An adjustable preheating system for vacuum coating
By designing an adjustable vacuum coating preheating system, the components that heat, cool and agitate air are used to solve the film quality and efficiency problems caused by the unpreheating of the substrate, and efficient preheating treatment is achieved and the coating quality is improved.
Patent Information
- Application Number
- CN202411689827.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-25
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2044-11-25
AI Technical Summary
During the existing vacuum coating process, the substrate cannot be preheated, which affects the quality of the film layer and the coating efficiency.
An adjustable vacuum coating preheating system is designed, including components such as heating boxes, cooling boxes, preheating mixing boxes, thermal conductivity boxes and exhaust fans. By heating, cooling and agitating the air to regulate the temperature, preheating the substrate is achieved.
The coating efficiency and film layer quality are improved, and the purity and uniformity of the film layer are ensured.
Smart Images

Figure CN119506785B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of vacuum coating, and specifically to an adjustable preheating system for vacuum coating. Background Art
[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions, evaporating them and condensing them on the surface of the workpiece to form a thin film. This method uses vacuum technology to avoid interference from impurities in the air during the coating process, ensuring the purity and uniformity of the film layer, and giving vacuum coating broad application prospects and significant technical advantages. Through vacuum coating, interference from impurities in the air during the coating process can be avoided, ensuring the purity and uniformity of the film layer, and having good adhesion strength.
[0003] During the vacuum coating process, heating can cause the coating material to evaporate and transform into a gaseous state. These gaseous molecules diffuse in the vacuum and adhere to the surface of the substrate to form a thin film. By preheating, the vaporization process of the coating material can be accelerated, enabling more molecules to evaporate and diffuse to the surface of the substrate, thereby improving the coating efficiency and the quality of the film layer.
[0004] However, in the current vacuum coating process, generally the substrate is directly heated, and it is impossible to preheat the substrate, resulting in an impact on the quality of the film layer and a reduction in the coating efficiency. Therefore, those skilled in the art have provided an adjustable preheating system for vacuum coating to solve the problems raised in the above background art. Summary of the Invention
[0005] The purpose of the present invention is to provide an adjustable preheating system for vacuum coating to solve the problems raised in the above background art.
[0006] To achieve the above purpose, the present invention provides the following technical solutions:
[0007] An adjustable preheating system for vacuum coating includes a vacuum coating machine. A heat conduction box and a preheating mixing box are respectively installed on the outside of the vacuum coating machine from left to right. A heating box and a cooling box are respectively arranged on the outside of the preheating mixing box from top to bottom. Two groups of heating frames are arranged inside the heating box, heating tubes are symmetrically arranged inside the two groups of heating frames, and an air extractor is also arranged on one side of the heating frame inside the heating box;
[0008] Cooling water is arranged inside the cooling box, and a semiconductor refrigeration sheet is also installed on the front inner surface of the cooling box. A liquid extraction pump is arranged inside the cooling box, and the water outlet end of the liquid extraction pump is connected to a circulation pipe;
[0009] A motor is installed on the upper surface of the preheating mixing box. The driving end of the motor is connected to a first rotating rod inside the preheating mixing box. Second rotating rods are arranged in front of and behind the first rotating rod inside the preheating mixing box. A first gear is installed on the outside of the first rotating rod, a second gear is arranged on the outside of the second rotating rod, and stirring rods are arranged on the outside of both the first rotating rod and the second rotating rod.
[0010] Two groups of heat conduction tubes penetrate through one side of the heat conduction box. A heat conduction plate is arranged inside the vacuum coating machine on the outside of the heat conduction tubes. An air extraction pump is also installed inside the heat conduction box.
[0011] As a further scheme of the present invention: an air inlet hole is opened on the outer side of the heating box, and exhaust pipes are symmetrically arranged on the other side of the heating box. One end of the exhaust pipe penetrates through the outer side of the preheating mixing box and extends into the preheating mixing box.
[0012] As a further scheme of the present invention: at least eight heating tubes are symmetrically arranged inside the heating frame, and heating wires are arranged inside the heating tubes.
[0013] As a further scheme of the present invention: a liquid inlet pipe is arranged on the front surface of the cooling box, and a liquid outlet pipe is arranged on the lower surface of the cooling box. Valves are arranged on the outside of both the liquid inlet pipe and the liquid outlet pipe.
