Door body driving mechanism, process chamber and semiconductor process equipment

Abstract

The invention provides a door body driving mechanism, a process chamber and semiconductor process equipment. The door body driving mechanism comprises a first driving device, a second driving device and a connecting part, the connecting part is in driving connection with the first driving device, and the first driving device is used for driving the connecting part to move in the first direction; in the second direction intersecting with the first direction, the connecting part can move relative to the first driving device, the connecting part is further in driving connection with the second driving piece, and the second driving piece is used for driving the connecting part to move in the second direction so that the connecting part can drive the door body to move in the second direction. According to the door body driving mechanism, transverse movement of the door body can be achieved by arranging the second driving device, so that the door body can be pressed on the lining structure to achieve sealing or the door body is separated from the lining, and collision between the door body and the lining structure is effectively avoided while the sealing effect of the door body is guaranteed.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a door driving mechanism, a process chamber and semiconductor process equipment. Background Art

[0002] In the field of semiconductor manufacturing, the process chamber is a very important equipment, and many white semiconductor process equipment need a process chamber. Take the etcher as an example, a process chamber is arranged inside the etcher, an upper electrode is arranged at the top of the process chamber, a lower electrode that can be raised and lowered is arranged inside the process chamber, an inner liner is arranged at the top of the process chamber, the top of the inner liner is connected to the upper electrode, and an assembly port that matches the lower electrode is arranged at the bottom. When the lower electrode rises to the assembly port, the upper electrode, the inner wall of the inner liner and the lower electrode together form an inner cavity for etching process, and an outer cavity is formed between the outer wall of the inner liner and the inner wall of the process chamber.

[0003] In order to facilitate the wafer to enter and exit the process chamber, a transfer port connected to the outer cavity is set on the outer wall of the process chamber, and a wafer transfer notch connected to the inner cavity is set on the inner lining. The transfer port corresponds to the wafer transfer notch, and the wafer is transferred by the robot through the transfer port and the wafer transfer notch. Since the integrity of the inner cavity needs to be ensured during the etching process, a liftable inner door mechanism will be set in the outer cavity. During the etching process, the inner door will cover the wafer transfer notch, so that the inner cavity forms a nearly complete circle, thereby improving the uniformity of the process environment inside the chamber and improving the etching uniformity.

[0004] However, in the prior art, since the inner door mechanism is lifted and lowered along the outer wall of the inner liner during the opening and closing process, in order to avoid friction between the inner door and the outer wall of the inner liner during the opening and closing process, a movable gap is provided between the inner door and the inner liner. Therefore, the inner cavity is not completely closed, which is not conducive to the stability and uniformity of the airflow, and the plasma is not completely shielded, and there is a risk of plasma leakage. Moreover, although there is a movable gap between the inner door and the inner liner, the lifting and lowering of the inner door is unstable due to the long lifting rod. There is a risk of the guide rod tilting and the lifting rod rubbing against the inner wall of the reaction chamber or the inner liner during long lifting and lowering movements. Therefore, how to effectively prevent the friction between the inner door and the inner liner while ensuring the sealing effect of the inner cavity is a problem that needs to be solved in this field. Summary of the invention

[0005] The present invention aims to solve the problem in the prior art that the inner door and the inner lining cannot be completely sealed and there is a risk of scratching, and proposes a door driving mechanism, a process chamber and a semiconductor process equipment.

[0006] In order to achieve the purpose of the present invention, a door body driving mechanism is provided, including: a first driving device; a second driving device; a connecting part, the connecting part is drivingly connected to the first driving device and the second driving device, so that the connecting part drives the door body to move, the first driving device is used to drive the connecting part to move in a first direction, so that the connecting part drives the door body to move in the first direction; and the second driving device is used to drive the connecting part to move in a second direction, the second direction intersects with the first direction, so that the connecting part drives the door body to be movable along the second direction relative to the first driving device.

[0007] Furthermore, the second driving device includes: a second shell having an installation port and an installation space connected to the installation port, the second shell being used to be installed on a support and to close the installation port through the support; a second driving member being arranged in the installation space and being used to provide a driving force in the second direction; a transmission assembly being connected between the second driving member and the connecting part, the second driving member applying a driving force in the second direction to the connecting part through the transmission assembly to drive the connecting part to move along the second direction.

[0008] Further, the transmission assembly includes: a connecting plate, which is movably arranged in the installation space, and the connecting plate is drivingly connected to the second driving member; a guide shaft, which is passed through the second shell, and the axis of the guide shaft is arranged along the second direction and is movable relative to the second shell in the second direction, the first end of the guide shaft is located in the installation space and fixedly connected to the connecting plate, and the second end of the guide shaft is located outside the second shell; a mounting seat is provided at the second end of the guide shaft, and the connecting part is arranged on the mounting seat, and the mounting seat is movable along the second direction driven by the guide shaft; wherein in the first direction, the connecting part and the mounting seat are relatively movable; in the second direction, the connecting part and the mounting seat are relatively fixed, so that the mounting seat drives the connecting part to move along the second direction.

[0009] Further, the second shell includes: a first accommodating portion, having a first end and a second end arranged opposite to each other along a second direction, the first end of the first accommodating portion is used to connect with the support, and the first end of the first accommodating portion is provided with the mounting port; a second accommodating portion, having a first end and a second end arranged opposite to each other along the second direction, the first end of the second accommodating portion is connected to the second end of the first accommodating portion and a step structure is formed at the connection position; the interior of the first accommodating portion is connected to the interior of the second accommodating portion and forms the mounting space; the connecting plate is movably arranged in the first accommodating portion; the second driving member is arranged in the second accommodating portion; a guide hole connected to the interior of the first accommodating portion is provided on the first accommodating portion along the second direction, the guide hole is located on the step structure, and the guide shaft is movably passed through the guide hole.

[0010] Further, the connecting plate includes a plate body and a connecting arm, the connecting arm is arranged on the outer periphery of the plate body, the plate body is drivingly connected to the second driving member, and the connecting arm is connected to the guide shaft.

[0011] Furthermore, a seal is provided between the guide shaft and the second shell.

[0012] Furthermore, a positioning column is provided in the second shell, and the positioning column is arranged along the second direction; a positioning hole is provided on the connecting plate, the positioning column is located in the positioning hole, and the connecting plate is movable relative to the positioning column to perform positioning and guiding through the cooperation of the positioning column and the positioning hole.

[0013] Furthermore, there are two positioning posts, and the two positioning posts are spaced apart in the second accommodating portion, and a limiting space for installing the second driving member is formed between two adjacent positioning posts.

