Direct-current pulse power supply, control method and semiconductor process equipment

Abstract

The embodiment of the invention discloses a direct-current pulse power supply, a control method and semiconductor process equipment, a controller responds to a direct-current output instruction, the working mode of a first switch is controlled to be a conduction mode, and the working modes of a second switch and a third switch are controlled to be a disconnection mode, so that the negative electrode of the direct-current power supply is conducted with a second output port; therefore, the direct-current pulse power supply is in a direct-current output mode. And controlling the working modes of the first switch to the third switch to be switched between a first control state and a second control state through the controller in response to the pulse output instruction, so that the negative electrode of the direct-current power supply and the positive electrode of the bias power supply are alternately conducted with the second output port, and the direct-current pulse power supply is in a pulse output mode. On the basis, the direct-current pulse power supply can be compatible with a direct-current output mode and a pulse output mode, so that the utilization rate of equipment can be improved, and the cost and the site area can be reduced.

Description

Technical Field

[0001] The present application relates to the field of power supply technology, and in particular to a direct current pulse power supply, a control method and semiconductor process equipment. Background Art

[0002] In the process of preparing semiconductor devices, semiconductor process equipment is usually used to perform process preparation processes such as coating and etching on semiconductor devices. Semiconductor process equipment usually has a reaction chamber, a power supply, etc., and the reaction chamber has a first electrode and a second electrode that are relatively arranged. The power supply is connected to the first electrode and the second electrode, respectively, and a voltage is applied to the first electrode and the second electrode to realize process processes such as coating and etching. At present, the power supply is mainly a DC power supply with a DC output mode and a pulse power supply with a pulse output mode. However, in actual applications, a variety of different process preparation processes are usually carried out in the same reaction chamber, and the output modes required for different process preparation processes are different. In this way, the power supply needs to be replaced to meet different process requirements, resulting in a large size of semiconductor process equipment, high site area requirements, and inconvenience for system integration control. Summary of the invention

[0003] The embodiments of the present application provide a DC pulse power supply, a control method and a semiconductor process equipment, which are used to be compatible with the DC output mode and the pulse output mode of the power supply to meet the different output modes required by different process preparation processes.

[0004] In the first aspect, an embodiment of the present application provides a DC pulse power supply, including: a DC power supply, a bias power supply, a DC pulse generator, a first output port, a second output port and a controller. Among them, the DC pulse generator includes a first switch, a second switch, and a third switch, the first output port is connected to the positive electrode of the DC power supply and the negative electrode of the bias power supply, and the first output port is used to connect the first electrode in the reaction chamber. The second output port is used to connect the second electrode in the reaction chamber. The first end of the first switch is connected to the negative electrode of the DC power supply, the second end of the first switch is connected to the second output port, and the control end of the first switch is connected to the controller. The first end of the second switch is connected to the positive electrode of the bias power supply, the second end of the second switch is connected to the second output port, and the control end of the second switch is connected to the controller. The first end of the third switch is connected to the first output port, the second end of the third switch is connected to the first end of the first switch, and the control end of the third switch is connected to the controller.

[0005] Among them, the controller can respond to the DC output instruction, control the working mode of the first switch to the on mode, and control the working modes of the second switch and the third switch to the off mode, so that the negative pole of the DC power supply is connected to the second output port, thereby making the DC pulse power supply in the DC output mode, and then realizing the DC signal output through the DC power supply.

[0006] And, the controller can also control the working modes of the first switch, the second switch and the third switch to switch between the first control state and the second control state in response to the pulse output instruction, so that the DC pulse power supply is in the pulse output mode; wherein the first control state is that the working mode of the first switch is the on mode, and the working modes of the second switch and the third switch are the off mode, and the second control state is that the working mode of the first switch is the off mode, and the working modes of the second switch and the third switch are the on mode, and in the second control state, the bias power supply is also controlled to output the bias voltage. Based on this, the working modes of the first switch and the second switch are controlled to be alternately on mode, and the third switch is controlled to be turned on at the same time as the second switch, and when the working mode of the second switch is the on mode, the bias power supply is controlled to output the bias voltage, so that the negative pole of the DC power supply and the positive pole of the bias power supply are alternately turned on with the second output port, so that the DC pulse power supply is in the pulse output mode, and then the pulse signal output is realized through the DC power supply and the bias power supply.

[0007] Based on this, the DC pulse power supply in the present application is compatible with DC output mode and pulse output mode to meet the different output modes required by different process preparation processes, thereby improving equipment utilization, reducing costs and site area.

[0008] Moreover, the power supply capable of outputting pulse signals in the prior art is usually implemented by full-bridge inversion plus rectification, which requires a large number of power switch tubes, increases the power cost, and makes the power control complex, affecting the power reliability. The DC pulse power supply in the present application can output pulse signals through the cooperation of the first switch, the second switch, and the third switch, which can reduce the power cost, reduce the control complexity, and provide power reliability.

[0009] The DC power supply is a high-power constant current (CC) power supply or a constant voltage (CV) power supply. The bias power supply is a low-power CC power supply or a CV power supply. In addition, the power of the DC power supply is greater than the power of the bias power supply. For example, the power of the DC power supply is greater than or equal to 6KW, and the power of the bias power supply 150 is less than or equal to 1KW.

[0010] During the process, there will be accumulation of positive charges on the surface of the target material, which will cause arcing discharge. If arcing occurs, it will cause defects in the thin film deposited on the substrate. To this end, the DC pulse power supply in the present application can also achieve an arc extinguishing process when it is in the DC output mode or the pulse output mode. For example, the controller is also used to: when the DC pulse power supply is in the DC output mode or the pulse output mode, obtain an impedance parameter, and compare the impedance parameter with a first parameter threshold value. If the impedance parameter is less than the first parameter threshold value, the working mode of the first switch is controlled to be a disconnect mode, the working modes of the second switch and the third switch are controlled to be a conduction mode, and the bias power supply is controlled to output a bias voltage so that the current on the output cable can decrease and the current is reversed, so that the DC pulse power supply is in an arc extinguishing mode.

[0011] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in the arc extinguishing mode, and after controlling the working mode of the first switch to the disconnecting mode and controlling the working modes of the second switch and the third switch to the conducting mode, the controller also controls the working mode of the first switch to switch from the disconnecting mode to the conducting mode, controls the working mode of the second switch to switch from the conducting mode to the disconnecting mode, and controls the working mode of the third switch to continue to be the conducting mode, so that the energy of the parasitic inductance on the output cable is dissipated in the reaction chamber and the first switch and the third switch.

[0012] Furthermore, in order to improve the stability of the power supply, in response to the impedance parameter being less than the first parameter threshold, before controlling the working mode of the first switch to the disconnect mode and controlling the working modes of the second switch and the third switch to the on mode, the controller also controls the working mode of the first switch to the disconnect mode, controls the working modes of the second switch and the third switch to the on mode, and controls the bias power supply to suspend output, so as to realize the energy transfer of the parasitic inductance on the output cable.

[0013] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in the arc extinguishing mode, and before controlling the working mode of the first switch to the disconnecting mode, controlling the working modes of the second switch and the third switch to the on mode, and controlling the bias power supply to suspend output, the controller also controls the working modes of the first switch and the third switch to the on mode, controls the working mode of the second switch to switch to the disconnecting mode, so as to realize the energy dissipation of the parasitic inductance on the output cable.

