Vacuum-pumping annealing equipment for lower coating film

Abstract

The invention relates to lower coating vacuum-pumping annealing equipment, and belongs to the technical field of photoelectric sensor coating, the lower coating vacuum-pumping annealing equipment comprises a base, the base is provided with a coating mechanism, a vacuum mechanism and an annealing mechanism, the coating mechanism, the vacuum mechanism and the annealing mechanism are arranged along the conveying direction of a substrate, the coating mechanism is used for coating the substrate, and the annealing mechanism is used for annealing the substrate. The vacuum mechanism is used for carrying out vacuum treatment on the substrate, and the annealing mechanism is used for carrying out annealing treatment on the substrate; according to the device, coating, vacuum treatment and annealing treatment are carried out at the same time, continuous assembly line type operation is achieved for the front procedure and the rear procedure of a production line, that is, continuous coating is carried out on a substrate, the coating position of the substrate is arranged downwards in the substrate coating period, and the influence of falling dust is reduced; impurities can be prevented from influencing the coating effect, and the thickness of the coating liquid on the coating roller is controlled through the scraper, so that the coating effect of the substrate can be ensured.

Description

Technical Field

[0001] The invention relates to a lower coating vacuum annealing device, belonging to the technical field of photoelectric sensor coating. Background Art

[0002] With the rapid development of new energy, perovskite cells, as a new type of solar cells with high efficiency and low cost, have been widely used in photovoltaic power generation, optoelectronic devices, photoelectric sensors and other fields.

[0003] During the preparation process of perovskite cells, due to the different preparation processes involved, the perovskite cell substrate needs to be flipped back and forth according to different steps to meet the requirements of different processes.

[0004] In the prior art: In the conventional perovskite cell preparation process, the TCO (Transparent Conductive Oxide) glass substrate needs to go through cleaning, hole transport layer preparation, P1 laser scribing, lower interface layer preparation, perovskite layer preparation, upper interface layer preparation, C60 layer evaporation, SnO2 layer preparation, P2 laser scribing, back electrode layer preparation, P3 laser scribing, edge cleaning, testing and sorting, and then laminated into components.

[0005] Among them, the cleaning process, lower interface layer preparation, perovskite layer preparation, upper interface layer preparation and other processes require the TCO base film to face up according to process requirements, and the evaporated C60 layer requires the TCO base film to face down according to equipment requirements. In other processes, the TCO base film surface can be facing up, down or vertical, which is determined by the equipment requirements.

[0006] The three steps of lower interface layer preparation, perovskite layer preparation, and upper interface layer preparation require the TCO substrate to be prepared upwards, which places very high requirements on the cleanliness of the production environment. During the preparation process, if dust falls on the substrate, it will cause perovskite film defects and affect the appearance and performance of the device.

[0007] Since the TCO substrate has its membrane surface facing upward, downward, or vertical in different processes, it is necessary to flip the TCO substrate back and forth, which not only increases the complexity of the production line and the equipment cost, but also is not conducive to the smoothness of the substrate positioning process.

[0008] The coating and printing preparation process includes upper coating (printing) and plating processes, which require the substrate to be transferred to the coating area or the coating equipment. The upper coating equipment needs to pre-coat the substrate before coating. After coating, the coated substrate is transferred from the coating area. At the same time, the coating equipment is in a waiting state for the next coating preparation. This prolongs the coating operation time and reduces the coating efficiency, thereby reducing the overall working efficiency of the coating equipment. The coating process is complicated, the single operation cycle is long, and the equipment is expensive and the maintenance cost is high.

[0009] Therefore, there is a need for a lower coating vacuum annealing device to achieve continuous coating of the substrate while reducing the impact of dust on the quality of the film layer. Summary of the invention

[0010] The technical problem to be solved by the present invention is: in order to overcome the deficiencies of the prior art, a lower coating vacuum annealing device is provided to achieve continuous coating of a substrate while reducing the influence of dust on the quality of the film layer.

