Grinding and polishing machining device and method for edges and corners of large-diameter aspheric optical element

Abstract

The invention relates to a large-caliber aspheric optical element edge and corner angle grinding and polishing machining device and method. The machining device comprises a base, and the top of the base is provided with an X-axis sliding table capable of moving in the X-axis direction; the top of the X-axis sliding table is provided with a rotary workbench with a rotary shaft parallel to the Z axis; an optical element clamp is arranged at the top of the rotating table; a portal frame is arranged above the base, and a Y-axis sliding table capable of sliding in the Y-axis direction is arranged on a cross beam of the portal frame; the Y-axis sliding table is provided with a lifting sliding rail capable of moving along the Z axis, a deflection shaft is installed below the lifting sliding rail, and the rotating axis of the deflection shaft is parallel to the X axis. A double-end output main shaft is mounted on the rotation axis of the deflection shaft, and a grinding shaft and a polishing shaft are arranged at the two ends of the double-end output main shaft correspondingly; the control system controls the X-axis sliding table, the rotating table, the Y-axis sliding table, the deflection shaft and the double-end output main shaft to move according to a set path to complete grinding and polishing machining. And automatic machining of grinding forming and polishing of the edges and the corner angles of the large-diameter aspheric surface element in any design is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of ultra-precision manufacturing of large-aperture optical elements, and more specifically to a processing device and method for grinding and shaping edges and corners and surface polishing of large-aperture aspherical optical elements. Background Art

[0002] Compared with traditional spherical optical elements, aspherical optical elements can avoid adverse effects such as spherical aberration, coma, and aberration, reduce light energy loss when focusing the beam, and improve focusing and calibration accuracy. They are widely used in modern large-scale optical systems (such as high-power laser devices used in inertial confinement fusion research). Compared with traditional optical systems, high-power laser devices require large-aperture aspherical optical elements in terms of high precision, batch production, and low cost. This is an engineering and technical problem commonly faced by the field of optical processing in the world.

[0003] In the precision forming stage of large-aperture aspheric optical components, in addition to obtaining high shape accuracy of the aspheric surface, the edges and corners of the components also need to be precisely formed and polished to ensure the clean control of the components in the use environment. Since the sagittal height and radius of curvature of the aspheric surface points are different, it is generally done manually, using oilstone to grind the edges and corners of the components step by step, and then using polishing leather and polishing liquid to polish the edges and corners. This method has low processing efficiency, unstable surface quality, and high dependence on the skills of the operator. It is difficult to achieve mass production and cannot meet the growing needs of engineering applications.

[0004] Patent document CN 116021369 A discloses a glass cover plate edge polishing device and a glass cover plate edge polishing method. The polishing device includes a clamping component, a grinding component, and a lowering component for fixing the glass cover plate, which can improve the smoothness and bending resistance of the glass cover plate after polishing. The device can realize batch polishing of the edges of optical components, but can only realize the grinding and polishing of the edges of flat optical components. Patent document CN 218533905 U discloses a touch screen panel edge polishing device, including a polishing component, an "L"-shaped base, and a driving component. It can only polish each edge of a flat optical component in turn. Patent document CN 210452254 U discloses a resin optical aspheric lens mold edge corner polishing device, including a machine base, a polishing slide, a polishing assembly, a lens mold fixing assembly, etc. During the polishing process, the mold fixing block can be adjusted to a larger polishing area to avoid the generation of polishing dead angles. At the same time, the polishing grinding head can automatically move up and down and swing back and forth. The degree of automation and polishing accuracy are high, and the surface shape can be guaranteed while improving the smoothness of the edge corners. This solution can only be used for polishing the edges and corners of small-caliber aspheric components made of soft optical materials.

