A detachable compact ion pump

Abstract

This invention belongs to the field of ion pump technology, specifically relating to a detachable compact ion pump. The detachable compact ion pump disclosed in this invention includes a magnet assembly comprising at least one pair of magnets, each pair consisting of two magnets respectively disposed on opposite inner walls of the suction cylinder, forming a magnetic field between the two magnets. By placing the magnet assembly inside the suction cylinder, the magnetic gap is shortened, thus reducing the magnet thickness while still meeting the magnetic field requirements. This results in a compact and small overall structure for the ion pump, suitable for devices with limited installation space. The detachable compact ion pump disclosed in this invention features detachable connections for the suction cylinder, suction cylinder cover, electrodes, and connecting columns, facilitating disassembly and installation for maintenance and repair, making it more convenient to use and adaptable to various application needs.

Description

Technical Field

[0001] The invention belongs to the technical field of ion pumps, and in particular relates to a detachable compact ion pump. Background Art

[0002] The ion pump is a gas capture pump. Compared with the mechanical rotor pump, it has no physical parts in relative motion, does not require vacuum pump oil lubrication, is an oil-free clean pump, and is free of vibration and noise caused by moving parts. -9 Pa level, so it is widely used in high-end scientific devices such as heavy ion accelerators, synchrotron radiation sources, and space environment simulation devices. Ion pumps use Penning discharge to make electrons make long-term spiral motion in the anode area to increase the collision ionization probability of gas molecules. At the same time, the ionized gas ions collide with the cathode plate to sputter active atoms such as titanium. These titanium atoms are layered on the anode to form a gas adsorption film layer, which adsorbs the gas to be pumped to achieve the purpose of vacuuming. The simplest structural form of an ion pump can be realized with only an anode cylinder, a pair of parallel cathode plates, and a horseshoe-shaped permanent magnet.

[0003] The magnetic field of an ion pump is usually generated by a permanent magnet. The two magnets are separated by a pumping chamber shell, a cathode plate, and an anode cylinder. The magnetic gap is large and the magnetic potential drops quickly. In order to make the magnetic field strength at the anode cylinder meet the use requirements, previous patents have the following practices: first, a yoke assembly is used (such as Chinese patents with application numbers 201910142821.1 and 201910822526.0), but the yoke assembly can only shrink the magnetic lines of force inside the yoke, and the improvement of the magnetic field strength at the anode cylinder in the gap area is limited; second, the magnetic field strength of the permanent magnet is increased or the length of the magnet is increased, but it will make the ion pump too bulky and the cost will increase, narrowing the application range and use occasions of the ion pump; third, the length of the anode cylinder is shortened, so that the gap length is shortened to increase the magnetic field strength at the anode cylinder, but this will reduce the pumping speed of the ion pump.

[0004] In addition, after the ion pump has been used for a long time, the titanium film covering the anode cylinder becomes thicker and there is a risk of it falling off if not handled, which will cause consequences such as equipment short circuit. After long-term use, the cathode plate will have problems such as breakdown and air suction cracking. The performance of the magnet will degrade at high temperatures or for a long time, affecting the pumping speed of the ion pump. Therefore, the anode cylinder, cathode plate, and magnet require regular maintenance. However, the existing ion pump vacuum chamber adopts a fully welded closed structure, and the magnet is on the outside of the vacuum chamber shell. Among the above three, only the magnet can be quickly assembled and disassembled in the existing ion pump structure, which is inconvenient for inspection and maintenance. Summary of the invention

[0005] In view of the problems existing in the prior art, the present invention provides a detachable compact ion pump, which specifically includes the following contents:

[0006] A detachable compact ion pump includes a pumping cylinder assembly, a magnet assembly, a cathode assembly, an anode assembly, a pumping assembly, and an electrode feedthrough.

[0007] The vacuum pump assembly comprises a vacuum pump and a vacuum pump cover plate. The vacuum pump is a hollow cylindrical structure with an upper opening and a bottom and surrounding sealed. A vacuum chamber is formed inside the vacuum pump. The vacuum pump cover plate is arranged above the upper opening of the vacuum pump and is detachably and sealedly connected to the vacuum pump. A vacuum port is arranged on the vacuum pump cover plate.