[0014] In practical applications, if arc discharge occurs, it means that the impedance of the load in the reaction chamber will suddenly decrease. Therefore, the impedance of the load in the reaction chamber can be used to reflect the arc discharge. Based on this, the controller is connected to the first output port and the second output port respectively, and the sampled voltage between the first output port and the second output port is collected, and the sampled current flowing through the second output port is collected to determine the ratio between the sampled voltage and the sampled current (the ratio is equivalent to the impedance of the load in the reaction chamber), so as to determine the ratio between the sampled voltage and the sampled current as the impedance parameter. In addition, the first parameter threshold can be determined according to the process requirements and is not limited here.

[0015] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in the pulse output mode, the controller controls the working mode of the first switch to switch from the disconnect mode to the on mode, controls the working mode of the second switch to switch from the on mode to the disconnect mode, and controls the working mode of the third switch to continue to be the on mode after the working modes of the first switch, the second switch and the third switch are in the second control state, that is, after the second control state and before the first control state, so that the energy of the parasitic inductance on the output cable is dissipated in the reaction chamber and the first switch and the third switch.

[0016] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in the pulse output mode, the controller controls the working mode of the third switch to switch from the disconnection mode to the conduction mode after the working modes of the first switch, the second switch and the third switch are in the first control state, that is, after the first control state and before the second control state, and controls the working mode of the first switch to continue to be the conduction mode and the working mode of the second switch to continue to be the disconnection mode, so as to achieve energy dissipation of the parasitic inductance on the output cable. Afterwards, the working mode of the first switch is controlled to switch from the conduction mode to the disconnection mode, the working mode of the second switch is controlled to switch from the disconnection mode to the conduction mode, the working mode of the third switch is controlled to continue to be the conduction mode, and the bias power supply is controlled to suspend output, so as to achieve energy transfer of the parasitic inductance on the output cable.

[0017] Exemplarily, the first switch includes a first transistor, a first end of the first transistor is connected to the negative electrode of the DC power supply, a second end of the first transistor is connected to the second output port, and a control end of the first transistor is connected to the controller. Thus, the controller controls the first switch to be in the on mode by controlling the first transistor to be turned on. Also, the controller controls the first switch to be in the off mode by controlling the first transistor to be turned off.

[0018] Exemplarily, the second switch includes a second transistor, a first end of the second transistor is connected to the positive electrode of the bias power supply, a second end of the second transistor is connected to the second output port, and a control end of the second transistor is connected to the controller. Thus, the controller controls the second switch to be in the on mode by controlling the second transistor to be turned on. Also, the controller controls the second switch to be in the off mode by controlling the second transistor to be turned off.

[0019] Exemplarily, the third switch includes a third transistor, a first end of the third transistor is connected to the first output port, a second end of the second transistor is connected to the first end of the second switch, and a control end of the third transistor is connected to the controller. Thus, the controller controls the third switch to be in the on mode by controlling the third transistor to be turned on. Also, the controller controls the third switch to be in the off mode by controlling the third transistor to be turned off.

[0020] Furthermore, the first transistor, the second transistor, and the third transistor are configured as metal-oxide-semiconductor (MOS) transistors, so that through the combined control of the three MOS transistors, the DC pulse power supply in the present application can be compatible with the DC output mode and the pulse output mode, thereby reducing the number of MOS transistors used. In addition, the gate of the MOS transistor serves as the control terminal of the above-mentioned transistor, the source (or drain) of the MOS transistor serves as the first terminal of the above-mentioned transistor, and the drain (or source) of the MOS transistor serves as the second terminal of the above-mentioned transistor.

[0021] Furthermore, the DC pulse generator also includes a clamped pre-charge circuit, which includes: a clamped power supply and a fourth switch, wherein the positive electrode of the clamped power supply is connected to the first output port, the negative electrode of the clamped power supply is connected to the first end of the fourth switch, the second end of the fourth switch is connected to the first end of the first switch, and the control end of the fourth switch is connected to the controller. In order to avoid the clamped power supply interfering with the output of the DC signal, the controller also responds to the DC output instruction to control the working mode of the fourth switch to the disconnection mode. And, in order to avoid the clamped power supply interfering with the output of the pulse signal, the controller also responds to the pulse output instruction to control the working mode of the fourth switch to the disconnection mode.

[0022] The power of the clamped power supply is smaller than the power of the DC power supply and the power of the bias power supply. For example, the power of the clamped power supply is several hundred watts.

[0023] When an arc occurs in the DC pulse power supply when it is in the DC output mode or the pulse output mode, the impedance parameter will be less than the first parameter threshold value, and the controller will continue to control the working mode of the fourth switch to the disconnection mode, so that the clamping pre-charging circuit is not connected, thereby avoiding interference of the clamping power supply with the arc extinguishing process.

[0024] In addition, when the DC pulse power supply operates in the DC output mode or the pulse output mode, the impedance of the load in the reaction chamber will suddenly increase. For this reason, the controller is also used to respond to the impedance parameter being greater than the second parameter threshold, control the first switch, the second switch and the third switch to be in the disconnection mode, and control the working mode of the fourth switch to be in the conduction mode, so that the clamped pre-charge circuit is connected to absorb the energy of the high-power DC power supply, play a buffering role, and reduce the voltage spike. If there is no clamped pre-charge circuit, the high-power DC power supply continues to transfer energy to the rear end, and all the energy will be released to the third switch, causing damage to it. Among them, the second parameter threshold can be determined according to the process requirements and is not limited here.

[0025] In some examples, the clamp precharge circuit further includes: a clamp resistor and a clamp capacitor, wherein a first end of the clamp resistor is connected to a positive electrode of the clamp power supply, and a second end of the clamp resistor is connected to a negative electrode of the clamp power supply. A first end of the clamp capacitor is connected to a positive electrode of the clamp power supply, and a second end of the clamp capacitor is connected to a negative electrode of the clamp power supply.

[0026] Exemplarily, the fourth switch includes a fourth transistor, a first end of the fourth transistor is connected to the negative electrode of the clamp power supply, a second end of the fourth transistor is connected to the first end of the first switch, and a control end of the fourth transistor is connected to the controller. Thus, the controller controls the fourth switch to be in the on mode by controlling the fourth transistor to be turned on. Also, the controller controls the fourth switch to be in the off mode by controlling the fourth transistor to be turned off.

[0027] Furthermore, the DC pulse generator further comprises a first capacitor, wherein a first end of the first capacitor is connected to the positive electrode of the DC power supply, and a second end of the first capacitor is connected to the negative electrode of the DC power supply. Thus, the first capacitor can be used to filter the voltage output by the DC power supply.

[0028] Furthermore, the DC pulse generator further comprises a second capacitor, wherein a first end of the second capacitor is connected to the positive electrode of the bias power supply, and a second end of the second capacitor is connected to the negative electrode of the bias power supply. Thus, the second capacitor can be used to filter the voltage output by the bias power supply.

[0029] In addition, the DC pulse generator also includes an inductor, wherein the negative electrode of the DC power supply is connected to the first end of the first transistor and the second end of the third transistor through the inductor, that is, an inductor is provided between the negative electrode of the DC power supply and the first end of the first transistor and the second end of the third transistor. Furthermore, the first end of the inductor is connected to the negative electrode of the DC power supply, and the second end of the inductor is connected to the first end of the first switch and the second end of the third switch. Of course, the inductor may not be provided to further reduce the number of components used in the DC pulse power supply.

[0030] The embodiment of the present application also provides a semiconductor process equipment, which includes: a reaction chamber and a DC pulse power supply. Among them, the first output port of the DC pulse power supply is connected to the first electrode in the reaction chamber and the ground terminal, and the second output port of the DC pulse power supply is connected to the second electrode in the reaction chamber. In addition, the DC pulse power supply is a DC pulse power supply as in the first aspect or various possible designs of the first aspect. Since the DC pulse power supply provided in the embodiment of the present application is compatible with the DC output mode and the pulse output mode, it can improve the utilization rate of the equipment, reduce the cost and site area. In addition, the semiconductor process equipment is, for example: physical vapor deposition (PVD) equipment (such as magnetron sputtering equipment), chemical vapor deposition (CVD) equipment, etching (Etch) equipment, etc.

