Multi-inlet air inlet cavity with scraper for waste gas treatment equipment

Abstract

The invention provides a multi-inlet air inlet cavity with a scraper for waste gas treatment equipment, and relates to the technical field of waste gas treatment. The multi-inlet air inlet cavity with the scraper for the waste gas treatment equipment comprises an air inlet cavity device, an intra-cavity scraper device and a plurality of air inlet devices, the air inlet cavity device is internally provided with an air inlet cavity, the bottom of the air inlet cavity device is provided with an air outlet port, the air outlet port is provided with a limiting ring extending inwards in the radial direction, and the side wall of the air inlet cavity device is provided with a plurality of air inlet ports; the intra-cavity scraper device comprises a driving part, a supporting frame, a plurality of scrapers and a plurality of lower rolling wheels, the supporting frame is rotatably arranged in the air inlet cavity, and the driving part is connected with the supporting frame. According to the multi-inlet air inlet cavity with the scraper for the waste gas treatment equipment, the supporting frame is driven by the driving component to rotate, the scraper scrapes dust on the side wall of the air inlet cavity when the supporting frame rotates, the air inlet cavity is prevented from being blocked by the dust in the air inlet cavity, and the situation that the waste gas treatment equipment stops working due to blockage of the air inlet cavity is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, and in particular to a multi-inlet scraper air inlet chamber for waste gas treatment equipment. Background Art

[0002] With the increasing prosperity of the pan-semiconductor industry and the surge in production capacity, various waste gases (NF3, PH3, B2H6, SiH4, etc.) will be generated during the production process. Most of these gases are seriously harmful to the human body and the environment. Most of the exhaust gases emitted are heavier than air. If they are discharged into the atmosphere, they will be deposited on the ground after spreading and reach a very high concentration, causing serious environmental pollution and endangering human health. If a fire is encountered, it will cause a fire or even an explosion. Therefore, the market demand for waste gas treatment equipment is very large. However, due to the different internal facilities and environments of semiconductor manufacturers, waste gas treatment equipment also has a large demand for various practical special devices. At present, the waste gas treatment equipment includes an air intake chamber. In the process of the waste gas entering the air intake chamber, dust blocks the air intake chamber (silane reacts with oxygen to produce a large amount of silicon dioxide), causing the equipment to stop running. Summary of the invention

[0003] The invention provides a multi-inlet air intake chamber with a scraper for waste gas treatment equipment, which is used to solve the problem in the prior art that dust blocks the air intake chamber and causes the equipment to stop running.

[0004] The present invention provides a multi-inlet scraper air inlet chamber for waste gas treatment equipment, comprising: An air inlet cavity device, wherein the air inlet cavity device has an air inlet cavity inside, an air outlet port is arranged at the bottom of the air inlet cavity device, the air outlet port is provided with a limiting ring extending radially inward, and a side wall of the air inlet cavity device is provided with a plurality of air inlet ports; The intracavity scraper device comprises a driving component, a support frame, a plurality of scrapers and a plurality of lower rollers, wherein the support frame is rotatably arranged in the air inlet cavity, the driving component is connected to the support frame, and the driving component is used to drive the support frame to rotate; the plurality of scrapers are arranged at intervals on the outer periphery of the support frame, and the scrapers are used to scrape off the dust on the side wall of the air inlet cavity when the support frame rotates; the plurality of lower rollers are arranged at intervals along the circumferential direction at the bottom of the support frame, and are in rolling cooperation with the limit ring; A plurality of air intake devices are connected to the plurality of air intake ports in a one-to-one correspondence, and the air intake devices are used to input air into the interior of the air intake cavity device.

[0005] According to the present invention, a multi-inlet scraper air inlet chamber is provided for waste gas treatment equipment, wherein the scraper is parallel to the side wall of the air inlet chamber, and the distance between two adjacent scrapers is equal.

[0006] According to the invention, a multi-inlet scraper air inlet cavity for waste gas treatment equipment is provided, wherein the scraper device in the cavity further comprises: A plurality of bottom scraping modules are arranged at intervals along the circumferential direction at the bottom of the support frame, and a plurality of lower rollers are respectively installed on the plurality of bottom scraping modules in a one-to-one correspondence through lower roller shafts, and the bottom scraping modules are used to push the dust falling on the limit ring toward the air outlet port.

[0007] According to the invention, a multi-inlet scraper air inlet cavity for waste gas treatment equipment is provided, wherein the scraper device in the cavity further comprises: A plurality of upper rollers are arranged at intervals along the circumferential direction on the upper part of the support frame, the upper rollers are arranged horizontally, the upper rollers are installed on the support frame through upper roller shafts, and the upper rollers are rollingly matched with the side walls of the air inlet cavity.

[0008] According to the invention, a multi-inlet scraper air inlet chamber for an exhaust gas treatment device is provided, wherein the driving component comprises: A driving assembly, the driving assembly being arranged on the top of the air inlet cavity device; A drive shaft, one end of which is connected to the drive assembly; A toothed disc, the toothed disc being arranged on the upper part of the support frame; A driving rod is arranged inside the air inlet cavity, the driving rod is connected to the other end of the driving shaft, and a plurality of positioning blocks are arranged at intervals on the edge of the bottom of the driving rod, and the positioning blocks are used to engage with the convex teeth of the gear disk.

[0009] According to the invention, a multi-inlet scraper air inlet chamber for an exhaust gas treatment device, the driving component further comprises: A connecting rod, one end of which is connected to the driving rod, and the other end of which passes through the top of the air inlet chamber device and is connected to the other end of the driving shaft through a coupling; An oil seal, sleeved on the outer periphery of the connecting rod and located between the outer peripheral surface of the connecting rod and the top wall of the air intake chamber device; The sealing ring is sleeved on the outer periphery of the connecting rod and is located between the outer peripheral surface of the connecting rod and the top wall of the air intake chamber device.

[0010] According to the present invention, a multi-inlet scraper air inlet chamber for waste gas treatment equipment is provided, and the air inlet chamber device comprises: An air intake chamber shell, wherein the air intake chamber is formed inside the air intake chamber shell, a plurality of air intake ports are arranged on the side wall of the air intake chamber shell, the plurality of air intake ports are arranged at intervals along the circumferential direction, and two adjacent air intake ports are staggered in the up-down direction, an interlayer cavity is arranged inside the side wall of the air intake chamber shell and inside the top wall of the air intake chamber shell, a first interface communicating with the interlayer cavity is arranged on the lower part of the outer side wall of the air intake chamber shell, a second interface communicating with the interlayer cavity is arranged on the outer side of the top wall of the air intake chamber shell, and the limiting ring is located at the bottom of the air intake chamber shell.

[0011] According to the invention, a multi-inlet scraper air inlet chamber for waste gas treatment equipment is provided, wherein the top of the air inlet chamber shell is provided with a heat source installation port connected to the air inlet chamber, and the heat source installation port is used to install an ion torch or a natural gas burner.

[0012] According to the present invention, a multi-inlet scraper air inlet chamber for waste gas treatment equipment further comprises: The overflow flange includes a flange body and a flange cover, wherein the flange body and the flange cover are both arranged at the bottom of the limiting ring, the flange body is located at the outer periphery of the flange cover, and a first convex ring extending radially inward is arranged on the inner side of the flange body, the first convex ring is located below the flange cover, a guide groove is formed on the upper surface of the first convex ring, and a liquid inlet connected to the guide groove is arranged on the outer side of the flange body; a second convex ring is formed on the side of the lower surface of the flange cover away from the flange body, the second convex ring is located on the side of the first convex ring away from the flange body, the second convex ring cooperates with the side of the first convex ring away from the flange body to form an annular flow channel connected to the guide groove, and the liquid outlet of the annular flow channel faces downward.

[0013] According to a multi-inlet scraper air inlet chamber for waste gas treatment equipment provided by the present invention, the side of the second convex ring facing the first convex ring is an arc surface.

[0014] The waste gas treatment equipment provided by the present invention uses a multi-inlet scraper air inlet chamber, and drives the support frame to rotate through a driving component. The scraper scrapes off the dust on the side wall of the air inlet chamber when the support frame rotates, preventing the dust inside the air inlet chamber from clogging the air inlet chamber, thereby preventing the waste gas treatment equipment from stopping working due to the clogging of the air inlet chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is one of the three-dimensional structural schematic diagrams of the multi-inlet scraper air inlet chamber for the waste gas treatment equipment provided by the present invention.

[0017] Figure 2 It is a side structural schematic diagram of a multi-inlet scraper air inlet chamber for waste gas treatment equipment provided by the present invention.

[0018] Figure 3 This is the second schematic diagram of the three-dimensional structure of the air inlet cavity with multiple inlets and scrapers for the waste gas treatment equipment provided by the present invention.

