Wafer box detection equipment and wafer box detection system

Abstract

The invention discloses wafer box detection equipment and a wafer box detection system, the wafer box detection equipment comprises a feeding conveyor belt, a discharging conveyor belt, a return conveyor belt, a balance wheel sorting machine and a detection transmission belt, the side edge of the detection transmission belt is provided with a swing mechanism, and the swing mechanism is provided with a synchronous detection mechanism through a support frame; the synchronous detection mechanism comprises a hanging bracket which is installed through a horizontal moving structure and a vertical moving structure which are perpendicular to each other, a detection box is installed at the bottom end of the hanging bracket, parallel transverse rods are symmetrically arranged on the two sides of the detection box, and a plurality of laser displacement sensors are evenly installed on each transverse rod in the length direction through a plurality of detection rods. The synchronous detection mechanism is driven by the swing mechanism to move synchronously with the detection transmission belt, so that the wafer box can be dynamically detected under the condition that the equipment does not need to stop and wait, the whole detection process is automatically and continuously operated, and the detection efficiency is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of product testing equipment, and in particular to a wafer box testing equipment and a wafer box testing system. Background Art

[0002] Wafers are silicon chips used in the manufacture of silicon semiconductor integrated circuits. They are round in shape, so they are called wafers. Since the overall texture of wafers is usually fragile, in order to prevent them from being damaged during the production and transportation of wafers, they are usually loaded into special wafer boxes for temporary storage. Currently, wafer boxes on the market are equipped with card slots to facilitate the vertical card placement of wafers in the box. Multiple parallel card slots are set in a wafer box so that multiple wafers can be placed.

[0003] In the prior art, during the production of wafer boxes, the flatness of the material slots is required to be inspected after they are formed. When the material slots are deformed, the wafers may easily shake or even break during storage. The current inspection process is usually performed manually, which is not only time-consuming and labor-intensive, but also has low inspection efficiency, and it is difficult to ensure inspection accuracy and consistency. When some existing automatic inspection lines are conducting inspections, they generally need to be stopped for inspection when the product is moved to the inspection area. The entire inspection process still has the problem of low efficiency.

[0004] To this end, we propose a wafer box detection device and a wafer box detection system to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a wafer box detection device and a wafer box detection system to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions: A wafer box detection device comprises a feed conveyor belt, a discharge conveyor belt, a return conveyor belt, a swing wheel sorter and a detection transmission belt, wherein the feed conveyor belt, the detection transmission belt, the swing wheel sorter and the discharge conveyor belt are sequentially arranged on the same straight line according to the transmission direction, and the return conveyor belt is arranged on the other side of the swing wheel sorter and is perpendicular to the transmission direction of the discharge conveyor belt, a slewing mechanism is arranged on the side of the detection transmission belt, a synchronous detection mechanism is installed on the slewing mechanism through a support frame, and the slewing mechanism is used to drive the synchronous detection mechanism and the detection transmission belt to move synchronously; The synchronous detection mechanism includes a hanger installed by a horizontal moving structure and a vertical moving structure that are perpendicular to each other. A detection box is installed at the bottom end of the hanger. Parallel cross bars are symmetrically provided on both sides of the detection box. A number of laser displacement sensors are evenly installed on each cross bar along the length direction through a number of detection rods. The laser displacement sensors extend into the material slot of the wafer box and move in the vertical direction to detect whether the upper and lower widths of the material slot of the wafer box are consistent.

[0007] In a further embodiment, the slewing mechanism includes a frame, and sprockets are symmetrically rotatably mounted at both ends of the frame, a motor is connected under one of the sprockets, and a chain transmission is sleeved between the two sprockets.

[0008] In a further embodiment, a plurality of support frames are provided along the extension direction of the chain.

[0009] In a further embodiment, the structures of the horizontal moving structure and the vertical moving structure are equal, and the vertical moving structure includes a frame, in which a single screw is rotatably installed, and the end of the single screw is connected to motor 2, and a movable block is threadedly sleeved on the outer wall of the single screw.

[0010] In a further embodiment, a central gear is rotatably installed inside the detection box, and a motor three for driving the central gear to rotate is installed under the detection box. Two racks are symmetrically meshed and connected on both sides of the central gear, and the two racks are fixedly connected to two cross bars respectively.

