Luminescence electrode using inverted L-shaped insulation structure

Abstract

The invention provides a glow electrode using an inverted L-shaped insulation structure. The glow electrode comprises an anode flat plate, an active cooling plate and insulation ceramic. The anode flat plate is fixed with the active cooling plate through a bolt, and a cooling pipeline is arranged in the active cooling plate, so that active water supply and heat dissipation can be realized. An insulating ceramic block is laid between the anode and the active cooling plate, and in order to prevent insulating property deterioration caused by particle deposition coating in the glow discharge and plasma discharge process, ceramic with an inverted-L-shaped slotting design is adopted on the periphery of the insulating ceramic block. After the periphery of the ceramic is coated by particles from plasma, the particles are difficult to reflect into the slotted part, especially the turned part, so that the insulation failure caused by complete coating of the outer surface of the ceramic can be avoided, the insulation performance between the anode and the cooling plate is effectively improved, and the normal use of the electrode is ensured.

Description

Technical Field

[0001] The present invention relates to the field of plasma wall treatment, and in particular to a method for protecting the electrode insulation by using an inverted "L"-shaped insulating structure to protect the glow electrode and the active cooling plate by using an inverted "L"-shaped slotted insulating ceramic to prevent the plasma in the device from being deposited on the ceramic surface and causing insulation failure. Background Art

[0002] In the Tokamak device, glow discharge cleaning is one of the important wall treatment methods, which aims to remove impurities and fuel particles retained on the first wall surface. The basic principle is to introduce working gas into the vacuum chamber, apply high voltage to the glow electrode as the anode, and the inner wall of the device is grounded as the cathode. Under a certain gas pressure, Paschen breakdown is formed to generate glow plasma to achieve the cleaning effect. The glow electrode is mainly composed of electrode plates, insulating ceramics and active cooling plates. When the plasma is running, some particles will be deposited on the outer surface of the insulating ceramic, causing the ceramic insulation to fail, thus causing the electrode to be unable to be used normally. Summary of the invention

[0003] In order to solve the problem of unstable ceramic insulation reliability between the current glow electrode and the active cooling plate, and to avoid the situation where particles are deposited and attached to the ceramic surface during the plasma operation or wall treatment of the Tokamak device and the ceramic insulation fails, the present invention provides a glow electrode using an inverted "L" type insulation structure. The inverted "L" type slotted ceramic structure prevents the outer surface of the ceramic from being completely coated, thereby effectively improving the electrode insulation.

[0004] The technical solution adopted by the present invention is: a glow electrode using an inverted "L"-shaped insulating structure, the glow electrode includes an electrode body, insulating ceramic and an active cooling plate; the insulating ceramic includes an inverted "L"-shaped ceramic block and an ordinary ceramic block, the active cooling plate is used for cooling the electrode body, and the insulating ceramic is installed between the electrode body and the active cooling plate to insulate the electrode body from the active cooling plate; ordinary ceramic blocks and inverted "L"-shaped ceramic blocks are laid on top of the active cooling plate, and the inverted "L"-shaped ceramic blocks are tightly attached to the outer periphery of the ordinary ceramic blocks; the electrode body is installed above the inverted "L"-shaped ceramic block and the ordinary ceramic block, and the electrode body is connected to the active cooling plate with bolts, so that the electrode plate, the ordinary ceramic block, the inverted "L"-shaped ceramic block and the active cooling plate are tightly fitted.

[0005] The present invention has the following beneficial effects: The present invention proposes a glow electrode using an inverted "L"-shaped insulating structure. During the operation of a tokamak device, the design of the inverted "L"-shaped ceramic block structure avoids plasma deposition on the outer surface of the ceramic and causing insulation failure, thereby improving the reliability of the glow discharge electrode of the tokamak device and providing good wall conditions for plasma operation. It also provides a new and convenient method for other devices to avoid insulation failure due to plasma coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 It is a schematic diagram of an inverted "L"-shaped ceramic block of the present invention; Figure 2 It is a schematic diagram of the inverted "L"-shaped ceramic block of the present invention installed on the electrode body.

[0007] In the figure, there are an electrode body 1, an inverted “L”-shaped ceramic block 2, a common ceramic block 3, and an active cooling plate 4. DETAILED DESCRIPTION

[0008] The technical solution of the present invention will be clearly and completely described below in conjunction with the schematic diagram of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0009] The present invention provides a glow electrode using an inverted "L" type insulation structure, such as Figure 2 As shown, the glow electrode includes an electrode body 1, insulating ceramic and an active cooling plate 4; the insulating ceramic includes an inverted "L"-shaped ceramic block 2 and a common ceramic block 3. The electrode body 1 generates a large amount of heat during operation and needs to be cooled by an active cooling plate 4 with a water cooling structure. In order to ensure that the electrode body 1 is insulated from the active cooling plate 4, an insulating ceramic is installed between the two.

[0010] Furthermore, during the operation of the Tokamak device, an inverted "L"-shaped ceramic block 2 is installed at the outermost portion to ensure that the entire outer side of the electrode body 1 is still insulated from the active cooling plate 4 after being coated with plasma.