[0011] The technical solution adopted by the present invention to solve the above-mentioned problem is: a lower coating vacuum annealing device, comprising a base, on which a coating mechanism, a vacuum mechanism and an annealing mechanism are arranged, the coating mechanism, the vacuum mechanism and the annealing mechanism are arranged along the substrate conveying direction, the coating mechanism is used to realize coating of the substrate, the vacuum mechanism is used to realize vacuum treatment of the substrate, and the annealing mechanism is used to realize annealing treatment of the substrate; The coating mechanism includes a coating conveying component and a coating execution component; The coating conveying assembly includes a conveying driving source, two support frames and two groups of conveying units, the two support frames are arranged at intervals, the two groups of conveying units correspond to the two support frames one by one, one of the two support frames is fixedly connected to the base, and the other support frame is slidably connected to the base through a guide rail, each group of conveying units is provided with a plurality of conveying units, the plurality of conveying units are arranged along the substrate conveying direction, and the two groups of conveying units are connected to the conveying driving source; The conveying unit comprises a fixed seat and a lifting seat, the lifting seat and the fixed seat are distributed up and down, the lifting seat is provided with an upper conveying wheel, the fixed seat is provided with a lower conveying wheel, and the lifting seat is connected to the fixed seat; The conveying drive source includes a conveying shaft, one end of which is connected to a conveying motor, two adjacent lower conveying wheels in the same conveying unit are connected by a first transmission belt, two second transmission belts are connected to the conveying shaft, the two second transmission belts correspond to the two groups of conveying units one by one, and the conveying shaft is connected to one of the lower conveying wheels through the second transmission belt; The coating execution component includes a coating roller and a coating trough, the top of the coating trough is open, the coating roller is inserted into the opening of the coating trough, the top of the coating roller is located above the coating trough, a rotating support seat is provided at one end of the coating roller, and a coating motor is connected to the other end of the coating roller. The rotating support seat and the coating motor are both provided with coating elevators, and the rotating support seat and the coating motor are driven to rise and fall synchronously by the coating elevator.

[0012] Preferably, two guide rods are vertically fixed on the lifting seat, and the two guide rods are movably inserted into the fixed seat. A spring is provided on the guide rod, and the spring is located between the fixed seat and the lifting seat. The two ends of the spring are respectively fixedly connected to the lifting seat and the fixed seat. The spring is in a compressed state. A fixing plate is provided above the lifting seat, and a tightening screw is vertically inserted on the fixing plate, and the bottom of the tightening screw abuts against the top of the lifting seat.

[0013] Preferably, both ends of the coating trough are provided with end covers, and the end covers and the coating trough enclose the coating roller.

[0014] Preferably, an air box is provided at the bottom of the coating tank, one side of the air box is connected to an air inlet pipe, the other side of the air box is connected to an air outlet pipe, and the air inlet pipe is connected to an air supply system.

[0015] Preferably, a plurality of the air outlet pipes are provided, and the plurality of air outlet pipes are distributed along the length direction of the coating roller.

[0016] Preferably, the air outlet pipe is arranged obliquely.

[0017] Preferably, a scraper is provided on one side of the coating trough, and two support rods are fixed on the coating trough, the two support rods are arranged side by side, the support rods are parallel to the conveying direction of the substrate, and sliders are sleeved on the two support rods, and the sliders are locked with the support rods by screws, and the sliders are fixedly connected to the scraper.

[0018] Preferably, a liquid storage tank and a liquid supply device are provided on the base, the liquid storage tank is connected to the liquid supply device, and the liquid storage tank is used to store the coating liquid.

[0019] Preferably, the vacuum mechanism comprises a vacuum conveying seat and a vacuum cover which are distributed up and down, the vacuum cover is connected to a vacuum pump, and the vacuum cover is driven to rise and fall by a vacuum lifter.

