Semiconductor process flow simulation system and method
By introducing process analysis, vehicle management, and process control modules in the semiconductor process process designer, the problem of the flexibility and self -defined ability of the traditional designer in design and optimizing the process of processing process has been solved, and it has achieved more flexible and efficient and efficient Process process design and simulation.
Patent Information
- Application Number
- CN202411393892.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-30
- Publication Date
- 2025-01-28
AI Technical Summary
When designing and optimizing semiconductor process flow, traditional process flow designers lack flexibility and customization capabilities, and cannot meet highly customized production needs. The parameter configuration is limited by fixed templates and cannot be flexibly adjusted according to actual needs.
A semiconductor process process simulation system is proposed, including the process analysis unit, vehicle management unit, and process control module. By resolution process steps and vehicle information, control the vehicle movement to cooperate with the process process to achieve custom process steps and parameter configuration.
It improves the flexibility and accuracy of the process design, simplifies the design process, reduces the design cost, can flexibly cope with different types of vehicles and process steps, optimize process efficiency, and reduce time and resources waste.
Smart Images
Figure CN119378216A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a semiconductor process simulation system and method. Background Art
[0002] In the process of modern industrial production and management, process design and optimization is a crucial link. Process design not only affects production efficiency and product quality, but also affects the cost control and market competitiveness of enterprises. In order to improve the efficiency and accuracy of process design, process simulators came into being. The workflow designer in traditional process simulators provides a graphical operation interface, and users can intuitively design and adjust the process through operations such as dragging and clicking.
[0003] However, since the controls and functional modules of traditional designers are pre-defined, users can only select and configure within the range of these preset controls and modules when designing process flows. Although this method simplifies the design process, it also limits the user's customization capabilities and cannot meet the needs of some special process flows. For example, in some highly customized production processes, specific process steps and parameter configurations may be required, and these steps and parameters cannot find corresponding controls and modules in traditional designers, resulting in users being unable to achieve accurate process flow configuration.
[0004] Secondly, the configuration of the process flow not only involves the arrangement and combination of each step, but also requires detailed setting and adjustment of the parameters of each step to ensure the accuracy and feasibility of the process flow. Traditional designers use fixed configuration templates for parameter configuration. Users can only select and adjust from these templates, and cannot flexibly configure parameters according to actual needs.
[0005] Therefore, how to improve the flexibility and accuracy of process design, simplify the design process and reduce design costs has become a technical problem that needs to be solved urgently. Summary of the invention
[0006] The main purpose of the present invention is to provide a semiconductor process flow simulation system and method, aiming to improve the flexibility and accuracy of process flow design, simplify the design process and reduce design costs.
[0007] In order to achieve the above object, the present invention proposes a semiconductor process simulation system, comprising A process analysis unit, used to analyze the first target file and obtain the process steps in the first target file; a vehicle management unit, configured to parse the second target file and obtain vehicle information in the second target file; and The process control module obtains the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, and controls the movement of the carrier to coordinate with the process flow in the process steps according to the process steps, carrier information, the starting position of the carrier, and the end position of the carrier to complete the process flow simulation.
[0008] In one embodiment of the present application, the process control module includes: Multiple process machines are used to complete different process steps; A lower execution unit is used to execute the transport task of the carrier, and after completing the transport instruction, send the current position to the carrier management unit to update the carrier position information; and The process control unit obtains the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, generates a transport instruction based on the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, and sends it to the lower-level execution unit. After the lower-level execution unit completes the execution, the process machine is controlled to execute the corresponding process flow in the process steps.
[0009] In one embodiment of the present application, a custom unit is also included, which can adjust the process steps to change the process flow in the process steps.
[0010] In one embodiment of the present application, a time setting module is also included to set the time for each process machine.
[0011] The present application also discloses a method for a semiconductor process simulation system, comprising the following steps: Get process steps and carrier information; According to the process steps and the carrier information, the movement of the carrier is controlled to coordinate with the process flow of the process steps to complete the process flow simulation.
[0012] In one embodiment of the present application, controlling the movement of the carrier to coordinate with the process flow of the process steps includes the following steps: S1. Obtain the current position of the target carrier and the initial position of the process step, and control the carrier to move to the initial position of the process step. After the movement is completed, update the current position of the target carrier and the starting position of the next process flow in the process step; S2, execute the process flow in the process steps, and after the process flow is completed, determine whether the current process flow is the last process flow, if not, repeat steps S1 and S2.
[0013] In one embodiment of the present application, it is determined whether the current process flow is the last process flow in the process steps, and if so, the process flow is terminated.
[0014] In an embodiment of the present application, the process steps include at least one of a process sequence and a process parameter.
