Heat treatment furnace device

Abstract

An embodiment of the present invention relates to a heat treatment furnace device in which a plurality of ceramic metal substrates are heat-treated at 600 DEG C or more and less than 950 DEG C by heating a storage container containing the plurality of ceramic metal substrates and made of stainless steel when brazing metal plates to ceramic substrates. The heat treatment furnace device is provided with a guide rail part for conveying a storage container arranged in a furnace main body, and a conveying mechanism for conveying the storage container placed on the guide rail part in a specified conveying direction along the guide rail part while moving in a direction perpendicular to the guide rail part.

Description

Technical Field

[0001] The embodiment relates to a heat treatment furnace apparatus for performing heat treatment such as brazing bonding on a ceramic substrate and a metal plate conveyed in a furnace. Background Art

[0002] As a method for manufacturing a ceramic metal substrate, there is a method as follows: a flux (e.g., brazing material) containing metals such as silver, copper, and active metals is printed on a ceramic substrate and dried, a metal plate is placed on the surface of the dried brazing material, and heat treatment is performed to join the ceramic substrate and the metal plate (Patent Document 1). Hereinafter, for convenience, the ceramic substrate, brazing material, and metal plate after joining are of course referred to as "ceramic metal substrates", and the ceramic substrate, brazing material, and metal plate before joining are also referred to as "ceramic metal substrates". According to Patent Document 1, in 10 -3 The metal plates are joined by heating at a temperature of 700° C. to 950° C. for 10 minutes or more under a reduced pressure of Pa or less.

[0003] In addition, a metal mesh belt conveyor type brazing furnace is disclosed, in which a base material and a brazing material are conveyed in a furnace by a metal mesh belt conveyor, and the brazing material is melted in a heating chamber to perform brazing (Patent Document 2). According to Patent Document 2, in a furnace conveying section closer to the furnace entrance side than a melting area where the brazing material melts in the heating chamber, a metal mesh belt of the metal mesh belt conveyor is supported by a furnace roller, so that the frictional resistance applied to the metal mesh belt is reduced.

[0004] In addition, a method for moving a ceramic storage container in a heating furnace without contacting a surface is disclosed (Patent Document 3). According to Patent Document 3, a guide rail portion for conveying a workpiece storage container provided in a furnace body and a workpiece storage container placed on the guide rail portion are conveyed in a predetermined conveying direction along the guide rail portion while being moved in a direction perpendicular to the guide rail portion, thereby conveying the storage container substantially without load.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent No. 7240511

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 9-150261

[0009] Patent Document 3: Japanese Patent No. 4179714 Summary of the invention

[0010] Problems to be solved by the invention

[0011] In a conventional heat treatment furnace for brazing, a storage container loaded with a ceramic metal substrate is transported by a metal mesh belt. Since the metal mesh belt is transported while sliding on a base, wear powder generated by the wear between the metal mesh belt and the base adheres to the ceramic metal substrate, thereby reducing the yield of the ceramic metal substrate.

[0012] In addition, the weight of the ceramic metal substrate and the storage container causes tension in the metal mesh belt, so the metal mesh belt needs to be replaced due to stretching and deformation, which increases the equipment cost of the heat treatment furnace.

[0013] Furthermore, the storage container is arranged with margins in the front, back, left, and right directions when the ceramic metal substrate is arranged, so the size is larger than the ceramic metal substrate. Therefore, when the ceramic metal substrate is repeatedly arranged in the approximate center of the bottom surface of the storage container and heat treatment is performed, if the storage container is made of metal, the bottom plate is easily deformed to convex downward. The storage container with the bottom plate deformed to convex downward is easy to rotate around the convex part, causing deviation during transportation, which becomes a cause of stopping during transportation in the furnace.

[0014] Therefore, it is required that a storage container made of metal such as stainless steel containing a ceramic metal substrate can be transported in a heat treatment furnace substantially without load relative to the storage container. Thus, the equipment cost of the heat treatment furnace device can be reduced, the yield rate of the ceramic metal substrate can be increased, and the production efficiency of the ceramic metal substrate can be improved.

[0015] Means for solving problems

[0016] The heat treatment furnace device according to the embodiment is configured to heat a ceramic metal substrate storage container (hereinafter referred to as "storage container") containing a plurality of ceramic metal substrates and made of stainless steel to heat the plurality of ceramic metal substrates at a temperature of 600° C. to less than 950° C. when brazing a metal plate to a ceramic substrate. The heat treatment furnace device includes a guide rail for transporting the storage container provided in the furnace body, and a conveying unit for transporting the storage container placed on the guide rail in a predetermined conveying direction along the guide rail while moving the storage container in a direction perpendicular to the guide rail.

[0017] Furthermore, in the heat treatment furnace apparatus, the transport unit includes a first moving unit that moves the storage container along the transport direction, and a second moving unit that moves the storage container and the first moving unit integrally in a vertical direction.

[0018] Furthermore, in the heat treatment furnace device, the first moving unit comprises: a container support plate for supporting the storage container, a support member supporting the container support plate, and a first moving mechanism for moving the support member along the conveying direction. In addition, the second moving unit comprises: a support plate for supporting the support member so as to be movable along the conveying direction, and a second moving mechanism for raising and lowering the support plate.

[0019] Moreover, in this heat treatment furnace device, there is a guide rail portion having a space formed along the conveying direction and penetrating the central portion of the guide rail portion relative to the vertical direction, the upper space of the guide rail portion is constituted as the conveying space of the storage container, and the upper surface of the guide rail portion is constituted as the loading surface of the storage container.

[0020] In this heat treatment furnace apparatus, the container support plate is supported by the support member in a state where the upper surface of the container support plate is inserted into the space of the rail portion so as to be parallel to the container storage mounting surface of the rail portion.

[0021] Moreover, in the heat treatment furnace device, the guide rail portion includes an entrance-side chain belt mechanism, the entrance-side chain belt mechanism includes a closed-loop entrance-side chain belt portion and a driving portion for circulating the entrance-side chain belt portion, the entrance-side chain belt mechanism is configured so that the downstream end of the conveying surface of the entrance-side chain belt portion is connected to the upstream end of the storage container loading surface of the guide rail portion, and the conveying surface of the first chain belt portion is along the storage container loading surface. In addition, the guide rail portion includes an exit-side chain belt mechanism, the exit-side chain belt mechanism includes a closed-loop exit-side chain belt portion and a driving portion for circulating the exit-side chain belt portion, the exit-side chain belt mechanism is configured so that the upstream end of the conveying surface of the exit-side chain belt portion is connected to the downstream end of the storage container loading surface of the guide rail portion, and the conveying surface of the exit-side chain belt portion is along the storage container loading surface. Furthermore, the container support plate is configured such that when the height of the upper surface of the container support plate coincides with the height of the container storage placement surface of the guide rail portion, the upstream end of the upper surface of the container support plate overlaps with the downstream end of the conveying surface of the inlet-side chain belt portion. In addition, the container support plate is configured such that the downstream end of the upper surface of the container support plate overlaps with the upstream end of the conveying surface of the outlet-side chain belt portion. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a top view showing the heat treatment furnace apparatus according to the embodiment.

[0023] Figure 2 is Figure 1 The heat treatment furnace device shown in the figure shows Figure 3 FIG. 2 is a diagram of the cross section viewed along the II-II line.