[0008] The magnet assembly includes at least one group of magnet pairs, and the group of magnet pairs includes two magnets. The two magnets are respectively arranged on two opposite inner walls of the vacuum cylinder, and a magnetic field is formed between the two magnets. The present invention arranges the magnet assembly inside the vacuum cylinder, shortens the magnetic gap, and thus can reduce the thickness of the magnet while still meeting the magnetic field requirements, so that the overall structure of the ion pump is compact and small, and can be applied to devices with smaller installation spaces.

[0009] The cathode assembly comprises two cathode plates arranged relatively and spaced apart from each other, and the cathode plates are arranged in the air pumping cavity and located in the magnetic field;

[0010] The anode assembly comprises an anode cylinder and a connecting column, wherein the anode cylinder is arranged in the air extraction cavity and located between two cathode plates, and one end of the connecting column is connected to the anode cylinder;

[0011] The exhaust assembly comprises an exhaust pipe, which is communicated with the exhaust port and is sealed with the exhaust cylinder cover; a mounting port is provided on the side wall of the exhaust pipe;

[0012] The electrode feedthrough includes a sleeve, an electrode and an insulating connector. The sleeve is a hollow cylindrical structure. One end of the sleeve passes through the mounting port and is disposed inside the exhaust pipe, and the side wall of the sleeve is sealed and connected to the exhaust pipe wall around the mounting port. The electrode is disposed in the sleeve and is rotatably connected to the sleeve through the insulating connector. One end of the electrode is located in the exhaust pipe, and the end of the electrode located in the exhaust pipe is detachably connected to the other end of the connecting column. The principle of the electrode feedthrough described in the present invention is the same as that of the electrode feedthrough in the prior art, with the difference that the electrode of the electrode feedthrough described in the present invention is rotatably connected to the sleeve. The specific implementation method of the rotatable connection can be referred to in the attached. Figure 1 , it can also be set and selected according to actual needs, as long as the electrode feed-through function and rotational connection can be realized, the present invention does not impose too many restrictions.

[0013] The detachable compact ion pump disclosed in the present invention has a vacuum cylinder and a vacuum cylinder cover plate, and electrodes and connecting columns that are all detachably connected. When maintenance and overhaul are required, it is more convenient to disassemble and install, and is more convenient to use, and can meet the use requirements of different occasions.

[0014] Furthermore, the vacuum pump assembly also includes a sealing ring and a plurality of connecting bolts. A circle of mounting rings is provided at the upper end of the vacuum pump, a circle of sealing grooves is provided on the mounting ring, the sealing ring is provided in the sealing groove, and the height of the sealing ring is greater than the height of the sealing groove. Preferably, the width of the sealing ring is not less than the width of the sealing groove, that is, the sealing ring and the sealing groove are interference fitted. More preferably, a circle of sealing grooves is also provided at the position on the vacuum pump cover plate that contacts the sealing ring. Similarly, the sealing ring and the two sealing grooves at both ends thereof are interference fitted, which can ensure a better sealing effect. The mounting ring on the periphery of the sealing groove is also provided with a plurality of first threaded holes, and the vacuum pump cover plate is provided with a plurality of second threaded holes. The second threaded holes and the first threaded holes are arranged one-to-one and overlapped up and down, and the connecting bolts are connected to the second threaded holes and the first threaded holes through threads.

[0015] Furthermore, the sealing ring is preferably a soft metal sealing ring, and the soft metal is a metal with a relatively low hardness, such as lead, aluminum, tin and other metal materials.

[0016] Furthermore, at least one cathode fixing groove is provided at the bottom end inside the vacuum cylinder; the cathode assembly also includes a cathode fixing frame, the cathode fixing frame is provided inside the vacuum cylinder, and at least one fixing protrusion is provided at the bottom of the cathode fixing frame, and the fixing protrusion is provided in the cathode fixing groove; the two cathode plates are provided on the cathode fixing frame. The cathode fixing frame is combined to fix the two cathode plates, so as to facilitate the installation and removal of the cathode plates in the vacuum cylinder. The cathode fixing frame is connected to the cathode fixing groove at the bottom of the vacuum cylinder through the fixing protrusion. The shape, quantity, size and position of the cathode fixing groove and the fixing protrusion can be set as needed, and the present invention does not impose too many restrictions.

[0017] Furthermore, one end of the electrode located inside the exhaust pipe is provided with a thread, and the end of the connecting column is provided with a threaded hole, and the end of the electrode located inside the exhaust pipe is detachably connected to the connecting end through the thread.

