Connector and pressure equipment

Abstract

The embodiment of the invention discloses a connector and pressure equipment, relates to the technical field of vibration isolation connection, and solves the problem of poor vibration isolation effect of a vacuum corrugated pipe. The connector comprises a first flange, a second flange, N corrugated pipes, N-1 connecting pieces and N-1 flexible supporting pieces. The first flange and the second flange are oppositely arranged. N > = 2. The N corrugated pipes are all located between the first flange and the second flange. The N corrugated pipes are sequentially arranged in a sleeved mode from inside to outside. The corrugated pipe located on the innermost layer is connected with the first flange. The corrugated pipe located on the outermost layer is connected with the second flange. Every two adjacent corrugated pipes are connected through the corresponding N-1 connecting pieces. The N-1 flexible supporting pieces are all arranged on the outer side of a cavity defined by the N corrugated pipes, the N-1 connecting pieces and the N-1 flexible supporting pieces. And the (N-1) flexible supporting pieces are respectively connected with the (N-1) connecting plates. And when N is equal to 2, the flexible supporting piece is connected with the first flange or the second flange. When N is larger than 2, N-1 flexible supporting pieces are connected with the first flange and the second flange respectively.

Description

Technical Field

[0001] The present application relates to the field of vibration isolation connection technology, and in particular to a connector and a pressure device. Background Art

[0002] In vacuum systems such as electron beam etcher, photolithography machine, electron microscope, etc., vacuum connectors are widely used to connect different vacuum structures. In addition, in some cases, there is relative displacement between the two vacuum devices connected by the vacuum connector, or there is vibration in the vacuum device. Therefore, the vacuum connector needs to have a vibration isolation function.

[0003] Existing vacuum connectors with vibration isolation function usually include an input end flange, a vacuum bellows and an output end flange. The two ends of the vacuum bellows are connected to the input end flange and the output end flange respectively. The vacuum bellows is a flexible structure and can achieve vibration isolation function. However, the vibration isolation effect of the existing vacuum bellows is not good. Summary of the invention

[0004] The embodiments of the present application provide a connector and a pressure device, which improve the vibration isolation effect of the vacuum bellows.

[0005] In order to achieve the above objectives, this application adopts the following technical solutions:

[0006] In the first aspect, an embodiment of the present application provides a connector. The connector includes a first flange, a second flange, N bellows, N-1 connectors and N-1 flexible supports. The first flange and the second flange are arranged opposite to each other. N≥2, that is, more than two bellows. The N bellows are all located between the first flange and the second flange. The N bellows are arranged in sequence from the inside to the outside. The bellows located in the innermost layer is connected to the first flange. The bellows located in the outermost layer is connected to the second flange. N-1 connectors, that is, at least one connector. The N-1 connectors connect two adjacent bellows respectively. N-1 flexible supports, that is, at least one flexible support. The N-1 flexible supports are all arranged on the outside of the chamber surrounded by the N bellows, the N-1 connectors, the first flange and the second flange. In addition, the N-1 flexible supports are connected to the N-1 connecting plates respectively. When N=2, the flexible support is connected to the first flange or the second flange. When N>2, N-1 flexible supports are connected to the first flange and the second flange respectively.

[0007] Compared to a connector with a single bellows, the connector of the embodiment of the present application includes N bellows (more than two bellows), and the more than two bellows are sequentially arranged from the inside to the outside, and are sequentially connected by one or more connectors. One or more flexible supports can provide support force to the N bellows, thereby preventing the N bellows from collapsing due to pressure. The connector of the embodiment of the present application can increase the equivalent length and wave number of the bellows without significantly increasing the total length of the bellows. The overall stiffness of the N bellows is low, so that the vibration isolation effect of the connector is good. Even if the bellows needs to pass through a pipeline or a supporting structure, it is also applicable, the processing difficulty is low, and the strength of the bellows will not be reduced. There is no material strength limit, and the atmospheric pressure load on a single wave in the bellows will not be increased.

[0008] The connector of the embodiment of the present application can be applied to vacuum scenarios or non-vacuum scenarios. When applied to vacuum scenarios, the connector of the embodiment of the present application is a vacuum connector, and the bellows in the connector is a vacuum bellows.