[0020] Preferably, the annealing mechanism comprises an annealing conveying seat and a heating cover which are distributed up and down, and the heating cover is driven to rise and fall by an annealing lifter.

[0021] Compared with the prior art, the advantages of the present invention are: The present invention discloses a lower coating vacuum annealing device, which realizes the simultaneous coating, vacuum treatment and annealing treatment, and connects the front and rear processes of the production line to realize continuous assembly line operation, that is, to realize continuous coating of the substrate, and during the coating of the substrate, the coating position of the substrate is arranged downward, thereby reducing the influence of falling dust, and secondly, by applying air to the bottom of the substrate, it is possible to avoid impurities affecting the coating effect, and by controlling the thickness of the coating liquid on the coating roller through a scraper, it is possible to ensure the coating effect of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A three-dimensional diagram of a lower coating vacuum annealing device according to the present invention; Figure 2 A top view of a lower coating vacuum annealing device according to the present invention; Figure 3 It is a structural schematic diagram of the coating mechanism; Figure 4 It is a schematic diagram of the structure of the coating conveying component; Figure 5 is a structural schematic diagram of a conveying unit; Figure 6 It is a structural schematic diagram of the lifting seat; Figure 7 It is a structural schematic diagram of the coating execution component; Figure 8 It is a schematic diagram of the connection structure of the coating tank, the air box and the scraper; Fig. 9 for Figure 8 A cross-sectional view of Fig.10 for Figure 8 A magnified view of part A; Fig.11 It is a structural schematic diagram of the vacuum mechanism; Fig.12 It is a structural schematic diagram of the annealing mechanism.

[0023] in: Base 1, coating mechanism 2, vacuum mechanism 3, annealing mechanism 4, substrate 5; Coating conveying component 21, coating execution component 22; Conveying drive source 211, support frame 212, conveying unit 213, guide rail 214; Conveying shaft 2111, conveying motor 2112, first transmission belt 2113, second transmission belt 2114; A fixing seat 2131, a lifting seat 2132, an upper conveying wheel 2133, a lower conveying wheel 2134, a guide rod 2135, a spring 2136, a fixing plate 2137, and a tightening screw 2138; Coating roller 221, coating tank 222, rotating support seat 223, coating motor 224, coating lifter 225, end cover 226, air box 227, air inlet pipe 228, air outlet pipe 229, scraper 230, support rod 231, slider 232, screw 233, liquid storage tank 234, liquid supply device 235; Vacuum conveying seat 31, vacuum cover 32, vacuum pump 33, vacuum lifter 34; Annealing conveying seat 41, heating cover 42, annealing lifter 43. DETAILED DESCRIPTION