[0014] As a further scheme of the present invention: the circulation pipe is arranged in a multi-segment "U" pipe connection inside the preheating mixing box, and the end of the circulation pipe penetrates through the outer side of the cooling box and extends into the cooling box.
[0015] As a further scheme of the present invention: a bracket is installed on the front surface of the cooling box in front of the semiconductor refrigeration sheet, and a heat dissipation fan is arranged on the front surface of the bracket.
[0016] As a further scheme of the present invention: the first gear and the second gear have the same number of teeth, and the first gear meshes with the second gear.
[0017] As a further scheme of the present invention: the stirring rod is cylindrical, and at least four are symmetrically arranged on the outside of the first rotating rod and the second rotating rod. The stirring rods on the outside of the first rotating rod and the second rotating rod are arranged staggeredly.
[0018] As a further scheme of the present invention: the air inlet end of the air extraction pump is connected to an air inlet pipe. One end of the air inlet pipe penetrates through the outer side of the preheating mixing box and extends into the preheating mixing box. One end of the heat conduction tube also penetrates through the outer side of the preheating mixing box and extends into the preheating mixing box.
[0019] As a further solution of the present invention: one end of the heat conduction tube is connected with a fixed tube inside the heat conduction box, a connecting tube is arranged outside the fixed tube, and the air outlet end of the air extraction pump is connected with one end of the connecting tube.
[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0021] 1. Through the settings of the air extraction fan, heating frame, heating tube, exhaust pipe and air inlet hole inside the heating box in the present invention, when the air extraction fan works, external air can be introduced and heated by the heating tube inside the heating frame, so that the heated air can enter the inside of the preheating mixing box through the exhaust pipe. At the same time, through the settings of the liquid extraction pump, circulation pipe and semiconductor refrigeration sheet in the cooling box, the cooling water inside can be pumped out when the liquid extraction pump works to contact the hot air entering the inside of the preheating mixing box, and the temperature sensor inside can monitor and control the temperature to facilitate the subsequent preheating treatment of the inside of the vacuum coating machine.
[0022] 2. Through the settings of the motor, first rotating rod, second rotating rod, first gear, second gear and stirring rod in the present invention, when the motor works, the first rotating rod will rotate, and the second rotating rod can be driven to rotate through the first gear and the second gear, so that the air inside the preheating mixing box can be stirred and turbulized by the stirring rods outside the first rotating rod and the second rotating rod to achieve the purpose of mixing, so as to facilitate the subsequent preheating treatment.
[0023] 3. Through the settings of the heat conduction box, heat conduction plate, heat conduction tube, air extraction pump, fixed tube and connecting tube in the present invention, when the air extraction pump works, the regulated temperature can be extracted and enter the inside of the heat conduction tube, and through the transfer of the heat conduction plate, the preheating treatment of the vacuum coating work can be realized. The structure is simple and the preheating effect is good. Description of the Drawings
[0024] Figure 1 It is a structural schematic diagram of a controllable vacuum coating preheating system;
[0025] Figure 2 It is a structural schematic diagram of the heat conduction plate in a controllable vacuum coating preheating system;
[0026] Figure 3 It is an internal structural schematic diagram of the heating box in a controllable vacuum coating preheating system;
[0027] Figure 4 It is an internal structural schematic diagram of the cooling box in a controllable vacuum coating preheating system;
[0028] Figure 5 It is an internal structural schematic diagram of the preheating mixing box in a controllable vacuum coating preheating system;
[0029] Figure 6 A schematic diagram of the structure of a stirring rod in an adjustable vacuum coating preheating system;
[0030] Figure 7 This is a schematic diagram of the structure of a heat pipe in an adjustable vacuum coating preheating system.
[0031] In the figure: 1. Vacuum coating machine; 2. Preheating mixing box; 21. Motor; 22. First rotating rod; 221. First gear; 23. Second rotating rod; 231. Second gear; 24. Stirring rod; 3. Heating box; 31. Air inlet; 32. Exhaust fan; 33. Exhaust pipe; 34. Heating frame; 341. Heating pipe; 4. Cooling box; 41. Liquid inlet pipe; 42. Liquid outlet pipe; 43. Liquid extraction pump; 431. Circulation pipe; 5. Heat transfer box; 51. Heat transfer plate; 52. Heat transfer pipe; 53. Exhaust pump; 54. Fixed pipe; 541. Connecting pipe. DETAILED DESCRIPTION
[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0033] See also Figures 1 to 7 In an embodiment of the present invention, an adjustable vacuum coating preheating system includes a vacuum coating machine 1. A heat conduction box 5 and a preheating mixing box 2 are installed on the outside of the vacuum coating machine 1 from left to right. A heating box 3 and a cooling box 4 are installed on the outside of the preheating mixing box 2 from top to bottom. Two sets of heating frames 34 are installed inside the heating box 3. Heating pipes 341 are symmetrically arranged inside the two sets of heating frames 34. An exhaust fan 32 is also installed on one side of the heating frame 34 inside the heating box 3.