[0005] The above existing technologies cannot realize the forming and polishing of the edges and corners of all large-aperture, hard and brittle materials, and special-shaped aspherical optical components of high-power laser devices, and cannot realize the mass and low-cost manufacturing of large-aperture aspherical optical components. Therefore, how to provide a large-aperture aspherical optical component edge and corner grinding and polishing device and processing method is a problem that technical personnel in this field urgently need to solve. Summary of the invention

[0006] The present invention aims to solve the problem that the prior art cannot realize the forming and polishing of the edges and corners of all large-aperture, hard and brittle materials, and special-shaped aspherical optical components of high-power laser devices, and cannot realize the batch and low-cost manufacturing of large-aperture aspherical optical components. For this purpose, the present invention provides a device for grinding and polishing the edges and corners of large-aperture aspherical optical components.

[0007] In order to implement processing, the present invention provides a processing method based on the above-mentioned device.

[0008] The invention provides a large-aperture aspherical optical element edge and corner grinding and polishing device, comprising:

[0009] A base, wherein the top of the base is provided with an X-axis slide table movable along the X-axis direction;

[0010] A rotary table, the top of the X-axis slide has a rotary table with a rotary axis parallel to the Z-axis; the top of the rotary table has an optical element fixture;

[0011] A gantry, wherein the base is provided with a gantry above the base, and a Y-axis slide table which can slide along the Y-axis direction is provided on the crossbeam of the gantry;

[0012] The Y-axis slide has a lifting rail that can move along the Z-axis, the yaw axis is installed below the lifting rail, and the rotation axis of the yaw axis is parallel to the X-axis;

[0013] A double-ended output spindle, wherein the double-ended output spindle is installed on the rotating axis of the deflection shaft, and the two ends of the double-ended output spindle are a grinding shaft and a polishing shaft respectively;

[0014] A control system, wherein the control system controls the X-axis slide, the rotary table, the Y-axis slide, the yaw axis and the double-end output spindle to move along a set path to complete grinding and polishing processing.

[0015] According to the technical solution of the present invention, the deflection range of the deflection axis is ±100°, and the 0° position is the position where the axis of the double-ended output spindle is parallel to the Y axis and the polishing axis faces the optical element side.

[0016] According to the technical solution of the present invention, the X-axis slide table moves through the cooperation of the X-axis guide rail, X-axis servo motor, and X-axis ball screw on the base, the Y-axis slide table moves through the cooperation of the Y-axis guide rail, Y-axis servo motor, and Y-axis ball screw on the beam, the rotary table is supported by the C-axis ball bearing on the X-axis slide table and driven to rotate by the C-axis servo motor, the lifting slide rail is driven by the lifting servo motor and the lifting ball screw on the Y-axis slide table; the yaw shaft is driven to swing by the yaw servo motor on the lifting slide rail, and the double-end output spindle is driven to rotate by the spindle servo motor;

[0017] The X-axis servo motor, the Y-axis servo motor, the C-axis servo motor, the lifting servo motor, the yaw servo motor and the spindle servo motor are all electrically connected to the control system.

[0018] The technical solution of the present invention also includes a grinding fluid circulation system and a polishing fluid circulation system.

[0019] The processing method of the processing device of the present invention comprises placing a rectangular pad at the center of the top of the rotary table, wherein the length and width of the pad are smaller than the length and width of the optical element;

[0020] Place the optical element flat on the pad, with the side of the optical element parallel to the X-axis or Y-axis, and make the projected geometric center of the optical element coincide with the rotation axis of the rotary table;

[0021] The optical element fixture fixes the optical element and ensures that the edges of the optical element are exposed from the optical element fixture;

[0022] Then, according to processing requirements, the optical element is subjected to corner grinding, edge grinding, corner surface polishing, and edge surface polishing.