[0015] In one embodiment of the present application, the carrier information includes at least one of a carrier ID and a process batch of the carrier.
[0016] By adopting the above technical solution, the system can efficiently simulate the semiconductor process flow by parsing the process steps and carrier information, thereby improving the flexibility of process flow design, simplifying the design process, and reducing design costs. Through the effective analysis and management of the carrier management unit, the system can flexibly respond to different types of carriers to ensure that they move efficiently according to the preset process. The real-time monitoring and feedback mechanism of the process control module enables the system to dynamically adjust according to the current situation, optimize process efficiency, and reduce the waste of time and resources. The system design has good scalability and can easily access new process steps or carrier types to adapt to different production needs and process changes. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The present invention is described in detail below with reference to specific embodiments and accompanying drawings, wherein: Figure 1 It is a structural schematic diagram of the system of the first embodiment of the present invention; Figure 2 It is a schematic diagram of the process structure of the present invention. DETAILED DESCRIPTION
[0018] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention is described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the following specific embodiments are only used to explain the present invention and do not constitute a limitation to the present invention.
[0019] like Figure 1 To achieve the above-mentioned purpose, the present invention proposes a semiconductor process simulation system, comprising A process analysis unit, used to analyze the first target file and obtain the process steps in the first target file; a vehicle management unit, configured to parse the second target file and obtain vehicle information in the second target file; and The process control module obtains the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, and controls the movement of the carrier to coordinate with the process flow in the process steps according to the process steps, carrier information, the starting position of the carrier, and the end position of the carrier to complete the process flow simulation.
[0020] Specifically, the process analysis unit is responsible for parsing the first target file (such as a process flow document) and extracting the process steps therein. These steps include the process sequence, the corresponding process parameters, and the ID of the process machine, etc. The extracted process step information will be passed to the process control module for subsequent process control and simulation.
[0021] The vehicle management unit parses the second target file (such as the vehicle information document) to obtain relevant information about the vehicle, such as vehicle type, vehicle capacity, starting position and target position. The vehicle information will be provided as input to the process control module to help it formulate an effective movement strategy. It is conceivable that the parsed process steps and vehicle information can be stored in the database first and then called uniformly by the process control module. At the same time, a custom interface can be provided to customize the data stored in the database, thereby improving the flexibility and accuracy of process flow design, simplifying the design process, and reducing design costs.
[0022] The process control module uses information from the process analysis unit and the carrier management unit to control the movement of the carrier to ensure that it works in coordination with the process steps. The process control module controls the sequence of process steps, the start and end positions of the carrier, and the process requirements. It generates control signals to indicate the movement direction and path of the carrier and monitors the progress of the process flow.
[0023] After the process parsing unit parses the file, it sends the extracted process steps to the process control module through the data interface. After the carrier management unit parses the carrier information, it similarly passes the information to the process control module. After receiving the process steps and carrier information, the process control module calculates the optimal path for carrier movement based on the process requirements and the starting and ending positions of the carrier, and generates control instructions. The control instructions are fed back to the lower execution unit through the data interface to execute the carrier movement.
[0024] By adopting the above technical solution, the system can efficiently simulate the semiconductor process flow by parsing the process steps and carrier information, thereby improving the flexibility of process flow design, simplifying the design process, and reducing design costs. Through the effective analysis and management of the carrier management unit, the system can flexibly respond to different types of carriers to ensure that they move efficiently according to the preset process. The real-time monitoring and feedback mechanism of the process control module enables the system to dynamically adjust according to the current situation, optimize process efficiency, and reduce the waste of time and resources. The system design has good scalability and can easily access new process steps or carrier types to adapt to different production needs and process changes.
[0025] In one embodiment of the present application, the process control module includes: Multiple process machines are used to complete different process steps; A lower execution unit is used to execute the transport task of the carrier, and after completing the transport instruction, send the current position to the carrier management unit to update the carrier position information; and The process control unit obtains the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, generates a transport instruction based on the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, and sends it to the lower-level execution unit. After the lower-level execution unit completes the execution, the process machine is controlled to execute the corresponding process flow in the process steps.
[0026] Specifically, multiple process machines are responsible for simulating different process flows in the process steps, such as cleaning, etching, deposition, etc. Each process machine can complete the process simulation through the process duration, that is, when the process machine starts working, the timer records the running time of the process machine to achieve process simulation.
[0027] The lower execution unit is responsible for executing the transport task of the carrier, including the transport operation from the starting point to the end point. The lower execution unit receives the transport instruction and controls the movement of the carrier according to the instruction. After completing the transport task, the lower execution unit feeds back the current position to the carrier management unit to update the position information of the carrier.
