a second substrate flipping gripper; the small carrier in the large carrier in the IN section process equipment is taken down by the seventh truss substrate gripper and placed on the fourth small carrier conveyor line, flows into the second substrate flipping gripper for flipping and placing it in the second conveying area and flows into the third automated loading area. At the same time, the eighth truss substrate gripper places the empty small carrier into the large carrier and returns to the second automated loading area through the internal circulation of the second processing area.
[0034] In some embodiments, the second conveying area includes an IN-P section small carrier conveying line, and the IN-P section small carrier conveying line conveys the material from the second automated unloading area.
[0035] In some embodiments, the third automated loading area includes a second substrate transfer machine, a ninth truss substrate gripper, a fifth small carrier conveyor line, a fourth pallet elevator, a fifth small carrier lifting and rotating table, and a tenth truss substrate gripper; the material conveyed from the IN-P section small carrier conveyor line is transported by the second substrate transfer machine to the small carrier taken down by the ninth truss substrate gripper, and the small carrier is transported to the fifth small carrier lifting and rotating table through the fifth small carrier conveyor line, and finally the small carrier on the fifth small carrier lifting and rotating table is placed on the large carrier on the third processing area by the tenth truss substrate gripper.
[0036] In some embodiments, the third processing area includes a P-stage process equipment, and the P-stage process equipment performs a third coating on the material from the third automated loading area as the third processing.
[0037] In some embodiments, the third automated unloading area includes an eleventh truss substrate gripper, a sixth small carrier conveyor line, a twelfth truss substrate gripper, a sixth small carrier lifting and rotating table, a second substrate transferor and a substrate transferor; the small carrier in the large carrier in the P-stage process equipment is taken out by the eleventh truss substrate gripper and placed on the sixth small carrier conveyor line, flows into the twelfth truss substrate gripper for rotation and flipping, and the second substrate transferor transports the material on the sixth small carrier lifting and rotating table to the substrate transferor, and the material is collected in a flower basket by the substrate transferor.
[0038] The present invention can process the coating process in sections, set reasonable automation zones and process zones, reduce the twisting path and time of the coated substrate, thereby reducing the substrate stagnation time in the atmosphere, improving the coating quality, and reducing the equipment footprint. That is, the following beneficial effects are achieved: (1) higher substrate efficiency (because the substrate stagnates in the atmosphere for a shorter time); (2) smaller line width, higher plant utilization, smaller thousand-level area, and lower factory service costs; (3) easy maintenance, fewer types of equipment, more reasonable production line space layout, and more in line with fire safety standards; (4) high production capacity and strong scalability, and only a small amount of equipment needs to be added to upgrade the production line. BRIEF DESCRIPTION OF THE DRAWINGS
[0039] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.
[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the description of the embodiments or the prior art are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0041] Figure 1 It is an overall schematic diagram of a mass production automated production line according to a first embodiment of the present invention;
[0042] Figure 2 A schematic diagram of a section of a mass production automated production line according to a first embodiment of the present invention;
[0043] Figure 3 A schematic diagram of two sections of a mass production automated production line according to a first embodiment of the present invention;
[0044] Figure 4 A schematic diagram of three sections of a mass production automated production line according to a first embodiment of the present invention;
[0045] Figure 5 A schematic diagram of four sections of a mass production automated production line according to a first embodiment of the present invention;
[0046] Figure 6 The overall detailed schematic diagram of the mass production automated production line according to the first embodiment of the present invention
[0047] Figure 7 It is an overall schematic diagram of a mass production automated production line according to a second embodiment of the present invention.
[0048] In the figure: 1-flower basket loader, 2-loading inserting and swinging machine, 3, 3A-variable pitch gantry gripper, 4, 4A, 4B, 4C-double-station loading platform, 5, 5A, 5B, 5C, 5D, 5E-large gantry substrate transfer machine, 6, 6A, 6B, 6C, 6D, 6E-carrier flip table, 7, 7A, 7B, 7C, 7D, 7E-buffer, 8-I section process equipment, 9-IN section process equipment, 10-P section process equipment, 11-unloading inserting and swinging machine, 12-flower basket unloading machine, 13, 13A-substrate flip Machine, 100-first automation area, 101-second automation area, 102-third automation area, 103-fourth automation area, 200-first processing area, 201-second processing area, 202-third processing area, 300-first automated loading area, 301-first automated unloading area, 302-second automated loading area, 303-second automated unloading area, 304-third automated loading area, 305-third automated unloading area, 400-first processing area, 401-second processing area, 402-third processing area Work area, 500-first conveying area, 501-second conveying area, 1001-loading and inserting machine, 1002, 1002A-substrate transfer machine, 1003, 1003A, 1003B, 1003C, 1003D, 1003E, 1003F, 1003G, 1003H, 1003I, 1003J, 1003K-truss substrate gripper, 1004, 1004A, 1004B, 1004C, 1004D, 1004E-small carrier conveyor line, 1005, 1005 A, 1005B, 1005C, 1005D, 1005E - small carrier lifting and rotating table, 1006, 1006A, 1006B, 1006C - tray elevator, 1007, 1007A - substrate turning gripper, 1008-I-IN section small carrier conveyor line, 1009-IN-P section small carrier conveyor line, 1010 - substrate transfer machine, 1011 - I section process equipment, 1012 - IN section process equipment, 1013 - P section process equipment, 1014, 1014A - substrate transfer machine. DETAILED DESCRIPTION
[0049] In order to more clearly understand the above-mentioned purposes, features and advantages of the present disclosure, the embodiments of the present disclosure will be further described below. It should be noted that the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.
[0050] In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure, but the present disclosure may also be implemented in other ways different from those described herein; obviously, the embodiments in the specification are only part of the embodiments of the present disclosure, rather than all of the embodiments.
[0051] (First embodiment)
[0052] At least in order to achieve the above-mentioned technical problems of segmenting the coating process, setting up reasonable automation zones and process zones, reducing the torsion path and time of the coated substrate, thereby reducing the stagnation time of the substrate in the atmosphere, improving the coating quality, and reducing the equipment footprint, the first embodiment of the present application provides a mass production automated production line, comprising in sequence: a first automation zone, a first processing zone, a second automation zone, a second processing zone, a third automation zone, a third processing zone and a fourth automation zone; the first processing zone is located between the first automation zone and the second automation zone; the second processing zone is located between the second automation zone and the third automation zone; the third processing zone is located between the third automation zone and the fourth automation zone.
[0053] It can be understood that the mass production automated production line provided by the embodiments of the present application can effectively improve the technical defects existing in the production line using related technologies.
[0054] Combine the following Figure 1-Figure 5 The above-mentioned mass production automated production line is exemplified and the structure of the mass production automated production line is exemplified. It should be noted that those skilled in the art can design different mass production automated production lines based on the concept of the above-mentioned mass production automated production line according to specific needs. Figure 1-Figure 5 device.
[0055] First, briefly introduce the Figure 1-Figure 5 The corresponding work area or unit.
