Multi-angle optical milling and grinding device for photoetching machine

Abstract

The invention relates to the technical field of milling and grinding, and discloses a multi-angle optical milling and grinding device for a photoetching machine, the multi-angle optical milling and grinding device comprises a hood and a shafting transmission mechanism arranged above the hood, a position adjusting assembly is assembled at the bottom of the shafting transmission mechanism, and a flow jetting assembly located at the bottom end of the position adjusting assembly is mounted on the peripheral side wall of the hood; the center of the machine cover is provided with a carrying seat and a collecting assembly which are located below the flow jetting assembly, and a material distributing plate is movably arranged in the collecting assembly; the bearing seat can be carried by the shafting transmission mechanism to adjust and move in front, back, left and right directions so as to adjust the milling and grinding point position of the laser generator on the light mirror, so that the axial moving laser generator carries the flow jetting assembly on one side to perform telescopic motion, the hydraulic pressure of the liquid collecting pipe is changed, and an injection mode or a material supplementing mode is entered; and the cross beam arranged along the Y axis can carry the flow jetting assemblies on the front side and the rear side to jointly and horizontally move through the connecting piece, so that the sieve tray shakes, and milling and grinding products are efficiently separated.

Description

Technical Field

[0001] The present invention relates to the technical field of milling and grinding, and more specifically to a multi-angle optical milling and grinding device for a photolithography machine. Background Art

[0002] The multi-angle optical milling and grinding device for lithography machines is a precision equipment specially used to manufacture and optimize key components in lithography machines. This device uses advanced optical technology and mechanical control systems to perform high-precision, multi-angle milling and grinding on optical components, thereby ensuring that these components achieve optimal performance during the lithography process. The device is equipped with a flexible rotating platform or multi-axis linkage system, allowing the operator to adjust the position and angle of the workpiece as needed to achieve processing of materials from different directions. This is particularly important for processing complex geometric shapes or applications requiring specific incident angles / reflection angles, and is widely used in the field of spherical mirror processing.

[0003] However, before grinding the optical lens, a layer of special abrasive needs to be applied to its surface. This step is crucial to improving grinding efficiency because it can effectively reduce the roughness of the lens surface and ensure the uniformity and smoothness of the final product. In order to achieve this goal, an additional reagent injection device that is compatible with the existing equipment must be added, which is bound to increase the company's production costs or labor. In addition, the products of the grinding process are often mixed with some recyclable optical lens blocks. If these parts containing valuable materials are directly discarded as ordinary garbage, it will not only cause a waste of resources, but may also cause unnecessary burden on the environment.

[0004] Therefore, the present invention proposes a multi-angle optical milling processing device for a lithography machine, optimizes the equipment structure, realizes automatic application of abrasive to the optical mirror surface on the milling track, and separates the optical mirror blocks included in the milling product, constructs an integrated and efficient processing and production, reduces the production cost of the enterprise, and promotes the sustainable use of resources. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a multi-angle optical milling processing device for a lithography machine to solve the problem existing in the above-mentioned background technology of how to apply abrasive to the surface of the optical mirror on the milling track, and separate the optical mirror blocks included in the milling product, so as to construct an integrated and efficient processing production.

