Telescopic manipulator

Abstract

The utility model provides a telescopic manipulator. The telescopic manipulator comprises a driving device, a first bracket, a second bracket, a fork arm, a first horizontal reciprocating motion mechanism and a second horizontal reciprocating motion mechanism, the first support horizontally extends and is fixedly connected to the driving device, the second support is suspended in the first support, and the first horizontal reciprocating mechanism is connected with the driving device and the second support. The first horizontal reciprocating motion mechanism is used for driving the second support to horizontally reciprocate relative to the first support under driving of the driving device so that the second support can stretch out and draw back relative to the first support. The second horizontal reciprocating motion mechanism is connected with the first support, the second support and the fork arm and used for driving the fork arm to horizontally reciprocate in the same direction relative to the second support when the second support horizontally reciprocates relative to the first support so that the fork arm can stretch out and draw back relative to the second support. Therefore, the telescopic manipulator can simplify the transmission of the carrier plate inside and outside the process cavity when being suitable for PECVD (Plasma Enhanced Chemical Vapor Deposition) coating.

Description

Technical Field

[0001] The present disclosure relates to the field of film coating, and more specifically to a telescopic manipulator. Background Art

[0002] The preparation of heterojunction photovoltaic cells requires four processes: cleaning and texturing, PECVD (plasma enhanced chemical vapor deposition) to prepare polycrystalline silicon film layers, PVD to prepare window layers, and screen printing. Among them, PECVD to prepare polycrystalline silicon film layers is divided into intrinsic coating, N-type doped coating, and P-type doped coating. These coatings are all carried out in the process chamber. When coating in the process chamber, it is necessary to transfer the carrier carrying the substrate to be coated (also called an object) to the process chamber, and the transmission is carried out using a transmission chamber. The transmission chamber is provided with a mechanism for transmission to the process chamber.

[0003] Chinese patent document CN111962039A discloses that a carrier plate carrying a substrate to be coated is transferred by a roller in a coating process chamber, and the roller is driven by a magnetic shaft passing through the side wall of the process chamber. In addition, the patent document also relates to a conductive mechanism containing a magnetic fluid passing through the bottom wall of the process chamber for coating discharge.

[0004] This patent document uses rollers in the process chamber to receive the carrier, and there must be a corresponding transmission structure outside the process chamber. The transmission structure outside the process chamber and the rollers in the process chamber form a transmission system for the carrier, and this transmission system is relatively complex.

[0005] In addition, both the magnetic shaft and the magnetic fluid (collectively referred to as the magnetic structure) will affect the flow field and temperature field of the gas in the process chamber, thereby affecting the coating effect in the process chamber.

[0006] In addition, the patent document uses a side roller group to transfer the carrier carrying the substrate to be coated. The side roller group can only support the carrier from the opposite side edges, while the middle part of the carrier has no support. This will cause the middle part of the carrier to sink and deform due to gravity. When the carrier is in the process chamber, if the carrier is supported by the side roller group only at the edge areas on both sides in the process chamber, the lower surface of the carrier will present a sagging state in the middle during the coating process, affecting the coating effect of the substrate on the carrier in the process chamber.

[0007] Furthermore, if the lower surface of the carrier plate is to be overcome in a manner that the lower surface of the carrier plate sags in the middle, a reinforcing structure can be provided for the carrier plate. For example, the carrier plate of Chinese patent document CN114774888A is in the form of a tray assembly for carrying the substrate to be coated and a frame assembly with supporting ribs. The tray assembly is placed on the supporting ribs of the frame assembly. However, due to the presence of the frame assembly with supporting ribs, when a heating plate that contacts from below is used to heat the tray assembly carrying the substrate to be coated, the heating plate cannot directly contact the tray assembly, which will reduce the heating speed and heating efficiency of the substrate on the tray assembly, and increase the material cost of the carrier plate. Utility Model Content

[0008] In view of the problems existing in the background technology, an object of the present disclosure is to provide a telescopic robot that can simplify the transportation of a carrier in and out of a process chamber when suitable for PECVD coating.

[0009] An object of the present disclosure is to provide a telescopic robot that can prevent the flow field and temperature field of the gas in the process chamber from being affected by the magnetic structure when it is suitable for PECVD coating.

[0010] Thus, a telescopic manipulator is provided, which includes a driving device, a first bracket, a second bracket, a fork arm, a first horizontal reciprocating motion mechanism, and a second horizontal reciprocating motion mechanism; the first bracket extends horizontally and is fixedly connected to the driving device, the second bracket is suspended in the first bracket, the first horizontal reciprocating motion mechanism connects the driving device and the second bracket, and the first horizontal reciprocating motion mechanism is used to drive the second bracket to reciprocate horizontally relative to the first bracket under the drive of the driving device so that the second bracket can be telescoped relative to the first bracket; the second horizontal reciprocating motion mechanism connects the first bracket, the second bracket and the fork arm, and the second horizontal reciprocating motion mechanism is used to drive the fork arm to reciprocate horizontally in the same direction relative to the second bracket while the second bracket reciprocates horizontally relative to the first bracket so that the fork arm can be telescoped relative to the second bracket.

[0011] The beneficial effects of the present disclosure are as follows.