[0056] The figure mark 1 is used to characterize the flower basket loader (sometimes also called the flower basket transfer machine); the figure mark 2 is used to characterize the loading and inserting swinging machine (sometimes also simply called the inserting swinging machine); the figure marks 3 and 3A are used to characterize the variable pitch gantry gripper (sometimes also simply called the small gantry), wherein 3 is the first variable pitch gantry gripper, and 3A is the second variable pitch gantry gripper; the figure marks 4, 4A, 4B, and 4C are used to characterize the double-station loading platform, wherein 4 is the first double-station loading platform, 4A is the second double-station loading platform, 4B is the third double-station loading platform, and 4C is the fourth double-station loading platform; the figure marks 5, 5A, 5B, 5C, 5D, and 5E are used to characterize the large gantry substrate transfer machine (sometimes also simply called the large gantry), wherein 5 is the first large gantry substrate Transfer machine, 5A is the second largest gantry substrate transfer machine, 5B is the third largest gantry substrate transfer machine, 5C is the fourth largest gantry substrate transfer machine, 5D is the fifth largest gantry substrate transfer machine, and 5E is the sixth largest gantry substrate transfer machine; the figure marks 6, 6A, 6B, 6C, 6D, and 6E are used to characterize the carrier flip table (sometimes also referred to as the flip table), among which 6 is the first carrier flip table, 6A is the second carrier flip table, 6B is the third carrier flip table, 6C is the fourth carrier flip table, 6D is the fifth carrier flip table, and 6E is the sixth carrier flip table; the figure marks 7, 7A, 7B, 7C, 7D, and 7E are used to characterize the cache bin, among which 7 is the first cache bin, 7A is the second cache bin, 7B is the third cache bin, and 7C is the fourth cache bin. , 7D is the fifth cache bin, 7E is the sixth cache bin; reference numeral 8 is used to characterize the I-stage process equipment; reference numeral 9 is used to characterize the IN-stage process equipment; reference numeral 10 is used to characterize the P-stage process equipment; reference numeral 11 is used to characterize the blanking and inserting machine; reference numeral 12 is used to characterize the basket blanking machine; reference numerals 13 and 13A are used to characterize the substrate flipping machine, wherein 13 is the first substrate flipping machine, and 13A is the second substrate flipping machine; reference numeral 100 is used to characterize the first automation zone; reference numeral 101 is used to characterize the second automation zone; reference numeral 102 is used to characterize the third automation zone; reference numeral 103 is used to characterize the fourth automation zone; reference numeral 200 is used to characterize the first processing zone; reference numeral 201 is used to characterize the The second processing area is characterized by reference numeral 202; the third processing area is characterized by reference numeral 300; the first automated loading area is characterized by reference numeral 301; the first automated unloading area is characterized by reference numeral 302; the second automated loading area is characterized by reference numeral 303; the second automated unloading area is characterized by reference numeral 304; the third automated loading area is characterized by reference numeral 305; the first processing area is characterized by reference numeral 400; the second processing area is characterized by reference numeral 401; the third processing area is characterized by reference numeral 402; the first conveying area is characterized by reference numeral 500; the second conveying area is characterized by reference numeral 501; the second conveying area is characterized by reference numeral 1001; the loading and inserting machine is characterized by reference numeral 1001;Reference numerals 1002 and 1002A are used to characterize substrate transfer machines, wherein 1002 is a first substrate transfer machine and 1002A is a second substrate transfer machine; reference numerals 1003, 1003A, 1003B, 1003C, 1003D, 1003E, 1003F, 1003G, 1003H, 1003I, 1003J, and 1003K are used to characterize truss substrate grippers, wherein 1003 is a first truss substrate gripper, 1003A is a second truss substrate gripper, and 100 3B is the third truss substrate gripper, 1003C is the fourth truss substrate gripper, 1003D is the fifth truss substrate gripper, 1003E is the sixth truss substrate gripper, 1003F is the seventh truss substrate gripper, 1003G is the eighth truss substrate gripper, 1003H is the ninth truss substrate gripper, 1003I is the tenth truss substrate gripper, 1003J is the eleventh truss substrate gripper, and 1003K is the twelfth truss substrate gripper; Figure numerals 1004, 1004A, 1004B, 1004C , 1004D, 1004E are used to represent small carrier conveyor lines, wherein 1004 is the first small carrier conveyor line, 1004A is the second small carrier conveyor line, 1004B is the third small carrier conveyor line, 1004C is the fourth small carrier conveyor line, 1004D is the fifth small carrier conveyor line, and 1004E is the sixth small carrier conveyor line; Figure numerals 1005, 1005A, 1005B, 1005C, 1005D, 1005E are used to represent small carrier lifting and rotating tables, wherein 1005 is the first A small carrier plate lifting and rotating table, 1005A is a second small carrier plate lifting and rotating table, 1005B is a third small carrier plate lifting and rotating table, 1005C is a fourth small carrier plate lifting and rotating table, 1005D is a fifth small carrier plate lifting and rotating table, and 1005E is a sixth small carrier plate lifting and rotating table; the figure marks 1006, 1006A, 1006B, and 1006C are used to characterize the pallet elevator, among which 1006 is the first pallet elevator, 1006A is the second pallet elevator, and 1006B is the third pallet elevator. 1006C is the fourth tray lifter; reference numerals 1007 and 1007A are used to characterize substrate flip grippers, wherein 1007 is the first substrate flip gripper and 1007A is the second substrate flip gripper; reference numeral 1008 is used to characterize the I-IN section small carrier conveyor line; reference numeral 1009 is used to characterize the IN-P section small carrier conveyor line; reference numeral 1010 is used to characterize a substrate transfer machine; reference numeral 1011 is used to characterize the I section process equipment; reference numeral 1012 is used to characterize the IN section process equipment; reference numeral 1013 is used to characterize the P section process equipment; reference numerals 1014 and 1014A are used to characterize a substrate transfer machine, wherein 1014 is the first substrate transfer machine and 1014A is the second substrate transfer machine. ;
[0057] Secondly, the mass production automated production lines of some embodiments of the present application are exemplarily described in combination with the above-mentioned figure marks.
[0058] like Figure 1 As shown, the mass production automated production line provided by the first embodiment of the present invention exemplarily includes: a first automated zone 100, which arranges and adjusts the posture of materials; a first processing zone 200, which is adjacent to the first automated zone 100 and located on the downstream side of the first automated zone 100, and performs a first processing on the materials from the first automated zone 100; a second automated zone 101, which is adjacent to the first processing zone 200 and located on the downstream side of the first processing zone 200, and arranges and adjusts the posture of materials from the first processing zone 200; a second processing zone 201, which is adjacent to the second automated zone 101 and located on the downstream side of the second automated zone 101, and performs a first processing on the materials from the first processing zone 200; The materials from the second automated zone 101 undergo a second processing; the third automated zone 102, which is adjacent to the second processing zone 201 and located on the downstream side of the second processing zone 201, arranges and adjusts the posture of the materials from the second processing zone 201; the third processing zone 202, which is adjacent to the third automated zone 102 and located on the downstream side of the third automated zone 102, performs a third processing on the materials from the third automated zone 102; and the fourth automated zone 103, which is adjacent to the third processing zone 202 and located on the downstream side of the third processing zone 202, arranges and adjusts the posture of the materials from the third processing zone 202 to send them to the AGV unloading port.
[0059] exist Figure 1 In the example, the first automation zone 100 corresponds to the first section, the second automation zone 101 corresponds to the second section, the third automation zone 102 corresponds to the third section, and the fourth automation zone 103 corresponds to the fourth section. Here, the material can be a substrate or a silicon wafer, or other thin sheet material that needs to be coated. Furthermore, "adjacent" here means that there is no other zone between the two zones. For example, there is no other zone between the first automation zone 100 and the first processing zone 200. Furthermore, the "downstream side" here refers to the direction in which the material (substrate) moves forward (flows) in the production line. Figure 1 In the embodiment, the downstream side is the rightward direction. Furthermore, the posture adjustment mentioned above may include turning over, rotating, etc. AGV is the abbreviation of automatic guided vehicle.
