Single-particle burnt area online positioning system, irradiation terminal equipment and use method

Abstract

The invention relates to the technical field of irradiation monitoring, and particularly provides an online positioning system for a single-particle burnt area, an irradiation terminal device and a using method, the positioning system comprises a beam detection unit for monitoring the intensity of a particle beam, a vacuum control unit and a microscopic rapid positioning unit, and a particle accelerator is used for generating particles to irradiate a sample to be detected; the method comprises the following steps: capturing radiation excited on the surface of a to-be-detected sample after the to-be-detected sample is irradiated by particles through a microscopic rapid positioning unit in an irradiation process, carrying out wave band separation on the radiation, carrying out imaging on multi-wave band radiation, calculating temperature distribution on the surface of the to-be-detected sample according to imaging data, and positioning a single-particle burning area according to the temperature distribution. And in-situ online analysis and monitoring of the power device in the irradiation process are realized. The positioning system is integrated in the irradiation terminal, the problem that a traditional irradiation terminal lacks the function of carrying out in-situ online monitoring and analysis on a sample to be tested is solved, and the system has a vacuum irradiation mode and an atmosphere irradiation and single particle burning positioning mode at the same time.

Description

Technical Field

[0001] The present invention relates to the field of radiation monitoring technology, and specifically provides a single particle burnout area online positioning system, radiation terminal equipment and a use method. Background Art

[0002] With the deepening of research and development of practice in the field of deep space exploration, the space environment faced by spacecraft is becoming more and more complex. The deep space exploration environment is a strong radiation environment with high-energy particles. Electronic components are hit by high-energy particles in the radiation environment and then have many radiation effects, which will significantly change their electrical properties and radiation resistance characteristics, causing the spacecraft to fail to work properly or even fail, seriously threatening the safe and reliable operation of the spacecraft. At present, the stable operation of the power supply system on the spacecraft is directly related to its long-term stable operation. Power devices are one of the core components of the power supply system. Because they work in a high voltage state, and when such devices are hit by high-energy particles in the space environment, the devices will be burned by single particles. The unrestrained increase in the number of high-energy particle collision devices will cause the power devices to burn, which will directly lead to the destruction of the spacecraft power supply system.

[0003] The design and modification of traditional irradiation terminals are mainly aimed at simulating space environments, including providing ions of different energies and vacuum systems of different ambient temperatures. There is a lack of irradiation terminals for in-situ online monitoring and analysis of test samples. In-situ online monitoring and analysis of components during irradiation is of great value both in scientific research and in engineering construction and development. When power devices are irradiated with ions, the traditional solution is to apply different bias voltages to the power devices, observe the degree of single-particle burnout of the power devices during irradiation, and stop the test when the leakage current generated by the single-particle burnout reaches the preset value. The power device is then located and analyzed offline, which leads to many problems: First, the location of the device damaged by particles cannot be known in time during the irradiation test, and it is necessary to search and locate it offline using a microscope. Secondly, the damage caused by the single-particle burnout area will produce different mechanistic changes with the continuous accumulation of particles. Since the single-particle burnout area cannot be known in time, it is very difficult to understand the irradiation damage mechanism of the power device. Finally, the failure to locate the single-particle burnout area in time during the irradiation process will slow down the reliability research and analysis of the power device. Therefore, if the in-situ online single-particle burnout area positioning of power devices is not solved, the development of engineering reliability and scientific mechanism research of components will be very slow.

[0004] Therefore, it is necessary to establish a set of irradiation terminal equipment with an online positioning system for the single-particle burnout area of ​​power devices to simulate the deep space exploration environment of spacecraft, fundamentally solve the working conditions of devices and circuits in a strong radiation environment, and carry out fundamental reinforcement and adjustment, so as to solve the problem of normal operation of devices from the source. Summary of the invention

[0005] In order to solve the above problems, the present invention provides a single-particle burnout area online positioning system, an irradiation terminal device and a method of use, and designs a system that can perform in-situ online analysis and monitoring of the single-particle burnout area of ​​a power device, fundamentally solving the drawbacks of traditional offline positioning analysis, which is of great significance for the radiation effect research and life assessment of electronic devices and materials.