[0024] Figure 3 is Figure 1 The heat treatment furnace device shown in the figure shows Figure 2 FIG. 3 is a diagram of the cross section viewed along the line III-III.

[0025] Figure 4 It is a diagram showing a storage container constituting the heat treatment furnace apparatus according to the embodiment.

[0026] Figure 5 The storage container is moved to the container placement surface and is Figure 2 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0027] Figure 6 The storage container is moved to the container placement surface and is Figure 3 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0028] Figure 7 The storage container is supported on the container placement surface and the container support surface, and is Figure 2 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0029] Figure 8 The storage container is supported on the container placement surface and the container support surface, and is Figure 3 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0030] Fig. 9 The storage container is supported only on the container support surface, and is Figure 2 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0031] Fig.10 The storage container is supported only on the container support surface, and is Figure 3 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0032] Fig.11 is from Fig.10 The state shown in FIG. 1 is a state in which the storage container and the container support plate are moved integrally along the conveying direction, and is Figure 3 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0033] Fig.12 is from Fig.11 In the state shown, the storage container and the container support plate are integrally lowered and the storage container is supported on the container mounting surface of the guide rail portion and the container support surface of the container support plate, and is Figure 3 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0034] Fig.13 is from Fig.10 In the state shown, the storage container and the container support plate are lowered integrally, and the height of the container support surface of the container support plate is lowered than the height of the container mounting surface of the guide rail part, and Figure 3 The cross section of the heat treatment furnace device shown corresponds to a cross-sectional view.

[0035] Fig.14 It is a cross-sectional view showing a furnace container conveying unit of a heat treatment furnace apparatus according to a second embodiment.

[0036] Fig.15 This is a diagram showing a conventional belt-type heat treatment furnace. DETAILED DESCRIPTION

[0037] The heat treatment furnace device according to the embodiment is configured to heat a storage container made of stainless steel that stores a plurality of ceramic metal substrates when brazing a metal plate to a ceramic substrate, and perform heat treatment on the plurality of ceramic metal substrates at a temperature of 600° C. or higher and lower than 950° C. The heat treatment furnace device includes a guide rail portion that transports the storage container provided in the furnace body, and a conveying unit that transports the storage container placed on the guide rail portion in a predetermined conveying direction along the guide rail portion while moving the storage container in a direction perpendicular to the guide rail portion.

[0038] Furthermore, in the heat treatment furnace apparatus, the transport unit includes a first moving unit that moves the storage container along the transport direction, and a second moving unit that moves the storage container and the first moving unit integrally in a vertical direction.

[0039] Furthermore, in the heat treatment furnace device, the first moving unit includes a container support plate for supporting the storage container, a support member supporting the container support plate, and a first moving mechanism for moving the support member along the conveying direction. In addition, the second moving unit includes a support plate for supporting the support member so as to be movable along the conveying direction, and a second moving mechanism for raising and lowering the support plate.

[0040] Moreover, in this heat treatment furnace device, there is a guide rail portion having a space formed along the conveying direction and penetrating the central portion of the guide rail portion relative to the vertical direction, the upper space of the guide rail portion constitutes the conveying space of the storage container, and the upper surface of the guide rail portion constitutes the loading surface of the storage container.

[0041] In this heat treatment furnace apparatus, the container support plate is supported by the support member in a state where the upper surface of the container support plate is inserted into the space of the rail portion so as to be parallel to the container storage mounting surface of the rail portion.

[0042] In addition, in the heat treatment furnace device, the guide rail portion includes an entrance side chain belt mechanism, the entrance side chain belt mechanism has a closed loop entrance side chain belt portion and a driving portion that circulates the entrance side chain belt portion, and the entrance side chain belt mechanism is configured so that the downstream end of the conveying surface of the entrance side chain belt portion is connected to the upstream end of the storage container loading surface of the guide rail portion, and the conveying surface of the entrance side chain belt portion is along the storage container loading surface. In addition, the guide rail portion includes an exit side chain belt mechanism, the exit side chain belt mechanism has a closed loop exit side chain belt portion and a driving portion that circulates the exit side chain belt portion, and the exit side chain belt mechanism is configured so that the upstream end of the conveying surface of the exit side chain belt portion is connected to the downstream end of the storage container loading surface of the guide rail portion, and the conveying surface of the exit side chain belt portion is along the storage container loading surface. Furthermore, the container support plate is configured such that when the height of the upper surface of the container support plate coincides with the height of the container storage placement surface of the guide rail portion, the upstream end of the upper surface of the container support plate overlaps with the downstream end of the conveying surface of the inlet-side chain belt portion. In addition, the container support plate is configured such that the downstream end of the upper surface of the container support plate overlaps with the upstream end of the conveying surface of the outlet-side chain belt portion.

[0043] In the heat treatment furnace device, it is preferred that the inlet-side chain belt section and the outlet-side chain belt section have a space that passes through the central part in the vertical direction. In the case of having such a space, the following mechanism is provided: an inlet-side lifting platform connected to an inlet-side lifting cylinder is provided in the space of the inlet-side chain belt section, and is at the same height as the carrying-in section of the inlet-side carrying-in mechanism located at a position higher than the upper surface of the inlet-side chain belt section, and the storage container is transported by the carrying-in section, and the inlet-side lifting cylinder is lowered, thereby arranging the storage container on the inlet-side chain belt section. Moreover, in the case of having such a space, it is configured such that an outlet-side lifting platform connected to an outlet-side lifting cylinder is provided in the space of the outlet-side chain belt section, and the outlet-side lifting platform located at a position lower than the upper surface of the outlet-side chain belt section is raised by the outlet-side lifting cylinder, thereby the storage container downstream of the outlet-side chain belt section becomes at the same height as the discharge section of the outlet-side carrying-out mechanism, and the storage container is transported to the carrying-out section.

[0044] Furthermore, in the heat treatment furnace apparatus, it is preferable that the conveying means is a means for moving the storage containers so as to draw a square pulse-shaped trajectory while placing the storage containers on the rail portion at a desired interval.

[0045] In addition, the heat treatment furnace device is preferably configured such that an inert gas atmosphere is provided in the furnace main body, and the inert gas flows into the furnace main body from the outside and flows out to the outside of the furnace main body.

[0046] Moreover, in the heat treatment furnace device, it is preferably configured that the second moving mechanism has a link mechanism for raising and lowering the support plate in a state where its support surface is parallel to the conveying direction, and the support plate is raised and lowered via the link mechanism by moving the support plate back and forth parallel to the conveying direction.

[0047] In addition, in the heat treatment furnace device, it is preferred that the second moving mechanism comprises: a moving mechanism support plate, which is arranged to be movable along the conveying direction relative to the furnace body; a plurality of convex portions, which are arranged on the base surface of the moving mechanism at predetermined intervals along the conveying direction, and one end portion on the upstream side protrudes upward, and each has an inclined surface protruding from the other end portion on the downstream side of the base surface and inclined toward one end portion and upward; and a plurality of rollers, which are rotatably connected to the moving mechanism support plate, and reciprocate while rotating on the inclined surface of the convex portion on the upper surface of the base surface. Furthermore, in the heat treatment furnace device, it is preferred that the moving mechanism support plate is reciprocated parallel to the conveying direction, thereby reciprocating along the inclined surface of the roller, thereby raising and lowering the moving mechanism support plate integrally with the roller in a state where its supporting surface remains parallel to the conveying direction.

