Spectral confocal detection device with high signal-to-noise ratio and height measurement method

Abstract

The invention discloses a spectrum confocal detection device with a high signal-to-noise ratio, which comprises a light source, and a first lens group, a transmission area of a light splitting component and a second lens group which are sequentially and coaxially arranged and are jointly used for guiding incident light emitted by the light source to the surface of a detected object after dispersion and focusing, and enabling light with a target wavelength to form a focusing light spot, the light of the non-target wavelength forms a dispersion light spot at a position different from the focusing light spot; and the second lens group, the reflection area of the light splitting component, the third lens group, the first spatial filtering structure and the spectrum acquisition unit are sequentially arranged according to the reflection light path and are used for receiving the reflection light reflected by the measured object, and the reflection light enters the spectrum acquisition unit after being reflected, focused and filtered so as to acquire spectrum information. The advantages of a triangular structure and a coaxial structure are combined, and the problem that an existing spectrum confocal detection system is affected by background light, so that the signal-to-noise ratio of an obtained spectrum is low can be solved.

Description

Technical Field

[0001] The invention relates to the technical field of machine vision, and in particular to a spectral confocal detection device with a high signal-to-noise ratio and a height measurement method. Background Art

[0002] The 3D detection technology based on spectral confocal is a commonly used technical means in the field of optical detection of 3D microstructures such as wafers, LED panels, and PCBs. It has the advantages of high detection accuracy and fast detection speed. The principle of the 3D microstructure detection system based on spectral confocal is to use the combination of gratings and lenses or directly use dispersion lenses to produce chromatic aberration, focus light beams of different wavelengths at different heights, form a connection between wavelength and spatial height, and then use imaging spectrometer to perform 3D detection of sample structures.

[0003] The existing spectral confocal detection system is mainly divided into two structures according to the optical path layout, namely the triangular structure and the coaxial structure. The advantage of the triangular structure is that the spectrum line reflecting the surface structure of the sample is of high purity and the background light is low, so the signal-to-noise ratio (SNR) of the system is high; this is mainly due to the triangular structure, which can make the signal light spot and the background light spot have better separation in space (such as Figure 1 As shown in , assuming that a certain area on the sample surface is in the focal plane with a wavelength of λ2, the light beam with a wavelength of λ2 for this area is called signal light, and light beams with other wavelengths, such as λ1 and λ3, are called background light). This also leads to the large size of the triangular structure, poor convenience of use and user experience. The coaxial structure has the advantages of a simpler and more compact structure, but in this system, the signal light and the background light are completely overlapped, so the purity of the spectrum obtained by the system is low, the background light is strong, and the signal-to-noise ratio (SNR) of the spectrum line is low. Summary of the invention

[0004] In order to overcome the defects of the above-mentioned prior art, an embodiment of the present invention provides a spectral confocal detection device with a high signal-to-noise ratio and a height measurement method, which combines the advantages of a triangular structure and a coaxial structure, and can solve the problem that the existing spectral confocal detection system is affected by background light, resulting in a low spectral signal-to-noise ratio.

[0005] Specifically, the present invention provides a spectral confocal detection device with a high signal-to-noise ratio, which includes: a light emitting part and a light receiving part; the light emitting part includes a light source and a first lens group coaxially arranged in sequence, a splitter component and a second lens group obliquely arranged, the splitter component includes a transmission area and a reflection area; the first lens group, the transmission area of ​​the splitter component, and the second lens group are used together to guide the incident light emitted by the light source to the surface of the object to be measured after dispersion and focusing, and make the light of the target wavelength form a focused light spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse light spot on the surface of the object to be measured, and the position of the diffuse light spot is different from the position of the focused light spot ; The light receiving part includes the second lens group, the reflection area of ​​the spectroscopic component, the third lens group, the first spatial filtering structure and the spectrum acquisition unit in sequence according to the reflected light path; the light receiving part is used to receive the reflected light reflected by the object to be measured, and the reflected light is transmitted by the second lens group, reflected by the reflection area of ​​the spectroscopic component, focused by the third lens group, filtered by the first spatial filtering structure, and then enters the spectrum acquisition unit, and the light acquisition unit is used to acquire spectral information; a second spatial filtering structure is arranged between the light source and the first lens group, which is used to modulate the incident light into a point light source or a line light source, so as to perform point-by-point scanning detection or line scanning detection on the object to be measured.

