Lifting mechanism and wafer inspection device

Abstract

The present application relates to a lifting mechanism and a wafer inspection device. The lifting mechanism includes: a mounting base and an adjustment assembly. The adjustment assembly includes a first adjustment member and a second adjustment member. The first adjustment member is slidably connected to the mounting base along a first direction. The second adjustment member is slidably connected to the first adjustment member along a second direction and is also slidably connected to the first adjustment member along a third direction. When the first adjustment member moves along the first direction, the second adjustment member moves relative to the first adjustment member along the second direction and the third direction, thereby adjusting the height of the second adjustment member in the third direction. Among them, the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, and the range of the included angle α between the first direction and the second direction is: 15° ≤ α ≤ 30°; the range of the included angle β between the second direction and the third direction is: 60° ≤ β ≤ 75°. The lifting mechanism has a high adjustment accuracy for the height of the second adjustment member in the third direction.

Description

Technical Field

[0001] This application relates to the technical field of wafer detection, and particularly relates to a lifting mechanism and a wafer detection device. Background Art

[0002] In a wafer detection device, a moving stage is provided to carry a wafer to be detected and adjust the position of the wafer to be detected in the horizontal direction and the height direction. When the size of the wafer to be detected is large, the greater the weight carried on the moving stage, which may affect the accuracy of adjusting the position of the wafer to be detected in the height direction. Therefore, in order to adapt to different sizes of samples to be detected, it is necessary to improve the adjustment accuracy of the moving stage for the position of the wafer to be detected in the height direction. Summary of the Invention

[0003] In view of this, this application provides a lifting mechanism and a wafer detection device, and the lifting mechanism has a high adjustment accuracy for the height of the second adjusting member in the third direction.

[0004] This application provides a lifting mechanism, which includes: a mounting seat and an adjusting assembly. The adjusting assembly includes a first adjusting member and a second adjusting member. The first adjusting member is slidably connected to the mounting seat along a first direction. The second adjusting member is slidably connected to the first adjusting member along a second direction, and the second adjusting member is also slidably connected to the first adjusting member along a third direction. When the first adjusting member moves along the first direction, the second adjusting member moves relative to the first adjusting member along the second direction and the third direction, so as to adjust the height of the second adjusting member in the third direction. Wherein, the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, the range of the included angle α between the first direction and the second direction is: 15° ≤ α ≤ 30°; the range of the included angle β between the second direction and the third direction is: 60° ≤ β ≤ 75°.

[0005] Further, the first adjusting member has a first position and a second position relative to the mounting seat along the first direction; the lifting mechanism further includes a control assembly, which includes a controller, a first control sub-assembly and a second control sub-assembly. The first control sub-assembly and the second control sub-assembly are arranged at intervals along the first direction on the mounting seat. The first control sub-assembly is arranged close to the first position, and the second control sub-assembly is arranged close to the second position. The controller is electrically connected to the first control sub-assembly and the second control sub-assembly respectively. The controller, the first control sub-assembly and the second control sub-assembly cooperate to control the first adjusting member to move between the first position and the second position.

[0006] Further, the lifting mechanism further includes a driving assembly, the driving assembly includes a driving member, the driving member is installed on the mounting seat and electrically connected to the controller, and the driving member is used to drive the first adjusting member to move in the first direction; when the first adjusting member moves to the first position, the first control sub-component forms a first signal, the controller receives the first signal of the first control sub-component and controls the driving member to turn off; when the first adjusting member moves to the second position, the second control sub-component forms a second signal, the controller receives the second signal of the second control sub-component and controls the driving member to turn off, and the controller, the first control sub-component and the second control sub-component cooperate to enable the first adjusting member to move between the first position and the second position.

[0007] Further, the first control sub-component includes a first mounting member, a first electrode, a second electrode and a first switch member. The first mounting member is installed on the mounting seat, the first electrode is arranged on the first mounting member, the second electrode abuts against the first electrode, the second electrode is also connected to the first switch member, and the second electrode and the first switch member can move relative to the first mounting member in the first direction. Both the first electrode and the second electrode are electrically connected to the controller. When the first adjusting member moves to the first position, the first electrode and the second electrode are disconnected to form a first signal, the controller receives the first signal and controls the driving member to turn off; when the first adjusting member moves away from the first position in the direction of approaching the second position, the controller controls the driving member to turn on, and the first electrode and the second electrode abut against each other; the second control sub-component includes a second mounting member, a third electrode, a fourth electrode and a second switch member. The second mounting member is installed on the mounting seat, the third electrode is arranged on the second mounting member, the fourth electrode abuts against the third electrode, the fourth electrode is also connected to the second switch member, and the fourth electrode and the second switch member can move relative to the second mounting member in the first direction. Both the third electrode and the fourth electrode are electrically connected to the controller. When the first adjusting member moves to the second position, the third electrode and the fourth electrode are disconnected to form a second signal, the controller receives the second signal and controls the driving member to turn off; when the first adjusting member moves away from the second position in the direction of approaching the second position, the controller controls the driving member to turn on, and the third electrode and the fourth electrode abut against each other.

[0008] Furthermore, the driving assembly also includes a guide member and a connecting block, the power output shaft of the driving member is connected to the guide member, the guide member extends along a first direction, the connecting block is sleeved on the outer periphery of the guide member and is threadedly connected to the guide member, the connecting block is connected to the first adjusting member, and the connecting block is located between the first position and the second position; when the driving member is turned on, the guide member is driven to rotate, thereby driving the connecting block and the first adjusting member to move relative to the mounting seat along the first direction, thereby realizing the adjustment of the height of the second adjusting member in the third direction.

[0009] Furthermore, the first control subassembly also includes a first elastic member, the first mounting member has a first accommodating cavity, and the first accommodating cavity extends along a first direction; the first electrode is arranged in the first accommodating cavity, the first switch member is sequentially penetrated through the first elastic member, the first electrode and the second electrode, and one end of the first switch member away from the second electrode protrudes from the first accommodating cavity; when the first adjusting member moves to the first position, the connecting block abuts against the first switch member to compress the first elastic member and drive the first switch member and the second electrode to move relative to the first accommodating cavity along the first direction toward the direction away from the second position, the first electrode is disconnected from the second electrode and a first signal is generated, the controller receives the first signal and controls the driving member to close; when the first adjusting member leaves the first position in a direction close to the second position, the controller controls the driving member to open, the first elastic member elastically recovers and pushes the first switch member and the second electrode to move relative to the first accommodating cavity along the first direction toward the direction close to the second position, the first electrode and the second electrode are closed. abutment; the second control subassembly also includes a second elastic member, the second mounting member has a second accommodating cavity, and the second accommodating cavity extends along the first direction; the third electrode is arranged in the second accommodating cavity, the second switch member is sequentially penetrated through the second elastic member, the third electrode and the fourth electrode, and one end of the second switch member away from the fourth electrode protrudes from the second accommodating cavity; when the first adjusting member moves to the second position, the connecting block abuts the second switch member to compress the second elastic member and drive the second switch member and the fourth electrode to move relative to the second accommodating cavity along the first direction toward the direction away from the first position, the third electrode is disconnected from the fourth electrode and a second signal is formed, the controller receives the second signal and controls the driving member to close; when the first adjusting member leaves the second position in the direction close to the first position, the controller controls the driving member to open, the second elastic member elastically recovers and pushes the second switch member and the fourth electrode to move relative to the second accommodating cavity along the first direction toward the direction close to the first position, and the third electrode abuts against the fourth electrode.

[0010] Further, the lifting mechanism further includes a limiting component, the limiting component includes a first limiting member and a second limiting member, the first limiting member and the second limiting member are arranged on the mounting seat, and the first limiting member and the second limiting member are arranged at opposite sides of the connecting block at intervals in a first direction to limit the movement of the connecting block in the first direction.

[0011] Further, the lifting mechanism includes a first track component and a second track component. The first track component is arranged between the first adjusting member and the mounting seat, and the first track component extends in a first direction to enable the first adjusting member to move relative to the mounting seat in the first direction; the second track component is arranged between the first adjusting member and the second adjusting member, and the second track component extends in a second direction to enable the first adjusting member to move relative to the second adjusting member in the second direction.

[0012] Further, the first track component includes a first sub-component and a second sub-component. The mounting seat has a first rib facing the first adjusting member, and the first adjusting member has a first groove facing the second adjusting member. The first rib divides the first groove into a first setting space and a second setting space. The first setting space is used to set the first sub-component, and the second setting space is used to set the second sub-component. The first sub-component and the second sub-component cooperate to guide the first adjusting member to move relative to the mounting seat in the first direction; the second track component includes a third sub-component and a fourth sub-component. The second adjusting member has a second rib facing the first adjusting member, and the first adjusting member has a second groove facing the second adjusting member. The second rib divides the second groove into a third setting space and a fourth setting space. The third setting space is used to set the third sub-component, and the fourth setting space is used to set the fourth sub-component. The third sub-component and the fourth sub-component cooperate to guide the first adjusting member to move relative to the second adjusting member in the second direction; both the first sub-component and the second sub-component include a first track member, a second track member and a rolling member. The first track member is arranged on the first adjusting member, the second track member is arranged on the second adjusting member, and the rolling member is arranged between the first track member and the second track member and is respectively rollably connected to the first track member and the second track member; both the third sub-component and the fourth sub-component include a third track member, a fourth track member and a second rolling member. The third track member is arranged on the first adjusting member, the fourth track member is arranged on the second adjusting member, and the second rolling member is arranged between the third track member and the fourth track member and is respectively rollably connected to the third track member and the fourth track member.

[0013] The present application also provides a wafer detection device, which includes: a housing, a base, a lifting mechanism provided by the present application, and a chuck. The housing has a chamber; the base is disposed in the chamber; the lifting mechanism is installed on one side of the base; the chuck is used for carrying a sample to be detected, and the chuck is disposed on the side of the second adjusting member away from the mounting seat. When the second adjusting member moves in the third direction, the chuck and the sample to be detected are driven to move in the third direction.