[0060] like Figure 2As shown, the first automation area 100 includes a basket loader 1, a loading and inserting film machine 2, a first variable pitch gantry gripper 3, a first double-station loading platform 4, a first large gantry substrate transfer machine 5, a first carrier flipping table 6 and a first buffer bin 7; the basket loader 1 transports the basket containing materials to the loading and inserting film machine 2; the loading and inserting film machine 2 arranges the materials in the basket into a matrix; the first variable pitch gantry gripper 3 grabs the matrix of materials arranged by the loading and inserting film machine 2 and places it on the first double-station loading platform 4 ; The first double-station loading platform 4 moves the matrix of materials to the bottom of the first large gantry substrate transfer machine 5; the first large gantry substrate transfer machine 5 moves the matrix of materials to the first carrier flip table 6; when taking and placing the matrix of materials, the carrier in the first carrier flip table 6 changes from a vertical state to a horizontal state and stands up again after taking and placing the matrix of materials and transports it to the first cache warehouse 7 after standing up; the first cache warehouse 7 transports the carrier transported from the first carrier flip table 6 to the first processing area 200.
[0061] like Figure 2 As shown, the first processing area 200 includes a stage I process equipment 8, and the stage I process equipment 8 performs a first coating on the material from the first automation area 100 as a first process.
[0062] like Figure 3 As shown, the second automated area 101 includes a second cache bin 7A, a second carrier flipping table 6A, a second double-station loading platform 4A, a second large gantry substrate transfer machine 5A, a first substrate flipping machine 13, a third carrier flipping table 6B, a third large gantry substrate transfer machine 5B and a third cache bin 7B; the carriers of the first processing area 200 are sent to the second cache bin 7A; the second cache bin 7A sends the carriers to the second carrier flipping table 6A, and the carriers in the second carrier flipping table 6A change from an upright state to a horizontal state in the state of taking and placing the materials in the matrix, and stand up again after taking and placing the materials in the matrix. Return to the second buffer warehouse 7A; the second large gantry substrate transfer machine 5A transports the matrix of materials in the second carrier turning table 6A to the second double-station loading platform 4A; the second double-station loading platform 4A moves the matrix of materials to the first substrate flipping machine 13; the first substrate flipping machine 13 flips the matrix of materials, and transports the matrix of materials at the first substrate flipping machine 13 to the carrier in the third carrier turning table 6B through the third large gantry substrate transfer machine 5B; the third carrier turning table 6B sends the carrier into the third buffer warehouse 7B; the third buffer warehouse 7B sends the carrier into the second processing area 201.
[0063] like Figure 3 , 4 As shown, the second processing area 201 includes IN section process equipment 9, and the IN section process equipment 9 performs a second coating on the material from the second automation area 101 as a second processing.
[0064] like Figure 4 As shown, the third automated zone 102 includes a fourth cache bin 7C, a fourth carrier flipping table 6C, a third double-station loading platform 4B, a fourth large gantry substrate transfer machine 5C, a second substrate flipping machine 13A, a fifth carrier flipping table 6D, a fifth large gantry substrate transfer machine 5D and a fifth cache bin 7D; the carrier of the second processing area 201 is sent to the fourth cache bin 7C; the fourth cache bin 7C sends the carrier to the fourth carrier flipping table 6C, and the carrier in the fourth carrier flipping table 6C is in a horizontal state when the material matrix is placed and picked up, and then it is stood up and sent back to the first Four buffer warehouses 7C; the fourth large gantry substrate transfer machine 5C transports the matrix of materials in the fourth carrier turning table 6C to the third double-station loading platform 4B; the third double-station loading platform 4B moves the matrix of materials to the second substrate flipping machine 13A; the second substrate flipping machine 13A flips the matrix of materials, and transports the matrix of materials at the substrate flipping machine 13 to the carrier in the fifth carrier turning table 6D through the fifth large gantry substrate transfer machine 5D; the fifth carrier turning table 6D sends the carrier into the fifth buffer warehouse 7D; the fifth buffer warehouse 7D sends the carrier into the third processing area 202.
[0065] like Figure 5 As shown, the third processing area 202 includes a P-stage process equipment 10, and the P-stage process equipment 10 performs a third coating on the material from the third automation area 102 as a third process.
[0066] like Figure 5 As shown, the fourth automation zone 103 includes a sixth buffer bin 7E, a sixth carrier flip table 6E, a fourth double-station loading platform 4C, a sixth gantry substrate transfer machine 5E, a second variable-pitch gantry gripper 3A, a blanking and inserting machine 11, and a basket blanking machine 12; the carrier of the third processing area 202 is sent to the sixth buffer bin 7E; the sixth buffer bin 7E sends the carrier to the sixth carrier flip table 6E, and the carrier in the sixth carrier flip table 6E is in a horizontal state when the matrix of materials is taken and placed, and then the matrix of materials is taken and placed. Stand it up and send it back to the sixth buffer warehouse 7E; the sixth large gantry substrate transfer machine 5E transports the matrix of materials in the sixth carrier flipping table 6E to the fourth double-station loading platform 4C; the fourth double-station loading platform 4C moves the matrix of materials to the second variable-pitch gantry gripper 3A; the second variable-pitch gantry gripper 3A puts the matrix of materials into the unloading and inserting machine 11, and the unloading and inserting machine 11 collects the materials into the flower basket; the flower basket unloading machine 12 sends the flower basket filled with materials in the second variable-pitch gantry gripper 3A to the AGV unloading port.
[0067] In summary, the first automation zone 100 is responsible for receiving the basket with substrates, placing the substrates into the carrier, and pushing the carrier into the first processing zone 200. The first processing zone 200 deposits thin films on the substrates inside the first processing zone 200 according to the requirements of the coating equipment. The second automation zone 101 is responsible for meeting the requirements of the second processing zone 201 for the substrates (the substrates on the carrier can be turned over), and pushing the carrier into the second processing zone 201. In addition, according to the requirements of the coating equipment, if it is only required to directly unload the material after the thin film is deposited in the first processing zone 200, the substrates from the first processing zone 200 are directly connected to the fourth automation zone 103. The second processing zone 201 deposits thin films on the substrates inside the second processing zone 201 according to the requirements of the coating equipment. Among them, the third automation zone 102 is responsible for meeting the requirements of the third processing zone 202 for the substrates (the substrates on the carrier can be turned over), and pushing the carrier into the third processing zone 202. In addition, according to the requirements of the coating equipment, if it is required to directly unload the substrate after depositing the thin film in the first processing area 200, the substrate in the first processing area 200 is directly connected to the fourth automation area 103. The third processing area 202 deposits a thin film on the substrate inside the third processing area 202 according to the requirements of the coating equipment. The fourth automation area 103 is responsible for completing the unloading of the substrate in the third processing area 202 and placing the substrate in the basket.
[0068] Furthermore, the flower basket loader 1 is responsible for receiving the flower basket from the AGV trolley, caching the flower basket, and sending the flower basket to the loading and swinging machine 2. The loading and swinging machine 2 is responsible for taking out the substrates from the flower basket and arranging the substrates according to the direction and spacing of the carrier. Among them, the variable pitch gantry grippers 3 and 3A are responsible for grabbing the sorted substrates and placing the substrates on the double-station loading platforms 4 to 4C. The double-station loading platforms 4 to 4C are responsible for arranging the substrates in a regular manner and strictly arranging them according to the size and quantity of the carrier. The large gantry substrate transfer machine 5 to 5E grabs the substrates on the double-station loading platform and places them into the carrier. The carrier flipping table 6 to 6E knocks the carrier down from the upright state to the horizontal state and flips it from the horizontal state to the upright state. The cache bin 7 to 7E can confirm whether to put it into the cache bin according to the process rhythm. The unloading and swinging machine 11 is responsible for placing the substrate into the unloading flower basket machine. The unloading flower basket machine 12 is responsible for delivering the flower basket into the AGV trolley. The substrate flipping machines 13-13A are responsible for grabbing and flipping the substrate.