[0006] In one embodiment of the present invention, the first spatial filtering structure is a slit, which is used to filter out light of non-target wavelengths in the reflected light to obtain a spectral image of the focused light spot.

[0007] In one embodiment of the present invention, the light splitting component includes a transmission area and a reflection area, the transmission area is located on a first side of the system optical axis, a portion of the reflection area is located on a second side opposite to the first side, and the other portion is located on the first side and adjacent to the transmission area.

[0008] In one embodiment of the present invention, the light splitting component includes a reflective region across the system optical axis and two transmissive regions respectively disposed on both sides of the reflective region.

[0009] In one embodiment of the present invention, the light splitting component includes a plurality of transmission areas and reflection areas that are spaced apart from each other, wherein at least one of the reflection areas crosses the system optical axis.

[0010] In one embodiment of the present invention, the first lens group is used to collimate the incident light, and the second lens group is used to focus and disperse the incident light.

[0011] In one embodiment of the present invention, the first lens group is used to collimate and disperse the incident light, and the second lens group is used to focus the incident light.

[0012] In addition, the present invention also provides a height measurement method, which is applicable to the spectral confocal detection device with a high signal-to-noise ratio described in any one of the above embodiments, comprising: the light source of the light emitting part emits incident light; part of the incident light passes through the first lens group, the transmission area of ​​the spectroscopic component and the second lens group and then irradiates the surface of the object to be measured, so that the light of the target wavelength forms a focused spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse spot on the surface of the object to be measured, and the position of the diffuse spot is different from the position of the focused spot; the reflected light reflected by the object to be measured is transmitted by the second lens group, reflected by the reflection area of ​​the spectroscopic component, and focused by the third lens group before reaching the spectrum acquisition unit; the target wavelength of the light focused on the surface of the object to be measured is determined according to the spectrum obtained by the spectrum acquisition unit, and the height of the surface of the object to be measured is determined according to the target wavelength.

[0013] Furthermore, the present invention also provides an electronic device, comprising: a memory and one or more processors connected to the memory, the memory storing a computer program, and the processor being used to execute the computer program to implement a high signal-to-noise ratio height measurement method as described in any one of the above embodiments.

[0014] Furthermore, the present invention also provides a computer-readable storage medium, wherein the computer-readable storage medium stores computer-executable instructions, and the computer-executable instructions are used to execute the height measurement method described in the above embodiment.

[0015] It can be seen from the above that the above embodiments of the present invention can have the following beneficial effects:

[0016] The high signal-to-noise ratio spectral confocal detection device and height measurement method proposed in the embodiments of the present invention, by setting the spectroscope as a partial transmission area and a partial reflection area, so that the light of the target wavelength in the incident light forms a focused spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse spot at a position different from the focused spot on the surface of the object to be measured. While retaining the advantages of the simple and compact structure of the traditional coaxial detection system, the signal light spot and the background light spot can be spatially separated, thereby effectively improving the purity and signal-to-noise ratio of the detection spectrum. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0018] Figure 1 A schematic structural diagram of a spectral confocal detection system with a high signal-to-noise ratio provided by an embodiment of the present invention;

[0019] Figure 2 for Figure 1 A magnified view of the light path where it is focused;

[0020] Figure 3 A schematic structural diagram of another spectral confocal detection system with a high signal-to-noise ratio provided by an embodiment of the present invention;

[0021] Figure 4 for Figure 3 A magnified view of the light path where it is focused;

[0022] Figure 5 It is a structural schematic diagram of a triangular spectral confocal detection system in the prior art;

[0023] Figure 6 The figure is a schematic diagram of the structure of a coaxial spectral confocal detection system in the prior art. DETAILED DESCRIPTION

[0024] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described below with reference to the accompanying drawings and in combination with the embodiments.

[0025] In order to enable ordinary technicians in the field to better understand the technical solution of the present invention, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments, and all should belong to the protection scope of the present invention.