[0014] Further, the wafer detection device further includes a plurality of leveling components. The plurality of leveling components are disposed around the outer periphery of the mounting seat, and the plurality of leveling components cooperate to adjust the relative position between the mounting seat and the base; the leveling component includes: a support member, an adjusting pressing block, and a locking member. The support member passes through the mounting seat and is threadedly connected to the mounting seat. One end of the support member abuts against the base. The support member has a first through hole. The adjusting pressing block is disposed on the surface of the mounting seat away from the base and has a second through hole. The base has a locking hole. The locking member sequentially passes through the second through hole, the first through hole, and the locking hole to fix the relative position between the mounting seat and the base.

[0015] Further, the chuck has a flow channel for circulating refrigerant; the wafer detection device further includes a refrigerant tank and a pipeline assembly. The refrigerant tank is used for storing refrigerant and conveying the refrigerant to the chuck through the pipeline assembly; the pipeline assembly includes a pipeline joint, a first pipeline member, a second pipeline member, a third pipeline member, and a fourth pipeline member. The pipeline joint is disposed on the housing and is located in the chamber. The pipeline joint has a first interface, a second interface, a third interface, and a fourth interface. Among them, the first interface is communicated with the second interface, and the third interface and the fourth interface are communicated; the first pipeline member penetrates through the bottom wall of the chamber, and one end of the first pipeline member is connected to the refrigerant, and the other end of the first pipeline member is connected to the first interface. The second pipeline member is in a ring structure, and the opposite ends of the second pipeline member are respectively connected to the second interface and the flow channel; the third pipeline member is in a ring structure, and the opposite ends of the third pipeline member are respectively connected to the flow channel and the third interface. One end of the fourth pipeline member is connected to the fourth interface, and the other end of the fourth pipeline member penetrates through the bottom wall of the chamber and is connected to the outside.

[0016] In the present application, when the lifting mechanism is applied to a wafer inspection device, the side of the second adjusting member facing away from the first adjusting member is used to carry a chuck and a sample to be inspected. By adjusting the relative position of the first adjusting member and the mounting seat in the first direction, the height of the second adjusting member in the third direction is achieved, thereby realizing the adjustment of the positions of the chuck and the sample to be inspected in the height direction. Specifically, when the first adjusting member slides relative to the mounting seat in the first direction, through the relative sliding of the second adjusting member and the first adjusting member in the second direction, the second adjusting member is driven to move relative to the first adjusting member and the mounting seat in the third direction, so as to change the height of the second adjusting member in the third direction.

[0017] When the included angle α between the first direction and the second direction satisfies the range 15° ≤ α ≤ 30°, and the included angle β between the second direction and the third direction satisfies the range 60° ≤ β ≤ 75°, the included angle between the first direction and the second direction is within a reasonable range, and the included angle between the second direction and the third direction is within a reasonable range. On the one hand, when the first adjusting member moves relative to the mounting seat, the resistance of the relative sliding of the first adjusting member and the second adjusting member in the second direction can be reduced and the resistance value is within a reasonable range, so as to reduce the load of the driving member and improve the service performance of the lifting mechanism. On the other hand, it is convenient to control the relative sliding speed of the first adjusting member and the second adjusting member, and avoid the second adjusting member sliding directly towards the side close to the mounting seat relative to the first adjusting member due to the steep slope formed by the second direction and the horizontal plane, which is beneficial to improving the height adjustment accuracy of the lifting mechanism for the second adjusting member in the third direction. When the weight of the component carried on the side of the second adjusting member facing away from the mounting seat is relatively large, through the setting of the included angle between the first direction and the second direction, and the included angle between the second direction and the third direction, it is ensured that the second adjusting member does not slide directly towards the side close to the mounting seat relative to the first adjusting member due to the excessive weight of the component carried on the side of the second adjusting member facing away from the mounting seat, and the lifting mechanism still maintains a high adjustment accuracy for the height of the second adjusting member in the third direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the implementation will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1Partial structural schematic diagram of the wafer detection device according to the first embodiment of the present application;

[0020] Figure 2 Partial exploded structural schematic diagram of the wafer detection device according to the first embodiment of the present application;

[0021] Figure 3 Partial side view of the structure of the wafer detection device according to the first embodiment of the present application;

[0022] Figure 4 Partial side view of the structure of the wafer detection device according to the second embodiment of the present application;

[0023] Figure 5 Circuit block diagram of the lifting mechanism according to an embodiment of the present application;

[0024] Figure 6 Top view structural schematic diagram of the wafer detection device according to an embodiment of the present application;

[0025] Figure 7 It is Figure 6 Cross-sectional view in the A-A direction in;

[0026] Figure 8 It is Figure 7 Enlarged view of the B dashed box in;

[0027] Figure 9 It is Figure 7 Enlarged view of the C dashed box in;

[0028] Figure 10 It is Figure 2 Enlarged view of the D dashed box in;

[0029] Figure 11 Partial structural schematic diagram of the lifting mechanism according to the first embodiment of the present application;

[0030] Figure 12 Partial structural schematic diagram of the lifting mechanism according to the second embodiment of the present application;

[0031] Figure 13 Partial structural schematic diagram of the wafer detection device according to the second embodiment of the present application;

[0032] Figure 14 Partial exploded structural schematic diagram of the wafer detection device according to the second embodiment of the present application;

[0033] Figure 15 Top view structural schematic diagram of the housing according to an embodiment of the present application;

[0034] Figure 16 It is Figure 15 Cross-sectional view in the E-E direction in;

[0035] Figure 17 is Figure 6 a sectional view in the F-F direction in

[0036] Figure 18 is Figure 17 an enlarged view of the dashed-line box G in

[0037] Figure 19 a partial structural schematic diagram of a wafer inspection device according to the third embodiment of the present application;

[0038] Figure 20 a structural schematic diagram of a chuck according to an embodiment of the present application.

[0039] Description of reference numerals:

[0040] 100 - Lifting mechanism, 110 - Mounting base, 111 - First rib, 112 - First mounting plate, 113 - Second mounting plate, 120 - Adjusting assembly, 121 - First adjusting member, 1211 - First groove, 1212 - Second groove, 122 - Second adjusting member, 1221 - Second rib, 130 - Control assembly, 131 - Controller, 132 - First control sub - assembly, 1321 - First mounting member, 1322 - First electrode, 1323 - Second electrode, 1324 - First switch member, 1325 - First elastic member, 1326 - First accommodating cavity, 1327 - First penetrating portion, 1328 - First switch portion, 133 - Second control sub - assembly, 1331 - Second mounting member, 1332 - Third electrode, 1333 - Fourth electrode, 1334 - Second switch member, 1335 - Second elastic member, 1336 - Second accommodating cavity, 1337 - Second penetrating portion, 1338 - Second switch portion, 140 - Driving assembly, 141 - Driving member, 142 - Guide member, 143 - Connecting block, 150 - Limiting assembly, 151 - First limiting member, 152 - Second limiting member, 160 - First track assembly, 161 - First sub - assembly, 162 - Second sub - assembly, 163 - First track member, 164 - Second track member, 165 - First rolling member, 170 - Second track assembly, 171 - Third sub - assembly, 172 - Fourth sub - assembly, 173 - Third track member, 174 - Fourth track member, 175 - Second rolling member, 180 - Guide rail assembly, 181 - Guide rail member, 182 - Sliding member, 200 - Wafer inspection device, 210 - Housing, 211 - Chamber, 212 - Through - hole, 220 - Base, 221 - Locking hole, 230 - Chuck, 231 - Flow channel, 240 - Levelling assembly, 241 - Support member, 2411 - First penetrating hole, 242 - Adjusting press block, 2421 - Second penetrating hole, 243 - Locking member, 250 - Refrigerant tank, 260 - Pipeline assembly, 261 - Pipeline joint, 2611 - First interface, 2612 - Second interface, 2613 - Third interface, 2614 - Fourth interface, 262 - First pipeline member, 263 - Second pipeline member, 264 - Third pipeline member, 265 - Fourth pipeline member, 270 - Baffle assembly, 271 - First baffle, 272 - Second baffle. Detailed implementation manners

[0041] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0042] The terms "first", "second", etc. in the description, claims and the above-mentioned drawings of the present application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0043] Reference to "embodiment" or "embodiment mode" herein means that a particular feature, structure or characteristic described in connection with the embodiment or embodiment mode may be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein may be combined with other embodiments.

[0044] In a wafer inspection device, a moving stage is provided for carrying a wafer to be inspected and adjusting the position of the wafer to be inspected in the horizontal direction and the height direction. When the size of the wafer to be inspected is large, the greater the weight carried on the moving stage, the more likely it is to affect the accuracy of the moving stage in adjusting the position of the wafer to be inspected in the height direction. Therefore, in order to adapt to wafers to be inspected of different sizes, it is necessary to improve the adjustment accuracy of the moving stage for the position of the wafer to be inspected in the height direction.

[0045] Please refer to Figure 1 and Figure 2 , the present application provides a lifting mechanism 100, the lifting mechanism 100 includes: a mounting base 110 and an adjusting assembly 120, the adjusting assembly 120 includes a first adjusting member 121 and a second adjusting member 122, the first adjusting member 121 is slidably connected to the mounting base 110 along a first direction (such as Figure 2 the X direction shown in Figure 2 ), the second adjusting member 122 is slidably connected to the first adjusting member 121 along a second direction (such as Figure 2The second adjusting member 122 is slidably connected to the first adjusting member 121 as shown in the Z direction. When the first adjusting member 121 moves in the first direction, the second adjusting member 122 moves relative to the first adjusting member 121 in the second direction and the third direction, so as to adjust the height of the second adjusting member 122 in the third direction. Wherein, the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, and the range of the included angle α between the first direction and the second direction is: 15° ≤ α ≤ 30°; the range of the included angle β between the second direction and the third direction is: 60° ≤ β ≤ 75°.