[0006] The present invention provides the following technical solution: a multi-angle optical milling and grinding device for a photolithography machine, comprising a machine cover and a shaft transmission mechanism arranged above the machine cover, a positioning assembly is installed at the bottom of the shaft transmission mechanism, a jet assembly located at the bottom of the positioning assembly is installed on the surrounding side walls of the machine cover, and a carrier seat and a collection assembly located below the jet assembly are installed at the center of the machine cover, and a material dividing plate is movably arranged in the collection assembly; The positioning assembly includes a bearing seat, a laser generator, a crossbeam and a connecting seat, wherein the bottom wall of the bearing seat is installed with a laser generator, and the bottom end of the bearing seat is movably penetrated by two crossbeams that are vertically and staggered, and the outer wall of the bottom end of the laser generator is equipped with a connecting seat; the fluid jet assembly includes a collecting pipe, a first piston rod, a U-shaped connecting rod, a jet tube, a discharge check valve and a liquid infusion tube, wherein the first piston rod is movably inserted in the collecting pipe, and the end of the first piston rod is assembled on the connecting seat through the U-shaped connecting rod. In addition, the jet tube is assembled on the side of the connecting seat, and the liquid cavity of the collecting pipe is equipped with a discharge check valve and a liquid infusion tube, and the discharge check valve is connected to the jet tube through the liquid infusion tube; The cross beams in the X and Y axes are respectively connected to the coaxial jet assemblies through connectors, so that when the cross beams move, they can drive the jet assemblies connected thereto to move smoothly through the connectors; The collecting assembly comprises a box body, a sieve plate, a positioning tube, a second piston rod and a spring, wherein a sieve plate is movably arranged in the box body, the positioning tube is installed at the four corners of the top wall of the box body, the second piston rod is movably inserted in the positioning tube, and the bottom end of the second piston rod is fixedly connected to the sieve plate, and a spring located in the positioning tube is provided below the plug handle of the second piston rod. When the dividing plate moves, the sieve plate will be squeezed by the dredging head at the bottom of the dividing plate and overcome the elastic force of the spring to pull the second piston rod downward, so that the sieve plate can be separated from the positioning tube and sink downward, and when the dredging head moves to align with the sieve holes of the sieve plate, the dredging head of the dividing plate can be smoothly inserted into the sieve holes, causing the sieve plate to rebound and reset, during which the sieve plate continues to shake, so as to efficiently separate the milling products; The first piston rod in the Y-axis direction is connected to the dividing plate through a telescopic connecting rod. When the supporting seat moves left and right, the crossbeam arranged along the Y-axis can carry the front and rear side jet assemblies to move horizontally together through the connecting parts, so that the first piston rod can pull the dividing plate to move left and right along the inner cavity of the sieve plate by means of the telescopic connecting rod.

[0007] Furthermore, both ends of the inner wall of the collecting tube are provided with block rings, which divide the collecting tube into three chambers, namely, a liquid chamber, a transmission chamber and an air chamber from the outside to the inside. The plug handle of the first piston rod can only move between the two block rings, and the transmission chambers on both sides of the plug handle are respectively connected with the liquid chamber and the air chamber, wherein the side wall of the air chamber is provided with an exhaust hole, which enables the laser generator to stably pull the first piston rod to perform telescopic activities when adjusting its position, causing the hydraulic pressure of the collecting tube to change, thereby entering the injection mode or the feeding mode.

[0008] Furthermore, the jet assembly also includes a liquid injection one-way valve installed outside the liquid cavity, and the liquid injection one-way valve can be connected to a supply source through a conduit, and the supply source is a supply device for providing abrasives.

[0009] Furthermore, the connecting member is composed of an assembly rod and sliders fixedly connected at both ends thereof. The top and bottom ends of the assembly rod are respectively assembled with the crossbeam and the liquid collecting pipe through the sliders, so that the coaxial crossbeam and jet assembly can maintain the same movement pace. In addition, the side wall of the hood is provided with a sliding groove for the movement of the slider.

[0010] Furthermore, the collection component also includes a drop hopper and an assembly rack, wherein the drop hopper is installed on the bottom wall of the box body and communicates with its inner cavity, so that the sieve holes on the bottom wall of the waste slag screen plate are separated and then discharged by the drop hopper. In addition, the box body is installed in the inner cavity of the hood through the assembly rack.

[0011] Furthermore, the dividing plate includes an upper fence and a lower brush plate, and a clearing head buried in the brush plate. The clearing head of the dividing plate fits conically with the sieve holes of the sieve plate. When the clearing head moves to align with the sieve holes of the sieve plate, the clearing head of the dividing plate can be smoothly inserted into the sieve holes to clear the sieve holes and avoid blockage of the sieve holes.

[0012] Furthermore, the telescopic connecting rod includes a U-shaped sleeve, an L-shaped inner rod and a sliding rod, wherein the top end of the U-shaped sleeve is movably connected to the L-shaped inner rod connected to the end of the first piston rod, and the bottom end of the U-shaped sleeve is fixedly connected to the sliding rod, and the sliding rod is fixedly connected to the dividing plate after passing through the sliding grooves of the box body and the side walls of the screen plate.