[0018] Furthermore, the vacuum assembly also includes a shoulder ring and a knife-edge flange, the shoulder ring is arranged at the end of the vacuum pipe away from the vacuum cylinder assembly, and the knife-edge flange is sleeved on the end of the vacuum pipe and connected to the shoulder ring.

[0019] Furthermore, one or more groups of reinforcing ribs are provided on the outer wall of the vacuum cylinder.

[0020] Furthermore, the anode cylinder can be used as shown in the attached Figure 4 (a)-(c) shown in the shape and structure, preferably, the anode cylinder includes at least one cylinder assembly, the cylinder assembly includes a plurality of inner cylinders and at least one outer cylinder sleeved outside the plurality of inner cylinders, as shown in the attached Figure 4 As shown in (d)-(e).

[0021] Furthermore, the shapes and / or sizes of the multiple inner cylinders are the same or different.

[0022] Furthermore, the multiple inner cylinders are densely arranged inside the outer cylinder.

[0023] Beneficial effects of the present invention:

[0024] (1) The detachable compact ion pump disclosed in the present invention comprises a magnet assembly including at least one group of magnet pairs, wherein the group of magnet pairs comprises two magnets, and the two magnets are respectively arranged on two opposite inner walls of the vacuum cylinder, and a magnetic field is formed between the two magnets. The present invention arranges the magnet assembly inside the vacuum cylinder, shortening the magnetic gap, thereby reducing the thickness of the magnet while still meeting the magnetic field requirements, thereby making the overall structure of the ion pump compact and small, and suitable for devices with smaller installation spaces.

[0025] (2) The detachable compact ion pump disclosed in the present invention has a vacuum cylinder and a vacuum cylinder cover, and an electrode and a connecting column that are all detachably connected. When maintenance and overhaul are required, it is more convenient to disassemble and install, and is more convenient to use, and can meet the needs of use in different occasions. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic cross-sectional structure diagram of the detachable compact ion pump disclosed in the present invention;

[0027] Figure 2 It is a schematic diagram of the structure of the vacuum pump;

[0028] Figure 3 is a schematic diagram of the structure of the cathode assembly;

[0029] Figure 4 is a schematic diagram of the structure of the anode cylinder;

[0030] Figure 5 It is a schematic diagram of the external installation structure of the vacuum assembly, electrode feedthrough and vacuum cylinder cover. DETAILED DESCRIPTION

[0031] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments shown below do not limit the invention content described in the claims. In addition, the entire contents of the structures represented by the following embodiments are not limited to those necessary as solutions to the invention described in the claims.

[0032] Reference Figure 1-5 , a detachable compact ion pump, comprising a vacuum tube assembly, a magnet assembly, a cathode assembly, an anode assembly, a vacuum assembly, and an electrode feedthrough 8, wherein the vacuum tube assembly comprises a vacuum tube 1 and a vacuum tube cover 9, wherein the vacuum tube 1 is a hollow cylindrical structure with an opening at the upper end, a bottom end and surrounding seals, and a vacuum chamber is formed inside the vacuum tube 1; the vacuum tube cover 9 is arranged above the upper opening of the vacuum tube 1, and is detachably and sealedly connected to the vacuum tube 1; an air suction port is arranged on the vacuum tube cover 9; the magnet assembly comprises at least one group of magnet pairs, wherein the group of magnet pairs comprises two magnets 2, and the two magnets 2 are respectively arranged on two opposite inner walls of the vacuum tube 1, and a magnetic field is formed between the two magnets 2; the present invention arranges the magnet assembly inside the vacuum tube 1, shortens the magnetic gap, and thus can reduce the thickness of the magnet 2 while meeting the magnetic field requirements, so that the overall structure of the ion pump is compact and small, and can be suitable for devices with smaller installation spaces; the cathode assembly comprises two relatively The cathode plates 3 are arranged at intervals, and the cathode plates 3 are arranged in the exhaust cavity and located in the magnetic field; the anode assembly includes an anode cylinder 11 and a connecting column 10, and the anode cylinder 11 is arranged in the exhaust cavity and located between the two cathode plates 3, and one end of the connecting column 10 is connected to the anode cylinder 11; the exhaust assembly includes an exhaust pipe 5, and the exhaust pipe 5 is communicated with the exhaust port and is sealed with the exhaust pipe cover 9; a mounting port is arranged on the side wall of the exhaust pipe 5; the electrode feedthrough 8 includes a sleeve, an electrode and an insulating connector, and the sleeve is a hollow cylindrical structure, one end of the sleeve passes through the mounting port and is arranged inside the exhaust pipe 5, and the side wall of the sleeve is sealed with the wall of the exhaust pipe 5 around the mounting port; the electrode is arranged in the sleeve and is rotatably connected to the sleeve through the insulating connector, one end of the electrode is located in the exhaust pipe 5, and the end of the electrode located in the exhaust pipe 5 is detachably connected to the other end of the connecting column 10. The principle of the electrode feedthrough 8 of the present invention is the same as that of the electrode feedthrough 8 in the prior art, except that the electrode and the sleeve of the electrode feedthrough 8 of the present invention are rotatably connected. The specific implementation method of the rotatable connection can be referred to in the attached Figure 1 , can also be set and selected according to actual needs, as long as the function of the electrode feedthrough 8 can be realized and the rotation connection can be realized, the present invention does not make too many restrictions. The detachable compact ion pump disclosed by the present invention, the vacuum cylinder 1 and the vacuum cylinder cover 9, the electrode and the connecting column 10 are all detachably connected, which is more convenient to disassemble and install when maintenance and repair are required, and the use is more convenient, which can meet the use needs of different occasions.

