Insulation and voltage resistance test equipment and method

Abstract

The invention relates to the technical field of integrated circuits, in particular to insulation and voltage resistance testing equipment and method. The insulation and voltage resistance testing equipment can be applied to insulation and voltage resistance testing of a vacuum electrode and comprises an equipment body, various flange interfaces and various flange covers matched with the various flange interfaces. The flange connectors are distributed on the circumferential outer surface of the equipment body, and a containing cavity is formed in the equipment body and communicates with the outside atmosphere through the flange connectors. The outer surface of the equipment body is provided with a transparent observation window corresponding to the accommodating cavity, the flange interface can be used for being in sealed connection with an external to-be-tested part and / or an external vacuum pump, at least one flange interface can be used for being connected with an external vacuum electrode, the flange interface is detachably connected with the flange cover, and the flange cover seals the flange interface when covering the flange interface. The insulation and voltage resistance test method has the same beneficial effects as insulation and voltage resistance test equipment.

Description

[Technical field]

[0001] The present invention relates to the technical field of integrated circuits, and in particular to an insulation withstand voltage testing device and method. [Background technology]

[0002] In recent years, the rapid development of the integrated circuit industry has prompted higher requirements on the process and technology of key components in scanning electron microscopes. Among them, vacuum electrodes are used more frequently in scanning electron microscopes, and there are many types of research and development verifications with high frequency. The requirements for the insulation withstand voltage performance of vacuum electrodes are also getting higher and higher.

[0003] The function of the vacuum electrode is to introduce the voltage / current / power electrical signal into the vacuum cavity. According to the process and technical requirements of the SEM, the voltage that the vacuum electrode bears ranges from a few volts to tens of kilovolts. With the rapid development of SEM technology, the performance requirements of the integrated circuit manufacturing factories and workshops (Fabrication, referred to as FAB) for SEM are becoming more and more stringent, and the update and iteration of key components are becoming more and more frequent. As a component that is used more frequently in SEM, the vacuum electrode has more types and frequencies of R&D verification in order to meet the higher insulation withstand voltage performance requirements.

[0004] Since there is no insulation withstand voltage test equipment specifically suitable for vacuum electrodes on the market, the test efficiency is low and cannot meet the higher insulation withstand voltage performance requirements after updates and iterations; the existing insulation withstand voltage test method for vacuum electrodes is to install the vacuum electrode to be tested on the vacuum chamber of the assembled scanning electron microscope module, which will result in the completed scanning electron microscope module being unable to flow to the next process for process testing on time, resources being seriously occupied, and the yield of the vacuum electrode will also be affected. [Summary of the invention]

[0005] In order to solve the technical problems that the existing vacuum electrode insulation withstand voltage test method has low testing efficiency, serious resource occupation, and cannot meet the higher requirements of insulation withstand voltage performance after updates and iterations, thereby affecting the yield of vacuum electrodes, the present invention provides an insulation withstand voltage test device and method.

[0006] The solution to the technical problem of the present invention is to provide an insulation withstand voltage test device, which can be applied to the insulation withstand voltage test of a vacuum electrode. The insulation withstand voltage test device includes a device body, a plurality of flange interfaces, and a plurality of flange covers adapted to each of the flange interfaces;

[0007] The flange interface is distributed on the circumferential outer surface of the equipment body, and a receiving cavity is provided in the equipment body, and the receiving cavity is connected to the outside atmosphere through the flange interface;

[0008] The outer surface of the equipment body is provided with a transparent observation window corresponding to the accommodating cavity, the flange interface can be used to seal and connect with an external part to be tested and / or an external vacuum pump, at least one of the flange interfaces can be used to connect with an external vacuum electrode, the flange interface is detachably connected to the flange cover, and the flange cover closes the flange interface when it is set on the flange interface.

[0009] Preferably, the transparent observation window includes a coverable observation window body and a connecting flange, and the observation window body is detachably connected to one of the flange interfaces on the outer surface of the equipment body through the connecting flange; a first seal is provided between the connected connecting flange and the flange interface, and a second seal is provided between the coverable observation window body and the connecting flange.

[0010] Preferably, a locking end is correspondingly arranged at the same position on the outer side of the observation window body and the connecting flange, and a locking piece is provided on the locking end; the locking piece is detachably connected to the locking end to control the covering of the observation window body and the connecting flange.

[0011] Preferably, the insulation withstand voltage testing equipment further comprises at least one partition structure arranged in the accommodating cavity; a placement plane is provided on the partition structure, and the placement plane is arranged corresponding to the transparent observation window.

[0012] Preferably, the partition structure includes a fixing member, a connecting member, a support column and a partition, the fixing member is fixed to the bottom wall of the accommodating cavity, the support column is connected to the fixing member through one end of the fixing member away from the bottom wall of the accommodating cavity, the partition is located at one end of the support column away from the fixing member, the connecting member is connected to the support column through the partition to fix the partition to the support column, and the side of the partition facing away from the support column is the placement plane.

[0013] Preferably, there is a gap between the partition and the inner wall of the accommodating cavity.

[0014] Preferably, the insulation and voltage withstand testing equipment also includes an adapter flange plate installed on the outer surface of the equipment body, and the adapter flange plate is sealed and connected to one of the flange interfaces on the outer surface of the equipment body through the first seal; an adapter interface is provided on the adapter flange plate, and the adapter interface can be sealed by an external vacuum electrode or connected to an adapter flange plate adapted to the caliber of the adapter interface, and the first seal is also provided between adjacent adapter flange plates.

[0015] The present invention also provides an insulation withstand voltage test method, which is applied to the above insulation withstand voltage test equipment and comprises the following steps:

[0016] Provide a first part to be tested, a dry vacuum pump and a molecular pump, seal the first part to be tested to the flange interface or place it in the accommodating cavity, seal the dry vacuum pump and the molecular pump to different flange interfaces respectively, and seal the other flange interfaces connected to the outside atmosphere by the flange cover;

[0017] Turn on the dry vacuum pump to evacuate the containing chamber. When the air pressure in the containing chamber is E -1 When the molecular pump is turned on at 1000 Pa, the dry vacuum pump and the molecular pump are used together to evacuate the containing chamber;

[0018] A testing device is provided, and when the air pressure in the accommodating chamber reaches a preset value, an insulation withstand voltage test is performed on the first part to be tested: the testing device detects the voltage of the first part to be tested after a predetermined time, and if the voltage does not drop back to 0V, the insulation withstand voltage test of the first part to be tested is qualified.