[0023] In the processing method of the present invention, when grinding edges and corners, a parallel diamond grinding wheel is installed at the grinding shaft end of the double-end output spindle, and the deflection axis moves to a -90° position;

[0024] Find the X-axis, Y-axis and Z-axis zero points of the optical element on the processing device;

[0025] The length of the optical element is L, and the width is W. The edges need to be processed to a width of A. The angle between the direction of the processed edges and the X-axis is β. The equation of the projection of the edge line on the XOY plane is shown in formula 1):

[0026]

[0027] According to formula 1), the diameter of the diamond grinding wheel is D, and the grinding trajectory coordinates (x t ,y t ) and the edge line coordinates (x, y) is shown in Formula 2):

[0028]

[0029] The edge processing trajectory is calculated according to formula 2), and the control system controls the processing according to the edge processing trajectory.

[0030] In the processing method of the present invention, when grinding the edge, a conical grinding wheel with a cone angle of 90 degrees is installed on the grinding shaft end of the double-end output spindle, and the deflection axis moves to a -90° position;

[0031] Find the X-axis, Y-axis and Z-axis zero points of the optical element on the processing device; the length of the optical element is L, and the width is W;

[0032] After the optical element is projected onto the XOY plane, the projection equation of edge AB on the XOY plane is shown in formula 3):

[0033]

[0034] Substitute formula 3) into the aspheric surface equation of formula 4) to calculate the three-dimensional coordinates (x, y, z) of the edge AB space curve;

[0035]

[0036] In formula 4): c = 1 / R 0 , R 0 is the radius of curvature of the aspherical vertex, k is the cone coefficient, α i is the coefficient of the higher order term;

[0037] The use radius of the conical diamond grinding wheel is R t , then the coordinates of the motion trajectory of the diamond grinding wheel are calculated according to formula 5); the control system controls the device to move according to the coordinates of the grinding wheel trajectory;

[0038]

[0039] For the BC edge, the projection equation is shown in formula 6), which is substituted into the aspherical equation formula 4) to calculate the three-dimensional coordinates of the BC edge space curve, and then the conical diamond grinding wheel motion trajectory coordinates are calculated according to formula 7), and the control system controls the device to move according to the grinding wheel trajectory coordinates.

[0040]

[0041] For the CD edge, the projection equation is shown in formula 8). Formula 8) is substituted into the aspheric surface equation formula 4) to calculate the three-dimensional coordinates of the CD space curve of the edge. Then, the coordinates of the motion trajectory of the conical diamond grinding wheel are calculated according to formula 9). The control device moves according to the coordinates of the grinding wheel trajectory through the control system.

[0042]

[0043] For edge AD, the projection equation is shown in formula 10), and formula 10) is substituted into the aspheric surface equation formula 4) to calculate the three-dimensional coordinates of the space curve of edge AD, and then the coordinates of the motion trajectory of the conical diamond grinding wheel are calculated according to formula 11), and the control device moves according to the coordinates of the grinding wheel trajectory through the control system;

[0044]

[0045] In the processing method of the present invention, when polishing the corner surface, after the corner is ground to the required size, a plane is formed, which is the corner surface, and the corner surface polishing is performed;

[0046] The polishing disc is used for polishing the corner surface. The polishing disc is installed on the polishing spindle, and the double-ended output spindle is rotated to the 0° position, that is, the axis of the double-ended output spindle is parallel to the Y axis, and the polishing axis faces the optical element;

[0047] Rotate the rotary table so that the angular surface to be polished is parallel to the X-axis;

[0048] Move the X-axis, Y-axis, and Z-axis so that the axis of the polishing axis is perpendicular to the angular surface to be polished, and the intersection is located at the center of the angular surface, and keep the polishing disc in contact with the surface to be polished;

[0049] Rotate the polishing spindle, spray the polishing liquid, control the polishing spindle to move up and down along the Z axis, the movement range is the height range of the surface to be polished, and polish the angular surface;

[0050] Then the other edges and corners are polished in turn.

