Setting method, machine, application force interface, and method for operating machine

Abstract

The invention provides a setting method, a machine, an application force interface, and a method for operating the machine, and provides a technology which facilitates the efficiency of work for the machine. A setting method for setting, in a setting location, a device having a device that functions using an application force provided from the device, the setting method comprising: a step for setting an application force interface having a virtual device that generates a virtual loss corresponding to a loss of the application force in the device; a step for connecting an application force line of the device to the application force interface; a step in which the dummy device is used to confirm that the applied force provided via the applied force line satisfies a specification; a step in which the machine is installed; a step for connecting the machine to the application force interface; and a step for providing the application force interface so as to provide the application force provided via the application force line to the device instead of the dummy device.

Description

Technical Field

[0001] The present invention relates to a setting method, a machine, an application force interface and a method for using the machine. Background Art

[0002] Large machines such as exposure devices are transported to the installation site in a disassembled state and assembled, and then multiple application forces can be provided. Here, the so-called application force (Japanese: force) refers to, for example, cooling water, compressed air, exhaust capacity, electricity, etc. For example, as the performance of machines used to manufacture semiconductor devices and the like improves and they become larger, the period required for installation is lengthening. However, the users of the machines have a demand to shorten the installation time as much as possible and deliver the machines as soon as possible. Regardless of whether it is under such circumstances, if the application force cannot be provided immediately after the machine is assembled, it is impossible to proceed to the performance adjustment process after the machine is working. One of the reasons is that as the performance of the machine improves and it becomes larger, the required application force becomes larger, and the construction period of the project to lay the lines for providing the application force under the floor of the machine and the like is lengthened.

[0003] In order to solve such a problem, the following setting sequence is known. Prepare a simulation device with the same outer dimensions as the machine to be set up and the same position and interface for the applied force connection. At the beginning of the machine setting work, set the simulation device to the setting location of the machine, and start the laying work of the applied force line under the floor. Then, temporarily connect the simulation device and the applied force line. After the applied force connection is completed, leave the boundary between the simulation device and the applied force line and remove the simulation device. Set the machine at the setting location where the simulation device was previously located, and connect the machine and the applied force line. According to the above setting sequence, the waiting time for the applied force connection after the machine is set up can be eliminated, thereby shortening the setting time.

[0004] Prior Art Literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent No. 4509944 Summary of the invention

[0007] Problems to be solved by the invention

[0008] As the scale of the machine increases, the simulator will also become larger, and it will take time to set up the simulator. In addition, since the machine must be set up after the simulator is removed, the removal of the simulator also takes time. Furthermore, the machine must be assembled near the part where the simulator and the applied force line are connected, but it is difficult to ensure space for arranging and configuring the large-scale simulator and machine. Furthermore, the following problem may also occur: after the connection between the machine and the applied force line is completed and the machine is operated, it is determined that the applied force that meets the specifications cannot be provided, and the original performance of the machine cannot be exerted.

[0009] An object of the present invention is to provide a technique that contributes to improving the efficiency of work for installing a machine.

[0010] Solutions to Solve Problems

[0011] The first aspect of the present invention relates to a setting method, which sets a machine having a device at a setting location, and the device uses an application force provided from the device to perform its function, wherein the setting method includes: a process of setting an application force interface having a virtual device, and the virtual device generates a virtual loss corresponding to the loss of application force in the device; a process of connecting an application force line of the device to the application force interface; a process of using the virtual device to confirm that the application force provided via the application force line meets the specifications; a process of setting the machine; a process of connecting the machine to the application force interface; and a process of setting the application force interface in a manner that the application force provided via the application force line is provided to the device instead of the virtual device.

[0012] A second aspect of the present invention relates to a machine having a device that performs a function by utilizing an applied force provided from a device, wherein the machine has an applied force interface having a virtual device that generates a virtual loss corresponding to the loss of applied force in the device, and the applied force interface is configured to form a first path connecting the applied force line of the device to the device and a second path connecting the applied force line to the virtual device.

