Tail gas treatment device and process for phosphorane preparation

Abstract

The invention relates to the technical field of waste gas treatment, in particular to a tail gas treatment device and process for phosphorane preparation, the device comprises a tower body and a filtering mechanism arranged in the tower body, and the filtering mechanism comprises a fixing frame and a lifting frame; the feeding mechanism comprises a feeding assembly and a recycling assembly, the feeding assembly is used for conveying filling materials to the position between the fixing frame and the lifting frame through the mounting pipe, and the recycling assembly is used for recycling the filling materials between the fixing frame and the lifting frame. Therefore, the thickness of the filling material is automatically adjusted. When the lifting frame slides, the feeding mechanism supplements or recovers the filling materials according to needs, the filtering efficiency is improved, and waste of the filling materials is avoided. The requirement for frequently replacing the filler is reduced, the maintenance cost is reduced, the trouble of frequently disassembling and cleaning the device is avoided, and the long-term stability and sustainability of the device are remarkably improved.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, and in particular to a tail gas treatment device and process for preparing phosphine. Background Art

[0002] Phosphine is a toxic gas widely used in many industrial fields such as semiconductor manufacturing, phosphating industry and metal processing. As an important raw material, phosphine will produce a large amount of tail gas emissions during processing. Due to the toxicity of phosphine and its potential harm to the environment, at present, the treatment of phosphine tail gas is usually carried out by spray tower treatment, which uses the full contact between droplets and gas to remove harmful substances in the gas and achieve tail gas purification. For example, Chinese patent authorization announcement number CN113877396B discloses a spray tower for industrial desulfurization, including a mounting base, a main tower body, a water storage tank, a support frame, a mobile packing storage mechanism, a triangular seat, a discharge pipe and a rotary spray mechanism. This patent can move left and right in the main tower body through a mobile packing storage mechanism, and the design of the two packing frames enables the replacement of packing materials without stopping the machine. This technology provides the convenience of replacing packing materials without stopping the tower body, thereby improving work efficiency. However, although this design has certain advantages, it also has certain limitations. First, the replacement of the filling material depends on the overall replacement of the filling frame, and the entire frame needs to be moved left and right, which not only increases the complexity of the operation, but also makes it difficult to ensure the leakage of toxic gases inside the spray tower during the movement, which may lead to safety hazards. Secondly, in order to ensure that the filling frame can move smoothly, sufficient space needs to be left around the spray tower, which will increase the difficulty of installation and layout in a limited space environment. In addition, the precise docking and adjustment of the filling frame also increases the complexity of the work and affects the overall reliability and efficiency of the system. Summary of the invention

[0003] In view of the above problems, a tail gas treatment device and process for preparing phosphine are provided. The present invention realizes dynamic adjustment of the space between the fixed frame and the lifting frame by sliding the lifting frame, thereby automatically adjusting the thickness of the filling material. When the lifting frame slides, the feeding mechanism replenishes or recycles the filling material as needed, thereby improving the filtering efficiency of the phosphine tail gas and avoiding the waste of filling material. Not only does it reduce the need for frequent replacement of filling materials and reduce maintenance costs, it also avoids the trouble of frequent disassembly and cleaning of the device, significantly improving the long-term stability and sustainability of the device.

[0004] In order to solve the problems of the prior art, the present invention provides a tail gas treatment device for phosphine preparation, comprising a tower body and a filtering mechanism arranged in the tower body, the filtering mechanism comprising a fixed frame and a lifting frame, the fixed frame is fixedly installed in the tower body; the lifting frame can slide below the fixed frame along the axial direction of the tower body; filter screens are arranged at the top of the fixed frame, the bottom of the lifting frame and between the fixed frame and the lifting frame, wherein the filter screen between the fixed frame and the lifting frame can be expanded or contracted as the positions of the lifting frame and the fixed frame change; the fixed frame and the lifting frame are filled with filling material for treating tail gas; a feeding mechanism is arranged on the side of the tower body; a discharge tray is arranged at the center of the lifting frame, and a mounting pipe that penetrates the tower wall and is connected to an external feeding mechanism is arranged on the discharge tray; the feeding mechanism comprises a feeding component for conveying the filling material to between the fixed frame and the lifting frame through the mounting pipe and a recovery component for recovering the filling material between the fixed frame and the lifting frame, and both the feeding component and the recovery component are connected to the mounting pipe.

[0005] Preferably, a fixing ring matching the unloading tray is also provided in the center of the lifting frame, a plurality of fixing rods equidistantly surrounding the axis thereof are provided on the circumference of the fixing ring, the fixing ring is sleeved on the unloading tray, and a fixing component capable of connecting and disconnecting the two is provided between the fixing ring and the unloading tray, a driving component for driving the unloading tray to move is provided on the fixing frame, a plurality of telescopic rods equidistantly surrounding the axis thereof are provided on the unloading tray, and both ends of the telescopic rods are respectively hinged to the unloading tray and the lifting frame.

[0006] Preferably, the fixing assembly includes a plurality of sliding holes and a plurality of elastic clips, the plurality of sliding holes are equidistantly arranged around the axis of the fixing ring, and the sliding holes extend radially along the fixing ring, the plurality of elastic clips can be slidably disposed in the plurality of sliding holes, and the edge of the discharge tray is provided with mounting holes having the same number and one-to-one corresponding to the elastic clips.

