Polishing solution circulating supply system for mask substrate polishing machine

Abstract

The invention relates to a polishing solution circulating supply system for a mask substrate polishing machine, which comprises a support assembly, and a supply mechanism for supplying a polishing solution is arranged on the support assembly. The supply mechanism comprises a barrel body used for storing polishing liquid, a polishing liquid output pipeline assembly, a water injection pipeline assembly, a water drainage pipeline assembly and a polishing liquid input pipeline assembly. The polishing device has the functions of polishing solution self-circulation and pipeline self-dredging.

Description

Technical Field

[0001] The invention relates to the field of liquid circulation equipment, in particular to a polishing liquid circulation supply system for a mask substrate polishing machine. Background Art

[0002] The mask controls the diffraction and reflection of the light path in the lithography exposure system and ultimately helps achieve nanometer-precision pattern transfer, which determines the minimum critical size of a chip. The mask is mainly composed of a mask substrate, a light shielding layer, and a protective mold, of which the substrate (mainly made of glass substrate, including quartz and soda) accounts for 90% of the direct raw material cost. The mask substrate is a photosensitive blank plate for making fine photomask patterns.

[0003] The accuracy and production quality of the mask substrate are crucial to the production of the mask plate. The accuracy of the mask substrate is mainly improved by polishing with a polishing machine. Polishing the mask substrate is a complex process that requires multiple steps, and each step requires the use of different polishing fluids. During the standby process of the polishing machine, the polishing fluid in the polishing machine is prone to clustering, which blocks the pipeline and affects the polishing accuracy of the mask substrate. Summary of the invention

[0004] The present application provides a polishing liquid circulation supply system for a mask substrate polishing machine, which has the functions of polishing liquid self-circulation and pipeline self-dredging.

[0005] The present application provides a polishing liquid circulation supply system for a mask substrate polishing machine, which adopts the following technical solution: A polishing liquid circulation supply system for a mask substrate polishing machine comprises a support assembly, on which a supply mechanism for supplying the polishing liquid is provided, wherein the supply mechanism comprises a barrel for storing the polishing liquid, a polishing liquid output pipeline assembly, and a water injection pipeline assembly; The polishing liquid output pipeline assembly is connected to the barrel body and the polishing machine; when the polishing machine is in working state, the polishing liquid output pipeline assembly is connected to both the barrel body and the polishing machine, and the polishing liquid output pipeline assembly outputs the polishing liquid in the barrel body to the polishing machine; when the polishing machine is in standby state, the polishing liquid output pipeline assembly is connected to the barrel body, and the polishing liquid output pipeline assembly is not connected to the polishing machine, and the polishing liquid in the circulating barrel body circulates between the barrel body and the polishing liquid output pipeline assembly; when the polishing machine is not in working state, the polishing liquid output pipeline assembly is not connected to both the barrel body and the polishing machine; The water injection pipeline assembly is connected to the barrel body and the polishing liquid output pipeline assembly; when the polishing machine is in a working state, the water injection pipeline assembly is connected to the barrel body, and the water injection pipeline assembly is not connected to the polishing liquid output pipeline assembly, and the barrel body water injection pipeline assembly injects deionized water into the barrel body; when the polishing machine is in a standby state, the water injection pipeline assembly is not connected to the barrel body and the polishing liquid output pipeline assembly; when the polishing machine is in a stopped state, the water injection pipeline assembly is not connected to the barrel body, and the water injection pipeline assembly is connected to the polishing liquid output pipeline assembly, and the water injection pipeline assembly injects deionized water into the polishing liquid output pipeline assembly, and the deionized water circulates in the polishing liquid output pipeline assembly.

[0006] By adopting the above technical solution, when the polishing machine is in working state, the water injection pipeline assembly injects deionized water into the barrel body, thereby adjusting the concentration of the polishing liquid. When the polishing machine is in standby state, the polishing liquid in the barrel body circulates between the barrel body and the polishing liquid output pipeline assembly, thereby preventing the polishing liquid from clustering. At the same time, during the polishing liquid circulation process, the pipeline in the polishing liquid output pipeline assembly can be unblocked to prevent pipeline congestion. When the polishing machine is not in working state, the water injection pipeline assembly injects deionized water into the polishing liquid output pipeline assembly, so that the deionized water circulates in the polishing liquid output pipeline assembly to clean the pipe wall of the polishing liquid output pipeline assembly.