[0011] In a further embodiment, a crossbeam frame is also installed between the support frame and the horizontal moving structure, and a double-headed screw is rotatably installed in the crossbeam frame, and one end of the double-headed screw passes through the side of the crossbeam frame and is connected to a motor four, and sliding rods are symmetrically threaded on the two threaded sections of the double-headed screw, and a clamp for clamping the wafer box is installed at the lower end of the sliding rod.

[0012] In a further embodiment, transition plates are provided between the connections of the feed conveyor belt, the detection transmission belt, the swing wheel sorter, the discharge conveyor belt and the return conveyor belt.

[0013] A wafer box detection system, comprising the wafer box detection device and a control box, wherein the control box is provided with The acquisition module is used to centrally collect the detection data of several laser displacement sensors when they move along the same vertical line; Analysis module: used to compare and analyze the data collected by the acquisition module through an algorithm, analyze whether the detection data when moving in the same vertical line is consistent, and then determine whether the width of the card slot of the wafer box is qualified; Speed ​​regulating module; used to adjust the running speed of the rotary mechanism; Control module; used to control the speed regulating module to adjust the running speed of the rotary mechanism. When the synchronous detection mechanism rotates to the horizontal section of the rotary mechanism, its speed remains equal to the transmission speed of the detection transmission belt. When the synchronous detection mechanism rotates to the curved section of the rotary mechanism, its speed is lower than the transmission speed of the detection transmission belt. When the product is unqualified, the control module controls the swing wheel sorter to reverse, so that the wafer box on the detection transmission belt is output and returned to the high return conveyor belt at the moving end of the swing wheel sorter guide; when the product is qualified, the swing wheel sorter does not reverse, and the wafer box on the detection transmission belt is guided by the swing wheel sorter and moved to the discharge conveyor belt and transported away.

[0014] Compared with the prior art, the present invention has the following beneficial effects: The present invention cooperates by arranging a feed conveyor belt, a discharge conveyor belt, a return conveyor belt, a detection transmission belt and a pendulum wheel sorter, so that the wafer box is transported from the feed conveyor belt to the detection transmission belt for detection, qualified products are output by the discharge conveyor belt, and unqualified products are returned by the return conveyor belt. The pendulum wheel sorter is used to switch the transmission direction of the wafer box, which effectively replaces the manual detection operation. At the same time, the synchronous detection mechanism keeps synchronous movement with the detection transmission belt under the drive of the rotating mechanism, so that the equipment does not need to stop and wait, and dynamic detection of the wafer box is realized. The entire detection process realizes automatic and continuous operation, which greatly improves the detection efficiency.

[0015] The synchronous detection mechanism in the present invention can also drive multiple laser displacement sensors on the detection box to simultaneously detect multiple material slots of the wafer box through the vertical moving structure, while the horizontal moving structure can drive the laser displacement sensor to shift horizontally to detect the remaining material slots, which not only ensures the detection accuracy and consistency, but also effectively improves the detection efficiency.

[0016] The synchronous detection mechanism in the present invention can also drive the two cross bars to move through the central gear and a pair of rack transmissions, thereby adjusting the distance between a pair of symmetrical laser displacement sensors, so as to be suitable for detection of wafer boxes of different sizes on the market, which is more flexible and convenient to use.

[0017] The synchronous detection mechanism in the present invention can also use a double-headed screw to drive a sliding rod to control the two clamping plates to move synchronously in opposite directions, so as to clamp or loosen the wafer box, thereby adjusting the position of the wafer box on the detection transmission belt, effectively improving the stability of the wafer box during dynamic detection, and ensuring the accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front structural schematic diagram of the present invention; Figure 2 It is a rear view structural schematic diagram of the present invention; Figure 3This is a schematic diagram of the structure of the detection transmission belt and the rotary mechanism of the present invention; Figure 4 It is a structural schematic diagram of the synchronous detection mechanism of the present invention; Figure 5 This is a schematic diagram of the structure of the detection box of the present invention after being cut open; Figure 6 It is a schematic diagram of the installation structure of the horizontal moving structure and the vertical moving structure of the present invention.