[0019] Figure 4 It is a schematic diagram of the top view of the structure of a multi-inlet air inlet cavity with a scraper for the waste gas treatment equipment provided by the present invention.

[0020] Figure 5 It is a schematic diagram of the side cross-sectional structure of the air intake cavity device provided by the present invention.

[0021] Figure 6 yes Figure 5 Schematic diagram of the local enlarged structure at point B.

[0022] Figure 7 This is one of the structural schematic diagrams of the air inlet scraper provided by the present invention.

[0023] Figure 8 This is the second structural schematic diagram of the air inlet scraper provided by the present invention.

[0024] Fig. 9 This is the third structural schematic diagram of the air inlet scraper provided by the present invention.

[0025] Fig.10 yes Figure 8 Schematic diagram of the structure of the AA section.

[0026] Fig.11 It is a structural schematic diagram of the negative pressure detection tube scraper provided by the present invention.

[0027] Fig.12 It is a structural schematic diagram of the cooperation between the negative pressure detection tube scraper and the air intake connecting tube provided by the present invention.

[0028] Fig.13 It is a cross-sectional schematic diagram of the cooperation between the negative pressure detection tube scraper and the air intake connecting tube provided by the present invention.

[0029] Fig.14 It is a structural schematic diagram of the guide assembly provided by the present invention.

[0030] Fig.15 It is a structural schematic diagram of the flexible scraper provided by the present invention.

[0031] Fig.16 yes Fig.13Schematic diagram of the local enlarged structure at A.

[0032] Fig.17 It is a schematic diagram of the three-dimensional structure of the air inlet scraper provided by the present invention.

[0033] Fig.18 It is a schematic diagram of the top structure of the air inlet scraper provided by the present invention.

[0034] Fig.19 The figure is a schematic diagram of the side cross-sectional structure of an air inlet scraper provided by the present invention.

[0035] Fig. 20 It is another schematic diagram of the side cross-sectional structure of an air inlet scraper provided by the present invention.

[0036] Reference numerals: 11. Connecting flange; 20. Sealing assembly; 21. Sealing flange; 22. Motor flange; 23. Step; 24. Connecting shaft; 25. Outer sealing ring; 26. Inner sealing ring; 30. Scraper; 40. Driving assembly; 41. Motor; 42. Speed ​​reducer; 50. Scraper fixing plate; 60. Purge air intake pipe; 100. Air inlet scraper; 110, scraper assembly; 111, scraper plate; 112, vent hole; 113, circumferential side surface; 120, scraper connecting assembly; 121, first scraper connecting rod; 122, first flexible connecting member; 123, second scraper connecting rod; 124, air outlet; 130. Scraper drive assembly; 140, housing; 141, guide tube; 142, fixed tube; 143, straight-through ferrule; 144, straight tube section; 145, curved tube section; 150, ferrule intake pipe; 160, throttle valve; 210, guide assembly; 211, first guide tube; 212, second guide tube; 213, elbow; 220, flexible scraper; 221, scraper section of the detection port; 222, flexible section; 223, connecting section; 230, driving assembly; 231, driving cylinder; 2311, piston rod; 232, cylinder connecting sleeve; 240, second connecting sleeve; 241, scraper connecting rod; 250, first connecting sleeve; 251, pressure detection port; 300, air inlet cavity device; 310, air inlet cavity; 311, air outlet port; 312, limiting ring; 313, air inlet port; 314, air inlet cavity shell; 315, interlayer cavity; 316, heat source installation port; 317, inlet pipe; 318, second interface; 400, intracavity scraper device; 410, driving component; 411, support frame; 412, scraper; 413, lower roller; 414, bottom scraping module; 415, upper roller; 417, driving shaft; 418, toothed disc; 419, driving rod; 500, air intake device; 510, air intake pipe; 520, negative pressure detection tube scraper; 530, air intake connecting pipe; 540, negative pressure detection port; 610, flange body; 611, flange cover; 612, first convex ring; 613, guide groove; 614, second convex ring; 615, annular flow channel; 616, arc surface. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0039] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0040] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0041] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0042] like Figures 1 to 5 As shown, the multi-inlet scraper air inlet chamber for the waste gas treatment equipment includes an air inlet chamber device 300, an intra-cavity scraper device 400 and a plurality of air inlet devices 500. The air inlet chamber device 300 has an air inlet chamber 310 inside, an air outlet port 311 is provided at the bottom of the air inlet chamber device 300, and the air outlet port 311 is provided with a radially inwardly extending limiting ring 312, and the side wall of the air inlet chamber device 300 is provided with a plurality of air inlet ports 313.

[0043] The intracavity scraper device 400 includes a driving component 410, a support frame 411, a plurality of scrapers 412 and a plurality of lower rollers 413. The support frame 411 is rotatably arranged in the air inlet cavity 310. The driving component 410 is connected to the support frame 411 and is used to drive the support frame 411 to rotate. The plurality of scrapers 412 are arranged at intervals on the outer periphery of the support frame 411 and are used to scrape off the dust on the side wall of the air inlet cavity 310 when the support frame 411 rotates. The plurality of lower rollers 413 are arranged at intervals at the bottom of the support frame 411 along the circumferential direction and are in rolling cooperation with the limit ring 312. The lower rollers 413 can provide support for the support frame 411 and avoid contact between the support frame 411 and the limit ring 312, thereby reducing the friction during the rotation of the support frame 411. The plurality of air inlet devices 500 are connected to the plurality of air inlet ports 313 in a one-to-one correspondence. The air inlet devices 500 are used to input air into the interior of the air inlet cavity device 300.

[0044] After the process waste gas enters the air inlet chamber 310, it will react rapidly with the reaction gas in the chamber at high temperature. Some dust will flow out from the lower part of the air inlet chamber 310 through the air flow, and a small amount of dust will adhere to the inner wall of the air inlet chamber 310. After a long period of operation, the air inlet chamber 310 will be clogged with dust. The waste gas treatment equipment provided by the present invention uses a multi-inlet scraper air inlet chamber, and the support frame 411 is driven to rotate by the driving component 410. The scraper 412 scrapes off the dust on the side wall of the air inlet chamber 310 when the support frame 411 rotates, preventing the dust inside the air inlet chamber 310 from clogging the air inlet chamber 310, and preventing the waste gas treatment equipment from stopping working due to the clogging of the air inlet chamber 310.

[0045] In one embodiment of the present invention, the intracavitary scraper device 400 uses corrosion-resistant materials, the air inlet cavity 310 is a circular air inlet cavity 310, the support frame 411 is a circular frame, the scraper 412 is vertically arranged, the scraper 412 is parallel to the side wall of the air inlet cavity 310, the distance between two adjacent scrapers 412 is equal, the scraper 412 is welded to the support frame 411, and the number of scrapers 412 is determined according to actual needs.

[0046] In one embodiment of the present invention, Figure 5 As shown, the intracavitary scraper device 400 also includes a plurality of scraping modules 414, which are rectangular parallelepiped, and are welded to the bottom of the support frame 411. Of course, the scraping modules 414 and the support frame 411 can also be connected by screws. The plurality of scraping modules 414 are arranged at intervals along the circumference at the bottom of the support frame 411, and the distances between two adjacent scraping modules 414 can be the same or different. The plurality of lower rollers 413 are respectively installed on the plurality of scraping modules 414 in a one-to-one correspondence through the shafts of the lower rollers 413, and the scraping modules 414 are used to push the dust falling on the limit ring 312 to the air outlet port 311.

[0047] Although the scraper 412 can scrape off the dust on the side wall of the air inlet chamber 310, the dust from the scraper 412 will move downward and fall on the limiting ring 312. By setting a bottom scraping module 414 at the bottom of the support frame 411, the bottom scraping module 414 can push the dust at the bottom of the air inlet chamber 310 out of the air inlet chamber 310 through the air outlet port 311.

[0048] In one embodiment of the present invention, Figure 5As shown, the intracavity scraper device 400 also includes a plurality of upper rollers 415, which are arranged at intervals along the circumference on the upper part of the support frame 411, and the upper rollers 415 are arranged horizontally. The upper rollers 415 are mounted on the support frame 411 through the upper roller 415 shaft, and the upper rollers 415 roll with the side wall of the air inlet chamber 310. Since the contact point between the driving rod 419 and the toothed disc 418 is not at the center of the toothed disc 418, the toothed disc 418 is unevenly stressed and will be biased to the stressed side. By arranging the upper rollers 415 on the upper part of the support frame 411, the upper rollers 415 roll with the side wall of the air inlet chamber 310, and the upper rollers 415 not only play a limiting role on the support frame 411, ensuring that the support frame 411 is in the center of the air inlet chamber 310, but also avoid the contact between the support frame 411 and the side wall of the air inlet chamber 310, thereby reducing the friction during the rotation of the support frame 411.