[0024] like Figure 1-12 As shown, a lower coating vacuum annealing device in this embodiment includes a base 1, on which a coating mechanism 2, a vacuum mechanism 3 and an annealing mechanism 4 are arranged, and the coating mechanism 2, the vacuum mechanism 3 and the annealing mechanism 4 are arranged along the conveying direction of the substrate 5. The coating mechanism 2 is used to achieve coating on the substrate 5, the vacuum mechanism 3 is used to achieve vacuum treatment on the substrate 5, and the annealing mechanism 4 is used to achieve annealing treatment on the substrate 5; The coating mechanism 2 includes a coating conveying component 21 and a coating execution component 22, wherein the coating conveying component 21 is used to realize the conveying of the substrate 5, and the coating execution component 22 is used to execute the coating action on the substrate 5; The coating conveying assembly 21 includes a conveying driving source 211, two support frames 212 and two groups of conveying units 213. The two support frames 212 are arranged at intervals, and the two groups of conveying units 213 correspond to the two support frames 212 one by one. Among the two support frames 212, one support frame 212 is fixedly connected to the base 1, and the other support frame 212 is slidably connected to the base 1 through a guide rail 214. By moving the support frames 212 on the guide rail 214, the distance between the two support frames 212 is adjusted according to the size of the substrate 5. Each group of conveying units 213 is provided with a plurality of conveying units 213, and the plurality of conveying units 213 are arranged along the conveying direction of the substrate 5. Both groups of conveying units 213 are connected to the conveying driving source 211; The conveying unit 213 includes a fixed seat 2131 and a lifting seat 2132. The lifting seat 2132 and the fixed seat 2131 are arranged up and down. The lifting seat 2132 is provided with an upper conveying wheel 2133. The fixed seat 2131 is provided with a lower conveying wheel 2134. The lifting seat 2132 is connected to the fixed seat 2131. The conveying driving source 211 includes a conveying shaft 2111, one end of which is connected to a conveying motor 21112, two adjacent lower conveying wheels 2134 in the same conveying unit 213 are connected via a first transmission belt 2113, two second transmission belts 2114 are connected to the conveying shaft 2111, and the two second transmission belts 2114 correspond to the two groups of conveying units 213 one by one, and the conveying shaft 2111 is connected to one of the lower conveying wheels 2134 via the second transmission belt 2114; When conveying the substrate 5, the substrate 5 is placed between the upper conveying wheel 2133 and the lower conveying wheel 2134, and the lower conveying wheel 2134 abuts against the bottom of the substrate 5, and the upper conveying wheel 2133 abuts against the top of the substrate 5, wherein the upper conveying wheel 2133 and the lower conveying wheel 2134 do not contact the active layer of the substrate 5, and the contact area between the upper conveying wheel 2133 and the lower conveying wheel 2134 and the substrate 5 is ≤1 cm from the edge of the substrate 5. After the conveying motor 21112 is started, the conveying shaft 2111 rotates, and the rotation of the conveying shaft 2111 drives the same conveying unit 2111 through the second transmission belt 2114. 3, one of the lower conveying wheels 2134 rotates, and this lower conveying wheel 2134 drives the other lower conveying wheels 2134 in the same conveying unit 213 to rotate synchronously through the first transmission belt 2113, that is, the conveying of the substrate 5 is realized. When the substrate 5 is conveyed to the coating position, it stops, and the coating execution component 22 is used to coat the bottom of the substrate 5. In this way, the film layer of the substrate 5 faces downward, which can reduce the impact of falling dust. After the coating is completed, the substrate 5 is conveyed to the vacuum mechanism 3, and the vacuum mechanism 3 performs vacuum treatment on the substrate 5. During the vacuum treatment of the substrate 5, the next substrate 5 is coated; The lifting seat 2132 is vertically fixed with two guide rods 2135, and the two guide rods 2135 are movably inserted into the fixed seat 2131. A spring 2136 is arranged on the guide rod 2135, and the spring 2136 is located between the fixed seat 2131 and the lifting seat 2132. The two ends of the spring 2136 are respectively fixedly connected to the lifting seat 2132 and the fixed seat 2131, and the spring 2136 is in a compressed state. A fixing plate 2137 is arranged above the lifting seat 2132, and a tightening screw 2138 is vertically inserted on the fixing plate 2137. The bottom of the tightening screw 2138 abuts against the top of the lifting seat 2132. When the distance between the upper conveying wheel 2133 and the lower conveying wheel 2134 needs to be adjusted according to the thickness of the substrate 5, the tightening screw 2138 is loosened or tightened. When the tightening screw 2138 is loosened, the lifting seat 2132 is lifted by the elastic action of the spring 2136, that is, the distance between the upper conveying wheel 2133 and the lower conveying wheel 2134 is increased. When the tightening screw 2138 is tightened, the tightening screw 2138 pushes the lifting block to descend, that is, the distance between the upper conveying wheel 2133 and the lower conveying wheel 2134 is reduced. The coating execution component 22 includes a coating roller 221 and a coating slot 222. The coating roller 221 is located between two adjacent lower conveying wheels 2134 in the same conveying unit 213. The coating slot 222 is fixedly arranged on the base 1. The top of the coating slot 222 is open. The coating roller 221 is inserted into the opening of the coating slot 222. The top of the coating roller 221 is located above the coating slot 222. A rotating support seat 223 is provided at one end of the coating roller 221. A coating motor 224 is connected to the other end of the coating roller 221. A coating lifter 225 is provided on the rotating support seat 223 and the coating motor 224. The rotating support seat 223 and the coating motor 224 are driven by the coating lifter 225 to synchronously lift and lower, that is, the lifting