[0014] Furthermore, the connecting portion includes a connecting rod, a penetrating mounting hole is provided on the mounting seat along the first direction, the connecting rod is inserted into the mounting hole, and the connecting portion is movable in the mounting hole along the first direction.

[0015] Further, the first driving device includes: a first driving member, which is movably arranged along the first direction, and a first sliding portion is arranged on the first driving member; a second sliding portion is arranged on the connecting portion, and the first sliding portion and the second sliding portion are limitedly matched in the first direction, and the first sliding portion and the second sliding portion are slidingly matched in the second direction, so that the first driving member drives the connecting portion to move along the first direction, and the connecting portion slides relative to the first driving member in the second direction.

[0016] Further, the connecting part includes: a connecting rod, a first end of which is connected to the door body; a sliding plate, fixedly connected to the second end of the connecting rod, and the sliding plate is provided with the second sliding part; wherein, the first sliding part is a sliding rail or a sliding groove arranged along the second direction, and the second sliding part is a sliding groove or a sliding rail matching the first sliding part.

[0017] Furthermore, the first driving device further includes: a bracket, on which the first driving member is movably disposed along the first direction; and a detection device, which is disposed on the bracket and is used to detect the position of the first driving member.

[0018] Furthermore, the first driving device also includes: a first connecting member, the first connecting member is used to connect a support, the first connecting member is provided with a long hole penetrating along the first direction, the connecting portion is inserted into the long hole, and the radial length direction of the long hole is arranged along the second direction; the connecting portion and the long hole are slidingly matched in the first direction; the connecting portion and the long hole are slidingly matched in the second direction; the connecting portion and the long hole are sealed.

[0019] According to a second aspect of the present invention, a process chamber is disclosed, comprising: a chamber body; a lining structure, arranged in the chamber body, the lining structure divides the chamber body into an inner cavity and an outer cavity, the lining structure having a film transmission gap connecting the inner cavity with the outer cavity; a door body, movably arranged in the outer cavity, the door body being used to open and close the film transmission gap; the above-mentioned door body driving mechanism is connected to the door body driving to drive the door body to open and close the film transmission gap.

[0020] Furthermore, the door body has a first position, a second position and a third position; in the first position, the door body is located at the film transmission gap position, and the film transmission gap is closed; in the second position, the door body is located away from the film transmission gap position in the second direction, and a movable gap is formed between the door body and the outer wall of the lining structure; in the third position, the door body is located in the first direction to avoid the film transmission gap; the first driving device is used to drive the door body to move between the second position and the third position; the second driving device is used to drive the door body to move between the first position and the second position.

[0021] Furthermore, the lining structure has a first mating end face, and the film transmission gap is located on the first mating end face; the door body has a second mating end face, and in the first position of the door body, the second mating end face covers the first mating end face and closes the film transmission gap.

[0022] Furthermore, an inductive coil is arranged on the second mating end surface of the door body, and in the first position of the door body, the door body presses the inductive coil against the lining structure.

[0023] Furthermore, a receiving groove is provided on the first mating end surface, and when the door body is in the first position, the electromagnetic coil is located in the receiving groove, and the electromagnetic coil abuts against the bottom of the receiving groove.

[0024] Furthermore, the second mating end face of the door body is provided with a boss structure, and the electromagnetic coil is arranged on the outer peripheral side of the boss structure; the lining structure also has a sealing channel, the first end of the sealing channel extends to the first mating end face to form the transmission gap, and the second end of the sealing channel is connected to the inner cavity; when the door body is in the first position, the boss structure is located in the sealing channel, and the protruding end surface of the boss structure is flush with the inner wall surface of the inner cavity, so that a complete symmetrical space is formed inside the inner cavity; a first sealing gap is formed between the outer peripheral wall of the boss structure and the inner wall of the sealing channel.

[0025] Furthermore, from the first end to the second end of the sealing channel, the distance between the inner walls arranged opposite to each other in the sealing channel gradually decreases, and the boss structure is a wedge-shaped boss matching the sealing channel.

[0026] Furthermore, at least one annular protrusion is provided on the second mating end surface of the door body along the outer periphery of the boss structure, and the annular protrusion is located on the inner side of the electromagnetic coil; at least one annular groove is provided on the first mating end surface of the lining structure, and the annular protrusion is located in the corresponding annular groove, and a second sealing gap is formed between the annular protrusion and the annular groove.

[0027] Furthermore, when the door body is in the second position, the boss structure disengages from the sealing channel to form the movable gap between the door body and the outer wall of the lining structure; the second driving device drives the door body to move so that the boss structure enters the sealing channel or disengages from the sealing channel.

[0028] According to a third aspect of the present invention, a semiconductor process equipment is also disclosed, comprising at least one process chamber as described above.

[0029] The door driving mechanism of the present invention can realize lateral movement of the door body by setting a second driving device, so that the door body can be pressed against the lining structure to achieve sealing or the door body can be separated from the lining, while ensuring the sealing effect of the door body, and effectively avoiding the friction between the door body and the lining structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1This is a schematic structural diagram of a door driving mechanism according to a first embodiment of the present invention;

[0031] Figure 2 It is a structural schematic diagram of the second driving device of the door driving mechanism of the first embodiment of the present invention;

[0032] Figure 3 It is a front view of the second driving device of the door driving mechanism of the first embodiment of the present invention;

[0033] Figure 4 It is a cross-sectional view taken along the AA line of the second housing of the second driving device of the door driving mechanism according to the first embodiment of the present invention;

[0034] Figure 5 It is a cross-sectional view taken along the line AA of the entire second driving device of the door driving mechanism according to the first embodiment of the present invention;

[0035] Figure 6 It is a BB-cross-sectional view of the second driving device of the door driving mechanism of the first embodiment of the present invention;

[0036] Figure 7 for Figure 5 A partial enlarged view of part A;

[0037] Figure 8 It is a structural schematic diagram of a first driving device of a door driving mechanism according to a first embodiment of the present invention;

[0038] Fig. 9 A top view of a first connecting member of a first driving device of a door driving mechanism according to a first embodiment of the present invention;

[0039] Fig.10 It is a front view of the first driving device of the door driving mechanism of the first embodiment of the present invention;

[0040] Fig.11 is a cross-sectional view of a top view of a first driving device of a door driving mechanism according to a first embodiment of the present invention;

[0041] Fig.12 This is a structural schematic diagram of a process chamber door in a first position according to a first embodiment of the present invention;

[0042] Fig.13 This is a structural schematic diagram of the door of the process chamber in the first embodiment of the present invention being located in the second position;

[0043] Fig.14 This is a structural schematic diagram of the door of the process chamber in the first embodiment of the present invention being located at the third position;

[0044] Fig.15 It is a schematic diagram of the cooperation between the lining structure and the door body of the process chamber according to the first embodiment of the present invention;