[0013] Technical effects and advantages of the present invention: The present invention uses a positioning component, a jet component, a telescopic connecting rod, a collecting component and a material dividing plate in coordination, which is conducive to the shaft transmission mechanism being able to carry the bearing seat to adjust and move in four directions of front, back, left and right, so as to adjust the milling point position of the laser generator on the optical mirror, so that the jet component on one side of the axially movable laser generator is contracted, resulting in increased hydraulic pressure, and then the abrasive in the liquid cavity can be discharged by the discharge one-way valve, and introduced into the jet tube connected to it through the infusion tube, and then sprayed by the jet tube at the point to be milled, so as to apply the abrasive to the surface of the optical mirror on the milling track, and the jet component is expanded on the opposite side. , causing the liquid cavity to expand and form negative pressure, and then the abrasive provided by the feed source can be injected into the liquid cavity of the collecting pipe through the injection one-way valve, and the liquid cavity is automatically loaded; at the same time, when the bearing seat moves left and right, the crossbeam arranged along the Y-axis can carry the front and rear jet components to move horizontally together through the connecting parts, so that the first piston rod can pull the dividing plate to move left and right along the inner cavity of the sieve plate by means of the telescopic connecting rod, causing the sieve plate to vibrate, and the milling products can be efficiently separated, so as to realize the coating of abrasive on the surface of the optical mirror on the milling track, and separate the optical mirror blocks mixed in the milling products, so as to construct an integrated and efficient processing and production. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0015] Figure 2 It is a schematic diagram of the overall structure of the present invention and its partial cross-section.

[0016] Figure 3 For the present invention Figure 2 Schematic diagram of the remaining structure after removing the hood.

[0017] Figure 4 For the present invention Figure 3 Schematic diagram of the structure at point A in the middle.

[0018] Figure 5 It is a schematic diagram of the connection structure of the position adjustment component, the connector, the jet component and the telescopic connecting rod of the present invention.

[0019] Figure 6 For the present invention Figure 5 Schematic diagram of the structure at point B in the middle.

[0020] Figure 7 For the present invention Figure 5 Schematic diagram of the structure at point C in the middle.

[0021] Figure 8 It is a schematic diagram of the connection structure of the carrier, the collecting assembly and the dividing plate of the present invention.

[0022] Fig. 9 For the present invention Figure 8 Schematic diagram of the structure at point D in the middle.

[0023] The accompanying drawings are marked as follows: 1. hood; 2. adjustment assembly; 201. bearing seat; 202. laser generator; 203. crossbeam; 204. connecting seat; 3. connector; 301. assembly rod; 302. slider; 4. jet assembly; 401. liquid collecting pipe; 402. first piston rod; 403. U-shaped connecting rod; 404. jet pipe; 405. discharge check valve; 406. injection check valve; 407. infusion tube; 5. telescopic connecting rod; 501. U-shaped sleeve; 502. L-shaped inner rod; 503. slide rod; 6. loading seat; 7. collecting assembly; 701. box; 702. sieve plate; 703. positioning tube; 704. second piston rod; 705. spring; 706. drop hopper; 707. assembly frame; 8. dividing plate. DETAILED DESCRIPTION

[0024] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative. The multi-angle optical milling and grinding processing device for a lithography machine involved in the present invention is not limited to the various structures recorded in the following embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0025] Reference Figure 1-9 The present invention provides a multi-angle optical milling processing device for a photolithography machine, comprising a machine cover 1 and an axis transmission mechanism arranged above the machine cover 1, a positioning assembly 2 is installed at the bottom of the axis transmission mechanism, wherein the axis transmission mechanism comprises an X-axis adjustment part and a Y-axis adjustment part, and the position of a laser generator 202 is accurately adjusted through the planar axial drive of the axis transmission mechanism, that is, the linkage displacement of the X-axis (transverse) and the Y-axis (longitudinal), the machine cover 1 is provided with a jet assembly 4 located at the bottom end of the positioning assembly 2, and the machine cover 1 is provided with a carrier 6 and a collecting assembly 7 located below the jet assembly 4 at the center, and a material dividing plate 8 is movably arranged in the collecting assembly 7.

[0026] In this embodiment, it should be specifically explained that the X / Y axis adjustment part of the shaft transmission mechanism is responsible for left and right and front and back adjustment and movement respectively. These directions are defined by a right-hand rectangular coordinate system and have the characteristics of being perpendicular to each other. The adjustment of each axis is equipped with a corresponding precision mechanical structure and servo system; for example: in a milling machine, the X-axis adjustment part is responsible for left and right movement. The one-way screw in this part converts the rotational motion from the drive motor into a linear motion of the worktable or workpiece in the horizontal direction. This conversion is achieved through the cooperation of the one-way screw and the nut seat. When the one-way screw rotates, the nut seat will move along the spiral line of the one-way screw. Since the nut seat is connected to the bearing seat 201, the bearing seat 201 and its connecting parts also move accordingly.