[0007] Preferably, the polishing liquid output pipeline assembly includes a polishing liquid pump-out pipeline, a lower ball valve, a short elbow, a pump, a reducer, a pump-out straight pipe, a polishing liquid pump-out three-way pipe joint, a rear PFA joint, a pre-filter pipeline, a left ball valve, a filter element, a right ball valve, a post-filter pipeline, a first gas liquid valve, an output pipeline, a mounting plate, a first flange, and an output interface, which are connected in sequence; the polishing liquid pump-out pipeline is connected to the inner cavity of the barrel body, and the output interface is connected to the polishing machine through an external pipeline; the polishing liquid output pipeline assembly also includes an input short elbow, an upper ball valve, an input long elbow, a front PFA joint, an input short straight pipe, and an input long straight pipe, which are connected in sequence; the input short elbow is connected to the polishing liquid pump-out three-way pipe joint, and the polishing liquid pump-out pipeline and the input long straight pipe both extend into the inner cavity of the barrel body; when the polishing machine is in working state or standby state, the polishing liquid pump-out pipeline is connected to the inner cavity of the barrel body; when the polishing machine is in non-working state, the polishing liquid pump-out pipeline is not connected to the inner cavity of the barrel body.

[0008] By adopting the above technical solution, when the polishing machine is in standby mode, the upper ball valve is opened and the right ball valve is closed, so that the polishing liquid can circulate between the polishing liquid output pipeline assembly and the barrel. When the polishing machine is in working mode, the upper ball valve is closed and the right ball valve is opened, so that the polishing liquid can be input into the polishing machine through the output interface; when the polishing machine is not in working mode, the right ball valve, the upper ball valve, the connecting port of the polishing liquid pump outlet pipeline and the barrel are closed, and the water injection pipeline assembly injects deionized water into the polishing liquid output pipeline assembly, and the deionized water will circulate in the polishing liquid output pipeline assembly.

[0009] Preferably, the water injection pipeline assembly includes a water injection output pipe, a short pipe for water injection, a water injection pipeline PFA joint, a long elbow pipe for water injection, a pressure reducing valve, a short elbow pipe for water injection, a ball valve, a water injection input pipe, and a water injection pipeline joint, which are connected in sequence. The water injection output pipe extends into the inner cavity of the barrel body, and a lap pipe is provided on the water injection output pipe of the barrel body, and the lap pipe is connected to the polishing liquid pump out pipe; when the polishing machine is in the working state and the standby state, the water injection output pipe is connected to the inner cavity of the barrel body, and the lap pipe is not connected to the water injection output pipe and the polishing liquid pump out pipe; when the polishing machine is not in the working state, the water injection output pipe is not connected to the inner cavity of the barrel body, and the lap pipe connects the water injection output pipe and the polishing liquid pump out pipe.

[0010] By adopting the above technical solution, the concentration of the polishing liquid can be adjusted and the polishing liquid output pipeline assembly can be cleaned.

[0011] Preferably, the supply mechanism also includes a polishing liquid input pipeline assembly arranged on the support assembly for supplying polishing liquid, and the polishing liquid input pipeline assembly is used to replenish the polishing liquid into the barrel body; the polishing liquid input pipeline assembly includes an input interface connected in sequence, a second flange arranged on the mounting plate, an input pipeline, a long elbow pipe connecting the ball valve, a second gas liquid valve, a short elbow pipe, a second PFA joint, a short straight pipe, and a long straight pipe, and the long straight pipe is connected to the inner cavity of the barrel body.

[0012] By adopting the above technical solution, automatic filling of polishing liquid can be completed.

[0013] Preferably, the supply mechanism also includes a drainage pipe assembly, which includes a drainage top input pipe, an upper PFA joint, a long elbow pipe for drainage, a drainage pipe three-way pipe joint, a drainage straight pipe, and a drainage pipe joint connected in sequence, the drainage top input pipe is connected to the inner cavity of the barrel body, and the connection port of the drainage top input pipe and the barrel body is located at the top of the barrel body; the drainage pipe assembly also includes a third gas liquid medicine valve connected to the drainage pipe three-way pipe joint, a short elbow pipe for drainage connected to the third gas liquid medicine valve, a lower PFA joint connected to the short elbow pipe for drainage, and a drainage bottom input pipe connected to the lower PFA joint, the drainage bottom input pipe is connected to the inner cavity of the barrel body, and the connection port of the drainage bottom input pipe and the barrel body is located at the bottom of the barrel body.

