Atmosphere sampling detection device and detection method

Abstract

The invention relates to the field of atmosphere sampling detection, in particular to an atmosphere sampling detection device and a detection method.The detection device comprises a sampling box, a gas release box, a sample gas box, a puncture assembly, a vacuumizing device and a mass spectrum testing device.A sampling cavity is formed in the sampling box; a first air hole and a second air hole which are respectively communicated with the sampling cavity are formed in the side wall of the sampling box; the gas release box and the sample gas box can be respectively placed in the sampling cavity, and a gas release cavity is formed in the gas release box and is used for placing a to-be-tested piece; a sample gas cavity is formed in the sample gas box, the volume of the sample gas cavity is equal to that of the gas release cavity, and the sample gas cavity is used for filling standard gas; the puncture assembly is used for destroying the airtightness of the gas release box or the sample gas box to release the gas in the gas release cavity or the sample gas cavity into the sampling cavity; the vacuumizing device is communicated with the first air hole; the mass spectrum testing device is communicated with the second air hole. According to the detection method, the measurement result of the device can be calibrated based on the components of the standard gas, so that the detection precision of the device is improved.

Description

Technical Field

[0001] The present application relates to the technical field of atmosphere sampling and detection, and in particular to an atmosphere sampling and detection device and a detection method. Background Art

[0002] The accumulation method is one of the commonly used methods for testing the material degassing rate. The test method is to place the material to be tested in a sealed cavity and let it stand for a certain period of time. During the standing period, it is baked at a constant temperature or controlled in different temperature ranges as needed. The gas in the packaging cavity is then taken out by puncture or a special outlet valve. The gas analysis system such as mass spectrometry or chromatography is used for detection, and the changes in gas composition and concentration are observed to verify the degassing characteristics of the material under different environments.

[0003] For some specific needs, such as electronic components, microwave components and other electronic packaging devices, which are small in size and release gas slowly, when studying the release characteristics of their internal materials, it is necessary to place the electronic component materials in a standard test sealed box for a long time accumulation, and then puncture the sealed box with a puncture device to lead out the internal gas. Therefore, the puncture device is one of the key equipment in the material release test process.

[0004] Currently, since the mass spectrometry test system is not a standard instrument, there are errors in the gas composition detection results based on the mass spectrometry test system. Summary of the invention

[0005] The present application provides an atmosphere sampling detection device and a detection method, which are used to solve the problem of errors in gas composition detection results based on mass spectrometry testing systems in the prior art.

[0006] In one aspect, the present application provides an atmosphere sampling and detection device, comprising:

[0007] A sampling box, wherein a sampling cavity is formed inside the sampling box, and a first air hole and a second air hole are opened on the side wall of the sampling box, and the first air hole and the second air hole are respectively connected to the sampling cavity;

[0008] A gas release box can be placed in the sampling cavity, and the gas release box has a gas release cavity inside, and the gas release cavity is used to place the test piece;

[0009] The sample gas box can be placed in the sampling cavity. The sample gas box has a sample gas cavity inside. The volume of the sample gas cavity is equal to the volume of the gas release cavity. The sample gas cavity is used to fill the standard gas.

[0010] A puncture assembly, part of which is sealed and connected to the side wall of the sampling box, and is used to destroy the air tightness of the gas release box or the sample gas box to release the gas in the gas release cavity or the sample gas cavity into the sampling cavity;

[0011] A vacuum pump connected to the first air hole;

[0012] The mass spectrometer testing device is connected to the second air hole.

[0013] In a possible design, the side wall of the sampling box is provided with a guide cylinder, and the puncture assembly includes:

[0014] The guide shaft is arranged in the guide cylinder, the outer wall of the guide shaft is slidably matched with the inner wall of the guide cylinder, and the guide shaft can move along its own axial direction in the guide cylinder;

[0015] The sealing ring is sleeved on the outer wall of the guide shaft, and the sealing ring is respectively matched with the outer wall of the guide shaft and the inner wall of the guide cylinder in a clearance;

[0016] The puncture needle is arranged at the end of the guide shaft located in the sampling cavity. The puncture needle can puncture the gas release box or the sample gas box under the drive of the guide shaft.