[0019] Preferably, if the air pressure in the containing chamber reaches a preset value ≤ E -6 Pa, after the dry vacuum pump and the molecular pump jointly evacuate the containing chamber and before the air pressure in the containing chamber reaches a preset value, the following steps are also included:

[0020] Provide an ion pump, when the pressure of the containing chamber is E -4 Pa, the ion pump is turned on, and the containing chamber is evacuated by the dry vacuum pump, the molecular pump and the ion pump together.

[0021] Preferably, after performing the insulation withstand voltage test on the first part to be tested, the method further includes the following steps:

[0022] Cutting off the connection between the containing chamber and the molecular pump, the dry vacuum pump and the ion pump, introducing an inert gas into the containing chamber, and stopping introducing the inert gas when the air pressure of the containing chamber is equal to the external atmospheric pressure;

[0023] Providing a second part to be tested, taking out the first part to be tested that has passed the insulation withstand voltage test, and then sealingly connecting the second part to be tested to the flange interface or placing it in the accommodating cavity;

[0024] The accommodating chamber is restored to communication with the dry vacuum pump, the molecular pump and the ion pump in sequence, and when the air pressure in the accommodating chamber reaches a preset value, an insulation withstand voltage test is performed on the second part to be tested.

[0025] Compared with the prior art, the insulation withstand voltage test device and method provided by the present invention have the following advantages:

[0026] 1. The insulation withstand voltage test equipment provided in the embodiment of the present invention can be applied to the insulation withstand voltage test of the vacuum electrode, wherein the external parts to be tested include the vacuum electrode, and a variety of flange interfaces are distributed on the circumferential outer surface of the equipment body. Multiple external parts to be tested can be installed on the flange interfaces, and insulation withstand voltage tests can be performed on these external parts to be tested at the same time to improve the efficiency of the insulation withstand voltage test. These flange interfaces can be sealed and connected with the external vacuum pump and / or the external parts to be tested including the vacuum electrode. The flange interface type of the external vacuum electrode may be different from that of other external parts to be tested, and at least one flange interface has a caliber that is compatible with the vacuum electrode.

[0027] Furthermore, after the vacuum pump and / or the external parts to be tested are sealed and connected to the flange interface, a flange cover is provided on other flange interfaces connected to the external atmosphere to seal these flange interfaces. As a detachable sealing element, the flange cover is a flange without a hole in the middle, which is used to seal the remaining flange interfaces to isolate the accommodating cavity from the external atmosphere, and then a vacuum state can be obtained in the accommodating cavity by evacuating the accommodating cavity, thereby ensuring the effect of the insulation withstand voltage test.

[0028] It should be noted that the insulation withstand voltage test equipment of the present embodiment is an independent test module, which provides good insulation withstand voltage test conditions for the external parts to be tested, avoiding installing the external parts to be tested on the vacuum chamber of the completed assembly module, which takes up too many resources. The insulation withstand voltage test equipment can significantly improve the efficiency of the insulation withstand voltage test on the external parts to be tested, thereby improving the yield of the external parts to be tested.

[0029] 2. In the insulation and voltage withstand test equipment provided by the embodiment of the present invention, the observation window body and the connecting flange can be covered, and the connecting flange and one of the flange interfaces on the outer surface of the equipment body can be detachably connected to fix the connecting flange on the equipment body; the observation window body is covered on the connecting flange to realize manual opening and closing of the observation window body, and the external parts to be tested that need to participate in the insulation and voltage withstand test can be quickly taken and placed through the accommodating cavity to be compatible with the insulation and voltage withstand test of large-diameter external parts to be tested; the first seal and the second seal respectively ensure good airtightness between the connecting flange and the flange interface, and between the observation window body and the connecting flange.

[0030] 3. In the insulation withstand voltage test equipment provided in the embodiment of the present invention, by setting a locking end and providing a locking member detachably connected to the locking end, the observation window body can be quickly opened and closed, so as to facilitate the rapid placement of external parts to be tested in the accommodating cavity.

[0031] 4. In the insulation withstand voltage test equipment provided by the embodiment of the present invention, by means of an interlayer structure arranged in the accommodating cavity, it is possible to simultaneously perform insulation withstand voltage tests on two external parts to be tested in the accommodating cavity of the same device body, so as to improve the efficiency of the insulation withstand voltage test; further, the number of interlayer structures may be two or even more, thereby enabling the testing of multiple external parts to be tested at the same time.

[0032] It should be noted that the placement plane on the interlayer structure can be used to place external parts to be tested, so that the external parts to be tested can be subjected to insulation and withstand voltage tests inside the accommodating cavity; the placement plane corresponds to the transparent observation window setting, so that the external parts to be tested inside the accommodating cavity can be observed multiple times during the test, and after the external parts to be tested are tested, they can be taken out by opening the transparent observation window, and new external parts to be tested can be placed in the accommodating cavity through the transparent observation window for a new round of insulation and withstand voltage tests. Through this design, the test efficiency of the insulation and withstand voltage test can be improved, and the operation of taking and placing the external parts to be tested can be simplified to reduce the error of the insulation and withstand voltage test.

[0033] 5. In the insulation withstand voltage test equipment provided in the embodiment of the present invention, the fixing parts, support columns, partitions and connecting parts of the partition structure are arranged in sequence. The fixing parts located on the bottom wall of the accommodating cavity fix the support columns, and the support columns support the partitions. The connecting parts pass through the partitions and are connected to the support columns to achieve limited fixation of the support columns and the partitions.

[0034] It should be noted that the placement plane is located at one end of the partition away from the bottom wall of the accommodating cavity; by setting a partition structure on the accommodating cavity and dividing the accommodating cavity into two parts by the partition, an external part to be tested can be placed on the bottom wall of the accommodating cavity, and the other external part to be tested can be placed on the placement plane set on the partition, so as to realize insulation and voltage withstand tests on two external parts to be tested in the same accommodating cavity at the same time. Through this design, the efficiency of the insulation and voltage withstand test can be further improved.

[0035] 6. In the insulation withstand voltage test equipment provided by the embodiment of the present invention, there is a gap between the partition and the inner wall of the accommodating chamber, which can ensure that the external parts to be tested placed on the bottom wall of the accommodating chamber and the external parts to be tested placed on the partition have the same test environment. Through this design, the fault tolerance rate of the insulation withstand voltage test is significantly improved, and the insulation withstand voltage test can be carried out simultaneously on external parts to be tested of the same type but different design details, which is beneficial to the subsequent research and development updates and iterations of the same batch of external parts to be tested.