[0014] By adopting the above technical solution, when the polishing liquid in the barrel is too full, it can be discharged from the barrel through the input pipe at the top of the drainage, so as to prevent the polishing liquid from being too full. Normally, the polishing liquid in the barrel can be input through the bottom of the drainage.

[0015] Preferably, the barrel body is provided with a stirring shaft flange, a stirring shaft and a motor, and the stirring shaft is connected to the motor via the stirring shaft flange.

[0016] By adopting the above technical solution, the polishing liquid in the barrel can be stirred and monitored to prevent the polishing liquid from clustering.

[0017] Preferably, the support assembly includes a mounting frame and universal wheels formed of a plurality of aluminum profiles.

[0018] By adopting the above technical solution, the displacement of the polishing liquid circulation supply system is facilitated.

[0019] Preferably, two groups of supply mechanisms are provided on the support assembly, and the two groups of supply mechanisms are symmetrically distributed on the support assembly.

[0020] The technical effects of the present invention are mainly reflected in the following aspects: 1. The present invention can self-circulate the polishing liquid and prevent the polishing liquid from clustering; 2. The present invention cleans the pipeline and prevents polishing liquid clusters by injecting deionized water into the barrel when the machine body is dormant; 3. The present invention can stir and monitor the polishing liquid in the barrel to prevent the polishing liquid from clustering. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural diagram of the polishing liquid circulation supply system.

[0022] Figure 2 It is a structural diagram of the supply mechanism.

[0023] Figure 3It is a schematic diagram of the structure of the supply mechanism after removing the side wall of the barrel.

[0024] Figure 4 yes Figure 3 Schematic diagram of the structure of the middle barrel and polishing liquid output pipeline assembly.

[0025] Figure 5 yes Figure 3 Schematic diagram of the structure of the middle barrel and polishing liquid input pipeline assembly.

[0026] Figure 6 yes Figure 3 Schematic diagram of the structure of the middle barrel, polishing liquid output pipeline assembly, and water injection pipeline assembly.

[0027] Figure 7 yes Figure 6 Schematic diagram of the structure of the middle barrel body and water injection pipeline assembly.

[0028] Figure numerals: 1, electric control cabinet; 2, supply assembly; 4, support assembly; 4-1, mounting frame; 4-2, corner block; 4-3, universal wheel; 6-1, barrel; 6-2, agitator shaft flange; 6-3, agitator shaft; 6-4, motor; 7, water injection pipeline assembly; 7-1, water injection output pipe; 7-2, short pipe for water injection; 7-3, water injection pipeline PFA connector; 7-4, long elbow pipe for water injection; 7-5, pressure reducing valve; 7-6, short elbow pipe for water injection; 7-7, ball valve ;7-8, water injection input pipe;7-9, water injection pipeline joint;8, drainage pipeline assembly;8-1, drainage top input pipe;8-2, upper PFA joint;8-3, long elbow pipe for drainage;8-4, three-way pipe joint for drainage pipeline;8-5, third gas liquid valve;8-6, short elbow pipe for drainage;8-7, lower PFA joint;8-8, drainage bottom input pipe;8-9, straight pipe for drainage;8-10, drainage pipeline joint;9, polishing liquid output pipeline assembly; 9-1, polishing liquid pump outlet pipeline; 9-2, lower ball valve; 9-3, short elbow; 9-4, pump; 9-5, reducer; 9-6, pump outlet straight pipe; 9-7, polishing liquid pump outlet three-way pipe joint; 9-8, rear PFA joint; 9-9, pre-filter pipeline; 9-10, left ball valve; 9-11, filter element; 9-12, right ball valve; 9-13, post-filter pipeline; 9-14, first gas liquid valve; 9-15, output pipeline; 9-16, output interface; 9-17, Input short elbow; 9-18, upper ball valve; 9-19, input long elbow; 9-20, front PFA connector; 9-21, input short straight pipe; 9-22, input long straight pipe; 10, polishing liquid input pipeline assembly; 10-1, input interface; 10-2, input pipeline; 10-3, ball valve; 10-4, long elbow; 10-5, second gas liquid valve; 10-6, short elbow; 10-7, PFA connector; 10-8, short straight pipe; 10-9, long straight pipe. DETAILED DESCRIPTION

[0029] The present invention is further described in detail below in conjunction with the accompanying drawings to make the technical solution of the present application easier to understand and grasp.