[0051] In the processing method of the present invention, when polishing the edge surface, after the edge is ground to the required size, a spatial curved surface is formed, which is the edge surface, and the edge surface width is A1, and the edge surface polishing is performed;

[0052] The edge surface is polished using a polishing disc, which is installed on the polishing spindle, and the double-end output spindle is rotated to the -45° position;

[0053] Rotate the rotary table so that the side of the optical element is parallel to the X-axis or Y-axis;

[0054] Move the X-axis, Y-axis, and Z-axis to make the polishing disc surface contact the edge surface to be polished;

[0055] According to formula 12), the three-dimensional coordinates of the polishing machining trajectory are calculated, and the control system controls the device to move according to the grinding wheel trajectory coordinates;

[0056]

[0057] It can be seen from the above technical solution that compared with the prior art, the beneficial effects of the present invention are as follows: the present invention adopts a gantry structure, has three linear motion axes of XYZ, a rotary table and a deflectable double-end output spindle, and controls the grinding head to strictly follow the contour movement of the edges and corners of the aspheric optical element according to the morphological characteristics of the aspheric optical element to achieve shaping, and then switches to the polishing head to polish the edges and corners. The device has a simple structure and high rigidity, can realize the processing of large-caliber aspheric elements of any design, and can realize the automated processing of edge and corner grinding and polishing. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0059] Figure 1 A schematic diagram of the structure of a device for grinding and polishing edges and corners of a large-aperture aspherical optical element provided by the present invention;

[0060] Figure 2 The schematic diagram of the edge grinding of the present invention is shown;

[0061] Figure 3 A schematic diagram of chamfer width is shown;

[0062] Figure 4 A schematic diagram of the edge position is shown;

[0063] Figure 5 The schematic diagram of polishing the corner surface of the present invention is shown;

[0064] Figure 6 The schematic diagram of edge polishing of the present invention is shown. DETAILED DESCRIPTION

[0065] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0066] Since the existing technology cannot realize the forming and polishing of the edges and corners of all large-caliber, hard and brittle materials, and special-shaped aspherical optical components of high-power laser devices, it is impossible to achieve the problem of mass production and low-cost manufacturing of large-caliber aspherical optical components 5. Therefore, the present invention provides a large-caliber aspherical optical component edge and corner grinding and polishing device. See attached Figure 1 ,include:

[0067] A base 1, wherein the top of the base 1 has an X-axis slide 2 that can move along the X-axis direction;

[0068] A rotary table 3, the top of the X-axis slide 2 has a rotary table 3 with a rotary axis parallel to the Z axis; the top of the rotary table 3 has an optical element fixture 4;

[0069] A gantry, wherein the base 1 is provided with a gantry, and a Y-axis slide 12 which can slide along the Y-axis direction is provided on the crossbeam 7 of the gantry; the gantry also includes a left column 6 and a right column 8 supporting the left and right sides of the crossbeam 7;

[0070] The yaw axis 10, the Y-axis slide 12 has a lifting rail 11 that can move along the Z axis, the yaw axis 10 is installed below the lifting rail 11, and the rotation axis of the yaw axis 10 is parallel to the X axis;

[0071] A double-ended output spindle 9, on the rotating axis of the deflection shaft 10, a double-ended output spindle 9 is installed, and the two ends of the double-ended output spindle 9 are a grinding shaft 91 and a polishing shaft 92 respectively;

[0072] A control system, wherein the control system controls the X-axis slide 2, the rotary table 3, the Y-axis slide 12, the yaw axis 10 and the double-end output spindle 9 to move along a set path to complete grinding and polishing processing.

[0073] In the embodiment of the present invention, the deflection range of the deflection axis 10 is ±100°, and the 0° position is the position where the axis of the double-ended output spindle 9 is parallel to the Y axis and the polishing axis 92 faces the optical element side.