[0031] The embodiment of the present application also provides a control method for a DC pulse power supply, including: by responding to a DC output instruction, controlling the working mode of the first switch to be a conduction mode, and the working modes of the second switch and the third switch to be a disconnection mode, so that the DC pulse power supply is in a DC output mode. And, by responding to a pulse output instruction, controlling the working modes of the first switch, the second switch, and the third switch to switch between a first control state and a second control state, so that the DC pulse power supply is in a pulse output mode; wherein the first control state is that the working mode of the first switch is a conduction mode, and the working modes of the second switch and the third switch are disconnection modes, and the second control state is that the working mode of the first switch is a disconnection mode, and the working modes of the second switch and the third switch are a conduction mode, and in the second control state, the bias power supply is also controlled to output a bias voltage. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1a A schematic diagram of the structure of a magnetron sputtering device in an embodiment of the present application;

[0033] Figure 1b It is another structural schematic diagram of the magnetron sputtering device in the embodiment of the present application;

[0034] Figure 2 A schematic diagram of the structure of a DC pulse power supply in an embodiment of the present application;

[0035] Figure 3a It is a structural schematic diagram of the DC pulse power supply in the embodiment of the present application when it is in the DC output mode;

[0036] Figure 3b A schematic diagram of the voltage between the first output port and the second output port when the DC pulse power supply in the embodiment of the present application is in the DC output mode;

[0037] Figures 4a to 4e A schematic diagram of the structure of the DC pulse power supply in the embodiment of the present application when it is in the pulse output mode;

[0038] Figure 5 A signal diagram of the voltage between the first output port and the second output port when the DC pulse power supply in the embodiment of the present application is in the pulse output mode;

[0039] Figures 6a to 6d They are respectively a structural schematic diagram of a DC pulse power supply in an arc extinguishing mode in an embodiment of the present application;

[0040] Figure 7 It is another structural schematic diagram of the DC pulse power supply in the embodiment of the present application;

[0041] Figure 8 It is a structural schematic diagram of the DC pulse power supply in the embodiment of the present application when the impedance of the load in the reaction chamber suddenly increases.

[0042] Reference numerals:

[0043] 100-DC pulse power supply; 110-first switch; 120-second switch; 130-third switch; 140-DC power supply; 150-bias power supply; 160-controller; 170-clamp pre-charge circuit; 180-DC pulse generator; 190-output cable; 171-clamp power supply; 172-fourth switch; RS-clamp resistor; CS-clamp capacitor; M1-first transistor; M2-second transistor; M3-third transistor; M4-fourth transistor; C1-first capacitor; C2-second capacitor, L0-inductor; 200-reaction chamber; 210-first electrode; 211-substrate; 220-second electrode; 222-target; DA-first output port; DB-second output port. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings. The specific operating methods in the method embodiments can also be applied to device embodiments or system embodiments. It should be noted that in the description of the present application, "multiple" can be understood as "at least two". In addition, it should be understood that in the description of the present application, words such as "first" and "second" are only used to distinguish the purpose of description, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying order.

[0045] It should be noted that the same reference numerals in the drawings of this application represent the same or similar structures, and thus their repeated description will be omitted. The words expressing positions and directions described in this application are all explained using the drawings as examples, but they can be changed as needed, and the changes are included in the protection scope of this application. The drawings of this application are only used to illustrate the relative position relationship and do not represent the true proportion.

[0046] In order to facilitate understanding of the technical solution provided by the embodiments of the present application, the application scenario of the solution of the present application is first explained below.

[0047] The DC pulse power supply provided in the embodiment of the present application can be applied to semiconductor process equipment. Since the DC pulse power supply provided in the embodiment of the present application is compatible with the DC output mode and the pulse output mode, it can improve the utilization rate of the equipment, reduce the cost and site area. In addition, the semiconductor process equipment is, for example: physical vapor deposition (PVD) equipment (such as magnetron sputtering equipment), chemical vapor deposition (CVD) equipment, etching (Etch) equipment, etc. It is understandable that the DC pulse power supply provided in the embodiment of the present application is intended to include but is not limited to application in these and any other suitable types of semiconductor process equipment.

[0048] The following is a detailed description of the application of the DC pulse power supply provided in the embodiment of the present application to a magnetron sputtering device. For the working process of the DC pulse power supply provided in the embodiment of the present application applied to other devices, reference can be made to the working process of the application to a magnetron sputtering device described below, and the repetitions will not be discussed.

[0049] Figure 1a Schematic diagram of a structure of a magnetron sputtering device in an embodiment of the present application. Figure 1aThe magnetron sputtering device includes: a DC pulse power supply 100 and a reaction chamber 200, wherein the reaction chamber 200 has a first electrode 210 and a second electrode 220 arranged opposite to each other, wherein the first electrode 210 is usually connected to the outer wall of the reaction chamber 200, and the outer wall of the reaction chamber 200 is grounded. In addition, the DC pulse power supply 100 has a first output port DA and a second output port DB, wherein the first output port DA is connected to the outer wall of the reaction chamber 200 through an output cable (e.g., a high-power cable), so that the first output port DA is connected to the first electrode 210, and the second output port DB is also connected to the second electrode 220 through the output cable. In the process of preparing semiconductor devices, a substrate (e.g., a wafer) 211 is fixed on a first electrode 210, a target 222 is fixed on a second electrode 220, an inert gas (e.g., Ar) as a discharge gas is pre-introduced into the reaction chamber 200, and a corresponding voltage is output to the second electrode 220 through a DC pulse power supply 100, so that an electric field is generated between the first electrode 210 and the second electrode 220, so that the discharge gas introduced into the reaction chamber 200 is ionized, and the ionized argon ions are accelerated to bombard the surface of the target 222 so that particles escape from the target 222, so that the sputtered particles are deposited on the substrate 211, thereby forming a thin film on the substrate 211. In practical applications, a variety of different process preparation processes are usually carried out in the reaction chamber 200, and different process preparation processes require different output modes of the DC pulse power supply. For this reason, the embodiment of the present application provides a DC pulse power supply that is compatible with the DC output mode and the pulse output mode, thereby improving the utilization rate of the equipment, reducing the cost and the site area.

[0050] Figure 1b FIG. 1 is another structural schematic diagram of a magnetron sputtering device in an embodiment of the present application. Figure 1b , refer to Figure 1bThe DC pulse power supply 100 includes: a DC power supply 140, a bias power supply 150, a DC pulse generator 180 and a controller 160. The DC power supply 140 and the bias power supply 150 are respectively connected to the first output port DA and the second output port DB through the DC pulse generator 180, and the first output port DA and the second output port DB are connected to the reaction chamber 200 through an output cable (e.g., a high-power cable) 190. Among them, the controller 160 can control the DC pulse generator 180 to connect the DC power supply 140 to the first output port DA and the second output port DB, so that the DC pulse power supply realizes a DC output mode. The controller 160 can also control the DC pulse generator 180 to alternately connect the DC power supply 140 and the bias power supply 150 to the first output port DA and the second output port DB, so that the DC pulse power supply realizes a pulse output mode. Thus, the DC pulse generator 180 can be compatible with both DC output and pulse output modes. In addition, the DC pulse power supply 100 in the embodiment of the present application can be applied to a scene where the output cable has a certain inductive reactance. In addition, the controller 160 detects the voltage and current of the first output port DA and the second output port DB, and determines whether arcing discharge occurs through the ratio U / I of the voltage U and the current I sampled by the ADC. When arcing occurs, the output combination of the DC power supply 140 and the bias power supply 150 is quickly controlled to achieve the purpose of arc extinguishing.