[0012] Compared with the transmission system mentioned in the background technology, in the telescopic manipulator according to the present invention, the telescopic manipulator can be used as the transmission structure of the carrier of both the transmission chamber and the process chamber when the PECVD equipment is used for PECVD coating (that is, the fork arm is used to support the carrier carrying the objects to be / have been PECVD coated), which can simplify the transmission structure of the transmission chamber and the process chamber during PECVD coating, and thus simplify the transmission of the carrier in and out of the process chamber when it is used for PECVD coating.

[0013] In the telescopic manipulator according to the present invention, the telescopic manipulator does not have the magnetic structure (magnetic shaft and magnetic fluid) mentioned in the background technology. Therefore, when the telescopic manipulator is suitable for the PECVD equipment described later for PECVD coating, when the carrier carrying the objects to be / have been PECVD coated is transferred between the transfer chamber and the process chamber, the flow field and temperature field of the gas in the process chamber will not be affected by the magnetic structure, which is beneficial to ensure the coating effect of PECVD coating on the objects in the process chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a stereoscopic view of the PECVD equipment according to the present disclosure, wherein the telescopic robot in the transfer chamber is in a retracted state, a carrier plate carrying objects to be PECVD coated is shown supported on the telescopic robot, and the heating plate in the process chamber is not shown.

[0015] Figure 2 yes Figure 1 A three-dimensional view of the process chamber of a PECVD device.

[0016] Figure 3 yes Figure 1 A top perspective view of a carrier plate of a PECVD device.

[0017] Figure 4 yes Figure 1 A bottom perspective view of a carrier plate of a PECVD device.

[0018] Figure 5 yes Figure 1 A three-dimensional view of a telescopic manipulator of a PECVD device, wherein the second bracket and fork arm of the telescopic manipulator are in a retracted state and the first bracket, the second bracket and the fork arm are in a dropped state.

[0019] Figure 6 yes Figure 5 A stereogram viewed from another angle.

[0020] Figure 7 yes Figure 1 A three-dimensional view of a telescopic manipulator of a PECVD device, wherein the second bracket and fork arm of the telescopic manipulator are in an extended state and the first bracket, the second bracket and the fork arm are in a raised state.

[0021] Figure 8 It is a top perspective view of some components of 7.

[0022] Fig. 9 yes Figure 8 A top perspective view of some components.

[0023] Fig.10 yes Figure 7 A bottom-up perspective view of some components.

[0024] Fig.11 yes Fig.10 A bottom perspective view of some components.

[0025] Fig.12 yes Figure 5 A three-dimensional view of some components of a telescopic manipulator.

[0026] Fig.13 yes Fig.12 A three-dimensional view of some components of a telescopic manipulator.

[0027] The reference numerals are described as follows:

[0028] 100PECVD equipment 45 first horizontal reciprocating motion mechanism

[0029] D1 first horizontal direction 451 first pulley

[0030] D2 second horizontal direction 452 second pulley

[0031] D3 up and down direction 453 first belt

[0032] 1 Upper part of process chamber 453a

[0033] 11 fixing pin 454 first belt clip

[0034] 12 lifting heating plate 46 second horizontal reciprocating motion mechanism

[0035] 13 first valve opening 461 second belt

[0036] 2 Transmission chamber 461a lower part

[0037] 21 second valve opening 462 third belt

[0038] 22 upper part of transmission belt 462a

[0039] E entrance 463 second belt clip

[0040] 3 carrier plate 464 third belt clip

[0041] 31 bottom surface 465 third pulley

[0042] 4 Telescopic manipulator 466 fourth pulley

[0043] 41 driving device 467 fifth pulley

[0044] 42 first bracket 468 sixth pulley

[0045] 421 base plate 469 connecting shaft

[0046] 421a Slotted S support plate

[0047] 422 side plate B bearing

[0048] 43 second bracket 47 rotating mechanism

[0049] 431 first side plate 471 rotating shaft

[0050] 432 second side plate 472 belt transmission structure

[0051] 433 end plate 473 housing

[0052] P sliding pair 48 lifting mechanism

[0053] 44 fork arm 481 screw nut transmission structure

[0054] P1 first sliding pair 5 loading cavity

[0055] P2 second sliding pair 200 objects DETAILED DESCRIPTION

[0056] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0057] In the description of the present disclosure, unless otherwise specified, the terms "first", "second", "third", "fourth", "fifth", "sixth", etc. are only used for the purpose of description and component identification and should not be understood as relative importance and mutual relationship.

[0058] [Telescopic manipulator]

[0059] Reference Figures 5 to 13According to the present disclosure, the telescopic manipulator 4 includes a driving device 41, a first bracket 42, a second bracket 43, a fork arm 44, a first horizontal reciprocating motion mechanism 45, and a second horizontal reciprocating motion mechanism 46. The first bracket 42 extends horizontally and is fixedly connected to the driving device 41, the second bracket 43 is suspended in the first bracket 42, the first horizontal reciprocating motion mechanism 45 connects the driving device 41 and the second bracket 43, and the first horizontal reciprocating motion mechanism 45 is used to drive the second bracket 43 to reciprocate horizontally relative to the first bracket 42 under the drive of the driving device 41 so that the second bracket 43 can be telescoped relative to the first bracket 42; the second horizontal reciprocating motion mechanism 46 connects the first bracket 42, the second bracket 43 and the fork arm 44, and the second horizontal reciprocating motion mechanism 46 is used to drive the fork arm 44 to reciprocate horizontally in the same direction relative to the second bracket 43 while the second bracket 43 reciprocates horizontally relative to the first bracket 42 so that the fork arm 44 can be telescoped relative to the second bracket 43.