[0030] Reference Figure 1 and Figure 2 In this embodiment, a polishing liquid circulation supply system for a mask substrate polishing machine includes a support assembly 4. The support assembly 4 includes a mounting frame 4-1 composed of a plurality of aluminum profiles and a universal wheel 4-3 installed at the bottom of the mounting frame 4-1. The aluminum profiles constituting the mounting frame 4-1 are connected by an angle block 4-2, and the universal wheel 4-3 is installed at the bottom of the mounting frame 4-1.

[0031] Reference Figure 2 and Figure 3 Two sets of supply mechanisms 2 for supplying polishing liquid are installed on the mounting frame 4-1, and the two sets of supply mechanisms 2 are symmetrically distributed on the support assembly 4. The supply mechanism 2 includes a barrel 6-1 for storing polishing liquid, which is arranged on the mounting frame 4-1. The barrel 6-1 is provided with a stirring shaft flange 6-2, a stirring shaft 6-3, and a motor 6-4. The stirring shaft 6-3 is connected to the connecting motor 6-6 through the stirring shaft flange 6-2; the stirring shaft 6-5 is driven by the motor 6-6 to rotate so that the stirring shaft 6-5 stirs the polishing liquid in the barrel, thereby preventing the clustering of the polishing liquid.

[0032] Reference Figure 2-Figure 4 The supply mechanism 2 also includes a polishing liquid output pipeline assembly 9 arranged on the mounting frame 4-1, including a polishing liquid pumping out pipeline 9-1, a lower ball valve 9-2, a short elbow 9-3, a pump 9-4, a reducer 9-5, a pumping out straight pipe 9-6, a polishing liquid pumping out three-way pipe joint 9-7, a rear PFA joint 9-8, a pre-filter pipeline 9-9, a left ball valve 9-10, a filter element 9-11, a right ball valve 9-12, a post-filter pipeline 9-13, a first gas liquid valve 9-14, an output pipeline 9-15, and an output interface 9-16. The polishing liquid pumping out pipeline 9-1 extends into the barrel body 6-1.

[0033] Reference Figure 2-Figure 4, wherein one end of the polishing liquid pump-out pipeline 9-1 away from the barrel body 6-1 is connected to one end of the short elbow pipe 9-3 through the lower ball valve 9-2, and the other end of the short elbow pipe 9-3 is connected to the inlet of the pump 9-4; the outlet of the pump 9-4 is connected to one end of the pump-out straight pipe 9-6 through the reducer 9-5, and the other end of the pump-out straight pipe 9-6 is connected to the first port of the polishing liquid pump-out three-way pipe joint 9-7, and the second port of the polishing liquid pump-out three-way pipe joint 9-7 is connected to one end of the pre-filter pipeline 9-9 through the rear PFA joint 9-8, and the other end of the pre-filter pipeline 9-9 is connected to the left ball valve 9-10, the filter element 9-11 and the right ball valve 9-12 in sequence; the right ball valve 9-12 is connected to one end of the post-filter pipeline 9-13, and the other end of the post-filter pipeline 9-13 is connected to the first gas liquid valve 9-14. The first gas liquid valve 9-14 is connected downwardly to the output pipeline 9-15, the output pipeline 9-15 is connected to the output interface 9-17 through the first flange 9-16, and the output interface 9-17 is connected to the polishing machine through an external pipeline.

[0034] Reference Figure 2-Figure 4 The polishing liquid output pipeline assembly 9 also includes an input short elbow 9-17, an upper ball valve 9-18, an input long elbow 9-19, a front PFA connector 9-20, an input short straight pipe 9-21 and an input long straight pipe 9-22. The input short elbow 9-17 is connected to the polishing liquid pump out three-way pipe connector 9-7, and the input long straight pipe 9-22 extends into the inner cavity of the barrel body 6-1 and is connected to the inner cavity of the barrel body 6-1.

[0035] Reference Figure 2-Figure 4 , wherein the polishing liquid is pumped out of the three-way pipe joint 9-7 connected to one end of the input short elbow pipe 9-18, one end of the input short elbow pipe 9-18 is connected to one end of the input long elbow pipe 9-20 through the upper ball valve 9-19, and the other end of the input long elbow pipe 9-20 is connected to one end of the input short straight pipe 9-22 through the front PFA joint 9-21; the input short straight pipe 9-22 is installed on the barrel body 6-1 and connected to the input long straight pipe 9-23, and the input long straight pipe 9-23 extends into the interior of the barrel body 6-1 and connects to the inner cavity of the barrel body 6-1.

