Rolling shaft structure for improving silicon wafer stains of alkali corrosion machine

Abstract

The invention relates to the technical field of silicon wafer processing, in particular to a rolling shaft structure for improving silicon wafer stains of an alkali etching machine, which is arranged in a cleaning tank to assist liquid medicine in cleaning silicon wafers. Comprising a rotatable driving shaft arranged in the cleaning tank and at least one rotating shaft arranged on the driving shaft; the circumferential side wall of the rotating shaft is provided with a plurality of first stirring parts protruding in the direction away from the axis of the rotating shaft. Due to the fact that the multiple first stirring parts are arranged on the circumferential side wall of the rotating shaft, each first stirring part can stir the liquid medicine near the rotating shaft when the rotating shaft rotates, according to the different numbers of the first stirring parts, the liquid medicine can be stirred multiple times in the process that the rotating shaft rotates by one circle along with the driving shaft, and therefore the liquid medicine can be stirred more thoroughly. The specific stirring times are the same as the number of the first stirring parts. And the multiple first stirring parts are arranged on the rotating shaft, so that the stirring efficiency of the rotating shaft on the liquid medicine can be improved, the liquid medicine can have good fluidity, and the cleaning effect on the silicon wafer is improved.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer processing, in particular to a roller structure for improving silicon wafer stains of an alkali etching machine. Background Art

[0002] The cleaning tank of the alkaline etching machine contains cleaning liquid. Usually, the silicon wafer is placed in a wafer box, and then the wafer box is placed in the cleaning tank of the alkaline etching machine, so that the wafer box and the silicon wafer are immersed in the cleaning liquid.

[0003] A roller is provided in the cleaning tank of the alkali etching machine, and the roller is rotatably installed in the cleaning tank of the alkali etching machine. A driving motor is provided outside the cleaning tank of the alkali etching machine, and the driving motor can drive the roller to rotate; the rotation of the roller can stir the cleaning solution in the cleaning tank of the alkali etching machine, so that the cleaning solution can have a certain fluidity, and thus better clean the silicon wafers in the wafer box to avoid abnormalities on the surface of the silicon wafer and stains on the edges.

[0004] The above-mentioned roller usually includes a driving shaft and a rotating shaft, wherein the driving shaft is connected to the driving motor, and the rotating shaft is connected to the driving shaft. When the driving shaft is driven by the driving motor, the driving shaft can synchronously drive the rotating shaft to rotate, and the stirring of the cleaning solution is achieved through the rotation of the rotating shaft.

[0005] Currently, the cross-sections of the driving shaft and the rotating shaft are both standard circles. The driving shaft and the rotating shaft are eccentrically connected, so that the rotating shaft can stir the cleaning solution when it rotates with the driving shaft. However, the rotating shaft can only stir the cleaning solution once when it rotates one circle following the driving shaft. The fluidity of the cleaning solution is poor, which in turn leads to poor cleaning effect on the silicon wafers in the wafer box. Summary of the invention

[0006] In view of the above problems existing in the prior art, the present invention provides a roller structure for improving silicon wafer stains in an alkaline etching machine.

[0007] In order to solve the above technical problems, the present invention is solved by the following technical solutions:

[0008] A roller structure for improving the stains on silicon wafers of an alkaline etching machine is arranged in a cleaning tank to assist the chemical solution in cleaning the silicon wafers; it includes a rotatable driving shaft arranged in the cleaning tank and at least one rotating shaft arranged on the driving shaft; the circumferential side wall of the rotating shaft has a plurality of first stirring parts protruding in the axial direction away from the rotating shaft.

[0009] Preferably, the circumferential side wall of the drive shaft has a plurality of second agitating portions protruding in a direction away from the axis of the drive shaft.

[0010] Preferably, at least one convex strip is provided on the circumferential side wall of the rotary shaft;

[0011] When the rotating shaft rotates, the convex strips can push the liquid medicine around the rotating shaft.

[0012] Preferably, the convex strip is arranged on the first stirring part.

[0013] Preferably, the driving shaft is connected to an external driving device to achieve rotation in the cleaning tank.

[0014] Preferably, at least one end of the driving shaft is connected to a mounting seat via a bearing, and the mounting seat is fixedly installed in the cleaning tank via positioning bolts.

[0015] Preferably, the driving shaft and the rotating shaft are detachably connected via fixing bolts.

