Eccentricity measuring device and method

Abstract

The invention discloses an eccentricity measuring device and method, and relates to the technical field of optical measurement. The eccentricity measurement device comprises a detection assembly used for outputting measurement light and obtaining detection information according to a received light beam; the first light splitting assembly is located on an emergent light path of the detection assembly and used for splitting the measuring light into multiple beams of sub-measuring light and converging and projecting the first sub-measuring light transmitted in the first direction to a first area where the to-be-detected sample is located; and the calibration assembly is used for reflecting second sub-measurement light transmitted along a second direction or outputting calibration light so as to output the calibration light to the first light splitting assembly, so that the first light splitting assembly outputs reflected light to the detection assembly. The eccentricity measuring device can realize non-rotation measurement of the optical eccentricity of the lens.

Description

Technical Field

[0001] The present application relates to the field of optical measurement technology, and in particular to an eccentricity measurement device and method. Background Art

[0002] At present, the optical eccentricity of the lens is an important basis for judging the quality of optical lens assembly.

[0003] However, currently, a rotary eccentricity measuring instrument is mainly used to measure the eccentricity of the lens. This method requires a high-precision air-floating turntable as a reference axis. The lens is driven to rotate by the high-precision air-floating turntable to perform rotational measurement on the lens, and the measurement efficiency is low. Summary of the invention

[0004] The main purpose of the present application is to provide an eccentricity measurement device and method, which can realize non-rotational measurement of the optical eccentricity of a lens.

[0005] In a first aspect, the present application provides an eccentricity measuring device, the eccentricity measuring device comprising: A detection component, used for outputting measurement light and obtaining detection information according to the received light beam; A first light splitting component, located on the outgoing light path of the detection component, is used to split the measurement light into multiple sub-beams of measurement light, and converge the first sub-measurement light transmitted along a first direction and project it onto a first area where a sample to be measured is located, wherein the sample to be measured is a lens; The calibration component is used to reflect the second sub-measurement light transmitted along the second direction or output the calibration light to output the light beam to the first spectroscopic component so that the first spectroscopic component outputs the reflected light to the detection component, wherein the second direction intersects with the first direction.

[0006] In one embodiment, the first light splitting component includes: A first beam splitter, located on the outgoing light path of the detection component, and used for splitting the measurement light into a plurality of sub-beams of measurement light; The first focusing mechanism includes at least one first focusing lens. The target first focusing lens and the first beam splitter are arranged on the same optical axis. The target first focusing lens is used to converge the first sub-measurement light to the first area where the sample to be measured is located.

[0007] In one embodiment, the calibration component comprises: a first reflector, the first reflector being used to receive the second sub-measuring light and project the second sub-measuring light to a second area; A first calibration element is located in the second area and is used to output calibration light to the first reflector so that the first reflector projects the calibration light to the first spectrometer, wherein the first calibration element is one of the second reflector and the first light source, and when the first calibration element is the second reflector, the calibration light is the reflected light of the second sub-measurement light projected by the first reflector, and when the first calibration element is the first light source, the calibration light is the calibration light output by the first calibration element.

[0008] In one embodiment, the first light splitting component includes: A second focusing mechanism includes at least one second focusing lens, the target second focusing lens is located on the outgoing light path of the detection component, and the target second focusing lens is used to converge the measurement light; The second beam splitter is arranged on the same optical axis as the target second focusing objective lens, and is used to split the measurement light passing through the target second focusing objective lens into a plurality of sub-beams of measurement light.

[0009] In one embodiment, the calibration component comprises: a third focusing objective lens, used for receiving the second sub-measurement light and outputting parallel sub-measurement light; a third reflector, the third reflector being used to receive the parallel sub-measurement light and project the parallel sub-measurement light to a third area; A second calibration element is located in the third area and is used to output calibration light to the third reflector so that the third reflector outputs calibration light to the second spectrometer, wherein the second calibration element is one of the fourth reflector and the second light source, and when the second calibration element is the fourth reflector, the calibration light is the reflected light of the parallel sub-measurement light projected by the third reflector, and when the second calibration element is the second light source, the calibration light is the calibration light output by the second calibration element.

[0010] In one embodiment, the first light splitting component further includes: a light transmission control component, and the light transmission control component is used to control shielding of target sub-measurement light, wherein the target sub-measurement light includes at least one of the first sub-measurement light and the second sub-measurement light.

[0011] In one embodiment, the eccentricity measuring device further comprises: a carrying assembly for carrying the sample to be measured.

[0012] In one embodiment, the eccentricity measuring device further comprises: a moving stand, wherein the moving stand is connected to the detection component and is used to drive the detection component to move.

[0013] In one embodiment, the detection component includes: an autocollimator.

[0014] In a second aspect, the present application further provides an eccentricity measurement method, which is applied to the eccentricity measurement device as described in the first aspect, and the method comprises: When the convergence focus of the first sub-measurement light is located at a position corresponding to the center of a sphere on the first surface of the sample to be measured, obtaining first detection information of the detection component; In the process of synchronously moving the detection component and the first light splitting component to the target position with a step value, obtaining second detection information of the detection component for each step value, wherein when the detection component and the first light splitting component are at the target position, the convergence focus of the first sub-measurement light is located at the position of the sphere center corresponding to the second surface of the sample to be tested; The eccentricity of the first surface and the second surface is determined according to the step value, the first detection information, each of the second detection information, and the image plane center position of the detection component.

[0015] The above-mentioned eccentricity measuring device includes a detection component, a first spectroscopic component and a calibration component. The detection component outputs the measuring light. The first spectroscopic component divides the measuring light into a plurality of sub-beams of measuring light. The sub-beams of measuring light transmitted along the first direction are projected to the first area where the sample to be tested is located. The detection component can receive the reflected light from the first area to obtain the detection information of the surface to be tested of the sample to be tested. The sub-measuring light transmitted along the second direction is projected to the calibration component, so that the calibration component reflects the sub-measuring light transmitted along the second direction or outputs the calibration light to output a light beam to the first spectroscopic component. The output light beam is reflected by the first spectroscopic component and transmitted to the detection component, and a reflection image is formed on the detection component. The detection component can use the detection information obtained from the reflection image as the calibration data of the moving axis of the detection component, and determine the eccentricity by combining the calibration data and the detection information of the surface to be tested of the sample to be tested, so as to realize the measurement of the sample to be tested without rotating the sample to be tested, thereby reducing the measurement time of the sample to be tested and improving the measurement efficiency. In addition, based on the calibration data, real-time calibration of the moving axis of the detection component can be achieved, thereby providing more accurate calibration data for eccentricity measurement; at the same time, due to the introduction of real-time calibration, the device does not need to have high requirements on the accuracy of the moving axis itself, and there is no need to introduce high-cost equipment such as high-precision air-floating turntables, thereby significantly reducing costs.