[0074] In a specific embodiment of the invention, the X-axis slide 2 moves through the X-axis guide rail, X-axis servo motor, and X-axis ball screw on the base 1, the Y-axis slide 12 moves through the Y-axis guide rail, Y-axis servo motor, and Y-axis ball screw on the beam 7, the rotary table 3 is supported by the C-axis ball bearing on the X-axis slide 2 and driven to rotate by the C-axis servo motor, the lifting rail 11 is driven by the lifting servo motor and the lifting ball screw on the Y-axis slide 2; the yaw shaft 10 is driven to swing by the yaw servo motor on the lifting rail 11, and the double-end output spindle 9 is driven to rotate by the spindle servo motor;

[0075] The X-axis servo motor, the Y-axis servo motor, the C-axis servo motor, the lifting servo motor, the yaw servo motor and the spindle servo motor are all electrically connected to the control system.

[0076] It is worth noting that the above-mentioned servo motor and ball screw are both based on existing technologies, and their specific installation positions are based on ensuring that the movement of the above-mentioned solution can be achieved. Those skilled in the art can choose to install them according to actual conditions.

[0077] In an embodiment of the present invention, a grinding fluid circulation system and a polishing fluid circulation system are also included.

[0078] Among them, the grinding fluid circulation system at least includes a grinding fluid pool, a grinding fluid filter, a high-pressure water pump, and a grinding fluid pipeline, which are used to continuously supply grinding fluid during component grinding; it is implemented using existing technology.

[0079] The polishing liquid circulation system at least includes a polishing liquid pool, an agitator, a polishing liquid filter, a water pump, and a polishing liquid pipeline, and is used to continuously supply polishing liquid during component polishing processing; it is implemented using existing technology.

[0080] In the description of the present invention, it is necessary to understand that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0081] Based on the processing method of the large-aperture aspheric optical element edge grinding and polishing device, a rectangular pad is placed at the center of the top of the rotary table. The length and width of the pad are smaller than the length and width of the optical element 5. The optical element can be about 50 mm.

[0082] Place the optical element flat on the pad, with the side of the rectangular optical element parallel to the X-axis or Y-axis, and make the projected geometric center of the optical element coincide with the rotation axis of the rotary table;

[0083] The optical element fixture fixes the optical element and ensures that the edges of the optical element are exposed from the optical element fixture;

[0084] Then, according to processing requirements, the optical element is subjected to corner grinding, edge grinding, corner surface polishing, and edge surface polishing.

[0085] See attached Figure 2 , when grinding edges and corners, a parallel diamond grinding wheel is installed at the grinding shaft end of the double-ended output spindle, and the deflection axis moves to the -90° position;

[0086] Find the X-axis, Y-axis and Z-axis zero points of the optical element on the processing device; specifically, move the X-axis and Y-axis so that the axis of the double-end output spindle coincides with the rotation axis of the rotary table on a straight line, and set the processing coordinate system at this time as the X-zero point and the Y-zero point. Move the Z-axis so that the lower end surface of the parallel grinding wheel is about 5mm lower than the lower surface of the element, and set the processing coordinate system at this time as the Z-zero point.

[0087] See attached Figure 3 , the length of the optical element is L, the width is W, the edges need to be processed to width A, the angle between the direction of the edges after processing and the X-axis is β, and the equation of the edge line projection on the XOY plane is shown in formula 1):

[0088]

[0089] According to formula 1), the diameter of the diamond grinding wheel is D, and the grinding trajectory coordinates (x t ,y t ) and the edge line coordinates (x, y) is shown in Formula 2):

[0090]

[0091] The edge processing trajectory is calculated according to formula 2), and the control system controls the processing according to the above edge processing trajectory, thereby realizing the edge grinding processing.

[0092] When grinding edges, refer to the attached Figure 1 , a conical grinding wheel with a 90-degree cone angle is installed on the grinding shaft end of the double-ended output spindle, and the deflection axis moves to the -90° position;

[0093] Find the X-axis, Y-axis and Z-axis zero points of the optical element on the processing device; specifically, move the X-axis and Y-axis so that the axis of the double-end output spindle coincides with the rotation axis of the rotary table on a straight line, and set the processing coordinate system at this time as the X-zero point and Y-zero point. Slowly lower the Z-axis of the device so that the bottom end of the conical grinding wheel contacts the surface of the element, and set the processing coordinate system at this time as the Z-zero point.