[0013] A third aspect of the present invention relates to an application force interface, which is a component of a machine having a device that functions by utilizing an application force provided from a device, wherein the application force interface includes a virtual device that generates a virtual loss corresponding to the loss of application force in the device, and the application force interface is configured to form a first path connecting the application force line of the device and the device and a second path connecting the application force line and the virtual device.

[0014] A fourth aspect of the present invention relates to a method for operating a machine, the machine having a device that performs a function by utilizing an application force provided from a device, wherein the machine has an application force interface having a virtual device that generates a virtual loss corresponding to a loss of application force in the device, the application force interface being configured to form a first path connecting an application force line of the device to the device and a second path connecting the application force line to the virtual device, the operation method comprising the steps of setting the application force interface in such a manner that the application force provided via the application force line is provided to the virtual device rather than to the device, and performing maintenance on the machine.

[0015] Effects of the Invention

[0016] According to the present invention, a technique that contributes to improving the efficiency of work for installing a machine can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a figure which shows the structure of the exposure apparatus which provides 1st Embodiment.

[0018] Figure 2 This is a diagram showing a cooling water interface among the applied force interfaces according to the first embodiment.

[0019] Figure 3 This is a diagram for explaining virtual devices at the cooling water interface.

[0020] Figure 4 This is a diagram showing a procedure for installing an exposure apparatus at an installation location such as a factory using a cooling water interface as an example of a force application interface.

[0021] Figure 5 It is a diagram showing the valve state of the cooling water interface when cooling water is supplied to the machine room.

[0022] Figure 6 This is a diagram showing an exhaust port among the applied force ports according to the first embodiment.

[0023] Figure 7 This is a diagram showing a procedure for installing an exposure apparatus at an installation location such as a factory using an exhaust interface as an example of a force application interface.

[0024] Figure 8 FIG. 1 is a diagram showing the shutter state of the exhaust port when performing heat exhaust of the lighting unit.

[0025] Fig. 9 This is a diagram showing a compressed air interface among the applied force interfaces according to the first embodiment.

[0026] Fig.10It is a diagram showing the valve state of the compressed air interface when compressed air is supplied to the machine room.

[0027] Fig.11 It is a diagram showing an applied force interface according to the third embodiment.

[0028] Fig.12 It is a diagram for explaining the fourth embodiment.

[0029] Fig.13 This is a diagram showing an electric power interface among the applied force interfaces according to the first embodiment.

[0030] Fig.14 The diagram shows a procedure for installing an exposure apparatus at an installation location such as a factory using a power interface as an example of an application force interface.

[0031] Fig.15 It is a diagram showing an example of use of the power interface.

[0032] Fig.16 It is a diagram showing an example of use of the power interface.

[0033] Fig.17 It is a diagram showing an example of use of the power interface. DETAILED DESCRIPTION

[0034] The following detailed description of the embodiments is given with reference to the accompanying drawings. In addition, the following embodiments do not limit the invention involved in the claims. A plurality of features are described in the embodiments, but not all of these features are necessary components of the invention, and a plurality of features can be combined arbitrarily. Furthermore, in the accompanying drawings, the same or similar components are marked with the same reference numerals, and repeated descriptions are omitted.

[0035] The following is an illustrative description of a machine having a device that functions by utilizing an applied force provided from equipment at a setting location such as a factory, a method for setting the machine at the setting location, a method for operating the machine, and an applied force interface suitable for them. The setting location refers to the place where the machine is set up, which can be either indoors or outdoors. The concept of a machine may include photolithography equipment (such as an exposure device, an imprinting device, etc.), a coating and developing device, a film forming device (such as a CVD device, a PVD device), an etching device, an inspection device (such as an electron microscope, an X-ray inspection device), a medical device (such as an MRI inspection device), etc. The concept of applied force may include, for example, cooling water, compressed air, exhaust capacity, electricity, etc.