[0049] In one embodiment of the present invention, Figures 1 to 5 As shown, the driving component 410 includes a driving assembly, a driving shaft 417, a toothed disc 418 and a driving rod 419. The driving assembly is arranged at the top of the air inlet chamber device 300. The driving assembly and the driving shaft 417 are located outside the air inlet chamber 310. The driving shaft 417 is arranged vertically, and one end of the driving shaft 417 is connected to the driving assembly. The toothed disc 418 is annular, and the toothed disc 418 is arranged on the upper part of the support frame 411. The toothed disc 418 and the support frame 411 are arranged coaxially. The toothed disc 418 is welded to the support frame 411 or is integrally formed with the support frame 411. The toothed disc 418 is an inner toothed ring. Of course, the toothed disc 418 can also be an outer toothed ring. The driving rod 419 is disposed inside the air inlet chamber 310. The driving rod 419 is coaxially disposed with the driving shaft 417. The driving rod 419 is connected to the other end of the driving shaft 417. A plurality of positioning blocks are arranged at intervals on the edge of the bottom of the driving rod 419. The shape of the positioning blocks matches the shape of the convex teeth of the toothed disc 418. The positioning blocks are used to mesh with the convex teeth of the toothed disc 418. In this embodiment, three convex teeth are arranged, and the distance between two adjacent convex teeth is equal. When the driving rod 419 rotates, the convex teeth cooperate with the positioning blocks to drive the toothed disc 418 to rotate.

[0050] Furthermore, the driving assembly includes a motor and a reducer, the rotating shaft of the motor is connected to the input shaft of the reducer, the output shaft of the reducer is connected to one end of the driving shaft 417, the motor housing and the reducer housing are both connected to the motor fixing plate, and the motor fixing plate is connected to the top of the air inlet chamber housing 314 by screws.

[0051] In one embodiment of the present invention, Figures 1 to 5As shown, the driving component 410 also includes a connecting rod, an oil seal and a sealing ring. One end of the connecting rod is connected to the driving rod 419, and the other end of the connecting rod passes through the top of the air intake chamber device 300 and is connected to the other end of the driving shaft 417 through a coupling. Specifically, a connecting hole is provided at the top of the air intake chamber housing 314, and the connecting hole is connected to the air intake chamber 310, but not to the interlayer chamber 315. One end of the connecting rod is welded to the driving rod 419 or integrally formed, and the other end of the connecting rod passes through the connecting hole and is connected to the coupling, and the coupling is connected to the other end of the driving shaft 417.

[0052] The oil seal is sleeved on the outer periphery of the connecting rod, and the oil seal is located between the outer periphery of the connecting rod and the top wall of the air intake chamber device 300. Specifically, the oil seal is located between the outer periphery of the connecting rod and the inner wall of the connecting hole. The oil seal is used to seal the gap between the outer periphery of the connecting rod and the inner wall of the connecting hole. The sealing ring is sleeved on the outer periphery of the connecting rod, and the sealing ring is located between the outer periphery of the connecting rod and the top wall of the air intake chamber device 300. Specifically, the sealing ring is located between the outer periphery of the connecting rod and the inner wall of the connecting hole. The sealing ring is used to seal the gap between the outer periphery of the connecting rod and the inner wall of the connecting hole. Preferably, the sealing ring is an O-type sealing ring.

[0053] When the motor drives the reducer to rotate, the motor drives the drive shaft 417 to rotate, and the drive shaft 417 drives the connecting rod to rotate through the coupling, and the connecting rod drives the support frame 411 to rotate through the driving rod 419, and the support frame 411 drives the scraper 412 and rotates in the air intake chamber 310 with the cooperation of the upper and lower rollers 413. During the rotation process, the air intake chamber 310 is doubly sealed by the sealing ring and the oil seal. During the rotation process, part of the dust scraped off by the scraper 412 on the cavity wall and the cavity top will remain at the cavity bottom. At this time, the bottom scraping module 414 pushes the dust at the bottom of the air intake chamber 310 out of the cavity bottom.

[0054] In one embodiment of the present invention, Figure 5As shown, the air intake chamber device 300 includes an air intake chamber shell 314, the air intake chamber 310 is formed inside the air intake chamber shell 314, and the side wall of the air intake chamber shell 314 is provided with a plurality of air intake ports 313, the plurality of air intake ports 313 are arranged at intervals along the circumferential direction, and two adjacent air intake ports 313 are staggered along the up and down directions, so that more air intake ports 313 can be arranged in a limited space. The air inlet port 313 can be set to 6, 8, 10, 12 or more according to needs. The air inlet port 313 is provided with an air inlet flange. The air inlet flange uses a standard KF vacuum flange for easy assembly and disassembly. The air inlet flange and the air inlet pipe 510 are inserted and connected. This connection method is adopted to spatially isolate the exhaust gas from the medium in the interlayer cavity 315, which can greatly reduce the influence of the interlayer medium on the exhaust gas flowing through the air inlet pipe 510. For example, some high-temperature exhaust gas will form dust during the cooling process. If the air inlet pipe 510 is not isolated from the cooling medium in the interlayer cavity 315, a large amount of dust will be formed at the air inlet to block the air inlet pipe 510.

[0055] An interlayer cavity 315 is provided inside the side wall of the air inlet chamber shell 314 and inside the top wall of the air inlet chamber shell 314. Various media can be introduced into the interlayer cavity 315 according to needs. For example, cooling water can be introduced if the temperature of the inner and outer walls of the cavity needs to be lowered, and high-temperature steam can be introduced if the internal temperature needs to be protected. The interlayer cavity 315 is provided inside the side wall of the air inlet chamber shell 314 and inside the top wall of the air inlet chamber shell 314 for the following three reasons: 1. The corrosive gas (fluoride) in the exhaust gas corrodes the inner wall of the air inlet chamber 310 at high temperature. Cooling water can reduce the temperature of the inner wall and slow down the corrosion. 2. High temperature can cause the external temperature of the air inlet chamber 310 to be high. Cooling water can reduce the temperature of the outer wall of the air inlet chamber 310 to protect the safety of employees during equipment maintenance and inspection. 3. Some process exhaust gases require higher temperatures to decompose. The use of high-temperature steam can protect the temperature in the cavity, reduce heat loss, and thus increase the temperature in the cavity.

[0056] The lower part of the outer wall of the air inlet chamber shell 314 is provided with a first interface connected to the interlayer chamber 315. Preferably, a plurality of first interfaces are provided, and the plurality of first interfaces are arranged at intervals along the outer periphery of the air inlet chamber 310. The first interface can input or output the medium. The outer side of the top wall of the air inlet chamber shell 314 is provided with a second interface 318 connected to the interlayer chamber 315. The plurality of second interfaces 318 are provided, and the second interface 318 can input or output the medium. When a liquid medium is used, it can be input into the interlayer chamber 315 through the second interface 318 and output from the first interface; when a gas medium is used, it can be input into the interlayer chamber 315 through the first interface and output from the second interface 318; in this way, the flexible installation according to the different media can make the medium fill the interlayer chamber 315 to achieve better cooling or heat preservation effect. The limit ring 312 is located at the bottom of the air inlet chamber shell 314, and the limit ring 312 is detachably connected to the air inlet chamber shell 314. Preferably, the limit ring 312 is connected to the air inlet chamber shell 314 by bolts.

[0057] Furthermore, a fixed pull ring is provided on the top of the air inlet cavity shell 314. When the cavity is maintained, the fixed pull ring can be used to flip the air inlet cavity shell 314 and fix the air inlet cavity shell 314 using a chain and the pull ring, so as to facilitate maintenance.

[0058] In one embodiment of the present invention, a heat source mounting port 316 communicating with the air inlet chamber 310 is provided at the top of the air inlet chamber shell 314. The heat source mounting port 316 is located at the center of the top of the air inlet chamber shell 314. The heat source mounting port 316 is used to install an ion torch or a natural gas burner. The heat source mounting port 316 is sealed by an O-ring or a sealing gasket.

[0059] In one embodiment of the present invention, Figure 5 and Figure 6 As shown, the multi-inlet scraper air inlet chamber for waste gas treatment equipment also includes an overflow flange, which includes a flange body 610 and a flange cover 611. The flange body 610 and the flange cover 611 are both arranged at the bottom of the limiting ring 312. The flange body 610 and the flange cover 611 are both annular. The thickness of the flange body 610 is greater than the thickness of the flange cover 611. The inner diameter of the flange body 610 is greater than the outer diameter of the flange cover 611. The flange body 610 is located at the periphery of the flange cover 611. Preferably, an annular groove is provided on the outer peripheral surface of the flange cover 611, a sealing ring is provided in the annular groove, and the inner side of the flange body 610 and the outer side of the flange cover 611 are sealed by the sealing ring. An annular groove is provided on the side of the upper surface of the flange cover 611 away from the flange body 610, a sealing ring is provided in the annular groove, and the upper surface of the flange cover 611 and the lower surface of the limiting ring 312 are sealed by the sealing ring. An annular groove is provided on the upper surface of the flange body 610 , and a sealing ring is provided in the annular groove. The upper surface of the flange body 610 and the lower surface of the limiting ring 312 are sealed by the sealing ring.

