Multi-channel glue pump control system for wet process equipment

Abstract

The invention discloses a multi-channel glue pump control system for wet equipment, which comprises an industrial personal computer, a plurality of multi-channel glue pump controllers and a plurality of controlled hardware, and data transmission between the industrial personal computer and the plurality of multi-channel glue pump controllers is realized based on serial port communication; a main control board of the multi-channel glue pump controller comprises a controller master controller and a plurality of controller slave controllers, the controller master controller is used for sending a control command, and the plurality of controller slave controllers receive the control command; the plurality of controller slave controllers are respectively in one-to-one correspondence with the plurality of controlled hardware, and control on the controlled hardware is realized by the controller slave controllers based on serial port communication and pin point control; according to the multi-channel glue pump controller, on the basis of embedded software of a main control board, command parameters of an industrial personal computer and signal feedback and action execution of controlled hardware are combined to achieve multi-pump one-control real-time cooperative driving, parallel control over a plurality of glue pumps is achieved in a master-slave mode in combination with a single-chip microcomputer, the number requirement for equipment interfaces is reduced, and the cost is reduced. And parallel operation of multiple units is ensured.

Description

Technical Field

[0001] This invention relates to the field of glue pump control technology, and in particular to a multi-channel glue pump control system for wet processing equipment. Background Technology

[0002] In the integrated circuit industry, the control of adhesive pumps is a crucial component of wet process equipment. These pumps control the amount and speed of adhesive used to form films on wafer surfaces or remove impurities during the cleaning process. To ensure the production capacity of wet process equipment, multiple adhesive pumps need to be controlled simultaneously, combined with external flow meters and valve controls, thereby enabling the parallel operation of multiple units within the equipment.

[0003] However, the control of multiple glue pumps in the above methods is often combined with a driver, using a one-pump-one-control approach. Furthermore, the control of the glue pump, flow meter, and valve start / stop are independent, and communication delays may occur, thus failing to guarantee accurate flow control. In addition, a large number of glue pumps can lead to an insufficient number of interfaces in the equipment, failing to meet the needs of multi-unit modules. To address these issues, a solution is proposed below. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-channel glue pump control system for wet processing equipment, which has the advantages of realizing parallel control of multiple glue pumps, reducing the number of equipment interfaces required, and ensuring the parallel operation of multiple units.

[0005] The above-mentioned technical objective of the present invention is achieved through the following technical solution: A multi-channel glue pump control system for wet processing equipment, including Industrial control computer, which is used to issue parameter commands; A plurality of multi-channel glue pump controllers are provided, wherein the industrial control computer and the plurality of multi-channel glue pump controllers transmit data based on serial communication; the main control board of the multi-channel glue pump controller includes a master controller and a plurality of slave controllers, wherein the master controller is used to issue control commands and the plurality of slave controllers receive control commands; A plurality of controlled hardware, the number of which is the same as the number of controller slaves, and each of the plurality of controller slaves corresponds one-to-one with a plurality of controlled hardware. The controller slaves control the controlled hardware based on serial communication and pin point control. The multi-channel glue pump controller achieves real-time collaborative driving of multiple pumps under one control by combining the embedded software of the main control board with the command parameters of the industrial control computer and the signal feedback and action execution of the controlled hardware.

[0006] Preferably, the controlled hardware includes a glue pump, a flow meter, and a valve. The controller controls the state of the glue pump and the flow meter, and the controller controls the state of the valve by controlling the valve control point.

[0007] Preferably, the controller master includes a master communication module, a master storage module, a master display module, and a master alarm module. The main communication module is used to realize the interaction of parameter commands and control commands between the industrial control computer and the controller slave; The main storage module is used to store control commands and parameter commands; The main display module displays the control parameters and current status of the glue pump, as well as the status of the valves and the values ​​of the flow meter, through an LED screen; The main alarm module is used to provide alarm prompts when the controlled hardware is in an abnormal state.

[0008] Preferably, the controller slave includes a slave communication module, a slave reset module, a slave drive module, and a slave query module. The communication module completes communication with the controller master and controlled hardware; The drive module controls the speed of the glue pump through PWM at different frequencies, and controls the valve by combining the high and low levels of the pins with the valve control point. The reset module performs a reset operation based on the pump's Home switch status, the valve's switch status, and the flow meter's count. The query module is used to query the current status of the controlled hardware.

[0009] Preferably, the multi-channel glue pump controller further includes a motor driver, a display screen, a controller master switch, a controller power interface, a power interface for powering the controlled hardware, and a signal interface for receiving and outputting signals from the controlled hardware.