[0017] In a possible design, the puncture assembly further includes:

[0018] A support base, installed on the sampling box;

[0019] The fixing plate is installed on the supporting seat. The fixing plate is provided with a threaded hole. The guide shaft is passed through the threaded hole. The guide shaft has a threaded section. The threaded section is threadedly matched with the threaded hole.

[0020] In a possible design, the puncture assembly further includes a limiting nut, which is sleeved on the threaded segment.

[0021] In a possible design, the puncture needle is detachably connected to the guide shaft.

[0022] In a possible design, the sampling box includes a first box body and a second box body, the first box body and the second box body are detachably connected, and a sealing gasket is provided on the connection surface between the first box body and the second box body.

[0023] In one possible design, it also includes:

[0024] a first gas path, one end of which is connected to the first air hole, and the other end of which is connected to the vacuum pumping device, and a first vacuum valve is provided on the first gas path;

[0025] a second gas path, one end of the second gas path being connected to the second air hole, and the other end being connected to the mass spectrometry testing device, and a second vacuum valve being arranged on the first gas path;

[0026] The third gas path has one end connected to the second air hole and the other end connected to the mass spectrometer testing device. A vacuum fine-tuning valve is arranged on the third gas path.

[0027] In a possible design, a third air hole is further provided on the sampling box, and the third air hole is used to communicate with a full-range vacuum gauge.

[0028] On the other hand, the present application also provides an atmosphere sampling detection method, the detection method comprising:

[0029] Detecting the initial gas composition of the sampling chamber when it is in an empty state;

[0030] Putting a gas release box containing the object to be tested into the sampling cavity, destroying the gas release box, and detecting the gas components to be tested in the sampling cavity;

[0031] Put a sample gas box into the sampling cavity, destroy the sample gas box, and then detect the sample gas components in the sampling cavity;

[0032] The concentration of the gas to be measured is determined according to the initial gas composition, the gas composition to be measured, the sample gas composition and the sample gas concentration.

[0033] In one possible design, the detection method includes:

[0034] The sampling chamber is evacuated by a vacuum device to make the pressure in the sampling chamber reach a preset pressure, and the ion flow of the initial gas in the sampling chamber is detected by a mass spectrometer when the sampling chamber is in an empty state;

[0035] A gas release box containing the test piece is placed in the sampling cavity, and a vacuum device is used to evacuate the sampling cavity so that the pressure in the sampling cavity reaches a preset pressure. After the gas release box is destroyed, a mass spectrometer is used to detect the ion flow of the gas to be tested in the sampling cavity;

[0036] A sample gas box is placed in the sampling cavity, and a vacuum device is used to evacuate the sampling cavity so that the pressure in the sampling cavity reaches a preset pressure. After the sample gas box is destroyed, a mass spectrometer test device is used to detect the ion flow of the sample gas in the sampling cavity;

[0037] The concentration of the gas to be measured is determined according to the ion flow of the initial gas, the ion flow of the gas to be measured, the ion flow of the sample gas and the concentration of the sample gas.

[0038] The beneficial effects of this application are as follows:

[0039] The atmosphere sampling and detection device of the present application, by arranging a gas release box in the sampling cavity, after the puncture component punctures the gas release box, the gas to be measured in the gas release box can be released into the sampling cavity, thereby measuring the composition of the gas to be measured; by arranging a sample gas box in the sampling cavity, after the puncture component punctures the sample gas box, the standard gas in the sample gas box can be released into the sampling cavity, thereby measuring the composition of the standard gas. Since the concentration of the standard gas is certain, the measurement result of the present device can be calibrated based on the composition of the standard gas, thereby improving the accuracy of the concentration of the gas to be measured measured by the present device.

[0040] The atmosphere sampling and detection method provided in the present application can effectively improve the accuracy of the measured concentration of the gas to be measured by measuring the components of the gas to be measured and the standard gas under the same working conditions, and calibrating the measurement results using the standard concentration of the standard gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] Figure 1 A schematic diagram of the structure of an atmosphere sampling and detection device provided in an embodiment of the present application;

[0043] Figure 2 A schematic diagram of the structure of a sampling box and a puncture assembly of an atmosphere sampling and detection device provided in an embodiment of the present application;

[0044] Figure 3 A schematic diagram of the internal structure of a sampling box and a puncture assembly of an atmosphere sampling and detection device provided in an embodiment of the present application;

[0045] Figure 4 A schematic diagram of the structure of the guide shaft of the atmosphere sampling and detection device provided in an embodiment of the present application.