[0048] In addition, in the heat treatment furnace device, it is preferable that the heater is provided in a direction perpendicular to the outer side surface of the furnace body, and the position of the heater is at a height of the storage container when the storage container is located on the rail portion.

[0049] In addition, the heat treatment furnace apparatus preferably includes the storage container, wherein a hole is formed in a bottom surface portion of the storage container so as to include a central portion thereof.

[0050] According to the heat treatment furnace device as described above, in the furnace body, the storage container containing a plurality of ceramic metal substrates can be transported in a substantially unloaded state without sliding on the guide rail portion, and the storage container in the unloaded transported state can be heat treated. Therefore, according to the heat treatment furnace device, friction and wear between the storage container and the container mounting surface of the guide rail portion can be avoided. As a result, it is no longer necessary to replace the worn metal mesh belt and guide rail portion generated in the previous heat treatment furnace, and the equipment cost of the heat treatment furnace device can be significantly reduced.

[0051] In addition, according to the heat treatment furnace device as described above, no friction or wear is generated between the storage container and the container mounting surface of the guide rail portion, thereby being able to avoid the wear powder generated by the wear of the storage container and the guide rail portion from adhering to the ceramic metal substrate, thereby being able to maintain a high yield of the ceramic metal substrate.

[0052] Furthermore, according to the heat treatment furnace apparatus as described above, the storage container can be transported in a substantially no-load state, so there is no need to replace the belt due to stretching as in the conventional belt method, and maintenance costs can be reduced.

[0053] The heat treatment furnace device described above will be described in detail with reference to the drawings. In this embodiment, a brazing furnace device is used as an example of a heat treatment furnace device that performs a heat treatment on a ceramic metal substrate during brazing bonding.

[0054] Figure 1 This is a top view of the heat treatment furnace device according to the embodiment as viewed from above. Figure 2 is Figure 1 The heat treatment furnace device shown in FIG. Figure 3 FIG. 2 is a diagram of the cross section viewed along the II-II line. Figure 3 is Figure 1 The heat treatment furnace device shown in FIG. Figure 2 FIG. 3 is a diagram of the cross section viewed along the line III-III. Figure 4 It is composed Figure 1 A top view and a side view of a storage container of a heat treatment furnace device are shown. Figure 1 The heat treatment furnace device 1 involved in the embodiment is shown. The heat treatment furnace device 1 includes an outer wall 4, an inlet side carrying-in mechanism 15, and an outlet side carrying-out mechanism 16. The outer wall 4 includes a walking beam heating furnace. The following points can be listed as the advantages of the walking beam heating furnace: since the transportation is based on a moving hearth, there is no friction between the material and the hearth like a push rod furnace and no sliding scratches are generated; there is no heating mechanism at the bottom of the furnace, so the structure is simpler than that of a walking beam furnace. In addition, the inlet side carrying-in mechanism 15 includes opening and closing mechanisms 56, 57, and a push rod 58. The outlet side carrying-out mechanism 16 includes opening and closing mechanisms 66, 67, and a push rod 68.

[0055] exist Figures 1 to 4 In the figure, the heat treatment furnace device 1 is a device in which a plurality of ceramic metal substrates 3 before joining are arranged in a storage container 2 of stainless steel or the like conveyed from a printing drying and metal plate setting process (not shown). For example, the heat treatment furnace device 1 is a device for heat treating a ceramic metal substrate 3 in which an active metal brazing material containing silver or copper is printed and dried on the surface and back of a ceramic substrate such as silicon nitride, and a metal plate such as a copper plate is arranged on the surface and back. In addition, the storage container 2 may be a part of the structure of the heat treatment furnace device 1, or may be an external structure of the heat treatment furnace device 1. In addition, the ceramic metal substrate 3 is an external structure of the heat treatment furnace device 1.

[0056] like Figure 2As shown, the heat treatment furnace device 1 is composed of an outer wall 4, a heater 5 for heating the ceramic metal substrate 3, a furnace body 6, a guide rail 7, and a furnace container conveying unit 8 as a conveying unit. The furnace body 6 has an inert gas atmosphere. The guide rail 7 is installed in the furnace body 6 along a horizontal plane and is used to convey the storage container 2 of the ceramic metal substrate 3 in the furnace. The furnace container conveying unit 8 is provided in the furnace body 6 and is used to convey the storage container 2 containing the ceramic metal substrate 3 in the furnace body 6 while placing it on the guide rail 7 at a required interval along the conveying direction of the ceramic metal substrate 3, that is, the length direction of the guide rail 7. In addition, the furnace body 6 is provided on the inner side of the outer wall 4 in a manner covering the conveyed storage container 2. In addition, from the viewpoint of the heating efficiency of the ceramic metal substrate 3, the outer periphery of the furnace body 6 is preferably provided near the storage container 2. For example, the outer periphery of the furnace body 6 is preferably provided at a position closer to the inner side than the heater 5. The above-mentioned inert gas is configured to enter from a predetermined gas inlet in the furnace body 6 and be discharged from a predetermined gas outlet. The heat treatment environment of the heat treatment furnace apparatus 1 according to the present embodiment is not limited to an inert environment as long as no hindrance occurs during brazing, and may be a reducing environment such as hydrogen, air, or vacuum.

[0057] like Figure 3 As shown, the furnace body 6 includes: a furnace entrance portion 10 which serves as an entrance when the storage container 2 is moved into the furnace body 6, a furnace exit portion 11 which serves as an exit when the storage container 2 is moved out of the furnace body 6, a heating portion 12 connected to the furnace entrance portion 10, and a cooling portion 13 for cooling the ceramic metal substrate 3 in the storage container 2.

[0058] like Figure 2 As shown, a heater 5 is installed in the up-down direction on the outer wall side of the heating section 12 of the furnace body 6. The heater 5 heats the ceramic metal substrate 3 in the storage container 2 conveyed into the heating section 12 through the furnace inlet 10, thereby brazing the ceramic substrate and the metal plate constituting the ceramic metal substrate 3.

[0059] In order to improve the productivity of the ceramic metal substrate 3, a ceramic substrate with a larger area is used for the ceramic metal substrate 3. In addition, in order to set and join a metal plate with the same area as the ceramic substrate, it is necessary to uniformly heat the peripheral portion and the central portion of the ceramic metal substrate 3. Therefore, when the storage container 2 is placed on the container placement surface 7a, it is preferred that the heater 5 heats from the side. In addition, it is preferred that the heater 5 extends to the side of the guide rail portion 7 and heats from below the lower surface of the storage container 2.

[0060] The predetermined area of ​​the heating section 12 on the furnace entrance 10 side is configured as a preheating section for preheating the ceramic metal substrate 3, and the remaining area is configured as a joining area for joining the ceramic metal substrate 3. In the heat treatment of the brazing joint performed in the present embodiment, the heater 5 is heated so that the temperature of the preheating area is 400°C or more and less than 700°C, and the temperature of the joining area is 600°C or more and less than 950°C. At this time, the heat treatment temperature is appropriately selected according to the metal material forming the brazing layer, but the temperature difference between the preheating area and the joining area is 100°C or more, preferably in the range of 100°C or more and 200°C or less.