[0028] The process control unit is responsible for integrating the process steps, carrier information, starting and ending positions to generate corresponding transport instructions. The process control unit also controls the process machine to execute the corresponding process flow. The generated transport instructions are sent to the lower execution unit to guide the movement of the carrier and trigger the timing operation of the process machine after the transport is completed. The starting and ending positions of the carrier in this application can be manually input or obtained by the system itself through iteration.
[0029] The connection between the process machine and the process control unit enables the process machine to execute the corresponding process steps (simulating the process duration) according to the instructions of the process control unit. After obtaining the information that the transport is completed, the process control unit will issue an instruction to execute the process steps. The lower-level execution unit receives the transport instruction from the process control unit, and after execution, it feeds back the current carrier position to the process control unit. This feedback mechanism ensures that the process control unit can understand the carrier status in real time and perform subsequent operations. The carrier management unit receives the position information update from the lower-level execution unit. This information update enables the carrier management unit to accurately track the real-time status of the carrier for further scheduling and management.
[0030] Using the above technical solution, the system enables efficient coordination of process steps, carrier transportation and process execution through clear module division and data flow, reducing waiting time and operation delays. Since the process control unit can receive the position information of the lower execution unit in real time, the system can achieve precise control of the carrier. This precise control helps to reduce errors in the process flow and improve production quality. At the same time, the system has dynamic scheduling capabilities, which can adjust the priority of transportation tasks and process execution in real time according to changes in process steps and carrier status, thereby improving overall production efficiency.
[0031] In one embodiment of the present application, a custom unit is also included, which can adjust the process steps to change the process flow in the process steps.
[0032] Specifically, by setting up custom units, users are allowed to adjust process steps, change the order and parameters of the process, or add new process steps. Users can optimize and customize the process according to actual needs. The customized process information will be fed back to the process control unit to update the system's operating logic. With the above technical solution, users can optimize the process steps by customizing the process, thereby improving overall production efficiency. The custom unit provides a friendly user interface, which facilitates operators to intuitively adjust the process, reduces the complexity of operation, and improves the user experience.
[0033] In one embodiment of the present application, a time setting module is also included to set the time for each process machine.
[0034] Specifically, the time setting module is used to set specific process time for each process machine, including the processing time required for each process step. It can be flexibly set according to different process requirements and carrier types. The time setting information will be fed back to the process control unit to help it better manage the execution time of the process steps.
[0035] With the above technical solution, users can dynamically adjust the process time according to actual needs. For example, if a certain step needs to be extended or shortened, the system can respond immediately and adjust the execution strategy of the relevant process machine to maintain the flexibility of the production line.
[0036] The present application also discloses a method for a semiconductor process simulation system, comprising the following steps: Get process steps and carrier information; According to the process steps and the carrier information, the movement of the carrier is controlled to coordinate with the process flow of the process steps to complete the process flow simulation.
[0037] Specifically, relevant process step information is extracted from the system's process flow database, including the type, parameters, sequence and required time of each process step. Vehicle information is obtained from the vehicle management module, including vehicle type, idle status, current position, start and end positions, etc.
[0038] By developing a data analysis module, the process step files stored in the database are read to ensure the correct analysis of the structure and content of the process steps. A data interface is established to interact with the carrier management unit to obtain real-time carrier status information.
[0039] Based on the acquired process steps and carrier information, a transport instruction is generated and sent through the lower execution unit to control the specific movement of the carrier to ensure that it performs the task according to the set path and speed. The movement status of the carrier is monitored in real time to ensure that it can reach the destination smoothly and handle any abnormal situation in time. After the carrier arrives at the specified location, the corresponding process step execution is triggered to achieve a complete simulation of the process flow.
[0040] By adopting the above technical solution, the system can efficiently simulate the semiconductor process flow by analyzing the process steps and carrier information, thereby improving the flexibility of process flow design, simplifying the design process and reducing design costs.
[0041] like Figure 2 As shown, in one embodiment of the present application, controlling the movement of the carrier to coordinate with the process flow of the process steps includes the following steps: S1. Obtain the current position of the target carrier and the initial position of the process step, and control the carrier to move to the initial position of the process step. After the movement is completed, update the current position of the target carrier and the starting position of the next process flow in the process step; S2, execute the process flow in the process steps, and after the process flow is completed, determine whether the current process flow is the last process flow, if not, repeat steps S1 and S2.
[0042] Specifically, the vehicle management unit is used to obtain the current position of the target vehicle in real time. This process includes extracting the latest status information of the vehicle from the database to ensure accuracy. Of course, according to design needs, manual input can also be used to help obtain the current position of the target vehicle.
