Droplet discharge apparatus, adjustment method, and method for manufacturing article

Abstract

The present invention relates to a liquid droplet discharge apparatus, an adjustment method, and a method of manufacturing an article, the liquid droplet discharge apparatus comprising: a nozzle head having a plurality of nozzles; a driving unit that drives the plurality of nozzles so that the plurality of nozzles eject a plurality of liquid droplets; an image capturing unit that captures an image of the plurality of droplets; an image confirmation unit that confirms a focus state of the plurality of droplets captured by the imaging unit; and an adjustment unit that adjusts an angle of at least a portion of the imaging unit with respect to the plurality of droplets based on the in-focus state confirmed by the image confirmation unit.

Description

Technical Field

[0001] The present invention relates to a liquid droplet ejection device, an adjustment method, an article manufacturing method, and the like. Background Art

[0002] A droplet observation device that photographs flying droplets ejected from the nozzles of an inkjet device to measure droplet characteristics such as droplet velocity, volume, and ejection angle generally photographs flying droplets from one nozzle to measure droplet characteristics. In this case, when the inkjet device is large in scale and has a large number of nozzles, it takes a long time to measure the droplet characteristics.

[0003] On the other hand, there is a method of simultaneously photographing flying droplets from a plurality of nozzles to measure droplet characteristics in order to shorten the measurement time.

[0004] For example, Japanese Patent Application Laid-Open No. 2004-337771 discloses a method for measuring droplet characteristics by disposing an imaging unit at a position perpendicular to the row direction of the nozzles and simultaneously photographing flying droplets from a plurality of nozzles. In this example, a rotating unit capable of rotating the droplet ejection head relative to the imaging unit and a moving mechanism capable of moving the imaging unit relative to the droplet ejection head in an imaging direction are provided.

[0005] The rotating unit makes the nozzle array of the droplet ejection head and the imaging unit orthogonal to each other, and the moving mechanism adjusts the distance between the imaging unit and the flying droplets from the nozzle array to focus, and simultaneously captures the flying droplets from a plurality of nozzles to measure droplet characteristics. Summary of the invention

[0006] Problem that the invention aims to solve

[0007] However, in the conventional technology described in Japanese Patent Application Laid-Open No. 2004-337771, when simultaneously imaging flying droplets from a plurality of nozzles, the distance between the imaging unit and the nozzle array is merely adjusted by a moving mechanism that is movable in the imaging direction relative to the droplet ejection head.

[0008] Therefore, when the imaging plane of the flying droplets ejected from the plurality of nozzles that are the imaging object is not parallel to the imaging plane focused on by the depth of field of the imaging unit, there are portions of the imaging plane where the flying droplets are not focused. As a result, there is a problem that the imaging image of the flying droplets is blurred and accurate measurement cannot be performed.

[0009] In view of these problems, one object of the present invention is to provide a liquid droplet ejection device capable of improving the measurement accuracy of liquid droplets ejected from a plurality of nozzles.

[0010] Solutions for solving problems

[0011] In order to solve the above-mentioned problems, a liquid droplet discharge device according to one aspect of the present invention is characterized by comprising:

[0012] a nozzle head having a plurality of nozzles;

[0013] a driving unit configured to drive the plurality of nozzles to cause the plurality of nozzles to eject a plurality of liquid droplets;

[0014] A camera unit for photographing the plurality of droplets;

[0015] an image confirmation unit that confirms a focus state of the plurality of droplets photographed by the imaging unit; and

[0016] An adjustment unit adjusts an angle of at least a portion of the imaging unit relative to the plurality of droplets based on the focus state confirmed by the image confirmation unit.

[0017] Effects of the Invention

[0018] According to the present invention, it is possible to realize a liquid droplet ejecting device capable of improving the measurement accuracy of liquid droplets ejected from a plurality of nozzles. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a functional block diagram showing a configuration example of a liquid droplet ejection device according to the first embodiment of the present invention.

[0020] Figure 2 (A) and (B) are diagrams showing configuration examples of the XY movable portion and the nozzle head module in the first embodiment of the present invention.

[0021] Figure 3 This is a diagram showing an example of the nozzle head and the ejected liquid droplets in the first embodiment of the present invention.

[0022] Figure 4 (A) to (C) are diagrams showing an example of the positional relationship between the nozzle head and the droplet imaging unit in Example 1 of the present invention.

[0023] Figure 5 This is a functional block diagram showing a configuration example of a liquid droplet ejection device according to Embodiment 2 of the present invention.

[0024] Figure 6 (A) and (B) are diagrams for explaining the nozzle head and reference marks in Example 2 of the present invention.

[0025] Figure 7 This is a functional block diagram showing a configuration example of a liquid droplet ejection device according to Embodiment 3 of the present invention.

[0026] Figure 8 This is a diagram showing a configuration example of an XY movable portion and a nozzle head module in Example 3 of the present invention.

[0027] Fig. 9 This is a functional block diagram showing a configuration example of a liquid droplet ejection device according to a fourth embodiment of the present invention.