[0051] Figure 2 Schematic diagram of a DC pulse power supply in an embodiment of the present application. Figure 2The DC pulse power supply 100 further includes: a DC power supply 140, a bias power supply 150, a first switch 110, a second switch 120, a third switch 130 and a controller 160. The first output port DA is connected to the positive electrode of the DC power supply 140 and the negative electrode of the bias power supply 150. The first end of the first switch 110 is connected to the negative electrode of the DC power supply 140, the second end of the first switch 110 is connected to the second output port DB, and the control end of the first switch 110 is connected to the controller 160. The first end of the second switch 120 is connected to the positive electrode of the bias power supply 150, the second end of the second switch 120 is connected to the second output port DB, and the control end of the second switch 120 is connected to the controller 160. The first end of the third switch 130 is connected to the first output port DA, the second end of the third switch 130 is connected to the first end of the first switch 110, and the control end of the third switch 130 is connected to the controller 160. Among them, the controller 160 is communicatively connected or electrically connected to the host computer, and the host computer sends a DC output instruction to the controller 160 according to the automatic selection or the instruction input by the operator, so that the controller 160 responds to the DC output instruction, and inputs corresponding control signals to the control end of the first switch 110, the control end of the second switch 120 and the control end of the third switch 130 respectively, controls the working mode of the first switch 110 to be the on mode, and controls the working modes of the second switch 120 and the third switch 130 to be the off mode, so that the negative pole of the DC power supply 140 is connected to the second output port DB, so that the DC pulse power supply 100 is in the DC output mode, and then the DC signal output is realized through the DC power supply 140. In addition, the host computer also sends a pulse output instruction to the controller 160 according to the automatic selection or the instruction input by the operator, so that the controller 160 responds to the pulse output instruction and inputs corresponding control signals to the control end of the first switch 110, the control end of the second switch 120 and the control end of the third switch 130, respectively, to control the working modes of the first switch 110, the second switch 120 and the third switch 130 to switch between a first control state and a second control state, wherein the first control state is that the working mode of the first switch 110 is the on mode, and the working modes of the second switch 120 and the third switch 130 are the off mode, and the second control state is that the working mode of the first switch 110 is the off mode, and the working modes of the second switch 120 and the third switch 130 are the on mode, and in the second control state, the bias power supply 150 is also controlled to output a bias voltage. Based on this, the working mode of the first switch 110 and the second switch 120 is controlled to be an alternating conduction mode, and the third switch 130 and the second switch 120 are controlled to be turned on at the same time, so that the negative pole of the DC power supply 140 and the positive pole of the bias power supply 150 are alternately turned on with the second output port DB, so that the DC pulse power supply 100 is in a pulse output mode, and then the pulse signal output is realized through the DC power supply 140 and the bias power supply 150.Based on this, the DC pulse power supply 100 in the present application is compatible with the DC output mode and the pulse output mode, thereby improving the utilization rate of the equipment and reducing the cost and site area.

[0052] Moreover, the power supply capable of outputting pulse signals in the prior art is usually implemented by full-bridge inversion plus rectification, which requires a large number of power switch tubes, increases the power cost, and makes the power control complex, affecting the power reliability. The DC pulse power supply in the present application can output pulse signals through the cooperation of the first switch, the second switch, and the third switch, which can reduce the power cost, reduce the control complexity, and provide power reliability.

[0053] The DC power supply 140 is a high-power constant current (CC) power supply or a constant voltage (CV) power supply. The bias power supply 150 is a low-power CC power supply or a CV power supply. Moreover, the power of the DC power supply 140 is greater than the power of the bias power supply 150. For example, the power of the DC power supply 140 is greater than or equal to 6KW, and the power of the bias power supply 150 is less than or equal to 1KW. Exemplarily, the DC power supply 140 can be configured as an alternating current-direct current (AC-DC) conversion circuit, and the AC-DC conversion circuit is connected to alternating current (such as city power) to convert the alternating current into direct current as the output of the DC power supply. Alternatively, the DC power supply 140 may also be configured as a combination of an AC-DC conversion circuit and a direct current-direct current (DC-DC) conversion circuit, wherein the AC-DC conversion circuit is connected to an alternating current (e.g., a mains supply) to convert the alternating current into direct current, and the DC-DC conversion circuit then performs a step-up or step-down conversion on the direct current output by the AC-DC conversion circuit and outputs direct current as the output of the DC power supply. Similarly, the bias power supply 150 may also be configured as an AC-DC conversion circuit, wherein the AC-DC conversion circuit is connected to an alternating current (e.g., a mains supply) to convert the alternating current into direct current, and the DC-DC conversion circuit then performs a step-up or step-down conversion on the direct current output by the AC-DC conversion circuit and outputs direct current as the output of the bias power supply. Alternatively, the bias power supply 150 may also be configured as a combination of an AC-DC conversion circuit and a DC-DC conversion circuit, wherein the AC-DC conversion circuit is connected to an alternating current (e.g., a mains supply) to convert the alternating current into direct current, and the DC-DC conversion circuit then performs a step-up or step-down conversion on the direct current output by the AC-DC conversion circuit and outputs direct current as the output of the bias power supply. In addition, the controller 160 is also connected to the AC-DC conversion circuit or the DC-DC conversion circuit in the bias power supply 150 to control whether the bias power supply 150 outputs the bias voltage.

[0054] Continue to refer to Figure 2, the first switch 110 includes a first transistor M1, wherein the first end of the first transistor M1 is connected to the negative electrode of the DC power supply 140, the second end of the first transistor M1 is connected to the second output port DB, and the control end of the first transistor M1 is connected to the controller 160. Thus, the controller 160 controls the first transistor M1 to be turned on to control the first switch 110 to be in the on mode. And, the controller 160 controls the first transistor M1 to be turned off to control the first switch 110 to be in the off mode. Exemplarily, the first transistor M1 can be a low-voltage transistor, so that the low on-resistance of the low-voltage device can be utilized, the conduction loss in the DC output mode can be reduced, the use of heat dissipation can be reduced, and the cost can be reduced.

[0055] Continue to refer to Figure 2 , the second switch 120 includes a second transistor M2, a first end of the second transistor M2 is connected to the positive electrode of the bias power supply 150, a second end of the second transistor M2 is connected to the second output port DB, and a control end of the second transistor M2 is connected to the controller 160. Thus, the controller 160 controls the second transistor M2 to be turned on to control the second switch 120 to be in the on mode. And, the controller 160 controls the second transistor M2 to be turned off to control the second switch 120 to be in the off mode. Exemplarily, the second transistor M2 can be a high-voltage transistor.

[0056] Continue to refer to Figure 2 The third switch 130 includes a third transistor M3, a first end of the third transistor M3 is connected to the first output port DA, a second end of the second transistor M2 is connected to the first end of the second switch 120, and a control end of the third transistor M3 is connected to the controller 160. Thus, the controller 160 controls the third switch 130 to be in the on mode by controlling the third transistor M3 to be turned on. And, the controller 160 controls the third switch 130 to be in the off mode by controlling the third transistor M3 to be turned off. Exemplarily, the third transistor M3 may be a high voltage transistor.

[0057] Exemplarily, the first transistor, the second transistor, and the third transistor are configured as metal-oxide-semiconductor (MOS) transistors, so that through the combined control of the three MOS transistors, the DC pulse power supply in the present application can be compatible with the DC output mode and the pulse output mode, thereby reducing the number of MOS transistors used. In addition, the gate of the MOS transistor serves as the control terminal of the above-mentioned transistor, the source (or drain) of the MOS transistor serves as the first terminal of the above-mentioned transistor, and the drain (or source) of the MOS transistor serves as the second terminal of the above-mentioned transistor.

