Insulation self-shielding high-voltage accelerating tube and insulation component

Abstract

The insulating self-shielding high-voltage accelerating tube comprises a plurality of electrode plates and a plurality of insulating parts, each insulating part is arranged between every two adjacent electrode plates, the electrode plates and the insulating parts are both in a circular ring shape, and beam holes are formed in the centers of the electrode plates and the insulating parts; the insulating part comprises at least one annular channel with a preset depth, and an opening of the annular channel is arranged on the inner side surface of the insulating part. According to the accelerating tube based on the insulating material self-shielding technology, the accelerating gradient of an accelerating electric field can be greatly improved, miniaturization of a high-voltage accelerator is achieved, and the requirements of various application occasions are met.

Description

Technical Field

[0001] The invention relates to an insulating self-shielding high-voltage accelerating tube and an insulating component. Background Art

[0002] High voltage accelerator is a commonly used accelerator, which is widely used in scientific research, industry, medical treatment, energy and other fields.

[0003] A key component of the high-voltage accelerator is the high-voltage accelerating tube, which is composed of multiple circular electrode sheets with holes in the center of the electrode sheets for accelerating the passage of the beam. The electrode sheets are insulated from each other and are loaded with different high voltages in sequence to achieve uniform and continuous acceleration of the beam.

[0004] When the high-voltage accelerating tube is working, a high vacuum environment is required. Firstly, it can reduce the collision loss between the particles in the accelerated beam and the background gas molecules, and secondly, it can avoid the additional beam load generated by the ionization of the background gas, and even the high-voltage breakdown caused by it.

[0005] The vacuum degree in the accelerating tube is usually difficult to be better than 10 -6 Pa, so there is still a large amount of background gas in the accelerating tube. The background gas will be ionized under the action of high pressure to produce ions. In addition, micro-discharge, field emission and micro-particle ionization on the electrode surface will also produce charged ions. When ions bombard the metal electrode sheet, metal atoms will be sputtered out, and the sputtering near the central opening of the electrode sheet will be more serious. The sputtered metal atoms will drift and deposit around. If they are deposited on the insulating parts of the accelerating tube, their insulation properties will be destroyed, causing the insulating material to be metallized, resulting in damage to the accelerating tube.

[0006] The prior art accelerating tube is as follows Figure 1 As shown, reference numeral 1 is an electrode sheet, 2 is an insulating component, 3 is a beam accelerating channel, and 4 is an electrode sheet accelerating channel edge. The metal atoms sputtered at the accelerating channel edge 4 will be deposited on the inner surface of the insulating component 2 to metallize the surface of the insulating component.

[0007] To solve the above problems, the electrode sheet is generally not flat, but disc-shaped, such as Figure 2 Most of the atoms sputtered at the edge of the central hole of the disk-shaped electrode can only move in a straight line and are blocked by the disk-shaped structure and cannot be deposited on the insulating part, thus protecting the insulating performance of the insulating part.

[0008] At the curved part of the disc-shaped electrode, the electric field strength is higher than other parts, and there is generally no problem under low electric field gradient. In order to meet more application occasions, it is necessary to reduce the size of the accelerator and increase the acceleration gradient of the high-voltage accelerating tube. As the acceleration gradient increases, the electric field strength at the curved part of the disc-shaped electrode reaches a certain limit, which will easily cause problems such as surface discharge breakdown. Therefore, the disc-shaped electrode limits the increase of the accelerating gradient of the accelerating tube, thereby limiting the reduction of the accelerator volume, making it difficult to meet certain application occasions. Summary of the invention

[0009] The technical problem to be solved by the present invention is to overcome the problems in the prior art that the curved part of the dish-shaped electrode is prone to surface discharge breakdown, and the dish-shaped electrode affects the improvement of the acceleration gradient of the accelerating tube, thereby making it difficult to reduce the volume of the accelerator. An accelerating tube electrode using the self-shielding technology of insulating materials is provided, which is a flat disc electrode, can greatly improve the acceleration gradient of the accelerating electric field, and realize the miniaturization of the insulating self-shielding high-voltage accelerating tube and insulating components of the high-voltage accelerator.

[0010] The present invention solves the above technical problems through the following technical solutions:

[0011] An insulated self-shielded high-voltage accelerating tube is used in an electron accelerator. The invention is characterized in that the insulated self-shielded high-voltage accelerating tube comprises a plurality of electrode sheets and a plurality of insulating components, each insulating component is arranged between two adjacent electrode sheets, the electrode sheets and the insulating components are both in annular shape and have a beam hole at the center, the insulating component comprises at least one annular channel of a preset depth, the opening of the annular channel is arranged on the inner side surface of the insulating component; the electron beam accelerated by the insulated self-shielded high-voltage accelerating tube moves from top to bottom in the beam hole.