[0028] Fig.10 (A) to (C) are diagrams showing examples of the nozzle head and the ejected liquid droplets in Example 4 of the present invention.

[0029] Fig.11 This is a functional block diagram showing a configuration example of a liquid droplet ejection device according to a fifth embodiment of the present invention. DETAILED DESCRIPTION

[0030] Hereinafter, the embodiments of the present invention will be described with reference to the accompanying drawings. However, the present invention is not limited to the following embodiments. In addition, in each figure, the same components or elements are marked with the same reference numerals, and repeated descriptions are omitted or simplified.

[0031] <Example 1>

[0032] Figure 1 1 is a functional block diagram showing a configuration example of a liquid droplet ejection device according to Embodiment 1 of the present invention. In addition, the liquid droplet ejection device is implemented by causing a CPU (not shown) or the like as a computer to execute a computer program stored in a memory (not shown) as a storage medium. Figure 1 A portion of the functional block is shown.

[0033] However, part or all of these functional blocks may be realized by hardware. As the hardware, a dedicated circuit (ASIC), a processor (reconfigurable processor, DSP), etc. may be used.

[0034] in addition, Figure 1 The functional blocks shown may not be built into the same housing, but may be composed of different devices connected to each other via signal lines. Figure 1 The same description applies to Figure 5 , Figure 7 , Fig. 9 , Fig.11 .

[0035] exist Figure 1 In the figure, 10 is a nozzle head of a droplet ejection device (inkjet device), and a droplet drive unit 20 is a droplet drive unit that drives the nozzle head 10 to eject ink in the form of droplets. The droplet drive unit 20 functions as a drive unit that drives the plurality of nozzles to eject a plurality of droplets.

[0036] Figure 2 (A) and (B) are diagrams showing a structural example of the XY movable part and the nozzle head module in Example 1 of the present invention. Figure 2As shown in FIG. 1 (A), the nozzle head 10 includes a plurality of nozzles 101 .

[0037] Each nozzle is a fine hole of, for example, several tens of μm. Figure 2 In the example shown in (A), a row is formed in the horizontal direction and four rows are arranged in the vertical direction. Each of the plurality of nozzles 101 has a droplet driving unit 20, for example, which drives a piezoelectric element to cause the nozzle 101 to eject ink in the form of droplets. The piezoelectric element ejects droplets according to an applied voltage.

[0038] Therefore, the volume and speed of the droplets ejected from the nozzle 101 can be controlled by the voltage applied to the droplet driving unit 20. The timing adjustment unit 30 adjusts the timing of driving the droplet driving unit 20 based on the command from the control unit 40.

[0039] Figure 1 The thick solid line portion is the inspection unit 100, and the portion surrounded by the dotted line is the flying droplet measuring unit 60. The flying droplet measuring unit 60 illuminates the flying droplets ejected from the plurality of nozzles 101 using the illumination unit 52, photographs the droplet imaging unit 50, performs image processing using the image processing unit 56, and calculates the velocity, volume, ejection angle, etc. of the droplets ejected from each nozzle.

[0040] Here, the droplet imaging unit 50 functions as imaging means for imaging a plurality of droplets, and the image processing unit 56 functions as image processing means for calculating at least one of the velocity, volume, and ejection angle of the droplets ejected from the plurality of nozzles based on the image from the imaging means.

[0041] Here, if Figure 2 As shown in (A), the droplet imaging unit 50 and the lighting unit 52 are fixed to the plate 55. When the horizontal axis is set to Xdrv and the vertical axis is set to Ydrv, the droplet imaging unit 50 and the lighting unit 52 are mounted on an XY movable unit 140 that can move freely along the Xdrv axis and the Ydrv axis.

[0042] That is, the XY movable unit 140 functions as a moving unit that moves the nozzle head and the imaging unit relative to each other, and the XY movable unit 140 has a driving axis X (first driving axis) in a predetermined direction and a driving axis Y (second driving axis) in a direction perpendicular to the driving axis X (first driving axis). Figure 2 As shown in (A) of FIG. 8 , the drive axis X (first drive axis) and the drive axis Y (second drive axis) are axes parallel to the arrangement surface of the plurality of nozzles.

[0043] exist Figure 2 In (A), a plurality of nozzle heads 10 are attached to the nozzle head module 200. In this example, six nozzle heads 10 are attached to the nozzle head module 200.

[0044] Figure 3 1 is a diagram showing an example of a nozzle head and a sprayed droplet in Embodiment 1 of the present invention, wherein the vertical axis is Zdrv and the horizontal axis is Xdrv, and the nozzle head 10 installed in the nozzle head module 200 is shown as viewed from the horizontal direction. Figure 3 As shown, a plurality of liquid droplets 103 are ejected simultaneously from the nozzle 101 .

[0045] In the flying droplet measuring unit 60 , the droplet imaging unit 50 simultaneously captures a plurality of images of the plurality of droplets 103 , and the image processing unit 56 calculates the speed, volume, and discharge angle of the droplets discharged from the plurality of nozzles through image processing.

[0046] The XY movable part 140 can be moved along the Figure 2 The axes Xdrv and Ydrv shown in (A) are moved to arbitrary positions. The inspection unit 100 is mounted on the XY movable part 140 .