[0045] Fig.16 for Fig.15 A partial enlarged view of part C in the middle;

[0046] Fig.17 This is a schematic structural diagram of a door body of a process chamber according to a first embodiment of the present invention;

[0047] Fig.18 for Fig.17 A partial enlarged view of part D in the middle;

[0048] Fig.19 for Fig.14 A partial enlarged view of part B;

[0049] Fig. 20 This is a schematic diagram of the structure of the boss structure and the sealing channel of the process chamber of the first embodiment of the present invention;

[0050] List of reference numerals:

[0051] 10. first driving device; 11. first connecting member; 111. long hole; 12. bracket;

[0052] 13. first driving member; 131. shielding member; 14. first sliding portion; 15. detection device;

[0053] 151, transmitting end; 152, receiving end; 16, sliding mechanism; 17, servo motor; 20, second driving device; 21, second housing; 211, first accommodating portion; 212, second accommodating portion; 213, guide hole; 214, step structure; 22, second driving member; 221, piston rod; 23, connecting plate; 23a, plate body; 23b, connecting arm; 231, positioning hole; 24, guide shaft; 25, mounting seat; 251, mounting hole; 26, buffer ring; 27, positioning column; 28, positioning sleeve;

[0054] 29, locking nut; 30, connecting part; 31, connecting rod; 32, sliding plate; 321, second sliding part; 40, installation space; 41, first installation groove; 41a, main groove body; 41b, auxiliary groove body; 411, installation opening; 42, second installation groove; 50, chamber body; 51, inner cavity; 52, outer cavity; 60, lining structure; 61, transmission sheet gap; 62, first matching end face; 621, receiving groove; 622, annular groove; 63, sealing channel; 70, door body; 71, second matching end face;

[0055] 72. Boss structure; 73. Annular protrusion; 80. Induction coil; 90. Labyrinth seal structure;

[0056] 91. First sealing gap; 92. Second sealing gap. DETAILED DESCRIPTION

[0057] In order to enable those skilled in the art to better understand the technical solution of the present invention, the door driving mechanism, process chamber and semiconductor process equipment provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0058] To achieve the purpose of the present invention, Figure 1 As shown, an embodiment of the present invention discloses a door driving mechanism, which can be applied to various semiconductor process equipment such as an etcher, to drive the door to close the film transmission gap or move away from the film transmission gap. The door driving mechanism of the embodiment of the present invention may include: a first driving device 10, a second driving device 20 and a connecting portion 30. The connecting portion 30 is used to be drivingly connected to the door 70 to drive the door 70 to move. The connecting portion 30 is drivingly connected to the first driving device 10. The first driving device 10 is used to drive the connecting portion 30 to move in a first direction so that the connecting portion 30 drives the door 70 to move in the first direction; in a second direction intersecting with the first direction, the connecting portion 30 is movable relative to the first driving device. The connecting portion 30 is also drivingly connected to the second driving member. The second driving member is used to drive the connecting portion 30 to move in the second direction so that the connecting portion 30 drives the door 70 to move in the second direction.

[0059] When in use, the first driving device 10 drives the connecting part 30 to move, and the connecting part 30 drives the door body 70 to move along the first direction; when the door body 70 moves to the preset position, the first driving device 10 stops, so that the connecting part 30 stops moving in the first direction. At this time, the second driving device 20 drives the connecting part 30 to move in the second direction. Since the connecting part 30 can move in the second direction relative to the first driving device, it will not be restricted by the first driving device 10. Therefore, under the drive of the second driving device 20, the connecting part 30 can drive the door body 70 to move in the second direction.

[0060] After the door body 70 driving mechanism is assembled on the process chamber, in this embodiment, the first direction is the vertical direction, that is, Figure 1 The middle direction is the up-down direction, and the second direction is the horizontal direction, that is, Figure 1 When closing the door body 70, the first driving device 10 can drive the connecting portion 30 and the door body 70 to rise and fall together. After rising to an appropriate position, the second driving device 20 drives the door body 70 to move laterally, thereby pressing the door body 70 against the lining structure 60 (see Fig.12 When the door body 70 is opened, the door body 70 is first separated from the lining structure 60 by the second driving device 20, and then the second driving device 20 and the door body 70 are driven to descend by the first driving device 10, thereby completing the opening of the door body 70.

[0061] The door body driving mechanism of the present invention can realize lateral movement of the door body 70 by setting a second driving device 20, so that the door body 70 can be pressed against the lining structure 60 to achieve sealing or the door body 70 can be separated from the lining structure 60. While ensuring the sealing effect of the door body 70, it can also effectively avoid friction between the door body 70 and the lining structure 60.

[0062] like Figure 1 As shown, in this embodiment, the connecting portion 30 includes a connecting rod 31, which is arranged on the second driving device 20, and the axial direction of the connecting rod 31 is arranged along the first direction. The connecting rod 31 is movable in the first direction relative to the second driving device 20; one end of the connecting rod 31 is movably arranged on the first driving device 10 along the second direction, and the second end of the connecting rod 31 is used to connect with the door body 70. That is, Figure 1 As shown, the connecting rod 31 is along Figure 1 The connecting rod 31 is arranged on the second driving device 20 in the vertical direction, and the connecting rod 31 can move relative to the second driving device 20 in the vertical direction, thereby preventing the first driving device 10 from being restricted by the second driving device 20 when driving the connecting rod 31 to rise and fall. Figure 1 The second driving device 20 can move in the horizontal direction relative to the first driving device 10, thereby preventing the second driving device 20 from being restricted by the first driving device 10 when driving the connecting rod 31 to move horizontally.

[0063] Specifically, if Figure 2 As shown, in this embodiment, the second driving device 20 includes: a second housing 21 , a second driving member 22 and a transmission assembly. The transmission assembly includes: a connecting plate 23 , a guide shaft 24 and a mounting seat 25 .

[0064] like Figure 3 As shown, the second shell 21 has an installation port 411 and an installation space 40 connected to the installation port 411, and the second shell 21 is used to be installed on a support and close the installation port 411 through the support; the second driving member 22 is arranged in the installation space 40, and is used to provide a driving force in the second direction; the transmission assembly is connected between the second driving member 22 and the connecting part 30, and the second driving member 22 applies a driving force in the second direction to the connecting part 30 through the transmission assembly to drive the connecting part 30 to move along the second direction.