[0026] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are applicable to distinguishing similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition. The terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or are proprietary to these processes, methods, products or devices.

[0027] It should also be noted that the division of multiple embodiments in the present invention is only for the convenience of description and should not constitute a special limitation. The features in various embodiments can be combined and referenced to each other without contradiction.

[0028] like Figure 1As shown, the first embodiment of the present invention provides a spectral confocal detection device with a high signal-to-noise ratio, for example, comprising: a light emitting unit and a light receiving unit. The light emitting unit comprises a light source 1 and a first lens group 3 coaxially arranged along the incident light emitted by the light source 1, a light splitting component 4 and a second lens group 5 arranged obliquely.

[0029] Specifically, the light-splitting component 4 is, for example, a spectroscope, which includes a transmission area 13 and a reflection area 14. Part of the incident light emitted by the light source 1 passes through the first lens group 3, the transmission area 13 of the spectroscope, and the second lens group 5 in sequence, and then is dispersed and converged to the surface of the object to be measured 6. The second lens group 5 allows light beams of different wavelengths in the incident light to be focused to different heights. Among them, the first lens group 3 is used to guide the light to the light-splitting component 4. After the light passing through the transmission area of ​​the light-splitting component 4 passes through the second lens group 5, due to the dispersion and focusing functions of the first lens group 3 and / or the second lens group 5 themselves, the light of different wavelengths is focused on different heights of the system optical axis. It can be understood that the system optical axis refers to a straight line formed by the midline points of the first lens group 3 and the second lens group 5.

[0030] When there is an object to be measured, light of a certain wavelength will be focused on the surface of the object to be measured, forming a focused light spot, while light of other wavelengths will form diffuse light spots on the surface. The wavelength corresponding to the light focused on the surface of the object is called the target wavelength, and the wavelength corresponding to the light not focused on the surface of the object is called the non-target wavelength. As the height of the surface of the object changes, light of different wavelengths will be focused on the surface of the object. Figure 2 As shown in , the light beam with a wavelength of λ2 forms a focused light spot 11 on the surface of the measured object 6, the light beam with a wavelength of λ1 forms a diffuse light spot 10 on the surface of the measured object 6, and the light beam with a wavelength of λ3 (usually λ1<λ2<λ3) forms a diffuse light spot 12 on the surface of the measured object 6. Moreover, the position of the focused light spot 11 is different from the positions of the diffuse light spots 10 and 12. The above-mentioned light beams of different wavelengths are collected by the light receiving unit after being reflected by the measured object 6. The light receiving unit includes the second lens group 5, the reflection area 14 of the light splitting component 4, the third lens group 7, the first spatial filtering structure 8 and the spectrum acquisition unit 9 in sequence according to the reflection light path. Specifically, the reflected light is transmitted through the second lens group 5, reflected by the reflection area 14 of the light splitting component 4, focused by the third lens group 7, and filtered by the first spatial filtering structure 8, and finally imaged to the spectrum acquisition unit 9 to record and form a spectrum line, that is, to obtain spectral information. The spectrum acquisition unit 9 can be a spectrometer.

[0031] A second spatial filter structure 2 is also provided between the light source 1 and the first lens group 3. The second spatial filter structure 2 is, for example, a linear structure, which is used to modulate the incident light into a linear beam to form a linear focal spot on the surface of the object to be measured 6 for line scanning detection. The second spatial filter structure 2 can also be a pinhole structure, which is used to modulate the incident light into a point light source for line scanning detection.

[0032] In one embodiment, the first spatial filtering structure 8 is a slit structure, which is used to filter out light of non-target wavelengths in the reflected light to obtain a spectral image of the focused light spot. Of course, in other embodiments of the present invention, the first spatial filtering structure 8 can also be an optical filter that implements spatial filtering through principles such as dispersion, diffraction, and interference, and the present invention is not limited to this. The first spatial filtering structure and the spectrum acquisition unit 9 can be a whole that together constitutes a spectrometer, or they can be two separate devices. The first spatial filtering structure and the spectrum acquisition unit 9 are used together to perform spatial filtering and obtain spectral information after filtering.