[0007] Preferably, the driving assembly includes a first rotary drive motor and multiple electric push rods, the multiple electric push rods are equidistantly arranged around the axis of the discharge tray, and the axes of the multiple electric push rods are parallel to the axis direction of the tower body, the two ends of the electric push rods are respectively connected to the fixed frame and the discharge tray, the first rotary drive motor is arranged in the center of the fixed frame, and the first rotary drive motor is used to synchronously drive the multiple electric push rods to extend and retract.

[0008] Preferably, the drive assembly further comprises a protective cover arranged on the fixing frame, the first rotary drive motor and the plurality of electric push rods are all arranged in the protective cover, and the protective cover has a conical structure.

[0009] Preferably, a sensor for identifying the filling amount of the input filling material is provided in the discharge tray.

[0010] Preferably, a first valve is provided at the bottom of the discharge tray, a retractable connecting pipe is provided between the mounting pipe and the first valve, a three-way joint connected to the mounting pipe is provided at one end away from the discharge tray, a second valve is provided on the three-way joint, and the three-way joint is respectively connected to the feeding assembly and the recovery assembly.

[0011] Preferably, the feeding assembly includes a feeding barrel, a spiral blade, a second rotary drive motor and a feeding rack. The feeding barrel is inclinedly arranged on the side of the tower body, a first feeding pipe connected to a three-way joint is arranged on the top of the feeding barrel, the spiral blade is rotatably arranged in the feeding barrel, the second rotary drive motor is arranged at the bottom of the feeding barrel, and the spiral blade is drivingly connected to the output shaft of the second rotary drive motor, the feeding rack is arranged on the side of the feeding barrel, and a second feeding pipe connected to the feeding barrel is arranged on the feeding rack.

[0012] Preferably, the recovery component includes a recovery box and a recovery pipe for collecting the filling material. The recovery box is arranged on the side of the tower body, and the recovery pipe is arranged between the recovery box and the tower body. The two ends of the recovery pipe are respectively connected to the recovery box and the three-way joint. The recovery pipe is also provided with a branch connected to an external suction device.

[0013] A tail gas treatment process for phosphine preparation is applied to the above-mentioned tail gas treatment device for phosphine preparation, and comprises the following steps: S1. The phosphine tail gas is introduced from the bottom of the tower body, and the impurities in the tail gas are preliminarily filtered through the filtering mechanism in the tower body.

[0014] S2. The position of the lifting frame is adjusted according to the impurity concentration in the exhaust gas, thereby adjusting the space between the fixed frame and the lifting frame, and then adjusting the expansion or contraction of the filter to optimize the filtering effect.

[0015] S3a. When the space between the fixed frame and the lifting frame becomes larger, the filling material is provided into the filtering mechanism through the feeding mechanism, and the filling amount is adjusted according to the change of the position of the lifting frame.

[0016] S3b. When the space between the fixed frame and the lifting frame becomes smaller, the filling material is recovered using the recovery component so that it can be reused or replaced in the next processing process.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention can achieve the change of space between the fixed frame and the lifting frame by sliding the lifting frame along the axial direction of the tower body, so that the filter between the fixed frame and the lifting frame can automatically expand or shrink as the space changes. Through the dynamic adjustment of this space, the present invention can accurately adjust the filling thickness of the filling material (such as polypropylene multi-faceted hollow spheres). When the lifting frame slides to increase the space between the fixed frame and the lifting frame, the feeding component will automatically add an appropriate amount of filling material to the space, thereby increasing the thickness of the filling material and improving the filtration efficiency; conversely, when the space is reduced, the recovery component will recover and store the excess filling material to avoid waste. This process not only reduces the operating cost, but also effectively extends the service life of the filling material.

[0018] 2. The present invention realizes dynamic adjustment of the device and recycling of filling materials through the feeding component and the recycling component, greatly reducing the need for frequent replacement of filling materials, thereby avoiding the trouble of frequent disassembly and cleaning of the device. By reducing the maintenance cycle and work intensity, the present invention improves the long-term stability and sustainability of the device, ensuring that the device can maintain efficient and reliable performance in long-term operation, so that the filling material can be cleaned without disassembling the device.

[0019] 3. The present invention sets a fixing component so that when the driving component drives the discharge tray, the discharge tray can be connected and disconnected with the fixing ring through the fixing component, so that the filter screen at the bottom of the lifting frame can be changed from a disc-shaped structure to a funnel-shaped structure, thereby realizing efficient recovery of the filling material during the recovery process. The device can flexibly adjust the filtering mechanism according to the actual composition and concentration of the exhaust gas, adapt to the needs under different working conditions, and ensure that it can maintain efficient operation under different loads and pollution levels. In addition, the driving component only needs to drive the discharge tray to achieve the adjustment of the device, avoiding the need to configure a separate driving source for the discharge tray and the lifting frame, reducing the complexity and cost of the device, and improving the flexibility and efficiency of the adjustment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The present invention is a schematic diagram of the three-dimensional structure of a tail gas treatment device for preparing phosphine.

[0021] Figure 2 The present invention is a schematic diagram of the cross-sectional structure of a tail gas treatment device for preparing phosphine.

[0022] Figure 3 The present invention is a schematic diagram of the cross-sectional structure of a tail gas treatment device for phosphine preparation when a discharge plate moves independently.

[0023] Figure 4 The present invention is a schematic diagram of the cross-sectional structure of a tail gas treatment device for phosphine preparation when a lifting frame and a discharge tray move synchronously.

[0024] Figure 5The present invention is a three-dimensional structural schematic diagram of a feeding mechanism in a tail gas treatment device for preparing phosphine.

[0025] Figure 6 The present invention is a schematic diagram of the cross-sectional structure of a feeding mechanism in a tail gas treatment device for preparing phosphine.