[0009] Furthermore, in order to ensure the support strength of the flexible support member, the above-mentioned connecting member is a rigid member. In some embodiments of the present application, the connecting member is made of stainless steel. The bellows can be a metal bellows or a stainless steel bellows, and the present application does not limit this. The bellows can be connected to the bellows by welding.

[0010] Based on the structure of the above connector, the connector in the connector can have a variety of structural forms. In some embodiments of the present application, the above connector is an annular connecting plate. The N-1 connectors in the connector are all annular connecting plates, and the width of the annular connecting plate can be small, so that the radial size of the connector is more compact.

[0011] In some other embodiments of the present application, the above-mentioned connecting member includes a first connecting portion, a second connecting portion and a third connecting portion, the second connecting portion is a cylindrical connecting plate or a conical connecting plate, and the first connecting portion and the third connecting portion are both annular connecting plates. The first connecting portion, the second connecting portion and the third connecting portion are connected in sequence to form a connecting structure with a Z-shaped cross section on one side. The first connecting portion and the third connecting portion are connected to two adjacent corrugated pipes respectively. Since the connecting member is rigid, the connecting member with a Z-shaped cross section on one side can increase the supporting force for the corrugated pipe. The N-1 connecting members in the connector all adopt the above structure, so that the connector has a higher supporting strength for the N corrugated pipes.

[0012] The structural forms of the flexible support members of the embodiments of the present application can be various. In some embodiments of the present application, the above-mentioned flexible support member is a spring, and the spring can be sleeved on the outside of the bellows. Or, in some other embodiments of the present application, the above-mentioned flexible support member is a group of springs. A group of springs includes at least two springs distributed at intervals. The first ends of the same group of springs are respectively connected to different areas of the same connecting member. The second ends of the same group of springs are all connected to the first flange. Or the second ends of the same group of springs are all connected to the second flange. The spring has the advantages of good elasticity, good stability, high dimensional accuracy, and strong load capacity. In addition, the same group of springs are evenly spaced.

[0013] In some other embodiments of the present application, the above-mentioned one flexible support member is an annular damping block, and the annular damping block is sleeved on the outer side of the bellows. Alternatively, in some other embodiments of the present application, the above-mentioned one flexible support member is a group of damping blocks. A group of damping blocks includes at least two damping blocks arranged at intervals, and the same group of damping blocks is respectively connected to different areas of the same connecting member. Moreover, the same group of damping blocks are all connected to the first flange. Or the same group of damping blocks are all connected to the second flange. The damping blocks have the advantages of excellent vibration reduction and noise reduction, heat resistance, cold resistance, anti-aging and strong adhesion. Moreover, the same group of damping blocks are equally spaced. The damping blocks can be made of rubber material. Rubber material has high elasticity, low price, and good physical and chemical stability.

[0014] When N=2, the connector includes only one flexible support member, which may be a spring or a damping block.

[0015] When N≥3, the connector includes more than two flexible support members. For the convenience of explanation, more than two flexible support members are referred to as multiple flexible support members. The multiple flexible support members can adopt the same structural form or different structural forms, and the present application does not limit this. In some embodiments, some of the multiple flexible support members are springs, and another part of the multiple flexible support members are damping blocks. In other embodiments, the multiple flexible support members are all damping blocks. In some other embodiments, the multiple flexible support members are all springs.

[0016] In the second aspect, an embodiment of the present application provides a pressure device, which may be an electron beam etcher, a photolithography machine, an electron microscope, or an electron beam defect detection device, etc. The pressure device includes two or more pressure chambers and the connector described in the above embodiment, and the connector connects the two pressure chambers. Since the connector in the pressure device of the embodiment of the present application has the same structure as the connector described in the above embodiment, both can solve the same technical problems and obtain the same technical effects, and will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to illustrate the technical solution of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be described below.

