Nozzle mounting device of furnace tube

Abstract

The invention discloses a nozzle mounting device of a furnace tube, a first nozzle in the furnace tube is provided with a main nozzle pipeline, and the main nozzle pipeline is located in the inner side surface of a process tube and extends from the bottom to the top along the inner side surface of the process tube. The nozzle mounting device includes a first mounting member. The first mounting part is provided with a nozzle mounting hole for the first nozzle to penetrate through, a first edge, close to one side of the inner side surface of the process pipe, of the main nozzle pipeline is tightly attached to a second edge, close to one side of the inner side surface of the process pipe, of the nozzle mounting hole, and a first distance is formed between the second edge and the outer side face of the first mounting part. A flange is arranged at the bottom of the process pipe, and the first installation part is installed on the flange through a first fixing piece. And the outer side surface of the first mounting part is positioned on the inner side of the inner side surface of the process pipe or is aligned with the inner side surface of the process pipe. The distance between the long nozzle and the inner side surface of the process pipe can be adjusted, and adhesion is prevented.

Description

Technical Field

[0001] The invention relates to a semiconductor integrated circuit manufacturing device, in particular to a nozzle mounting device of a furnace tube. Background Art

[0002] Semiconductor gate technology has always used polysilicon (ploy) as a carrier. In the subsequent development of 40nm technology, amorphous bodies were derived. Due to its unique conductive properties and the advantage of easy self-alignment process, it is widely used as a basic structural material in MEMS.

[0003] The basic principle of LPCVD process for depositing polysilicon is the thermal decomposition of silane (SiH4): SiH4->Si (solid) + H2 (gas). Under the pressure of 13Pa~133.32Pa and the temperature of 600℃, the mean free path of gas molecules reaches the order of nearly millimeters. The polysilicon film produced by LPCVD process can obtain a uniform polysilicon film on each silicon wafer.

[0004] The LPCVD equipment used in the poly process technology node is a furnace tube, which usually also has a dry cleaning function (Dry Clean function) and can automatically clean the polycrystalline coating (poly coating). Multiple SiH4 gases will be used in the furnace tube. After the SiH4 gas reaches the machine from the gas pipeline, it needs to be introduced into the process tube (process tube) of the furnace tube through the nozzle (injector) installed on the machine. The SiH4 is uniformly ejected in the process tube through the nozzle, thereby achieving uniform growth of polysilicon thin film. Because the process tube is very long, it will simultaneously achieve the growth of multiple wafers (wafers), so some nozzles will be long nozzles, and this long nozzle is flat. In the prior art, the nozzle is directly fixed by the top screw and the gas pipeline and sealed by setting a sealing ring (o-ring) at the connection. The existing nozzle is easy to cause the nozzle and the inner surface of the process tube to adhere after installation, and the poly coating will remain at the adhesion. It is easy to cause poly peeling (peeling) during the production process, resulting in product scrapping.

[0005] like Figure 1 The figure is a schematic diagram of the cross-sectional structure of an existing furnace tube; the existing furnace tube comprises:

[0006] The housing 101 is generally made of stainless steel. The interior of the housing 101 is evacuated by a pump (not shown).

[0007] The process tube 102 is usually made of quartz material and is disposed inside the housing 101 .

[0008] The wafer boat 103 is used to place multiple wafers 104 , and the wafer boat 103 can be moved by a moving device 105 .

[0009] Figure 1 A nozzle 106 is also shown in the figure. This nozzle 106 is a long nozzle. The nozzle 106 includes a vertical main pipe 106a and a horizontal pipe 106b located at the bottom. In the process, the main pipe 106a is used to provide the required process gas such as silane to each wafer 104 in the wafer boat 103. Therefore, the main pipe 106a needs to extend from the bottom to the top surface of the topmost wafer along the inner side of the inner side of the process tube 102.