[0026] Figure 7 The present invention is a schematic diagram of a partial three-dimensional structure of a filtering mechanism in a tail gas treatment device for phosphine preparation.

[0027] Figure 8 The present invention is a three-dimensional structural schematic diagram of a lifting frame in a tail gas treatment device for phosphine preparation.

[0028] Fig. 9 The present invention is an exploded view of a lifting frame, a discharge tray and fixed components in a tail gas treatment device for phosphine preparation.

[0029] Fig.10 The present invention is a schematic diagram of the three-dimensional structure of a fixing frame in a tail gas treatment device for preparing phosphine.

[0030] Fig.11 yes Fig. 9 Enlarged view of point A in the middle.

[0031] The numbers in the figure are: 1. Tower body; 2. Filter mechanism; 21. Fixed frame; 22. Lifting frame; 221. Discharge tray; 2211. Telescopic rod; 2212. Mounting pipe; 22121. Connecting pipe; 22122. Three-way joint; 22123. Second valve; 2213. Mounting hole; 2214. Sensor; 2215. First valve; 222. Fixed ring; 2221. Fixed rod; 2222. Fixed assembly; 22221. Sliding hole; 22222. Elastic buckle; 223. Driving assembly; 2231, first rotary driving motor; 2232, electric push rod; 2233, protective cover; 23, filter; 3, feeding mechanism; 31, feeding assembly; 311, feeding barrel; 3111, spiral blade; 3112, second rotary driving motor; 3113, first feeding pipe; 312, feeding rack; 3121, second feeding pipe; 32, recovery assembly; 321, recovery box; 3211, recovery pipe; 322, branch; 3221, external suction device. DETAILED DESCRIPTION

[0032] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0033] like Figures 1 to 5As shown: A tail gas treatment device for phosphine preparation, comprising a tower body 1 and a filtering mechanism 2 arranged in the tower body 1, the filtering mechanism 2 comprising a fixed frame 21 and a lifting frame 22, the fixed frame 21 is fixedly installed in the tower body 1; the lifting frame 22 can slide below the fixed frame 21 along the axial direction of the tower body 1; a filter screen 23 is arranged on the top of the fixed frame 21, the bottom of the lifting frame 22, and between the fixed frame 21 and the lifting frame 22, wherein the filter screen 23 located between the fixed frame 21 and the lifting frame 22 can be expanded or contracted as the positions of the lifting frame 22 and the fixed frame 21 change; the fixed frame 21 and ... the fixed frame 21 and the lifting frame 22 can slide below the fixed frame 21 along the axial direction of the tower body 1; the fixed frame 21 and the lifting frame 22 can slide below the fixed frame 21 along the axial direction of the tower body 1; the fixed frame 21 and the lifting frame 22 can slide below the fixed frame 21 along the axial direction of the tower body 1; the fixed frame 21 and the lifting frame 22 can slide below the fixed frame 21 along the axial direction of the tower body 1; the fixed frame 21 and the lifting frame 22 can slide below the fixed frame 21 along the The space between the lifting frames 22 is filled with filling materials for treating exhaust gas; a feeding mechanism 3 is arranged on the side of the tower body 1; a discharge tray 221 is arranged in the center of the lifting frame 22, and a mounting pipe 2212 is arranged on the discharge tray 221 which passes through the tower wall and is connected to the external feeding mechanism 3; the feeding mechanism 3 includes a feeding component 31 for conveying the filling material between the fixed frame 21 and the lifting frame 22 through the mounting pipe 2212 and a recovery component 32 for recovering the filling material between the fixed frame 21 and the lifting frame 22, and both the feeding component 31 and the recovery component 32 are connected to the mounting pipe 2212.

[0034] After the phosphine tail gas enters the tower body 1 from the bottom of the tower body 1, the tail gas will be filtered by the filter screens 23 on the fixed frame 21 and the lifting frame 22 and the filling material between the fixed frame 21 and the lifting frame 22. The lifting frame 22 slides along the axial direction of the tower body 1, so that the space between the fixed frame 21 and the lifting frame 22 can be changed. At this time, the filter screen 23 between the fixed frame 21 and the lifting frame 22 will expand or shrink with the change of space; the thickness of the filling material (polypropylene multi-faceted hollow sphere) can be adjusted by the change of space. When the space becomes larger, the filling material is supplemented to the filter mechanism 2 through the feeding component 31, and when the space becomes smaller, the excess filling material is recovered through the recovery component 32. By increasing or decreasing the thickness of the filling material, the contact time between the phosphine tail gas and the filling material can be controlled (the thicker the filling material, the longer the contact time between the gas and the filling material), thereby optimizing the filtering effect.

[0035] The phosphine tail gas first enters the processing device from the bottom of the tower body 1. After entering the tower body 1, the tail gas will be filtered through the filter 23 set on the fixed frame 21 and the lifting frame 22 and the filling material between the two. The filter 23 and the filling material purify the tail gas and remove the solid particles and pollutants therein. The lifting frame 22 can slide freely along the axial direction of the tower body 1, thereby adjusting the space between the fixed frame 21 and the lifting frame 22. As the position of the lifting frame 22 changes, the filter 23 between the fixed frame 21 and the lifting frame 22 will automatically expand or contract, thereby realizing dynamic adjustment of the filtering space.