[0036] Figure 11 is a schematic diagram showing the structure of an exposure device 1 to which the first embodiment is applied. The exposure device 1 is an example of a photolithography device as an example of a machine. The exposure device 1 may include, for example: an original plate positioning unit 2 for positioning an original plate; an illumination unit 3 for illuminating the original plate; a projection unit 4 for projecting the pattern of the illuminated original plate onto a substrate; and a substrate positioning unit 5 for positioning the substrate. In addition, the exposure device 1 may include a mechanical chamber unit 6 for distributing power to each component or for regulating the temperature of the internal space of the exposure device 1. The mechanical chamber unit 6 includes an application force interface 7 connected to an application force line of equipment at a setting place such as a factory. The application force is supplied to the application force interface 7 from the equipment at a setting place such as a factory. The application force supplied via the application force line may include, for example, at least one of cooling water, compressed air, exhaust capacity, and electricity. The application force interface 7 may include at least one of the cooling water interface 10, the exhaust interface 20, the compressed air interface 30, and the power interface 60 described below.

[0037] exist Figure 2 , the structure of the cooling water interface 10 in the applied force interface 7 of the first embodiment is illustrated when viewed from above. The cooling water interface 10 can be set on the floor surface, for example. The cooling water line (applied force line) WIN of the equipment in the setting place such as the factory is connected to the cooling water interface 10. The cooling water interface 10 can include: an equipment side joint 11a connected to the cooling water line WIN of the equipment in the setting place; and a pipe 12 that circulates the cooling water (applied force) provided from the cooling water line WIN via the equipment side joint 11a.

[0038] In addition, the cooling water interface 10 may include: a sensor 13 for measuring the amount and temperature of the cooling water; and valves 14a, 14b, 14c for switching the flow direction of the cooling water. In addition, the cooling water interface 10 may include machine room side joints 15a, 15b for connecting the refrigerator (device) 8 of the machine room unit 6 as the cooling water supply target and the cooling water interface 10. In addition, the cooling water interface 10 may include a virtual device 16 for generating a virtual loss equal to the pressure loss of the refrigerator 8.

[0039] The cooling water line WIN or the piping 12 may be configured to form a first path P1 connecting the cooling water line WIN to the refrigerator (device) 8 and a second path P2 connecting the cooling water line WIN to the dummy device 16. The cooling water line WIN or the piping 12 may have a third path P3 for returning the cooling water supplied via the cooling water line WIN to a recovery line WOUT of the factory (installation location).

[0040] The valves 14a, 14b, and 14c are, for example, ball valves, and can be switched between a closed state and an open state by manually rotating a handle that moves integrally with a valve body by 90 degrees.

[0041] The virtual device 16 is, for example, Figure 3 As shown, the pressure loss can be reduced by narrowing the inner diameter area A1 of the pipe 12 to the inner diameter area A2 via the special-shaped socket 17. The pressure loss ΔP at the throttle pipe 18 with the inner diameter area A2 can be calculated by equation (1).

[0042]

[0043] …(1)

[0044] In the formula (1), ρ is the density of cooling water, v1 is the flow rate of cooling water in the pipe 12, and v2 is the flow rate of cooling water in the throttling pipe 18. c For the value of , the representative value listed in the Mechanical Engineering Handbook can be used. d It is obtained by formula (2).

[0045]

[0046] When the exposure device 1 is in operation, cooling water is supplied to the condenser of the refrigerator 8, and after heat exchange with the refrigerant circulating inside the refrigerator 8, it is discharged to the outside of the refrigerator 8. The flow rate and temperature of the cooling water required for heat exchange with the refrigerant can be determined, and the areas A1 and A2 can be determined so that ΔP in the formula (1) is equal to the pressure loss in the condenser. Through the above settings, the virtual device 16 is defined. It is preferable to confirm in advance that the virtual device 16 has the expected pressure loss. For example, a pressure gauge and a flow meter are installed before and after the virtual device 16. At the supply pressure when the required amount of water flows, the difference between the pressure values ​​on the upstream and downstream sides of the virtual device 16 is equal to the pressure loss in the condenser. In the case where the measured pressure loss deviates from the necessary pressure loss, it can be adjusted by changing the inner diameter area A2 of the throttling pipe 18.