[0065] It should be noted that the support is a component used to install the second housing 21. In this embodiment, Fig.12As shown, the interior of the process chamber includes an inner cavity 51 and an outer cavity 52, and the support is the inner wall of the outer cavity 52. ​​After the second shell 21 is installed on the inner wall of the outer cavity 52, the inner wall surface of the outer cavity 52 closes the installation port 411, thereby isolating the installation space 40 from the outer cavity 52. ​​On the one hand, it can prevent the process gas in the process chamber from entering the installation space 40 and adversely affecting the components in the second drive device 20. On the other hand, it can also prevent the particles generated by friction and impact of the internal components of the second drive device 20 from entering the process chamber and affecting the product, thereby achieving multiple goals at one stroke.

[0066] like Figure 4 As shown, the second housing 21 includes: a first accommodating portion 211 and a second accommodating portion 212. The first accommodating portion 211 has a first end and a second end arranged opposite to each other along the second direction, and the first end of the first accommodating portion 211 is used to connect with a support; a first mounting groove 41 is arranged in the first accommodating portion 211, and the groove opening of the first mounting groove 41 extends to the surface of the first end of the first accommodating portion 211 to form a mounting opening 411, and the groove bottom of the first mounting groove 41 is located at the second end of the first accommodating portion 211.

[0067] The second accommodating portion 212 has a first end and a second end arranged opposite to each other along the second direction, the first end of the second accommodating portion 212 is connected to the second end of the first accommodating portion 211 and forms a step structure 214 at the connecting position; a second mounting groove 42 is arranged in the second accommodating portion 212, the groove opening of the second mounting groove 42 extends to the groove bottom of the first mounting groove 41 and is connected to the first mounting groove 41, the groove bottom of the second mounting groove 42 is located at the second end of the first accommodating portion 211, and the first mounting groove 41 and the second mounting groove 42 jointly form an installation space 40.

[0068] like Figure 4 As shown, the first installation groove 41 includes a main groove body 41a and a sub-groove body 41b, the sub-groove body 41b is arranged on the outer periphery of the main groove body 41a, and the sub-groove body 41b is communicated with the main groove body 41a, and the second installation groove 42 is communicated with the main groove body 41a.

[0069] A guide hole 213 is further provided on the first receiving portion 211 along the second direction. The guide hole 213 is communicated with the interior of the first receiving portion 211 and is located on the step structure 214. In other words, Figure 4 As shown, one end of the guide hole 213 extends to the bottom of the auxiliary groove body 41b, and the other end of the guide hole 213 extends to the outer surface of the second end of the first receiving portion 211. At the same time, the axial direction of the guide hole 213 is arranged along the second direction.

[0070] In addition, a positioning column 27 is provided in the second housing 21, and the positioning column 27 is provided along the second direction, and the first end of the positioning column 27 is connected to the bottom of the second mounting groove 42, and the second end of the positioning column 27 extends to the slot opening (mounting opening 411) of the first mounting groove 41. There are two positioning columns 27, and the two positioning columns 27 are arranged inside the second accommodating portion 212 at intervals, and a limiting space for installing the second driving member 22 is formed between the two adjacent positioning columns 27.

[0071] like Figure 4 and Figure 5 As shown, in this embodiment, the second driving member 22 is a cylinder, which is disposed in the second mounting groove 42 and is located in the limiting space formed by the two positioning columns 27. The piston rod 221 of the cylinder faces the mounting opening 411 and is fixedly connected to the connecting plate 23, so that the connecting plate 23 is driven to move along the second direction by the piston rod 221 of the cylinder.

[0072] The connecting plate 23 is movably arranged in the first mounting groove 41 along the second direction, wherein the connecting plate 23 includes a plate body 23a and a connecting arm 23b, the connecting arm 23b is arranged on the outer periphery of the plate body 23a, the plate body 23a is located in the main groove body 41a, the connecting arm 23b is located in the auxiliary groove body 41b, the plate body 23a is drivingly connected to the second driving member 22, and the connecting arm 23b is connected to the guide shaft 24.

[0073] Specifically, if Figure 5 As shown, the plate body 23a of the connecting plate 23 is fixedly connected to the piston rod 221 of the cylinder, and a positioning hole 231 is also provided on the plate body 23a of the connecting plate 23. The positioning column 27 is located in the positioning hole 231, and the connecting plate 23 is movable relative to the positioning column 27, so as to be positioned and guided by the positioning column 27 and the positioning hole 231. When installing the connecting plate 23, the positioning hole 231 needs to be aligned with the positioning column 27 so that the connecting plate 23 can be installed in the first installation groove 41.

[0074] like Figure 5 As shown, the guide shaft 24 is disposed in the guide hole 213, and the guide shaft 24 is movable relative to the second housing 21 in the second direction. Figure 3 As shown, the first end of the guide shaft 24 is located in the auxiliary groove body 41b of the first installation groove 41 and is fixedly connected to the connecting plate 23. Figure 5 As shown, the second end of the guide shaft 24 is located outside the second housing 21. Figure 1 and Figure 5 The mounting seat 25 is disposed at the second end of the guide shaft 24 , and the connecting portion 30 is disposed on the mounting seat 25 . The mounting seat 25 is movable along the second direction driven by the guide shaft 24 .

[0075] It should be noted that if Figure 6As shown, the mounting seat 25 is provided with a through mounting hole 251 along the first direction, and the connecting portion 30 is provided through the mounting hole 251 and moves along the first direction in the mounting hole 251. Thus, in the first direction, the connecting portion 30 and the mounting seat 25 are relatively movable; in the second direction, the connecting portion 30 and the mounting seat 25 are relatively fixed, so that the mounting seat 25 drives the connecting portion 30 to move along the second direction.

[0076] It should also be noted that in order to ensure the stability of the movement of the connecting portion 30, Figure 2 As shown, a positioning sleeve 28 and a locking nut 29 are provided in the mounting hole 251 . The positioning sleeve 28 is located between the connecting portion 30 and the mounting hole 251 . The locking nut 29 is installed on the positioning sleeve to prevent the connecting portion 30 from shaking in the mounting hole 251 .

[0077] It is understandable that if Figure 7 As shown, a sealing ring is provided between the guide shaft 24 and the guide hole 213 to ensure the sealing of the installation space 40. In order to ensure the smooth movement of the guide shaft 24 in the second direction, a buffer ring 26 is provided on the guide shaft 24, and the buffer ring 26 is located between the guide shaft 24 and the inner wall of the guide hole 213.

[0078] In this embodiment, if Figure 5 and 6 As shown, there are two connecting rods 31, and the two connecting rods 31 are arranged at intervals to ensure that the door body 70 is evenly stressed and runs more stably. Correspondingly, there are two guide holes 213 and guide shafts 24, and the second accommodating portion 212 is located between the two guide shafts 24. This arrangement not only facilitates the installation of the second shell 21, but also makes full use of the space between the two connecting rods 31 to accommodate the second shell 21, making full use of the space inside the already narrow process chamber, thereby achieving horizontal movement, improving the sealing effect of the door body 70, and effectively avoiding the door body 70 from rubbing against the lining structure 60.