[0069] The machines, equipment and devices in the above-mentioned areas can adopt known existing products.
[0070] This mass production automated production can complete 40,000 substrates per hour, and the process equipment cycle can reach 30 seconds; the substrate is grasped by a matrix gripper fixture, and the fixture and the substrate are in line contact to reduce the wear on the substrate; the double-station loading platform moves up and down alternately, which can realize loading and unloading at the same time, improving the production line cycle, and the substrate is loaded and unloaded by the large gantry substrate transfer machine. The large gantry substrate transfer machine is equipped with high-precision linear motors on both sides as power drives, and the running speed is fast and stable. The large gantry substrate transfer machine is equipped with CCD and XYR alignment platforms to correct the substrate to ensure that the substrate can be accurately loaded on the carrier.
[0071] like Figure 6 As shown, the specific working process of the mass production automated production line provided by the first embodiment of the present invention is as follows:
[0072] (1) A basket loader 1, a loader and inserter 2, a first variable-pitch gantry gripper 3, a first double-station loading platform 4, a first large gantry substrate transfer machine 5, a first carrier flipping table 6 and a first buffer bin 7, a total of seven machines, constitute an automation module 1 (a first automation area 100). AVG sends the flower basket into the flower basket loader 1, and the flower basket is transported to the loading and inserting machine 2 through the flower basket loader 1. The loading and inserting machine 2 takes out the substrates in the flower basket one by one and arranges them into a matrix. The first variable-pitch gantry gripper 3 grabs the substrate matrix arranged by the loading and inserting machine 2 and puts it on the first double-station loading platform 4. The first double-station loading platform 4 moves the substrate matrix to the bottom of the first large gantry substrate transfer machine 5 (within the working range). The first large gantry substrate transfer machine 5 grabs the substrate matrix on the first double-station loading platform 4 and transports it to the first carrier flip table 6 (the carrier flip table can only load and unload materials in a horizontal state). The carrier in the first carrier flip table 6 is horizontal when the substrate matrix is taken and placed. The substrate matrix is placed in a flat state and then stood up; the carrier in the first carrier flip table 6 is transported to the first buffer warehouse 7 after being stood up, wherein the empty carrier is also transported from the first buffer warehouse 7 to the first carrier flip table 6, and finally transported from the first buffer warehouse 7 to the I stage process equipment 8 for coating (that is, after the carrier on the first carrier flip table 6 is full of substrates, the carrier is stood up by the driving device, and then the carrier is sent to the first buffer warehouse 7 by the conveying device on the first carrier flip table 6, and the first buffer warehouse 7 is then sent to the I stage process equipment 8 for coating, and the empty carrier is reflowed by the return device of the first buffer warehouse 7 docking the I stage process equipment 8, and the docked carrier is sent to the first carrier flip table 6);
[0073] (2) The second buffer warehouse 7A, the second carrier flip table 6A, the second double-station loading platform 4A, the second large gantry substrate transfer machine 5A, the first substrate flip machine 13, the third carrier flip table 6B, the third large gantry substrate transfer machine 5B and the third buffer warehouse 7B, a total of eight machines, constitute the automation module 2 (the second automation area 101), and the automation module 2 has the same structural layout as the automation module 3. After the carrier coating is completed in the I-stage process equipment 8, the carrier will be sent to the second buffer warehouse 7A, and then the second buffer warehouse 7A will send the carrier to the second carrier flip table 6A. In the state of taking and placing the substrate matrix, the carrier in the second carrier flip table 6A is in a horizontal lying state and after taking and placing the substrate matrix, it is stood up and sent back to the second buffer warehouse 7A; the second large gantry substrate transfer machine 5A transports the substrate matrix in the second carrier flip table 6A to the second double-station loading platform 4A, and the second double-station loading platform 4A moves the substrate matrix to the first substrate flip machine 13, the first substrate flipping machine 13 grabs and flips the substrate matrix, and the third large gantry substrate transfer machine 5B grabs and transfers the substrate matrix at the first substrate flipping machine 13 to the carrier in the third carrier flipping table 6B, and the third carrier flipping table 6B sends the carrier into the third buffer warehouse 7B, and the third buffer warehouse 7B also reflows the empty carrier through the return device of the I stage process equipment 8 and sends the docked carrier into the third carrier flipping table 6B, and finally the third buffer warehouse 7B sends the carrier into the IN stage process equipment 9 for coating;
[0074] (3) The fourth buffer warehouse 7C, the fourth carrier flipping table 6C, the third double-station loading platform 4B, the fourth large gantry substrate transfer machine 5C, the second substrate flipping machine 13A, the fifth carrier flipping table 6D, the fifth large gantry substrate transfer machine 5D and the fifth buffer warehouse 7D, a total of eight machines constitute the automation module three (the third automation area 102), and the structural layout of the automation module three is the same as that of the automation module two. After the coating of the carrier is completed in the IN section process equipment 9, the carrier will be sent to the fourth buffer warehouse 7C, and then the fourth buffer warehouse 7C will send the carrier to the fourth carrier flip table 6C. In the state of taking and placing the substrate matrix, the carrier in the fourth carrier flip table 6C is in a horizontal lying state and after taking and placing the substrate matrix, it is stood up and sent back to the fourth buffer warehouse 7C; the fourth large gantry substrate transfer machine 5C grabs the substrate matrix in the fourth carrier flip table 6C and transports it to the third double-station loading platform 4B, and the third double-station loading platform 4B moves the substrate matrix to the second substrate flip machine 13A, the second substrate flipping machine 13A grabs and flips the substrate matrix, and the fifth gantry substrate transfer machine 5D grabs and transfers the substrate matrix at the second substrate flipping machine 13A to the carrier in the fifth carrier flipping table 6D, and the fifth carrier flipping table 6D sends the carrier into the fifth buffer warehouse 7D, and the fifth buffer warehouse 7D also reflows the empty carrier through the return device of the P-stage process equipment 10 and sends the docked carrier into the fifth carrier flipping table 6D, and finally the fifth buffer warehouse 7D sends the carrier into the P-stage process equipment 10 for coating;
[0075] (4) The sixth buffer warehouse 7E, the sixth carrier flip table 6E, the fourth double-station loading platform 4C, the sixth gantry substrate transfer machine 5E, the second variable-pitch gantry gripper 3A, the unloading and inserting machine 11, and the basket unloading machine 12, a total of seven machines, constitute the automation module four (the fourth automation area 103). After the substrate coating is completed in the P-stage process equipment 10, the substrate will be sent to the sixth buffer warehouse 7E, and then the sixth buffer warehouse 7E will send the substrate to the sixth carrier flip table 6E. In the state of taking and placing the substrate matrix, the substrate in the sixth carrier flip table 6E is in a horizontal lying state and after taking and placing the substrate matrix, it is stood up and sent back to the sixth buffer warehouse 7E; the sixth gantry substrate transfer machine 5E transports the substrate matrix in the sixth carrier flip table 6E to the fourth double-station loading platform 4C In the process, the fourth double-station loading platform 4C moves the substrate matrix to the position directly below the second variable-pitch gantry gripper 3A, the second variable-pitch gantry gripper 3A grabs the substrate matrix and puts it into the unloading and inserting machine 11, the unloading and inserting machine 11 collects the substrate matrix into the flower basket through the tongue assembly, the unloading and inserting machine 11 sends the flower basket full of substrates into the flower basket unloading machine 12, and the flower basket unloading machine 12 sends the full substrate flower basket in the second variable-pitch gantry gripper 3A to the AGV unloading port.
