Integrated optical tweezers

Abstract

The invention discloses integrated optical tweezers comprising a gain chip used as a laser gain source in an external cavity laser system; the silicon-based optical chip and the gain chip are integrated in a heterogeneous mode; the silicon-based optical chip internally comprises a 2 * 2 multi-mode interference coupler, a micro-ring filter, a plurality of 1 * 2 multi-mode interference couplers and a plurality of antenna transmitting array elements; the silicon-based optical chip end face coupler is connected with the output end of the gain chip and is used for receiving the light beam generated by the gain chip and transmitting the light beam to the micro-ring filter through the 2 * 2 multimode interference coupler for filtering so as to adjust the wavelength of the light beam; the filtered light beam passes through a plurality of 1 * 2 multi-mode interference couplers to carry out average beam splitting on light beam energy; the split light beam is emitted to the space through the grating antenna structure after the phase of the light beam is adjusted by the antenna emission array element. According to the invention, more accurate control of the optical potential well can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon-based optoelectronics, and more specifically, the present invention is an integrated optical system for optical capture and manipulation based on silicon-based optical chips. Background Art

[0002] Traditional optical tweezers systems rely on bulky optical components and are typically used for non-contact manipulation of particles and cells. However, they are costly, complex, and require sophisticated laboratory equipment. This limitation restricts their widespread application. Previous optical tweezers technologies were either complex and bulky in structure, or had limited capture distances and insufficient dynamic manipulation capabilities, making it difficult to achieve non-mechanical precision manipulation of targets.

[0003] Integrated optical tweezers offer the potential to solve these problems and enable compact, low-cost optical manipulation systems. However, previous integrated optical tweezer technologies were mainly limited to micrometer-scale working distances near the chip surface, and most of them were passive capture functions, limiting their applicability in cell experiments. Summary of the invention

[0004] In view of this, the present invention proposes an integrated optical tweezers, which can achieve more precise control of the optical potential well.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] The present invention provides an integrated optical tweezers, comprising:

[0007] Gain chips, used to act as laser gain sources in external cavity laser systems;

[0008] The silicon-based optical chip is integrated with the gain chip in a heterogeneous manner;

[0009] The silicon-based optical chip includes an end-face coupler, a 2×2 multi-mode interference coupler, a micro-ring filter, multiple 1×2 multi-mode interference couplers, and multiple antenna transmitting array elements;

[0010] The end coupler is connected to the output end of the gain chip, and is used to receive the light beam generated by the gain chip and transmit it to the 2×2 multimode interference coupler, and then transmit it to the micro-ring filter for filtering to adjust the wavelength of the light beam;

[0011] The filtered beam passes through multiple 1×2 multimode interference couplers to averagely split the beam energy;

[0012] The split light beam is emitted into space through the grating antenna structure after the phase is adjusted by the antenna transmitting array element.

[0013] Preferably, the gain chip comprises a gain chip electrode and a gain chip body, wherein:

[0014] By injecting current into the gain chip electrode, the gain chip body enters the working state;

[0015] One end face of the gain chip body has a high reflectivity coating, and the other end face has a reflective coating with a slightly lower reflectivity. The light beam generated by the gain chip is output through the lower reflectivity end face and coupled to the outside through a curved waveguide.

[0016] Preferably, the silicon-based optical chip further includes an end coupler, and the end coupler adopts a Taper structure of a silicon waveguide;

[0017] The end face coupler and the gain chip are matched with the mode field to introduce the light beam generated by the gain chip;

[0018] The end coupler adopts a preset tilt angle to prevent the reflected light from entering during the end coupling process.

[0019] Preferably, the microring filter comprises:

[0020] Silicon-based waveguides, either straight or curved;

[0021] The microring resonator comprises a microring waveguide structure, a titanium nitride structure having a shape similar to that of the microring waveguide and a wider width is arranged above the microring waveguide structure, a Box layer made of silicon dioxide material is arranged below the microring waveguide structure, and a silicon-based substrate is arranged below the Box layer;

[0022] A microring filter control electrode, used for receiving an external current and loading it into a titanium nitride structure in the microring resonator;

[0023] The titanium nitride structure generates heat under the action of electric current, which changes the local temperature field, and changes the effective refractive index of the micro-ring waveguide structure through the local temperature field, thereby changing the resonant wavelength of the light beam to adjust the output wavelength of the light beam;

[0024] The dispersion direction of the grating antenna structure is controlled by adjusting the output wavelength of the light beam, thereby controlling the focal position of the light beam in the X direction.