[0046] Reference numerals:

[0047] 100, sampling box; 110, first box body; 120, second box body; 130, sampling cavity; 140, first air hole; 150, second air hole; 160, third air hole; 210, gas release box; 220, sample gas box; 300, vacuum device; 400, mass spectrometer testing device; 510, guide cylinder; 520, guide shaft; 521, mounting groove; 522, adjustment hole; 530, sealing ring; 540, puncture needle; 550, support seat; 560, fixing plate; 570, limiting nut; 610, first gas circuit; 620, first vacuum valve; 630, second gas circuit; 640, second vacuum valve; 650, third gas circuit; 660, vacuum fine-tuning valve; 700, sealing gasket; 800, screw; 900, full-scale vacuum gauge. DETAILED DESCRIPTION

[0048] The technical solution of the present application will be described clearly and completely below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0049] Combine the following Figure 1-Figure 4 , describing the atmosphere sampling and detection device provided in the embodiments of the present application.

[0050] Reference Figure 1 As shown, the atmosphere sampling detection device includes a sampling box 100, a gas release box 210, a sample gas box 220, a puncture assembly, a vacuum device 300 and a mass spectrometer testing device 400. The sampling box 100 is provided with a sampling cavity 130. The side wall of the sampling box 100 is provided with a first air hole 140 and a second air hole 150. The first air hole 140 and the second air hole 150 are respectively connected to the sampling cavity 130. The gas release box 210 can be placed in the sampling cavity 130. The gas release box 210 has a gas release cavity inside, which is used to place the sample gas to be sampled. Test piece; the sample gas box 220 can be placed in the sampling cavity 130, and the interior of the sample gas box 220 has a sample gas cavity, the volume of the sample gas cavity is equal to the volume of the gas release cavity, and the sample gas cavity is used to fill the standard gas; part of the puncture component is sealed and connected to the side wall of the sampling box 100, and the puncture component is used to destroy the airtightness of the gas release box 210 or the sample gas box 220 to release the gas in the gas release cavity or the sample gas cavity into the sampling cavity 130; the vacuum device 300 is connected to the first air hole 140; the mass spectrometer testing device 400 is connected to the second air hole 150.

[0051] By utilizing the technical solution provided in the above-mentioned embodiment, by setting a gas release box 210 in the sampling cavity 130, after the puncture assembly punctures the gas release box 210, the gas to be measured in the gas release box 210 can be released into the sampling cavity 130, thereby measuring the composition of the gas to be measured; by setting a sample gas box 220 in the sampling cavity 130, after the puncture assembly punctures the sample gas box 220, the standard gas in the sample gas box 220 can be released into the sampling cavity 130, thereby measuring the composition of the standard gas. Since the concentration of the standard gas is certain, the measurement result of the device can be calibrated based on the composition of the standard gas, thereby improving the accuracy of the concentration of the gas to be measured measured by the device.

[0052] Reference Figure 2 , Figure 3As shown, in some embodiments provided in the present application, a guide cylinder 510 is provided on the side wall of the sampling box 100, the interior of the guide cylinder 510 is connected to the sampling cavity 130, and part of the puncture assembly is provided inside the guide cylinder 510. Specifically, the puncture assembly includes a guide shaft 520, a sealing ring 530 and a puncture needle 540, part of the guide shaft 520 is provided in the guide cylinder 510, the outer wall of the guide shaft 520 is slidably matched with the inner wall of the guide cylinder 510, and the guide shaft 520 can move along its own axial direction in the guide cylinder 510; the sealing ring 530 is sleeved on the outer wall of the guide shaft 520, and the sealing ring 530 is respectively matched with the outer wall of the guide shaft 520 and the inner wall of the guide cylinder 510 in a clearance; the puncture needle 540 is provided at the end of the guide shaft 520 located in the sampling cavity 130, and the puncture needle 540 can puncture the gas release box 210 or the sample gas box 220 under the drive of the guide shaft 520. In some of the specific embodiments, an annular groove is provided on the outer wall of the guide shaft 520, and the sealing ring 530 is sleeved in the annular groove. In this way, when the guide shaft 520 slides up and down along the inner wall of the guide cylinder 510, the sealing ring 530 can play a dynamic sealing role, so that the sampling cavity 130 does not leak when the guide shaft 520 moves, thereby ensuring the sealing of the sampling cavity 130 during the puncture process. In some specific embodiments, the puncture needle 540 is made of alloy tungsten steel, which can not only puncture conventional metal packaging boxes, but also plastic, ceramic, glass and other packaging boxes, and has a wide range of applications; in some specific embodiments, the puncture needle 540 is detachably connected to the guide shaft 520. For example, a mounting groove 521 extending along its axial direction is provided at the lower end of the guide shaft 520, and the puncture needle 540 is installed in the mounting groove 521. An adjustment hole 522 is provided at intervals on the side wall of the mounting groove 521. The puncture needle 540 is fixed by passing the clamping screw through the adjustment hole 522 and abutting against the puncture needle 540. By changing the installation position of the clamping screw, the length of the puncture needle 540 can be adjusted, so as to adapt to gas release boxes 210 or sample gas boxes 220 of different volumes and heights. By making the puncture needle 540 adopt a replaceable structure, the service life of the device can be extended.