[0047] exist Figure 4 , the order of installing the exposure device 1 in a factory or other installation location using the cooling water interface 10 as an example of an application interface is illustrated. In step S101, the cooling water interface 10 is installed in a factory or other installation location. In step S102, the cooling water lines WIN and WOUT of the factory equipment are connected to the equipment side connectors 11a and 11b of the cooling water interface 10. At this time, the opening and closing states of the valves 14a, 14b, and 14c are as shown in FIG. Figure 2As shown in FIG. 1 , the cooling water is set not to flow out first from the machine room side joint 15. In step S103, the supply of cooling water by the cooling water line WIN of the factory equipment is started. The cooling water supplied to the cooling water interface 10 enters the cooling water interface 10, passes through the sensor 13 and the dummy device 16, and then returns from the cooling water interface 10 to the recovery line WOUT of the factory equipment.

[0048] In step S104, it is confirmed whether the flow rate and temperature of the cooling water measured by the sensor 13 meet the specifications. If the specifications are not met, the cooling water is adjusted in step S105 so as to meet the specifications. In parallel with steps S102 to S105, in step S106, the exposure device 1 is installed at the installation location. Here, it is preferred that the installation of the machine room unit 6 in the exposure device 1 is not completed until it is confirmed in step S104 that the cooling water meets the specifications. In step S107, the exposure device 1 is connected to the machine room side joints 15a and 15b of the cooling water interface 10 via connecting members 19a and 19b, and more specifically, the refrigerator 8 of the machine room unit 6 is connected. The connecting members 19a and 19b can be, for example, flexible tubes having screw-in joints at both ends. In step S108, as shown in FIG. Figure 5 Thus, the valves 14a, 14b, and 14c are switched open and closed to start supplying cooling water to the refrigerator 8. That is, in step S108, the cooling water interface 10 is set so that the cooling water supplied through the cooling water line WIN is supplied to the refrigerator 8 instead of the dummy device 16.

[0049] In order to operate the machine room unit 6, in addition to the supply of cooling water, exhaust capacity and compressed air are also required. For example, when the lighting unit 3 is used at a high light intensity, exhaust capacity is required. The lighting unit 3 used at a high light intensity is temporarily connected to the machine room unit 6 by a pipe. If the heat of the lighting unit 3 is discharged by the fan of the machine room unit 6, the exhaust gas becomes high temperature and cannot be fully cooled in the machine room unit 6. In this case, the exhaust gas from the lighting unit 3 can be discharged to the factory equipment instead of returning it to the machine room unit 6.

[0050] exist Figure 6, the structure of the exhaust interface 20 in the application force interface 7 of the first embodiment is shown as an example when viewed from above. The exhaust interface 20 can be set on the floor surface. The exhaust interface 20 may include: an equipment side flange 21 connected to the exhaust duct EX of the factory equipment; and a lighting side flange 22 connected to the exhaust duct 25 extending from the lighting unit 3. In addition, the exhaust interface 20 may include an air suction port 27 for sucking the atmosphere of the clean room, and a gate 24 for switching the flow direction of the exhaust gas. The gates 24a and 24b are, for example, butterfly gates. Like the valves 14a, 14b, and 14c, if the handle is manually rotated 90 degrees, the closed state and the open state can be switched. In addition, the exhaust interface 20 may be provided with a sensor 23. The sensor 23 is, for example, an anemometer that can measure the exhaust wind speed.

[0051] The lighting unit 3 and the lighting side flange 22 may be connected via an exhaust duct 25. A dummy device 26 that generates a dummy loss equal to the sum of the pressure loss A generated by the exhaust air volume required to keep the lighting unit 3 at a predetermined temperature and the pressure loss B generated when the exhaust passes through the exhaust duct 25, A+B, may be provided at the air suction port 27. The dummy device 26 may be, for example, a perforated metal member. The pressure loss when the required exhaust air volume of the lighting unit 3 passes through the perforated metal member may be calculated by airflow simulation or the like, and the opening ratio of the perforated metal member may be determined in such a way that the calculated result is equal to the pressure loss A+B. Preferably, it is confirmed in advance that the dummy device 26 has the expected pressure loss. For example, a pressure gauge and a flow meter may be installed before and after the dummy device 26, and the difference in pressure values ​​between the upstream side and the downstream side of the dummy device 26 when the required amount of exhaust flow passes through the dummy device 26 may be equal to A+B. In the case where the measured pressure loss deviates from the required pressure loss value A+B, it may be adjusted by changing the opening ratio of the perforated metal member.