[0025] Preferably, the antenna transmitting array element includes:

[0026] The MZI structure is composed of two 1×2 MMI multimode interference couplers and a type-I phase shifter. The phase of the light beam in one of the waveguides is changed by the type-I phase shifter, and the energy of the output light beam is controlled under the interference effect.

[0027] The second type of phase shifter is arranged at the output end of the MZI structure, and is used to control the phase of the light beam input to the grating antenna structure, so as to control the position of the grating antenna structure in the near field coherent phase, and then control the focus position;

[0028] The grating antenna structure is composed of a silicon-based waveguide and is a periodic winding structure.

[0029] Preferably, a type of phase shifter includes a thermo-optical based phase shifter or an electro-optical based phase shifter;

[0030] Thermo-optical based phase shifters control the optical phase by changing the local temperature and thus the local effective refractive index;

[0031] Electro-optical phase shifters control the optical phase by changing the effective refraction by varying the carrier concentration;

[0032] The local temperature or carrier concentration is changed by receiving an externally applied voltage or current through a phase shifter electrode arranged in a type of phase shifter.

[0033] Preferably, multiple grating antenna structures corresponding to multiple antenna transmitting array elements are combined into an array antenna, and the coherent position of the light beam in the Y direction is controlled by adjusting the phase of the light beam through the second type phase shifter corresponding to each grating antenna structure in the array antenna.

[0034] Preferably, the near-field electric field distribution generated by the light beam emitted into space by the silicon-based optical chip is approximated by a near-field quasi-array factor model:

[0035]

[0036] Where N represents the total number of arrays of grating antenna structures, A n represents the amplitude of the nth grating antenna structure, r n represents the distance from the nth grating antenna structure to the target focus (x, y, z), λ is the wavelength transmitted in the optical waveguide, Φ n is the phase that needs to be adjusted for the nth grating antenna structure;

[0037]

[0038] When a lens-like hyperbolic element phase distribution is used, the distance L from the nth grating antenna structure to the focus is n The calculation is as follows:

[0039]

[0040] Among them, F z Indicates the desired focal length.

[0041] The present invention has achieved at least the following beneficial effects:

[0042] 1. Realizing on-chip light gradient force and radiation pressure control and combining it with existing CMOS chip technology can greatly reduce system size and cost, and provide higher flexibility for optical tweezers technology to achieve non-contact capture and manipulation of tiny particles or cells by focusing light beams.

[0043] 2. The wavelength and phase of the light wave can be precisely controlled by adjusting the microring resonator and the second type of phase shifter. The amplitude of each antenna can be precisely controlled by controlling the first type of phase shifter, thereby controlling the gradient force and radiation pressure of the light, achieving high-precision dynamic optical capture.

[0044] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art may be taught from the practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the present invention provides the following drawings for illustration:

[0046] Figure 1 Schematic diagram of the structure of an integrated optical tweezers according to an embodiment of the present invention;

[0047] Figure 2 This is a schematic diagram of the structure of a 2×2 MMI structure in an embodiment of the present invention;

[0048] Figure 3 A schematic diagram of the longitudinal structure of a microring resonator in an embodiment of the present invention;

[0049] Figure 4 Schematic diagram of the structure of a phase shifter based on thermal light in an embodiment of the present invention;

[0050] Figure 5 Schematic diagram of the structure of an electro-optical phase shifter in an embodiment of the present invention;

[0051] Figure 6 A schematic diagram of the structure of the MZI in an embodiment of the present invention;

[0052] Figure 7 It is a partial enlarged view of the grating antenna structure in an embodiment of the present invention.