[0016] In the above-mentioned eccentricity measurement method, when the convergence focus of the sub-measurement light transmitted along the first direction is located at the position of the center of the sphere corresponding to the first surface of the sample to be measured, the first detection information of the detection component is obtained, and the position of the reflected image of the first surface of the sample to be measured can be determined based on the first detection information. In the process of the detection component and the first spectroscopic component synchronously moving to the target position with a step value, the second detection information of the detection component is obtained for each step value, and the second detection information includes the imaging information of the calibration light output by the calibration component. Then, the calibration data of the moving axis of the detection component can be obtained based on the step value and the second detection information. In addition, when the detection component and the first spectroscopic component are at the target position, the convergence focus of the sub-measurement light transmitted along the first direction is located at the position of the center of the sphere corresponding to the second surface of the sample to be measured, and the position of the reflected image corresponding to the second surface of the sample to be measured can be determined based on the second detection information at this time. The reflected image position of the second surface to be detected can be calibrated through the calibration data to obtain the actual reflected image position of the second surface, and the eccentricity of the first surface and the second surface can be determined based on the reflected image position of the first surface, the actual reflected image position of the second surface and the center position of the image plane. Therefore, the eccentricity of the first surface and the second surface can be determined according to the first detection information, each second detection information and the center position of the image plane of the detection component, thereby realizing non-rotational measurement of the sample to be measured, reducing the measurement time of the sample to be measured and improving the measurement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0019] Figure 1 This is one of the structural schematic diagram examples of the eccentricity measuring device in the embodiment of the present application; Figure 2 This is the second example of the structural schematic diagram of the eccentricity measuring device in the embodiment of the present application; Figure 3 This is the third example of the structural schematic diagram of the eccentricity measuring device in the embodiment of the present application; Figure 4 This is the fourth example of the structural schematic diagram of the eccentricity measuring device in the embodiment of the present application; Figure 5 This is the fifth example of the structural schematic diagram of the eccentricity measuring device in the embodiment of the present application; Figure 6This is a flow chart of an eccentricity measurement method in one embodiment of the present application; Figure 7 Schematic diagram of the internal structure of a computer device in one embodiment of the present application.

[0020] Description of Figure Numbers: 1-carrying assembly, 2-detection assembly, 3-first spectroscopic assembly, 31-first spectroscope, 32-first focusing mechanism, 321-first focusing objective lens, 322-first objective lens converter, 323-first light hole, 33-second focusing mechanism, 331-second focusing objective lens, 332-second objective lens converter, 333-second light hole, 34-second spectroscope, 35-light transmission control assembly, 351-first shutter, 352-second shutter, 4-calibration assembly, 41-first reflector, 42-first calibration element, 421-second reflector, 422-first light source, 43-third focusing objective lens, 44-third reflector, 45-second calibration element, 451-fourth reflector, 452-second light source, 5-sample to be tested, 6-motion stand.

[0021] The purpose, features and advantages of this application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0024] In the case of using “including”, “having”, and “comprising” described herein, another component may be added unless a clear limiting term such as “only”, “consisting of”, etc. is used. Unless mentioned otherwise, a term in the singular form may include a plural form and should not be understood as being one in number.

[0025] It should be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of the present application.

[0026] It should also be understood that when interpreting an element, even if not explicitly described, the element is interpreted as including a range of error, which should be within the acceptable deviation range of the specific value determined by those skilled in the art. For example, "approximately", "approximately" or "substantially" can mean within one or more standard deviations, which are not limited here.

[0027] In addition, the drawings are not drawn to a 1:1 scale, and the relative sizes of the elements in the drawings are drawn only as examples and not necessarily according to the true scale.

[0028] At present, in the relevant technology, the optical eccentricity of the lens is an important basis for judging the quality of the optical lens assembly. However, the current method mainly uses a rotary eccentricity measuring instrument to measure the eccentricity of the lens. This method requires a high-precision air-floating turntable as the reference axis, and drives the lens to rotate through the high-precision air-floating turntable to perform rotation measurement on the lens, which has low measurement efficiency.

[0029] In order to solve the above problems, the inventors further developed the technical solutions of the embodiments of the present application. Specifically, the eccentricity measuring device provided in the embodiments of the present application includes: a detection component, a first spectroscopic component and a calibration component. The detection component is used to output measurement light and obtain detection information based on the received light beam. The first spectroscopic component is located on the outgoing light path of the detection component, and is used to divide the measurement light into multiple sub-measurement lights, and converge the sub-measurement lights transmitted along the first direction to project them onto the first area where the sample to be measured is located, wherein the sample to be measured is a lens. The calibration component is used to reflect the sub-measurement light transmitted along the second direction or output the calibration light, so as to output the light beam to the first spectroscopic component, so that the first spectroscopic component reflects the light beam to the detection component, and forms a reflected image on the detection component, wherein the second direction intersects with the first direction.

[0030] The eccentricity measuring device of the present application includes a carrier component, a detection component, a first spectroscopic component and a calibration component. The carrier component carries the sample to be tested to fix the sample to be tested. The detection component outputs the measuring light. The first spectroscopic component divides the measuring light into multiple sub-beams of measuring light. The sub-measuring light transmitted along the first direction is projected to the first area where the sample to be tested is located. The detection component can receive the reflected light from the first area to obtain the detection information of the surface to be tested of the sample to be tested. The sub-measuring light transmitted along the second direction is projected to the calibration component, so that the calibration component reflects the sub-measuring light transmitted along the second direction or outputs the calibration light to output the light beam to the first spectroscopic component. The output light beam is reflected by the first spectroscopic component and transmitted to the detection component, and a reflection image is formed on the detection component. The detection component can determine the calibration data of the moving axis of the detection component based on the detection information obtained from the reflection image, and determine the eccentricity in combination with the calibration data and the detection information of the surface to be tested of the sample to be tested, so as to measure the sample to be tested without rotating the sample to be tested, thereby reducing the measurement time of the sample to be tested and improving the measurement efficiency. In addition, based on the calibration data, real-time calibration of the moving axis of the detection component can be achieved, thereby providing more accurate calibration data for eccentricity measurement; at the same time, due to the introduction of real-time calibration, the device does not need to have high requirements on the accuracy of the moving axis itself, and there is no need to introduce high-cost equipment such as high-precision air-floating turntables, thereby significantly reducing costs.