[0046] Specifically, the value of the included angle α between the first direction and the second direction can be, but is not limited to, 15°, 16°, 18°, 20°, 21°, 22°, 23°, 24°, 25°, 26°, 27°, 28°, 29°, and 30°, etc.

[0047] Specifically, the value of the included angle β between the second direction and the third direction can be, but is not limited to, 60°, 62°, 63°, 65°, 67°, 69°, 70°, 71°, 72°, 73°, 74°, and 75°.

[0048] It can be understood that the first direction, the third direction, and the second direction intersect pairwise.

[0049] It can be understood that the third direction is the height direction.

[0050] In this embodiment, when the lifting mechanism 100 is applied to the wafer detection device 200, the side of the second adjusting member 122 facing away from the first adjusting member 121 is used to carry the chuck 230 and the sample to be detected. By adjusting the relative position of the first adjusting member 121 and the mounting seat 110 in the first direction, the height of the second adjusting member 122 in the third direction is realized, so as to realize the adjustment of the positions of the chuck 230 and the sample to be detected in the height direction. Specifically, when the first adjusting member 121 slides relative to the mounting seat 110 in the first direction, through the relative sliding of the second adjusting member 122 and the first adjusting member 121 in the second direction, the second adjusting member 122 is driven to move relative to the first adjusting member 121 and the mounting seat 110 in the third direction, so as to change the height of the second adjusting member 122 in the third direction.

[0051] When the included angle α between the first direction and the second direction satisfies the range of 15° ≤ α ≤ 30°, and the included angle β between the second direction and the third direction satisfies the range of 60° ≤ β ≤ 75°, the included angle between the first direction and the second direction is within a reasonable range, and the included angle between the second direction and the third direction is within a reasonable range. On the one hand, when the first adjusting member 121 moves relative to the mounting seat 110, the resistance of the relative sliding of the first adjusting member 121 and the second adjusting member 122 along the second direction can be reduced and the resistance value is within a reasonable range, so as to reduce the load of the driving member 141 and improve the service performance of the lifting mechanism 100. On the other hand, it is convenient to control the relative sliding speed of the first adjusting member 121 and the second adjusting member 122, and avoid the second adjusting member 122 sliding directly towards the side close to the mounting seat 110 relative to the first adjusting member 121 due to the steep slope formed by the second direction and the horizontal plane, which is beneficial to improving the height adjustment accuracy of the lifting mechanism 100 for the second adjusting member 122 in the third direction. When the weight of the component carried on the side of the second adjusting member 122 away from the mounting seat 110 is relatively large, through the setting of the included angle between the first direction and the second direction and the included angle between the second direction and the third direction, it is ensured that the second adjusting member 122 does not slide directly towards the side close to the mounting seat 110 relative to the first adjusting member 121 due to the excessive weight of the component carried on the side of the second adjusting member 122 away from the mounting seat 110, and the lifting mechanism 100 still maintains a high height adjustment accuracy for the second adjusting member 122 in the third direction.

[0052] It can be understood that the included angle α between the first direction and the second direction and the included angle β between the second direction and the third direction satisfy the relational expression: α + β ≤ 90°, in other words, the included angle between the first direction and the third direction is an acute angle or a right angle.

[0053] The included angle between the first direction and the second direction, the included angle between the second direction and the third direction, and the included angle between the first direction and the third direction are all within a reasonable range, so as to reduce the resistance of the relative sliding of the first adjusting member 121 and the second adjusting member 122 along the second direction while improving the height adjustment accuracy of the second adjusting member 122 in the third direction.

[0054] Preferably, the included angle α between the first direction and the second direction and the included angle β between the second direction and the third direction satisfy the relational expression: α + β = 90°, in other words, the included angle between the first direction and the third direction is a right angle.

[0055] The included angles between the first direction and the second direction, between the second direction and the third direction, and between the first direction and the third direction are all within a preferred range. The resistance of the first adjusting member 121 and the second adjusting member 122 sliding relative to each other along the second direction is small, and the lifting mechanism 100 has a high precision in adjusting the height of the second adjusting member 122 in the third direction.

[0056] Optionally, the number of the first adjusting members 121 is two, and the two first adjusting members 121 are spaced apart on opposite sides of the second adjusting member 122 along a fourth direction (such as the W direction shown in Figure 2 ). The fourth direction intersects with the first direction, the second direction, and the third direction respectively. When the two first adjusting members 121 move relative to the mounting seat 110 along the first direction, the second adjusting member 122 is driven to move relative to the first adjusting members 121 along the second direction and the third direction, so as to improve the stability of adjusting the height of the second adjusting member 122 in the third direction.

[0057] Optionally, the mounting seat 110 includes a first mounting plate 112 and a second mounting plate 113 which are bent and connected. The first mounting plate 112 extends along the first direction and is used for arranging the first adjusting member 121, and the second mounting plate 113 extends along the third direction. When the second adjusting member 122 moves relative to the first adjusting member 121 along the third direction, the second adjusting member 122 moves relative to the second mounting plate 113 along the third direction.

[0058] It can be understood that, along the third direction, the first mounting plate 112 is spaced apart from the second adjusting member 122.

[0059] In this embodiment, the first mounting plate 112 is used to provide support for the first adjusting member 121 and the second adjusting member 122, and the second mounting plate 113 is used to provide guidance and support for the movement of the second adjusting member 122 in the third direction, so that when the first adjusting member 121 moves relative to the mounting seat 110 along the first direction, the movement of the second adjusting member 122 in the third direction can be prevented from tilting, which may affect the precision of adjusting the height of the second adjusting member 122 in the third direction.

[0060] Optionally, the lifting mechanism 100 further includes a guide rail assembly 180. The guide rail assembly 180 includes a guide rail member 181 and a sliding member 182. The guide rail member 181 is arranged on the second mounting plate 113 and extends along the third direction. The sliding member 182 is slidably connected to the guide rail member 181 along the third direction, and the sliding member 182 is further connected to the second adjusting member 122.

[0061] When the first adjusting member 121 moves relative to the mounting base 110 in the first direction, the second adjusting member 122 moves relative to the first adjusting member 121 in the second direction, and the guide rail assembly 180 is configured to guide the second adjusting member 122 to move relative to the first adjusting member 121 in the third direction, so as to prevent the second adjusting member 122 from tilting during movement.

[0062] Please refer to Figures 2 to 5 , in some embodiments, the first adjusting member 121 has a first position and a second position relative to the mounting base 110 in the first direction; the lifting mechanism 100 further includes a control assembly 130, and the control assembly 130 includes a controller 131, a first control sub-assembly 132 and a second control sub-assembly 133. The first control sub-assembly 132 and the second control sub-assembly 133 are arranged at intervals along the first direction on the mounting base 110. The first control sub-assembly 132 is disposed near the first position, and the second control sub-assembly 133 is disposed near the second position. The controller 131 is electrically connected to the first control sub-assembly 132 and the second control sub-assembly 133 respectively. The controller 131, the first control sub-assembly 132 and the second control sub-assembly 133 cooperate to control the first adjusting member 121 to move between the first position and the second position.

[0063] It can be understood that, along the first direction, the first position and the second position are arranged at intervals, and the first control sub-sub-assembly and the second control sub-assembly 133 are arranged at intervals.

[0064] It can be understood that when the first adjusting member 121 moves from the first position to the second position, the second adjusting member 122 moves from the first limit position to the second limit position in the third direction. The first position corresponds to the first limit position, and the second position corresponds to the second limit position.

[0065] It can be understood that in the embodiment of FIG. 3, the first adjusting member 121 is in the first position, and the second adjusting member 122 is in the first limit position; in Figure 4 the embodiment, the first adjusting member 121 is in the second position, and the second adjusting member 122 is in the second limit position.

[0066] In this embodiment, when the first adjusting member 121 moves relative to the mounting base 110 in the first direction to the first position, the controller 131 cooperates with the first control sub-assembly 132 to control the first adjusting member 121 to stop moving and prevent the first adjusting member 121 from continuing to move in the direction away from the second position towards the first position; when the first adjusting member 121 moves relative to the mounting base 110 in the first direction to the second position, the controller 131 cooperates with the second control sub-assembly 133 to control the first adjusting member 121 to stop moving and prevent the first adjusting member 121 from continuing to move in the direction away from the first position towards the second position. The controller 131, the first control sub-assembly 132 and the second control sub-assembly 133 cooperate to control the first adjusting member 121 to move between the first position and the second position, so that the second adjusting member 122 moves between the first limit position and the second limit position in the third direction, thereby improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0067] It can be understood that when the first adjusting member 121 moves relative to the mounting base 110 in the first direction from the first position to the second position, the second adjusting member 122 moves relative to the first adjusting member 121 in the second direction towards the direction close to the first mounting plate 112, and then the second adjusting member 122 moves in the third direction towards the direction close to the first mounting plate 112 to reduce the height of the second adjusting member 122 in the third direction.

[0068] It can be understood that in the third direction, the first adjusting member 121 and the second adjusting member 122 are arranged in sequence, and the second limit position and the first limit position are arranged in sequence.

[0069] In some embodiments, the lifting mechanism 100 further includes a driving assembly 140. The driving assembly 140 includes a driving member 141. The driving member 141 is mounted on the mounting base 110 and electrically connected to the controller 131. The driving member 141 is used to drive the first adjusting member 121 to move in the first direction; when the first adjusting member 121 moves to the first position, the first control sub-assembly 132 forms a first signal, and the controller 131 receives the first signal of the first control sub-assembly 132 and controls the driving member 141 to turn off; when the first adjusting member 121 moves to the second position, the second control sub-assembly 133 forms a second signal, and the controller 131 receives the second signal of the second control sub-assembly 133 and controls the driving member 141 to turn off. The controller 131, the first control sub-assembly 132 and the second control sub-assembly 133 cooperate to make the first adjusting member 121 move between the first position and the second position.

[0070] Optionally, the driving member 141 is a driving motor.