[0010] The first side of the transverse pipe 106b is connected to the bottom of the main pipe 106a to form an elbow. The transverse pipe 106b passes through the shell 101 and is sealed to the outside of the shell 101 and the gas pipe 109 by a sealing ring 107 and fixed by a top screw 108.

[0011] Depend on Figure 1 As shown, the main pipe 106a of the nozzle 106 extends along the inner surface of the process pipe 102 for a long distance, and the distance between the main pipe 106a of the nozzle 106 and the inner surface of the process pipe 102 cannot be guaranteed, which easily leads to adhesion between the main pipe 106a of the nozzle 106 and the inner surface of the process pipe 102. Summary of the invention

[0012] The technical problem to be solved by the present invention is to provide a nozzle installation device for a furnace tube, which can adjust the distance between a longer nozzle and the inner surface of the process tube, thereby preventing the longer nozzle and the inner surface of the process tube from sticking together, preventing the film layer caused by the adhesion from peeling off and thereby improving the product yield.

[0013] In order to solve the above technical problems, in the nozzle installation device of the furnace tube provided by the present invention, a process tube and a plurality of first nozzles are arranged in the furnace tube.

[0014] The inner space of the process tube is cylindrical.

[0015] The first nozzle has a main nozzle conduit located inside the inner side surface of the process tube and extending from the bottom to the top along the inner side surface of the process tube.

[0016] The nozzle mounting device includes a first mounting component.

[0017] The first mounting component has a nozzle mounting hole, and the nozzle mounting hole is for the first nozzle to pass through. The first edge of the main nozzle pipe of the first nozzle close to the inner surface of the process pipe is tightly attached to the second edge of the nozzle mounting hole close to the inner surface of the process pipe. There is a first distance between the second edge and the outer side surface of the first mounting component. The outer side surface of the first mounting component is the side close to the inner surface of the process pipe.

[0018] A flange is arranged at the bottom of the process pipe, and the first mounting component is mounted on the flange through a first fixing member.

[0019] The outer side surface of the first mounting component is located inside the inner surface of the process tube or is aligned with the inner surface of the process tube, and the distance between the first edge and the inner surface of the process tube is greater than or equal to the first spacing.

[0020] A further improvement is that the first nozzle further comprises a second transverse nozzle pipe, and the bottom of the main nozzle pipe and the first side of the second transverse nozzle pipe are connected together to form a communicating first elbow.

[0021] The nozzle installation hole includes a first vertical hole and a second transverse hole that are interconnected, and a second elbow is formed at a connection position between the first vertical hole and the second transverse hole.

[0022] The main nozzle pipe is inserted into the first vertical hole, and the second transverse nozzle pipe is inserted into the second transverse hole; the first elbow is located in the second elbow, and the second side of the second transverse nozzle pipe extends to the outside of the outer side surface of the first mounting component.

[0023] A further improvement is that the nozzle mounting device also includes a second mounting component.

[0024] The inner side surface of the first mounting component is a side surface away from the inner side surface of the process pipe.

[0025] The second mounting component is mounted on the inner side surface of the first mounting component through a second fixing component, and the first side surface of the second mounting component is a side surface fixedly contacted with the inner side surface of the first mounting component.

[0026] A further improvement is that the first vertical hole and the second elbow are formed by a combination of a first recessed portion provided on the inner side surface of the first mounting component and a second recessed portion provided on the first side surface of the second mounting component.

[0027] A further improvement is that the first nozzle is made of quartz.

[0028] A further improvement is that the second side of the second transverse nozzle pipe is sealed and fixedly connected to the gas pipeline.

[0029] A further improvement is that a sealing ring is used to seal between the second side of the second transverse nozzle pipe and the gas pipeline.

[0030] A further improvement is that the second side of the second transverse nozzle pipe and the gas pipeline are fixed by means of a top screw.

[0031] A further improvement is that the first fixing member includes a first screw hole arranged on the flange, a first hole passing through the first mounting component and a first screw, the first hole and the first screw hole are aligned, and the first screw passes through the first hole and is locked in the first screw hole.

