Silane wet dust treatment system

Abstract

The invention provides a silane wet dust treatment system, which is characterized in that a silane wet dust separation device is arranged between a tail gas output end of processing equipment and a combustion treatment device, is used for carrying out gas-solid separation on output tail gas, and comprises a primary sieving filler area, a separation area and a first compressed air pump; the tail gas output end of the processing equipment is connected with the bottom of the primary screening packing area, a plurality of first compressed air pumps are evenly and obliquely arranged on the side edge of the primary screening packing area at intervals, the adjacent first compressed air pumps are arranged in parallel, a separation area is arranged above the primary screening packing area, an air outlet is formed above the separation area, and the air outlet is connected with the output end of the combustion treatment device. A partition plate is arranged at the position, close to the primary screening filler area, of the middle of the separation area, the partition plate is a deposition area away from the primary screening filler area, and a dry dust discharging port is formed in the side edge of the deposition area, so that gas-solid separation is effectively conducted on silane wet dust with the water content of 70%, the blocking rate of the combustion treatment device is greatly reduced, and the treatment efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of tail gas emission, and more specifically to a silane wet dust treatment system. Background Art

[0002] During the PECVD (Plasma Enhanced Chemical Vapor Deposition) process of photovoltaic cell production, tail gas containing silane is produced. Silane is a colorless gas that reacts with air and causes suffocation. This gas usually burns when in contact with air and releases thick white amorphous silicon dioxide smoke, so it must be treated before being discharged into the atmosphere.

[0003] The technology closest to the existing one is, publication number: CN215637221U, a silane tail gas emission treatment system, including an output end of a vacuum pump group connected to an input end of a combustion barrel group, the output end of the combustion barrel group is connected to the input end of an exhaust tower group, the output end of the exhaust tower group is connected to the input end of a fan group, the output end of the fan group is connected to a chimney, and the treated silane tail gas is discharged to the outdoors through the chimney. A pressure sensor is provided at the output end of the vacuum pump group, and the pressure sensor and the fan group are connected.

[0004] The silane emission treatment system uses the output end of the vacuum pump group to connect the input end of the combustion barrel group for treatment. The wet dust particles in the silane tail gas output by the machine are easy to clog the conveying pipeline, and the machine often needs to be shut down for cleaning, which greatly reduces production efficiency.

[0005] In view of this, the present invention proposes a silane wet dust treatment system which can effectively separate dust and is not prone to clogging. Summary of the invention

[0006] The object of the present invention is to provide a silane wet dust treatment system which can effectively separate dust and is not easy to be blocked.

[0007] A silane wet dust treatment system comprises a silane wet dust separation device 1 and a combustion treatment device 2, characterized in that: a silane wet dust separation device 1 is arranged between the tail gas output end of the processing equipment 6 and the combustion treatment device 2, the silane wet dust separation device 1 is used for gas-solid separation of the output tail gas, the silane wet dust separation device 1 comprises a primary screening filler area 3, a separation area 4, and a first compressed air pump 5, the tail gas output end of the processing equipment 6 is connected to the bottom of the primary screening filler area 3, a plurality of first compressed air pumps 5 are evenly spaced and obliquely arranged on the side of the primary screening filler area 3, adjacent first compressed air pumps 5 are arranged in parallel, a separation area 4 is arranged above the primary screening filler area 3, an air outlet 7 is arranged above the separation area 4, the air outlet 7 is connected to the output end of the combustion treatment device 2, a partition plate 8 is arranged in the middle of the separation area 4 near the primary screening filler area 3, the partition plate 8 is away from the primary screening filler area 3 as a deposition area 12, and a dry dust discharge port 121 is arranged on the side of the deposition area 12.

[0008] Furthermore, a second compressed air pump 9 is provided at the bottom of the partition plate 8, and the output end of the second compressed air pump 9 corresponds to the deposition area 12. The second compressed air pump 9 outputs 80°C-90°C high-temperature compressed air for drying the silane wet dust received in the deposition area 12 into dry dust.

[0009] Furthermore, the partition plate 8 is vertically connected to the primary screening filler area 3 to facilitate gas-solid separation of the tail gas.