[0033] In some embodiments of the present invention, the vacuum pump assembly further includes a sealing ring 12 and a plurality of connecting bolts 13. A circle of mounting rings is provided at the upper end of the vacuum pump 1, and a circle of sealing grooves is provided on the mounting ring. The sealing ring 12 is provided in the sealing groove, and the height of the sealing ring 12 is greater than the height of the sealing groove. Preferably, the width of the sealing ring 12 is not less than the width of the sealing groove, that is, the sealing ring 12 is interference-fitted with the sealing groove. More preferably, a circle of sealing grooves is also provided at the position on the vacuum pump cover plate 9 that contacts the sealing ring 12. Similarly, the sealing ring 12 is interference-fitted with the two sealing grooves at both ends thereof, which can ensure a better sealing effect. The mounting ring on the periphery of the sealing groove is also provided with a plurality of first threaded holes, and the vacuum pump cover plate 9 is provided with a plurality of second threaded holes. The second threaded holes and the first threaded holes are arranged one-to-one and overlapped with each other, and the connecting bolts 13 are connected to the second threaded holes and the first threaded holes through threads.

[0034] In some embodiments of the present invention, the sealing ring 12 is preferably a soft metal sealing ring, and the soft metal is a metal with a relatively low hardness, such as lead, aluminum, tin and other metal materials.

[0035] In some embodiments of the present invention, at least one cathode fixing groove is provided at the bottom end inside the vacuum cylinder 1; the cathode assembly also includes a cathode fixing frame 4, the cathode fixing frame 4 is provided inside the vacuum cylinder 1, and at least one fixing protrusion is provided at the bottom of the cathode fixing frame 4, and the fixing protrusion is provided in the cathode fixing groove; the two cathode plates 3 are provided on the cathode fixing frame 4. The cathode fixing frame 4 functions to fix the two cathode plates 3 in combination, so as to facilitate the installation and removal of the cathode plates 3 in the vacuum cylinder 1. The cathode fixing frame 4 is connected to the cathode fixing groove at the bottom of the vacuum cylinder 1 through the fixing protrusion, and the shape, quantity, size and position of the cathode fixing groove and the fixing protrusion can be set as needed, and the present invention does not impose too many restrictions.

[0036] In some embodiments of the present invention, one end of the electrode located inside the exhaust pipe 5 is provided with a thread, and the end of the connecting column 10 is provided with a threaded hole, and the end of the electrode located inside the exhaust pipe 5 is detachably connected to the connecting end through a thread.

[0037] In some embodiments of the present invention, the vacuum assembly also includes a shoulder ring 6 and a knife-edge flange 7, the shoulder ring 6 is arranged at the end of the vacuum pipe 5 away from the vacuum cylinder assembly, and the knife-edge flange 7 is sleeved on the end of the vacuum pipe 5 and connected to the shoulder ring 6.

[0038] In some embodiments of the present invention, one or more groups of reinforcing ribs are provided on the outer wall of the vacuum cylinder 1 .

