Door body driving mechanism and process chamber

Abstract

The invention provides a door body driving mechanism and a process chamber. The door body driving mechanism comprises a first driving device and a second driving device, the second driving device comprises a second shell, and a containing cavity is formed in the second shell; the second driving piece is movably arranged in the containing cavity in the second direction so as to drive the door body to move in the second direction; the second connecting piece is connected to the second shell, the second connecting piece is further in driving connection with the first driving device, the first driving device is used for driving the second shell to move in the first direction through the second connecting piece, and a channel for providing driving force for the second driving piece is further formed in the second connecting piece. According to the door body driving mechanism, transverse movement of the door body is achieved by arranging the second driving device, so that the door body is pressed on the lining to achieve sealing or the door body is separated from the lining, and collision between the door body and the lining is effectively avoided while the sealing effect of the door body is guaranteed.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a door driving mechanism and a process chamber. Background Art

[0002] In the integrated circuit manufacturing process, a reaction chamber is provided inside a semiconductor device such as an etcher, an upper electrode is provided at the top of the reaction chamber, a liftable lower electrode is provided inside the reaction chamber, an inner lining is provided on the top of the reaction chamber, the top of the inner lining is connected to the upper electrode, and an assembly port matching the lower electrode is provided at the bottom. When the lower electrode rises to the assembly port, the upper electrode, the inner wall of the inner lining and the lower electrode together form an inner cavity for performing semiconductor processing, and an outer cavity is formed between the outer wall of the inner lining and the inner wall of the reaction chamber.

[0003] In order to facilitate the wafers to enter and exit the reaction chamber, a transfer port connected to the outer cavity is provided on the outer wall of the reaction chamber, and a wafer transfer notch connected to the inner cavity is provided on the inner lining. The transfer port corresponds to the wafer transfer notch, and the wafer is transferred through the transfer port and the wafer transfer notch by the robot. Since the integrity of the inner cavity needs to be ensured during the process, a liftable door mechanism is set in the outer cavity. During the process, the door body blocks the wafer transfer notch, so that the inner cavity forms a nearly complete circle, thereby improving the uniformity of the process environment inside the chamber and improving the process uniformity.

[0004] However, in the prior art, since the door body mechanism is lifted and lowered along the outer wall of the lining during the opening and closing process, in order to avoid friction between the door body and the outer wall of the lining during the opening and closing process, a movable gap is provided between the door body and the lining. Therefore, the inner cavity is not completely closed, which is not conducive to the stability and uniformity of the airflow, and the plasma is not completely shielded, and there is a risk of plasma leakage. Moreover, although there is a movable gap between the door body and the lining, the lifting rod is relatively long, which causes the door body to be lifted and lowered unsteadily. If the lifting and lowering movement is prolonged, there is a risk that the guide rod tilts and the lifting rod rubs against the inner wall of the reaction chamber or the lining. Therefore, how to effectively prevent the friction between the door body and the lining while ensuring the sealing effect of the inner cavity is a problem that needs to be solved urgently in this field. Summary of the invention

[0005] The present invention aims to solve the problem in the prior art that the door body and the inner lining cannot be completely sealed and there is a risk of scratching.

[0006] To achieve the purpose of the present invention, according to a first aspect of the present invention, a door driving mechanism for a process chamber is disclosed, comprising a first driving device and a second driving device, wherein the first driving device is used to drive the second driving device to move along a first direction, and the second driving device is used to drive the door to move along a second direction, wherein the second direction intersects with the first direction, and the second driving device comprises: a second shell, wherein a accommodating chamber is arranged in the second shell; a second driving member, wherein the second driving member is movably arranged in the accommodating chamber along the second direction to drive the door to move along the second direction; and a second connecting member, wherein the second connecting member is connected to the second shell, and the second connecting member is also drivingly connected to the first driving device, wherein the first driving device is used to drive the second shell to move along the first direction via the second connecting member, and a channel for providing driving force to the second driving member is also arranged in the second connecting member.

[0007] Further, the second driving device is a cylinder, the channel is a fluid channel, the fluid channel is connected to the accommodating chamber, and the fluid channel is used to provide fluid that drives the second driving member to move along the second direction.

[0008] Furthermore, the second driving device further comprises: a control valve, the control valve is arranged on the second connecting member, and the control valve is used to control the fluid to enter and exit the fluid channel.

[0009] Furthermore, the second driving member divides the accommodating chamber into a first cavity and a second cavity, the first cavity and the second cavity are distributed sequentially along the second direction, and the fluid channel is used to change the pressure difference between the first cavity and the second cavity by providing fluid to drive the second driving member to move along the second direction.

[0010] Further, the fluid channel includes a first fluid channel and a second fluid channel; the first fluid channel is connected to the first cavity, and the second fluid channel is connected to the second cavity; the fluid enters the first cavity through the first fluid channel or enters the second cavity through the second fluid channel to change the pressure difference between the first cavity and the second cavity.

[0011] Furthermore, the second driving member has a first position and a second position in the second direction; the first fluid channel is used to provide fluid to the first cavity, and the second fluid channel is used to discharge the fluid in the second cavity so that the second driving member moves from the first position to the second position.

[0012] Furthermore, the second fluid channel is further used to provide fluid to the second cavity, and the first fluid channel is further used to discharge the fluid in the first cavity, so that the second driving member moves from the second position to the first position.

[0013] Further, the second connecting member includes: a first connecting rod, the first connecting rod is a hollow tube, the first connecting rod has the first fluid channel inside, the first end of the first connecting rod is connected to the second shell, and the second end of the first connecting rod is connected to the first driving device; a second connecting rod, the second connecting rod is a hollow tube, the second connecting rod has the second fluid channel inside, the first end of the second connecting rod is connected to the second shell, the second end of the second connecting rod is connected to the first driving device, and the first connecting rod and the second connecting rod are spaced apart.

[0014] Furthermore, a fluid buffer structure is provided on the inner wall of the first cavity and / or the second cavity.

[0015] Furthermore, the second driving device also includes: a driving rod, which is inserted into the second shell and is movable in a second direction relative to the second shell. The first end of the driving rod is connected to the second driving member, and the second end of the driving rod is used to connect to the door body so that the second driving member drives the door body to move through the driving rod.

[0016] Furthermore, the second driving device further includes: a sealing member, which is disposed on the second housing and is used to seal a movable gap between the second housing and the driving rod.

[0017] Furthermore, the sealing member is a bellows, a first end of the bellows is sealingly connected to the second shell, the other end of the bellows is used to be sealingly connected to the door body, and the driving rod is located in the bellows.