[0034] Cooling water is provided inside the cooling box 4, and a semiconductor refrigeration plate is installed on the inner front surface of the cooling box 4. A liquid pump 43 is provided inside the cooling box 4, and a circulation pipe 431 is connected to the water outlet of the liquid pump 43.
[0035] A motor 21 is mounted on the upper surface of the preheating mixing box 2. The driving end of the motor 21 is connected to a first rotating rod 22 inside the preheating mixing box 2. A second rotating rod 23 is disposed inside the preheating mixing box 2 in front of and behind the first rotating rod 22. A first gear 221 is mounted on the outside of the first rotating rod 22. A second gear 231 is disposed on the outside of the second rotating rod 23. A stirring rod 24 is disposed on the outside of both the first rotating rod 22 and the second rotating rod 23.
[0036] On one side of the heat conduction box 5, two groups of heat conduction tubes 52 are arranged in a penetrating manner. On the outside of the heat conduction tubes 52, heat conduction plates 51 are arranged inside the vacuum coating machine 1. An air extraction pump 53 is also installed inside the heat conduction box 5.
[0037] In a preferred embodiment of this example: An air inlet hole 31 is provided on the outer side of the heating box 3, and exhaust pipes 33 are symmetrically arranged on the other side of the heating box 3. One end of the exhaust pipe 33 penetrates through the outer side of the preheating mixing box 2 and extends into the interior of the preheating mixing box 2.
[0038] Specifically in this embodiment, through the air inlet hole 31 on the outer side of the heating box 3, when the exhaust fan 32 inside the heating box 3 works, the external air can be inhaled into the interior of the heating box 3 through the air inlet hole 31 for heating, and the heated air can be introduced into the interior of the preheating mixing box 2 through the exhaust pipe 33 for mixing to regulate the temperature of the air, so as to preheat the materials for vacuum coating subsequently.
[0039] In a preferred embodiment of this example: At least eight heating tubes 341 are symmetrically arranged inside the heating frame 34, and heating wires are arranged inside the heating tubes 341.
[0040] Specifically in this embodiment, by symmetrically arranging heating tubes 341 inside the heating frame 34 and using the heating wires inside the heating tubes 341 to conduct electricity and heat, the temperature inside the heating box 3 can be increased, so as to heat the air entering the interior of the heating box 3.
[0041] In a preferred embodiment of this example: A liquid inlet pipe 41 is provided on the front surface of the cooling box 4, and a liquid outlet pipe 42 is provided on the lower surface of the cooling box 4. Valves are arranged on the outside of both the liquid inlet pipe 41 and the liquid outlet pipe 42.
[0042] Specifically in this embodiment, external coolant can be introduced into the interior of the cooling box 4 through the liquid inlet pipe 41, and the excess coolant inside it can be discharged through the liquid outlet pipe 42.
[0043] In a preferred embodiment of this example: The circulation pipe 431 is arranged in a multi-segment "U" pipe connection inside the preheating mixing box 2, and the end of the circulation pipe 431 penetrates through the outer side of the cooling box 4 and extends into the interior of the cooling box 4.
[0044] Specifically in this embodiment, after the coolant is pumped into the circulation pipe 431, the cold air outside the circulation pipe 431 will come into contact with the hot air entering the interior of the preheating mixing box 2, so that the temperature inside the preheating mixing box 2 can be regulated, and the end of the circulation pipe 431 also returns to the interior of the cooling box 4 to achieve the purpose of recycling.
[0045] In a preferred embodiment of this example: A bracket is installed on the front surface of the cooling box 4 in front of the semiconductor refrigeration sheet, and a heat dissipation fan is arranged on the front surface of the bracket.