[0036] 7. In the insulation withstand voltage test equipment provided by the embodiment of the present invention, an adapter flange plate installed on the outer surface of the equipment body can be connected to one of the multiple flange interfaces, and an adapter interface can be opened according to the size of the external parts to be tested. By setting adapter interfaces of different types and different calibers, various types of external parts to be tested including vacuum electrodes can be compatible while ensuring that the number and types of flange interfaces remain unchanged.

[0037] It should be noted that the adapter interface opened on the adapter flange plate can not only connect different types of external parts to be tested, but also can be connected to an adapter flange plate that is adapted to the caliber of the adapter interface, thereby exposing an adapter interface with a smaller caliber. It can be understood that after the various assembly components of the insulation and voltage withstand test equipment (such as flange interfaces, adapter flange plates, etc.) are formed, when new external parts to be tested are developed, they can be connected through two or more adapter flange plates to change the caliber of the adapter interface, thereby achieving a higher degree of adaptability to the external parts to be tested. Through this design, the compatibility of the insulation and voltage withstand test equipment with external parts to be tested can be further improved.

[0038] 8. The insulation withstand voltage test method provided in the embodiment of the present invention is applied to the above-mentioned insulation withstand voltage test equipment. It can be understood that different types of first parts to be tested have different environmental requirements for insulation withstand voltage. Among them, a part of the parts to be tested needs to be sealed and connected to the flange interface, and the other part of the parts to be tested can be directly placed in the accommodating cavity for insulation withstand voltage test. The selection can be based on the type of parts to be tested that are actually being tested for insulation withstand voltage.

[0039] Furthermore, according to the type of the first part to be tested, the first part to be tested is selectively sealed and connected to the flange interface or placed in the accommodating cavity, and after the dry vacuum pump and the molecular pump are respectively sealed and connected to different flange interfaces and before the dry vacuum pump evacuates the accommodating cavity, it is necessary to use a flange cover to seal other flange interfaces connected to the outside atmosphere. The flange cover, as a detachable sealing element, can be used to seal the remaining flange interfaces to isolate the accommodating cavity from the outside atmosphere, and then a vacuum state can be obtained in the accommodating cavity by evacuating the accommodating cavity to ensure good airtightness inside the insulation and withstand voltage test equipment.

[0040] The insulation withstand voltage test method provided in the embodiment of the present invention provides good insulation withstand voltage test conditions for vacuum electrodes and other parts to be tested, avoiding multiple installations of the parts to be tested on the vacuum chamber of the assembled module, which results in excessive occupation of resources, thereby improving the efficiency of the insulation withstand voltage test.

[0041] 9. In the insulation withstand voltage test method provided in the embodiment of the present invention, there are many types of parts to be tested that need to be tested for insulation withstand voltage. Therefore, in order to meet higher insulation withstand voltage performance requirements, the preset value that the air pressure of the accommodating chamber can reach can be set according to the vacuum pressure required by each part to be tested; if the preset value required before the insulation withstand voltage test is ≤E -6 Pa, you need to use an ion pump with better pumping effect. When the air pressure in the chamber is E -4 Through this design, the air pressure in the accommodating chamber can reach the corresponding value faster to ensure a good environment for the insulation withstand voltage test and ensure good results for subsequent tests.

[0042] 10. In the insulation withstand voltage test method provided in the embodiment of the present invention, after the insulation withstand voltage test is performed on the part to be tested, an inert gas is provided and introduced into the containing chamber so that the gas pressure of the containing chamber is equal to the external atmospheric pressure, thereby protecting the part to be tested from oxidation.

[0043] It should be noted that the technical solution of the embodiment of the present invention can prevent the parts to be tested from being oxidized. When there are a large number of parts to be tested participating in the insulation withstand voltage test, the parts to be tested placed in the accommodating chamber can be taken out without shutting down the molecular pump. Through this design, the number of starts and stops of the molecular pump can be reduced, thereby extending the service life of the molecular pump.

[0044] In addition, by taking and placing the parts to be tested without turning off the molecular pump, the rate at which the dry vacuum pump, molecular pump, and ion pump evacuate the containment chamber can be increased, further improving the efficiency of the insulation withstand voltage test.

Brief Description of the Drawings

[0045] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0046] Figure 1 It is a schematic diagram of the overall structure of an insulation withstand voltage test device provided by an embodiment of the present invention.

[0047] Figure 2 The present invention provides an explosion-proof device for testing the overall structure of insulation and withstand voltage. Figure 1 .

[0048] Figure 3 The present invention is a schematic diagram of a transparent observation window in an insulation withstand voltage test device provided by an embodiment of the present invention.

[0049] Figure 4 The present invention provides an explosion-proof device for testing the overall structure of insulation and withstand voltage. Figure 2 .

[0050] Figure 5 A cross-sectional schematic diagram of a gap between a partition in a device body and an inner side wall of a containing cavity of an insulation withstand voltage testing device provided by an embodiment of the present invention.

[0051] Figure 6 The following is a flow chart of an insulation withstand voltage test method provided by an embodiment of the present invention. Figure 1 .

[0052] Figure 7 The following is a flow chart of an insulation withstand voltage test method provided by an embodiment of the present invention. Figure 2 .

[0053] Description of the accompanying drawings:

[0054] 1. Insulation withstand voltage test equipment;

[0055] 11. Equipment body; 12. Flange interface; 13. Flange cover; 14. Transparent observation window; 15. Interlayer structure; 16. Adapter flange plate;

[0056] 111. Accommodating chamber; 112. Gap; 141. Observation window body; 142. Connecting flange; 143. First sealing member; 144. Second sealing member; 145. Locking end; 146. Locking member; 150. Placement plane; 151. Fixing member; 152. Support column; 153. Partition; 154. Connecting member; 161. Adapter. [Specific implementation method]

[0057] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0058] In the embodiments provided by the present invention, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined according to A. However, it should also be understood that determining B according to A does not mean determining B only according to A, and B can also be determined according to A and / or other information.

[0059] It should be understood that the "one embodiment" or "an embodiment" mentioned throughout the specification means that the specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. Those skilled in the art should also be aware that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily required for the present invention.

[0060] In various embodiments of the present invention, it should be understood that the size of the serial numbers of the above-mentioned processes does not mean the necessary order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0061] The flow chart and block diagram in the accompanying drawings of the present invention illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present application. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a sequence different from that marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, which is determined based on the functions involved. It should be particularly noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented by a dedicated hardware-based system that performs a specified function or operation, or can be implemented by a combination of dedicated hardware and computer instructions.