[0019] In the figure: 1. Feed conveyor belt; 2. Discharge conveyor belt; 3. Return conveyor belt; 4. Swing wheel sorter; 5. Detection transmission belt; 6. Rotating mechanism; 61. Frame; 62. Sprocket; 63. Chain; 64. Motor one; 7. Support frame; 71. Crossbeam frame; 72. Double-headed screw; 73. Motor four; 74. Sliding rod; 75. Clamp; 8. Horizontal moving structure; 9. Vertical moving structure; 91. Frame; 92. Single screw; 93. Motor two; 94. Movable block; 10. Hanger; 11. Detection box; 111. Center gear; 112. Rack; 113. Motor three; 12. Crossbar; 13. Detection rod; 14. Laser displacement sensor; 15. Control box; 16. Transition plate. DETAILED DESCRIPTION

[0020] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] See also Figure 1-2 , a wafer box detection equipment, including a feed conveyor belt 1, a discharge conveyor belt 2, a return conveyor belt 3, a swing wheel sorter 4 and a detection conveyor belt 5, the output side of the feed conveyor belt 1 is provided with a detection conveyor belt 5, the output side of the detection conveyor belt 5 is provided with a swing wheel sorter 4, the output side of the swing wheel sorter 4 and the detection conveyor belt 5 are provided with a discharge conveyor belt 2 on the same output line, and the return conveyor belt 3 is arranged on the other side of the swing wheel sorter 4 and is perpendicular to the transmission direction of the discharge conveyor belt 2, the swing wheel sorter 4 is used to switch the output direction, so that qualified products are guided to the discharge conveyor belt 2, and unqualified products are guided to the return conveyor belt 3, a rotating mechanism 6 is provided on the side of the detection conveyor belt 5, a synchronous detection mechanism is installed on the rotating mechanism 6 through a support frame 7, the rotating mechanism 6 is used to drive the synchronous detection mechanism to rotate and move, and move synchronously with the detection conveyor belt 5, so that the synchronous detection mechanism and the detection conveyor belt 5 are in a relatively static state, so that when the detection conveyor belt 5 does not need to be stopped, the synchronous detection mechanism can be used for dynamic detection.

[0024] See also Figure 3 The synchronous detection mechanism includes a hanger 10 installed by a horizontal moving structure 8 and a vertical moving structure 9 which are perpendicular to each other. A detection box 11 is installed at the bottom end of the hanger 10, so that the detection box 11 can be driven horizontally by the horizontal moving structure 8, and the detection box 11 can be driven vertically by the vertical moving structure 9. Parallel cross bars 12 are symmetrically arranged on both sides of the detection box 11. A number of laser displacement sensors 14 are evenly installed on each cross bar 12 along the length direction through a number of detection rods 13. When the wafer box moves to the detection transmission belt 5, the laser displacement sensor 14 can be extended into the card slot of the wafer box after it descends. At this time, the detection can be moved in the vertical direction to detect whether the upper and lower widths of the card slot of the wafer box are consistent.

[0025] See also Figure 3In order to facilitate the synchronous detection mechanism to be used for cyclic detection, a rotating mechanism 6 is set up, including a frame 61, and sprockets 62 are symmetrically installed at both ends of the frame 61. The sprockets 62 are distributed corresponding to the output and input ends of the detection transmission belt 5. A motor 64 is connected under one of the sprockets 62. The motor 64 is fixed to the frame 61, and a chain 63 is connected between the two sprockets 62 for transmission. The sprocket 62 drives the chain 63 to rotate and move, thereby driving the synchronous detection mechanism to move a distance along the detection transmission belt 5 and then rotate, thereby facilitating the detection of subsequent wafer boxes.

[0026] Furthermore, according to actual production needs, several support frames 7 are arranged along the extension direction of the chain 63, so that multiple synchronous detection mechanisms are installed for detection, so as to control the detection distance between adjacent wafer boxes, so that it can cooperate with multiple synchronous detection mechanisms to realize continuous detection.

[0027] See also Figure 6 The structures of the horizontal moving structure 8 and the vertical moving structure 9 are equal, and the vertical moving structure 9 includes a frame 91, in which a single screw 92 is rotatably installed, and the end of the single screw 92 passing through the frame 91 is connected to a second motor 93, and a movable block 94 is threadedly sleeved on the outer wall of the single screw 92, and the movable block 94 is slidably connected to the ridge of the inner wall of the frame 91, thereby limiting the position of the movable block 94 to prevent deflection. When the second motor 93 drives the single screw 92 to rotate, the movable block 94 can move along the single screw 92, and the other end of the frame 91 of the vertical moving structure 9 is connected to the movable block 94 of the horizontal moving structure 8, and then the horizontal moving structure 8 drives the vertical moving structure 9 to move horizontally.