[0071] In this embodiment, the driving member 141 provides power to drive the first adjusting member 121 to move in the first direction. When the first adjusting member 121 moves to the first position, the first control sub-component 132 forms a first signal, and the controller 131 receives the first signal of the first control sub-component 132 and controls the driving member 141 to turn off, so that the first adjusting member 121 stops moving to prevent the first adjusting member 121 from continuing to move in the direction away from the second position towards the first position. When the first adjusting member 121 moves to the second position, the second control sub-component 133 forms a second signal, and the controller 131 receives the second signal of the second control sub-component 133 and controls the driving member 141 to turn off, so that the first adjusting member 121 stops moving to prevent the first adjusting member 121 from continuing to move in the direction away from the first position towards the second position. The controller 131, the first control sub-component 132, the second control sub-component 133 and the driving member 141 cooperate to control the driving member 141 through the first signal or the second signal, so that the driving member 141 is turned off and the first adjusting member 121 stops moving, thereby realizing the control of the first adjusting member 121 to move between the first position and the second position, and finally enabling the second adjusting member 122 to move between the first limit position and the second limit position in the third direction, so as to improve the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0072] It should be further noted that when the included angle α between the first direction and the second direction satisfies the range of 15° ≤ α ≤ 30°, and the included angle β between the second direction and the third direction satisfies the range of 60° ≤ β ≤ 75°, the included angle between the first direction and the second direction is within a reasonable range, and the included angle between the second direction and the third direction is within a reasonable range. When the driving member 141 is used to drive the first adjusting member 121 to move relative to the mounting base 110, the resistance of the first adjusting member 121 and the second adjusting member 122 sliding relative to each other in the second direction can be reduced and the resistance value is within a reasonable range, so as to reduce the load of the driving member 141, and it can be avoided that the speed of the driving member 141 driving the first adjusting member 121 to move is too fast, which reduces the accuracy of adjusting the position of the second adjusting member 122 in the third direction, and improves the service performance of the lifting mechanism 100.

[0073] Please refer to Figures 6 to 8, in some embodiments, the first control sub-component 132 includes a first mounting member 1321, a first electrode 1322, a second electrode 1323, and a first switch member 1324. The first mounting member 1321 is mounted on the mounting base 110. The first electrode 1322 is disposed on the first mounting member 1321. The second electrode 1323 abuts against the first electrode 1322. The second electrode 1323 is further connected to the first switch member 1324. And the second electrode 1323 and the first switch member 1324 are movable relative to the first mounting member 1321 along a first direction. Both the first electrode 1322 and the second electrode 1323 are electrically connected to the controller 131. When the first adjusting member 121 moves to a first position, the first electrode 1322 and the second electrode 1323 are disconnected to form a first signal, and the controller 131 receives the first signal and controls the driving member 141 to close. When the first adjusting member 121 moves away from the first position in a direction close to a second position, the controller 131 controls the driving member 141 to turn on, and the first electrode 1322 abuts against the second electrode 1323.

[0074] It can be understood that when the first adjusting member 121 is located between the first position and the second position, the second electrode 1323 abuts against the first electrode 1322, and the first electrode 1322 and the second electrode 1323 are electrically connected.

[0075] Optionally, when the first electrode 1322 and the second electrode 1323 are in abutment and electrically connected, in some embodiments, the first electrode 1322 is the positive electrode and the second electrode 1323 is the negative electrode; in some other embodiments, the first electrode 1322 is the negative electrode and the second electrode 1323 is the positive electrode.

[0076] It can be understood that the first signal is a signal for disconnecting the electrical connection between the first electrode 1322 and the second electrode 1323.

[0077] In this embodiment, when the first adjusting member 121 is located between the first position and the second position, the second electrode 1323 abuts against the first electrode 1322, and the first electrode 1322 and the second electrode 1323 are electrically connected. At this time, the driving member 141 drives the first adjusting member 121 to move in the first direction toward the direction close to the first position. When the first adjusting member 121 moves to the first position, the first adjusting member 121 abuts against the first switching member 1324 and drives the second electrode 1323 and the first switching member 1324 to move in the first direction away from the first electrode 1322 relative to the first mounting member 1321, so that the second electrode 1323 is spaced from the first electrode 1322, the first electrode 1322 and the second electrode 1323 are disconnected from the electrical connection and form a first signal. The controller 131 receives the first signal of the first control subassembly 132 and controls the driving member 141 to turn off, so that the first adjusting member 121 stops moving, to prevent the first adjusting member 121 from continuing to move in the direction away from the second position toward the first position. When the first adjusting member 121 leaves the first position toward the direction close to the second position, the controller 131 controls the driving member 141 to turn on, to drive the first adjusting member 121 to slide relative to the mounting base 110 in the first direction. The first adjusting member 121 is separated from the first switching member 1324, and the first switching member 1324 drives the second electrode 1323 to move in the first direction toward the direction close to the first electrode 1322 relative to the first mounting member 1321, so that the second electrode 1323 abuts against the first electrode 1322 and the electrical connection is restored. The controller 131, the first control subassembly 132 and the driving member 141 cooperate to limit one of the extreme positions of the first adjusting member 121 moving in the first direction on the mounting base 110, so as to limit the first extreme position of the second adjusting member 122 in the third direction, which is beneficial to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0078] Please refer to Figure 6 、 Figure 7 and Figure 9, in some embodiments, the second control sub-component 133 includes a second mounting member 1331, a third electrode 1332, a fourth electrode 1333, and a second switch member 1334. The second mounting member 1331 is mounted on the mounting base 110. The third electrode 1332 is disposed on the second mounting member 1331. The fourth electrode 1333 abuts against the third electrode 1332. The fourth electrode 1333 is further connected to the second switch member 1334. And the fourth electrode 1333 and the second switch member 1334 are movable relative to the second mounting member 1331 along a first direction. Both the third electrode 1332 and the fourth electrode 1333 are electrically connected to the controller 131. When the first adjusting member 121 moves to a second position, the third electrode 1332 and the fourth electrode 1333 are disconnected to form a second signal, and the controller 131 receives the second signal and controls the driving member 141 to close. When the first adjusting member 121 moves away from the second position in a direction approaching the second position, the controller 131 controls the driving member 141 to open, and the third electrode 1332 and the fourth electrode 1333 abut against each other.

[0079] It can be understood that when the first adjusting member 121 is located between the first position and the second position, the fourth electrode 1333 abuts against the third electrode 1332, and the third electrode 1332 and the fourth electrode 1333 are electrically connected.

[0080] Optionally, when the third electrode 1332 and the fourth electrode 1333 abut against each other and are electrically connected, in some embodiments, the third electrode 1332 is the positive electrode and the fourth electrode 1333 is the negative electrode; in some other embodiments, the third electrode 1332 is the negative electrode and the fourth electrode 1333 is the positive electrode.

[0081] It can be understood that the second signal is a signal for disconnecting the electrical connection between the third electrode 1332 and the fourth electrode 1333.

[0082] In this embodiment, when the first adjusting member 121 is located between the first position and the second position, the fourth electrode 1333 abuts against the third electrode 1332, and the third electrode 1332 and the fourth electrode 1333 are electrically connected. At this time, the driving member 141 drives the first adjusting member 121 to move in the first direction toward the direction close to the second position. When the first adjusting member 121 moves to the second position, the first adjusting member 121 abuts against the second switching member 1334 and drives the fourth electrode 1333 and the second switching member 1334 to move in the first direction away from the third electrode 1332 relative to the first mounting member 1321, so that the fourth electrode 1333 is spaced apart from the third electrode 1332, and the third electrode 1332 and the fourth electrode 1333 are disconnected from each other to form a second signal. The controller 131 receives the second signal of the second control sub-assembly 133 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, thereby preventing the first adjusting member 121 from continuing to move in the direction away from the first position toward the second position. When the first adjusting member 121 leaves the second position toward the direction close to the first position, the controller 131 controls the driving member 141 to turn on, so as to drive the first adjusting member 121 to slide in the first direction relative to the mounting base 110 toward the direction close to the first position. The first adjusting member 121 is separated from the second switching member 1334, and the second switching member 1334 drives the fourth electrode 1333 to move in the first direction toward the direction close to the third electrode 1332 relative to the first mounting member 1321, so that the fourth electrode 1333 abuts against the third electrode 1332 and the electrical connection is restored. The controller 131, the second control sub-assembly 133 and the driving member 141 cooperate to limit another extreme position of the first adjusting member 121 moving in the first direction on the mounting base 110, thereby limiting the second extreme position of the second adjusting member 122 in the third direction, which is beneficial to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0083] In some embodiments, the driving assembly 140 further includes a guiding member 142 and a connecting block 143. The power output shaft of the driving member 141 is connected to the guiding member 142. The guiding member 142 extends along a first direction. The connecting block is sleeved on the outer periphery of the guiding member 142 and is threadedly connected to the guiding member 142. The connecting block is connected to the first adjusting member 121. The connecting block is located between the first position and the second position. When the driving member 141 is turned on, the guiding member 142 is driven to rotate, so as to drive the connecting block and the first adjusting member 121 to move relative to the mounting base 110 along the first direction, thereby realizing the adjustment of the height of the second adjusting member 122 in the third direction.

[0084] Understandably, along a fourth direction, opposite ends of the connecting block are respectively connected to the two first adjusting members 121.

[0085] Understandably, when the first adjusting member 121 moves to the first position, the connecting block 143 abuts against the first switch member 1324 of the first control sub-assembly 132. When the first adjusting member 121 moves to the second position, the connecting block 143 abuts against the second switch member 1334 of the second control sub-assembly 133.

[0086] In this embodiment, when the driving member 141 is turned on, the power output shaft of the driving member 141 rotates and drives the guiding member 142 to rotate, so as to realize the movement of the connecting block relative to the guiding member 142 in the first direction, thereby driving the first adjusting member 121 to move in the first direction. When the driving member 141 is turned off, the power output shaft of the driving member 141 and the guiding member 142 stop rotating, and the connecting block stops sliding relative to the guiding member 142, so that the first adjusting member 121 stops moving in the first direction, which is conducive to adjusting the second adjusting member 122 to a specific height.