[0033] exist Figure 2 It can be seen from the enlarged view shown that under the influence of the oblique incidence of the light beam, on the surface of the object 6 to be measured, the diffuse light spot 10 with a wavelength of λ1 and the diffuse light spot 12 with a wavelength of λ3 are respectively located on the right and left of the focused light spot 11 with a wavelength of λ2, and as the difference from λ2 to λ1 and the difference from λ3 to λ2 increase, the diffuse light spot 10 and the diffuse light spot 12 will move away from the focused light spot 11. From the imaging relationship, it can be seen that as the difference from λ2 to λ1 and the difference from λ3 to λ2 increase, the intensity of the light with wavelengths of λ1 and λ3 entering the imaging spectrum acquisition unit 9 will be significantly reduced, while the intensity of the light with a wavelength of λ2 will not change. In this way, the device has higher spectral purity and signal-to-noise ratio (SNR) than the existing coaxial spectral confocal detection system.

[0034] In one embodiment, if Figure 1 As shown in the figure, the spectroscopic component 4, for example, includes a transmission area 13 and a reflection area 14, the transmission area 13 is located on a first side of the system optical axis, a part of the reflection area 14 is located on a second side opposite to the first side, and the other part is located on the first side and adjacent to the transmission area 13, that is, the reflection area crosses the system optical axis, thereby realizing triangular incidence and reflection on the coaxial structure, so that the signal light spot and the background light spot are separated in space, thereby achieving the effect of improving the purity of the detection spectrum line and the signal-to-noise ratio (SNR).

[0035] In one embodiment, if Figure 3 As shown, another structure of the light splitting component 4 is provided. The light splitting component 4 includes a reflection area 14 across the system optical axis and two transmission areas 13 respectively arranged on both sides of the reflection area 14. The detection principle is as follows:

[0036] The light source 1 and the second spatial filtering structure 2 together constitute a line light source, which emits a part of the light beam which passes through the first lens group 3, the transmission area 13 and the transmission area 15 of the light splitting component 4, and the second lens group 5 in sequence, and then generates dispersion and convergence, and light beams of different wavelengths are focused to different heights; wherein the light beam with a wavelength of λ2 forms a linear focal spot 11 on the surface of the object to be measured 6, and the light beams with wavelengths of λ1 and λ3 (usually λ1<λ2<λ3) form diffuse light spots 10 and diffuse light spots 12 on the surface of the sample 6. The light reflected by the object to be measured 6 is collected by the second lens group 5, and reflected by the reflection area 14 of the light splitting component 4, and finally imaged by the third lens group 7 to the first spatial filtering structure 8, and after spatial filtering, it is recorded by the imaging spectrum acquisition unit 9 to form a spectrum line.

[0037] exist Figure 4 As can be seen from the enlarged view shown, the light is incident obliquely from two directions to the surface of the object 6 to be measured. The diffuse light spots 10 and 12 formed by the light beams with wavelengths λ1 and λ3 are distributed on both sides of the linear focal spot 11 with a wavelength of λ2. As the difference between λ2 and λ1 and the difference between λ3 and λ2 increase, the diffuse light spots 10 and 12 will move away from the linear focal spot 11. From the imaging relationship, it can be seen that as the difference between λ2 and λ1 and the difference between λ3 and λ2 increase, the intensity of the light with wavelengths λ1 and λ3 entering the imaging spectrum acquisition unit 9 through the slit 8 will be significantly reduced, while the intensity of the light with a wavelength of λ2 will not change. Therefore, compared with the existing coaxial spectral confocal system, the device can also improve the spectral purity and signal-to-noise ratio (SNR).

[0038] But it should be noted that Figure 1 The embodiment shown is suitable for detecting objects with specular reflection and / or diffuse reflection. Figure 3 The embodiment shown should be applied to the detection of samples with diffuse reflection, so that the reflected light can be reflected by the reflection area 14 of the light splitting component 4 to obtain spectral information. If the mirror reflective surface has foreign matter such as dust or scratches, it can also be used Figure 3 The embodiment shown is used for detection because foreign matter such as dust or defects such as scratches can also cause diffuse reflection.