[0058] Continue to refer to Figure 2The DC pulse generator 180 further includes a first capacitor C1, wherein a first end of the first capacitor C1 is connected to the positive electrode of the DC power source 140, and a second end of the first capacitor C1 is connected to the negative electrode of the DC power source 140. Thus, the voltage output by the DC power source 140 can be filtered by using the first capacitor C1.

[0059] Continue to refer to Figure 2 The DC pulse generator 180 further includes a second capacitor C2, wherein a first end of the second capacitor C2 is connected to the positive electrode of the bias power supply 150, and a second end of the second capacitor C2 is connected to the negative electrode of the bias power supply 150. Thus, the voltage output by the bias power supply 150 can be filtered by the second capacitor C2.

[0060] Continue to refer to Figure 2 , the DC pulse generator 180 also includes an inductor L0, wherein the negative electrode of the DC power supply 140 is connected to the first end of the first transistor and the second end of the third transistor through the inductor L0, that is, the inductor L0 is arranged between the negative electrode of the DC power supply 140 and the first end of the first transistor and the second end of the third transistor. In addition, the first end of the inductor L0 is connected to the negative electrode of the DC power supply 140, and the second end of the inductor L0 is connected to the first end of the first switch 110 and the second end of the third switch 130. Of course, the inductor L0 may not be arranged to further reduce the number of components used in the DC pulse power supply 100.

[0061] The controller in the embodiment of the present application can be a general-purpose central processing unit (CPU), a general-purpose processor, a digital signal processing (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. The above-mentioned processor can also be a combination that realizes the computing function, for example, including a combination of one or more microprocessors, a combination of DSP and microprocessors, etc.

[0062] Below Figure 2 As an example, combining the structure shown Figure 3a and Figure 3b The working process of the DC pulse power supply in the DC output mode is described. Figure 3a Schematic diagram of the structure of the DC pulse power supply in the embodiment of the present application when it is in DC output mode. Figure 3bSchematic diagram of the voltage between the first output port and the second output port when the DC pulse power supply in the embodiment of the present application is in the DC output mode. Figure 3a and Figure 3b During the process, the controller 160 inputs a corresponding control signal to the gate of the first transistor M1 to control the first transistor M1 to be turned on, so that the negative electrode of the DC power supply 140 is turned on with the second output port DB. In addition, the controller 160 also inputs corresponding control signals to the gate of the second transistor M2 and the gate of the third transistor M3, respectively, to control the second transistor M2 and the third transistor M3 to be turned off. Based on this, the positive electrode of the DC power supply 140 is turned on with the first output port DA, and the negative electrode of the DC power supply 140 is turned on with the second output port DB, so that the DC power supply 140 supplies power to the first output port DA and the second output port DB, so that the voltage UAB between the first output port DA and the second output port DB is a negative voltage, and then the voltage between the first electrode 210 and the second electrode 220 in the reaction chamber 200 is a negative voltage, so as to realize the DC signal output, so that the DC pulse power supply 100 is in the DC output mode. In addition, Figure 3a The dashed arrow in the figure indicates the direction of current flow.

[0063] Below Figure 2 As an example, combining the structure shown Figures 4a to 5 The working process of the DC pulse power supply in the pulse output mode is described. Figures 4a to 4e They are respectively a structural schematic diagram of the DC pulse power supply in the embodiment of the present application when it is in the pulse output mode, Figure 5 Schematic diagram of the voltage between the first output port and the second output port when the DC pulse power supply in the embodiment of the present application is in the pulse output mode. Figure 4a and Figure 5 In the process, the controller 160 inputs a corresponding control signal to the gate of the first transistor M1 to control the first transistor M1 to be turned on, so that the negative electrode of the DC power supply 140 is turned on with the second output port DB. In addition, the controller 160 also inputs corresponding control signals to the gate of the second transistor M2 and the gate of the third transistor M3, respectively, to control the second transistor M2 and the third transistor M3 to be turned off. Based on this, the working mode of the first transistor M1 to the third transistor M3 is the first control state, and the positive electrode of the DC power supply 140 is connected to the first output port DA, and the negative electrode of the DC power supply 140 is connected to the second output port DB, so that the DC power supply 140 supplies power to the first output port DA and the second output port DB, so that the voltage UAB1 between the first output port DA and the second output port DB is a negative voltage, and then the voltage between the first electrode 210 and the second electrode 220 in the reaction chamber 200 is a negative voltage.

[0064] Afterwards, refer to Figure 4b , the controller 160 controls the first transistor M1 and the third transistor M3 to be turned on, and controls the second transistor M2 to be turned off, so as to timely shut down the output of the high-power DC power supply 140. In addition, due to the existence of parasitic inductance on the output cable, the current cannot be reduced to 0 immediately, and will continue to flow through the first transistor M1 and the third transistor M3, and the energy will be dissipated in the reaction chamber 200 and the first transistor M1 and the third transistor M3, that is, energy dissipation is achieved.

[0065] Afterwards, refer to Figure 4c , the controller 160 controls the first transistor M1 to be turned off, and controls the second transistor M2 and the third transistor M3 to be turned on, thereby turning off the output of the high-power DC power supply 140. In addition, the bias power supply 150 is controlled not to work, so that the bias power supply 150 does not output the bias voltage. Due to the existence of parasitic inductance on the output cable, the current cannot be reduced to 0 immediately, and will continue to flow through the second transistor M2, and the energy will be fed back to the second capacitor C2, or the DC-DC conversion circuit in the bias power supply 150 can also be a bidirectional DC-DC conversion circuit, which feeds back the energy to the previous stage, that is, to achieve energy transfer.

[0066] Afterwards, refer to Figure 4d and Figure 5 , the controller 160 controls the first transistor M1 to be turned off, and controls the second transistor M2 and the third transistor M3 to be turned on. Based on this, the working mode of the first transistor M1 to the third transistor M3 is the second control state, and the positive electrode of the bias power supply 150 is turned on with the second output port DB. Based on the conduction of the third transistor M3, the energy of the DC power supply 140 is blocked from flowing into the reaction chamber 200. In addition, the controller 160 controls the bias power supply 150 to start output, so that the bias power supply 150 outputs a positive bias voltage, so that the current on the output cable can drop and the current is reversed, and the positive electrode of the bias power supply 150 is turned on with the second output port DB, and the negative electrode of the bias power supply 150 is turned on with the first output port DA, so that the bias power supply 150 supplies power to the first output port DA and the second output port DB, so that the voltage UAB2 between the first output port DA and the second output port DB is a positive voltage, and then the voltage between the first electrode 210 and the second electrode 220 in the reaction chamber 200 is a positive voltage.

[0067] Afterwards, refer to Figure 4e, the controller 160 controls the first transistor M1 and the third transistor M3 to be turned on, and the second transistor M2 to be turned off, thereby cutting off the output of the bias power supply 150. Due to the presence of parasitic inductance on the output cable, the current cannot be reduced to 0 immediately, and will continue to flow through the first transistor M1 and the third transistor M3, and the energy will be dissipated in the reaction chamber 200 and the first transistor M1 and the third transistor M3. In addition, by turning on the first transistor M1 in advance, the withstand voltage problem of the low-voltage transistor can be solved.