[0036] When the sliding of the lifting frame 22 increases the space between the fixed frame 21 and the lifting frame 22, the feeding component 31 will automatically add an appropriate amount of filling material to the space, thereby increasing the thickness of the filling material and improving the filtering efficiency; conversely, when the space is reduced, the recovery component 32 will recover and store the excess filling material to avoid unnecessary material waste. This not only reduces the operating cost, but also extends the service life of the filling material. Compared with the traditional device that requires frequent replacement and disposal of excess filling materials, the present invention can efficiently utilize each filling material and reduce the overall operation and maintenance cost. This dynamic adjustment of the space and the thickness of the filling material can optimize the filtering effect in real time according to the changes in the exhaust gas concentration and composition, thereby ensuring the efficiency and stability of the entire exhaust gas treatment process.

[0037] In addition, the sliding mechanism of the lifting frame 22 and the change of the filter screen 23 can flexibly adjust the treatment efficiency according to the degree of exhaust gas pollution, thereby avoiding the problems of uneven treatment and inefficiency that may be caused by the fixed filtering mechanism 2 in the prior art, so that the exhaust gas treatment effect is always maintained in the best state, avoiding the problem of low purification efficiency caused by insufficient reaction of the traditional spray tower. This flexible adjustment mechanism makes the exhaust gas treatment more adaptable to the needs under different working conditions.

[0038] The present invention avoids the waste of filling materials by recycling the excess filling materials through the recycling component 32. The filtering mechanism 2 realizes dynamic adjustment of the exhaust gas processing capacity in this way, so that the whole device does not need frequent manual intervention during operation. The device can automatically adjust according to the exhaust gas processing requirements, thereby reducing the workload of manual operation and maintenance and improving the automation degree and work efficiency of the device.

[0039] Due to the dynamic adjustment and recycling of the filling material, the present invention reduces the need for frequent replacement of the filling material and avoids the trouble of frequent disassembly and cleaning of the device. By reducing the maintenance cycle and work intensity, the present invention improves the long-term stability and sustainability of the device.

[0040] like Figures 2 to 4 and Figures 7 to 11 As shown: a fixing ring 222 matching with the discharge tray 221 is also provided in the center of the lifting frame 22, and a plurality of fixing rods 2221 equidistantly surrounding its axis are provided on the circumference of the fixing ring 222, the fixing ring 222 is sleeved on the discharge tray 221, and a fixing component 2222 capable of connecting and disconnecting the two is provided between the fixing ring 222 and the discharge tray 221, a driving component 223 for driving the discharge tray 221 to move is provided on the fixing frame 21, and a plurality of telescopic rods 2211 equidistantly surrounding its axis are provided on the discharge tray 221, and both ends of the telescopic rods 2211 are respectively hinged to the discharge tray 221 and the lifting frame 22.

[0041] Through the setting of the fixing component 2222, the discharge tray 221 can be connected and disconnected with the fixing ring 222. When the filling material needs to be recycled, the connection between the discharge tray 221 and the fixing ring 222 is first disconnected through the fixing component 2222, and then the discharge tray 221 is driven to move along the axis direction of the tower body 1 through the driving component 223. During this process, multiple telescopic rods 2211 will move with the discharge tray 221, so that the bottom surface of the lifting frame 22 changes from the original disc-shaped structure to a funnel-shaped structure. At this time, the filter screen 23 at the bottom of the lifting frame 22 will be deformed accordingly. The structure of the funnel-shaped bottom can effectively guide the filling material to flow into the discharge tray 221 along the inner wall of the filter screen 23, so as to facilitate the recycling of the filling material. When it is necessary to adjust the space between the lifting frame 22 and the fixed frame 21, first lock the connection between the fixing ring 222 and the discharge tray 221 through the fixing assembly 2222, and then drive the discharge tray 221 to move through the driving assembly 223. The fixing ring 222 will move synchronously with the discharge tray 221, and the movement of the lifting frame 22 is driven by the multiple fixing rods 2221 on the fixing ring 222, so that the lifting frame 22 can move together with the discharge tray 221, thereby realizing precise dynamic adjustment of the space between the lifting frame 22 and the fixed frame 21, ensuring that the filtration effect is optimized in real time according to the changes in the exhaust gas concentration or composition during the filtration process.

[0042] By setting the fixing component 2222, the driving component 223 only needs to drive the discharge tray 221 to achieve the adjustment of the device. The structure of the device is effectively simplified, and it is avoided to configure a driving source separately for the discharge tray 221 and the lifting frame 22, which not only reduces the complexity and cost of the device, but also improves the flexibility and efficiency of the adjustment process. At the same time, the need for additional driving sources is reduced, thereby reducing energy consumption and maintenance costs, and achieving more efficient and economical operation.

[0043] Dynamically adjusting the space between the lifting frame 22 and the fixed frame 21 does not require frequent manual adjustment. The automated operation makes the maintenance and management of the entire device more convenient, reduces manual intervention, and improves the safety and stability of the operation. Through the setting of the fixed component 2222, the device can flexibly adjust the filter mechanism 2 according to the actual composition and concentration of the exhaust gas, adapt to the needs under different working conditions, and ensure that it can maintain efficient operation under different loads and pollution levels.

[0044] It should be noted that the lifting frame 22 and the fixed frame 21 are connected and lifted by a damping rod. The damping rod is set so that the lifting frame 22 can achieve a stable position after being adjusted, thereby ensuring that the thickness of the filling material can be guaranteed after being adjusted.

[0045] like Figures 2 to 4 and Figures 7 to 11As shown: the fixing assembly 2222 includes a plurality of sliding holes 22221 and a plurality of elastic clips 22222, the plurality of sliding holes 22221 are arranged equidistantly around the axis of the fixing ring 222, and the sliding holes 22221 extend radially along the fixing ring 222, the plurality of elastic clips 22222 can be slidably disposed in the plurality of sliding holes 22221, and the edge of the discharge tray 221 is provided with mounting holes 2213 which are the same in number and correspond one to one to the elastic clips 22222.