[0018] Figure 1 This is a schematic diagram of the structure of the vacuum equipment of the embodiment of the present application;

[0019] Figure 2 It is a structural schematic diagram of a connector with a vibration isolation function;

[0020] Figure 3 This is a schematic diagram of the structure of a connector with vibration isolation function for vacuum equipment;

[0021] Figure 4 This is one of the structural schematic diagrams of a connector having two bellows and a Z-shaped connecting plate according to an embodiment of the present application;

[0022] Figure 5 This is a second structural schematic diagram of a connector having two bellows and a Z-shaped connecting plate according to an embodiment of the present application;

[0023] Figure 6 This is one of the structural schematic diagrams of a connector having three bellows and two annular connecting plates according to an embodiment of the present application;

[0024] Figure 7 This is a second structural schematic diagram of a connector having three bellows and two annular connecting plates according to an embodiment of the present application;

[0025] Figure 8 This is a schematic diagram of the structure of a connector having two bellows, a Z-shaped connecting plate and a group of springs according to an embodiment of the present application;

[0026] Fig. 9 This is a schematic structural diagram of a connector having three bellows and two Z-shaped connecting plates according to an embodiment of the present application;

[0027] Fig.10 This is a schematic structural diagram of a connector having four bellows, two annular connecting plates and one Z-shaped connecting plate according to an embodiment of the present application;

[0028] Fig.11 This is a schematic structural diagram of a connector having three bellows, two annular connecting plates and two sets of springs according to an embodiment of the present application;

[0029] Fig.12 This is a schematic structural diagram of a connector having three bellows, two annular connecting plates and two groups of damping blocks according to an embodiment of the present application;

[0030] Fig.13 It is a comparison diagram of the frequency response curves of the axial vibration of the connector with a single bellows and the connector of the embodiment of the present application;

[0031] Fig.14 It is a comparison diagram of the frequency response curves of lateral vibration of a connector with a single bellows and a connector according to an embodiment of the present application.

[0032] Figure Number:

[0033] 1000-vacuum equipment; 100-movable component; 101, 101a, 101b-vacuum chamber; 200-connector; 1-first flange; 2-second flange; 3-bellows; 4-connecting piece; 41-annular connecting plate; 42-Z-shaped connecting plate; 421-first connecting part; 422-second connecting part; 423-third connecting part; 5-flexible support member; 51-spring; 52-damping block. DETAILED DESCRIPTION

[0034] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings.

[0035] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0036] In addition, in the present application, directional terms such as "up", "down", "left", "right", "horizontal" and "vertical" are defined relative to the orientation of the components in the drawings. It should be understood that these directional terms are relative concepts. They are used for relative description and clarification, and they may change accordingly according to the changes in the orientation of the components in the drawings.

[0037] In this application, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense. For example, "connection" can refer to the connection of mechanical structure or physical structure. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be directly connected or indirectly connected through an intermediate medium. It can also be understood as the physical contact and electrical conduction of components, and it can also be understood as the form in which different components in the circuit structure are connected through physical lines such as PCB copper foil or wires that can transmit electrical signals.

[0038] The embodiment of the present application provides a pressure device, which may be a device with a vacuum cavity such as an electron beam etcher, a photolithography machine, an electron microscope, or an electron beam defect detection device, or may be a non-vacuum device. The embodiment of the present application does not impose any special restrictions on the specific form of the above-mentioned pressure device. The following description is made by taking the pressure device as a vacuum device as an example.

[0039] Reference Figure 1 , the vacuum equipment 1000 of the embodiment of the present application includes two or more vacuum chambers 101 and a connector 200, and the connector 200 is used to connect the two vacuum chambers 101. According to the number of vacuum chambers 101 and the connection requirements, a suitable number of connectors 200 are set, and the present application does not limit this. It should be noted that the two vacuum chambers 101a and 101b can be movable components 100. The two movable components 100 are prone to relative displacement or vibration, so the connector 200 connecting the two movable components 100 needs to have a vibration isolation function.