[0018] Further, the first driving device includes: a bracket; a first driving member, the first driving member is movably arranged on the bracket, the first driving member is drivingly connected to the second connecting member, and is used to drive the second connecting member to move along the first direction; a first connecting member, the first connecting member is connected to the bracket, the first connecting member and the second connecting member are slidingly matched in the first direction, and the first connecting member and the second connecting member are limited in the second direction to limit the displacement of the second connecting member in the second direction.

[0019] Further, the first connecting member is a connecting plate, and a limiting through hole is provided on the connecting plate along the first direction, and the second connecting member is inserted into the limiting through hole; the second connecting member and the limiting through hole are slidingly matched in the first direction; the second connecting member and the limiting through hole are limitedly matched in the second direction; and the second connecting member and the limiting through hole are sealed.

[0020] Furthermore, the channel is a wiring channel, the wiring channel is communicated with the accommodating cavity, and the second driving member is electrically connected to an external power supply through the wiring channel.

[0021] Furthermore, the second driving member includes: a driving member body, the driving member body is made of metal, the driving member body is movably arranged in the accommodating cavity along the second direction, the driving member body is used to drive the door body to move, the driving member body has a first position and a second position in the second direction, and the driving member body switches between the first position and the second position by movement; an electromagnetic coil, the electromagnetic coil is used to drive the driving member body to move from the second position to the first position; a reset spring, the reset spring is connected between the driving member body and the inner wall of the accommodating cavity, and is used to reset the driving member body from the first position to the second position.

[0022] Further, the channel is a transmission channel, which is connected to the accommodating chamber; a transmission member is arranged through the transmission channel, and the transmission member is used to transmit an external driving force to the second driving member to drive the door body to move.

[0023] Furthermore, the second driving member includes: a driving member body, which is movably arranged in the accommodating cavity along the second direction, and the driving member body is used to drive the door body to move. At the same time, the driving member body and the second shell are limitedly matched in the circumferential direction; a screw rod, which is passed through the driving member body and threadedly connected to the driving member body, and the screw rod drives the driving member body to move in the second direction by rotation; and a driven gear, which is arranged at the end of the screw rod, and the driven gear is drivingly connected to the transmission member.

[0024] Furthermore, the transmission member is a transmission shaft, which is rotatably arranged in the transmission channel, one end of the transmission shaft is provided with a driving gear, the driving gear is meshed with the driven gear, and the other end of the transmission shaft is drivingly connected to a driving source.

[0025] According to a second aspect of the present invention, a process chamber is also disclosed, comprising: an inner lining structure having a film transmission gap; a door body adapted to the film transmission gap; and the above-mentioned door body driving mechanism, used to drive the door body to close the film transmission gap or open the film transmission gap.

[0026] Furthermore, it also includes: a chamber body, the lining structure is arranged in the chamber body, the lining structure divides the chamber body into an inner cavity and an outer cavity, the inner cavity is connected with the outer cavity through the film transmission gap, the door body is movably arranged in the outer cavity, and the door body is used to open and close the film transmission gap.

[0027] Further, the door body driving mechanism includes: a first driving device; a second driving device, the door body is arranged on the second driving device, and the second driving device is arranged on the first driving device, the first driving device is used to drive the second driving device to move along the first direction; while the second driving device moves along the first direction, it drives the door body to move along the first direction, and the second driving device is also used to drive the door body to move along the second direction, and the first direction intersects with the second direction; the door body has an open position for opening the film transmission gap and a closed position for closing the film transmission gap in the first direction, and under the drive of the first driving device, the door body moves between the open position and the closed position; in the second direction, the second driving device is used to move the door body located at the closed position toward or away from the film transmission gap, so that the door body abuts against the lining structure or forms a movable gap between the door body and the lining structure.

[0028] Further, the second driving device includes: a second shell, the second shell is arranged in the outer cavity, and a accommodating cavity is arranged in the second shell; a second driving member, the second driving member is movably arranged in the accommodating cavity along the second direction, and the second driving member is used to drive the door body to move along the second direction; a second connecting member, the second connecting member has a first end and a second end that are relatively arranged, the first end of the second connecting member is connected to the second shell, the second end of the second connecting member is located outside the chamber body, and the second end of the second connecting member is also drivingly connected to the first driving device, and the first driving device drives the second shell to move along the first direction through the second connecting member; the second connecting member has a fluid channel inside, the fluid channel is connected to the accommodating cavity, and the fluid channel is used to provide fluid from the outside of the chamber body to drive the second driving member to move along the second direction.

[0029] Further, the first driving device includes: a first connecting member, the chamber body is provided with a mounting port connected to the external cavity, the first connecting member is installed on the mounting port, and the first connecting member and the mounting port are sealed together; a bracket, the bracket is connected to the first connecting member, and the bracket is installed on the outside of the chamber body through the first connecting member; a first driving member, the first driving member is movably arranged on the bracket, and the first driving member is drivingly connected to the second end of the second connecting member for driving the second connecting member to move along the first direction.

[0030] Furthermore, the second connecting member is inserted into the first connecting member, and the first connecting member and the second connecting member are slidably matched in the first direction. At the same time, the first connecting member and the second connecting member are limitedly matched in the second direction to limit the displacement of the second connecting member in the second direction.

[0031] Furthermore, the first connecting member and the second connecting member are sealed together.

[0032] After the door driving mechanism is assembled on the reaction chamber, when closing the door, the first driving device can drive the second driving device and the door to rise and fall together. After rising to an appropriate position, the second driving device drives the door to move laterally, thereby pressing the door against the inner lining to achieve sealing. When opening the door, the second driving device is first used to separate the door from the inner lining, and then the first driving device drives the second driving device and the door to descend, thereby completing the opening of the door.

[0033] The door driving mechanism of the present invention can realize lateral movement of the door body by setting a second driving device, so that the door body can be pressed against the lining to achieve sealing or the door body and the lining can be separated, while ensuring the sealing effect of the door body, it can also effectively avoid the friction between the door body and the lining. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic structural diagram of a door driving mechanism according to a first embodiment of the present invention;

[0035] Figure 2 It is a structural schematic diagram of the second driving device of the door driving mechanism of the first embodiment of the present invention;

[0036] Figure 3 It is a cross-sectional view of the second housing of the door driving mechanism of the first embodiment of the present invention taken along the AA line;

[0037] Figure 4 It is a cross-sectional view of the second housing of the door driving mechanism of the first embodiment of the present invention along the line BB;

[0038] Figure 5An exploded view of the second driving device of the door driving mechanism of the first embodiment of the present invention;

[0039] Figure 6 An exploded view of a first driving device of a door driving mechanism according to a first embodiment of the present invention;

[0040] Figure 7 This is a diagram showing the coordination between the first driving device and the second connecting member of the door driving mechanism of the first embodiment of the present invention;

[0041] Figure 8 This is a schematic diagram of the structure of the door driving mechanism according to the second embodiment of the present invention;