[0076] (5) On the left side of the stage I process equipment 8 is the automation module 1, wherein the function of the automation module 1 is to transport the substrate from the basket to the stage I process equipment 8 for coating;
[0077] (6) On the right side of the I-stage process equipment 8 is the automation module 2, wherein the function of the automation module 2 is to turn over the substrates coated in the I-stage process equipment 8, and send the turned-over substrates to the IN-stage process equipment 9 for coating;
[0078] (7) On the right side of the IN section process equipment 9 is the automation module 3, wherein the function of the automation module 3 is to turn over the substrates coated in the IN section process equipment 9, and send the turned over substrates to the P section process equipment 10 for coating;
[0079] (8) On the right side of the P-stage process equipment 10 is the automation module 4, wherein the function of the automation module 4 is to deliver the substrates coated in the P-stage process equipment 10 into the basket.
[0080] Furthermore, the automation equipment (automation area) is arranged at both ends of the process equipment (processing area) in the direction of material travel in the production line, but the protection points of the present invention are not limited to the positions where the automation equipment is arranged at both ends of the process equipment.
[0081] The flower basket loader delivers and stores the uncoated substrate flower baskets from the factory AGV, and is equipped with a nitrogen bin to cache the flower baskets in the nitrogen bin to reduce the stagnation time of the substrates in the atmosphere and improve substrate efficiency. When downstream equipment needs to replenish the flower baskets, the flower baskets in the nitrogen bin will be transported to the downstream equipment.
[0082] The loading and inserting machine arranges the substrates in the flower basket into a matrix through a sheet taking mechanism.
[0083] The variable pitch gantry gripper is used to transport the substrate matrix on the loading and inserting machine to the double-station loading platform through multiple mechanical devices, and the variable pitch processing will be performed during the transportation process.
[0084] The double-station loading platform can ensure that loading and unloading can be carried out simultaneously, thus improving the cycle time.
[0085] The large gantry substrate transfer machine transports and transfers upstream and downstream substrates.
[0086] The carrier turning table turns the vertical carrier to a horizontal state, which makes loading and unloading of the carrier in a horizontal state easier and reduces the fragmentation rate.
[0087] The buffer warehouse is used to send carrier boards into process equipment and also to reflow empty carrier boards in process equipment. When the upstream and downstream equipment experience downtime, the buffer warehouse can cache a certain amount of carrier boards to improve the utilization rate of the entire line.
[0088] The substrate flipping machine flips the substrate. Specifically, the substrate is flipped by a rotating shaft in cooperation with a clamping claw.
[0089] The blanking and inserting machine inserts the finished substrate matrix into the flower basket through the film taking mechanism.
[0090] The basket unloading machine delivers the basket filled with coated substrates into the factory AGV.
[0091] The carrier turning table knocks the carrier down to a horizontal state, but the protection points of the present invention are not limited to the number of carriers knocked down to a horizontal state, and the entire large carrier or a part of the large carrier is within the protection range.
[0092] The invention provides an automated production line for coating substrates on two carriers at one time, and for loading and unloading substrates on the two carriers at the same time.
[0093] (Second embodiment)
[0094] Figure 7 A mass production automated production line according to a second embodiment of the present invention is shown.
[0095] The mass production automated production line involved in the second embodiment of the present invention includes: a first automated loading area 300, which arranges and adjusts the posture of materials; a first processing area 400, which is adjacent to the first automated loading area 300 and located on the downstream side of the first automated loading area 300, and performs a first processing on the materials from the first automated loading area 300; a first automated unloading area 301, which is adjacent to the first processing area 400 and located on the downstream side of the first processing area 400, and arranges and adjusts the posture of materials from the first processing area 400; a first conveying area 500, which is adjacent to the first automated unloading area 301 and located on the downstream side of the first automated unloading area 301, and conveys the materials from the first automated unloading area 301; a second automated loading area 302, which is adjacent to the first conveying area 500 and located on the downstream side of the first conveying area 500, and arranges and adjusts the posture of materials from the first conveying area 500; a second processing area 401, which is adjacent to the second automated loading area 302 and located on the downstream side of the second automated loading area 302, and performs The materials from the second automated loading area 302 are subjected to the second processing; the second automated unloading area 303 is adjacent to the second processing area 401 and is located on the downstream side of the second processing area 401, and arranges and adjusts the posture of the materials from the second processing area 401; the second conveying area 501 is adjacent to the second automated unloading area 303 and is located on the downstream side of the second automated unloading area 303, and conveys the materials from the second automated unloading area 303; the third automated loading area 304 is adjacent to the second conveying area 501 and is located on the downstream side of the second automated unloading area 303 On the downstream side of the second conveying area 501, the materials from the second conveying area 501 are arranged and adjusted in posture; the third processing area 402 is adjacent to the third automated loading area 304 and located on the downstream side of the third automated loading area 304, and the materials from the third automated loading area 304 are subjected to the third processing; and the third automated unloading area 305 is adjacent to the third processing area 402 and located on the downstream side of the third processing area 402, and the materials from the third processing area 402 are arranged and adjusted in posture for collection.
[0096] like Figure 7 As shown, the first automated loading area 300 includes a loading and inserting machine 1001, a first substrate transfer machine 1002, a first truss substrate gripper 1003, a first small carrier conveyor line 1004, a second truss substrate gripper 1003A and a first small carrier lifting and rotating table 1005; the small carrier in the large carrier in the loading and inserting machine 1001 is taken out by the first truss substrate gripper 1003 and placed on the first small carrier conveyor line 1004; the first substrate transfer machine 1002 then places the substrate on the loading and inserting machine 1001 on the small carrier; the large carrier is turned over by the first small carrier lifting and rotating table 1005; and the small carrier is hung on the large carrier by the second truss substrate gripper 1003A.
[0097] As shown in FIG. 7 , the first processing area 400 includes a stage I process equipment 1011 , and the stage I process equipment 1011 performs a first coating on the material from the first automated loading area 300 as a first processing.
[0098] As shown in Figure 7, the first automated unloading area 301 includes a second small carrier lifting and rotating table 1005A, a third truss substrate gripper 1003B, a second small carrier conveyor line 1004A, a first tray elevator 1006, a fourth truss substrate gripper 1003C and a first substrate flipping gripper 1007; the small carrier in the large carrier in the I-stage process equipment 1011 is taken out by the third truss substrate gripper 1003B and placed on the second small carrier conveyor line 1004A, flows into the first substrate flipping gripper 1007 for flipping and is placed in the first conveying area 500 and flows into the second automated loading area 302. At the same time, the fourth truss substrate gripper 1003C puts the empty small carrier into the large carrier and returns to the first automated loading area 300 through the internal circulation of the first processing area 400.
[0099] As shown in FIG. 7 , the first conveying area 500 includes an I-IN section small carrier conveying line 1008 , and the I-IN section small carrier conveying line 1008 conveys materials from the first automated unloading area 301 .
[0100] As shown in Figure 7, the second automated loading area 302 includes a first substrate transfer machine 1014, a fifth truss substrate gripper 1003D, a third small carrier conveyor line 1004B, a second pallet elevator 1006A, a third small carrier lifting and rotating table 1005B and a sixth truss substrate gripper 1003E; the material conveyed from the I-IN section small carrier conveyor line 1008 is transported by the first substrate transfer machine 1014 to the small carrier taken down by the fifth truss substrate gripper 1003D, and the small carrier is transported to the third small carrier lifting and rotating table 1005B through the third small carrier conveyor line 1004B, and finally the small carrier on the third small carrier lifting and rotating table 1005B is placed on the large carrier on the second processing area 401 by the sixth truss substrate gripper 1003E.