[0016] Preferably, a sleeve hole is provided on the rotating shaft along its axial direction, and the rotating shaft is sleeved on the driving shaft through the sleeve hole.

[0017] Preferably, the driving device is arranged on the outer side wall of the cleaning tank.

[0018] Preferably, the driving device is a driving motor.

[0019] The present invention has at least the following beneficial effects:

[0020] 1. In the present application, since there are multiple first stirring parts on the circumferential side wall of the rotating shaft, each first stirring part will stir the liquid medicine near the rotating shaft when the rotating shaft rotates. According to the number of first stirring parts, the rotating shaft can stir the liquid medicine multiple times during one rotation of the driving shaft, and the specific number of stirring times is the same as the number of first stirring parts. The provision of multiple first stirring parts on the rotating shaft can improve the stirring efficiency of the liquid medicine by the rotating shaft, so that the liquid medicine can have better fluidity, thereby improving the cleaning effect of the silicon wafer.

[0021] 2. In the process of the rotating shaft following the driving shaft to rotate, the first stirring part of the present application can stir the medicine liquid. During this process, the medicine liquid near the rotating shaft will flow toward the axis away from the rotating shaft, and the convex strips can block the flow of these medicine liquids. The convex strips can force the flow direction of the medicine liquid to change, thereby making the flow direction of the medicine liquid diverse, thereby improving the fluidity of the medicine liquid and improving the cleaning effect on the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The figure shows the assembly diagram of the driving shaft and the rotary shaft in some embodiments of the present application;

[0023] Figure 2 A schematic diagram of a drive shaft in some embodiments of the present application is shown;

[0024] Figure 3 The figure shows an assembly diagram of a drive shaft, a rotary shaft and a mounting seat in some embodiments of the present application.

[0025] The parts indicated by the numbers in the accompanying drawings are as follows:

[0026] 100, driving shaft; 110, second stirring part; 120, mounting seat; 200, rotating shaft; 210, first stirring part; 220, convex strip; 230, sleeve hole. DETAILED DESCRIPTION

[0027] In order to further understand the content of the present invention, the present invention is described in detail in conjunction with the accompanying drawings and embodiments. It should be understood that the embodiments are only for explaining the present invention and are not intended to limit it.

[0028] like Figure 1-3 As shown, this embodiment provides a roller structure for improving the stain of silicon wafers in an alkaline etching machine. The roller structure is applied in a cleaning tank (not shown) of an alkaline etching machine to assist the cleaning of silicon wafers by a liquid. The roller structure includes a driving shaft 100 and a rotating shaft 200, wherein the driving shaft 100 is rotatably disposed in the cleaning tank, and the rotating shaft 200 is disposed on the driving shaft 100. When the driving shaft 100 rotates circumferentially, the rotating shaft 200 can also be driven to rotate synchronously.

[0029] Furthermore, the circumferential side wall of the rotary shaft 200 is provided with a plurality of first stirring portions 210, and in the axial direction away from the rotary shaft 200, the plurality of first stirring portions 210 can protrude from the outer surface of the rotary shaft 200. When the driving shaft 100 drives the rotary shaft 200 to rotate, the plurality of first stirring portions 210 protruding from the surface of the rotary shaft 200 can stir the liquid medicine near the rotary shaft 200, thereby improving the fluidity of the liquid medicine in the cleaning tank, and further can better clean the silicon wafers immersed in the liquid medicine, thereby improving the cleaning effect on the silicon wafers.

[0030] In particular, since there are multiple first stirring parts 210 on the circumferential side wall of the rotating shaft 200, each first stirring part 210 will stir the medicine liquid near the rotating shaft 200 when the rotating shaft 200 rotates. Depending on the number of the first stirring parts 210, the rotating shaft 200 can stir the medicine liquid multiple times during the process of rotating one circle following the driving shaft 100, and the specific number of stirring times is the same as the number of the first stirring parts 210.

[0031] The arrangement of the plurality of first stirring parts 210 on the rotating shaft 200 can improve the stirring efficiency of the rotating shaft 200 on the chemical liquid, so that the chemical liquid can have better fluidity, thereby improving the cleaning effect on the silicon wafer.