[0031] The above is the core idea of ​​this application. The technical solutions in the embodiments of this application will be described clearly and completely below in conjunction with the drawings in the embodiments of this application. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0032] Figure 1 This is one of the structural schematic diagram examples of the eccentricity measuring device in the embodiment of the present application; Figure 2 This is a second example of a structural schematic diagram of an eccentricity measuring device in an embodiment of the present application. In one embodiment, Figure 1 and Figure 2 As shown, the present application provides an eccentricity measuring device, which includes: a detection component 2, a first spectroscopic component 3 and a calibration component 4.

[0033] In one example, the eccentricity measuring device may further include: a carrier assembly 1. The carrier assembly 1 is used to carry the sample 5 to be measured, wherein the sample 5 to be measured is a lens. In application, the carrier assembly 1 may also be used to adjust the posture of the sample 5 to be measured, so as to adjust the surface of the sample 5 to be measured that receives the measuring light. Exemplarily, the carrier assembly 1 may be a four-dimensional adjustment table, and the sample 5 to be measured may be fixed on the tooling of the four-dimensional adjustment table, and the four non-axial degrees of freedom of the sample may be adjusted by the four-dimensional adjustment table.

[0034] It should be noted that in order to explain this plan clearly, Figure 1 and Figure 2 The following is a specific structural example of an eccentricity measuring device. Figure 1 and Figure 2 The object-carrying component 1, the detection component 2, the first light-splitting component 3 and the calibration component 4 are only an example structure of the present application. The object-carrying component 1, the detection component 2, the first light-splitting component 3 and the calibration component 4 can also be other structures. Figure 1 and Figure 2 The structural example does not constitute a limitation on the structures of the object carrier component 1, the conversion component 3 and the imaging component 4.

[0035] The detection component 2 is used to output the measuring light and obtain the detection information according to the received light beam. The detection component 2 may include an angle measuring sensor to measure the eccentricity of the sample 5 to be measured.

[0036] The first light splitting component 3 is located on the outgoing light path of the detection component 2, and is used to split the measurement light into multiple sub-measurement lights, and converge the first sub-measurement lights transmitted along the first direction and project them onto the first area where the sample 5 to be measured is located.

[0037] It can be understood that the first light splitting component 3 receives the measurement light output by the detection component 2, and can divide the measurement light into sub-measurement lights transmitted in different directions. The first light splitting component 3 can converge the first sub-measurement light transmitted in the first direction and project it to the first area where the sample to be tested 5 is located, so that the sample to be tested 5 reflects the sub-measurement light, and the detection component 2 can receive the reflected light of the sample to be tested 5 to obtain the position of the reflected image of the sample to be tested 5, thereby achieving the measurement of the sample to be tested 5.

[0038] The calibration component 4 is used to reflect the second sub-measurement light or output calibration light transmitted along the second direction to output a light beam to the first spectroscopic component 3, so that the first spectroscopic component 3 outputs reflected light to the detection component 2, wherein the second direction intersects with the first direction.

[0039] It can be understood that the first spectroscopic component 3 can at least divide the measuring light into the first sub-measuring light and the second sub-measuring light. The first spectroscopic component 3 converges the first sub-measuring light and projects it to the first area where the sample 5 to be measured is located, and projects the second sub-measuring light to the calibration component 4. The calibration component 4 can reflect the second sub-measuring light transmitted along the second direction to output the calibration light to the first spectroscopic component 3, so that the first spectroscopic component 3 outputs the reflected light beam to the detection component 2, so that the detection component 2 can detect the reflection inclination between the detection component 2 and the calibration component 4 according to the reflected light, that is, the angle between the image plane of the detection component 2 and the reference plane of the calibration component 4. Using the reference plane of the calibration component 4 as a reference, the calibration of the motion axis of the detection component 2 can be achieved. Since the detection component 2 can obtain the detection information according to the received light beam (that is, the above-mentioned reflection inclination can be obtained), therefore, the real-time calibration of the motion axis of the detection component 2 can be achieved based on the detection information of the detection component 2, providing more accurate calibration data for eccentricity measurement, without the need to perform rotation measurement of the sample 5 to be measured, thereby improving the measurement efficiency. At the same time, due to the introduction of real-time calibration, the device does not need to have high requirements on the accuracy of the motion axis itself, thereby significantly reducing the cost.

[0040] The above-mentioned eccentricity measuring device includes a load component 1, a detection component 2, a first spectroscopic component 3 and a calibration component 4. The load component 1 carries the sample 5 to be measured, and fixes the sample 5 to be measured. The detection component 2 outputs the measuring light. The first spectroscopic component 3 divides the measuring light into a plurality of sub-beams of measuring light, and projects the sub-beams of measuring light transmitted along the first direction to the first area where the sample 5 to be measured is located. The detection component 2 can receive the reflected light from the first area to obtain the detection information of the surface to be measured of the sample 5 to be measured. The sub-beams of measuring light transmitted along the second direction are projected to the calibration component 4, so that the calibration component 4 reflects the sub-beams of measuring light transmitted along the second direction or outputs the calibration light, so as to output the light beam to the first spectroscopic component. The output light beam is reflected and transmitted to the detection component 2 by the first spectroscopic component 3, and forms a reflection image on the detection component 2. The detection component 2 can use the detection information obtained from the reflection image as the calibration data of the moving axis of the detection component 2, and determine the eccentricity by combining the calibration data and the detection information of the surface to be measured of the sample 5 to be measured, so as to measure the sample 5 to be measured without rotating the sample 5 to be measured, thereby reducing the measurement time of the sample 5 to be measured and improving the measurement efficiency. In addition, based on the calibration data, real-time calibration of the moving axis of the detection component 2 can be achieved, thereby providing more accurate calibration data for eccentricity measurement; at the same time, due to the introduction of real-time calibration, the device does not need to have high requirements on the accuracy of the moving axis itself, and there is no need to introduce high-cost equipment such as high-precision air-floating turntables, thereby significantly reducing costs.

[0041] In one embodiment, the detection component 2 includes: an autocollimator.

[0042] The autocollimator can be an optical autocollimator, a photoelectric autocollimator, a laser collimator, etc. An autocollimator is a measuring instrument that converts angle measurement into linear measurement using the principle of light self-collimation, and can measure small angle changes. The autocollimator can be used to measure the eccentricity of the sample 5 to be measured.

[0043] In one example, the detection component 2 may be an autocollimator.