[0061] The cooling section 13 of the furnace body 6 is connected to the heating section 12 at its upstream end in the conveying direction (hereinafter referred to as the "upstream side"), and connected to the furnace outlet 11 at its downstream end (hereinafter referred to as the "downstream side"). The cooling section 13 cools the ceramic metal substrate 3 in the storage container 2 heated in the heating section 12.

[0062] Figure 1 The entrance side carrying mechanism 15 of the heat treatment furnace device 1 shown is to carry the storage container 2 having a plurality of ceramic metal substrates 3 conveyed via a conveyor (not shown) into the furnace entrance portion 10 and place it on the upstream end of the entrance side chain belt mechanism 23 of the guide rail portion 7. The exit side carrying mechanism 16 carries the storage container 2 located at the downstream end of the guide rail portion 7 out of the furnace exit portion 11 and places it on a conveyor (not shown) for the next process.

[0063] exist Figure 3 In the guide rail portion 7, an inlet-side chain belt mechanism 23 and an outlet-side chain belt mechanism 30 are provided. The inlet-side chain belt mechanism 23 has a closed-loop inlet-side chain belt portion 20 and a driving portion 21 such as a roller that drives the inlet-side chain belt portion 20 in a circular motion. The inlet-side chain belt mechanism 23 is configured so that the upper surface of the inlet-side chain belt portion 20, i.e., the inlet-side conveying surface 20a, is along a horizontal plane. In addition, the outlet-side chain belt mechanism 30 has a closed-loop outlet-side chain belt portion 28 and a driving portion 29 such as a roller that drives the outlet-side chain belt portion 28 in a circular motion. The outlet-side chain belt mechanism 30 is configured so that the upper surface of the outlet-side chain belt portion 28, i.e., the outlet-side conveying surface 28a, is along a horizontal plane.

[0064] An entry-side lifting platform 90 connected to an entry-side lifting cylinder (not shown) is provided in a space on the opposite side of the entry-side chain belt section 20 from the driving section 21. The upper surface 90a of the entry-side lifting platform moves in a direction (up and down direction) perpendicular to the entry-side conveying surface 20a from between the plurality of entry-side chain belt sections 20 via the entry-side lifting cylinder. In addition, an exit-side lifting platform 91 connected to an exit-side lifting cylinder (not shown) is provided in a space on the opposite side of the exit-side chain belt section 28 from the driving section 29. The upper surface 91a of the exit-side lifting platform moves in a direction perpendicular to the exit-side conveying surface 28a from between the plurality of exit-side chain belt sections 28 via the exit-side lifting cylinder.

[0065] The downstream end of the inlet conveying surface 20a is disposed near the upstream end of the heating section 12 and at a predetermined position upstream of the upstream end thereof. In addition, the furnace body 6 is provided with a first photoelectric sensor (not shown) for detecting whether the storage container 2 is present at the downstream end of the inlet conveying surface 20a.

[0066] exist Figure 2 as well as Figure 3 In the embodiment, the guide rail portion 7 has an upstream end connected to the downstream end of the inlet-side conveying surface 20a, and is provided with the following guide rail portion 7: the container mounting surface 7a thereof is arranged relative to the furnace body 6 in a manner along the inlet-side conveying surface 20a. The guide rail portion 7 is arranged so that its downstream front end reaches a position corresponding to the downstream end of the cooling portion 13 in the furnace body 6.

[0067] The guide rail section 7 is provided with an exit-side chain belt mechanism 30, in which the upstream end of the exit-side conveying surface 28a is connected to the downstream end of the guide rail section 7, and the exit-side conveying surface 28a is arranged along the container placement surface 7a. In addition, a second photoelectric sensor (not shown) for detecting whether the storage container 2 is present at the upstream end of the exit-side conveying surface 28a is provided on the furnace body 6.

[0068] The storage container 2 is placed on the bottom surface 2c (at the Figure 4 A plurality of ceramic metal substrates 3 are placed on the container 2 (shown in the figure). The storage container 2 can be made of any material as long as it is heat-resistant, inexpensive and easy to process, and is preferably made of stainless steel.

[0069] Figure 4(A) A perspective view, (B) A bottom view, and (C) A side view of a storage container 2 are shown. As shown in the bottom view, a hole portion 2d is formed in the bottom portion 2c of the storage container 2 so as to include the central portion C of the bottom portion 2c. The storage container 2 is designed to be larger than the ceramic metal substrate 3 in order to arrange the ceramic metal substrate 3 with margins in the front, back, left, and right directions. Therefore, when the ceramic metal substrate 3 is repeatedly arranged in the central portion C of the bottom portion 2c and heat-treated, if the storage container 2 is made of metal, the bottom portion 2c is easily deformed to bulge downward.

[0070] Compared with the conventional belt furnace, the heat treatment furnace device 1 of the present embodiment can make the storage container 2 storing the ceramic metal substrate 3 heavier. However, when the storage container 2 is stored heavier, the deformation of the bottom surface 2c becomes larger. Therefore, by providing the hole portion 2d in a manner including the central portion C of the bottom surface 2c, it is possible to prevent the bottom surface 2c from deforming convexly. Moreover, by providing the hole portion 2d in the bottom surface 2c, even if the bottom surface 2c is deformed in a convex shape, the deformation will not be concentrated at one point due to the presence of the hole portion 2d, and rotation around the convex portion can be prevented.

[0071] Figure 4 The hole portion 2d shown is circular, but is not limited to this case. For example, the hole portion 2d only needs to have no corners, and may be an ellipse, or may be a rectangle with corners in an R shape. In this case, the diameter of the hole portion 2d is preferably greater than 15% and less than 70% of the length of the shorter side of the bottom portion 2c. In the case where the bottom portion 2c of the storage container 2 is in a cubic shape, it becomes the ratio of the length of the opening to the corresponding side. When the ratio is less than 15%, a sufficient effect for preventing deformation cannot be obtained. In addition, when the ratio is greater than 70%, the overall strength of the storage container 2 is reduced.

[0072] In addition, the storage container 2 of the heat treatment furnace device 1 of the present embodiment is not directly transported from the entrance side carrying-in mechanism 15 to the entrance side conveying surface 20a, but is transported to the entrance side conveying surface 20a after being moved to the entrance side lifting platform 90. Therefore, even if the storage container 2 is provided with a hole portion 2d, the hole portion 2d can be moved without being hooked on the chain belt. Similarly, even when the storage container 2 is moved from the exit side conveying surface 28a to the exit side carrying-out mechanism 16 via the exit side lifting platform 91, the hole portion 2d can be moved without being hooked.

[0073] exist Figure 2 In the embodiment, the guide rail portion 7 has a substantially rectangular cross section perpendicular to the conveying direction, and a gap 36 is formed along the conveying direction, which is a gap penetrating the center of the rectangle in a direction perpendicular to the conveying direction.

[0074] The upper surface of the rail portion 7 is arranged as a container placement surface 7 a so as to be parallel to and connected to the inlet conveying surface 20 a of the inlet chain mechanism 23 and the outlet conveying surface 28 a of the outlet chain mechanism 30 .