[0062] See also Figure 1 and Figure 2 The embodiment of the present invention provides an insulation withstand voltage test device, which can be applied to the insulation withstand voltage test of a vacuum electrode. The insulation withstand voltage test device 1 includes a device body 11, a plurality of flange interfaces 12, and a plurality of flange covers 13 adapted to each flange interface 12;

[0063] The flange interface 12 is distributed on the circumferential outer surface of the equipment body 11. The equipment body 11 is provided with a receiving cavity 111. The receiving cavity 111 is connected to the outside atmosphere through the flange interface 12.

[0064] The outer surface of the equipment body 11 is provided with a transparent observation window 14 corresponding to the accommodating cavity 111. The flange interface 12 can be used for sealing connection with external parts to be tested and / or external vacuum pumps. At least one flange interface 12 can be used to connect to external vacuum electrodes. The flange interface 12 is detachably connected to the flange cover 13. When the flange cover 13 is covered on the flange interface 12, the flange interface 12 is closed.

[0065] It can be understood that the external parts to be tested involved in the embodiment of the present invention include vacuum electrodes, and a variety of flange interfaces 12 are distributed on the circumferential outer surface of the equipment body 11. Multiple external parts to be tested can be installed on the flange interfaces 12, and these external parts to be tested can be subjected to insulation and voltage withstand tests at the same time to improve the efficiency of the insulation and voltage withstand tests. These flange interfaces 12 can be sealed and connected to an external vacuum pump and / or external parts to be tested including vacuum electrodes, wherein the interface type of the external vacuum electrode may be different from that of other external parts to be tested, and at least one flange interface 12 has a caliber that is compatible with the vacuum electrode.

[0066] Furthermore, after the external parts to be tested and / or the vacuum pump are sealed and connected to the flange interface 12, the flange cover 13 is used to cover and seal other flange interfaces 12 that are connected to the external atmosphere.

[0067] In some embodiments, the flange cover 13 is detachably connected to the flange interfaces 12. The connection methods between the flange cover 13 and the flange interfaces 12 provided in the embodiments of the present invention include but are not limited to snap-on, plug-in, magnetic connection, and connection via threaded parts.

[0068] As a detachable sealing element, the flange cover 13 is a flange without a hole in the middle, also known as a blind plate or a blind flange; in the embodiment of the present invention, the flange cover 13 is used to seal the remaining flange interfaces 12, isolating the accommodating cavity 111 from the outside atmosphere, and then a vacuum state can be obtained in the accommodating cavity 111 by evacuating the accommodating cavity 111, thereby ensuring the effect of the insulation withstand voltage test.

[0069] It should be noted that the insulation withstand voltage test equipment 1 of the embodiment of the present invention is an independent test module, which provides good insulation withstand voltage test conditions for external parts to be tested, avoiding installing the external parts to be tested that need to be tested in the vacuum chamber of the completed assembly module (in the embodiment of the present invention, mainly refers to the formal module in the scanning electron microscope module), which takes up too many resources. The insulation withstand voltage test equipment 1 can significantly improve the efficiency of insulation withstand voltage testing of external parts to be tested, thereby improving the yield of external parts to be tested.

[0070] The technical solution provided by the embodiment of the present invention solves the technical problem that the existing vacuum electrode insulation withstand voltage test method has low test efficiency and serious resource occupation, and cannot meet the higher requirements of insulation withstand voltage performance after updating and iteration, thereby affecting the yield of the vacuum electrode.

[0071] It should be further explained that a transparent observation window 14 is opened on the outer surface of the equipment body 11. Through the transparent observation window 14, the changes of the external parts to be tested in the accommodating cavity 111 during the insulation withstand voltage test can be observed. Through this design, the situation in the accommodating cavity 111 can be monitored more quickly and conveniently, and the environmental conditions of the accommodating cavity 111 can be better adjusted.

[0072] See also Figure 3 and Figure 4 The transparent observation window 14 includes a coverable observation window body 141 and a connecting flange 142 . The observation window body 141 is detachably connected to one of the flange interfaces 12 on the outer surface of the equipment body 11 through the connecting flange 142 .

[0073] It can be understood that the observation window body 141 and the connecting flange 142 can be covered, wherein the connecting flange 142 is detachably connected to one of the flange interfaces 12 on the outer surface of the equipment body 11 to fix the connecting flange 142 on the equipment body 11.

[0074] It should be noted that the observation window body 141 is covered on the connecting flange 142 to realize manual opening and closing of the observation window body 141, and the external parts to be tested that need to participate in the insulation withstand voltage test can be quickly taken in and placed through the accommodating cavity 111 to be compatible with the insulation withstand voltage test of large-diameter external parts to be tested.

[0075] Furthermore, a first sealing member 143 is provided between the connected connecting flange 142 and the flange interface 12 , and a second sealing member 144 is provided between the coverable observation window body 141 and the connecting flange 142 .

[0076] It can be understood that the first sealing member 143 and the second sealing member 144 respectively ensure good air tightness between the connected connecting flange 142 and the flange interface 12 , and between the covered observation window body 141 and the connecting flange 142 .

[0077] In some embodiments, a knife-edge type seal is used between the connecting flange 142 on the transparent observation window 14 and one of the flange interfaces 12 on the outer surface of the equipment body 11. The knife-edge type seal has a better effect. The connecting flange 142 and the flange interface 12 are connected through a first seal 143. The first seal 143 in the embodiment of the present invention is specifically an oxygen-free copper sealing gasket, which is made of metallic oxygen-free copper. The metal is used to seal the connected part between the connecting flange 142 and the flange interface 12, which will further improve the sealing effect between the connecting flange 142 and the flange interface 12.

[0078] As an alternative solution of the embodiment of the present invention, the first sealing member 143 may also be a sealing ring made of rubber material, but the effect of rubber material is not as good as that of metal material.

[0079] In some embodiments, the transparent observation window 14 also needs to be sealed when the observation window body 141 and the connecting flange 142 are covered; on the basis of the sealed connection between the connecting flange 142 and the flange interface 12 through the first seal 143, the sealed connection between the observation window body 141 and the connecting flange 142 is achieved through the second seal 144.

[0080] In some embodiments, the second sealing member 144 is a rubber sealing ring, and the airtightness requirement of the second sealing member 144 is relatively lower than that of the first sealing member 143 .