[0053] In the figure, 1, gain chip; 101, gain chip electrode; 102, gain chip body; 201, end coupler; 202, 2×2 multimode interference coupler; 203, silicon-based waveguide; 204, microring resonator; 205, microring filter control electrode; 206, 1×2MMI multimode interference coupler; 207, phase shifter electrode; 208, type I phase shifter; 209, type II phase shifter; 210, grating antenna structure. DETAILED DESCRIPTION

[0054] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0055] The present invention provides an integrated optical tweezers, comprising:

[0056] A gain chip 1, used to serve as a laser gain source in an external cavity laser system;

[0057] The silicon-based optical chip 2 is integrated with the gain chip 1 in a heterogeneous manner;

[0058] The silicon-based optical chip 2 includes an end face coupler 201, a 2×2 multi-mode interference coupler 202, a micro-ring filter, a plurality of 1×2 multi-mode interference couplers 206 and a plurality of antenna transmitting array elements;

[0059] The end coupler 201 is connected to the output end of the gain chip 1, and is used to receive the light beam generated by the gain chip 1 and transmit it to the 2×2 multimode interference coupler 202, and then transmit it to the micro-ring filter for filtering to adjust the wavelength of the light beam;

[0060] The filtered light beam passes through a plurality of 1×2 multimode interference couplers 206 to averagely split the light beam energy;

[0061] The split light beam is emitted into space through the grating antenna structure 210 after the antenna transmitting array element adjusts the phase.

[0062] The working principle and beneficial effects of the above technical solution are as follows: using silicon-based optoelectronics technology, a method is proposed to adjust the output wavelength by adjusting the parameters of the microring filter, and then adjust the electrically controlled phase regulator to control the focus position in the x and y planes. At the same time, an MZI (Mach-Zehnder interferometer) structure is introduced before each antenna to achieve arbitrary control of the antenna radiation energy distribution, so as to apply a specific power attenuation mode in the array, reduce the sidelobe intensity, and concentrate more energy on the main beam. Through the above structure and control method, more precise control of the optical potential well can be achieved.

[0063] In a specific embodiment, referring to Figure 1The silicon-based optical chip 2 and the gain chip 1 are integrated in a heterogeneous manner. The light generated by the gain chip body 102 is coupled into the silicon photonic chip through the end coupler 201 by receiving external current to the gain chip electrode 101. The end coupler 201 adopts an angle design to reduce reflection. The coupled light is output to the silicon-based waveguide 203 through a port of the 2×2 multimode interference coupler 202 (2×2MMI). The silicon-based waveguide 203 is a curved coupled waveguide and is coupled into the microring resonator 204. The microring resonator 204 generally adds a TiN (titanium nitride) thermal adjustment controller above its microring waveguide structure. The local temperature can be changed by injecting current through the microring filter control electrode 205 to adjust the filtering parameters. The filtered light beam is output to the first stage 1×2MMI (1×2 multimode interference coupler 206) through one of the ports of the 2×2 multimode interference coupler 202 structure. According to the array scale, the 1×2 multimode interference coupler 206 structure is used to evenly split the light beam energy into the subsequent antenna transmitting array elements. The MZI structure is used in the last two stages of the 1×2 multimode interference coupler 206 beam splitting, and a phase shifter (TiN thermal adjustment electrode or PN junction phase shifter) is added to one arm, as shown in the structure of the first type of phase shifter 208. The phase shifter electrode 207 receives an externally applied voltage or current, and the phase of the light beam in the waveguide can be controlled by an external control circuit. After passing through the MZI structure, the output light beam is sent to the last stage of the second type of phase shifter 209, and then emitted into space through the grating antenna structure 210 structure.

[0064] The beneficial effects of the above technical solution are as follows: the present invention proposes a highly integrated optical tweezers system, which can realize the on-chip light gradient force and radiation pressure control, and combined with the existing CMOS chip technology, can greatly reduce the system size and cost, and provide higher flexibility for the optical tweezers technology to achieve non-contact capture and operation of tiny particles or cells by focusing the light beam.

[0065] In a specific embodiment, the gain chip 1 includes a gain chip electrode 101 and a gain chip body 102, wherein:

[0066] By injecting current into the gain chip electrode 101, the gain chip body 102 enters the working state;

[0067] One end face of the gain chip body 102 is provided with a high reflectivity coating, and the other end face is provided with a reflective coating with a slightly lower reflectivity. The light beam generated by the gain chip is output through the lower reflectivity end face and is coupled to the outside through the curved waveguide.