[0011] like Figure 1As shown, the inverted "L"-shaped ceramic block 2 adopts an inverted "L" slot design. The inverted "L"-shaped ceramic block 2 is block-shaped as a whole. The inverted "L"-shaped ceramic block 2 is formed by an inverted "L" slot with a certain width running through the left and right sides of the ceramic block. The inverted "L" slot divides the ceramic block into two parts, front and back, wherein the height of the front part is lower than the height of the rear part. The ordinary ceramic block 3 and the inverted "L"-shaped ceramic block 2 are laid on the top of the active cooling plate 4, and the inverted "L"-shaped ceramic block 2 is close to the outer periphery of the ordinary ceramic block 3; the electrode body 1 is installed on the inverted "L"-shaped ceramic block 2 and the ordinary ceramic block 3, and the electrode body 1 is connected to the active cooling plate 4 with bolts, so that the electrode plate 1 and the ordinary ceramic block 3 and the inverted "L"-shaped ceramic 2 and the active cooling plate 4 are tightly fitted to ensure timely heat transfer. The higher rear part of the inverted "L"-shaped ceramic block 2 fits tightly with the ordinary ceramic block 3, and the upper surface of the rear part fits tightly with the electrode body 1. The lower front part of the inverted "L"-shaped ceramic block 2 has a gap with the electrode body 1. The inverted "L"-shaped ceramic block 2 and the ordinary ceramic block 3 isolate the electrode body 1 from the active cooling plate 4. The particles from the plasma are coated on the periphery of the two ceramic blocks but it is difficult to enter the surface of the inverted "L" grooved part, thereby avoiding the outer surface of the ceramic block from being completely coated and thus causing insulation failure. The glow electrode can effectively improve the insulation performance between the electrode body 1 and the active cooling plate 4, ensuring the normal use of the electrode.

[0012] The electrode body 1 adopts an anode plate structure. During use, working gas (D2, He) is introduced into the device and a certain gas pressure is maintained. A certain positive voltage is applied to the anode plate to make it act as an anode, and the device wall is grounded as a cathode, generating a glow discharge in the vacuum chamber to achieve the purpose of removing impurities retained on the surface of the first wall. When the electrode body 1 is working, water is introduced into the active cooling plate 4 to cool the electrode body 1.

[0013] The active cooling plate 4 has a flow channel inside, and cooling water is passed through it to relieve the heat load deposited on the electrode surface when in use.

[0014] By adopting an inverted "L" slot design, when the plasma of the Tokamak device is running, all outer surfaces of the inverted "L"-shaped ceramic block 2 can be prevented from being deposited with particles and losing its insulating function, thereby effectively improving the insulation performance between the anode and the active cooling plate 4 and ensuring the normal use of the electrode.

[0015] Although the specific embodiments of the present invention are described above to facilitate those skilled in the art to understand the present invention, and it should be clear that the present invention is not limited to the scope of the specific embodiments, for those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present invention as defined and determined by the attached claims, these changes are obvious, and all inventions and creations utilizing the concept of the present invention are protected.

Claims

1. A glow electrode using an inverted "L" type insulating structure, characterized in that: The glow electrode includes an electrode body, insulating ceramic and an active cooling plate; the insulating ceramic includes an inverted "L"-shaped ceramic block and an ordinary ceramic block, the active cooling plate is used for cooling the electrode body, and the insulating ceramic is installed between the electrode body and the active cooling plate to insulate the electrode body from the active cooling plate; ordinary ceramic blocks and inverted "L"-shaped ceramic blocks are laid on top of the active cooling plate, and the inverted "L"-shaped ceramic blocks are closely attached to the outer periphery of the ordinary ceramic blocks; the electrode body is installed on top of the inverted "L"-shaped ceramic block and the ordinary ceramic block, and the electrode body is connected to the active cooling plate with bolts, so that the electrode plate, the ordinary ceramic block, the inverted "L"-shaped ceramic block and the active cooling plate are closely attached.

2. The glow electrode using an inverted "L"-shaped insulating structure according to claim 1, characterized in that: The inverted "L"-shaped ceramic block is block-shaped as a whole, and is formed by an inverted "L"-shaped groove with a certain width running through the left and right sides of the ceramic block. The inverted "L"-shaped groove divides the ceramic block into two parts, front and back, wherein the height of the front part is lower than the height of the rear part; the rear part with a higher height of the inverted "L"-shaped ceramic block is tightly fitted with the ordinary ceramic block, and the upper surface of the rear part is tightly fitted with the electrode body, and the upper surface of the front part with a lower height of the inverted "L"-shaped ceramic block has a gap with the electrode body. In order to ensure the insulation between the active cooling plate and the electrode plate, the inverted "L"-shaped ceramic block and the ordinary ceramic block isolate the electrode body from the active cooling plate, and particles from the plasma are coated on the outer periphery of the two ceramic blocks but are difficult to enter the surface of the inverted "L"-shaped groove part, thereby avoiding insulation failure.

3. The glow electrode using an inverted "L"-shaped insulating structure according to claim 1, characterized in that: There is a flow channel inside the active cooling plate, and cooling water is passed through it when in use to alleviate the heat load deposited on the surface of the electrode body.

4. The glow electrode using an inverted "L"-shaped insulating structure according to claim 1, characterized in that: The electrode body adopts an anode flat plate structure, which increases the heat transfer area of ​​the anode and can effectively improve the thermal conductivity from the anode to the ceramic and then to the active cooling plate.

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