[0060] A first convex ring 612 extending radially inward is provided on the inner side of the flange body 610. The width of the first convex ring 612 is smaller than the width of the flange cover 611. The first convex ring 612 is located below the flange cover 611. A guide groove 613 is formed on the upper surface of the first convex ring 612. The guide groove 613 is annular. The side wall of the guide groove 613 away from the flange body 610 is an inclined surface. The inclined surface can reduce the resistance of the medium flowing from the guide groove 613 to the annular flow channel 615, and make more medium flow to the arc surface 616 of the second convex ring 614.

[0061] The outer side of the flange body 610 is provided with a liquid inlet connected to the guide groove 613. There are multiple liquid inlets, which are evenly spaced along the circumference. By providing multiple liquid inlets, liquid can be input from different directions. In this embodiment, there are four liquid inlets. Of course, the number of liquid inlets is not limited to this, and is determined according to actual needs. The outer side of the flange body 610 is provided with an inlet pipe 317 connected to the liquid inlet. The normal of the connection between the inlet pipe 317 and the external liquid inlet of the flange body 610 is 53.4 degrees. This liquid inlet is just tangent to the guide groove 613. After the circulating water is introduced into the four liquid inlets, it rotates and flows in the guide groove 613. The rotating flow can make the circulating water evenly distributed in the guide groove 613, and finally flows out from the eagle mouth between the flange cover 611 and the flange body 610.

[0062] A second convex ring 614 is formed on the side of the lower surface of the flange cover 611 away from the flange body 610. The second convex ring 614 is annular and protrudes downward relative to the upper surface of the flange body 610. The second convex ring 614 is located on the side of the first convex ring 612 away from the flange body 610. The second convex ring 614 and the side of the first convex ring 612 away from the flange body 610 cooperate to form an annular flow channel 615 connected to the guide groove 613. The thickness of the annular flow channel 615 is less than the thickness of the guide groove 613. In this way, the guide groove 613 plays a certain temporary storage role for the circulating water, improves the stability of the circulating water in the annular flow channel 615, and the liquid outlet of the annular flow channel 615 is downward.

[0063] In one embodiment of the present invention, Figure 6As shown, the side of the second convex ring 614 facing the first convex ring 612 is an arc surface 616, and the arc surface 616 forms a liquid outlet similar to an eagle's beak between the second convex ring 614 and the first convex ring 612. The circulating water first flows into the guide groove 613 from the inlet pipe 317 to rotate, and then flows from the guide groove 613 to the annular flow channel 615. At this time, the flow rate of the circulating water is accelerated, and then the circulating water is ejected through the eagle's beak liquid outlet to the side of the first convex ring 612 away from the flange body 610, so that the annular water curtain flows downward along the side of the first convex ring 612 away from the flange body 610, thereby washing away the dust on the inner wall (the lower part of the flange body 610 is connected to the reaction chamber, so that the dust on the inner wall of the reaction chamber can also be washed away).

[0064] In one embodiment of the present invention, the air intake device 500 includes an air intake pipe 510, an air intake scraper 100 and a negative pressure detection tube scraper 520. The air intake pipe 510 is a circular tube. The side wall of the air intake pipe 510 is provided with an air intake connecting pipe 530 connected to the air intake pipe 510, and the air intake connecting pipe 530 is perpendicular to the air intake pipe 510. The air intake pipe 510 and the air intake connecting pipe 530 cooperate to form a three-way connector. The air intake pipe 510 and the air intake connecting pipe 530 are welded or integrally formed. One end of the air intake pipe 510 is inserted into the air intake port 313 and connected to the air intake flange through a flange. The air intake pipe 510 is connected to the air intake cavity 310 through the air intake port 313. The air enters the air intake pipe 510 through the air intake connecting pipe 530, and then enters the air intake cavity 310 from one end of the air intake pipe 510.

[0065] In one embodiment of the present invention, Figure 7 As shown, the air inlet scraper 100 can be used to clear a blocked air inlet pipe. The air inlet scraper 100 includes a scraper assembly 110, a scraper connecting assembly 120 and a first scraper driving assembly 130. The scraper assembly 110 is used to be arranged in the air inlet pipe, and the scraper assembly 110 abuts against the inner wall of the air inlet pipe. One end of the scraper connecting assembly 120 is connected to the scraper assembly 110. The first scraper driving assembly 130 is connected to the other end of the scraper connecting assembly 120, and the first scraper driving assembly 130 drives the scraper assembly 110 to move through the scraper connecting assembly 120.

[0066] In one embodiment of the present invention, by providing a scraper assembly 110 that can abut against the inner wall of the intake pipe, a scraper connecting assembly 120 connected to the scraper assembly 110, and a first scraper driving assembly 130 for driving the scraper connecting assembly 120, the scraper connecting assembly 120 can be driven by the first scraper driving assembly 130, thereby driving the scraper assembly 110 to move in the intake pipe, so that the scraper assembly 110 can scrape off the dust on the inner wall of the intake pipe to avoid the intake pipe from being blocked. The problem of dust blocking the intake pipe of the intake chamber of the exhaust gas treatment equipment in the prior art and the difficulty in installing the traditional cylinder scraper is solved.

[0067] It should be noted that the first scraper driving assembly 130 can drive the scraper assembly 110 to move along the axial direction of the air intake pipe through the scraper connecting assembly 120, and can also drive the scraper assembly 110 to rotate relative to the air intake pipe.

[0068] In some embodiments of the present invention, the first scraper driving assembly 130 may be a rotary cylinder or a motor, etc. Taking the rotary cylinder as an example, the rotary cylinder drives the air intake pipe connecting assembly to rotate, thereby driving the scraper assembly 110 to rotate in the air intake pipe.

[0069] In some other embodiments, the first scraper driving assembly 130 may be a linear cylinder, and the linear cylinder may drive the scraper assembly 110 to move linearly along the axial direction of the intake pipe in the intake pipe through the scraper connecting assembly 120 .

[0070] Furthermore, both the linear cylinder and the rotary cylinder are dual-drive cylinders and have air inlet pipes of two specifications, which can prevent errors in the installation of the air pipes during the installation process.

[0071] The air inlet scraper 100 of the present invention is described in detail below by taking the example of the scraper assembly 110 performing linear motion along the axial direction of the air inlet pipe in the air inlet pipe.

[0072] like Fig. 9 and Fig.10 As shown, in some embodiments of the present invention, the scraper assembly 110 includes a scraper plate 111, and the circumferential side surface 113 of the scraper plate 111 is used to abut against the inner wall of the intake pipe. When the scraper plate 111 moves in the axial direction of the intake pipe, the circumferential side surface 113 of the scraper plate 111 can scrape off the dust on the inner wall of the intake pipe. One end of the scraper connecting assembly 120 is connected to the first end surface of the scraper plate 111, and the scraper connecting assembly 120 is used to slide with the intake pipe along the axial direction of the intake pipe; the first scraper driving assembly 130 drives the scraper plate 111 to reciprocate along the axial direction of the intake pipe through the scraper connecting assembly 120. By providing the scraper plate 111 whose circumferential side surface abuts against the inner wall of the intake pipe, and the scraper connecting assembly 120 that slides with the intake pipe along the axial direction of the intake pipe, and then cooperating with the first scraper driving assembly 130, dust can be removed from the intake pipe along the axial direction, and the structure is simple and the operation is convenient.

[0073] Specifically, the linear cylinder is connected to the other end of the scraper connecting assembly 120, and is used to drive the scraper plate 111 to reciprocate along the axial direction of the intake pipe in the intake pipe through the scraper connecting assembly 120 to scrape off the dust attached to the inner wall of the intake pipe.

[0074] like Fig.10As shown, further, along the axial direction of the air inlet pipe, a vent hole 112 is opened on the scraper plate 111. The vent hole 112 can ensure that the gas in the air inlet pipe flows smoothly when the scraper plate 111 is working, realize continuous action, and improve the working speed.

[0075] It should be noted that the shape of the vent hole 112 is not limited in this embodiment. Preferably, the vent hole 112 is a fan-shaped hole. The central angle of each fan-shaped hole points to the center of the scraper plate 111.

[0076] Specifically, the cross section of the scraper plate 111 is the same as the cross section of the air intake pipe. For example, the cross section of the scraper plate 111 is circular.