[0044] In one embodiment, if Figure 1 and Figure 2 As shown, the first beam splitter component 3 includes: a first beam splitter 31 and a first focusing mechanism 32 .

[0045] The first beam splitter 31 is located on the outgoing light path of the detection component 2, and is used to split the measurement light into multiple sub-beams of measurement light. The first beam splitter 31 may be a semi-transparent and semi-reflective mirror.

[0046] The first focusing mechanism 32 includes at least one first focusing lens 321 . The first focusing lens 321 is coaxially arranged with the first beam splitter 31 . The first focusing lens 321 is used to converge the first sub-measurement light to the first area where the sample 5 to be measured is located.

[0047] It can be understood that, in the case where there are multiple first focusing objective lenses 321, the focal lengths of the first focusing objective lenses 321 are different, and the target first focusing objective lens 321 is one of the first focusing objective lenses 321. The user determines the target first focusing objective lens 321 according to needs. The target first focusing objective lens 321 is located on the output optical path of the first sub-measurement light, and the target first focusing objective lens 321 converges the first sub-measurement light and projects it onto the sample 5 to be measured, thereby achieving eccentricity measurement of the sample 5 to be measured.

[0048] In one example, the first focusing mechanism 32 may include a first objective lens converter 322 and a plurality of first focusing objective lenses 321, each of which is disposed on the first objective lens converter 322, and the first focusing objective lenses 321 are switched by the first objective lens converter 322. In an application, a first light hole 323 may also be disposed on the first objective lens converter 322, and the first objective lens converter 322 may also adjust the position of the first light hole 323.

[0049] Exemplarily, each first focusing objective lens 321 is respectively disposed at a different position of the first objective lens converter 322. The first objective lens converter 322 is used to move to control the target structure to be located on the outgoing light path of the detection component 2.

[0050] The first focusing lenses 321 may be arranged in a predetermined manner, such as a linear arrangement.

[0051] It can be understood that by adjusting the position of the first objective lens converter 322 relative to the detection component 2, the position of each first focusing objective lens 321 relative to the detection component 2 can be adjusted. Therefore, the first focusing objective lens 321 located on the output optical path of the first sub-measurement light can be switched by driving the first objective lens converter 322 to move relative to the detection component 2, that is, the target first focusing objective lens 321 is switched. In application, the position of the first objective lens converter 322 can be adjusted manually, or the position of the first objective lens converter 322 can be adjusted by a driving mechanism, that is, the first focusing mechanism 32 can also include a driving mechanism. In one example, the driving mechanism can include a motor, and the first objective lens converter 322 is driven by the motor to move to switch the target first focusing objective lens 321.

[0052] In one embodiment, Figure 1 and Figure 2 As shown, the calibration component 4 includes: a first reflector 41 and a first calibration element 42 .

[0053] The first reflector 41 is used to receive the second sub-measurement light and project the second sub-measurement light to the second area. It can be understood that when the first beam splitter 31 is located in the outgoing light path of the detection component 2, the first beam splitter 31 will split the measurement light into multiple parallel sub-measurement lights, and the first reflector 41 can directly receive the second sub-measurement light and project it to the first calibration element 42.

[0054] The first calibration element 42 is located in the second area, and is used to output calibration light to the first reflector 41, so that the first reflector 41 projects the calibration light to the first beam splitter 31. The first calibration element 42 is one of the second reflector 421 and the first light source 422. When the first calibration element 42 is the second reflector 421, the calibration light is the reflected light of the second sub-measurement light projected by the first reflector 41. When the first calibration element 42 is the first light source 422, the calibration light is the calibration light output by the first calibration element 42.

[0055] It can be understood that when the first calibration element 42 is the second reflector 421, the second reflector 421 will reflect the second sub-measurement light projected by the first reflector 41, output the calibration light to the first reflector 41, and the first reflector 41 will output the calibration light to the first beam splitter 31, and project it to the detection component 2 through the first beam splitter 31. Based on the received light beam, the detection component 2 can determine the angle (i.e., the above-mentioned reflection inclination angle) between the image plane of the detection component 2 and the plane where the second reflector 421 is located (i.e., the above-mentioned reference plane). By ensuring that the reference plane remains unchanged, the reference plane can be used as a reference during the movement of the detection component 2 to achieve real-time calibration of the motion axis. The detection information corresponding to the calibration light can be used as calibration data of the motion axis to achieve calibration of the motion axis of the detection component 2. The eccentricity of the corresponding surface of the line of the sample 5 to be tested can be determined by combining the calibration data and the detection information of the surface to be tested of the sample 5 to be tested, so as to achieve measurement of the sample 5 to be tested without rotating the sample 5 to be tested, thereby reducing the measurement time of the sample 5 to be tested and improving the measurement efficiency.

[0056] When the first calibration element 42 is the first light source 422, the first calibration element 42 directly outputs calibration light to the first reflector 41, and the first reflector 41 outputs the calibration light to the first beam splitter 31, which is projected to the detection component 2 via the first beam splitter 31, so that the detection component 2 obtains the calibration data of the motion axis, so as to calibrate the motion axis of the detection component 2 in the subsequent measurement process.

[0057] It should be noted that, since the calibration light needs to be output to the detection component 2 while ensuring that the reference plane remains unchanged, in the application, the first reflector 41 needs to move synchronously with the detection component 2. In order to facilitate the synchronous movement of the first reflector 41 and the detection component 2, the first reflector 41 can be connected to the detection component 2.

[0058] Exemplarily, the eccentricity measurement process can be as follows: first, fix the sample 5 to be tested on the supporting component; the detection component 2, the first spectroscopic component 3 and the first reflector 41 move synchronously to the first position, at which time the focus of the first sub-measurement light is located at the center of the first surface of the sample 5 to be tested, and the detection component 2 records the first detection information, the first detection information includes the reflection image position (x1, y1) corresponding to the first surface of the sample 5 to be tested and the first reflection inclination angle (that is, the angle between the reference plane and the image plane of the detection component 2 at this position); then the detection component 2, the first spectroscopic component 3 and the first reflector 41 move synchronously to the second position with a step value, at which time the focus of the first sub-measurement light is located at the center of the second surface of the sample 5 to be tested, and during the movement, the second detection information is obtained once for each step value, and the second detection information includes the second reflection inclination angle (that is, the angle between the reference plane and the image plane of the detection component 2 at each step value). with the reference plane), when the detection component 2, the first spectroscopic component 3 and the first reflector 41 are in the second position, the second detection information acquired by the detection component 2 includes the reflection image position (x2, y2) corresponding to the second surface of the sample 5 to be tested; the offset (dx1, dy1) of the movement axis itself can be calculated according to the step value and the second reflection inclination angle of each step, that is, the offset of the movement axis itself can be determined according to the step value and the second detection information, and the actual second surface reflection image position can be written as: x2'=x2-dx1, y2'=y2-dy1; finally, the eccentricity of the first surface and the second surface can be calculated according to the distance between the first surface reflection image position and the actual second surface reflection image relative to the center of the image plane, that is, the eccentricity of the first surface and the second surface is determined according to the step value, the first detection information, each second detection information and the image plane center position of the detection component 2.