[0075] exist Figure 2 as well as Figure 3 In the embodiment, the in-furnace container conveying unit 8 includes a first moving mechanism 40, a second moving mechanism 41, and a heat-resistant plate (hereinafter referred to as a "container support plate") 42 for supporting the storage container. The first moving mechanism 40 moves the storage container 2 in the vertical direction (up and down direction) relative to the base 8a of the in-furnace container conveying unit 8. The second moving mechanism 41 moves in the vertical direction according to the vertical movement of the first moving mechanism 40, and reciprocates the storage container 2 along the conveying direction. The container support plate 42 is supported in the vertical direction by the second moving mechanism 41.

[0076] exist Figure 2 In the figure, the container support plate 42 is inserted into the gap 36 of the guide rail portion 7 along the conveying direction with its upper surface (hereinafter referred to as "container support surface") 42a parallel to the container loading surface 7a of the guide rail portion 7, and is supported by the second moving mechanism 41.

[0077] exist Figure 3 In the embodiment, the first moving mechanism 40 is a moving mechanism support plate 45 having a second moving mechanism support surface (hereinafter referred to as "moving mechanism support surface") parallel to the conveying direction, which is mounted on the base portion 8a. The first moving mechanism 40 includes a link mechanism 46 and a first hydraulic cylinder 47. The link mechanism 46 raises and lowers the moving mechanism support plate 45 in a state where its moving mechanism support surface 45a is parallel to the conveying direction. The first hydraulic cylinder 47 reciprocates the moving mechanism support plate 45 in parallel to the conveying direction by the reciprocating movement of the piston 47a.

[0078] exist Figure 3 In the embodiment, the second moving mechanism 41 includes a support member 50 for supporting the container support plate, and a second hydraulic cylinder 51. The support member 50 is mounted on the moving mechanism support surface 45a of the moving mechanism support plate 45 in the first moving mechanism 40 via a plurality of rollers 49 so as to be reciprocable along the conveying direction. The second hydraulic cylinder 51 reciprocates the support member 50 in parallel with the conveying direction by the reciprocating movement of the piston 51a.

[0079] Furthermore, a limit switch (LS) 53 is provided on each of the first hydraulic cylinder 47 and the second hydraulic cylinder 51. The limit switch 53 detects the piston stroke of the first hydraulic cylinder 47 and the second hydraulic cylinder 51, thereby being able to detect the moving position of the container support plate 42 in the vertical direction and the moving position in the conveying direction based on the driving of the first moving mechanism 40 and the second moving mechanism 41, respectively.

[0080] Moreover, the container support plate 42 is such that, when the height of the container support surface 42a is consistent with the height of the container loading surface 7a of the guide rail portion 7, the upstream end of the container support surface 42a overlaps with the downstream end of the inlet-side conveying surface 20a, and the downstream end of the container support surface 42a overlaps with the upstream end of the outlet-side conveying surface 28a.

[0081] exist Figure 1 In the embodiment, the inlet side carrying-in mechanism 15 is formed to carry the storage container 2 conveyed by the conveying rail or the like into the heat treatment furnace, and is configured to communicate with the inlet side chain belt portion 20. At this time, in order to prevent the atmosphere in the heat treatment furnace from leaking to the outside, it is preferable to provide an opening and closing mechanism 56, 57 such as a gate. The opening and closing mechanism 56, 57 is opened and closed by a driving cylinder. In addition, the outlet side carrying-out mechanism 16 is also preferably equipped with a conveying rail, an opening and closing mechanism 66, 67, a driving cylinder, etc., similar to the inlet side mechanism.

[0082] Next, the overall operation of the heat treatment furnace apparatus 1 according to the embodiment will be described with a focus on the conveyance operation of the storage container 2 .

[0083] First, the operation of carrying the storage container 2 into the heat treatment furnace apparatus 1 will be described.

[0084] The plurality of storage containers 2 storing the plurality of ceramic metal substrates 3 in multiple layers are sequentially transported to the entrance side carrying mechanism 15 of the heat treatment furnace device 1 via the conveyor rail by the operation of the conveyor. At this time, the opening and closing mechanism 57 of the entrance side carrying mechanism 15 is closed, and the opening and closing mechanism 56 is opened.

[0085] Then, when the front storage container 2 enters the entrance side carrying-in mechanism 15, the opening and closing mechanism 56 is closed, and the opening and closing mechanism 57 is opened after the entrance side carrying-in mechanism 15 is replaced with nitrogen, for example. As a result, the atmosphere in the heat treatment furnace device 1 will not leak to the outside. Next, the storage container 2 in the entrance side carrying-in mechanism 15 is moved to the entrance side lifting platform 90 of the furnace entrance 10 by the push rod 58. At this time, the entrance side lifting platform 90 rises, and the upper surface 90a of the entrance side lifting platform is located at a position higher than the entrance side conveying surface 20a (this state is not shown in the figure). The push rod 58 returns and the opening and closing mechanism 57 is closed. Next, the entrance side lifting platform 90 descends, and in the process of the upper surface 90a of the entrance side lifting platform becoming a position lower than the entrance side conveying surface 20a, the storage container 2 placed on the upper surface 90a of the entrance side lifting platform is placed on the upstream end of the entrance side conveying surface 20a.

[0086] Next, the storage container 2 placed on the upstream end of the entrance conveying surface 20a is moved to the downstream end of the entrance conveying surface 20a by circulating the entrance chain belt section 20 via the driving section 21. That is, the storage container 2 is moved to the upstream end of the container placement surface 7a of the overlapping guide rail section 7.

[0087] Next, when the storage container 2 is transported and moves from the detection position of the first photoelectric sensor (not shown), that is, the downstream end of the inlet-side transport surface 20a, by the operation of the in-furnace container transport unit 8, the first photoelectric sensor sends a container carrying-in instruction signal. As a result, the control operation is executed, and the storage container 2 is carried into the heat treatment furnace device 1. Hereinafter, each time the container carrying-in instruction signal is sent from the first photoelectric sensor, a plurality of storage containers 2 are sequentially carried into the heat treatment furnace device 1.

[0088] Next, the conveyance operation of the storage container 2 in the heat treatment furnace apparatus 1 will be described.

[0089] In a state where the storage container 2a in the storage container 2 has been moved onto the container placement surface 7a of the rail portion 7 by the container carrying-in operation process, Figure 2 as well as Figure 3 The corresponding cross-sectional view of the heat treatment furnace device 1 is as follows Figure 5 as well as Figure 6 shown.

[0090] exist Figure 5 as well as Figure 6 When the storage container 2a is moved onto the container placement surface 7a, the moving mechanism support plate 45 of the first moving mechanism 40 is lowered to a predetermined position, and the container support surface 42a is arranged at a position lower than the container placement surface 7a. The height of the container support surface 42a at this time is referred to as H1.

[0091] Therefore, all storage containers 2 including storage container 2a are placed on container placement surface 7a of rail portion 7. At this time, the reference numeral of the storage container located on the most downstream side is denoted by "2b".

[0092] In the pre-transport state of the storage container 2, the first hydraulic cylinder 47 is driven to move the piston 47a to the opposite side (upstream side) of the transport direction. As a result, the moving mechanism support plate 45 moves the link mechanism 46 to raise the moving mechanism support surface 45a in parallel with the transport direction.

[0093] In response to the rise of the moving mechanism support plate 45 , the second moving mechanism 41 rises integrally with the moving mechanism support plate 45 , and the container support plate 42 supported by the support member 50 of the second moving mechanism 41 also rises integrally.