[0039] In addition, in one embodiment, another structure of the light splitting component 4 is provided, and the light splitting component 4 includes a plurality of transmission regions 13 and reflection regions 14 arranged at intervals from each other, wherein at least one reflection region 14 crosses the system optical axis. This embodiment needs to be applied to the detection of samples with diffuse reflection, and can also improve the spectral purity and signal-to-noise ratio (SNR), that is, the present invention does not limit the number of transmission regions and reflection regions, as long as the reflection region is set across the system optical axis, the above-mentioned beneficial effects can be achieved.

[0040] Furthermore, the light splitting component 4 including a plurality of transmission areas 13 and reflection areas 14 spaced apart from each other can be specifically arranged according to different reflection types (specular reflection / diffuse reflection) on the object to be measured 6 to achieve a better detection effect.

[0041] The following further explains the technical solutions and beneficial effects of the embodiments of the present invention in combination with the solutions in the prior art:

[0042] like Figure 5 As shown in FIG. 1 , the system layout and working principle of the traditional triangular structure are as follows: the light source and the slit together constitute a linear light source, and the light beam emitted by the light source is collimated by the lens group 1 and then split by the dispersion element, and then the light beams of different wavelengths are focused to the sample surface by the lens group 2; the light beam with a wavelength of λ2 forms a linear focal spot on the sample surface, and the light beams with wavelengths of λ1 and λ3 (usually λ1<λ2<λ3) form diffuse light spots on the sample surface. After the light beams of these wavelengths are reflected by the sample surface, they are collected and collimated by the lens group 3, and imaged on the slit surface after passing through the dispersion element and the lens group 4; the light beam with a wavelength of λ2 is still imaged as a focused linear light spot on the slit surface, and the light beams with wavelengths of λ1 and λ3 are still imaged as diffuse light spots on the slit surface. In this way, these light beams are recorded by the spectrum acquisition unit after passing through the slit, and a spectrum with a wavelength of λ2 as the main peak can be obtained. The system establishes a connection between the relative height of the sample surface and the spectrum, and can obtain three-dimensional information of the sample through the collected spectrum.

[0043] The advantage of the triangular structure is that the spectrum reflecting the surface structure of the sample is of high purity and the background light is low, so the signal-to-noise ratio (SNR) of the system is high. This is mainly due to the triangular structure, which can make the signal light spot and the background light spot have better separation in space (such as Figure 5 As shown in , assuming that a certain area on the sample surface is in the focal plane with a wavelength of λ2, the light beam with a wavelength of λ2 for this area is called signal light, and light beams with other wavelengths, such as λ1 and λ3, are called background light). This also leads to a larger volume of the triangular structure, poor convenience of use and user experience.

[0044] In addition, if Figure 6As shown in , the system layout and working principle of the coaxial structure are as follows: the light source and the slit together constitute a linear light source. After the light beam emitted by the light source passes through the lens group 1, the beam splitter and the lens group 2, the light beam will be dispersed and focused along the axial direction; the light beam with a wavelength of λ2 forms a linear focal spot on the sample surface, while the light beams with wavelengths of λ1 and λ3 (usually λ1<λ2<λ3) form diffuse light spots on the sample surface. After these light beams are reflected by the sample surface, they are collected by the lens group 2, and after being reflected by the beam splitter, they are imaged on the slit surface by the lens group 1; the light beam with a wavelength of λ2 is still imaged as a focused linear light spot on the slit surface, while the light beams with wavelengths of λ1 and λ3 are still imaged as diffuse light spots on the slit surface. In this way, these light beams are recorded by the spectrum acquisition unit after passing through the slit, and a spectrum with a wavelength of λ2 as the main peak can also be obtained. Similarly, the system also establishes a connection between the relative height of the sample surface and the spectrum, and the three-dimensional information of the sample can be obtained through the collected spectrum.

[0045] The coaxial structure has the advantage of being simple and compact, but in this system, the signal light and the background light are completely overlapped, so the purity of the spectrum obtained by the system is low, the background light is strong, and thus the signal-to-noise ratio (SNR) of the spectrum line is low.