[0081] To facilitate observation, the connecting flange 142 on the transparent observation window 14 can be connected to the flange interface 12 with a larger diameter, and the corresponding observation window body 141 can be covered on the connecting flange 142 to seal the flange interface 12 connected to the connecting flange 142; in fact, the observation window body 141 is also a special flange. In the embodiment of the present invention, the observation window body 141 is preferably a CF250 model observation window flange with a quick opening door, which is compatible with external parts to be tested with larger diameters.

[0082] It should be noted that the transparent observation window 14 can be provided to better observe the situation in the accommodating cavity 111 during the insulation withstand voltage test. The material of the transparent observation window 14 in the embodiment of the present invention is glass. It can be understood that the material of the transparent observation window 14 can be set according to actual needs, and it only needs to ensure the sealing of the accommodating cavity 111 while facilitating observation.

[0083] Please continue reading Figure 3 and Figure 4 A locking end 145 is correspondingly arranged at the same position on the outer side of the observation window body 141 and the connecting flange 142, and a locking member 146 is provided on the locking end 145; the locking member 146 is detachably connected to the locking end 145 to control the covering of the observation window body 141 and the connecting flange 142.

[0084] It can be understood that by providing the locking end 145 and the locking member 146 detachably connected to the locking end 145 , the observation window body 141 can be quickly opened and closed, so as to quickly take in and put in the external parts to be tested in the accommodating cavity 111 .

[0085] In some embodiments, since the transparent observation window 14 is opened on the outer surface of the equipment body 11 and the accommodating cavity 111 is opened inside the equipment body 11, the requirements for the sealing inside the accommodating cavity 111 are high when performing the insulation and voltage withstand test. Therefore, it is necessary to respectively open fastening structures on the outer edges of the observation window body 141 and the connecting flange 142, that is, the locking end 145 provided in the embodiment of the present invention, and the positions between the two locking ends 145 correspond to each other to ensure the good airtightness of the insulation and voltage withstand test equipment 1 during use.

[0086] In some embodiments, the locking member 146 is a threaded knob, through which the connection with the locking end 145 can be fixed and loosened, and the observation window body 141 in the transparent observation window 14 can be quickly opened and closed, so as to realize the rapid placement of external parts to be tested in the accommodating cavity 111.

[0087] See also Figure 4 The insulation withstand voltage test device 1 further includes at least one interlayer structure 15 arranged in the accommodating cavity 111 ; a placement plane 150 is provided on the interlayer structure 15 , and the placement plane 150 is arranged corresponding to the transparent observation window 14 .

[0088] It can be understood that, by providing the partition structure 15 in the accommodating cavity 111 , it is possible to simultaneously perform insulation withstand voltage tests on two external parts to be tested in the accommodating cavity 111 of the same device body 11 , thereby improving the efficiency of the insulation withstand voltage test.

[0089] In some embodiments, the number of the partition structures 15 may be more than one, and may be two or even more, so that multiple external parts to be tested can be tested simultaneously; wherein, when there are two partition structures 15, three external parts to be tested can be placed therein, and when there are three partition structures 15, four external parts to be tested can be placed therein, and so on.

[0090] It should be noted that the placement plane 150 on the interlayer structure 15 can be used to place external parts to be tested, so as to implement insulation and withstand voltage testing of the external parts to be tested inside the accommodating cavity 111 .

[0091] In an embodiment of the present invention, the placement plane 150 is arranged corresponding to the transparent observation window 14, so that the external parts to be tested inside the accommodating cavity 111 can be observed multiple times during the test. After the external parts to be tested are tested, they can be taken out by opening the transparent observation window 14, and new external parts to be tested can be placed in the accommodating cavity 111 through the transparent observation window 14 for a new round of insulation withstand voltage test.

[0092] Through this design, the efficiency of the insulation withstand voltage test can be improved, and the pick-up and placement operations of external parts to be tested can be simplified to reduce the error of the insulation withstand voltage test.

[0093] Please continue reading Figure 4 The partition structure 15 includes a fixing member 151, a connecting member 154, a support column 152 and a partition 153. The fixing member 151 is fixed to the bottom wall of the accommodating cavity 111. The support column 152 is connected to the fixing member 151 through one end of the fixing member 151 away from the bottom wall of the accommodating cavity 111. The partition 153 is located at one end of the support column 152 away from the fixing member 151. The connecting member 154 is connected to the support column 152 through the partition 153 to fix the partition 153 to the support column 152. The side of the partition 153 away from the support column 152 is the placement plane 150.

[0094] It can be understood that the fixing member 151, the support column 152, the partition 153 and the connecting member 154 in the partition structure 15 are arranged in sequence, the fixing member 151 located on the bottom wall of the accommodating cavity 111 fixes the support column 152, and the support column 152 supports the partition 153. The connecting member 154 passes through the partition 153 and is connected to the support column 152 to achieve the limiting fixation of the support column 152 and the partition 153.

[0095] It should be noted that the placement plane 150 is located at one end of the partition 153 away from the bottom wall of the accommodating chamber 111; by setting a partition structure 15 in the accommodating chamber 111, and dividing the accommodating chamber 111 into two parts by the partition 153, an external part to be tested can be placed on the bottom wall of the accommodating chamber 111, and another external part to be tested can be placed on the placement plane 150 set on the partition 153, so as to realize insulation and voltage withstand tests on two external parts to be tested in the same accommodating chamber 111 at the same time. Through this design, the efficiency of the insulation and voltage withstand test can be further improved.

[0096] In some embodiments, the fixing member 151 is a top screw, which is a headless screw, and the two ends of the top screw are respectively connected to the bottom wall of the accommodating cavity 111 and the support column 152; the connecting member 154 is a headed screw, through which the partition 153 is fixedly connected to the support column 152, and is sequentially passed through the partition 153 and the support column 152.

[0097] In some embodiments, the number of the interlayer structures 15 is more than one, and can be set according to the actual space of the accommodating cavity 111 . Correspondingly, the number of the placement planes 150 also changes with the number of the interlayer structures 15 .

[0098] In addition to only setting a single partition structure 15, the embodiment of the present invention can further set the partition structure 15; specifically, the fixing member 151 can be fixed to the end of the partition 153 away from the bottom wall of the accommodating chamber 111, and the end of the support column 152 away from the fixing member 151 is connected to the partition 153 to support the partition 153. The connecting member 154 is passed through the partition 153 and connected to the support column 152 to achieve the limited fixation of the support column 152 and the partition 153, which can meet the insulation withstand voltage test of multiple external parts to be tested in the accommodating chamber 111, thereby correspondingly improving the test efficiency.