[0032] A further improvement is that a first extending portion is provided on the first mounting component, and the first hole is provided on and passes through the first extending portion.

[0033] A further improvement is that the second fixing member includes a second screw hole arranged on the inner side surface of the first mounting component, a second hole passing through the second mounting component and a second screw, the second hole and the second screw hole are aligned, and the second screw passes through the second hole and is locked in the second screw hole.

[0034] A further improvement is that a wafer boat is arranged in the process tube, and the wafer boat is used to place wafers.

[0035] The top surface of the main nozzle conduit is located above the top surface of the topmost wafer in the wafer boat.

[0036] A further improvement is that the number of the first nozzles is two.

[0037] A further improvement is that a second nozzle is further provided in the furnace tube, and the length of the second nozzle is shorter than that of the first nozzle.

[0038] A further improvement is that the first nozzle and the second nozzle are each connected to a gas pipe.

[0039] For the first nozzle of the longer furnace tube, the present invention provides a first mounting component, in which a nozzle mounting hole is provided, and the nozzle mounting hole is for the first nozzle to pass through and be fixedly provided, so that the first edge of the longer main nozzle pipeline of the first nozzle close to the inner surface of the process tube will be tightly attached to the second edge of the nozzle mounting hole close to the inner surface of the process tube, and there is a first distance between the second edge and the outer side surface of the first mounting component. By fixing the first mounting component on the flange at the bottom of the process tube, and the outer side surface of the first mounting component is located on the inner side of the inner surface of the process tube or aligned with the inner surface of the process tube, the distance between the first edge and the inner surface of the process tube can be greater than or equal to the first distance. It can be seen that by adjusting the first distance, the distance between the first edge and the inner surface of the process tube can be adjusted, so the present invention can adjust the distance between the longer nozzle and the inner surface of the process tube, thereby preventing the longer nozzle and the inner surface of the process tube from sticking together, preventing the film layer caused by the adhesion from peeling off, and thereby improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments:

[0041] Figure 1 It is a schematic diagram of the cross-sectional structure of an existing furnace tube;

[0042] Figure 2 Schematic diagram of the cross-sectional structure of a furnace tube according to an embodiment of the present invention;

[0043] Figure 3 yes Figure 2 Enlarged view of the middle nozzle after installation;

[0044] Figure 4 The nozzle installation device of the furnace tube of the embodiment of the present invention is installed along the first installation component after the first installation component is installed. Figure 2 Schematic diagram of the structure observed from left to right;

[0045] Figure 5 The nozzle installation device of the furnace tube of the embodiment of the present invention is installed along the second installation component Figure 2 Schematic diagram of the structure observed from left to right;

[0046] Figure 6 It is a top view of the nozzle installation device of the furnace tube according to the embodiment of the present invention after the second installation component is installed. DETAILED DESCRIPTION

[0047] like Figure 2 , which is a schematic cross-sectional structure diagram of a furnace tube according to an embodiment of the present invention; Figure 3 yes Figure 2 The enlarged picture of the middle nozzle after installation; Figure 4FIG. 1 is a diagram showing a nozzle installation device for a furnace tube according to an embodiment of the present invention after the first installation component 301 is installed. Figure 2 The schematic diagram of the structure observed from left to right in FIG. Figure 5 FIG. 1 is a diagram showing the nozzle installation device of the furnace tube according to an embodiment of the present invention after the second installation component 302 is installed. Figure 2 The schematic diagram of the structure observed from left to right in FIG. Figure 6 , which is a top view of the nozzle installation device for the furnace tube according to the embodiment of the present invention after the second installation component 302 is installed; in the nozzle installation device for the furnace tube according to the embodiment of the present invention, a process tube 202 and a plurality of first nozzles 206 are arranged in the furnace tube.