[0046] A spectral confocal detection device with a high signal-to-noise ratio proposed in an embodiment of the present invention sets a spectroscope as a partial transmission area and a partial reflection area so that the light of the target wavelength in the incident light forms a focused light spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse light spot at a position different from the focused light spot on the surface of the object to be measured. While retaining the advantages of the simple and compact structure of the traditional coaxial detection system, the light spot of the signal light and the light spot of the background light can be spatially separated, thereby effectively improving the purity and signal-to-noise ratio of the detection spectrum, and having high applicability in the field of spectral confocal detection.

[0047] In addition, the second embodiment of the present invention proposes a height measurement method, for example, including steps S1 to S4. In step S1, the light source of the light emitting unit emits incident light; in step S2, part of the incident light passes through the first lens group, the transmission area of ​​the spectroscopic component and the second lens group and then irradiates the surface of the object to be measured, so that the light of the target wavelength forms a focused light spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse light spot on the surface of the object to be measured, and the position of the diffuse light spot is different from the position of the focused light spot; in step S3, the reflected light reflected by the object to be measured passes through the second lens group, is reflected by the reflection area of ​​the spectroscopic component, and is focused by the third lens group before reaching the spectrum acquisition unit; in step S4, the target wavelength of the light focused on the surface of the object to be measured is determined according to the spectrum obtained by the spectrum acquisition unit, and the height of the surface of the object to be measured is determined according to the target wavelength.

[0048] It is worth mentioning that the height measurement method proposed in the second embodiment of the present invention is applicable to the spectral confocal detection device with high signal-to-noise ratio proposed in the aforementioned first embodiment. The specific structure and function of the spectral confocal detection device with high signal-to-noise ratio can refer to the contents described in the first embodiment and will not be described in detail here. The height measurement method provided in this embodiment has the same beneficial effect as the spectral confocal detection device with high signal-to-noise ratio provided in the first embodiment.

[0049] The third embodiment of the present invention further proposes an electronic device, for example, comprising: at least one processing unit, and at least one storage unit, wherein the storage unit stores a computer program, and when the computer program is executed by the processing unit, the processing unit executes the method described in the first embodiment, and the electronic device provided by this embodiment has the same beneficial effect as the height measurement method provided by the second embodiment.

[0050] The fourth embodiment of the present invention also provides a computer-readable storage medium having computer executable instructions stored thereon. When the executable instructions are executed by a processor, the steps of the above method are implemented. The computer-readable storage medium provided in this embodiment has the same beneficial effects as the height measurement method provided in the second embodiment.

[0051] Among them, computer-readable storage media may include, but are not limited to, any type of disk, including floppy disks, optical disks, DVDs, CD-ROMs, microdrives and magneto-optical disks, ROMs, RAMs, EPROMs, EEPROMs, DRAMs, VRAMs, flash memory devices, magnetic or optical cards, nanosystems (including molecular memory ICs), or any type of medium or device suitable for storing instructions and / or data.

[0052] It should be noted that, for the above-mentioned method embodiments, for the sake of simplicity, they are all described as a series of action combinations, but those skilled in the art should know that the present invention is not limited by the described action sequence, because according to the present invention, certain steps can be performed in other sequences or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the present invention.

[0053] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0054] In the several embodiments provided by the present invention, it should be understood that the disclosed devices can be implemented in other ways. For example, the device embodiments described above are only schematic, such as the division of the units, which is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some service interfaces, and the indirect coupling or communication connection of devices or units can be electrical or other forms.

[0055] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0056] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0057] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable memory. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, which is stored in a memory and includes several instructions for a computer device (which can be a personal computer, a server or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned memory includes: U disk, read-only memory (ROM), random access memory (RAM), mobile hard disk, magnetic disk or optical disk, etc., various media that can store program codes.

[0058] A person skilled in the art may understand that all or part of the steps in the various methods of the above embodiments may be completed by entering a program to instruct the relevant hardware. The program may be stored in a computer-readable memory, and the memory may include: a flash drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, etc.

[0059] The above is only an exemplary embodiment of the present disclosure, and the scope of the present disclosure cannot be limited thereto. That is, any equivalent changes and modifications made according to the teachings of the present disclosure are still within the scope of the present disclosure. After considering the specification and practicing the disclosure here, those skilled in the art will easily think of the implementation scheme of the present disclosure. The present invention is intended to cover any variation, use or adaptive change of the present disclosure, which follows the general principles of the present disclosure and includes common knowledge or customary technical means in the technical field not recorded in the present disclosure. The description and examples are regarded as exemplary only, and the scope and spirit of the present disclosure are defined by the claims.