[0079] In addition, by setting the positioning column 27, not only can the cylinder be limited to facilitate the installation and fixation of the cylinder, but also the positioning column 27 and the positioning hole 231 can cooperate to facilitate the positioning of the connecting plate 23 during assembly. Moreover, the two positioning columns 27 are arranged in parallel to ensure that the assembly angle of the connecting plate 23 is perpendicular to the second direction, so as to ensure the consistency of the position of the guide shaft 24 connected to the two sides of the connecting plate 23, thereby ensuring the consistency of the position of the two connecting rods 31, and finally ensuring the tightness of the cooperation between the door body 70 and the lining structure 60. It is a typical multi-purpose object.

[0080] like Figure 8 As shown, the first driving device 10 includes: a first connecting member 11, a bracket 12, a first driving member 13, a sliding mechanism 16 and a servo motor 17. Figure 1As shown, the first connecting member 11 is fixed to the first end of the bracket 12 by bolts, the first connecting member 11 is used to connect the support, the first connecting member 11 and the connecting part 30 are slidably matched in the first direction, and the first connecting member 11 and the connecting part 30 are slidably matched in the second direction.

[0081] like Fig.12 As shown, when assembled to the process chamber, the first connecting member 11 is connected to the chamber body 50, an opening is provided at the bottom of the chamber body 50, the outer cavity 52 is connected to the outside through the opening, the first connecting member 11 is installed at the opening position of the chamber body 50, and the bracket 12 is fixedly connected to the chamber body 50 through the first connecting member 11.

[0082] The connecting rod 31 of the connecting portion 30 is simultaneously passed through the first connecting member 11 and the chamber body 50 , the first connecting member 11 and the connecting portion 30 are slidably matched in the first direction, and the first connecting member 11 and the connecting portion 30 are slidably matched in the second direction.

[0083] The servo motor 17 is fixed to the second end of the bracket 12, the sliding mechanism 16 is installed on the bracket 12 between the first end and the second end, the servo motor 17 is drivingly connected to the sliding mechanism 16, and the first driving member 13 is fixedly connected to the sliding mechanism 16, that is, the first driving member 13 is movably arranged on the bracket 12 through the sliding mechanism 16, the connecting part 30 is arranged on the first driving member 13, the first driving member 13 is used to drive the connecting part 30 to move along the first direction, and the connecting part 30 is movable along the second direction on the first driving member 13.

[0084] When in use, the servo motor 17 drives the sliding mechanism 16, so that the sliding mechanism 16 drives the first driving member 13 to move between the first end and the second end of the bracket 12, and the moving first driving member 13 drives the connecting portion 30 to move in the first direction. After moving to the preset position, under the drive of the second driving device 20, the connecting portion 30 can move along the second direction on the first driving member 13, so as to drive the door body 70 to move along the second direction.

[0085] After being assembled on the process chamber, the servo motor 17 drives the sliding mechanism 16, so that the sliding mechanism 16 drives the first driving member 13 to move, and the moving first driving member 13 drives the connecting part 30 to move in the first direction, and then the connecting part 30 drives the door body 70 to move in the first direction. Fig.13 The location shown and Fig.14 When the first driving member 13 moves to the first end of the bracket 12, the connecting portion 30 drives the door body 70 to move to Fig.13 At this time, under the drive of the second driving device 20, the connecting portion 30 can move along the second direction on the first driving member 13 to drive the door body 70 to move along the second direction to Fig.12In the position shown, the film transmission gap 61 is closed.

[0086] It should be noted that, in this embodiment, Figure 1 , Figure 8 and Fig. 9 As shown, the first connecting member 11 is a mounting plate, and the mounting plate is provided with a Figure 1 The long hole 111 (see Fig. 9 ), the connecting portion 30 is disposed in the long hole 111, and the radial length direction of the long hole 111 is along the second direction ( Fig. 9 The connecting portion 30 and the long hole 111 are slidably matched in the first direction, so that the connecting portion 30 moves under the drive of the first driving member 13; the connecting portion 30 and the long hole 111 are slidably matched in the second direction, that is, the whole can be Figure 1 The connecting portion 30 is moved left and right in the process chamber, so that the connecting portion 30 is moved under the drive of the second driving member 22; the connecting portion 30 is sealed with the long hole 111, so that after the mounting plate is assembled on the process chamber, the process gas can be prevented from leaking from the long hole 111. Preferably, as Figure 1 and Figure 8 As shown, the connection portion 30 and the long hole 111 are sealed by a bellows, which can take into account both sealing and movement.

[0087] It should also be noted that, in order to realize that the connecting portion 30 is movable relative to the first driving member 13, the first driving member 13 is movably arranged along the first direction, the first driving member 13 is provided with a first sliding portion 14, and the connecting portion 30 is provided with a second sliding portion 321, the first sliding portion 14 and the second sliding portion 321 are engaged in upper limit positioning in the first direction, and the first sliding portion 14 and the second sliding portion 321 are engaged in sliding in the second direction, so that the first driving member 13 drives the connecting portion 30 to move along the first direction, and the connecting portion 30 slides relative to the first driving member 13 in the second direction.

[0088] Specifically for this embodiment, Figure 8 As shown, the first sliding part 14 is a slide rail arranged along the second direction, and the second sliding part 321 is a slide groove matching the first sliding part 14. The slide rail is fixedly arranged on the first driving member 13 along the second direction. In order to ensure stability, as shown in FIG. Fig.10 As shown, there are two slide rails arranged at intervals.

[0089] The connecting part 30 includes: two connecting rods 31 and a sliding plate 32. The first ends of the two connecting rods 31 are fixedly connected to the door body 70, and the second ends of the connecting rods 31 are fixedly connected to the sliding plate 32. The sliding plate 32 is movably arranged on the slide rail along the second direction, and a slide groove is arranged on the sliding plate 32. The slide rail is located in the slide groove and slides with the slide groove. That is to say, the sliding plate 32 is movably arranged on the first driving member 13 through the slide rail, and the connecting rod 31 is fixedly connected to the sliding plate 32, so as to realize the movement in the second direction relative to the first driving member 13. In this way, the two connecting rods 31 can be ensured to move synchronously, and the door body 70 can be ensured to move smoothly. Further, in this embodiment, the cross section of the slide rail is a T-shaped structure.