[0060] Compared with the transmission system mentioned in the background technology, in the telescopic manipulator 4 according to the present disclosure, the telescopic manipulator 4 can be used as the transmission structure of the carrier 3 of both the transmission chamber 2 and the process chamber 1 when the PECVD equipment described later is used for PECVD coating (that is, the fork arm 44 is used to support the carrier 3 carrying the object 200 to be / has been PECVD coated), which can simplify the transmission structure of the transmission chamber 2 and the process chamber 1 during PECVD coating, and further simplify the transmission of the carrier in and outside the process chamber 1 when it is suitable for PECVD coating.

[0061] In the telescopic manipulator 4 according to the present disclosure, the telescopic manipulator 4 does not have the magnetic structure (magnetic shaft and magnetic fluid) mentioned in the background technology. Therefore, when the telescopic manipulator 4 is suitable for the PECVD equipment 100 described later for PECVD coating, when the carrier plate 3 carrying the object 200 to be / have been PECVD coated is transferred between the transmission chamber 2 and the process chamber 1, the flow field and temperature field of the gas in the process chamber 1 will not be affected by the magnetic structure, which is beneficial to ensure the coating effect of the process chamber 1 for PECVD coating of the object 200.

[0062] The driving device 41 may be, but is not limited to, a rotary motor.

[0063] Specifically, in one example, referring to Figure 5 , Figure 6 , Figure 7 ,as well as Fig.10, the first bracket 42 includes a bottom plate 421 and two side plates 422. The bottom plate 421 extends horizontally, and is provided with a slot 421a that penetrates the bottom plate 421 along the up-down direction D3 and extends along the first horizontal direction D1 of the telescopic fork arm 44. The two side plates 422 are parallel to each other in the second horizontal direction D2 perpendicular to the first horizontal direction D1, and the two side plates 422 are located on opposite sides of the slot 421a in the second horizontal direction D2. A sliding pair P is formed between each side plate 422 and the corresponding side of the second bracket 43, and the sliding pair P is used to suspend the second bracket 43 in the first bracket 42 and guide the second bracket 43 to reciprocate horizontally in the first horizontal direction D1 relative to the first bracket 42. The first horizontal reciprocating motion mechanism 45 passes through the slot 421a along the up-down direction D3 to connect the driving device 41 and the second bracket 43. The sliding pair P can adopt a slide rail and a slide groove matching structure as shown in the figure.

[0064] Furthermore, if Figure 6 ,as well as Figures 9 to 13 As shown in an example, the first horizontal reciprocating motion mechanism 45 includes a first pulley 451, a second pulley 452, a first belt 453, and a first belt clamp 454; the first pulley 451 is connected to the driving device 41 to rotate under the drive of the driving device 41; the second pulley 452 is arranged below the bottom plate 421 of the first bracket 42 and connected to the bottom plate 421; the first belt 453 is installed on the first pulley 451 and the second pulley 452, so that when the driving device 41 drives the first pulley 451 to rotate, it is driven by the first pulley 451 to rotate and rotate. The first pulley 451 and the second pulley 452 move on the first belt clip 454; the first belt clip 454 passes through the slot 421a along the up-down direction D3, the upper end of the first belt clip 454 is fixedly connected to the second bracket 43 from the bottom, and the lower end of the first belt clip 454 is fixedly connected to the upper part 453a of the bottom plate 421 of the first bracket 42 of the first belt 453 close to the first bracket 42, and the first belt clip 454 is used to be driven by the horizontal reciprocating motion of the upper part 453a of the first belt 453 when the first belt 453 moves, thereby driving the second bracket 43 to reciprocate along the first horizontal direction D1 relative to the first bracket 42.

[0065] like Figure 5 , Figure 6 , Figure 7 , Fig.11As shown, the second bracket 43 includes a first lateral plate 431, a second lateral plate 432, and an end plate 433. The first lateral plate 431 and the second lateral plate 432 extend along the first horizontal direction D1 and are spaced apart from each other in the second horizontal direction D2. The end plate 433 fixedly connects the first lateral plate 431 and the second lateral plate 432 on the side opposite to the fork arm 44 along the first horizontal direction D1; a first sliding pair P1 is formed between the first lateral plate 431 and the fork arm 44, and a second sliding pair P2 is formed between the second lateral plate 432 and the fork arm 44. The first sliding pair P1 and the second sliding pair P2 are used to make the fork arm 44 reciprocate along the first horizontal direction D1 relative to the first lateral plate 431 and the second lateral plate 432 when the second horizontal reciprocating mechanism 46 reciprocates horizontally relative to the first bracket 42 and drives the fork arm 44 to reciprocate horizontally in the same direction relative to the second bracket 43. Likewise, the first sliding pair P1 and the second sliding pair P2 may adopt a slide rail and slide groove matching structure as shown in the figure.