[0099] See also Figure 4 and Figure 5 There is a gap 112 between the partition 153 and the inner wall of the accommodating chamber 111; on the one hand, it can ensure that an external part to be tested placed on the bottom wall of the accommodating chamber 111 and another external part to be tested placed on the partition 153 away from one end of the bottom wall of the accommodating chamber 111 have the same test environment, and the same vacuum degree is guaranteed when these external parts to be tested are subjected to the same round of insulation withstand voltage test.

[0100] Through this design, the fault tolerance rate of the insulation withstand voltage test equipment 1 of the embodiment of the present invention can be significantly improved, and the insulation withstand voltage test of external parts to be tested of the same type but with different design details can be carried out simultaneously, which is beneficial to the subsequent research and development update and iteration of the same batch of external parts to be tested.

[0101] On the other hand, by providing a gap 112 between the partition 153 and the inner wall of the accommodating chamber 111 , the installation and disassembly between the partition 153 and the supporting column 152 can be more conveniently achieved.

[0102] Please continue reading Figure 2 The insulation withstand voltage test device 1 further includes a transfer flange plate 16 mounted on the outer surface of the device body 11 , and the transfer flange plate 16 is sealedly connected to one of the flange interfaces 12 on the outer surface of the device body 11 through a first seal 143 .

[0103] Furthermore, an adapter port 161 is provided on the adapter flange plate 16 , and the adapter port 161 can be sealed by an external vacuum electrode or connected to an adapter flange plate 16 adapted to the caliber of the adapter port 161 , and a first seal 143 is also provided between adjacent adapter flange plates 16 .

[0104] It can be understood that the vacuum electrode involved in the embodiment of the present invention is one of the external parts to be tested. In the insulation and voltage resistance testing equipment 1, an adapter flange plate 16 installed on the outer surface of the equipment body 11 can be connected to one of the multiple flange interfaces 12, and an adapter interface 161 can be opened according to the size of the external parts to be tested.

[0105] In some embodiments, by providing adapters 161 of different types and different calibers, various types of external parts to be tested including vacuum electrodes can be compatible while ensuring that the number and type of flange interfaces 12 remain unchanged.

[0106] It should be noted that the adapter port 161 on the adapter flange plate 16 can not only be connected to different types of external parts to be tested, but can also be connected to an adapter flange plate 16 adapted to the diameter of the adapter port 161, thereby exposing the adapter port 161 with a smaller diameter.

[0107] Among them, when encountering a situation where at least two adapter flange plates 16 need to be connected, the adapter flange plates 16 are stacked from the bottom to the top starting from the connected flange interface 12 position, and then the large-diameter adapter interface 161 is converted into a small-diameter adapter interface 161 to achieve better test compatibility.

[0108] It can be understood that after the various assembly components of the insulation and voltage withstand test equipment 1 (such as the flange interface 12 and the adapter flange plate 16 of the embodiment of the present invention) are formed, when new external parts to be tested are developed, they can be connected through two or more adapter flange plates 16 to change the caliber size of the adapter interface 161, so that the degree of adaptability to the external parts to be tested is higher. Through this design, the compatibility of the insulation and voltage withstand test equipment 1 with external parts to be tested can be further improved.

[0109] In general, if the size of the external part to be tested can be compatible with the caliber of one of the flange interfaces 12 on the circumferential outer surface of the equipment body 11, and / or the caliber of the adapter interface 161 of the adapter flange plate 16, then the external part to be tested can be directly sealed with the flange interface 12 and / or the adapter flange plate 16; if the caliber of these flange interfaces 12 and the caliber of the adapter interface 161 of the adapter flange plate 16 are not compatible with the size of the external part to be tested, the adapter flange plates 16 can be stacked to adjust the caliber of the adapter interface 161 to be compatible with various types of external parts to be tested.

[0110] As an optional embodiment, the adapter flange plate 16 is specifically a CF250 to CF100 flange plate, that is, the caliber of the adapter flange plate 16 corresponds to the flange interface 12 of the CF250 model, and a CF100 adapter interface 161 is provided thereon for performing insulation withstand voltage testing on vacuum electrodes of the CF100 type flange; it should be noted that this adapter flange plate 16 can be provided with different types of adapter interfaces 161 (for example, CF160, CF200 models, etc.) as needed to be compatible with different types of vacuum electrodes.

[0111] See also Figure 6 The embodiment of the present invention further provides an insulation withstand voltage test method, which is applied to the above insulation withstand voltage test device, and includes the following steps:

[0112] S1: Provide a first part to be tested, a dry vacuum pump and a molecular pump, seal the first part to be tested to the flange interface or place it in the accommodating cavity, seal the dry vacuum pump and the molecular pump to different flange interfaces respectively, and seal the other flange interfaces connected to the outside atmosphere with flange covers;

[0113] S2: Turn on the dry vacuum pump and use it to evacuate the containment chamber. When the pressure in the containment chamber is E -1 When Pa, the molecular pump is turned on, and the dry vacuum pump and the molecular pump are used to evacuate the containment chamber together;

[0114] S3: Provide a testing device, and when the air pressure in the accommodating chamber reaches a preset value, perform an insulation withstand voltage test on the first part to be tested: the testing device detects the voltage of the first part to be tested after a predetermined time, and if the voltage does not drop back to 0V, the insulation withstand voltage test of the first part to be tested is qualified.

[0115] It can be understood that in step S1, for the first part to be tested, different types of parts to be tested have different environmental requirements for the insulation and voltage withstand test. Some of the parts to be tested need to be sealed and connected to the flange interface, while other parts to be tested can be directly placed in the accommodating cavity. The selection can be made based on the type of parts to be tested that are actually being tested for insulation and voltage withstand test.

[0116] Furthermore, after the first part to be tested is sealed and connected to the flange interface or placed in the accommodating cavity and the dry vacuum pump and the molecular pump are respectively sealed and connected to different flange interfaces, and before the accommodating cavity is evacuated by the dry vacuum pump, it is necessary to use a flange cover to seal other flange interfaces connected to the outside atmosphere.

[0117] Among them, the flange cover is used as a detachable sealing device, and is used to seal the remaining flange interfaces in the embodiment of the present invention, isolating the accommodating cavity from the outside atmosphere, and then a vacuum state can be obtained in the accommodating cavity by evacuating the accommodating cavity, thereby ensuring the effect of the insulation withstand voltage test.

[0118] The insulation withstand voltage test method provided in the embodiment of the present invention is applied to the corresponding insulation withstand voltage test equipment, providing good insulation withstand voltage test conditions for other parts to be tested such as vacuum electrodes, avoiding multiple installations of the parts to be tested on the vacuum chamber of the assembled module, which results in excessive occupation of resources, thereby improving the efficiency of the insulation withstand voltage test.