[0068] Afterwards, the above process is repeated to realize pulse signal output, so that the DC pulse power supply 100 is in pulse output mode. Figures 4a to 4e The dashed arrow in the figure indicates the direction of current flow. Figure 4a The process shown is similar to Figure 4d The process shown is set between Figure 4b and Figure 4c The process can improve the stability and reliability of the DC pulse power supply. Figure 4d The process shown is similar to Figure 4a The process shown is set between Figure 4e The process can also improve the stability and reliability of the DC pulse power supply.

[0069] During the process, positive charges will accumulate on the surface of the target material, which will cause arcing discharge. If arcing discharge occurs, it will cause defects in the thin film deposited on the substrate. For this reason, the DC pulse power supply in the present application can also implement the arc extinguishing process when it is in DC output mode or pulse output mode. In addition, in actual applications, if arcing discharge occurs, it means that the impedance of the load in the reaction chamber 200 will suddenly decrease. Therefore, the impedance of the load in the reaction chamber 200 can be used to reflect the arcing discharge. Based on this, the sampling voltage between the first output port DA and the second output port DB can be collected, and the sampling current flowing through the second output port DB can be collected to determine the ratio between the sampling voltage and the sampling current (this ratio is equivalent to the impedance of the load in the reaction chamber 200), so that the ratio between the sampling voltage and the sampling current is determined as the impedance parameter. Continue to refer to Figure 2 , the controller 160 is also connected to the first output port DA and the second output port DB, and the controller 160 can also obtain impedance parameters based on the first output port DA and the second output port DB. The impedance parameter is compared with a first parameter threshold value (which can be determined according to process requirements and is not limited here). If the impedance parameter is less than the first parameter threshold value, it means that an arc discharge has occurred or the possibility of an arc discharge is high. The controller 160 can control the first switch to the third switch to be in the following modes 1 to 4, so that the DC pulse power supply is in an arc extinguishing mode to achieve the arc extinguishing process.

[0070] Mode 1: Figure 6a This is a schematic diagram of a structure of a DC pulse power supply in an arc extinguishing mode in an embodiment of the present application, referring to Figure 6a If the impedance parameter is less than the first parameter threshold, the controller 160 controls the first transistor M1 and the third transistor M3 to be turned on, and controls the second transistor M2 to be turned off, so that the output of the high-power DC power supply 140 can be turned off in time. In addition, due to the existence of parasitic inductance on the output cable, the current cannot be reduced to 0 immediately, and will continue to flow through the first transistor M1 and the third transistor M3, and the energy will be dissipated in the reaction chamber 200 and the first transistor M1 and the third transistor M3, that is, the energy dissipation of the parasitic inductance on the output cable is realized. In addition, Figure 6a The dashed arrow in the figure indicates the direction of current flow.

[0071] Modal 2: Figure 6b FIG. 1 is another structural diagram of the DC pulse power supply in the embodiment of the present application in the arc extinguishing mode, referring to FIG. Figure 6b If the impedance parameter is less than the first parameter threshold, the controller 160 controls the first transistor M1 to be disconnected, and controls the second transistor M2 and the third transistor M3 to be turned on, thereby shutting down the output of the high-power DC power supply 140. In addition, the bias power supply 150 is controlled not to work, so that the bias power supply 150 does not output the bias voltage. Due to the existence of parasitic inductance on the output cable, the current cannot be reduced to 0 immediately, and will continue to flow through the second transistor M2, and the energy will be fed back to the second capacitor C2, or the DC-DC conversion circuit in the bias power supply 150 can also be a bidirectional DC-DC conversion circuit, which feeds energy back to the previous stage, that is, realizing the energy transfer of the parasitic inductance on the output cable. In addition, Figure 6b The dashed arrow in the figure indicates the direction of current flow.

[0072] Mode 3: Figure 6c FIG. 1 is another structural diagram of the DC pulse power supply in the embodiment of the present application in the arc extinguishing mode, referring to FIG. Figure 6c , the controller 160 controls the first transistor M1 to be turned off, controls the second transistor M2 and the third transistor M3 to be turned on, and controls the bias power supply 150 to work, so that the bias power supply 150 outputs a positive bias voltage, so that the current on the output cable can decrease and the current is reversed. In addition, Figure 6c The dashed arrow in the figure indicates the direction of current flow.

[0073] Mode 4: Figure 6d FIG. 1 is another structural diagram of the DC pulse power supply in the embodiment of the present application in the arc extinguishing mode, referring to FIG. Figure 6d, the controller 160 controls the first transistor M1 and the third transistor M3 to be turned on, and the second transistor M2 to be turned off, thereby cutting off the output of the bias power supply 150. Due to the existence of parasitic inductance on the output cable, the current cannot be reduced to 0 immediately, and will continue to flow through the first transistor M1 and the third transistor M3. The energy of the parasitic inductance on the output cable is dissipated in the reaction chamber 200 and the first transistor M1 and the third transistor M3. In addition, Figure 6d The dashed arrow in the figure indicates the direction of current flow.

[0074] Based on this, when the DC pulse power supply is in DC output mode and arcing discharge occurs, it can be Figure 3a The DC output mode shown can enter the arc extinguishing mode of the process of mode 1 → mode 2 → mode 3 → mode 4 in sequence, or enter the arc extinguishing mode of the process of mode 1, or enter the arc extinguishing mode of the process of mode 2 → mode 3 → mode 4 in sequence, so as to achieve arc extinguishing. After that, you can Figure 3a The DC pulse power supply 100 is shown in the process of being in the DC output mode. If the arc cannot be extinguished, the process of the arc extinguishing mode can be repeated.

[0075] Furthermore, when the DC pulse power supply is in pulse output mode and arcing discharge occurs, Figures 4a to 4e When the DC pulse power supply is in any state, it can directly enter the arc extinguishing mode of the process of mode 1 → mode 2 → mode 3 → mode 4, or enter the arc extinguishing mode of the process of mode 1, or enter the arc extinguishing mode of the process of mode 2 → mode 3 → mode 4 in sequence, thereby achieving arc extinguishing and improving the stability and reliability of the DC pulse power supply. Afterwards, it can be carried out in sequence Figures 4a to 4e The DC pulse power supply 100 is shown in the process of being in the pulse output mode. If the arc cannot be extinguished, the process of the arc extinguishing mode can be repeated.

[0076] In addition, the DC pulse power supply in the embodiment of the present application can also reduce the cycle of reactive energy, and has the ability to quickly extinguish arcs in any mode such as DC mode and pulse mode. And, the DC pulse power supply in the embodiment of the present application, through the 4-transistor structure, realizes the simplicity of the circuit, and realizes the multi-mode fusion of pulse output, DC output, zero-voltage output, and cable energy recovery. And, based on the topological structure of the DC pulse power supply in the embodiment of the present application, all controls and detections can be based on a stable capacitor midpoint (i.e., the connection point between the second end of the second capacitor and the first end of the first capacitor C1), avoiding the use of optical fiber for detection and control due to large common mode signals.

[0077] Figure 7Schematic diagram of another structure of the DC pulse power supply in the embodiment of the present application. This embodiment is a modification of the implementation method in the above embodiment. The following only describes the differences between this embodiment and the above embodiment, and the similarities are not repeated here. Figure 7 The DC pulse power supply 100 not only includes a DC power supply 140, a bias power supply 150, a first switch 110, a second switch 120, a third switch 130, a controller 160, a first output port DA and a second output port DB, but the DC pulse generator 180 also includes a clamp pre-charge circuit 170. The clamp pre-charge circuit 170 includes: a fourth switch 172, a clamp power supply 171, a clamp resistor RS and a clamp capacitor CS. Among them, the positive electrode of the clamp power supply 171 is connected to the first output port DA, and the negative electrode of the clamp power supply 171 is connected to the first end of the fourth switch 172. The second end of the fourth switch 172 is connected to the first end of the first switch 110, and the control end of the fourth switch 172 is connected to the controller 160. The first end of the clamp resistor RS is connected to the positive electrode of the clamp power supply 171, and the second end of the clamp resistor RS is connected to the negative electrode of the clamp power supply 171. The first end of the clamp capacitor CS is connected to the positive electrode of the clamp power supply 171, and the second end of the clamp capacitor CS is connected to the negative electrode of the clamp power supply 171. In response to the DC output instruction, the controller 160 also controls the working mode of the fourth switch 172 to the disconnection mode to prevent the clamp power supply 171 from interfering with the output of the DC signal, thereby putting the DC pulse power supply 100 in the DC output mode. In response to the pulse output instruction, the controller 160 also controls the working mode of the fourth switch 172 to the disconnection mode to prevent the clamp power supply 171 from interfering with the output of the pulse signal, thereby putting the DC pulse power supply 100 in the pulse output mode.