[0043] Get the initial position of the current process step from the process control unit. This includes the position information of the process tool and the required processing parameters.
[0044] Generate a movement instruction to control the target carrier to move from the current position to the initial position of the process step. The instruction will be sent to the carrier through the lower execution unit. During the movement process, the status of the carrier is monitored in real time to ensure that it moves correctly according to the instruction. After the movement is completed, the system will automatically update the current position of the target carrier and the starting position of the next process flow in the process step for subsequent operations.
[0045] After the carrier reaches the initial position of the process step, the process control unit will start the corresponding process machine for processing according to the current process information. The processing time of the process machine is recorded by the timer to simulate the processing of the process machine. After the execution is completed, the system will determine whether the current process flow is the last one. If not, it returns to step S1 and prepares to move to the next process step; if so, the entire process ends.
[0046] By adopting the above technical solution, the method ensures that the carrier moves quickly and accurately between each process step, making the execution of the entire process flow efficient and smooth. Through real-time monitoring and feedback, the time waste caused by improper carrier movement can be reduced.
[0047] In one embodiment of the present application, it is determined whether the current process flow is the last process flow in the process steps, and if so, the process flow is terminated.
[0048] With the above technical solution, if the current process flow is the last process flow of the process steps, it means that the entire process steps can be completed by completing the current process flow. At this time, after completing the process steps, the simulation process is terminated and the results are fed back, ensuring the complete implementation of the system and avoiding data loops.
[0049] In an embodiment of the present application, the process steps include at least one of a process sequence and a process parameter.
[0050] With the above technical solution, the process sequence ensures that each step is executed in a predetermined order, which helps to avoid process errors. The process parameters allow the process conditions (such as temperature, pressure, time, etc.) to be flexibly adjusted according to actual needs to optimize the process effect and product performance.
[0051] In one embodiment of the present application, the carrier information includes at least one of a carrier ID and a process batch of the carrier.
[0052] With the above technical solution, the carrier ID uniquely identifies each carrier, which is convenient for real-time monitoring and management, ensuring the accuracy and safety of operations. The status and location of the carrier can be clearly understood at any time. The process batch information helps track the specific process batch processed by the carrier, facilitating quality control and traceability, ensuring that the production process of each batch can be traced.
[0053] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A semiconductor process simulation system, characterized in that: include A process analysis unit, used to analyze the first target file and obtain the process steps in the first target file; A vehicle management unit, used to parse the second target file and obtain the vehicle information in the second target file; as well as The process control module obtains the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, and controls the movement of the carrier to coordinate with the process flow in the process steps according to the process steps, carrier information, the starting position of the carrier, and the end position of the carrier to complete the process flow simulation.
2. The semiconductor process simulation system according to claim 1, characterized in that: The process control module includes: Multiple process machines are used to complete different process steps; A lower execution unit is used to execute the transport task of the carrier, and after completing the transport instruction, send the current position to the carrier management unit to update the carrier position information; and The process control unit obtains the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, generates a transport instruction based on the process steps, carrier information, the starting position of the carrier, and the end position of the carrier, and sends it to the lower-level execution unit. After the lower-level execution unit completes the execution, the process machine is controlled to execute the corresponding process flow in the process steps.
3. The semiconductor process simulation system according to claim 1, characterized in that: Also included are custom cells that can be adjusted to the process steps to change the process flow within the process step.
4. The semiconductor process simulation system according to claim 2, characterized in that: It also includes a time setting module for setting the time of each process machine.
5. A method for a semiconductor process simulation system, characterized in that: The following steps are involved: Get process steps and carrier information; According to the process steps and the carrier information, the movement of the carrier is controlled to coordinate with the process flow of the process steps to complete the process flow simulation.
6. The semiconductor process simulation system according to claim 5, characterized in that: Controlling the movement of the carrier to coordinate with the process flow of the process steps includes the following steps: S1. Obtain the current position of the target carrier and the initial position of the process step, and control the carrier to move to the initial position of the process step. After the movement is completed, update the current position of the target carrier and the starting position of the next process flow in the process step; S2, execute the process flow in the process steps, and after the process flow is completed, determine whether the current process flow is the last process flow, if not, repeat steps S1 and S2.
7. The semiconductor process simulation system according to claim 6, characterized in that: Determine whether the current process flow is the last process flow in the process steps. If so, terminate the process.
8. The semiconductor process simulation system according to claim 5, characterized in that: The process steps include at least one of a process sequence and a process parameter.
9. The semiconductor process simulation system according to claim 5, characterized in that: The carrier information includes at least one of a carrier ID and a process batch of the carrier.