[0087] Understandably, when the first adjusting member 121 is in the first position, the controller 131 receives the first signal from the first control sub - assembly 132 and shuts off the driving member 141 to prevent the first adjusting member 121 from continuing to move in the direction away from the second position towards the first position; when the first adjusting member 121 is in the second position, the controller 131 receives the second signal from the second control sub - assembly 133 and shuts off the driving member 141 to prevent the first adjusting member 121 from continuing to move in the direction away from the first position towards the second position; when the first adjusting member 121 is between the first position and the second position, the controller 131 can also control the driving member 141 to shut off and keep the first adjusting member 121 between the first position and the second position, and adjust the second adjusting member 122 to a specific height. In this embodiment, it should not be understood that the first adjusting member 121 can only stay at the first position or the second position.

[0088] Understandably, by changing the rotation direction of the power output shaft of the driving member 141, the moving direction of the connecting block and the first adjusting member 121 on the mounting base 110 can be changed, so as to change the moving direction of the second adjusting member 122 in the third direction.

[0089] Optionally, in some embodiments, when the power output shaft of the driving member 141 rotates clockwise, the connecting block and the first adjusting member 121 move from the first position to the second position, and the second adjusting member 122 moves from the first extreme position to the second extreme position; when the power output shaft of the driving member 141 rotates counterclockwise, the connecting block and the first adjusting member 121 move from the second position to the first position, and the second adjusting member 122 moves from the second extreme position to the first extreme position.

[0090] In other embodiments, when the power output shaft of the driving member 141 rotates counterclockwise, the connecting block and the first adjusting member 121 move from the first position to the second position, and the second adjusting member 122 moves from the first extreme position to the second extreme position; when the power output shaft of the driving member 141 rotates clockwise, the connecting block and the first adjusting member 121 move from the second position to the first position, and the second adjusting member 122 moves from the second extreme position to the first extreme position.

[0091] In some embodiments, the first control sub-component 132 further includes a first elastic member 1325. The first mounting member 1321 has a first accommodating cavity 1326 that extends along a first direction. The first electrode 1322 is disposed in the first accommodating cavity 1326. The first switch member 1324 sequentially passes through the first elastic member 1325, the first electrode 1322, and the second electrode 1323. One end of the first switch member 1324 facing away from the second electrode 1323 protrudes from the first accommodating cavity 1326. When the first adjusting member 121 moves to a first position, the connecting block abuts against the first switch member 1324 to compress the first elastic member 1325 and drive the first switch member 1324 and the second electrode 1323 to move in a direction away from the second position along the first direction relative to the first accommodating cavity 1326. The first electrode 1322 is disconnected from the second electrode 1323 to form a first signal. The controller 131 receives the first signal and controls the driving member 141 to close. When the first adjusting member 121 moves away from the first position in a direction close to the second position, the controller 131 controls the driving member 141 to turn on. The first elastic member 1325 undergoes elastic recovery and pushes the first switch member 1324 and the second electrode 1323 to move in a direction close to the second position along the first direction relative to the first accommodating cavity 1326. The first electrode 1322 abuts against the second electrode 1323.

[0092] In this embodiment, when the first adjusting member 121 moves to the first position, the connecting block abuts against the first switching member 1324 to push the second electrode 1323 and the first switching member 1324 to move in a first direction away from the first electrode 1322 in the first accommodating cavity 1326, so that the second electrode 1323 is spaced apart from the first electrode 1322, while compressing the first elastic member 1325. The first electrode 1322 and the second electrode 1323 are disconnected from each other and form a first signal. The controller 131 receives the first signal of the first control sub-assembly 132 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, preventing the first adjusting member 121 from continuing to move in a direction away from the second position toward the first position. When the first adjusting member 121 moves away from the first position in a direction close to the second position, the controller 131 controls the driving member 141 to turn on to drive the first adjusting member 121 to slide relative to the mounting base 110 in the first direction. The first adjusting member 121 is separated from the first switching member 1324, and the first elastic member 1325 undergoes elastic recovery and pushes the first switching member 1324 to drive the second electrode 1323 to move in the first direction toward the first electrode 1322 in the first accommodating cavity 1326, so that the second electrode 1323 abuts against the first electrode 1322 and the electrical connection is restored. The controller 131, the first control sub-assembly 132, and the driving member 141 cooperate to limit one of the extreme positions of the first adjusting member 121 moving in the first direction on the mounting base 110, thereby limiting the first extreme position of the second adjusting member 122 in the third direction, which is beneficial to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction. The first elastic member 1325 is conducive to quickly restoring the electrical connection between the first electrode 1322 and the second electrode 1323, so as to improve the accuracy of controlling the moving position of the first adjusting member 121 in the first direction and the moving position of the second adjusting member 122 in the third direction.

[0093] Understandably, in some embodiments, when the first adjusting member 121 is in the first position, the first elastic member 1325 is in a compressed state; when the first adjusting member 121 is located between the first position and the second position, the first elastic member 1325 is in its original length state. In other embodiments, when the first adjusting member 121 is in the first position, the first elastic member 1325 is in a compressed state and the first elastic member 1325 has a first compression amount; when the first adjusting member 121 is located between the first position and the second position, the first elastic member 1325 is in a compressed state and the first elastic member 1325 has a second compression amount, and the first compression amount is greater than the second compression amount.

[0094] Understandably, the first switch member 1324 has a first passing portion 1327 and a first switch portion 1328 connected to each other. The radial dimension of the first switch portion 1328 is greater than the radial dimension of the first passing portion 1327. The first passing portion 1327 sequentially passes through the first elastic member 1325, the first electrode 1322, and the second electrode 1323. The first switch portion 1328 at least partially protrudes from the first accommodating cavity 1326. The first elastic member 1325 is sleeved on the outer periphery of the first passing portion 1327, and the opposite ends of the first elastic member 1325 respectively abut against the first electrode 1322 and the first switch portion 1328.

[0095] In some embodiments, the second control sub-component 133 further includes a second elastic member 1335. The second mounting member 1331 has a second accommodation cavity 1336 that extends along a first direction. The third electrode 1332 is disposed in the second accommodation cavity 1336. The second switch member 1334 sequentially passes through the second elastic member 1335, the third electrode 1332, and the fourth electrode 1333. One end of the second switch member 1334 facing away from the fourth electrode 1333 protrudes from the second accommodation cavity 1336. When the first adjusting member 121 moves to the second position, the connecting block abuts against the second switch member 1334 to compress the second elastic member 1335 and drive the second switch member 1334 and the fourth electrode 1333 to move in a direction away from the first position along the first direction relative to the second accommodation cavity 1336. The third electrode 1332 is disconnected from the fourth electrode 1333 to form a second signal. The controller 131 receives the second signal and controls the driving member 141 to close. When the first adjusting member 121 moves away from the second position in a direction approaching the first position, the controller 131 controls the driving member 141 to turn on. The second elastic member 1335 elastically returns and pushes the second switch member 1334 and the fourth electrode 1333 to move in a direction approaching the first position along the first direction relative to the second accommodation cavity 1336, and the third electrode 1332 abuts against the fourth electrode 1333.

[0096] In this embodiment, when the first adjusting member 121 moves to the second position, the connecting block abuts against the second switching member 1334 to push the fourth electrode 1333 and the second switching member 1334 to move in the first direction away from the third electrode 1332 in the second accommodating cavity 1336, so that the fourth electrode 1333 is spaced apart from the third electrode 1332, and at the same time, the second elastic member 1335 is compressed. The third electrode 1332 and the fourth electrode 1333 are disconnected from each other to form a second signal. The controller 131 receives the second signal of the second control sub-assembly 133 and controls the driving member 141 to close, so that the first adjusting member 121 stops moving, thereby preventing the first adjusting member 121 from continuing to move in the direction away from the first position towards the second position. When the first adjusting member 121 moves away from the second position towards the first position, the controller 131 controls the driving member 141 to turn on to drive the first adjusting member 121 to slide in the first direction relative to the mounting base 110 towards the first position. The first adjusting member 121 is separated from the second switching member 1334, and the second elastic member 1335 undergoes elastic recovery and pushes the second switching member 1334 to drive the fourth electrode 1333 to move in the first direction towards the third electrode 1332 in the second accommodating cavity 1336, so that the fourth electrode 1333 abuts against the third electrode 1332 and the electrical connection is restored. The controller 131, the second control sub-assembly 133 and the driving member 141 cooperate to limit another extreme position of the first adjusting member 121 moving in the first direction on the mounting base 110, thereby limiting the second extreme position of the second adjusting member 122 in the third direction, which is beneficial to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction. The second elastic member 1335 is beneficial to quickly restoring the electrical connection between the third electrode 1332 and the fourth electrode 1333, so as to improve the accuracy of controlling the moving position of the first adjusting member 121 in the first direction and the moving position of the second adjusting member 122 in the third direction.

[0097] Understandably, in some embodiments, when the first adjusting member 121 is in the first position, the second elastic member 1335 is in a compressed state; when the first adjusting member 121 is located between the first position and the second position, the second elastic member 1335 is in its original length state. In other embodiments, when the first adjusting member 121 is in the first position, the second elastic member 1335 is in a compressed state and the second elastic member 1335 has a first compression amount; when the first adjusting member 121 is located between the first position and the second position, the second elastic member 1335 is in a compressed state and the second elastic member 1335 has a second compression amount, and the first compression amount is greater than the second compression amount.

[0098] Understandably, the second switching member 1334 has a connected second passing portion 1337 and a second switching portion 1338. The radial dimension of the second switching portion 1338 is greater than the radial dimension of the second passing portion 1337. The second passing portion 1337 sequentially passes through the second elastic member 1335, the third electrode 1332, and the fourth electrode 1333. At least a part of the second switching portion 1338 protrudes from the second accommodating cavity 1336. The second elastic member 1335 is sleeved on the outer periphery of the second passing portion 1337, and opposite ends of the second elastic member 1335 respectively abut against the third electrode 1332 and the second switching portion 1338.