[0068] In a specific embodiment, the silicon-based optical chip 2 further includes an end coupler 201, and the end coupler 201 adopts a Taper structure of a silicon waveguide;

[0069] The end face coupler 201 performs mode field matching with the gain chip 1 to introduce the light beam generated by the gain chip 1;

[0070] The end face coupler 201 adopts a preset tilt angle to prevent reflected light from entering during the end face coupling process.

[0071] In a specific embodiment, the microring filter comprises:

[0072] The silicon-based waveguide 203 is a straight waveguide or a curved waveguide;

[0073] The microring resonator 204 includes a microring waveguide structure, a titanium nitride structure having a shape similar to that of the microring waveguide and a wider width is disposed above the microring waveguide structure, a Box layer made of silicon dioxide material is disposed below the microring waveguide structure, and a silicon-based substrate is disposed below the Box layer;

[0074] A microring filter control electrode 205 is used to receive an external current and load it into the titanium nitride structure in the microring resonator 204;

[0075] The titanium nitride structure generates heat under the action of electric current, which changes the local temperature field, and changes the effective refractive index of the micro-ring waveguide structure through the local temperature field, thereby changing the resonant wavelength of the light beam to adjust the output wavelength of the light beam;

[0076] The dispersion direction of the grating antenna structure 210 is controlled by adjusting the output wavelength of the light beam, thereby controlling the focal position of the light beam in the X direction.

[0077] In a specific embodiment, the antenna transmitting array element includes:

[0078] The MZI structure is composed of two 1×2 MMI multimode interference couplers and a first-class phase shifter 208. The first-class phase shifter 208 is used to change the phase of the light beam in one of the waveguides, and the energy of the output light beam is controlled under the interference effect.

[0079] The second type of phase shifter 209 is arranged at the output end of the MZI structure, and is used to control the phase of the light beam input to the grating antenna structure 210, so as to control the position of the grating antenna structure 210 in the near field coherent phase, and further control the focus position;

[0080] The grating antenna structure 210 is composed of a silicon-based waveguide and is a periodic surrounding structure.

[0081] In one specific embodiment, a type of phase shifter 208 includes a thermo-optical based phase shifter or an electro-optical based phase shifter;

[0082] Thermo-optical based phase shifters control the optical phase by changing the local temperature and thus the local effective refractive index;

[0083] Electro-optical phase shifters control the optical phase by changing the effective refraction by changing the carrier concentration;

[0084] The phase shifter electrode 207 disposed in the type of phase shifter 208 receives an externally applied voltage or current to change the local temperature or carrier concentration.

[0085] In a specific embodiment, multiple grating antenna structures 210 corresponding to multiple antenna transmitting elements are combined into an array antenna, and the coherent position of the light beam in the Y direction is controlled by adjusting the phase of the light beam through the second type phase shifter 209 corresponding to each grating antenna structure 210 in the array antenna.

[0086] In a specific embodiment, the near-field electric field distribution generated by the light beam emitted into space by the silicon-based optical chip 2 is approximated by a quasi-array factor model of the near field:

[0087]

[0088] Wherein, N represents the total number of arrays of the grating antenna structure 210, A n represents the amplitude of the nth grating antenna structure 210, r n represents the distance from the nth grating antenna structure 210 to the target focus (x, y, z), λ is the wavelength transmitted in the optical waveguide, Φ n is the phase that needs to be adjusted for the nth grating antenna structure 210;

[0089]

[0090] When a lens-like hyperbolic element phase distribution is adopted, the distance L from the nth grating antenna structure 210 to the focus is n The calculation is as follows:

[0091]

[0092] Among them, F z Indicates the desired focal length.

[0093] Φ n The phase that needs to be adjusted for the nth grating antenna structure 210 can be obtained by adjusting the structure of the second type phase shifter 209 to obtain the desired phase, thereby obtaining the desired focal position. The wavelength and phase of the light wave can be precisely controlled by adjusting the microring resonator 204 and the second type phase shifter 209. The amplitude A of each antenna can be precisely controlled by controlling the first type phase shifter 208. n , and then control the gradient force and radiation pressure of light to achieve high-precision dynamic optical capture.