[0094] See attached Figure 4 , the length of the optical element is L, and the width is W;

[0095] After the optical element is projected onto the XOY plane, the projection equation of edge AB on the XOY plane is shown in formula 3):

[0096]

[0097] Substitute formula 3) into the aspheric surface equation of formula 4) to calculate the three-dimensional coordinates (x, y, z) of the edge AB space curve;

[0098]

[0099] In formula 4): c = 1 / R 0 , R 0 is the radius of curvature of the aspherical vertex, k is the cone coefficient, α i is the coefficient of the higher order term;

[0100] The use radius of the conical diamond grinding wheel is R t , then the coordinates of the motion trajectory of the diamond grinding wheel are calculated according to formula 5); the grinding process of the AB edge can be realized by controlling the device of the control system to move according to the coordinates of the grinding wheel trajectory;

[0101]

[0102] For the BC edge, the projection equation is shown in formula 6). Substitute it into the aspherical equation formula 4) to calculate the three-dimensional coordinates of the BC edge space curve, and then calculate the coordinates of the conical diamond grinding wheel motion trajectory according to formula 7). The control system controls the device to move according to the grinding wheel trajectory coordinates to achieve the grinding process of the BC edge.

[0103]

[0104] For the CD edge, the projection equation is shown in formula 8). Formula 8) is substituted into the aspheric surface equation formula 4) to calculate the three-dimensional coordinates of the CD space curve of the edge. Then, the coordinates of the motion trajectory of the conical diamond grinding wheel are calculated according to formula 9). The control system controls the device to move according to the grinding wheel trajectory coordinates to achieve the grinding process of the CD edge.

[0105]

[0106] For edge AD, the projection equation is shown in formula 10). Formula 10) is substituted into the aspheric surface equation formula 4) to calculate the three-dimensional coordinates of the space curve of edge AD. Then, according to formula 11), the coordinates of the motion trajectory of the conical diamond grinding wheel are calculated. The control system controls the device to move according to the coordinates of the grinding wheel trajectory, so that the grinding process of the AD edge can be realized.

[0107]

[0108] When polishing the corners, see the attached Figure 5 After the edges and corners are ground to the required size, a plane is formed, which is the edge and corner surface, and the edge and corner surface is polished;

[0109] Polishing discs are used for polishing the corner surfaces, and the diameter of the polishing disc can be 30-50mm. The polishing disc is installed on the polishing spindle, and the double-end output spindle is rotated to the 0° position, that is, the axis of the double-end output spindle is parallel to the Y axis, and the polishing axis faces the optical element;

[0110] Rotate the rotary table so that the angular surface to be polished is parallel to the X-axis;

[0111] Move the X-axis, Y-axis, and Z-axis so that the axis of the polishing axis is perpendicular to the angular surface to be polished, and the intersection is located at the center of the angular surface, and keep the polishing disc in contact with the surface to be polished;

[0112] Rotate the polishing spindle, spray the polishing liquid, control the polishing spindle to move up and down along the Z axis, the movement range is the height range of the surface to be polished, and polish the angular surface;

[0113] Then the other edges and corners are polished in turn.

[0114] When polishing the edges, refer to the attached Figure 6 After the edge is ground to the required size, a spatial curved surface is formed, which is the edge surface. The edge surface width is A1, and the edge surface is polished;

[0115] The edge surface is polished using a polishing disc, which is installed on the polishing spindle, and the double-end output spindle is rotated to the -45° position;

[0116] Rotate the rotary table so that the side of the optical element is parallel to the X-axis or Y-axis;

[0117] Move the X-axis, Y-axis, and Z-axis to make the polishing disc surface contact the edge surface to be polished;

[0118] According to formula 12), the three-dimensional coordinates of the polishing machining trajectory are calculated, and the control system controls the device to move according to the grinding wheel trajectory coordinates;