[0090] It should be noted that, in the present embodiment, the first sliding part 14 is a slide rail provided on the first driving member 13 along the second direction, and the second sliding part 321 is a slide groove provided on the sliding plate 32 and matched with the first sliding part 14. However, this is not restrictive, and in some other embodiments not shown in the figure, the first sliding part 14 can also be a slide groove, and the second sliding part 321 can be a slide rail, as long as the structure can realize the upper limit cooperation of the first sliding part 14 and the second sliding part 321 in the first direction, and the first sliding part 14 and the second sliding part 321 can slide and cooperate in the second direction, all are within the protection scope of the present invention.

[0091] In order to obtain the position of the door body 70 conveniently, Figure 8 As shown, the first driving device 10 further includes: a detection device 15, the detection device 15 is arranged on the bracket 12, and the detection device 15 is used to detect the position of the first driving member 13, so as to indirectly obtain the position of the door body 70. Specifically, see Fig.11 The detection device 15 is an optical sensor having a transmitting end 151 and a receiving end 152 arranged opposite to each other, and a detection space is formed between the transmitting end 151 and the receiving end 152. A shielding member 131 is arranged on the first driving member 13. When the first driving member 13 moves to a position corresponding to the detection device 15, the shielding member 131 is located in the detection space, thereby realizing the detection of the position of the first driving member 13, and then indirectly obtaining the position of the door body 70.

[0092] It should be noted that, in this embodiment, Figure 8As shown, there are two detection devices 15, which are arranged on the bracket 12 at intervals. The two detection devices 15 correspond to the upper limit position and the lower limit position of the first driving member 13 moving in the first direction, that is, the two extreme positions of the door body 70 in the first direction. However, this is not restrictive. In some other embodiments not shown in the figure, the detection device 15 can also be arranged only at a position close to the first end of the bracket 12, so that the detection device 15 can detect whether the first driving member 13 is at the upper limit position of the travel in the first direction. At this time, the corresponding position of the door body 70 is the same as the height of the transmission notch, so as to facilitate the control of the movement of the second driving device 20.

[0093] like Figure 12 to Figure 14 As shown, the present invention also discloses a process chamber, comprising: a chamber body 50, a lining structure 60, a door body 70, the above-mentioned door body driving mechanism and a control device. The lining structure 60 is arranged in the chamber body 50, and the lining structure 60 divides the chamber body 50 into an inner cavity 51 and an outer cavity 52. ​​The lining structure 60 has a film transmission gap 61 that connects the inner cavity 51 with the outer cavity 52; the door body 70 is movably arranged in the outer cavity 52, and the door body 70 is used to open and close the film transmission gap 61; the door body driving mechanism is connected to the door body 70 to drive the door body 70 to open and close the film transmission gap 61.

[0094] The process chamber of the present invention can realize lateral movement of the door body 70 by connecting the door driving mechanism with the door body 70, so that the door body 70 can be pressed against the lining structure 60 to achieve sealing or separate the door body 70 from the lining, while ensuring the sealing effect of the door body 70, it can also effectively avoid the friction between the door body 70 and the lining.

[0095] like Figures 12 to 13 As shown, the door body 70 has a first position, a second position and a third position.

[0096] like Fig.12 As shown, in the first position, the door body 70 is located at the film transmission gap 61, closing the film transmission gap 61.

[0097] like Fig.13 As shown, in the second position, the door body 70 is located away from the transmission notch 61 in the second direction, and a movable gap is formed between the door body 70 and the outer wall of the lining structure 60.

[0098] like Fig.14 As shown, in the third position, the door body 70 is located in the first direction to avoid the transmission piece gap 61; the first driving device 10 is used to drive the door body 70 to move between the second position and the third position; the second driving device 20 is used to drive the door body 70 to move between the first position and the second position.

[0099] It should also be noted that the control device is electrically connected to the detection device 15, the servo motor 17, and the second drive device 20 respectively, and the control device is used to control the second drive device 20 to drive the door body 70 to switch between the first position and the second position according to the position of the first drive member 13.

[0100] like Fig.15 and Fig.16 As shown, the lining structure 60 has a first mating end face 62, and the film transmission gap 61 is located on the first mating end face 62; the door body 70 has a second mating end face 71, and in the first position of the door body 70, the second mating end face 71 covers the first mating end face 62 and closes the film transmission gap 61.

[0101] like Fig.17 and Fig.18 As shown, an induction coil 80 is disposed on the second mating end surface 71 of the door body 70. When the door body 70 is in the first position, the door body 70 presses the induction coil 80 against the lining structure 60. By providing the induction coil 80, when the door body 70 is in the first position, the door body 70 presses the induction coil 80 against the lining structure 60, so that the lining structure 60 and the door body 70 are connected, thereby constructing a completely closed radio frequency environment.

[0102] like Fig.19 As shown, the first mating end surface 62 is provided with a receiving groove 621. Fig. 20 As shown, in the first position of the door body 70, the inductive coil 80 is located in the receiving groove 621, and at the same time, the inductive coil 80 abuts against the groove bottom of the receiving groove 621. By providing the receiving groove 621 on the first mating end face 62, when the door body 70 is in the first position, the inductive coil 80 is located in the receiving groove 621, and at the same time, the inductive coil 80 abuts against the groove bottom of the receiving groove 621, which can ensure that the first mating end face 62 and the second mating end face 71 are in contact with each other, thereby improving the sealing effect.

[0103] like Fig.17 and Fig.18 As shown, the second mating end surface 71 of the door body 70 is provided with a boss structure 72, and the induction coil 80 is provided on the outer peripheral side of the boss structure 72; Fig.19 As shown, the lining structure 60 also has a sealing channel 63, the first end of the sealing channel 63 extends to the first mating end surface 62 to form a transmission gap 61, and the second end of the sealing channel 63 is connected to the inner cavity 51; Fig. 20 As shown, in the first position of the door body 70, the boss structure 72 is located in the sealing channel 63, and the protruding end surface of the boss structure 72 is flush with the inner wall surface of the inner cavity 51, so that a complete symmetrical space is formed inside the inner cavity 51; a first sealing gap 91 is formed between the outer peripheral wall of the boss structure 72 and the inner wall of the sealing channel 63 (see Fig.16). The first sealing gap 91 is formed by providing the boss structure 72 and the sealing channel 63. The first sealing gap 91 can prevent the lining structure 60 from colliding with the door body 70 to form particles that contaminate the wafer; on the other hand, it can prevent the plasma in the process gas from passing through, thereby protecting the induction coil 80.