[0027] Reference Figure 2-3 ,and Figure 5-7 The positioning assembly 2 includes a bearing seat 201, a laser generator 202, a beam 203 and a connecting seat 204, wherein the bottom wall of the bearing seat 201 is equipped with the laser generator 202, and the bottom end of the bearing seat 201 is movably penetrated by two vertical and staggered beams 203, and the outer wall of the bottom end of the laser generator 202 is equipped with a connecting seat 204; The jet assembly 4 includes a liquid collecting pipe 401, a first piston rod 402, a U-shaped connecting rod 403, a jet tube 404, a liquid discharge check valve 405 and a liquid infusion tube 407, wherein the first piston rod 402 is movably inserted in the liquid collecting pipe 401, and the end of the first piston rod 402 is assembled on the connecting seat 204 through the U-shaped connecting rod 403. In addition, the jet tube 404 is assembled on the side of the connecting seat 204, and the liquid cavity of the liquid collecting pipe 401 is equipped with a liquid discharge check valve 405 and a liquid infusion tube 407. The liquid discharge check valve 405 is connected to the jet tube 404 through the liquid infusion tube 407; The jet assembly 4 also includes a liquid injection check valve 406 mounted outside the liquid cavity. The liquid injection check valve 406 can be connected to a supply source through a conduit. The supply source is a supply device for providing abrasives, which can be a storage box to provide sufficient reagent supply for the liquid collecting pipe 401. The X- and Y-axis crossbeams 203 are respectively connected to the coaxial jet assemblies 4 through the connectors 3, so that when the crossbeams 203 move, they can drive the jet assemblies 4 connected thereto to move smoothly through the connectors 3, so that the jet assemblies 4 on the side close to the laser generator 202 are condensed, and the jet assemblies 4 on the side away from the laser generator 202 are extended, while the jet assemblies 4 on the parallel side do not condense.

[0028] In this embodiment, it should be specifically explained that the laser generator 202 is a device capable of generating laser light, which mainly involves basic principles such as laser amplification, photon excitation and resonant cavity. The atoms or molecules in the medium are in an excited state through the excitation of the excitation medium inside the laser generator 202. When these excited atoms or molecules are excited, photons are released, and finally laser light is formed. This is a conventional selection and application by those skilled in the art, and this embodiment will not be described in detail here. The cross beam 203 is vertical and staggered through the support base 201, that is, the two cross beams 203 are vertical to each other in space, but not in the same plane, so that the support base 201 can carry the laser generator 202 to move on the surface of the cross beam 203 in the X or Y axis, avoiding the interference of the movement of the two; Both ends of the inner wall of the liquid collecting pipe 401 are provided with block rings, which divide the liquid collecting pipe 401 into three chambers, namely, a liquid chamber, a transmission chamber and an air chamber from the outside to the inside. The plug handle of the first piston rod 402 can only move between the two block rings, and the transmission chambers on both sides of the plug handle are connected with the liquid chamber and the air chamber respectively, wherein the side wall of the air chamber is provided with an exhaust hole, so that the laser generator 202 can stably pull the first piston rod 402 to perform telescopic activities when adjusting the position, causing the hydraulic pressure of the liquid collecting pipe 401 to change, thereby entering the injection mode or the feeding mode; The connecting member 3 is composed of an assembly rod 301 and sliders 302 fixedly connected at both ends thereof. The top and bottom ends of the assembly rod 301 are respectively assembled with the cross beam 203 and the liquid collecting pipe 401 through the sliders 302, so that the coaxial cross beam 203 and the jet assembly 4 can maintain the same movement pace. In addition, the side wall of the hood 1 is provided with a slide groove for the movement of the slider 302.