[0046] In the initial state, the elastic buckle 22222 is in the ejected state in the sliding hole 22221, and the elastic buckle 22222 can be connected to the discharge tray 221 through the mounting hole 2213, so that the discharge tray 221 sleeved in the fixing ring 222 is tightly combined with the fixing ring 222. When the discharge tray 221 is driven by the driving assembly 223, the discharge tray 221 can drive the fixing ring 222 to move through the mounting hole 2213 and the elastic buckle 2222, and the fixing ring 222 drives the lifting frame 22 to move through the fixing rod 2221, thereby realizing the space adjustment between the lifting frame 22 and the fixing frame 21.

[0047] When it is necessary to recover the filling material between the fixed frame 21 and the lifting frame 22, the elastic buckle 22222 retracts, so that the elastic buckle 22222 slides into the sliding hole 22221 along the axial direction of the sliding hole 22221, thereby separating the elastic buckle 22222 from the mounting hole 2213, so that the discharge tray 221 is separated from the fixed ring 222 at this time, and the discharge tray 221 can be independently driven by the driving assembly 223, and the telescopic rod 2211 is driven to move by the discharge tray 221, and the shape of the filter screen 23 at the bottom of the lifting frame 22 is changed by the telescopic rod 2211, so as to facilitate the introduction of the filling material in the filter screen 23 into the discharge tray 221, thereby realizing efficient recovery of the filling material.

[0048] The elastic buckle 22222 can be provided with an elastic part and a magnetic block at one end thereof close to the sliding hole 22221, and an electromagnet is provided inside the sliding hole 22221. When the electromagnet is energized, it can generate magnetic attraction with the magnetic block, thereby adsorbing the elastic buckle 22222, so that the elastic buckle 22222 shrinks in the sliding hole 22221. When the electromagnet is powered off, the elastic buckle 22222 can pop out from the sliding hole 22221 under the reset of the elastic part. Through the synergistic effect of the electromagnet and the elastic buckle 22222, the connection and separation of the discharge tray 221 and the fixing ring 222 can be accurately controlled, which greatly simplifies the operation steps and improves the convenience of operation. The cooperation between the electromagnet and the elastic buckle 22222 enables this adjustment process to achieve semi-automatic or fully automatic operation, greatly improves the automation level of the device, and reduces the complexity and labor intensity of manual operation. Excessive mechanical friction is avoided, and mechanical wear caused by frequent operation is reduced, thereby extending the service life of the device and reducing maintenance costs.

[0049] like Figures 2 to 4 and Figures 7 to 11 As shown: the driving component 223 includes a first rotary driving motor 2231 and a plurality of electric push rods 2232, the plurality of electric push rods 2232 are equidistantly arranged around the axis of the discharge tray 221, and the axes of the plurality of electric push rods 2232 are parallel to the axis direction of the tower body 1, the two ends of the electric push rods 2232 are respectively connected to the fixed frame 21 and the discharge tray 221, the first rotary driving motor 2231 is arranged in the center of the fixed frame 21, and the first rotary driving motor 2231 is used to synchronously drive the plurality of electric push rods 2232 to extend and retract.

[0050] When the first rotary drive motor 2231 is started, the first rotary drive motor 2231 drives the electric push rod 2232 to extend and retract along its axial direction. Each electric push rod 2232 will generate a certain force during the extension and retraction process, pushing the discharge tray 221 to move along the axial direction of the tower body 1. Due to the synchronous action of multiple electric push rods 2232, the discharge tray 221 can maintain stable movement to ensure the accuracy of its position adjustment. The telescopic action of the electric push rod 2232 can also be used to adjust the space between the lifting frame 22 and the fixed frame 21, so as to achieve functions such as adjustment of the filling material, change of the shape of the discharge tray 221, and optimization of the filtering effect. The first rotary drive motor 2231 synchronously drives multiple electric push rods 2232 to move, ensuring the smooth movement of the discharge tray 221 and improving the working efficiency of the device. By arranging multiple electric push rods 2232 equidistantly around the discharge tray 221, it is possible to ensure that the discharge tray 221 is subjected to uniform force during movement, which helps to improve the stability and accuracy of the discharge tray 221 and avoid damage or functional failure of the device due to uneven force. The telescopic action of the electric push rod 2232 is relatively smooth, avoiding frequent high-load work, thereby reducing the wear and failure rate of the device and extending its service life. In addition, the telescopic action of the electric push rod 2232 can be precisely adjusted according to specific needs to adapt to the adjustment requirements under different working conditions, providing greater flexibility and adaptability.

[0051] like Figures 2 to 4 and Figures 7 to 11 As shown, the driving assembly 223 also includes a protective cover 2233 disposed on the fixing frame 21 , the first rotary driving motor 2231 and a plurality of electric push rods 2232 are all disposed in the protective cover 2233 , and the protective cover 2233 is a conical structure.