[0104] like Fig.16 As shown, from the first end to the second end of the sealing channel 63, the distance between the inner walls arranged opposite to each other in the sealing channel 63 gradually decreases, and the boss structure 72 is a wedge-shaped boss that matches the sealing channel 63. In other words, the inner wall of the sealing channel 63 is inclined. In this embodiment, the distance between the outer peripheral wall of the boss structure 72 and the inner wall of the sealing channel 63 is d, and the value range of d is 0.5 to 1.3 mm. The inner wall of the sealing channel 63 forms an angle α with the tangent of the arc passing through the position, and the value range of α is 30° to 60°, so that the gap depth-to-width ratio is increased to achieve the purpose of annihilating plasma.

[0105] join Figures 17 to 20 , an annular protrusion 73 is provided on the second mating end surface 71 of the door body 70 along the outer periphery of the boss structure 72, and the annular protrusion 73 is located on the inner side of the induction coil 80; an annular groove 622 is provided on the first mating end surface 62 of the lining structure 60, and the annular protrusion 73 is located in the annular groove 622, and a second sealing gap 92 is formed between the annular protrusion 73 and the annular groove 622. The first sealing gap 91 is connected with the second sealing gap 92 to form a labyrinth sealing structure 90. By providing the first sealing gap 91 and the second sealing gap 92, the first sealing gap 91 is connected with the second sealing gap 92 to form a labyrinth sealing structure 90, which can increase the stroke of the process gas flowing to the induction coil 80, increase the flow resistance, and thus increase the difficulty of the process gas reaching the induction coil 80, and at the same time, increase the probability of annihilating plasma, and better protect the induction coil 80.

[0106] like Fig.13 As shown, in the second position of the door body 70, the boss structure 72 is separated from the sealing channel 63 to form a movable gap between the door body 70 and the outer wall of the lining structure 60; the second driving device 20 drives the door body 70 to move so that the boss structure 72 enters the sealing channel 63 or separates from the sealing channel 63.

[0107] In order to ensure that the door body 70 can be pressed tightly and the electromagnetic coil 80 is compressed to a certain extent (the compression amount is 20-25%), and because the boss structure 72 needs to enter the sealing channel 63, the first sealing gap 91 is maintained at 0.5-1.3 mm, and the matching accuracy between the door body 70 and the lining structure 60 needs to be improved. Therefore, the traditional door body 70 structure is split into a first driving device 10 that drives the door body 70 to move in the first direction and a second driving device 20 that drives the door body 70 to move in the second direction. The servo motor 17 of the first driving device 10 is used to accurately control the lifting height of the door body 70 in the first direction; the added second driving device 20 can ensure that the door body 70 moves smoothly in the second direction while compacting the electromagnetic coil 80 on the curved surface, ensuring the integrity of the RF circuit, and thus improving the process uniformity.

[0108] The present invention also discloses a semiconductor process equipment, comprising at least one of the above process chambers. By providing a second drive device 20, the door body 70 can be moved laterally, so that the door body 70 can be pressed against the lining structure 60 to achieve sealing or the door body 70 can be separated from the lining structure 60, while ensuring the sealing effect of the door body 70, and effectively avoiding the door body 70 from rubbing against the lining structure 60.

[0109] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A door driving mechanism, characterized in that: include: A first driving device (10); A second driving device (20); a connecting portion (30), the connecting portion (30) being drivingly connected to the first driving device (10) and the second driving device (20), so that the connecting portion (30) drives the door body (70) to move, and the first driving device (10) is used to drive the connecting portion (30) to move along a first direction, so that the connecting portion (30) drives the door body (70) to move along the first direction; and The second driving device (20) is used to drive the connecting portion (30) to move along a second direction, and the second direction intersects with the first direction, so that the connecting portion (30) drives the door body (70) to move along the second direction relative to the first driving device (10).

2. The door driving mechanism according to claim 1, characterized in that: The second driving device (20) comprises: A second shell (21) having an installation opening (411) and an installation space (40) communicating with the installation opening (411), wherein the second shell (21) is used to be installed on a support and to close the installation opening (411) through the support; A second driving member (22) is arranged in the installation space (40) and is used to provide a driving force in the second direction; A transmission assembly is connected between the second driving member (22) and the connecting portion (30), and the second driving member (22) applies a driving force in the second direction to the connecting portion (30) through the transmission assembly to drive the connecting portion (30) to move along the second direction.

3. The door driving mechanism according to claim 2, characterized in that: The transmission assembly comprises: A connecting plate (23) is movably arranged in the installation space (40), and the connecting plate (23) is drivingly connected to the second driving member (22); A guide shaft (24) is inserted into the second shell (21); the axis of the guide shaft (24) is arranged along the second direction and is movable relative to the second shell (21) in the second direction; the first end of the guide shaft (24) is located in the installation space (40) and is fixedly connected to the connecting plate (23); the second end of the guide shaft (24) is located outside the second shell (21); a mounting seat (25) is arranged at the second end of the guide shaft (24); the connecting portion (30) is arranged on the mounting seat (25); the mounting seat (25) is movable along the second direction driven by the guide shaft (24); wherein In the first direction, the connecting portion (30) and the mounting seat (25) are relatively movable; In the second direction, the connecting portion (30) and the mounting seat (25) are relatively fixed, so that the mounting seat (25) drives the connecting portion (30) to move along the second direction.

4. The door driving mechanism according to claim 3, characterized in that: The second housing (21) comprises: A first accommodating portion (211), comprising a first end and a second end arranged opposite to each other along a second direction, wherein the first end of the first accommodating portion (211) is used to be connected to the support, and the first end of the first accommodating portion (211) is provided with the mounting opening (411); A second accommodating portion (212) having a first end and a second end arranged opposite to each other along a second direction, wherein the first end of the second accommodating portion (212) is connected to the second end of the first accommodating portion (211) and a step structure (214) is formed at the connection position; The interior of the first accommodating portion (211) is communicated with the interior of the second accommodating portion (212) to form the installation space (40); The connecting plate (23) is movably arranged in the first accommodating portion (211); The second driving member (22) is arranged in the second accommodating portion (212); A guide hole (213) communicating with the interior of the first accommodating portion (211) is provided along the second direction, the guide hole (213) is located on the step structure (214), and the guide shaft (24) is movably inserted into the guide hole (213).

5. The door driving mechanism according to claim 4, characterized in that: The connecting plate (23) comprises a plate body (23a) and a connecting arm (23b), wherein the connecting arm (23b) is arranged on the outer periphery of the plate body (23a), the plate body (23a) is drivingly connected to the second driving member (22), and the connecting arm (23b) is connected to the guide shaft (24).

6. The door driving mechanism according to claim 3, characterized in that: A seal is arranged between the guide shaft (24) and the second shell (21).