[0059] In applications, when there are more surfaces of the sample 5 to be tested, the eccentricity measurement process can be repeated to calculate the eccentricity of any number of surfaces, thereby completing the eccentricity measurement of the sample 5 to be tested.

[0060] Figure 3 This is the third example of the structural schematic diagram of the eccentricity measurement device in the embodiment of the present application. It should be noted that: Figure 1 and Figure 2 The vertical structure of the eccentricity measuring device in the embodiment of the present application is shown. The eccentricity measuring device can also be set as a horizontal structure. Figure 1 The structure shown in the figure, the horizontal structure of the eccentricity measuring device can be referred to Figure 3 Since the eccentricity measuring device is placed horizontally as a whole, the load on the corresponding supporting structure can be reduced.

[0061] Figure 4 This is the fourth example of the structural schematic diagram of the eccentricity measuring device in the embodiment of the present application; Figure 5 This is a fifth example of a structural schematic diagram of an eccentricity measuring device in an embodiment of the present application. In another embodiment, Figure 4and Figure 5 As shown, the first beam splitter component 3 includes: a second focusing mechanism 33 and a second beam splitter 34 .

[0062] The second focusing mechanism 33 includes at least one second focusing lens 331. The target second focusing lens 331 is located on the outgoing light path of the detection component 2. The target second focusing lens 331 is used to converge the measurement light. The second beam splitter 34 is arranged on the same optical axis as the target second focusing lens 331. The second beam splitter 34 is used to split the measurement light passing through the target second focusing lens 331 into a plurality of sub-beams of measurement light.

[0063] It can be understood that, unlike the first spectroscopic component 3 of the aforementioned embodiment, the spectroscopic component of this embodiment first converges the measurement light and then performs spectroscopic processing on the converged measurement light. Specifically, the second focusing mechanism 33 is located between the second spectroscope 34 and the detection component 2, and the target second focusing objective lens 331 converges the measurement light to the second spectroscope 34. The second spectroscope 34 divides the received measurement light into multiple sub-beams of measurement light, and projects the first sub-measurement light transmitted along the first direction to the first area where the sample 5 to be tested is located, and projects the second sub-measurement light transmitted along the second direction to the second area where the calibration component 4 is located. The detection component 2 obtains detection information based on the light beams received from the first area and the second area, thereby realizing eccentricity measurement.

[0064] In one example, the second focusing mechanism 33 may include a second objective lens converter 332 and a plurality of second focusing objective lenses 331, each of which is disposed on the objective lens converter, and the objective lens converter is used to realize the switching of the second focusing objective lenses 331. In application, the second objective lens converter 332 may also be provided with a second light hole 333, and the second objective lens converter 332 may also adjust the position of the second light hole 333.

[0065] In one embodiment, if Figure 4 and Figure 5 As shown, the calibration component 4 includes: a third focusing lens 43 , a third reflecting mirror 44 and a second calibration element 45 .

[0066] The third focusing objective lens 43 is used to receive the second sub-measurement light and output parallel sub-measurement light.

[0067] It can be understood that in the above-mentioned embodiment, since the second beam splitter 34 splits the converged measurement light, the second sub-measurement light projected by the second beam splitter 34 is not parallel light, which is not conducive to the subsequent reception of the light beam from the area where the calibration component 4 is located by the detection component 2. Therefore, it is necessary to receive the second sub-measurement light through the third focusing objective lens 43 and output the parallel sub-measurement light. The third focusing objective lens 43 and the target second focusing objective lens 331 are conjugate objective lenses, so that parallel light can be output. In addition, the third focusing objective lens 43 can receive parallel light, and the parallel light is still parallel light after passing through the third focusing objective lens 43 and the target second focusing objective lens 331, so that it is easy for the detection component 2 to receive it.

[0068] The third reflector 44 is used to receive the parallel sub-measurement light and project the parallel sub-measurement light to the third area.

[0069] The second calibration element 45 is located in the third area, and is used for outputting calibration light to the third reflector 44, so that the third reflector 44 outputs calibration light to the second spectrometer 34, wherein the second calibration element 45 is one of the fourth reflector 451 and the second light source 452, and when the second calibration element 45 is the fourth reflector 451, the calibration light is the reflected light of the parallel sub-measurement light projected by the third reflector 44, and when the second calibration element 45 is the second light source 452, the calibration light is the calibration light output by the second calibration element 45.

[0070] It can be understood that when the second calibration element 45 is the fourth reflector 451, the fourth reflector 451 will reflect the second sub-measurement light projected by the third reflector 44, and output the calibration light to the third reflector 44. The third reflector 44 outputs the calibration light to the detection component 2 through the third focusing lens, the second beam splitter 34 and the target second focusing lens. Based on the received light beam, the detection component 2 can determine the angle (i.e., the above-mentioned reflection inclination) between the image plane of the detection component 2 and the plane where the fourth reflector 451 is located (i.e., the above-mentioned reference plane). By ensuring that the reference plane remains unchanged, the reference plane can be used as a reference during the movement of the detection component 2 to achieve real-time calibration of the motion axis. The detection information corresponding to the calibration light can be used as calibration data of the motion axis to achieve calibration of the motion axis of the detection component 2. The eccentricity of the corresponding surface of the line of the sample 5 to be tested can be determined by combining the calibration data and the detection information of the surface to be tested of the sample 5 to be tested, so as to achieve measurement of the sample 5 to be tested without rotating the sample 5 to be tested, thereby reducing the measurement time of the sample 5 to be tested and improving the measurement efficiency.

[0071] When the second calibration element 45 is the second light source 452, the second calibration element 45 directly outputs the calibration light to the third reflector 44, and the third reflector 44 outputs the calibration light to the detection component 2 via the third focusing lens, the second beam splitter 34 and the target second focusing lens, so that the detection component 2 obtains the calibration data of the motion axis, so as to calibrate the motion axis of the detection component 2 in the subsequent measurement process.