[0010] A control method for a multi-channel glue pump control system in a wet-process equipment includes the following steps. S1: After the multi-channel glue pump controller is powered on and initialized, it waits for parameter commands from the industrial control computer in a loop. After receiving the parameter command, it first parses the parameter command. If the parameter command is parsed incorrectly, it returns to continue waiting for parameter commands. If the parameter command is parsed successfully, it is displayed and stored on the LED screen, and the control command is distributed to each controller slave through the communication module. S2: The controller parses and verifies the control commands from the slave controller, and executes drive, query or reset functions according to the control commands; S3: If it is a query function, it returns the status information of the glue pump, flow meter, and valve switch; if it is a reset function, it resets the hardware such as the glue pump, flow meter, and valve switch; if it is a drive function, it sets the PWM frequency according to the speed, and controls the stopping of the PWM wave and the closing of the valve according to the preset glue quantity and flow meter value; finally, it determines whether to generate an alarm prompt based on the execution result status.

[0011] The beneficial effects of this invention are as follows: This application implements multi-pump single-control in a master-slave mode based on multiple microcontrollers, reducing the need for equipment interfaces and effectively meeting the multi-channel control requirements of multi-unit modules. At the same time, the microcontroller controlling the pump can convert the preset speed into the frequency of PWM waves to drive the glue pump. The number of PWM waves can be precisely adjusted based on the expected glue volume and real-time data from the flow meter. In addition, the valve can be switched on and off by combining the high and low levels of the pins, ensuring high-precision supply and real-time control of glue volume in multiple glue channels. Attached Figure Description

[0012] Figure 1 This is a structural diagram of a multi-channel glue pump controller system as an example. Figure 2 This is a structural diagram of the main control board of the multi-channel glue pump controller in an embodiment; Figure 3 The control flowchart for the multi-adhesive circuit controller; Figure 4 This is a hardware structure diagram of a multi-channel glue pump controller for an example embodiment; Figure 5 The circuit diagram of the controller's main control minimum control unit is shown in the example. Figure 6 This is a power supply circuit diagram for an example; Figure 7 This is a circuit diagram of the encoder input receiver for an embodiment; Figure 8 This is a temperature alarm circuit diagram for an example. Figure 9 This is a control circuit diagram of the glue pump for an example.

[0013] Reference numerals in the attached diagram: 1. Motor driver; 2. Display screen; 3. Controller main switch; 4. Controller power interface; 5. Power interface; 6. Signal interface; 7. Main control board. Detailed Implementation

[0014] The following description is merely a preferred embodiment of the present invention, and the scope of protection is not limited to this embodiment. All technical solutions falling within the scope of the present invention should be protected by the present invention. Identical components are indicated by the same reference numerals.

[0015] A multi-channel glue pump control system for wet-process equipment includes an industrial computer, several multi-channel glue pump controllers, and several controlled hardware components. Data transmission between the industrial computer and the multiple multi-channel glue pump controllers is achieved via serial communication. In this design, the controlled hardware includes glue pumps, flow meters, and valves; other controlled hardware can be added according to actual needs. The multi-channel glue pump controller, based on embedded software on the main control board 7, combines command parameters from the industrial computer with signal feedback and action execution from the controlled hardware to achieve real-time coordinated driving of multiple pumps under one control.

[0016] The multi-channel glue pump controller includes a main control board 7, a motor driver 1, a display screen 2, a controller main switch 3, a controller power interface 4, a power interface 5 for powering the controlled hardware, and a signal interface 6 for receiving and outputting signals from the controlled hardware. The received and output signals from the controlled hardware mainly include glue pump control pulses, glue pump status, valve status, and external flow meter counting results.

[0017] The main control board 7 includes a master controller and several slave controllers. The number of controlled hardware devices is the same as the number of slave controllers, and each slave controller controls a group of controlled hardware devices. A simplified control method involves the industrial computer sending parameter commands. The master controller of each of the multiple glue pump controllers receives the parameter commands, parses them, and, if correct, sends control commands to the slave controllers. Upon receiving the control commands, the slave controllers parse them and, based on the parsing, perform specific operations on the glue pumps, valves, and flow meters within the controlled hardware.

[0018] The controller master unit includes a main communication module, a main storage module, a main display module, and a main alarm module. The main communication module is used to realize the interaction of parameter commands and control commands between the industrial computer and the controller slave unit. The main storage module is used to store control commands and parameter commands. The main display module displays the control parameters and current status of the glue pump, as well as the status of the valves and the values ​​of the flow meters, through an LED screen. The main alarm module is used to provide alarm prompts when the controlled hardware is in an abnormal state.

[0019] The controller controls the status of the glue pump and flow meter, and controls the valve status through control valve control points. The controller slave includes a communication module, a reset module, a drive module, and a query module. The communication module facilitates communication with the controller master and the controlled hardware. The drive module drives the glue pump at different frequencies using PWM to control its speed, and simultaneously controls the valves through high and low levels on pins combined with the control points. The reset module performs a reset operation based on the pump's home switch status, the valve's on / off status, and the flow meter's count. The query module is used to query the current status of the controlled hardware.