[0047] Next, for Figure 2 The case where the mounting angle of the plate 55 to which the droplet imaging unit 50 and the illumination unit 52 are fixed is offset as shown in (B) of FIG.

[0048] In reality, the mounting angle deviates due to various reasons such as the deviation between the droplet imaging unit 50 and the plate 55 , the deviation between the plate 55 and a mounting plate (not shown) of the XY movable unit 140 , and the deviation between the mounting plate and the XY movable unit.

[0049] Figure 4 (A) to (C) are diagrams showing an example of the positional relationship between the nozzle head and the droplet imaging unit in Example 1 of the present invention. Figure 4 As shown in (A), the vicinity of the nozzle head 10 is magnified. For simplicity, only the droplet imaging unit 50 and the nozzle are magnified, and the angle deviation of the plate 55 to which the droplet imaging unit 50 and the lighting unit 52 are fixed caused by the stacking of multiple structures is represented as θz.

[0050] exist Figure 4 In (A), six nozzles are indicated by a circle. The nozzle on the left is Nz-1, and the nozzle on the right is Nz-6. The droplet imaging unit 50 simultaneously captures the droplets ejected from the six nozzles Nz-1 to Nz-6, and the image processing unit 56 performs image processing to calculate the velocity, volume, ejection angle, etc. of the droplets ejected from each nozzle.

[0051] Here, for example, the fourth nozzle from the left is set as the reference nozzle. The dotted line indicates the focus plane on which the droplet imaging unit 50 focuses, and on this plane, the droplets from the reference nozzle are focused to obtain a non-defocused, clearly outlined image of the droplets.

[0052] This position is set as the first focus position (X0, Y0). For example, at this position, since Nz-1 and Nz-6 deviate from the focus plane, they are out of focus and an accurate camera image of the droplet cannot be obtained, resulting in errors in the measurement results of the droplet speed, volume, ejection angle, etc. calculated by the image processing unit 56.

[0053] use Figure 1 The image confirmation unit 70 is used to confirm the focus state of the camera image of each droplet. The image confirmation unit 70 functions as an image confirmation unit that confirms the focus state of multiple droplets captured by the camera unit. In addition, for example, the XY movable unit 140 is moved along the Xdrv axis so that the droplet imaging unit 50 can simultaneously capture the droplets of Nz-1 to Nz-6 as the measurement target nozzles.

[0054] Next, the stepping drive is performed along the Ydrv axis to capture images of droplets, and the contrast of the captured image is confirmed by the image confirmation unit 70. The position of Ydrv with the highest contrast relative to the reference nozzle is set as the first focus position (X0, Y0).

[0055] Next, the second focus position is determined. For example, Nz-1 is set as the measurement nozzle to be measured. Figure 4 As shown in (B), the distance between the measuring nozzle and the reference nozzle is known, and this distance is ΔXnz. The selection of the reference nozzle and the measuring nozzle is not limited thereto, and at least two nozzles whose distances between the nozzles are known can be arbitrarily selected.

[0056] For the measuring nozzle Nz-1, the XY movable unit 140 is driven stepwise along the Ydrv axis to capture a droplet, and the contrast of the captured image is confirmed by the image confirmation unit 70, and the position of Ydrv with the highest contrast is set as the second focus position (X0, Y1). At this time, since there is no movement in the Xdrv axis direction relative to the first focus position, there is only a position difference in the Ydrv axis direction.

[0057] Here, according to Figure 4 As can be seen from (B), the angle deviation θz can be calculated by the following formula 1.

[0058] θz=tan-1{(Y1-Y0) / ΔXnz}…(Formula 1)

[0059] use Figure 1The angle deviation is calculated by the adjustment amount calculation unit 80, and the angle adjustment is performed by the angle adjustment unit 90 so that θz becomes zero. In this way, in this embodiment, the angle adjustment is performed by the angle adjustment unit 90 based on the results of measuring the focal positions of the predetermined reference nozzle and the measurement nozzle at a predetermined distance from the reference nozzle. In addition, the angle adjustment unit 90 can be an electric adjustment unit using a motor or the like, or a manual adjustment unit that manually adjusts the angle.

[0060] Here, the angle adjustment unit 90 functions as an adjustment unit that performs the following adjustment step: in this adjustment step, the angle of at least a part of the imaging unit relative to the plurality of droplets is adjusted based on the focus state confirmed by the image confirmation unit. In addition, in this embodiment, the angle adjustment unit 90 is configured to adjust the angle by rotating the entire droplet imaging unit 50 around the Z axis.

[0061] However, the angle may be adjusted by rotating at least one of the lens and the imaging element of the droplet imaging unit 50 about an axis parallel to the Z axis. That is, the depth of field may be changed and adjusted so that a plurality of nozzles are within the depth of field.