[0101] As shown in FIG. 7 , the second processing area 401 includes an IN section process equipment 1012 , and the IN section process equipment 1012 performs a second coating on the material from the second automated loading area 302 as a second process.
[0102] As shown in Figure 7, the second automated unloading area 303 includes a fourth small carrier lifting and rotating table 1005C, a seventh truss substrate gripper 1003F, a fourth small carrier conveyor line 1004C, a third tray elevator 1006B, an eighth truss substrate gripper 1003G and a second substrate flipping gripper 1007A; the small carrier in the large carrier in the IN section process equipment 1012 is taken out by the seventh truss substrate gripper 1003F and placed on the fourth small carrier conveyor line 1004C, flows into the second substrate flipping gripper 1007A for flipping and is placed in the second conveying area 501 and flows into the third automated loading area 304. At the same time, the eighth truss substrate gripper 1003G puts the empty small carrier into the large carrier and returns to the second automated loading area 302 through the internal circulation of the second processing area 401.
[0103] As shown in FIG. 7 , the second conveying area 501 includes an IN-P section small carrier conveying line 1009 , and the IN-P section small carrier conveying line 1009 conveys materials from the second automated unloading area 303 .
[0104] As shown in Figure 7, the third automated loading area 304 includes a second substrate transfer machine 1014A, a ninth truss substrate gripper 1003H, a fifth small carrier conveyor line 1004D, a fourth pallet elevator 1006C, a fifth small carrier lifting and rotating table 1005D and a tenth truss substrate gripper 1003I; the material conveyed from the IN-P section small carrier conveyor line 1009 is transported by the second substrate transfer machine 1014A to the small carrier taken down by the ninth truss substrate gripper 1003H, and the small carrier is transported to the fifth small carrier lifting and rotating table 1005D through the fifth small carrier conveyor line 1004D, and finally the small carrier on the fifth small carrier lifting and rotating table 1005D is placed on the large carrier on the third processing area 402 by the tenth truss substrate gripper 1003I.
[0105] As shown in FIG. 7 , the third processing area 402 includes a P-stage process equipment 1013 , and the P-stage process equipment 1013 performs a third coating on the material from the third automated loading area 304 as the third processing.
[0106] As shown in Figure 7, the third automated unloading area 305 includes the eleventh truss substrate gripper 1003J, the sixth small carrier conveyor line 1004E, the twelfth truss substrate gripper 1003K, the sixth small carrier lifting and rotating table 1005E, the second substrate transfer machine 1002A and the substrate transfer machine 1010; the small carrier in the large carrier in the P-section process equipment 1013 is taken out by the eleventh truss substrate gripper 1003J and placed on the sixth small carrier conveyor line 1004E, flows into the twelfth truss substrate gripper 1003K for rotation and flipping, and the material on the sixth small carrier lifting and rotating table 1005E is transported to the substrate transfer machine 1010 by the second substrate transfer machine 1002A, and the material is collected into the flower basket by the substrate transfer machine 1010.
[0107] The detailed layout of the workbench, equipment, etc. in the above-mentioned processing areas and automation areas can be referred to Figure 2-Figure 5 , the two are similar.
[0108] The specific working process of the mass production automated production line provided by the second embodiment of the present invention is as follows:
[0109] The six machines of loading and inserting and swinging machine 1001, first substrate transfer machine 1002, first truss substrate gripper 1003, first small carrier conveyor line 1004, second truss substrate gripper 1003A and first small carrier lifting and rotating table 1005 constitute the loading automation of stage I process equipment 1011 (first automated loading area 300); the six machines of second small carrier lifting and rotating table 1005A, third truss substrate gripper 1003B, second small carrier conveyor line 1004A, first tray elevator 1006, fourth truss substrate gripper 1003C and first substrate flipping gripper 1007 constitute the unloading automation of stage I process equipment 1011 (first automated unloading area 301);
[0110] The first substrate transfer machine 1014, the fifth truss substrate gripper 1003D, the third small carrier conveyor line 1004B, the second tray lifter 1006A, the third small carrier lifting and rotating table 1005B and the sixth truss substrate gripper 1003E constitute the IN section process equipment 1012 loading automation (the second automated loading area 302); the fourth small carrier lifting and rotating table 1005C, the seventh truss substrate gripper 1003F, the fourth small carrier conveyor line 1004C, the third tray lifter 1006B, the eighth truss substrate gripper 1003G and the second substrate flip gripper 1007A constitute the IN section process equipment 1012 unloading automation (the second automated unloading area 303);
[0111] The second substrate transfer machine 1014A, the ninth truss substrate gripper 1003H, the fifth small carrier conveyor line 1004D, the fourth tray lifter 1006C, the fifth small carrier lifting and rotating table 1005D and the tenth truss substrate gripper 1003I constitute the P-stage process equipment 1013 loading automation (third automated loading area 304); the eleventh truss substrate gripper 1003J, the sixth small carrier conveyor line 1004E, the twelfth truss substrate gripper 1003K, the sixth small carrier lifting and rotating table 1005E, the second substrate transfer machine 1002A and the substrate transfer machine 1010 constitute the P-stage process equipment 1013 unloading automation (third automated unloading area 305);
[0112] The automated loading part of the stage I process equipment 1011 is to remove the small carrier from the large carrier in the stage I process equipment 1011 through the first truss substrate gripper 1003 and place it on the first small carrier conveyor line 1004. The first substrate transfer machine 1002 then places the substrate on the loading and inserting machine 1001 on the small carrier, and turns the carrier over through the first small carrier lifting and rotating table 1005 (the large carrier is double-row, and the substrate faces the middle, so it needs to be turned over), and finally the small carrier is hung on the large carrier through the second truss substrate gripper 1003A, and the large carrier automatically flows into the process equipment for coating; After the film is completed, it comes to the unloading automation part of the I-stage process equipment 1011, and the small carrier in the large carrier in the I-stage process equipment 1011 is unloaded by the third truss substrate gripper 1003B, placed on the second small carrier conveyor line 1004A, flows into the first substrate flip gripper 1007 for flipping, and put into the I-IN-stage small carrier conveyor line 1008, flows into the IN-stage process equipment 1012 loading section, and at the same time, the second truss substrate gripper 1003A puts the empty small carrier into the large carrier, and flows back to the loading place of the I-stage process equipment 1011 through the internal circulation of the I-stage process equipment 1011;
[0113] The I-IN section small carrier conveyor line 1008 conveys the substrate at the unloading position of the I section process equipment 1011 to the loading position of the IN section process equipment 1012. The I-IN section small carrier conveyor line 1008 automatically pallets the pallets and reflows the pallets through the first pallet elevator 1006.
[0114] The automated loading part of the IN section process equipment 1012 is to move the substrate conveyed by the I-IN section small carrier conveyor line 1008 to the small carrier taken down by the fifth truss substrate gripper 1003D through the first substrate transfer machine 1014, and then convey the small carrier to the third small carrier lifting and rotating table 1005B through the third small carrier conveyor line 1004B, and finally put the small carrier on the third small carrier lifting and rotating table 1005B into the large carrier on the IN section process equipment 1012 through the sixth truss substrate gripper 1003E, and the large carrier automatically flows into the process equipment for coating; after the coating is completed, Arriving at the automated unloading section of the IN section process equipment 1012, the small carrier in the large carrier in the IN section process equipment 1012 is unloaded by the seventh truss substrate gripper 1003F, placed on the fourth small carrier conveyor line 1004C, flowed into the second substrate flip gripper 1007A for flipping, and placed into the IN-P section small carrier conveyor line 1009, flowed into the loading section of the IN section process equipment 1012, and at the same time, the eighth truss substrate gripper 1003G puts the empty small carrier into the large carrier, and flows back to the loading section of the IN section process equipment 1012 through the internal circulation of the IN section process equipment 1012;
[0115] The IN-P section small carrier conveyor line 1009 conveys the substrates at the unloading position of the IN section process equipment 1012 to the loading position of the P section process equipment 1013. The IN-P section small carrier conveyor line 1009 automatically pallets the pallets and reflows the pallets through the third pallet elevator 1006B.