[0046] Specifically, in this embodiment, the purpose of refrigerating the coolant inside the cooling box 4 can be achieved through a thermoelectric cooler. The hot end of the thermoelectric cooler is arranged outside the cooling box 4, and the cold end is arranged inside the cooling box 4. The hot end of the thermoelectric cooler can be dissipated by a cooling fan, thereby improving its refrigeration effect.
[0047] Preferably, in this embodiment: the number of teeth of the first gear 221 is the same as that of the second gear 231, and the first gear 221 and the second gear 231 are meshed with each other. The stirring rod 24 is cylindrical, and at least four stirring rods 24 are symmetrically arranged outside the first rotating rod 22 and the second rotating rod 23. The stirring rods 24 outside the first rotating rod 22 and the second rotating rod 23 are arranged staggeredly.
[0048] Specifically, in this embodiment, through the mutual meshing of the first gear 221 and the second gear 231, when the motor 21 works to rotate the first rotating rod 22, since the first gear 221 is installed outside the first rotating rod 22, the first gear 221 will also rotate to drive the second gear 231 to rotate, thereby driving the second rotating rod 23 to rotate. When rotating, the stirring rods 24 outside the first rotating rod 22 and the second rotating rod 23 can stir and disturb the incoming air, achieving the purpose of efficiently mixing the air.
[0049] Preferably, in this embodiment: the intake end of the air extraction pump 53 is connected with an intake pipe. One end of the intake pipe penetrates through the outer side of the preheating and mixing box 2 and extends into the preheating and mixing box 2. One end of the heat conduction pipe 52 also penetrates through the outer side of the preheating and mixing box 2 and extends into the preheating and mixing box 2. One end of the heat conduction pipe 52 is connected with a fixed pipe 54 inside the heat conduction box 5. A connecting pipe 541 is arranged outside the fixed pipe 54. The air outlet end of the air extraction pump 53 is connected with one end of the connecting pipe 541.
[0050] Specifically, in this embodiment, through the operation of the air extraction pump 53, the air regulated inside the preheating and mixing box 2 can be extracted through a pipeline, and after extraction, it enters the inside of the heat conduction pipe 52 through the connecting pipe 541 and the fixed pipe 54. After entering the inside of the heat conduction pipe 52, its temperature will be conducted through the heat conduction plate 51, and then the heat conducted can be used to preheat the vacuum coating material.
[0051] The working principle of the present invention is as follows: When the adjustable vacuum coating preheating system of the present invention is in use, first, the heating tubes 341 inside the heating box 3 are energized for heating. After heating, the exhaust fan 32 inside the heating box 3 is started to work. In this way, external air can be extracted and enter the inside of the heating box 3 through the air inlet holes 31. After entering, the air will contact the energized and heated heating tubes 341 to achieve heating, and after heating, it will enter the preheating mixing box 2 through the exhaust pipe 33. A temperature sensor is provided inside the preheating mixing box 2, and the temperature sensor can be used to monitor the temperature inside it. And an electric valve is provided on the exhaust pipe 33 to achieve the purpose of automatic opening and closing;
[0052] When the temperature of the hot air needs to be adjusted after it enters the preheating mixing box 2 and is relatively high, at this time, the liquid extraction pump 43 inside the cooling box 4 is started to work. In this way, the coolant inside it will be extracted and enter the circulation pipe 431. The circulation pipe 431 is arranged inside the preheating mixing box 2. After the coolant enters the circulation pipe 431, its cold air will dissipate heat outward and contact the hot air inside the preheating mixing box 2, so as to achieve the purpose of adjusting the temperature. It should be noted here that the end of the circulation pipe 431 is arranged inside the cooling box 4, so as to achieve the purpose of recycling the coolant;
[0053] When the temperature inside the preheating mixing box 2 meets the preheating temperature of the vacuum coating material, at this time, the electric valve outside the pipeline penetrating the preheating mixing box 2 is opened, and the exhaust pump 53 is started to work. In this way, the air inside the preheating mixing box 2 can be introduced into the inside of the heat conduction pipe 52 through the connecting pipe 541 and the fixed pipe 54. After entering the inside of the heat conduction pipe 52, its temperature will be conducted through the heat conduction plate 51, and then the vacuum coating material can be preheated by the conducted heat. The other end of the heat conduction pipe 52 also penetrates into the inside of the preheating mixing box 2 to achieve the purpose of exhausting gas.
[0054] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.