[0062] By adjusting the angle, Figure 4 As shown in (C), the angle deviation θz disappears, and the focus plane of the droplet imaging unit 50 is parallel to each nozzle array of the nozzle head 10, so that the droplets from all nozzles within the imaging range are in focus. As a result, a camera image with clear contours and no defocusing can be obtained for all droplets within the imaging range, so that the velocity, volume, and ejection angle of the droplets can be calculated with high precision using the image processing unit 56.

[0063] In addition, when the angle adjustment unit 90 is an electrical adjustment unit, the angle adjustment can be performed for each of the plurality of nozzle heads mounted on the nozzle head module 200. That is, a reference nozzle and a measurement nozzle can be selected for each nozzle head, the angle offset can be calculated using the adjustment amount calculation unit 80, and the angle adjustment can be performed using the angle adjustment unit 90 so that each θz becomes zero.

[0064] In this case, even if the angle offset θz of each nozzle head is slightly different, the angle can be accurately adjusted for each nozzle head so that θz becomes zero. Therefore, a camera image with no defocus and clear contour lines can be obtained for all droplets from the multiple nozzle heads installed in the nozzle head module 200, so that the image processing unit 56 can be used to calculate the accurate droplet speed, volume and ejection angle.

[0065] As described above, according to this embodiment, even when the focus plane of the droplet imaging unit 50 is offset from the angle of the row of the plurality of nozzles, the XY movable unit 140 is step-driven in the Ydrv axis direction and the contrast of the captured images of the reference nozzle and the measurement nozzle is confirmed by the image confirmation unit 70. Then, the first focus position and the second focus position are calculated based on the position of Ydrv with the highest contrast.

[0066] Thus, by calculating the angle offset using the adjustment amount calculation unit 80 and adjusting the angle offset using the angle adjustment unit 90, the focus plane of the droplet imaging unit 50 is made parallel to each nozzle array of the nozzle head 10, so that the droplets from all nozzles within the imaging range are in focus. Therefore, it is possible to obtain an image with clear contours without defocusing for all droplets within the imaging range, so that the image processing unit 56 can calculate the accurate velocity, volume, and ejection angle of the droplets.

[0067] As described above, according to this embodiment, the focus on the imaged surface can be optimized by adjusting the offset between the imaged surface of the flying droplets ejected from the plurality of nozzles and the imaged surface focused on based on the depth of field of the image pickup unit. In addition, the measurement accuracy when the flying droplets of the plurality of nozzles are simultaneously photographed to measure the droplet characteristics can be improved.

[0068] <Example 2>

[0069] Next, based on Figure 5 Embodiment 2 of the present invention will be described. In addition, description of the same operations as those of Embodiment 1 will be omitted.

[0070] Figure 5 1 is a functional block diagram showing a configuration example of a liquid droplet ejection device according to Embodiment 2 of the present invention. The difference from Embodiment 1 is that a reference mark imaging unit 105, a position calculation unit 110, and a position correction unit 120 are provided in the inspection unit 100a, and the other parts are the same as Embodiment 1, so the description thereof is omitted.

[0071] That is, the inspection unit 100 a of the present embodiment is equipped with the reference mark imaging unit 105 . Figure 6 (A) and (B) are diagrams for explaining the nozzle head and reference marks in Example 2 of the present invention. Figure 6 As shown in FIG. 1 (A), in the nozzle head 10, the plurality of reference marks 102 are provided on the lower side of the nozzle head 10. However, the plurality of reference marks 102 may be provided on the upper side of the nozzle head 10.

[0072] When the plurality of reference marks 102 are provided on the lower side of the nozzle head 10, the reference mark imaging unit 105 photographs the reference marks 102 from the lower side of the nozzle head 10. When the reference marks 102 are provided on the upper side of the nozzle head 10, the reference mark imaging unit 105 photographs the reference marks 102 from the upper side of the nozzle head 10. Here, the reference mark imaging unit 105 functions as a detection unit for detecting the reference marks.

[0073] The position calculation unit 110 calculates the position of each reference mark 102 based on the image data from the reference mark imaging unit 105 and the coordinate position data of the Xdrv axis and the Ydrv axis from the drive control unit 130 .

[0074] Here, consider Figure 6 As shown in (B), the nozzle head 10 is offset from the coordinates based on the Xdrv axis and the Ydrv axis. Xhd and Yhd are the coordinate axes of the nozzle head 10. As shown in the figure, the coordinate axes of the nozzle head 10 are offset from the coordinate systems Xdrv and Ydrv of the XY movable part 140 by an angle θhd.

[0075] Next, a case where the reference marks 102 - a and 102 - b of the plurality of reference marks 102 of the nozzle head 10 are imaged by the reference mark imaging unit 105 will be described as an example.

[0076] In the position calculation unit 110, the position of each reference mark 102 is calculated based on the image data of the reference marks 102-a and 102-b and the coordinate position data of the Xdrv axis and the Ydrv axis from the drive control unit 130. Here, the position of the reference mark 102-a is (Xa, Ya), and the position of 102-b is (Xb, Yb). The distance Lab between the reference marks 102-a and 102-b is known.

[0077] Therefore, the angular deviation θhd of the coordinate axis of the nozzle head 10 with respect to the coordinate system of the XY movable part 140 is calculated by the following equations 2 and 3.