[0006] To achieve the above object, the technical solution created by the present invention is implemented as follows: In a first aspect, the present invention provides a single particle burnout area online positioning system, comprising: a first beam detection unit for monitoring the intensity of a particle beam irradiating a sample to be tested; A first vacuum control unit for monitoring and regulating the vacuum degree of the system; And, a microscopic rapid positioning unit, which includes a microscopic optical lens, a multi-frame spectroscopic unit and a multi-spectral thermal imaging unit, the microscopic optical lens is used to capture the radiation excited by the sample to be tested after particles irradiate the sample to be tested in an atmospheric environment; the multi-frame spectroscopic unit is used to separate the radiation into bands; the multi-spectral thermal imaging unit is used to image the multi-band radiation after the band separation, calculate the temperature distribution on the surface of the sample to be tested based on the imaging data, and locate the single particle burning area based on the temperature distribution.

[0007] Preferably, a particle accelerator is used to provide particles for irradiating the sample to be tested, and the particles are input from the particle accelerator to the single particle burnout region online positioning system through a vacuum pipe.

[0008] Preferably, the microscope optical lens comprises a multi-zoom lens group and a single convex lens arranged in parallel.

[0009] Preferably, the multi-band light splitting unit includes a narrowband filter and a light splitting bar, the light splitting bar is provided with a plurality of through holes, and a plurality of narrowband filters including different wavelength bands are installed on the through holes.

[0010] Preferably, the multispectral thermal imaging unit includes a CCD camera, a data acquisition module, a temperature calculation module and a positioning module, wherein the CCD camera is used to detect multi-band radiation after band separation to obtain a multispectral image; the data acquisition module collects multispectral image data from the CCD camera and transmits it to the temperature calculation module; the temperature calculation module calculates the temperature distribution on the surface of the sample to be tested based on the multispectral image data through multispectral radiation temperature measurement technology; the positioning module performs online real-time positioning of the single-particle burnt area of ​​the sample to be tested according to the temperature distribution.

[0011] In a second aspect, the irradiation terminal device provided by the present invention comprises: a particle accelerator, a vacuum main chamber, an atmospheric sample stage, and an online positioning system for a single particle burnout area; The particle accelerator is connected to the vacuum main chamber through a first vacuum pipe; the vacuum main chamber is provided with a second beam detection unit for monitoring the intensity of the particle beam input into the vacuum main chamber, a second vacuum control unit for monitoring and regulating the vacuum degree of the vacuum main chamber, and a vacuum sample stage; The vacuum main chamber is connected to the single particle burnout area online positioning system through a second vacuum pipeline, and a first beam plug-in valve for controlling the on-off of the second vacuum pipeline is arranged on the second vacuum pipeline.

[0012] Preferably, the vacuum sub-chamber is connected to the vacuum main chamber through a third vacuum pipe, and a second beam line plug-in valve for controlling the on and off of the third vacuum pipe is provided on the third vacuum pipe; a third vacuum control unit and a sample transfer table for monitoring and regulating the vacuum degree of the vacuum sub-chamber are provided in the vacuum sub-chamber.

[0013] Preferably, the first vacuum control unit, the second vacuum control unit and the third vacuum control unit each include a vacuum pump and a vacuum gauge.

[0014] Preferably, the bottom of the vacuum sample stage and the sample transfer stage are both provided with slide rails, and the vacuum sample stage and the sample transfer stage can be driven to move between the vacuum main chamber and the vacuum sub-chamber via the slide rails.