[0094] The structure in the embodiment of the present invention includes:

[0095] Gain chip 1 (Gain Chip): The gain chip acts as the laser gain source in the external cavity laser system;

[0096] Gain chip electrode 101: inject current through the electrode to put the gain chip into working state;

[0097] Gain chip body 102: The left end face is provided with a high reflectivity (HR) coating, and the other inclined end face is provided with a reflective (AR) coating with a lower reflectivity. The light beam generated by the gain chip is output through the waveguide with an inclined right end face;

[0098] Silicon-based chip 2: Made of SOI wafer;

[0099] End coupler 201: uses a silicon waveguide Taper structure to perform mode field matching with the gain chip to guide the light beam into the silicon photonic chip. The end coupler in this example uses a certain tilt angle to prevent the reflected light in the end coupling process from entering the chip;

[0100] 2×2 multimode interference coupler 202: 2×2MMI, structure reference Figure 2 , light enters from port 1, is output from ports 2 and 3 to the micro-ring filter, and the filtered light beam is output from port 4 to the subsequent optical path;

[0101] Silicon-based waveguide 203: can be a straight waveguide or a curved waveguide. In the example, an ultra-sharp curved waveguide is used to increase the tunable wavelength range;

[0102] Microring resonator 204: Its longitudinal structure is as follows Figure 3 As shown, titanium nitride is used above the microring waveguide, which has a shape similar to that of the microring and a width of about 100 mm;

[0103] Microring filter control electrode 205: Current is injected from the electrode into the titanium nitride in the microring resonator 204, and the titanium nitride will generate heat, thereby changing the local temperature field and further changing the effective refractive index of the microring waveguide. Where R is the radius of the microring, m is a positive integer, and n eff is the effective refractive index. The change of the effective refractive index changes the resonant wavelength, thereby achieving the purpose of adjusting the output wavelength.

[0104] 1×2 multimode interference coupler 206: 1×2 MMI, splitting the light into two output ports at an energy ratio of 50:50;

[0105] The electrode 207 of the phase shifter is connected to an external circuit and a voltage or current is applied externally;

[0106] A type of phase shifter 208: Silicon-based phase shifters mainly include thermo-optical phase shifters and electro-optical phase shifters. The schematic diagram of their structure is shown in FIG. Figure 4 and5 As shown, the thermal-optical based method changes the local temperature, thereby changing the local effective refractive index to control the optical phase, and the electro-optical based phase shifter changes the carrier concentration to change the effective refraction, thereby controlling the optical phase;

[0107] MZI structure (Mach-Zehnder interferometer): refer to Figure 6 , using 2 1×2MMIs, 1 phase shifter, and 1 straight waveguide can be combined into an MZI structure. By changing the phase in one of the waveguides in the MZI, the energy of the output light can be controlled due to interference;

[0108] The second type of phase shifter 209 has the same structure as the first type of phase shifter 208. The phase shifter here controls the phase input to the grating antenna structure 210, and can control the position of the optical antenna in the near field coherent phase, thereby controlling the focal position;

[0109] Grating antenna structure 210: composed of silicon-based waveguide, its partial enlarged diagram is shown in FIG. Figure 7 , which is a periodic surrounding structure, and N antennas are combined into an array antenna. By controlling and adjusting the phase in the second type phase shifter 209, the coherent position of the light beam in the Y direction can be controlled. By controlling the microring resonator 204, the wavelength can be controlled, thereby controlling the dispersion direction of the antenna, and then controlling the focus position of the light beam in the X direction.

[0110] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. An integrated optical tweezers, characterized in that: include: A gain chip (1) is used to act as a laser gain source in an external cavity laser system; The silicon-based optical chip (2) is integrated with the gain chip (1) in a heterogeneous manner; The silicon-based optical chip (2) comprises an end face coupler (201), a 2×2 multimode interference coupler (202), a micro-ring filter, a plurality of 1×2 multimode interference couplers (206) and a plurality of antenna transmission array elements; The end face coupler (201) is connected to the output end of the gain chip (1), and is used for receiving the light beam generated by the gain chip (1) and transmitting it to the 2×2 multimode interference coupler (202), and then transmitting it to the micro-ring filter for filtering, thereby adjusting the wavelength of the light beam; The filtered light beam is passed through a plurality of 1×2 multi-mode interference couplers (206) to averagely split the light beam energy; The split light beam is emitted into space through the grating antenna structure (210) after the antenna transmitting array element adjusts the phase.