[0020] The specific control method of the system in this application is as follows: S1: After the multi-channel glue pump controller is powered on and initialized, it waits for parameter commands from the industrial control computer in a loop. After receiving the parameter command, it first parses the parameter command. If the parameter command is parsed incorrectly, it returns to continue waiting for parameter commands. If the parameter command is parsed successfully, it is displayed and stored on the LED screen, and the control command is distributed to each controller slave through the communication module. S2: The controller parses and verifies the control commands from the slave controller, and executes drive, query or reset functions according to the control commands; S3: If it is a query function, it returns the status information of the glue pump, flow meter, and valve switch; if it is a reset function, it resets the hardware such as the glue pump, flow meter, and valve switch; if it is a drive function, it sets the PWM frequency according to the speed, and controls the stopping of the PWM wave and the closing of the valve according to the preset glue quantity and flow meter value; finally, it determines whether to generate an alarm prompt based on the execution result status.

[0021] This multi-channel glue pump controller for wet-process equipment implements multi-pump single-control in a master-slave mode based on multiple microcontrollers, reducing equipment interface requirements and effectively meeting the multi-channel control needs of multi-unit modules. The slave microcontroller can convert the preset speed into PWM wave frequency to drive the glue pump. The number of PWM waves can be precisely adjusted based on the expected glue volume and real-time data from the flow meter. Furthermore, the controller uses pin level adjustments to control valve switching, ensuring high-precision glue supply and real-time control across multiple glue channels. The specific embodiments described above further illustrate the technical problems, technical solutions, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-channel glue pump control system for wet process equipment, characterized in that: include An industrial computer, the industrial computer is used to issue parameter commands; A plurality of multi-channel glue pump controllers, wherein the industrial computer and the plurality of multi-channel glue pump controllers realize data transmission based on serial port communication; the main control board (7) of the multi-channel glue pump controller comprises a controller master and a plurality of controller slaves, the controller master is used to issue control commands, and the plurality of controller slaves receive control commands; A plurality of controlled hardware, the number of the controlled hardware is the same as the number of the controller slaves, the plurality of the controller slaves correspond to the plurality of controlled hardwares one by one, and the controller slaves control the controlled hardware based on serial port communication and pin point control; The multi-channel glue pump controller realizes real-time coordinated driving of multiple pumps with one control based on the embedded software of the main control board (7) combined with the command parameters of the industrial computer and the signal feedback and action execution of the controlled hardware.

2. A multi-channel glue pump control system for wet process equipment according to claim 1, characterized in that: The controlled hardware includes a glue pump, a flow meter and a valve. The controller controls the states of the glue pump and the flow meter, and the controller controls the valve state by controlling the valve control point.

3. A multi-channel glue pump control system for wet process equipment according to claim 2, characterized in that: The controller main control includes a main communication module, a main storage module, a main display module and a main alarm module. The main communication module is used to realize the interaction of parameter commands and control commands between the industrial computer and the slave controller; The main storage module is used for storing control commands and parameter commands; The main display module displays the control parameters and current status of the glue pump, as well as the status of the valve and the value of the flow meter through the LED screen; The main alarm module is used to implement an alarm prompt when the controlled hardware is in an abnormal state.

4. A multi-channel glue pump control system for wet process equipment according to claim 3, characterized in that: The controller slave includes a slave communication module, a slave reset module, a slave drive module and a slave query module. The slave communication module completes the communication with the controller master and the controlled hardware; The slave drive module drives the glue pump by speed control through PWM of different frequencies, and controls the valve by combining the high and low levels of the pin with the valve control point; The slave reset module performs a reset operation according to the Home switch state of the pump, the switch state of the valve, and the counted amount of the flow meter; The slave query module is used to query the current status of the controlled hardware.

5. The multi-channel glue pump control system for wet process equipment according to claim 1, characterized in that: The multi-channel glue pump controller also includes a motor driver (1), a display screen (2), a controller main switch (3), a controller power interface (4), a power interface (5) for powering the controlled hardware, and a signal interface (6) for receiving and outputting signals from the controlled hardware.

6. The control method of a multi-channel glue pump control system for wet process equipment according to claim 5, characterized in that: The following steps are included: S1: After the multi-channel glue pump controller is powered on and initialized, it cyclically waits for the parameter command from the industrial computer. After receiving the parameter command, it first parses the parameter command. If the parameter command parsing error occurs, it returns to continue waiting for the parameter command. If the parameter command is parsed successfully, it will be displayed and stored on the LED screen, and the control command will be distributed to each slave controller through the communication module; S2: The slave controller parses and verifies the control command, and executes the drive, query or reset function according to the control command; S3: If it is a query function, the status information of the glue pump, flow meter and valve switch is returned; if it is a reset function, the hardware such as the glue pump, flow meter and valve switch is reset; if it is a drive function, the PWM frequency is set according to the speed, and the PWM wave is stopped and the valve is closed according to the preset glue amount and the flow meter value; finally, according to the execution result status, it is determined whether an alarm prompt is generated.

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