[0078] cos(θhd)=(Xb-Xa) / Lab…(Formula 2)

[0079] θhd=cos-1{(Xb-Xa) / Lab}…(Formula 3)

[0080] In addition, the positional relationship between the reference mark 102 and each nozzle 101 is known. Therefore, in the position correction unit 120, for example, based on the coordinates (Xa, Ya) of the reference mark 102-a in the coordinate system of the XY movable unit 140 and the angle deviation θhd, the coordinates of all the nozzles 101 of the nozzle head 10 in the coordinate system of the XY movable unit 140 are calculated.

[0081] Then, the coordinates (positions) of all the nozzles 101 are corrected by the position correction unit 120, and the XY movable unit 140 is driven based on the corrected coordinates by the drive control unit 130. In this way, the position correction unit 120 functions as a position correction unit that moves the moving unit to a predetermined position based on the detection result of the detection unit that detects the reference mark.

[0082] That is, the detection unit detects two or more of the plurality of reference marks, the position correction unit calculates relative positional deviations between the plurality of nozzles and the moving unit based on the detection result of the detection unit, and moves the moving unit to a predetermined position based on the calculation result.

[0083] Thus, even if the nozzle head 10 is offset by an angle θhd relative to the XY movable unit 140 , the position of the inspection unit 100 a can be accurately controlled so that the flying droplets ejected from any of the plurality of nozzles 101 can be illuminated by the illumination unit 52 and photographed by the droplet imaging unit 50 .

[0084] In addition, in the above description, the shooting Figure 6 The case where the positional deviation is corrected by using 102-a and 102-b in the reference mark (B) is used as an example. However, as long as the reference mark is within the imaging range of the reference mark imaging unit 105, the positional deviation can be corrected in the same manner regardless of which reference mark is used. Therefore, the droplet imaging unit 50 can be used to accurately capture the flying droplets ejected from the plurality of nozzle heads 10 installed in the nozzle head module 200.

[0085] As described above, according to the second embodiment of the present invention, the inspection unit 100 a mounted on the XY movable portion 140 includes the reference mark imaging unit 105 for imaging the plurality of reference marks 102 attached to the nozzle head 10 .

[0086] The reference mark imaging unit 105 and the position calculating unit 110 calculate the coordinates of the reference mark 102 in the coordinate system of the XY movable unit 140 and the angular displacement, thereby calculating the positions (coordinates) of all the nozzles 101 of the nozzle head 10 in the coordinate system of the XY movable unit 140 .

[0087] Thus, by correcting the positions of all nozzles 101 and driving the XY movable unit 140 based on the corrected coordinates by the drive control unit 130 , flying droplets ejected from any plurality of nozzles 101 can be illuminated by the illumination unit 52 and photographed by the droplet imaging unit 50 .

[0088] Furthermore, when there are a plurality of nozzle heads, the detection unit may detect a plurality of reference marks of the plurality of nozzle heads, and the position correction unit may control the movement unit to move to a predetermined position for each nozzle head based on the detection result of the detection unit.

[0089] <Example 3>

[0090] Next, based on Figure 7 Embodiment 3 of the present invention will be described. In addition, descriptions of the same operations as those of Embodiments 1 and 2 will be omitted.

[0091] Figure 7 1 is a functional block diagram showing a configuration example of a liquid droplet discharge device according to Embodiment 3 of the present invention. The difference from Embodiment 2 lies in the position correction unit 120a and the angle adjustment unit 90a, and the other parts are the same as Embodiment 2, so the description thereof is omitted.

[0092] In Example 3, the angle deviation θhd calculated by the position correction unit 120a based on the equation 3 of Example 2 is sent to the angle adjustment unit 90a, and the angle adjustment is performed so that θhd becomes zero. In addition, the angle adjustment is performed so that the angle deviation θz of the droplet imaging unit 50 from the adjustment amount calculation unit 80 also becomes zero.

[0093] Therefore, the angle adjustment unit 90a can make the angle deviation θhd of the nozzle head 10 and the angle deviation θz of the droplet imaging unit 50 both zero. Therefore, the focus plane of the droplet imaging unit 50 is parallel to each nozzle array of the nozzle head 10, and the droplets from all nozzles within the imaging range can be in focus.

[0094] As a result, a captured image with clear outlines and without defocusing can be obtained for all the droplets within the imaging range, and the image processing unit 56 can calculate accurate velocity, volume, and ejection angle of the droplets.

[0095] in addition, Figure 8 1 is a diagram showing a structural example of an XY movable portion and a nozzle head module in Embodiment 3 of the present invention. Figure 8 As shown, sometimes the installation positions of the plurality of nozzle heads 10 installed in the nozzle head module 200 are offset. In such a case, the reference mark imaging unit 105 is used to photograph the reference mark provided on each nozzle head 10, and the position correction unit 120a is used to calculate the angle offset θhd relative to the XY movable unit 140 for each nozzle head 10.

[0096] Then, the angle adjustment unit 90a performs angle adjustment of the droplet imaging unit 50 for each nozzle head so that θhd becomes 0. That is, the angle is adjusted by the adjustment unit based on the detection result of the detection unit that detects the reference mark.