[0036] Reference Figure 2-Figure 4 A valve is installed in the polishing liquid pumping out pipe 9-1. When the polishing machine is in working state and standby state, the valves in the polishing liquid pumping out pipe 9-1 are in an open state, and the polishing liquid pumping out pipe 9-1 is connected with the inner cavity of the barrel body; when the polishing machine is in a non-working state, the valves in the polishing liquid pumping out pipe 9-1 are in a closed state, and the polishing liquid pumping out pipe 9-1 is not connected with the inner cavity of the barrel body.

[0037] Reference Figure 2-Figure 4When the polishing machine is in working state, close the upper ball valve 9-19 and open the right ball valve 9-12. At this time, the polishing liquid cannot enter the pipeline behind the upper ball valve 9-19, and the polishing liquid will only be delivered to the polishing machine through the output interface 9-17. When the polishing machine is in standby state, open the upper ball valve 9-19 and close the right ball valve 9-12. At this time, the polishing liquid will enter the input short elbow 9-18 after passing through the polishing liquid pump out three-way pipe joint 9-7, and then pass through the upper ball valve 9-19, the input long elbow 9-20, the front PFA joint 9-21, the input short straight pipe 9-22 and the input long straight pipe 9-23 in turn, and enter the barrel body 6-1. Then it is pumped from the inside of the barrel body 6-1 by the pump 9-4 into the polishing liquid pump out pipe 9-1, and passes through the previous path again. The polishing liquid in the barrel 6 - 1 will circulate back and forth between the barrel 6 - 1 and the polishing liquid output pipeline assembly 9 . The continuous movement of the polishing liquid can prevent the polishing liquid from clumping and ensure that the polishing liquid will not block the polishing liquid output pipeline assembly 9 .

[0038] Reference Figure 2 and Figure 5 The supply mechanism 2 also includes a polishing liquid input pipeline assembly 10 arranged on the mounting frame 4-1, and the polishing liquid input pipeline assembly 10 is used to replenish the polishing liquid into the barrel body 6-1; the polishing liquid input pipeline assembly 10 includes an input interface 10-1, an input pipeline 10-2, a connecting ball valve 10-3, a long bend pipe 10-4, a second gas liquid valve 10-5, a short bend pipe 10-6, a second PFA connector 10-7, a short straight pipe 10-8, and a long straight pipe 10-9, and the long straight pipe 10-9 is connected to the inner cavity of the barrel body 6-1.

[0039] Reference Figure 2 and Figure 5 The input interface 10-1 is connected to one end of the input pipe 10-2 through the second flange 10-2, and the other end of the input pipe 10-2 is connected to one end of the long elbow pipe 10-4 through the ball valve 10-3. The other end of the long elbow pipe 10-4 is connected to the second gas liquid valve 10-5, and the second gas liquid valve 10-5 is also connected to the short elbow pipe 10-6. The other end of the short elbow pipe 10-6 is connected to the second PFA connector 10-7 and the short straight pipe 10-8 in sequence. The short straight pipe 10-8 is installed on the barrel cover (6-3) and is connected to the long straight pipe 10-9. The long straight pipe 10-9 is located inside the barrel body 6-1 and communicates with the inner cavity of the barrel body.

[0040] Reference Figure 1 , Figure 2 and Figure 5, an electric control cabinet 1 for controlling the polishing liquid input pipeline assembly 10 is also installed on the top of the mounting frame 4-1. When the polishing liquid in the barrel body 6-1 is insufficient, the polishing liquid input function of the polishing liquid input pipeline assembly 10 can be turned on through the electric control cabinet 1, which can allow the configured polishing liquid to enter the polishing liquid input pipeline assembly 10 from the external pipeline through the input interface 10-1. The polishing liquid passes through the flange 10-2, the input pipeline 10-2, the ball valve 10-3, the long elbow 10-4, the second gas liquid valve 10-5, the short elbow 10-6, the second PFA joint 10-7, the short straight pipe 10-8 and the long straight pipe 10-9 in sequence, and finally enters the barrel body 6-1 to achieve the replenishment of the polishing liquid.