[0077] like Figures 9 to 11 As shown, further, the scraper connection assembly 120 includes a first scraper link 121, a first flexible connector 122 and a second scraper link 123. One end of the first scraper link 121 is connected to the first end surface of the scraper plate 111, and is used to slide with the intake pipe; one end of the first flexible connector 122 is connected to the other end of the first scraper link 121. One end of the second scraper link 123 is connected to the other end of the first flexible connector 122, and the other end of the second scraper link 123 is connected to the first scraper drive assembly 130. By providing the first scraper link 121, a mounting base can be provided for the scraper plate 111, and the scraper plate 111 can be guided to ensure that the scraper plate 111 can move along the axial direction of the intake pipe when subjected to force. By providing the first flexible connector 122, the shape of the scraper connection assembly 120 can be adjusted according to actual conditions. For example, the first flexible connector 122 can be bent, which can reduce the space occupied by the scraper connection assembly 120, which is conducive to the miniaturized design of the air inlet scraper 100 and facilitates the use of the air inlet scraper 100 in areas with smaller spaces. In addition, the installation direction of the first scraper drive assembly 130 can be adjusted to reduce the installation space. By providing the second scraper connecting rod 123, an installation foundation can be provided for the first scraper drive assembly 130 to facilitate the transmission of force.

[0078] Specifically, one end of the first scraper link 121 is welded to the first end face of the scraper plate 111, and one end of the first flexible connector 122 is welded to the other end of the first scraper link 121; one end of the second scraper link 123 is welded to the other end of the first flexible connector 122, and the other end of the second scraper link 123 is connected to the piston rod of the cylinder. The piston rod of the cylinder drives the scraper plate 111 to reciprocate along the axial direction of the intake pipe through the second scraper link 123, the first flexible connector 122 and the first scraper link 121.

[0079] Furthermore, the first flexible connector 122 may be a tension spring. The tension spring can be used to closely fit the waves in a free state, so that the scraper plate 111 acts as a rigid force when working, thereby improving the dust scraping effect.

[0080] like Figures 7 to 10 As shown, further, the air inlet scraper 100 also includes a shell 140; the shell 140 has a receiving cavity inside, the scraper connecting assembly 120 is located in the receiving cavity, and a ventilation gap is formed between the shell 140 and the inner side wall; the shell 140 is provided with an air inlet hole connected to the ventilation gap; the first scraper connecting rod 121 is a pipe, and a plurality of air outlet holes 124 are provided on the side of the first scraper connecting rod 121, and the plurality of air outlet holes 124 are arranged at intervals along the axial direction of the first scraper connecting rod 121, and the air outlet holes 124 are connected to the ventilation gap. When the scraper plate 111 reciprocates along the axial direction of the air inlet pipe, the first scraper connecting rod 121 will also move relative to the air inlet pipe, and the air inlet hole, the first scraper connecting rod 121 and the ventilation gap form a purge pipeline, and the air outlet holes 124 on the first scraper connecting rod 121 have a purge function. When the scraper plate 111 is working, the airflow blown by the air outlet 124 will ensure that the first scraper connecting rod 121 is under positive pressure and the airflow continues to flow out, ensuring that no dust enters the interior of the housing 140, and protecting the interior of the scraper from being eroded by dust and exhaust gas.

[0081] Specifically, one end of the housing 140 is used to connect with the air inlet pipe, and the other end of the housing 140 is threadedly assembled with the cylinder, and a sealing gasket is arranged inside. The accommodating cavity of the housing 140 can ensure that the piston rod of the cylinder can move freely.

[0082] Specifically, a ferrule air inlet pipe 150 is installed at the air inlet hole of the outer shell 140, and a throttle valve 160 is installed on the ferrule air inlet pipe 150. The throttle valve 160 is used to adjust the air flow rate entering the ventilation gap to ensure that the air flow discharged from the air outlet 124 can prevent dust and exhaust gas from entering the accommodating cavity of the outer shell 140, thereby ensuring that the interior of the air inlet scraper 100 is not corroded by dust and exhaust gas.

[0083] like Figures 7 to 11As shown, further, the housing 140 includes a guide tube 141 and a fixed tube 142; the guide tube 141 is sleeved on the outside of the first scraper connecting rod 121 and the first flexible connecting member 122, and one end of the guide tube 141 is used to connect with the air intake pipe. One end of the fixed tube 142 is detachably connected to the other end of the guide tube 141, and the fixed tube 142 is sleeved on the outside of the second scraper connecting rod 123, and the other end of the fixed tube 142 is connected to the first scraper driving assembly 130. By providing the guide tube 141, the first scraper connecting rod 121 and the first flexible connecting member 122 can be protected, and by providing the fixed tube 142, the second scraper connecting rod 123 can be protected. By detachably connecting the guide tube 141 and the fixed tube 142, it is convenient to maintain and disassemble the air intake scraper 100. For example, if the tension spring is damaged and needs to be replaced, the scraper plate 111 is maintained, and the linear cylinder is maintained, the guide tube 141 and the fixed tube 142 can be disassembled first.

[0084] Specifically, the guide tube 141 and the fixed tube 142 are connected by a straight-through ferrule 143 to form a housing 140 with an accommodating cavity inside, the fixed tube 142 is threadedly assembled with the linear cylinder, the piston rod of the linear cylinder is connected to the second scraper connecting rod 123, and an air inlet hole is opened on the tube wall of the fixed tube 142. The length of the fixed tube 142 changes with the stroke of the linear cylinder, and the fixed tube 142 ensures that the movement of the piston rod within the maximum stroke is not interfered.

[0085] It is understandable that the straight-through ferrule 143 may be a straight-through reducing ferrule.

[0086] Furthermore, the guide pipe 141 includes a straight pipe section 144 and a curved pipe section 145. The straight pipe section 144 is sleeved on the outside of the first scraper connecting rod 121, and one end of the straight pipe section 144 is used to connect with the air inlet pipe. The curved pipe section 145 is formed at the other end of the straight pipe section 144; the curved pipe section 145 is sleeved on the outside of the first flexible connector 122; one end of the curved pipe section 145 away from the straight pipe section 144 is detachably connected to the fixed pipe 142. Specifically, one end of the straight pipe section 144 is used to be welded to the air inlet pipe, and the other end of the straight pipe section 144 is integrally formed with the curved pipe section 145, and the other end of the curved pipe section 145 is detachably connected to the fixed pipe 142 through a straight-through ferrule 143. The linear cylinder drives the second scraper link 123 to move relative to the fixed tube 142, and the second scraper link 123 pushes the first flexible connector 122, that is, the tension spring is deformed. At this time, the tension spring moves relative to the curved pipe section 145; the tension spring drives the first scraper link 121 to move in the straight pipe section 144, and at the same time drives the scraper plate 111 to move axially along the intake pipe, thereby scraping off the dust on the inner wall of the intake pipe.

[0087] Specifically, the curved pipe section 145 is flexible, that is, the shape of the curved pipe section 145 can be changed, ensuring that the deformation of the first flexible connector 122 will not be interfered by the curved pipe section 145 .

[0088] like Figures 17 to 19 As shown, the air inlet scraper 100 includes a driving assembly 40, a sealing assembly 20 and a scraper 30. The other end of the air inlet pipe 510 is provided with an opening. The sealing assembly 20 is arranged at the other end of the air inlet pipe 510 and seals the opening. The scraper 30 is arranged inside the air inlet pipe 510, and the scraper 30 extends along the axial direction of the air inlet pipe 510 in a spiral. The driving assembly 40 is connected to the sealing assembly 20 and the scraper 30, and the driving assembly 40 is used to drive the scraper 30 to rotate so as to scrape off the dust on the inner wall of the air inlet pipe 510.

[0089] The air inlet scraper 100 provided by the present invention can drive the scraper 30 to rotate through the driving assembly 40, so as to scrape off the dust on the inner wall of the air inlet pipe 510, effectively solving the problem of dust blockage at the air inlet; because the scraper 30 is spiral-shaped, the inner wall of the air inlet pipe 510 can be scraped off multiple times after one rotation, thereby improving the cleaning efficiency. In addition, the spiral scraper 30 can also push the dust scraped off by the scraper 30 out of the air outlet of the air inlet pipe 510, thereby preventing the dust from accumulating in the air inlet pipe 510.

[0090] In one embodiment of the present invention, the scraper 30 is made of corrosion-resistant material, and the pitch of the scraper 30 is equal to the outer diameter of the scraper 30, so that the cross section of the scraper 30 forms an angle of 45° with the axis of the air inlet pipe 510, so that the scraper 30 has the best effect of pushing the dust. The length of the scraper 30 is greater than the length of the air inlet pipe 510, so that part of the scraper 30 is exposed from the air inlet pipe 510, and the pitch, number of turns, and outer diameter of the scraper 30 can be adjusted according to needs.