[0099] In some embodiments, the lifting mechanism 100 further includes a limiting assembly 150. The limiting assembly 150 includes a first limiting member 151 and a second limiting member 152. The first limiting member 151 and the second limiting member 152 are disposed on the mounting base 110. The first limiting member 151 and the second limiting member 152 are spaced apart in a first direction on opposite sides of the connecting block to limit the movement of the connecting block in the first direction.

[0100] Understandably, the first limiting member 151 is disposed close to the first position, and the second limiting member 152 is disposed close to the second position.

[0101] Understandably, the first limiting member 151 and the second limiting member 152 are disposed on the surface of the first mounting plate 112 facing the second adjusting member 122.

[0102] In this embodiment, when the first adjusting member 121 moves relative to the mounting base 110 in the first direction, the first limiting member 151 is configured to limit the connecting block and the first adjusting member 121 to the first position, so as to prevent the connecting block and the first adjusting member 121 from continuing to move in the direction away from the second position with respect to the first position; the second limiting member 152 is configured to limit the connecting block and the first adjusting member 121 to the second position, so as to prevent the connecting block and the first adjusting member 121 from continuing to move in the direction away from the first position with respect to the second position. The first limiting member 151 and the second limiting member 152 cooperate to provide a hard limit for the movement of the connecting block in the first direction, thereby restricting the movement trajectory of the first adjusting member 121 between the first position and the second position.

[0103] Please refer to Figure 2 , in some embodiments, the lifting mechanism 100 includes a first track assembly 160 and a second track assembly 170. The first track assembly 160 is disposed between the first adjusting member 121 and the mounting base 110. The first track assembly 160 extends in the first direction to enable the first adjusting member 121 to move relative to the mounting base 110 in the first direction; the second track assembly 170 is disposed between the first adjusting member 121 and the second adjusting member 122. The second track assembly 170 extends in the second direction to enable the first adjusting member 121 to move relative to the second adjusting member 122 in the second direction.

[0104] In this embodiment, the first track assembly 160 is disposed between the first adjusting member 121 and the mounting base 110. When the driving member 141 drives the first adjusting member 121 to move relative to the mounting base 110, the first track assembly 160 guides the first track member 163 to move relative to the mounting base 110 in the first direction. The second track assembly 170 is disposed between the first adjusting member 121 and the second adjusting assembly. When the first adjusting member 121 moves relative to the mounting base 110 in the first direction, the first adjusting member 121 also moves relative to the second adjusting member 122 in the first direction. The second track assembly 170 guides the second adjusting member 122 to move relative to the first adjusting member 121 in the second direction, and finally realizes the movement of the second adjusting member 122 in the third direction. In this embodiment, the first track assembly 160 and the second track assembly 170 guide the moving directions of the first adjusting member 121 and the second adjusting member 122, which is beneficial to improving the accuracy of the movement of the first adjusting member 121 on the mounting base 110 and the accuracy of the movement of the second adjusting member 122 in the third direction.

[0105] Please refer to Figure 10 andFigure 11 , in some embodiments, the first rail assembly 160 includes a first sub - assembly 161 and a second sub - assembly 162. The mounting base 110 has a first rib 111 facing the first adjusting member 121. The first adjusting member 121 has a first groove 1211 facing the second adjusting member 122. The first rib 111 divides the first groove 1211 into a first setting space and a second setting space. The first setting space is used to set the first sub - assembly 161, and the second setting space is used to set the second sub - assembly 162. The first sub - assembly 161 and the second sub - assembly 162 cooperate to guide the first adjusting member 121 to move relative to the mounting base 110 in a first direction. Both the first sub - assembly 161 and the second sub - assembly 162 include a first rail member 163, a second rail member 164, and a first rolling member 165. The first rail member 163 is disposed on the first adjusting member 121, the second rail member 164 is disposed on the mounting base 110, and the first rolling member 165 is disposed between the first rail member 163 and the second rail member 164 and is respectively rollably connected to the first rail member 163 and the second rail member 164.

[0106] Optionally, the first sub - assembly 161 is a crossed roller guide assembly 180, and the second sub - assembly 162 is a crossed roller guide assembly 180.

[0107] In this embodiment, the first groove 1211 is used to arrange the first sub-component 161 and the second sub-component 162. The first sub-component 161 is located in the first setting space, and the second sub-component 162 is located in the second setting space. The first groove 1211 cooperates with the first rib 111, so that the first track member 163 and the second track member 164 of the first sub-component 161 are tightly arranged on the opposite sides of the first rolling member 165, and the first track member 163 and the second track member 164 of the second sub-component 162 are tightly arranged on the opposite sides of the first rolling member 165, which is beneficial to further improve the accuracy of the first sub-component 161 and the second sub-component 162 for guiding the first adjusting member 121 to move relative to the mounting seat 110 in the first direction. In addition, the first rolling member 165 is arranged between the first track member 163 and the second track member 164, and the opposite sides of the first rolling member 165 are respectively and rotatably connected to the first track member 163 and the second track member 164. Then, the contact between the first rolling member 165 and the first track member 163 is a line contact, and the frictional force of the relative sliding between the first rolling member 165 and the first track member 163 is small. Also, the contact between the first rolling member 165 and the second track member 164 is a line contact, and the frictional force of the relative sliding between the first rolling member 165 and the second track member 164 is small, which improves the accuracy of the relative sliding of the first track member 163 and the second track member 164 in the first direction, and then is beneficial to improving the accuracy of adjusting the height of the second adjusting member 122 in the third direction.

[0108] Please refer to Figure 11 and Figure 12, in some embodiments, the second rail assembly 170 includes a third sub - assembly 171 and a fourth sub - assembly 172. The second adjusting member 122 has a second rib 1221 facing the first adjusting member 121, and the first adjusting member 121 has a second groove 1212 facing the second adjusting member 122. The second rib 1221 divides the second groove 1212 into a third setting space and a fourth setting space. The third setting space is used to set the third sub - assembly 171, and the fourth setting space is used to set the fourth sub - assembly 172. The third sub - assembly 171 and the fourth sub - assembly 172 cooperate to guide the first adjusting member 121 to move relative to the second adjusting member 122 in a second direction. Both the third sub - assembly 171 and the fourth sub - assembly 172 include a third rail member 173, a fourth rail member 174, and a second rolling member 175. The third rail member 173 is provided on the first adjusting member 121, the fourth rail member 174 is provided on the second adjusting member 122, and the second rolling member 175 is provided between the third rail member 173 and the fourth rail member 174 and is respectively rollably connected to the third rail member 173 and the fourth rail member 174.

[0109] Optionally, the third sub - assembly 171 is a crossed roller guide assembly 180, and the fourth sub - assembly 172 is a crossed roller guide assembly 180.

[0110] In this embodiment, the second groove 1212 is used to set the third subassembly 171 and the fourth subassembly 172, and the third subassembly 171 is located in the third setting space, and the fourth subassembly 172 is located in the fourth setting space. The second groove 1212 and the second ridge 1221 cooperate so that the third track member 173 and the fourth track member 174 of the third subassembly 171 are tightly arranged on the opposite sides of the second rolling member 175, and the third track member 173 and the fourth track member 174 of the fourth subassembly 172 are tightly arranged on the opposite sides of the second rolling member 175, thereby facilitating further improving the accuracy of the third subassembly 171 and the fourth subassembly 172 in guiding the first adjusting member 121 to move relative to the second adjusting member 122 along the second direction. In other words, it is facilitating guiding the second adjusting member 122 to move relative to the first adjusting member 121 along the second direction. In addition, the second rolling member 175 is arranged between the third track member 173 and the fourth track member 174, and the opposite sides of the second rolling member 175 can be respectively rollingly connected to the third track member 173 and the fourth track member 174, so that the second rolling member 175 and the third track member 173 are in line contact and the friction force of relative sliding between the second rolling member 175 and the third track member 173 is small, and the second rolling member 175 and the fourth track member 174 are in line contact and the friction force of relative sliding between the second rolling member 175 and the fourth track member 174 is small, which improves the accuracy of relative sliding of the third track member 173 and the fourth track member 174 along the second direction, and then helps to improve the accuracy of adjusting the height of the second adjustment member 122 in the third direction.

[0111] See also Figures 13 to 16 The present application also provides a wafer detection device 200, which includes: a shell 210, a base 220, a lifting mechanism 100 provided in the present application and a chuck 230, wherein the shell 210 has a chamber 211; the base 220 is arranged in the chamber 211; the lifting mechanism 100 is installed on one side of the base 220; the chuck 230 is used to carry a sample to be detected, and the chuck 230 is arranged on a side of the second adjustment member 122 away from the mounting seat 110. When the second adjustment member 122 moves along the third direction, the chuck 230 and the sample to be detected are driven to move along the third direction.

[0112] Optionally, the wafer inspection device 200 is a vacuum probe station.

[0113] It can be understood that along the third direction, the base 220 , the lifting mechanism 100 and the chuck 230 are arranged in sequence.

[0114] In this embodiment, the base 220, the lifting mechanism 100, and the chuck 230 are located in the chamber 211. When the first adjusting member 121 in the lifting mechanism 100 moves relative to the mounting seat 110 in the first direction, it drives the second adjusting member 122 to move relative to the first adjusting member 121 in the second direction and the third direction, so as to adjust the position of the second adjusting member 122 in the third direction, thereby adjusting the positions of the chuck 230 and the sample to be detected carried on the second adjusting member 122 in the third direction. In this embodiment, the lifting mechanism 100 still maintains a high adjustment accuracy for the height of the second adjusting member 122 in the third direction, so that the heights of the chuck 230 and the sample to be detected in the third direction also still maintain a high adjustment accuracy, which is convenient for improving the detection performance of the wafer detection device 200.