[0028] See also Figure 5 , considering that in actual use, the current wafer box sizes can be divided into 12-inch wafer boxes, 8-inch wafer boxes, 6-inch wafer boxes, and 4-inch wafer boxes, therefore, the distance of the card slots of each size of wafer boxes is different. In order to match wafer boxes of different specifications, a central gear 111 is installed inside the detection box 11, and a motor 113 for driving the central gear 111 to rotate is installed under the detection box 11. Two racks 112 are meshed and connected on both sides of the central gear 111. The two racks 112 are symmetrically distributed about the center of the axis of the central gear 111, and the two racks 112 are respectively fixedly connected to the two cross bars 12, so that when the central gear 111 rotates, the two cross bars 12 are driven to move closer to or away from each other through the meshing action with the racks 112, thereby adjusting the distance between the symmetrical pair of laser displacement sensors 14.

[0029] See also Figure 4The two ends of the double-headed screw 72 pass through the side of the crossbeam frame 71 and are connected to the motor 4 73. The two threaded sections of the double-headed screw 72 are symmetrically threaded with sliding rods 74, and the lower end of the sliding rod 74 is provided with a clamping plate 75 for clamping the wafer box. The center line of the double-headed screw 72 coincides with the center line of the detection box 11. Considering that in the actual production process, when the wafer box is transmitted from the feeding conveyor belt 1 to the detection transmission belt 5, its position is difficult to maintain in the detection center position. Therefore, by synchronously moving and clamping the two clamping plates 75, the wafer box can be kept in the center state during detection, and the wafer box is more stable when clamped.

[0030] See also Figure 1-3 Considering that there are transition gaps between adjacent transmission belts during actual assembly, there is a problem of stumbling when the wafer box passes through the transition gap. Therefore, transition plates 16 are provided between the connection points of the feed conveyor belt 1, the detection conveyor belt 5, the swing wheel sorter 4, the discharge conveyor belt 2 and the return conveyor belt 3. The transition plates 16 are kept flush with the upper surfaces of the feed conveyor belt 1, the detection conveyor belt 5, the swing wheel sorter 4, the discharge conveyor belt 2 and the return conveyor belt 3, so as to improve the stability of the wafer box when moving through the conveyor belts.

[0031] A wafer box detection system includes a wafer box detection device and a control box 15, wherein the control box 15 is provided with A collection module, used to centrally collect detection data of a plurality of laser displacement sensors 14 when they move along the same vertical line; Analysis module: used to compare and analyze the data collected by the acquisition module through an algorithm, analyze whether the detection data when moving in the same vertical line is consistent, and then determine whether the width of the card slot of the wafer box is qualified; Speed ​​regulating module; used to adjust the running speed of the rotary mechanism 6; Control module; used to control the speed regulating module to adjust the running speed of the rotary mechanism 6. When the synchronous detection mechanism rotates to the horizontal section of the rotary mechanism 6, its speed remains equal to the transmission speed of the detection transmission belt 5. When the synchronous detection mechanism rotates to the curved section of the rotary mechanism 6, its speed is lower than the transmission speed of the detection transmission belt 5, so that when the synchronous detection mechanism moves to the input end of the detection transmission belt 5, the position is later than the wafer box, thereby preventing the wafer box from being knocked over during rotation. At the same time, when the moving end of the synchronous detection mechanism reaches the output end of the detection transmission belt 5, the position is later than the wafer box, thereby preventing the wafer box from being knocked over during rotation. When the product is unqualified, the control module controls the pendulum sorting machine 4 to reverse, so that the wafer box on the detection transmission belt 5 is guided by the pendulum sorting machine 4 to the high return material conveyor belt 3 at the moving end to be output and returned; when the product is qualified, the pendulum sorting machine 4 does not reverse, and the wafer box on the detection transmission belt 5 is guided by the pendulum sorting machine 4 to move to the discharge conveyor belt 2 and be transported away.