[0097] In addition, a plurality of nozzle heads are provided, and the angle deviation of each nozzle head is calculated based on the plurality of reference marks of the plurality of nozzle heads, and the angle is adjusted for each nozzle head by the adjustment unit. Thus, even if each nozzle head has an angle deviation θhd, the position of the inspection unit 100a can be accurately controlled.

[0098] As described above, according to the third embodiment of the present invention, the angle offset of the nozzle head and the angle offset of the droplet imaging unit are both adjusted to zero, thereby adjusting the offset between the imaging plane of the flying droplets ejected from the plurality of nozzles and the imaging plane focused on by the depth of field of the imaging unit. Therefore, the focus in the imaging plane can be optimized, thereby simultaneously capturing the flying droplets of the plurality of nozzles and improving the measurement accuracy of the droplet characteristics.

[0099] <Example 4>

[0100] Next, based on Fig. 9 Embodiment 4 of the present invention will be described. Note that description of the same operations as those of Embodiments 1 and 2 will be omitted.

[0101] Fig. 9 This is a functional block diagram showing a configuration example of a liquid droplet discharge device according to Embodiment 4. The difference from Embodiment 2 is the liquid droplet position confirmation unit 150 and the timing adjustment unit 30a, and the other parts are the same as those in Embodiment 2, so the description thereof is omitted.

[0102] The droplet position confirmation unit 150 receives the captured image data of the droplet from the droplet imaging unit 50 and confirms the position of the droplet.

[0103] Fig.10 (A) to (C) are diagrams showing examples of the nozzle head and the ejected droplets in Example 4 of the present invention. Fig.10 In (A) to (C), the vertical axis is Zdrv and the horizontal axis is Xdrv, and the nozzle head 10 attached to the nozzle head module 200 is viewed from the horizontal direction, and the liquid droplets 103 are ejected from the nozzle 101.

[0104] exist Fig.10 In (A), the position from the nozzle 101 to the droplet 103 on the Zdrv axis is Z0. When measuring flying droplets, it is necessary to photograph the droplets ejected from the nozzle 101 at a predetermined position. Generally, the closer to the nozzle 101, the faster the droplet speed, and the droplet speed becomes slower as it moves away from the nozzle 101. The position Z0 for photographing the droplet needs to be less than a few mm, preferably less than 1 mm.

[0105] Relative to the specified position Z0 where the droplet is photographed, Fig.10The droplet 103 shown in (B) was imaged at the position Z1. In the droplet position confirmation unit 150, the position of the imaged droplet is measured with reference to the position of the nozzle 101. In this example, Z1 is calculated as the droplet imaging position. In this case, since the imaging was performed before the specified position Z0, it is an inappropriate imaging position, resulting in an error in the droplet velocity calculated by the image processing unit 56 of the flying droplet measurement unit 60.

[0106] Therefore, the timing adjustment unit 30a receives the droplet imaging position Z1 from the droplet position confirmation unit 150 and compares it with the specified position Z0 for imaging the droplet. In this case, since Z1 < Z0, the time interval between the timing of droplet ejection by the droplet driving unit 20 and the imaging timing of the droplet imaging unit 50 is extended.

[0107] Specifically, the timing of droplet ejection by the droplet driving unit 20 can be advanced, or the imaging timing of the droplet imaging unit 50 can be delayed. By this timing adjustment, it is possible to image the droplet ejected from the nozzle 101 at the specified position Z0 as shown in (A) of Fig.10

[0108] In addition, Fig.10 In the case of the droplet 103 shown in (C), it was imaged at the position Z2 with respect to the specified position Z0 for imaging the droplet. In this case, since the imaging was performed after passing the specified position Z0, it is an inappropriate imaging position, resulting in an error in the droplet velocity calculated by the image processing unit 56 of the flying droplet measurement unit 60.

[0109] Therefore, the timing adjustment unit 30a receives the droplet imaging position Z2 from the droplet position confirmation unit 150 and compares it with the specified position Z0 for imaging the droplet. In this case, since Z2 > Z0, the time interval between the timing of droplet ejection by the droplet driving unit 20 and the imaging timing of the droplet imaging unit 50 is shortened.

[0110] Specifically, the timing of droplet ejection by the droplet driving unit 20 can be delayed, or the imaging timing of the droplet imaging unit 50 can be advanced. By this timing adjustment, it is possible to image the droplet ejected from the nozzle 101 at the specified position Z0 as shown in (A) of Fig.10

[0111] As described above, according to the fourth embodiment of the present invention, the imaging position of the droplet ejected from the nozzle head is confirmed by the droplet position confirmation unit, and the time interval between the droplet ejection timing and the imaging timing is adjusted by the timing adjustment unit 30a.

[0112] Here, the timing adjustment unit 30a functions as a timing adjustment unit that adjusts the interval between the driving timing of the driving unit and the imaging timing of the imaging unit. By adjusting the timing, the droplets ejected from the nozzle head can be photographed at a predetermined position Z0, thereby improving the measurement accuracy of the droplet characteristics.