[0039] In some embodiments of the present invention, the anode cylinder 11 can be used as shown in the attached Figure 4 (a)-(c) shown in the shape and structure, preferably, the anode cylinder 11 includes at least one cylinder assembly, the cylinder assembly includes a plurality of inner cylinders and at least one outer cylinder sleeved outside the plurality of inner cylinders, as shown in the attached Figure 4 As shown in (d)-(e).

[0040] In some embodiments of the present invention, the shapes and / or sizes of the plurality of inner cylinders are the same or different.

[0041] In some embodiments of the present invention, the plurality of inner cylinders are densely arranged inside the outer cylinder.

[0042] In some embodiments of the present invention, the cross-sectional structure diagram of the detachable compact ion pump is shown in the attached Figure 1 The spirit of the present invention is to place the magnet 2 in the vacuum chamber and adopt a modular design concept for easy disassembly. The specific form of the ion pump is not specified. Therefore, the composite pump formed by combining a dipole ion pump, a tripole ion pump, or other types of vacuum pumps (getter pumps, titanium sublimation pumps, etc.) with an ion pump is protected by the present invention as long as it conforms to the spirit of the present invention.

[0043] In some embodiments of the present invention, the structure of the vacuum cylinder 1 is shown in the attached Figure 2 The upper end surface of the vacuum cylinder 1 is provided with a sealing groove reserved for a soft metal sealing ring and a threaded hole for installing the vacuum cylinder cover 9. The outer side of the vacuum cylinder 1 is designed with reinforcing ribs, and the inner bottom surface of the vacuum cylinder 1 has a pair of recessed grooves for installing the cathode plate 3 assembly.

[0044] In some embodiments of the present invention, the structure of the cathode assembly is shown in the attached Figure 3 A pair of cathode plates 3 are fixed to a cathode plate 3 fixing frame by threaded connection. A T-shaped fixing protrusion protrudes from the bottom of the cathode plate 3 fixing frame for inserting into the cathode fixing groove on the inner bottom surface of the vacuum cylinder 1.

[0045] In some embodiments of the present invention, the structure of the anode cylinder 11 is shown in the attached Figure 4 , the common structural forms of the existing products of anode cylinder 11 are as follows Figure 4 (a) cylindrical, (b) square, (c) honeycomb, in addition to the above three forms, the present invention can also be used to increase the area of ​​sputtering deposition getter material Figure 4 (d) and (e) Anode cylinder 11 in the form of cylindrical square nesting.

[0046] In some embodiments of the present invention, the external mounting structure of the vacuum assembly, the electrode feedthrough 8 and the vacuum cylinder cover 9 is shown in the attached Figure 5, the exhaust pipe 5 and the shoulder ring 6, the high-voltage electrode feedthrough 8, and the exhaust cylinder cover plate 9 are connected by argon arc welding, and the knife-edge flange 7 is in the form of a loose flange. The assembly sequence is to first weld the exhaust pipe 5 and the shoulder ring 6, then insert the knife-edge flange 7 from the bottom of the exhaust pipe 5 upward, and weld the high-voltage electrode feedthrough 8 upside down on the entire exhaust pipe 5 assembly. At this time, the knife-edge flange 7 is limited by the shoulder ring 6 and the high-voltage electrode feedthrough 8 above and below, and finally the exhaust cylinder cover plate 9 is welded to the exhaust pipe 5.

[0047] In some embodiments of the present invention, the assembly sequence of the ion pump is to first install the magnet 2 in the vacuum chamber, then insert the cathode assembly into the mounting groove reserved on the inner bottom surface of the vacuum cylinder 1, then weld the anode column and the anode cylinder 11 and screw them together with the welded high-voltage electrode feedthrough 8, then put the soft metal sealing ring into the sealing groove on the top surface of the vacuum cylinder cover 9, and install the vacuum assembly together with the anode cylinder 11 assembly and the vacuum cylinder assembly. At this time, the anode cylinder 11 is in the exact center position inside the vacuum cylinder 1, and the second threaded hole on the vacuum cylinder cover 9 is aligned one by one with the multiple first threaded holes on the mounting ring on the outer periphery of the vacuum cylinder 1, and finally, the soft metal sealing ring is squeezed with bolts to apply pre-tightening force symmetrically and evenly to achieve a sealed connection.