[0119] It should be noted that the fewer the gas molecules contained in the accommodating chamber, the higher the vacuum degree. The purpose of evacuating the accommodating chamber in the embodiment of the present invention is to reduce the number of gas molecules in the accommodating chamber as much as possible.

[0120] In step S2, both the dry vacuum pump and the molecular pump can evacuate the containing chamber, but before using the molecular pump, the interior of the containing chamber needs to reach a certain low vacuum degree before the molecular pump can be turned on. This is due to the characteristics of the molecular pump itself: the molecular pump relies on the rotation of a large number of blades to transfer kinetic energy to the gas molecules, so that the gas molecules obtain kinetic energy to achieve the effect of vacuuming. Therefore, the molecular pump can only start working normally when it reaches a certain vacuum degree (that is, the air pressure in the containing chamber needs to be at least below 5Pa).

[0121] Optionally, in step S2 and step S3, the air pressure of the accommodating chamber is monitored, and a preset value and a predetermined time are set, which can be specifically achieved by a relevant control system or control device applied in the field of integrated circuit technology.

[0122] In step S3, before the insulation withstand voltage test is performed on the part to be tested, the preset value reached by the air pressure in the containing chamber is related to the type of part to be tested actually being tested; in the insulation withstand voltage test method provided in the embodiment of the present invention, when the first part to be tested is a vacuum electrode, the vacuum degree to be reached by the air pressure in the containing chamber is different from the vacuum degree required when the first part to be tested is other external parts to be tested, and therefore, the preset value also changes accordingly.

[0123] Furthermore, in step S3, the role of the predetermined time is mainly to determine whether the voltage of the part to be tested has dropped back to 0V within a period of time. If it is detected that the voltage of the part to be tested has not dropped back to 0V, it means that the insulation withstand voltage test of the part to be tested is qualified; if the voltage of the part to be tested is detected to drop back to 0V, it means that the insulation withstand voltage test of the part to be tested has failed.

[0124] In some embodiments, factors that need to be considered when setting the predetermined time include, but are not limited to: characteristics of each part to be tested, insulation withstand voltage requirements, and sensitivity of the test device to voltage fluctuations.

[0125] In some embodiments, the preset value reached by the air pressure in the containment chamber before the insulation withstand voltage test, as well as the predetermined time, can be manually set values; the preset value and the predetermined time can also be set by relevant control systems or control devices in the field of integrated circuit technology before each insulation withstand voltage test.

[0126] Furthermore, if the air pressure in the receiving chamber reaches a preset value ≤ E -6 Pa, after the dry vacuum pump and the molecular pump jointly evacuate the containing chamber and before the air pressure in the containing chamber reaches a preset value, the following steps are also included:

[0127] Provide an ion pump. When the pressure in the chamber is E -4 Pa, the ion pump is turned on, and the containment chamber is evacuated by the dry vacuum pump, molecular pump and ion pump together.

[0128] It is understandable that there are many types of parts that need to be tested for insulation and voltage resistance. Therefore, in order to meet higher insulation and voltage resistance performance requirements, the preset value that the air pressure of the accommodating chamber can reach can be set according to the vacuum pressure required by each part to be tested.

[0129] In the technical solution provided in the embodiment of the present invention, if the preset value required before the insulation withstand voltage test is ≤E -6 Pa, you need to use an ion pump with better pumping effect. When the air pressure in the chamber is E -4 Through this design, the air pressure in the accommodating chamber can reach the corresponding value faster to ensure a good environment for the insulation withstand voltage test and ensure good results for subsequent tests.

[0130] In some embodiments, when an ion pump is needed to assist in evacuating the containing chamber, the flange cover installed on the flange interface is removed in the embodiment of the present invention, and the ion pump is sealed and installed on the flange interface; optionally, the dry vacuum pump, molecular pump and ion pump can be selectively installed in different positions, for example, they can be installed on the flange interface, or they can be installed on the adapter flange plate, and connecting pipes to the dry vacuum pump, molecular pump and ion pump can be opened in advance on the equipment body of the insulation and voltage resistance testing equipment.

[0131] It can be understood that the installation method of the dry vacuum pump, molecular pump and ion pump can be set according to different application scenarios or usage environments. The present invention only lists some implementation methods for illustration. The installation methods of these vacuum pumps include but are not limited to the methods mentioned above, and can be set according to the conditions of the insulation withstand voltage test and the habits of the actual operators. Any modifications, equivalent replacements and improvements made within the principles of the present invention should be included in the protection scope of the present invention.

[0132] See also Figure 7 In some embodiments, after performing the insulation withstand voltage test on the first part to be tested, the following steps are also included:

[0133] S4: disconnecting the containing chamber from the molecular pump, the dry vacuum pump and the ion pump, introducing an inert gas into the containing chamber, and stopping introducing the inert gas when the gas pressure in the containing chamber is equal to the external atmospheric pressure;

[0134] S5: providing a second part to be tested, taking out the first part to be tested that has passed the insulation withstand voltage test, and sealingly connecting the second part to be tested to the flange interface or placing it in the accommodating cavity;

[0135] S6: The receiving chamber is connected to the dry vacuum pump, the molecular pump and the ion pump in sequence. When the air pressure in the receiving chamber reaches a preset value, an insulation withstand voltage test is performed on the second part to be tested.

[0136] It can be understood that in step S4, after the insulation withstand voltage test is performed on the first part to be tested, an inert gas is provided and introduced into the accommodating chamber so that the gas pressure of the accommodating chamber is equal to the external atmospheric pressure, thereby protecting the tested first part to be tested from oxidation.

[0137] In some embodiments, the inert gas is nitrogen. By filling the accommodating cavity with nitrogen, the original vacuum state can be destroyed to protect the first part to be tested that has completed the insulation withstand voltage test from being oxidized.

[0138] It should be noted that in step S4, the connection between the containing chamber and the molecular pump, the dry vacuum pump and the ion pump is disconnected, and in step S6, the connection between the containing chamber and the dry vacuum pump, between the containing chamber and the molecular pump, and between the containing chamber and the ion pump is restored in turn.

[0139] Steps S4 to S6 of the technical solution of the embodiment of the present invention can prevent the first parts to be tested from being oxidized. When there are a large number of first parts to be tested participating in the insulation withstand voltage test, the first parts to be tested placed in the accommodating cavity can be taken out without shutting down the molecular pump. Through this design, the number of starts and stops of the molecular pump can be reduced, thereby extending the service life of the molecular pump.