[0078] The clamped power supply is, for example, a low-power CC power supply or a CV power supply, and the power of the clamped power supply 171 is less than the power of the DC power supply 140 and the power of the bias power supply 150. For example, the power of the clamped power supply 171 is several hundred watts. Exemplarily, the clamped power supply 171 may also be configured as an AC-DC conversion circuit, and the AC-DC conversion circuit is connected to alternating current (such as city power) to convert the alternating current into direct current as the output of the clamped power supply 171. Alternatively, the clamped power supply 171 may also be configured as a combination of an AC-DC conversion circuit and a DC-DC conversion circuit, the AC-DC conversion circuit is connected to alternating current (such as city power) to convert the alternating current into direct current, and the DC-DC conversion circuit then performs a step-up or step-down conversion on the direct current output by the AC-DC conversion circuit and outputs direct current as the output of the clamped power supply 171.

[0079] Continue to refer to Figure 7, the fourth switch 172 includes a fourth transistor M4, wherein the first end of the fourth transistor M4 is connected to the negative electrode of the clamp power supply 171, the second end of the fourth transistor M4 is connected to the first end of the first switch 110, and the control end of the fourth transistor M4 is connected to the controller 160. Thus, the controller 160 controls the fourth transistor M4 to be turned on to control the fourth switch 172 to be in the on mode. And, the controller 160 controls the fourth transistor M4 to be turned off to control the fourth switch 172 to be in the off mode. Exemplarily, the fourth transistor M4 is also set as a MOS transistor, so that the DC pulse power supply 100 in the present application can be compatible with the DC output mode and the pulse output mode through the combination control of four MOS transistors, thereby reducing the number of MOS transistors used. In addition, the gate of the MOS transistor serves as the control end of the fourth transistor M4, the source (or drain) of the MOS transistor serves as the first end of the fourth transistor M4, and the drain (or source) of the MOS transistor serves as the second end of the fourth transistor M4.

[0080] Furthermore, since the fourth switch 172 (i.e., the fourth transistor M4) is in the disconnected state when the DC pulse power supply 100 is in the DC output mode or the pulse output mode, the clamp pre-charge circuit 170 is not connected. Therefore, the working process of the DC pulse power supply 100 in the embodiment of the present application when it is in the DC output mode or the pulse output mode can refer to the working process in the above embodiment and will not be described here.

[0081] Furthermore, when the DC pulse power supply 100 is in the DC output mode or the pulse output mode and an arc occurs, the impedance parameter will be less than the first parameter threshold, and the controller 160 will continue to control the working mode of the fourth switch 172 (i.e., the fourth transistor M4) to be the disconnection mode, so that the clamp pre-charge circuit 170 is not connected. Therefore, the working process of the DC pulse power supply 100 in the embodiment of the present application when an arc occurs in the DC output mode or the pulse output mode can also refer to the working process in the above embodiment, and will not be repeated here.

[0082] In addition, when the DC pulse power supply 100 operates in the DC output mode or the pulse output mode, the impedance of the load in the reaction chamber 200 will suddenly increase. For this reason, the controller 160 is also used to control the first switch 110, the second switch 120 and the third switch 130 to be in the disconnection mode in response to the impedance parameter being greater than the second parameter threshold, and the fourth switch 172 to operate in the conduction mode, so that the clamp precharge circuit 170 is connected. The second parameter threshold can be determined according to the process requirements and is not limited here. For example, the following is Figure 7 As an example, combining the structure shown Figure 8The working process of the DC pulse power supply when the impedance of the load in the reaction chamber suddenly increases is described. Figure 8 FIG. 1 is a schematic diagram of a structure of a DC pulse power supply in an embodiment of the present application when the impedance of the load in the reaction chamber suddenly increases. Taking the case where the impedance of the load in the reaction chamber 200 suddenly increases when the DC pulse power supply 100 works in the DC output mode as an example, refer to FIG. Figure 3a , the DC pulse power supply 100 is in the DC output mode to output a DC signal. If the impedance parameter is greater than the second parameter threshold, refer to Figure 8 , the controller 160 controls the first transistor M1, the second transistor M2 and the third transistor M3 to be turned off, and controls the fourth transistor M4 to be turned on, so that the clamp pre-charge circuit 170 is connected to absorb the energy of the high-power DC power supply 140, play a buffering role, and reduce the voltage spike. If there is no clamp pre-charge circuit 170, the high-power DC power supply 140 continues to transfer energy to the back end, then all the energy will be released to the third transistor M3, causing damage to it. In addition, Figure 8 The dashed arrow in the figure indicates the direction of current flow.

[0083] Based on this, the DC pulse power supply in the embodiment of the present application achieves a simple circuit through a 4-transistor structure, and realizes a multi-mode integration of pulse output, DC output, bias output, zero-voltage output, and cable energy recovery.

[0084] The embodiment of the present application also provides a semiconductor process equipment, which includes: a reaction chamber and a DC pulse power supply in the above various embodiments. In addition, the first output port of the DC pulse power supply is connected to the first electrode in the reaction chamber and the ground terminal, and the second output port of the DC pulse power supply is connected to the second electrode in the reaction chamber. Since the DC pulse power supply provided in the embodiment of the present application is compatible with the DC output mode and the pulse output mode, it can improve the utilization rate of the equipment, reduce the cost and site area.

[0085] The embodiment of the present application also provides a control method for a DC pulse power supply, including: in response to a DC output instruction, controlling the working mode of the first switch to be a conduction mode, and the working modes of the second switch and the third switch to be a disconnection mode, so that the DC pulse power supply is in a DC output mode. And, in response to a pulse output instruction, controlling the working modes of the first switch to the third switch to switch between a first control state and a second control state, so that the DC pulse power supply is in a pulse output mode; wherein the first control state is that the working mode of the first switch is a conduction mode, and the working modes of the second switch and the third switch are disconnection modes, and the second control state is that the working mode of the first switch is a disconnection mode, and the working modes of the second switch and the third switch are a conduction mode, and in the second control state, the bias power supply is also controlled to output a bias voltage.

[0086] The above contents are only specific implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered by the protection scope of the present application.