[0029] Reference Figure 4-5 ,and Figure 8-9 The collecting assembly 7 includes a box body 701, a sieve plate 702, a positioning tube 703, a second piston rod 704 and a spring 705, wherein the sieve plate 702 is movably arranged in the box body 701, the positioning tube 703 is installed at the four corners of the top wall of the box body 701, the second piston rod 704 is movably inserted in the positioning tube 703, and the bottom end of the second piston rod 704 is fixedly connected to the sieve plate 702, and a spring 705 is arranged below the plug handle of the second piston rod 704 and located in the positioning tube 703. 05. When the material distribution plate 8 moves, the sieve plate 702 will be squeezed by the dredging head at the bottom of the material distribution plate 8 and overcome the elastic force of the spring 705 to pull the second piston rod 704 downward, so that the sieve plate 702 can be separated from the positioning tube 703 and sink downward. When the dredging head moves to align with the sieve holes of the sieve plate 702, the dredging head of the material distribution plate 8 can be smoothly inserted into the sieve holes, causing the sieve plate 702 to rebound and reset. During this period, the sieve plate 702 continues to shake, so as to efficiently separate the milling products. The collecting assembly 7 also includes a drop hopper 706 and an assembly rack 707, wherein the drop hopper 706 is installed on the bottom wall of the box body 701 and communicates with its inner cavity, so that the sieve holes on the bottom wall of the waste slag screen plate 702 are separated and then discharged by the drop hopper 706. In addition, the box body 701 is installed in the inner cavity of the hood 1 through the assembly rack 707.

[0030] In this embodiment, it should be specifically explained that the dividing plate 8 includes an upper fence and a lower brush plate, and a dredging head embedded in the brush plate. The dredging head of the dividing plate 8 is conically matched with the sieve holes of the sieve plate 702. When the dredging head moves to align with the sieve holes of the sieve plate 702, the dredging head of the dividing plate 8 can be smoothly inserted into the sieve holes to dredge the sieve holes and avoid blockage of the sieve holes. The first piston rod 402 in the Y-axis direction is connected to the material separation plate 8 through the telescopic connecting rod 5. When the bearing seat 201 moves left and right, the crossbeam 203 arranged along the Y-axis can carry the front and rear jet assemblies 4 through the connecting piece 3 to move horizontally together, so that the first piston rod 402 can pull the material separation plate 8 to move left and right along the inner cavity of the sieve plate 702 by means of the telescopic connecting rod 5, so as to separate the milled objects in the sieve plate 702; The telescopic connecting rod 5 includes a U-shaped sleeve 501, an L-shaped inner rod 502 and a sliding rod 503, wherein the top of the U-shaped sleeve 501 is movably connected with the L-shaped inner rod 502 connected to the end of the first piston rod 402, and the bottom of the U-shaped sleeve 501 is fixedly connected to the sliding rod 503, and the sliding rod 503 passes through the sliding grooves of the side walls of the box body 701 and the sieve plate 702 and is fixedly connected to the material distribution plate 8; The opening of the slide groove on the side wall of the sieve plate 702 is larger than the opening of the slide groove on the box body 701 to meet the requirement of sinking the sieve plate 702. In addition, a hatch is provided on the side wall of the sieve plate 702 to facilitate opening the hatch and taking out the optical mirror block therein.