[0116] The automated loading part of the P-stage process equipment 1013 is to move the substrate conveyed by the IN-P-stage small carrier conveyor line 1009 to the small carrier taken down by the ninth truss substrate gripper 1003H through the second substrate transfer machine 1014A, and then convey the small carrier to the fifth small carrier lifting and rotating table 1005D through the fifth small carrier conveyor line 1004D. Finally, the small carrier on the fifth small carrier lifting and rotating table 1005D is placed on the large carrier on the P-stage process equipment 1013 through the tenth truss substrate gripper 1003I, and the large carrier automatically flows into the process equipment. Carry out coating; after coating is completed, it comes to the automated unloading part of the P-section process equipment 1013, and the small carrier in the large carrier in the P-section process equipment 1013 is taken out through the eleventh truss substrate gripper 1003J, and placed on the sixth small carrier conveyor line 1004E and flows into the sixth small carrier lifting and rotating table 1005E to rotate and turn the small carrier over, and the substrate on the sixth small carrier lifting and rotating table 1005E is transported to the substrate transfer machine 1010 through the second substrate transfer machine 1002A, and finally the substrates are collected into the flower basket through the substrate transfer machine 1010.
[0117] The machines, equipment and devices in the above-mentioned areas can adopt known existing products.
[0118] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.
[0119] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.
[0120] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.
[0121] For those skilled in the art, any modifications and changes made according to the above-mentioned embodiments of the present invention should be included in the protection scope of the present invention without departing from the spirit of the present invention.
Claims
1. A mass production automated production line, characterized in that: Including in order: A material loading automation area, a first processing area (200) and a material unloading automation area; The first processing area (200) is located between the loading automation area as the first automation area (100) and the unloading automation area as the fourth automation area (103).
2. The mass production automated production line according to claim 1, characterized in that: It also includes: a second automation area (101), a second processing area (201), a third automation area (102) and a third processing area (202); The first processing area (200) is located between the first automation area (100) and the second automation area (101); The second processing area (201) is located between the second automation area (101) and the third automation area (102); The third processing area (202) is located between the third automation area (102) and the fourth automation area (103).
3. The mass production automated production line according to claim 1, characterized in that: The first automated zone (100) comprises a basket loader (1), a loader and inserting machine (2), a first variable-pitch gantry gripper (3), a first double-station loading platform (4), a first large gantry substrate transfer machine (5), a first carrier plate turning table (6) and a first buffer warehouse (7); The flower basket feeding machine (1) conveys the flower basket containing materials to the feeding and inserting machine (2); The loading and inserting machine (2) arranges the materials in the flower basket into a matrix; The first variable-pitch gantry gripper (3) grabs the matrix of materials arranged by the loading and inserting machine (2) and places it on the first double-station loading platform (4); The first dual-station loading platform (4) moves the matrix of materials to below the first large gantry substrate transfer machine (5); The first large gantry substrate transfer machine (5) moves the matrix of materials onto the first carrier flipping table (6); When the matrix of materials is placed and taken, the carrier in the first carrier flipping table (6) changes from an upright state to a horizontal state, and after the matrix of materials is placed and taken, it is stood up again and transported to the first buffer bin (7). The first buffer warehouse (7) transports the carrier transported from the first carrier turning table (6) to the first processing area (200).
4. The mass production automated production line according to claim 1, characterized in that: The first processing area (200) includes a stage I process equipment (8), and the stage I process equipment (8) performs a first coating on the material from the first automation area (100) as the first processing.
5. The mass production automated production line according to claim 1, characterized in that: The second automated area (101) comprises a second buffer warehouse (7A), a second carrier flipping table (6A), a second double-station loading platform (4A), a second large gantry substrate transfer machine (5A), a first substrate flipping machine (13), a third carrier flipping table (6B), a third large gantry substrate transfer machine (5B) and a third buffer warehouse (7B); The carrier plate in the first processing area (200) is sent to the second buffer bin (7A); The second buffer warehouse (7A) sends the carrier to the second carrier flipping table (6A), and when the matrix of the material is placed, the carrier in the second carrier flipping table (6A) changes from an upright state to a horizontal state, and after the matrix of the material is placed, it stands up again and is sent back to the second buffer warehouse (7A); The second large gantry substrate transfer machine (5A) moves the matrix of materials in the second carrier flipping table (6A) to the second double-station loading platform (4A); The second double-station loading platform (4A) moves the matrix of materials to the first substrate flipping machine (13); The first substrate flipping machine (13) flips the matrix of the material over, and the matrix of the material at the first substrate flipping machine (13) is transferred to the carrier in the third carrier flipping table (6B) by the third large gantry substrate transfer machine (5B); The third carrier turning platform (6B) delivers the carrier into the third buffer bin (7B); The third buffer bin (7B) delivers the carrier plate to the second processing area (201).
6. The mass production automated production line according to claim 1, characterized in that: The second processing area (201) includes IN section process equipment (9), and the IN section process equipment (9) performs a second coating on the material from the second automation area (101) as the second processing.
7. The mass production automated production line according to claim 1, characterized in that: The third automated zone (102) comprises a fourth buffer storehouse (7C), a fourth carrier flipping table (6C), a third double-station loading platform (4B), a fourth gantry substrate transfer machine (5C), a second substrate flipping machine (13A), a fifth carrier flipping table (6D), a fifth gantry substrate transfer machine (5D) and a fifth buffer storehouse (7D); The carrier plate in the second processing area (201) is sent to the fourth buffer warehouse (7C); The carrier is sent from the fourth buffer warehouse (7C) to the fourth carrier turning table (6C), and when the matrix of the material is placed, the carrier in the fourth carrier turning table (6C) changes from an upright state to a horizontal state, and after the matrix of the material is placed, it is stood up again and sent back to the fourth buffer warehouse (7C); The fourth large gantry substrate transfer machine (5C) transports the matrix of materials in the fourth carrier flipping table (6C) to the third double-station loading platform (4B); The third dual-station loading platform (4B) moves the matrix of materials to the second substrate flipping machine (13A); The second substrate flipping machine (13A) flips the matrix of the material over, and the matrix of the material at the substrate flipping machine (13) is transferred to the carrier in the fifth carrier flipping table (6D) through the fifth large gantry substrate transfer machine (5D); The fifth carrier turning platform (6D) delivers the carrier into the fifth buffer bin (7D); The fifth buffer bin (7D) delivers the carrier plate to the third processing area (202).
8. The mass production automated production line according to claim 1, characterized in that: The third processing area (202) includes a P-stage process equipment (10), and the P-stage process equipment (10) performs a third coating on the material from the third automation area (102) as the third processing.