Claims

1. A DC pulse power supply, characterized in that: include: A DC power supply, a bias power supply, a DC pulse generator, a first output port, a second output port and a controller; the DC pulse generator includes a first switch, a second switch and a third switch; The first output port is connected to the positive electrode of the DC power supply and the negative electrode of the bias power supply, and the first output port is used to connect to the first electrode in the reaction chamber; The second output port is used to connect to the second electrode in the reaction chamber; A first end of the first switch is connected to the negative electrode of the DC power supply, a second end of the first switch is connected to the second output port, and a control end of the first switch is connected to the controller; A first end of the second switch is connected to the positive electrode of the bias power supply, a second end of the second switch is connected to the second output port, and a control end of the second switch is connected to the controller; A first end of the third switch is connected to the first output port, a second end of the third switch is connected to the first end of the first switch, and a control end of the third switch is connected to the controller; The controller is used to: In response to a DC output instruction, controlling the working mode of the first switch to be an on mode, and controlling the working modes of the second switch and the third switch to be an off mode, so that the DC pulse power supply is in a DC output mode; In response to a pulse output instruction, the working modes of the first switch, the second switch and the third switch are controlled to switch between a first control state and a second control state so that the DC pulse power supply is in a pulse output mode; wherein, the first control state is that the working mode of the first switch is an on mode, and the working modes of the second switch and the third switch are an off mode, and the second control state is that the working mode of the first switch is an off mode, and the working modes of the second switch and the third switch are an on mode, and in the second control state, the bias power supply is also controlled to output a bias voltage.

2. The DC pulse power supply according to claim 1, characterized in that: The controller is also used for: When the DC pulse power supply is in the DC output mode or the pulse output mode, acquiring impedance parameters; In response to the impedance parameter being less than a first parameter threshold, the operating mode of the first switch is controlled to be a disconnection mode, the operating modes of the second switch and the third switch are controlled to be a conduction mode, and the bias power supply is controlled to output a bias voltage so that the DC pulse power supply is in an arc extinguishing mode.

3. The DC pulse power supply according to claim 2, characterized in that: The controller is also used for: After the DC pulse power supply is in the arc extinguishing mode, the working mode of the first switch is controlled to switch from the disconnection mode to the conduction mode, and the working mode of the second switch is controlled to switch from the conduction mode to the disconnection mode.

4. The DC pulse power supply according to claim 2 or 3, characterized in that: The controller is also used for: Before, in response to the impedance parameter being less than a first parameter threshold, controlling the operating mode of the first switch to be an off mode and controlling the operating modes of the second switch and the third switch to be an on mode, controlling the operating mode of the first switch to be an off mode, controlling the operating modes of the second switch and the third switch to be an on mode, and controlling the bias power supply to suspend output.

5. The DC pulse power supply according to claim 4, characterized in that: The controller is also used for: Before controlling the working mode of the first switch to be the disconnecting mode, controlling the working modes of the second switch and the third switch to be the on-mode, and controlling the bias power supply to suspend output, the working modes of the first switch and the third switch are controlled to be the on-mode, and the working mode of the second switch is switched to the disconnecting mode.

6. The DC pulse power supply according to any one of claims 2 to 5, characterized in that: The controller is also connected to the first output port and the second output port respectively; The controller obtaining the impedance parameter comprises: Collecting a sampled voltage between the first output port and the second output port, and collecting a sampled current flowing through the second output port; The ratio between the sampled voltage and the sampled current is determined as the impedance parameter.

7. The DC pulse power supply according to any one of claims 1 to 6, characterized in that: The controller is also used for: After the working modes of the first switch, the second switch and the third switch are in the second control state, the working mode of the first switch is controlled to switch from the disconnection mode to the conduction mode, and the working mode of the second switch is controlled to switch from the conduction mode to the disconnection mode.

8. The DC pulse power supply according to any one of claims 1 to 7, characterized in that: The controller is also used for: After the working modes of the first switch, the second switch and the third switch are in the first control state, controlling the working mode of the third switch to switch from the disconnection mode to the conduction mode; Afterwards, the working mode of the first switch is controlled to switch from the on mode to the off mode, the working mode of the second switch is controlled to switch from the off mode to the on mode, and the bias power supply is controlled to stop outputting.

9. The DC pulse power supply according to any one of claims 1 to 8, characterized in that: The first switch comprises: a first transistor, a first end of the first transistor is connected to the negative electrode of the DC power supply, a second end of the first transistor is connected to the second output port, and a control end of the first transistor is connected to the controller; And / or, the second switch comprises: a second transistor, a first end of the second transistor is connected to the positive electrode of the bias power supply, a second end of the second transistor is connected to the second output port, and a control end of the second transistor is connected to the controller; And / or, the third switch includes: a third transistor, a first end of the third transistor is connected to the first output port, a second end of the second transistor is connected to the first end of the second switch, and a control end of the third transistor is connected to the controller.

10. The DC pulse power supply according to any one of claims 1 to 9, characterized in that: The DC pulse generator further comprises: a clamp pre-charging circuit, the clamp pre-charging circuit comprising: a clamp power supply and a fourth switch, the power of the clamp power supply being less than the power of the DC power supply and the power of the bias power supply; The positive electrode of the clamp power supply is connected to the first output port, the negative electrode of the clamp power supply is connected to the first end of the fourth switch, the second end of the fourth switch is connected to the first end of the first switch, and the control end of the fourth switch is connected to the controller; The controller is also used for: In response to the DC output instruction, controlling the working mode of the fourth switch to be a disconnection mode; In response to the pulse output instruction, the working mode of the fourth switch is controlled to be an off mode.

11. The DC pulse power supply according to claim 10, characterized in that: The controller is also used for: In response to the impedance parameter being less than a first parameter threshold, controlling the working mode of the fourth switch to be a disconnection mode; In response to the impedance parameter being greater than a second parameter threshold, the first switch, the second switch, and the third switch are controlled to be in a disconnection mode, and the fourth switch is controlled to be in a conduction mode.

12. The DC pulse power supply according to claim 10 or 11, characterized in that: The clamp pre-charge circuit also includes: a clamp resistor and a clamp capacitor; The first end of the clamp resistor is connected to the positive electrode of the clamp power supply, and the second end of the clamp resistor is connected to the negative electrode of the clamp power supply; A first end of the clamp capacitor is connected to the positive electrode of the clamp power supply, and a second end of the clamp capacitor is connected to the negative electrode of the clamp power supply.

13. The DC pulse power supply according to any one of claims 10 to 12, characterized in that: The fourth switch includes: a fourth transistor, a first end of the fourth transistor is connected to the negative electrode of the clamp power supply, a second end of the fourth transistor is connected to the first end of the first switch, and a control end of the fourth transistor is connected to the controller.

14. The DC pulse power supply according to any one of claims 1 to 13, characterized in that: The DC pulse generator further includes: at least one of a first capacitor, a second capacitor and an inductor; The first end of the first capacitor is connected to the positive electrode of the DC power supply, and the second end of the first capacitor is connected to the negative electrode of the DC power supply; A first end of the second capacitor is connected to the positive electrode of the bias power supply, and a second end of the second capacitor is connected to the negative electrode of the bias power supply; The first end of the inductor is connected to the negative electrode of the DC power supply, and the second end of the inductor is connected to the first end of the first switch and the second end of the third switch.

15. A semiconductor process equipment, characterized in that: include: A reaction chamber and a DC pulse power supply as claimed in any one of claims 1 to 14; The first output port of the DC pulse power supply is connected to the first electrode in the reaction chamber and the ground terminal, and the second output port of the DC pulse power supply is connected to the second electrode in the reaction chamber.

16. A method for controlling a DC pulse power supply, characterized in that: include: In response to a DC output instruction, controlling the working mode of the first switch to be an on mode, and controlling the working modes of the second switch and the third switch to be an off mode, so that the DC pulse power supply is in a DC output mode; In response to a pulse output instruction, the working modes of the first switch, the second switch and the third switch are controlled to switch between a first control state and a second control state so that the DC pulse power supply is in a pulse output mode; wherein, the first control state is that the working mode of the first switch is an on mode, and the working modes of the second switch and the third switch are an off mode, and the second control state is that the working mode of the first switch is an off mode, and the working modes of the second switch and the third switch are an on mode, and in the second control state, the bias power supply is also controlled to output a bias voltage.

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