[0052] exist Figure 7 201, the order of installing the exposure device 1 in a factory or other installation location using the exhaust interface 20 as an example of an application force interface is illustrated. In step S201, the exhaust interface 20 is installed in a factory or other installation location. In step S202, the exhaust line EX of the factory equipment is connected to the equipment side flange 21 of the exhaust interface 20. At this time, the open and closed states of the gates 24a and 24b are set to Figure 6 In step S203, exhaust is started using the exhaust line EX of the plant equipment, the atmosphere of the clean room is sucked from the air suction port 27, and exhausted from the equipment-side flange 21 to the plant equipment side through the exhaust line EX.

[0053] In step S204, it is confirmed whether the exhaust air volume calculated by multiplying the exhaust air velocity measured by the sensor 23 by the pipe area meets the specification. If the specification is not met, the exhaust air volume is adjusted in step S205 to meet the specification. In parallel with steps S202 to S205, in step S106, the exposure device 1 is installed at the installation location. In step S206, the lighting unit 3 is connected to the lighting side flange 22 of the exhaust interface 20 via the exhaust duct 25. In step S207, as shown in FIG. Figure 8 In this way, the shutters 24a and 24b are switched open and closed to start exhausting the lighting unit 3. That is, in step S207, the exhaust port 20 is set so that the exhaust capacity provided through the exhaust line EX is provided to the lighting unit 3 instead of the dummy device 26.

[0054] During the exposure operation, the temperature of the optical components of the projection unit 4 rises due to the exposure light emitted from the lighting unit 3. Therefore, there is sometimes a demand to partially air-cool the optical components using compressed air. If the compressed air hits the optical components without adjusting the temperature of the compressed air, the temperature distribution of the optical components becomes uneven, or an uneven temperature distribution is generated in the exposure light path, resulting in poor exposure performance. Therefore, it is preferable to partially air-cool the optical components after the temperature adjustment of the compressed air is completed. This temperature adjustment is performed in the machine room unit 6, and therefore, the compressed air can be supplied to the machine room unit 6 from the factory equipment side.

[0055] exist Fig. 9 , the structure of the compressed air interface 30 in the applied force interface 7 of the first embodiment is shown as an example when viewed from above. The compressed air interface 30 can be set on the floor surface. The compressed air interface 30 can include: an equipment side connector 31a connected to the compressed air line CAIN of the factory equipment; a pipe 12 constituting a flow path of the supplied compressed air; a sensor 33 for measuring the flow rate of the compressed air; and valves 34a and 34b for switching the flow direction of the compressed air. In addition, the compressed air interface 30 can include a machine room side connector 35 for connecting the machine room unit 6 (and then the lighting unit 3 and the projection unit 4) as the compressed air supply target and the compressed air interface 30. The machine room unit 6 (and then the projection unit 4) and the compressed air interface 30 can be connected through a line 39. In addition, the machine room unit 6 and the projection unit 4 are also connected through a line 39, and the compressed air that has been temperature-controlled in the machine room unit 6 can be sprayed from a nozzle or the like toward the optical components of the projection unit 4.

[0056] Virtual device 36 and Figure 3Similarly to the configuration of , the piping 12 can be throttled to generate pressure loss (virtual loss). The flow rate of compressed air required for cooling the optical component is determined, and the pressure loss generated when the compressed air of the required flow rate flows from the compressed air interface 30 to the outer line 39 and the piping in the mechanical room unit 6 is calculated. The configuration of the virtual device 36 can be determined in such a way that the calculated pressure loss is equal to ΔP calculated by formula (1) (same as the aforementioned areas A1 and A2). Preferably, as with the cooling water interface 10, it is confirmed in advance whether the virtual device 36 has the expected pressure loss.