[0015] In a third aspect, the present invention provides a method for using an irradiation terminal device, comprising: Vacuum irradiation mode: placing the sample to be tested on the vacuum sample stage in the vacuum main chamber, closing the first beam line plug valve and the second beam line plug valve; evacuating the vacuum main chamber through the second vacuum control unit; starting the particle accelerator to vacuum irradiate the sample to be tested on the vacuum sample stage; Atmospheric irradiation and single particle burnout positioning mode: place the sample to be tested on the atmospheric sample stage, open the first beam line plug-in valve and close the second beam line plug-in valve; evacuate the single particle burnout area online positioning system through the first vacuum control unit; start the particle accelerator to perform atmospheric irradiation on the sample to be tested on the atmospheric sample stage, and analyze the single particle burnout area through the single particle burnout area online positioning system.

[0016] Compared with the prior art, the invention can achieve the following beneficial effects: The present invention proposes an irradiation terminal test device which can not only monitor the irradiation of power devices, but also analyze, monitor and locate the single-particle burnout area in situ online. The single-particle burnout data of the power device can be acquired in real time without interrupting the test process through the online positioning system, thereby avoiding the damage caused by the single-particle burnout area causing different mechanistic changes with the continuous accumulation of particles, improving the test efficiency and reliability, solving the problem that the traditional irradiation terminal only simulates the space environment and the power device can only be located and analyzed offline, and filling the gap in the field of in-situ online analysis and monitoring of the irradiation terminal.

[0017] The present invention expands the means of monitoring single-particle radiation of power devices. Through this system, not only can the damage location be searched online, but also the radiation damage mechanism of power devices can be further understood. By monitoring the device for a long time in a simulated radiation environment, the service life of the device can be more accurately evaluated. By finding the damage mechanism through damage analysis, improvements can be made in production materials, device structure, production process, etc., providing data support for the reliability design of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings: Figure 1 is an architecture diagram of a single particle burnout area online positioning system provided according to an embodiment of the present invention; Figure 2 It is a composition architecture diagram of an irradiation terminal device provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the invention clearer, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and do not constitute a limitation to the invention. Similar components in different embodiments use associated similar component numbers. In the following embodiments, many detailed descriptions are to enable the invention to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other components, materials, and methods. In some cases, some operations related to the invention are not shown or described in the specification, in order to avoid the core part of the invention being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0020] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other to form various implementation methods. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a necessary sequence, unless otherwise specified that a certain sequence must be followed.

[0021] In the description of the invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, the meaning of "multiple" is two or more.

[0022] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0023] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0024] See also Figure 1 In one embodiment of the present invention, there is provided a single particle burnout area online positioning system applied to an irradiation terminal, which can perform in-situ online analysis and monitoring of power devices, and mainly includes: a first beam detection unit, a first vacuum control unit and a microscopic fast positioning unit. Specifically, since the positioning system of the embodiment of the present invention is specifically used in the atmospheric irradiation simulation process, the positioning system usually needs to be connected to a particle accelerator through a vacuum pipeline to provide particles for irradiating the sample to be tested through the particle accelerator. The particles are input into the positioning system through the vacuum pipeline, and then output through a transparent window opened on the positioning system to irradiate the surface of the sample to be tested in the atmospheric environment, so as to simulate the irradiation of the sample to be tested in the atmospheric environment. In this process, the beam intensity of the particles needs to be controlled to simulate the real atmospheric irradiation environment. Therefore, in the embodiment of the present invention, a first beam detection unit is designed inside the positioning system, and the beam intensity of the particles input into the system is monitored by the first beam detection unit. The main functional component of the first beam detection unit is a scintillator detector, which is an instrument that uses the flash generated by ionizing radiation in certain substances for detection, and can count the particles input into the system. The scintillator detector is usually fixed with a movable support frame, which can realize horizontal and vertical movement. In the actual design process, the movable support frame needs to be able to drive the scintillator detector to move 10 cm forward and backward and 10 cm left and right.