and lowering of the coating roller 221 is realized. During coating, , the coating liquid is injected into the coating tank 222, and the bottom of the coating roller 221 is immersed in the coating liquid. When the substrate 5 is transported to the top of the coating roller 221, the coating lifter 225 drives the rotating support seat 223 and the coating motor 224 to rise, and the top of the coating roller 221 is abutted against the bottom of the substrate 5. Subsequently, the coating motor 224 is started to rotate the coating roller 221. When the coating roller 221 rotates, the coating liquid is applied to the bottom of the substrate 5 to achieve coating. In addition, during the rotation of the coating roller 221, the substrate 5 moves, and the linear speed of the contact position between the coating roller 221 and the substrate 5 is kept consistent. After the coating is completed and the substrate 5 is separated from the coating roller 221 by the movement of the substrate 5, the rotating support seat 223 and the coating motor 224 are driven to descend, so that the coating roller 221 descends to achieve reset; End covers 226 are provided at both ends of the coating tank 222. The end covers 226 and the coating tank 222 enclose the coating roller 221 to prevent the coating liquid on the coating roller 221 from leaking from both ends of the coating tank 222 during coating. An air box 227 is provided at the bottom of the coating tank 222, one side of the air box 227 is connected to an air inlet pipe 228, and the other side of the air box 227 is connected to an air outlet pipe 229. A plurality of air outlet pipes 229 are provided, and the plurality of air outlet pipes 229 are distributed along the length direction of the coating roller 221. The air inlet pipe 228 is connected to an air supply system, and the air supply system can be an air pump. During coating, clean air is transported from the air inlet pipe 228 to the air box 227 through the air supply system, and the air in the air box 227 is then discharged from the air outlet pipe 229 and acts on the bottom of the substrate 5, and the air action position is the uncoated position of the substrate 5. Under the action of the airflow, impurities on the substrate 5 are blown away to prevent the impurities from affecting the coating effect of the substrate 5. The outlet pipe 229 is arranged obliquely, and the outlet pipe 229 is arranged obliquely to discharge air, and the flow direction of the air acting on the substrate 5 is opposite to the conveying direction of the substrate 5, so as to avoid the airflow affecting the coating effect; A scraper 230 is provided on one side of the coating tank 222, and two support rods 231 are fixed on the coating tank 222. The two support rods 231 are arranged side by side, and the support rods 231 are parallel to the conveying direction of the substrate 5. Slide blocks 232 are sleeved on the two support rods 231, and the slide blocks 232 are locked with the support rods 231 by screws 233. The slide blocks 232 are fixedly connected to the scraper 230. During coating, the scraper 230 scrapes off excess coating liquid through the rotation of the coating roller 221 to avoid excessive coating liquid on the coating roller 221 affecting the coating effect. Of course, when it is necessary to adjust the thickness of the coating liquid on the coating roller 221, the screws 233 are loosened to move the slide blocks 232 on the support rods 231, so as to adjust the distance between the scraper 230 and the coating roller 221, thereby adjusting the thickness of the coating liquid on the coating roller 221; The base 1 is provided with a liquid storage tank 234 and a liquid supply device 235, the liquid storage tank 234 is connected to the liquid supply device 235, the liquid storage tank 234 is used to store the coating liquid, when the coating liquid needs to be added to the coating tank 222, the coating liquid in the liquid storage tank 234 is transported to the coating tank 222 through the liquid supply device 235; The vacuum mechanism 3 includes a vacuum conveying seat 31 and a vacuum cover 32 which are arranged in an upper and lower manner. The vacuum cover 32 is connected to a vacuum pump 33. The vacuum cover 32 is driven to rise and fall by a vacuum lifter 34. The substrate 5 after coating is conveyed to the vacuum conveying seat 31. The substrate 5 is conveyed to a vacuum treatment position by the vacuum conveying seat 31. Subsequently, the vacuum cover 32 is driven to descend by the vacuum lifter 34 and is covered on the substrate 5. The vacuum pump 33 is opened to perform vacuum treatment. After the vacuum treatment is completed, the vacuum cover 32 is driven to rise by the vacuum lifter 34 to achieve reset, and then is conveyed to the annealing mechanism 4 by the vacuum conveying seat 31 for annealing treatment. The annealing mechanism 4 includes an annealing conveying seat 41 and a heating cover 42 which are arranged vertically. The heating cover 42 is driven to rise and fall by an annealing lifter 43. The vacuum-treated substrate 5 is transported to the annealing conveying seat 41. The substrate 5 is transported to the annealing position by the annealing conveying seat 41. Subsequently, the heating cover 42 is driven to descend by the annealing lifter 43 and placed on the substrate 5. The substrate 5 is heated by the heating cover 42 to perform annealing. After the annealing is completed, the heating cover 42 is driven to rise by the annealing lifter 43 to reset, and then the substrate 5 is transported to the next process by the annealing conveying seat 41. In addition, during the annealing, the next substrate 5 performs a vacuum treatment. To sum up, coating, vacuum treatment and annealing treatment are carried out simultaneously, and the front and rear processes of the production line are connected to realize continuous assembly line operation, that is, continuous coating of the substrate 5 is realized, and during the coating of the substrate 5, the coating position of the substrate 5 is arranged downward to reduce the impact of falling dust. Secondly, by applying air to the bottom of the substrate 5, impurities can be prevented from affecting the coating effect. Moreover, by controlling the thickness of the coating liquid on the coating roller 221 through the scraper 230, the coating effect of the substrate 5 can be ensured.