[0031] Working principle of the present invention: The shaft transmission mechanism can carry the bearing seat 201 to adjust and move in four directions, front, back, left, and right, so as to adjust the milling point of the laser generator 202 on the optical mirror. For example, when the bearing seat 201 carries the laser generator 202 and slides to the left on the surface of the crossbeam 203 arranged along the X-axis, the connecting seat 204 assembled at the bottom end of the laser generator 202 can jointly push the first piston rod 402 connected thereto to the left, so that it gradually retracts into the collecting pipe 401, causing the liquid cavity of this branch collecting pipe 401 to be compressed, resulting in an increase in hydraulic pressure, and then the abrasive in the liquid cavity can be discharged by the discharge check valve 405, and introduced into the jet pipe 404 connected thereto through the infusion pipe 407, and then the jet pipe 40 4 is sprayed on the point to be milled, so as to automatically apply the abrasive to the surface of the optical mirror on the milling track, thereby improving the grinding efficiency and ensuring the production quality. At the same time, the connecting seat 204 at the bottom end of the laser generator 202 will pull the first piston rod 402 on the right side to move to the left, so that it is gradually withdrawn from the collecting pipe 401, causing the liquid cavity of this branch collecting pipe 401 to expand and form a negative pressure. Then the abrasive provided by the feed source can be injected into the liquid cavity of the collecting pipe 401 through the injection check valve 406, and the liquid cavity is automatically loaded. When the moving direction of the supporting seat 201 is reversed, the right collecting pipe 401 will provide the above-mentioned injection operation to the optical mirror surface, and the left collecting pipe 401 will enter the feeding operation; At the same time, as the supporting seat 201 moves left and right, the crossbeam 203 arranged along the Y-axis can carry the front and rear side jet components 4 to move horizontally together through the connecting piece 3, so that the first piston rod 402 can pull the dividing plate 8 to move left and right along the inner cavity of the sieve plate 702 by means of the telescopic connecting rod 5. When the dividing plate 8 moves, the sieve plate 702 will be squeezed by the dredging head at the bottom of the dividing plate 8 and overcome the elastic force of the spring 705 to pull the second piston rod 704 downward, so that the sieve plate 702 can be separated from the positioning tube 703 and sink downward. When the dredging head moves to align with the sieve holes of the sieve plate 702, the dredging head of the dividing plate 8 can be horizontally The sieve plate 702 is inserted into the sieve hole along the direction of rotation. With the movement of the dividing plate 8, on the one hand, the sieve plate 702 will shake up and down, dynamically separating the optical mirror blocks mixed in the milled material, which is convenient for the recycling of optical mirror block resources. On the other hand, the milled material in the sieve plate 702 can pass through its upper fence when the dividing plate 8 moves, so as to realize material turning and avoid the problem of reduced storage capacity caused by material accumulation. At the same time, the waste residue is continuously pushed by the brush plate under the dividing plate 8 and discharged from the sieve hole on the bottom wall of the sieve plate 702, and then introduced into the collecting device by the drop hopper 706, so as to realize the efficient separation of the milled products. In addition, the dredging head can dredge the sieve hole to avoid clogging of the sieve hole. Similarly, when the support seat 201 carrying the laser generator 202 slides forward or backward on the surface of the beam 203 set along the Y-axis, the jet components 4 set on the front and rear sides will perform corresponding injection operations or feeding operations. During this period, the L-shaped inner rod 502 can be telescopically adjusted in the U-shaped sleeve 501 to avoid interfering with the direction of the dividing plate 8, so that it can only slide horizontally in the sieve plate 702, thereby ensuring the smooth implementation of integrated and efficient processing and production.

[0032] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent substitutions or modifications within the technical scope disclosed by the present invention; according to the technical plan and its improved conception of the present invention, all of which should be included under the protection of the present invention.

Claims

1. A multi-angle optical milling device for a photolithography machine, comprising a machine cover (1) and a shaft transmission mechanism arranged above the machine cover, wherein a positioning assembly (2) is mounted at the bottom of the shaft transmission mechanism, and wherein: The side walls of the hood (1) are provided with a jet assembly (4) located at the bottom of the positioning assembly (2), and the center of the hood (1) is provided with a carrier (6) and a collection assembly (7) located below the jet assembly (4), wherein a material distribution plate (8) is movably provided in the collection assembly (7); The positioning assembly (2) comprises a bearing seat (201), a laser generator (202), a crossbeam (203) and a connecting seat (204), wherein the bottom wall of the bearing seat (201) is mounted with the laser generator (202), and the bottom end of the bearing seat (201) is movably penetrated by two crossbeams (203) that are vertically and staggered, and the outer wall of the bottom end of the laser generator (202) is equipped with the connecting seat (204); the jet assembly (4) comprises a liquid collecting pipe (401), a first piston rod (402), a U-shaped connecting rod (403), a jet pipe ( 404), a discharge one-way valve (405) and a liquid infusion tube (407), wherein a first piston rod (402) is movably inserted into the liquid collecting tube (401), and the end of the first piston rod (402) is assembled on the connecting seat (204) through a U-shaped connecting rod (403), and the jet tube (404) is assembled on the side of the connecting seat (204), and a discharge one-way valve (405) and a liquid infusion tube (407) are assembled outside the liquid cavity of the liquid collecting tube (401), and the discharge one-way valve (405) is connected to the jet tube (404) through the liquid infusion tube (407); The crossbeams (203) in the X and Y axes are respectively connected to the coaxial jet assemblies (4) via the connecting pieces (3), so that when the crossbeam (203) moves, it can drive the jet assemblies (4) connected thereto to move smoothly via the connecting pieces (3); The collecting assembly (7) comprises a box (701), a sieve plate (702), a positioning tube (703), a second piston rod (704) and a spring (705), wherein the sieve plate (702) is movably arranged in the box (701), the positioning tube (703) is installed at the four corners of the top wall of the box (701), the second piston rod (704) is movably inserted in the positioning tube (703), and the bottom end of the second piston rod (704) is fixedly connected to the sieve plate (702), and a spring (705) is provided below the plug handle of the second piston rod (704) on the positioning tube (703). 3) The spring (705) inside the material distribution plate (8) causes the sieve plate (702) to be squeezed by the dredging head at the bottom of the material distribution plate (8) when the material distribution plate (8) moves, thereby overcoming the elastic force of the spring (705) and pulling the second piston rod (704) downward, so that the sieve plate (702) can be separated from the positioning tube (703) and sink downward. When the dredging head moves to align with the sieve holes of the sieve plate (702), the dredging head of the material distribution plate (8) can be smoothly inserted into the sieve holes, causing the sieve plate (702) to rebound and reset. During this period, the sieve plate (702) continues to vibrate, thereby efficiently separating the milling products. The first piston rod (402) in the Y-axis direction is connected to the material distribution plate (8) via a telescopic connecting rod (5). When the supporting seat (201) moves left and right, the crossbeam (203) arranged along the Y-axis can carry the front and rear side jet assemblies (4) to move horizontally together via the connecting piece (3), so that the first piston rod (402) can pull the material distribution plate (8) to move left and right along the inner cavity of the sieve plate (702) by means of the telescopic connecting rod (5).