[0052] The conical structure of the protective cover 2233 can effectively protect the first rotary drive motor 2231 and the plurality of electric push rods 2232, and prevent the reaction liquid (such as water mist, purification liquid, etc.) from entering the interior of the drive assembly 223 during the spraying process. The conical structure can effectively guide the flow of liquid that may splash, and prevent the liquid from contacting sensitive components such as the first rotary drive motor 2231 and the electric push rod 2232. The protective cover 2233 acts as a barrier to block these liquids and prevent them from directly entering the interior of the first rotary drive motor 2231 and the electric push rod 2232, thereby ensuring the long-term stable operation of the drive assembly 223. The conical setting of the protective cover 2233 not only enhances the guiding effect on the liquid, but also reduces the accumulation of liquid on the surface through its streamlined shape, thereby improving the protective effect. The structural setting of the protective cover 2233 takes into account the requirements of waterproofing and corrosion resistance, and can be used in harsh working environments for a long time. The protective cover 2233 can withstand high humidity, high temperature and corrosive substances in harsh working environments, improve the adaptability and durability of the device in complex environments, and reduce the frequency of maintenance and replacement.

[0053] like Figure 8 As shown, a sensor 2214 for identifying the filling amount of the input filling material is arranged in the discharge tray 221 .

[0054] The filling amount of the filling material is identified by the sensor 2214 provided in the discharge tray 221, and the sensor 2214 is preferably a pressure sensor 2214. The sensor 2214 is installed at the bottom or side wall of the discharge tray 221, and can monitor the pressure change inside the discharge tray 221 in real time. When the filling material is put into the discharge tray 221, the filling material will occupy a certain space and generate a certain pressure on the discharge tray 221. The sensor 2214 will sense this pressure change and transmit the corresponding signal to the control system.

[0055] When the amount of filling material increases, the pressure in the discharge tray 221 will also increase accordingly. The sensor 2214 can accurately determine the filling amount of the filling material by continuously monitoring this pressure change. When the volume of the filling material reaches the set threshold, the sensor 2214 will send a signal to the control system, thereby triggering the control system to respond, stop the input of the filling material or start the next operation.

[0056] The sensor 2214 can be combined with an automated control system to achieve precise filling volume control, avoid overfilling or underfilling, and ensure the efficiency and stability of the filling process. Automatic monitoring and adjustment of the filling volume avoids the tedious operation of manually checking the filling volume, reduces errors, and improves overall production efficiency.

[0057] It should be noted that the sensor 2214 can also be set as a weighing sensor 2214, a capacitive sensor 2214 and a laser sensor 2214, etc., and the most suitable detection method can be selected according to the different properties of the filling material and the working environment, so as to realize real-time and high-precision monitoring of the filling amount of the filling material.

[0058] like Figures 1 to 6 As shown: a first valve 2215 is provided at the bottom of the discharge tray 221, a retractable connecting pipe 22121 is provided between the mounting pipe 2212 and the first valve 2215, a three-way joint 22122 connected to the mounting pipe 2212 is provided at one end away from the discharge tray 221, a second valve 22123 is provided on the three-way joint 22122, and the three-way joint 22122 is respectively connected to the feeding component 31 and the recovery component 32.

[0059] The first valve 2215 is used to control the flow of filling materials inside the lifting frame 22 and the fixed frame 21, and to adjust the addition or recovery of filling materials. A flexible connection is provided between the discharge tray 221 and the installation pipe 2212 through a retractable connecting pipe 22121, ensuring that the movement of the lifting frame 22 will not affect the smooth transportation or recovery of the filling materials. The three-way joint 22122 is arranged at the end of the installation pipe 2212 away from the discharge tray 221, and plays the role of switching the pipeline channel, and can select the feeding component 31 or the recovery component 32 as needed. The second valve 22123 realizes the switching of the feeding and recovery functions by controlling the channel switching of the three-way joint 22122. When it is necessary to add filling materials to the device, the second valve 22123 opens the channel of the feeding component 31 to deliver new filling materials to the device; and when it is necessary to recycle the filling materials, the second valve 22123 switches to the recycling component 32 to complete the material recycling process; ensuring that the supply and recycling of materials can smoothly transition at different stages when the device is running, improving the working efficiency of the device, enabling the device to achieve a higher level of automation, reducing manual intervention, improving production efficiency and reducing the occurrence of erroneous operations. At the same time, it simplifies the pipeline layout and operation process of the device, reducing the complexity and maintenance difficulty of the device.

[0060] like Figures 1 to 6 As shown: the feeding assembly 31 includes a feeding barrel 311, a spiral blade 3111, a second rotary drive motor 3112 and a feeding rack 312. The feeding barrel 311 is arranged at an angle beside the tower body 1. A first feeding pipe 3113 connected to the three-way joint 22122 is arranged on the top of the feeding barrel 311. The spiral blade 3111 is rotatably arranged in the feeding barrel 311. The second rotary drive motor 3112 is arranged at the bottom of the feeding barrel 311, and the spiral blade 3111 is drivingly connected to the output shaft of the second rotary drive motor 3112. The feeding rack 312 is arranged beside the feeding barrel 311, and a second feeding pipe 3121 connected to the feeding barrel 311 is arranged on the feeding rack 312.

[0061] The feeding rack 312 is arranged beside the feeding barrel 311 to stably support the position of the feeding barrel 311. At the same time, the feeding rack 312 is convenient for adding filling materials. The filling materials are fed into the feeding barrel 311 through the second feeding pipe 3121. The feeding barrel 311 is arranged beside the tower body 1 at an inclined angle to ensure that the filling materials can flow smoothly into the tower body 1. The top of the feeding barrel 311 is connected with the first feeding pipe 3113 connected to the three-way joint 22122. By starting the second rotary drive motor 3112, the output shaft of the second rotary drive motor 3112 drives the spiral blade 3111 to rotate, and the driving force is generated by the rotation of the spiral blade 3111, so that the filling materials are provided to the first feeding pipe 3113 along the axial direction of the feeding barrel 311. It is ensured that the filling materials are evenly transported to the tower body 1, avoiding the problem of clogging or uneven distribution of the filling materials. The second rotary drive motor 3112 can accurately control the flow rate and conveying speed of the material by automatically adjusting the rotation speed of the spiral blade 3111, thereby improving the automation level of the feeding process, reducing manual operation intervention, and improving production efficiency. The feeding component 31 can work closely with the recycling component 32. The connection between the feeding component 31 and the three-way connector 22122 enables flexible switching of material supply and recycling, thereby improving the operational convenience and adaptability of the entire device.