[0032] Furthermore, a plurality of rotating shafts 200 may be provided on the same driving shaft 100. Specifically, the number of rotating shafts 200 provided on the driving shaft 100 may be adjusted according to actual cleaning needs to achieve a better cleaning effect. Furthermore, the driving shaft 100 and the rotating shaft 200 may be coaxially arranged or eccentrically arranged.

[0033] In some embodiments, the circumferential side wall of the driving shaft 100 is provided with a plurality of second stirring portions 110, and in the axial direction away from the driving shaft 100, the plurality of second stirring portions 110 can protrude from the outer surface of the driving shaft 100. When the driving shaft 100 rotates, the plurality of second stirring portions 110 protruding from the surface of the driving shaft 100 can stir the liquid medicine near the driving shaft 100, thereby improving the fluidity of the liquid medicine in the cleaning tank, and further can better clean the silicon wafers immersed in the liquid medicine, thereby improving the cleaning effect on the silicon wafers.

[0034] In particular, since there are multiple second stirring parts 110 on the circumferential side wall of the driving shaft 100, each second stirring part 110 will stir the medicinal liquid near the driving shaft 100 when the driving shaft 100 rotates. Depending on the number of the second stirring parts 110, the medicinal liquid can be stirred multiple times during one rotation of the driving shaft 100, and the specific number of stirring times is the same as the number of the second stirring parts 110.

[0035] The arrangement of the plurality of second stirring parts 110 on the driving shaft 100 can improve the stirring efficiency of the driving shaft 100 on the chemical liquid, so that the chemical liquid can have better fluidity, thereby improving the cleaning effect on the silicon wafer.

[0036] In some embodiments, at least one convex strip 220 is provided on the circumferential side wall of the rotating shaft 200, and the convex strip 220 extends along the axial direction of the rotating shaft 200. When the rotating shaft 200 rotates following the driving shaft 100, the convex strip 220 on the rotating shaft 200 can push the medicine near the rotating shaft 200, thereby improving the fluidity of the medicine.

[0037] It can be understood that, in the process of the rotating shaft 200 following the rotation of the driving shaft 100, the first stirring part 210 can stir the medicine liquid. During this process, the medicine liquid near the rotating shaft 200 will flow toward the axis away from the rotating shaft 200, and the convex strips 220 can block the flow of these medicine liquids. The convex strips 220 can force the flow direction of the medicine liquid to change, thereby making the flow direction of the medicine liquid diverse, thereby improving the fluidity of the medicine liquid and improving the cleaning effect on the silicon wafer.

[0038] In particular, a plurality of ridges 220 are provided on the axial side wall of the rotating shaft 200, and the sizes of the plurality of ridges 220 may be inconsistent, so that different ridges 220 have different blocking effects on the flow of the drug liquid, thereby further changing the direction of the flow of the drug liquid, improving the diversity of the flow of the drug liquid, and making the drug liquid have better fluidity.

[0039] In some embodiments, the convex strips 220 are disposed on the first stirring portion 210. Since the first stirring portion 210 protrudes from the surface of the rotating shaft 200, the convex strips 220 are disposed on the first stirring portion 210 so that the convex strips 220 can penetrate deeper into the liquid medicine, thereby better achieving the convex strips 220 blocking the flow of the liquid medicine, improving the effect of the convex strips 220 acting on the liquid medicine, and improving the fluidity of the liquid medicine.

[0040] Of course, it is understandable that a convex strip 220 structure may also be provided on the second stirring portion 110 to enhance the stirring effect of the second stirring portion 110 on the medicinal liquid and improve the fluidity of the medicinal liquid.

[0041] In some embodiments, the rotatable drive shaft 100 is achieved by connecting to an external drive device (not shown in the figure), and at least one end of the drive shaft 100 is connected to the external drive device. When working, starting the external drive device can provide power for the rotation of the drive shaft 100, thereby improving the fluidity of the drug solution through the rotation of the drive shaft 100.

[0042] In some embodiments, the external driving device can be fixedly mounted on the outer side wall of the cleaning tank by connecting bolts.

[0043] In some embodiments, the driving device uses a driving motor, and the output shaft of the driving motor is directly or indirectly connected to the driving shaft 100. When working, the driving motor is started so that the output shaft of the driving motor drives the driving shaft 100 to rotate, thereby improving the fluidity of the medicine solution.

[0044] It is understandable that the drive motor can be indirectly connected to the drive shaft 100 by means of gears, reduction gears, etc., and there is no particular limitation on this, as long as the drive motor can drive the drive shaft 100 .