[0091] In one embodiment of the present invention, Fig.19 As shown, the wire diameter section of the scraper 30 is circular, semicircular, triangular or square. Compared with the scraper 30 with a circular wire diameter section, the scraper 30 with a semicircular, triangular or square wire diameter section has the best scraping effect. When the wire diameter section of the scraper 30 is semicircular, the flat surface of the scraper 30 faces outward and the round surface faces inward to reduce the contact area between the scraper 30 and the dust, thereby reducing the accumulation of dust on the scraper 30. The scrapers 30 with semicircular or square wire diameter sections all use the sharp corners of the scraper 30 to remove dust inside the intake pipe 510.

[0092] When the air inlet pipe 510 is arranged horizontally, the scraper 30 is also in a horizontal state, and the dust scraped by the scraper 30 can be taken out of the air outlet of the air inlet pipe 510 by the airflow entering through the air inlet connecting pipe 12, and can also be pushed out of the air outlet of the air inlet pipe 510 by the rotating scraper 30. When the air inlet pipe 510 is arranged vertically, the scraper 30 is also in a vertical state, and the dust scraped by the scraper 30 can be taken out of the air outlet of the air inlet pipe 510 by the airflow entering through the air inlet connecting pipe 12 and the gravity of the dust, and can also be pushed out of the air outlet of the air inlet pipe 510 by the rotating scraper 30.

[0093] In one embodiment of the present invention, the drive assembly 40 includes a motor 41 and a reducer 42, the input end of the reducer 42 is connected to the rotating shaft of the motor 41, the output end of the reducer 42 is connected to the other end of the connecting shaft 24, and the housing of the reducer 42 abuts against the step 23. Of course, the step 23 can also be set on the reducer 42, and the step 23 abuts against the side of the sealing flange 21 facing the reducer 42. Since the scraper 30 will encounter greater resistance during the process of scraping dust, the reduction gear 42 is arranged between the motor 41 and the scraper 30 to increase the torque output by the drive assembly 40 and enhance the scraping effect of the scraper 30. The housing of the motor 41 is connected to the housing of the reducer 42. Of course, the reducer 42 can also be integrated into the motor housing.

[0094] In one embodiment of the present invention, the sealing assembly 20 includes a sealing flange 21 and a motor flange 22. The outer peripheral surface of the other end of the intake pipe 510 is provided with a connecting flange 11, and the sealing flange 21 is connected to the connecting flange 11. Preferably, a flange sealing ring is provided between the sealing flange 21 and the connecting flange 11 to improve the sealing between the sealing flange 21 and the connecting flange 11. The sealing flange 21 can be conveniently connected to the intake pipe 510. The sealing flange 21 blocks the opening. The interior of the sealing flange 21 is provided with a through hole, which extends along the central axis of the sealing flange 21. The through hole is used to install the connecting shaft 24. In this embodiment, the sealing flange 21 is a KF flange. Of course, the specific structure of the sealing flange 21 is not limited thereto, and is determined according to actual needs.

[0095] The motor flange 22 is provided to facilitate the connection between the scraper 30 and the drive assembly 40. The motor flange 22 is sleeved on the end of the sealing flange 21 away from the air inlet pipe 510, and the motor flange 22 is connected to the drive assembly 40. Specifically, the motor flange 22 is a sheet structure, and the motor flange 22 is sleeved on the end of the sealing flange 21 away from the air inlet pipe 510, that is, the motor flange 22 is sleeved on the left end of the sealing flange 21, and the motor flange 22 is welded or integrally formed with the sealing flange 21. The four corners of the motor flange 22 are respectively provided with a through hole, and the motor flange 22 is connected to the reducer housing through the screws in the through hole. Compared with the use of a cylinder or other types of driving mechanisms, the use of the motor 41 and the reducer 42 effectively reduces the volume of the drive assembly 40.

[0096] In one embodiment of the present invention, the sealing flange 21 forms a step 23 on the side of the motor flange 22 facing the driving assembly 40, that is, the sealing flange 21 protrudes relative to the motor flange 22, and a gap is formed between the motor flange 22 and the reducer housing. The driving assembly 40 abuts against the step 23, specifically, the reducer housing abuts against the step 23, and the step 23 is a circular step 23. The step 23 is provided for sealing with the reducer housing to prevent the exhaust gas from contacting the reducer 42 or the motor 41, causing corrosion of the motor 41 or the reducer 42.

[0097] In one embodiment of the present invention, the step 23 is provided with a sealing ring, the material of the sealing ring is rubber, and the sealing ring is sealed with the driving assembly 40 and the step 23. Preferably, there are two sealing rings, namely, an outer sealing ring 25 and an inner sealing ring 26, the diameter of the outer sealing ring 25 is larger than the diameter of the inner sealing ring 26, the inner sealing ring 26 is coaxially arranged with the through hole, the inner sealing ring 26 is sleeved on the outer peripheral surface of the rotating shaft, the inner sealing ring 26 is used to seal the gap between the step 23 and the reducer housing, and also to seal the gap between the rotating shaft and the step 23, the outer sealing ring 25 is located on the outside of the inner sealing ring 26, and the outer sealing ring 25 is used to seal the gap between the step 23 and the reducer housing to form a secondary seal, and if one of the outer sealing ring 25 and the inner sealing ring 26 is damaged, it will not affect the normal operation of the equipment.

[0098] In one embodiment of the present invention, the step 23 is provided with a groove, and the sealing ring is partially embedded in the groove. Specifically, there are two grooves, namely an inner groove and an outer groove, the inner groove is coaxially arranged with the through hole, and the inner groove is connected with the through hole, and the inner sealing ring 26 is embedded in the inner groove. The outer groove is arranged at the outer periphery of the inner groove, the central axis of the outer groove is in the same straight line as the central axis of the inner groove, and the outer sealing ring 25 is embedded in the outer groove.

[0099] In one embodiment of the present invention, a connecting shaft 24 is provided in the sealing flange 21, one end of the connecting shaft 24 is connected to the scraper 30, and the other end of the connecting shaft 24 is connected to the driving assembly 40. Specifically, the connecting shaft 24 is provided in the through hole, the connecting shaft 24 is sealed with the sealing flange 21 through the inner sealing ring 26, one end of the connecting shaft 24 is directly connected to the scraper 30 or connected to the scraper 30 through the scraper fixing plate 50, the output end of the reducer 42 is provided with a plug hole, the plug hole is a non-circular hole, the cross section of the other end of the connecting shaft 24 is non-circular, and the other end of the connecting shaft 24 is inserted into the plug hole. Of course, in some embodiments, the output end of the reducer 42 can also be directly connected to the scraper 30 or the scraper fixing plate 50 after passing through the through hole.

[0100] In one embodiment of the present invention, the air inlet scraper 100 further includes a scraper fixing plate 50, which is a circular sheet structure. The gap between the circular scraper fixing plate 50 and the inner wall of the air inlet pipe 510 can be minimized, which can fully block the dust in the air inlet pipe 510 from spreading to the motor end, and effectively prevent the dust from clogging and causing the drive assembly 40 to jam or be damaged. The scraper fixing plate 50 is arranged inside the air inlet pipe 510, and the scraper fixing plate 50 is welded and connected to the scraper 30. Of course, the scraper fixing plate 50 can also be connected to the scraper 30 by plugging or other detachable connection methods to facilitate the replacement of the scraper fixing plate 50 or the scraper 30. The side of the scraper fixing plate 50 facing away from the scraper 30 is connected to one end of the connecting shaft 24. Specifically, the side of the scraper fixing plate 50 facing away from the scraper 30 is provided with a connecting portion, and the connecting portion is provided with a threaded blind hole. One end of the connecting shaft 24 is inserted into the threaded blind hole and threadedly matched with the threaded blind hole.

[0101] Furthermore, a threaded through hole is provided on the side wall of the blind hole, and a screw is provided in the threaded through hole. The screw abuts against one end of the connecting shaft 24, thereby fixing one end of the connecting shaft 24 in the threaded blind hole.

[0102] Furthermore, since the high temperature is transferred from the scraper 30 to the connecting shaft 24 during the operation of the waste gas treatment equipment, the thermal expansion and contraction may easily cause the connection between the connecting shaft 24 and the scraper fixing plate 50 to loosen, resulting in the separation of the scraper 30 from the motor 41. Therefore, in the process of connecting the connecting shaft 24 and the scraper fixing plate 50, high-temperature resistant fixing glue is injected between the connecting shaft 24 and the scraper fixing plate 50. The high-temperature resistant fixing glue can prevent the loosening of the connecting shaft 24 and the scraper fixing plate 50 on the one hand, and prevent the exhaust gas from corroding the end face of the connecting shaft 24 or the output end of the reducer 42 on the other hand.