[0062] like Figures 1 to 6 As shown: the recovery component 32 includes a recovery box 321 and a recovery pipe 3211 for collecting filling materials. The recovery box 321 is arranged on the side of the tower body 1, and the recovery pipe 3211 is arranged between the recovery box 321 and the tower body 1. The two ends of the recovery pipe 3211 are respectively connected to the recovery box 321 and the three-way joint 22122, and the recovery pipe 3211 is also provided with a branch 322 connected to the external suction device 3221.

[0063] The setting of the recovery component 32 can effectively collect the filling material in the tower body 1. The recovery pipe 3211 is connected between the recovery box 321 and the tower body 1, and plays a role in material recovery and guidance. The two ends of the recovery pipe 3211 are respectively connected to the recovery box 321 and the three-way joint 22122 in the tower body 1, forming a closed circulation loop, ensuring that the filling material can be guided from the tower body 1 to the recovery box 321.

[0064] In addition, a branch 322 is also provided on the recovery pipe 3211, and the branch 322 is connected to the external suction device 3221. The external suction device 3221 can absorb the filling material or gas in the recovery pipe 3211 through the negative pressure effect, thereby improving the recovery efficiency. When the filling material in the tower body 1 needs to be recovered, the external suction device 3221 extracts the filling material from the tower body 1 through the suction effect and guides it to the recovery box 321 through the recovery pipe 3211, thereby realizing an efficient recovery process. It should be noted that when the external suction device 3221 is working, the first valve 2215 is in a closed state, so that a negative pressure can be formed in the section from the connecting pipe 22121 to the recovery pipe 3211, which is convenient for the movement of the filling material. Through the negative pressure suction effect, the filling material in the tower body 1 can be efficiently sucked out from the tower body 1 and guided to the recovery box 321, thereby avoiding the waste of filling materials and improving the utilization rate of resources.

[0065] The sealing arrangement between the recovery pipe 3211 and the recovery box 321, as well as the connection with the external suction device 3221, ensures that the gas and filling materials in the recovery process will not leak out, thereby improving the sealing of the device and avoiding environmental pollution and material waste.

[0066] The entire recycling process can be automatically completed through the negative pressure of the external suction device 3221, which reduces manual intervention, improves the convenience and automation level of operation, and further improves the overall working efficiency of the device.

[0067] The setting of the recovery box 321 and the recovery pipe 3211 facilitates the cleaning of the collected filling material. When the recovery component 32 needs to be repaired, the recovery box 321 and the recovery pipe 3211 can be easily disassembled and cleaned, reducing the maintenance difficulty and downtime, and improving the reliability and long-term service life of the device.

[0068] like Figures 1 to 5 As shown: A tail gas treatment process for phosphine preparation, applied to the above-mentioned tail gas treatment device for phosphine preparation, includes the following steps: S1. Introduce phosphine tail gas from the bottom of the tower body 1, and perform preliminary filtration of impurities in the tail gas through the filtering mechanism 2 in the tower body 1.

[0069] S2. The position of the lifting frame 22 is adjusted according to the impurity concentration in the exhaust gas, thereby adjusting the space between the fixed frame 21 and the lifting frame 22, and further adjusting the expansion or contraction of the filter screen 23 to optimize the filtering effect.

[0070] S3a, when the space between the fixed frame 21 and the lifting frame 22 becomes larger, the filling material is provided into the filtering mechanism 2 through the feeding mechanism 3, and the filling amount is adjusted according to the change of the position of the lifting frame 22.

[0071] S3b. When the space between the fixed frame 21 and the lifting frame 22 becomes smaller, the filling material is recovered by using the recovery component 32 so as to be reused or replaced in the next processing process.

[0072] The above embodiments only express one or several implementation modes of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the protection scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the attached claims.

Claims

1. A tail gas treatment device for phosphine preparation, comprising a tower body (1) and a filtering mechanism (2) arranged in the tower body (1), characterized in that: The filtering mechanism (2) comprises a fixing frame (21) and a lifting frame (22), wherein the fixing frame (21) is fixedly installed in the tower body (1); The lifting frame (22) can slide below the fixed frame (21) along the axial direction of the tower body (1); A filter screen (23) is arranged at the top of the fixed frame (21), the bottom of the lifting frame (22), and between the fixed frame (21) and the lifting frame (22), wherein the filter screen (23) between the fixed frame (21) and the lifting frame (22) can be expanded or contracted as the positions of the lifting frame (22) and the fixed frame (21) change; A filling material for treating exhaust gas is filled between the fixed frame (21) and the lifting frame (22); A feeding mechanism (3) is provided on the side of the tower body (1); A discharge tray (221) is provided in the center of the lifting frame (22), and a mounting pipe (2212) is provided on the discharge tray (221) that penetrates the tower wall and is connected to the external feeding mechanism (3); The feeding mechanism (3) comprises a feeding assembly (31) for conveying the filling material to a position between the fixed frame (21) and the lifting frame (22) through the mounting tube (2212), and a recovery assembly (32) for recovering the filling material between the fixed frame (21) and the lifting frame (22); the feeding assembly (31) and the recovery assembly (32) are both connected to the mounting tube (2212).