[0115] Optionally, in some embodiments, the inside of the chamber 211 is in a vacuum state to detect the performance of the sample to be detected in a vacuum state.

[0116] Optionally, the sample to be detected is a wafer, and the wafer detection device 200 is used for radio frequency testing and reliability testing of the wafer, etc.

[0117] Optionally, the size specifications of the sample to be detected can be, but are not limited to, 6 inches, 8 inches, 12 inches, etc.

[0118] Optionally, the material of the sample to be detected can be, but is not limited to, silicon (Si), gallium nitride (GaN), silicon carbide (SiC), etc.

[0119] Optionally, the wafer detection device 200 further includes a negative pressure device (not shown in the figure) and a baffle assembly 270. The bottom of the housing 210 has a through hole 212, and the through hole 212 communicates the chamber 211 and the negative pressure device. The baffle assembly 270 includes a first baffle 271 and a second baffle 272. The first baffle 271 and the second baffle 272 are arranged at intervals in the third direction and are respectively connected to the side walls of the through hole 212. The orthographic projection of the first baffle 271 on the housing 210 overlaps part of the orthographic projection of the second baffle 272 on the housing 210.

[0120] When the negative pressure device communicates with the chamber 211 through the through hole 212, the negative pressure device can evacuate the chamber 211 to make the chamber 211 in a vacuum state. During this process, the first baffle 271 and the second baffle 272 can prevent the small parts in the chamber 211 from being sucked out through the through hole 212 and transported to the negative pressure device, which can avoid damage to the negative pressure device and extend the service life of the negative pressure device.

[0121] Optionally, the wafer detection device 200 further includes a plurality of probe assemblies (not shown in the figure). The probe assembly includes a probe base, a probe arm, and a probe that are connected to each other. The probe base is disposed outside the chamber 211, and part of the probe arm and the probe extend into the chamber 211 to contact the sample to be detected and perform detection on the sample to be detected.

[0122] Please refer to Figure 17 and Figure 18 , in some embodiments, the wafer detection device 200 further includes a plurality of leveling assemblies 240. The plurality of leveling assemblies 240 are disposed around the outer periphery of the mounting base 110. The plurality of leveling assemblies 240 cooperate to adjust the relative position between the mounting base 110 and the base 220. The leveling assembly 240 includes: a support member 241, an adjustment pressing block 242, and a locking member 243. The support member 241 passes through the mounting base 110 and is threadedly connected to the mounting base 110. One end of the support member 241 abuts against the base 220. The support member 241 has a first through hole 2411. The adjustment pressing block 242 is disposed on the surface of the mounting base 110 facing away from the base 220 and has a second through hole 2421. The base 220 has a locking hole 221. The locking member 243 sequentially passes through the second through hole 2421, the first through hole 2411, and the locking hole 221 to fix the relative position between the mounting base 110 and the base 220.

[0123] In the terms of this application, "a plurality of" means greater than or equal to two, and can be, but is not limited to, two, three, four, five, or six, etc.

[0124] Optionally, the first through hole 2411 is a through hole, and the locking hole 221 is a threaded hole.

[0125] In this embodiment, a plurality of leveling components 240 are arranged around the outer periphery of the mounting base 110 to adjust the relative position between the mounting base 110 and the base 220, so that the mounting base 110 is in a horizontal state, preventing the first adjusting member 121 and the second adjusting member 122 carried on the mounting base 110 from tilting, which is beneficial to improving the accuracy of adjusting the positions of the second adjusting member 122, the chuck 230 and the sample to be detected in the third direction. Specifically, one end of the support member 241 abuts against the base 220, and the support member 241 passes through the mounting base 110 and is threadedly connected to the mounting base 110. Then, the support member 241 can rotate relative to the mounting base 110 to adjust the relative position between the support member 241 and the mounting base 110, thereby adjusting the relative position between the mounting base 110 and the base 220, which is beneficial to adjusting the mounting base 110 to a horizontal state. Further, the locking member 243 sequentially passes through the second through hole 2421, the first through hole 2411 and the locking hole 221. Then, the locking member 243 fixes the relative positions of the adjusting pressure block 242, the support member 241 and the base 220, and can prevent the support member 241 from continuing to rotate relative to the mounting base 110 and causing the mounting base 110 to deviate from the horizontal state, which is beneficial to fixing the relative position between the mounting base 110 and the base 220, improving the stability of the chuck 230 and the sample to be detected arranged on the side of the second adjusting member 122 away from the first adjusting member 121, and then improving the accuracy of the lifting mechanism 100 in adjusting the height of the second adjusting member 122 in the third direction.

[0126] Please refer to Figure 19 and Figure 20, in some embodiments, the chuck 230 has a flow channel 231 for circulating refrigerant; the wafer detection device 200 further includes a refrigerant tank 250 and a pipeline assembly 260. The refrigerant tank 250 is used for storing refrigerant and delivering the refrigerant to the chuck 230 through the pipeline assembly 260. The pipeline assembly 260 includes a pipeline joint 261, a first pipeline member 262, a second pipeline member 263, a third pipeline member 264, and a fourth pipeline member 265. The pipeline joint 261 is disposed in the housing 210 and located in the chamber 211. The pipeline joint 261 has a first interface 2611, a second interface 2612, a third interface 2613, and a fourth interface 2614. Among them, the first interface 2611 communicates with the second interface 2612, and the third interface 2613 communicates with the fourth interface 2614. One end of the first pipeline member 262 penetrates the bottom wall of the chamber 211 and is connected to the refrigerant, and the other end of the first pipeline member 262 is connected to the first interface 2611. The second pipeline member 263 is of an annular structure, and the opposite ends of the second pipeline member 263 are respectively connected to the second interface 2612 and the flow channel 231. The third pipeline member 264 is of an annular structure, and the opposite ends of the third pipeline member 264 are respectively connected to the flow channel 231 and the third interface 2613. One end of the fourth pipeline member 265 is connected to the fourth interface 2614, and the other end of the fourth pipeline member 265 penetrates the bottom wall of the chamber 211 and is connected to the outside.

[0127] Optionally, the refrigerant may be, but is not limited to, liquid nitrogen, air, etc.

[0128] It can be understood that the refrigerant tank 250, the first pipeline member 262, the first interface 2611, the second interface 2612, the second pipeline member 263, the flow channel 231, the third pipeline member 264, the third interface 2613, the fourth interface 2614, the fourth pipeline member 265, and the outside constitute the refrigerant circulation path.

[0129] It can be understood that the other end of the fourth pipeline member 265 is connected to the outside. The fourth pipeline member 265 can be directly connected to the outside air or can also be connected to an external processing device to process the remaining refrigerant.

[0130] Optionally, the second pipeline member 263 and the third pipeline member 264 are steel strip members.

[0131] It can be understood that this application Figure 19 The embodiments are only schematic illustrations of the connection relationship between the pipeline assembly 260, the refrigerant tank 250, and the chuck 230, and should not be construed as a limitation on the shape of the pipeline assembly 260.

[0132] In this embodiment, when the refrigerant in the refrigerant tank 250 conveys the refrigerant to the chuck 230 through the pipeline assembly 260, the refrigerant is used to cool the chuck 230 and reduce the temperature of the chuck 230, thereby reducing the temperature of the sample to be detected carried by the chuck 230, so that the sample to be detected reaches a low-temperature environment, facilitating the wafer detection device 200 to perform performance tests on the sample to be detected in the low-temperature environment. When the refrigerant enters the chamber 211 from the refrigerant tank 250, the first pipeline member 262 communicates with the pipeline joint 261, and is connected to the pipeline joint 261 and the chuck 230 through the second pipeline member 263 with an annular structure. After the refrigerant flows through the chuck 230, the remaining refrigerant flows out of the chuck 230 and is connected to the pipeline joint 261 through the third pipeline member 264 with an annular structure, and finally flows out of the chamber 211 through the fourth pipeline member 265. In this embodiment, on the one hand, the connection method of the pipeline assembly 260 is simple and convenient for installation; on the other hand, both the second pipeline member 263 and the fourth pipeline member 265 are of annular structures and are arranged around the outer periphery of the chuck 230, so that the second pipeline member 263 and the fourth pipeline member 265 have a certain space for movement. When the lifting mechanism 100 drives the second adjusting member 122 and the chuck 230 to move relative to the mounting base 110 in the third direction, it will drive one end of the second pipeline member 263 connected to the chuck 230 and one end of the third pipeline member 264 connected to the chuck 230 to move in the third direction, which can prevent directly pulling the second pipeline member 263 and the third pipeline member 264 and causing damage to the second pipeline member 263 and the third pipeline member 264, and can also avoid the second pipeline member 263 and the third pipeline member 264 from hindering the movement of the second adjusting member 122 and the chuck 230 in the third direction, thereby ensuring the accuracy of the lifting mechanism 100 in adjusting the height of the second adjusting member 122 in the third direction.

[0133] In this application, the mention of "embodiment" and "implementation manner" means that the specific features, structures or characteristics described in combination with the embodiment can be included in at least one embodiment of this application. The appearance of this phrase at various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in each embodiment of this application can be combined arbitrarily without contradiction to form another embodiment that does not depart from the spirit and scope of the technical solution of this application.