[0066] Furthermore, if Figure 5 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 ,as well as Fig.11As shown, the second horizontal reciprocating mechanism 46 includes a second belt 461, a third belt 462, a second belt clamp 463, a third belt clamp 464, a third pulley 465, a fourth pulley 466, a fifth pulley 467, a sixth pulley 468, and a connecting shaft 469. The third pulley 465 and the fourth pulley 466 are arranged on one side of the first lateral plate 431 facing the second lateral plate 432 and are spaced apart from each other along the first horizontal direction D1. The second belt 461 is connected to the third pulley 465 and the fourth pulley 466. The lower end of the second belt clamp 463 is fixedly connected to the bottom plate 421 of the first bracket 42, and the upper end of the second belt clamp 463 is fixedly connected to the lower part 461a of the second belt 461. The second belt clamp 463 is used to drive the second belt 461 to reciprocate while the second bracket 43 reciprocates horizontally relative to the first bracket 42, thereby driving the third pulley 465 and the fourth pulley 466 to rotate. The fifth pulley 467 and the sixth pulley 468 are arranged on one side of the second lateral plate 432 facing the first lateral plate 431 and are spaced apart from each other along the first horizontal direction D1. The fifth pulley 467 is opposite to the third pulley 465 in the second horizontal direction D2. The connecting shaft 469 extends along the second horizontal direction D2 and connects the fifth pulley 467 with the third pulley 465. The connecting shaft 469 is used to be driven by the third pulley 465 when the third pulley 465 rotates, and then the connecting shaft 469 drives the fifth pulley 467 to rotate. The third belt 462 is connected to the fifth pulley 467 and the sixth pulley 468. The third belt 462 is used to be driven to rotate on the fifth pulley 467 and the sixth pulley 468 when the fifth pulley 467 rotates. The upper end of the third belt clamp 464 is fixedly connected to the fork arm 44, and the lower end of the third belt clamp 464 is fixedly connected to the upper part 462a of the third belt 462. The third belt clamp 464 is used to drive the upper part 462a of the third belt 462 when the third belt 462 rotates on the fifth pulley 467 and the sixth pulley 468, thereby driving the fork arm 44 to reciprocate in the first horizontal direction D1.

[0067] like Figure 7 , Figure 8 ,as well as Fig.11 As shown, the second horizontal reciprocating motion mechanism 46 also includes a support plate S and a bearing B; the bearing B is arranged in the support plate S, and the connecting shaft 469 passes through the bearing B; the support plate S is fixedly connected to the end plate 433. The arrangement of the support plate S and the bearing B improves the synchronization and stability of the third pulley 465 driving the connecting shaft 469 to rotate, and the connecting shaft 469 driving the fifth pulley 467 to rotate. As shown in the figure, the support plate S and the bearing B are arranged in two sets at intervals, which further improves the synchronization and stability of the third pulley 465 driving the connecting shaft 469 to rotate, and the connecting shaft 469 driving the fifth pulley 467 to rotate.

[0068] like Figure 1 As shown, the fork arm 44 is used to hold the carrier 3 in the middle of the carrier 3 from below. Thus, the fork arm 44 can hold the carrier 3 from below the middle part of the carrier 3, avoiding the problem of poor stability and complex control of the carrier caused by the lower surface of the carrier drooping in the middle mentioned in the background art, and can ensure the coating effect in the process chamber 1. In the example shown in the figure, the fork arm 44 is in the form of a double fork, and in an example not shown, the fork arm 44 can be in the form of more than two forks.

[0069] like Fig.13 As shown, the telescopic manipulator 4 also includes a rotating mechanism 47. The rotating mechanism 47 is used to drive the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rotate together. The angle at which the rotating mechanism 47 drives the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rotate together is determined according to the relative position relationship of the process chamber 1, the transmission chamber 2, and even the loading chamber 5. Figure 1 In the layout, the rotation mechanism 47 drives the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rotate together at an angle of 90 degrees. When another process chamber is set on the other side of the transmission chamber 2 away from the process chamber 1, the rotation mechanism 47 drives the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rotate together at an angle of 180 degrees. When a material discharge chamber (not shown) is set on the other side of the transmission chamber 2 away from the material discharge chamber 5, the rotation mechanism 47 drives the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rotate together at an angle that can be regarded as 360 degrees, that is, 180 degrees in both the first horizontal direction D1 and the second horizontal direction D2.

[0070] Specifically, Fig.13 As shown, the rotating mechanism 47 includes a rotating shaft 471 and a belt transmission structure 472. The upper end of the rotating shaft 471 is fixedly connected to the driving device 41; the lower end of the rotating shaft 471 is connected to the belt transmission structure 472; the belt transmission structure 472 is used to drive the rotating shaft 471 to rotate, and then drive the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rotate together. It should be noted that the rotation of the rotating mechanism 47 refers to the rotation around the up-down direction D3 in the plane formed by the first horizontal direction D1 and the second horizontal direction D2.

[0071] like Fig.13Shown and combined Figures 5 to 7 In one example, the telescopic manipulator 4 further includes a lifting mechanism 48. The lifting mechanism 48 is connected to the rotating mechanism 47, and the lifting mechanism 48 is used to drive the rotating mechanism 47, the driving device 41, the first bracket 42, the second bracket 43, the fork arm 44, the first horizontal reciprocating motion mechanism 45, and the second horizontal reciprocating motion mechanism 46 to rise and fall together (i.e., rise and fall along the up and down direction D3).