[0025] In order to ensure that particles can be smoothly transferred from the particle accelerator to the positioning system, not only a vacuum pipeline is required between the particle accelerator and the positioning system, but also the interior of the positioning system needs to have an extremely high vacuum degree. Under normal circumstances, the vacuum degree of the positioning system needs to reach at least the E-4 level. Therefore, the embodiment of the present invention designs a first vacuum control unit for monitoring and regulating the vacuum degree of the system inside the positioning system. The first vacuum control unit needs to be able to achieve vacuuming of the system positioning and detect the vacuum degree inside the system in real time to avoid affecting the normal operation of the system due to vacuum problems. Specifically, the first vacuum control unit includes: a vacuum gauge for real-time monitoring of the vacuum degree of the system, and a mechanical pump and a molecular pump for vacuuming and maintaining the vacuum state of the system, wherein the mechanical pump is a screw pump.

[0026] Based on the multi-spectral radiation temperature measurement technology, the embodiment of the present invention proposes a microscopic rapid positioning unit for in-situ online single-particle burnout analysis of the sample to be tested. The microscopic rapid positioning unit mainly includes a microscopic optical lens, a multi-frame spectroscopic unit, a multi-spectral thermal imaging unit and an adjustable lens barrel for fixing the above optical elements, wherein the microscopic optical lens is mainly used to capture the radiation excited by the surface of the sample to be tested after irradiation. It can be understood that the particles generated by the particle accelerator are transmitted to the positioning system through a vacuum pipe, and then irradiated on the surface of the sample to be tested through the system window. When these high-energy particles collide with the sample to be tested, they will release energy in the form of radiation. This radiation has multiple bands and carries important information such as the structure and properties of the surface of the sample to be tested.

[0027] The microscope optical lens mainly includes a multi-zoom lens group and a single convex lens. The multi-zoom lens group is installed at the front end of the adjustable lens barrel. The single convex lens is arranged in the adjustable lens barrel, located at the rear side of the multi-zoom lens group, and parallel to the multi-zoom lens group. The multi-zoom lens group is used to adjust the magnification to adapt to observation areas of different sizes and levels of detail. The single convex lens is used to assist the multi-zoom lens group in focusing to ensure that a clear image can be obtained at different magnifications. The maximum positioning range of the single-particle burnout area online positioning system provided in the embodiment of the present invention can reach 1cm 2 , which can achieve single-particle burnt area positioning with a minimum spatial resolution of 5μm.

[0028] The multi-frame spectroscopic unit is arranged on the rear optical path of the microscope optical lens. The multi-frame spectroscopic unit mainly includes a narrowband filter, a spectroscopic bar and a convex lens group. The spectroscopic bar and the convex lens group are sequentially installed in the adjustable lens barrel. The spectroscopic bar is installed directly behind the focus of the multi-fold zoom lens group, and is used to further split the light beam focused by the lens. A plurality of equally spaced through holes are provided on the spectroscopic bar, and narrowband filters of the required wavelength are installed on these through holes. The plurality of narrowband filters have different working bands. The narrowband filters allow light of a specific wavelength range to pass through, while effectively blocking or reflecting light of other wavelengths. The spectroscopic bar and the narrowband filter can separate light of a specific wavelength from the radiation excited by the surface of the sample to be tested, and provide accurate spectral information for subsequent image capture and analysis. The convex lens group is arranged directly behind the spectroscopic bar to further adjust the focus of the multi-band radiation, so as to facilitate the subsequent detection of multi-spectral images.