[0010] In some embodiments, an initial speed detection component 10 is also provided at the output end of the primary screening filling area 3. The initial speed detection component 10 is composed of a plurality of first sensors 101. Each first sensor 101 corresponds to a first compressed air pump 5. The first sensor 101 is used to detect the initial parameters of the exhaust gas after it is output through the primary screening filling area 3. The initial parameters include initial speed, initial time, and initial position.

[0011] Furthermore, a terminal speed detection component 11 is provided between the air outlet 7 and the top of the partition plate 8. The terminal speed detection component 11 is composed of a plurality of second sensors 111. Each second sensor 111 corresponds to a first sensor 101. The first sensor 101 is used to detect the terminal parameters of the exhaust gas arriving at the air outlet 7 after being impacted by the air output by the first compressed air pump 5. The terminal parameters include terminal speed, terminal time, and terminal position.

[0012] Furthermore, the initial velocity detected by the first sensor 101 is v0, and the terminal velocity detected by the second sensor 111 is v1, wherein v1=√{(gd(ρs-ρ) / 18μ)²+(L / t²}, wherein u is the particle settling velocity (cm / s); ρs and ρ are the densities of particles and air, respectively (g / cm); g is the gravitational acceleration (cm / s); μ is the adhesion coefficient of air (Pa·s); d is the particle diameter (cm), and the distance between the initial position and the end of the primary screening filler area 3 close to the partition plate 8 is L.

[0013] Furthermore, the θ=arccos(L / t / v1).

[0014] Furthermore, the inclination angles of the separation zone 4 close to the primary sieve filling area 3 and the separation zone 4 far from the primary sieve filling area 3 are both θ. The separation zone 4 close to the primary sieve filling area 3 plays a role in guiding the movement of exhaust gas, and the separation zone 4 far from the primary sieve filling area 3 plays a role in receiving solid dust and guiding it to fall into the sedimentation area.

[0015] Furthermore, the first sensor 101 and the second sensor 111 are electrically connected to the first compressed air pump 5, and the pressure of the first compressed air pump 5 is P=1 / 8V1²+4, where the unit of P is bar.

[0016] In some embodiments, the primary sieve filler area 3 is an inverted pyramid shape, and the filler in the primary sieve filler area 3 is an antistatic molecular sieve with a filling rate of 70%-75%. The primary sieve filler area 3 is used to absorb substances with a particle size less than 2 mm output by the exhaust gas of the processing equipment 6.

[0017] In some embodiments, the distance between adjacent first compressed air pumps 5 is 20 cm-30 cm.

[0018] In some embodiments, the length of the partition plate 8 is 2-2.3 m, preferably 2.15 m.

[0019] In some embodiments, the combustion treatment device 2 includes a combustion barrel group 21, a dust collecting group 22, a first fan group 23, an exhaust tower group 24, and a second fan group 25. The air outlet 7 is connected to the input end of the combustion barrel group 21, the output end of the combustion barrel group 21 is connected to the input end of the dust collecting group 22, the output end of the dust collecting group 22 is connected to the input end of the exhaust tower group 24 through the first fan group 23, and the output end of the dust collecting group 22 is connected to the external discharge port through the second fan group 25.

[0020] Beneficial effects of the present invention: The present invention proposes a silane wet dust treatment system, wherein a silane wet dust separation device 1 is provided between the tail gas output end of the processing equipment 6 and the combustion treatment device 2, and the silane wet dust separation device 1 is used to perform gas-solid separation on the output tail gas, and the silane wet dust separation device 1 includes a primary screening filler area 3, a separation area 4, and a first compressed air pump 5. The tail gas output end of the processing equipment 6 is connected to the bottom of the primary screening filler area 3, and a plurality of first compressed air pumps are evenly spaced and obliquely arranged on the side of the primary screening filler area 3. 5, adjacent first compressed air pumps 5 are arranged in parallel, a separation zone 4 is arranged above the primary sieve filling zone 3, an air outlet 7 is arranged above the separation zone 4, the air outlet 7 is connected to the output end of the combustion treatment device 2, a partition plate 8 is arranged in the middle of the separation zone 4 near the primary sieve filling zone 3, the partition plate 8 is far away from the primary sieve filling zone 3 as a deposition zone 12, and a dry dust discharge port 121 is arranged on the side of the deposition zone 12, which effectively separates the silane wet dust with a moisture content of 70% into gas and solid, greatly reduces the blockage rate of the combustion treatment device 2, and improves the treatment efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic structural diagram of a silane wet dust treatment system of the present application.