2. A tail gas treatment device for phosphine preparation according to claim 1, characterized in that: A fixing ring (222) matching the discharge tray (221) is also provided in the center of the lifting frame (22), a plurality of fixing rods (2221) equidistantly surrounding the axis of the fixing ring (222) are provided on the circumference of the fixing ring (222), the fixing ring (222) is sleeved on the discharge tray (221), and a fixing assembly (2222) capable of connecting and disconnecting the fixing ring (222) and the discharge tray (221) is provided between the fixing ring (222) and the discharge tray (221), a driving assembly (223) for driving the discharge tray (221) to move is provided on the fixing frame (21), a plurality of telescopic rods (2211) equidistantly surrounding the axis of the discharge tray (221) are provided on the discharge tray (221), and two ends of the telescopic rods (2211) are respectively hinged to the discharge tray (221) and the lifting frame (22).

3. A tail gas treatment device for phosphine preparation according to claim 2, characterized in that: The fixing assembly (2222) comprises a plurality of sliding holes (22221) and a plurality of elastic buckles (22222); the plurality of sliding holes (22221) are arranged equidistantly around the axis of the fixing ring (222), and the sliding holes (22221) extend radially of the fixing ring (222); the plurality of elastic buckles (22222) can be slidably arranged in the plurality of sliding holes (22221); and the edge of the discharge tray (221) is provided with mounting holes (2213) having the same number as the elastic buckles (22222) and corresponding one to one.

4. The tail gas treatment device for phosphine preparation according to claim 2, characterized in that: The drive assembly (223) comprises a first rotary drive motor (2231) and a plurality of electric push rods (2232); the plurality of electric push rods (2232) are arranged equidistantly around the axis of the discharge tray (221); the axes of the plurality of electric push rods (2232) are parallel to the axis direction of the tower body (1); the two ends of the electric push rods (2232) are respectively connected to the fixed frame (21) and the discharge tray (221); the first rotary drive motor (2231) is arranged at the center of the fixed frame (21); and the first rotary drive motor (2231) is used to synchronously drive the plurality of electric push rods (2232) to extend and retract.

5. A tail gas treatment device for phosphine preparation according to claim 4, characterized in that: The driving assembly (223) further comprises a protective cover (2233) arranged on the fixing frame (21); the first rotary driving motor (2231) and the plurality of electric push rods (2232) are all arranged in the protective cover (2233); and the protective cover (2233) is a conical structure.

6. The tail gas treatment device for phosphine preparation according to claim 1, characterized in that: A sensor (2214) for identifying the filling amount of the input filling material is provided in the discharge tray (221).

7. The tail gas treatment device for phosphine preparation according to claim 1, characterized in that: A first valve (2215) is provided at the bottom of the discharge tray (221), a retractable connecting pipe (22121) is provided between the installation pipe (2212) and the first valve (2215), a three-way joint (22122) in communication with the installation pipe (2212) is provided at one end of the installation pipe (2212) away from the discharge tray (221), a second valve (22123) is provided on the three-way joint (22122), and the three-way joint (22122) is respectively connected to the feeding assembly (31) and the recovery assembly (32).

8. A tail gas treatment device for phosphine preparation according to claim 7, characterized in that: The feeding assembly (31) comprises a feeding barrel (311), a spiral blade (3111), a second rotary drive motor (3112) and a feeding rack (312); the feeding barrel (311) is arranged at an angle beside the tower body (1); a first feeding pipe (3113) connected to a three-way joint (22122) is arranged at the top of the feeding barrel (311); the spiral blade (3111) is rotatably arranged in the feeding barrel (311); the second rotary drive motor (3112) is arranged at the bottom of the feeding barrel (311), and the spiral blade (3111) is drivingly connected to the output shaft of the second rotary drive motor (3112); the feeding rack (312) is arranged beside the feeding barrel (311); and a second feeding pipe (3121) connected to the feeding barrel (311) is arranged on the feeding rack (312).

9. The tail gas treatment device for phosphine preparation according to claim 7, characterized in that: The recovery component (32) comprises a recovery box (321) and a recovery pipe (3211) for collecting the filling material. The recovery box (321) is arranged beside the tower body (1). The recovery pipe (3211) is arranged between the recovery box (321) and the tower body (1). Both ends of the recovery pipe (3211) are respectively connected to the recovery box (321) and the three-way joint (22122). The recovery pipe (3211) is also provided with a branch (322) connected to an external air suction device (3221).

10. A tail gas treatment process for phosphine preparation, applied to a tail gas treatment device for phosphine preparation according to claims 1-9, characterized in that: The following steps are included: S1, introducing phosphine tail gas from the bottom of the tower body (1), and performing preliminary filtration of impurities in the tail gas through a filtering mechanism (2) in the tower body (1); S2, adjusting the position of the lifting frame (22) according to the concentration of impurities in the exhaust gas, thereby adjusting the space between the fixed frame (21) and the lifting frame (22), and further adjusting the expansion or contraction of the filter (23) to optimize the filtering effect; S3a, when the space between the fixed frame (21) and the lifting frame (22) becomes larger, the filling material is supplied to the filtering mechanism (2) through the feeding mechanism (3), and the filling amount is adjusted according to the change in the position of the lifting frame (22); S3b, when the space between the fixed frame (21) and the lifting frame (22) becomes smaller, the filling material is recovered by using the recovery component (32) so as to be reused or replaced in the next processing process.

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