[0134] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application and not to limit them. Although the present application has been described in detail with reference to the above preferred embodiments, those of ordinary skill in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present application without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A lifting mechanism, characterized in that, The lifting mechanism includes: a mounting base; and an adjusting assembly, the adjusting assembly includes a first adjusting member and a second adjusting member, the first adjusting member is slidably connected to the mounting base along a first direction, the second adjusting member is slidably connected to the first adjusting member along a second direction, and the second adjusting member is slidably connected to the first adjusting member along a third direction. When the first adjusting member moves along the first direction, the second adjusting member moves relative to the first adjusting member along the second direction and the third direction, so as to adjust the height of the second adjusting member in the third direction. Wherein, the first direction intersects with the third direction, the second direction is located between the first direction and the third direction, the range of the included angle α between the first direction and the second direction is: 15° ≤ α ≤ 30°; the range of the included angle β between the second direction and the third direction is: 60° ≤ β ≤ 75°; The first adjusting member has a first position and a second position relative to the mounting base along the first direction; the lifting mechanism further includes a control assembly, the control assembly includes a controller, a first control sub-assembly and a second control sub-assembly, the first control sub-assembly and the second control sub-assembly are arranged at intervals along the first direction on the mounting base, the first control sub-assembly is arranged close to the first position, the second control sub-assembly is arranged close to the second position, the controller is electrically connected to the first control sub-assembly and the second control sub-assembly respectively, and the controller, the first control sub-assembly and the second control sub-assembly cooperate to control the first adjusting member to move between the first position and the second position.

2. The lifting mechanism according to claim 1, characterized in that, The lifting mechanism further includes a driving assembly, the driving assembly includes a driving member, the driving member is installed on the mounting base and electrically connected to the controller, and the driving member is used to drive the first adjusting member to move along the first direction; when the first adjusting member moves to the first position, the first control sub-assembly forms a first signal, the controller receives the first signal of the first control sub-assembly and controls the driving member to turn off; when the first adjusting member moves to the second position, the second control sub-assembly forms a second signal, the controller receives the second signal of the second control sub-assembly and controls the driving member to turn off, and the controller, the first control sub-assembly and the second control sub-assembly cooperate to make the first adjusting member move between the first position and the second position.

3. The lifting mechanism according to claim 2, wherein, The first control sub-component includes a first mounting member, a first electrode, a second electrode, and a first switch member. The first mounting member is mounted on the mounting seat. The first electrode is disposed on the first mounting member. The second electrode abuts against the first electrode. The second electrode is further connected to the first switch member. Moreover, the second electrode and the first switch member are movable relative to the first mounting member along a first direction. Both the first electrode and the second electrode are electrically connected to the controller. When the first adjusting member moves to a first position, the first electrode and the second electrode are disconnected to form a first signal. The controller receives the first signal and controls the driving member to close. When the first adjusting member moves away from the first position in a direction approaching the second position, the controller controls the driving member to open, and the first electrode and the second electrode abut against each other. The second control sub-component includes a second mounting member, a third electrode, a fourth electrode, and a second switch member. The second mounting member is mounted on the mounting seat. The third electrode is disposed on the second mounting member. The fourth electrode abuts against the third electrode. The fourth electrode is further connected to the second switch member. Moreover, the fourth electrode and the second switch member are movable relative to the second mounting member along a first direction. Both the third electrode and the fourth electrode are electrically connected to the controller. When the first adjusting member moves to a second position, the third electrode and the fourth electrode are disconnected to form a second signal. The controller receives the second signal and controls the driving member to close. When the first adjusting member moves away from the second position in a direction approaching the second position, the controller controls the driving member to open, and the third electrode and the fourth electrode abut against each other.

4. The lifting mechanism according to claim 3, wherein, The driving assembly further includes a guiding member and a connecting block. The power output shaft of the driving member is connected to the guiding member. The guiding member extends along a first direction. The connecting block is sleeved on the outer periphery of the guiding member and is threadedly connected to the guiding member. The connecting block is connected to the first adjusting member. The connecting block is located between the first position and the second position. When the driving member is turned on, it drives the guiding member to rotate, thereby driving the connecting block and the first adjusting member to move relative to the mounting seat along a first direction, so as to realize the adjustment of the height of the second adjusting member in a third direction.

5. The lifting mechanism according to claim 4, characterized in that, The first control sub-component further includes a first elastic member. The first mounting member has a first accommodation cavity that extends along a first direction. The first electrode is disposed in the first accommodation cavity. The first switch member sequentially passes through the first elastic member, the first electrode, and the second electrode. One end of the first switch member facing away from the second electrode protrudes from the first accommodation cavity. When the first adjusting member moves to a first position, the connecting block abuts against the first switch member to compress the first elastic member and drive the first switch member and the second electrode to move in a direction away from the second position along the first direction relative to the first accommodation cavity. The first electrode and the second electrode are disconnected to form a first signal, and the controller receives the first signal and controls the driving member to close. When the first adjusting member moves away from the first position in a direction approaching the second position, the controller controls the driving member to turn on. The first elastic member undergoes elastic recovery and pushes the first switch member and the second electrode to move in a direction approaching the second position along the first direction relative to the first accommodation cavity, and the first electrode abuts against the second electrode. The second control sub-component further includes a second elastic member. The second mounting member has a second accommodation cavity that extends along the first direction. The third electrode is disposed in the second accommodation cavity. The second switch member sequentially passes through the second elastic member, the third electrode, and the fourth electrode. One end of the second switch member facing away from the fourth electrode protrudes from the second accommodation cavity. When the first adjusting member moves to a second position, the connecting block abuts against the second switch member to compress the second elastic member and drive the second switch member and the fourth electrode to move in a direction away from the first position along the first direction relative to the second accommodation cavity. The third electrode and the fourth electrode are disconnected to form a second signal, and the controller receives the second signal and controls the driving member to close. When the first adjusting member moves away from the second position in a direction approaching the first position, the controller controls the driving member to turn on. The second elastic member undergoes elastic recovery and pushes the second switch member and the fourth electrode to move in a direction approaching the first position along the first direction relative to the second accommodation cavity, and the third electrode abuts against the fourth electrode.

6. The lifting mechanism according to claim 4, characterized in that, The lifting mechanism further includes a limiting component. The limiting component includes a first limiting member and a second limiting member. The first limiting member and the second limiting member are disposed on the mounting base. The first limiting member and the second limiting member are spaced apart along the first direction on opposite sides of the connecting block to limit the movement of the connecting block in the first direction.

7. The lifting mechanism according to any one of claims 1 to 6, characterized in that, The lifting mechanism includes a first track assembly and a second track assembly, wherein the first track assembly is arranged between the first adjusting member and the mounting seat, and the first track assembly extends along a first direction to enable the first adjusting member to move relative to the mounting seat along the first direction; the second track assembly is arranged between the first adjusting member and the second adjusting member, and the second track assembly extends along a second direction to enable the first adjusting member to move relative to the second adjusting member along the second direction.

8. The lifting mechanism according to claim 7, wherein, The first track assembly includes a first subassembly and a second subassembly, the mounting seat has a first convex strip facing the first adjusting member, the first adjusting member has a first groove facing the second adjusting member, the first convex strip divides the first groove into a first setting space and a second setting space, the first setting space is used to set the first subassembly, the second setting space is used to set the second subassembly, the first subassembly and the second subassembly cooperate to guide the first adjusting member to move relative to the mounting seat along a first direction; The second track assembly includes a third subassembly and a fourth subassembly, the second adjusting member has a second convex strip facing the first adjusting member, the first adjusting member has a second groove facing the second adjusting member, the second convex strip divides the second groove into a third setting space and a fourth setting space, the third setting space is used to set the third subassembly, the fourth setting space is used to set the fourth subassembly, the third subassembly and the fourth subassembly cooperate to guide the first adjusting member to move relative to the second adjusting member along the second direction; The first subassembly and the second subassembly both include a first track member, a second track member and a first rolling member, the first track member is arranged on the first adjusting member, the second track member is arranged on the mounting seat, and the first rolling member is arranged between the first track member and the second track member and can be respectively connected to the first track member and the second track member by rolling; the third subassembly and the fourth subassembly both include a third track member, a fourth track member and a second rolling member, the third track member is arranged on the first adjusting member, the fourth track member is arranged on the second adjusting member, and the second rolling member is arranged between the third track member and the fourth track member and can respectively be connected to the third track member and the fourth track member by rolling.

9. A wafer inspection device, characterized in that, The wafer detection device comprises: a housing having a chamber; A base, the base being disposed in the chamber; The lifting mechanism according to any one of claims 1 to 8, wherein the lifting mechanism is installed on one side of the base; and A chuck is used to carry the sample to be tested. The chuck is arranged on a side of the second adjusting member away from the mounting seat. When the second adjusting member moves along the third direction, the chuck and the sample to be tested are driven to move along the third direction.

10. The wafer inspection apparatus according to claim 9, wherein, The wafer inspection device further includes a plurality of leveling components, which are arranged around the outer periphery of the mounting base. The plurality of leveling components cooperate to adjust the relative position of the mounting base and the base; the leveling component includes: a support member, an adjusting pressing block and a locking member. The support member penetrates through the mounting base and is threadedly connected to the mounting base. One end of the support member abuts against the base. The support member has a first through hole. The adjusting pressing block is arranged on the surface of the mounting base facing away from the base and has a second through hole. The base has a locking hole. The locking member sequentially penetrates through the second through hole, the first through hole and the locking hole to fix the relative position of the mounting base and the base.

11. The wafer inspection device according to claim 9, wherein, The chuck has a flow channel for circulating refrigerant; the wafer inspection device further includes a refrigerant tank and a pipeline assembly. The refrigerant tank is used for storing refrigerant and conveying the refrigerant to the chuck through the pipeline assembly; The pipeline assembly includes a pipeline joint, a first pipeline member, a second pipeline member, a third pipeline member and a fourth pipeline member. The pipeline joint is arranged in the housing and located in the chamber. The pipeline joint has a first interface, a second interface, a third interface and a fourth interface. Among them, the first interface is communicated with the second interface, and the third interface and the fourth interface are communicated; the first pipeline member penetrates through the bottom wall of the chamber and one end of the first pipeline member is connected to the refrigerant, and the other end of the first pipeline member is connected to the first interface. The second pipeline member is in a ring structure and the opposite ends of the second pipeline member are respectively connected to the second interface and the flow channel; the third pipeline member is in a ring structure and the opposite ends of the third pipeline member are respectively connected to the flow channel and the third interface. One end of the fourth pipeline member is connected to the fourth interface, and the other end of the fourth pipeline member penetrates through the bottom wall of the chamber and is connected to the outside.

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