9. The mass production automated production line according to claim 1, characterized in that: The fourth automated zone (103) comprises a sixth buffer bin (7E), a sixth carrier flipping table (6E), a fourth double-station loading platform (4C), a sixth gantry substrate transfer machine (5E), a second variable-pitch gantry gripper (3A), a blanking and inserting machine (11) and a basket blanking machine (12); The carrier plate of the third processing area (202) is sent to the sixth buffer warehouse (7E); The sixth buffer storehouse (7E) sends the carrier plate to the sixth carrier plate flipping table (6E), and when the matrix of the material is placed, the carrier plate in the sixth carrier plate flipping table (6E) changes from a standing state to a horizontal state, and after the matrix of the material is placed, it stands up again and is sent back to the sixth buffer storehouse (7E); The sixth large gantry substrate transfer machine (5E) transports the matrix of materials in the sixth carrier flipping table (6E) to the fourth double-station loading platform (4C); The fourth dual-station loading platform (4C) moves the matrix of materials to the second variable-pitch gantry gripper (3A); The second variable-pitch gantry gripper (3A) places the matrix of the materials into the material blanking and inserting swinging machine (11), and the material blanking and inserting swinging machine (11) collects the materials into the flower basket; The flower basket unloading machine (12) delivers the flower basket filled with the material in the second variable-pitch gantry gripper (3A) to the AGV unloading port.
10. A mass production automated production line, characterized in that: Including in order: A first automated loading area (300), a first processing area (400), a first automated unloading area (301), a first conveying area (500), a second automated loading area (302), a second processing area (401), a second automated unloading area (303), a second conveying area (501), a third automated loading area (304), a third processing area (402) and a third automated unloading area (305); The first processing area (400) is located between the first automated loading area (300) and the first automated unloading area (301); The second processing area (401) is located between the second automated loading area (302) and the second automated unloading area (303); The third processing area (402) is located between the third automated loading area (304) and the third automated unloading area (305).
11. The mass production automated production line according to claim 10, characterized in that: The first automated loading area (300) comprises a loading and inserting machine (1001), a first substrate transfer machine (1002), a first truss substrate gripper (1003), a first small carrier conveyor line (1004), a second truss substrate gripper (1003A) and a first small carrier lifting and rotating platform (1005); The small carrier plate in the large carrier plate in the loading and inserting machine (1001) is taken out by the first truss substrate gripper (1003) and placed on the first small carrier plate conveyor line (1004); The first substrate transfer machine (1002) then places the substrate on the loading, inserting and swinging machine (1001) onto the small carrier plate; Turning over the large carrier plate by means of the first small carrier plate lifting rotating platform (1005); The small carrier is hung on the large carrier by the second truss substrate gripper (1003A).
12. The mass production automated production line according to claim 10, characterized in that: The first processing area (400) includes a stage I process equipment (1011), and the stage I process equipment (1011) performs a first coating on the material from the first automated loading area (300) as the first processing.
13. The mass production automated production line according to claim 10, characterized in that: The first automated unloading area (301) comprises a second small carrier lifting rotating platform (1005A), a third truss substrate gripper (1003B), a second small carrier conveyor line (1004A), a first tray elevator (1006), a fourth truss substrate gripper (1003C) and a first substrate flipping gripper (1007); The small carrier in the large carrier in the stage I process equipment (1011) is taken out by the third truss substrate gripper (1003B) and placed on the second small carrier conveyor line (1004A), flows into the first substrate flipping gripper (1007) to be flipped over and placed into the first conveying area (500) and flows into the second automated loading area (302). At the same time, the fourth truss substrate gripper (1003C) places the empty small carrier into the large carrier and returns to the first automated loading area (300) through the internal circulation of the first processing area (400).
14. The mass production automated production line according to claim 10, characterized in that: The first conveying area (500) includes an I-IN section small carrier conveying line (1008), and the I-IN section small carrier conveying line (1008) conveys the material from the first automated unloading area (301).
15. The mass production automated production line according to claim 10, characterized in that: The second automated loading area (302) comprises a first substrate transfer machine (1014), a fifth truss substrate gripper (1003D), a third small carrier conveyor line (1004B), a second tray lifter (1006A), a third small carrier lifting rotary table (1005B) and a sixth truss substrate gripper (1003E); The material conveyed from the I-IN section small carrier conveyor line (1008) is transported to the small carrier taken down by the fifth truss substrate gripper (1003D) through the first substrate transfer machine (1014), and the small carrier is conveyed to the third small carrier lifting and rotating table (1005B) through the third small carrier conveyor line (1004B), and finally the small carrier on the third small carrier lifting and rotating table (1005B) is placed on the large carrier on the second processing area (401) through the sixth truss substrate gripper (1003E).
16. The mass production automated production line according to claim 10, characterized in that: The second processing area (401) includes IN section process equipment (1012), and the IN section process equipment (1012) performs a second coating on the material from the second automated loading area (302) as the second processing.
17. The mass production automated production line according to claim 10, characterized in that: The second automated unloading area (303) comprises a fourth small carrier lifting rotating platform (1005C), a seventh truss substrate gripper (1003F), a fourth small carrier conveyor line (1004C), a third tray elevator (1006B), an eighth truss substrate gripper (1003G) and a second substrate flipping gripper (1007A); The small carrier in the large carrier in the IN section process equipment (1012) is taken out by the seventh truss substrate gripper (1003F) and placed on the fourth small carrier conveyor line (1004C), flows into the second substrate flipping gripper (1007A) to be flipped over and placed into the second conveying area (501) and flows into the third automated loading area (304). At the same time, the eighth truss substrate gripper (1003G) places the empty small carrier into the large carrier and returns to the second automated loading area (302) through the internal circulation of the second processing area (401).
18. The mass production automated production line according to claim 10, characterized in that: The second conveying area (501) includes an IN-P section small carrier conveying line (1009), and the IN-P section small carrier conveying line (1009) conveys the material from the second automated unloading area (303).
19. The mass production automated production line according to claim 10, characterized in that: The third automated loading area (304) includes a second substrate transfer machine (1014A), a ninth truss substrate gripper (1003H), a fifth small carrier conveyor line (1004D), a fourth tray lifter (1006C), a fifth small carrier lifting rotary table (1005D) and a tenth truss substrate gripper (1003I); The material conveyed from the IN-P section small carrier conveyor line (1009) is transported to the small carrier taken down by the ninth truss substrate gripper (1003H) through the second substrate transfer machine (1014A), and the small carrier is conveyed to the fifth small carrier lifting and rotating table (1005D) through the fifth small carrier conveyor line (1004D), and finally the small carrier on the fifth small carrier lifting and rotating table (1005D) is placed on the large carrier on the third processing area (402) through the tenth truss substrate gripper (1003I).
20. The mass production automated production line according to claim 10, characterized in that: The third processing area (402) includes a P-stage process equipment (1013), and the P-stage process equipment (1013) performs a third coating on the material from the third automated loading area (304) as the third processing.
21. The mass production automated production line according to claim 10, characterized in that: The third automated unloading area (305) includes an eleventh truss substrate gripper (1003J), a sixth small carrier conveyor line (1004E), a twelfth truss substrate gripper (1003K), a sixth small carrier lifting and rotating platform (1005E), a second substrate transfer machine (1002A) and a substrate transfer machine (1010); The small carrier in the large carrier in the P-stage process equipment (1013) is taken down by the eleventh truss substrate gripper (1003J) and placed on the sixth small carrier conveyor line (1004E), flows into the twelfth truss substrate gripper (1003K) for rotation and flipping, and the material on the sixth small carrier lifting and rotating table (1005E) is transported to the substrate transfer machine (1010) by the second substrate transfer machine (1002A), and the material is collected in a flower basket by the substrate transfer machine (1010).
Citation Information
Patent Citations
Automatic control production line for assisting in coating of special workpieces
CN111621766A
Mass production type vertical CVD (Chemical Vapor Deposition) loading and unloading integrated automatic production line
CN114551312A
Set formula dry process making herbs into wool device and production line
CN206595276U
Coating equipment
CN220829927U
Battery piece coating and blanking equipment
CN220925283U
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