[0022] Figure 2 This is a schematic structural diagram of a silane wet dust separation device of a silane wet dust treatment system of the present application.

[0023] Figure 3 This is a schematic diagram of the range of the tail gas separation of a silane wet dust separation device of a silane wet dust treatment system of the present application.

[0024] Main component symbols

[0025] Silane wet dust separation device 1, combustion treatment device 2, combustion barrel group 21, dust collection unit 22, first fan group 23, exhaust tower group 24, second fan group 25, primary screening filling area 3, separation area 4, first compressed air pump 5, processing equipment 6, air outlet 7, partition plate 8, second compressed air pump 9, initial speed detection component 10, first sensor 101, final speed detection component 11, second sensor 111, deposition area 12, dry dust discharge port 121.

[0026] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0027] The following examples are described to assist the understanding of the present application, and the examples are not and should not be interpreted in any way as limiting the scope of protection of the present application.

[0028] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including integration into a single system or component).

[0029] At the same time, the connections between components or systems are not intended to be limited to direct connections, rather, the data between these components may be modified, reformatted, or otherwise changed by intermediate components. In addition, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" should be understood to include direct connections, indirect connections through one or more intermediate devices, and wireless connections. Example

[0030] like Figure 1 As shown, it is a structural schematic diagram of a silane wet dust treatment system of the present application; Figure 2 As shown, it is a schematic structural diagram of a silane wet dust separation device of a silane wet dust treatment system of the present application; Figure 3 As shown, it is a schematic diagram of the range of the tail gas separation of a silane wet dust separation device of a silane wet dust treatment system of the present application.

[0031] A silane wet dust treatment system comprises a silane wet dust separation device 1 and a combustion treatment device 2, characterized in that: a silane wet dust separation device 1 is arranged between the tail gas output end of the processing equipment 6 and the combustion treatment device 2, the silane wet dust separation device 1 is used for gas-solid separation of the output tail gas, the silane wet dust separation device 1 comprises a primary screening filler area 3, a separation area 4, and a first compressed air pump 5, the tail gas output end of the processing equipment 6 is connected to the bottom of the primary screening filler area 3, a plurality of first compressed air pumps 5 are evenly spaced and obliquely arranged on the side of the primary screening filler area 3, adjacent first compressed air pumps 5 are arranged in parallel, a separation area 4 is arranged above the primary screening filler area 3, an air outlet 7 is arranged above the separation area 4, the air outlet 7 is connected to the output end of the combustion treatment device 2, a partition plate 8 is arranged in the middle of the separation area 4 near the primary screening filler area 3, the partition plate 8 is away from the primary screening filler area 3 as a deposition area 12, and a dry dust discharge port 121 is arranged on the side of the deposition area 12.

[0032] A second compressed air pump 9 is also provided at the bottom of the partition plate 8. The output end of the second compressed air pump 9 corresponds to the deposition area 12. The second compressed air pump 9 outputs 80°C-90°C high-temperature compressed air for drying the silane wet dust received in the deposition area 12 into dry dust.

[0033] The partition plate 8 is vertically connected to the primary screening filler area 3 to facilitate gas-solid separation of the tail gas.

[0034] An initial speed detection component 10 is also provided at the output end of the primary screening filling area 3. The initial speed detection component 10 is composed of a plurality of first sensors 101. Each first sensor 101 corresponds to a first compressed air pump 5. The first sensor 101 is used to detect the initial parameters of the exhaust gas after it is output through the primary screening filling area 3. The initial parameters include initial speed, initial time, and initial position.

[0035] A terminal speed detection component 11 is provided between the air outlet 7 and the top of the partition plate 8. The terminal speed detection component 11 is composed of a plurality of second sensors 111. Each second sensor 111 corresponds to a first sensor 101. The first sensor 101 is used to detect the terminal parameters of the exhaust gas arriving at the air outlet 7 after being impacted by the air output by the first compressed air pump 5. The terminal parameters include terminal speed, terminal time, and terminal position.

[0036] The initial velocity detected by the first sensor 101 is v0, and the terminal velocity detected by the second sensor 111 is v1, wherein v1=√{(gd(ρs-ρ) / 18μ)²+(L / t²}, wherein u is the particle settling velocity (cm / s); ρs and ρ are the densities of particles and air respectively (g / cm); g is the gravitational acceleration (cm / s); μ is the adhesion coefficient of air (Pa·s); d is the particle diameter (cm), and the distance between the initial position and the end of the primary screening filler area 3 close to the partition plate 8 is L.