[0057] Will Figure 4 The cooling water is replaced by compressed air, and Figure 4 In the same order as in step S101, the compressed air interface 30 is provided. And, through step S102 to step S105 and step S107, the compressed air interface 30 is connected to the machine room unit 6. Finally, in step S108, as shown in FIG. Fig.10 In this way, the valves 34a and 34b are switched open and closed to start supplying the temperature-controlled compressed air to the machine room unit 6 and the projection unit 4. That is, in step S108, the compressed air interface 30 is set so that the compressed air supplied through the compressed air line CAIN is supplied to the machine room unit 6 instead of the dummy device 36.

[0058] exist Fig.13 2 shows an example of a structure of the power interface 60 in the force application interface 7 of the first embodiment when viewed from above. The power interface 60 can be installed on the floor surface.

[0059] The power interface 60 may include: a device side cable interface 61 connected to the power line PL of the factory equipment; a circuit breaker 62 for cutting off the supplied power; and a sensor 63 for measuring the voltage value and the current value. In addition, the power interface 60 may include: a selection switch 67 for switching the direction of the current; and a machine room side cable connection port 64 for connecting the machine room unit 6 as the power supply target and the power interface 60 via a cable. Typically, the power supply system of the factory equipment is a three-phase AC, and three device side cable interfaces 61, circuit breakers 62, sensors 63, selection switches 67, and machine room side cable connection ports 64 are prepared. A resistor 65 having a predetermined resistance value R is connected to the power interface 60 via a resistor side cable interface 66.

[0060] exist Fig.14 , the procedure of installing the exposure device 1 at a setting place such as a factory using the power interface 60 as an example of an application force interface is illustrated. In step S301, the power interface 60 is installed at the setting place. In step S302, the power line of the factory equipment is connected to the equipment side cable interface 61 of the power interface 60 via a cable. At this time, the circuit breaker 62 is Fig.13 In step S303, power is supplied from the power line of the factory equipment to the power line of the factory equipment. In step S304, it is confirmed whether the power value Ve of the power supply meets the specification. If it does not meet the specification, the connection of the cable is confirmed in step S305. After confirming that the voltage value Ve is normal, the circuit breaker 62 is closed in step S306. Fig.15 In this way, all are set to the off state, and the current is set to flow to the resistor 65. At this time, the current value Ie is equal to the value calculated by the formula (3), which is a normal state.

[0061]

[0062] In step S307, the current value I is measured by the sensor 63, and it is confirmed that it is equal to the current value Ie calculated by equation (3). If a part of the device side cable is disconnected, the resistance value of the device side cable increases, and the measured current value I becomes smaller. Therefore, in the case where equation (4) is established, in step S308, it is recommended to the end user to replace the device side cable, etc., to eliminate the abnormality.

[0063] <Ie

[0064] …(4)

[0065] After the abnormality is eliminated, in step S309, the circuit breaker 62 is set to the open state again. Fig.16 After the machine room unit 6 is installed, the cables of the machine room are connected to the machine room side cable connection port 64. Fig.17 Then, in step S310 , the selection switch 67 is switched to close the circuit breaker 62 , thereby starting to supply power to the machine room unit 6 .

[0066] The second embodiment is described below. Matters not mentioned in the second embodiment may be in accordance with the first embodiment. The second embodiment, for example, has an aspect of an operation method of a machine such as an exposure device set according to the first embodiment. The operation method is an operation method of a machine having a device that functions by using an application force provided from a device at a setting location. The operation method includes the following steps: setting the application force interface in such a way that the application force provided via the application force line is provided to a virtual device instead of the device, and performing maintenance on the machine.