[0053] Reference Figure 2As shown, in some specific embodiments, the puncture assembly further includes a support seat 550 and a fixing plate 560, the support seat 550 is mounted on the sampling box 100, the fixing plate 560 is mounted on the support seat 550, a threaded hole is provided on the fixing plate 560, the guide shaft 520 is penetrated in the threaded hole, the guide shaft 520 has a threaded section, and the threaded section is threadedly matched with the threaded hole. A top screw is provided at the upper end of the guide shaft 520, and the top screw can be screwed by a wrench. By applying a torque to the guide shaft 520, the puncture force is transmitted through the thread of the guide shaft 520, and a greater puncture force can be obtained, and the gas release box 210 or the sample gas box 220 can be easily punctured. In some specific embodiments, the lower end of the support seat 550 is fixed to the sampling box 100 by bolts, and the upper end of the support seat 550 has a square block. The fixing plate 560 is provided with a direction hole, and the square block can be inserted into the direction hole. Pin holes are also provided on the square block and the fixing plate 560, respectively. A pin shaft is provided in the pin hole, and the end of the pin shaft passes through the pin holes on the square block and the fixing plate 560 in turn, and a retaining spring groove is provided at the end of the pin shaft, and a retaining spring groove is sleeved with a retaining spring to realize the fixed connection between the fixing plate 560 and the support seat 550. In this way, the stability of the fixing plate 560 on the sampling box 100 can be guaranteed, and strong support can be provided for the rotation of the guide shaft 520 to ensure that the puncture needle 540 obtains greater puncture force.

[0054] Reference Figure 3 As shown, in some specific embodiments, the puncture assembly further includes a limit nut 570, which is sleeved on the threaded section. The limit nut 570 can control the movement stroke of the puncture needle 540, and when puncturing the gas release box 210 or the sample gas box 220 of different sizes, it can better prevent the puncture needle 540 from damaging the material in the gas release box 210 or the sample gas box 220 and the structure of the sampling box 100 due to over-stroke.

[0055] Reference Figure 3 As shown, in some specific embodiments, the sampling box 100 includes a first box body 110 and a second box body 120, the first box body 110 and the second box body 120 are detachably connected, and a sealing gasket 700 is provided on the connection surface between the first box body 110 and the second box body 120. Specifically, the first box body 110 and the second box body 120 are fixedly connected by screws, so that it is convenient to open the first box body 110 and the second box body 120, and take out or place the gas release box 210 or the sample gas box 220.