[0072] Specifically, Fig.13 As shown, the rotating mechanism 47 further includes a housing 473, which seals the rotating shaft 471 and exposes both ends of the rotating shaft 471 in the up-down direction D3, and the lifting mechanism 48 is connected to the housing 473. Fig.13 As shown, in one example, the lifting mechanism 48 includes a screw nut transmission structure 481 ; the screw nut transmission structure 481 is connected to the housing 473 .

[0073] [PECVD equipment]

[0074] Reference Figures 1 to 7 According to the present disclosure, the PECVD device 100 includes a process chamber 1. The PECVD device 100 also includes a transmission chamber 2, a carrier plate 3, and the aforementioned telescopic manipulator 4. A plurality of lifting heating plates 12 are arranged in the process chamber 1. The transmission chamber 2 is located outside the process chamber 1, and the transmission chamber 2 is adjacent to and connected to the process chamber 1. The transmission chamber 2 is used to transmit the carrier plate 3. The carrier plate 3 is used to carry the object 200 to be PECVD coated. The telescopic manipulator 4 is disposed in the transfer chamber 2. The telescopic manipulator 4 is used to hold the carrier plate 3 carrying the object 200 to be PECVD-coated and transferred through the transfer chamber 2, and to transfer the carrier plate 3 carrying the object 200 to be PECVD-coated to the process chamber 1 through the entrance E communicating with the process chamber 1 through the transfer chamber 2 by telescoping, and to transfer the carrier plate 3 carrying the object 200 that has been PECVD-coated from the process chamber 1 through the entrance E communicating with the process chamber 1 through the transfer chamber 2 by telescoping after the object 200 has been PECVD-coated in the process chamber 1. The plurality of lifting heating plates 12 can be lifted and lowered, and the plurality of lifting heating plates 12 are used to directly support and heat the middle portion and the edge portions on both sides of the support carrier plate 3 from below.

[0075] The specific structure, function and operation of the aforementioned telescopic manipulator 4 are as mentioned above and will not be repeated here.

[0076] Compared with the transport system mentioned in the background technology, in the PECVD equipment 100 according to the present disclosure, the telescopic robot 4 is used as the transport structure of the carrier 3 in both the transport chamber 2 and the process chamber 1, which simplifies the transport structure of the transport chamber 2 and the process chamber 1, and further simplifies the transport of the carrier in and outside the process chamber 1.

[0077] In the PECVD equipment 100 according to the present disclosure, the telescopic manipulator 4 does not have the magnetic structure (magnetic shaft and magnetic fluid) mentioned in the background technology. Therefore, when the carrier 3 carrying the object 200 to be / have been PECVD coated is transferred between the transmission chamber 2 and the process chamber 1, the flow field and temperature field of the gas in the process chamber 1 will not be affected by the magnetic structure, which is beneficial to ensure the coating effect of the process chamber 1 on the object 200 for PECVD coating.

[0078] In the PECVD device 100 according to the present disclosure, a plurality of lifting heating plates 12 are used to directly support and heat the middle portion and the edge portions on both sides of the support carrier 3 from below, thereby avoiding the lower surface of the carrier mentioned in the background technology from sagging in the middle and affecting the coating effect in the process chamber 1.

[0079] In the PECVD device 100 according to the present disclosure, a plurality of lifting heating plates 12 are used to directly support and heat the middle portion and the edge portions on both sides of the supporting carrier 3 from below, without providing a reinforcing structure corresponding to the middle portion of the lower surface of the carrier mentioned in the background technology, so that the lower surface of the carrier can be constructed as a whole in a plane, thereby improving the heating speed and efficiency of the carrier and reducing the material cost of the carrier.

[0080] exist Figure 1 In the figure, a process chamber 1, a transmission chamber 2 and a loading chamber 5 are shown. However, in actual large-scale production, the PECVD equipment can be designed according to the integration of intrinsic coating, N-type doped coating and P-type doped coating. For each of the intrinsic coating, N-type doped coating and P-type doped coating, at least Figure 1 Of course, according to actual requirements, multiple transmission cavities 2 and multiple process cavities 1 can be set for each of the intrinsic coating, N-type doped coating and P-type doped coating, and the multiple transmission cavities 2 and multiple process cavities 1 can be arranged according to various spatial arrangements.

[0081] also, Figure 1 The process chamber 1 , the transfer chamber 2 and the loading chamber 5 shown can be changed to a serial form, that is, the process chamber 1 , the transfer chamber 2 and the loading chamber 5 are arranged in a straight line.

[0082] In addition, in the PECVD device 100 according to the present disclosure, the object 200 is not limited to the polycrystalline silicon wafer used in the heterojunction photovoltaic cell, but can also be an object suitable for any PECVD coating.