[0037] The θ=arccos(L / t / v1).

[0038] The inclination angles of the separation zone 4 close to the primary sieve filling area 3 and the separation zone 4 far from the primary sieve filling area 3 are both θ. The separation zone 4 close to the primary sieve filling area 3 plays a role in guiding the movement of exhaust gas, and the separation zone 4 far from the primary sieve filling area 3 plays a role in receiving solid dust and guiding it to fall into the sedimentation area.

[0039] The first sensor 101 and the second sensor 111 are electrically connected to the first compressed air pump 5, and the pressure of the first compressed air pump 5 is P=1 / 8V1²+4, where P is in bar.

[0040] The primary sieve filler area 3 is an inverted pyramid shape. The filler in the primary sieve filler area 3 is an antistatic molecular sieve with a filling rate of 70%-75%. The primary sieve filler area 3 is used to absorb substances with a particle size less than 2 mm output by the tail gas of the processing equipment 6.

[0041] The distance between adjacent first compressed air pumps 5 is 20 cm-30 cm.

[0042] The length of the partition plate 8 is 2-2.3 m, preferably 2.15 m.

[0043] The combustion treatment device 2 includes a combustion barrel group 21, a dust collecting group 22, a first fan group 23, an exhaust tower group 24, and a second fan group 25. The air outlet 7 is connected to the input end of the combustion barrel group 21, the output end of the combustion barrel group 21 is connected to the input end of the dust collecting group 22, the output end of the dust collecting group 22 is connected to the input end of the exhaust tower group 24 through the first fan group 23, and the output end of the dust collecting group 22 is connected to the external discharge port through the second fan group 25.

[0044] Working principle of the present invention:

[0045] First, silane wet dust tail gas with a water content of 70% (most of the particle sizes are above 2mm-3mm, and the silane wet dust tail gas includes PH3 and CH4) enters the primary screening filler area 3, and the particles below 2mm are absorbed by the fillers in the primary screening filler area 3, and then output to the separation area 4. The initial speed v0 at this time is generally 5m / s. The first compressed air pump 5 outputs compressed air to drive the tail gas after the primary screening to move. When it moves to the top of the partition plate, gas-solid separation is performed and the terminal parameter detection is performed through the terminal speed detection component 11. When the terminal parameter detection does not meet the set value, the pressure of the first compressed air pump 5 is immediately adjusted according to P=1 / 8V1²+4. When the terminal parameter detection meets the set value, the dust particles continue to move to the deposition area 12. The second compressed air pump 9 at the deposition area 12 outputs 80℃-90℃ high-temperature compressed air to receive the silane wet dust for drying into dry dust. At the same time, the gas particles are output through the air outlet 7. The temperature of the gas particles at this time is 20℃.

[0046] Beneficial effects of the present invention: The present invention proposes a silane wet dust treatment system, wherein a silane wet dust separation device 1 is provided between the tail gas output end of the processing equipment 6 and the combustion treatment device 2, and the silane wet dust separation device 1 is used to perform gas-solid separation on the output tail gas, and the silane wet dust separation device 1 includes a primary screening filler area 3, a separation area 4, and a first compressed air pump 5. The tail gas output end of the processing equipment 6 is connected to the bottom of the primary screening filler area 3, and a plurality of first compressed air pumps are evenly spaced and obliquely arranged on the side of the primary screening filler area 3. 5, adjacent first compressed air pumps 5 are arranged in parallel, a separation zone 4 is arranged above the primary sieve filling zone 3, an air outlet 7 is arranged above the separation zone 4, the air outlet 7 is connected to the output end of the combustion treatment device 2, a partition plate 8 is arranged in the middle of the separation zone 4 near the primary sieve filling zone 3, the partition plate 8 is far away from the primary sieve filling zone 3 as a deposition zone 12, and a dry dust discharge port 121 is arranged on the side of the deposition zone 12, which effectively separates the silane wet dust with a moisture content of 70% into gas and solid, greatly reduces the blockage rate of the combustion treatment device 2, and improves the treatment efficiency.