[0029] The multi-spectral thermal imaging unit is arranged at the rear end of the adjustable lens barrel. Through the adjustable lens barrel, the microscopic optical lens and the multi-frame spectroscopic unit, the multi-spectral thermal imaging unit can capture clear multi-spectral images. Specifically, the multi-spectral thermal imaging unit includes a high-speed CCD camera, a height data acquisition module, a temperature calculation module and a positioning module for a power device (i.e., a sample to be tested). The spectral band in which the CCD camera can work includes the inherent bands of all narrow-band filters in the multi-frame spectroscopic unit, so that the CCD camera can effectively detect the radiation signal of a specific wavelength generated by the sample to be tested due to particle irradiation, and the detector image plane of the CCD camera obtains a multi-spectral image. Then, the multi-spectral image data is collected from the CCD camera in real time through the data acquisition module, and the data is transmitted to the temperature calculation module. The temperature calculation module is connected with the positioning module. Both the temperature calculation module and the positioning module are mounted on a computer. The temperature calculation module analyzes the multi-spectral image data based on the multi-spectral radiation temperature measurement technology, and calculates the radiation temperature reflected by it according to the radiation information of different bands. The temperature corresponds to the temperature distribution on the surface of the sample to be tested. The positioning module will perform online real-time positioning of the single-particle burnout area of ​​the sample to be tested according to these temperature data, identify the area with abnormal temperature, and thus accurately locate the single-particle burnout area. Through real-time monitoring and analysis, the positioning system can respond quickly when single-particle burnout occurs on the surface of the sample to be tested, and provide instant data support for the performance evaluation and fault analysis of the power device. The single-particle burnout area online positioning system provided by the embodiment of the present invention can obtain the single-particle burnout data of the power device in real time without interrupting the test process, avoiding the damage caused by the single-particle burnout area to produce different mechanistic changes with the continuous accumulation of particles, thereby improving the test efficiency and reliability.

[0030] Based on the above-mentioned single particle burnout area online positioning system, in one embodiment of the present invention, an irradiation terminal device is also proposed to make up for the defect that the traditional irradiation terminal only simulates the space environment and needs to be analyzed through offline positioning. For details, please refer to Figure 2 The irradiation terminal device includes: a particle accelerator, a vacuum main chamber, an atmospheric sample stage and a single particle burnout area online positioning system, wherein the particle accelerator is used to provide particles for simulated irradiation, the particle accelerator is connected to the vacuum main chamber through a first vacuum pipe, the vacuum main chamber is a simulated space for vacuum irradiation, and a second beam detection unit, a second vacuum control unit and a vacuum sample stage are arranged in the vacuum main chamber, wherein the main functional component of the second beam detection unit is a scintillator detector, which is used to count the number of particles input into the vacuum main chamber by the particle accelerator, the second beam detection unit is located behind the vacuum sample stage, and the second beam detection unit is supported by a movable support frame, and the support frame can drive the second beam detection unit to move in both horizontal and vertical directions.

[0031] Furthermore, the inner wall of the vacuum main chamber is provided with a vacuum pipe interface, a signal and power data transmission interface and an exhaust interface connected to the particle accelerator. The particles generated by the particle accelerator are transmitted to the vacuum main chamber through the vacuum pipe, and the sample to be tested on the vacuum sample table located in the center of the chamber is irradiated through the vacuum pipe interface. The signal and power data transmission interface is used to output signals such as beam intensity, vacuum degree, beam intensity technology, etc., input and output control signals, and power the relevant components in the vacuum main chamber. There are 12 data transmission interfaces in total, which constitute the unified body of the power-on equipment in the vacuum main chamber. Each data transmission interface is remotely controlled through software.

[0032] The second vacuum control unit is used to monitor and regulate the vacuum degree of the vacuum main chamber. It mainly includes a screw pump, a spiral pump, two molecular pumps and a vacuum gauge. The vacuum gauge is used to monitor the vacuum degree inside the vacuum main chamber in real time. The screw pump, spiral pump and molecular pump are connected to the exhaust interface to evacuate and maintain the vacuum state of the vacuum main chamber. When working, the vacuum degree of the vacuum main chamber can reach the E-5 level.

[0033] The vacuum sample stage is used to carry the sample to be tested. It is located in the center of the vacuum main chamber. The vacuum sample stage is supported by a support frame installed on a slide rail. The slide rail can drive the support frame and the vacuum sample stage to move in both horizontal and vertical directions. In addition, the vacuum sample stage is also equipped with a controller, which includes interface circuits for various components. One end of the component interface circuit is connected to the flange on the inner wall of the vacuum main chamber through a DB9 interface, and the outer end of the flange is connected to an external control computer. The other end of the component interface circuit is connected to the control and communication circuit of the component to achieve control and adjustment of each component.