[0094] When the height of the container support surface 42a of the container support plate 42 is equal to the height of the container placement surface 7a, the storage container 2 placed on the container placement surface 7a is supported by the container support surface 42a of the container support plate 42. The height of the container support surface 42a at this time is H2 (in Fig. 9 (see figure in the figure).

[0095] The storage container 2a is supported by the container mounting surface 7a of the rail portion 7 and the container support surface 42a of the container support plate 42. Figure 2 as well as Figure 3 The corresponding cross-sectional view of the heat treatment furnace device 1 is as follows Figure 7 as well as Figure 8 shown.

[0096] exist Figure 7 as well as Figure 8 In the state where the storage container 2 is supported by the container mounting surface 7a of the guide rail portion 7 and the container support surface 42a of the container support plate 42, the first hydraulic cylinder 47 is driven to move the piston 47a to the opposite side of the conveying direction and further raise the moving mechanism support plate 45.

[0097] As the moving mechanism support plate 45 rises, the container support plate 42 also rises integrally, and the height of the container support surface 42a of the container support plate 42 rises beyond the height of the container mounting surface 7a of the rail portion 7. All storage containers 2 mounted on the container mounting surface 7a are separated from the container mounting surface 7a thereof and supported only by the container support surface 42a of the container support plate 42.

[0098] When it is detected that the storage container 2 leaves the container loading surface 7a and the container support surface 42a rises to a specified position (height H3) based on the piston stroke of the first hydraulic cylinder 47 detected by the limit switch, the drive of the first hydraulic cylinder 47 is stopped, and the rise of the container support plate 42 and the storage container 2 is stopped.

[0099] The storage container 2a is separated from the container mounting surface 7a of the rail portion 7 by the rise of the container support plate 42 and is supported only by the container support surface 42a of the container support plate 42. Figure 2 as well as Figure 3 The corresponding cross-sectional view of the heat treatment furnace device 1 is as follows Fig. 9 as well as Fig.10 shown.

[0100] exist Fig. 9 as well as Fig.10In the embodiment, in response to the driving of the first moving mechanism 40, the container support surface 42a rises a predetermined distance (S1+S2) from the height H1 to H3, and the storage container 2 placed on the container placement surface 7a (height H2) of the guide rail 7 is transported upward by a predetermined distance (S2). In addition, the trajectory of the storage container 2a at this time is indicated by arrow r1 (at Fig.10 (in the figure).

[0101] exist Fig. 9 as well as Fig.10 In the state where the storage container 2a is supported only by the container support surface 42a through the container support plate 42 and conveyed upward, the second hydraulic cylinder 51 is driven to move the piston 51a in the conveying direction by a predetermined stroke, so that the support member 50 moves along the conveying direction on the moving mechanism support surface 45a via the roller 49. The lifting amount at this time is referred to as S3.

[0102] exist Fig.11 In the embodiment, the container support plate 42 moves integrally with the support member 50 along the conveying direction in response to the movement of the support member 50 along the conveying direction, and the storage container 2 supported only by the container support surface 42a of the container support plate 42 moves integrally with the container support plate 42 along the conveying direction.

[0103] In response to the driving of the second moving mechanism 41, the container support plate 42 moves a predetermined distance S3 along the conveying direction, and all the storage containers 2 supported by the container support surface 42a of the container support plate 42 are conveyed a predetermined distance S3 along the conveying direction. The trajectory of the storage container 2a at this time is indicated by arrow r2 (at Fig.11 (in the figure).

[0104] exist Fig.11 In the state where the storage container 2 is transported to the downstream side in the transport direction by the container support plate 42, the first hydraulic cylinder 47 is driven to move the piston 47a in the transport direction. As a result, the moving mechanism support plate 45 is lowered by the action of the link mechanism 46 while the moving mechanism support surface 45a is parallel to the transport direction.

[0105] In response to the descent of the moving mechanism support plate 45 , the second moving mechanism 41 is lowered integrally with the moving mechanism support plate 45 , and the container support plate 42 supported by the support member 50 of the second moving mechanism 41 is also lowered.

[0106] exist Fig.12 When the height of the container support surface 42a is equal to the height H2 of the container mounting surface 7a of the guide rail portion 7 by moving downwardly of the container support plate 42 (in Fig. 9), the storage container 2 supported only by the container support surface 42a of the container support plate 42 is placed on the container placement surface 7a of the rail portion 7. The trajectory of the storage container 2a at this time is indicated by an arrow r3.

[0107] exist Figure 6 as well as Fig.12 In the embodiment, the storage container 2 placed on the container placement surface 7a of the guide rail portion 7 is conveyed along the conveying direction by a square pulse-shaped trajectory (at a distance S3) due to the movement of the container support plate 42 driven by the first moving mechanism 40 and the second moving mechanism 41. Fig.11 ), and is placed again on the container placement surface 7a of the rail portion 7. At this time, the trajectory of the storage container 2a becomes the order of arrow r1, arrow r2, and arrow r3.

[0108] In this way, the plurality of storage containers 2 placed on the container placement surface 7a in the heat treatment furnace device 1 are heated while moving forward a predetermined distance S3 along the conveying direction in the furnace entrance 10 and the heating section 12 in the furnace body 6 each time, while drawing a square pulse-shaped trajectory.

[0109] Then, the plurality of heated and sintered storage containers 2 move toward the cooling unit 13 a predetermined distance S3 at a time along the conveying direction while drawing a square pulse-shaped trajectory, and are cooled while moving along the conveying direction in the cooling unit 13 .

[0110] exist Fig.12 in Figure 6 The storage container 2b located most downstream in the conveying direction before the in-furnace storage container conveying operation is placed on the downstream end of the container placing surface 7a, i.e., the upstream end of the outlet conveying surface 28a overlapped by the outlet chain mechanism. That is, the storage container 2b is placed at the detection position of the second photoelectric sensor.

[0111] In addition, in a state where the storage container 2a is supported by the container placement surface 7a and the container support surface 42a, the first hydraulic cylinder 47 is further driven to move the piston 47a in the conveyance direction to lower the moving mechanism support plate 45.

[0112] exist Fig.13 In the embodiment, by lowering the moving mechanism support plate 45, the container support plate 42 is also lowered integrally, and the container support surface 42a is lowered than the height of the container placement surface 7a and is located at a height H1 (at Figure 5 As a result, the container support plate 42 returns to the position shown in the figure. Figure 5 as well as Figure 6 The storage container 2 is shown in a state before transportation.

[0113] exist Fig.13 in Figure 6The storage container 2a located at the upstream end of the container placement surface 7a, that is, the downstream end of the inlet-side conveying surface 20a, is conveyed along the conveying direction by a predetermined distance S3 (at Fig.11 Therefore, the container carrying-in instruction signal is sent through the first photoelectric sensor. Then, the container carrying-in operation process and the container conveying operation process in the heat treatment furnace device 1 are sequentially performed.

[0114] Then, the moving distance S3 of the storage container 2 in the vertical direction based on the piston stroke of the first hydraulic cylinder 47 of the first moving mechanism 40 and the moving distance S3 of the storage container 2 relative to the conveying direction based on the piston stroke of the second hydraulic cylinder 51 of the second moving mechanism 41 can change the detection setting of the limit switch 53 arranged on each hydraulic cylinder, and change it according to each pulse-like conveying step.