[0040] The connector 200 with vibration isolation function may include: Figure 2 and Figure 3 The first flange 1, the second flange 2 and the bellows 3 are shown. The first flange 1 and the second flange 2 are arranged opposite to each other, and the bellows 3 is arranged between the first flange 1 and the second flange 2. The two ends of the bellows 3 are used to connect the first flange 1 and the second flange 2. One of the first flange 1 and the second flange 2 is used to connect the movable component 100 as the input end, and the other of the first flange 1 and the second flange 2 is used to connect the movable component 100 as the output end. When the two movable components 100 are relatively displaced or any movable component 100 vibrates, the bellows 3 will deform, thereby realizing the vibration isolation function. Therefore, the bellows 3 is the core component of the connector 200 to realize the vibration isolation function.

[0041] Among them, the rigidity of the bellows 3 has a decisive influence on the vibration isolation effect of the connector 200. Therefore, in order to be suitable for application scenarios with high requirements for vibration isolation performance, it is necessary to reduce the rigidity of the bellows 3 to improve the vibration isolation effect of the connector 200.

[0042] Since the rigidity of the bellows 3 is related to factors such as thickness, inner diameter, outer diameter, wave number and wave pitch, the rigidity of the bellows 3 can be changed from the above aspects. However, when the thickness of the bellows 3 is reduced to reduce the rigidity of the bellows 3, the strength of the bellows 3 will be reduced at the same time, and there is a material strength limit. When the rigidity of the bellows 3 is reduced by increasing the difference between the inner diameter of the bellows 3 and the outer diameter of the bellows 3, the atmospheric pressure load on a single wave in the bellows 3 will be increased at the same time. When the rigidity of the bellows 3 is reduced by reducing the inner diameter of the bellows 3, it will result in the bellows 3 being unable to be used when a pipeline or supporting structure needs to pass through it. When the rigidity of the bellows 3 is reduced by reducing the wave pitch of the bellows 3 and increasing the wave number at the same time, the processing difficulty of the bellows 3 will increase.

[0043] In order to reduce the rigidity of the bellows 3 without causing the above problems, the embodiment of the present application provides a connector 200 with an improved structure. The connector 200 of the embodiment of the present application includes the first flange 1 and the second flange 2 as described above, and also includes: Figure 4 and Figure 5 The N bellows 3 and N-1 connectors 4 are shown. Among them, N≥2, that is, the connector 200 includes more than two bellows 3 and at least one connector 4. The N bellows 3 are sequentially arranged from the inside to the outside, and two adjacent bellows 3 are connected by N-1 connectors 4 respectively. The bellows 3 located in the innermost layer is connected to the first flange 1, and the bellows 3 located in the outermost layer is connected to the second flange 2. In addition, the connector 200 of the embodiment of the present application also includes N-1 flexible support members 5, that is, at least one flexible support member 5. The N-1 flexible support members 5 can provide supporting force to the N bellows 3 to prevent the N bellows 3 from collapsing due to pressure. The N-1 flexible support members 5 are all arranged on the outside of the chamber surrounded by the N bellows 3, the N-1 connectors 4, the first flange 1 and the second flange 2. In addition, the N-1 flexible support members 5 are respectively connected to the N-1 connecting plates. When N=2, as Figure 4 and Figure 5 As shown, the flexible support member 5 is connected to the first flange 1 or the second flange 2; when N>2, N-1 flexible support members 5 are connected to the first flange 1 and the second flange 2 respectively. That is, some of the N-1 flexible support members 5 are connected to the first flange 1, and another part of the N-1 flexible support members 5 are connected to the second flange 2. Figure 6 and Figure 7 As shown, N=3, the connector 200 includes 3 bellows, 2 connecting members 4 and 2 flexible supporting members 5. One flexible supporting member 5 is connected to the first flange 1, and the other flexible supporting member 5 is connected to the second flange 2.

[0044] Compared with the connector 200 having a single bellows 3, the connector 200 of the embodiment of the present application includes N bellows 3 (more than two bellows 3), and the more than two bellows 3 are sequentially sleeved from the inside to the outside, and are sequentially connected by one or more connectors 4. One or more flexible support members 5 can provide support force to the N bellows 3, thereby preventing the N bellows 3 from collapsing due to pressure. The connector 200 of the embodiment of the present application can increase the equivalent length and wave number of the bellows 3 without significantly increasing the total length of the bellows 3. The overall stiffness of the N bellows 3 is low, so that the vibration isolation effect of the connector 200 is good. Even if the bellows 3 needs to pass through a pipeline or a supporting structure, the processing difficulty of the bellows 3 is low, and the strength of the bellows 3 will not be reduced. There is no material strength limit, and the atmospheric pressure load on a single wave in the bellows 3 will not be increased.