[0119]

[0120] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0121] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A device for grinding and polishing edges and corners of large-aperture aspherical optical elements, characterized in that: include: A base (1), wherein the top of the base (1) is provided with an X-axis slide table (2) movable along the X-axis direction; A rotary table (3), wherein the top of the X-axis slide table (2) has a rotary table (3) whose rotary axis is parallel to the Z axis; the top of the rotary table (3) has an optical element fixture (4); A gantry, wherein the base (1) is provided with a gantry, and a crossbeam (7) of the gantry is provided with a Y-axis slide table (12) which can slide along the Y-axis direction; A deflection shaft (10), wherein the Y-axis slide table (12) is provided with a lifting rail (11) movable along the Z-axis, the deflection shaft (10) is installed below the lifting rail (11), and the rotation axis of the deflection shaft (10) is parallel to the X-axis; A double-end output spindle (9), the double-end output spindle (9) being mounted on the rotating axis of the deflection shaft (10), and the two ends of the double-end output spindle (9) are respectively a grinding shaft (91) and a polishing shaft (92); A control system, wherein the control system controls the X-axis slide (2), the rotary table (3), the Y-axis slide (12), the deflection axis (10) and the double-end output spindle (9) to move along a set path to complete grinding and polishing processing.

2. The large-aperture aspherical optical element edge and corner grinding and polishing device according to claim 1, characterized in that: The deflection range of the deflection axis (10) is ±100°, and the 0° position is a position where the axis of the double-ended output spindle (9) is parallel to the Y axis and the polishing axis (92) faces the optical element side.

3. The large-aperture aspherical optical element edge and corner grinding and polishing device according to claim 1, characterized in that: The X-axis slide (2) moves in coordination with the X-axis guide rail, the X-axis servo motor, and the X-axis ball screw on the base (1); the Y-axis slide (12) moves in coordination with the Y-axis guide rail, the Y-axis servo motor, and the Y-axis ball screw on the crossbeam (7); the rotary table (3) is supported by the C-axis ball bearing on the X-axis slide (2) and driven to rotate by the C-axis servo motor; the lifting slide (11) is driven by the lifting servo motor and the lifting ball screw on the Y-axis slide (2); the yaw shaft (10) is driven to swing by the yaw servo motor on the lifting slide (11); and the double-end output spindle (9) is driven to rotate by the spindle servo motor; The X-axis servo motor, the Y-axis servo motor, the C-axis servo motor, the lifting servo motor, the yaw servo motor and the spindle servo motor are all electrically connected to the control system.

4. The device for grinding and polishing edges and corners of a large-aperture aspherical optical element according to any one of claims 1 to 3, characterized in that: It also includes a grinding fluid circulation system and a polishing fluid circulation system.

5. A processing method based on the large-aperture aspherical optical element edge grinding and polishing device according to any one of claims 1 to 4, characterized in that: A rectangular pad is placed at the center of the top of the rotary table, and the length and width of the pad are smaller than those of the optical element; Place the optical element flat on the pad, with the side of the optical element parallel to the X-axis or Y-axis, and make the projected geometric center of the optical element coincide with the rotation axis of the rotary table; The optical element fixture fixes the optical element and ensures that the edges of the optical element are exposed from the optical element fixture; Then, according to processing requirements, the optical element is subjected to corner grinding, edge grinding, corner surface polishing, and edge surface polishing.

6. The processing method according to claim 5, characterized in that: When grinding corners, a parallel diamond grinding wheel is installed at the grinding shaft end of the double-ended output spindle, and the deflection axis moves to the -90° position; Find the X-axis, Y-axis and Z-axis zero points of the optical element on the processing device; The length of the optical element is L, and the width is W. The edges need to be processed to a width of A. The angle between the direction of the processed edges and the X-axis is β. The equation of the projection of the edge line on the XOY plane is shown in formula 1): According to formula 1), the diameter of the diamond grinding wheel is D, and the grinding trajectory coordinates (x t ,y t ) and the edge line coordinates (x, y) is shown in Formula 2): The edge processing trajectory is calculated according to formula 2), and the control system controls the processing according to the edge processing trajectory.