[0041] Reference Figure 2 , Figure 6 and Figure 7 The supply mechanism 2 further includes a water injection pipeline assembly 7 arranged on the mounting frame 4-1, and the water injection function of the water injection pipeline assembly 7 is controlled by the electric control cabinet 1. The water injection pipeline assembly 7 includes a water injection output pipe 7-1, a short water injection pipe 7-2, a water injection pipeline PFA connector 7-3, a long water injection elbow 7-4, a pressure reducing valve 7-5, a short water injection elbow 7-6, a ball valve 7-7, a water injection input pipe 7-8, and a water injection pipeline connector 7-9. The water injection output pipe 7-1 extends into the inner cavity of the barrel body 6-1.

[0042] Reference Figure 2 , Figure 6 and Figure 7 A valve is also installed in the water injection output pipe 7-1. When the polishing machine is in working state or standby state, the valve in the water injection output pipe 7-1 is in an open state, and the water injection output pipe 7-1 is connected to the inner cavity of the barrel body 6-1. When the polishing machine is not in working state, the valve in the water injection output pipe 7-1 is in a closed state, and the water injection output pipe 7-1 is not connected to the inner cavity of the barrel body 6-1.

[0043] Reference Figure 2 , Figure 6 and Figure 7 , a lap pipe 7-10 is provided on the water injection output pipe 7-1, and the lap pipe 7-10 is connected to the polishing liquid pumping pipe 9-1. A valve is also installed in the lap pipe 7-10. When the polisher is in the working state and the standby state, the valve in the lap pipe 7-10 is in a closed state, and the lap pipe 7-10 is not connected to the water injection output pipe 7-1 and the polishing liquid pumping pipe 9-1; when the polisher is not in the working state, the valve in the lap pipe 7-10 is in an open state, and the lap pipe 7-10 is connected to the water injection output pipe 7-1 and the polishing liquid pumping pipe 9-1.

[0044] Reference Figure 2 , Figure 6 and Figure 7When the polishing machine is in working state, when the water injection function of the water injection pipeline assembly 7 is turned on through the electric control cabinet 1, the deionized water will enter the water injection pipeline assembly 7 through the water injection pipeline joint 7-9, and then pass through the water injection input pipe 7-8, the ball valve 7-7, the short elbow 7-6, the pressure reducing valve 7-5, the long elbow 7-4 for water injection, the water injection pipeline PFA joint 7-3, the short pipe 7-2 for water injection and the water injection output pipe 7-1, and finally reach the inside of the barrel 6-1, and mix with the polishing liquid to realize the concentration control of the polishing liquid.

[0045] Reference Figure 2 , Figure 6 and Figure 7 When the polishing machine is not in working state, the water injection function of the water injection pipeline assembly 7 is turned on by electronic control, and deionized water enters the polishing liquid output pipeline assembly 9 through the water injection output pipe 7-1 and the overlapping pipe 7-10, so that the deionized water circulates in the polishing liquid output pipeline assembly 9 to clean the pipe wall of the polishing liquid output pipeline assembly 9.

[0046] Reference Figure 2 , Figure 3 and Figure 5 The supply mechanism 2 further includes a drainage pipeline assembly 8 disposed on the mounting frame 4-1, and the electric control cabinet 1 can control the drainage pipeline assembly 8. The drainage pipeline assembly 8 includes a drainage top input pipeline 8-1, an upper PFA joint 8-2, a drainage long elbow 8-3, a drainage pipeline three-way pipe joint 8-4, a drainage straight pipe 8-9 and a drainage pipeline joint 8-10 connected in sequence, and the drainage top input pipeline 8-1 is connected to the inner cavity of the barrel body 6-1, and the connection port of the drainage top input pipeline 8-1 and the barrel body 6-1 is located at the top of the barrel body 6-1.

[0047] Reference Figure 2 , Figure 3 and Figure 5 If there is too much liquid in the barrel 6-1, in order to prevent overflow, the liquid in the barrel 6-1 can be discharged from the system outside along the water top input pipe 8-1, the upper PFA joint 8-2, the long elbow pipe 8-3 for drainage, the three-way pipe joint 8-4 for drainage, the straight pipe 8-9 for drainage and the drainage pipe joint 8-10.