[0042] Fig. 9 Schematic diagram of the structure of the door driving mechanism of the third embodiment of the present invention;

[0043] Fig.10 Schematic diagram of the structure of the process chamber of the fourth embodiment of the present invention;

[0044] List of reference numerals:

[0045] 10. First driving device; 11. Bracket; 12. First driving member; 13. First connecting member; 131. Position limiting through hole; 14. Sliding mechanism; 15. Servo motor; 20. Second driving device; 21. Second housing; 211. First cavity; 212. Second cavity; 213. First flow guiding channel; 214. Second flow guiding channel; 22. Second driving member; 221. Fluid buffer structure; 222. Driving member body; 223. Electromagnetic coil; 224. Return spring; 225. Cable; 226. Screw; 227 , driven gear; 23, second connecting member; 231, first connecting rod; 232, second connecting rod; 24, control valve; 241, first control valve; 242, second control valve; 25, sealing member; 26, driving rod; 27, transmission member; 271, driving gear; 40, fluid channel; 41, first fluid channel; 42, second fluid channel; 60, wiring channel; 70, transmission channel; 100, chamber body; 110, inner cavity; 120, outer cavity; 200, lining structure; 210, transmission notch; 300, door body. DETAILED DESCRIPTION

[0046] In order to enable those skilled in the art to better understand the technical solution of the present invention, the door driving mechanism and the process chamber provided by the present invention are described in detail below with reference to the accompanying drawings.

[0047] like Figures 1 to 7The first embodiment of the present invention shown in the figure discloses a door driving mechanism, which can be applied to various semiconductor process equipment such as etching machines to drive the door to close the film transmission gap or move away from the film transmission gap. The door driving mechanism of the embodiment of the present invention includes a first driving device 10 and a second driving device 20, wherein the second driving device 20 is arranged on the first driving device 10, and the first driving device 10 is used to drive the second driving device 20 to move along a first direction, and the second direction intersects with the first direction. In this embodiment, the first direction is Figure 1 The up and down directions in .

[0048] The second driving device 20 includes: a second housing 21, a second driving member 22, and a second connecting member 23. The second housing 21 is provided with a receiving chamber; the second driving member 22 is movably provided in the receiving chamber along the second direction to drive the door body 300 to move along the second direction. In this embodiment, the second direction is Figure 1 The left and right direction in .

[0049] The second connecting member 23 is connected to the second shell 21, and the second connecting member 23 is also drivingly connected to the first driving device 10. The first driving device 10 drives the second shell 21 to move along the first direction through the second connecting member 23. The second connecting member 23 has a fluid channel 40 inside, and the fluid channel 40 is connected to the accommodating cavity. The fluid channel 40 is used to provide fluid that drives the second driving member 22 to move along the second direction.

[0050] When in use, the first driving device 10 drives the second connecting member 23 to move, and the second connecting member 23 drives the second shell 21 and the second driving member 22 in the second shell 21 to move along the first direction; when moving to the preset position, the second connecting member 23 stops moving, and the second shell 21 and the second driving member 22 also stop moving together, and the fluid channel 40 inside the second connecting member 23 provides fluid to the accommodating chamber, and drives the second driving member 22 to move in the second direction through the fluid, so that the second driving member 22 can drive the door body 300 to move along the second direction.

[0051] After the door driving mechanism is assembled on the reaction chamber, the door driving mechanism is used to drive the door 300. When closing the door 300, the first driving device 10 can drive the second driving device 20 and the door 300 to rise and fall together. After rising to an appropriate position, the second driving device 20 drives the door 300 to move laterally, thereby pressing the door 300 against the lining structure to achieve sealing. When opening the door 300, the second driving device 20 is used to separate the door 300 from the lining structure, and then the first driving device 10 drives the second driving device 20 and the door 300 to descend, thereby completing the opening of the door 300.

[0052] The door body driving mechanism of the present invention can realize lateral movement of the door body 300 by setting a second driving device 20, so that the door body 300 can be pressed against the lining structure to achieve sealing or the door body 300 can be separated from the lining. While ensuring the sealing effect of the door body 300, it also effectively avoids the friction between the door body 300 and the lining structure.

[0053] It should be noted that the driving source and the driving member of the traditional driving device are close to each other because they need to be connected by driving. For example, in the traditional motor driving mechanism, the driving motor is used as the driving source to drive the screw to rotate and then drive the slider on the screw to move. Due to the existence of the slider structure of the driving motor, the overall volume of the traditional motor driving mechanism is large and cannot be installed in a small space.

[0054] The reason why the embodiment 1 of the present invention can realize the lateral drive of the door body 300 in a narrow space is that in this embodiment, the second drive device 20 is a cylinder, the second drive member 22 is a piston in the cylinder, and by arranging a fluid channel 40 in the second connecting member 23, and connecting the fluid channel 40 with the inside of the second housing 21, the fluid that drives the second drive member 22 to move can be provided to the inside of the second housing 21 through the fluid channel 40, thereby driving the second drive member 22 to move in the second direction. In this way, the driving source can be separately arranged from the second housing 21 and the second drive member 22, so that the overall size of the second drive device 20 is smaller, so that lateral movement in a narrow space can be achieved. Moreover, by arranging the fluid channel 40 in the inside of the second connecting member 23, the second connecting member 23 can not only play the role of driving the second housing 21, but also make the second connecting member 23 play the role of providing fluid, which is a typical one-piece multi-purpose, and can also make the second connecting member 23 lightweight, eliminating a separate fluid pipeline, and greatly reducing the cost of transformation.

[0055] like Figure 2 As shown, in this example, the second driving member 22 divides the accommodating chamber into a first chamber 211 and a second chamber 212, and the first chamber 211 and the second chamber 212 are distributed sequentially along the second direction. The fluid channel 40 changes the pressure difference between the first chamber 211 and the second chamber 212 by providing fluid to drive the second driving member 22 to move along the second direction.

[0056] exist Figure 2 In the embodiment, the first cavity 211 is located on the left side of the second cavity 212. When fluid is supplied to the first cavity 211, the pressure in the first cavity 211 increases. When the pressure in the first cavity 211 is greater than the pressure in the second cavity 212, the second driving member 22 moves to the Figure 2The first cavity 211 gradually expands and the second cavity 212 gradually shrinks. When fluid is supplied to the second cavity 212, the pressure in the second cavity 212 increases. When the pressure in the second cavity 212 is greater than the pressure in the first cavity 211, the second driving member 22 moves to the right side. Figure 2 As the first cavity 211 moves to the left, the first cavity 211 gradually shrinks and the second cavity 212 gradually expands.