[0056] Reference Figure 1As shown, in some embodiments provided in the present application, the detection device further includes a first gas circuit 610, a second gas circuit 630 and a third gas circuit 650. One end of the first gas circuit 610 is connected to the first air hole 140, and the other end is connected to the vacuum pumping device 300. The first gas circuit 610 is provided with a first vacuum valve 620; one end of the second gas circuit 630 is connected to the second air hole 150, and the other end is connected to the mass spectrometer testing device 400. The first gas circuit 610 is provided with a second vacuum valve 640; one end of the third gas circuit 650 is connected to the second air hole 150, and the other end is connected to the mass spectrometer testing device 400. The third gas circuit 650 is provided with a vacuum fine-tuning valve 660. The sampling box 100 is also provided with a third air hole 160, which is used to communicate with the full-scale vacuum gauge 900. The first gas circuit 610, the second gas circuit 630 and the third gas circuit 650 respectively use metal bellows. The first vacuum valve 620 is used to isolate the vacuum pressure between the vacuum pumping device 300 and the sampling chamber 130. The vacuum fine-tuning valve 660 is used to control the flow into the mass spectrometer testing device 400 so that it meets the working pressure requirements of vacuum equipment such as mass spectrometers. The vacuum fine-tuning valve 660 can adjust the flow into the mass spectrometer detection device according to the pressure in the sampling chamber 130, which can not only ensure the consistency of the test process, but also achieve safety protection of the device. The second vacuum valve 640 is used for the mass spectrometer measurement device to quickly evacuate the sampling chamber and the metal bellows under abnormal conditions. The full-range vacuum gauge is used to monitor the pressure changes inside the sampling chamber, and provide a basis for judging the opening or closing of the vacuum pumping device 300 and the opening size of the vacuum fine-tuning valve 660. It should be noted that the mass spectrometer detection device requires that the vacuum pressure must be better than 0.01Pa (the pressure of the general mass spectrometer detection device is 10 -4 Pa to 10 -10 Pa), and the internal pressure of the sampling chamber 130 varies during the test, and the maximum pressure can reach 10 5 If the pressure of the mass spectrometer system is too high, the mass spectrometer and vacuum equipment may be damaged. Thus, by providing the first vacuum valve 620, the second vacuum valve 640 and the vacuum fine-tuning valve 660, the rough vacuum environment and the high vacuum or ultra-high vacuum environment can be isolated, so as to avoid the internal pressure of the sampling chamber 130 from rising sharply during the puncture of the test piece, thereby affecting or damaging the mass spectrometer testing device 400.

[0057] On the other hand, the present application also provides an atmosphere sampling detection method, the detection method comprising the following steps:

[0058] Step 1: Detecting the initial gas composition of the sampling chamber 130 when it is in an unloaded state; in some specific embodiments, step 1 is: using a vacuum pumping device 300 to evacuate the sampling chamber 130 so that the pressure in the sampling chamber 130 reaches a preset pressure, and using a mass spectrometer testing device 400 to detect the ion flow of the initial gas in the sampling chamber 130 when it is in an unloaded state;

[0059] Step 2: Place the gas release box 210 containing the object to be tested into the sampling chamber 130, and after destroying the gas release box 210, detect the gas components to be tested in the sampling chamber 130; In some specific embodiments, step 2 is: place the gas release box 210 containing the object to be tested into the sampling chamber 130, use the vacuum device 300 to evacuate the sampling chamber 130, so that the pressure in the sampling chamber 130 reaches a preset pressure, and after destroying the gas release box 210, use the mass spectrometer testing device 400 to detect the ion flow of the gas to be tested in the sampling chamber 130;

[0060] Step three, placing the sample gas box 220 into the sampling cavity 130, and after destroying the sample gas box 220, detecting the sample gas components in the sampling cavity 130; in some specific embodiments, step three is: placing the sample gas box 220 into the sampling cavity 130, using the vacuum pumping device 300 to vacuum the sampling cavity 130, so that the pressure in the sampling cavity 130 reaches a preset pressure, and after destroying the sample gas box 220, using the mass spectrometer testing device 400 to detect the ion flow of the sample gas in the sampling cavity 130;

[0061] Step 4: Determine the concentration of the gas to be measured based on the initial gas composition, the gas composition to be measured, the sample gas composition and the sample gas concentration. In some specific embodiments, step 4 is: determine the concentration of the gas to be measured based on the ion flow of the initial gas, the ion flow of the gas to be measured, the ion flow of the sample gas and the sample gas concentration.

[0062] In some specific embodiments, the specific operations of the atmosphere sampling detection method are as follows:

[0063] In the first step, after the system is assembled and integrated, the first vacuum valve 620 is opened, the vacuum pumping device 300, the mass spectrometer test device 400 and the full-range vacuum gauge 900 are started, and when the vacuum pressure in the sampling chamber 130 is stable or reaches the limit pressure value, the second vacuum valve 640 or the vacuum fine-tuning valve 660 is opened, and the mass spectrometer test device 400 is used to detect the gas composition and partial pressure (denoted as I i0 , i is a certain gas component); close the first vacuum valve 620, the second vacuum valve 640 and the vacuum fine-tuning valve 660, and close the vacuum pumping device 300 and the full-range vacuum gauge 900;