[0113] <Example 5>

[0114] Next, based on Fig.11 Embodiment 5 of the present invention will be described. In addition, the description of the same operations as those of Embodiments 1 and 2 will be omitted.

[0115] Fig.11 1 is a functional block diagram showing a configuration example of a liquid droplet discharge device according to Embodiment 5. The difference from Embodiment 2 lies in the distance measuring unit 160 and the control unit 40a, and the other parts are the same as those of Embodiment 2, so the description thereof is omitted.

[0116] The distance measuring unit 160 is a distance measuring sensor installed near the droplet imaging unit 50 of the inspection unit 100a, and measures the height in the Z-axis direction of the nozzle head 10 or the nozzle 101. Here, the distance measuring unit 160 functions as a distance measuring unit for measuring the height of the nozzle head.

[0117] When measuring the flying droplets as described in Example 4, it is necessary to capture an image of the droplets ejected from the nozzle 101 at a predetermined position Z0.

[0118] On the other hand, Figure 2 As shown in (A), when a plurality of nozzle heads 10 are mounted on the nozzle head module 200, there may be some unevenness depending on the position of the nozzle head 10. In addition, the relative height of the nozzle head 10 in the Z-axis direction relative to the droplet imaging unit 50 mounted on the XY movable unit 140 may change depending on the position of the XY movable unit 140.

[0119] As described above, the relative height of the imaging surface of the droplet imaging unit 50 and the nozzle head 10 in the Z-axis direction may not be constant depending on the position of the nozzle head 10 or the XY movable unit 140. In this case, in the present embodiment, the height of the nozzle head 10 in the Z-axis direction of the nozzle head module 200 is measured in advance by the distance measuring unit 160.

[0120] The data of the height in the Z-axis direction of the nozzle head 10 is sent to the control unit 40a. Based on the received height data in the Z-axis direction, the control unit 40a adjusts the interval between the driving timing of the droplet driving unit 20 and the imaging timing of the droplet imaging unit 50 so as to be able to capture the droplets ejected from the nozzle 101 at a predetermined position Z0.

[0121] For example, when the height of the nozzle head 10 in the Z-axis direction is lower than the reference height, the time interval between the timing of droplet discharge by the droplet drive unit 20 and the timing of imaging by the droplet imaging unit 50 is lengthened.

[0122] Specifically, the timing of the droplet ejection by the droplet drive unit 20 can be advanced, and the timing of the image pickup unit 50 can be delayed. Fig.10 As shown in (A) of FIG. 8 , a liquid droplet ejected from the nozzle 101 is photographed at a predetermined position Z0.

[0123] When the height of the nozzle head 10 in the Z-axis direction is higher than the reference height, the time interval between the timing of droplet discharge by the droplet drive unit 20 and the timing of imaging by the droplet imaging unit 50 is shortened.

[0124] Specifically, the timing of the droplet ejection by the droplet drive unit 20 can be delayed, and the timing of the image pickup unit 50 can be advanced. Fig.10 As shown in (A) of FIG. 8 , a liquid droplet ejected from the nozzle 101 is photographed at a predetermined position Z0.

[0125] As described above, according to Embodiment 5 of the present invention, the height of each nozzle head in the Z-axis direction is measured by the distance measuring unit 160 as the distance measuring unit. Furthermore, the time interval between the timing of droplet ejection and the timing of imaging is adjusted based on the height of the nozzle head in the Z-axis direction measured by the distance measuring unit, so that the droplets ejected from the nozzle can be photographed at a predetermined position.

[0126] That is, the timing adjustment unit 30 adjusts the interval between the driving timing of the driving unit and the imaging timing of the imaging unit according to the height of the nozzle head. By adjusting the timing, the droplets ejected from the nozzle head can be photographed at a predetermined position Z0, thereby improving the measurement accuracy of the droplet characteristics.

[0127] In addition, the droplet ejection device in the above embodiment can be used, for example, to apply droplets on the surface of a display, or in a semiconductor manufacturing device that performs imprinting by a mold, it can also be used when applying an imprint material to a substrate, etc., and is not limited to the object of application.

[0128] Furthermore, the adjustment operation in the droplet ejection device according to the above-described embodiment is performed when the droplet ejection device is manufactured, but may also be performed periodically, during maintenance, or as a calibration operation before formal operation.

[0129] <Implementation Method of Manufacturing Article>

[0130] The article manufacturing method according to the embodiment of the present invention is suitable for manufacturing articles such as display panels such as organic EL, micro devices such as semiconductor devices, and elements having a microstructure.

[0131] The article manufacturing method of this embodiment includes: a supply step of supplying liquid onto a substrate using the above-mentioned liquid ejecting device; a processing step of processing the substrate supplied with liquid through the supply step; and a step of manufacturing an article from the substrate processed through the processing step.

[0132] Furthermore, the article manufacturing method includes other known steps (baking, cooling, cleaning, oxidation, film formation, evaporation, doping, planarization, etching, resist stripping, cutting, bonding, packaging, etc.). The article manufacturing method of this embodiment is advantageous over the conventional methods in at least one of the performance / quality / productivity / production cost of the article.