[0047] Although the present application has disclosed multiple aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art, and several modifications and improvements may be made without departing from the concept of the present application, all of which belong to the protection scope of the present application. The multiple aspects and embodiments disclosed in the present application are only for illustration and are not intended to limit the present application. The actual protection scope of the present application shall be subject to the claims.

Claims

1. A silane wet dust treatment system, comprising a silane wet dust separation device (1) and a combustion treatment device (2), characterized in that: A silane wet dust separation device (1) is provided between the tail gas output end of the processing equipment (6) and the combustion treatment device (2). The silane wet dust separation device (1) is used for performing gas-solid separation on the output tail gas. The silane wet dust separation device (1) comprises a primary sieve filling area (3), a separation area (4), and a first compressed air pump (5). The tail gas output end of the processing equipment (6) is connected to the bottom of the primary sieve filling area (3). A plurality of first compressed air pumps (5) are evenly spaced and obliquely arranged on the side of the primary sieve filling area (3). Adjacent first compressed air pumps (5) are arranged in parallel. A separation area (4) is provided above the primary sieve filling area (3). An air outlet (7) is provided above the separation area (4). The air outlet (7) is connected to the output end of the combustion treatment device (2). A partition plate (8) is provided in the middle of the separation area (4) near the primary sieve filling area (3). A deposition area (12) is provided away from the primary sieve filling area (3). A dry dust discharge port (121) is provided on the side of the deposition area (12).

2. The silane wet dust treatment system according to claim 1, characterized in that: A second compressed air pump (9) is also provided at the bottom of the partition plate (8), and an output end of the second compressed air pump (9) corresponds to the deposition area (12). The second compressed air pump (9) outputs high-temperature compressed air of 80° C.-90° C. for drying the silane wet dust received by the deposition area (12) into dry dust.

3. The silane wet dust treatment system according to claim 1, characterized in that: The partition plate (8) is vertically connected to the primary screening filler area (3) to facilitate gas-solid separation of the tail gas.

4. The silane wet dust treatment system according to claim 1, characterized in that: An initial speed detection component (10) is also provided at the output end of the primary screening filling area (3). The initial speed detection component (10) is composed of a plurality of first sensors (101). Each first sensor (101) corresponds to a first compressed air pump (5). The first sensor (101) is used to detect initial parameters of the exhaust gas after it is output from the primary screening filling area (3). The initial parameters include initial speed, initial time, and initial position.

5. The silane wet dust treatment system according to claim 4, characterized in that: A terminal speed detection component (11) is provided between the air outlet (7) and the top of the partition plate (8). The terminal speed detection component (11) is composed of a plurality of second sensors (111). Each second sensor (111) corresponds to a first sensor (101). The first sensor (101) is used to detect terminal parameters of the exhaust gas arriving at the air outlet (7) after being impacted by the air output by the first compressed air pump (5). The terminal parameters include terminal speed, terminal time, and terminal position.

6. The silane wet dust treatment system according to claim 5, characterized in that: The initial velocity detected by the first sensor (101) is v0, and the terminal velocity detected by the second sensor (111) is v1, wherein v1=√{(gd(ρs-ρ) / 18μ)²+(L / t²}, wherein u is the particle settling velocity; ρs and ρ are the densities of the particles and air, respectively; g is the gravitational acceleration; μ is the adhesion coefficient of air; d is the particle diameter, and the distance between the initial position and the end of the primary screening filler area (3) close to the partition plate (8) is L.

7. The silane wet dust treatment system according to claim 6, characterized in that: The θ=arccos(L / t / v1).

8. The silane wet dust treatment system according to claim 6, characterized in that: The first sensor (101) and the second sensor (111) are electrically connected to the first compressed air pump (5), and the pressure of the first compressed air pump (5) is P=1 / 8V1²+4, where the unit of P is bar.

9. The silane wet dust treatment system according to claim 1, characterized in that: The primary sieve filler area (3) is in an inverted pyramid shape. The filler in the primary sieve filler area (3) is an antistatic molecular sieve with a filling rate of 70%-75%. The primary sieve filler area (3) is used to absorb substances with a particle size of less than 2 mm output from the tail gas of the processing equipment (6).

10. The silane wet dust treatment system according to claim 1, characterized in that: The distance between adjacent first compressed air pumps (5) is 20 cm-30 cm, and the length of the partition plate (8) is 2-2.3 m.

Images