[0045] It should be noted that, when applied to a vacuum scenario, the connector 200 of the embodiment of the present application is a vacuum connector, and the bellows 3 in the connector 200 is a vacuum bellows. The vacuum bellows is an elastic element with a foldable corrugated sheet structure realized by welding or forming methods.

[0046] Furthermore, in order to ensure the support strength of the flexible support member 5, the connecting member 4 is a rigid member. In some embodiments of the present application, the connecting member 4 is made of stainless steel. The bellows 3 can be a metal bellows or a stainless steel bellows, which is not limited in the present application. The connecting member 4 can be connected to the bellows 3 by welding.

[0047] Based on the structure of the connector 200, the connector 4 in the connector 200 may have various structural forms. Figure 6 As shown, the connecting member 4 is an annular connecting plate 41. The inner ring of the annular connecting plate 41 can be connected to the inner layer of the corrugated tube 3, and the outer ring of the annular connecting plate 41 is connected to the outer layer of the corrugated tube 3. The width of the annular connecting plate 41 can be small, so that the radial dimension of the connector 200 is compact. Figure 6 The N-1 connecting members 4 in the connector 200 shown are all annular connecting plates 41, so that the overall structure of the connector 200 is relatively compact.

[0048] In other embodiments of the present application, Figure 4 , Figure 8 and Fig. 9 As shown, the above-mentioned connecting member 4 includes a first connecting portion 421, a second connecting portion 422 and a third connecting portion 423, the second connecting portion 422 is a cylindrical connecting plate or a conical connecting plate, and the first connecting portion 421 and the third connecting portion 423 are both annular connecting plates. Therefore, the first connecting portion 421, the second connecting portion 422 and the third connecting portion 423 are connected in sequence, that is, a connecting structure with a Z-shaped cross section on one side is formed (for the convenience of explanation, hereinafter referred to as "Z-shaped connecting plate"). The first connecting portion 421 and the third connecting portion 423 are connected to two adjacent bellows 3 respectively. Since the connecting member 4 is rigid, the Z-shaped connecting plate 42 can increase the supporting force of the bellows 3.

[0049] based on Figure 8 The connecting member 4 shown in some embodiments of the present application refers to Fig. 9 , N-1 connectors 4 in the connector 200 ( Fig. 9 The connector 200 includes two connecting parts 4, both of which are Z-shaped connecting plates 42, so that the supporting strength of the N bellows 3 of the connector 200 is relatively high.

[0050] Alternatively, in some embodiments of the present application, refer to Fig.10, some of the N-1 connectors 4 of the connector 200 ( Fig.10 The two connecting pieces 4 in the connector 200 are annular connecting plates 41, and another part of the connecting pieces 4 ( Fig.10 One of the connecting pieces) is a Z-shaped connecting plate 42.

[0051] In addition, the flexible support member 5 of the embodiment of the present application can have various structural forms. In some embodiments of the present application, such as Figure 8 As shown, the above-mentioned flexible support member 5 is a spring 51 or a group of springs 51. If a flexible support member 5 is a spring 51, the spring 51 can be sleeved on the outside of the bellows 3. If a flexible support member 5 is a group of springs 51, a group of springs 51 includes two or more springs arranged at intervals. The first ends of the same group of springs 51 are connected to different positions of the same connector 4. The second ends of the same group of springs 51 are connected to the first flange 1, or the second ends of the same group of springs 51 are connected to the second flange 2. The spring 51 has the advantages of good elasticity, good stability, high dimensional accuracy, and strong load capacity. In addition, the same group of springs 51 are evenly spaced on the outer wall of the connector 4 to form a uniform supporting force on the connector 4.