[0060] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0061] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A spectral confocal detection device with high signal-to-noise ratio, characterized in that: include: A light emitting unit and a light receiving unit; The light emitting unit comprises a light source and a first lens group coaxially arranged in sequence, a beam splitter component obliquely arranged, and a second lens group, wherein the beam splitter component comprises a transmission area and a reflection area; the first lens group, the transmission area of ​​the beam splitter component, and the second lens group are used together to guide the incident light emitted by the light source to the surface of the object to be measured after dispersion and focusing, and make the light of the target wavelength form a focused light spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse light spot on the surface of the object to be measured, and the position of the diffuse light spot is different from the position of the focused light spot; The light receiving unit includes the second lens group, the reflection area of ​​the light splitting component, the third lens group, the first spatial filtering structure and the spectrum acquisition unit in sequence according to the reflection light path; the light receiving unit is used to receive the reflected light reflected by the measured object, and the reflected light is transmitted by the second lens group, reflected by the reflection area of ​​the light splitting component, focused by the third lens group, filtered by the first spatial filtering structure, and then enters the spectrum acquisition unit, and the spectrum acquisition unit is used to acquire spectrum information; A second spatial filtering structure is provided between the light source and the first lens group, and is used to modulate the incident light into a point light source or a line light source, so as to perform point-by-point scanning detection or line scanning detection on the object to be detected.

2. The spectral confocal detection device with high signal-to-noise ratio according to claim 1, characterized in that: The first spatial filtering structure is a slit, which is used to filter out light of non-target wavelengths in the reflected light to obtain a spectral image of the focused light spot.

3. The spectral confocal detection device with high signal-to-noise ratio according to claim 1, characterized in that: The light splitting component includes a transmission area and a reflection area. The transmission area is located on a first side of the system optical axis. A portion of the reflection area is located on a second side opposite to the first side, and another portion is located on the first side and adjacent to the transmission area.

4. The spectral confocal detection device with high signal-to-noise ratio according to claim 1, characterized in that: The light splitting component comprises a reflection area across the system optical axis and two transmission areas respectively arranged on both sides of the reflection area.

5. The spectral confocal detection system with high signal-to-noise ratio according to claim 1, characterized in that: The light splitting component comprises a plurality of transmission areas and reflection areas which are spaced apart from each other, wherein at least one of the reflection areas crosses the system optical axis.

6. The spectral confocal detection device with high signal-to-noise ratio according to claim 1, characterized in that: The first lens group is used to collimate the incident light, and the second lens group is used to disperse and focus the incident light.

7. The spectral confocal detection device with high signal-to-noise ratio according to claim 1, characterized in that: The first lens group is used to collimate and disperse the incident light, and the second lens group is used to disperse and focus the incident light.

8. A method for measuring height, characterized in that: A spectral confocal detection device with a high signal-to-noise ratio applicable to any one of claims 1 to 7, comprising: The light source of the light emitting unit emits incident light; A part of the incident light passes through the first lens group, the transmission area of ​​the light splitting component and the second lens group and then irradiates the surface of the object to be measured, so that the light of the target wavelength forms a focused light spot on the surface of the object to be measured, and the light of the non-target wavelength forms a diffuse light spot on the surface of the object to be measured, and the position of the diffuse light spot is different from the position of the focused light spot; The reflected light reflected by the measured object is transmitted by the second lens group, reflected by the reflection area of ​​the light splitting component, and focused by the third lens group before reaching the spectrum acquisition unit; The target wavelength of the light focused on the surface of the measured object is determined according to the spectrum obtained by the spectrum acquisition unit, and the height of the surface of the measured object is determined according to the target wavelength.

9. An electronic device, characterized in that: include: A memory and one or more processors connected to the memory, wherein the memory stores a computer program, and the processor is configured to execute the computer program to implement the method according to claim 8.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer-executable instructions for executing the method of claim 8.

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