[0072] Similarly, since it is necessary to output calibration light to the detection component 2 while ensuring that the reference plane remains unchanged, the third reflector 44 and the third focusing lens 43 need to move synchronously with the detection component 2. In order to facilitate the third reflector 44 and the third focusing lens 43 to move synchronously with the detection component 2, the third reflector 44 and the third focusing lens 43 can be connected to the detection component 2 respectively.

[0073] The specific measurement process can refer to the description of the eccentricity measurement process mentioned above, which will not be repeated here.

[0074] In one embodiment, Figures 1 to 5 As shown, the first light splitting component 3 further includes: a light transmission control component 35, and the light transmission control component 35 is used to control the shielding of the target sub-measurement light, wherein the target sub-measurement light includes at least one of the first sub-measurement light and the second sub-measurement light.

[0075] It can be understood that, in the absence of the light transmission control component 35, the detection component 2 may receive light beams from the area of ​​the sample to be tested 5 and the area of ​​the calibration component 4 at the same time, and multiple reflected images may appear on the image plane, which must be distinguished by an algorithm. After the light transmission control component 35 is set, the light transmission control component 35 can be used to control the shielding of the target sub-measurement light, and the light beams from the area of ​​the sample to be tested 5 and the area of ​​the calibration component 4 are received separately, thereby avoiding the situation where multiple reflected images appear on the image plane, and no need to distinguish them by an algorithm.

[0076] In one embodiment, if Figures 1 to 5 As shown, the light transmission control component 35 includes: a first shutter 351 and a second shutter 352 .

[0077] The first shutter 351 is located on the transmission optical path of the first sub-measurement light, and is used to shield the first sub-measurement light. The second shutter 352 is located on the transmission optical path of the second sub-measurement light, and is used to shield the second sub-measurement light.

[0078] It can be understood that the shutter can control exposure, blocking light when the shutter is closed and allowing light to pass when the shutter is open. By controlling the opening and closing of the first shutter 351, the output of the first sub-measurement light can be controlled, and by controlling the opening and closing of the second shutter 352, the output of the second sub-measurement light can be controlled. It should be understood that by controlling the opening and closing of the first shutter 351 and the second shutter 352, the detection component 2 can separately receive the light beams from the area of ​​the sample 5 to be tested and the area of ​​the calibration component 4, thereby avoiding the situation where multiple reflected images appear on the image plane without distinguishing them through an algorithm.

[0079] In this embodiment, the eccentricity measurement process can be as follows: first, fix the sample 5 to be tested on the supporting component; the detection component 2, the first spectroscopic component 3 and the first reflector 41 move synchronously to the first position, control the first shutter 351 to open, and the second shutter 352 to close. At this time, the focus of the first sub-measurement light is located at the spherical center position of the first surface of the sample 5 to be tested, and the detection component 2 records the reflected image position (x1, y1) of the first surface of the sample 5 to be tested; then control the first shutter 351 to close, and the second shutter 352 to open, and the detection component 2 records the corresponding first reflection inclination angle (that is, the angle between the reference plane and the image plane of the detection component 2 at this position); then keep the first shutter 351 closed, and the second shutter 352 open, and the detection component 2, the first spectroscopic component 3 and the first reflector 41 move synchronously to the second position with a step value, at this time, the focus of the first sub-measurement light is located at the spherical center position of the second surface of the sample 5 to be tested. During the movement, the second reflection inclination angle (i.e., the angle between the image plane of the detection component 2 and the reference plane) is obtained once for each moving step value. When the detection component 2, the first light splitting component 3 and the first reflector 41 are in the second position, the first shutter 351 is controlled to be opened and the second shutter 352 is closed, and the detection component 2 obtains the reflection image position (x2, y2) corresponding to the second surface of the sample 5 to be tested; the offset (dx1, dy1) of the movement axis itself can be calculated according to the step value and the second reflection inclination angle of each step, that is, the offset of the movement axis itself can be determined according to the step value and the second detection information, and the actual second surface reflection image position can be written as: x2'=x2-dx1, y2'=y2-dy1; finally, the eccentricity of the first surface and the second surface can be calculated according to the distance between the first surface reflection image position and the actual second surface reflection image relative to the center of the image plane.

[0080] In one embodiment, if Figures 1 to 5 As shown, the eccentricity measuring device further includes: a moving stand 6, which is connected to the detection component 2 and is used to drive the detection component 2 to move.

[0081] It should be noted that the first spectroscopic component 3 needs to move synchronously with the detection component 2 so that the distance between the image plane of the detection component 2 and the convergence focus of the first sub-measurement light remains unchanged. In one example, the first spectroscopic component 3 can be installed on the detection component 2 so that the first spectroscopic component 3 and the detection component 2 can move synchronously in the vertical direction. In another example, the first spectroscopic component 3 can be installed on a motion stand 6, and the first spectroscopic component 3 and the detection component 2 are driven to move synchronously by the motion stand 6. It should also be noted that other structures that need to move synchronously with the detection component 2 can also be installed on the motion stand 6, such as the first reflector 41 of the aforementioned embodiment. The structures that need to move synchronously in the eccentricity measurement device can be found in Figures 1 to 4 The measurement system shown will not be described in detail here.

[0082] It can be understood that the moving table 6 is connected to the detection group, and the moving table 6 can drive the detection component 2 to move in the vertical direction, so that the distance from the carrier component 1 can be adjusted, and then the distance from the sample to be tested 5 can be adjusted, so that the focus of the first sub-measurement light can be changed from the center position of the first surface to the center position of the second surface, thereby realizing the eccentricity measurement of the first surface and the second surface of the sample to be tested 5.

[0083] In one embodiment, the eccentricity measuring device may further include: a processing component (not shown in the figure), the processing component being used to obtain first detection information of the detection component 2 when the convergence focus of the first sub-measurement light is located at the center position of the sphere corresponding to the first surface of the sample 5 to be measured; in the process of the detection component 2 and the first spectroscopic component 3 moving synchronously to the target position with a step value, the second detection information of the detection component 2 is obtained for each step value of movement, wherein when the detection component 2 and the first spectroscopic component 3 are at the target position, the convergence focus of the first sub-measurement light is located at the center position of the sphere corresponding to the second surface of the sample 5 to be measured; and the eccentricity of the first surface and the second surface is determined according to the step value, the first detection information, each second detection information and the image plane center position of the detection component 2.

[0084] The specific measurement process can refer to the eccentricity measurement process of the above embodiment. The eccentricity of the first surface and the second surface can be calculated by the processing component, thereby obtaining the eccentricity of the first surface and the second surface of the sample 5 to be tested.