[0133] The present invention has been described in detail above based on the preferred embodiments of the present invention. However, the present invention is not limited to the above embodiments, and various modifications can be made based on the gist of the present invention. These modifications are not excluded from the scope of the present invention.

[0134] In addition, in order to realize part or all of the control in the above-mentioned embodiments, a computer program realizing the functions of the above-mentioned embodiments may be provided to the droplet ejection device, etc., via a network or various storage media. Furthermore, it may be set that the computer (or CPU, MPU, etc.) in the droplet ejection device, etc. reads and executes the program. In this case, the program and the storage medium storing the program constitute the present invention.

[0135] (CROSS-REFERENCE TO RELATED APPLICATIONS)

[0136] This application claims the benefit of Japanese Patent Application No. 2023-125745, previously filed on August 1, 2023. The entire contents of the above-mentioned Japanese Patent Application are hereby incorporated by reference in this specification.

Claims

1. A droplet ejection device, characterized in that: have: a nozzle head having a plurality of nozzles; a driving unit configured to drive the plurality of nozzles to cause the plurality of nozzles to eject a plurality of liquid droplets; A camera unit for photographing the plurality of droplets; an image confirmation unit configured to confirm a focus state of the plurality of droplets captured by the imaging unit; as well as An adjustment unit adjusts an angle of at least a portion of the imaging unit relative to the plurality of droplets based on the focus state confirmed by the image confirmation unit.

2. The liquid droplet ejection device according to claim 1, characterized in that: The adjustment unit adjusts an angle of at least one of a lens and an imaging element of the imaging unit.

3. The liquid droplet ejection device according to claim 1, characterized in that: A moving unit is provided, the moving unit moves the nozzle head and the imaging unit relative to each other, The moving unit includes a first driving axis in a predetermined direction and a second driving axis in a direction perpendicular to the first driving axis, and the first driving axis and the second driving axis are axes parallel to the arrangement surface of the plurality of nozzles.

4. The liquid droplet ejection device according to claim 3, characterized in that: The adjustment unit adjusts the angle based on a result of measuring a focal position of each of a reference nozzle and a measurement nozzle that is a predetermined distance away from the reference nozzle.

5. The liquid droplet ejection device according to claim 3, characterized in that: The nozzle head has a plurality of reference marks, The liquid droplet ejection device includes a position correction unit that moves the moving unit to a predetermined position based on a detection result of a detection unit that detects the reference mark.

6. The liquid droplet ejection device according to claim 5, characterized in that: The detection unit detects two or more of the plurality of reference marks, and the position correction unit calculates relative positional deviations between the plurality of nozzles and the moving unit based on a detection result of the detection unit, and moves the moving unit to a predetermined position based on the calculation result.

7. The droplet ejection device according to claim 5, characterized in that: having a plurality of the nozzle heads, The detection unit detects the plurality of reference marks of the plurality of nozzle heads, and the position correction unit moves the moving unit to a predetermined position for each nozzle head based on the detection result of the detection unit.

8. The liquid droplet ejection device according to claim 5, characterized in that: The angle is adjusted by the adjustment unit based on the detection result of the detection unit.

9. The liquid droplet ejection device according to claim 5, characterized in that: having a plurality of the nozzle heads, The liquid droplet ejecting device calculates an angle deviation of each nozzle head based on the plurality of reference marks of the plurality of nozzle heads, and adjusts the angle for each nozzle head by the adjustment unit.

10. The liquid droplet ejection device according to claim 1, characterized in that: A timing adjustment unit is provided to adjust the interval between the driving timing of the driving unit and the imaging timing of the imaging unit.

11. The liquid droplet ejection device according to claim 10, characterized in that: A distance measuring unit is provided, wherein the distance measuring unit measures the height of the nozzle head. The timing adjustment unit adjusts an interval between the driving timing of the driving unit and the imaging timing of the imaging unit according to the height of the nozzle head measured by the distance measurement unit.

12. The liquid droplet ejection device according to claim 1, characterized in that: An image processing unit is provided for calculating at least one of the speed, volume, and ejection angle of the droplets ejected from the plurality of nozzles based on the image from the imaging unit.

13. An adjustment method for a liquid droplet ejection device, the liquid droplet ejection device comprising: a nozzle head having a plurality of nozzles; a driving unit driving the plurality of nozzles to cause the plurality of nozzles to eject a plurality of liquid droplets; and a camera unit for photographing the plurality of droplets, wherein the adjustment method is characterized in that: The method includes an adjustment step of adjusting an angle of at least a portion of the imaging unit relative to the plurality of liquid droplets based on a focus state of the plurality of liquid droplets captured by the imaging unit.

14. A method for manufacturing an article, characterized in that: include: a supplying step of supplying liquid onto the substrate using the liquid droplet ejecting device according to any one of claims 1 to 12; as well as a processing step of processing the substrate to which the liquid has been supplied in the supplying step, In the method for manufacturing the article, the article is manufactured from the substrate processed in the processing step.

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