[0012] Preferably, a circular groove opening downward is provided in the circular channel.

[0013] Preferably, the annular channel is arranged at the bottom of the inner side surface of the insulating component, the inner side of the insulating component is provided with a downwardly protruding annular protrusion, and the outer side of the annular protrusion is provided with an annular groove opening downward.

[0014] Preferably, the insulating component comprises a plurality of annular protrusions, the protrusion heights of the annular protrusions increase from inside to outside, an annular groove is provided on the outer side of each annular protrusion, and the inner side of the innermost annular protrusion is the inner side of the insulating component.

[0015] Preferably, the number of the annular protrusions and the number of the annular grooves are both three, and the bottom surfaces of the annular grooves are all located in the same plane.

[0016] Preferably, the insulating component is integrally formed.

[0017] Preferably, an annular baffle protruding toward the annular groove is provided on the outer side of each annular protrusion.

[0018] Preferably, the insulating component includes at least one shielding ring and an insulating ring, the shielding rings are arranged above the insulating ring, the shielding ring includes a ring body and a ring protrusion, the ring protrusion is arranged below the ring body and located at the inner edge, and the insulating ring is installed on the upper surface of the electrode sheet.

[0019] Preferably, the outer diameters of all shielding rings are equal, and the inner diameters of the shielding rings decrease from bottom to top.

[0020] Preferably, the shielding ring and the insulating ring are connected by welding.

[0021] This embodiment also provides an insulating component, which is characterized in that the insulating component is used for the insulating self-shielding high-voltage accelerating tube as described above.

[0022] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0023] The positive and progressive effects of the present invention are:

[0024] The accelerating tube electrode using the insulating material self-shielding technology is a flat disc electrode, which can greatly increase the acceleration gradient of the accelerating electric field, realize the miniaturization of the high-voltage accelerator, and meet the needs of various application occasions. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of a high-voltage accelerating tube in the prior art.

[0026] Figure 2 It is another structural schematic diagram of a high-voltage accelerating tube in the prior art.

[0027] Figure 3 This is a schematic structural diagram of the insulating component of Example 1 of the present invention.

[0028] Figure 4 This is a schematic structural diagram of an insulated self-shielded high-voltage accelerating tube according to Example 1 of the present invention.

[0029] Figure 5 This is a schematic structural diagram of the insulating component of Example 1 of the present invention.

[0030] Figure 6 This is a schematic structural diagram of an insulated self-shielded high-voltage accelerating tube according to Example 2 of the present invention.

[0031] Figure 7 This is a schematic structural diagram of an insulated self-shielded high-voltage accelerating tube according to Example 3 of the present invention. DETAILED DESCRIPTION

[0032] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0033] Example 1

[0034] In this embodiment, the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0035] See also Figures 3 to 5 In this embodiment, the acceleration direction of the accelerating tube is from top to bottom. The description of the direction and position relationship in this embodiment is based on the acceleration direction. When the acceleration direction of the accelerating tube changes, the description of the direction and position relationship changes accordingly. The description of the direction and position relationship does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0036] This embodiment provides an insulated self-shielded high-voltage accelerating tube for use in an electron accelerator.

[0037] The insulated self-shielded high-voltage accelerating tube comprises a plurality of electrode sheets 11 and a plurality of insulating components 12 , wherein each insulating component 12 is disposed between two adjacent electrode sheets 11 .

[0038] The electrode sheet and the insulating component are both in annular shape and have a beam hole 13 at the center.

[0039] The insulating component includes at least one annular channel 21 of a preset depth, and the opening of the annular channel 21 is arranged on the inner side surface of the insulating component.

[0040] In this embodiment, at least one annular channel 21 is provided on the insulating component, and the annular channel forms a shielding surface, so that sputtered atoms will not be deposited inside the annular channel, thereby avoiding metallization of the surface of the insulating component and destroying its insulation.

[0041] Specifically, see Figure 3 The annular channel is provided with an annular groove 211 opening downward. This accelerating tube is a short-section accelerating tube, and a longer accelerating tube can be stacked and extended again according to this rule.

[0042] The annular channel 21 is arranged at the bottom of the inner side of the insulating component. The inner side of the insulating component 12 is provided with an annular protrusion 212 protruding downward. The outer side of the annular protrusion 212 is provided with an annular groove 211 opening downward.

[0043] See also Figure 4 The insulating component includes a plurality of annular protrusions, the protrusion heights of which increase from the inside to the outside, the outer side surface of each annular protrusion is provided with an annular groove, and the inner side surface of the innermost annular protrusion is the inner side surface of the insulating component.

[0044] The accelerating tube is made of a plurality of disc electrode sheets and insulating components bonded alternately. The voltage of the electrode sheets 11 increases from top to bottom.

[0045] The insulating component is a concentric ring whose bottom is connected into one body by homogeneous insulating material to form a plurality of annular grooves 211 .