[0048] The furnace tube further includes a shell 201 , and the process tube 202 is arranged inside the shell 201 .

[0049] The inner space of the process tube 202 is cylindrical.

[0050] The first nozzle 206 has a main nozzle conduit 206 a , which is located inside the inner surface of the process pipe 202 and extends from the bottom to the top along the inner surface of the process pipe 202 .

[0051] The nozzle mounting device comprises a first mounting component 301 .

[0052] The first mounting component 301 has a nozzle mounting hole, and the first nozzle 206 is installed in the nozzle mounting hole.

[0053] In the embodiment of the present invention, the first nozzle 206 further includes a second transverse nozzle pipe 206b, and the bottom of the main nozzle pipe 206a and the first side of the second transverse nozzle pipe 206b are connected together to form a communicating first elbow.

[0054] The nozzle installation hole includes a first vertical hole 306b and a second transverse hole 306a that are interconnected, and a second elbow is formed at the connection position of the first vertical hole 306b and the second transverse hole 306a. Figure 3 The position of the nozzle mounting hole is shown in the dashed line segment in the first mounting component 301. For a top view of the first vertical hole 306b, please refer to Figure 6 As shown, the side view of the second transverse hole 306a is shown in FIG. Figure 4 shown.

[0055] The main nozzle pipe 206a is inserted into the first vertical hole 306b, and the second transverse nozzle pipe 206b is inserted into the second transverse hole 306a; the first elbow is located in the second elbow, and the second side of the second transverse nozzle pipe 206b extends to the outside of the outer side surface of the first mounting component 301.

[0056] The first edge of the main nozzle pipe 206a of the first nozzle 206, which is close to the inner surface of the process tube 202, is tightly attached to the second edge of the nozzle mounting hole, which is close to the inner surface of the process tube 202. There is a first distance d1 between the second edge and the outer surface of the first mounting component 301. The outer surface of the first mounting component 301 is the side close to the inner surface of the process tube 202.

[0057] like Figure 4 As shown, a flange 303 is provided at the bottom of the process pipe 202 , and the first mounting component 301 is mounted on the flange 303 through a first fixing member.

[0058] The outer side surface of the first mounting component 301 is located inside the inner surface of the process tube 202 or aligned with the inner surface of the process tube 202 , and the distance between the first edge and the inner surface of the process tube 202 is greater than or equal to the first distance d1 .

[0059] In the embodiment of the present invention, Figure 4 As shown, the first fixing member includes a first screw hole arranged on the flange 303, a first hole passing through the first mounting component 301 and a first screw 304, the first hole is aligned with the first screw hole, and the first screw 304 passes through the first hole and is locked in the first screw hole.

[0060] The first installation component 301 is provided with a first extending portion 301 a , and the first hole is provided on and passes through the first extending portion 301 a .

[0061] In the embodiment of the present invention, the nozzle mounting device further includes a second mounting component 302 .

[0062] The inner side surface of the first mounting component 301 is the side surface away from the inner side surface of the process pipe 202 .

[0063] The second mounting component 302 is mounted on the inner side surface of the first mounting component 301 through a second fixing member, and the first side surface of the second mounting member is a side surface fixedly contacted with the inner side surface of the first mounting component 301 .

[0064] In the embodiment of the present invention, Figure 4 As shown, the second fixing member includes a second screw hole 305 disposed on the inner side of the first mounting member 301; Figure 5As shown, the second fixing member further includes: a second hole passing through the second mounting component 302 and a second screw 307 , the second hole is aligned with the second screw hole 305 , and the second screw 307 passes through the second hole and is locked in the second screw hole 305 .