[0032] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0033] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A wafer box detection device, comprising a feed conveyor belt (1), a discharge conveyor belt (2), a return conveyor belt (3), a swing wheel sorter (4) and a detection transmission belt (5), characterized in that: The feed conveyor belt (1), the detection transmission belt (5), the swing wheel sorter (4) and the discharge conveyor belt (2) are arranged in sequence on the same straight line according to the transmission direction, and the return conveyor belt (3) is arranged on the other side of the swing wheel sorter (4) and is perpendicular to the transmission direction of the discharge conveyor belt (2). A slewing mechanism (6) is provided on the side of the detection transmission belt (5), and a synchronous detection mechanism is installed on the slewing mechanism (6) through a support frame (7). The slewing mechanism (6) is used to drive the synchronous detection mechanism and the detection transmission belt (5) to move synchronously; The synchronous detection mechanism comprises a hanger (10) installed by means of a horizontal moving structure (8) and a vertical moving structure (9) which are perpendicular to each other. A detection box (11) is installed at the bottom end of the hanger (10). Parallel cross bars (12) are symmetrically provided on both sides of the detection box (11). A plurality of laser displacement sensors (14) are evenly installed on each cross bar (12) along the length direction through a plurality of detection rods (13). The laser displacement sensors (14) extend into the material slot of the wafer box and move in the vertical direction to detect whether the upper and lower widths of the material slot of the wafer box are consistent.

2. The wafer box detection device according to claim 1, characterized in that: The rotary mechanism (6) comprises a frame (61), with sprockets (62) symmetrically rotatably mounted at both ends of the frame (61), a motor (64) being connected below one of the sprockets (62), and a chain (63) being sleeved between the two sprockets (62) for transmission.

3. The wafer box detection device according to claim 2, characterized in that: A plurality of support frames (7) are arranged along the extension direction of the chain (63).

4. The wafer box detection device according to claim 1, characterized in that: The horizontal moving structure (8) and the vertical moving structure (9) are identical in structure, and the vertical moving structure (9) comprises a frame (91), a single screw (92) is rotatably mounted in the frame (91), and a second motor (93) is connected to the end of the single screw (92), and a movable block (94) is threadedly sleeved on the outer wall of the single screw (92).

5. The wafer box detection device according to claim 1, characterized in that: A central gear (111) is rotatably mounted inside the detection box (11), and a third motor (113) is mounted under the detection box (11) for driving the central gear (111) to rotate. Two racks (112) are symmetrically meshed and connected to each other on both sides of the central gear (111), and the two racks (112) are respectively fixedly connected to the two cross bars (12).

6. The wafer box detection device according to claim 1, characterized in that: A crossbeam frame (71) is also installed between the support frame (7) and the horizontal movable structure (8), and a double-headed screw (72) is rotatably installed in the crossbeam frame (71), and one end of the double-headed screw (72) passes through the side of the crossbeam frame (71) and is connected to a motor four (73), and a sliding rod (74) is symmetrically threaded on the two threaded sections of the double-headed screw (72), and a clamping plate (75) for clamping the wafer box is installed at the lower end of the sliding rod (74).

7. The wafer box detection device according to claim 1, characterized in that: Transition plates (16) are provided between the connection points of the feed conveyor belt (1), the detection transmission belt (5), the swing wheel sorter (4), the discharge conveyor belt (2) and the return conveyor belt (3).

8. A wafer box detection system, characterized in that: A detection device for a wafer box according to any one of claims 1 to 7 and a control box (15), wherein the control box (15) is provided with A collection module, used for centrally collecting detection data of a plurality of laser displacement sensors (14) when they move along the same vertical line; Analysis module: used to compare and analyze the data collected by the acquisition module through an algorithm, analyze whether the detection data when moving in the same vertical line is consistent, and then determine whether the width of the card slot of the wafer box is qualified; Speed ​​control module; Used to adjust the operating speed of the slewing mechanism (6); A control module is used to control the speed regulating module to adjust the running speed of the rotary mechanism (6). When the synchronous detection mechanism rotates to the horizontal section of the rotary mechanism (6), its speed is kept equal to the transmission speed of the detection transmission belt (5). When the synchronous detection mechanism rotates to the curved section of the rotary mechanism (6), its speed is lower than the transmission speed of the detection transmission belt (5). When the product is unqualified, the control module controls the swing wheel sorter (4) to reverse direction, so that the wafer box on the detection transmission belt (5) is guided by the swing wheel sorter (4) to the high return material conveyor (3) at the moving end to be output and returned; when the product is qualified, the swing wheel sorter (4) does not reverse direction, and the wafer box on the detection transmission belt (5) is guided by the swing wheel sorter (4) to move to the discharge conveyor (2) and be transported away.

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