[0025] In addition to the above embodiments, the present invention also includes other implementation modes. Any technical solutions formed by equivalent transformation or equivalent replacement should fall within the protection scope of the claims of the present invention.

Claims

1. A lower coating vacuum annealing device, comprising a base (1), characterized in that: The base (1) is provided with a coating mechanism (2), a vacuum mechanism (3) and an annealing mechanism (4); the coating mechanism (2), the vacuum mechanism (3) and the annealing mechanism (4) are arranged along the conveying direction of the substrate (5); the coating mechanism (2) is used to achieve coating of the substrate (5); the vacuum mechanism (3) is used to achieve vacuum treatment of the substrate (5); and the annealing mechanism (4) is used to achieve annealing treatment of the substrate (5); The coating mechanism (2) comprises a coating conveying component (21) and a coating execution component (22); The coating conveying assembly (21) comprises a conveying driving source (211), two support frames (212) and two groups of conveying units (213); the two support frames (212) are arranged at intervals; the two groups of conveying units (213) correspond to the two support frames (212) one by one; one of the two support frames (212) is fixedly connected to the base (1); the other support frame (212) is slidably connected to the base (1) via a guide rail (214); a plurality of conveying units (213) are provided in each group; the plurality of conveying units (213) are arranged along the conveying direction of the substrate (5); and both groups of conveying units (213) are connected to the conveying driving source (211); The conveying unit (213) comprises a fixed seat (2131) and a lifting seat (2132); the lifting seat (2132) and the fixed seat (2131) are arranged vertically; an upper conveying wheel (2133) is arranged on the lifting seat (2132); a lower conveying wheel (2134) is arranged on the fixed seat (2131); and the lifting seat (2132) is connected to the fixed seat (2131); The conveying drive source (211) comprises a conveying shaft (2111), one end of the conveying shaft (2111) is connected to a conveying motor (21112), two adjacent lower conveying wheels (2134) in the same conveying unit (213) are connected via a first transmission belt (2113), the conveying shaft (2111) is connected to two second transmission belts (2114), the two second transmission belts (2114) correspond one to one to the two groups of conveying units (213), and the conveying shaft (2111) is connected to one of the lower conveying wheels (2134) via the second transmission belt (2114); The coating execution component (22) comprises a coating roller (221) and a coating groove (222); the top of the coating groove (222) is open; the coating roller (221) is inserted into the opening of the coating groove (222); the top of the coating roller (221) is located above the coating groove (222); one end of the coating roller (221) is provided with a rotating support seat (223); the other end of the coating roller (221) is connected to a coating motor (224); the rotating support seat (223) and the coating motor (224) are both provided with a coating lifter (225); the rotating support seat (223) and the coating motor (224) are driven by the coating lifter (225) to rise and fall synchronously.