2. An integrated optical tweezers according to claim 1, characterized in that: The gain chip (1) comprises a gain chip electrode (101) and a gain chip body (102), wherein: By injecting current into the gain chip electrode (101), the gain chip body (102) enters a working state; One end face of the gain chip body (102) is provided with a high reflectivity coating, and the other end face is provided with a reflective coating with a slightly lower reflectivity. The light beam generated by the gain chip is output through the lower reflectivity end face and is coupled to the outside through a curved waveguide.

3. The integrated optical tweezers according to claim 1, characterized in that: The silicon-based optical chip (2) also includes an end face coupler (201), and the end face coupler (201) adopts a silicon waveguide Taper structure; The end face coupler (201) and the gain chip (1) perform mode field matching to introduce the light beam generated by the gain chip (1); The end face coupler (201) adopts a preset tilt angle to prevent reflected light from entering during the end face coupling process.

4. The integrated optical tweezers according to claim 1, characterized in that: Microring filter includes: A silicon-based waveguide (203), which is a straight waveguide or a curved waveguide; The microring resonator (204) comprises a microring waveguide structure, a titanium nitride structure having a shape similar to that of the microring waveguide and a wider width is arranged above the microring waveguide structure, a Box layer made of silicon dioxide material is arranged below the microring waveguide structure, and a silicon-based substrate is arranged below the Box layer; A microring filter control electrode (205) for receiving an external current and loading it into a titanium nitride structure in the microring resonator (204); The titanium nitride structure generates heat under the action of electric current, which changes the local temperature field, and changes the effective refractive index of the micro-ring waveguide structure through the local temperature field, thereby changing the resonant wavelength of the light beam to adjust the output wavelength of the light beam; The dispersion direction of the grating antenna structure (210) is controlled by adjusting the output wavelength of the light beam, thereby controlling the focal position of the light beam in the X direction.

5. The integrated optical tweezers according to claim 1, characterized in that: The antenna transmitting array elements include: The MZI structure is composed of two 1×2 MMI multimode interference couplers and a first-class phase shifter (208), and the phase of the light beam in one of the waveguides is changed by the first-class phase shifter (208), so as to control the energy of the output light beam under the interference effect; A second type of phase shifter (209) is arranged at the output end of the MZI structure and is used to control the phase of the light beam input into the grating antenna structure (210), so as to control the position of the grating antenna structure (210) in the near field coherent phase, thereby controlling the focal position; The grating antenna structure (210) is composed of a silicon-based waveguide and is a periodic surrounding structure.

6. The integrated optical tweezers according to claim 5, characterized in that: One type of phase shifter (208) includes a thermo-optical based phase shifter or an electro-optical based phase shifter; Thermo-optical based phase shifters control the optical phase by changing the local temperature and thus the local effective refractive index; Electro-optical phase shifters control the optical phase by changing the effective refraction by changing the carrier concentration; A phase shifter electrode (207) disposed in a type of phase shifter (208) receives an externally applied voltage or current to change the local temperature or carrier concentration.

7. The integrated optical tweezers according to claim 1, characterized in that: A plurality of grating antenna structures (210) corresponding to a plurality of antenna transmitting array elements are combined into an array antenna, and the coherent position of the light beam in the Y direction is controlled by adjusting the phase of the light beam through the second type phase shifter (209) corresponding to each grating antenna structure (210) in the array antenna.

8. The integrated optical tweezers according to claim 1, characterized in that: The near-field electric field distribution generated by the light beam emitted into space by the silicon-based optical chip (2) is approximated by the near-field quasi-array factor model: Wherein, N represents the total number of arrays of grating antenna structures (210), A n represents the amplitude of the nth grating antenna structure (210), r n represents the distance from the nth grating antenna structure (210) to the target focus (x, y, z), λ is the wavelength transmitted in the optical waveguide, Φ n The phase that needs to be adjusted for the nth grating antenna structure (210); When a lens-like hyperbolic element phase distribution is adopted, the distance L from the nth grating antenna structure (210) to the focus is n The calculation is as follows: Among them, f z Indicates the desired focal length.

Images