7. The door driving mechanism according to claim 4, characterized in that: A positioning column (27) is arranged in the second shell (21), and the positioning column (27) is arranged along the second direction; The connecting plate (23) is provided with a positioning hole (231), the positioning column (27) is located in the positioning hole (231), and the connecting plate (23) is movable relative to the positioning column (27) so as to be positioned and guided by the cooperation between the positioning column (27) and the positioning hole (231).

8. The door driving mechanism according to claim 7, characterized in that: There are two positioning columns (27), and the two positioning columns (27) are arranged at intervals in the second accommodating portion (212), and a limiting space for installing the second driving member (22) is formed between two adjacent positioning columns (27).

9. The door driving mechanism according to claim 3, characterized in that: The connecting portion (30) comprises a connecting rod (31); a penetrating mounting hole (251) is provided on the mounting seat (25) along the first direction; the connecting rod (31) is inserted into the mounting hole (251); and the connecting portion (30) is movable in the mounting hole (251) along the first direction.

10. The door driving mechanism according to claim 1, characterized in that: The first driving device (10) comprises: A first driving member (13) is movably arranged along the first direction, and a first sliding portion (14) is arranged on the first driving member (13); The connecting portion (30) is provided with a second sliding portion (321), the first sliding portion (14) and the second sliding portion (321) are matched in upper limit position in the first direction, and the first sliding portion (14) and the second sliding portion (321) are matched in sliding manner in the second direction, so that the first driving member (13) drives the connecting portion (30) to move along the first direction, and the connecting portion (30) slides relative to the first driving member (13) in the second direction.

11. The door driving mechanism according to claim 10, characterized in that: The connecting portion (30) comprises: A connecting rod (31), a first end of the connecting rod (31) being connected to the door body (70); A sliding plate (32) fixedly connected to the second end of the connecting rod (31), wherein the sliding plate (32) is provided with the second sliding portion (321); Wherein, the first sliding part (14) is a sliding rail or a sliding groove arranged along the second direction, and the second sliding part (321) is a sliding groove or a sliding rail matching the first sliding part (14).

12. The door driving mechanism according to claim 11, characterized in that: The first driving device (10) further comprises: A bracket (12), wherein the first driving member (13) is movably arranged on the bracket (12) along the first direction; A detection device (15), wherein the detection device (15) is arranged on the bracket (12), and the detection device (15) is used to detect the position of the first driving member (13).

13. The door driving mechanism according to claim 1, characterized in that: The first driving device (10) further comprises: A first connecting member (11), the first connecting member (11) being used for connecting a support, the first connecting member (11) being provided with a long hole (111) penetrating along the first direction, the connecting portion (30) being inserted into the long hole (111), and the radial length direction of the long hole (111) being provided along the second direction; The connecting portion (30) and the long hole (111) are slidably matched in the first direction; The connecting portion (30) and the long hole (111) are slidably matched in the second direction; The connecting portion (30) is sealed and matched with the long hole (111).

14. A process chamber, characterized in that: include: Chamber body (50); an inner lining structure (60) disposed in the chamber body (50), the inner lining structure (60) dividing the chamber body (50) into an inner cavity (51) and an outer cavity (52), the inner lining structure (60) having a transmission notch (61) for connecting the inner cavity (51) with the outer cavity (52); A door body (70) is movably disposed in the outer cavity (52), and the door body (70) is used to open and close the film transmission gap (61); The door driving mechanism according to any one of claims 1 to 13 is drivingly connected to the door body (70) to drive the door body (70) to open and close the transmission gap (61).

15. The process chamber according to claim 14, characterized in that: The door body (70) has a first position, a second position and a third position; In the first position, the door body (70) is located at the position of the film transmission gap (61), closing the film transmission gap (61); In the second position, the door body (70) is located away from the transmission notch (61) in the second direction, and a movable gap is formed between the door body (70) and the outer wall of the lining structure (60); In the third position, the door body (70) is located in the first direction at a position avoiding the transmission notch (61); The first driving device (10) is used to drive the door body (70) to move between the second position and the third position; The second driving device (20) is used to drive the door body (70) to move between the first position and the second position.

16. The process chamber according to claim 15, characterized in that: The lining structure (60) has a first mating end surface (62), and the transmission notch (61) is located on the first mating end surface (62); The door body (70) has a second mating end face (71). When the door body (70) is in a first position, the second mating end face (71) covers the first mating end face (62) and closes the transmission gap (61).

17. The process chamber according to claim 16, characterized in that: An induction coil (80) is provided on the second mating end surface (71) of the door body (70). When the door body (70) is in the first position, the door body (70) presses the induction coil (80) against the lining structure (60).

18. The process chamber according to claim 17, characterized in that: The first mating end surface (62) is provided with a receiving groove (621). When the door body (70) is in the first position, the electromagnetic coil (80) is located in the receiving groove (621), and the electromagnetic coil (80) abuts against the bottom of the receiving groove (621).

19. The process chamber according to claim 17, characterized in that: The second mating end surface (71) of the door body (70) is provided with a boss structure (72), and the induction coil (80) is provided on the outer peripheral side of the boss structure (72); The lining structure (60) further comprises a sealing channel (63), a first end of the sealing channel (63) extending to the first matching end surface (62) to form the transmission gap (61), and a second end of the sealing channel (63) communicating with the inner cavity (51); When the door body (70) is in the first position, the boss structure (72) is located in the sealing channel (63), and the surface of the protruding end (721) of the boss structure (72) is flush with the inner wall surface of the inner cavity (51), so that a complete symmetrical space is formed inside the inner cavity (51); A first sealing gap (91) is formed between the outer peripheral wall of the boss structure (72) and the inner wall of the sealing channel (63).

20. The process chamber according to claim 19, characterized in that From the first end to the second end of the sealing channel (63), the distance between the inner walls arranged opposite to each other in the sealing channel (63) gradually decreases, and the boss structure (72) is a wedge-shaped boss matching the sealing channel (63).

21. The process chamber according to claim 19, characterized in that At least one annular protrusion (73) is provided on the second mating end surface (71) of the door body (70) along the outer periphery of the boss structure (72), and the annular protrusion (73) is located on the inner side of the induction coil (80); At least one annular groove (622) is provided on the first mating end surface (62) of the lining structure (60), the annular protrusion (73) is located in the corresponding annular groove (622), and a second sealing gap (92) is formed between the annular protrusion (73) and the annular groove (622).

22. The process chamber according to claim 19, characterized in that When the door body (70) is in the second position, the boss structure (72) is separated from the sealing channel (63), so that the movable gap is formed between the door body (70) and the outer wall of the lining structure (60); The second driving device (20) drives the door body (70) to move so that the boss structure (72) enters the sealing channel (63) or leaves the sealing channel (63).

23. A semiconductor process equipment, characterized in that: include: At least one process chamber according to any one of claims 14 to 22.

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