2. The lower coating vacuum annealing equipment according to claim 1, characterized in that: Two guide rods (2135) are vertically fixedly inserted on the lifting seat (2132), and the two guide rods (2135) are movably inserted into the fixed seat (2131). A spring (2136) is arranged on the guide rod (2135), and the spring (2136) is located between the fixed seat (2131) and the lifting seat (2132). The two ends of the spring (2136) are respectively fixedly connected to the lifting seat (2132) and the fixed seat (2131). The spring (2136) is in a compressed state. A fixing plate (2137) is arranged above the lifting seat (2132), and a tightening screw (2138) is vertically inserted on the fixing plate (2137), and the bottom of the tightening screw (2138) is against the top of the lifting seat (2132).

3. The lower coating vacuum annealing equipment according to claim 1, characterized in that: End covers (226) are provided at both ends of the coating groove (222), and the end covers (226) and the coating groove (222) surround the coating roller (221).

4. The lower coating vacuum annealing equipment according to claim 1, characterized in that: An air box (227) is provided at the bottom of the coating tank (222); one side of the air box (227) is connected to an air inlet pipe (228); the other side of the air box (227) is connected to an air outlet pipe (229); and the air inlet pipe (228) is connected to an air supply system.

5. The lower coating vacuum annealing equipment according to claim 4, characterized in that: A plurality of the air outlet pipes (229) are provided, and the plurality of air outlet pipes (229) are distributed along the length direction of the coating roller (221).

6. The lower coating vacuum annealing equipment according to claim 4, characterized in that: The air outlet pipe (229) is arranged obliquely.

7. The lower coating vacuum annealing equipment according to claim 1, characterized in that: A scraper (230) is provided on one side of the coating trough (222), and two support rods (231) are fixed on the coating trough (222), the two support rods (231) are arranged side by side, the support rods (231) are parallel to the conveying direction of the substrate (5), and a slider (232) is sleeved on the two support rods (231), the slider (232) is locked with the support rod (231) by means of a screw (233), and the slider (232) is fixedly connected to the scraper (230).

8. The lower coating vacuum annealing equipment according to claim 1, characterized in that: A liquid storage tank (234) and a liquid supply device (235) are provided on the base (1); the liquid storage tank (234) is connected to the liquid supply device (235); and the liquid storage tank (234) is used to store the coating liquid.

9. The lower coating vacuum annealing equipment according to claim 1, characterized in that: The vacuum mechanism (3) comprises a vacuum conveying seat (31) and a vacuum cover (32) which are arranged vertically. The vacuum cover (32) is connected to a vacuum pump (33). The vacuum cover (32) is driven to rise and fall by a vacuum lifter (34).

10. The lower coating vacuum annealing equipment according to claim 1, characterized in that: The annealing mechanism (4) comprises an annealing conveying seat (41) and a heating cover (42) which are arranged vertically, and the heating cover (42) is driven to rise and fall by an annealing lifter (43).

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