[0057] like Figures 2 to 4 In the first embodiment shown, in this embodiment, the fluid channel 40 includes a first fluid channel 41 and a second fluid channel 42. A first flow guide channel 213 and a second flow guide channel 214 are provided in the second housing 21. The first fluid channel 41 is communicated with the first cavity 211 through the first flow guide channel 213, and the second fluid channel 42 is communicated with the second cavity 212 through the second flow guide channel 214. The fluid enters the first cavity 211 through the first fluid channel 41 or enters the second cavity 212 through the second fluid channel 42 to change the pressure difference between the first cavity 211 and the second cavity 212.

[0058] Specifically, the second connecting member 23 includes a first connecting rod 231 and a second connecting rod 232. Figure 3 As shown, the first connecting rod 231 is a hollow tube, the interior of the first connecting rod 231 is a first fluid channel 41, the first end of the first connecting rod 231 is connected to the second shell 21, the first fluid channel 41 is connected to the first guide channel 213, and the second end of the first connecting rod 231 is connected to the first drive device 10.

[0059] like Figure 4 As shown, the second connecting rod 232 is a hollow tube, the interior of the second connecting rod 232 is a second fluid channel 42, the first end of the second connecting rod 232 is connected to the second housing 21, the second end of the second connecting rod 232 is connected to the first driving device 10, and the second fluid channel 42 is connected to the second guide channel 214. Figure 6 As shown, the first connecting rod 231 and the second connecting rod 232 are arranged at an interval.

[0060] like Figure 2 As shown, the second driving member 22 has a first position and a second position in the second direction; the first fluid channel 41 is used to provide fluid to the first cavity 211, and the second fluid channel 42 is used to discharge the fluid in the second cavity 212 to move the second driving member 22 from the first position to the second position.

[0061] That is, when the second driving member 22 needs to be driven to move from the first position to the second position (from Figure 2 ), the first fluid channel 41 provides fluid to the first cavity 211 , and at the same time, the fluid in the second cavity 212 is discharged from the second fluid channel 42 .

[0062] The second fluid channel 42 is further used to provide fluid to the second cavity 212 , and the first fluid channel 41 is further used to discharge the fluid in the first cavity 211 , so that the second driving member 22 moves from the second position to the first position.

[0063] In other words, when the second driving member 22 needs to be driven to move from the second position to the first position (from Figure 2 ), the second fluid channel 42 provides fluid to the second cavity 212, and at the same time, the fluid in the first cavity 211 is discharged from the first fluid channel 41.

[0064] It is understandable that, in order to ensure the flow of fluid in and out of the pipeline, the second drive device 20 further includes: a control valve 24 , which is disposed on the second connecting member 23 and is used to control the flow of fluid in and out of the fluid channel 40 .

[0065] like Figure 6 As shown, a first control valve 241 is provided on the first connecting rod 231, and a second control valve 242 is provided on the second connecting rod 232. The first control valve 241 and the second control valve 242 may be three-way valves, and the first end of the first control valve 241 is connected to the fluid source, the second end is connected to the first fluid channel 41, and the third end is connected to the outside. The first end of the second control valve 242 is connected to the fluid source, the second end is connected to the second fluid channel 42, and the third end is connected to the outside.

[0066] When the second driving member 22 moves from the first position to the second position, the first end of the first control valve 241 is connected to the second end, and the fluid of the fluid source passes through the first control valve 241, the first fluid channel 41, and the first guide channel 213 in sequence to reach the first cavity 211, and pushes the second driving member 22 to Figure 2 The valve 242 moves to the right, and at the same time, the second end of the second control valve 242 is connected to the third end, and the fluid in the second cavity 212 is discharged through the second guide channel 214, the second fluid channel 42, and the second control valve 242 in sequence.

[0067] When the second driving member 22 moves from the second position to the first position, the first end of the second control valve 242 is connected to the second end, and the fluid of the fluid source passes through the second control valve 242, the second fluid channel 42, and the second guide channel 214 in sequence to reach the second cavity 212, and pushes the second driving member 22 to move to the first position. Figure 2 The valve 241 moves to the left, and at the same time, the second end of the first control valve 241 is connected to the third end, and the fluid in the first cavity 211 is discharged through the first guide channel 213, the first fluid channel 41, and the first control valve 241 in sequence.

[0068] It should be noted that, although in the present embodiment, the fluid channel 40 includes the first fluid channel 41 and the second fluid channel 42, this is not restrictive. In some other embodiments not shown in the figure, the fluid channel 40 can also be one, for example: the fluid channel 40 is only connected to one of the first cavity 211 or the second cavity 212, and the other is a closed cavity. When the pressure in one cavity is greater than the other, the second driving member 22 can be driven to move by the pressure difference. In other words, without violating the principle of the present invention, as long as the second driving member 22 is driven to move by the pressure difference, it is within the protection scope of the present invention.

[0069] Furthermore, in order to avoid clogging of the second driving member 22 , a fluid cache structure 221 is provided on the inner wall of the first cavity 211 and / or the second cavity 212 . Preferably, the fluid cache structure 221 is provided on the second driving member 22 .

[0070] like Figure 5 As shown, the second driving device 20 further includes a driving rod 26 and a sealing member 25 .

[0071] See also Figure 2 The driving rod 26 is disposed on the second housing 21. The driving rod 26 is movable relative to the second housing 21 along the second direction. The first end of the driving rod 26 is connected to the second driving member 22. The second end of the driving rod 26 is used to connect to the door body 300, so that the second driving member 22 drives the door body 300 to move through the driving rod 26. The sealing member 25 is disposed on the second housing 21 and is used to seal the movable gap between the second housing 21 and the driving rod 26. The driving rod 26 and the second housing 21 are sealed and connected through the sealing member 25. In this embodiment, the sealing member 25 is a bellows. The first end of the bellows is sealed and connected to the second housing 21. The other end of the bellows is used to be sealed and connected to the door body 300. The driving rod 26 is located in the bellows.

[0072] like Figure 1 , Figure 6 and Figure 7 As shown, the first driving device 10 includes: a bracket 11, a first driving member 12, a first connecting member 13, a sliding mechanism 14 and a servo motor 15. Figure 1 As shown, the first connecting member 13 is fixedly connected to the first end of the bracket 11 by bolts, the servo motor 15 is fixed to the second end of the bracket 11, the sliding mechanism 14 is installed on the bracket 11 between the first end and the second end, and the first driving member 12 is fixedly connected to the sliding mechanism 14, that is, the first driving member 12 is movably arranged on the bracket 11 through the sliding mechanism 14, and the first driving member 12 is drivingly connected to the second connecting member 23 for driving the second connecting member 23 to move along the first direction.

[0073] When in use, the servo motor 15 drives the sliding mechanism 14 so that the sliding mechanism 14 drives the first driving member 12 to move between the first end and the second end of the bracket 11, and the moving first driving member 12 drives the second connecting member 23 to move in the first direction.