[0064] The second step is to remove the screws, open the sampling chamber 130 and put the gas release box 210 to be tested, install the screws and seal the sampling chamber 130; open the first vacuum valve 620, start the vacuum pumping device 300 and the full-scale vacuum gauge 900, and when the vacuum pressure in the sampling chamber 130 is stable, adjust the limit nut 570, use a wrench to turn the guide shaft 520 clockwise to drive the puncture needle 540 to pierce the gas release box 210, and the gas to be tested inside the gas release box 210 is released. After the pressure is stable, open the vacuum fine-tuning valve 660 and adjust it to a suitable size (the scale position of the fine-tuning valve is marked as A); use the mass spectrometer detection device 400 to detect the gas composition and partial pressure (marked as I i1 , i is a certain gas component); twist the guide shaft 520 counterclockwise with a wrench to return the puncture needle 540 upward to its original position, and close the first vacuum valve 620, the vacuum pumping device 300, the vacuum fine-tuning valve 660 and the full-range vacuum gauge 900;

[0065] In the third step, remove the screws, open the sampling chamber 130 and place a sample gas box 220 of the same volume as the gas release box 210. The sample gas box 220 is filled with a standard gas of a certain or more gas components with a standard concentration (the concentration value is recorded as Q i标 ), the base gas of the standard gas can be high-purity nitrogen; install the screws and seal the sampling chamber 130; open the first vacuum valve 620, start the vacuum pumping device 300 and the full-range vacuum gauge 900, and when the vacuum pressure in the sampling chamber 130 is stable, adjust the limit nut 570, use a wrench to turn the guide shaft 520 clockwise to drive the guide shaft 520 and the puncture needle 540 to pierce the sample gas box 220, and the gas inside the sample gas box 220 is released. After the pressure is stable, open the vacuum fine-tuning valve 660 and adjust it to the scale position A; use the mass spectrometer detection device 400 to detect the gas composition and partial pressure (denoted as I i标 , i is a certain gas component);

[0066] The fourth step is to calculate the concentration (Q i ), the calculation formula is as follows:

[0067]

[0068] In formula (1):

[0069] Q i is the concentration of a certain gas component in the gas release box 210 to be measured, and the unit is dimensionless, or percentage or ppm / ppb;

[0070] I i0 It is the ion flow of a certain gas component tested by the mass spectrometer testing device 400 in the no-load environment of the sampling chamber 130, and the unit is A;

[0071] I i1 After the puncture needle 540 punctures the gas release box 210, the mass spectrometer testing device 400 tests the ion flow of a certain gas component, the unit is A;

[0072] I i标 After the puncture needle 540 punctures the sample gas box 220, the mass spectrometer testing device 400 tests the ion flow of a certain gas component, the unit is A;

[0073] Q i标 It is the concentration of the standard sample gas (a certain gas component) in the sample gas box 220, and the unit is dimensionless, or percentage or ppm / ppb.

[0074] Among them, the first step is to obtain the background signal of the sampling chamber 130, that is, the values ​​of various atmospheres in the sampling chamber 130 under the background environment; the second step is to obtain the signal of the test piece in the gas release box 210, that is, the values ​​of various components of the internal atmosphere after piercing the gas release box 210 under normal test conditions; the third step is to obtain the signal of the standard gas in the gas release box 210, that is, the values ​​of various components of the internal atmosphere after piercing the sample gas box 220 under normal test conditions; the fourth step is to calibrate and convert the signal value of the sample by testing the gas of known standard concentration. In this way, the gas to be tested can be calibrated by the gas of standard concentration, which can improve the accuracy of the test.

[0075] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0076] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0077] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0078] In the present application, the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0079] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. An atmosphere sampling and detection device, characterized in that: include: A sampling box, wherein a sampling cavity is formed inside the sampling box, and a first air hole and a second air hole are opened on the side wall of the sampling box, and the first air hole and the second air hole are respectively connected to the sampling cavity; A gas release box, which can be placed in the sampling cavity, wherein the gas release box has a gas release cavity inside, and the gas release cavity is used to place the test piece; A sample gas box, which can be placed in the sampling cavity, wherein the sample gas box has a sample gas cavity inside, the volume of the sample gas cavity is equal to the volume of the gas release cavity, and the sample gas cavity is used to be filled with standard gas; A puncture assembly, part of which is sealed and connected to the side wall of the sampling box, and the puncture assembly is used to destroy the air tightness of the gas release box or the sample gas box to release the gas in the gas release cavity or the sample gas cavity into the sampling cavity; A vacuum device, connected to the first air hole; A mass spectrometry testing device is connected to the second air hole.