2. The multi-angle optical milling device for a photolithography machine according to claim 1, characterized in that: Both ends of the inner wall of the liquid collecting pipe (401) are provided with resistance rings, which divide the liquid collecting pipe (401) into three chambers, namely, a liquid chamber, a transmission chamber and an air chamber from the outside to the inside. The plug handle of the first piston rod (402) can only move between the two resistance rings, and the transmission chambers on both sides of the plug handle are respectively connected with the liquid chamber and the air chamber, wherein the side wall of the air chamber is provided with an exhaust hole, so that the laser generator (202) can stably pull the first piston rod (402) to perform telescopic activities when adjusting the position, causing the hydraulic pressure of the liquid collecting pipe (401) to change, thereby entering the injection mode or the feeding mode.

3. The multi-angle optical milling device for a photolithography machine according to claim 1, characterized in that: The jet assembly (4) further comprises a liquid injection one-way valve (406) mounted outside the liquid cavity, wherein the liquid injection one-way valve (406) can be connected to a material supply source via a conduit, and the material supply source is a supply device for providing abrasives.

4. The multi-angle optical milling device for a photolithography machine according to claim 1, characterized in that: The connecting member (3) is composed of an assembly rod (301) and sliders (302) fixedly connected at both ends thereof. The top and bottom ends of the assembly rod (301) are respectively assembled with the crossbeam (203) and the liquid collecting pipe (401) through the sliders (302), so that the coaxial crossbeam (203) and the jet assembly (4) can maintain the same movement pace. In addition, a sliding groove for the slider (302) to move is provided on the side wall of the hood (1).

5. The multi-angle optical milling device for a photolithography machine according to claim 1, characterized in that: The collecting assembly (7) further comprises a hopper (706) and an assembly rack (707), wherein the hopper (706) is mounted on the bottom wall of the box body (701) and communicates with the inner cavity thereof, so that the sieve holes on the bottom wall of the waste residue sieve plate (702) are separated and then discharged by the hopper (706); in addition, the box body (701) is mounted in the inner cavity of the hood (1) via the assembly rack (707).

6. The multi-angle optical milling device for a photolithography machine according to claim 1, characterized in that: The material distribution plate (8) comprises an upper fence and a lower brush plate, and a dredging head embedded in the brush plate. The dredging head of the material distribution plate (8) is conically matched with the sieve holes of the sieve plate (702). When the dredging head moves to align with the sieve holes of the sieve plate (702), the dredging head of the material distribution plate (8) can be smoothly inserted into the sieve holes to dredge the sieve holes and avoid blockage of the sieve holes.

7. The multi-angle optical milling device for a photolithography machine according to claim 1, characterized in that: The telescopic connecting rod (5) comprises a U-shaped sleeve (501), an L-shaped inner rod (502) and a sliding rod (503), wherein the top end of the U-shaped sleeve (501) is movably connected to the L-shaped inner rod (502) connected to the end of the first piston rod (402), and the bottom end of the U-shaped sleeve (501) is fixedly connected to the sliding rod (503), and the sliding rod (503) is fixedly connected to the material distribution plate (8) after passing through the sliding grooves of the side walls of the box body (701) and the sieve plate (702).

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