[0074] like Figure 6 and Figure 7 As shown, the first connecting member 13 and the second connecting member 23 are slidably matched in the first direction, and at the same time, the first connecting member 13 and the second connecting member 23 are limitedly matched in the second direction to limit the displacement of the second connecting member 23 in the second direction.

[0075] Specifically, if Figure 7 As shown, the first connecting member 13 is a connecting plate, and a limiting through hole 131 is provided on the connecting plate along the first direction, and the second connecting member 23 is inserted into the limiting through hole 131; the second connecting member 23 and the limiting through hole 131 are slidably matched in the first direction, and at the same time, the second connecting member 23 and the limiting through hole 131 are limitedly matched in the second direction. In other words, the second connecting member 23 is Figure 7 It can move relative to the limit hole 131 in the up and down direction, but Figure 7 The second connecting member 23 cannot move relative to the limiting through hole 131 in the left-right direction.

[0076] When the second driving member 22 drives the door body 300 to move in the second direction, the reaction force is transmitted to the second connecting member 23. Under the action of the reaction force, the second connecting member 23 is easy to move in the second direction ( Figure 7 The second connecting member 23 does not shake in the left and right directions (in the left and right directions), and the limiting through hole 131 is provided to limit the second connecting member 23 in the second direction, so that there are two limiting points in the second direction on the second connecting member 23, thereby effectively preventing the second connecting member 23 from shaking in the second direction due to the reaction force, thereby improving the sealing effect of the door body 300 and preventing gas leakage.

[0077] In order to further prevent gas leakage, the first connecting member 13 and the second connecting member 23 are sealed together, that is, the second connecting member 23 and the limiting through hole 131 are sealed together. In this embodiment, the second connecting member 23 and the limiting through hole 131 are sealed by a sealing member 25. Figure 7 As shown, the sealing member 25 may be a bellows, one end of which is sealedly connected to the first connecting member 13 , and the other end of which is sealedly connected to the second connecting member 23 .

[0078] That is to say, the first connecting member 13 not only has the function of limiting the second direction, but also has the function of sealing, which is a typical multi-purpose object.

[0079] It should be noted that, in this embodiment, although the sealing member 25 is a bellows, the bellows of this embodiment has less friction resistance than the sealing ring while ensuring sealing. However, this is not restrictive. In some other embodiments not shown in the figure, the sealing member 25 can also be a sealing ring arranged between the inner wall of the limiting through hole 131 and the second connecting member 23. In other words, as long as the second connecting member 23 and the sealing through hole are sealed, they are within the protection scope of the present invention.

[0080] It should also be noted that, in this embodiment, the fluid that drives the second driving member 22 to move can be gas or liquid. When the fluid is gas, the driving source can be an air pump. When the fluid is liquid, the driving source can be a liquid pump.

[0081] It should be noted that in the first embodiment, the second driving device is a cylinder. Therefore, in order to match the cylinder, the channel in the second connecting member 23 is a fluid channel 40 for circulating fluid. However, this is not restrictive. Figure 8 In the second embodiment shown, the channel in the second connecting member 23 may be a routing channel 60 for passing the cable 225, and in Fig. 9 In the third embodiment shown, the channel is a transmission channel 70 for passing the transmission member 27. That is to say, as long as a channel for providing driving force to the second driving member 22 is provided in the second connecting member 23, it is within the protection scope of the present invention.

[0082] The following are combined Figure 8 and Fig. 9 The second and third embodiments are described in detail:

[0083] like Figure 8 The second embodiment shown also discloses a door driving mechanism, which is basically the same as the first embodiment, except that the second driving device 20 includes: a second shell 21, a second driving member 22 and a second connecting member 23, and the second shell 21 is provided with a accommodating chamber; the second driving member 22 is arranged in the accommodating chamber, and the second driving member 22 is used to drive the door body to move along the second direction, and the second direction intersects with the first direction; the second connecting member 23 is connected to the second shell 21, and the second connecting member 23 is also drivingly connected to the first driving device 10, and the first driving device 10 drives the second shell 21 to move along the first direction through the second connecting member 23; the second connecting member 23 has a wiring channel 60 inside, and the wiring channel 60 is connected to the accommodating chamber, and the cable 225 of the second driving member 22 is electrically connected to the external power supply through the wiring channel 60.

[0084] In the second embodiment of the present invention, the door body 300 is driven to move along the second direction by electromagnetic drive, so as to achieve the sealing and separation between the door body 300 and the liner. By providing a wiring channel 60 in the second connecting member 23, the cable 225 can be extended to the outside and connected to an external power supply, thereby reducing the volume of the second driving device 20, reducing the installation space, and avoiding interference with the plasma.

[0085] Specifically, if Figure 8 As shown, the second driving member 22 includes: a driving member body 222, an electromagnetic coil 223 and a reset spring 224. Taking the driving member body 222 as an iron core as an example, the driving member body 222 is movably arranged in the accommodating cavity along the second direction, and the driving member body 222 is used to drive the door body 300 to move. The driving member body 222 has a first position and a second position in the second direction, and the driving member body 222 switches between the first position and the second position by moving; the electromagnetic coil 223 is used to drive the driving member body 222 to move from the second position to the first position; the reset spring 224 is connected between the driving member body 222 and the inner wall of the accommodating cavity, and is used to reset the driving member body 222 from the first position to the second position.

[0086] In the power-off state, the return spring 224 pushes the driver body 222 to the second position. In order to avoid interference or friction between the door body 300 and the lining structure 200, when the transmission plate gap 210 needs to be closed, the electromagnetic coil 223 is first energized. After the energization, the electromagnetic coil 223 magnetically attracts the driver body 222. The magnetic attraction force of the electromagnetic coil 223 is greater than the elastic force of the return spring 224, so that the driver body 222 moves from the second position to the first position, that is, Figure 8 The first drive member 12 is then driven by the first drive device 10 to move along the first direction. After moving to the position corresponding to the transmission notch 210, the electromagnetic coil 223 is powered off, the magnetic attraction disappears, and the drive member body 222 is reset to the second position under the drive of the reset spring 224, so that the door body 300 is pressed against the lining structure 200 to achieve sealing.

[0087] After the process is completed, when the transmission gap 210 is opened, the electromagnetic coil 223 is energized first. The electromagnetic coil 223 after being energized magnetically attracts the driving member body 222. The magnetic attraction force of the electromagnetic coil 223 is greater than the elastic force of the return spring 224, so that the driving member body 222 moves from the second position to the first position. Figure 8 The first drive member 12 is then driven by the first drive device 10 to move along the first direction, thereby opening the film transmission gap 210.

[0088] It is understandable that, since the door body 300 is pressed against the inner lining, the electromagnetic coil 223 is in a power-off state and will not generate an electric field or a magnetic field. Therefore, it will not affect the plasma in the process, thereby ensuring the accuracy of the process.