[0067] Here, in order to provide a specific example of maintenance, an example is described in which a component of the refrigerator 8 is replaced with a new one or the entire refrigerator 8 is replaced with a new one when the refrigerator 8 fails. In order to ensure the safety of the replacement operation, after the power supply of the machine room unit 6 is turned off, the applied force supplied from the factory equipment to the machine room unit 6 must be cut off. In one example, the total applied force line of the floor below the floor can be branched into multiple lines and connected to multiple exposure devices 1. In this case, if the applied force line for the exposure device 1 to be replaced is cut off, unnecessary applied force will be supplied to other exposure devices 1, and thus, applied force exceeding the specification will be supplied to other exposure devices 1. If the applied force supplied to other exposure devices 1 changes, it will have an adverse effect on exposure performance.

[0068] In the second embodiment, by Figure 5 , Figure 8 , Fig.10 The device operation status is switched to Figure 2 , Figure 6 , Fig. 9 , so that the virtual devices 16, 26, and 36 consume the applied force. The virtual devices 16, 26, and 36 have a virtual loss equal to that of the original device to which the applied force should be supplied, and therefore, the applied force supplied to other exposure devices 1 will not change due to the above-mentioned switching. Therefore, it is easy to cut off the applied force to the faulty unit, and repairs can be started quickly, which can shorten the downtime of the exposure device caused by the fault.

[0069] In the second embodiment, when the applied force is supplied again after the repair is completed, it is also easy to switch from the cut-off state to the supply state. Figure 2 , Figure 6 , Fig. 9 The valves 14a, 14b, 14c, the gates 24a, 24b, and the valves 34a, 34b are opened and closed from the state of Figure 5 , Figure 8 , Fig.10 After the applied force is supplied, the power supply of the machine room unit 6 is turned on, and the recovery operation of the device is completed.

[0070] In the third embodiment, a method is described in which a limitation is set on the external dimensions of the force application interface 7 so as to facilitate installation of the exposure device 1 at the installation site in a shorter time. The exposure device 1 is usually divided into a plurality of units and carried into a clean room, and assembled in each clean room. When moving a plurality of units, the units can be placed on a trolley equipped with casters to transport the units. Alternatively, casters can be directly mounted on the bottom surface of the unit to transport the unit to the installation site. If the force application interface 7 is arranged on the floor surface at the beginning of the installation of the exposure device 1, the force application interface 7 will hinder the transportation operation when the units of the exposure device 1 are transported to the installation site. In addition, as the exposure device 1 becomes larger, the space required for the installation operation of the exposure device 1 also increases, and sometimes the force application interface 7 will hinder the installation operation.

[0071] Therefore, it is preferable to prepare the force application interface 7 with an outer size that does not get in the way during the transportation and installation of each unit of the exposure device 1. Fig.11 In this way, the force application interface 7 is set to a size that is smaller than the height H of the casters 40 for transporting the machine room unit 6 into the clean room, for example, and is accommodated in the interval W between the front and rear casters 40. Thus, even if the space near the force application interface 7 arranged on the floor surface when installing the exposure device 1 is narrow, the unit can be transported to a predetermined position without bypassing the force application interface 7, and the installation time can be shortened.

[0072] In the fourth embodiment, the following method is described: by setting the two ends of the connecting member 19 used to connect the refrigerator 8 of the machine room unit 6 and the cooling water interface 10 as quick connectors instead of screw-in joints, the connection operation can be shortened. The quick connector has two components, a plug on the male end and a socket on the female end. If the plug is pressed into the socket, the two can be locked in a connected state, and the valve between the plug and the socket is automatically opened. Therefore, the following structure is formed: if the plug and the socket are connected, the fluid flows, and if the connection is released, the valve is closed and the fluid no longer flows.

[0073] In order to install the connecting member 19 to the refrigerator 8 using the screw-in joint of the first embodiment, a tool is required, but the tool cannot be effectively used in a narrow environment around the refrigerator 8, and the installation takes time. Fig.12 As shown in FIG. 1 , by preparing a socket 50 at the interface of the refrigerator 8 and preparing a plug 51 at the interface of the connecting member 19, the connection can be easily performed by simply pressing the connecting member 19 toward the refrigerator 8. On the other hand, even if there is sufficient working space, the connection operation time of the connector is shorter than that of screwing in the joint, so it is also possible to Fig.12In this way, the sockets 50 are prepared at the machine room side joints 15 a and 15 b of the cooling water interface 10 , and the plug 51 is prepared at the interface of the connecting member 19 , and the connection is performed.