[0103] In one embodiment of the present invention, the air inlet scraper 100 further includes a purge air inlet pipe 60, the sealing assembly 20 is provided with an air inlet hole communicating with the inside of the air inlet pipe 510, the purge air inlet pipe 60 is communicated with the air inlet hole, and the purge air inlet pipe 60 is used to transport gas into the air inlet pipe 510 through the air inlet hole. Preferably, the air inlet hole is provided on the sealing flange 21, specifically, the air inlet hole is provided at the edge of the sealing flange 21.

[0104] Since there is a small space between the scraper 30 and the sealing assembly 20, and there is a small gap between the scraper 30 and the inner wall of the air inlet pipe 510, the purge air inlet pipe 60 delivers gas to the air inlet pipe 510 through the air inlet hole, so that the space between the scraper 30 and the sealing assembly 20 is in a positive pressure state, preventing the exhaust gas in the air inlet pipe 510 from entering the space between the scraper 30 and the sealing assembly 20, and avoiding the exhaust gas from contacting the connecting shaft 24 or the reducer 42; the gas enters the gap between the scraper 30 and the inner wall of the air inlet pipe 510 through the space between the scraper 30 and the sealing assembly 20, protecting the scraper 30 from being corroded by the exhaust gas, and extending the service life of the scraper 30. The motor 41 and the reducer 42 are mostly made of carbon steel or aluminum, which are not corrosion-resistant. By setting the purge air inlet pipe 60 and delivering gas to the air inlet pipe 510 through the air inlet hole, the problem of damage caused by corrosion of the motor 41 is solved.

[0105] In another embodiment of the present invention, Fig. 20 As shown, in another embodiment, the scraper 30 is a rod-shaped structure, the scraper 30 extends along the axial direction of the air inlet pipe 510, the cross-section of the scraper 30 is semicircular, and the plane of the scraper 30 faces the inner wall of the air inlet pipe 510, that is, the plane of the scraper 30 faces outward and the circular surface faces inward, so as to reduce the contact area between the scraper 30 and the dust, thereby reducing the accumulation of dust on the scraper 30.

[0106] In one embodiment of the present invention, Fig.11 and Fig.12 As shown, the air intake connecting pipe 530 is provided with a negative pressure detection port 540 , and the negative pressure detection pipe scraper includes a guide component 210 , a flexible scraper 220 and a driving component 230 .

[0107] Among them, the guide component 210 is suitable for connecting to the negative pressure detection port 540; the flexible scraper 220 is inserted into the guide component 210; the driving component 230 is connected to the flexible scraper 220, and the driving component 230 is suitable for driving the flexible scraper 220 to move toward or away from the negative pressure detection port 540 along the extension direction of the guide component 210.

[0108] Specifically, the driving component 230 drives the flexible scraper 220 to move toward the negative pressure detection port 540 to move to the first position, at which time the flexible scraper 220 extends into the negative pressure detection port 540 and pushes away the blockage at the negative pressure detection port 540; the driving component 230 drives the flexible scraper 220 to move away from the negative pressure detection port 540 to move to the second position, at which time the flexible scraper 220 is away from the negative pressure detection port 540, so that the driving component 230 drives the flexible scraper 220 to switch between the first position and the second position. In the first position, the flexible scraper 220 extends into the negative pressure detection port 540 and pushes the blockage to move; in the second position, the flexible scraper 220 is away from the negative pressure detection port 540.

[0109] It should be noted that during the normal operation of the exhaust gas treatment equipment, the flexible scraper 220 is in the second position; when the blocked negative pressure detection port 540 needs to be cleaned, the flexible scraper 220 is switched from the second position to the first position, and in the process of the flexible scraper 220 moving from the second position to the first position, the blockage in the negative pressure detection port 540 is cleared.

[0110] It can be understood that the flexible scraper 220 is connected to the negative pressure detection port 540 of the air intake connecting pipe through the guide component 210, and passes through the guide component 210 and moves along the extension direction of the guide component 210 to realize reciprocating movement between the first position and the second position; in the first position, the flexible scraper 220 extends into the negative pressure detection port 540 and pushes the blockage to move, so that the blocked negative pressure detection port 540 can be cleaned during the normal operation of the equipment, avoiding shutdown for cleaning, thereby improving the processing efficiency; in the second position, the flexible scraper 220 is away from the negative pressure detection port 540 and does not affect the normal use of the equipment; thereby, the blocked negative pressure detection port 540 of the equipment is regularly cleaned by the negative pressure detection tube scraper to avoid blockage and extend the maintenance cycle.

[0111] The negative pressure detection tube scraper provided in the embodiment of the present invention is connected to the guide assembly 210 through the negative pressure detection port 540 of the air intake connecting pipe, the flexible scraper 220 is inserted into the guide assembly 210, and the flexible scraper 220 is driven by the driving assembly 230 to move close to or away from the negative pressure detection port 540. The flexible scraper 220 moves close to the negative pressure detection port 540 to push away the blockage at the negative pressure detection port 540, thereby cleaning the blocked negative pressure detection port 540 and avoiding shutdown caused by blockage, thereby improving the equipment utilization efficiency. In addition, by using the flexible scraper 220 to clean the negative pressure detection port 540, the installation direction and position of the driving assembly 230 can be adjusted, thereby reducing the installation space, and can be suitable for installation environments with limited space.

[0112] In one embodiment of the present invention, the guide assembly 210 includes a guide tube, and the flexible scraper 220 is inserted into the guide tube, and the guide tube provides a guide function for the movement of the flexible scraper 220 .

[0113] Optional, such as Fig.14 As shown, the guide tube includes a first guide tube 211 and a second guide tube 212 that are connected, the first guide tube 211 and the second guide tube 212 have a preset angle, the first guide tube 211 is connected to the negative pressure detection port 540, the flexible scraper 220 is passed through the first guide tube 211 and the second guide tube 212, one end of the flexible scraper 220 is close to the negative pressure detection port 540, and the other end of the flexible scraper 220 is connected to the drive assembly 230.

[0114] It should be noted that, due to the limited floor space of the waste gas treatment equipment, the installation space of the negative pressure detection tube scraper is limited, and the traditional scraper cannot be installed. The present invention realizes the bending design of the guide tube by providing an angle between the first guide tube 211 and the second guide tube 212 to reduce the installation space, which can be suitable for installation in the limited space of the waste gas treatment equipment.

[0115] Furthermore, the first guide tube 211 and the second guide tube 212 are connected by a bent tube 213, and the first guide tube 211 and the second guide tube 212 are connected with a smooth transition, so that the flexible scraper 220 is arranged in a smooth transition at the connection position between the first guide tube 211 and the second guide tube 212, thereby avoiding the flexible scraper 220 from getting stuck or damaged at the connection position between the first guide tube 211 and the second guide tube 212 due to the bending transition.

[0116] Optionally, the guide pipe can be a flexible pipe, and the guide pipe can be bent according to the installation space of the exhaust gas treatment device so that the guide pipe is composed of multiple sections. Optionally, the guide pipe includes the first guide pipe 211, the bent pipe 213 and the second guide pipe 212 after being bent.

[0117] It should be noted that when the guide tube is designed to be bent, the inside of the guide tube should be guaranteed to be free of deformation to ensure the stability of the flexible scraper 220 during movement.

[0118] In this embodiment, the guide assembly 210 includes a second guide tube 212, a bent tube 213 and a first guide tube 211 connected in sequence, and the first guide tube 211 and the second guide tube 212 are arranged vertically; of course, in other embodiments, the angle between the first guide tube 211 and the second guide tube 212 can be designed to be 0°~180° according to the actual installation space, preferably 45°~135°.

[0119] In an optional embodiment of the present invention, Fig.13 and Fig.15As shown, the flexible scraper 220 includes a detection port scraper segment 221, a flexible segment 222 and a connecting segment 223 which are connected in sequence. The detection port scraper segment 221 is located in the first guide tube 211, the connecting segment 223 is located in the second guide tube 212, and the flexible segment 222 is at least partially located in the curved tube 213.

[0120] It can be understood that the detection port scraper segment 221 is located in the first guide tube 211, and the connecting segment 223 is located in the second guide tube 212. The first guide tube 211 and the second guide tube 212 are both straight tubes, and the detection port scraper segment 221 and the connecting segment 223 are both straight segments; during the process of the drive component 230 driving the flexible scraper 220 to move, the detection port scraper segment 221 is always located in the first guide tube 211, and the connecting segment 223 is always located in the second guide tube 212, then the length of the flexible segment 222 is greater than the length of the curved tube 213. During the movement of the flexible scraper 220, the flexible segment 222 is at least partially located in the curved tube 213 to ensure the stability of the detection port scraper segment 221 along the axial movement of the first guide tube 211, thereby improving the cleaning effect.