[0089] like Fig. 9 The third embodiment shown also discloses a door body driving mechanism, which is basically the same as the first embodiment, except that the second driving device 20 includes: a second shell 21, a second driving member 22, a second connecting member 23 and a transmission member 27, and a accommodating chamber is arranged in the second shell 21; the second driving member 22 is arranged in the accommodating chamber, and the second driving member 22 is used to drive the door body 300 to move along the second direction, and the second direction intersects with the first direction; the second connecting member 23 is connected to the second shell 21, and the second connecting member 23 is also drivingly connected to the first driving device 10, and the first driving device 10 drives the second shell 21 to move along the first direction through the second connecting member 23; the second connecting member 23 has a transmission channel 70 inside, and the transmission channel 70 is connected to the accommodating chamber; the transmission member 27 is arranged through the transmission channel 70, and the transmission member 27 is used to transmit the external driving force to the second driving member 22 to drive the door body 300 to move.

[0090] In the third embodiment of the present invention, the door body 300 is driven to move along the second direction by mechanical driving, so as to achieve the sealing and separation between the door body 300 and the inner lining. By setting the transmission channel 70 in the second connecting member 23, the transmission member 27 can be extended to the outside and connected to the external driving source, thereby reducing the volume of the second driving device 20 and reducing the installation space.

[0091] Specifically, if Fig. 9 As shown, the second driving member 22 includes: a driving member body 222, a screw rod 226, and a driven gear 227. The driving member body 222 is movably arranged in the accommodating cavity along the second direction, and the driving member body 222 is used to drive the door body 300 to move. At the same time, the driving member body 222 and the second shell 21 are matched in the circumferential upper limit. In other words, a slide groove is arranged on the inner wall of the accommodating cavity, and a slide rail is arranged on the driving member body 222. The slide groove is arranged along the second direction, and the slide rail is arranged in the slide groove and can slide along the second direction, so that the driving member body 222 can move in the second direction, and at the same time, the axial upper limit is matched with the second shell 21.

[0092] The driving member body 222 is provided with a threaded through hole, the screw 226 is inserted into the threaded through hole and is threadedly connected with the driving member body 222, the screw 226 drives the driving member body 222 to move in the second direction by rotation, and the driven gear 227 is provided at the end of the screw 226, and the driven gear 227 is drivingly connected with the transmission member 27. The transmission member 27 is a transmission shaft, which is rotatably provided in the transmission channel 70, and a driving gear 271 is provided at one end of the transmission shaft, and the driving gear 271 is meshed with the driven gear 227, and the other end of the transmission shaft is drivingly connected with a driving source. Among them, the external driving source can be a motor.

[0093] When in use, when the transmission gap 210 needs to be closed, the first driving device 10 first drives the first driving member 12 to move along the first direction. After moving to the position corresponding to the transmission gap 210, the motor is turned on, and the motor drives the transmission shaft to rotate. The transmission shaft drives the screw 226 to rotate through the driven gear 227. The rotating screw 226 causes the driving member body 222 to move from the first position to the second position, that is, Fig. 9 The door body 300 moves from left to right, thereby pressing the door body 300 against the lining structure 200 .

[0094] When the film transmission gap 210 needs to be opened, the motor rotates the rod in the opposite direction to move the metal drive from the second position to the first position. Fig. 9 The first drive member 12 is then driven by the first drive device 10 to move along the first direction, thereby opening the film transmission gap 210.

[0095] The invention also discloses a process chamber, comprising the door driving mechanism mentioned above.

[0096] like Fig.10 In the fourth embodiment shown, a semiconductor process setting is also disclosed, including: a chamber body 100, a lining structure 200, a door body 300 and a door body driving mechanism.

[0097] The lining structure 200 is arranged in the chamber body 100, and the lining structure 200 divides the interior of the chamber body 100 into an inner cavity 110 and an outer cavity 120. The lining structure 200 has a film transmission gap 210 that connects the inner cavity 110 with the outer cavity 120. The door body 300 is movably arranged in the outer cavity 120. The door body 300 is used to open and close the film transmission gap 210. The door body driving mechanism is connected to the door body 300 for driving the door body 300 to move.

[0098] The door driving mechanism comprises: a first driving device 10 and a second driving device 20 .

[0099] The door body 300 is disposed on the second driving device 20 , and the second driving device 20 is disposed on the first driving device 10 . The first driving device 10 is used to drive the second driving device 20 to move along a first direction.

[0100] When the second driving device 20 moves along the first direction, it drives the door body 300 to move along the first direction. The second driving device 20 is also used to drive the door body 300 to move along the second direction. The first direction intersects with the second direction.

[0101] The door body 300 has an open position in the first direction to open the transmission gap 210 and a closed position to close the transmission gap 210. Driven by the first driving device 10, the door body 300 moves between the open position and the closed position.

[0102] In the second direction, the second driving device 20 is used to move the door body 300 in the closed position toward or away from the transmission plate gap 210 so that the door body 300 abuts against the lining structure 200 or a movable gap is formed between the door body 300 and the lining structure 200.

[0103] When the film transmission gap 210 needs to be closed, the first driving device 10 first drives the second driving device 20 and the door body 300 on the second driving device 20 to move along the first direction to the closed position, and then the second driving device 20 drives the door body 300 to press against the lining structure 200, thereby closing the film transmission gap 210.

[0104] When the film transmission gap 210 needs to be opened, the second driving device 20 is first used to drive the door body 300 to separate from the lining structure 200 to form a movable gap therebetween, and then the first driving device 10 drives the second driving device 20 and the door body 300 on the second driving device 20 to move along the first direction to the open position, thereby opening the film transmission gap 210.

[0105] The process chamber of the present invention is equipped with a second driving device 20 in the inner cavity 110, so that the door body 300 can be moved horizontally, so that the door body 300 is pressed against the lining to achieve sealing or the door body 300 is separated from the lining. While ensuring the sealing effect of the door body 300, it also effectively avoids the friction between the door body 300 and the lining.

[0106] In this embodiment, the structures of the first drive device 10 and the second drive device 20 are the same as those in the first embodiment. Therefore, they are not described in detail. In this embodiment, the specific assembly position of the second drive device 20 and the cooperation between the first drive device 10 and the second drive device 20 are further described.

[0107] The second shell 21 is arranged in the outer cavity 120, and the second driving member 22 is driven and connected to the door body 300 through the driving rod 26. The driving rod 26 is penetrated by the second shell 21, and the driving rod 26 is movable along the second direction relative to the second shell 21. The first end of the driving rod 26 is connected to the second driving member 22, and the second end of the driving rod 26 is used to connect with the door body 300, so that the second driving member 22 drives the door body 300 to move through the driving rod 26.