[0048] In the description of the present application, it should be noted that the terms "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0049] Unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0050] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A detachable compact ion pump, characterized in that: It includes a vacuum cylinder assembly, a magnet assembly, a cathode assembly, an anode assembly, a vacuum assembly, and an electrode feedthrough, The vacuum pump assembly comprises a vacuum pump and a vacuum pump cover plate. The vacuum pump is a hollow cylindrical structure with an upper opening and a bottom and surrounding sealed. A vacuum chamber is formed inside the vacuum pump. The vacuum pump cover plate is arranged above the upper opening of the vacuum pump and is detachably and sealedly connected to the vacuum pump. A vacuum port is arranged on the vacuum pump cover plate. The magnet assembly includes at least one set of magnet pairs, wherein the set of magnet pairs includes two magnets, and the two magnets are respectively arranged on two opposite inner walls of the vacuum cylinder, and a magnetic field is formed between the two magnets; The cathode assembly comprises two cathode plates arranged relatively and spaced apart from each other, and the cathode plates are arranged in the air pumping cavity and located in the magnetic field; The anode assembly comprises an anode cylinder and a connecting column, wherein the anode cylinder is arranged in the air extraction cavity and located between two cathode plates, and one end of the connecting column is connected to the anode cylinder; The exhaust assembly comprises an exhaust pipe, which is communicated with the exhaust port and is sealed with the exhaust cylinder cover; a mounting port is provided on the side wall of the exhaust pipe; The electrode feedthrough includes a sleeve, an electrode and an insulating connector. The sleeve is a hollow cylindrical structure. One end of the sleeve passes through the mounting port and is arranged inside the exhaust pipe, and the side wall of the sleeve is sealed and connected to the exhaust pipe wall around the mounting port. The electrode is arranged in the sleeve and is rotatably connected to the sleeve through the insulating connector. One end of the electrode is located in the exhaust pipe, and the end of the electrode located in the exhaust pipe is detachably connected to the other end of the connecting column.

2. A detachable compact ion pump according to claim 1, characterized in that: The vacuum pump assembly also includes a sealing ring and a plurality of connecting bolts. A circle of mounting ring is provided at the upper end of the vacuum pump, and a circle of sealing groove is provided on the mounting ring. The sealing ring is arranged in the sealing groove, and the height of the sealing ring is greater than the height of the sealing groove. The mounting ring outside the sealing groove is also provided with a plurality of first threaded holes, and a plurality of second threaded holes are provided on the vacuum pump cover plate. The second threaded holes and the first threaded holes are arranged one by one and overlapped up and down, and the connecting bolts are connected to the second threaded holes and the first threaded holes through threads.

3. A detachable compact ion pump according to claim 2, characterized in that: The sealing ring is a soft metal sealing ring.

4. A detachable compact ion pump according to claim 1, characterized in that: At least one cathode fixing groove is arranged at the bottom end of the vacuum cylinder; The cathode assembly also includes a cathode fixing frame, which is arranged inside the vacuum cylinder. At least one fixing protrusion is arranged at the bottom of the cathode fixing frame, and the fixing protrusion is arranged in the cathode fixing groove; the two cathode plates are arranged on the cathode fixing frame.

5. A detachable compact ion pump according to claim 1, characterized in that: The end of the electrode located inside the exhaust pipe is provided with a thread, the end of the connecting column is provided with a threaded hole, and the end of the electrode located inside the exhaust pipe is detachably connected to the connecting end through the thread.

6. A detachable compact ion pump according to claim 1, characterized in that: The vacuum assembly also includes a shoulder ring and a knife-edge flange. The shoulder ring is arranged at the end of the vacuum pipe away from the vacuum cylinder assembly, and the knife-edge flange is sleeved on the end of the vacuum pipe and connected to the shoulder ring.

7. A detachable compact ion pump according to claim 1, characterized in that: One or more groups of reinforcing ribs are arranged on the outer wall of the vacuum cylinder.

8. The detachable compact ion pump according to any one of claims 1 to 7, characterized in that: The anode cylinder comprises at least one cylinder assembly, and the cylinder assembly comprises a plurality of inner cylinders and at least one outer cylinder sleeved outside the plurality of inner cylinders.

9. A detachable compact ion pump according to claim 8, characterized in that: The shapes and / or sizes of the multiple inner cylinders are the same or different.

10. The detachable compact ion pump according to claim 8, characterized in that: The plurality of inner cylinders are densely arranged in the outer cylinder.

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