[0052] In other embodiments of the present application, Figure 4 As shown, the above-mentioned flexible support member 5 is a damping block 52. When the damping block 52 is an annular damping block, one flexible support member 5 is one damping block. The annular damping block is sleeved on the outer side of the bellows 3. When the damping block 52 is other non-annular shapes, one flexible support member 5 is a group of damping blocks 52. A group of damping blocks 52 may include two or more damping blocks 52 arranged at intervals. The same group of damping blocks 52 are all connected to the same connector 4. In addition, the same group of damping blocks 52 are all connected to the first flange 1. Or the same group of damping blocks 52 are all connected to the second flange 2. The damping blocks 52 have the advantages of excellent vibration reduction and noise reduction, heat resistance, cold resistance, anti-aging and strong adhesion. In addition, the same group of damping blocks 52 can be evenly spaced on the outer wall of the connector 4 to form a uniform supporting force on the connector 4.

[0053] Furthermore, the damping block 52 can be made of rubber material, which has high elasticity, low price, and good physical and chemical stability.

[0054] When N=2, the connector 200 includes only one flexible support member 5. Based on the structure of the flexible support member 5, the flexible support member 5 can be a group of springs 51 or one or a group of damping blocks 52. Figure 8 As shown, the first flange 1 and the second flange 2 are arranged in the up-down direction (i.e. Figure 8 The vertical direction in the image is set relative to the vertical direction in the image. Figure 8The first flange 1 is shown located above the second flange 2 . Figure 8 The flexible support 5 shown is a set of springs 51 (comprising at least two springs). Figure 4 The flexible support member 5 shown may be an annular damping block, or a group of damping blocks 52 (a group of damping blocks 52 includes at least two damping blocks).

[0055] When N≥3, the connector 200 includes more than two flexible support members 5. At this time, the multiple flexible support members 5 can adopt the same structural form or different structural forms, and the present application does not limit this.

[0056] In some embodiments, Fig.11 As shown, the N-1 flexible support members 5 of the connector 200 are all springs 51. That is, the N-1 flexible support members 5 are multiple groups of springs 51. According to the position of the flange to be connected, a suitable form of the spring 51 is selected. The first flange 1 is located above the second flange 2, and one or more flexible support members 5 connected to the first flange 1 can all be tension springs, and one or more flexible support members 5 connected to the second flange 2 can be compression springs.

[0057] In some other embodiments, such as Fig. 9 As shown, some of the N-1 flexible supports 5 of the connector 200 are springs 51, and some of the N-1 flexible supports 5 of the connector 200 are damping blocks 52. The first flange 1 is located above the second flange 2, and one or more flexible supports 5 connected to the first flange 1 may be springs 51, and one or more flexible supports 5 connected to the second flange 2 may be damping blocks 52.

[0058] Or, in other embodiments, Fig.12 As shown, the N-1 flexible support members 5 of the connector 200 are all damping blocks 52. That is, the N-1 flexible support members 5 are multiple groups of damping blocks 52. Alternatively, the N-1 flexible support members 5 are multiple annular damping blocks. Alternatively, some of the N-1 flexible support members 5 are each a group of damping blocks 52, and the other flexible support members of the N-1 flexible support members 5 are all annular damping blocks.

[0059] In order to further illustrate the effect of the above-mentioned connector 200, a comparative description is given below in combination with a connector 200 having a single bellows 3 and a specific embodiment of the present application.

[0060] Various physical parameters of the bellows 3 in the connector 200 having a single bellows 3 are shown in Table 1 below.

[0061] Table 1 Physical parameters of the bellows 3 in the connector

[0062] Part Name Number of layers Wavelength Wall thickness inner diameter outer diameter length Axial stiffness Lateral stiffness Bellows 2 1mm 0.12mm 100mm 120mm 95mm 2.45N / mm 4.55N / mm

[0063] The connector 200 of the embodiment of the present application includes two bellows 3, a connecting member 4 and a flexible support member 5. The physical parameters of the bellows 3 in the connector 200 are shown in Table 2 below.