[0074] The force application interface 7 described above can also be applied to the installation of other semiconductor manufacturing devices other than exposure devices or photolithography devices, and can also be applied to the installation of manufacturing devices for manufacturing all other products.

[0075] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the concept and scope of the invention. Therefore, the following claims are attached to disclose the scope of the invention.

[0076] Description of Reference Numerals

[0077] 1: Exposure device (machine), 7: Applied force interface, 8: Refrigerator (device), 10: Cooling water interface, 16, 26, 36: Virtual device, 20: Exhaust interface, 30: Compressed air interface.

Claims

1. A setting method, the setting method comprising setting a machine having a device at a setting location, the device performing a function by using an application force provided from a device, characterized in that: The above setting methods include: The step of providing an applied force interface having a virtual device that generates a virtual loss corresponding to a loss of applied force in the device; A step of connecting the force application circuit of the device to the force application interface; A step of using the virtual device to confirm whether the applied force provided via the applied force circuit satisfies the specification; The process of setting up the above-mentioned machine; The process of connecting the machine to the force application interface; and The step of setting the applied force interface in such a manner that the applied force provided via the applied force line is provided to the device instead of the dummy device.

2. The setting method according to claim 1, characterized in that: The applied force interface is configured to form a first path connecting the applied force line to the device and a second path connecting the applied force line to the dummy device.

3. The setting method according to claim 2, characterized in that: The applied force interface has a third path for returning the applied force provided via the applied force circuit to the recovery circuit of the device.

4. The setting method according to claim 3, characterized in that: The above-mentioned applied force is cooling water.

5. The setting method according to claim 3, characterized in that: The applied force is compressed air.

6. The setting method according to claim 1, characterized in that: The above-mentioned applied force is the exhaust capacity.

7. The installation method according to any one of claims 1 to 6, characterized in that: The step of connecting the machine with the force interface includes the step of transporting the units constituting the machine. The force application interface has a size that is accommodated within a space between front and rear casters for transporting the machine.

8. The installation method according to any one of claims 1 to 6, characterized in that: In the step of connecting the force application interface to the machine, the machine is connected to the force application interface via a quick connector.

9. The installation method according to any one of claims 1 to 6, characterized in that: The setting method includes the following steps: setting the applied force interface in such a way that the applied force provided via the applied force line is provided to the virtual device instead of the device, and performing maintenance on the machine.

10. A machine having a device that functions by utilizing an applied force provided from a device, characterized in that: The device comprises an applied force interface having a virtual device, the virtual device generating a virtual loss corresponding to a loss of applied force in the device, The applied force interface is configured to form a first path connecting an applied force line of the device to the device and a second path connecting the applied force line to the dummy device.

11. The machine according to claim 10, characterized in that The applied force interface has a third path for returning the applied force provided via the applied force circuit to the recovery circuit of the device.

12. An applied force interface, the applied force interface being a component of a machine having a device that functions using applied force provided from a device, characterized in that: The applied force interface includes a virtual device that generates a virtual loss corresponding to the loss of applied force in the device. The applied force interface is configured to form a first path connecting an applied force line of the device to the device and a second path connecting the applied force line to the dummy device.

13. The force application interface according to claim 12, characterized in that: The applied force interface has a third path for returning the applied force provided via the applied force circuit to the recovery circuit of the device.

14. A method for operating a machine having a device that performs a function using an applied force provided from a device, characterized in that: The machine has an applied force interface having a virtual device, the virtual device generating a virtual loss corresponding to the loss of applied force in the device, the applied force interface being configured to form a first path connecting an applied force line of the device to the device and a second path connecting the applied force line to the virtual device, The operation method includes the following steps: setting the applied force interface in such a way that the applied force provided via the applied force line is provided to the virtual device instead of the device, and performing maintenance on the machine.

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