[0048] Reference Figure 2 , Figure 3 and Figure 5 The drainage pipeline assembly 8 also includes a third gas liquid medicine valve 8-5 connected to the drainage pipeline three-way pipe joint 8-4, a short drain elbow 8-6 connected to the third gas liquid medicine valve 8-5, a lower PFA joint 8-7 connected to the short drain elbow 8-6, and a drainage bottom input pipe 8-8 connected to the lower PFA joint 8-7. The drainage bottom input pipe 8-8 is connected to the inner cavity of the barrel body 6-1, and the connection port of the drainage bottom input pipe 8-8 and the barrel body 6-1 is located at the bottom of the barrel body 6-1.

[0049] Reference Figure 2 , Figure 3 and Figure 5 When the polishing liquid needs to be replaced or the barrel 6-1 needs to be cleaned, the drainage function of the drainage pipeline assembly 8 can be turned on through the electric control cabinet 1. After turning it on, the polishing liquid in the barrel 6-1 will enter the drainage pipeline three-way pipe joint 8-4 along the drainage bottom input pipe 8-8, PFA joint 8-7, short elbow pipe 8-6, and the third gas liquid valve 8-5, and then be discharged to the outside of the system through the drainage straight pipe 8-9 and the drainage pipeline joint (8-10).

[0050] Of course, the above are only typical examples of the present application. In addition, the present application may have many other specific implementation methods. All technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection required by the present application.

Claims

1. A polishing liquid circulation supply system for a mask substrate polishing machine, comprising a support assembly (4), characterized in that: The support assembly (4) is provided with a supply mechanism (2) for supplying polishing liquid, and the supply mechanism (2) comprises a barrel (6-1) for storing polishing liquid, a polishing liquid output pipeline assembly (9), and a water injection pipeline assembly (7); The polishing liquid output pipeline assembly (9) is connected to the barrel body (6-1) and the polishing machine; when the polishing machine is in the working state, the polishing liquid output pipeline assembly (9) is in communication with the barrel body (6-1) and the polishing machine, and the polishing liquid output pipeline assembly (9) outputs the polishing liquid in the barrel body to the polishing machine; when the polishing machine is in the standby state, the polishing liquid output pipeline assembly (9) is in communication with the barrel body (6-1), and the polishing liquid output pipeline assembly (9) is not in communication with the polishing machine, and the polishing liquid in the circulating barrel body (6-1) circulates between the barrel body (6-1) and the polishing liquid output pipeline assembly (9); when the polishing machine is not in the working state, the polishing liquid output pipeline assembly (9) is not in communication with the barrel body (6-1) and the polishing machine; The water injection pipeline assembly (7) is connected to the barrel (6-1) and the polishing liquid output pipeline assembly (9); when the polishing machine is in working state, the water injection pipeline assembly (7) is connected to the barrel (6-1), the water injection pipeline assembly (7) is not connected to the polishing liquid output pipeline assembly (9), and the barrel body water injection pipeline assembly (7) injects deionized water into the barrel (6-1); when the polishing machine is in standby state, the water injection pipeline assembly (7) is not connected to the barrel (6-1) and the polishing liquid output pipeline assembly (9); when the polishing machine is stopped, the water injection pipeline assembly (7) is not connected to the barrel (6-1), the water injection pipeline assembly (7) is connected to the polishing liquid output pipeline assembly (9), the water injection pipeline assembly (7) injects deionized water into the polishing liquid output pipeline assembly (9), and the deionized water circulates in the polishing liquid output pipeline assembly (9).

2. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 1, characterized in that: The polishing liquid output pipeline assembly (9) comprises a polishing liquid pump-out pipeline (9-1), a lower ball valve (9-2), a short elbow (9-3), a pump (9-4), a reducer (9-5), a pump-out straight pipe (9-6), a polishing liquid pump-out three-way pipe joint (9-7), a rear PFA joint (9-8), a pre-filter pipeline (9-9), a left ball valve (9-10), a filter element (9-11), a right ball valve (9-12), a post-filter pipeline (9-13), a first gas liquid valve (9-14), an output pipeline (9-15), and an output interface (9-16) which are connected in sequence; the polishing liquid pump-out pipeline (9-1) is connected to the inner cavity of the barrel (6-1), and the output interface (9-16) is connected to the polishing machine via an external pipeline; The polishing liquid output pipeline assembly (9) further comprises an input short elbow pipe (9-17), an upper ball valve (9-18), an input long elbow pipe (9-19), a front PFA joint (9-20), an input short straight pipe (9-21) and an input long straight pipe (9-22) which are connected in sequence; the input short elbow pipe (9-17) is connected to a polishing liquid pump-out three-way pipe joint (9-7); the polishing liquid pump-out pipeline (9-1) and the input long straight pipe (9-22) both extend into the inner cavity of the barrel body (6-1); when the polishing machine is in a working state or a standby state, the polishing liquid pump-out pipeline (9-1) is in communication with the inner cavity of the barrel body (6-1); when the polishing machine is in a non-working state, the polishing liquid pump-out pipeline (9-1) is not in communication with the inner cavity of the barrel body (6-1).

3. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 2, characterized in that: The water injection pipeline assembly (7) comprises a water injection output pipe (7-1), a short water injection pipe (7-2), a water injection pipeline PFA joint (7-3), a long water injection elbow (7-4), a pressure reducing valve (7-5), a short water injection elbow (7-6), a ball valve (7-7), a water injection input pipe (7-8), and a water injection pipeline joint (7-9) which are connected in sequence. The water injection output pipe (7-1) extends into the inner cavity of the barrel body (6-1). The water injection output pipe (7-1) of the barrel body is provided with a lap pipe (7-10). The lap pipe (7-10) is connected to the polishing liquid pumping pipe (9-1); when the polishing machine is in working state and standby state, the water injection output pipe (7-1) is connected to the inner cavity of the barrel body (6-1), and the overlapping pipe (7-10) is not connected to the water injection output pipe (7-1) and the polishing liquid pumping pipe (9-1); when the polishing machine is not in working state, the water injection output pipe (7-1) is not connected to the inner cavity of the barrel body (6-1), and the overlapping pipe (7-10) is connected to the water injection output pipe (7-1) and the polishing liquid pumping pipe (9-1).

4. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 1, characterized in that: The supply mechanism (2) also includes a polishing liquid input pipeline assembly (10) arranged on the support assembly (4) for supplying polishing liquid, and the polishing liquid input pipeline assembly (10) is used to replenish the polishing liquid into the barrel body (6-1); the polishing liquid input pipeline assembly (10) includes an input interface (10-1), an input pipeline (10-2), a connecting ball valve (10-3), a long curved pipe (10-4), a second gas liquid valve (10-5), a short curved pipe (10-6), a second PFA connector (10-7), a short straight pipe (10-8), and a long straight pipe (10-9) which are connected in sequence, and the long straight pipe (10-9) is connected to the inner cavity of the barrel body (6-1).

5. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 1, characterized in that: The supply mechanism (2) further comprises a drainage pipeline assembly (8), wherein the drainage pipeline assembly (8) comprises a drainage top input pipeline (8-1), an upper PFA joint (8-2), a drainage long elbow pipe (8-3), a drainage pipeline three-way pipe joint (8-4), a drainage straight pipe (8-9), and a drainage pipeline joint (8-10) which are connected in sequence, wherein the drainage top input pipeline (8-1) is connected to the inner cavity of the barrel body (6-1), and the connection port between the drainage top input pipeline (8-1) and the barrel body (6-1) is located at the top of the barrel body (6-1); the drainage pipeline assembly (8-1) 8) also includes a third gas liquid medicine valve (8-5) connected to the three-way pipe joint (8-4) of the drainage pipeline, a short drain elbow (8-6) connected to the third gas liquid medicine valve (8-5), a lower PFA joint (8-7) connected to the short drain elbow (8-6), and a drainage bottom input pipe (8-8) connected to the lower PFA joint (8-7), wherein the drainage bottom input pipe (8-8) is connected to the inner cavity of the barrel body (6-1), and the connection port of the drainage bottom input pipe (8-8) and the barrel body (6-1) is located at the bottom of the barrel body (6-1).

6. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 1, characterized in that: The barrel body (6-1) is provided with a stirring shaft flange (6-2), a stirring shaft (6-3), and a motor (6-4); the stirring shaft (6-3) is connected to the motor (6-4) via the stirring shaft flange (6-2).

7. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 1, characterized in that: The support assembly (4) comprises a mounting frame (4-1) formed of a plurality of aluminum profiles and a universal wheel (4-2).

8. The polishing liquid circulation supply system for a mask substrate polishing machine according to claim 1, characterized in that: Two groups of supply mechanisms (2) are provided on the support component (4), and the two groups of supply mechanisms (2) are symmetrically distributed on the support component (4).

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