[0108] The second driving device 20 also includes: a seal 25, which is arranged on the second shell 21 and is used to seal the movable gap between the second shell 21 and the driving rod 26. The driving rod 26 and the second shell 21 are sealed and connected via the seal 25. In this embodiment, the seal 25 is a bellows, and the first end of the bellows is sealed and connected to the second shell 21, and the other end of the bellows is used to be sealed and connected to the door body 300, and the driving rod 26 is located in the bellows.

[0109] The second connecting member 23 has a first end and a second end that are arranged opposite to each other. The first end of the second connecting member 23 is connected to the second shell 21 , the second end of the second connecting member 23 is located outside the chamber body 100 , and the second end of the second connecting member 23 is also drivingly connected to the first driving device 10 .

[0110] The chamber body 100 is provided with an installation opening which is in communication with the outer chamber 120 . The first connecting member 13 is installed on the installation opening by means of bolts. The first connecting member 13 is sealed with the installation opening.

[0111] The bracket 11 is connected to the first connecting member 13, and the bracket 11 is installed on the outside of the chamber body 100 through the first connecting member 13. The first driving member 12 is movably arranged on the bracket 11, and the second end of the second connecting member 23 is fixedly connected to the first driving member 12, so that the first driving member 12 can drive the second connecting member 23 to move along the first direction.

[0112] The second connecting member 23 is inserted into the first connecting member 13 , and the first connecting member 13 and the second connecting member 23 are slidably matched in the first direction. At the same time, the first connecting member 13 and the second connecting member 23 are limitedly matched in the second direction to limit the displacement of the second connecting member 23 in the second direction. The first connecting member 13 and the second connecting member 23 are sealed.

[0113] It can be seen that after the first driving device 10 is assembled to the chamber body 100 through the first connecting member 13, the first connecting member 13 not only has the original limiting and sealing functions for the second connecting member 23, but also takes into account the sealing of the chamber body 100 to prevent the gas in the outer cavity 120 from leaking from the installation port to the outside of the chamber body 100, which is a typical one-item-for-multiple-purposes.

[0114] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A door driving mechanism for a process chamber, characterized in that: The invention comprises a first driving device (10) and a second driving device (20), wherein the first driving device (10) is used to drive the second driving device (20) to move along a first direction, and the second driving device (20) is used to drive the door body (300) to move along a second direction, wherein the second direction intersects with the first direction, and the second driving device (20) comprises: A second shell (21), wherein a receiving cavity is provided in the second shell (21); a second driving member (22), the second driving member (22) being movably disposed in the accommodating cavity along the second direction so as to drive the door body (300) to move along the second direction; A second connecting member (23), the second connecting member (23) is connected to the second shell (21), the second connecting member (23) is also drivingly connected to the first driving device (10), the first driving device (10) is used to drive the second shell (21) to move along the first direction through the second connecting member (23), and the second connecting member (23) is also provided with a channel for providing driving force to the second driving member (22).

2. The door driving mechanism according to claim 1, characterized in that: The second driving device (20) is a cylinder, The channel is a fluid channel (40), the fluid channel (40) is in communication with the accommodating chamber, and the fluid channel (40) is used to provide a fluid for driving the second driving member (22) to move along the second direction.

3. The door driving mechanism according to claim 2, characterized in that: The second driving device (20) further comprises: A control valve (24), wherein the control valve (24) is arranged on the second connecting member (23), and the control valve (24) is used to control the flow of fluid into and out of the fluid channel (40).

4. The door driving mechanism according to claim 2, characterized in that: The second driving member (22) divides the accommodating chamber into a first chamber (211) and a second chamber (212); the first chamber (211) and the second chamber (212) are sequentially distributed along the second direction; and the fluid channel (40) is used to change the pressure difference between the first chamber (211) and the second chamber (212) by providing fluid, so as to drive the second driving member (22) to move along the second direction.

5. The door driving mechanism according to claim 4, characterized in that: The fluid channel (40) comprises a first fluid channel (41) and a second fluid channel (42); The first fluid channel (41) is in communication with the first cavity (211), and the second fluid channel (42) is in communication with the second cavity (212); The fluid enters the first cavity (211) through the first fluid channel (41) or enters the second cavity (212) through the second fluid channel (42) to change the pressure difference between the first cavity (211) and the second cavity (212).

6. The door driving mechanism according to claim 5, characterized in that: The second driving member (22) has a first position and a second position in the second direction; The first fluid channel (41) is used to provide fluid to the first cavity (211), and the second fluid channel (42) is used to discharge the fluid in the second cavity (212), so that the second driving member (22) moves from the first position to the second position.

7. The door driving mechanism according to claim 6, characterized in that: The second fluid channel (42) is also used to provide fluid to the second cavity (212), and the first fluid channel (41) is also used to discharge the fluid in the first cavity (211) so as to move the second driving member (22) from the second position to the first position.

8. The door driving mechanism according to claim 5, characterized in that: The second connecting member (23) comprises: A first connecting rod (231), wherein the first connecting rod (231) is a hollow tube, the interior of the first connecting rod (231) is the first fluid channel (41), the first end of the first connecting rod (231) is connected to the second housing (21), and the second end of the first connecting rod (231) is connected to the first driving device (10); A second connecting rod (232), the second connecting rod (232) is a hollow tube, the interior of the second connecting rod (232) is the second fluid channel (42), the first end of the second connecting rod (232) is connected to the second shell (21), the second end of the second connecting rod (232) is connected to the first driving device (10), and the first connecting rod (231) and the second connecting rod (232) are arranged at an interval.

9. The door driving mechanism according to claim 4, characterized in that: A fluid buffer structure (221) is provided on the inner wall of the first cavity (211) and / or the second cavity (212).

10. The door driving mechanism according to claim 2, characterized in that: The second driving device (20) further comprises: A driving rod (26), wherein the driving rod (26) is passed through the second shell (21), and the driving rod (26) is movable along a second direction relative to the second shell (21). The first end of the driving rod (26) is connected to the second driving member (22), and the second end of the driving rod (26) is used to connect to the door body (300), so that the second driving member (22) drives the door body (300) to move through the driving rod (26).

11. The door driving mechanism according to claim 10, characterized in that: The second driving device (20) further comprises: A sealing member (25), wherein the sealing member (25) is arranged on the second housing (21) and is used for sealing a movable gap between the second housing (21) and the driving rod (26).

12. The door driving mechanism according to claim 11, characterized in that: The sealing member (25) is a bellows, the first end of which is sealingly connected to the second shell (21), the other end of which is used to be sealingly connected to the door body (300), and the driving rod (26) is located inside the bellows.