2. The atmosphere sampling and detection device according to claim 1, characterized in that: The side wall of the sampling box is provided with a guide cylinder, and the puncture assembly comprises: A guide shaft is disposed in the guide cylinder, the outer wall of the guide shaft is slidably matched with the inner wall of the guide cylinder, and the guide shaft can move along its own axial direction in the guide cylinder; A sealing ring is sleeved on the outer wall of the guide shaft, and the sealing ring is respectively matched with the outer wall of the guide shaft and the inner wall of the guide cylinder in a clearance; The puncture needle is arranged at the end of the guide shaft located in the sampling cavity. The puncture needle can puncture the gas release box or the sample gas box under the drive of the guide shaft.

3. The atmosphere sampling and detection device according to claim 2, characterized in that: The puncture assembly also includes: A support base, mounted on the sampling box; A fixing plate is installed on the support seat, a threaded hole is opened on the fixing plate, the guide shaft is passed through the threaded hole, and the guide shaft has a threaded section, and the threaded section is threadedly matched with the threaded hole.

4. The atmosphere sampling and detection device according to claim 3, characterized in that: The puncture assembly also includes a limiting nut, and the limiting nut is sleeved on the threaded segment.

5. The atmosphere sampling and detection device according to claim 2, characterized in that: The puncture needle is detachably connected to the guide shaft.

6. The atmosphere sampling and detection device according to any one of claims 1 to 5, characterized in that: The sampling box includes a first box body and a second box body, the first box body and the second box body are detachably connected, and a sealing gasket is arranged on the connection surface between the first box body and the second box body.

7. The atmosphere sampling and detection device according to any one of claims 1 to 5, characterized in that: Also includes: a first gas path, one end of which is connected to the first air hole, and the other end of which is connected to the vacuum device, and a first vacuum valve is provided on the first gas path; a second gas path, one end of the second gas path being in communication with the second air hole, and the other end of the second gas path being in communication with the mass spectrometry testing device, and a second vacuum valve being disposed on the first gas path; A third gas path, one end of which is connected to the second air hole, and the other end of which is connected to the mass spectrometry testing device, and a vacuum fine-tuning valve is provided on the third gas path.

8. The atmosphere sampling and detection device according to any one of claims 1 to 5, characterized in that: The sampling box is also provided with a third air hole, and the third air hole is used to communicate with the full-range vacuum gauge.

9. An atmosphere sampling and detection method, characterized in that: include: Detecting the initial gas composition of the sampling chamber when it is in an empty state; Putting a gas release box containing a test object into the sampling cavity, and detecting the gas components to be tested in the sampling cavity after destroying the gas release box; Putting a sample gas box into the sampling cavity, and detecting the sample gas components in the sampling cavity after destroying the sample gas box; The concentration of the gas to be measured is determined according to the initial gas composition, the gas composition to be measured, the sample gas composition and the sample gas concentration.

10. The atmosphere sampling and detection method according to claim 9, characterized in that: include: The sampling chamber is evacuated by a vacuum pump so that the pressure in the sampling chamber reaches a preset pressure, and a mass spectrometer is used to detect the ion flow of the initial gas in the sampling chamber when the sampling chamber is in an empty state; Putting a gas release box containing a test piece into the sampling cavity, using a vacuum pump to evacuate the sampling cavity so that the pressure in the sampling cavity reaches a preset pressure, destroying the gas release box, and using a mass spectrometer to detect the ion flow of the gas to be tested in the sampling cavity; A sample gas box is placed in the sampling cavity, and a vacuum device is used to evacuate the sampling cavity so that the pressure in the sampling cavity reaches a preset pressure. After the sample gas box is destroyed, a mass spectrometer test device is used to detect the ion flow of the sample gas in the sampling cavity; The concentration of the gas to be measured is determined according to the ion flow of the initial gas, the ion flow of the gas to be measured, the ion flow of the sample gas, and the concentration of the sample gas.

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