[0046] The annular groove 211 and the annular protrusion form a deposition surface 213 and a shielding surface 214. Most of the sputtered atoms generated by the beam hole edge 111 are deposited on the deposition surface 21.

[0047] The insulating part between the accelerating tube electrodes is composed of multiple circular rings, and the outer diameter of the small circular ring of the adjacent circular ring is smaller than the inner diameter of the large circular ring, so that a channel is formed between the adjacent circular rings. The lengths of the multiple circular rings increase from the inside to the outside.

[0048] Basically, no metal will be deposited on the shielding surface 214 , especially on the back side, so that good insulation can be formed.

[0049] There are three annular protrusions and three annular grooves, and the bottom surfaces 215 of the annular grooves 211 are all located in the same plane. The bottom surface of the annular groove 211 is also a shielding surface.

[0050] The insulating component is integrally formed.

[0051] Example 2

[0052] This embodiment is basically the same as Embodiment 1, except that:

[0053] See also Figure 6 The insulating component includes at least one shielding ring 31 and an insulating ring 32 .

[0054] The shielding ring 31 is disposed above the insulating ring 32 .

[0055] The shielding ring 31 includes a ring body 311 and a ring protrusion 312 . The ring protrusion is disposed below the ring body and at the inner edge.

[0056] The insulating ring is installed on the upper surface of the electrode sheet 11 .

[0057] The electrode sheet and the insulating component are both in annular shape and have a beam hole 13 at the center.

[0058] Most of the sputtered atoms generated by the beam hole edge 111 are deposited on the deposition surface 213 .

[0059] Basically, no metal is deposited on the shielding surface 214 .

[0060] The outer diameters of all shielding rings are equal, and the inner diameters of the shielding rings decrease from bottom to top.

[0061] The shielding ring 31 and the insulating ring 32 are connected by welding.

[0062] Example 3

[0063] See also Figure 7 This embodiment is basically the same as embodiment 2, except that:

[0064] An annular baffle 313 is provided on the outer side of each annular protrusion 312 and protrudes toward the annular groove 211 .

[0065] Although the specific embodiments of the present invention are described above, those skilled in the art should understand that these are only examples, and the protection scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. An insulated self-shielded high-voltage accelerating tube for use in an electron accelerator, characterized in that: The insulated self-shielded high-voltage accelerating tube comprises a plurality of electrode sheets and a plurality of insulating components, each insulating component is arranged between two adjacent electrode sheets, the electrode sheets and the insulating components are both in annular shapes and have a beam hole at the center, the insulating component comprises at least one annular channel of a preset depth, the opening of the annular channel is arranged on the inner side surface of the insulating component, and the electron beam accelerated by the insulated self-shielded high-voltage accelerating tube moves from top to bottom in the beam hole.

2. The insulated self-shielded high-voltage accelerating tube according to claim 1, characterized in that: A circular groove opening downward is arranged in the circular channel.

3. The insulated self-shielded high-voltage accelerating tube according to claim 1, characterized in that: The annular channel is arranged at the bottom of the inner side surface of the insulating component. The inner side of the insulating component is provided with an annular protrusion protruding downward. The outer side of the annular protrusion is provided with an annular groove opening downward.

4. The insulated self-shielded high-voltage accelerating tube according to claim 3, characterized in that: The insulating component includes a plurality of annular protrusions, the protrusion heights of which increase from the inside to the outside, an annular groove is provided on the outer side of each annular protrusion, and the inner side of the innermost annular protrusion is the inner side of the insulating component.

5. The insulated self-shielded high-voltage accelerating tube according to claim 4, characterized in that: The number of the annular protrusions and the number of the annular grooves are both three, the bottom surfaces of the annular grooves are all located in the same plane, and the insulating component is integrally formed.

6. The insulated self-shielded high-voltage accelerating tube according to claim 3, characterized in that: The outer side of each circular protrusion is provided with a circular baffle protruding toward the circular groove.

7. The insulated self-shielded high-voltage accelerating tube according to claim 1, characterized in that: The insulating component includes at least one shielding ring and an insulating ring. The shielding rings are arranged above the insulating ring. The shielding ring includes a ring body and a ring protrusion. The ring protrusion is arranged below the ring body and located at the inner edge. The insulating ring is installed on the upper surface of the electrode sheet.

8. The insulated self-shielded high-voltage accelerating tube according to claim 7, characterized in that: The outer diameters of all shielding rings are equal, and the inner diameters of the shielding rings decrease from bottom to top.

9. The insulated self-shielded high-voltage accelerating tube according to claim 8, characterized in that: The shielding ring and the insulating ring are connected by welding.

10. An insulating component, characterized in that: The insulating component is used for the insulating self-shielding high-voltage accelerating tube as claimed in any one of claims 1 to 9.

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