[0083] like Figure 1 and Figure 2As shown, in one example, a plurality of fixing pins 11 are further provided in the process chamber 1. The plurality of fixing pins 11 are used to receive the carrier plate 3 carrying the object 200 to be PECVD coated and transported into the process chamber 1 by the telescopic robot 4. The plurality of lifting heating plates 12 are used to drop back to the original position when the process chamber 1 receives the carrier plate 3 carrying the object 200 to be PECVD coated and transported by the telescopic robot 4 from the transfer chamber 2, to lift and jack up the carrier plate 3 carrying the object 200 to be PECVD coated and received by the plurality of fixing pins 11 when the telescopic robot 4 completes the transport of the carrier plate 3 carrying the object 200 to be PECVD coated to the process chamber 1, and to drop the carrier plate 3 carrying the object 200 coated with PECVD onto the plurality of fixing pins 11 and continue to drop back to the original position after the process chamber 1 completes the coating. That is, during the coating process, only a plurality of lift-type heating plates 12 contact the carrier plate 3, so that the heat heated by the lift-type heating plates 12 is transferred to the carrier plate 3, thereby improving the heating effect of the carrier plate 3. The lifting mechanism of the lift-type heating plate 12 can be implemented in any suitable manner, such as a cylinder, a hydraulic cylinder, a linear motor, a lead screw nut transmission, etc., but as mentioned above, it also does not have a magnetic fluid form.

[0084] like Figure 2 As shown, the plurality of fixing pins 11 and the plurality of lifting heating plates 12 are arranged alternately in multiple rows. With the multiple rows of alternating arrangements, both the plurality of fixing pins 11 and the plurality of lifting heating plates 12 can support the middle part and the edge parts on both sides of the carrier 3, so that both the plurality of fixing pins 11 and the plurality of lifting heating plates 12 can simultaneously receive the middle area of ​​the lower surface of the carrier 3 and the edge areas on both sides.

[0085] like Figure 1 and Figure 2 As shown, the process chamber 1 is provided with a first gate valve opening 13; the transmission chamber 2 is provided with a second gate valve opening 21; the first gate valve opening 13 is aligned with the second gate valve opening 21 and constitutes an inlet and outlet E for communicating the transmission chamber 2 with the process chamber 1, and a cut-off valve (not shown) that can be opened and closed is disposed in the inlet and outlet E. In other words, the inlet and outlet E is constituted by the independent first gate valve opening 13 and the second gate valve opening 21, so that the process chamber 1 and the transmission chamber 2 can be assembled and disassembled independently of each other.

[0086] The method of transporting the carrier plate 3 carrying the object 200 to be PECVD coated by the transport chamber 2 can be flexibly set. For example, Figure 1As shown, a transmission belt 22 is provided in the transmission chamber 2, and the transmission belt 22 is used to transmit the carrier plate 3 carrying the object 200 to be PECVD coated. Specifically, there are two transmission belts 22 arranged side by side and spaced apart, and the space between the two transmission belts 22 is for the telescopic manipulator 4 to insert and lift the carrier plate 3 carrying the object 200 to be PECVD coated on the two transmission belts 22 away from the two transmission belts 22. As a result, the telescopic manipulator 4 and the two transmission belts 22 are arranged in a compact manner in the transmission chamber 2, which improves the space utilization and reduces the volume of the PECVD equipment. The number of transmission belts 22 is not limited, and can be more than two, as long as it does not interfere with the operation of the telescopic manipulator 4.

[0087] like Figure 1 As shown, the extending direction of the transmission belt 22 is perpendicular to the connecting direction of the transmission chamber 2 and the process chamber 1. In an alternative example not shown, the extending direction of the transmission belt 22 is in a straight line (ie, consistent) with the connecting direction of the transmission chamber 2 and the process chamber 1.

[0088] like Figure 3 and Figure 4 As shown, the bottom surface 31 of the carrier plate 3 is a plane. Since the bottom surface 31 of the carrier plate 3 is a plane, it is unnecessary to set reinforcing ribs at the middle part of the carrier plate corresponding to the bottom surface 31 (i.e., the lower surface) of the carrier plate 3 mentioned in the background technology, so that all the aforementioned heating plates 3 can directly contact the bottom surface 31 of the carrier plate 3, thereby improving the heating speed and heating efficiency of the carrier plate 3 and reducing the material cost of the carrier plate 3.