[0085] In one embodiment, the eccentricity measuring device may further include: a driving component, which may be a motor. A processing component may be connected to the driving component, and the processing component is further used to control the driving component to drive the detection component 2 to move, so as to realize the movement of the detection component 2 during the eccentricity measurement process.

[0086] In another embodiment, the processing component may be connected to the motion platform 6 , and the processing component is further used to control the motion platform 6 to drive the detection component 2 to move, so as to drive the detection component 2 to move.

[0087] In one embodiment, the processing component may also be connected to the light transmission control component 35, and the processing component shields the target sub-measurement light by controlling the working state of the light transmission control component 35. For example, when the light transmission control component 35 includes a first shutter 351 and a second shutter 352, the processing component may control the opening and closing of the first shutter 351 and the second shutter 352, thereby controlling the shielding of at least one of the first sub-measurement light and the second sub-measurement light.

[0088] Figure 6 FIG. 1 is a flow chart of an eccentricity measurement method in an embodiment of the present application. Figure 6 As shown, the present application also provides an eccentricity measurement method, which is applied to the eccentricity measurement device of any of the above embodiments. The eccentricity measurement method includes the following steps S601 to S603.

[0089] S601: Acquire first detection information of the detection component when the convergence focus of the first sub-measurement light is located at a position corresponding to the center of a sphere on the first surface of the sample to be measured.

[0090] S601: In the process of synchronously moving the detection component and the first spectroscopic component to the target position with a step value, the second detection information of the detection component is obtained every time the step value is moved, wherein, when the detection component and the first spectroscopic component are at the target position, the convergence focus of the first sub-measurement light is located at the corresponding spherical center position of the second surface of the sample to be measured.

[0091] S603: Determine the eccentricity of the first surface and the second surface according to the step value, the first detection information, each second detection information and the image plane center position of the detection component.

[0092] The specific eccentricity measurement process can be found in the description of the aforementioned embodiment and will not be described in detail here.

[0093] In the above-mentioned eccentricity measurement method, when the convergence focus of the sub-measurement light transmitted along the first direction is located at the position of the center of the sphere corresponding to the first surface of the sample to be measured, the first detection information of the detection component is obtained, and the position of the reflected image of the first surface of the sample to be measured can be determined based on the first detection information. In the process of the detection component and the first spectroscopic component synchronously moving to the target position with a step value, the second detection information of the detection component is obtained for each step value, and the second detection information includes the imaging information of the calibration light output by the calibration component. Then, the calibration data of the moving axis of the detection component can be obtained based on the step value and the second detection information. In addition, when the detection component and the first spectroscopic component are at the target position, the convergence focus of the sub-measurement light transmitted along the first direction is located at the position of the center of the sphere corresponding to the second surface of the sample to be measured, and the position of the reflected image corresponding to the second surface of the sample to be measured can be determined based on the second detection information at this time. The reflected image position of the second surface to be detected can be calibrated through the calibration data to obtain the actual reflected image position of the second surface, and the eccentricity of the first surface and the second surface can be determined based on the reflected image position of the first surface, the actual reflected image position of the second surface and the center position of the image plane. Therefore, the eccentricity of the first surface and the second surface can be determined according to the first detection information, each second detection information and the center position of the image plane of the detection component, thereby realizing non-rotational measurement of the sample to be measured, reducing the measurement time of the sample to be measured and improving the measurement efficiency.

[0094] In one embodiment, the eccentricity measuring device includes a moving stand. The eccentricity measuring method further includes: controlling the moving stand to drive the detection component to move from the third position to the fourth position at a step value. Wherein, when the detection component is in the third position, the convergence focus of the first sub-measurement light is located at the position of the spherical center corresponding to the first surface of the sample to be measured; when the detection component is in the fourth position, the convergence focus of the first sub-measurement light is located at the position of the spherical center corresponding to the second surface of the sample to be measured.

[0095] In one embodiment, the eccentricity measuring device includes a first shutter and a second shutter. The eccentricity measuring method also includes: when the detection component is in the third position, the first shutter is controlled to be opened and the second shutter is closed; after obtaining the position of the reflection image of the first surface of the sample to be measured, the first shutter is controlled to be closed and the second shutter is controlled to be opened; when the detection component moves from the third position to the fourth position with a step value, the first shutter is controlled to remain closed and the second shutter is controlled to remain open; when the detection component is in the fourth position, the first shutter is controlled to be opened and the second shutter is closed.

[0096] In one embodiment, the present application also provides a computer device, comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the eccentricity measurement method in the above-mentioned embodiment.

[0097] Reference below Figure 7 , which shows a schematic diagram of the structure of a computer device suitable for implementing the embodiments of the present application. The computer device in the embodiments of the present application may include but is not limited to mobile terminals such as mobile phones, laptop computers, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions), PMPs (Portable Media Players), vehicle-mounted terminals (such as vehicle-mounted navigation terminals), etc., and fixed terminals such as digital TVs, desktop computers, etc. Figure 7 The computer device shown is only an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0098] like Figure 7 As shown, the computer device may include a processing device 1001 (such as a central processing unit, a graphics processor, etc.), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM: Read Only Memory) 1002 or a program loaded from a storage device 1003 to a random access memory (RAM: Random Access Memory) 1004. In RAM1004, various programs and data required for the operation of the computer device are also stored. The processing device 1001, ROM1002 and RAM1004 are connected to each other through a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Generally, the following systems can be connected to the I / O interface 1006: an input device 1007 including, for example, a touch screen, a touch pad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; an output device 1008 including, for example, a liquid crystal display (LCD: Liquid Crystal Display), a speaker, a vibrator, etc.; a storage device 1003 including, for example, a magnetic tape, a hard disk, etc.; and a communication device 1009. The communication device 1009 can allow the computer device to communicate with other devices wirelessly or by wire to exchange data. Although the figure shows a computer device with various systems, it should be understood that it is not required to implement or have all the systems shown. More or fewer systems can be implemented or have alternatively.

[0099] In particular, according to the embodiments disclosed in the present application, the process described above with reference to the flowchart can be implemented as a computer software program. For example, the embodiments disclosed in the present application include a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication device, or installed from a storage device 1003, or installed from a ROM 1002. When the computer program is executed by the processing device 1001, the above-mentioned functions defined in the method of the embodiment disclosed in the present application are executed.

[0100] The computer device provided by the present application adopts the eccentricity measurement method in the above embodiment to realize non-rotational measurement of the optical eccentricity of the lens. Compared with the prior art, the beneficial effects of the computer device provided by the present application are the same as the beneficial effects of the eccentricity measurement method provided by the above embodiment, and other technical features in the computer device are the same as the features disclosed in the method of the previous embodiment, which will not be repeated here.