7. The processing method according to claim 5, characterized in that: When grinding edges, a conical grinding wheel with a 90-degree taper angle is installed on the grinding shaft end of the double-ended output spindle, and the deflection axis moves to the -90° position; Find the X-axis, Y-axis and Z-axis zero points of the optical element on the processing device; the length of the optical element is L, and the width is W; After the optical element is projected onto the XOY plane, the projection equation of edge AB on the XOY plane is shown in formula 3): Substitute formula 3) into the aspheric surface equation of formula 4) to calculate the three-dimensional coordinates (x, y, z) of the edge AB space curve; In formula 4), c = 1 / R0, R0 is the radius of curvature of the aspheric vertex, k is the cone coefficient, α i is the coefficient of the higher order term; The use radius of the conical diamond grinding wheel is R t , then the coordinates of the motion trajectory of the diamond grinding wheel are calculated according to formula 5); the control system controls the device to move according to the coordinates of the grinding wheel trajectory; For the BC edge, the projection equation is shown in formula 6), which is substituted into the aspherical equation formula 4) to calculate the three-dimensional coordinates of the BC edge space curve, and then the conical diamond grinding wheel motion trajectory coordinates are calculated according to formula 7), and the control system controls the device to move according to the grinding wheel trajectory coordinates. For the CD edge, the projection equation is shown in formula 8). Formula 8) is substituted into the aspheric surface equation formula 4) to calculate the three-dimensional coordinates of the CD space curve of the edge. Then, the coordinates of the motion trajectory of the conical diamond grinding wheel are calculated according to formula 9). The control device moves according to the coordinates of the grinding wheel trajectory through the control system. For edge AD, the projection equation is shown in formula 10), and formula 10) is substituted into the aspheric surface equation formula 4) to calculate the three-dimensional coordinates of the space curve of edge AD, and then the coordinates of the motion trajectory of the conical diamond grinding wheel are calculated according to formula 11), and the control device moves according to the coordinates of the grinding wheel trajectory through the control system; 8. The processing method according to claim 6, characterized in that: When polishing the corner surface, after the corner is ground to the required size, a flat surface is formed, which is the corner surface, and the corner surface is polished; The polishing disc is used for polishing the corner surface. The polishing disc is installed on the polishing spindle, and the double-ended output spindle is rotated to the 0° position, that is, the axis of the double-ended output spindle is parallel to the Y axis, and the polishing axis faces the optical element; Rotate the rotary table so that the angular surface to be polished is parallel to the X-axis; Move the X-axis, Y-axis, and Z-axis so that the axis of the polishing axis is perpendicular to the angular surface to be polished, and the intersection is located at the center of the angular surface, and keep the polishing disc in contact with the surface to be polished; Rotate the polishing spindle, spray the polishing liquid, control the polishing spindle to move up and down along the Z axis, the movement range is the height range of the surface to be polished, and polish the angular surface; Then the other edges and corners are polished in turn.

9. The processing method according to claim 7, characterized in that: When polishing the edge surface, after the edge is ground to the required size, a spatial curved surface is formed, which is the edge surface. The edge surface width is A1, and the edge surface polishing is performed; The edge surface is polished using a polishing disc, which is installed on the polishing spindle, and the double-end output spindle is rotated to the -45° position; Rotate the rotary table so that the side of the optical element is parallel to the X-axis or Y-axis; Move the X-axis, Y-axis, and Z-axis to make the polishing disc surface contact the edge surface to be polished; According to formula 12), the three-dimensional coordinates of the polishing machining trajectory are calculated, and the control system controls the device to move according to the grinding wheel trajectory coordinates;

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