[0115] Next, the operation of carrying out the storage container from the heat treatment furnace apparatus 1 will be described.

[0116] exist Fig.12 When the storage container 2b is placed at the detection position of the second photoelectric sensor, the second photoelectric sensor transmits a container carrying-out instruction signal.

[0117] exist Fig.13 In the process, according to the container unloading signal of the second photoelectric sensor, the exit side chain belt section 28 is circulated via the driving section 29, thereby causing the storage container 2b placed on the upstream end of the exit side conveying surface 28a to be removed from the upstream end of the exit side conveying surface 28a ( Fig.13 The storage container 2b shown in the dashed line is directed to the downstream end ( Fig.13 The storage container 2b shown in the solid line moves. At this time, the outlet side lifting platform 91 descends, and the upper surface 91a of the outlet side lifting platform is at a position lower than the outlet side conveying surface 28a.

[0118] Next, the outlet side lifting platform 91 rises and the storage container 2 placed on the upstream end rises. At this time, the opening and closing mechanism 66 is opened and the opening and closing mechanism 67 is closed. The storage container 2 is moved into the outlet side carrying-out mechanism 16 by the push rod 68. The push rod 68 returns and the opening and closing mechanism 66 is closed. Next, the opening and closing mechanism 67 is opened, and the storage container 2 is discharged and transported to the subsequent process.

[0119] When the storage container 2 is transported a predetermined distance S3 each time by the operation of the in-furnace container transport unit 8 to the detection position of the second photoelectric sensor, that is, the upstream end of the outlet-side transport surface 28a, the second photoelectric sensor sends a signal, and the storage container 2 is carried out of the heat treatment furnace device 1. Each time the second photoelectric sensor signal is sent, the storage container 2 is carried out of the heat treatment furnace device 1 and transported to the subsequent process.

[0120] According to the present embodiment, in the heating section 12 and the cooling section 13 of the furnace body 6, the storage container 2 containing a plurality of ceramic metal substrates 3 can be conveyed in a substantially unloaded state while drawing a pulse-shaped trajectory, and the storage container 2 in the unloaded conveyed state can be subjected to a heating and sintering process. Therefore, no friction is generated between the storage container 2 and the container mounting surface 7a of the guide rail section 7, and wear and deformation of the storage container 2 and the container mounting surface 7a of the guide rail section 7 can be eliminated. As a result, it is unnecessary to replace the worn belt and the guide rail section that are generated in the conventional heat treatment furnace, and the equipment cost of the heat treatment furnace device can be reduced.

[0121] In addition, according to the present embodiment, no friction or wear is generated between the storage container 2 and the container mounting surface 7a of the guide rail portion 7, and therefore the wear powder generated by the wear between the storage container 2 and the guide rail portion 7 will not adhere to the ceramic metal substrate 3, thereby reducing the defects of the ceramic metal substrate caused by the above-mentioned wear powder.

[0122] Furthermore, since the storage container 2 is transported in a substantially unloaded state, no load is applied as in the case of using a metal mesh belt. Fig.15 When the ceramic metal substrate 104 is subjected to heat treatment as shown in the prior art, assuming that a stainless steel storage container 103 with a length of 200 mm, a width of 200 mm, and a height of 50 mm is used, the weight of the storage container 103 storing the ceramic metal substrate 104 is about 1 kg. For 20 storage containers 10, when the metal mesh belt 100 is slid on the base 102 and simultaneously moved by the driving unit 101, a load of 20 kg is applied to the metal mesh belt.

[0123] On the other hand, in the heat treatment furnace apparatus 1 of the no-load conveying system used in the present embodiment, the pressing load on the storage container is substantially 0. In addition, the load applied to the push rod and the chain belt portion of the entrance and exit can be as small as 1 kg.

[0124] Therefore, it is possible to provide a heat treatment furnace apparatus 1 which is superior to a conventional belt furnace in terms of facility cost due to friction and wear and production efficiency of ceramic metal substrates.

[0125] In addition, in this embodiment, as a mechanism for raising and lowering the container support plate 42 in the in-furnace container conveying unit and reciprocating along the conveying direction, a Figure 2 as well as Figure 3 The in-furnace container transport unit shown in the above examples is not limited thereto.

[0126] Fig.14 It is a diagram of a furnace container conveying unit of a heat treatment furnace apparatus according to a second embodiment.

[0127] exist Fig.14 In the in-furnace container transport unit 80, a container support plate 42 for supporting the storage container 2 and a second moving mechanism 41 for supporting the container support plate 42 in the gap 36 in a vertical direction are provided. Figure 2 as well as Figure 3 The structure shown in the above is the same.

[0128] exist Fig.14 In the embodiment, the first moving mechanism 81 in the in-furnace container conveying unit 80 includes: a moving mechanism support plate 82 having a moving mechanism support surface 82a parallel to the conveying direction and movably provided along the base portion 8a of the in-furnace container conveying unit; and a plurality of protrusions 84 provided on the base portion 8a of the in-furnace container conveying unit in a manner protruding upward at predetermined intervals along the conveying direction. In addition, the second moving mechanism 41 includes a support member 50 and a plurality of rollers 49 that can freely reciprocate along the conveying direction on the moving mechanism support surface 82a of the moving mechanism support plate 82.

[0129] exist Fig.14 In the embodiment, the upstream end of each convex portion 84 in the conveying direction protrudes almost upward. Then, each convex portion 84 has an inclined surface 84a which protrudes upward from the downstream end of the conveying direction on the base portion 8a toward the upstream end. That is, the side surface of the convex portion 84 has a substantially right triangle shape.

[0130] In addition, the first moving mechanism 81 has a plurality of rollers 85 which are rotatably connected to the moving mechanism support plate 82 and rotate and reciprocate on the inclined surface 84a of the convex portion 84 formed on the base portion 8a. In response to the reciprocating movement of the rollers 85 along the inclined surface 84a, the moving mechanism support plate 82 and the rollers 85 become one and rise and fall in a state where the moving mechanism support surface 82a thereof is parallel to the conveying direction.

[0131] The first moving mechanism 81 includes a first hydraulic cylinder 87 for causing the moving mechanism support plate 82 to reciprocate in parallel with the conveying direction by the reciprocating movement of a piston, and a limit switch for detecting the stroke of the piston.

[0132] In this embodiment, the first hydraulic cylinder 87 is driven to move the piston to the side opposite to the conveying direction (upstream side), whereby the roller 85 of the moving mechanism support plate 82 rotates and moves toward the conveying direction on the inclined surface 84a of the convex portion 84 of the base portion 8a. The moving mechanism support plate 82 and the roller 85 are integrated and rise in a state where the moving mechanism support surface 82a thereof is parallel to the conveying direction.

[0133] In response to the rise of the moving mechanism support plate 82, the second moving mechanism 41 rises integrally with the moving mechanism support plate 82. As a result, the container support plate 42 (at Fig.13 etc.) also rise as a whole.

[0134] Then, in the state where the container support plate 42 and the support member 50 are raised, the second hydraulic cylinder 51 is operated to move the second moving mechanism 41 in the conveying direction. Next, the first hydraulic cylinder 87 is driven to move the piston in the conveying direction. As a result, the roller 85 of the moving mechanism support plate 82 rotates and moves in the conveying direction on the inclined surface 84a of the convex portion 84 of the base portion 8a. The moving mechanism support plate 82 is integrated with the roller 85 and descends in a state where its moving mechanism support surface 82a is parallel to the conveying direction.