13. The door driving mechanism according to claim 1, characterized in that: The first driving device (10) comprises: Bracket (11); a first driving member (12), the first driving member (12) being movably disposed on the bracket (11), the first driving member (12) being drivingly connected to the second connecting member (23) and being used for driving the second connecting member (23) to move along a first direction; A first connecting member (13), wherein the first connecting member (13) is connected to the bracket (11), the first connecting member (13) and the second connecting member (23) are slidably matched in the first direction, and the first connecting member (13) and the second connecting member (23) are limitedly matched in the second direction to limit the displacement of the second connecting member (23) in the second direction.

14. The door driving mechanism according to claim 13, characterized in that: The first connecting member (13) is a connecting plate, the connecting plate is provided with a limiting through hole (131) arranged along the first direction, and the second connecting member (23) is inserted into the limiting through hole (131); The second connecting member (23) and the limiting through hole (131) are slidably matched in the first direction; The second connecting member (23) cooperates with the limiting through hole (131) in limiting position in the second direction; The second connecting member (23) is sealed and matched with the limiting through hole (131).

15. The door driving mechanism according to claim 1, characterized in that: The channel is a wiring channel (60), the wiring channel (60) is communicated with the accommodating cavity, and the second driving member (22) is electrically connected to an external power source through the wiring channel (60).

16. The door driving mechanism according to claim 15, characterized in that: The second driving member (22) comprises: A driving member body (222), wherein the driving member body (222) is made of metal, and the driving member body (222) is movably arranged in the accommodating cavity along the second direction, and the driving member body (222) is used to drive the door body (300) to move, and the driving member body (222) has a first position and a second position in the second direction, and the driving member body (222) switches between the first position and the second position by moving; an electromagnetic coil (223), the electromagnetic coil (223) being used to drive the driving member body (222) to move from the second position to the first position; A return spring (224), wherein the return spring (224) is connected between the driving member body (222) and the inner wall of the accommodating cavity, and is used for returning the driving member body (222) from the first position to the second position.

17. The door driving mechanism according to claim 1, characterized in that: The channel is a transmission channel (70), and the transmission channel (70) is in communication with the accommodating chamber; A transmission member (27), wherein the transmission member (27) is disposed through the transmission channel (70), and the transmission member (27) is used to transmit an external driving force to the second driving member (22) to drive the door body (300) to move.

18. The door driving mechanism according to claim 17, characterized in that: The second driving member (22) comprises: A driving member body (222), the driving member body (222) is movably disposed in the accommodating cavity along a second direction, the driving member body (222) is used to drive the door body (300) to move, and at the same time, the driving member body (222) and the second shell (21) are matched in a circumferential limit position; a screw rod (226), the screw rod (226) being passed through the driving member body (222) and being threadedly connected to the driving member body (222), the screw rod (226) driving the driving member body (222) to move in a second direction by rotating; A driven gear (227), wherein the driven gear (227) is arranged at the end of the screw rod (226), and the driven gear (227) is drivingly connected to the transmission member (27).

19. The door driving mechanism according to claim 18, characterized in that: The transmission member (27) is a transmission shaft, which is rotatably arranged in the transmission channel (70), one end of the transmission shaft is provided with a driving gear (271), the driving gear (271) is meshed with the driven gear (227), and the other end of the transmission shaft is drivingly connected to a driving source.

20. A process chamber, characterized in that: include: The lining structure (200) has a film transmission gap (210); The door body (300) is adapted to the transmission notch (210); as well as The door driving mechanism described in any one of claims 1 to 19 is used to drive the door body (300) to close the film transmission gap (210) or to open the film transmission gap (210).

21. The process chamber according to claim 20, characterized in that: Also includes: The chamber body (100) comprises a lining structure (200) arranged in the chamber body (100), wherein the lining structure (200) divides the chamber body (100) into an inner cavity (110) and an outer cavity (120), wherein the inner cavity (110) is connected to the outer cavity (120) through the film transmission gap (210), and the door body (300) is movably arranged in the outer cavity (120), and the door body (300) is used to open and close the film transmission gap (210).

22. The process chamber according to claim 21, characterized in that: The door driving mechanism comprises: A first driving device (10); a second driving device (20), the door body (300) being arranged on the second driving device (20), the second driving device (20) being arranged on the first driving device (10), and the first driving device (10) being used for driving the second driving device (20) to move along a first direction; When the second driving device (20) moves along the first direction, it drives the door body (300) to move along the first direction. The second driving device (20) is also used to drive the door body (300) to move along the second direction. The first direction intersects with the second direction. The door body (300) has an open position for opening the film transmission gap (210) and a closed position for closing the film transmission gap (210) in a first direction, and the door body (300) moves between the open position and the closed position under the drive of the first driving device (10); In the second direction, the second driving device (20) is used to move the door body (300) located in the closed position toward or away from the transmission notch (210) so that the door body (300) abuts against the lining structure (200) or a movable gap is formed between the door body (300) and the lining structure (200).

23. The process chamber according to claim 22, characterized in that: The second driving device (20) comprises: A second shell (21), the second shell (21) being arranged in the outer cavity (120), and a receiving cavity being arranged in the second shell (21); a second driving member (22), the second driving member (22) being movably disposed in the accommodating cavity along a second direction, the second driving member (22) being used to drive the door body (300) to move along the second direction; a second connecting member (23), the second connecting member (23) having a first end and a second end arranged opposite to each other, the first end of the second connecting member (23) being connected to the second shell (21), the second end of the second connecting member (23) being located outside the chamber body (100), and the second end of the second connecting member (23) being drivingly connected to the first driving device (10), the first driving device (10) driving the second shell (21) to move along the first direction via the second connecting member (23); The second connecting member (23) has a fluid channel (40) inside, and the fluid channel (40) is connected to the accommodating cavity. The fluid channel (40) is used to provide fluid from the outside of the chamber body (100) to drive the second driving member (22) to move along the second direction.

24. The process chamber according to claim 22, characterized in that The first driving device (10) comprises: A first connecting piece (13), wherein the chamber body (100) is provided with a mounting opening communicating with the outer chamber (120), the first connecting piece (13) is mounted on the mounting opening, and the first connecting piece (13) and the mounting opening are in sealing cooperation; a bracket (11), the bracket (11) being connected to the first connecting member (13), and the bracket (11) being installed outside the chamber body (100) through the first connecting member (13); A first driving member (12), wherein the first driving member (12) is movably disposed on the bracket (11), and the first driving member (12) is drivingly connected to the second end of the second connecting member (23) for driving the second connecting member (23) to move along a first direction.

25. The process chamber according to claim 24, characterized in that The second connecting member (23) is inserted into the first connecting member (13), and the first connecting member (13) and the second connecting member (23) are slidably matched in the first direction. At the same time, the first connecting member (13) and the second connecting member (23) are limitedly matched in the second direction to limit the displacement of the second connecting member (23) in the second direction.

26. The process chamber according to claim 25, characterized in that The first connecting member (13) and the second connecting member (23) are sealed together.

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