[0089] Cooperate Figure 1 , Figure 5 and Figure 7 In an exemplary operation, the carrier plate 3 carrying the object 200 to be PECVD coated enters the loading chamber 5, and the loading chamber 5 delivers the carrier plate 3 carrying the object 200 to be PECVD coated into the transmission chamber 2 via a conveyor belt. Figure 5 The lifting mechanism 48 lifts the telescopic manipulator 4 to lift the carrier plate 3 carrying the object 200 to be PECVD coated, and then the rotating mechanism 47 rotates the lifted telescopic manipulator 4 90 degrees to align with the inlet and outlet E, and the isolation valve is opened. Then the telescopic manipulator 4 extends the second bracket 43 and the fork arm 44, and the fork arm 44 extends while supporting the carrier plate 3 carrying the object 200 to be PECVD coated into the process chamber 1 through the inlet and outlet E, and the fork arm 44 is extended to the longest (that is, the carrier plate 3 carrying the object 200 to be PECVD coated is in place in the process chamber 1, refer to Figure 7), the lifting mechanism 48 drops the telescopic manipulator 4, so that the carrier plate 3 carrying the object 200 to be PECVD coated falls on the multiple fixing pins 11 of the process chamber 1, and the lifting mechanism 48 drops the telescopic manipulator 4 to separate from the carrier plate 3 carrying the object 200 to be PECVD coated, and then the telescopic manipulator 4 retracts the second bracket 43 and the fork arm 44 and leaves the process chamber 1 and returns to the transfer chamber 2 and is in a fully retracted state, and the rotating mechanism 47 rotates the telescopic manipulator 4 in the opposite direction by 90 degrees, and finally the lifting mechanism 48 drops the telescopic manipulator 4 to the reset position and is in Figure 5 The descending and retracting posture shown; after the telescopic manipulator 4 leaves the process chamber 1, the isolation valve is closed, and the multiple lifting heating plates 12 are lifted and lifted up the carrier plate 3 carrying the objects 200 to be PECVD coated and supported by the multiple fixing pins 11, and then the process chamber 1 performs the corresponding PECVD coating operation. After the PECVD coating operation is completed, the lifting mechanism 48 lifts the telescopic manipulator 4 in the descending and fully retracted state, and the rotating mechanism 47 rotates the lifted telescopic manipulator 4 90 degrees to align with the entrance and exit E, and the isolation valve is opened. Then the telescopic manipulator 4 extends the second bracket 43 and the fork arm 44, and the extended fork arm 44 enters the bottom of the carrier plate 3 carrying the objects 200 that have been PECVD coated and supported by the multiple lifting heating plates 12 in the process chamber 1, and the lifting mechanism 48 causes the telescopic manipulator 4 to rise again and lift up the carrier plate 3 that has been PECVD coated. After that, the telescopic manipulator 4 causes the second bracket 43 and the fork arm 44 to retract while holding the carrier 3 of the object 200 coated with the PECVD film out of the process chamber 1; after the carrier 3 of the object 200 coated with the PECVD film exits the process chamber 1, the isolation valve is closed, and the multiple lifting heating plates 12 fall back to their original positions, and the telescopic manipulator 4 is in a fully retracted state in the transmission chamber 2, and the rotating mechanism 47 then causes the telescopic manipulator 4 to rotate 90 degrees in the opposite direction, and finally the lifting mechanism 48 causes the telescopic manipulator 4 to fall to the reset position and be in a Figure 5 The lowered and fully retracted posture shown allows the carrier plate 3 of the PECVD-coated object 200 to be placed on the conveying belt 22 of the conveying chamber 2, and then the conveying belt 22 is conveyed to the lower material chamber.

[0090] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A telescopic manipulator, characterized in that: The telescopic manipulator (4) comprises a driving device (41), a first bracket (42), a second bracket (43), a fork arm (44), a first horizontal reciprocating motion mechanism (45), and a second horizontal reciprocating motion mechanism (46); The first bracket (42) extends horizontally and is fixedly connected to the driving device (41). The second bracket (43) is suspended in the first bracket (42). The first horizontal reciprocating motion mechanism (45) is connected to the driving device (41) and the second bracket (43), and the first horizontal reciprocating motion mechanism (45) is used to drive the second bracket (43) to perform horizontal reciprocating motion relative to the first bracket (42) under the drive of the driving device (41) so that the second bracket (43) can be extended and retracted relative to the first bracket (42); The second horizontal reciprocating motion mechanism (46) is connected to the first bracket (42), the second bracket (43) and the fork arm (44). The second horizontal reciprocating motion mechanism (46) is used to drive the fork arm (44) to reciprocate horizontally in the same direction relative to the second bracket (43) while the second bracket (43) reciprocates horizontally relative to the first bracket (42) so that the fork arm (44) can be extended and retracted relative to the second bracket (43).

2. The telescopic manipulator according to claim 1, characterized in that: The first bracket (42) includes a bottom plate (421) and two side plates (422); The bottom plate (421) extends horizontally, and the bottom plate (421) is provided with a slot (421a) penetrating the bottom plate (421) along the up-down direction (D3) and extending along the first horizontal direction (D1) in which the fork arm (44) is telescoped; The two side plates (422) are parallel to each other in a second horizontal direction (D2) perpendicular to the first horizontal direction (D1), and the two side plates (422) are located on opposite sides of the slot (421a) in the second horizontal direction (D2); A sliding pair (P) is formed between each side plate (422) and a corresponding side of the second bracket (43), and the sliding pair (P) is used to suspend the second bracket (43) in the first bracket (42) and guide the second bracket (43) to reciprocate horizontally in a first horizontal direction (D1) relative to the first bracket (42); The first horizontal reciprocating motion mechanism (45) passes through the slot (421a) along the up-down direction (D3) to connect the driving device (41) and the second bracket (43).