[0135] In response to the descent of the moving mechanism support plate 82 , the second moving mechanism 41 and the moving mechanism support plate 82 are integrally descended, and the container support plate 42 supported by the support member 50 of the second moving mechanism 41 is also integrally descended.

[0136] Thus, when the in-furnace container conveying unit 80 of this modified example is used, the container support plate 42 can be raised or lowered by the operation of the first moving mechanism 81 , and substantially the same operation process as the in-furnace container conveying unit 8 having the first moving mechanism 40 can be performed.

[0137] exist Fig.14 In the embodiment, the base portion 8a is provided with a gas inlet 88. The same gas as the furnace body 6 can be introduced into the in-furnace container transport unit 80, and the gas outflow from the gap 36 can be prevented. The gas flow rate introduced into the furnace body 6 can be reduced, and the gap 36 can be expanded.

[0138] In the above, in the present embodiment, as a heat treatment furnace device, a brazing furnace device for heating the ceramic metal substrate 3 during brazing is used as an example for explanation, but the present embodiment is not limited thereto. For example, it can also be applied to a heat treatment furnace device for heat treatment other than brazing.

[0139] Moreover, although several embodiments of the present invention are illustrated, these embodiments are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, changes, etc. can be made without departing from the scope of the main purpose of the invention. These embodiments and their variations are included in the scope and main purpose of the invention, and are included in the invention described in the scope of the patent claim and its equivalent scope. In addition, the above-mentioned embodiments can be implemented in combination with each other.

Claims

1. A heat treatment furnace device, which heats a storage container made of stainless steel containing a plurality of ceramic metal substrates when brazing a metal plate to a ceramic substrate, and performs heat treatment on the plurality of ceramic metal substrates at a temperature of 600° C. or higher and lower than 950° C., wherein: The heat treatment furnace device includes a heater disposed outside the furnace body. The heat treatment furnace device comprises: a guide rail portion for conveying the storage container provided in the furnace body, and a conveying unit for conveying the storage container placed on the guide rail portion in a predetermined conveying direction along the guide rail portion while moving the storage container in a direction perpendicular to the guide rail portion. The conveying unit includes: a first moving unit that moves the storage container along the conveying direction; and a second moving unit that moves the storage container and the first moving unit in a vertical direction as a whole. The first moving unit includes: a container support plate for supporting the storage container, a support member supporting the container support plate, and a first moving mechanism for moving the support member along the conveying direction. The second moving unit includes: a support plate that supports the support member so as to be movable along the conveying direction; and a second moving mechanism that moves the support plate up and down. The heat treatment furnace device includes a guide rail portion having a space formed along a conveying direction and penetrating a central portion of the guide rail portion relative to a vertical direction, wherein an upper space of the guide rail portion is configured as a conveying space for the storage container, and an upper surface of the guide rail portion is configured as a loading surface for the storage container. The container support plate is supported by the support member in a state where the upper surface of the container support plate is inserted into the space of the guide rail portion in a manner parallel to the container storage placement surface of the guide rail portion. The guide rail portion is provided with an entrance side chain belt mechanism, the entrance side chain belt mechanism having a closed loop entrance side chain belt portion and a driving portion for circulating the entrance side chain belt portion, the entrance side chain belt mechanism being configured so that a downstream end portion of a conveying surface of the entrance side chain belt portion is connected to an upstream end portion of a storage container loading surface of the guide rail portion, and the conveying surface of the entrance side chain belt portion is along the storage container loading surface, The guide rail portion is provided with an exit-side chain belt mechanism, which has an exit-side chain belt portion in a closed loop and a driving portion for circulating the exit-side chain belt portion, wherein the exit-side chain belt mechanism is configured such that an upstream end portion of a conveying surface of the exit-side chain belt portion is connected to a downstream end portion of a storage container loading surface of the guide rail portion, and the conveying surface of the exit-side chain belt portion is along the storage container loading surface, The container support plate is configured such that when the height of the upper surface of the container support plate coincides with the height of the container storage mounting surface of the guide rail portion, the upstream end of the upper surface of the container support plate overlaps with the downstream end of the conveying surface of the inlet-side chain belt portion. The container support plate is configured such that a downstream end portion of an upper surface of the container support plate overlaps an upstream end portion of a conveying surface of the exit-side chain belt portion.

2. The heat treatment furnace device according to claim 1, characterized in that: The inlet-side link part and the outlet-side link part have a space penetrating through the central part in the vertical direction. The heat treatment furnace device comprises the following mechanism: an entry-side lifting platform connected to an entry-side lifting cylinder is provided in the space of the entry-side chain belt portion, and is at the same height as the carrying-in portion of the entry-side carrying-in mechanism located at a position higher than the upper surface of the entry-side chain belt portion; the storage container is transported by the carrying-in portion, and the entry-side lifting cylinder descends, thereby arranging the storage container on the entry-side chain belt portion; An exit side lifting platform connected to an exit side lifting cylinder is provided in the space of the exit side chain belt portion. The exit side lifting platform, which is located at a position lower than the upper surface of the exit side chain belt portion, is raised by the exit side lifting cylinder, whereby the storage container downstream of the exit side chain belt portion becomes at the same height as the discharge portion of the exit side carry-out mechanism, and the storage container is transported to the carry-out portion.

3. The heat treatment furnace device according to claim 1, characterized in that: The transport unit is a unit that moves the storage containers so as to draw a square pulse-shaped trajectory while placing the storage containers on the rail portion at a desired interval.

4. The heat treatment furnace device according to claim 1, characterized in that: The furnace body is configured to have an inert gas atmosphere, and the inert gas flows into the furnace body from the outside and flows out to the outside of the furnace body.

5. The heat treatment furnace device according to claim 1, characterized in that: The second moving mechanism includes a link mechanism for raising and lowering the support plate with its support surface parallel to the conveying direction, and the support plate is raised and lowered via the link mechanism by reciprocating the support plate in parallel to the conveying direction.

6. The heat treatment furnace device according to claim 1, characterized in that: The second moving mechanism is configured to include: A moving mechanism support plate is arranged relative to the furnace body so as to be movable along the conveying direction; A plurality of convex portions are arranged on the base portion of the second moving mechanism at predetermined intervals along the conveying direction, one end portion on the upstream side protrudes upward, and each has an inclined surface protruding from the other end portion on the downstream side of the base portion and inclined toward one end portion and upward; as well as A plurality of rollers are rotatably connected to the moving mechanism support plate, and reciprocate while rotating on the inclined surface of the convex portion of the upper surface of the base portion. The moving mechanism support plate is reciprocated parallel to the conveying direction, thereby being reciprocated along the inclined surface of the roller, thereby being raised and lowered integrally with the roller while its supporting surface is kept parallel to the conveying direction.

7. The heat treatment furnace device according to claim 1, characterized in that: The heater is provided in a direction perpendicular to the outer side surface of the furnace body, and is located at a height of the storage container when the storage container is located on the guide rail portion.

8. The heat treatment furnace device according to claim 1, characterized in that: The heat treatment furnace device includes the storage container. A hole is formed in the bottom surface of the storage container so as to include a central portion thereof.

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