[0034] The vacuum main chamber is connected to the single particle burnout area online positioning system in the above embodiment through the second vacuum pipeline, and a first beam line plug valve for controlling the opening and closing of the second vacuum pipeline is provided on the second vacuum pipeline. The opening and closing of the first beam line plug valve is controlled by the controller inside the single particle burnout area online positioning system to realize the connection and isolation between the single particle burnout area online positioning system and the vacuum main chamber. When the first beam line plug valve is opened, the sample to be tested can be placed on the atmospheric sample stage, and the particles generated by the particle accelerator enter the single particle burnout area online positioning system through the first vacuum pipeline, the vacuum main chamber, and the second vacuum pipeline in turn, and then irradiate the surface of the sample to be tested on the atmospheric sample stage through the window of the single particle burnout area online positioning system, so as to realize the atmospheric irradiation of the sample to be tested and the in-situ online single particle burnout positioning. When the first beam line plug valve is closed, the sample to be tested can be placed on the vacuum sample stage in the vacuum main chamber, and the particles generated by the particle accelerator enter the vacuum main chamber through the first vacuum pipeline and irradiate the surface of the sample to be tested on the vacuum sample stage, so as to realize the vacuum irradiation of the sample to be tested.

[0035] As a preferred embodiment, the atmospheric sample stage includes a device supporting structure for supporting the sample to be tested and a laser calibration position positioning device for spatially positioning the device supporting structure; the device supporting structure is located outside the single particle burnout area online positioning system, and the device supporting structure is supported by a support frame installed on a slide rail, and the support frame can drive the device supporting structure to achieve horizontal and vertical movement and horizontal angle rotation; the laser calibration position positioning device is installed outside the shell of the single particle burnout area online positioning system, and can emit a cross-shaped infrared laser to guide and adjust the spatial position of the device supporting structure, so that particles emitted from the single particle burnout area online positioning system can be accurately and comprehensively irradiated on the surface of the sample to be tested.

[0036] As a preferred embodiment, a vacuum sub-chamber is also provided, which is mainly used for preparation work for vacuum irradiation. The sample to be tested can be pre-treated in the vacuum sub-chamber before entering the vacuum main chamber. The vacuum sub-chamber is connected to the vacuum main chamber through a third vacuum pipe, and a second beam line plug-in valve for controlling the on-off of the third vacuum pipe is provided on the third vacuum pipe. During vacuum irradiation, the vacuum degree in the vacuum main chamber is required to reach the E-5 level. Therefore, during the vacuum irradiation process, the second beam line plug-in valve needs to be closed to cut off the connection between the vacuum main chamber and the vacuum sub-chamber to avoid affecting the vacuum degree in the vacuum main chamber and causing the failure of the vacuum irradiation simulation test. The second beam line plug-in valve will be opened to connect the vacuum main chamber with the vacuum sub-chamber only before starting vacuum irradiation, when the sample to be tested needs to be sent into the vacuum main chamber, or when the vacuum irradiation is completed and the sample to be tested needs to be taken out, etc. Since the vacuum degree of the vacuum main chamber is extremely high, the process of evacuating the vacuum main chamber is very long, even requiring dozens of hours. Therefore, in order to avoid the vacuum degree of the vacuum main chamber being seriously damaged when the second beam plug valve is opened, the vacuum sub-chamber also needs to maintain a vacuum state. The vacuum degree of the vacuum sub-chamber is required to reach at least the E-4 level, otherwise it cannot be connected to the vacuum main chamber. The vacuum sub-chamber is equipped with a third vacuum control unit and a sample transfer table for monitoring and regulating the vacuum degree of the vacuum sub-chamber. The third vacuum control unit also includes a screw pump, a molecular pump and a vacuum gauge. The vacuum degree in the vacuum sub-chamber is detected in real time by the vacuum gauge, and the vacuum state is maintained by the screw pump and the molecular pump. The sample transfer table is fixed by a movable support frame, and a slide rail is connected to the bottom of the support frame. The slide rail drives the support frame and the sample transfer table to move in both horizontal and vertical directions. The maximum stroke of the sample transfer table can reach 1 meter. The device bearing structure on the sample transfer table is a placement plate with a size of 30cm*30cm. The slide rail under the sample transfer stage and the slide rail under the vacuum sample stage are parallel to each other, so the vacuum sample stage and the sample transfer stage can perform reciprocating exchange motion between the vacuum main chamber and the vacuum sub-chamber to switch the positions of the sample transfer stage and the vacuum sample stage.