[0064] Table 2 Physical parameters of the bellows in the connector of the present application embodiment

[0065]

[0066] Comparing Table 1 and Table 2, it can be seen that the data (wave pitch, wall thickness, total length, inner diameter, outer diameter, axial stiffness, and transverse stiffness) of the bellows 3 in the connector 200 with a single bellows are the same as those of the first bellows in the connector 200 of the embodiment of the present application. The connector 200 of the embodiment of the present application is provided with a second bellows, and the overall axial stiffness of the two bellows 3 is reduced to 1.38 N / mm, and the overall transverse stiffness is reduced to 3.08 N / mm, which significantly reduces the stiffness of the bellows 3.

[0067] Furthermore, taking the second flange 2 for connecting the movable member 100 as the output end as an example, and the mass of the movable member 100 connected to the second flange 2 is 10 kg as an example, the frequency response analysis of the connector 200 with a single bellows and the connector 200 of the embodiment of the present application is performed, and the results are as follows: Fig.13 and Fig.14 shown.

[0068] Fig.13 The frequency response curves of the axial vibration of the connector 200 having a single bellows and the connector 200 according to the embodiment of the present application are shown. Fig.14 The frequency response curves of the lateral vibration of the connector 200 having a single bellows and the connector 200 according to the embodiment of the present application are shown. Fig.13 and Fig.14 The horizontal coordinates are all frequencies. The vertical coordinates are respectively magnitude and phase from top to bottom. Line type 1 is the frequency response curve of the connector 200 of the embodiment of the present application. Line type 2 is the frequency response curve of the connector 200 with a single bellows. Fig.13 and Fig.14 It can be seen that the characteristic frequency of the connector 200 of the embodiment of the present application is lower than that of the connector 200 with a single bellows. Therefore, the connector 200 of the embodiment of the present application has a wider vibration isolation range, a better attenuation effect on high-frequency signals, and a better vibration isolation effect.

[0069] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A connector, characterized in that: include: A first flange and a second flange arranged opposite to each other; N bellows, wherein N ≥ 2; the N bellows are all located between the first flange and the second flange, and are arranged in sequence from the inside to the outside; the innermost bellows is connected to the first flange, and the outermost bellows is connected to the second flange; N-1 connecting pieces, each of which connects two adjacent bellows; N-1 flexible support members, the N-1 flexible support members are all located outside the chamber surrounded by the N bellows, the N-1 connecting members, the first flange and the second flange, and are respectively connected to the N-1 connecting plates; when N=2, the flexible support member is connected to the first flange or the second flange; when N>2, the N-1 flexible support members are respectively connected to the first flange and the second flange.

2. The connector according to claim 1, characterized in that: The bellows is a vacuum bellows.

3. The connector according to claim 1 or 2, characterized in that: The material of the connecting piece is stainless steel.

4. The connector according to any one of claims 1 to 3, characterized in that: The connecting member includes a first connecting part, a second connecting part and a third connecting part which are connected in sequence, the second connecting part is a cylindrical connecting plate or a conical connecting plate, the first connecting part and the third connecting part are both annular connecting plates, and the first connecting part and the third connecting part are respectively connected to two adjacent corrugated pipes.

5. The connector according to any one of claims 1 to 4, characterized in that: The connecting piece is an annular connecting plate.

6. The connector according to any one of claims 1 to 5, characterized in that: One of the flexible supporting members is a spring, and the spring is sleeved on the outside of the bellows; Alternatively, one of the flexible support members is a group of springs, the group of springs includes at least two springs arranged at intervals, one end of the at least two springs is connected to the connecting plate, and the other ends of the at least two springs are connected to the first flange or the second flange.

7. The connector according to any one of claims 1 to 6, characterized in that: One of the flexible support members is an annular damping block, and the annular damping block is sleeved on the outside of the bellows; Alternatively, one of the flexible support members is a group of damping blocks; the group of damping blocks includes at least two damping blocks arranged at intervals, and the at least two annular damping blocks are connected to the connecting plate and are both connected to the first flange or the second flange.

8. The connector according to claim 7, characterized in that: The material of the flexible support member is rubber.

9. A pressure device, characterized in that: include: at least two pressure chambers; The connector described in any one of claims 1 to 8 connects the two pressure chambers.

10. The pressure device according to claim 9, characterized in that The pressure equipment is any one of an electron beam etching machine, a photolithography machine, an electron microscope, and an electron beam defect detection device.

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