[0055] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A controllable preheating system for vacuum coating, comprising a vacuum coating machine (1), characterized in that, On the outside of the vacuum coating machine (1), a heat conduction box (5) and a preheating and mixing box (2) are installed from left to right respectively. On the outside of the preheating and mixing box (2), a heating box (3) and a cooling box (4) are arranged from top to bottom respectively. Inside the heating box (3), two groups of heating frames (34) are provided. Inside the two groups of heating frames (34), heating tubes (341) are symmetrically arranged. Inside the heating box (3), on one side of the heating frame (34), an air extractor (32) is also provided. Inside the cooling box (4), cooling water is provided. On the inner front surface of the cooling box (4), a semiconductor refrigeration sheet is installed. Inside the cooling box (4), a liquid extraction pump (43) is provided. The water outlet end of the liquid extraction pump (43) is connected to a circulation pipe (431). On the upper surface of the preheating and mixing box (2), a motor (21) is installed. The driving end of the motor (21) is connected to a first rotating rod (22) inside the preheating and mixing box (2). Inside the preheating and mixing box (2), second rotating rods (23) are arranged in front of and behind the first rotating rod (22). On the outside of the first rotating rod (22), a first gear (221) is installed. On the outside of the second rotating rod (23), a second gear (231) is provided. Stirring rods (24) are arranged on the outside of both the first rotating rod (22) and the second rotating rod (23). On one side of the heat conduction box (5), two groups of heat conduction tubes (52) are penetrated. Inside the vacuum coating machine (1), on the outside of the heat conduction tubes (52), a heat conduction plate (51) is provided. Inside the heat conduction box (5), an air extraction pump (53) is also installed.
2. The adjustable preheating system for vacuum coating according to claim 1, wherein On the outside of the heating box (3), an air inlet hole (31) is opened. On the other side of the heating box (3), exhaust pipes (33) are symmetrically arranged. One end of the exhaust pipe (33) penetrates the outside of the preheating and mixing box (2) and extends into the preheating and mixing box (2).
3. A controllable vacuum coating preheating system according to claim 1, characterized in that, At least eight heating tubes (341) are symmetrically arranged inside the heating frame (34), and heating wires are arranged inside the heating tubes (341).
4. A controllable preheating system for vacuum coating according to claim 1, characterized in that, On the front surface of the cooling box (4), a liquid inlet pipe (41) is provided. On the lower surface of the cooling box (4), a liquid outlet pipe (42) is provided. Valves are arranged on the outside of both the liquid inlet pipe (41) and the liquid outlet pipe (42).
5. A controllable vacuum coating preheating system according to claim 1, characterized in that, The circulation pipe (431) is arranged in a multi-section "U" tube connection inside the preheating and mixing box (2), and the end of the circulation pipe (431) penetrates the outside of the cooling box (4) and extends into the cooling box (4).
6. A controllable preheating system for vacuum coating according to claim 1, characterized in that, On the front surface of the cooling box (4), in front of the semiconductor refrigeration sheet, a bracket is installed. On the front surface of the bracket, a heat dissipation fan is provided.
7. A controllable vacuum coating preheating system according to claim 1, wherein, The number of teeth of the first gear (221) is the same as that of the second gear (231), and the first gear (221) meshes with the second gear (231).
8. A controllable preheating system for vacuum coating according to claim 1, wherein, The stirring rod (24) is cylindrical. At least four stirring rods (24) are symmetrically arranged on the outside of the first rotating rod (22) and the second rotating rod (23). The stirring rods (24) on the outside of the first rotating rod (22) and the second rotating rod (23) are arranged alternately.
9. The adjustable preheating system for vacuum coating according to claim 1, characterized in that, The intake end of the air extraction pump (53) is connected with an intake pipe, one end of the intake pipe penetrates through the outer side of the preheating and mixing box (2) and extends into the interior of the preheating and mixing box (2), and one end of the heat conduction pipe (52) also penetrates through the outer side of the preheating and mixing box (2) and extends into the interior of the preheating and mixing box (2).
10. A controllable preheating system for vacuum coating according to claim 1, characterized in that, One end of the heat conduction pipe (52) is connected with a fixed pipe (54) inside the heat conduction box (5), a connecting pipe (541) is arranged on the outer side of the fixed pipe (54), and the air outlet end of the air extraction pump (53) is connected with one end of the connecting pipe (541).
Citation Information
Patent Citations
Large-area evaporation boat
CN118600373A
Vacuum coating equipment with preheating mechanism
CN219174607U