[0037] In one embodiment of the present invention, a method for using the above-mentioned irradiation terminal device is also provided. The switching between the vacuum irradiation mode and the atmospheric irradiation and single-particle burnout positioning mode can be achieved by controlling the opening and closing of the first beam line plug-in valve. Specifically, when it is necessary to simulate the irradiation state of the power device in a vacuum environment, the device starts the vacuum irradiation mode, performs preparation work in the vacuum sub-chamber, and sends the sample to be tested onto the vacuum sample table in the vacuum main chamber. At this time, the first beam line plug-in valve and the second beam line plug-in valve are closed to cut off the connection between the vacuum main chamber and the single-particle burnout area online positioning system. The vacuum main chamber is evacuated by the second vacuum control unit. When the vacuum degree reaches the test condition, the particle accelerator is started to generate particles, and the sample to be tested on the vacuum sample table is vacuum irradiated. This process is only a simulation of the irradiation condition of the sample to be tested in a vacuum environment, and cannot achieve online in-situ analysis.

[0038] When it is necessary to simulate the irradiation state of the power device in the atmospheric environment, and to detect and analyze the single particle burnout of the power device, the equipment starts the atmospheric irradiation and single particle burnout positioning mode, and places the sample to be tested on the atmospheric sample stage. At this time, the first beam line plug-in valve is opened and the second beam line plug-in valve is closed, so that the vacuum main chamber is connected to the single particle burnout area online positioning system, and the single particle burnout area online positioning system is evacuated by the first vacuum control unit. When the vacuum degree reaches the test condition, the particle accelerator is started to generate particles, and the particles pass through the first vacuum pipeline, the vacuum main chamber, and the second vacuum pipeline in turn to enter the single particle burnout area online positioning system, and then irradiate the surface of the sample to be tested on the atmospheric sample stage through the window of the single particle burnout area online positioning system, and the sample to be tested on the vacuum sample stage is irradiated with the atmosphere, and the single particle burnout area is analyzed by the single particle burnout area online positioning system. The present invention greatly enriches the functions of the irradiation terminal and enhances the monitoring capability of power devices in a simulated radiation environment. It can search and locate the damaged area in real time online after the power device is irradiated by particles. This can not only quickly identify and respond to potential fault points, but also help researchers further understand the radiation damage mechanism of power devices. By analyzing the performance changes of devices after irradiation, we can deeply understand the causes and processes of damage. By monitoring the device for a long time in a simulated radiation environment, the system can more accurately evaluate the service life of the device, which is of great significance for predicting the durability of power devices in practical applications and the production design of power devices.

[0039] In short, the above description is only a preferred embodiment of this specification and is not intended to limit the protection scope of this specification. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this specification shall be included in the protection scope of this specification.

[0040] The systems, devices, modules or units described in one or more of the above embodiments may be implemented by a computer chip or entity, or by a product having a certain function. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0041] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0042] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0043] The above is a description of a specific embodiment of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

Claims

1. A single particle burnout area online positioning system, characterized in that: include: A first beam detection unit for monitoring the intensity of a particle beam irradiating a sample to be tested; A first vacuum control unit for monitoring and regulating the vacuum degree of the system; And, a microscopic rapid positioning unit, which includes a microscopic optical lens, a multi-frame spectroscopic unit and a multi-spectral thermal imaging unit, wherein the microscopic optical lens is used to capture the radiation excited by the sample to be tested after the particles irradiate the sample to be tested in an atmospheric environment; the multi-frame spectroscopic unit is used to separate the radiation into bands; the multi-spectral thermal imaging unit is used to image the multi-band radiation after the band separation, calculate the temperature distribution on the surface of the sample to be tested based on the imaging data, and locate the single particle burnt area based on the temperature distribution.