[0140] In addition, by taking and placing the first part to be tested without shutting down the molecular pump, the rate at which the dry vacuum pump, the molecular pump, and the ion pump evacuate the containment chamber can be increased, further improving the efficiency of the insulation withstand voltage test.

[0141] It should be further explained that in step S5, after the second part to be tested is sealed and connected to the flange interface or placed in the accommodating chamber, in step S6, the accommodating chamber is controlled to restore the connection with the dry vacuum pump, the molecular pump and the ion pump in sequence, and the conditions for restoring the connection are as follows:

[0142] First, restore the connection between the containment chamber and the dry vacuum pump, and use the dry vacuum pump to evacuate the containment chamber. When the air pressure in the containment chamber is E -1 Pa, the dry vacuum pump and molecular pump are used to evacuate the containment chamber; when the pressure in the containment chamber reaches E -4 Pa and the air pressure in the containment chamber needs to reach E -6 Pa, the connection between the containing chamber and the ion pump is restored. At this time, the containing chamber is evacuated by the dry vacuum pump, molecular pump and ion pump together until the air pressure in the containing chamber reaches the preset value, and then the insulation withstand voltage test is performed on the second part to be tested.

[0143] The above is a detailed introduction to an insulation withstand voltage testing device and method disclosed in an embodiment of the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea.

[0144] At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation of the present invention, and any modifications, equivalent substitutions and improvements made within the principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An insulation withstand voltage test device, which can be used for insulation withstand voltage test of vacuum electrodes, characterized in that: The insulation withstand voltage test equipment comprises an equipment body, a plurality of flange interfaces and a plurality of flange covers adapted to each of the flange interfaces; The flange interface is distributed on the circumferential outer surface of the equipment body, and a receiving cavity is provided in the equipment body, and the receiving cavity is connected to the outside atmosphere through the flange interface; The outer surface of the equipment body is provided with a transparent observation window corresponding to the accommodating cavity, the flange interface can be used to seal and connect with an external part to be tested and / or an external vacuum pump, at least one of the flange interfaces can be used to connect with an external vacuum electrode, the flange interface is detachably connected to the flange cover, and the flange cover closes the flange interface when it is set on the flange interface.

2. The insulation withstand voltage test equipment according to claim 1, characterized in that: The transparent observation window comprises a coverable observation window body and a connecting flange, and the observation window body is detachably connected to one of the flange interfaces on the outer surface of the equipment body through the connecting flange; A first sealing member is provided between the connected connecting flange and the flange interface, and a second sealing member is provided between the coverable observation window body and the connecting flange.

3. The insulation withstand voltage test equipment according to claim 2, characterized in that: A locking end is correspondingly arranged at the same position of the outer side surface of the observation window body and the connecting flange, and a locking piece is arranged on the locking end; The locking member is detachably connected to the locking end to control the covering of the observation window body and the connecting flange.

4. The insulation withstand voltage test equipment according to claim 3, characterized in that: The insulation withstand voltage test equipment further comprises at least one interlayer structure arranged in the accommodating cavity; A placement plane is provided on the partition structure, and the placement plane is arranged corresponding to the transparent observation window.

5. The insulation withstand voltage test equipment according to claim 4, characterized in that: The partition structure includes a fixing part, a connecting part, a support column and a partition. The fixing part is fixed to the bottom wall of the accommodating cavity. The support column is connected to the fixing part through one end of the fixing part away from the bottom wall of the accommodating cavity. The partition is located at the end of the support column away from the fixing part. The connecting part is connected to the support column through the partition to fix the partition to the support column. The side of the partition facing away from the support column is the placement plane.

6. The insulation withstand voltage test equipment according to claim 5, characterized in that: There is a gap between the partition plate and the inner side wall of the accommodating cavity.

7. The insulation withstand voltage test equipment according to claim 4, characterized in that: The insulation withstand voltage test equipment further comprises a transfer flange plate mounted on the outer surface of the equipment body, wherein the transfer flange plate is sealedly connected to one of the flange interfaces on the outer surface of the equipment body through the first sealing member; The adapter flange plate is provided with an adapter interface, which can be sealed by an external vacuum electrode or connected to an adapter flange plate adapted to the adapter interface caliber, and the first sealing member is also provided between adjacent adapter flange plates.

8. An insulation withstand voltage test method, applied to the insulation withstand voltage test device according to any one of claims 1 to 7, characterized in that: The following steps are involved: Provide a first part to be tested, a dry vacuum pump and a molecular pump, seal the first part to be tested to the flange interface or place it in the accommodating cavity, seal the dry vacuum pump and the molecular pump to different flange interfaces respectively, and seal the other flange interfaces connected to the outside atmosphere by the flange cover; Turn on the dry vacuum pump to evacuate the containing chamber. When the air pressure in the containing chamber is E -1 When the molecular pump is turned on at 1000 Pa, the dry vacuum pump and the molecular pump are used together to evacuate the containing chamber; A testing device is provided, and when the air pressure in the accommodating chamber reaches a preset value, an insulation withstand voltage test is performed on the first part to be tested: the testing device detects the voltage of the first part to be tested after a predetermined time, and if the voltage does not drop back to 0V, the insulation withstand voltage test of the first part to be tested is qualified.

9. The insulation withstand voltage test method according to claim 8, characterized in that: If the air pressure in the containing chamber reaches a preset value ≤ E -6 Pa, after the dry vacuum pump and the molecular pump jointly evacuate the containing chamber and before the air pressure in the containing chamber reaches a preset value, the following steps are also included: Provide an ion pump, when the pressure of the containing chamber is E -4 Pa, the ion pump is turned on, and the containing chamber is evacuated by the dry vacuum pump, the molecular pump and the ion pump together.

10. The insulation withstand voltage test method according to claim 9, characterized in that: After the insulation withstand voltage test is performed on the first part to be tested, the following steps are also included: Cutting off the connection between the containing chamber and the molecular pump, the dry vacuum pump and the ion pump, introducing an inert gas into the containing chamber, and stopping introducing the inert gas when the air pressure of the containing chamber is equal to the external atmospheric pressure; Providing a second part to be tested, taking out the first part to be tested that has passed the insulation withstand voltage test, and then sealingly connecting the second part to be tested to the flange interface or placing it in the accommodating cavity; The accommodating chamber is restored to communication with the dry vacuum pump, the molecular pump and the ion pump in sequence, and when the air pressure in the accommodating chamber reaches a preset value, an insulation withstand voltage test is performed on the second part to be tested.

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