3. The telescopic manipulator according to claim 2, characterized in that: The first horizontal reciprocating motion mechanism (45) comprises a first pulley (451), a second pulley (452), a first belt (453), and a first belt clamp (454); The first pulley (451) is connected to the driving device (41) so as to rotate under the drive of the driving device (41); The second pulley (452) is disposed below the bottom plate (421) of the first bracket (42) and is connected to the bottom plate (421); The first belt (453) is installed on the first pulley (451) and the second pulley (452) so as to move on the first pulley (451) and the second pulley (452) through the rotation of the first pulley (451) when the driving device (41) drives the first pulley (451) to rotate; The first belt clip (454) passes through the slot (421a) along the up-down direction (D3); the upper end of the first belt clip (454) is fixedly connected to the second bracket (43) from below; the lower end of the first belt clip (454) is fixedly connected to the upper part (453a) of the bottom plate (421) of the first belt (453) close to the first bracket (42); the first belt clip (454) is used to be driven by the horizontal reciprocating motion of the upper part (453a) of the first belt (453) when the first belt (453) moves, thereby driving the second bracket (43) to reciprocate relative to the first bracket (42) along the first horizontal direction (D1).

4. The telescopic manipulator according to claim 2, characterized in that: The second bracket (43) includes a first lateral plate (431), a second lateral plate (432), and an end plate (433); The first lateral plate (431) and the second lateral plate (432) extend along a first horizontal direction (D1) and are spaced apart from each other in a second horizontal direction (D2); The end plate (433) fixedly connects the first lateral plate (431) and the second lateral plate (432) at a side opposite to the fork arm (44) along the first horizontal direction (D1); A first sliding pair (P1) is formed between the first lateral plate (431) and the fork arm (44). A second sliding pair (P2) is formed between the second lateral plate (432) and the fork arm (44); The first sliding pair (P1) and the second sliding pair (P2) are used to make the fork arm (44) slide back and forth relative to the first lateral plate (431) and the second lateral plate (432) along the first horizontal direction (D1) when the second horizontal reciprocating mechanism (46) drives the fork arm (44) to reciprocate horizontally in the same direction relative to the second bracket (43) while the second bracket (43) reciprocates horizontally relative to the first bracket (42).

5. The telescopic manipulator according to claim 4, characterized in that: The second horizontal reciprocating motion mechanism (46) includes a second belt (461), a third belt (462), a second belt clamp (463), a third belt clamp (464), a third pulley (465), a fourth pulley (466), a fifth pulley (467), a sixth pulley (468), and a connecting shaft (469); The third pulley (465) and the fourth pulley (466) are disposed on a side of the first lateral plate (431) facing the second lateral plate (432) and are spaced apart from each other along the first horizontal direction (D1); The second belt (461) is connected to the third pulley (465) and the fourth pulley (466); The lower end of the second belt clamp (463) is fixedly connected to the bottom plate (421) of the first bracket (42), and the upper end of the second belt clamp (463) is fixedly connected to the lower part (461a) of the second belt (461). The second belt clamp (463) is used to drive the second belt (461) to reciprocate while the second bracket (43) reciprocates horizontally relative to the first bracket (42), thereby driving the third pulley (465) and the fourth pulley (466) to rotate; The fifth pulley (467) and the sixth pulley (468) are disposed on a side of the second lateral plate (432) facing the first lateral plate (431) and are spaced apart from each other along the first horizontal direction (D1); The fifth pulley (467) is opposite to the third pulley (465) in the second horizontal direction (D2); The connecting shaft (469) extends along the second horizontal direction (D2) and connects the fifth pulley (467) to the third pulley (465), and the connecting shaft (469) is used to be driven by the third pulley (465) when the third pulley (465) rotates, and then the connecting shaft (469) drives the fifth pulley (467) to rotate; The third belt (462) is connected to the fifth pulley (467) and the sixth pulley (468), and the third belt (462) is used to be driven to rotate on the fifth pulley (467) and the sixth pulley (468) when the fifth pulley (467) rotates; The upper end of the third belt clamp (464) is fixedly connected to the fork arm (44), and the lower end of the third belt clamp (464) is fixedly connected to the upper part (462a) of the third belt (462). The third belt clamp (464) is used to be driven by the upper part (462a) of the third belt (462) when the third belt (462) rotates on the fifth pulley (467) and the sixth pulley (468), thereby driving the fork arm (44) to reciprocate in the first horizontal direction (D1).

6. The telescopic manipulator according to claim 5, characterized in that: The second horizontal reciprocating motion mechanism (46) further comprises a support plate (S) and a bearing (B); The bearing (B) is arranged in the support plate (S), and the bearing (B) allows the connecting shaft (469) to pass through; The support plate (S) is fixedly connected to the end plate (433).

7. The telescopic manipulator according to claim 1, characterized in that: The fork arm (44) is used to support the carrier plate (3) from below in the middle of the carrier plate (3).

8. The telescopic manipulator according to claim 7, characterized in that: The telescopic manipulator (4) further comprises a rotating mechanism (47); The rotating mechanism (47) is used to drive the driving device (41), the first bracket (42), the second bracket (43), the fork arm (44), the first horizontal reciprocating motion mechanism (45), and the second horizontal reciprocating motion mechanism (46) to rotate together.

9. The telescopic manipulator according to claim 8, characterized in that: The telescopic manipulator (4) further comprises a lifting mechanism (48), The lifting mechanism (48) is connected to the rotating mechanism (47), and is used to drive the rotating mechanism (47), the driving device (41), the first bracket (42), the second bracket (43), the fork arm (44), the first horizontal reciprocating motion mechanism (45), and the second horizontal reciprocating motion mechanism (46) to lift and lower together.

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