[0101] It should be understood that the various parts disclosed in this application can be implemented by hardware, software, firmware or a combination thereof. In the description of the above embodiments, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0102] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0103] The present application provides a computer-readable storage medium having computer-readable program instructions (ie, computer programs) stored thereon, and the computer-readable program instructions are used to execute the eccentricity measurement method in the above-mentioned embodiment.

[0104] The computer-readable storage medium provided in the present application may be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, systems or devices, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM: Random Access Memory), a read-only memory (ROM: Read Only Memory), an erasable programmable read-only memory (EPROM: Erasable Programmable Read Only Memory or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM: CD-Read Only Memory), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, system or device. The program code contained on the computer-readable storage medium may be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (Radio Frequency: Radio Frequency), etc., or any suitable combination of the above.

[0105] The computer-readable storage medium may be included in the computer device; or may exist independently without being installed in the computer device.

[0106] The computer-readable storage medium carries one or more programs. When the one or more programs are executed by a computer device, the computer device implements the steps of the eccentricity measurement method in any of the above embodiments.

[0107] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0108] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present application. In this regard, each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0109] The modules involved in the embodiments described in this application may be implemented by software or hardware, wherein the name of the module does not constitute a limitation on the unit itself in some cases.

[0110] The readable storage medium provided in the present application is a computer-readable storage medium, which stores computer-readable program instructions (i.e., computer programs) for executing the above-mentioned eccentricity measurement method, and can realize automatic calculation of the final parameters related to the sample to be tested. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in the present application are the same as the beneficial effects of the eccentricity measurement method provided in the above-mentioned embodiment, and will not be described in detail here.

[0111] The present application also provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the steps of the eccentricity measurement method as described above are implemented.

[0112] The computer program product provided in this application can realize the automatic calculation of the final parameters related to the sample to be tested. Compared with the prior art, the beneficial effects of the computer program product provided in this application are the same as the beneficial effects of the eccentricity measurement method provided in the above embodiment, which will not be repeated here.

[0113] The above descriptions are only some embodiments of the present application, and are not intended to limit the patent scope of the present application. All equivalent structural changes made using the contents of the present application specification and drawings under the technical concept of the present application, or direct / indirect applications in other related technical fields are included in the patent protection scope of the present application.

Claims

1. An eccentricity measuring device, characterized in that: The eccentricity measuring device comprises: A detection component, used for outputting measurement light and obtaining detection information according to the received light beam; A first light splitting component, located on the outgoing light path of the detection component, is used to split the measurement light into multiple sub-beams of measurement light, and converge the first sub-measurement light transmitted along a first direction and project it onto a first area where a sample to be measured is located, wherein the sample to be measured is a lens; The calibration component is used to reflect the second sub-measurement light transmitted along the second direction or output the calibration light to output the light beam to the first spectroscopic component so that the first spectroscopic component outputs the reflected light to the detection component, wherein the second direction intersects with the first direction.

2. The eccentricity measuring device according to claim 1, characterized in that: The first light splitting component comprises: A first beam splitter, located on an outgoing light path of the detection component, and configured to split the measurement light into a plurality of sub-beams of measurement light; The first focusing mechanism includes at least one first focusing lens. The target first focusing lens and the first beam splitter are arranged on the same optical axis. The target first focusing lens is used to converge the first sub-measurement light to the first area where the sample to be measured is located.

3. The eccentricity measuring device according to claim 2, characterized in that: The calibration assembly comprises: a first reflector, the first reflector being used to receive the second sub-measuring light and project the second sub-measuring light to a second area; A first calibration element is located in the second area and is used to output calibration light to the first reflector so that the first reflector projects the calibration light to the first spectrometer, wherein the first calibration element is one of the second reflector and the first light source, and when the first calibration element is the second reflector, the calibration light is the reflected light of the second sub-measurement light projected by the first reflector, and when the first calibration element is the first light source, the calibration light is the calibration light output by the first calibration element.

4. The eccentricity measuring device according to claim 1, characterized in that: The first light splitting component comprises: A second focusing mechanism includes at least one second focusing lens, the target second focusing lens is located on the outgoing light path of the detection component, and the target second focusing lens is used to converge the measurement light; The second beam splitter is arranged on the same optical axis as the target second focusing objective lens, and is used to split the measurement light passing through the target second focusing objective lens into multiple sub-beams of measurement light.

5. The eccentricity measuring device according to claim 4, characterized in that: The calibration assembly comprises: a third focusing objective lens, used for receiving the second sub-measurement light and outputting parallel sub-measurement light; a third reflector, the third reflector being used to receive the parallel sub-measurement light and project the parallel sub-measurement light to a third area; A second calibration element is located in the third area and is used to output calibration light to the third reflector so that the third reflector outputs calibration light to the second spectrometer, wherein the second calibration element is one of the fourth reflector and the second light source, and when the second calibration element is the fourth reflector, the calibration light is the reflected light of the parallel sub-measurement light projected by the third reflector, and when the second calibration element is the second light source, the calibration light is the calibration light output by the second calibration element.

6. The eccentricity measuring device according to claim 2 or 4, characterized in that: The first light splitting component further includes: a light transmission control component, and the light transmission control component is used to control shielding of target sub-measurement light, wherein the target sub-measurement light includes at least one of the first sub-measurement light and the second sub-measurement light.

7. The optical eccentricity measuring device according to claim 1, characterized in that: The eccentricity measuring device further comprises: a moving stand connected to the detection assembly and used for driving the detection assembly to move.

8. The eccentricity measuring device according to claim 1, characterized in that: The detection component comprises: an autocollimator.

9. The eccentricity measuring device according to claim 1, characterized in that: The eccentricity measuring device also includes: The object-carrying component is used for carrying the sample to be tested.

10. An eccentricity measurement method, applied to the eccentricity measurement device according to any one of claims 1 to 9, characterized in that: The method comprises: When the convergence focus of the first sub-measurement light is located at a position corresponding to the center of a sphere on the first surface of the sample to be measured, obtaining first detection information of the detection component; In the process of synchronously moving the detection component and the first light splitting component to the target position with a step value, obtaining second detection information of the detection component for each step value, wherein when the detection component and the first light splitting component are at the target position, the convergence focus of the first sub-measurement light is located at the position of the sphere center corresponding to the second surface of the sample to be tested; The eccentricity of the first surface and the second surface is determined according to the step value, the first detection information, each of the second detection information, and the image plane center position of the detection component.

Images