2. The single-particle burnout area online positioning system according to claim 1, characterized in that: A particle accelerator is used to provide the particles for irradiating the sample to be tested, and the particles are input from the particle accelerator to the single particle burnout area online positioning system through a vacuum pipe.

3. The single-particle burnout area online positioning system according to claim 1, characterized in that: The microscopic optical lens comprises a multi-zoom lens group and a single convex lens which are arranged in parallel.

4. The single-event burnout area online positioning system according to claim 1, characterized in that: The multi-band light splitting unit comprises a narrowband filter and a light splitting barrier. The light splitting barrier is provided with a plurality of through holes, and a plurality of narrowband filters with different wavebands are mounted on the through holes.

5. The single-event burnout area online positioning system according to claim 1, characterized in that: The multi-spectral thermal imaging unit includes a CCD camera, a data acquisition module, a temperature calculation module and a positioning module, wherein the CCD camera is used to detect multi-band radiation after band separation to obtain a multi-spectral image; the data acquisition module collects multi-spectral image data from the CCD camera and transmits it to the temperature calculation module; the temperature calculation module calculates the temperature distribution on the surface of the sample to be tested based on the multi-spectral image data through multi-spectral radiation temperature measurement technology; the positioning module performs online real-time positioning of the single-particle burnt area of ​​the sample to be tested according to the temperature distribution.

6. An irradiation terminal device, characterized in that: include: A particle accelerator, a vacuum main chamber, an atmospheric sample stage, and a single particle burnout area online positioning system as claimed in any one of claims 1 to 5; The particle accelerator is connected to the vacuum main chamber through a first vacuum pipe; the vacuum main chamber is provided with a second beam detection unit for monitoring the intensity of the particle beam input into the vacuum main chamber, a second vacuum control unit for monitoring and regulating the vacuum degree of the vacuum main chamber, and a vacuum sample stage; The vacuum main chamber is connected to the single particle burnout area online positioning system through a second vacuum pipeline, and a first beam line plug-in valve for controlling the on-off of the second vacuum pipeline is provided on the second vacuum pipeline.

7. The irradiation terminal device according to claim 6, characterized in that: It also includes a vacuum sub-chamber, which is connected to the vacuum main chamber through a third vacuum pipe, and a second beam line plug-in valve for controlling the on and off of the third vacuum pipe is provided on the third vacuum pipe; a third vacuum control unit and a sample transfer table for monitoring and regulating the vacuum degree of the vacuum sub-chamber are provided in the vacuum sub-chamber.

8. The irradiation terminal device according to claim 7, characterized in that: The first vacuum control unit, the second vacuum control unit and the second vacuum control unit each include a vacuum pump and a vacuum gauge.

9. The irradiation terminal device according to claim 7, characterized in that: The bottoms of the vacuum sample stage and the sample transfer stage are both provided with slide rails, and the vacuum sample stage and the sample transfer stage can be driven to move between the vacuum main chamber and the vacuum sub-chamber via the slide rails.

10. A method for using the irradiation terminal device according to any one of claims 6 to 9, characterized in that: include: Vacuum irradiation mode: placing the sample to be tested on the vacuum sample stage in the vacuum main chamber, closing the first beam line plug valve and the second beam line plug valve; evacuating the vacuum main chamber through the second vacuum control unit; starting the particle accelerator to vacuum irradiate the sample to be tested on the vacuum sample stage; Atmospheric irradiation and single particle burnout positioning mode: place the sample to be tested on the atmospheric sample stage, open the first beam line plug-in valve and close the second beam line plug-in valve; evacuate the single particle burnout area online positioning system through the first vacuum control unit; start the particle accelerator to perform atmospheric irradiation on the sample to be tested on the atmospheric sample stage, and analyze the single particle burnout area through the single particle burnout area online positioning system.

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