[0121] Optionally, the cross-section of the flexible scraper 220 may be any shape such as rectangular, triangular, elliptical, etc., to adapt to negative pressure detection ports 540 of different shapes. The present application does not specifically limit the outer contour shape of the flexible scraper 220 .

[0122] In one embodiment of the present invention, Fig.12 and Fig.13 As shown, the negative pressure detection tube scraper also includes a first connecting sleeve 250, which has three connecting ports, namely a first connecting port, a second connecting port and a third connecting port. The first connecting port is connected to the negative pressure detection port 540, the second connecting port is connected to the first guide tube 211 of the guide assembly 210, and the third connecting port serves as a pressure detection port 251.

[0123] For example, the first connecting ferrule 250 adopts a three-way ferrule, the first connecting port and the second connecting port are arranged opposite to each other, respectively connecting the first guide tube 211 and the negative pressure detection port 540, and the middle connecting port of the three-way ferrule is used as the pressure detection port 251 for connecting the negative pressure detection component. It should be noted that the negative pressure detection port 540 and the guide assembly 210 are connected by the first connecting ferrule 250, which is convenient for maintenance and assembly.

[0124] In one embodiment of the present invention, Fig.13 and Fig.16 As shown, the negative pressure detection tube scraper also includes a second connecting sleeve 240 , a first end of the second connecting sleeve 240 is sleeved on the second guide tube 212 , and the driving assembly 230 is connected to the second end of the second connecting sleeve 240 .

[0125] For example, the upper end of the second connecting sleeve 240 is connected to the lower end of the second guide tube 212 , and the driving assembly 230 is fixed to the lower end of the second connecting sleeve 240 .

[0126] In this embodiment, the second connecting ferrule 240 adopts a straight-through ferrule, and the lower part of the second guide tube 212 is connected to the straight-through ferrule. According to the size of the second guide tube 212, the second connecting ferrule 240 can select a straight-through reducing ferrule. It should be noted that in this embodiment, the driving assembly 230 and the guide assembly 210 are assembled using the second connecting slot, which is convenient for maintenance and assembly.

[0127] Furthermore, the driving assembly 230 includes a driving cylinder 231 and a cylinder connecting sleeve 232, the driving cylinder 231 is connected to the lower end of the second connecting sleeve 240 through the cylinder connecting sleeve 232, the driving cylinder 231 and the cylinder connecting sleeve 232 are threadedly connected, and a sealing gasket is arranged between the driving cylinder 231 and the cylinder connecting sleeve 232, and the sealing gasket includes but is not limited to a Teflon sealing gasket.

[0128] It is understandable that if Fig.13 and Fig.16 As shown, the piston rod 2311 of the driving cylinder 231 is located inside the cylinder connecting sleeve 232, and the cylinder connecting sleeve 232 ensures that the piston rod 2311 can move freely. It should be noted here that the length of the cylinder connecting sleeve 232 changes adaptively with the driving stroke to ensure that the piston rod 2311 is free and does not interfere with the cylinder stroke).

[0129] In a preferred embodiment of the present invention, a scraper connecting rod 241 is provided in the second connecting sleeve 240, and the scraper connecting rod 241 connects the flexible scraper 220 and the output of the driving assembly 230; specifically, the scraper connecting rod 241 connects the connecting section 223 of the flexible scraper 220 and the piston rod 2311.

[0130] It is understandable that the scraper connecting rod 241 in the second connecting sleeve 240 is used to connect the flexible scraper 220 and the driving cylinder 231 on the one hand, and to provide a guide for the movement of the flexible scraper 220 on the other hand. It should be noted here that the piston rod 2311 needs space to move, so there will be a large space in the front when the cylinder is pulled back. The large space is not conducive to the movement of the flexible scraper 220 (the large space makes the flexible scraper 220 twisted without guidance), so the scraper connecting rod 241 provides a guide for the movement of the flexible scraper 220 in the large space.

[0131] In this embodiment, the driving cylinder 231 adopts a double driving cylinder, and the double driving cylinder adopts two specifications of air pipes to prevent the air pipes from being installed incorrectly during the installation process.

[0132] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-inlet scraper air inlet chamber for waste gas treatment equipment, characterized in that: include: An air inlet cavity device, wherein the air inlet cavity device has an air inlet cavity inside, an air outlet port is arranged at the bottom of the air inlet cavity device, the air outlet port is provided with a limiting ring extending radially inward, and a side wall of the air inlet cavity device is provided with a plurality of air inlet ports; The intracavity scraper device comprises a driving component, a support frame, a plurality of scrapers and a plurality of lower rollers, wherein the support frame is rotatably arranged in the air inlet cavity, the driving component is connected to the support frame, and the driving component is used to drive the support frame to rotate; the plurality of scrapers are arranged at intervals on the outer periphery of the support frame, and the scrapers are used to scrape off the dust on the side wall of the air inlet cavity when the support frame rotates; the plurality of lower rollers are arranged at intervals along the circumferential direction at the bottom of the support frame, and are in rolling cooperation with the limit ring; A plurality of air intake devices are connected to the plurality of air intake ports in a one-to-one correspondence, and the air intake devices are used to input air into the interior of the air intake cavity device.

2. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 1 is characterized in that: The scraper is parallel to the side wall of the air inlet cavity, and the distance between two adjacent scrapers is equal.

3. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 1 is characterized in that: The intracavitary scraper device also includes: A plurality of bottom scraping modules are arranged at intervals along the circumferential direction at the bottom of the support frame, and a plurality of lower rollers are respectively installed on the plurality of bottom scraping modules in a one-to-one correspondence through lower roller shafts, and the bottom scraping modules are used to push the dust falling on the limit ring toward the air outlet port.

4. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 1, characterized in that: The intracavitary scraper device also includes: A plurality of upper rollers are arranged at intervals along the circumferential direction on the upper part of the support frame, the upper rollers are arranged horizontally, the upper rollers are installed on the support frame through upper roller shafts, and the upper rollers are rollingly matched with the side walls of the air inlet cavity.

5. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to any one of claims 1 to 4, characterized in that: The driving component comprises: A driving assembly, the driving assembly being arranged on the top of the air inlet cavity device; A drive shaft, one end of which is connected to the drive assembly; A toothed disc, the toothed disc being arranged on the upper part of the support frame; A driving rod is arranged inside the air inlet cavity, the driving rod is connected to the other end of the driving shaft, and a plurality of positioning blocks are arranged at intervals on the edge of the bottom of the driving rod, and the positioning blocks are used to engage with the convex teeth of the gear disk.

6. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 5, characterized in that: The driving component also includes: A connecting rod, one end of which is connected to the driving rod, and the other end of which passes through the top of the air inlet chamber device and is connected to the other end of the driving shaft through a coupling; An oil seal, sleeved on the outer periphery of the connecting rod and located between the outer peripheral surface of the connecting rod and the top wall of the air intake chamber device; The sealing ring is sleeved on the outer periphery of the connecting rod and is located between the outer peripheral surface of the connecting rod and the top wall of the air intake chamber device.

7. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to any one of claims 1 to 4, characterized in that: The air inlet cavity device comprises: An air intake chamber shell, wherein the air intake chamber is formed inside the air intake chamber shell, a plurality of air intake ports are arranged on the side wall of the air intake chamber shell, the plurality of air intake ports are arranged at intervals along the circumferential direction, and two adjacent air intake ports are staggered in the up-down direction, an interlayer cavity is arranged inside the side wall of the air intake chamber shell and inside the top wall of the air intake chamber shell, a first interface communicating with the interlayer cavity is arranged on the lower part of the outer side wall of the air intake chamber shell, a second interface communicating with the interlayer cavity is arranged on the outer side of the top wall of the air intake chamber shell, and the limiting ring is located at the bottom of the air intake chamber shell.

8. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 7 is characterized in that: A heat source installation opening communicating with the air inlet cavity is arranged on the top of the air inlet cavity shell, and the heat source installation opening is used for installing an ion torch or a natural gas burner.

9. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 7, characterized in that: Also includes: The overflow flange includes a flange body and a flange cover, wherein the flange body and the flange cover are both arranged at the bottom of the limiting ring, the flange body is located at the outer periphery of the flange cover, and a first convex ring extending radially inward is arranged on the inner side of the flange body, the first convex ring is located below the flange cover, a guide groove is formed on the upper surface of the first convex ring, and a liquid inlet connected to the guide groove is arranged on the outer side of the flange body; a second convex ring is formed on the side of the lower surface of the flange cover away from the flange body, the second convex ring is located on the side of the first convex ring away from the flange body, the second convex ring cooperates with the side of the first convex ring away from the flange body to form an annular flow channel connected to the guide groove, and the liquid outlet of the annular flow channel faces downward.

10. The multi-inlet scraper air inlet chamber for waste gas treatment equipment according to claim 9, characterized in that: A side of the second convex ring facing the first convex ring is an arc surface.

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