[0045] In some embodiments, a mounting seat 120 is connected to at least one end of the driving shaft 100 via a bearing, wherein the mounting seat 120 can be fixedly installed in the cleaning tank via positioning bolts.

[0046] The installation of the mounting seat 120 can better realize the installation and use of the drive shaft 100 in the cleaning tank, and because the mounting seat 120 and the drive shaft 100 are connected through the bearing, the drive shaft 100 can rotate relative to the mounting seat 120. In specific use, the drive shaft 100 is first connected to the mounting seat 120 through the bearing, and then the drive shaft 100 is installed in the cleaning tank through the mounting seat 120, and the drive shaft 100 is connected to the external drive device. When the silicon wafer needs to be cleaned, the external drive device is started, so that the external drive device can drive the drive shaft 100 to rotate through the bearing, thereby improving the fluidity of the liquid medicine through the rotation of the drive shaft 100 and the rotary shaft 200.

[0047] It is understandable that the use of the mounting seat 120 can better improve the working stability of the driving shaft 100 and the rotating shaft 200 in the cleaning tank; of course, the number of mounting seats 120 can also be adjusted according to actual needs, and there is no special limitation on this.

[0048] In some embodiments, the driving shaft 100 and the rotating shaft 200 are designed as separate bodies, and the driving shaft 100 and the rotating shaft 200 are assembled together by fixing bolts after being manufactured separately.

[0049] In particular, the split design and the connection assembly with the fixing bolts make the drive shaft 100 and the rotary shaft 200 detachable, so that the rotary shaft 200 on the drive shaft 100 can be replaced or disassembled for maintenance. Of course, the rotary shaft 200 of different specifications can also be replaced according to the actual cleaning needs to ensure a better cleaning effect on the silicon wafer.

[0050] In some embodiments, a sleeve hole 230 is provided on the rotating shaft 200 . Specifically, the sleeve hole 230 is extended along the axial direction of the rotating shaft 200 , so that the rotating shaft 200 can be sleeved on the driving shaft 100 through the sleeve hole 230 for use.

[0051] During the specific installation, the rotary shaft 200 is first sleeved on the driving shaft 100 through the sleeve hole 230, and then the rotary shaft 200 is fixed on the driving shaft 100 by fixing bolts, thereby completing the assembly and use between the driving shaft 100 and the rotary shaft 200.

[0052] In conclusion, the above is only a preferred embodiment of the present invention, and all equivalent changes and modifications made according to the scope of the patent application of the present invention should fall within the scope of the patent of the present invention.

Claims

1. A roller structure for improving the stains on silicon wafers of an alkaline etching machine is arranged in a cleaning tank to assist the cleaning of silicon wafers with a chemical solution, and is characterized by: It comprises a rotatable driving shaft arranged in the cleaning tank and at least one rotating shaft arranged on the driving shaft; the circumferential side wall of the rotating shaft has a plurality of first stirring parts protruding in the axial direction away from the rotating shaft.

2. The roller structure according to claim 1, characterized in that: The circumferential side wall of the driving shaft has a plurality of second agitating portions protruding in a direction away from the axis of the driving shaft.

3. The roller structure according to claim 1, characterized in that: At least one convex strip is provided on the circumferential side wall of the rotary shaft; When the rotating shaft rotates, the convex strips can push the liquid medicine around the rotating shaft.

4. The roller structure according to claim 3, characterized in that: The convex strip is arranged on the first stirring part.

5. The roller structure according to claim 1, characterized in that: The driving shaft is connected to an external driving device to achieve rotation in the cleaning tank.

6. The roller structure according to claim 5, characterized in that: At least one end of the driving shaft is connected with a mounting seat via a bearing, and the mounting seat is fixedly installed in the cleaning tank via positioning bolts.

7. The roller structure according to claim 1, characterized in that: The driving shaft and the rotating shaft are detachably connected via fixing bolts.

8. The roller structure according to claim 7, characterized in that: The rotary shaft is provided with a sleeve hole along its axial direction, and the rotary shaft is sleeved on the driving shaft through the sleeve hole.

9. The roller structure according to claim 5, characterized in that: The driving device is arranged on the outer side wall of the cleaning tank.

10. The roller structure according to claim 9, characterized in that: The driving device is a driving motor.

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