[0065] like Figure 6 As shown, in the embodiment of the present invention, the first vertical hole 306b and the second elbow are composed of a first recessed portion provided on the inner side of the first mounting component 301 and a second recessed portion provided on the first side of the second mounting component. The separate structure of the first mounting component 301 and the second mounting component 302 makes it easy to install the first nozzle 206. For example: Figure 4 As shown, the first mounting component 301 is first mounted on the flange 303; at this time, the first vertical hole 306b is not closed, so it is convenient to insert the second transverse nozzle pipe 206b of the first nozzle 206 into the second transverse hole 306a.

[0066] Afterwards, if Figure 5 As shown, the second mounting component 302 is mounted on the first mounting component 301 , so that the first vertical hole 306 b is completely closed, thereby achieving the installation of the first nozzle 206 .

[0067] In the embodiment of the present invention, the first nozzle 206 is made of quartz.

[0068] like Figure 2 As shown, the second side of the second transverse nozzle pipe 206b and the gas pipe 209 are sealed and fixedly connected.

[0069] A sealing ring 207 is used to seal the second side of the second transverse nozzle pipe 206 b and the gas pipe 209 .

[0070] The second side of the second transverse nozzle pipe 206 b and the gas pipe 209 are fixed by using a top screw 208 .

[0071] A wafer boat 203 is disposed in the process tube 202 , and the wafer boat 203 is used to place wafers 204 .

[0072] The top surface of the main nozzle pipe 206 a is located above the top surface of the topmost wafer 204 in the wafer boat 203 .

[0073] In some embodiments, the number of the first nozzles 206 is two.

[0074] A second nozzle is further disposed in the furnace tube, and the length of the second nozzle is shorter than that of the first nozzle 206 .

[0075] The first nozzle 206 and the second nozzle are each connected to a gas pipe.

[0076] In some embodiments, the process tube 202 is used to produce polysilicon. The gas provided by the gas tubes connected to the first nozzle 206 and the second nozzle includes silane.

[0077] For the first nozzle 206 of the longer furnace tube, a first mounting component 301 is provided in the embodiment of the present invention, and a nozzle mounting hole is provided in the first mounting component 301, and the nozzle mounting hole is used for the first nozzle 206 to pass through and be fixedly provided, so that the first edge of the longer main nozzle pipeline 206a of the first nozzle 206 on the side of the inner surface of the process tube 202 will be closely attached to the second edge of the nozzle mounting hole on the side of the inner surface of the process tube 202, and there is a first distance d1 between the second edge and the outer side surface of the first mounting component 301, and the method of fixing the first mounting component 301 on the bottom of the process tube 202 is adopted. If the first mounting component 301 is on the flange 303, and the outer side surface of the first mounting component 301 is located on the inner side of the inner surface of the process tube 202 or is aligned with the inner surface of the process tube 202, the distance between the first edge and the inner surface of the process tube 202 can be greater than or equal to the first spacing d1. It can be seen that by adjusting the first spacing d1, the distance between the first edge and the inner surface of the process tube 202 can be adjusted. Therefore, the embodiment of the present invention can adjust the distance between the longer nozzle and the inner surface of the process tube 202, thereby preventing the longer nozzle and the inner surface of the process tube 202 from sticking together, preventing the film layer caused by adhesion from peeling off, and thereby improving the product yield.

[0078] The present invention has been described in detail above through specific embodiments, but these do not constitute limitations of the present invention. Without departing from the principle of the present invention, those skilled in the art may also make many variations and improvements, which should also be considered as the protection scope of the present invention.

Claims

1. A nozzle installation device for a furnace tube, characterized in that: A process tube and a plurality of first nozzles are arranged in the furnace tube; The inner space of the process tube is cylindrical; The first nozzle has a main nozzle conduit, the main nozzle conduit is located inside the inner surface of the process pipe and extends from the bottom to the top along the inner surface of the process pipe; The nozzle mounting device includes a first mounting component; The first mounting component has a nozzle mounting hole, the nozzle mounting hole is for the first nozzle to pass through, the first edge of the main nozzle pipe of the first nozzle close to the inner surface of the process pipe is closely attached to the second edge of the nozzle mounting hole close to the inner surface of the process pipe, a first distance is provided between the second edge and the outer side surface of the first mounting component, and the outer side surface of the first mounting component is the side surface close to the inner surface of the process pipe; A flange is provided at the bottom of the process pipe, and the first mounting component is mounted on the flange through a first fixing member; The outer side surface of the first mounting component is located inside the inner surface of the process tube or is aligned with the inner surface of the process tube, and the distance between the first edge and the inner surface of the process tube is greater than or equal to the first spacing.

2. The nozzle installation device for a furnace tube according to claim 1, characterized in that: The first nozzle further comprises a second transverse nozzle pipe, the bottom of the main nozzle pipe and the first side of the second transverse nozzle pipe are connected together to form a communicating first elbow; The nozzle installation hole comprises a first vertical hole and a second transverse hole which are interconnected, and a second elbow is formed at the connection position of the first vertical hole and the second transverse hole; The main nozzle pipe is inserted into the first vertical hole, and the second transverse nozzle pipe is inserted into the second transverse hole; The first elbow is located within the second elbow, and a second side of the second lateral nozzle conduit extends outside of an outer side surface of the first mounting component.

3. The nozzle installation device for a furnace tube according to claim 2, characterized in that: The nozzle mounting device further comprises a second mounting component; The inner side surface of the first mounting component is a side surface away from the inner side surface of the process pipe; The second mounting component is mounted on the inner side surface of the first mounting component through a second fixing component, and the first side surface of the second mounting component is a side surface fixedly contacted with the inner side surface of the first mounting component.

4. The nozzle installation device for a furnace tube according to claim 3, characterized in that: The first vertical hole and the second elbow are formed by a combination of a first recessed portion disposed on an inner side surface of the first mounting member and a second recessed portion disposed on a first side surface of the second mounting member.

5. The nozzle installation device for a furnace tube according to claim 1, characterized in that: The first nozzle is made of quartz.

6. The nozzle installation device for a furnace tube according to claim 4, characterized in that: The second side of the second transverse nozzle pipe is sealed and fixedly connected to the gas pipeline.

7. The nozzle installation device for a furnace tube according to claim 6, characterized in that: A sealing ring is used to seal the second side of the second transverse nozzle pipe and the gas pipeline.

8. The nozzle installation device for a furnace tube according to claim 6, characterized in that: The second side of the second transverse nozzle pipe and the gas pipeline are fixed by means of a jackscrew.

9. The nozzle installation device for a furnace tube according to claim 1, characterized in that: The first fixing member includes a first screw hole arranged on the flange, a first hole passing through the first mounting component, and a first screw, the first hole is aligned with the first screw hole, and the first screw passes through the first hole and is locked in the first screw hole.

10. The nozzle installation device for a furnace tube according to claim 9, characterized in that: A first extending portion is disposed on the first mounting component, and the first hole is disposed on and passes through the first extending portion.

11. The nozzle installation device for a furnace tube according to claim 3, characterized in that: The second fixing member includes a second screw hole arranged on the inner side surface of the first mounting component, a second hole passing through the second mounting component, and a second screw, the second hole is aligned with the second screw hole, and the second screw passes through the second hole and is locked in the second screw hole.

12. The nozzle installation device for a furnace tube according to claim 1, characterized in that: A wafer boat is arranged in the process tube, and the wafer boat is used to place wafers; The top surface of the main nozzle conduit is located above the top surface of the topmost wafer in the wafer boat.

13. The nozzle installation device for a furnace tube according to claim 12, characterized in that: The number of the first nozzles is two.

14. The nozzle installation device for a furnace tube according to claim 13, characterized in that: A second nozzle is also arranged in the furnace tube, and the length of the second nozzle is shorter than that of the first nozzle.

15. The nozzle installation device for a furnace tube according to claim 14, characterized in that: The first nozzle and the second nozzle are respectively connected to a gas pipe.

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